CN201528464U - A New Atmospheric Pressure Jet Cooling Plasma Generator - Google Patents
A New Atmospheric Pressure Jet Cooling Plasma Generator Download PDFInfo
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- CN201528464U CN201528464U CN2009201876510U CN200920187651U CN201528464U CN 201528464 U CN201528464 U CN 201528464U CN 2009201876510 U CN2009201876510 U CN 2009201876510U CN 200920187651 U CN200920187651 U CN 200920187651U CN 201528464 U CN201528464 U CN 201528464U
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- 239000002184 metal Substances 0.000 claims abstract description 27
- 230000005495 cold plasma Effects 0.000 claims abstract description 20
- 238000002347 injection Methods 0.000 claims 4
- 239000007924 injection Substances 0.000 claims 4
- 230000015572 biosynthetic process Effects 0.000 claims 1
- 239000011248 coating agent Substances 0.000 claims 1
- 238000000576 coating method Methods 0.000 claims 1
- 230000004888 barrier function Effects 0.000 description 6
- 238000010586 diagram Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 230000009977 dual effect Effects 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 230000001954 sterilising effect Effects 0.000 description 1
- 238000004659 sterilization and disinfection Methods 0.000 description 1
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Abstract
本实用新型公开了一种新型大气压射流冷等离子发生器，包括有绝缘管，其特征在于：所述绝缘管前端的外侧包括有环形翻折，所述环形翻折的内放置有环形片状外金属电极，所述绝缘管的末端呈弯折状，形成进气口，所述的绝缘管内横穿有内金属电极，所述的内金属电极一端穿过所述的绝缘管的弯折端，所述的内金属电极另一端伸展到所述绝缘管的前端，并在所述的绝缘管前端出口处形成射流等离子体区，所述的内金属电极位于绝缘管中心。本实用新型可以在不减少等离子体射流大小的前提下，减少了放电区域，降低了工作温度，便于手持便携操作，结构简单，且运行可靠。
The utility model discloses a novel atmospheric pressure jet flow cold plasma generator, which includes an insulating tube. A metal electrode, the end of the insulating tube is bent to form an air inlet, an inner metal electrode runs across the insulating tube, and one end of the inner metal electrode passes through the bent end of the insulating tube, The other end of the inner metal electrode extends to the front end of the insulating tube, and forms a jet plasma region at the outlet of the front end of the insulating tube, and the inner metal electrode is located at the center of the insulating tube. The utility model can reduce the discharge area and the working temperature without reducing the size of the plasma jet, is convenient for hand-held and portable operation, has a simple structure, and is reliable in operation.
Description
技术领域technical field
本实用新型涉及等离子体处理装置领域，具体涉及一种新型大气压射流冷等离子体发生器领域。The utility model relates to the field of plasma processing devices, in particular to the field of a novel atmospheric pressure jet flow cold plasma generator.
背景技术Background technique
大气压介质阻挡放电产生的等离子体在材料表面改性、灭菌、等离子体清洗等方面有着广泛的应用，但由于介质阻挡放电电极空隙的间距一般只有几个毫米，因此被处理的物体形状受到了限制，从而限制了大气压介质阻挡放电的应用。而采用介质阻挡放电产生射流冷等离子体主要是在装置的喷嘴口处形成较长的射流冷等离子体，这样被处理的物体可以放置在喷嘴口处即可被等离子体处理，物体形状不再受电极间距的限制。然而，目前大多数射流冷等离子体介质阻挡放电的装置，大多采用圆柱形内电极和相近长度同轴的管状外电极组成，两电极间用石英或陶瓷管隔开，内电极与射频功率耦合或接高压电源高压端，外电极接地。尽管这种装置喷嘴口位置能够产生射流冷等离子体，但是很大部分的等离子体的放电是在两电极之间产生，而一般情况下这是我们不需要的，并且由于电极间的放电而产生的较高温度，导致一般需要采取冷却措施，不便于手持便携式操作。Plasma generated by atmospheric pressure dielectric barrier discharge is widely used in surface modification, sterilization, plasma cleaning, etc. Limitation, thus limiting the application of atmospheric pressure dielectric barrier discharge. The use of dielectric barrier discharge to generate jet cold plasma is mainly to form a longer jet cold plasma at the nozzle mouth of the device, so that the object to be processed can be placed at the nozzle mouth to be processed by plasma, and the shape of the object is no longer affected. Limitations on electrode spacing. However, at present, most devices for jet cold plasma dielectric barrier discharge are composed of a cylindrical inner electrode and a coaxial tubular outer electrode with a similar length. The two electrodes are separated by a quartz or ceramic tube, and the inner electrode is coupled with radio frequency power or Connect to the high-voltage end of the high-voltage power supply, and the outer electrode is grounded. Although the position of the nozzle mouth of this device can generate jet flow cold plasma, a large part of the plasma discharge is generated between the two electrodes, which is generally not needed by us, and is generated due to the discharge between the electrodes The relatively high temperature leads to the general need to take cooling measures, which is not convenient for hand-held and portable operation.
