[go: up one dir, main page]

CN1917044A - Flexible cable frame assembly and flexible cable cantilever assembly for disk drives - Google Patents

Flexible cable frame assembly and flexible cable cantilever assembly for disk drives Download PDF

Info

Publication number
CN1917044A
CN1917044A CN 200510091256 CN200510091256A CN1917044A CN 1917044 A CN1917044 A CN 1917044A CN 200510091256 CN200510091256 CN 200510091256 CN 200510091256 A CN200510091256 A CN 200510091256A CN 1917044 A CN1917044 A CN 1917044A
Authority
CN
China
Prior art keywords
flexible cable
magnetic head
cantilever
connecting terminal
pad
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CN 200510091256
Other languages
Chinese (zh)
Other versions
CN100545912C (en
Inventor
姚明高
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
SAE Magnetics HK Ltd
Original Assignee
SAE Magnetics HK Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by SAE Magnetics HK Ltd filed Critical SAE Magnetics HK Ltd
Priority to CNB2005100912569A priority Critical patent/CN100545912C/en
Priority to JP2006222288A priority patent/JP2007052909A/en
Publication of CN1917044A publication Critical patent/CN1917044A/en
Application granted granted Critical
Publication of CN100545912C publication Critical patent/CN100545912C/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Landscapes

  • Supporting Of Heads In Record-Carrier Devices (AREA)
  • Moving Of Heads (AREA)
  • Adjustment Of The Magnetic Head Position Track Following On Tapes (AREA)
  • Moving Of The Head To Find And Align With The Track (AREA)

Abstract

本发明一种用于磁头折片组合的柔性电缆框架组合,包括微驱动器框体及安装在该微驱动器框体上的柔性电缆。该柔性电缆包括位于其一端的第一组连接触点、位于其另一端的第二组连接触点及集成于所述柔性电缆上、用于连接上述两组连接触点的导线(trace)。

Figure 200510091256

The present invention discloses a flexible cable frame assembly for a head flap assembly, comprising a micro-drive frame and a flexible cable mounted on the micro-drive frame. The flexible cable comprises a first group of connection contacts at one end thereof, a second group of connection contacts at the other end thereof, and a wire (trace) integrated on the flexible cable for connecting the two groups of connection contacts.

Figure 200510091256

Description

用于磁盘驱动装置的柔性电缆框架组合及柔性电缆悬臂组合Flexible cable frame assembly and flexible cable cantilever assembly for disk drives

技术领域technical field

本发明涉及一种信息记录盘驱动设备,具体地讲涉及一种用于磁盘驱动系统之磁头折片组合的微驱动器及悬臂,及用于减少导线振动的微驱动器及悬臂。The invention relates to an information recording disk drive device, in particular to a microdriver and a cantilever used in a magnetic head gimbal combination of a disk drive system, and a microdriver and a cantilever used to reduce wire vibration.

背景技术Background technique

一种常见的信息存储设备是磁盘驱动系统,其使用磁性媒介来存储数据及设置于该磁性媒介上方的移动式读写头来选择性地从磁性媒介上读取数据或将数据写在磁性媒介上。A common type of information storage device is a magnetic disk drive system that uses magnetic media to store data and a moving read/write head positioned over the magnetic media to selectively read data from and write data to the magnetic media superior.

消费者总是希望这类磁盘驱动系统的存储容量不断增加,同时希望其读写速度更快更精确。因此磁盘制造商一直致力于开发具有较高存储容量的磁盘驱动单元,比如通过减少磁盘上的磁道宽度或磁道间距的方式增加磁道的密度,进而间接增加磁盘的存储容量。然而,随着磁道密度的增加,对读写头的位置控制精度也必须相应的提高,以便在高密度磁盘中实现更快更精确的读写操作。随着磁道密度的增加,使用传统技术来实现更快更精确将读写头定位于磁盘上适当的磁道变得更加困难。因此,磁盘制造商一直寻找提高对读写头位置控制的方式,以便利用不断增加的磁道密度所带来的益处。Consumers have always expected increasing storage capacity from such disk drive systems, while at the same time expecting faster and more accurate read and write speeds. Therefore, disk manufacturers have been devoting themselves to developing disk drive units with higher storage capacity, such as increasing the density of tracks by reducing the track width or track pitch on the disk, thereby indirectly increasing the storage capacity of the disk. However, as the track density increases, the accuracy of the position control of the read/write head must also be improved accordingly in order to achieve faster and more accurate read/write operations in high-density disks. As track densities increase, it becomes more difficult to achieve faster and more precise positioning of the read-write head to the proper track on the disk using conventional techniques. As a result, disk manufacturers are constantly looking for ways to increase control over the position of the read/write heads in order to take advantage of increasing track densities.

磁盘制造商经常使用的一种提高读写头在高密度盘上位置控制精度的方法为采用第二个驱动器,也叫微驱动器。该微驱动器与一主驱动器配合共同实现控制读写头的位置精度及访问速度。包含微驱动器的磁盘驱动单元被称为双驱动器系统。One method often used by disk manufacturers to improve the accuracy of position control of the read/write head on high-density disks is to use a second drive, also called a microdrive. The micro drive cooperates with a main drive to control the position accuracy and access speed of the read-write head. Disk drive units that contain microdrives are known as dual drive systems.

在过去曾经开发出许多用于提高存取速度及读写头在高密度磁盘的磁道上定位精度的双驱动器系统。这种双驱动器系统通常包括一主音圈马达驱动器及一副微驱动器,比如压电微驱动器(即压电元件微驱动器,以下简称为压电微驱动器)。该音圈马达驱动器由一伺服控制系统控制,该伺服控制系统导致驱动臂旋转,该驱动臂上承载读写头以便将读写头定位于存储盘上适当的磁道上。压电微驱动器与音圈马达驱动器配合使用共同提高存取速度及实现读写头在磁道上位置的微调。音圈马达驱动器对读写头的位置粗调,而压电微驱动器微驱动器对读写头相对于磁盘的位置的精调。通过两个驱动器的配合,共同实现数据在存储盘上高效而精确的读写操作。Many dual-drive systems have been developed in the past to increase the access speed and positioning accuracy of the read/write head on the tracks of high-density magnetic disks. This dual-driver system usually includes a main voice coil motor driver and a secondary micro-driver, such as a piezoelectric micro-driver (ie, a piezoelectric element micro-driver, hereinafter referred to as a piezoelectric micro-driver). The voice coil motor driver is controlled by a servo control system which causes the rotation of the drive arm carrying the read/write head for positioning the read/write head on the appropriate track on the storage disk. The piezoelectric micro-driver is used in conjunction with the voice coil motor driver to improve the access speed and realize the fine adjustment of the position of the read-write head on the magnetic track. The voice coil motor driver provides coarse adjustment of the position of the read-write head, while the piezoelectric micro-actuator micro-driver provides fine adjustment of the position of the read-write head relative to the disk. Through the cooperation of the two drives, the efficient and accurate read and write operations of data on the storage disk are jointly realized.

一种已知的用于实现对读写头位置微调的微驱动器包含有压电微驱动器。该压电微驱动器具有相关的电性驱动驱动装置,该电性驱动装置可导致微驱动器上的压电微驱动器选择性的收缩或扩张。压电微驱动器具有适当的结构,使得压电微驱动器的收缩或扩张引起微驱动器的运动,进而引起读写头的运动。相对于仅仅使用音圈马达驱动器的磁盘驱动单元,该读写头的运动可以实现对读写头位置更快更精确的调整。该等范例性的压电微驱动器揭露于许多专利中,比如名称为“微驱动器及磁头折片组合”的日本专利JP 2002-133803,及名称为“具有实现位置微调的驱动器的磁头折片组合,包含该磁头折片组合的磁盘驱动单元及该磁头折片组合的制造方法”的日本专利JP 2002-074871。A known microactuator for fine-tuning the position of a read/write head includes a piezoelectric microactuator. The piezoelectric microactuator has an associated electrically actuated drive device that causes selective contraction or expansion of the piezoelectric microactuator on the microactuator. The piezoelectric microactuator is structured such that contraction or expansion of the piezoelectric microactuator causes movement of the microactuator, which in turn causes movement of the read/write head. The movement of the read/write head enables faster and more precise adjustment of the position of the read/write head compared to a disk drive unit that only uses a voice coil motor drive. Such exemplary piezoelectric micro-actuators are disclosed in many patents, such as Japanese Patent JP 2002-133803 entitled "Micro-actuator and HGA combination", and HGA assembly entitled "HEAD GAMEPLAY WITH DRIVE FOR FINE POSITION ADJUSTMENT" , a magnetic disk drive unit comprising the head gimbal assembly and a manufacturing method of the head gimbal assembly "Japanese Patent JP 2002-074871.

图1所示为一传统的磁盘驱动系统。一磁盘101安装在旋转马达102上并由其旋转。一音圈马达臂104上承载有磁头折片组合100,该磁头折片组合100包括含有磁头103的微驱动器105,该磁头103上安装有读写头。一音圈马达控制音圈马达臂104的运动,进而控制磁头103在磁盘101的表面上的磁道之间的移动,最终实现读写头在磁盘101上数据的读写。在运行状态时,包含读写头的磁头103与旋转的磁盘101之间形成空气动力性接触,并产生一升力。该升力与由磁头折片组合100的悬臂施加的弹力大小相等方向相反而互相平衡,进而导致在马达臂104旋转的过程中,旋转的磁盘101的表面上方形成并维持一预定的飞行高度。Figure 1 shows a conventional disk drive system. A magnetic disk 101 is mounted on and rotated by a rotary motor 102 . A VCM arm 104 carries the HGA 100 , the HGA 100 includes a micro-drive 105 including a magnetic head 103 on which a read/write head is mounted. A voice coil motor controls the movement of the voice coil motor arm 104 , and then controls the movement of the magnetic head 103 between tracks on the surface of the magnetic disk 101 , and finally realizes the reading and writing of data on the magnetic disk 101 by the read/write head. In the running state, an aerodynamic contact is formed between the magnetic head 103 including the read/write head and the rotating magnetic disk 101 to generate a lift force. The lift force is equal and opposite to the spring force exerted by the suspension of the HGA 100 to balance each other, thereby forming and maintaining a predetermined flying height above the surface of the rotating disk 101 during the rotation of the motor arm 104 .

