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CN202757956U - rotatable edge finder - Google Patents

rotatable edge finder Download PDF

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Publication number
CN202757956U
CN202757956U CN 201220376554 CN201220376554U CN202757956U CN 202757956 U CN202757956 U CN 202757956U CN 201220376554 CN201220376554 CN 201220376554 CN 201220376554 U CN201220376554 U CN 201220376554U CN 202757956 U CN202757956 U CN 202757956U
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rotating unit
rotating
described rotating
unit
seeking
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廖惇材
彭柏翰
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MJC Probe Inc
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MJC Probe Inc
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Abstract

The utility model relates to a rotatable edge finder, which comprises a base, a cantilever arranged on the base and a probe arranged on the cantilever; the method is characterized in that: the base comprises a fixed unit and a rotating unit which can be rotatably arranged on the fixed unit, and the cantilever is arranged on the rotating unit. Therefore, the utility model discloses a cantilever and probe can rotate and leave the position when point contact operation goes on along with the rotation unit of base to other limit wares of seeking that are close to carry out the probe and change the operation.

Description

可转动的寻边器rotatable edge finder

技术领域 technical field

本实用新型与利用探针(probe)检测诸如发光二极管等半导体晶粒性能的点测装置(prober)所搭载的寻边器(edge sensor)有关,特别是指一种可转动的寻边器。The utility model is related to an edge sensor mounted on a probing device (prober) which uses a probe to detect the properties of semiconductor crystal grains such as light-emitting diodes, in particular to a rotatable edge sensor.

背景技术 Background technique

点测装置为一种利用探针检测诸如发光二极管等半导体晶粒性能表现或特性参数的设备。点测装置通常包含有至少一寻边器,如图1及图2所示,习用的寻边器100包含有一座体110、一悬臂120、一连接于座体110与悬臂120之间的弹性片130,以及一设置于悬臂120一端的探针140,悬臂120与座体110之间还设有一可调预力施加器150,以及二分别固设于悬臂120及座体110的导电体160、170,二导电体160、170受预力施加器150施加的预力作用而保持接触并电性导通。A spot measuring device is a device that uses a probe to detect the performance or characteristic parameters of semiconductor grains such as light-emitting diodes. The spot measuring device usually includes at least one edge finder. As shown in FIGS. sheet 130, and a probe 140 arranged at one end of the cantilever 120, an adjustable pre-force applicator 150 is also provided between the cantilever 120 and the base 110, and two conductors 160 are respectively fixed on the cantilever 120 and the base 110. , 170, the two conductors 160, 170 are kept in contact with each other by the preforce applied by the preforce applicator 150 and are electrically connected.

在使用寻边器100时,其探针140与一测试机电性连接。通过一可垂直往复运动的进给机构带动寻边器100下降或通过一可垂直往复运动的承载台带动一待测物(Device Under Test)上升,探针140可与该待测物接触,使测试机能够输出测试讯号至待测物并自该待测物接收测试结果,以检测或验证待测物的电路良莠或电气特性。When the edge finder 100 is used, its probe 140 is electrically connected to a testing machine. The edge finder 100 is driven down by a vertically reciprocating feed mechanism or a device under test (Device Under Test) is driven up by a vertically reciprocating bearing table, and the probe 140 can be in contact with the device under test, so that The testing machine can output test signals to the object under test and receive test results from the object under test, so as to detect or verify the good or bad of the circuit or electrical characteristics of the object under test.

一旦探针140施予待测物的针压(probing force)使得其反作用力克服该预力时,将造成悬臂120摆动且弹性片130弹性弯曲变形,使得二导电体160、170相互分离而断路,同时,点测装置一旦侦测到二导电体160、170断路的讯号则立即停止前述进给动作。由此,寻边器100可确保探针140能确实接触并施加一定压抵力量在待测物上,而且,寻边器100还可避免探针140对待测物所施的针压过大而造成待测物或探针140损伤。Once the probe 140 exerts the probing force on the object to be tested so that its reaction force overcomes the pre-force, the cantilever 120 will be caused to swing and the elastic piece 130 will be elastically bent and deformed, so that the two conductors 160, 170 are separated from each other and disconnected. , and at the same time, once the spot measuring device detects the signal of the disconnection of the two conductors 160, 170, it immediately stops the aforementioned feeding action. Thus, the edge finder 100 can ensure that the probe 140 can actually contact and apply a certain pressing force on the object to be tested, and the edge finder 100 can also prevent the needle pressure of the probe 140 on the object to be measured from being too large cause damage to the object under test or the probe 140 .

同一点测装置常设有多个如前所述的寻边器,以同时点触同一待测物的多个电性接点,或者同时点触多个待测物,各寻边器的位置配置需配合其要点触的电性接点的位置,常使得其探针彼此相当靠近,如此一来,若不将寻边器从点测装置拆卸下来,便相当难进行探针更换作业。换言之,习用的寻边器容易造成其邻近的其他寻边器的探针更换作业不易进行,因此仍有待改进。The same point measuring device is often equipped with multiple edge finders as mentioned above to touch multiple electrical contacts of the same object under test at the same time, or to touch multiple objects under test at the same time. The position configuration of each edge finder needs to be The position of the electrical contacts to be touched often makes the probes quite close to each other, so that it is very difficult to replace the probes without disassembling the edge finder from the measuring device. In other words, conventional edge finders are likely to make it difficult to replace the probes of other edge finders adjacent to it, so there is still room for improvement.

发明内容 Contents of the invention

针对上述问题,本实用新型的主要目的在于提供一种可转动的寻边器,其可通过转动而使其悬臂及探针离开点触作业进行时的位置,以便其邻近的其他寻边器进行探针更换。In view of the above problems, the main purpose of this utility model is to provide a rotatable edge finder, which can make its cantilever and probe leave the position when the touch operation is in progress by rotating, so that other adjacent edge finders can carry out Probe replacement.

为达到上述目的,本实用新型所提供的一种可转动的寻边器,包含有一基座、一设置于所述基座的悬臂,以及一设置于所述悬臂的探针;其特征在于:所述基座包含有一固定单元,以及一能转动地设置于所述固定单元的转动单元,所述悬臂设置于所述转动单元。In order to achieve the above purpose, a rotatable edge finder provided by the utility model includes a base, a cantilever disposed on the base, and a probe disposed on the cantilever; it is characterized in that: The base includes a fixed unit, and a rotating unit rotatably arranged on the fixed unit, and the cantilever is arranged on the rotating unit.

