CN202757956U - rotatable edge finder - Google Patents
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Abstract
Description
技术领域 technical field
本实用新型与利用探针(probe)检测诸如发光二极管等半导体晶粒性能的点测装置(prober)所搭载的寻边器(edge sensor)有关,特别是指一种可转动的寻边器。The utility model is related to an edge sensor mounted on a probing device (prober) which uses a probe to detect the properties of semiconductor crystal grains such as light-emitting diodes, in particular to a rotatable edge sensor.
背景技术 Background technique
点测装置为一种利用探针检测诸如发光二极管等半导体晶粒性能表现或特性参数的设备。点测装置通常包含有至少一寻边器,如图1及图2所示,习用的寻边器100包含有一座体110、一悬臂120、一连接于座体110与悬臂120之间的弹性片130,以及一设置于悬臂120一端的探针140,悬臂120与座体110之间还设有一可调预力施加器150,以及二分别固设于悬臂120及座体110的导电体160、170,二导电体160、170受预力施加器150施加的预力作用而保持接触并电性导通。A spot measuring device is a device that uses a probe to detect the performance or characteristic parameters of semiconductor grains such as light-emitting diodes. The spot measuring device usually includes at least one edge finder. As shown in FIGS.
在使用寻边器100时,其探针140与一测试机电性连接。通过一可垂直往复运动的进给机构带动寻边器100下降或通过一可垂直往复运动的承载台带动一待测物(Device Under Test)上升,探针140可与该待测物接触,使测试机能够输出测试讯号至待测物并自该待测物接收测试结果,以检测或验证待测物的电路良莠或电气特性。When the
一旦探针140施予待测物的针压(probing force)使得其反作用力克服该预力时,将造成悬臂120摆动且弹性片130弹性弯曲变形,使得二导电体160、170相互分离而断路,同时,点测装置一旦侦测到二导电体160、170断路的讯号则立即停止前述进给动作。由此,寻边器100可确保探针140能确实接触并施加一定压抵力量在待测物上,而且,寻边器100还可避免探针140对待测物所施的针压过大而造成待测物或探针140损伤。Once the
同一点测装置常设有多个如前所述的寻边器,以同时点触同一待测物的多个电性接点,或者同时点触多个待测物,各寻边器的位置配置需配合其要点触的电性接点的位置,常使得其探针彼此相当靠近,如此一来,若不将寻边器从点测装置拆卸下来,便相当难进行探针更换作业。换言之,习用的寻边器容易造成其邻近的其他寻边器的探针更换作业不易进行,因此仍有待改进。The same point measuring device is often equipped with multiple edge finders as mentioned above to touch multiple electrical contacts of the same object under test at the same time, or to touch multiple objects under test at the same time. The position configuration of each edge finder needs to be The position of the electrical contacts to be touched often makes the probes quite close to each other, so that it is very difficult to replace the probes without disassembling the edge finder from the measuring device. In other words, conventional edge finders are likely to make it difficult to replace the probes of other edge finders adjacent to it, so there is still room for improvement.
发明内容 Contents of the invention
针对上述问题,本实用新型的主要目的在于提供一种可转动的寻边器,其可通过转动而使其悬臂及探针离开点触作业进行时的位置,以便其邻近的其他寻边器进行探针更换。In view of the above problems, the main purpose of this utility model is to provide a rotatable edge finder, which can make its cantilever and probe leave the position when the touch operation is in progress by rotating, so that other adjacent edge finders can carry out Probe replacement.
为达到上述目的,本实用新型所提供的一种可转动的寻边器,包含有一基座、一设置于所述基座的悬臂,以及一设置于所述悬臂的探针;其特征在于:所述基座包含有一固定单元,以及一能转动地设置于所述固定单元的转动单元,所述悬臂设置于所述转动单元。In order to achieve the above purpose, a rotatable edge finder provided by the utility model includes a base, a cantilever disposed on the base, and a probe disposed on the cantilever; it is characterized in that: The base includes a fixed unit, and a rotating unit rotatably arranged on the fixed unit, and the cantilever is arranged on the rotating unit.