图2所示为图1中含有双驱动器的磁盘驱动单元的磁头折片组合100。然而,由于音圈马达及磁头悬臂组合的固有误差,磁头103无法实现快速而精确的位置控制,相反地,而是影响读写头精确读写磁盘上数据的性能。为此,增加上述压电微驱动器微驱动器105,以便提高磁头及读写头的位置控制精度。更具体地讲,相对于音圈马达驱动器,该压电微驱动器以更小的幅度来调整磁头103的位移,以便补偿音圈马达和(或)磁头悬臂组合的制造误差。该压电微驱动器使得应用更小的磁道间距成为可能,并且可以将磁盘驱动单元的磁道密度(TPI,每英寸所含的磁道数量)提高50%,同时可以减少磁头的寻道时间及置位时间。因此,压电微驱动器微驱动器可以大幅度提高存储盘的存储容量。FIG. 2 shows the HGA 100 of the disk drive unit with dual drives in FIG. 1 . However, due to the inherent error of the combination of the voice coil motor and the head suspension, the magnetic head 103 cannot achieve fast and precise position control. On the contrary, it affects the performance of the read-write head to accurately read and write data on the disk. For this reason, the above-mentioned piezoelectric micro-driver micro-driver 105 is added to improve the position control accuracy of the magnetic head and the read-write head. More specifically, compared with the voice coil motor driver, the piezoelectric micro-driver adjusts the displacement of the magnetic head 103 in a smaller range, so as to compensate the manufacturing error of the voice coil motor and/or head suspension combination. The piezoelectric microactuator makes it possible to apply smaller track pitches, and can increase the track density (TPI, the number of tracks per inch) of the disk drive unit by 50%, while reducing the seek time and settling time of the magnetic head. time. Therefore, the piezoelectric microdrive microdrive can greatly increase the storage capacity of the storage disk.

如图2所示,该磁头折片组合100包括一具有挠性件108的悬臂106。该挠性件108具有悬臂舌片110用于承载压电微驱动器105及磁头103。该挠性件108的悬臂舌片110两侧向外突出设置两导线112、114。每一导线的一端连接到一活动板116上,另一端连接到多条导线118上,该多条导线118与连接触点120互连。As shown in FIG. 2 , the HGA 100 includes a suspension 106 with a flexible member 108 . The flexible member 108 has a cantilever tongue 110 for carrying the piezoelectric micro-actuator 105 and the magnetic head 103 . Two wires 112 , 114 protrude outward from two sides of the cantilever tongue 110 of the flexible member 108 . One end of each wire is connected to a movable plate 116 and the other end is connected to a plurality of wires 118 interconnected with connection contacts 120 .

参考图3,传统的压电微驱动器105包括金属框体130,该金属框体130包括顶板132、底板134及将顶板132、底板134连接起来的两侧臂136、138。两侧臂136、138上分别安装有压电单元140、142。磁头103安装在顶板132上。Referring to FIG. 3 , a conventional piezoelectric micro-actuator 105 includes a metal frame 130 including a top plate 132 , a bottom plate 134 and two side arms 136 , 138 connecting the top plate 132 and the bottom plate 134 . Piezoelectric units 140 , 142 are installed on the two side arms 136 , 138 respectively. The magnetic head 103 is mounted on the top plate 132 .

参考图4,该压电微驱动器105借助其金属框体130的底板134而安装到悬臂舌片110上。该底板134可通过环氧树脂胶或激光焊接的方式固定到悬臂舌片110上。三个电连接球150(金球连接或焊料球连接)将压电微驱动器105固定在压电单元140、142两侧的悬臂导线118上。另外,多个电连接球比如四个电连接球(金球连接或焊料球连接)将磁头103连接到悬臂导线118上,以便电性连接磁头103上的读写单元。当通过悬臂导线118对压电单元140、142施加电压时,压电单元140、142收缩或扩张导致其侧臂136、138侧向弯曲。该弯曲致使金属框体130产生剪切变形,即该金属框体130的形状由矩形变成平行四边形,从而导致顶板132的运动,继而导致安装在顶板132上的磁头103沿磁盘轨道运动,使得可精确调整读写头的位置。通过上述方式,可实现磁头位置控制及读写头位置微调。Referring to FIG. 4 , the piezoelectric micro-actuator 105 is mounted on the cantilever tongue 110 by means of the bottom plate 134 of its metal frame 130 . The bottom plate 134 can be fixed to the cantilever tongue 110 by epoxy glue or laser welding. Three electrical connection balls 150 (gold ball connection or solder ball connection) fix the piezoelectric micro-actuator 105 on the cantilever wires 118 on both sides of the piezoelectric unit 140 , 142 . In addition, a plurality of electrical connection balls such as four electrical connection balls (gold ball connection or solder ball connection) connect the magnetic head 103 to the suspension wire 118 so as to electrically connect the read/write unit on the magnetic head 103 . When a voltage is applied to the piezoelectric elements 140, 142 through the cantilever wire 118, the piezoelectric elements 140, 142 contract or expand causing their side arms 136, 138 to bend laterally. This bending causes the metal frame body 130 to produce shear deformation, that is, the shape of the metal frame body 130 changes from a rectangle to a parallelogram, thereby causing the movement of the top plate 132, which in turn causes the magnetic head 103 installed on the top plate 132 to move along the disk track, so that The position of the read/write head can be adjusted precisely. Through the above method, the position control of the magnetic head and the fine adjustment of the position of the read/write head can be realized.

图5所示为电压施加到压电单元140、142时该压电微驱动器105作动的过程。比如,当在第一半周期将正弦电压施加到具有正极性的压电微驱动器的压电单元140上时,该压电单元140将收缩并导致侧臂136产生波浪状变形。由于磁头103安装在顶板132上,该变形将促使磁头向左移动。相类似地,当在下半周期将正弦电压施加到具有正极性的压电微驱动器的压电单元142上时,该压电单元142将收缩并导致侧臂138产生波浪状变形。该变形将促使磁头向右移动。上述运动依赖于压电微驱动器压电单元的极性方向及电压施加的情况,但其工作原理却很简单。FIG. 5 shows the actuation process of the piezoelectric micro-driver 105 when a voltage is applied to the piezoelectric units 140 and 142 . For example, when a sinusoidal voltage is applied to the piezoelectric unit 140 of a piezoelectric micro-actuator with a positive polarity in the first half cycle, the piezoelectric unit 140 will contract and cause the side arm 136 to deform in a wavy manner. Since the magnetic head 103 is mounted on the top plate 132, this deformation will cause the magnetic head to move to the left. Similarly, when a sinusoidal voltage is applied to the piezoelectric unit 142 of the piezoelectric micro-actuator with positive polarity during the second half cycle, the piezoelectric unit 142 will contract and cause the side arm 138 to deform in a wave-like manner. This deformation will cause the head to move to the right. The above-mentioned motion depends on the polarity direction of the piezoelectric unit of the piezoelectric micro-driver and the situation of voltage application, but its working principle is very simple.

参考图6,两个向外突出的导线112、114用于将多条导线118与活动板116电连接起来,该活动板116与磁头103电性连接。为减少由于导线的刚度引起的导线阻力及为保持微驱动器在运行时的性能,导线112、114弯曲设置在悬臂舌片110的两侧。在磁盘驱动单元的磁头寻道及复位操作中,该微驱动器产生运动,这种布置允许在此过程中导线112、114进行振动及移动。上述导线的振动或移动将导致磁头脱离磁轨。对于具有较高转速及配置多个磁盘的磁盘驱动单元,向外弯曲的导线112、114还将引起因空气流撞击导线或悬臂而形成的风偏问题。上述两点将导致磁头的位置误差信号(PES)及不可重复偏转(NRRO)性能降低。这将限制磁盘驱动单元的性能及容量。Referring to FIG. 6 , two outwardly protruding wires 112 , 114 are used to electrically connect a plurality of wires 118 to the movable plate 116 , which is electrically connected to the magnetic head 103 . In order to reduce the wire resistance caused by the rigidity of the wire and to maintain the performance of the micro-driver during operation, the wires 112 and 114 are bent and arranged on both sides of the cantilever tongue 110 . This arrangement allows the wires 112, 114 to vibrate and move during head seek and reset operations of the disk drive unit during which the microdrive generates motion. Vibration or movement of the aforementioned wires will cause the head to come off the track. For disk drive units with higher rotational speeds and multiple disk configurations, the outwardly bent wires 112, 114 will also cause windage problems due to air flow hitting the wires or suspension. The above two points will lead to the degradation of the position error signal (PES) and non-repeatable run-out (NRRO) performance of the magnetic head. This will limit the performance and capacity of the disk drive unit.

比如,图6所示为当微驱动器105被激发时导线112、114运动时的情况。如图所示,当在微驱动器105上施加电压时,侧臂136、138的运动引发导线112向悬臂106的背面摆动,导线114则向磁头的顶面摆动。上述摆动将产生悬臂谐振,这是导致磁头偏离磁轨的原因之一。For example, FIG. 6 shows the movement of the wires 112, 114 when the micro-actuator 105 is activated. As shown, when a voltage is applied to the micro-actuator 105, the movement of the side arms 136, 138 causes the wire 112 to swing towards the back of the suspension 106 and the wire 114 to swing towards the top surface of the head. The above-mentioned swing will generate suspension resonance, which is one of the reasons for the head to deviate from the magnetic track.

图7所示为传统技术中当微驱动器被激发时由于导线运动而产生的磁头偏离磁轨的情况。如上讨论所述,传统设计中包括向外突出的导线112、114。由于导线运动产生的磁头偏离磁轨的位移是根据频率测量的。如该图所示,该位移趋势中包含三个峰值160(比如4Khz、6.3Khz、8.5Khz对应的数值)。FIG. 7 shows the deviation of the magnetic head from the magnetic track due to the movement of the wire when the micro-driver is activated in the conventional technology. As discussed above, conventional designs include outwardly protruding wires 112,114. The displacement of the head off-track due to wire movement is measured in terms of frequency. As shown in the figure, the displacement trend includes three peaks 160 (such as values corresponding to 4Khz, 6.3Khz, and 8.5Khz).

图8所示为传统技术中磁头的不可重复偏转(NRRO)性能的测量数据。如图所示,若干峰值170表示不同频率时的磁头偏离磁轨的情况,其表示了较明显的由导线运动产生的磁头偏移量。FIG. 8 shows measurement data of the non-repeatable run-out (NRRO) performance of the magnetic head in the conventional technology. As shown in the figure, a number of peaks 170 represent the deviation of the magnetic head from the magnetic track at different frequencies, which represent a relatively obvious head deviation caused by the movement of the wire.