上述本实用新型的技术方案中,还包含有一连接所述固定单元与所述转动单元的转轴,所述转动单元能自一起始位置受外力而绕所述转轴转动,所述悬臂在所述转动单元位于起始位置时实质上呈水平的姿态,所述转轴实质上呈水平且与所述悬臂垂直的姿态。In the above-mentioned technical solution of the utility model, it also includes a rotating shaft connecting the fixed unit and the rotating unit, the rotating unit can be rotated around the rotating shaft by an external force from a starting position, and the cantilever can rotate around the rotating shaft when it is rotating. When the unit is at the initial position, it is substantially horizontal, and the rotating shaft is substantially horizontal and perpendicular to the cantilever.

所述固定单元具有一前挡止面,当所述转动单元位于所述起始位置时,所述固定单元的前挡止面为朝向所述探针,且所述转动单元抵靠所述前挡止面。The fixing unit has a front stop surface. When the rotation unit is at the initial position, the front stop surface of the fixation unit faces the probe, and the rotation unit abuts against the front blocking surface.

所述固定单元还具有一位于所述前挡止面上方的上挡止面,所述转动单元以一预定方向转动时能受所述上挡止面抵挡而停定于一极限位置。The fixing unit also has an upper stop surface above the front stop surface, and when the rotating unit rotates in a predetermined direction, it can be resisted by the upper stop surface and stop at a limit position.

还包含有一磁吸组件,所述磁吸组件具有二能相吸的构件,所述二构件分别设置于所述固定单元及所述转动单元,当所述悬臂随着所述转动单元的转动而旋摆至实质上呈垂直的姿态时,所述磁吸组件的所述二构件相吸,使所述悬臂保持在实质上呈垂直的姿态。It also includes a magnetic attraction assembly. The magnetic attraction assembly has two components that can attract each other. The two components are respectively arranged on the fixed unit and the rotating unit. When the cantilever moves with the rotation of the rotating unit, When swinging to a substantially vertical posture, the two members of the magnetic attraction assembly attract each other, so that the cantilever maintains a substantially vertical posture.

所述磁吸组件设置于所述固定单元的构件为一磁铁,所述磁吸组件设置于所述转动单元的构件为一导磁件。The component of the magnetic attraction assembly disposed on the fixed unit is a magnet, and the component of the magnetic attraction assembly disposed on the rotating unit is a magnetic conductor.

所述导磁件为锁设于所述转动单元的螺丝。The magnetic guide is a screw locked on the rotating unit.

所述转轴穿设于所述转动单元,所述导磁件的尾端顶抵于所述转轴。The rotating shaft passes through the rotating unit, and the tail end of the magnetic-conducting member is against the rotating shaft.

还包含有另一设置于所述转动单元的磁铁,所述二磁铁为相吸或相斥,以提供一作用于所述转轴的力量。It also includes another magnet arranged on the rotating unit, and the two magnets attract or repel each other to provide a force acting on the rotating shaft.

所述固定单元包含有一连接件,所述连接件具有一顶壁、一右侧壁及一左侧壁,所述左、右侧壁分别装设有一轴承,所述转轴穿设于所述二轴承中;所述转动单元包含有一转动件,所述转动件位于所述连接件的左、右侧壁之间并与所述转轴固接,且所述转动件具有一与所述连接件的顶壁对应的顶部,以及一与所述悬臂连接的底部;所述磁吸组件的磁铁及导磁件分别设于所述连接件的顶壁及所述转动件的一前侧面。The fixing unit includes a connecting piece, the connecting piece has a top wall, a right side wall and a left side wall, the left and right side walls are respectively equipped with a bearing, and the rotating shaft passes through the two In the bearing; the rotating unit includes a rotating member, the rotating member is located between the left and right side walls of the connecting member and fixedly connected to the rotating shaft, and the rotating member has a connection with the connecting member The top corresponding to the top wall, and a bottom connected to the cantilever; the magnet and the magnetic guide part of the magnetic attraction assembly are respectively arranged on the top wall of the connecting part and a front side of the rotating part.

所述寻边器还包含有另一设置于所述转动件顶部的磁铁,所述二磁铁为相吸或相斥,以提供一作用于所述转轴的力量。The edge finder also includes another magnet disposed on the top of the rotating member. The two magnets attract or repel each other to provide a force acting on the rotating shaft.

所述固定单元还包含有一能在一作用位置与一非作用位置之间移动地穿设于所述连接件的顶壁的限位件;当所述限位件位于所述作用位置且所述转动单元以一预定方向转动时,所述限位件能抵顶所述转动单元以限制所述转动单元的转动角度;当所述限位件位于所述非作用位置时,所述限位件离开所述转动单元。The fixing unit also includes a limiting member that can move between an active position and a non-active position and penetrates the top wall of the connecting member; when the limiting member is at the active position and the When the rotating unit rotates in a predetermined direction, the limiting member can abut against the rotating unit to limit the rotation angle of the rotating unit; when the limiting member is in the inactive position, the limiting member Leave the turning unit.

所述固定单元包含有一连接件,所述连接件具有一顶壁、一右侧壁及一左侧壁,所述左、右侧壁分别装设有一轴承,所述转轴穿设于所述轴承中;所述转动单元包含有一转动件,所述转动件位于所述连接件的左、右侧壁之间并与所述转轴固接,且所述转动件具有一与所述连接件的顶壁对应的顶部,以及一与所述悬臂连接的底部;所述磁吸组件的所述二构件分别设于所述连接件的顶壁及所述转动件的一前侧面。The fixing unit includes a connecting piece, the connecting piece has a top wall, a right side wall and a left side wall, the left and right side walls are respectively equipped with a bearing, and the rotating shaft passes through the bearing In; the rotating unit includes a rotating member, the rotating member is located between the left and right side walls of the connecting member and fixedly connected to the rotating shaft, and the rotating member has a top connected to the connecting member A top corresponding to the wall, and a bottom connected to the cantilever; the two components of the magnetic attraction assembly are respectively arranged on the top wall of the connecting piece and a front side of the rotating piece.

所述固定单元还设有一能在一作用位置与一非作用位置之间移动的限位件;当所述限位件位于所述作用位置且所述转动单元以一预定方向转动时,所述限位件能抵顶所述转动单元以限制所述转动单元的转动角度;而当所述限位件位于所述非作用位置时,所述限位件离开所述转动单元。The fixing unit is also provided with a limiter capable of moving between an active position and a non-active position; when the limiter is located at the active position and the rotating unit rotates in a predetermined direction, the The limiter can abut against the rotation unit to limit the rotation angle of the rotation unit; and when the limiter is in the inactive position, the limiter leaves the rotation unit.

还包含有一连接所述固定单元与所述转动单元的转轴,所述转动单元能自一起始位置受外力而绕所述转轴转动,所述悬臂在所述转动单元位于起始位置时实质上呈水平的姿态,所述转轴实质上呈垂直的姿态。It also includes a rotating shaft connecting the fixed unit and the rotating unit, the rotating unit can be rotated around the rotating shaft by an external force from a starting position, and the cantilever is substantially in the shape of a cantilever when the rotating unit is at the starting position. In a horizontal posture, the rotating shaft is substantially in a vertical posture.

