CN202585366U

CN202585366U - Containers for storing semiconductor components

Info

Publication number: CN202585366U
Application number: CN 201220120649
Authority: CN
Inventors: 古震维; 王圣元; 李承儒
Original assignee: Gudeng Precision Industrial Co Ltd
Current assignee: Gudeng Precision Industrial Co Ltd
Priority date: 2012-03-26
Filing date: 2012-03-26
Publication date: 2012-12-05
Anticipated expiration: 2022-03-26

Abstract

The utility model relates to a container for storing semiconductor components, which includes a carrier body and a cover body. At least one locking component and a driving component are further provided in the carrier body, and the locking component is further provided with a rolling component, which contacts the driving component. When the driving component rotates, the driving component drives the locking component to move in the carrier body, and the fixing part of the locking component moves toward the locking part of the cover body, and the fixing part is arranged on the locking part to lock the cover body on the carrier body. In addition, the rolling component reduces the contact area between the locking component and the driving component, which can reduce the friction between the locking component and the driving component, avoid the generation of polluted particles in the container and cause the semiconductor components stored in the container to be contaminated, thereby achieving high cleanliness in the container.

Description

Be used to deposit the container of semiconductor element

Technical field

The utility model relates to a kind of container, is meant a kind of container that is used to deposit semiconductor element especially.

Background technology

Modern advanced wafer foundry or semiconductor manufacturing factory are constantly broken through on the wafer manufacturing technology, have reached 90 processing procedures below the rice how at present, along with the processing procedure live width dwindle the raising with the element integration, the component number that can make in the unit wafer increases.But the semiconductor element of these high integration descends for the tolerance of pollutant; Even if the pollutant of denier (particulate, dust, organic substance, gas or volatile matter etc.) all can cause the defective of semiconductor element; Even make semiconductor element receive electrostatic interference and short circuit causes damage.

In general manufacture of semiconductor, dust free room is provided all) environment to avoid airborne particle contamination.And the process that semiconductor element transports also must be avoided polluting, and therefore the container of protection need be provided one by one, avoids polluting the bogey of semiconductor element.

In order effectively to reduce the injury that semiconductor element may cause when transporting or store, there are many technology to be directed against the structure in the container at present and are used for the interior locked mechanism of container and improve, hope can improve the protection to the bearing semiconductor element.In the operating system at standard mechanical interface, the latch of board can insert the actuator in the locked mechanism in the container, opens entire operation in order to carry out container.

And convention is used for being easy to generate friction between each member of locked mechanism of container; Unstable when not only making the locked mechanism running; And then make container can't open entire operation swimmingly, even produce contamination particle in container, and then pollute and deposit in the semiconductor element in the container.

In order to solve the above problems; This is novel to provide a kind of container that is used to deposit semiconductor element, and the locked mechanism in the container is to have at least one locking part one actuator, and on locking part, is embedded a rolling member; So reduce the area that locking part contacts with actuator; Can reduce locking part and actuator and produce friction, avoid in container, producing contamination particle and the semiconductor element of depositing in the container is polluted, and then make and reach noble and unsullied degree in the container.

The utility model content

The purpose that this is novel is to provide a kind of container that is used to deposit semiconductor element, and it comprises a locked mechanism; Locked mechanism has an at least one locking part and an actuator, and locking part is embedded a rolling member, and rolling member contacts with actuator; So reduce the area that locking part contacts with actuator; Can reduce locking part and actuator and produce friction, avoid in container, producing contamination particle and the semiconductor element of depositing in the container is polluted, and then make and reach noble and unsullied degree in the container.Rolling member rotates with person's actuator and rolls in addition, and effectively the frictional force between minimizing and actuator can operate locked mechanism swimmingly, and then makes container can open entire operation swimmingly.