因此实有必要提供一种改进的系统,以便克服上述缺点。It is therefore necessary to provide an improved system in order to overcome the above-mentioned disadvantages.

发明内容Contents of the invention

本发明一方面涉及一种具有降低导线振动结构的微驱动器及悬臂。One aspect of the present invention relates to a micro-driver and a cantilever with a structure for reducing the vibration of a wire.

本发明另一方面涉及一种具有柔性电缆框架组合的微驱动器及具有柔性电缆悬臂组合的悬臂。Another aspect of the present invention relates to a micro-actuator with a flexible cable frame combination and a cantilever with a flexible cable cantilever combination.

本发明另一方面涉及一种用于磁头折片组合的柔性电缆框架组合。该柔性电缆框架组合包括微驱动器框体及安装在微驱动器框体上的柔性电缆。该柔性电缆包括位于其一端的第一组连接触点、位于其另一端的第二组连接触点及集成于所述柔性电缆上、用于连接上述两组连接触点的导线(trace)。Another aspect of the present invention relates to a flexible cable frame assembly for a head gimbal assembly. The flexible cable frame combination includes a micro-drive frame body and a flexible cable installed on the micro-drive frame body. The flexible cable includes a first group of connection contacts at one end, a second group of connection contacts at the other end, and traces integrated on the flexible cable for connecting the above two groups of connection contacts.

本发明另一方面涉及一种包含柔性电缆框架组合的磁头折片组合,其包括含有微驱动器框体及安装在该微驱动器框体上的框架柔性电缆的柔性电缆框架组合;磁头;及支撑上述柔性电缆框架组合与磁头的悬臂。该悬臂包括一个含有悬臂挠性件及安装于该挠性件上的柔性电缆的柔性电缆悬臂组合。Another aspect of the present invention relates to a magnetic head gimbal assembly comprising a flexible cable frame assembly, which includes a flexible cable frame assembly comprising a microdrive frame and a frame flexible cable mounted on the microdrive frame; a magnetic head; and supporting the above-mentioned The flexible cable frame is combined with the cantilever of the magnetic head. The suspension arm includes a flexible cable suspension assembly including a suspension flexure and a flexible cable mounted on the flexure.

本发明又一方面涉及一种磁盘驱动装置。所述磁盘驱动装置包括磁头折片组合;所述磁头折片组合包括柔性电缆框架组合、磁头及支撑所述柔性电缆框架组合与磁头的悬臂。所述磁盘驱动装置还包括连接与所述磁头折片组合的驱动臂;磁盘;及可旋转该磁盘的主轴马达。其中所述柔性电缆框架组合包括微驱动器框体及安装于该微驱动器框体上的柔性电缆。其中该柔性电缆包括位于其一端的第一组连接触点、位于其另一端的第二组连接触点及集成于所述柔性电缆上、用于连接上述两组连接触点的导线(trace)。Still another aspect of the present invention relates to a magnetic disk drive device. The disk drive device includes a magnetic head gimbal assembly; the magnetic head gimbal assembly includes a flexible cable frame assembly, a magnetic head, and a suspension arm supporting the flexible cable frame assembly and the magnetic head. The disk drive device further includes a drive arm connected to the head gimbal; a disk; and a spindle motor capable of rotating the disk. The flexible cable frame assembly includes a micro-drive frame and a flexible cable installed on the micro-drive frame. Wherein the flexible cable includes a first group of connection contacts at one end, a second group of connection contacts at the other end, and a wire (trace) integrated on the flexible cable for connecting the above two groups of connection contacts .

一磁头折片组合,该磁头折片组合包括微驱动器框体、安装在微驱动器框体上的柔性电缆,磁头及承载上述柔性电缆框架组合与磁头的悬臂。该磁盘驱动单元还包括与磁头折片组合连接的驱动臂、磁盘及驱动该磁盘的旋转马达。该柔性电缆框架组合包括微驱动器框体及安装在微驱动器框体上的柔性电缆。该柔性电缆包括位于柔性电缆一端的第一组连接触点、位于柔性电缆另一端的第二组连接触点及集成在柔性电缆上将第一组连接触点与第二组连接触点连接起来的导线。A magnetic head gimbal assembly, which includes a micro-drive frame, a flexible cable installed on the micro-drive frame, a magnetic head, and a cantilever carrying the above-mentioned flexible cable frame assembly and the magnetic head. The disk drive unit also includes a drive arm combined with the head gimbal, a disk, and a rotation motor for driving the disk. The flexible cable frame combination includes a micro-drive frame body and a flexible cable installed on the micro-drive frame body. The flexible cable includes a first set of connecting contacts at one end of the flexible cable, a second set of connecting contacts at the other end of the flexible cable, and is integrated on the flexible cable to connect the first set of connecting contacts with the second set of connecting contacts of wires.

本发明又一方面涉及一种磁头折片组合的制造方法。所述方法包括提供微驱动器框体;将框架柔性电缆安装于所述微驱动器框体,其中该框架柔性电缆包括第一及第二组连接触点以及将上述两组连接触点连接起来的集成导线;将压电元件安装到所述微驱动器框体上;将该微驱动器框体安装到悬臂上;将所述压电元件与悬臂上的悬臂导线电性连接;将磁头安装到所述微驱动器框体上;将所述磁头与悬臂上的悬臂导线电性连接;进行外观检查;测试磁头及压电性能;及清洗。Yet another aspect of the present invention relates to a method for manufacturing a HGA. The method includes providing a micro-actuator frame; mounting a frame-flexible cable on the micro-drive frame, wherein the frame-flexible cable includes first and second sets of connecting contacts and an integrated assembly connecting the two sets of connecting contacts. wire; the piezoelectric element is installed on the micro-drive frame; the micro-drive frame is installed on the cantilever; the piezoelectric element is electrically connected to the cantilever wire on the cantilever; the magnetic head is installed on the micro-drive on the drive frame; electrically connecting the magnetic head to the suspension wire on the suspension; performing appearance inspection; testing the magnetic head and piezoelectric performance; and cleaning.

通过以下详细的描述,并结合附图,本发明的其它方面、特征及优点将变得非常明显,该等附图属于发明内容的一部分并用于阐述发明原理。Other aspects, features and advantages of the present invention will become apparent from the following detailed description in conjunction with the accompanying drawings, which belong to a part of the summary of the invention and are used to illustrate the principles of the invention.

附图说明Description of drawings

图1为传统磁盘驱动单元的立体图。FIG. 1 is a perspective view of a conventional disk drive unit.

图2为传统磁头折片组合的立体图。FIG. 2 is a perspective view of a conventional head gimbal assembly.

图3为图2所示磁头折片组合的磁头及压电微驱动器的立体图。FIG. 3 is a perspective view of the magnetic head and the piezoelectric micro-actuator of the magnetic head gimbal assembly shown in FIG. 2 .

图4为图2所示磁头折片组合的局部立体图。FIG. 4 is a partial perspective view of the head gimbal assembly shown in FIG. 2 .

图5为图2所示磁头折片组合的磁头及压电微驱动器在使用状态时的俯视图。FIG. 5 is a top view of the magnetic head and the piezoelectric micro-actuator of the magnetic head gimbal assembly shown in FIG. 2 when they are in use.

图6为图2所示磁头折片组合使用状态的局部立体图。FIG. 6 is a partial perspective view of the assembled state of the magnetic head gimbal shown in FIG. 2 .

图7展示了传统技术中磁头由于导线(trace)运动而发生脱轨位移(off trackdisplacement)的情况。Figure 7 shows the situation of the off track displacement (off track displacement) of the magnetic head due to the movement of the wire (trace) in the conventional technology.

图8展示了现有技术中磁头的不可重复偏转(NRRO)性能。FIG. 8 shows the non-repeatable run-out (NRRO) performance of a prior art head.

图9为本发明一个实施例中描述的包含压电微驱动器的磁头折片组合的立体图。FIG. 9 is a perspective view of a HGA including a piezoelectric microactuator described in one embodiment of the present invention.

图10为图9所示的磁头折片组合的局部立体图。FIG. 10 is a partial perspective view of the HGA shown in FIG. 9 .

图11为图10所示的磁头折片组合的分解图。FIG. 11 is an exploded view of the head gimbal assembly shown in FIG. 10 .

图12为图10所示的磁头折片组合的侧视图。FIG. 12 is a side view of the HGA shown in FIG. 10 .

图13为图9所示的、从磁头及悬臂隔离出的压电微驱动器的立体图。FIG. 13 is a perspective view of the piezoelectric micro-actuator shown in FIG. 9, isolated from the magnetic head and suspension.

图14为图13所示压电微驱动器的分解图。FIG. 14 is an exploded view of the piezoelectric micro-actuator shown in FIG. 13 .

图15展示了图9所示的磁头折片组合的磁头由于导线运动而引起的脱轨位移情况。FIG. 15 shows the derailment displacement of the magnetic head of the HGA shown in FIG. 9 due to the movement of the wire.

图16展示了图9所示的磁头折片组合的磁头不可重复偏转(NRRO)性能。FIG. 16 shows the head non-repeatable deflection (NRRO) performance of the head gimbal assembly shown in FIG. 9 .

图17为本发明一个实施例中描述的制造流程图。Figure 17 is a fabrication flow diagram described in one embodiment of the invention.

图18为本发明的另一个实施例中描述的含有压电微驱动器及悬臂的磁头折片组合的分解图。18 is an exploded view of a HGA including a piezoelectric microactuator and a suspension described in another embodiment of the present invention.

图19为图18所示的磁头折片组合组装后的立体图。FIG. 19 is a perspective view of the assembled head gimbal shown in FIG. 18 .

图20为图18所示的磁头折片组合的局部立体图。FIG. 20 is a partial perspective view of the HGA shown in FIG. 18 .

图21为本发明另一个实施例中描述的制造流程图。Figure 21 is a fabrication flow diagram described in another embodiment of the present invention.

图22为本发明另一个实施例中描述的磁头折片组合的分解图。FIG. 22 is an exploded view of a HGA described in another embodiment of the present invention.

图23为本发明的又一个实施例中描述的含有压电微驱动器的磁头折片组合的立体图。23 is a perspective view of a HGA including a piezoelectric microactuator described in yet another embodiment of the present invention.