实用新型内容Utility model content
本实用新型要解决的技术问题是提供一种新型大气压射流冷等离子体发生器，能够避免或减少电极间的放电，从而降低电源功率在电极间的损耗，降低装置运行温度，提高装置运行的稳定性和便携性。The technical problem to be solved by the utility model is to provide a new type of atmospheric pressure jet cold plasma generator, which can avoid or reduce the discharge between electrodes, thereby reducing the loss of power supply between electrodes, reducing the operating temperature of the device, and improving the stability of device operation and portability.
为解决上述问题，本实用新型的技术方案如下：For solving the problems referred to above, the technical scheme of the utility model is as follows:
一种新型大气压射流冷等离子发生器，包括有绝缘管，其特征在于：所述绝缘管前端放置有环形片状金属电极，并被绝缘套包覆着，所述绝缘管的尾部开有一进气孔，所述的绝缘管内横穿有内金属电极，所述的内金属电极一端穿过所述绝缘管的末端，所述的内金属电极另一端伸展到所述绝缘管的前端，并在所述的绝缘管前端出口处形成射流等离子体区，所述的内金属电极位于绝缘管中心。A new atmospheric pressure jet cold plasma generator, including an insulating tube, is characterized in that: the front end of the insulating tube is placed with an annular sheet metal electrode, and is covered by an insulating sleeve, and an air inlet is opened at the tail of the insulating tube. hole, the inner metal electrode crosses the insulating tube, one end of the inner metal electrode passes through the end of the insulating tube, the other end of the inner metal electrode extends to the front end of the insulating tube, and A jet plasma region is formed at the outlet of the front end of the insulating tube, and the inner metal electrode is located at the center of the insulating tube.
所述的新型大气压射流冷等离子发生器，其特征在于：当所述的新型大气压射流冷等离子发生器为双介质放电时，所述的内金属电极外壁还包覆有一层绝缘管套。The new atmospheric pressure jet cold plasma generator is characterized in that: when the new atmospheric pressure jet cold plasma generator is a dual-medium discharge, the outer wall of the inner metal electrode is also covered with a layer of insulating sleeve.
所述的新型大气压射流冷等离子发生器，其特征在于：所述的内金属电极为圆柱形。The novel atmospheric pressure jet cold plasma generator is characterized in that: the inner metal electrode is cylindrical.
所述的新型大气压射流冷等离子发生器，其特征在于：当所述的新型大气压射流冷等离子发生器为双介质放电时，所述的内金属电极外壁还包覆有一层绝缘管套。The new atmospheric pressure jet cold plasma generator is characterized in that: when the new atmospheric pressure jet cold plasma generator is a dual-medium discharge, the outer wall of the inner metal electrode is also covered with a layer of insulating sleeve.
所述的新型大气压射流冷等离子发生器，其特征在于：所述的内金属电极为圆柱形。The novel atmospheric pressure jet cold plasma generator is characterized in that: the inner metal electrode is cylindrical.
本实用新型的有益效果：The beneficial effects of the utility model:
本实用新型可以在不减少等离子体射流大小的前提下，减少了放电区域，降低了工作温度，便于手持便携操作，结构简单，且运行可靠。The utility model can reduce the discharge area and the working temperature without reducing the size of the plasma jet, is convenient for hand-held and portable operation, has a simple structure, and is reliable in operation.
附图说明Description of drawings
图1为本实用新型(单介质阻挡放电)结构示意图。Fig. 1 is a structural schematic diagram of the utility model (single dielectric barrier discharge).
图2为本实用新型(双介质阻挡放电)结构示意图。Fig. 2 is a structural schematic diagram of the utility model (dual dielectric barrier discharge).
