CN202585367U - Containers for storing semiconductor components - Google Patents

Abstract

The utility model relates to a container for depositing semiconductor element, it contains one and bears body, a shrouding and a cover body, bears this internal at least locking part and a driving piece of being equipped with, and the shrouding is fixed to be locked in bearing the body below to support the driving piece, with fixed driving piece on bearing the body. When the driving part rotates, the driving part drives the locking part to move in the bearing body, at least one fixing part of the locking part moves towards at least one locking part of the cover body, and the fixing part is arranged on the locking part to fix the cover body on the bearing body. The fixing mode of the driving piece can reduce the acting force generated by the outer periphery of the driving piece opposite to the center of the driving piece, so that the stability of the driving piece during rotation can be improved, and the stability of the container for opening and closing operation is further improved.

Description

Containers for storing semiconductor components

technical field

The utility model relates to a container, in particular to a container for storing semiconductor elements.

Background technique

Modern advanced wafer foundries or semiconductor manufacturing plants have continuously made breakthroughs in wafer manufacturing technology, and have now reached a process of less than 90 nanometers. With the reduction of process line width and the increase of component integration, the unit wafer The number of manufacturable components within the circle increases. However, the tolerance of these highly integrated semiconductor components to pollutants is reduced. Even a very small amount of pollutants (particles, dust, organic matter, gas or volatiles, etc.) will cause defects in semiconductor components, and even cause semiconductor components to be subject to static electricity. Interference and short circuit, resulting in loss.

In general semiconductor manufacturing processes, a clean room) environment is provided to avoid particulate pollution in the air. The process of transporting semiconductor components must also avoid contamination, so protective containers are required one by one to avoid contamination of the carrying device of the semiconductor components.

In order to effectively reduce the damage that semiconductor components may cause during transportation or storage, there are currently many technologies to improve the structure in the container and the locking mechanism used in the container, hoping to improve the protection of the semiconductor components. In the operating system of the standard mechanical interface, the latch of the machine will be inserted into the driving member of the locking mechanism in the container to open and close the container.

However, the existing driving part is fixed in the container by locking method. When the bolt of the machine drives the driving part of the container, the outer peripheral edge of the driving part will produce an opposite force to the center, which will cause the driving part to rotate unstable, and then make the lock The operation of the locking mechanism is unstable, so that it is easy to cause friction between the components of the locking mechanism or other components in the container, and pollute particles are generated in the container, thereby polluting the semiconductor elements stored in the container.

In order to solve the above problems, the present invention provides a container for storing semiconductor components. The locking mechanism in the container is not fixed by locking means, so that the driving member can rotate stably, thereby making the locking mechanism operate stably.

Utility model content

The purpose of the present invention is to provide a container for storing semiconductor components, which does not use a locking mechanism to fix a locking mechanism, so that the locking mechanism can operate stably, so that the container can be opened and closed smoothly.

The purpose of this model is to provide a container for storing semiconductor components, the chance of friction between the various components of the locking mechanism in the container is reduced, so as to avoid the generation of pollution particles in the container and make the semiconductor components stored in the container Suffer from pollution, and then make the interior of the container reach a high degree of cleanliness.

The present invention provides a container for storing semiconductor components, which comprises: a carrying body, the side wall of which has at least one perforation, which comprises: at least one locking piece, which is arranged in the carrying body, and the locking piece includes a lock Solid body, at least one fixing part and a driving part, the fixing part is arranged on one side of the locking body and corresponds to the through hole, the driving part is arranged on the other side of the locking body; in the bearing body, and abut against the driving part; a sealing plate, fixedly locked under the bearing body, and resist the driving part on the bearing body; and a cover, arranged on the bearing body Above, the side wall of the cover has at least one locking portion, the locking portion corresponds to the perforation; wherein, when the driving member rotates, the driving member drives the locking member to displace in the bearing body, and the locking member’s The fixing part passes through the through hole of the bearing body and is disposed on the locking part, so as to fix the cover to the bearing body.

Among them, it also includes:

A wear-resistant part is provided with the sealing plate and corresponds to the driving part.