This is novel to provide a kind of container that is used to deposit semiconductor element, is to comprise: one carries body, and its sidewall has at least one perforation, and it is to comprise; At least one locking part; It is arranged in this carrying body; This locking part comprises locking body, an at least one fixed part, a drive division and a rolling member, and this fixed part is arranged at a side of this locking body, and to should the locking part; This drive division is arranged at the opposite side of this locking body, and this rolling member is embedded at this drive division; And an actuator, it is arranged in this carrying body, and is connected to this drive division, and contacts with this rolling member of this locking part; And a cover body, covering at the outside of this carrying body, the sidewall of this cover body has at least one locking part, and this locking part is to boring a hole; Wherein, when this actuator rotation, this actuator drives this locking part and carries the body intrinsic displacement in this, and this fixed part of this locking part passes this perforation of this carrying body and is arranged at this locking part, carries body with fixing this cover body in this.

Wherein, more comprise:

One seal is arranged between this cover body and this carrying body.

The container that is used to deposit semiconductor element as claimed in claim 1 is characterized in that, wherein this carrying body more comprises:

At least one strutting piece is provided with and should carries in the body, and be positioned at the below of this locking part, to support this locking part.

Wherein, wherein this carrying body more comprises:

2 first locating parts are provided with and should carry in the body, and lay respectively at the both sides of this locking part, and parallel with the moving direction of this locking part.

Wherein, wherein this carrying body more comprises:

2 second locating parts are provided with and should carry in the body, and lay respectively between two locating parts of this actuator, and this two locating part is active in respectively between this 2 second locating part.

Wherein, wherein this carrying body more comprises:

At least one the 3rd locating part is provided with and should carries in the body, and is arranged in a location hole of this locking body.

Wherein, more comprise:

One flexible member, the one of which end is connected in a junction of this carrying body, and its other end is connected in a junction of this locking part.

Wherein, wherein this flexible member has one first one and one second one, and this end of first one is connected in this connecting portion of this carrying body, and this end of second one is connected in this connecting portion of this locking part, and this second one with respect to this first inclination.

Wherein, wherein this actuator is to comprise:

One drives body, has a first surface and reaches and the corresponding second surface of this first surface, and this first surface contacts with this locking part; And

One rotating shaft is arranged at this first surface of this driving body, and this rotating shaft is arranged at an articulated section of this carrying body.

Wherein, wherein this carrying body more comprises:

One bearing is arranged at this articulated section, and this rotating shaft is arranged at this bearing.

Wherein, wherein this actuator more comprises:

At least one guiding structural is convexly set in this first surface of this driving body, and extends from periphery that this axial rotary should drive body, and connects with a drive division of this locking body.

Wherein, more comprise:

One shrouding, admittedly lock in this carrying body below, and cover this locking part and this actuator.

Wherein, wherein this shrouding more comprises:

At least one patchhole to should driving at least one perforation of body, and supplies at least one latch to pass, and this latch passes this patchhole and inserts this perforation, and is displaced in this patchhole, to rotate this actuator.

Wherein, wherein this actuator more comprises:

At least one pressure section is convexly set in this first surface of this driving body, and contacts with this rolling member.

Wherein, wherein this pressure section is a guiding face to surface that should drive division, and this locking part has a side of this drive division and goes up and down along this inclined-plane, and this rolling member is connected to this guiding face of this pressure section.

Wherein, wherein the end of this guiding face has a location groove, and this rolling member is arranged in this detent.

Wherein, wherein this rolling member is a bearing.

Wherein, wherein this actuator is locked in this carrying body.

Wherein, wherein this actuator is hubbed in this carrying body.

Wherein, wherein this actuator is hubbed in this carrying body, and this shrouding locks in this carrying body below admittedly, and props up this actuator on this carrying body.

Wherein, more comprise:

One wearing piece is provided with this shrouding, and to should actuator.

Wherein, wherein this actuator more comprises:

At least one rolling member is embedded at this driving body, and contacts with this shrouding.

Wherein, wherein this rolling member is a bearing.

The beneficial effect of the utility model:

This is novel to provide a kind of container that is used to deposit semiconductor element, its cover body to see through to be arranged at and carries intrinsic locked mechanism and be fixed in the carrying body, with airtight container and prevent that outside pollutant from getting in the container.And this novel locked mechanism is by at least one locking part and actuator collocation; Locking part and actuator are arranged at the carrying body; So utilize mode fixed drive part that shrouding props up actuator in carrying body, but not utilize the screws mode to fix, actuator can stably be rotated.Right actuator is provided with two rolling members, and the area that two rolling members minimizing actuator contacts with shrouding is avoided the friction of actuator and shrouding and produced contamination particle in container, is polluted with the semiconductor element that prevents to deposit in the container; And more attach wearing piece in shrouding and two rolling member position contacting, and so reduce two rolling members and shrouding friction and produce contamination particle, more can be reduced to the chance of generation contamination particle in the container.

