CN201402366Y - Exposure machine - Google Patents

Abstract

The exposure machine of the utility model is mainly provided with a light outlet cover outside the exposure light source group, the light outlet cover is provided with a strip-shaped light transmission groove at the position which is relatively towards the moving stroke of the exposure platform, and a movable light screen is arranged to control whether the light transmission groove is opened or not, so that the strip-shaped light source which is irradiated towards the moving stroke of the exposure platform is generated under the state that the light transmission groove is opened; the exposure platform is matched to receive the irradiation of the strip light source in a mode of relative displacement with the light-emitting cover at a preset speed, so that the processed object on the exposure platform is exposed and developed.

Description

Exposure machine

technical field

The utility model relates to an exposure machine, in particular to an exposure machine structure that does not generate heat accumulation and can relatively reduce equipment volume and cost.

Background technique

Press, when the general printed circuit board or semiconductor chip is exposed and developed, a layer of photoresist is first coated on the surface of the processed object, and then the circuit wiring pattern on the original is mapped to the surface of the processed object by the irradiation of the light source. On the photoresist layer, so that the chemical properties of the photoresist layer change due to the irradiation of the light source, and then use the photoresist remover to remove the photoresist irradiated by the light source or the unexposed photoresist from the surface of the processed object , to form a line layout corresponding to the original.

Among them, the basic structure of the exposure machine used to perform the exposure and development process is shown in FIG. Corresponding to the position above or below the exposure platform 13 inside the exposure chamber 12, a light source group 14 is provided; please refer to FIG. Platform, the overall exposure platform 13 enters and exits the exposure chamber 12 through a set of linear slide rails 15 .

After the exposure platform 13 enters the exposure chamber 12 together with the workpiece and the original to be positioned, it generally must stay in the exposure chamber 12 for a period of time (about 3 to 5 seconds) to allow the workpiece to be irradiated by the exposure light source of the light source group 14. After the exposure is completed, the object to be processed is sent out by the exposure platform 13 .

Because the general conventional exposure machines use the exposure platform 13 stagnant in the exposure chamber 12 to carry out the exposure operation, so the light source group 14 must have a large number of light bulbs 141 arranged in an array, so as to form enough to cover the entire exposure platform 13 Parallel light source; however, under the simultaneous operation of a large number of bulbs 141, serious heat accumulation will occur inside the casing 11, requiring an additional water-cooling system to dissipate heat, resulting in high equipment costs.

Another conventional exposure machine corrects the light of the light bulb to the required parallel light and area size through the compound eye device. Homogenize the light, then use a set of second reflectors to change the direction of the light, and finally use a set of convex lenses to correct the light to the required parallel light and area size, and then project the required exposure light source, thereby reducing the number of bulbs .

However, such a design will make the structure of the overall exposure machine more complex, and the body of the overall exposure machine will be relatively larger; especially, it is necessary to use a bulb with a large wattage, and the life of a bulb with a large wattage is generally quite short. , not only increases the replacement frequency of bulbs, but also relatively increases the production cost invisibly.

Utility model content

In view of this, the technical problem to be solved by the utility model is to provide an exposure machine structure that is less prone to heat accumulation and can relatively reduce equipment volume and cost.

In order to achieve the purpose of exposing, the exposure machine of the present invention is provided with at least one exposure platform on a machine platform, and is provided with a conveying unit for driving the at least one exposure platform relatively into and out of the exposure room of the machine platform. An exposure light source group is provided at a position above or below the moving stroke corresponding to the exposure platform, and a mask is provided outside the exposure light source group; in addition, a set of control circuits is provided for setting and integrating the conveyor unit and the exposure light source group and the operation of the mask.

Wherein, the light outlet cover is provided with a strip-shaped light-transmitting groove at its position relatively toward the moving stroke of the exposure platform, and is also provided with a movable light-shielding plate to control whether the light-transmitting groove is opened or not, and the light source of the light source group to be exposed (in this embodiment) For example, when the light bulb is started, its light source can shine outwards through the light-transmitting groove of the light-emitting cover, so that a strip-shaped light source is produced towards the moving stroke of the exposure platform; The cover is relatively displaced to receive the irradiation of the strip light source, and then the processed object on the exposure platform is exposed and developed.