Among them, it also includes:

A sealing element is arranged between the cover body and the bearing body.

Wherein, the bearer body further includes:

At least one supporting piece is arranged in the bearing body and is located below the locking piece to support the locking piece.

Wherein, the bearer body further includes:

Two first limiting parts are arranged in the carrying body, are respectively located on both sides of the locking piece, and are parallel to the moving direction of the locking piece.

Wherein, the bearer body further includes:

Two second limiting parts are arranged in the carrying body, and are respectively located between the two limiting parts of the driving part, and the two limiting parts respectively move between the two second limiting parts.

Wherein, the bearer body further includes:

At least one third limiting member is arranged in the carrying body and passes through a positioning hole of the locking body.

Among them, it also includes:

An elastic element, one end of which is connected to a connecting portion of the carrying body, and the other end of which is connected to a connecting portion of the locking member.

Wherein, the elastic element has a first part and a second part, one end of the first part is connected to the connecting part of the bearing body, one end of the second part is connected to the connecting part of the locking member, the The second part is inclined relative to the first part.

Among them, the driver includes:

A driving body has a first surface and a second surface corresponding to the first surface, the first surface is in contact with the locking member, and the second surface is in contact with the sealing plate; and

A rotating shaft is arranged on the first surface of the driving body, and the rotating shaft is pivotally arranged on a pivot portion of the bearing body.

Among them, the driver further includes:

At least one rolling element is embedded in the driving body and contacts with the sealing plate.

Wherein, the rolling element is a bearing.

Wherein, the bearer body further includes:

A bearing is arranged on the pivot joint, and the rotating shaft is pivotally arranged on the bearing.

Among them, the driver further includes:

At least one guiding structure protrudes from the first surface of the driving body, extends from the rotating shaft to the periphery of the driving body, and abuts against the driving portion of the locking member.

Among them, the sealing plate further includes:

At least one insertion hole corresponds to at least one driving hole of the driving body, and at least one pin passes through, and the pin passes through the insertion hole and is inserted into the driving hole, and moves in the insertion hole to rotate the driving member.

Among them, the driver further includes:

At least one pressing portion protrudes from the first surface of the driving body to press against the surface of the driving portion.

Wherein, the surface of the pressing portion corresponding to the driving portion is a guiding surface, and the side of the locking piece having the driving portion moves up and down along the guiding surface.

Among them, it also includes:

The two rolling elements are respectively embedded in the corresponding driving portion of the locking element, and abut against the corresponding guiding surface of the pressing portion.

Wherein, the end of the guiding surface further has a positioning groove, and the rolling element is arranged in the positioning groove.

Wherein, each rolling member is a bearing.

Wherein, one side of the driving part has an inclined surface, and the inclined surface is in contact with the guiding surface of the pressing part.

The beneficial effects of the utility model:

The present invention provides a container for storing semiconductor elements. The cover body is fixed to the carrying body through a locking mechanism arranged in the carrying body to seal the container and prevent external pollutants from entering the container. However, the locking mechanism of the present invention is composed of at least one locking piece and a driving piece. The locking piece and the driving piece are arranged on the carrying body, and the driving piece is fixed in the carrying body by means of a sealing plate against the driving piece instead of using screws. The locking method is fixed, so that the driving member can rotate stably. However, the driving part is provided with two rolling parts, and the two rolling parts reduce the contact area between the driving part and the sealing plate, so as to avoid the friction between the driving part and the sealing plate to produce pollution particles in the container, so as to prevent the semiconductor elements stored in the container from being polluted; and Wear-resistant parts are attached to the contact position between the sealing plate and the second rolling element, so as to reduce the generation of pollution particles caused by the friction between the second rolling element and the sealing plate, and further reduce the chance of generating pollution particles in the container.

In addition, each locking piece of the locking mechanism of the present invention is provided with a rolling element, and the rolling piece is in contact with the driving piece, thus reducing the contact area between the driving piece and the locking piece, and avoiding the friction between the driving piece and the locking piece to cause pollution particles in the container In order to prevent the semiconductor components stored in the container from being polluted; while the rolling element rolls with the rotation of the driving element, and reduces the friction generated by contact with the driving element, so that the driving element can smoothly drive the locking element to move on the bearing Inside the body, so that the locking mechanism can operate smoothly, so that the container can be opened and closed smoothly.