In addition; Each locking part of the locked mechanism that this is novel is provided with a rolling member; Rolling member contacts with actuator; So reduce the area that actuator contacts with locking part, avoid actuator and locking part generation friction and produce contamination particle in container, polluted with the semiconductor element that prevents to deposit in the container; And rolling member is to rotate and roll along with actuator; And minimizing contacts the frictional force that is produced with actuator; Make actuator can drive the locking part displacement swimmingly in carrying body,, and then make container can open entire operation swimmingly so that locked mechanism can operate swimmingly

Description of drawings

Fig. 1 is the exploded view of the container of this first novel embodiment;

Fig. 2 is the part exploded view of the container of this first novel embodiment;

Fig. 3 is another part exploded view of the container of this first novel embodiment;

Fig. 4 is the stereogram of the actuator of this first novel embodiment;

Fig. 5 is the locking part of this first novel embodiment and the stereogram of actuator;

Fig. 6 is the stereogram of the carrying body of this first novel embodiment;

Fig. 7 is the sketch map of the flexible member of this first novel embodiment;

Fig. 8 is the part exploded view of the container of this second novel embodiment; And

Fig. 9 is the locking part of this second novel embodiment and the stereogram of actuator.

[figure number is to as directed]

1 container, 10 cover bodies

Body is carried in 102 locking parts 111

1110 perforation, 1111 inner surfaces

1112 sidewalls, 1113 articulated sections

1114 bearings, 1,115 first locating parts

11151 breach, 1,116 second locating parts

1117 the 3rd locating parts, 1118 strutting pieces

1119 connecting portions, 112 shroudings

1121 patchholes, 1122 wearing pieces

121 locking parts, 1211 locking bodies

12110 rolling members, 12111 inclined-planes

1212 fixed parts, 1213 drive divisions

1214 location holes, 1215 connecting portions

122 actuators 1221 drive body

12211 first surfaces, 12212 second surfaces

1222 rotating shafts, 1223 guiding structurals

1224 drive holes, 1225 locating parts

1226 pressure sections, 12261 guiding faces

12262 detents, 1227 rolling members

131 first ones of 13 flexible members

132 second 14 seals

2 latches

Embodiment

For making architectural feature of the utility model and the effect of being reached there are further understanding and understanding, cooperate detailed explanation, explain as follows in order to preferred embodiment and accompanying drawing:

Convention is used for being easy to generate friction between each member of locked mechanism of container; Unstable when not only making the locked mechanism running; And then make container can't open entire operation swimmingly, even produce contamination particle in container, and then pollute and deposit in the semiconductor element in the container.Because the problems referred to above, basis is novel to provide a kind of container that is used to deposit semiconductor element, and can improve the problems referred to above.

Seeing also Fig. 1, Fig. 2 and Fig. 3, is the exploded view and the part exploded view of the container of this first novel embodiment.As shown in the figure; Present embodiment provides a kind of container 1 that is used to deposit semiconductor element; Container 1 comprises a cover body 10, and carries a body 111 and a shrouding 112 (seeing also Fig. 2 and Fig. 3); The outer surface that carries body 111 carries at least one semiconductor element, and cover body 10 covers on the outer surface that carries body 111 bearing semiconductor elements.And carry in the body 111 and be provided with a locked mechanism, shrouding 112 props up locked mechanism, with fixing locked mechanism in carrying body 111.Cover body 10 sees through locked mechanism and is fixed on the carrying body 111; Container 1 is sealed fully; And then prevent that outside pollutant from getting in the container 1, polluted with at least one semiconductor element (for example: light shield, wafer or other semiconductor elements) of avoiding depositing in the container 1.Then,, more a seal 14 is set, can prevents that outside pollutant from getting in the container 1, makes container 1 inside reach noble and unsullied degree in cover body 10 and 111 of bodies of carrying in order to increase the sealing of container 1.

