CN100426412C - HGA with Flying Height Adjustment Device, Hard Disk Drive and Manufacturing Method - Google Patents

Abstract

The present invention discloses a head gimbal assembly (HGA), which includes a magnetic head, a cantilever for supporting the magnetic head, and a flying height adjusting device for adjusting the flying height of the magnetic head. The flying height adjusting device is placed between the magnetic head and the cantilever. The flying height adjusting device is a piezoelectric unit. The flying height adjusting device has a fixed end and a free end. The free end extends under the magnetic head, and the fixed end is connected to the cantilever. The flying height adjusting device includes at least one thin film piezoelectric element or a ceramic piezoelectric element. In the present invention, the head gimbal assembly further includes a micro-actuator for adjusting the position of the magnetic head in the horizontal direction. The micro-actuator is a contraction type micro-actuator or a metal frame type micro-actuator. The present invention also discloses a manufacturing method of the head gimbal assembly, and a hard disk drive structure using the head gimbal assembly and a manufacturing method thereof.

Description

HGA with Flying Height Adjustment Device, Hard Disk Drive and Manufacturing Method

technical field

The invention relates to a disk drive and its manufacturing method, especially to a magnetic head flap assembly with a flying height adjustment device and its manufacturing method.

Background technique

A disk drive is an information storage device that uses magnetic media to store data. With reference to Fig. 1 a and 1b, existing typical disc drive (Disk Drive) comprises a disc 101 and a drive arm 104 (Drive) that is used to drive the magnetic head gimbal assembly (Head Gimbal Assembly, HGA, unmarked) that magnetic head 203 is housed Arm). Wherein, the disk 101 is installed on a spindle motor 102 for driving the rotation of the disk 101, and a voice coil motor 107 (Voice-Coil Motor, VCM) is used to control the movement of the driving arm 104 equipped with the magnetic head 203, thereby controlling the magnetic head 203 Data is read from or written to the magnetic disk 101 by moving from one track to the next on the surface of the magnetic disk 101 .

However, during the travel of the magnetic head 203, due to the inherent tolerance (Tolerance) of the voice coil motor (VCM), the magnetic head 203 cannot perform fine position adjustment (Position Fine Adjustment).

In order to solve the above problems, a piezoelectric (PZT) micro-actuator is used to adjust the displacement of the magnetic head 203 . That is, the piezoelectric micro-actuator adjusts the positioning of the magnetic head 203 in a small range to compensate for the tolerance of the voice coil motor (VCM) and the drive arm (Drive Arm) 104 . In this way, the track width can be made smaller, and the TPI value ('tracks perinch' value) of the disk drive can be increased by 50% (while also increasing its surface recording density).

Referring to FIG. 1d , a conventional piezoelectric micro-actuator 205 has a U-shaped ceramic frame 297 . The U-shaped ceramic frame 297 includes two ceramic arms 207, wherein each ceramic arm 207 is provided with a piezoelectric piece (not shown) on one side thereof. 1c and 1d, the piezoelectric micro-actuator 205 is physically connected to the cantilever 213, wherein, on one side of each ceramic arm 207, there are three electrical connection balls 209 (gold ball bonding or solder bump bonding) , GBB or SBB) connect the microdrive 205 to the HGA cable 210. In addition, there are four electrical connection balls 208 (GBB or SBB) for realizing the electrical connection between the magnetic head 203 and the suspension member 213. FIG. 2 shows the detailed process of inserting the magnetic head 203 into the microdrive 205 . Wherein, the magnetic head 203 is connected to two points 206 on the two ceramic arms 207 through epoxy glue 212, so that the movement of the magnetic head 203 is independent of the driving arm 104 (see FIG. 1 a ).

When current is applied to the piezoelectric micro-actuator 205 through the suspension cable 210 , the piezoelectric micro-actuator 205 expands or contracts, causing the U-shaped ceramic frame 297 to deform and the magnetic head 203 to rotate along the radial direction of the magnetic disk 101 . In this way, the fine adjustment of the position and stroke of the magnetic head 203 (Position Displacement Adjustment) can be realized.