Description of drawings

Fig. 1 is the exploded view of the container of the first embodiment of the present invention;

Fig. 2 is a partial exploded view of the container of the first embodiment of the present invention;

Fig. 3 is another partial exploded view of the container of the first embodiment of the present invention;

Fig. 4 is a perspective view of the driver of the first embodiment of the present invention;

Fig. 5 is a perspective view of the locking member and the driving member of the first embodiment of the present invention;

Fig. 6 is a perspective view of the carrying body of the first embodiment of the present invention;

Fig. 7 is a schematic diagram of the elastic element of the first embodiment of the present invention;

Figure 8 is a partially exploded view of a container of a second embodiment of the present invention; and

FIG. 9 is a perspective view of the locking member and the driving member of the second embodiment of the present invention.

[Description of drawing number comparison]

1 Container 10 Cover

102 Locking part 111 Bearing body

1110 perforation 1111 inner surface

1112 side wall 1113 pivot joint

1114 Bearing 1115 The first limiter

11151 Notch 1116 Second limit piece

1117 Third limit piece 1118 Support piece

1119 Connection part 112 Sealing plate

1121 Insertion hole 1122 Wear parts

121 lock piece 1211 lock body

12110 rolling element 12111 inclined plane

1212 Fixed part 1213 Drive part

1214 Positioning hole 1215 Connection part

122 Driving parts 1221 Driving body

12211 first surface 12212 second surface

1222 Rotation shaft 1223 Guide structure

1224 Driving hole 1225 Limiting piece

1226 Resisting part 12261 Guide surface

12262 Locating groove 1227 Rolling parts

13 Elastic elements 131 Part 1

132 Part Two 14 Seals

2 latch

Detailed ways

In order to have a further understanding and understanding of the structural features and the achieved effects of the utility model, a detailed description is provided in conjunction with preferred embodiments and accompanying drawings, as follows:

The existing locking mechanism for containers is fixed by a locking method, which makes the locking mechanism unstable during operation and cannot open and close the container smoothly. Moreover, it is easy to cause friction between the locking mechanism and other components in the container, and pollute particles are generated in the container, thereby polluting the semiconductor elements stored in the container.

Please refer to FIG. 1 , FIG. 2 and FIG. 3 , which are exploded views and partial exploded views of the container of the first embodiment of the present invention. As shown in the figure, the present embodiment provides a container 1 for storing semiconductor components. The container 1 includes a cover body 10, a carrying body 111 and a sealing plate 112 (please refer to FIGS. 2 and 3 ), and the carrying body The outer surface of the carrier body 111 carries at least one semiconductor device, and the cover body 10 covers the outer surface of the carrier body 111 carrying the semiconductor device. And the carrying body 111 is provided with a locking mechanism, and the sealing plate 112 is against the locking mechanism to fix the locking mechanism in the carrying body 111 . The cover body 10 is fixed on the carrier body 111 through a locking mechanism, so that the container 1 is completely sealed, thereby preventing external pollutants from entering the container 1, so as to avoid storing at least one semiconductor element (such as a photomask, wafer or other semiconductor components) are contaminated. Then, in order to increase the airtightness of the container 1 , a sealing member 14 is provided between the cover body 10 and the carrying body 111 , which can prevent external pollutants from entering the container 1 and make the interior of the container 1 reach a high degree of cleanliness.