图24为本发明的再一个实施例中描述的含有压电微驱动器的磁头折片组合的立体图。24 is a perspective view of a HGA including a piezoelectric microactuator described in yet another embodiment of the present invention.

具体实施方式Detailed ways

现在参考附图描述本发明的实施例,附图中类似的元件标号代表类似的元件。如上所述,本发明旨在利用微驱动器精确驱动磁头的同时减小磁头折片组合内的导线振动。本发明一方面是提供一种具有柔性电缆框架组合的微驱动器,以便减小磁头折片组合内的导线振动。本发明另一方面在于提供一种具有柔性电缆悬臂组合(flex cable suspension assembly)的悬臂,以便减小磁头折片组合内的导线振动。通过减小磁头折片组合内的导线振动,使得磁盘驱动装置的性能得以提高。Embodiments of the present invention will now be described with reference to the drawings, in which like reference numerals represent like elements. As mentioned above, the present invention aims to reduce the vibration of the wires in the HGA while precisely driving the magnetic head using a micro-driver. One aspect of the present invention is to provide a micro-actuator with a flexible cable frame assembly to reduce the vibration of the wires in the head gimbal assembly. Another aspect of the present invention is to provide a suspension with a flex cable suspension assembly to reduce wire vibration in the HGA. The performance of the disk drive is improved by reducing the vibration of the wires in the head gimbal assembly.

现在描述用于磁头折片组合的微驱动器及悬臂的几个实施例。应当注意该微驱动器及悬臂可适用于任何具有微驱动器及悬臂以减小导线振动的适合的磁盘驱动装置,而并不局限于附图中显示的磁头折片组合的特定结构。即本发明适用于任何领域内的任何含有微驱动器及悬臂的适合装置。Several embodiments of microactuators and suspensions for HGAs are now described. It should be noted that the micro-actuator and suspension can be applied to any suitable disk drive device with micro-actuation and suspension to reduce wire vibration, and is not limited to the specific structure of the HGA shown in the drawings. That is, the present invention is applicable to any suitable device including a micro-actuator and a cantilever in any field.

图9至图12为本发明一个实施例中描述的含有压电微驱动器212的磁头折片组合210(head gimbal assembly,HGA)。该磁头折片组合210包括压电微驱动器212、磁头214及用于承载或悬挂所述压电微驱动器212与磁头214的悬臂216。9 to 12 illustrate a head gimbal assembly (HGA) 210 (head gimbal assembly, HGA) including a piezoelectric micro-actuator 212 according to an embodiment of the present invention. The HGA 210 includes a piezoelectric micro-actuator 212 , a magnetic head 214 , and a suspension 216 for supporting or suspending the piezoelectric micro-actuator 212 and the magnetic head 214 .

如上所述,所述悬臂216包括基板218、负载梁220、枢接件222、挠性件224及位于该挠性件224上的内外悬臂导线226、227(suspension trace)。该基板218包括用于将悬臂16连接到磁盘驱动装置的音圈马达(VCM)的驱动臂上的安装孔228。该基板218的形状随磁盘驱动装置的构造或样式而变化。并且,该基板218由相对较硬或刚度较好的材料比如金属形成,以便稳定地将悬臂216支撑在音圈马达的驱动臂上。As mentioned above, the cantilever 216 includes a base plate 218 , a load beam 220 , a pivot member 222 , a flexible member 224 and inner and outer suspension traces 226 , 227 (suspension traces) on the flexible member 224 . The base plate 218 includes mounting holes 228 for attaching the suspension arm 16 to the drive arm of a voice coil motor (VCM) of a disk drive. The shape of the substrate 218 varies depending on the configuration or style of the magnetic disk drive. Moreover, the substrate 218 is formed of a relatively hard or rigid material such as metal, so as to stably support the cantilever 216 on the driving arm of the voice coil motor.

该枢接件222通过比如焊接方式装配到基板218与负载梁220上。如图所示,该枢接件222包括一个与基板218上的安装孔228对正的孔230。另外,该枢接件222还包括用于支撑负载梁220的保持条232。The pivot member 222 is assembled on the base plate 218 and the load beam 220 by, for example, welding. As shown, the pivot member 222 includes a hole 230 aligned with the mounting hole 228 on the base plate 218 . In addition, the pivot member 222 further includes a holding bar 232 for supporting the load beam 220 .

该负载梁220通过比如焊接方式安装在枢接件222的保持条232上。该负载梁220上形成与挠性件224配合的小凸起234(参考图12)。该负载梁220的作用类似于弹簧或吸振器,以缓冲磁头214对悬臂216的振动。该负载梁220上可选择地具有一提升片236,当磁盘停止旋转时,该提升片236将磁头折片组合210从磁盘上提起。The load beam 220 is mounted on the holding bar 232 of the pivot member 222 by, for example, welding. A small protrusion 234 is formed on the load beam 220 to cooperate with the flexible member 224 (refer to FIG. 12 ). The load beam 220 acts like a spring or a shock absorber to buffer the vibration of the magnetic head 214 against the suspension 216 . The load beam 220 optionally has a lifting piece 236 on it, and the lifting piece 236 lifts the HGA 210 from the disk when the disk stops rotating.

该挠性件224通过诸如叠压(lamination)或焊接方式安装到枢接件222和负载梁220上。该挠性件224上设有悬臂舌片238,用于将压电微驱动器212连接到悬臂216上(参考图11)。该悬臂舌片238与负载梁220上的小凸起234相配合。同时,设于该挠性件224上的悬臂导线226、227将若干连接触点240(与外部控制系统连接)与磁头214及位于压电微驱动器212上的压电元件242电连接起来。所述悬臂导线226、227可为柔性印刷电路(FPC)且可包括任何适合数量的连线。The flexible member 224 is mounted on the pivot member 222 and the load beam 220 by means such as lamination or welding. The flexible member 224 is provided with a cantilever tongue 238 for connecting the piezoelectric micro-actuator 212 to the cantilever 216 (refer to FIG. 11 ). The cantilever tongue 238 cooperates with the small protrusion 234 on the load beam 220 . At the same time, the cantilever wires 226 and 227 arranged on the flexible member 224 electrically connect a plurality of connection contacts 240 (connected to an external control system) with the magnetic head 214 and the piezoelectric element 242 on the piezoelectric micro-driver 212 . The cantilever wires 226, 227 may be flexible printed circuits (FPC) and may include any suitable number of wires.

如图10、11所示,连接触点244直接连接到内悬臂导线226上,以便将该内悬臂导线226电连接到压电微驱动器的柔性电缆框架组合的连接触点246上,所述连接触点246与磁头214电性连接。同时,连接触点248直接连接到外悬臂导线227上,以便将该外悬臂导线227与压电元件242上的连接触点250电性连接。As shown in FIGS. 10 and 11, the connection contacts 244 are directly connected to the inner cantilever wire 226 so as to electrically connect the inner cantilever wire 226 to the connection contacts 246 of the flexible cable frame assembly of the piezoelectric micro-actuator. The contact point 246 is electrically connected to the magnetic head 214 . Meanwhile, the connection contact 248 is directly connected to the outer cantilever wire 227 so as to electrically connect the outer cantilever wire 227 to the connection contact 250 on the piezoelectric element 242 .

在所述磁盘驱动装置中设有音圈马达,以便控制性地驱动驱动臂,进而控制性地驱动磁头折片组合210,并使得磁头折片组合210将磁头214及其读/写头定位于磁盘驱动装置的磁盘上的特定信息轨道。所述微驱动器212用于为磁盘驱动装置实现快速而精确的位置控制,同时减少工作过程中的磁头寻轨及定位时间。因此,当磁头折片组合210装入磁盘驱动装置中时,便形成双驱动器系统,其中该音圈马达驱动器实现读/写头的较大位置调整,而压电微驱动器212实现对读/写头位置的微调。A voice coil motor is provided in the disk drive to controllably drive the drive arm, thereby controllably driving the HGA 210 and causing the HGA 210 to position the magnetic head 214 and its read/write head at A specific track of information on a disk in a disk drive. The micro-driver 212 is used to realize fast and precise position control for the disk drive device, and at the same time reduce the time for tracking and positioning of the magnetic head during operation. Thus, when the HGA 210 is incorporated into a disk drive, a dual drive system is formed in which the voice coil motor drive enables greater positional adjustment of the read/write head, while the piezo microdrive 212 enables control of the read/write head. Fine-tuning of the head position.

图11、图13及图14展示了与磁头214及悬臂216隔离的压电微驱动器212。如图所示,该压电微驱动器212包括柔性电缆框架组合255(flex cable frameassembly)及安装在柔性电缆框架组合255上的压电元件242。所述柔性电缆框架组合255包括微驱动器框体252及框架柔性电缆257。11 , 13 and 14 illustrate piezoelectric microactuator 212 isolated from magnetic head 214 and suspension 216 . As shown in the figure, the piezoelectric micro-driver 212 includes a flexible cable frame assembly 255 (flex cable frame assembly) and a piezoelectric element 242 mounted on the flexible cable frame assembly 255 . The flexible cable frame assembly 255 includes a micro-drive frame body 252 and a frame flexible cable 257 .

该微驱动器框体252包括顶支撑板254、底支撑板256、连接顶支撑板254与底支撑板256的侧臂258及自顶支撑板254延伸出的连接触点支撑板260。该微驱动器框体252可由任何适当的材料,例如金属,通过任何适当的工艺形成。The micro-drive frame 252 includes a top support plate 254 , a bottom support plate 256 , a side arm 258 connecting the top support plate 254 and the bottom support plate 256 , and a connecting contact support plate 260 extending from the top support plate 254 . The micro-actuator frame 252 can be formed of any suitable material, such as metal, by any suitable process.

所述压电元件242借助例如环氧胶、粘结剂或各向异性导电膜(ACF)装在微驱动器框体252上的每一侧臂258上,以便形成压电微驱动器212。每一压电元件242为板体状,其通过由压电材料,如PZT构成的叠压薄膜形成,并以Ni-Ag(镍-银)、Pt(铂)或金作为电极。在另一实施例中,所述压电元件242为单层或多层陶瓷压电元件。然而,所述一个或多个压电元件242可以任何适合的方式安装到侧臂258上。The piezoelectric element 242 is mounted on each side arm 258 of the micro-actuator frame 252 by means of eg epoxy glue, adhesive or anisotropic conductive film (ACF), so as to form the piezoelectric micro-actuator 212 . Each piezoelectric element 242 has a plate shape formed by laminated thin films made of piezoelectric material such as PZT, and uses Ni-Ag (nickel-silver), Pt (platinum) or gold as electrodes. In another embodiment, the piezoelectric element 242 is a single-layer or multi-layer ceramic piezoelectric element. However, the one or more piezoelectric elements 242 may be mounted to the side arm 258 in any suitable manner.