However, the piezoelectric micro-actuator 205 can only be used for fine-tuning the position and travel of the HGA 277 (see FIG. 1 c ), but not for adjusting the flying height of the HGA 277 at the same time. As we all know, flying height is a very important parameter of disk drives. That is, if the flying height is too high, it will affect the magnetic head 203 to read or write data from the magnetic disk 101; In the modern magnetic disk drive industry, along with the rapid increase of the capacity of the magnetic disk drive, the track pitch (trackpitch) and the magnetic track width also become narrower and narrower, correspondingly, the flying height of the magnetic head 203 becomes lower and lower, so , a good flying height adjustment is particularly important for the head gimbal assembly.

Therefore, it is possible to provide a magnetic head flap assembly and a hard disk drive that can realize position travel adjustment and fly height adjustment simultaneously, and ensure that the magnetic head 203 can successfully access data from the magnetic disk 101 without damaging the magnetic head 203 and/or the magnetic disk 101. It is very necessary to overcome the shortcomings of the prior art and its manufacturing method.

Contents of the invention

Based on the shortcomings of the prior art, the main purpose of the present invention is to provide a head gimbal assembly capable of good flying height adjustment, a hard disk drive and a manufacturing method thereof.

Another object of the present invention is to provide a magnetic head gimbal assembly, a hard disk drive and a manufacturing method thereof capable of adjusting the position, stroke and flying height of the magnetic head at the same time.

In order to achieve the above object, the present invention discloses a head gimbal assembly, which includes a magnetic head, a suspension for supporting the magnetic head, and a flying height adjustment device for adjusting the flying height of the magnetic head. The flying height adjustment device Placed between the magnetic head and the suspension, the flying height adjustment device is a piezoelectric unit, the flying height adjustment device has a fixed end and a free end, and the free end extends below the magnetic head , the fixed end is connected with the cantilever. Wherein, the flying height adjustment device includes at least one film piezoelectric element or ceramic piezoelectric element. In one embodiment of the present invention, the HGA further includes a micro-driver for adjusting the position of the magnetic head in the horizontal direction. Wherein, the micro-actuator is a pinched type micro-actuator or a metal frame type micro-actuator. In the present invention, the micro-actuator includes at least one film piezoelectric element or ceramic piezoelectric element.

In one embodiment of the present invention, the micro-actuator further includes a support base for supporting the piezoelectric element. The fly height adjustment device is disposed between the cantilever member and the support base. In another embodiment, the fly height adjustment device is disposed between the magnetic head and the support base. The supporting bottom includes a bottom sheet, a top sheet and a lead post physically connecting the bottom sheet and the top sheet, and gaps are respectively arranged on opposite sides of the bottom sheet and the top sheet. In one embodiment of the present invention, the support bottom may also be a frame composed of two side beams and a bottom beam connecting the two side beams, and the piezoelectric element is fixed on at least one of the side beams. On the outer side, the magnetic heads are respectively fixed on the inner sides of the two side beams.

In one embodiment of the present invention, a plurality of electrode contacts are provided on the flying height adjustment device. The cantilever is provided with a plurality of electrode contacts corresponding to the plurality of electrode contacts on the flight height adjustment device, and the flight height adjustment device and the cantilever are electrically connected by electrically connecting the electrode contacts on it. . In one embodiment, the electrode contacts on the flying height adjustment device and the electrode contacts on the cantilever are electrically connected by wire bonding.

A method for manufacturing a magnetic head flap assembly according to the present invention includes the following steps: manufacturing a magnetic head, a flying height adjusting device and a cantilever, wherein the flying height adjusting device is a piezoelectric unit, and the flying height adjusting device has a fixed end and a free end; the flying height adjusting device is placed between the magnetic head and the suspension, and the free end is stretched under the magnetic head; and the fixed end of the flying height adjusting device is connected to the suspension pieces are connected. In the present invention, the flying height adjustment device is made of thin film piezoelectric material or ceramic piezoelectric material. The method further includes the step of fabricating a micro-actuator for adjusting the position of the magnetic head in the horizontal direction. Wherein, manufacturing the micro-driver includes the following steps: forming at least one piezoelectric element; forming a support base; welding the at least one piezoelectric element to the support base. In one embodiment of the present invention, forming the support bottom includes forming a bottom sheet, a top sheet and a step connecting the bottom sheet and the top sheet, and forming the support bottom also includes forming the bottom sheet and the top sheet Notched steps on opposite sides. In another embodiment, forming the supporting bottom includes the steps of forming two side beams and a bottom beam connecting the two side beams, and also includes fixing the piezoelectric element on the outer surface of at least one of the side beams. on the side. In the present invention, forming the flying height adjustment device includes the step of forming a plurality of electrode contacts thereon. Forming the cantilever includes a step of forming a plurality of electrode contacts corresponding to the plurality of electrode contacts on the flying height adjustment device. In addition, in the present invention, the step of connecting the flying height adjustment device with the suspension member includes the step of electrically connecting the electrode contacts on the flight height adjustment device with the electrode contacts on the suspension member. In one embodiment, the electrical connection between the electrode contacts on the flying height adjustment device and the electrode contacts on the cantilever is performed by wire bonding.