The bearing body 111 has an inner surface 1111 and a side wall 1112 , the side wall 1112 surrounds the periphery of the inner surface 1111 and forms an accommodating space. The locking mechanism of this embodiment is accommodated in the accommodating space, and includes two locking elements 121 and a driving element 122 . The two locking pieces 121 are symmetrically arranged on the inner surface 1111 of the carrying body 111, each locking piece 121 has a locking body 1211, one side of the locking body 1211 is provided with two fixing parts 1212, and the side of the carrying body 111 The wall 1112 has four perforations 1110, which correspond to the four fixing parts 1212 of the two locking pieces 121 respectively. However, the side wall of the cover body 10 is also provided with four locking parts 102 (see FIG. 1 ), and the four locking parts 102 correspond to the load bearing parts. The four through holes 1110 of the main body 111, so the four fixing parts 1212 of the two locking pieces 121 can pass through the two through holes 1110 of the carrying body 111 respectively, and are set on the corresponding locking parts 102 to lock the cover 10 on the carrying body 111 . The fixing part 1212 of this embodiment is a protrusion, and the locking part 102 corresponding to the fixing part 1212 is a groove. Just click and close, so I won't repeat them here.

Please also refer to FIG. 4 , which is a perspective view of the driving member of the first embodiment of the present invention. As shown in the figure, the driving element 122 is disposed on the inner surface 1111 of the bearing body 111 and located between the two locking elements 121 . The inner surface 1111 of the bearing body 111 has a pivot portion 1113 (see FIG. 3 ), the driving member 122 has a driving body 1221, the driving body 1221 has a first surface 12211 and a second surface 12212, and the first surface 12212 of the driving body 1221 A rotating shaft 1222 (see FIG. 2 ) is disposed on a surface 12211 . The rotating shaft 1222 is pivotally connected to the pivoting portion 1113 (see FIG. 3 ), so that the driving member 122 rotates on the supporting body 111 . In addition, the carrying body 111 is further provided with a bearing 1114, which is arranged on the pivot portion 1113. The rotation shaft 1222 is pivotally connected to the bearing 1114 to be pivotally connected to the pivot portion 1113. The bearing 1114 can reduce the number of connections between the pivot portion 1113 and the rotation shaft 1222 The friction between them enables the driving member 122 to rotate smoothly on the bearing body 111 .

Referring to FIG. 5 together, it is a perspective view of the locking member and the driving member of the first embodiment of the present invention. As shown in the figure, the driving member 122 has two guiding structures 1223 (refer to FIG. 2 ). The two guiding structures 1223 in this embodiment are respectively a protruding column, and the two guiding structures 1223 are protruded on the first surface of the driving body 1221. 12211, and extend from the rotating shaft 1222 to the periphery of the driving body 1221, and the other side of the locking body 1211 of each locking member 121 is further provided with a driving part 1213, and the two driving parts 1213 of the two locking parts 121 are respectively located in the driving Between the two guiding structures 1223 of the component 122 , the two guiding structures 1223 respectively abut against the corresponding driving parts 1213 .

The sealing plate 112 is fixedly locked under the bearing body 111, and against the second surface 12212 of the driving body 1221 of the driver 122, so that the driving member 122 is fixed between the inner surface 1111 of the bearing body 111 and the sealing plate 112 to fix The locking mechanism is inside the carrying body 111 . The rotating shaft 1222 of the driving member 122 in this embodiment is not fixed on the supporting body 111 by means of locking, so as to prevent the outer peripheral edge of the driving member 122 from generating a force opposite to the rotating shaft 1222, thereby avoiding the force from causing the driving member 122 Unstable when rotating.

Referring back to Fig. 3, the sealing plate 112 has two insertion holes 1121. The two insertion holes 1121 in this embodiment are respectively arc-shaped, and the driving body 1221 of the driving member 122 is further provided with two driving holes 1224. The second driving holes 1224 in this embodiment are respectively The drive body 122 penetrates into the corresponding guide structure 1223 , but does not penetrate the guide structure 1223 , so the drive hole 1224 is a blind hole, and the two insertion holes 1121 of the sealing plate 112 correspond to the two drive holes 1224 of the drive member 122 . When the driving member 122 is to be rotated, a pin 2 is inserted through the insertion hole 1121 and inserted into the second driving hole 1224 , and moves in the insertion hole 1121 to drive the driving member 122 to rotate.

