CN203266380U - Anti-collision suspension polishing device - Google Patents

Abstract

An anti-collision suspension polishing device, including a machine base, a suspension base plate, a grinding disc and a correction ring, the suspension base plate is connected to a pressurized assembly, the suspension base plate is clamped in the correction ring, and the correction ring is installed On the grinding disc, the grinding disc rotates around a fixed central axis through the main drive, and the surface opposite to the grinding disc is provided with a wedge-shaped groove along the circumferential direction and a processing station for placing the workpiece to be processed. The groove is filled with polishing liquid, and the wedge-shaped groove and the processing station are arranged at intervals; the polishing device also includes a first permanent magnet ring and a second permanent magnet ring, and the first permanent magnet ring is set on the outer surface of the suspension base plate, The second permanent magnet ring is set on the inner surface of the correction ring, there is a gap between the first permanent magnet ring and the second permanent magnet ring, and the outer ring of the first permanent magnet ring and the inner ring of the second permanent magnet ring have the same magnetism . The utility model has stable grinding, small surface damage and high quality.

Description

Anti-collision suspension polishing device

technical field

The utility model relates to the field of polishing, in particular to a suspension polishing device.

Background technique

The substrate is an indispensable material in the preparation process of the amorphous film, and the properties of the substrate will seriously affect the surface morphology of the amorphous film. In order to obtain a thin, defect-free and good adhesion alloy film, the substrate is required to have less Damaged ultra-smooth surface. Avoid the impact of mechanical damage, pollution, oxidation, excessive corrosion and other factors on the surface, so the traditional chemical mechanical polishing technology is not completely suitable for ultra-precision polishing of amorphous thin film substrates.

Fluid polishing has now become one of the important means to obtain ultra-smooth surfaces. Compared with rigid contact polishing, the contact state between abrasive grains and workpiece surface is soft contact, which can be obtained by improving the contour of abrasive grain processing. The ultra-smooth surface with roughness can also improve the contact state between the abrasive grains and the workpiece surface to obtain less damage-free processing effect. According to the technical requirements for the preparation of amorphous thin film substrates, suspension polishing has obvious advantages over current common fluid polishing. For example, the patent application number 201210140631.4 "Actively Driven Suspension Base Polishing Device" discloses an actively driven suspension base plate polishing device that can reduce the thickness of the processed metamorphic layer and obtain higher surface quality at the same time. , the device is based on the patent application No. 200910153716.4 "Correction Ring Drive Mechanism for Actively Driven Grinding Device", adopts the design of a wedge-shaped groove on the circumference of the suspension base plate, and uses the hydrodynamic phenomenon and powder action to make the polishing particles Soft contact with the workpiece surface. However, tests have shown that the device has the following problems:

The device drives the correction ring through the active drive device, the suspension base plate is stuck in the correction ring, and the suspension base plate is pressurized by weights. Since there is only friction constraint between the suspension base plate and the correction ring, the suspension base plate rotating at high speed If the rotation is not stable, it will cause collision, jamming, tilting, etc., which will affect the surface quality of polishing. , The liquid dynamic pressure generated by the wedge-shaped groove of the suspension base plate is small, the workpiece is easily pressed on the grinding disc, and the particles in the polishing liquid will cause a damage layer to the workpiece, which greatly affects the internal properties of the processed material.

Contents of the invention

In order to overcome the disadvantages of unstable grinding and low surface quality in the prior art, the utility model provides an anti-collision suspension polishing device with stable grinding, small surface damage and high quality.

The technical scheme that the utility model solves its technical problem adopts is:

An anti-collision suspension polishing device, including a machine base, a suspension base plate, a grinding disc and a correction ring, the suspension base plate is connected with a pressurized assembly, the suspension base plate is clamped in the correction ring, and the correction ring is installed On the grinding disc, the grinding disc rotates around a fixed central axis through the main drive, and the surface opposite to the grinding disc is provided with a wedge-shaped groove along the circumferential direction and a processing station for placing the workpiece to be processed. The groove is filled with polishing liquid, and the wedge-shaped groove and the processing station are arranged at intervals; the polishing device also includes a first permanent magnet ring and a second permanent magnet ring, and the first permanent magnet ring is set on the outer surface of the suspension base plate, The second permanent magnet ring is set on the inner surface of the correction ring, there is a gap between the first permanent magnet ring and the second permanent magnet ring, and the outer ring of the first permanent magnet ring and the inner ring of the second permanent magnet ring have the same magnetism .

Further, the pressurization assembly is an electromagnetic pressurization assembly, the electromagnetic pressurization assembly includes an electromagnet and a pressure sensor, the electromagnet is fixed on the machine base and is concentric with the suspension base, and the distance between the electromagnet and the machine base is A pressure sensor is installed between them, and the suspension base plate is a ferromagnet.

The technical concept of the utility model is: a plurality of wedge-shaped grooves are arranged on the opposite surface of the suspension base plate and the grinding plate along the circumferential direction, and the space between the suspension base plate and the grinding plate is filled with polishing liquid, that is, the wedge-shaped grooves are filled with polishing liquid, and the workpiece is processed Attached to the plane with the wedge-shaped groove of the suspension base plate without affecting the wedge-shaped groove. In the initial state, the suspension base plate is attracted by the electromagnet, and the grinding disc rotates with the spindle. The electromagnet controls the suspension base plate to slowly contact with the polishing liquid, and the suspension There is relative motion between the base disc and the grinding disc, and the hydrodynamic pressure generated by the wedge-shaped groove makes the base disc float to a height H, so that the particles in the polishing liquid do not have strong rigid contact when polishing the workpiece but become soft particles of polishing particles. Sexual collision, thereby reducing the damage to the workpiece.