上述本实用新型的技术方案中,还包含有一连接所述固定单元与所述转动单元的转轴,所述转动单元能自一起始位置受外力而绕所述转轴转动,所述悬臂在所述转动单元位于起始位置时实质上呈水平的姿态,所述转轴实质上呈水平且与所述悬臂垂直的姿态。In the above-mentioned technical solution of the utility model, it also includes a rotating shaft connecting the fixed unit and the rotating unit, the rotating unit can be rotated around the rotating shaft by an external force from a starting position, and the cantilever can rotate around the rotating shaft when it is rotating. When the unit is at the initial position, it is substantially horizontal, and the rotating shaft is substantially horizontal and perpendicular to the cantilever.
所述固定单元具有一前挡止面,当所述转动单元位于所述起始位置时,所述固定单元的前挡止面为朝向所述探针,且所述转动单元抵靠所述前挡止面。The fixing unit has a front stop surface. When the rotation unit is at the initial position, the front stop surface of the fixation unit faces the probe, and the rotation unit abuts against the front blocking surface.
所述固定单元还具有一位于所述前挡止面上方的上挡止面,所述转动单元以一预定方向转动时能受所述上挡止面抵挡而停定于一极限位置。The fixing unit also has an upper stop surface above the front stop surface, and when the rotating unit rotates in a predetermined direction, it can be resisted by the upper stop surface and stop at a limit position.
还包含有一磁吸组件,所述磁吸组件具有二能相吸的构件,所述二构件分别设置于所述固定单元及所述转动单元,当所述悬臂随着所述转动单元的转动而旋摆至实质上呈垂直的姿态时,所述磁吸组件的所述二构件相吸,使所述悬臂保持在实质上呈垂直的姿态。It also includes a magnetic attraction assembly. The magnetic attraction assembly has two components that can attract each other. The two components are respectively arranged on the fixed unit and the rotating unit. When the cantilever moves with the rotation of the rotating unit, When swinging to a substantially vertical posture, the two members of the magnetic attraction assembly attract each other, so that the cantilever maintains a substantially vertical posture.
所述磁吸组件设置于所述固定单元的构件为一磁铁,所述磁吸组件设置于所述转动单元的构件为一导磁件。The component of the magnetic attraction assembly disposed on the fixed unit is a magnet, and the component of the magnetic attraction assembly disposed on the rotating unit is a magnetic conductor.
所述导磁件为锁设于所述转动单元的螺丝。The magnetic guide is a screw locked on the rotating unit.
所述转轴穿设于所述转动单元,所述导磁件的尾端顶抵于所述转轴。The rotating shaft passes through the rotating unit, and the tail end of the magnetic-conducting member is against the rotating shaft.
还包含有另一设置于所述转动单元的磁铁,所述二磁铁为相吸或相斥,以提供一作用于所述转轴的力量。It also includes another magnet arranged on the rotating unit, and the two magnets attract or repel each other to provide a force acting on the rotating shaft.
所述固定单元包含有一连接件,所述连接件具有一顶壁、一右侧壁及一左侧壁,所述左、右侧壁分别装设有一轴承,所述转轴穿设于所述二轴承中;所述转动单元包含有一转动件,所述转动件位于所述连接件的左、右侧壁之间并与所述转轴固接,且所述转动件具有一与所述连接件的顶壁对应的顶部,以及一与所述悬臂连接的底部;所述磁吸组件的磁铁及导磁件分别设于所述连接件的顶壁及所述转动件的一前侧面。The fixing unit includes a connecting piece, the connecting piece has a top wall, a right side wall and a left side wall, the left and right side walls are respectively equipped with a bearing, and the rotating shaft passes through the two In the bearing; the rotating unit includes a rotating member, the rotating member is located between the left and right side walls of the connecting member and fixedly connected to the rotating shaft, and the rotating member has a connection with the connecting member The top corresponding to the top wall, and a bottom connected to the cantilever; the magnet and the magnetic guide part of the magnetic attraction assembly are respectively arranged on the top wall of the connecting part and a front side of the rotating part.
所述寻边器还包含有另一设置于所述转动件顶部的磁铁,所述二磁铁为相吸或相斥,以提供一作用于所述转轴的力量。The edge finder also includes another magnet disposed on the top of the rotating member. The two magnets attract or repel each other to provide a force acting on the rotating shaft.