Specifically, the exposure machine of the present invention has the following effects:

1. The light source used to produce the exposure effect is a strip light source rather than a large-area light source covering the entire exposure platform, so the number of light bulbs in the exposure light source group can be greatly reduced, the volume of the overall exposure machine can be relatively reduced, and the equipment cost can be relatively reduced.

2. The control circuit can increase the power of the exposure light source group when the exposure platform is irradiated by the strip light source, so that the heat accumulation phenomenon in the exposure room can be relatively reduced.

3. The overall exposure machine is especially suitable to adopt the method of continuous circulation conveying, so that the exposure platforms pass through the exposure room in sequence, but it can be used to increase the processing capacity of the exposure and development process.

Description of drawings

Fig. 1 is a structural sectional view of a conventional exposure machine;

2 is a perspective view of the appearance of an exposure platform of a conventional exposure machine;

Fig. 3 is a three-dimensional view of the appearance of the exposure machine of the present invention;

4 is a three-dimensional view of the internal structure of the exposure chamber of the exposure machine of the present invention;

Fig. 5 is an appearance structure diagram of the exposure light source group located above the moving stroke of the exposure platform in the utility model;

Fig. 6 is an enlarged schematic diagram of the exposure light source set located above the moving stroke of the exposure platform in the present invention;

Fig. 7 is an appearance structure diagram of the exposure light source group and the light output mask arranged at the position below the moving stroke of the exposure platform in the utility model;

Fig. 8 is an enlarged schematic diagram of the exposure light source group and the light output mask arranged at the position below the moving stroke of the exposure platform in the present invention;

Fig. 9 is an exploded view of the structure of the light emitting mask located at the position below the moving stroke of the exposure platform in the present invention;

Fig. 10 is an appearance structure diagram of the exposure light source group and the light emitting mask located above the moving stroke of the exposure platform in the utility model;

Fig. 11 is a top view of the structure of the exposure light source group located above the moving stroke of the exposure platform in the present invention;

Fig. 12 is the appearance structural diagram of the lamp housing in the utility model;

Fig. 13 is a schematic diagram of the action of the exposure platform reaching the predetermined stroke close to the light-transmitting groove in the utility model;

FIG. 14 is a schematic diagram of the action of the exposure platform reaching the predetermined stroke for completing the exposure and development in the present invention.

【Description of figure number】

11 Housing 12 Exposure chamber

13 exposure platform 14 light source groups

141 bulbs 15 linear slides

20 processed objects 30 machines

31 Chassis 311 Cooling vent

312 circulation air inlet 32 exposure chamber

33 filters 40 exposure platforms

50 conveyor unit 51 linear slide rail

52 belt 53 motor

60 exposure light source groups 61 bulbs

611 lamp housing 62 reflector

63 Cooling fan 70 Light outlet cover

71 Light-transmitting groove 72 Shading plate

73 power 80 control circuit

81 touch screen 82 induction switch

Detailed ways

The features of the utility model can be clearly understood by referring to the detailed description of the drawings and the embodiments.

As shown in Figures 3 and 4, the exposure machine of the present invention includes: a machine platform 30, at least one exposure platform 40, a conveyor unit 50, at least one exposure light source group 60, at least one photomask 70, and a control Circuit 80; wherein:

The machine 30 has an exposure chamber 32 surrounded by a casing 31. The casing 31 is provided with a heat dissipation air outlet 311 and at least one circulating air inlet 312 on the periphery of the exposure chamber 32, and at least A filter screen 33 is provided at the air circulation inlet 312 to prevent dust and foreign matter from entering the exposure chamber 32 .

The at least one exposure platform 40 is a transparent platform for fixing workpieces and originals; the conveying unit 50 is used to drive the at least one exposure platform 40 to relatively enter and exit the exposure chamber 32 of the machine 30, which has a set of laterally extending configurations The linear slide rails 51 in the exposure chamber 32 of the machine 30 and the outer area are used to carry the exposure platform 40, a belt 52 is provided for connecting with the exposure platform 40, and a motor 53 is provided to drive the belt 52 to run, and Under the guidance of the linear sliding rail 51 , the exposure platform 40 is driven to enter and exit the exposure chamber 32 of the machine 30 .