When the driving part 122 rotates, the two guiding structures 1223 of the driving part 122 push the two driving parts 1213 of the two locking parts 121 to laterally displace the two locking parts 121 in the bearing body 111 . When the driving part 122 rotates counterclockwise, the two guiding structures 1223 push the two driving parts 1213 of the two locking parts 121, and the two locking parts 121 move to the two sides of the carrying body 111 respectively, so that the fixing part 1212 of each locking part 121 Move toward the locking portion 102 of the cover body 10 , and be clamped in the locking portion 102 to lock the carrying body 111 on the cover body 10 . When the driving part 122 rotates clockwise, the two guiding structures 1223 push the two driving parts 1213 of the two locking parts 121 to move toward the center of the carrying body 111, so that the fixing part 1212 of each locking part 121 is separated from the locking part of the cover body 10 102 , and then separate the cover body 10 from the carrying body 111 .

Referring to Fig. 3 again, in order to make the locking member 121 perform linear displacement, the carrying body 111 is further provided with two first stoppers 1115, and the two first stoppers 1115 are respectively located on both sides of the second locking member 121, so that the second locking member 121 The lateral movement is between the two first limiting members 1115 , that is, the two first limiting members 1115 are parallel to the moving direction of the two locking members 121 . However, the carrying body 111 is further provided with two second stoppers 1116, which are located on both sides of the driver 122, and the periphery of the drive body 1221 of the driver 122 is further provided with two stoppers 1225, and the two stoppers 1225 are respectively It is located between the two second limiting members 1116 . Please also refer to FIG. 6 , when the driving member 122 rotates, the two limiting members 1225 of the driving member 122 respectively move between the two second limiting members 1116 to limit the rotation angle of the driving member 122 . In addition, the inner surface 1111 of the bearing body 111 is further provided with two third limiting members 1117, and the locking body 1211 of each locking member 121 is further provided with a positioning hole 1214, and the two third limiting members 1117 are respectively located in the corresponding lock. The positioning holes 1214 of the fasteners 121 limit the positions of the two locking pieces 121 in the carrying body 111 in this way.

However, a plurality of support members 1118 are further provided in the carrying body 111, and these support members 1118 are arranged between the two first limiting members 1115, and are located below the second locking member 121, so as to support the second locking member 121 and make the second lock The firmware 121 is far away from the inner surface 1111 of the carrying body 111, reducing the contact area between the two locking elements 121 and the inner surface 1111 of the carrying body 111, thereby reducing the friction between the two locking elements 121 and the inner surface 1111 of the carrying body 111 when moving, The two locking components 121 can be smoothly displaced on the inner surface 1111 of the bearing body 111 .

Referring again to FIGS. 2 to 5 , the driving member 122 of this embodiment further includes two pressing portions 1226 , each pressing portion 1226 is a bump, and the pressing portion 1226 protrudes from the first surface 12211 of the driving body 1221 , The two pressing portions 1226 are respectively located between the two guiding structures 1223 . The pressing part 1226 has a guiding surface 12261. When the driving part 122 rotates counterclockwise, one side of each locking part 121 with the driving part 1213 abuts against the guiding surface 12261 of the corresponding pressing part 1226, and then As the driving part 122 rotates, the guiding surface 12261 abuts against the surface of the driving part 1213 and advances along the surface of the driving part 1213, so that the side of the locking part 121 with the driving part 1213 is lowered along the guiding surface 12261, and the lock One side of the fastener 121 having the fixing portion 1212 is raised, so that the fixing portion 1212 is clamped to the locking portion 102 of the cover body 10 , so that the container 1 has good airtightness. The side of the driving portion 1213 of each locking member 121 abutting against the pressing portion 1226 has an inclined surface 12111 , and the inclined surface 12111 is located on one side of the driving portion 1213 . The pressing portion 1226 is easy to move along the slope 12111 of the locking body 1211 to the surface of the driving portion 1213 and advance along the surface of the driving portion 1213 (see FIG. 5 ).