所述固定单元具有一前挡止面,所述转动单元具有一后抵靠面,当所述转动单元位于所述起始位置时,所述固定单元的前挡止面为朝向所述探针,且所述转动单元的后抵靠面为抵靠所述前挡止面。The fixed unit has a front stop surface, and the rotation unit has a rear abutment surface. When the rotation unit is at the initial position, the front stop surface of the fixation unit faces the probe , and the rear abutting surface of the rotating unit abuts against the front stop surface.

所述转动单元还具有一侧抵靠面,所述转动单元以一预定方向转动时能以其侧抵靠面受所述固定单元的前挡止面抵挡而停定于一极限位置。The rotating unit also has a side abutting surface, and when the rotating unit rotates in a predetermined direction, the side abutting surface can be resisted by the front stop surface of the fixing unit to stop at a limit position.

所述转轴能设置于一第一位置与一第二位置其中之一,所述转动单元在所述转轴设置于所述第一位置时能自所述起始位置以一第一预定方向转动,所述转动单元在所述转轴设置于所述第二位置时能自所述起始位置以一与所述第一预定方向相反的第二预定方向转动。The rotating shaft can be set at one of a first position and a second position, and the rotating unit can rotate in a first predetermined direction from the initial position when the rotating shaft is set at the first position, The rotating unit can rotate from the initial position in a second predetermined direction opposite to the first predetermined direction when the rotating shaft is disposed at the second position.

所述转动单元还具有一第一侧抵靠面及一第二侧抵靠面;当所述转轴设置于所述第一位置且所述转动单元以所述第一预定方向转动时,所述转动单元能以所述第一侧抵靠面受所述固定单元的前挡止面抵挡而停定于一第一极限位置;当所述转轴设置于所述第二位置且所述转动单元以所述第二预定方向转动时,所述转动单元能以所述第二侧抵靠面受所述固定单元的前挡止面抵挡而停定于一第二极限位置。The rotating unit also has a first side abutting surface and a second side abutting surface; when the rotating shaft is set at the first position and the rotating unit rotates in the first predetermined direction, the The rotating unit can stop at a first limit position with the first side abutting surface being resisted by the front stop surface of the fixing unit; when the rotating shaft is set at the second position and the rotating unit is When rotating in the second predetermined direction, the rotating unit can stop at a second extreme position with the second side abutting surface being resisted by the front stop surface of the fixing unit.

采用上述技术方案,本实用新型的悬臂及探针可随基座的转动单元转动而离开点触作业进行时的位置,以远离其邻近的其他寻边器的探针,使得探针更换作业较容易进行。With the above technical solution, the cantilever and the probe of the utility model can rotate with the rotation unit of the base to leave the position when the touch operation is in progress, so as to stay away from the probes of other adjacent edge finders, so that the probe replacement operation is easier. easy to carry out.

附图说明 Description of drawings

图1是习用的寻边器的立体组合图;Fig. 1 is a three-dimensional combination diagram of a conventional edge finder;

图2是图1所示的寻边器的侧视图;Fig. 2 is a side view of the edge finder shown in Fig. 1;

图3是本实用新型一第一较佳的立体组合图;Fig. 3 is a first preferred three-dimensional combination diagram of the utility model;

图4是本实用新型该第一较佳实施例的立体分解图;Fig. 4 is a three-dimensional exploded view of the first preferred embodiment of the utility model;

图5是本实用新型该第一较佳实施例的侧视图,显示该寻边器一基座的一转动单元位于一起始位置的状态;Fig. 5 is a side view of the first preferred embodiment of the utility model, showing a state where a rotating unit of a base of the edge finder is located at an initial position;

图6类同于图5,显示该转动单元位于一极限位置的状态;Fig. 6 is similar to Fig. 5, showing the state that the rotating unit is in a limit position;

图7是一包含有四个本实用新型该第一较佳实施例所提供的可转动的寻边器的点测装置的立体示意图,其中各寻边器的转动单元均位于起始位置;Fig. 7 is a three-dimensional schematic diagram of a spot measuring device including four rotatable edge finders provided by the first preferred embodiment of the present invention, wherein the rotating units of each edge finder are located at the initial position;

图8类同于图7,显示该点测装置仅其中一寻边器位于起始位置;Figure 8 is similar to Figure 7, showing that only one of the edge finders is at the initial position of the spot measuring device;

图9是本实用新型一第二较佳实施例的立体组合图;Fig. 9 is a three-dimensional combined view of a second preferred embodiment of the utility model;

图10是本实用新型该第二较佳实施例的立体分解图;Fig. 10 is a three-dimensional exploded view of the second preferred embodiment of the utility model;

图11是本实用新型该第二较佳的剖视图,显示该寻边器一基座的一转动单元位于一起始位置的状态;Fig. 11 is the second preferred sectional view of the utility model, showing a state where a rotating unit of a base of the edge finder is located at an initial position;

图12类同于图11,显示该转动单元位于一极限位置的状态;Fig. 12 is similar to Fig. 11, showing the state that the rotating unit is in a limit position;

图13是本实用新型一第三较佳实施例的立体组合图;Fig. 13 is a three-dimensional combined view of a third preferred embodiment of the present invention;

图14是本实用新型该第三较佳实施例的立体分解图;Fig. 14 is a three-dimensional exploded view of the third preferred embodiment of the utility model;

图15是本实用新型该第三较佳实施例的俯视图,显示该寻边器一基座的一转动单元位于一起始位置的状态;Fig. 15 is a top view of the third preferred embodiment of the utility model, showing a state where a rotating unit of a base of the edge finder is located at an initial position;

图16类同于图15,显示该转动单元位于一第一极限位置的状态;Fig. 16 is similar to Fig. 15, showing that the rotation unit is in a state of a first extreme position;

图17类同于图15,显示该转动单元位于一第二极限位置的状态;Fig. 17 is similar to Fig. 15, showing that the rotation unit is in a state of a second extreme position;

图18为一包含有四个本实用新型该第三较佳实施例所提供的可转动的寻边器的点测装置的立体示意图,其中各寻边器的转动单元均位于起始位置;Fig. 18 is a three-dimensional schematic diagram of a spot measuring device including four rotatable edge finders provided by the third preferred embodiment of the present invention, wherein the rotating units of each edge finder are located at the initial position;

图19类同于图18,显示该点测装置仅其中一寻边器位于起始位置。Fig. 19 is similar to Fig. 18, showing that only one of the edge finders is in the initial position of the survey device.