所述固定单元还包含有一能在一作用位置与一非作用位置之间移动地穿设于所述连接件的顶壁的限位件;当所述限位件位于所述作用位置且所述转动单元以一预定方向转动时,所述限位件能抵顶所述转动单元以限制所述转动单元的转动角度;当所述限位件位于所述非作用位置时,所述限位件离开所述转动单元。The fixing unit also includes a limiting member that can move between an active position and a non-active position and penetrates the top wall of the connecting member; when the limiting member is at the active position and the When the rotating unit rotates in a predetermined direction, the limiting member can abut against the rotating unit to limit the rotation angle of the rotating unit; when the limiting member is in the inactive position, the limiting member Leave the turning unit.
所述固定单元包含有一连接件,所述连接件具有一顶壁、一右侧壁及一左侧壁,所述左、右侧壁分别装设有一轴承,所述转轴穿设于所述轴承中;所述转动单元包含有一转动件,所述转动件位于所述连接件的左、右侧壁之间并与所述转轴固接,且所述转动件具有一与所述连接件的顶壁对应的顶部,以及一与所述悬臂连接的底部;所述磁吸组件的所述二构件分别设于所述连接件的顶壁及所述转动件的一前侧面。The fixing unit includes a connecting piece, the connecting piece has a top wall, a right side wall and a left side wall, the left and right side walls are respectively equipped with a bearing, and the rotating shaft passes through the bearing In; the rotating unit includes a rotating member, the rotating member is located between the left and right side walls of the connecting member and fixedly connected to the rotating shaft, and the rotating member has a top connected to the connecting member A top corresponding to the wall, and a bottom connected to the cantilever; the two components of the magnetic attraction assembly are respectively arranged on the top wall of the connecting piece and a front side of the rotating piece.
所述固定单元还设有一能在一作用位置与一非作用位置之间移动的限位件;当所述限位件位于所述作用位置且所述转动单元以一预定方向转动时,所述限位件能抵顶所述转动单元以限制所述转动单元的转动角度;而当所述限位件位于所述非作用位置时,所述限位件离开所述转动单元。The fixing unit is also provided with a limiter capable of moving between an active position and a non-active position; when the limiter is located at the active position and the rotating unit rotates in a predetermined direction, the The limiter can abut against the rotation unit to limit the rotation angle of the rotation unit; and when the limiter is in the inactive position, the limiter leaves the rotation unit.
还包含有一连接所述固定单元与所述转动单元的转轴,所述转动单元能自一起始位置受外力而绕所述转轴转动,所述悬臂在所述转动单元位于起始位置时实质上呈水平的姿态,所述转轴实质上呈垂直的姿态。It also includes a rotating shaft connecting the fixed unit and the rotating unit, the rotating unit can be rotated around the rotating shaft by an external force from a starting position, and the cantilever is substantially in the shape of a cantilever when the rotating unit is at the starting position. In a horizontal posture, the rotating shaft is substantially in a vertical posture.
所述固定单元具有一前挡止面,所述转动单元具有一后抵靠面,当所述转动单元位于所述起始位置时,所述固定单元的前挡止面为朝向所述探针,且所述转动单元的后抵靠面为抵靠所述前挡止面。The fixed unit has a front stop surface, and the rotation unit has a rear abutment surface. When the rotation unit is at the initial position, the front stop surface of the fixation unit faces the probe , and the rear abutting surface of the rotating unit abuts against the front stop surface.
所述转动单元还具有一侧抵靠面,所述转动单元以一预定方向转动时能以其侧抵靠面受所述固定单元的前挡止面抵挡而停定于一极限位置。The rotating unit also has a side abutting surface, and when the rotating unit rotates in a predetermined direction, the side abutting surface can be resisted by the front stop surface of the fixing unit to stop at a limit position.