The suspending base plate is a ferromagnet, and the ferromagnet refers to a substance that generates the same strong additional magnetic field as the external magnetic field under the action of a magnetic field, and the ferromagnet includes iron, cobalt, nickel and the like. The electromagnet with a coil can change the magnitude and direction of the magnetic force by changing the magnitude of the incoming current, and control the suspension substrate to be slowly placed on the grinding disc with the polishing liquid, and a force sensor is installed between the electromagnet and the machine base , can accurately measure the magnitude of the force between the electromagnet and the suspension base plate, and adopt computer closed-loop control to obtain accurate pressure, which solves the problem of uncontrollable weight loading, which causes the workpiece and grinding when the liquid dynamic pressure has not yet formed. Abrasion between discs affects the quality of polishing.

Utilizing the principle that the opposite sex attracts the same sex and repels the same sex, the permanent magnetic ring is installed on the outer ring of the suspension base plate and the inner ring of the correction ring, so that the suspension base plate and the correction ring do not contact each other, avoiding collisions, jamming and other phenomena.

The beneficial effects of the utility model are mainly manifested in: precise pressurization, stable grinding, small surface damage and high quality.

Description of drawings

Fig. 1 is a schematic diagram of an anti-collision suspension polishing device.

Fig. 2 is a schematic diagram of a suspended substrate.

Detailed ways

Below in conjunction with accompanying drawing, the utility model is further described.

Referring to Fig. 1 and Fig. 2, a kind of anti-collision suspension polishing device comprises machine base 7, suspension base plate 3, grinding disc 1 and correction ring 5, and described suspension base plate 3 is connected with pressurized assembly, and described suspension base plate 3 is clamped in the correction ring 5, the correction ring 5 is installed on the grinding disc 1, the grinding disc 1 rotates around the fixed central axis through the main drive 11, and the surface of the suspension base plate 3 and the grinding disc 1 is along the circumference The direction is provided with a wedge-shaped groove 12 and a processing station for placing workpieces to be processed. The wedge-shaped groove 12 is filled with polishing liquid, and the wedge-shaped groove 12 and the processing station are arranged at intervals; the polishing device also includes a first permanent magnet ring 9 and the second permanent magnet ring 4, the first permanent magnet ring 9 is set on the outer surface of the suspension base plate 3, the second permanent magnet ring 4 is set on the inner surface of the correction ring 5, and the first permanent magnet There is a gap between the ring 9 and the second permanent magnet ring 4 and the outer ring of the first permanent magnet ring and the inner ring of the second permanent magnet ring have the same magnetic properties.

Further, the pressurization assembly is an electromagnetic pressurization assembly, the electromagnetic pressurization assembly includes an electromagnet 6 and a pressure sensor 8, the electromagnet 6 is fixed on the machine base 7 and is concentric with the suspension base plate 3, the electromagnetic pressurization assembly A pressure sensor 8 is installed between the iron 6 and the base 7, and the suspension base plate 3 is a ferromagnet.

In this embodiment, the opposite surface of the suspension base plate 3 and the grinding disc 1 is provided with a plurality of wedge-shaped grooves 12 along the circumferential direction. On planes with wedge grooves without affecting the wedge grooves.

In the initial state, the suspension base plate 3 is adsorbed on the electromagnet 6 and does not contact the grinding disc 1, and the grinding disc 1 starts to rotate around the central axis, and the force sensor 8 can accurately obtain the contact between the electromagnet 6 and the suspension base plate 3. The magnitude of the mutual interaction force is controlled by a computer closed-loop to adjust the size and direction of the coil current of the electromagnet 6, and the suspension base plate 3 is slowly placed on the grinding disc 1 with the polishing liquid 2, and applied The amount of pressure required for polishing.

Claims (2)

1. anticollision suspension polishing device, comprise support, suspension basal disc, abrasive disk and conditioning ring, described suspension basal disc is connected with pressure-applying unit, described suspension basal disc is installed in conditioning ring, described conditioning ring is arranged on abrasive disk, described abrasive disk rotates around the fixed center axis by master driver, described suspension basal disc and abrasive disk opposite face along the circumferential direction are provided with wedge-shaped slot and in order to place the processing stations of workpiece to be processed, be full of polishing fluid in described wedge-shaped slot, described wedge-shaped slot and processing stations interval setting; It is characterized in that: described burnishing device also comprises the first permanent-magnetic clamp and the second permanent-magnetic clamp, described the first permanent-magnetic clamp is sleeved on suspension basal disc outer surface, described the second permanent-magnetic clamp is sleeved on the conditioning ring inner surface, exists gap and the first permanent-magnetic clamp outer ring and the second permanent-magnetic clamp inner ring Magnetic Phase same between described permanent-magnetic clamp for the first time and the second permanent-magnetic clamp.

2. anticollision suspension polishing device as claimed in claim 1, it is characterized in that: described pressure-applying unit is the electromagnetism pressure-applying unit, described electromagnetism pressure-applying unit comprises electromagnet and pressure sensor, described electromagnet is fixed on support and is concentric with the suspension basal disc, between described electromagnet and support, pressure sensor is installed, described suspension basal disc is ferromagnet.

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