[embodiment]
A kind of pair of silver low radiation glass as shown in Figure 1 comprises the following structure that is arranged in order: glass, first basic unit's dielectric combination layer, second basic unit's dielectric combination layer, first blocking layer, an AgCu layer, second blocking layer, the first upper strata dielectric combination layer, the first interlayer dielectric combination layer, the second interlayer dielectric combination layer, the 3rd interlayer dielectric combination layer, the 3rd blocking layer, the 2nd AgCu layer, the 4th blocking layer, upper strata dielectric combination layer; Wherein, first blocking layer, second blocking layer, the 3rd blocking layer, the 4th blocking layer rete material are the material of reductibility greater than AgCu.
First basic unit's dielectric combination layer, the second interlayer dielectric combination layer are by comprising NbO
x, TiO
x, NiCrO
xConstitute with metal oxide at least a among the ZnO:Al; Second basic unit's dielectric combination layer, the first interlayer dielectric combination layer, the 3rd interlayer dielectric combination layer are made of the metal oxide that comprises AZO; The upper strata dielectric combination layer is by comprising AZO and SiO
xN
yIn at least a oxide compound or nitride or oxynitride constitute; First basic unit's dielectric combination layer thickness is 25~30nm; The second interlayer dielectric combination layer thickness is 45~50nm; Second basic unit's dielectric combination layer, the first interlayer dielectric combination layer, the 3rd interlayer dielectric combination layer thickness are 10~15nm; The thickness of upper strata dielectric combination layer is 35~45nm; Wherein, AZO is the Al that mixed
2O
3ZnO.
First blocking layer, second blocking layer, the 3rd blocking layer, the 4th blocking layer are made of metal or metal oxide at least a in the incomplete oxidation thing that comprises Nb and Nb; First blocking layer, second blocking layer, the 3rd blocking layer, the 4th barrier layer thickness are 1~1.5nm; The one AgCu layer, the 2nd AgCu layer are 70~80% by mass ratio Ag, and Cu is 30~20% yellow gold formation.
Preferably, two silver-bearing copper layer thicknesses relation satisfies the color value scope in product appearance color such as the following table:
The monolithic appearance color |
The glass surface reflected colour |
Rete face reflected colour |
Transmitted colour |
Y? |
Less than 9 |
Less than 3.5 |
Greater than 58 |
L*? |
Less than 35 |
Less than 20 |
Greater than 80 |
a*? |
-1~-2? |
-1~-2.5? |
-1~-3? |
b*? |
-5~-6? |
-2~-4.5? |
-0.5~-2? |
Preferred, an AgCu layer, the 2nd AgCu layer thickness are 10~13nm.
Preferably, the upper strata dielectric combination layer comprises first upper strata dielectric combination layer that is deposited on the 4th blocking layer and the second upper strata dielectric combination layer that is deposited on the first upper strata dielectric combination layer; The first upper strata dielectric combination layer is made of the oxide compound that comprises AZO; The second upper strata dielectric combination layer is by comprising SiO
xN
yOxide compound or nitride or oxynitride constitute; The thickness of the first upper strata dielectric combination layer is 10~15nm; The thickness of the second upper strata dielectric combination layer is 35~40nm.
Preferred, first, second upper strata dielectric combination layer is formed with the stack of differing materials alternating sputtering usually.
The manufacture method of above-mentioned pair of silver low radiation glass as shown in Figure 2 comprises the step that deposits each rete successively, and is specific as follows:
Clean glass, drying is placed on magnetron sputtering area;
The intermediate frequency power supply utmost point sputtering sedimentation first basic unit's dielectric combination layer of turning out cloudy of putting english;
The intermediate frequency power supply utmost point sputtering sedimentation second basic unit's dielectric combination layer of turning out cloudy of putting english;
Direct supply adds pulse sputtering sedimentation first blocking layer;
Direct supply adds pulse sputtering sedimentation the one AgCu layer;
Direct supply adds pulse sputtering sedimentation second blocking layer;
The intermediate frequency power supply utmost point sputtering sedimentation first interlayer dielectric combination layer of turning out cloudy of putting english;
The intermediate frequency power supply utmost point sputtering sedimentation second interlayer dielectric combination layer of turning out cloudy of putting english;
Intermediate frequency power supply utmost point sputtering sedimentation the 3rd interlayer dielectric combination layer of turning out cloudy of putting english;
Direct supply adds pulse sputtering sedimentation the 3rd blocking layer;
Direct supply adds pulse sputtering sedimentation the 2nd AgCu layer;
Direct supply adds pulse sputtering sedimentation the 4th blocking layer;
The intermediate frequency power supply utmost point sputtering sedimentation upper strata dielectric combination layer of turning out cloudy of putting english;
Inspection after construction;
Wherein, described first blocking layer, second blocking layer, the 3rd blocking layer, the 4th blocking layer rete material are the material of reductibility greater than AgCu.