所述转轴能设置于一第一位置与一第二位置其中之一,所述转动单元在所述转轴设置于所述第一位置时能自所述起始位置以一第一预定方向转动,所述转动单元在所述转轴设置于所述第二位置时能自所述起始位置以一与所述第一预定方向相反的第二预定方向转动。The rotating shaft can be set at one of a first position and a second position, and the rotating unit can rotate in a first predetermined direction from the initial position when the rotating shaft is set at the first position, The rotating unit can rotate from the initial position in a second predetermined direction opposite to the first predetermined direction when the rotating shaft is disposed at the second position.
所述转动单元还具有一第一侧抵靠面及一第二侧抵靠面;当所述转轴设置于所述第一位置且所述转动单元以所述第一预定方向转动时,所述转动单元能以所述第一侧抵靠面受所述固定单元的前挡止面抵挡而停定于一第一极限位置;当所述转轴设置于所述第二位置且所述转动单元以所述第二预定方向转动时,所述转动单元能以所述第二侧抵靠面受所述固定单元的前挡止面抵挡而停定于一第二极限位置。The rotating unit also has a first side abutting surface and a second side abutting surface; when the rotating shaft is set at the first position and the rotating unit rotates in the first predetermined direction, the The rotating unit can stop at a first limit position with the first side abutting surface being resisted by the front stop surface of the fixing unit; when the rotating shaft is set at the second position and the rotating unit is When rotating in the second predetermined direction, the rotating unit can stop at a second extreme position with the second side abutting surface being resisted by the front stop surface of the fixing unit.
采用上述技术方案,本实用新型的悬臂及探针可随基座的转动单元转动而离开点触作业进行时的位置,以远离其邻近的其他寻边器的探针,使得探针更换作业较容易进行。With the above technical solution, the cantilever and the probe of the utility model can rotate with the rotation unit of the base to leave the position when the touch operation is in progress, so as to stay away from the probes of other adjacent edge finders, so that the probe replacement operation is easier. easy to carry out.
附图说明 Description of drawings
图1是习用的寻边器的立体组合图;Fig. 1 is a three-dimensional combination diagram of a conventional edge finder;
图2是图1所示的寻边器的侧视图;Fig. 2 is a side view of the edge finder shown in Fig. 1;
图3是本实用新型一第一较佳的立体组合图;Fig. 3 is a first preferred three-dimensional combination diagram of the utility model;
图4是本实用新型该第一较佳实施例的立体分解图;Fig. 4 is a three-dimensional exploded view of the first preferred embodiment of the utility model;
图5是本实用新型该第一较佳实施例的侧视图,显示该寻边器一基座的一转动单元位于一起始位置的状态;Fig. 5 is a side view of the first preferred embodiment of the utility model, showing a state where a rotating unit of a base of the edge finder is located at an initial position;
图6类同于图5,显示该转动单元位于一极限位置的状态;Fig. 6 is similar to Fig. 5, showing the state that the rotating unit is in a limit position;
图7是一包含有四个本实用新型该第一较佳实施例所提供的可转动的寻边器的点测装置的立体示意图,其中各寻边器的转动单元均位于起始位置;Fig. 7 is a three-dimensional schematic diagram of a spot measuring device including four rotatable edge finders provided by the first preferred embodiment of the present invention, wherein the rotating units of each edge finder are located at the initial position;
图8类同于图7,显示该点测装置仅其中一寻边器位于起始位置;Figure 8 is similar to Figure 7, showing that only one of the edge finders is at the initial position of the spot measuring device;
图9是本实用新型一第二较佳实施例的立体组合图;Fig. 9 is a three-dimensional combined view of a second preferred embodiment of the utility model;
图10是本实用新型该第二较佳实施例的立体分解图;Fig. 10 is a three-dimensional exploded view of the second preferred embodiment of the utility model;
图11是本实用新型该第二较佳的剖视图,显示该寻边器一基座的一转动单元位于一起始位置的状态;Fig. 11 is the second preferred sectional view of the utility model, showing a state where a rotating unit of a base of the edge finder is located at an initial position;
图12类同于图11,显示该转动单元位于一极限位置的状态;Fig. 12 is similar to Fig. 11, showing the state that the rotating unit is in a limit position;
图13是本实用新型一第三较佳实施例的立体组合图;Fig. 13 is a three-dimensional combined view of a third preferred embodiment of the present invention;
图14是本实用新型该第三较佳实施例的立体分解图;Fig. 14 is a three-dimensional exploded view of the third preferred embodiment of the utility model;
图15是本实用新型该第三较佳实施例的俯视图,显示该寻边器一基座的一转动单元位于一起始位置的状态;Fig. 15 is a top view of the third preferred embodiment of the utility model, showing a state where a rotating unit of a base of the edge finder is located at an initial position;
图16类同于图15,显示该转动单元位于一第一极限位置的状态;Fig. 16 is similar to Fig. 15, showing that the rotation unit is in a state of a first extreme position;
图17类同于图15,显示该转动单元位于一第二极限位置的状态;Fig. 17 is similar to Fig. 15, showing that the rotation unit is in a state of a second extreme position;
图18为一包含有四个本实用新型该第三较佳实施例所提供的可转动的寻边器的点测装置的立体示意图,其中各寻边器的转动单元均位于起始位置;Fig. 18 is a three-dimensional schematic diagram of a spot measuring device including four rotatable edge finders provided by the third preferred embodiment of the present invention, wherein the rotating units of each edge finder are located at the initial position;
图19类同于图18,显示该点测装置仅其中一寻边器位于起始位置。Fig. 19 is similar to Fig. 18, showing that only one of the edge finders is in the initial position of the survey device.
