CN201589753U - Detection device of large caliber optical element subsurface defect - Google Patents
Detection device of large caliber optical element subsurface defect Download PDFInfo
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- CN201589753U CN201589753U CN200920318482XU CN200920318482U CN201589753U CN 201589753 U CN201589753 U CN 201589753U CN 200920318482X U CN200920318482X U CN 200920318482XU CN 200920318482 U CN200920318482 U CN 200920318482U CN 201589753 U CN201589753 U CN 201589753U
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- 230000003287 optical effect Effects 0.000 title claims abstract 16
- 230000007547 defect Effects 0.000 title claims abstract 14
- 238000001514 detection method Methods 0.000 title abstract 5
- 238000003384 imaging method Methods 0.000 claims abstract 5
- 230000010287 polarization Effects 0.000 claims abstract 3
- 230000004888 barrier function Effects 0.000 claims 2
- 238000009966 trimming Methods 0.000 claims 1
- 238000006243 chemical reaction Methods 0.000 abstract 1
- 230000001066 destructive effect Effects 0.000 abstract 1
- 238000004519 manufacturing process Methods 0.000 abstract 1
- 238000005457 optimization Methods 0.000 abstract 1
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Abstract
The utility model provides a device for detecting the large caliber optical element subsurface defect, the device comprises a laser, a polarization state conversion unit, a light beam incidence angle control unit and a light guide right-angle prism, according to light paths in turn, the image is formed by a microscopic imaging system, a CCD image acquisition acquires the image in the microscopic imaging system, a computer is connected with the CCD image acquisition. The utility model adopts the light total internal reflection microscopic imaging detection mode, can perform the quantitative or semi-quantitative non-destructive detection on the large caliber optical element subsurface defect, and is also adapted to the detection of the optical element surface quality, the necessary detection technical basis is established for the optimization of the manufacturing process of the large caliber optical element with high quality and low defect, and the utility model has good application prospect.
Description
Technical field
The utility model belongs to the optical detective technology field, the device that the detection mode that particularly relates to a kind of total internal reflection micro-imaging that adopts light detects the subsurface defect of optical elements of large caliber.
Background technology
Along with the continuous lifting of large-scale high light optical system energy, more and more higher for the quality requirements of optical elements of large caliber.For many years the element damage characteristic origin cause of formation be studies show that the subsurface defects such as micro-crack that produce in the optical element manufacture process are one of key factors that causes optic element damage under the high light.So select which kind of effective subsurface defect of optical element detection technique for use, the improvement of guiding optics element processing technology has become the active demand of low defective, the manufacturing of high threshold resisting laser damage optical elements of large caliber.
At present, detection for subsurface defect of optical element mainly contains: " the hitting the hole method " of adopting in the grinding/grinding process of element, the disruptive method that magnetorheological wedge surface polishing technology etc. are measured subsurface defect in conjunction with optical microscope or contourgraph, but this type of procedure is consuming time, and introduces extra subsurface defect possibly.Pass judgment on subsurface defect according to the experimental formula of the element surface roughness and the subsurface defect degree of depth exactly in addition, yet the uncertainty in the processing can't form accurately unified experimental formula.For the element after the polishing, often adopt destructive method such as hf etching to expose subsurface defect and observe in conjunction with optical microscope.Above-described technology and method only is applicable to that all the experimental technology of small-bore optical element gropes, and has destructiveness mostly, can't reflect the defect distribution feature of optical elements of large caliber processing intuitively, and heavy-calibre element is not had practicality.Also there are methods such as the confocal fluorescence microscopy of employing, optical coherence tomography that subsurface defect of optical element is detected abroad, but the device structure complexity, the cost costliness, and also can only detect small-bore optical element.Though abroad to adopting total internal reflection micro-imaging technique detection optical element subsurface defect to report to some extent, but just be based upon on the experiment porch basis of small-bore optical element detection, and the just assessment qualitatively of detection to subsurface defect of optical element does not form complete heavy caliber subsurface defect detection system.
The utility model content
Technical problem to be solved in the utility model provides a kind of device that the optical elements of large caliber subsurface defect is detected.
The technical scheme that the utility model technical solution problem is adopted is: the pick-up unit of optical elements of large caliber subsurface defect, described device comprises laser instrument, polarization converted unit, beam incident angle degree control module and leaded light right-angle prism successively by light path, by the micro imaging system imaging, the image in the micro imaging system is gathered in the ccd image collection, and computing machine is connected with the ccd image collection.