Preferably, the put english utmost point sputter of turning out cloudy of intermediate frequency power supply is to carry out in argon nitrogen or argon oxygen atmosphere, and frequency is 40kHz, and power is 20~90kW; It is to carry out in argon atmosphere that direct supply adds the pulse sputter, and power is 2~5kW.
Wherein, intermediate frequency power supply is put english to turn out cloudy and is carried out in argon oxygen atmosphere when utmost point sputtering sedimentation forms oxide skin, and carries out in argon nitrogen atmosphere when formation of deposits nitride or oxynitride.
Direct supply adds when the pulse sputtering sedimentation forms metal level or alloy layer and carries out in argon atmosphere, and carries out in argon oxygen atmosphere during the formation of deposits oxide skin.
The vacuum magnetic-control sputtering plated film is adopted in the preparation of two silver low radiation glass, and each rete can be by the one matter formation of deposits, also can be by several different materials formation of deposits successively.
Below in conjunction with specific embodiment two silver low radiation glass and manufacture method thereof are further described.
Embodiment 1
The film layer structure of this pair silver low radiation glass embodiment 1 is followed successively by: glass, NbO
x, AZO, Nb, AgCu, Nb, AZO, NbO
X, AZO, Nb, AgCu, Nb, AZO, SiO
xN
y
In the present embodiment, first basic unit's dielectric combination layer is NbO
xLayer, thickness is 26nm.
In the present embodiment, second basic unit's dielectric combination layer is the AZO layer, and thickness is 10nm.
In the present embodiment, first blocking layer is the Nb layer, and thickness is 1nm.
In the present embodiment, an AgCu layer thickness is 11nm, and an AgCu layer is 75% by mass ratio Ag, and Cu is 25% yellow gold formation; In other embodiment, the quality of Ag is 70~80% than scope.
In the present embodiment, second blocking layer is the Nb layer, and thickness is 1nm.
In the present embodiment, the first interlayer dielectric combination layer is the AZO layer, and thickness is 10nm.
In the present embodiment, the second interlayer dielectric combination layer is NbO
xLayer, thickness is 55nm.
In the present embodiment, the 3rd interlayer dielectric combination layer is the AZO layer, and thickness is 10nm.
In the present embodiment, the 3rd blocking layer is the Nb layer, and thickness is 1nm.
In the present embodiment, the 2nd AgCu layer thickness is 13nm, and the 2nd AgCu layer is 75% by mass ratio Ag, and Cu is 25% yellow gold formation; In other embodiment, the quality of Ag is 70~80% than scope.
In the present embodiment, the 4th blocking layer is the Nb layer, and thickness is 1nm.
In the present embodiment, the upper strata dielectric combination layer is by the first upper strata dielectric combination layer of two kinds of compounds formation of deposits successively and the second upper strata dielectric combination layer; Wherein, the first upper strata dielectric combination layer is the AZO layer, and thickness is 10nm, and the second upper strata dielectric combination layer is SiO
xN
yLayer, thickness is 30nm.
The concrete manufacturing process of above-mentioned each rete is:
SiO
xN
yLayer deposition adopts the intermediate frequency power supply utmost point sputtering sedimentation in argon nitrogen atmosphere of turning out cloudy of putting english, and the vacuum magnetic-control sputtering plant capacity is 80~90kW, and the intermediate frequency power supply frequency is 40kHz.
NbO
xLayer deposition adopts intermediate frequency power supply to put english to turn out cloudy the utmost point to carry out in argon oxygen atmosphere, and the vacuum magnetic-control sputtering plant capacity is 50~60kW, and the intermediate frequency power supply frequency is 40kHz.