具体实施方式 Detailed ways
为了详细说明本实用新型的结构、特点及功效,现举以下较佳实施例并配合附图说明如下。In order to describe the structure, features and effects of the present utility model in detail, the following preferred embodiments are given below together with the accompanying drawings.
申请人首先在此说明,在以下将要介绍的实施例以及图式中,相同的参考号码,表示相同或类似的元件或其结构特征。The applicant first explains here that in the embodiments and drawings to be described below, the same reference numerals denote the same or similar elements or structural features.
如图3至图6所示,本实用新型一第一较佳实施例所提供的可转动的寻边器11包含有一基座20、一悬臂30、一探针40、一预力施加单元50,以及一导电单元60。As shown in Figures 3 to 6, the rotatable edge finder 11 provided by a first preferred embodiment of the present invention includes a
基座20包含有一固定单元22、一转动单元24,以及一转轴26,固定单元22包含有一固定件222,转动单元24包含有一转动件242及一从动件244。从动件244、悬臂30、探针40、预力施加单元50及导电单元60与现有技术相同。The
固定件222具有一截面呈梯形的本体222a,以及二自本体222a向前并向下倾斜延伸的连接部222b,二连接部222b分别设有贯穿的一穿孔222c及一螺孔222d,各连接部222b分别具有一前挡止面222e,以及一位于前挡止面222e上方的上挡止面222f。The fixing
转动件242具有一截面呈梯形的本体242a,以及一自本体242a向后并向上倾斜延伸的连接部242b,连接部242b设有一实质上水平地贯穿连接部242b的轴孔242c。从动件244通过螺丝固定于转动件242底部。The rotating
转轴26依序穿过固定件222的穿孔222c及转动件242的轴孔242c,再以其一端的螺纹部262螺接固定于固定件222的螺孔222d。The rotating
悬臂30包含有一弹性片32、一前悬臂件34及一后悬臂件36,弹性片32上半部通过螺丝锁固于从动件244前侧,前悬臂件34及后悬臂件36通过螺丝分别固设在弹性片32下半部的前侧及后侧。探针40设置于前悬臂件34。The
预力施加单元50包含有一穿设于从动件244的螺栓52、一设于螺栓52底部的磁铁(图中未示),以及一穿设于后悬臂件36并与磁铁相对的金属螺丝54。导电单元60包含有一固设于从动件244底部的绝缘件62,以及分别固设于绝缘件62及后悬臂件36的一第一导电件64及一第二导电件66。预力施加单元50的磁铁与金属螺丝54相互吸引产生的预力使得二导电件64、66相互接触而电性导通。The
在寻边器11处于点触作业的使用状态时,转动单元24位于一起始位置P1(如图5所示),此时,悬臂30实质上呈水平的姿态,固定单元22的前挡止面222e为朝向探针40,且转动单元24的转动件242抵靠前挡止面222e。When the edge finder 11 is in the use state of the touch operation, the rotating
由于转轴26实质上呈水平且与悬臂30垂直的姿态,当旋松转轴26时,转动单元24能自起始位置P1受外力而以一预定方向D1绕转轴26转动,进而使悬臂30向上翻转,直到转动单元24受上挡止面222f抵挡而停定于一极限位置P2(如图6所示)。Since the rotating
在点触作业实际进行时,寻边器11以其固定件222固设于一进给机构70(如图7所示),以受进给机构70带动而沿三轴向移动,且探针40与一测试机(图中未示)电连接。寻边器11在进行点触作业时,其转动单元24位于如图5所示的起始位置P1,寻边器11相对一待测物(图中未示)由上而下地以探针40接触待测物的导电接点,使测试机能够将测试讯号输出至待测物并自待测物接收测试结果,以检测或验证待测物的电路良莠或电气特性。在持续进给的过程中,一旦待测物施加给探针40的反作用力克服预力施加单元50施加的预力时,悬臂30将以弹片32支点而摆动,使得二导电体64、66相互分离,进而送出一断路讯号使进给机构70停止前述进给动作,以避免待测物因受探针40所施的针压过大而损伤。When the touch operation is actually carried out, the edge finder 11 is fixed on a feed mechanism 70 (as shown in FIG. 7 ) with its fixing