Carry body 111 and have an inner surface 1111 and a sidewall 1112, sidewall 1112 is around the periphery of inner surface 1111, and forms an accommodation space.And the locked mechanism of present embodiment is placed in the accommodation space, and comprises two locking parts 121 and an actuator 122.Two locking parts 121 are arranged on the inner surface 1111 that carries body 111 symmetrically, and each locking part 121 has a locking body 1211, and a side of locking body 1211 is provided with two fixed parts 1212; And the sidewall 1112 that carries body 111 has four perforation 1110; And four fixed parts 1212 of corresponding two locking parts 121 of difference, right, the sidewall of cover body 10 also is provided with four locking parts 102 (seeing also Fig. 1); 102 corresponding four perforation 1110 of carrying body 111 of four locking parts; So four fixed parts 1212 of two locking parts 121 can pass two perforation 1110 of carrying body 111 respectively, and are arranged at corresponding locking part 102, to lock cover body 10 on carrying body 111.The fixed part 1212 of present embodiment is a male member, and the locking part 102 of corresponding fixed part 1212 is a groove, and this is merely this novel embodiment, fixed part 1212 can be other structures with locking part 102 and reach mutual engage get final product, repeat no more in this.

Please consulting Fig. 4 in the lump, is the stereogram of the actuator of this first novel embodiment.As shown in the figure, actuator 122 is arranged on the inner surface 1111 that carries body 111, and between two locking parts 121.The inner surface 1111 that carries body 111 has an articulated section 1113 (seeing also Fig. 3); Actuator 122 has one and drives body 1221; Drive body 1221 and have a first surface 12211 and a second surface 12212; The first surface 12211 that drives body 1221 is provided with a rotating shaft 1222 (seeing also Fig. 2), and rotating shaft 1222 is articulated in articulated section 1113 (seeing also Fig. 3), actuator 122 is rotated in carry on the body 111.In addition; Carry body 111 and more be provided with a bearing 1114; And being arranged at articulated section 1113, rotating shaft 1222 is articulated in bearing 1114, to articulate with articulated section 1113; Bearing 1114 is the frictions that can reduce 1222 on articulated section 1113 and rotating shaft, actuator 122 can be rotated on swimmingly carry on the body 111.

Consulting Fig. 5 more in the lump, is the locking part of this first novel embodiment and the stereogram of actuator.As shown in the figure; Actuator 122 has two guiding structurals 1223 (consulting Fig. 2); Two guiding structurals 1223 of present embodiment are respectively a projection; Two guiding structurals 1223 are convexly set in the first surface 12211 that drives body 1221, and extend to the periphery that drives body 1221 from rotating shaft 1222 respectively, and the opposite side of the locking body 1211 of each locking part 121 more is provided with a drive division 1213; Two drive divisions 1213 of two locking parts 121 lay respectively between two guiding structurals 1223 of actuator 122, and two guiding structurals 1223 are connected to corresponding drive division 1213 respectively.

Shrouding 112 locks in admittedly and carries body 111 belows; And prop up the second surface 12212 of the driving body 1221 of actuator 122; Actuator 122 is fixed in carries between the inner surface 1111 and shrouding 112 of body 111, with fixing locked mechanism in carrying body 111.The rotating shaft 1222 non-utilization locking modes of the actuator 122 of present embodiment are fixed in carries on the body 111; So avoid the outer peripheral edges of actuator 122 to produce and rotating shaft 1222 opposite effect power, and then avoid this active force unstable when rotating by actuator 122.

Consult Fig. 3 again; Shrouding 112 has two patchholes 1121, and two patchholes 1121 of present embodiment are arcuation respectively, and the driving body 1221 of actuator 122 more is provided with two drive holes 1224; Present embodiment two drive holes 1224 run through respectively in the guiding structural 1223 that drives body 122 to correspondence; But do not run through guiding structural 1223, so drive hole 1224 is a blind hole, and two drive holes 1224 of two patchholes, the 1121 corresponding actuators 122 of shrouding 112.When desiring rotary drive 122, a latch 2 inserts from patchhole 1121, and inserts two drive holes 1224, and in patchhole 1121, moves, to drive actuator 122 rotations.