AZO layer deposition adopts intermediate frequency power supply to put english to turn out cloudy the utmost point to carry out in argon oxygen atmosphere, and the vacuum magnetic-control sputtering plant capacity is 20~30kW, and the intermediate frequency power supply frequency is 40kHz.
Nb layer deposition adopts direct supply to add pulse and sputters in the argon atmosphere and carry out, and the vacuum magnetic-control sputtering plant capacity is 2kW.
AgCu layer deposition adopts direct supply to add pulse and sputters in the argon atmosphere and carry out, and the vacuum magnetic-control sputtering plant capacity is 5kW.
This pair silver low radiation glass optical property and thermal characteristics are as follows:
Radiant ratio ε≤0.05, (structure is hollow product: the heat transfer coefficient U-value<1.4W/m two silver low radiation glass of 6mm+12mm gas cloud+6mm common white glass)
2K selects coefficient Lsg 〉=1.85.
Its each silver-bearing copper layer thickness relation satisfies the color value scope in product appearance color such as the following table:
The monolithic appearance color |
The glass surface reflected colour |
Rete face reflected colour |
Transmitted colour |
Y? |
Less than 9 |
Less than 3.5 |
Greater than 58 |
L*? |
Less than 35 |
Less than 20 |
Greater than 80 |
a*? |
-1~-2? |
-1~-2.5? |
-1~-3? |
b*? |
-5~-6? |
-2~-4.5? |
-0.5~-2? |
Embodiment 2
The film layer structure of this pair silver low radiation glass embodiment 2 is followed successively by: glass, NbO
x, AZO, Nb, AgCu, Nb, AZO, NbO
X, AZO, Nb, AgCu, Nb, AZO, SiO
xN
y
In the present embodiment, first basic unit's dielectric combination layer is NbO
xLayer, thickness is 21nm.
In the present embodiment, second basic unit's dielectric combination layer is the AZO layer, and thickness is 15nm.
In the present embodiment, first blocking layer is the Nb layer, and thickness is 1.5nm.
In the present embodiment, an AgCu layer thickness is 11nm, and the 2nd AgCu layer is 75% by mass ratio Ag, and Cu is 25% yellow gold formation; In other embodiment, the quality of Ag is 70~80% than scope.
In the present embodiment, second blocking layer is the Nb layer, and thickness is 1.5nm.
In the present embodiment, the first interlayer dielectric combination layer is the AZO layer, and thickness is 15nm.
In the present embodiment, the second interlayer dielectric combination layer is NbO
xLayer, thickness is 50nm.
In the present embodiment, the 3rd interlayer dielectric combination layer is the AZO layer, and thickness is 15nm.
In the present embodiment, the 3rd blocking layer is the Nb layer, and thickness is 1.5nm.
In the present embodiment, the 2nd AgCu layer thickness is 13nm, and the 2nd AgCu layer is 75% by mass ratio Ag, and Cu is 25% yellow gold formation; In other embodiment, the quality of Ag is 70~80% than scope.
In the present embodiment, the 4th blocking layer is the Nb layer, and thickness is 1.5nm.
In the present embodiment, the upper strata dielectric combination layer is by the first upper strata dielectric combination layer of two kinds of compounds formation of deposits successively and the second upper strata dielectric combination layer; Wherein, the first upper strata dielectric combination layer is the AZO layer, and thickness is 15nm, and the second upper strata dielectric combination layer is SiO
xN
yLayer, thickness is 25nm.
The concrete manufacturing process of above-mentioned each rete is:
SiO
xN
yLayer deposition adopts the intermediate frequency power supply utmost point sputtering sedimentation in argon nitrogen atmosphere of turning out cloudy of putting english, and the vacuum magnetic-control sputtering plant capacity is 80~90kW, and the intermediate frequency power supply frequency is 40kHz.
NbO
xLayer deposition adopts intermediate frequency power supply to put english to turn out cloudy the utmost point to carry out in argon oxygen atmosphere, and the vacuum magnetic-control sputtering plant capacity is 50~60kW, and the intermediate frequency power supply frequency is 40kHz.
AZO layer deposition adopts intermediate frequency power supply to put english to turn out cloudy the utmost point to carry out in argon oxygen atmosphere, and the vacuum magnetic-control sputtering plant capacity is 20~30kW, and the intermediate frequency power supply frequency is 40kHz.