如图7及图8所示,当同一点测装置设有多个寻边器11,且其探针40彼此相当靠近时,使用者可在要更换其中一寻边器11的探针40时,将其他邻近的寻边器11的转动单元24以如图5所示的预定方向D1转动便可将各悬臂30向上翻转,以让出足够的空间进行探针更换作业。As shown in Figures 7 and 8, when the same measuring device is provided with multiple edge finders 11, and their
本实用新型所提供的可转动的寻边器的转动方式并不以前述实施例所提供的方式为限,只要寻边器的基座包含有一固定单元及一转动单元,使得设置于转动单元的悬臂可随转动单元转动进而离开其进行点测作业时的位置即可。下面再列举二实施例,其基座的构造与前述第一较佳实施例的基座20不同,但也可达到前述的功效。The rotation mode of the rotatable edge finder provided by the utility model is not limited to the method provided by the foregoing embodiments, as long as the base of the edge finder includes a fixed unit and a rotating unit, so that the The cantilever can rotate with the rotating unit and then leave its position for spot measurement. Two more embodiments are listed below, the structure of the base is different from the
如图9至图12所示,本实用新型一第二较佳实施例所提供的可转动的寻边器12的基座80主要包含有一固定单元82、一转动单元84,以及用于连接固定单元82与转动单元84的二轴承85及一转轴86。As shown in Figures 9 to 12, the
固定单元82包含有一用于与进给机构固接的固定件822,以及一固接于固定件822底部的连接件824。连接件824的形状类同于前述第一较佳实施例中的从动件244,且同样也装设有预力施加单元50的螺栓52及磁铁,以及导电单元60的绝缘件62及第一导电件64。然而,连接件824的前端部还具有由一顶壁824a、一右侧壁824b及一左侧壁824c所定义出且其前侧与底侧呈开放状的一容置槽824d。The fixing
转动单元84包含有一转动件842,转动件842具有一右侧面842a、一左侧面842b,以及一贯穿左、右侧面842b、842a的轴孔842c,转动件842设置于容置槽824d而位于连接件824的左、右侧壁824c、824b之间。二轴承85分别装设于连接件824的左、右侧壁824c、824b,转轴86穿设于二轴承85及转动件842的轴孔842c中,且转动件842与转轴86是通过一锁设于转动件842且顶抵于转轴86的止付螺丝87来相互固定(如图11所示)。The rotating
悬臂30的前、后悬臂件34、36通过螺丝相互锁固并锁固于转动件842的底部。The front and
由此,转轴86实质上呈水平并与悬臂30垂直的姿态,因此,转动单元84可自其使得悬臂30实质上呈水平姿态的起始位置P1以预定方向D1转动(如图11所示),进而使悬臂30向上翻转,以让出足够的空间使其邻近的寻边器可进行探针更换作业。Thus, the rotating
固定单元82还可再设有一限位件826,限位件826为一穿设于连接件824的顶壁824a的螺丝,可被转动而相对连接件824移动。限位件826位于一如图11所示的作用位置P3时,可用于挡止以预定方向D1转动的转动件842,以限制转动件842在寻边器12进行点触作业时的转动角度,以充分发挥寻边器12的功能。当限位件826位于一如图12所示的非作用位置P4时,限位件826离开转动件842不与转动件842抵触,使得转动件842能以预定方向D1转动较大的角度,使探针能离开原有的点触位置,如此,即可让出其他寻边器探针更换作业所需的空间。The fixing
基座80还可再设置一磁吸组件88,磁吸组件88具有二能相吸的构件882、884,即,二构件882、884可均为磁铁,或者二构件882、884可为一磁铁及一导磁件(例如金属)。二构件882、884分别设置于连接件824的顶壁824a及转动件842的一前侧面842d。由此,当悬臂30随着转动单元84的转动而旋摆至实质上呈垂直的姿态时(如图12所示),二构件882、884为相吸,使得悬臂30保持在实质上呈垂直的姿态。The base 80 can also be provided with a