When actuator 122 rotations, two guiding structurals 1223 of actuator 122 promote two drive divisions 1213 of two locking parts 121, make two locking parts, 121 lateral displacements in carrying body 111.When actuator 122 is rotated counterclockwise; Two guiding structurals 1223 promote two drive divisions 1213 of two locking parts 121; Two locking parts 121 are respectively toward two side shiftings of carrying body 111; The fixed part 1212 of each locking part 121 is moved toward the locking part 102 of cover body 10, and be arranged in the locking part 102, carry body 111 on cover body 10 with locking.When actuator 122 turns clockwise; Two drive divisions 1213 that two guiding structurals 1223 promote two locking parts 121 move to carrying body 111 centers; Make the fixed part 1212 of each locking part 121 break away from the locking part 102 of cover body 10, and then cover body 10 is separated with carrying body 111.

Consult Fig. 3 again; Make linear displacement in order to make locking part 121; Carry body 111 and more be provided with 2 first locating parts 1115; 2 first locating parts 1115 lay respectively at the both sides of two locking parts 121, and two locking parts 121 laterally are displaced between 2 first locating parts 1115, and promptly 2 first locating parts 1115 are parallel to the moving direction of two locking parts 121.So, carry body 111 and more be provided with 2 second locating parts 1116, and be positioned at the both sides of actuator 122, and the periphery of the driving body 1221 of actuator 122 more is provided with two locating parts, 1225, two locating parts 1225 and lays respectively between 2 second locating parts 1116.Please consult Fig. 6 in the lump, when actuator 122 rotations, two locating parts 1225 of actuator 122 are active in respectively between 2 second locating parts 1116, with the anglec of rotation of restriction actuator 122.In addition; The inner surface 1111 that carries body 111 more is provided with 2 the 3rd locating parts 1117; And the locking body 1211 of each locking part 121 more is provided with a location hole 1214; 2 the 3rd locating parts 1117 lay respectively in the location hole 1214 of corresponding locking part 121, so limit the position of two locking parts 121 in carrying body 111.

So; Carry in the body 111 and more be provided with plural strutting piece 1118; Those strutting pieces 1118 are arranged between 2 first locating parts 1115, and are positioned at two locking parts, 121 belows, to support two locking parts 121; And make two locking parts 121 away from the inner surface 1111 that carries body 111; Reduce the area that two locking parts 121 contacts with the inner surface 1111 that carries body 111, so reduce two locking parts 121 when moving with the frictional force of 1111 of the inner surfaces of carrying body 111, make two locking parts 121 swimmingly displacement on the inner surface 1111 of carrying body 111.

Consult Fig. 2-5 again, the actuator 122 of present embodiment more comprises two pressure sections 1226, and each pressure section 1226 is a projection, and pressure section 1226 is that two pressure sections 1226 lay respectively between two guiding structurals 1223 from first surface 12211 convexities of driving body 1221.And pressure section 1226 has a guiding face 12261; When actuator 122 was rotated counterclockwise, the side that each locking part 121 has a drive division 1213 was connected to the guiding face 12261 of corresponding pressure section 1226, along with actuator 122 rotates; Guiding face 12261 is connected to the surface of drive division 1213; And advance along the surface of drive division 1213, a side that makes locking part 121 have drive division 1213 reduces along guiding face 12261, and locking part 121 has a side lifting of fixed part 1212; So that fixed part 1212 is arranged in the locking part 102 of cover body 10, and then make container 1 have good air-tightness.Have an inclined-plane 12111 and the drive division 1213 of each locking part 121 is connected to a side of pressure section 1226, inclined-plane 12111 is positioned at a side of drive division 1213.Pressure section 1226 moves to advance on the surface of drive division 1213 and along the surface of drive division 1213 (seeing also Fig. 5) easily along the inclined-planes 12111 of locking body 1211.