具体实施方式Detailed ways
参见图1、2，一种新型大气压射流冷等离子发生器，包括有绝缘管1，其特征在于：绝缘管1前端的外侧包括绝缘套2，绝缘套2内放置有有环形片状外金属电极3，绝缘管1的尾部开一进气孔4，圆柱形内金属电极5向内贯穿于绝缘管1并延伸到绝缘管1的前端，并在绝缘管1前端出口处形成射流等离子体区6，圆柱形内金属电极5位于绝缘管中心位置。Referring to Figures 1 and 2, a new type of atmospheric pressure jet cold plasma generator includes an
当新型大气压射流冷等离子发生器为双介质放电时，圆柱形内金属电极5外壁还包覆有一层绝缘管套7。When the new atmospheric pressure jet cold plasma generator is a dual-medium discharge, the outer wall of the cylindrical
内金属电极5放置在绝缘管1内，一端在绝缘管1前端的射流等离子体区6，另一端接高压电源高压端(或地)，外金属电极3放置在绝缘管1前端，并被绝缘套2包覆着，两电极之间的间距包括绝缘管的厚度和间隙在几个毫米范围，可根据实际需要作相应的调整，当从绝缘管1的尾部进气口4通入等离子体工作气体(如：He、Ar、CF4、N2、空气等)，同时接通高频高压电源(典型工作电压为几kv到20kv之间，频率20k～100kHz)，射流等离子体区6形成射流等离子体。The
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| CN2009201876510U CN201528464U (en) | 2009-09-18 | 2009-09-18 | A New Atmospheric Pressure Jet Cooling Plasma Generator |
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| CN2009201876510U CN201528464U (en) | 2009-09-18 | 2009-09-18 | A New Atmospheric Pressure Jet Cooling Plasma Generator |
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Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102361528A (en) * | 2011-09-29 | 2012-02-22 | 西安交通大学 | High-impermeability capillary tube discharging plasma generator |
| CN102595757A (en) * | 2012-03-19 | 2012-07-18 | 河北大学 | Three-electrode discharge device for generating large-volume atmosphere pressure plasma |
| CN102752951A (en) * | 2012-07-04 | 2012-10-24 | 大连民族学院 | Atmospheric-pressure low-temperature plasma generation device and application of device to prevention of plant disease |
| CN104883806A (en) * | 2015-03-06 | 2015-09-02 | 苏州大学 | Plasma jet device and assembly, and crystalline silicon battery surface oxidation and decontamination method |
| CN106231771A (en) * | 2016-08-31 | 2016-12-14 | 大连民族大学 | A kind of protection mechanism of plasma laryngoscope sterilizing unit |
| CN106856644A (en) * | 2017-01-04 | 2017-06-16 | 京东方科技集团股份有限公司 | Plasma jet device |
| DE102016209097A1 (en) * | 2016-03-16 | 2017-09-21 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | plasma nozzle |
| CN108322984A (en) * | 2018-01-29 | 2018-07-24 | 中国科学院电工研究所 | Focus the device and method of cold plasma processing 3D objects |
| WO2021243966A1 (en) * | 2020-06-01 | 2021-12-09 | 深圳先进技术研究院 | Atmospheric pressure radio frequency thermal plasma generator based on pre-ionization ignition device |
-
2009
- 2009-09-18 CN CN2009201876510U patent/CN201528464U/en not_active Expired - Fee Related
Cited By (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102361528B (en) * | 2011-09-29 | 2012-11-28 | 西安交通大学 | High-impermeability capillary tube discharging plasma generator |
| CN102361528A (en) * | 2011-09-29 | 2012-02-22 | 西安交通大学 | High-impermeability capillary tube discharging plasma generator |
| CN102595757A (en) * | 2012-03-19 | 2012-07-18 | 河北大学 | Three-electrode discharge device for generating large-volume atmosphere pressure plasma |
| CN102595757B (en) * | 2012-03-19 | 2014-11-05 | 河北大学 | Three-electrode discharge device for generating large-volume atmosphere pressure plasma |
| CN102752951A (en) * | 2012-07-04 | 2012-10-24 | 大连民族学院 | Atmospheric-pressure low-temperature plasma generation device and application of device to prevention of plant disease |
| CN104883806B (en) * | 2015-03-06 | 2018-09-25 | 苏州大学 | A kind of plasma jet device and component and a kind of method of crystal silicon battery surface oxidation and decontamination |
| CN104883806A (en) * | 2015-03-06 | 2015-09-02 | 苏州大学 | Plasma jet device and assembly, and crystalline silicon battery surface oxidation and decontamination method |
| EP3430864B1 (en) * | 2016-03-16 | 2021-11-17 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Plasma nozzle and method of using the plasma nozzle |
| DE102016209097A1 (en) * | 2016-03-16 | 2017-09-21 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | plasma nozzle |
| CN106231771A (en) * | 2016-08-31 | 2016-12-14 | 大连民族大学 | A kind of protection mechanism of plasma laryngoscope sterilizing unit |
| CN106856644A (en) * | 2017-01-04 | 2017-06-16 | 京东方科技集团股份有限公司 | Plasma jet device |
| CN108322984A (en) * | 2018-01-29 | 2018-07-24 | 中国科学院电工研究所 | Focus the device and method of cold plasma processing 3D objects |
| WO2021243966A1 (en) * | 2020-06-01 | 2021-12-09 | 深圳先进技术研究院 | Atmospheric pressure radio frequency thermal plasma generator based on pre-ionization ignition device |
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Effective date of registration: 20160324 Address after: 1412, room 860, B, innovation center, Wangjiang West Road, 230000 hi tech Zone, Hefei, Anhui Patentee after: CAS NEW WORLD ENVIRONMENTAL PROTECTION TECHNOLOGY CO.,LTD. Address before: 230000 Dong Li, Hefei, Anhui Patentee before: HEFEI INSTITUTES OF PHYSICAL SCIENCE, CHINESE ACADEMY OF SCIENCES Effective date of registration: 20160324 Address after: 230000 Dong Li, Hefei, Anhui Patentee after: HEFEI INSTITUTES OF PHYSICAL SCIENCE, CHINESE ACADEMY OF SCIENCES Address before: 230031 Shushan Lake Road, Anhui, China, No. 350, No. Patentee before: INSTITUTE OF PLASMA PHYSICS CHINESE ACADEMY OF SCIENCES |
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