The beneficial effects of the utility model are: adopted the total internal reflection micro-imaging detection mode of light, gather light, mechanical, electrical, calculate and to be one, compact conformation, simple, it is directly perceived to save time; Used optical elements of large caliber to support technology such as translation mechanism and image mosaic, can carry out quantitative or semiquantitative non-destructive to the optical elements of large caliber subsurface defect and detect, and then can to pass judgment on according to the shape characteristic of detected subsurface defect be to grind or the subsurface defect that produces in polishing process; Can reflect simultaneously defectives such as element surface cut significantly, can be suitable for equally for the detection of optical element surface quality; Solved the demand that in the optical elements of large caliber process subsurface defect is detected, manufacturing to the heavy caliber high-precision optical element in high light optical system, etching system, the space high-quality imaging system all has good application, established necessary detection technique basis for the optimization of the low defective optical elements of large caliber manufacturing process of high-quality, had a good application prospect.
Description of drawings
Fig. 1 is the structural representation of a leaded light right-angle prism of employing of the present utility model.
Fig. 2 is the structural representation of two leaded light right-angle prisms of employing of the present utility model.
Embodiment
The utility model is to utilize the total internal reflection principle of light that the subsurface defect of optical elements of large caliber is carried out the device that micro-imaging detects.Because whole device has adopted the total internal reflection lighting system of light, make and can't satisfy total internal reflection condition by the scattered light that the interior defective of element causes, will transmit by tested element surface, and through microscope imaging; The zone of other the intact trapping spot in the element owing to satisfy the condition of total internal reflection, unglazedly is transmitted into microscopical visual field, so just defect point has been formed dark-field microscopy.
As shown in Figure 1, the utility model device comprises laser instrument 1, polarization converted unit 2, first catoptron 3, second catoptron 4, leaded light right-angle prism 5 and light barrier 6 successively by light path, and laser instrument 1 and polarization converted unit 2 are placed on the base 7; First catoptron 3 and second catoptron 4 constitute beam incident angle degree control module, and first catoptron 3 and second catoptron 4 are installed on first bracing frame 8; Leaded light right-angle prism 5 is placed on the supporting elevation governor motion 9; The effect of light barrier 6 is to be used for blocking of light beam, avoids illumination to be mapped to other place, and light barrier 6 is installed on second bracing frame 10; First bracing frame 8, supporting elevation governor motion 9 and second bracing frame 10 are arranged on the same axis rail 12 on the base 7 by slide block 11 respectively.
Above-mentioned beam incident angle degree control module has the angle trimming part, and the control of incident angle is realized by the cooperation adjustment between beam incident angle degree control module and the slide block 11; Scribble matching fluid between the surface of contact of leaded light right-angle prism 5 and optical elements of large caliber 16; Optical elements of large caliber 16 is placed on and supports on the translation mechanism 15, supporting translation mechanism 15 can be in X and the accurate translation of Y direction, realize the scanning of optical elements of large caliber 15 is detected in the accurate translation of orthogonal directions by supporting translation mechanism 15, as realizing automatically controlled driving, support translation mechanism 15 and be connected with computing machine 13 by data line; Light incides optical elements of large caliber 16 through polarization converted unit 2, beam incident angle degree control module and leaded light right-angle prism 5 backs with alinternal reflection angle, again by micro imaging system 17 details in a play not acted out on stage, but told through dialogues imagings; Micro imaging system 17 is provided with fine setting focusing mechanism 20 and accurate micrometer head 18; Digital dial gauge 20 is connected with accurate micrometer head 18 by data line, and the minute adjustment amount of fine setting focusing mechanism 19 is recorded by accurate micrometer head 18; Computing machine 13 is gathered 14 by data line and ccd image and is connected; Ccd image is gathered 14 images of gathering in the micro imaging system 17.