The driving body 1221 of the driving element 122 is further provided with two rolling elements 1227 , and the two rolling elements 1227 are embedded in the driving body 1221 and located below the pressing portion 1226 . When the driving part 122 rotates, the two rolling parts 1227 make the driving part 122 not directly contact with the sealing plate 112, that is, reduce the contact area between the driving part 122 and the sealing plate 112, so as to reduce the frictional force between the driving part 122 and the sealing plate 112 , and the two rolling elements 1227 roll along with the rotation of the driving element 122, so that the driving element 122 can rotate stably, thus reducing the chance of contamination particles due to the friction between the driving element 122 and the sealing plate 112, so as to avoid storage in the container 1 A problem arises that the semiconductor element 2 is contaminated. The rolling element 1227 in this embodiment is a bearing, and it can also be other elements, which will not be repeated here.

The second rolling member 1227 can make the driving member 122 rotate stably, but it will generate friction with the sealing plate 112 , and may also generate pollution particles in the container 1 to contaminate the semiconductor element 2 in the container 1 . Therefore, in this embodiment, a wear-resistant part 1122 for reducing friction is attached on the sealing plate 112. This wear-resistant part 1122 is located at the position where the sealing plate 112 and the second rolling element 1227 generate friction, reducing the friction between the second rolling element 1227 and the sealing plate. 112, and can reduce the chance of the two rolling elements 1227 wearing the sealing plate 112, and can further reduce the generation of pollution particles and avoid polluting the semiconductor element 2 in the container 1.

However, referring to FIG. 6 again, two connecting portions 1119 are further provided in the carrying body 111, and the two connecting portions 1119 are respectively located on one side of the corresponding locking member 121, and the locking body 1211 of each locking member 121 is further provided with a connecting portion 1215 , each connecting portion 1119 is connected to the corresponding connecting portion 1215 of the locking member 121 through an elastic element 13 . The two first stoppers 1115 of the bearing body 111 respectively have a gap 11151, and these gaps 11151 are for the corresponding elastic elements 13 to pass through, so that the height of the elastic element 13 is smaller than the thickness of the bearing body 111, so that the container 1 The sealing plate 112 can seal the carrier body 111 . It is defined here that when the two locking pieces 121 are locked to the locking portion 102 of the cover body 10, the position of the two locking pieces 121 is the original position. 121 moves toward the center of the carrying body 111 and is also resisted by the sides of the notch 11151 to restrict the locking member 121 from moving toward the center of the carrying body 111 . The elastic element 13 has elasticity due to its own material. When the elastic element 13 contacts the side of the opening 11151, the elastic element 13 is resisted by the notch 11151 to generate a restoring force. This restoring force makes the locking member 121 return to its original position. When 122 is not working normally, the elastic element 13 can return the locking member 121 to its original position, that is, the locking member 121 is locked to the locking portion 102 of the cover 10 to prevent the supporting body 111 from being separated from the cover 10 .

Please also refer to FIG. 7 , which is a schematic diagram of the elastic element of the first embodiment of the present invention. As shown in the figure, the elastic element 13 has a first portion 131 and a second portion 132 connected to the first portion 131 , and the second portion 132 of the elastic element 13 is inclined downward relative to the first portion 131 of the elastic element 13 . However, one end of the first portion 131 of the elastic element 13 is disposed on the connecting portion 1119 of the bearing body 111 , and one end of the second portion 132 of the elastic element 13 is disposed on the connecting portion 1215 of the locking member 121 . The second portion 132 of the elastic element 13 is inclined downward relative to the first portion 131 of the elastic element 13 to press against the locking body 1211 of the locking member 121 .

When the driving part 1213 of the locking part 121 is pressed by the pressing part 1226 of the driving part 122, the fixing part 1212 of the locking part 121 is lifted and locked on the locking part 102 of the cover body 10, and the second part of the elastic element 13 The portion 132 is inclined downward relative to the first portion 131 of the elastic element 13, so as to press against the locking body 1211 of the locking member 121, so that the fixing portion 1212 of the locking member 121 maintains a raised state and is locked to the locking portion of the cover body 10. 102, so that the container 1 has good airtightness.