该框架柔性电缆257包括绝缘层261,该绝缘层261包括顶部263、底部265及连接顶部263与底部265的中间部267。如图所示,该中间部267包括相对向内弯曲的边缘,从而在顶部263与底部265之间形成弱点(weak point)。在该顶部263上形成复数,比如四个,磁头连接触点264;在该底部265上形成复数,比如四个,悬臂连接触点246。磁头连接触点264与悬臂连接触点246通过绝缘层261上的导线266互相电性连接。The frame flex cable 257 includes an insulating layer 261 including a top 263 , a bottom 265 and a middle portion 267 connecting the top 263 and the bottom 265 . As shown, the intermediate portion 267 includes relatively inwardly curved edges forming a weak point between the top 263 and bottom 265 . A plurality of, for example four, magnetic head connecting contacts 264 are formed on the top 263 ; and a plurality of, for example four, cantilever connecting contacts 246 are formed on the bottom 265 . The magnetic head connecting contact 264 and the suspension connecting contact 246 are electrically connected to each other through the wire 266 on the insulating layer 261 .

通过将绝缘层261的顶部263安装到微驱动器框体252的顶支撑板254上,并将绝缘层261的底部265安装到微驱动器框体252的底支撑板256上,而将该框架柔性电缆257安装到微驱动器框体252上。该绝缘层261可借助例如环氧胶、粘结剂或各向异性导电膜(ACF)等固定在微驱动器框体252上。The frame flex cable is mounted by mounting the top 263 of the insulating layer 261 to the top support plate 254 of the microactuator frame 252 and the bottom 265 of the insulating layer 261 to the bottom support plate 256 of the microactuator frame 252. 257 is installed on the microdrive frame 252. The insulating layer 261 can be fixed on the micro-actuator frame 252 by means of, for example, epoxy glue, adhesive or anisotropic conductive film (ACF).

如图10所示,该微驱动器框体252的底支撑板256将所述压电微驱动器212固定到悬臂216上。具体地讲,该底支撑板256借助例如环氧胶、树脂或激光焊接等方式局部装在挠性件224的悬臂舌片238上。该框架柔性电缆257的悬臂连接触点246借助电连接262,例如线连接方式与悬臂216上对应的连接触点244电性连接。这样使得底支撑板256连接到悬臂216上,且使得框架柔性电缆257与内悬臂导线226电性连接。同时,在压电微驱动器212与悬臂舌片238之间形成一个平行间隙280,使得该压电微驱动器212在使用时能够自由运动,如图12所示。As shown in FIG. 10 , the bottom support plate 256 of the micro-actuator frame 252 fixes the piezoelectric micro-actuator 212 to the cantilever 216 . Specifically, the bottom support plate 256 is partially mounted on the cantilever tongue 238 of the flexible member 224 by means such as epoxy glue, resin or laser welding. The cantilever connecting contact 246 of the frame flexible cable 257 is electrically connected to the corresponding connecting contact 244 on the cantilever 216 via an electrical connection 262 , for example, a wire connection. This connects the bottom support plate 256 to the cantilever 216 and electrically connects the frame flex cable 257 to the inner cantilever wire 226 . At the same time, a parallel gap 280 is formed between the piezoelectric micro-actuator 212 and the cantilever tongue 238 so that the piezoelectric micro-actuator 212 can move freely when in use, as shown in FIG. 12 .

该微驱动器框体252的顶支撑板254及框架柔性电缆257的顶部263具有可将所述压电微驱动器212连接到磁头214上的结构。具体地讲,该磁头214的一端对应于框架柔性电缆257上的磁头连接触点264设有复数连接触点268,比如四个连接触点。所述顶支撑板254及顶部263支撑其上的磁头214,所述框架柔性电缆257上的磁头连接触点264与磁头214上对应的连接触点268借助例如电连接球270(GBB或SBB)电性连接(参考图10及12)。从而将压电微驱动器212连接到磁头214上,而形成一个磁头与压电微驱动器组合274,同时将磁头214及其读/写元件与悬臂216的内悬臂导线226电性连接。The top support plate 254 of the micro-actuator frame 252 and the top 263 of the frame flexible cable 257 have structures that can connect the piezoelectric micro-actuator 212 to the magnetic head 214 . Specifically, one end of the magnetic head 214 is provided with a plurality of connecting contacts 268 , such as four connecting contacts, corresponding to the magnetic head connecting contacts 264 on the frame flexible cable 257 . The top support plate 254 and the top 263 support the magnetic head 214 thereon, and the magnetic head connection contacts 264 on the frame flexible cable 257 are connected to the corresponding connection contacts 268 on the magnetic head 214 by means of, for example, electrical connection balls 270 (GBB or SBB). Electrical connections (refer to Figures 10 and 12). Thus, the piezoelectric micro-actuator 212 is connected to the magnetic head 214 to form a magnetic head and piezoelectric micro-actuator combination 274 , and the magnetic head 214 and its read/write elements are electrically connected to the inner cantilever wire 226 of the cantilever 216 .

在上述实施例中,该导线266在四个磁头连接触点264与四个悬臂连接触点246之间设有四条导线。然而,任何适合数量的导线及触点可被使用。In the above embodiment, the wire 266 has four wires between the four magnetic head connection contacts 264 and the four cantilever connection contacts 246 . However, any suitable number of wires and contacts may be used.

所述压电微驱动器212上的压电元件242电连接到外悬臂导线227上。具体地讲,压电元件242上的连接触点250,例如两个连接触点,与外悬臂导线227上的连接触点,例如两个连接触点248借助电连接球276(金球连接或焊料球连接,GBB或SBB)互相电连接起来。从而使得电压通过外悬臂导线227而施加到压电元件242上。The piezoelectric element 242 on the piezoelectric micro-driver 212 is electrically connected to the outer cantilever wire 227 . Specifically, the connection contacts 250 on the piezoelectric element 242, such as two connection contacts, are connected to the connection contacts on the outer cantilever wire 227, such as two connection contacts 248, by means of an electrical connection ball 276 (gold ball connection or Solder ball connections, GBB or SBB) are electrically connected to each other. Thus, a voltage is applied to the piezoelectric element 242 through the outer cantilever wire 227 .

使用时,通过例如在所述压电元件242上施加电压的方式,使得压电元件242被激发而引起其选择性地收缩或扩张。所述压电微驱动器212被如此构造,从而使得所述压电元件242的收缩或扩张引起侧臂258的运动,该侧臂258的运动又引起顶支撑板254的运动,最后导致连接在压电微驱动器212上的磁头214产生运动。In use, for example, by applying a voltage to the piezoelectric element 242 , the piezoelectric element 242 is excited to cause it to selectively contract or expand. The piezoelectric microactuator 212 is constructed such that contraction or expansion of the piezoelectric element 242 causes movement of the side arm 258, which in turn causes movement of the top support plate 254, which in turn causes A magnetic head 214 on an electrical micro-actuator 212 generates motion.

由于导线266集成于框架柔性电缆257,且连接触点支撑板260集成于微驱动器框体252,所以当压电微驱动器212工作时,上述元件不会产生额外振动。通过降低磁头折片组合内的导线振动,可使得磁盘驱动装置的性能得以提高。而且,因为上述元件在悬臂、磁头折片组合及磁盘驱动装置的制造过程中不容易变形,所以具有集成导线266和连接触点支撑板260的压电微驱动器212的良品率得以提高。另外,微驱动器框体252及框架柔性电缆257具有相对简单的结构及制造工序,可使得产品设计及制造成本降低。Since the wire 266 is integrated in the frame flexible cable 257 and the contact support plate 260 is integrated in the micro-actuator frame 252, when the piezoelectric micro-actuator 212 is working, the above-mentioned components will not generate extra vibration. The performance of the disk drive can be improved by reducing the vibration of the wires in the HGA. Furthermore, the yield of the piezoelectric microactuator 212 with integrated wires 266 and connecting contact support plate 260 is improved because the aforementioned components are less prone to deformation during suspension, HGA, and disk drive manufacturing. In addition, the micro-actuator frame 252 and the frame flexible cable 257 have a relatively simple structure and manufacturing process, which can reduce product design and manufacturing costs.

图15展示了当压电微驱动器212工作后磁头由于导线运动而引起的脱轨位移情况。与图7所示的传统技术的测试结果相对比,图15所示的三个峰值284相对于图7所示的峰值160有所改善(比如在4Khz、6.3kHz和8.5Khz的时候)。FIG. 15 shows the derailment displacement of the magnetic head caused by the movement of the wire when the piezoelectric micro-actuator 212 works. Compared with the test results of the conventional technology shown in FIG. 7 , the three peaks 284 shown in FIG. 15 are improved relative to the peak 160 shown in FIG. 7 (for example, at 4Khz, 6.3kHz and 8.5Khz).

图16所示为用于压电微驱动器212的磁头的不可重复偏转(NRRO)性能的测试数据。与图8表示的传统技术的测试结果相比较,图16所示的峰值286相对图8所示的峰值170有所改善。FIG. 16 shows test data for the non-repeatable run-out (NRRO) performance of the magnetic head for the piezoelectric micro-actuator 212 . Compared with the test results of the conventional technology shown in FIG. 8 , the peak value 286 shown in FIG. 16 is improved relative to the peak value 170 shown in FIG. 8 .