When device of the present utility model detects, tested optical elements of large caliber 16 is placed on the support translation mechanism 15, thickness and material according to optical elements of large caliber 16, select the number of leaded light right-angle prism 5 and adjust to corresponding position, must select two leaded light right-angle prisms 5 for use for thick type optical element, as shown in Figure 2.Adjust second catoptron 4 and slide block 11 and make laser incide tested optical elements of large caliber 16 with the angle that is not less than critical angle, thus the microscopic field of view of illumination micro imaging system 17.Select suitable microscopic examination multiplying power, adjust polarization state of light and beam incident angle degree, regulate fine setting focusing mechanism 19, the light and shade of observing defective changes and the out of focus situation, and the focusing amount of utilizing digital dial gauge 20 to read fine setting focusing mechanism 19 is weighed the depth information of defective.Carry out the collection of microscopic defect image by computing machine 13 control ccd image collections 14.According to the image mosaic technology, manually or by computing machine 13 regulate of the accurate translation of support translation mechanism 15 in X and Y direction, scanning optical elements of large caliber 16 is gathered several defect images, carries out the splicing of image.By digital image processing techniques, the ground unrest of introducing because of element surface roughness, extraneous parasitic light etc. in the removal of images, the quantitative statistics of parameter information such as the feature extraction of realization defect point and corresponding defect point area, position, quantity, intensity.Finally finish quantitative or half-quantitative detection to the subsurface defect of optical elements of large caliber 16.Controlling the line number word image of going forward side by side handles and image mosaic.
Claims (10)
1. the pick-up unit of optical elements of large caliber subsurface defect, it is characterized in that: described device comprises laser instrument (1), polarization converted unit (2), beam incident angle degree control module and leaded light right-angle prism (5) successively by light path, ccd image is gathered (14) and is gathered the interior image of micro imaging system (17), and computing machine (13) is connected with ccd image collection (14).
2. the pick-up unit of optical elements of large caliber subsurface defect as claimed in claim 1 is characterized in that: described laser instrument (1) and polarization converted unit (2) are placed on the base (7).
3. the pick-up unit of optical elements of large caliber subsurface defect as claimed in claim 1, it is characterized in that: described beam incident angle degree control module comprises first catoptron (3) and second catoptron (4), and described first catoptron (3) and second catoptron (4) are installed on first bracing frame (8).
4. the pick-up unit of optical elements of large caliber subsurface defect as claimed in claim 1 is characterized in that: described leaded light right-angle prism (5) is placed on the supporting elevation governor motion (9).
5. the pick-up unit of optical elements of large caliber subsurface defect as claimed in claim 1 is characterized in that: also be provided with light barrier (6) behind the described leaded light right-angle prism (5), described light barrier (6) is installed on second bracing frame (10).
6. as the pick-up unit of the arbitrary described optical elements of large caliber subsurface defect of claim 3-5, it is characterized in that: described first bracing frame (8), supporting elevation governor motion (9) and second bracing frame (10) are arranged on the same axis rail (12) on the base (7) by slide block (11) respectively.
7. the pick-up unit of optical elements of large caliber subsurface defect as claimed in claim 1 is characterized in that: described beam incident angle degree control module has the angle trimming part.
8. the pick-up unit of optical elements of large caliber subsurface defect as claimed in claim 1 is characterized in that: also be provided with the support translation mechanism (15) of placing optical elements of large caliber (16).
9. the pick-up unit of optical elements of large caliber subsurface defect as claimed in claim 8 is characterized in that: described support translation mechanism (15) is connected with computing machine (13) by data line.