具体实施方式 Detailed ways

为了详细说明本实用新型的结构、特点及功效,现举以下较佳实施例并配合附图说明如下。In order to describe the structure, features and effects of the present utility model in detail, the following preferred embodiments are given below together with the accompanying drawings.

申请人首先在此说明,在以下将要介绍的实施例以及图式中,相同的参考号码,表示相同或类似的元件或其结构特征。The applicant first explains here that in the embodiments and drawings to be described below, the same reference numerals denote the same or similar elements or structural features.

如图3至图6所示,本实用新型一第一较佳实施例所提供的可转动的寻边器11包含有一基座20、一悬臂30、一探针40、一预力施加单元50,以及一导电单元60。As shown in Figures 3 to 6, the rotatable edge finder 11 provided by a first preferred embodiment of the present invention includes a base 20, a cantilever 30, a probe 40, and a pre-force applying unit 50 , and a conductive unit 60 .

基座20包含有一固定单元22、一转动单元24,以及一转轴26,固定单元22包含有一固定件222,转动单元24包含有一转动件242及一从动件244。从动件244、悬臂30、探针40、预力施加单元50及导电单元60与现有技术相同。The base 20 includes a fixing unit 22 , a rotating unit 24 , and a rotating shaft 26 . The fixing unit 22 includes a fixing member 222 , and the rotating unit 24 includes a rotating member 242 and a driven member 244 . The follower 244 , the cantilever 30 , the probe 40 , the pre-force applying unit 50 and the conducting unit 60 are the same as those in the prior art.

固定件222具有一截面呈梯形的本体222a,以及二自本体222a向前并向下倾斜延伸的连接部222b,二连接部222b分别设有贯穿的一穿孔222c及一螺孔222d,各连接部222b分别具有一前挡止面222e,以及一位于前挡止面222e上方的上挡止面222f。The fixing member 222 has a body 222a with a trapezoidal cross section, and two connecting parts 222b extending forward and downward from the body 222a. The two connecting parts 222b are respectively provided with a through hole 222c and a screw hole 222d. Each connecting part 222b respectively have a front stop surface 222e, and an upper stop surface 222f located above the front stop surface 222e.

转动件242具有一截面呈梯形的本体242a,以及一自本体242a向后并向上倾斜延伸的连接部242b,连接部242b设有一实质上水平地贯穿连接部242b的轴孔242c。从动件244通过螺丝固定于转动件242底部。The rotating member 242 has a body 242a with a trapezoidal cross-section, and a connecting portion 242b extending obliquely upward from the body 242a. The connecting portion 242b defines a shaft hole 242c substantially horizontally penetrating through the connecting portion 242b. The follower 244 is fixed on the bottom of the rotating member 242 by screws.

转轴26依序穿过固定件222的穿孔222c及转动件242的轴孔242c,再以其一端的螺纹部262螺接固定于固定件222的螺孔222d。The rotating shaft 26 passes through the through hole 222c of the fixing member 222 and the shaft hole 242c of the rotating member 242 in sequence, and is screwed and fixed to the screw hole 222d of the fixing member 222 by the threaded portion 262 at one end.

悬臂30包含有一弹性片32、一前悬臂件34及一后悬臂件36,弹性片32上半部通过螺丝锁固于从动件244前侧,前悬臂件34及后悬臂件36通过螺丝分别固设在弹性片32下半部的前侧及后侧。探针40设置于前悬臂件34。The cantilever 30 includes an elastic piece 32, a front cantilever part 34 and a rear cantilever part 36. The upper half of the elastic piece 32 is locked on the front side of the follower 244 by screws, and the front cantilever part 34 and the rear cantilever part 36 are respectively connected by screws. It is fixed on the front side and the rear side of the lower half of the elastic piece 32 . The probe 40 is disposed on the front cantilever 34 .

预力施加单元50包含有一穿设于从动件244的螺栓52、一设于螺栓52底部的磁铁(图中未示),以及一穿设于后悬臂件36并与磁铁相对的金属螺丝54。导电单元60包含有一固设于从动件244底部的绝缘件62,以及分别固设于绝缘件62及后悬臂件36的一第一导电件64及一第二导电件66。预力施加单元50的磁铁与金属螺丝54相互吸引产生的预力使得二导电件64、66相互接触而电性导通。The pre-force applying unit 50 includes a bolt 52 passing through the follower 244, a magnet (not shown) disposed at the bottom of the bolt 52, and a metal screw 54 passing through the rear suspension member 36 and opposite to the magnet. . The conductive unit 60 includes an insulating part 62 fixed on the bottom of the follower 244 , and a first conductive part 64 and a second conductive part 66 respectively fixed on the insulating part 62 and the rear cantilever part 36 . The pre-force generated by mutual attraction between the magnet of the pre-force applying unit 50 and the metal screw 54 makes the two conductive elements 64 , 66 contact each other and conduct electrical conduction.

在寻边器11处于点触作业的使用状态时,转动单元24位于一起始位置P1(如图5所示),此时,悬臂30实质上呈水平的姿态,固定单元22的前挡止面222e为朝向探针40,且转动单元24的转动件242抵靠前挡止面222e。When the edge finder 11 is in the use state of the touch operation, the rotating unit 24 is located at a starting position P1 (as shown in FIG. 5 ), at this time, the cantilever 30 is in a substantially horizontal posture, and the front stop surface of the fixed unit 22 222e is toward the probe 40, and the rotating member 242 of the rotating unit 24 abuts against the front stop surface 222e.

由于转轴26实质上呈水平且与悬臂30垂直的姿态,当旋松转轴26时,转动单元24能自起始位置P1受外力而以一预定方向D1绕转轴26转动,进而使悬臂30向上翻转,直到转动单元24受上挡止面222f抵挡而停定于一极限位置P2(如图6所示)。Since the rotating shaft 26 is substantially horizontal and perpendicular to the cantilever 30, when the rotating shaft 26 is unscrewed, the rotating unit 24 can be rotated around the rotating shaft 26 in a predetermined direction D1 from the initial position P1 by an external force, and then the cantilever 30 can be turned upwards. , until the rotating unit 24 is stopped at a limit position P2 (as shown in FIG. 6 ) by being resisted by the upper stop surface 222f.