Nb layer deposition adopts direct supply to add pulse and sputters in the argon atmosphere and carry out, and the vacuum magnetic-control sputtering plant capacity is 2kW.
AgCu layer deposition adopts direct supply to add pulse and sputters in the argon atmosphere and carry out, and the vacuum magnetic-control sputtering plant capacity is 5kW.
This pair silver low radiation glass optical property and thermal characteristics are as follows:
Radiant ratio ε≤0.05, (structure is hollow product: the heat transfer coefficient U-value<1.4W/m two silver low radiation glass of 6mm+12mm gas cloud+6mm common white glass)
2K selects coefficient Lsg 〉=1.85.
Its two silver-bearing coppers layer thickness relation satisfies the color value scope in product appearance color such as the following table:
The monolithic appearance color |
The glass surface reflected colour |
Rete face reflected colour |
Transmitted colour |
Y? |
Less than 9 |
Less than 3.5 |
Greater than 58 |
L*? |
Less than 35 |
Less than 20 |
Greater than 80 |
a*? |
-1~-2? |
-1~-2.5? |
-1~-3? |
b*? |
-5~-6? |
-2~-4.5? |
-0.5~-2? |
This pair of silver low radiation glass substitutes Ag to obtain neutral transmitted colour with AgCu; by design thicknesses of layers and material; make the film material reductibility on AgCu layer both sides stronger than AgCu; oxygen had high affinity; in the heat-processed of product, the film material on AgCu layer both sides obtains oxygen sooner than AgCu, plays the effect of protection AgCu layer; thereby make the AgCu layer not oxidized in heat treatment process, can be by tempering.
Utilize AZO and NbO
xOptical performance stability before and after the distinctive resistance toheat of novel material and the thermal treatment allows novel material NbO
xWith SiO
xN
yBe asymmetric high low-refraction and match, alleviate the rete specific absorption; By novel coating process, make the rete on AgCu layer and both sides fine and close more.So further this pair of optimization silver low radiation glass makes high temperature when it can better adapt to tempering.
Its two silver-bearing coppers layer thickness relation satisfies the color value scope in product appearance color such as the following table:
The monolithic appearance color |
The glass surface reflected colour |
Rete face reflected colour |
Transmitted colour |
Y? |
Less than 9 |
Less than 3.5 |
Greater than 58 |
L*? |
Less than 35 |
Less than 20 |
Greater than 80 |
a*? |
-1~-2? |
-1~-2.5? |
-1~-3? |
b*? |
-5~-6? |
-2~-4.5? |
-0.5~-2? |
Make that like this this argentiferous low emissivity glass outward appearance is better, select coefficient higher.
First, second upper strata dielectric combination layer is formed with the stack of differing materials alternating sputtering usually, is convenient to control membrane uniformity, stability and reasonable optical effect.
Dielectric combination layer is an antireflection film layer, play a part simultaneously to connect glass and functional layer, and adhesiveproperties is good between the glass, and has alleviated the internal stress of whole low-radiation film.The upper strata dielectric combination layer has directly increased described pair of silver low radiation glass scratch resistance, wear-resisting and erosion-resisting performance.Dielectric combination layer adopts the intermediate frequency power supply with good arc extinction performance of frequency 40kHz to put english to turn out cloudy utmost point sputter to form, and the specific refractory power matched well makes the reflectivity of product and transmitance reach ideal value.
The two silver low radiation glass that adopt unique film layer structure, novel process, novel method to make have the advantage of low-E, high heat resistance, can carry out intensive treatment such as tempering, hot bending and curved tempering under 700 ℃ of high temperature; Has endurance quality simultaneously, satisfy long-distance transport, store (storage time can above eight months), can satisfy in the strange land requirement of following process such as processing, cut, break off with the fingers and thumb sheet, edging, boring, cleaning, and in said process, product is demoulding, not oxidation not, is convenient to extensive popularization.
The above embodiment has only expressed embodiment of the present utility model, and it describes comparatively concrete and detailed, but can not therefore be interpreted as the restriction to the utility model claim.Should be pointed out that for the person of ordinary skill of the art under the prerequisite that does not break away from the utility model design, can also make some distortion and improvement, these all belong to protection domain of the present utility model.Therefore, the protection domain of the utility model patent should be as the criterion with claims.