在本实施例中,磁吸组件88设置于固定单元82的构件882为一磁铁,而设置于转动单元84的构件884则为一导磁件,且导磁件884为锁设于转动件842的螺丝,由此,导磁件884除了可实现前述功能,更能以其尾端顶抵转轴86,使得转动件842与转轴86固定得更加稳固。此外,转动件842与顶壁824a对应的顶部可再设置另一磁铁89,在探针40点触待测物时,转动单元84位于起始位置P1(如图11所示),此时,二磁铁882、89为相吸或相斥(取决于其磁性相同或相异),使得转动件842带动转轴86向上或向下紧抵轴承85,进而消除转轴86与轴承85的间隙及轴承85与连接件824的间隙;换言之,二磁铁882、89的磁力可消除转轴86偏摆的间隙,以避免悬臂30产生非预期的摆动而造成探针40在待测物上留下过当的针痕。In this embodiment, the
如图13至图17所示,本实用新型一第三较佳实施例所提供的可转动的寻边器13的基座90包含有一固定单元92、一转动单元94,以及一连接固定单元92与转动单元94的转轴96。As shown in Figures 13 to 17, the
固定单元92包含有一固定件922,固定件922具有一本体922a,以及一自本体922a一前挡止面922b延伸而出的连接部922c,连接部922c设有实质上垂直地贯穿连接部922c的一第一轴孔922d及一第二轴孔922e。The fixing
转动单元94包含有一转动件942,以及一固设于转动件942底部的从动件944。由于从动件944的形状及与悬臂30、预力施加单元50及导电单元60的连接关系均与前述第一较佳实施例的从动件244相同,故在此不予赘述。转动件942具有一本体942a,以及二自本体942a向后延伸的连接部942b,其中一连接部942b设有一第一穿孔942c及一第二穿孔942d,另一连接部942b设有二分别与二穿孔942c、942d相对的螺孔942e。各连接部942b具有一后抵靠面942f、一第一侧抵靠面942g及一第二侧抵靠面942h。The rotating
转轴96能穿设于第一穿孔942c及第一轴孔922d,并以其一螺纹部962螺接固定于与第一穿孔942c相对的螺孔942e,而位于一第一位置P5(如图15及图16所示)。或者,转轴96能穿设于第二穿孔942d及第二轴孔922e,并以其螺纹部962螺接固定于与第二穿孔942d相对的螺孔942e,而位于一第二位置P6(如图17所示)。不论转轴96位于第一位置P5或第二位置P6,转轴96实质上呈垂直的姿态,使得转动单元94能实质上水平地转动。The rotating
如图15所示,当转动单元94位于起始位置P1时,固定件922的前挡止面922b为朝向探针40,且转动单元94的后抵靠面942f为抵靠前挡止面922b。当转轴96设置于第一位置P5且旋松时,转动单元94能自起始位置P1受外力而绕转轴96以一第一预定方向D2转动,直到转动单元94以第一侧抵靠面942g受前挡止面922b抵挡而停定于一第一极限位置P7(如图16所示)。当转轴96设置于第二位置P6且旋松时,转动单元94能自起始位置P1受外力而绕转轴96以一与第一预定方向D2相反的第二预定方向D3转动,直到转动单元94以第二侧抵靠面942h受前挡止面922b抵挡而停定于一第二极限位置P8(如图17所示)。As shown in FIG. 15 , when the rotating
由此,如图18及图19所示,当同一点测装置设有多个寻边器13,且其探针40彼此相当靠近时,使用者可在需要更换其中一寻边器13的探针40时,将其他邻近的寻边器13的转动单元84以第一预定方向D2或第二预定方向D3(取决于其与待更换探针的寻边器的相对位置)转动,进而使各悬臂30向一旁偏转,以让出足够的空间进行探针更换作业。Thus, as shown in Figure 18 and Figure 19, when the same point measuring device is provided with
综上所述,本实用新型的重点在于使寻边器的基座包含有一固定单元,以及一可相对固定单元转动的转动单元,使得设置于转动单元的悬臂可随转动单元转动而离开其进行点测作业时的位置,以让出可供其邻近的寻边器方便更换探针的空间。该基座的构造及转动单元的转动方向并无限制,且固定单元不一定要设有可止挡该转动单元或维持该转动单元位置的特征或元件。其次,实现寻边器功能的机构设计也不以上述实施例所公开的方式为限,即,预力施加单元并不以磁力的方式为限,也可利用弹簧来提供预力,而且弹片也可以传统的水平姿态方式与悬臂连接,换言之,本实用新型所提供的技术特征可以应用于现有各式各样的寻边器上,例如中国台湾第M345241号及第M382589号等专利中所揭示的各种寻边器。To sum up, the focus of this utility model is to make the base of the edge finder include a fixed unit and a rotating unit that can rotate relative to the fixed unit, so that the cantilever installed on the rotating unit can rotate away from it The location of the spot measurement operation to allow space for the adjacent edge finder to facilitate the replacement of the probe. The structure of the