Please refer to FIG. 8 and FIG. 9 , which are partial exploded views and perspective views of the container of the second embodiment of the present invention. As shown in the figure, in the above-mentioned embodiment, when the driving member 122 rotates, the driving member 122 is in contact with part of the surface of the driving portion 1213 of the locking member 121, so that the contact between the pressing portion 1226 of the driving member 122 and the surface of the driving portion 1213 Create friction. In order to reduce the friction generated between the driving part 122 and the driving part 1213, a rolling part 12110 is embedded in the frictional position between the driving part 1213 of each locking part 121 and the pressing part 1226 of the driving part 122, so that the driving part The guide surface 12261 of the pressing part 1226 of 122 is in contact with the rolling element 12110 of the driving part 1213 of the locking member 121, so as to reduce the contact area between the driving part 1213 and the pressing part 1226, thereby reducing the contact area between the driving part 1213 and the pressing part 1226. The friction generated between them, and avoid the generation of pollution particles in the container to contaminate the semiconductor components stored in the container.

When the driving part 122 rotates, the guiding surface 12261 of the pressing part 1226 of the driving part 122 is in contact with the rolling part 12110 of the driving part 1213 of the locking part 121, and the driving part 122 drives the rolling part 12110 to roll, and the rolling part 12110 is along the The guide surface 12261 rolls and moves, and the end of the guide surface 12261 has a positioning groove 12262. When the rolling element 12110 moves along the guiding surface 12261 to the positioning groove 12262, the positioning groove 12262 prevents the rolling element 12110 from moving And position the rolling element 12110 so that the fixing portion 1212 of the locking element 121 is locked to the locking portion of the cover body. The rolling element 12110 of this embodiment can roll on the guiding surface 12261, so as to reduce the friction between the rolling element 12110 and the guiding surface 12261, so that the driving element 122 can smoothly drive the locking element 121 to move into the bearing body 111, and make the The locking mechanism can operate smoothly, so that the container can be opened and closed smoothly. The rolling element 12110 in this embodiment is a bearing, and it can also be other components, which will not be repeated here. The rolling elements 12110 of this embodiment can also be used in the structure in which the driving element 122 is locked to the bearing body 111 , and details are not repeated here.

To sum up, the present invention provides a container for storing semiconductor components, the cover body of which is fixed to the carrier body through the locking mechanism provided in the carrier body to seal the container and prevent external pollutants from entering the container. However, the locking mechanism of the present invention is composed of at least one locking piece and a driving piece. The locking piece and the driving piece are arranged on the carrying body, and the driving piece is fixed in the carrying body by means of a sealing plate against the driving piece instead of using screws. The locking method is fixed, so that the driving member can rotate stably. However, the driving part is provided with two rolling parts, and the two rolling parts reduce the contact area between the driving part and the sealing plate, so as to avoid the friction between the driving part and the sealing plate to produce pollution particles in the container, so as to prevent the semiconductor elements stored in the container from being polluted; and Wear-resistant parts are attached to the contact position between the sealing plate and the second rolling element, so as to reduce the generation of pollution particles caused by the friction between the second rolling element and the sealing plate, and further reduce the chance of generating pollution particles in the container.

In addition, each locking piece of the locking mechanism of the present invention is provided with a rolling element, and the rolling piece is in contact with the driving piece, thus reducing the contact area between the driving piece and the locking piece, and avoiding the friction between the driving piece and the locking piece to cause pollution particles in the container In order to prevent the semiconductor components stored in the container from being polluted; while the rolling element rolls with the rotation of the driving element, and reduces the friction generated by contact with the driving element, so that the driving element can smoothly drive the locking element to move on the bearing Inside the body, so that the locking mechanism can operate smoothly, so that the container can be opened and closed smoothly.

Claims (21)