在点触作业实际进行时,寻边器11以其固定件222固设于一进给机构70(如图7所示),以受进给机构70带动而沿三轴向移动,且探针40与一测试机(图中未示)电连接。寻边器11在进行点触作业时,其转动单元24位于如图5所示的起始位置P1,寻边器11相对一待测物(图中未示)由上而下地以探针40接触待测物的导电接点,使测试机能够将测试讯号输出至待测物并自待测物接收测试结果,以检测或验证待测物的电路良莠或电气特性。在持续进给的过程中,一旦待测物施加给探针40的反作用力克服预力施加单元50施加的预力时,悬臂30将以弹片32支点而摆动,使得二导电体64、66相互分离,进而送出一断路讯号使进给机构70停止前述进给动作,以避免待测物因受探针40所施的针压过大而损伤。When the touch operation is actually carried out, the edge finder 11 is fixed on a feed mechanism 70 (as shown in FIG. 7 ) with its fixing part 222, so as to be driven by the feed mechanism 70 to move along the three axes, and the probe 40 is electrically connected with a testing machine (not shown in the figure). When the edge finder 11 is performing a touch operation, its rotating unit 24 is located at the initial position P1 as shown in Figure 5, and the edge finder 11 moves from top to bottom with the probe 40 relative to an object to be measured (not shown in the figure). Contact the conductive contact of the object under test, so that the testing machine can output the test signal to the object under test and receive the test result from the object under test, so as to detect or verify the circuit quality or electrical characteristics of the object under test. In the process of continuous feeding, once the reaction force applied by the object to be tested to the probe 40 overcomes the pre-force applied by the pre-force applying unit 50, the cantilever 30 will swing with the fulcrum of the shrapnel 32, so that the two conductors 64, 66 interact with each other. Separate, and then send a disconnection signal to make the feeding mechanism 70 stop the aforementioned feeding action, so as to prevent the object under test from being damaged due to excessive needle pressure exerted by the probe 40 .

如图7及图8所示,当同一点测装置设有多个寻边器11,且其探针40彼此相当靠近时,使用者可在要更换其中一寻边器11的探针40时,将其他邻近的寻边器11的转动单元24以如图5所示的预定方向D1转动便可将各悬臂30向上翻转,以让出足够的空间进行探针更换作业。As shown in Figures 7 and 8, when the same measuring device is provided with multiple edge finders 11, and their probes 40 are quite close to each other, the user can replace the probe 40 of one of the edge finders 11 Each cantilever 30 can be turned upwards by rotating the rotating units 24 of other adjacent edge finders 11 in the predetermined direction D1 as shown in FIG. 5 , so as to allow enough space for probe replacement operations.

本实用新型所提供的可转动的寻边器的转动方式并不以前述实施例所提供的方式为限,只要寻边器的基座包含有一固定单元及一转动单元,使得设置于转动单元的悬臂可随转动单元转动进而离开其进行点测作业时的位置即可。下面再列举二实施例,其基座的构造与前述第一较佳实施例的基座20不同,但也可达到前述的功效。The rotation mode of the rotatable edge finder provided by the utility model is not limited to the method provided by the foregoing embodiments, as long as the base of the edge finder includes a fixed unit and a rotating unit, so that the The cantilever can rotate with the rotating unit and then leave its position for spot measurement. Two more embodiments are listed below, the structure of the base is different from the base 20 of the aforementioned first preferred embodiment, but the aforementioned effects can also be achieved.

如图9至图12所示,本实用新型一第二较佳实施例所提供的可转动的寻边器12的基座80主要包含有一固定单元82、一转动单元84,以及用于连接固定单元82与转动单元84的二轴承85及一转轴86。As shown in Figures 9 to 12, the base 80 of the rotatable edge finder 12 provided by a second preferred embodiment of the present invention mainly includes a fixing unit 82, a rotating unit 84, and a Two bearings 85 and a rotating shaft 86 of the unit 82 and the rotating unit 84 .

固定单元82包含有一用于与进给机构固接的固定件822,以及一固接于固定件822底部的连接件824。连接件824的形状类同于前述第一较佳实施例中的从动件244,且同样也装设有预力施加单元50的螺栓52及磁铁,以及导电单元60的绝缘件62及第一导电件64。然而,连接件824的前端部还具有由一顶壁824a、一右侧壁824b及一左侧壁824c所定义出且其前侧与底侧呈开放状的一容置槽824d。The fixing unit 82 includes a fixing part 822 for fixing with the feeding mechanism, and a connecting part 824 fixed at the bottom of the fixing part 822 . The shape of the connector 824 is similar to that of the follower 244 in the aforementioned first preferred embodiment, and is also equipped with the bolt 52 and the magnet of the pre-force applying unit 50, and the insulator 62 of the conductive unit 60 and the first Conductive member 64 . However, the front end of the connecting member 824 also has a receiving groove 824d defined by a top wall 824a, a right side wall 824b, and a left side wall 824c, and its front side and bottom side are open.

转动单元84包含有一转动件842,转动件842具有一右侧面842a、一左侧面842b,以及一贯穿左、右侧面842b、842a的轴孔842c,转动件842设置于容置槽824d而位于连接件824的左、右侧壁824c、824b之间。二轴承85分别装设于连接件824的左、右侧壁824c、824b,转轴86穿设于二轴承85及转动件842的轴孔842c中,且转动件842与转轴86是通过一锁设于转动件842且顶抵于转轴86的止付螺丝87来相互固定(如图11所示)。The rotating unit 84 includes a rotating member 842. The rotating member 842 has a right side 842a, a left side 842b, and a shaft hole 842c passing through the left and right sides 842b, 842a. The rotating member 842 is disposed in the accommodating groove 824d It is located between the left and right side walls 824c, 824b of the connecting member 824 . The two bearings 85 are installed on the left and right side walls 824c, 824b of the connecting piece 824 respectively, and the rotating shaft 86 is penetrated in the shaft hole 842c of the second bearing 85 and the rotating member 842, and the rotating member 842 and the rotating shaft 86 are arranged through a lock. The set screws 87 on the rotating member 842 and against the rotating shaft 86 are fixed to each other (as shown in FIG. 11 ).

悬臂30的前、后悬臂件34、36通过螺丝相互锁固并锁固于转动件842的底部。The front and rear cantilever members 34 , 36 of the cantilever 30 are locked to each other and to the bottom of the rotating member 842 by screws.

由此,转轴86实质上呈水平并与悬臂30垂直的姿态,因此,转动单元84可自其使得悬臂30实质上呈水平姿态的起始位置P1以预定方向D1转动(如图11所示),进而使悬臂30向上翻转,以让出足够的空间使其邻近的寻边器可进行探针更换作业。Thus, the rotating shaft 86 is substantially horizontal and perpendicular to the cantilever 30, so the rotating unit 84 can rotate in a predetermined direction D1 from its initial position P1 where the cantilever 30 is substantially horizontal (as shown in FIG. 11 ). , and then the cantilever 30 is turned upwards to allow enough space for the adjacent edge finder to perform probe replacement operations.