It is to be embedded to drive body 1221 that the driving body 1221 of actuator 122 more is provided with two rolling members, 1227, two rolling members 1227, and is positioned at the below of pressure section 1226.When actuator 122 rotations; Two rolling members 1227 are that actuator 122 is not directly contacted with shrouding 112; Promptly reduce the area that actuator 122 contacts with shrouding 112; Reducing the frictional force of

actuator

122 and 112 of shroudings, and two rolling members 1227 rotate along with actuator 122 and roll, and actuator 122 can stably be rotated; The chance that producing contamination particle because of actuator 122 and shrouding 112 frictions that reduces like this receives the pollution problems generation with the semiconductor element of avoiding depositing in the container 12.The rolling member 1227 of present embodiment is a bearing, also can be other elements, repeats no more in this.

Two rolling members 1227 can make actuator 122 do rotation stably, can produce friction with shrouding 112, also generation contamination particle and pollute the semiconductor element 2 in the container 1 in container 1 in possibly.Therefore present embodiment is on shrouding 112, to attach a wearing piece 1122 that is used to reduce friction; This wearing piece 1122 is positioned at shrouding 112 and two rolling members 1227 produce the position that rubs; Reduce the friction of 112 of two rolling members 1227 and shroudings; And can reduce the chance of two rolling members 1227 wearing and tearing shroudings 112, more can reduce the generation of contamination particle and avoid polluting the semiconductor element 2 in the container 1.

So; Consult Fig. 6 again; Carry in the body 111 and more be provided with two connecting portions 1119; Two connecting portions 1119 lay respectively at a side of corresponding locking part 121, and the locking body 1211 of each locking part 121 more is provided with a junction 1215, and each connecting portion 1119 sees through the connecting portion 1215 that a flexible member 13 connects corresponding locking part 121.And 2 first locating parts 1115 that carry body 111 have a breach 11151 respectively; Those breach 11151 are to supply corresponding elastic element 13 to pass; The height that makes flexible member 13 is less than the thickness that carries body 111, to let the shrouding 112 salable carrying bodies 111 of container 1.When this limits two locking parts 121 and is locked in the locking part 102 of cover body 10; The position of two locking parts 121 is the home position; When two locking parts 121 move toward carrying body 111 centers; Flexible member 13 is kept out by the side of breach 11151 also along with locking part 121 moves toward carrying body 111 centers, move toward carrying body 111 centers with limited lock firmware 121.Flexible member 13 has elasticity because of material own, and when the side of flexible member 13 contact breach 11151, flexible member 13 is kept out by breach 11151 and produced a restoring force; This restoring force makes locking part 121 answer home positions; So, when actuator 122 not during normal operation, flexible member 13 can make locking part 121 answer home positions; Be the locking part 102 that locking part 121 is locked in cover body 10, to prevent that carrying body 111 breaks away from cover body 10.

Please consulting Fig. 7 in the lump, is the sketch map of the flexible member of this first novel embodiment.As shown in the figure, flexible member 13 has one first one 131 and reaches one second one 132 that is connected with first one 131, and first one 131 of second one 132 relative resilient element 13 of flexible member 13 is downward-sloping.So, an end of first one 131 of flexible member 13 is arranged at the connecting portion 1119 that carries body 111, and an end of second one 132 of flexible member 13 is arranged at the connecting portion 1215 of locking part 121.And first one 131 of second one 132 relative resilient element 13 of flexible member 13 is downward-sloping, to press on the locking body 1211 of locking part 121.

When the drive division 1213 of locking part 121 is compressed by the pressure section 1226 of actuator 122; Make fixed part 1212 liftings of locking part 121 and be locked in the locking part 102 of cover body 10; And first one 131 of second one 132 relative resilient element 13 of flexible member 13 is downward-sloping; To press on the locking body 1211 of locking part 121, make the fixed part 1212 of locking part 121 keep the lifting state and be locked in the locking part 102 of cover body 10, and then make container 1 have good air-tightness.