1. A container for storing semiconductor elements, characterized in that it comprises: A carrying body, its side wall has at least one perforation, it is to comprise: At least one locking piece is arranged in the carrying body. The locking piece includes a locking body, at least one fixing part and a driving part. The fixing part is arranged on one side of the locking body and corresponds to the through hole. The driving part disposed on the other side of the locking body; and a driving member pivotally arranged in the bearing body and abutting against the driving part; a plate, fixedly locked under the bearing body, and against the driving part on the bearing body; and a cover body, which is arranged above the bearing body, the side wall of the cover body has at least one locking part, and the locking part corresponds to the through hole; Wherein, when the driving part rotates, the driving part drives the locking part to displace in the bearing body, and the fixing part of the locking part passes through the through hole of the supporting body and is arranged on the locking part to fix the cover Body on the carrier body. 2. The container for storing semiconductor elements as claimed in claim 1, further comprising: A wear-resistant part is provided with the sealing plate and corresponds to the driving part. 3. The container for storing semiconductor elements as claimed in claim 1, further comprising: A sealing element is arranged between the cover body and the bearing body. 4. The container for storing semiconductor components as claimed in claim 1, wherein the carrying body further comprises: At least one supporting piece is arranged in the bearing body and is located below the locking piece to support the locking piece. 5. The container for storing semiconductor components as claimed in claim 1, wherein the carrying body further comprises: Two first limiting parts are arranged in the carrying body, are respectively located on both sides of the locking piece, and are parallel to the moving direction of the locking piece. 6. The container for storing semiconductor components as claimed in claim 1, wherein the carrying body further comprises: Two second limiting parts are arranged in the carrying body, and are respectively located between the two limiting parts of the driving part, and the two limiting parts respectively move between the two second limiting parts. 7. The container for storing semiconductor components as claimed in claim 1, wherein the carrying body further comprises: At least one third limiting member is arranged in the carrying body and passes through a positioning hole of the locking body. 8. The container for storing semiconductor elements as claimed in claim 1, further comprising: An elastic element, one end of which is connected to a connecting portion of the carrying body, and the other end of which is connected to a connecting portion of the locking piece. 9. The container for storing semiconductor elements as claimed in claim 8, wherein the elastic element has a first portion and a second portion, and one end of the first portion is connected to the connection of the carrying body part, one end of the second part is connected to the connecting part of the locking member, and the second part is inclined relative to the first part. 10. The container for storing semiconductor components as claimed in claim 1, wherein the driving member comprises: A driving body has a first surface and a second surface corresponding to the first surface, the first surface is in contact with the locking member, and the second surface is in contact with the sealing plate; and A rotating shaft is arranged on the first surface of the driving body, and the rotating shaft is pivotally arranged on a pivot portion of the bearing body. 11. The container for storing semiconductor elements as claimed in claim 10, wherein the driver further comprises: At least one rolling element is embedded in the driving body and contacts with the sealing plate. 12. The container for storing semiconductor components as claimed in claim 11, wherein the rolling member is a bearing. 13. The container for storing semiconductor components as claimed in claim 10, wherein the carrying body further comprises: A bearing is arranged on the pivot joint, and the rotating shaft is pivotally arranged on the bearing. 14. The container for storing semiconductor elements as claimed in claim 10, wherein the driving member further comprises: At least one guiding structure protrudes from the first surface of the driving body, extends from the rotating shaft to the periphery of the driving body, and abuts against the driving portion of the locking member. 15. The container for storing semiconductor components as claimed in claim 10, wherein the sealing plate further comprises: At least one insertion hole corresponds to at least one driving hole of the driving body, and at least one pin passes through, and the pin passes through the insertion hole and is inserted into the driving hole, and moves in the insertion hole to rotate the driving member. 16. The container for storing semiconductor elements as claimed in claim 10, wherein the driving member further comprises: At least one pressing portion protrudes from the first surface of the driving body to press against the surface of the driving portion. 17. The container for storing semiconductor elements as claimed in claim 16, wherein the surface of the pressing portion corresponding to the driving portion is a guiding surface, and the side of the locking piece having the driving portion is along the The guide surface is used for lifting. 18. The container for storing semiconductor elements as claimed in claim 17, further comprising: The two rolling elements are respectively embedded in the corresponding driving portion of the locking element, and abut against the corresponding guiding surface of the pressing portion. 19. The container for storing semiconductor components as claimed in claim 18, wherein the end of the guiding surface further has a positioning groove, and the rolling element is disposed in the positioning groove. 20. The container for storing semiconductor components as claimed in claim 18, wherein each rolling member is a bearing. 21. The container for storing semiconductor devices as claimed in claim 17, wherein one side of the driving part has an inclined surface, and the inclined surface is in contact with the guiding surface of the pressing part.

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