base and the direction of rotation of the rotating unit are not limited, and the fixing unit does not have to be provided with features or elements that can stop the rotating unit or maintain the position of the rotating unit. Secondly, the mechanism design for realizing the function of the edge finder is not limited to the methods disclosed in the above-mentioned embodiments, that is, the pre-force applying unit is not limited to the magnetic force, and springs can also be used to provide the pre-force, and the shrapnel can also It can be connected with the cantilever in the traditional horizontal attitude mode. In other words, the technical features provided by the utility model can be applied to various existing edge finders, such as those disclosed in Chinese Taiwan Patents No. M345241 and No. M382589 Various edge finders.
最后,必须再次说明,本实用新型在前述实施例中所揭示的构成元件,仅为举例说明,并非用来限制本案的专利保护范围,其他等效元件的替代或变化,也应被本实用新型的专利保护范围所涵盖。Finally, it must be explained again that the constituent elements disclosed in the foregoing embodiments of the present utility model are only for illustration, and are not used to limit the scope of patent protection of this case. The substitution or change of other equivalent elements should also be covered by the present utility model. covered by the scope of patent protection.
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CN104749403A (en) * | 2013-12-31 | 2015-07-01 | 旺矽科技股份有限公司 | probe module |
CN113533939A (en) * | 2021-08-09 | 2021-10-22 | 苏州联讯仪器有限公司 | Probe station for chip test |
CN113533938A (en) * | 2021-07-28 | 2021-10-22 | 苏州联讯仪器有限公司 | Chip testing machine |
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Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
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CN104749403A (en) * | 2013-12-31 | 2015-07-01 | 旺矽科技股份有限公司 | probe module |
CN113533938A (en) * | 2021-07-28 | 2021-10-22 | 苏州联讯仪器有限公司 | Chip testing machine |
CN113533938B (en) * | 2021-07-28 | 2022-02-18 | 苏州联讯仪器有限公司 | Chip testing machine |
CN113533939A (en) * | 2021-08-09 | 2021-10-22 | 苏州联讯仪器有限公司 | Probe station for chip test |
CN113533939B (en) * | 2021-08-09 | 2022-03-15 | 苏州联讯仪器有限公司 | Probe station for chip test |
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