Seeing also Fig. 8 and Fig. 9, is the part exploded view and the stereogram of the container of this second novel embodiment.As shown in the figure, in the foregoing description, when actuator 122 rotation, actuator 122 contact with the part surface of the drive division 1213 of locking part 121, makes that generation rubs between the surface of pressure section 1226 and drive division 1213 of actuator 122.In order to reduce the friction that is produced between actuator 122 and the drive division 1213; Therefore be embedded a rolling member 12110 in the position that the pressure section 1226 of the drive division 1213 of each locking part 121 and actuator 122 produces friction; So the guiding face 12261 of the pressure section 1226 of actuator 122 contacts with the rolling member 12110 of the drive division that is positioned at locking part 121 1213; To reduce the area that drive division 1213 contacts with pressure section 1226; And then reduce the friction that is produced between drive division 1213 and the pressure section 1226, and avoid producing contamination particle in container and the semiconductor element in the container is deposited in pollution.

When actuator 122 rotations; The guiding face 12261 of the pressure section 1226 of actuator 122 contacts with the rolling member 12110 of the drive division that is positioned at locking part 121 1213; Actuator 122 drives rolling member 12110 and rolls; Rolling member 12110 is to roll and move along guiding face 12261, and the end of guiding face 12261 has a location groove 12262, when rolling member 12110 when guiding face 12261 moves to detent 12262; Detent 12262 is to stop that rolling member 12110 moves and positioning and rolling spare 12110, makes the fixed part 1212 of locking part 121 be locked in the locking part of cover body.The rolling member 12110 of present embodiment can roll in guiding face 12261; To reduce the frictional force of 12261 of rolling member 12110 and guiding faces; Make actuator 122 can drive locking part 121 displacements swimmingly in carrying body 111; And locked mechanism can be operated swimmingly, and then make container can open entire operation swimmingly.The rolling member 12110 of present embodiment is a bearing, also can be other elements, repeats no more in this.Those rolling members 12110 of present embodiment also can be used for actuator 122 and are locked in the structure of carrying body 111, repeat no more in this.

In sum, this is novel to provide a kind of container that is used to deposit semiconductor element, its cover body to see through to be arranged at and carries intrinsic locked mechanism and be fixed in the carrying body, with airtight container and prevent that outside pollutant from getting in the container.And this novel locked mechanism is by at least one locking part and actuator collocation; Locking part and actuator are arranged at the carrying body; So utilize mode fixed drive part that shrouding props up actuator in carrying body, but not utilize the screws mode to fix, actuator can stably be rotated.Right actuator is provided with two rolling members, and the area that two rolling members minimizing actuator contacts with shrouding is avoided the friction of actuator and shrouding and produced contamination particle in container, is polluted with the semiconductor element that prevents to deposit in the container; And more attach wearing piece in shrouding and two rolling member position contacting, and so reduce two rolling members and shrouding friction and produce contamination particle, more can be reduced to the chance of generation contamination particle in the container.

In addition; Each locking part of the locked mechanism that this is novel is provided with a rolling member; Rolling member contacts with actuator; So reduce the area that actuator contacts with locking part, avoid actuator and locking part generation friction and produce contamination particle in container, polluted with the semiconductor element that prevents to deposit in the container; And rolling member is to rotate and roll along with actuator; And minimizing contacts the frictional force that is produced with actuator; Make actuator can drive the locking part displacement swimmingly in carrying body,, and then make container can open entire operation swimmingly so that locked mechanism can operate swimmingly.

Claims

1. A container for storing semiconductor elements, characterized in that it comprises:

A carrying body, the side wall of which has at least one perforation, which comprises;

At least one locking piece is arranged in the bearing body. The locking piece includes a locking body, at least one fixing part, a driving part and a rolling part. The fixing part is arranged on one side of the locking body and corresponds to the a locking part, the driving part is arranged on the other side of the locking body, and the rolling element is embedded in the driving part; and

a driving part is arranged in the bearing body, abuts against the driving part, and contacts with the rolling part of the locking part; and

A cover body, which is arranged on the outside of the bearing body, the side wall of the cover body has at least one locking part, and the locking part corresponds to the through hole;

Wherein, when the driving part rotates, the driving part drives the locking part to displace in the bearing body, and the fixing part of the locking part passes through the through hole of the supporting body and is arranged on the locking part to fix the cover body on the carrier body.