The at least one exposure light source group 60 is arranged at the position above or below the movement stroke of the exposure platform 40 inside the exposure chamber 32. As shown in FIGS. For example, a light bulb) 61 is used to generate the exposure light source; in this embodiment, the overall exposure machine is provided with an exposure light source group 60 above and below the moving stroke of the exposure platform 40, and the upper and lower sides of the exposure platform 40 are exposed simultaneously. The processed object is exposed and developed.

The at least one light outlet cover 70 is arranged outside the at least one exposure light source group 60. As shown in FIG. The plate 72 controls whether the light transmission groove 71 is opened or not; at least one power cylinder 73 is connected between the movable light shield 72 and the light outlet cover 70, and the movable light shield 72 is driven by the at least one power cylinder 73 to be opposite to the light outlet cover Displacement, and then control the light-transmitting groove 71 to close or open.

As shown in FIG. 7 , the control circuit 80 is used for setting and integrating the operation of the conveying unit 50 , the at least one exposure light source group 60 and the movable light shield 72 , and it has a touch screen 81 arranged on the machine platform 10 For setting relevant action parameters, and at least one sensor switch 82 is provided at the moving distance of the machine 10 relative to the exposure platform 40 to sense the relative position of the exposure platform 40 .

Please refer to Fig. 10 and Fig. 11 at the same time, the bulbs 61 of the exposure light source group 60 are arranged in a straight line along the light-transmitting groove 71 of the light-emitting cover 70, and a set of reflectors 62 are provided to reflect the light from the bulbs 61. Throw to the light-transmitting groove 71 of this light-emitting cover 70; Again, each bulb is configured in a way that a specific angle (about 2°) included angle is tilted towards the light irradiation direction, so that the light source of each bulb 61 can be completely connected, and the light of each bulb 61 Inside the housing 611 is a PI coating to increase its reflectivity (as shown in FIG. 12 ), and a cooling fan 63 is provided at a position relative to each bulb 61 to increase the waste heat discharge efficiency of the exposure light source group 60 .

As shown in Figure 13, the exposure machine of the present invention fixes the original and the workpiece on the exposure platform 40 before the exposure platform 40 enters the exposure chamber, and sets the output of the exposure light source 60 through the touch screen 81. The power and the operating speed of the conveyor unit 50 can then be started.

When the exposure machine starts to operate, first turn on the light bulb of the exposure light source group 60, and start the conveyor unit 50 to drive the exposure platform 40 to move towards the exposure room. During the stroke, the inductive switch 82 (as shown in Figure 8 ) of the control circuit 80 will be activated first, and the control circuit 80 will control the action of the movable visor, so that the light-transmitting groove 71 of the light-emitting cover 70 is opened, and the The output power of the exposure light source group 60.

At this time, the light source of the exposure light source group 60 can pass through the light-transmitting groove 71 of the light outlet cover 70 to irradiate outwards, so as to generate a strip light source moving toward the exposure platform 40; and then cooperate with the conveyor unit 50 to drive the exposure platform 40 is irradiated by the strip-shaped light source in a manner of relative displacement with the light emitting mask 70 at a predetermined speed, and then the processed object on the exposure platform 40 is exposed and developed.

As shown in FIG. 14 , when the exposure platform 40 is relatively moved to the predetermined stroke of completion of exposure and development, the sensor switch 82 (as shown in FIG. 8 ) of the control circuit 80 is turned off, and the movable light shielding plate 72 is controlled by the control circuit 80. Action, close the light transmission groove of the light exit cover 70, and lower the output power of the exposure light source group 60 at the same time.