图17所示为本发明的一个实施例中描述的磁头折片组合的制造及装配流程的主要步骤。该流程开始后(图17中的步骤1),所述柔性电缆被安装在微驱动器框体上(图17中的步骤2),所述柔性电缆及微驱动器框体可以为图9至图14所示的结构。接着,所述压电元件被安装在所述微驱动器框体的侧臂上(图17中的步骤3),以形成压电微驱动器。接着,压电微驱动器的微驱动器框体通过诸如焊接的方式被安装在悬臂的悬臂舌片上(图17中的步骤4)。上述安装结束后,将压电元件与悬臂的悬臂导线电性连接(图17中的步骤5)。接下来,将磁头安装在所述压电微驱动器上(图17中的步骤6),并将该磁头与悬臂上的悬臂导线电性连接(图17中的步骤7)。然后,对该磁头折片组合进行外观检查(图17中的步骤8),并对磁头及压电性能进行测试(图17中的步骤9)。在最后一个步骤中,对该磁头折片组合进行清洗(图17中的步骤10)。FIG. 17 shows the main steps of the manufacturing and assembly process of the HGA described in one embodiment of the present invention. After the flow process starts (step 1 in Figure 17), the flexible cable is installed on the micro-driver frame (step 2 in Figure 17), and the flexible cable and the micro-driver frame can be as shown in Figure 9 to Figure 14 structure shown. Next, the piezoelectric element is mounted on the side arm of the micro-actuator frame (step 3 in FIG. 17 ) to form a piezoelectric micro-actuator. Next, the micro-actuator frame of the piezoelectric micro-actuator is installed on the cantilever tongue of the cantilever by means such as welding (step 4 in FIG. 17 ). After the above installation is completed, the piezoelectric element is electrically connected to the cantilever wire of the cantilever (step 5 in FIG. 17 ). Next, install the magnetic head on the piezoelectric micro-actuator (step 6 in FIG. 17 ), and electrically connect the magnetic head to the cantilever wire on the cantilever (step 7 in FIG. 17 ). Then, perform visual inspection on the head gimbal assembly (step 8 in FIG. 17 ), and test the magnetic head and piezoelectric performance (step 9 in FIG. 17 ). In the last step, the HGA is cleaned (step 10 in FIG. 17).

图18至图20展示了本发明另一个实施例中描述的含有压电微驱动器312及悬臂316的磁头折片组合310。在该实施例中,该压电微驱动器312包括柔性电缆框架组合355,其中该柔性电缆357包括方便与悬臂316连接的延伸部394,比如长尾导板。该悬臂316还包括安装在挠性件324上的柔性电缆悬臂组合300。18 to 20 illustrate an HGA 310 including a piezoelectric micro-actuator 312 and a suspension 316 according to another embodiment of the present invention. In this embodiment, the piezoelectric microactuator 312 includes a flexible cable frame assembly 355, wherein the flexible cable 357 includes an extension 394, such as a tail guide, to facilitate attachment to the cantilever 316. The suspension 316 also includes a flexible cable suspension assembly 300 mounted on a flexure 324 .

如图18所示,该悬臂316包括基板318、安装在基板318上的枢接件322、安装在枢接件322的保持条上的负载梁320及安装于负载梁320与枢接件322上的挠性件324。挠性件324上设有与负载梁320上的小凸起相配合的悬臂舌片338(与图12类似)。所述基板318、枢接件322、负载梁320及挠性件324之间可以借助比如焊接的方式互相连接起来。As shown in FIG. 18 , the cantilever 316 includes a base plate 318 , a pivot member 322 installed on the base plate 318 , a load beam 320 installed on the holding bar of the pivot member 322 , and a load beam 320 installed on the load beam 320 and the pivot member 322 The flexible member 324. A cantilever tongue 338 (similar to FIG. 12 ) is provided on the flexible member 324 to cooperate with the small protrusion on the load beam 320 . The base plate 318 , the pivot member 322 , the load beam 320 and the flexible member 324 can be connected to each other by means such as welding.

所述柔性电缆悬臂组合300包括具有绝缘层304的悬臂柔性电缆302。内外悬臂导线326、327例如通过叠压的方式(laminated)集成于该绝缘层304上。所述内悬臂导线326的一端与若干连接触点340(其与外部控制系统相连)电性连接,另一端与连接触点344(其与磁头314相连)电性连接。同时,所述外悬臂导线327的一端与所述连接触点340(其与外部控制系统相连)电性连接,另一端则与连接触点348(其与压电微驱动器342相连)电性连接。The flexible cable cantilever assembly 300 includes a cantilever flexible cable 302 having an insulating layer 304 . The inner and outer cantilever wires 326 , 327 are integrated on the insulating layer 304 by laminating, for example. One end of the inner cantilever wire 326 is electrically connected to a plurality of connection contacts 340 (which are connected to an external control system), and the other end is electrically connected to a connection contact 344 (which is connected to the magnetic head 314 ). At the same time, one end of the outer cantilever wire 327 is electrically connected to the connection contact 340 (which is connected to the external control system), and the other end is electrically connected to the connection contact 348 (which is connected to the piezoelectric micro-driver 342 ). .

所述柔性电缆框架组合355包括微驱动器框体352及框架柔性电缆357。该微驱动器框体352与微驱动器框体252类似,也包括顶支撑板354、底支撑板356、侧臂358及连接触点支撑板360。一个压电元件342安装在每一侧臂358上。The flexible cable frame assembly 355 includes a micro-drive frame body 352 and a frame flexible cable 357 . The micro-drive frame 352 is similar to the micro-drive frame 252 , and also includes a top support plate 354 , a bottom support plate 356 , a side arm 358 and a connecting contact support plate 360 . A piezoelectric element 342 is mounted on each side arm 358 .

所述框架柔性电缆357包括具有顶部363及底部365的绝缘层361。导线366集成于该绝缘层361,并具有延伸部394,比如长尾导板。磁头连接触点364,例如四个磁头连接触点,形成于该顶部363上;悬臂连接触点346,例如四个悬臂连接触点形成于该延伸部394上。在一个实施例中,所述悬臂连接触点346为双面裸露的铜端子。所述磁头连接触点364与悬臂连接触点346通过绝缘层361上的导线366电性连接。The frame flex cable 357 includes an insulating layer 361 having a top 363 and a bottom 365 . The wire 366 is integrated in the insulating layer 361 and has an extension 394 such as a long-tail guide plate. Head connection contacts 364 , such as four head connection contacts, are formed on the top portion 363 ; cantilever connection contacts 346 , such as four cantilever connection contacts, are formed on the extension portion 394 . In one embodiment, the cantilever connecting contact 346 is a double-sided exposed copper terminal. The magnetic head connecting contact 364 is electrically connected to the cantilever connecting contact 346 through a wire 366 on the insulating layer 361 .

通过将绝缘层361的顶部363安装到微驱动器框体352的顶支撑板354上,并将绝缘层361的底部365安装到微驱动器框体352的底支撑板356上,从而将该框架柔性电缆357安装到微驱动器框体352上。该绝缘层361可借助例如环氧胶、粘结剂或各向异性导电膜安装于所述微驱动器框体352上。The frame flex cable is formed by mounting the top 363 of the insulating layer 361 to the top support plate 354 of the microactuator frame 352 and the bottom 365 of the insulating layer 361 to the bottom support plate 356 of the microactuator frame 352. 357 is installed on the microdrive frame 352. The insulating layer 361 can be installed on the micro-actuator frame 352 by means of epoxy glue, adhesive or anisotropic conductive film, for example.

如图19至图20所示,该悬臂柔性电缆302借助例如环氧树脂胶或粘结剂安装在悬臂316上的挠性件324上。如图18所示,该悬臂柔性电缆302包括由挠性件324的悬臂舌片338支撑的舌片部306。As shown in FIGS. 19-20 , the cantilever flexible cable 302 is mounted on the flexible member 324 on the cantilever 316 by means of eg epoxy glue or adhesive. As shown in FIG. 18 , the cantilever flex cable 302 includes a tongue portion 306 supported by a cantilever tongue 338 of a flexure 324 .

所述微驱动器框体352的底支撑板356借助例如环氧树脂胶或粘结剂安装于挠性件324的悬臂舌片338上及悬臂柔性电缆302的舌片部306上。柔性电缆357的悬臂连接触点346与悬臂柔性电缆302上对应的连接触点344借助比如超声波连接或各向异性导电膜连接方式实现电性连接。从而将底支撑板356连接到悬臂316上,并将柔性电缆357与内悬臂导线326电性连接。The bottom support plate 356 of the micro-actuator frame 352 is mounted on the cantilever tongue 338 of the flexible member 324 and the tongue portion 306 of the cantilever flexible cable 302 by means of eg epoxy glue or adhesive. The cantilever connecting contact 346 of the flexible cable 357 is electrically connected to the corresponding connecting contact 344 on the cantilever flexible cable 302 by means of, for example, ultrasonic connection or anisotropic conductive film connection. This connects the bottom support plate 356 to the cantilever 316 and electrically connects the flex cable 357 to the inner cantilever wire 326 .

所述微驱动器框体352的顶支撑板354及柔性电缆357的顶部363共同将压电微驱动器312连接到磁头314上。具体地将,顶支撑板354及顶部363共同支撑其上的磁头314,并且框架柔性电缆357上的磁头连接触点364与磁头314上对应的连接触点368借助例如电连接球370(GBB或SBB)电性连接(参考图20)。从而将压电微驱动器312连接到磁头314上,而形成一个磁头与压电微驱动器组合374,并且磁头314及其读/写头与悬臂316的内悬臂导线326电性连接。The top support plate 354 of the micro-actuator frame 352 and the top 363 of the flexible cable 357 jointly connect the piezoelectric micro-actuator 312 to the magnetic head 314 . Specifically, the top support plate 354 and the top 363 jointly support the magnetic head 314 thereon, and the magnetic head connection contacts 364 on the frame flexible cable 357 and the corresponding connection contacts 368 on the magnetic head 314 are connected by means of, for example, electrical connection balls 370 (GBB or SBB) electrical connections (refer to Figure 20). Thus, the piezoelectric micro-actuator 312 is connected to the magnetic head 314 to form a magnetic head and piezoelectric micro-actuator combination 374 , and the magnetic head 314 and its read/write head are electrically connected to the inner cantilever wire 326 of the cantilever 316 .

所述压电微驱动器312上的压电元件342与外悬臂导线327电性连接。具体地讲,所述压电元件342上的连接触点与外悬臂导线327上的连接触点348,比如两个连接触点借助电连接球376(GBB或SBB)(参考图20)电性连接。从而使得电压通过外悬臂导线327而施加到压电元件342上。The piezoelectric element 342 on the piezoelectric micro-actuator 312 is electrically connected to the outer cantilever wire 327 . Specifically, the connection contacts on the piezoelectric element 342 and the connection contacts 348 on the outer cantilever wire 327, such as two connection contacts, are electrically connected by means of an electrical connection ball 376 (GBB or SBB) (refer to FIG. 20 ). connect. Thus, a voltage is applied to the piezoelectric element 342 through the outer cantilever wire 327 .