2. The container for storing semiconductor elements as claimed in claim 1, further comprising:

A sealing element is arranged between the cover body and the bearing body.

3. The container for storing semiconductor components as claimed in claim 1, wherein the carrying body further comprises:

At least one supporting piece is arranged in the bearing body and is located below the locking piece to support the locking piece.

4. The container for storing semiconductor components as claimed in claim 1, wherein the carrying body further comprises:

Two first limiting parts are arranged in the bearing body, are respectively located on both sides of the locking piece, and are parallel to the moving direction of the locking piece.

5. The container for storing semiconductor components as claimed in claim 1, wherein the carrying body further comprises:

Two second limiting parts are arranged in the bearing body and respectively located between the two limiting parts of the driving part, and the two limiting parts move between the two second limiting parts respectively.

6. The container for storing semiconductor components as claimed in claim 1, wherein the carrying body further comprises:

At least one third limiting member is arranged in the carrying body and passes through a positioning hole of the locking body.

7. The container for storing semiconductor elements as claimed in claim 1, further comprising:

An elastic element, one end of which is connected to a connecting portion of the carrying body, and the other end of which is connected to a connecting portion of the locking member.

8. The container for storing semiconductor elements as claimed in claim 7, wherein the elastic element has a first portion and a second portion, and one end of the first portion is connected to the connection of the carrying body part, one end of the second part is connected to the connecting part of the locking member, and the second part is inclined relative to the first part.

9. The container for storing semiconductor components as claimed in claim 1, wherein the driving member comprises:

A driving body has a first surface and a second surface corresponding to the first surface, the first surface is in contact with the locking piece; and

A rotating shaft is arranged on the first surface of the driving body, and the rotating shaft is arranged on a pivot portion of the bearing body.

10. The container for storing semiconductor components as claimed in claim 9, wherein the carrying body further comprises:

A bearing is arranged on the pivot joint, and the rotating shaft is arranged on the bearing.

11. The container for storing semiconductor elements as claimed in claim 9, wherein the driving member further comprises:

At least one guiding structure protrudes from the first surface of the driving body, extends from the rotating shaft to the periphery of the driving body, and abuts against a driving portion of the locking body.

12. The container for storing semiconductor elements as claimed in claim 9, further comprising:

A plate is fixedly locked under the bearing body and covers the locking piece and the driving piece.

13. The container for storing semiconductor components as claimed in claim 12, wherein the sealing plate further comprises:

At least one insertion hole corresponds to at least one through hole of the driving body, and at least one pin is passed through, and the pin passes through the insertion hole and is inserted into the through hole, and moves in the insertion hole to rotate the driving member.

14. The container for storing semiconductor elements as claimed in claim 9, wherein the driving member further comprises:

At least one pressing portion protrudes from the first surface of the driving body and contacts with the rolling element.

15. The container for storing semiconductor elements as claimed in claim 14, wherein the surface of the pressing portion corresponding to the driving portion is a guiding surface, and the side of the locking member having the driving portion is along the The inclined surface is raised and lowered, and the rolling element abuts against the guiding surface of the pressing portion.

16 . The container for storing semiconductor components as claimed in claim 15 , wherein the end of the guiding surface has a positioning groove, and the rolling element is disposed in the positioning groove.

17. The container for storing semiconductor components as claimed in claim 1, wherein the rolling member is a bearing.

18. The container for storing semiconductor components as claimed in claim 1, wherein the driving member is locked in the carrying body.

19. The container for storing semiconductor components as claimed in claim 1, wherein the driving member is pivotally mounted in the carrying body.

20. The container for storing semiconductor components as claimed in claim 12, wherein the driving part is pivotally arranged in the carrying body, and the sealing plate is fixedly locked under the carrying body and resists the driving part on the carrier body.

21. The container for storing semiconductor elements as claimed in claim 12, further comprising:

A wear-resistant part is provided with the sealing plate and corresponds to the driving part.

22. The container for storing semiconductor elements as claimed in claim 12, wherein the driving member further comprises:

At least one rolling element is embedded in the driving body and contacts with the sealing plate.

23. The container for storing semiconductor components as claimed in claim 22, wherein the rolling member is a bearing.