固定单元82还可再设有一限位件826,限位件826为一穿设于连接件824的顶壁824a的螺丝,可被转动而相对连接件824移动。限位件826位于一如图11所示的作用位置P3时,可用于挡止以预定方向D1转动的转动件842,以限制转动件842在寻边器12进行点触作业时的转动角度,以充分发挥寻边器12的功能。当限位件826位于一如图12所示的非作用位置P4时,限位件826离开转动件842不与转动件842抵触,使得转动件842能以预定方向D1转动较大的角度,使探针能离开原有的点触位置,如此,即可让出其他寻边器探针更换作业所需的空间。The fixing unit 82 can further have a limiting member 826 , which is a screw passing through the top wall 824 a of the connecting member 824 , and can be rotated to move relative to the connecting member 824 . When the limiting member 826 is located at an active position P3 as shown in FIG. 11 , it can be used to stop the rotating member 842 rotating in a predetermined direction D1, so as to limit the rotation angle of the rotating member 842 when the edge finder 12 performs a touch operation. In order to give full play to the function of the edge finder 12. When the limiting member 826 is located at a non-active position P4 as shown in FIG. The stylus can move away from its original touch position, thus freeing up the space required for other edge finder stylus replacement operations.

基座80还可再设置一磁吸组件88,磁吸组件88具有二能相吸的构件882、884,即,二构件882、884可均为磁铁,或者二构件882、884可为一磁铁及一导磁件(例如金属)。二构件882、884分别设置于连接件824的顶壁824a及转动件842的一前侧面842d。由此,当悬臂30随着转动单元84的转动而旋摆至实质上呈垂直的姿态时(如图12所示),二构件882、884为相吸,使得悬臂30保持在实质上呈垂直的姿态。The base 80 can also be provided with a magnetic attraction assembly 88, and the magnetic attraction assembly 88 has two members 882, 884 that can attract each other, that is, the two members 882, 884 can be both magnets, or the two members 882, 884 can be a magnet and a magnetically conductive part (such as metal). The two components 882 and 884 are respectively disposed on the top wall 824a of the connecting part 824 and a front side 842d of the rotating part 842 . Thus, when the cantilever 30 swings to a substantially vertical posture with the rotation of the rotating unit 84 (as shown in FIG. 12 ), the two members 882, 884 are attracted to each other, so that the cantilever 30 remains substantially vertical. attitude.

在本实施例中,磁吸组件88设置于固定单元82的构件882为一磁铁,而设置于转动单元84的构件884则为一导磁件,且导磁件884为锁设于转动件842的螺丝,由此,导磁件884除了可实现前述功能,更能以其尾端顶抵转轴86,使得转动件842与转轴86固定得更加稳固。此外,转动件842与顶壁824a对应的顶部可再设置另一磁铁89,在探针40点触待测物时,转动单元84位于起始位置P1(如图11所示),此时,二磁铁882、89为相吸或相斥(取决于其磁性相同或相异),使得转动件842带动转轴86向上或向下紧抵轴承85,进而消除转轴86与轴承85的间隙及轴承85与连接件824的间隙;换言之,二磁铁882、89的磁力可消除转轴86偏摆的间隙,以避免悬臂30产生非预期的摆动而造成探针40在待测物上留下过当的针痕。In this embodiment, the component 882 of the magnetic attraction assembly 88 disposed on the fixing unit 82 is a magnet, while the component 884 disposed on the rotating unit 84 is a magnetic conducting member, and the magnetic conducting member 884 is locked on the rotating member 842 Therefore, in addition to realizing the aforementioned functions, the magnetically conductive member 884 can also push against the rotating shaft 86 with its tail end, so that the rotating member 842 and the rotating shaft 86 are fixed more firmly. In addition, another magnet 89 can be provided on the top of the rotating member 842 corresponding to the top wall 824a. When the probe 40 touches the object to be tested, the rotating unit 84 is located at the initial position P1 (as shown in FIG. 11 ). At this time, The two magnets 882, 89 attract or repel each other (depending on whether their magnetism is the same or different), so that the rotating member 842 drives the rotating shaft 86 to press against the bearing 85 upwards or downwards, thereby eliminating the gap between the rotating shaft 86 and the bearing 85 and the bearing 85 In other words, the magnetic force of the two magnets 882, 89 can eliminate the gap of the deflection of the rotating shaft 86, so as to avoid the unexpected swing of the cantilever 30 and cause the probe 40 to leave an excessive needle on the object to be tested. mark.

如图13至图17所示,本实用新型一第三较佳实施例所提供的可转动的寻边器13的基座90包含有一固定单元92、一转动单元94,以及一连接固定单元92与转动单元94的转轴96。As shown in Figures 13 to 17, the base 90 of the rotatable edge finder 13 provided by a third preferred embodiment of the present invention includes a fixing unit 92, a rotating unit 94, and a connection fixing unit 92 and the rotating shaft 96 of the rotating unit 94 .

固定单元92包含有一固定件922,固定件922具有一本体922a,以及一自本体922a一前挡止面922b延伸而出的连接部922c,连接部922c设有实质上垂直地贯穿连接部922c的一第一轴孔922d及一第二轴孔922e。The fixing unit 92 includes a fixing piece 922, the fixing piece 922 has a body 922a, and a connecting portion 922c extending from a front stop surface 922b of the body 922a, the connecting portion 922c is provided with a substantially vertical connection portion 922c A first shaft hole 922d and a second shaft hole 922e.

转动单元94包含有一转动件942,以及一固设于转动件942底部的从动件944。由于从动件944的形状及与悬臂30、预力施加单元50及导电单元60的连接关系均与前述第一较佳实施例的从动件244相同,故在此不予赘述。转动件942具有一本体942a,以及二自本体942a向后延伸的连接部942b,其中一连接部942b设有一第一穿孔942c及一第二穿孔942d,另一连接部942b设有二分别与二穿孔942c、942d相对的螺孔942e。各连接部942b具有一后抵靠面942f、一第一侧抵靠面942g及一第二侧抵靠面942h。The rotating unit 94 includes a rotating part 942 and a driven part 944 fixed on the bottom of the rotating part 942 . Since the shape of the follower 944 and the connection relationship with the cantilever 30 , the pre-force applying unit 50 and the conductive unit 60 are the same as those of the follower 244 in the first preferred embodiment, it will not be repeated here. The rotating member 942 has a main body 942a, and two connecting parts 942b extending backward from the main body 942a, wherein one connecting part 942b is provided with a first through hole 942c and a second through hole 942d, and the other connecting part 942b is provided with two respectively and two The through holes 942c and 942d are opposite to the screw holes 942e. Each connecting portion 942b has a rear abutting surface 942f, a first side abutting surface 942g and a second side abutting surface 942h.