Since the light source used by the exposure machine of the present invention to produce the exposure effect is a strip light source rather than a large-area light source covering the entire exposure platform, the number of light bulbs in the exposure light source group 60 can be greatly reduced, and the volume of the overall exposure machine can be relatively reduced. And the equipment cost is relatively reduced; moreover, the control circuit 80 can increase the output power of the exposure light source group 60 when the exposure platform 40 is irradiated by the strip light source, so that the heat accumulation phenomenon in the exposure chamber can be relatively reduced.

Incidentally, when the exposure machine of the present invention is performing exposure and development, the exposure platform continues to move toward the direction of the exposure room at a predetermined speed, so the overall exposure machine is particularly suitable for continuous circulation transportation, allowing exposure The platforms pass through the exposure chamber sequentially, so that the processing capacity of the exposure and development process can be improved.

In summary, the utility model provides a better and feasible exposure machine, and the application for a new patent is submitted according to law; the technical content and technical characteristics of the utility model have been disclosed as above, but those who are familiar with this technology may still Various replacements and modifications are made without departing from the spirit of the utility model for the disclosure of the utility model. Therefore, the protection scope of the present utility model should not be limited to those disclosed in the embodiments, but should include various replacements and modifications that do not deviate from the present utility model, and are covered by the scope of the following patent applications.

Claims (10)

1. An exposure machine, characterized in that it comprises: A machine with an exposure chamber surrounded by a casing; At least one exposure platform, which is a transparent platform for fixing the processed object and original manuscript; a conveying unit for driving the at least one exposure platform relatively into and out of the exposure chamber of the machine; At least one exposure light source group is located inside the exposure chamber at a position above or below the exposure platform relative to the moving stroke, and each exposure light source group has several light sources for generating exposure light sources; At least one light outlet mask is arranged outside the at least one exposure light source group, and it is provided with a strip-shaped light-transmitting groove at a position relatively toward the moving stroke of the exposure platform, and a movable light-shielding plate is provided to control whether the light-transmitting groove is opened or not ; a control circuit for setting and integrating the operation of the conveyor unit, the at least one exposure light source group and the movable light shield; and, When the light bulbs of the exposure light source group are activated, the light source can irradiate outwards through the light-transmitting groove of the light outlet cover, so as to produce a strip-shaped light source moving toward the exposure platform; and then cooperate with the conveyor unit to drive the exposure platform to predetermined The speed and the relative displacement of the light-emitting mask are irradiated by the strip light source, so that the processed object on the exposure platform is exposed and developed. 2 . The exposure machine according to claim 1 , wherein an exposure light source group is provided at positions above and below the moving stroke of the exposure platform. 3. The exposure machine according to claim 1, characterized in that, the casing is provided with a heat dissipation air outlet and at least one circulation air inlet on the periphery of the waterfall chamber, and at the at least one circulation air inlet With filter. 4. The exposure machine according to claim 1, characterized in that, the conveyor unit has a set of linear slide rails extending laterally in the exposure room and outside area of the machine for carrying the exposure platform, and a belt is provided for the exposure platform. The exposure platform is connected, and a motor for driving the belt is provided. 5. The exposure machine according to claim 1, characterized in that at least one device is connected between the movable light shield and the light outlet cover to drive the relative displacement of the movable light shield and the light outlet mask, and then control the light transmission groove. Power cylinder closed or open. 6. The exposure machine according to claim 1, wherein the control circuit has a touch screen provided on the machine table for setting relevant action parameters, and the movement of the machine table relative to the exposure platform At least one inductive switch for sensing the relative position of the exposure platform is arranged at the stroke. 7. The exposure machine according to claim 1, wherein the light bulbs of the at least one exposure light source group are arranged in a straight line along the light-transmitting groove of the light exit cover, and a group is provided for projecting light from the light bulbs to the The reflector of the light-transmitting groove of the light exit cover. 8. The exposure machine according to claim 7, characterized in that, the light bulbs of the at least one exposure light source group are arranged in a manner of oscillating toward the light irradiation direction. 9. The exposure machine according to claim 7, wherein the light bulbs of the at least one exposure light source group are arranged in a manner of swaying toward the light irradiation direction at an included angle of 2°. 10. The exposure machine according to claim 1, characterized in that the light source is a light bulb or an LED light source.

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