10. the pick-up unit of optical elements of large caliber subsurface defect as claimed in claim 1, it is characterized in that: described micro imaging system (17) is provided with fine setting focusing mechanism (19) and accurate micrometer head (18), and described accurate micrometer head (18) is connected with digital dial gauge (20).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN200920318482XU CN201589753U (en) | 2009-12-25 | 2009-12-25 | Detection device of large caliber optical element subsurface defect |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN200920318482XU CN201589753U (en) | 2009-12-25 | 2009-12-25 | Detection device of large caliber optical element subsurface defect |
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| Publication Number | Publication Date |
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| CN201589753U true CN201589753U (en) | 2010-09-22 |
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| CN200920318482XU Expired - Fee Related CN201589753U (en) | 2009-12-25 | 2009-12-25 | Detection device of large caliber optical element subsurface defect |
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Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103149217A (en) * | 2013-03-12 | 2013-06-12 | 合肥知常光电科技有限公司 | Infrared phase locking and imaging method and device for surface and subsurface defect detection of optimal element |
| CN103424843A (en) * | 2013-08-28 | 2013-12-04 | 中国科学院上海光学精密机械研究所 | Total internal reflection in-situ lighting device and control method thereof |
| CN103728315A (en) * | 2014-01-28 | 2014-04-16 | 中国科学院自动化研究所 | Large-aperture element surface detection device and corresponding damage quick localization method |
| CN104792798A (en) * | 2014-01-20 | 2015-07-22 | 南京理工大学 | Total internal reflection illumination technology-based subsurface damage measuring apparatus and method thereof |
| CN106500966A (en) * | 2016-10-20 | 2017-03-15 | 中国科学院上海光学精密机械研究所 | Optical elements of large caliber interferes mechanical automation detection auxiliary equipment |
| CN106529510A (en) * | 2016-12-12 | 2017-03-22 | 中国科学院合肥物质科学研究院 | Wrinkle recognition method and apparatus for capacitor thin film |
| CN108152294A (en) * | 2017-12-26 | 2018-06-12 | 华中光电技术研究所（中国船舶重工集团公司第七七研究所） | A kind of ultra-smooth eyeglass flaw inspection devices and methods therefor |
| CN109900700A (en) * | 2019-04-10 | 2019-06-18 | 南京邮电大学 | The detection method of Silver Clusters in a kind of silicate glass |
| CN116007908A (en) * | 2023-03-27 | 2023-04-25 | 中国工程物理研究院激光聚变研究中心 | Device and method for measuring high-transmittance and high-reflectance and non-uniformity of large-caliber flat plate element |
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2009
- 2009-12-25 CN CN200920318482XU patent/CN201589753U/en not_active Expired - Fee Related
Cited By (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103149217A (en) * | 2013-03-12 | 2013-06-12 | 合肥知常光电科技有限公司 | Infrared phase locking and imaging method and device for surface and subsurface defect detection of optimal element |
| CN103149217B (en) * | 2013-03-12 | 2015-06-24 | 合肥知常光电科技有限公司 | Infrared phase locking and imaging method and device for surface and subsurface defect detection of optimal element |
| CN103424843A (en) * | 2013-08-28 | 2013-12-04 | 中国科学院上海光学精密机械研究所 | Total internal reflection in-situ lighting device and control method thereof |
| CN103424843B (en) * | 2013-08-28 | 2015-12-23 | 中国科学院上海光学精密机械研究所 | Total internal reflection in-situ lighting device and control method thereof |
| CN104792798A (en) * | 2014-01-20 | 2015-07-22 | 南京理工大学 | Total internal reflection illumination technology-based subsurface damage measuring apparatus and method thereof |
| CN103728315A (en) * | 2014-01-28 | 2014-04-16 | 中国科学院自动化研究所 | Large-aperture element surface detection device and corresponding damage quick localization method |
| CN106500966A (en) * | 2016-10-20 | 2017-03-15 | 中国科学院上海光学精密机械研究所 | Optical elements of large caliber interferes mechanical automation detection auxiliary equipment |
| CN106500966B (en) * | 2016-10-20 | 2018-10-02 | 中国科学院上海光学精密机械研究所 | Optical elements of large caliber interferes mechanical automation to detect ancillary equipment |
| CN106529510A (en) * | 2016-12-12 | 2017-03-22 | 中国科学院合肥物质科学研究院 | Wrinkle recognition method and apparatus for capacitor thin film |
| CN106529510B (en) * | 2016-12-12 | 2019-07-05 | 中国科学院合肥物质科学研究院 | A kind of fold recognition methods and device for capacitor thin film |
| CN108152294A (en) * | 2017-12-26 | 2018-06-12 | 华中光电技术研究所（中国船舶重工集团公司第七七研究所） | A kind of ultra-smooth eyeglass flaw inspection devices and methods therefor |
| CN109900700A (en) * | 2019-04-10 | 2019-06-18 | 南京邮电大学 | The detection method of Silver Clusters in a kind of silicate glass |
| CN109900700B (en) * | 2019-04-10 | 2021-11-12 | 南京邮电大学 | Method for detecting silver clusters in silicate glass |
| CN116007908A (en) * | 2023-03-27 | 2023-04-25 | 中国工程物理研究院激光聚变研究中心 | Device and method for measuring high-transmittance and high-reflectance and non-uniformity of large-caliber flat plate element |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C17 | Cessation of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20100922 Termination date: 20131225 |