转轴96能穿设于第一穿孔942c及第一轴孔922d,并以其一螺纹部962螺接固定于与第一穿孔942c相对的螺孔942e,而位于一第一位置P5(如图15及图16所示)。或者,转轴96能穿设于第二穿孔942d及第二轴孔922e,并以其螺纹部962螺接固定于与第二穿孔942d相对的螺孔942e,而位于一第二位置P6(如图17所示)。不论转轴96位于第一位置P5或第二位置P6,转轴96实质上呈垂直的姿态,使得转动单元94能实质上水平地转动。The rotating shaft 96 can pass through the first through hole 942c and the first shaft hole 922d, and is screwed and fixed to the screw hole 942e opposite to the first through hole 942c with a threaded portion 962 thereof, and is located at a first position P5 (as shown in FIG. 15 and Figure 16). Alternatively, the rotating shaft 96 can pass through the second through hole 942d and the second shaft hole 922e, and be screwed and fixed to the screw hole 942e opposite to the second through hole 942d with its threaded portion 962, and be located at a second position P6 (as shown in FIG. 17). Regardless of whether the rotating shaft 96 is located at the first position P5 or the second position P6, the rotating shaft 96 is substantially vertical, so that the rotating unit 94 can rotate substantially horizontally.

如图15所示,当转动单元94位于起始位置P1时,固定件922的前挡止面922b为朝向探针40,且转动单元94的后抵靠面942f为抵靠前挡止面922b。当转轴96设置于第一位置P5且旋松时,转动单元94能自起始位置P1受外力而绕转轴96以一第一预定方向D2转动,直到转动单元94以第一侧抵靠面942g受前挡止面922b抵挡而停定于一第一极限位置P7(如图16所示)。当转轴96设置于第二位置P6且旋松时,转动单元94能自起始位置P1受外力而绕转轴96以一与第一预定方向D2相反的第二预定方向D3转动,直到转动单元94以第二侧抵靠面942h受前挡止面922b抵挡而停定于一第二极限位置P8(如图17所示)。As shown in FIG. 15 , when the rotating unit 94 is at the initial position P1, the front stop surface 922b of the fixing member 922 faces the probe 40, and the rear abutment surface 942f of the rotation unit 94 is against the front stop surface 922b. . When the rotating shaft 96 is set at the first position P5 and is unscrewed, the rotating unit 94 can be rotated in a first predetermined direction D2 around the rotating shaft 96 by an external force from the initial position P1 until the rotating unit 94 presses against the first side surface 942g It is stopped at a first extreme position P7 (as shown in FIG. 16 ) by being resisted by the front stop surface 922b. When the rotating shaft 96 is set at the second position P6 and unscrewed, the rotating unit 94 can be subjected to an external force from the initial position P1 to rotate around the rotating shaft 96 in a second predetermined direction D3 opposite to the first predetermined direction D2 until the rotating unit 94 The second side abutting surface 942h is stopped at a second extreme position P8 (as shown in FIG. 17 ) by being resisted by the front stop surface 922b.

由此,如图18及图19所示,当同一点测装置设有多个寻边器13,且其探针40彼此相当靠近时,使用者可在需要更换其中一寻边器13的探针40时,将其他邻近的寻边器13的转动单元84以第一预定方向D2或第二预定方向D3(取决于其与待更换探针的寻边器的相对位置)转动,进而使各悬臂30向一旁偏转,以让出足够的空间进行探针更换作业。Thus, as shown in Figure 18 and Figure 19, when the same point measuring device is provided with multiple edge finders 13, and the probes 40 thereof are quite close to each other, the user can replace the probe of one of the edge finders 13. When the needle 40 is used, the rotating unit 84 of other adjacent edge finders 13 is rotated in the first predetermined direction D2 or the second predetermined direction D3 (depending on its relative position with the edge finder of the probe to be replaced), and then each The cantilever 30 is deflected sideways to allow enough room for probe changing operations.

综上所述,本实用新型的重点在于使寻边器的基座包含有一固定单元,以及一可相对固定单元转动的转动单元,使得设置于转动单元的悬臂可随转动单元转动而离开其进行点测作业时的位置,以让出可供其邻近的寻边器方便更换探针的空间。该基座的构造及转动单元的转动方向并无限制,且固定单元不一定要设有可止挡该转动单元或维持该转动单元位置的特征或元件。其次,实现寻边器功能的机构设计也不以上述实施例所公开的方式为限,即,预力施加单元并不以磁力的方式为限,也可利用弹簧来提供预力,而且弹片也可以传统的水平姿态方式与悬臂连接,换言之,本实用新型所提供的技术特征可以应用于现有各式各样的寻边器上,例如中国台湾第M345241号及第M382589号等专利中所揭示的各种寻边器。To sum up, the focus of this utility model is to make the base of the edge finder include a fixed unit and a rotating unit that can rotate relative to the fixed unit, so that the cantilever installed on the rotating unit can rotate away from it The location of the spot measurement operation to allow space for the adjacent edge finder to facilitate the replacement of the probe. The structure of the base and the direction of rotation of the rotating unit are not limited, and the fixing unit does not have to be provided with features or elements that can stop the rotating unit or maintain the position of the rotating unit. Secondly, the mechanism design for realizing the function of the edge finder is not limited to the methods disclosed in the above-mentioned embodiments, that is, the pre-force applying unit is not limited to the magnetic force, and springs can also be used to provide the pre-force, and the shrapnel can also It can be connected with the cantilever in the traditional horizontal attitude mode. In other words, the technical features provided by the utility model can be applied to various existing edge finders, such as those disclosed in Chinese Taiwan Patents No. M345241 and No. M382589 Various edge finders.

最后,必须再次说明,本实用新型在前述实施例中所揭示的构成元件,仅为举例说明,并非用来限制本案的专利保护范围,其他等效元件的替代或变化,也应被本实用新型的专利保护范围所涵盖。Finally, it must be explained again that the constituent elements disclosed in the foregoing embodiments of the present utility model are only for illustration, and are not used to limit the scope of patent protection of this case. The substitution or change of other equivalent elements should also be covered by the present utility model. covered by the scope of patent protection.