由于所述导线366集成于框架柔性电缆357上,悬臂导线326及327集成于悬臂柔性电缆302内,连接触点支撑板360集成于微驱动器框体352,所以当压电微驱动器312工作时,该等元件不会产生多余振动。通过减小磁头折片组合内的导线振动,使得磁盘驱动装置的性能得以提高。此外,因为上述集成的部件在悬臂、磁头折片组合及磁盘驱动装置的制造过程中不容易变形,所以可以提高产品良率。另外,所述微驱动器框体352、悬臂316、框架柔性电缆357及悬臂柔性电缆302具有相对简单的结构及制造工序,使得产品设计及制造成本降低。Since the wire 366 is integrated on the frame flexible cable 357, the cantilever wires 326 and 327 are integrated in the cantilever flexible cable 302, and the connecting contact support plate 360 is integrated into the micro-driver frame 352, so when the piezoelectric micro-driver 312 works, These components do not generate unwanted vibrations. The performance of the disk drive is improved by reducing the vibration of the wires in the head gimbal assembly. In addition, since the above-mentioned integrated components are not easily deformed during the manufacturing process of the suspension arm, the HGA and the disk drive device, the yield rate of the product can be improved. In addition, the micro-actuator frame 352 , the cantilever 316 , the frame flexible cable 357 and the cantilever flexible cable 302 have a relatively simple structure and manufacturing process, which reduces product design and manufacturing costs.

图21所示为本发明的另一个实施例中描述的磁头折片组合的制造及装配流程的主要步骤。该流程开始后(图21中的步骤1),将框架柔性电缆安装在微驱动器框体上(图21中的步骤2),所述框架柔性电缆及微驱动器框体可以为图18至图20所示的结构。接着,将压电元件安装在微驱动器框体的侧臂上(图21中的步骤3),以形成压电微驱动器。接着,悬臂柔性电缆被安装于悬臂的挠性件(图21中的步骤4)。所述悬臂柔性电缆及悬臂可以为图18至图20所示的结构。接着,将压电微驱动器的微驱动器框体通过诸如焊接的方式安装在悬臂上(图21中的步骤5)。上述安装结束后,再将压电微驱动器与悬臂上的悬臂导线电性连接(图21中的步骤6)。接下来,将磁头安装在压电微驱动器上(图21中的步骤7),并将该磁头与悬臂上的悬臂导线电性连接(图21中的步骤8)。然后,对该磁头折片组合进行外观检查(图21中的步骤9),并对磁头及压电性能进行测试(图21中的步骤10)。在最后一个步骤中,对该磁头折片组合进行清洗(图21中的步骤11)。FIG. 21 shows the main steps of the manufacturing and assembling process of the HGA described in another embodiment of the present invention. After the flow process starts (step 1 in Figure 21), the frame flexible cable is installed on the micro-driver frame (step 2 in Figure 21), and the frame flexible cable and the micro-drive frame can be as shown in Figure 18 to Figure 20 structure shown. Next, install the piezoelectric element on the side arm of the micro-actuator frame (step 3 in FIG. 21 ) to form a piezoelectric micro-actuator. Next, the cantilever flex cable is mounted to the flexible member of the cantilever (step 4 in FIG. 21 ). The cantilever flexible cable and the cantilever can have the structures shown in Fig. 18 to Fig. 20 . Next, install the micro-actuator frame of the piezoelectric micro-actuator on the cantilever by means such as welding (step 5 in FIG. 21 ). After the above installation is completed, the piezoelectric micro-actuator is electrically connected to the cantilever wire on the cantilever (step 6 in FIG. 21 ). Next, install the magnetic head on the piezoelectric micro-actuator (step 7 in FIG. 21 ), and electrically connect the magnetic head to the cantilever wire on the cantilever (step 8 in FIG. 21 ). Then, perform visual inspection on the head gimbal assembly (step 9 in FIG. 21 ), and test the magnetic head and piezoelectric performance (step 10 in FIG. 21 ). In the last step, the HGA is cleaned (step 11 in FIG. 21).

图22为本发明又一个实施例中描述的磁头折片组合410。在该实施例中,所述悬臂柔性电缆402与悬臂416的挠性件424相结合。该磁头折片组合410的其余结构与上述磁头折片组合310基本相似,并以相似的标号表示。FIG. 22 illustrates a HGA 410 described in yet another embodiment of the present invention. In this embodiment, the cantilever flex cable 402 is integrated with the flexure 424 of the cantilever 416 . The rest of the structure of the HGA 410 is basically similar to the above-mentioned HGA 310 and denoted by similar reference numerals.

图23为本发明再一个实施例中描述的磁头折片组合510。在该实施例中,所述压电微驱动器512包括一个位于微驱动器框体552背侧的框架柔性电缆557。如图所示,所述连接触点支撑板560上设有一个开口或窗口590,以使磁头连接触点564暴露出来与磁头214相连接。在该实施例中,所述磁头连接触点564为飞线触点(fly lead pads)。同样,各向异性导电膜592或其它合适的材料亦可用于将悬臂连接触点546机械及电性连接到悬臂216上的连接触点244上。该磁头折片组合510的其余结构与上述磁头折片组合210基本相似,并以相似的标号表示。FIG. 23 illustrates a HGA 510 described in yet another embodiment of the present invention. In this embodiment, the piezoelectric microactuator 512 includes a frame flex cable 557 located on the back side of the microactuator frame 552 . As shown, an opening or window 590 is formed on the connecting contact support plate 560 to expose the magnetic head connecting contact 564 to connect with the magnetic head 214 . In this embodiment, the head connection contacts 564 are fly lead pads. Likewise, the anisotropic conductive film 592 or other suitable materials can also be used to mechanically and electrically connect the cantilever connecting contact 546 to the connecting contact 244 on the cantilever 216 . The rest of the structure of the HGA 510 is basically similar to the above-mentioned HGA 210 and denoted by similar reference numerals.

图24为本发明又一个实施例中描述的磁头折片组合610。在该实施例中,所述压电微驱动器612包括框架柔性电缆657。该框架柔性电缆657具有延伸部694,比如长尾导板,以方便与悬臂616连接。而且,该框架柔性电缆657位于微驱动器框体652的背侧。如图所示,所述连接触点支撑板660上具有一个开口或窗口690,以使磁头连接触点664暴露出来用于和磁头314连接。该磁头折片组合610的其余结构与上述磁头折片组合310基本相似,并以相似的标号表示。应当注意该悬臂616包括悬臂柔性电缆302,可以与挠性件324相结合,也可以不与挠性件324相结合。FIG. 24 illustrates a HGA 610 described in yet another embodiment of the present invention. In this embodiment, the piezoelectric microactuator 612 includes a frame flex cable 657 . The frame flex cable 657 has an extension 694 , such as a long tail guide, to facilitate connection with the cantilever 616 . Also, the frame flex cable 657 is located on the back side of the microdrive frame body 652 . As shown, the connection contact support plate 660 has an opening or window 690 therein to expose the head connection contacts 664 for connection to the magnetic head 314 . The rest of the structure of the HGA 610 is basically similar to the above-mentioned HGA 310 and denoted by similar reference numerals. It should be noted that the cantilever 616 includes a cantilever flexible cable 302 that may or may not be combined with a flexure 324 .

本发明诸多实施例所描述的具有压电微驱动器及悬臂的磁头折片组合可使用于磁盘驱动装置(HDD)中。该磁盘驱动装置可以为图1所展示的类型。The head gimbal assembly with piezoelectric microactuator and suspension described in various embodiments of the present invention can be used in a hard disk drive (HDD). The disk drive can be of the type shown in FIG. 1 .

由于所述磁盘驱动装置的结构、工作及组装流程为本技术领域普通技术人员所知悉,这里不再赘述。所述压电微驱动器及悬臂可使用于任何具有压电微驱动器及悬臂的磁盘驱动装置或具有压电微驱动器及悬臂的其它装置中。在一个实施例中,所述压电微驱动器及悬臂使用于具有高转速的磁盘驱动装置中。Since the structure, operation and assembly process of the disk drive device are well known to those skilled in the art, details will not be repeated here. The piezoelectric microactuator and cantilever can be used in any disk drive device having a piezoelectric microactuator and cantilever or other devices having a piezoelectric microactuator and cantilever. In one embodiment, the piezoelectric microactuator and cantilever are used in a disk drive with high rotational speed.

以上结合最佳实施例对本发明进行了描述,但本发明并不局限于以上揭示的实施例,而应当涵盖各种根据本发明的本质进行的修改及等效组合。The present invention has been described above in conjunction with the best embodiments, but the present invention is not limited to the above-disclosed embodiments, but should cover various modifications and equivalent combinations made according to the essence of the present invention.

Claims (26)