A hard disk drive of the present invention comprises a head gimbal assembly having a magnetic head, a flying height adjustment device and a suspension, a drive arm connected to the head gimbal assembly, a magnetic disk, and a spindle motor for rotating the magnetic disk. The flying height adjusting device is placed between the magnetic head and the suspension member. Wherein, the flying height adjustment device includes at least one film piezoelectric element or ceramic piezoelectric element. The HGA further includes a micro-driver for adjusting the position of the magnetic head in the horizontal direction.

Compared with the prior art, the present invention can obtain good flight height adjustment due to the use of the flight height adjustment device. Moreover, the present invention can also use the flight height adjustment device and the micro-driver for position stroke adjustment and flight height adjustment respectively, so that the hard disk drive of the present invention can obtain good position stroke adjustment and flight height adjustment, and its TPI value can be obtained. Raise accordingly.

In order to make the present invention easier to understand, the specific embodiments of the magnetic head gimbal assembly, the hard disk drive and the manufacturing method thereof of the present invention will be further described below with reference to the accompanying drawings.

Description of drawings

Figure 1a is a perspective view of a conventional disk drive;

Figure 1b is an enlarged partial view of Figure 1a;

FIG. 1c is a perspective view of a conventional head gag assembly (HGA);

Figure 1d is an enlarged partial view of Figure 1c;

Figure 2 shows the detailed process of inserting the magnetic head into the microdrive of the head gag assembly (HGA) in Figure 1c;

3 is a perspective view of the first embodiment of the head gag assembly (HGA) of the present invention;

Fig. 4 is a partially enlarged three-dimensional exploded view of the head gag assembly (HGA) in Fig. 3 before the magnetic head and the micro-drive unit are connected to the cantilever by the metal ball;

Fig. 5 is a partially enlarged perspective view of the assembled head gimbal assembly (HGA) in Fig. 3 before its magnetic head and micro-drive unit are connected to the suspension by metal balls;

Fig. 6 is a partially enlarged perspective view of the assembled head gimbal assembly (HGA) in Fig. 3 after its magnetic head and micro-drive unit are connected to the cantilever through metal balls;

7 is a sectional view of the head gag assembly (HGA) in the microdrive unit area in FIG. 3;

Figure 8 shows a perspective view of an embodiment of the microdrive unit of the head gimbal assembly (HGA) shown in Figure 3;

Figure 9 shows the process of assembling the micro-drive unit shown in Figure 8 and mounting the magnetic head thereon;

Figure 10a shows the electrical connection relationship between the two side piezoelectric sheets of the micro-drive unit shown in Figure 8, according to an embodiment of the present invention, the two side piezoelectric sheets have the same polarization direction;

Figure 10b shows the electrical connection relationship between the two side piezoelectric sheets of the micro-drive unit shown in Figure 8, according to another embodiment of the present invention, the two side piezoelectric sheets have opposite polarization directions;

Figure 10c shows the waveform diagrams of the voltages applied to the two side piezoelectric sheets shown in Figure 10a respectively;

Figure 10d shows the waveforms of the voltages applied to the two side piezoelectric sheets shown in Figure 10b respectively;

Figures 10e and 10f show two different working modes of the two side piezoelectric plates shown in Figure 10a, which can make the magnetic head move in a direction parallel to the surface of the magnetic disk;