Claims (19)

1. the rotating limit device of seeking includes the cantilever that a pedestal, is arranged at described pedestal, and a probe that is arranged at described cantilever; It is characterized in that:
Described pedestal includes a fixed cell, and a rotating unit that can be arranged at rotationally described fixed cell, and described cantilever is arranged at described rotating unit.
2. the rotating limit device of seeking as claimed in claim 1, it is characterized in that: also include the rotating shaft of a described fixed cell of connection and described rotating unit, described rotating unit can be subjected to external force from an initial position and rotate around described rotating shaft, described cantilever is in fact the attitude of level when described rotating unit is positioned at reference position, described rotating shaft is in fact level and the attitude vertical with described cantilever.
3. the rotating limit device of seeking as claimed in claim 2, it is characterized in that: described fixed cell has a front stopping surface, when described rotating unit was positioned at described reference position, the front stopping surface of described fixed cell was towards described probe, and described rotating unit is against described front stopping surface.
4. the rotating limit device of seeking as claimed in claim 3, it is characterized in that: described fixed cell also has a upper stopping surface that is positioned at described front stopping surface top, and described rotating unit is kept out by described upper stopping surface can when rotating with a predetermined direction and stop scheduling an extreme position.
5. the rotating limit device of seeking as claimed in claim 2, it is characterized in that: also include a magnetic assembly, described magnetic assembly has two members that can inhale mutually, described two members are arranged at respectively described fixed cell and described rotating unit, when described cantilever along with the rotation of described rotating unit swing when being in fact vertical attitude, described two members of described magnetic assembly are inhaled mutually, make described cantilever remain on the attitude that is in fact vertical.
6. the rotating limit device of seeking as claimed in claim 5, it is characterized in that: the member that described magnetic assembly is arranged at described fixed cell is a magnet, the member that described magnetic assembly is arranged at described rotating unit is a magnetic conductive part.
7. the rotating limit device of seeking as claimed in claim 6, it is characterized in that: described magnetic conductive part is the screw that is locked on described rotating unit.
8. the rotating limit device of seeking as claimed in claim 7, it is characterized in that: described rotating shaft is arranged in described rotating unit, and the tail end of described magnetic conductive part is resisted against described rotating shaft.
9. such as each described rotating limit device of seeking in the claim 6 to 8, it is characterized in that: also include the magnet that another is arranged at described rotating unit, described two magnet are for inhaling mutually or repel each other, so that a strength that acts on described rotating shaft to be provided.
10. such as each described rotating limit device of seeking in the claim 6 to 8, it is characterized in that: described fixed cell includes a connection piece, described web member has a roof, a right side wall and a left side wall, described left and right sidewall is equiped with respectively a bearing, and described rotating shaft is arranged in described two bearings; Described rotating unit includes a tumbler, and described tumbler is between the left and right sidewall of described web member and affixed with described rotating shaft, and described tumbler has a top corresponding with the roof of described web member, and a bottom that is connected with described cantilever; The magnet of described magnetic assembly and magnetic conductive part are located at respectively the roof of described web member and a leading flank of described tumbler.
11. the rotating limit device of seeking as claimed in claim 10 is characterized in that: the described limit device of seeking also includes the magnet that another is arranged at described tumbler top, described two magnet are for inhaling mutually or repel each other, so that a strength that acts on described rotating shaft to be provided.
12. the rotating limit device of seeking as claimed in claim 11 is characterized in that: described fixed cell also includes a locating part that can be arranged in movably the roof of described web member between an active position and a non-working position; When described locating part was positioned at described active position and described rotating unit and rotates with a predetermined direction, described locating part can be supported described rotating unit to limit the rotational angle of described rotating unit; When described locating part was positioned at described non-working position, described locating part left described rotating unit.
13. the rotating limit device of seeking as claimed in claim 5, it is characterized in that: described fixed cell includes a connection piece, described web member has a roof, a right side wall and a left side wall, and described left and right sidewall is equiped with respectively a bearing, and described rotating shaft is arranged in the described bearing; Described rotating unit includes a tumbler, and described tumbler is between the left and right sidewall of described web member and affixed with described rotating shaft, and described tumbler has a top corresponding with the roof of described web member, and a bottom that is connected with described cantilever; Described two members of described magnetic assembly are located at respectively the roof of described web member and a leading flank of described tumbler.
14. the rotating limit device of seeking as claimed in claim 5 is characterized in that: described fixed cell also is provided with a locating part that can move between an active position and a non-working position; When described locating part was positioned at described active position and described rotating unit and rotates with a predetermined direction, described locating part can be supported described rotating unit to limit the rotational angle of described rotating unit; And when described locating part was positioned at described non-working position, described locating part left described rotating unit.
15. the rotating limit device of seeking as claimed in claim 1, it is characterized in that: also include the rotating shaft of a described fixed cell of connection and described rotating unit, described rotating unit can be subjected to external force from an initial position and rotate around described rotating shaft, described cantilever is in fact the attitude of level when described rotating unit is positioned at reference position, described rotating shaft is in fact vertical attitude.
16. the rotating limit device of seeking as claimed in claim 15, it is characterized in that: described fixed cell has a front stopping surface, described rotating unit has a rear abutment face, when described rotating unit is positioned at described reference position, the front stopping surface of described fixed cell is towards described probe, and the rear abutment face of described rotating unit is against described front stopping surface.
17. the rotating limit device of seeking as claimed in claim 16, it is characterized in that: described rotating unit also has a side abutment face, can be subjected to the front stopping surface of described fixed cell to keep out and stop due to an extreme position with its side abutment face when described rotating unit rotates with a predetermined direction.
18. the rotating limit device of seeking as claimed in claim 16, it is characterized in that: described rotating shaft can be arranged at a primary importance and a second place one of them, described rotating unit can rotate with one first predetermined direction from described reference position when described rotating shaft is arranged at described primary importance, and described rotating unit can rotate with second predetermined direction opposite with described the first predetermined direction from described reference position when described rotating shaft is arranged at the described second place.
19. the rotating limit device of seeking as claimed in claim 18 is characterized in that: described rotating unit also has one first side abutment face and one second side abutment face; When described rotating shaft was arranged at described primary importance and described rotating unit and rotates with described the first predetermined direction, described rotating unit can be subjected to the front stopping surface of described fixed cell to keep out and stop due to one first extreme position with described the first side abutment face; When described rotating shaft was arranged at the described second place and described rotating unit and rotates with described the second predetermined direction, described rotating unit can be subjected to the front stopping surface of described fixed cell to keep out and stop due to one second extreme position with described the second side abutment face.
CN 201220376554 2012-08-01 2012-08-01 rotatable edge finder Expired - Fee Related CN202757956U (en)

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104749403A (en) * 2013-12-31 2015-07-01 旺矽科技股份有限公司 probe module
CN113533939A (en) * 2021-08-09 2021-10-22 苏州联讯仪器有限公司 Probe station for chip test
CN113533938A (en) * 2021-07-28 2021-10-22 苏州联讯仪器有限公司 Chip testing machine

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104749403A (en) * 2013-12-31 2015-07-01 旺矽科技股份有限公司 probe module
CN113533938A (en) * 2021-07-28 2021-10-22 苏州联讯仪器有限公司 Chip testing machine
CN113533938B (en) * 2021-07-28 2022-02-18 苏州联讯仪器有限公司 Chip testing machine
CN113533939A (en) * 2021-08-09 2021-10-22 苏州联讯仪器有限公司 Probe station for chip test
CN113533939B (en) * 2021-08-09 2022-03-15 苏州联讯仪器有限公司 Probe station for chip test

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