1. flexible cable frame combination that is used for magnetic head fold piece combination comprises:
The microdrive framework; And
Be installed in the flexible cable on this microdrive framework, wherein
This flexible cable comprises first group of connecting terminal being positioned at the one end, be positioned at second group of connecting terminal of its other end and be integrated on the described flexible cable, be used to connect the lead (trace) of above-mentioned two groups of connecting terminals.
2. flexible cable frame combination according to claim 1, it is characterized in that: described microdrive framework comprises the connecting terminal back up pad that is integrated in this microdrive framework, and this connecting terminal back up pad supports in described first group of connecting terminal and the second group of connecting terminal.
3. flexible cable frame combination according to claim 1, it is characterized in that: this microdrive framework comprises the connecting terminal back up pad that is integrated in this microdrive framework, and this connecting terminal back up pad is provided with at least one opening of one that is used for supporting and exposing described first group of connecting terminal and second group of connecting terminal.
4. flexible cable frame combination according to claim 1 is characterized in that: this microdrive framework comprises the end back up pad that is connected on the described magnetic head fold piece combination cantilever, support the top back up pad of described magnetic head fold piece combination magnetic head and connect described should end back up pad and a pair of side arm of top back up pad.
5. flexible cable frame combination according to claim 4, it is characterized in that further comprising the piezoelectric element that is installed on each side arm, each piezoelectric element can be excited and cause that the selectivity of side arm moves, and moving of described side arm can cause that top board moves, and then magnetic head is moved.
6. flexible cable frame combination according to claim 4, it is characterized in that: this flexible cable comprises the insulation course that contains at least one top and bottom, this top is installed on the top back up pad of described microdrive framework, and this bottom is installed on the end back up pad of described microdrive framework.
7. flexible cable frame combination according to claim 6 is characterized in that: described bottom comprises the cantilever connecting terminal, be used for described cantilever on corresponding connecting terminal electrically connect.
8. flexible cable frame combination according to claim 6 is characterized in that: described top comprises the magnetic head connecting terminal, be used for described magnetic head on corresponding connecting terminal electrically connect.
9. flexible cable frame combination according to claim 8 is characterized in that: described flexible cable is installed on the front surface of described microdrive framework, and this front surface is towards described magnetic head.
10. flexible cable frame combination according to claim 8 is characterized in that: described flexible cable is installed on the rear surface of microdrive framework, and this rear surface is said head dorsad.
11. flexible cable frame combination according to claim 10, it is characterized in that: described microdrive framework comprises the connecting terminal back up pad that is integrated in this microdrive framework, this connecting terminal back up pad has at least one and is used for opening that described magnetic head connecting terminal is come out, so that corresponding connecting terminal electrically connects on described magnetic head connecting terminal and the magnetic head.
12. flexible cable frame combination according to claim 6 is characterized in that further comprising being integrated in the bottom and from the extended extension in this bottom, this extension comprise with cantilever on the cantilever connecting terminal of corresponding connecting terminal electric connection.
13. flexible cable frame combination according to claim 12 is characterized in that: described flexible cable is installed on the front surface of described microdrive framework, and this front surface is towards said head.
14. flexible cable frame combination according to claim 12 is characterized in that: described flexible cable is installed on the rear surface of described microdrive framework, the described dorsad magnetic head in this rear surface.
15. flexible cable frame combination according to claim 14, it is characterized in that: this microdrive framework comprises the connecting terminal back up pad that is integrated in this microdrive framework, this connecting terminal back up pad has at least one and is used for opening that described magnetic head connecting terminal is come out, so that corresponding connecting terminal electrically connects on described magnetic head connecting terminal and the magnetic head.
16. a magnetic head fold piece combination comprises:
Contain the microdrive framework and be installed in the flexible cable frame combination of the framework flexible cable on this microdrive framework;
Magnetic head; And
Support the cantilever of above-mentioned flexible cable frame combination and magnetic head, this cantilever comprises a flexible cable cantilever combination that contains the cantilever flexible element and be installed on the flexible cable on this flexible element.
17. magnetic head fold piece combination according to claim 16 is characterized in that: this framework flexible cable comprises first group of connecting terminal being positioned at the one end, be positioned at second group of connecting terminal of its other end and be integrated on the described flexible cable, be used to connect the lead of above-mentioned two groups of connecting terminals.
18. magnetic head fold piece combination according to claim 17 is characterized in that: this microdrive framework comprises the end back up pad that is connected on the cantilever, support the top back up pad of magnetic head and connect a pair of side arm of this end back up pad and top back up pad.
19. magnetic head fold piece combination according to claim 18, it is characterized in that further comprising the piezoelectric element that is installed on each side arm, each piezoelectric element can be excited and cause that the selectivity of side arm moves, and moving of described side arm can cause that top board moves, and then magnetic head is moved.
20. magnetic head fold piece combination according to claim 18, it is characterized in that: this flexible cable comprises the insulation course that contains at least one top and bottom, this top is installed on the top back up pad of described microdrive framework, and this bottom is installed on the end back up pad of described microdrive framework.
21. magnetic head fold piece combination according to claim 20 is characterized in that: described bottom comprises the cantilever connecting terminal, be used for described cantilever on corresponding connecting terminal electrically connect.
22. magnetic head fold piece combination according to claim 20 is characterized in that: described top comprises the magnetic head connecting terminal, be used for described magnetic head on corresponding connecting terminal electrically connect.
23. magnetic head fold piece combination according to claim 16 is characterized in that: described cantilever flexible cable comprises insulation course and is integrated in cantilever lead on this insulation course that described cantilever lead and the connecting terminal that is used for being connected with external control system electrically connect.
24. a disk drive comprises:
Magnetic head fold piece combination; Described magnetic head fold piece combination comprises flexible cable frame combination, magnetic head and supports the cantilever of described flexible cable frame combination and magnetic head;
Connect actuating arm with described magnetic head fold piece combination;
Disk; And
The Spindle Motor of rotatable this disk, wherein
Described flexible cable frame combination comprises:
The microdrive framework; And
Be installed on the flexible cable on this microdrive framework, wherein
This flexible cable comprises first group of connecting terminal being positioned at the one end, be positioned at second group of connecting terminal of its other end and be integrated on the described flexible cable, be used to connect the lead (trace) of above-mentioned two groups of connecting terminals.
25. a method of making magnetic head fold piece combination comprises:
The microdrive framework is provided;
The framework flexible cable is installed on described microdrive framework, and wherein this framework flexible cable comprises first and second group connecting terminal and with above-mentioned two groups of integral wires that connecting terminal couples together;
Piezoelectric element is installed on the described microdrive framework;
This microdrive framework is installed on the cantilever;
Cantilever lead on described piezoelectric element and the cantilever is electrically connected;
Magnetic head is installed on the described microdrive framework;
Cantilever lead on described magnetic head and the cantilever is electrically connected;
Carry out visual examination;
Test magnetic head and piezoelectric property; And
Clean.
26. manufacture method according to claim 25 is characterized in that further comprising the step that a cantilever flexible cable is installed on the described cantilever with the integrated cantilever lead that links to each other with external control system.
CNB2005100912569A 2005-08-19 2005-08-19 Flexible cable frame assembly and flexible cable cantilever assembly for disk drive Expired - Fee Related CN100545912C (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
CNB2005100912569A CN100545912C (en) 2005-08-19 2005-08-19 Flexible cable frame assembly and flexible cable cantilever assembly for disk drive
JP2006222288A JP2007052909A (en) 2005-08-19 2006-08-17 Flexible cable frame assembly for hga of disk device, and head gimbal assembly using the same

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CNB2005100912569A CN100545912C (en) 2005-08-19 2005-08-19 Flexible cable frame assembly and flexible cable cantilever assembly for disk drive

Publications (2)

Publication Number Publication Date
CN1917044A true CN1917044A (en) 2007-02-21
CN100545912C CN100545912C (en) 2009-09-30

Family

ID=37738022

Family Applications (1)

Application Number Title Priority Date Filing Date
CNB2005100912569A Expired - Fee Related CN100545912C (en) 2005-08-19 2005-08-19 Flexible cable frame assembly and flexible cable cantilever assembly for disk drive

Country Status (2)

Country Link
JP (1) JP2007052909A (en)
CN (1) CN100545912C (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101295513B (en) * 2007-04-25 2012-09-05 新科实业有限公司 Suspension member and manufacturing method thereof, magnetic head gimbal assembly and disk drive unit

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009266348A (en) * 2008-04-28 2009-11-12 Fujitsu Ltd Head suspension and disk device
JP5570111B2 (en) * 2008-12-18 2014-08-13 エイチジーエスティーネザーランドビーブイ Head gimbal assembly and disk drive
CN102148039B (en) * 2010-02-10 2015-02-04 新科实业有限公司 Magnetic head, magnetic head tabs combination and disk drive unit

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SG106598A1 (en) * 2000-02-01 2004-10-29 Matsushita Electric Ind Co Ltd Head support mechanism and thin film piezoelectric actuator
CN100353419C (en) * 2003-12-24 2007-12-05 新科实业有限公司 Micro drive, magnetic head flap assembly and manufacturing method thereof

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101295513B (en) * 2007-04-25 2012-09-05 新科实业有限公司 Suspension member and manufacturing method thereof, magnetic head gimbal assembly and disk drive unit

Also Published As

Publication number Publication date
CN100545912C (en) 2009-09-30
JP2007052909A (en) 2007-03-01

Similar Documents

Publication Publication Date Title
US7719798B2 (en) Rotational micro-actuator integrated with suspension of head gimbal assembly, and disk drive unit with the same
US8593764B1 (en) Method for fine actuation of a head during operation of a disk drive
US7663843B2 (en) Flex cable frame assembly for micro-actuator and flex cable suspension assembly for HGA of disk drive device
US7768746B2 (en) Rotational micro-actuator with a rotatable plate, head gimbal assembly and disk drive device with the same
CN1828726B (en) Rotatable piezoelectric micro-actuator and magnetic head folding sheet combination and disk drive unit thereof
US7411764B2 (en) Head gimbal assembly with precise positioning actuator for read/write head and disk drive device with the head gimbal assembly
CN101042876B (en) Cantilever part containing reinforcing plate, magnetic head folding piece combination and disk drive unit
US8130469B2 (en) Suspension, head gimbal assembly and/or disk drive unit including outrigger with spring beams, and/or manufacturing method thereof
CN1967663A (en) Thin-film piezoelectric micro-driver and its magnetic head gimbal assembly and disk drive unit
CN1695180A (en) Accurate positioning actuator for head element and its head gimbal assembly and disk drive device
CN101051470A (en) Suspension, magnetic head gimbal assembly and disk drive using the same
US7538984B2 (en) Rotational PZT micro-actuator with a rotatable plate
US7417831B2 (en) Micro-actuator and head gimbal assembly for a disk drive device
US7701675B2 (en) Micro-actuator mounting structure capable of maintaining a substantially constant gap between a top support of a micro-actuator and a suspension during use
US7535680B2 (en) Micro-actuator with integrated trace and bonding pad support
JP4837350B2 (en) Microactuator, head gimbal assembly and disk drive using the same
CN1917044A (en) Flexible cable frame assembly and flexible cable cantilever assembly for disk drives
JP2007042262A (en) Head gimbal assembly and disk driving device
CN101038750A (en) Micro-actuator with U-shaped frame and metal support frame and its manufacturing method
CN101051511A (en) Combination of microactuator, microactuator cantilever and magnetic head flap
CN100433172C (en) Microdrive, HGA, magnetic disk drive and manufacturing method thereof
CN1920958A (en) Microdrive and HGA assembly for disk drives
CN100426412C (en) HGA with Flying Height Adjustment Device, Hard Disk Drive and Manufacturing Method
US7535681B2 (en) Micro-actuator including side arms having back-turned extensions, head gimbal assembly and disk drive unit with the same
CN101114461A (en) Method and system for integrating micro-actuator on cantilever part

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
C14 Grant of patent or utility model
GR01 Patent grant
C17 Cessation of patent right
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20090930

Termination date: 20100819