Figures 10g and 10h show two different polarization directions of the bottom piezoelectric sheet of the micro-actuator unit shown in Figure 8, according to two embodiments of the present invention;

Figure 10i shows a waveform diagram of the voltage applied to the bottom piezoelectric sheet shown in Figure 10g or 10h;

Figure 10j shows two different working modes of the bottom piezoelectric sheet shown in Figure 10g or 10h, which can make the magnetic head move along the direction perpendicular to the surface of the magnetic disk;

Fig. 11 has shown another kind of assembly mode of the micro-drive unit shown in Fig. 8;

FIG. 12 is a partial perspective view of the head gimbal assembly with the assembled micro-drive unit shown in FIG. 11;

Fig. 13 shows the electrical connection relationship between the micro-driver unit shown in Fig. 11 and the cantilever;

Fig. 14 is a three-dimensional exploded view of the second embodiment of the micro-drive unit of the present invention;

Fig. 15 is a perspective view showing that the magnetic head is loaded into the U-shaped frame of the microdrive unit shown in Fig. 14;

16 is a partial perspective exploded view of the HGA assembly with the micro-drive unit shown in FIG. 14; FIG. 17 shows that the bottom piezoelectric plate of the micro-drive unit shown in FIG. 14 is mounted on the HGA shown in FIG. 16 A partial perspective view of the combined cantilever;

Fig. 18 is a partial perspective view of the assembled magnetic head gimbal shown in Fig. 16 after its magnetic head and the micro-drive unit shown in Fig. 14 are connected by metal balls to the suspension;

Figure 19a shows the electrical connection relationship between the two side piezoelectric sheets of the micro-drive unit shown in Figure 14, according to an embodiment of the present invention, the two side piezoelectric sheets have the same polarization direction;

Fig. 19b shows the electrical connection relationship between the two side piezoelectric sheets of the micro-driver unit shown in Fig. 14. According to another embodiment of the present invention, the two side piezoelectric sheets have opposite polarization directions;

Figure 19c shows the waveform diagrams of the voltages applied to the two side piezoelectric sheets shown in Figure 19a respectively;

Figure 19d shows the waveform diagrams of the voltages respectively applied to the two side piezoelectric sheets shown in Figure 19b;

Figures 19e and 19f show two different working modes of the two side piezoelectric plates shown in Figure 19a, which can make the magnetic head move in a direction parallel to the surface of the magnetic disk;

Figure 19g shows two different modes of operation of the bottom piezoelectric sheet of the micro-drive unit shown in Figure 14, which can make the magnetic head move in a direction perpendicular to the surface of the magnetic disk;

FIG. 20 is a complete perspective view of the second embodiment of the HGA shown in FIG. 18 of the present invention.

Detailed ways

Referring to FIG. 3 , a HGA 3 of the present invention includes a magnetic head 203', a micro-drive unit 30, and a suspension member 213' for carrying the magnetic head 203' and the micro-drive unit 30.

Also referring to FIG. 3 , the cantilever 213' includes a load beam 326, a flexure 325, a hinge 324 and a base plate 321. There are three openings 408 and a plurality of small protrusions 329 (see FIG. 7 ) on the load bar 326 for stacking positioning. There are two holes 322 and 323 on the pivot member 324 and the base plate 321 respectively. Wherein, the hole 322 is used for swaging the HGA 3 and the driving arm (not shown), and the hole 323 is used for reducing the weight of the suspension member 213'. A plurality of electrode contacts 318 are provided on the flexible member 325 , one end of the plurality of electrode contacts 318 is connected to a control system (not shown), and the other end is connected to a plurality of cables 309 , 311 . With reference to Fig. 4 and 7, described flexure 325 also comprises a cantilever tongue (Suspension Tongue) 328, and described cantilever tongue 328 is used for supporting micro-driver 30, and makes load-carrying force always pass the small on load bar 326 The protrusion 329 is applied to the central area of the magnetic head 203'. In the present invention, a plurality of electrode contacts 801 , 802 , 803 and 805 are provided on the cantilever tongue 328 .

Please refer to FIG. 8 , the micro-driver unit 30 includes a micro-driver (not shown) and a flying height adjustment device (not shown). In one embodiment of the present invention, the micro-driver is a metal frame type (metal frame type) micro-driver, which includes a metal support base 302 and a piezoelectric (Piezoelectric, PZT) unit, the piezoelectric unit includes two sides Piezoelectric sheet 303. The flying height adjustment device is a bottom piezoelectric film 304 provided with two electrode contacts 305 . In the present invention, the support base 302 is preferably made of stainless steel. The support base 302 includes a bottom sheet 401 , a top sheet 402 and a lead post 404 physically connecting the bottom sheet 401 and the top sheet 402 . In one embodiment of the present invention, two side arms 401 a and 401 b are provided on both sides of the bottom sheet 401 , and similarly, two side arms 402 a and 402 b are also provided on both sides of the top sheet 402 . Moreover, one side of the top sheet 402 and the bottom sheet 401 is respectively provided with two notches 409 connected with the guide post 404 . The notch 409 can increase the moving length of the piezoelectric unit so that the magnetic head 203' can obtain a larger displacement. In one embodiment of the present invention, the bottom piezoelectric sheet 304 is T-shaped, which includes a piezoelectric substrate 308 and a piezoelectric arm 309 . The piezoelectric substrate 308 is provided with two electrode contacts 305 . Each side piezoelectric sheet 303 forms three electrode contacts 702 and 703 at both ends thereof. The side piezoelectric sheet 303 and the bottom piezoelectric sheet 304 are preferably made of piezoelectric film material, and can be made into a single-layer or multi-layer structure. Certainly, the side piezoelectric sheet 303 and the bottom piezoelectric sheet 304 may also be made of piezoelectric ceramic material.

Figures 10a, 10c, 10e, and 10f show the first working mode in which the two side piezoelectric sheets 303 realize the position and stroke adjustment function. In this embodiment, the two side piezoelectric sheets 303 have the same polarization direction (Polarization Direction), as shown in Figure 10a, one end 404 of the two side piezoelectric sheets 303 is commonly grounded, and the other end 401a and 401b are respectively applied with voltages having opposite phases, the waveforms 405 and 406 of which are shown in FIG. 10c. Please refer to Figures 10e and 10f, when a voltage is applied, in the same half cycle, one of the two side piezoelectric sheets 303 expands while the other contracts; when entering the next half cycle, the two side piezoelectric sheets 303 The sheet 303 will change its contraction and expansion states, that is, one contraction and the other expansion at the same time, so that the magnetic head 203' can be driven to move in a direction parallel to the magnetic disk, and then the head position stroke adjustment can be performed.

Figures 10b and 10d show another working mode in which the two side piezoelectric sheets 303 realize the function of position and stroke adjustment. In this embodiment, the two side piezoelectric sheets 303 have opposite polarization directions, as shown in FIG. 10b. One end 404 of the two side piezoelectric plates 303 is commonly grounded, and the other ends 401a and 401b are respectively applied with a voltage having the same phase, and its waveform 407 is shown in FIG. 10d. When a voltage is applied, in the same half cycle, one of the two side piezoelectric sheets 303 expands while the other contracts; when entering the next half cycle, the two side piezoelectric sheets 303 will change their contraction and An expanded state, where one contracts while the other expands. In this way, the magnetic head 203' is cyclically moved from the right to the left, and then from the left to the right.

10g and 10h illustrate two different polarization directions that the bottom piezoelectric sheet 304 may have. Fig. 10j shows the first working mode of adjusting the flying height of the bottom piezoelectric sheet 304, wherein the bottom piezoelectric sheet 304 is applied with a DC voltage, and its waveform 411 is shown in Fig. 10i. Referring to Figure 10j, when no voltage is applied, the bottom piezoelectric sheet 304 stays at its original position 412b; when a positive DC voltage is applied, the bottom piezoelectric sheet 304 will bend upwards to position 412a; When the DC voltage is applied, the bottom piezoelectric sheet 304 will bend down to position 412c. In this way, the static pitch angle (Static Pitch) of the suspension member will change, and the static attitude (Static Attitude) of the magnetic head 203' will also change at the same time, so that the flying height adjustment of the magnetic head 203' can be realized.

With reference to Fig. 9, manufacture micro-actuator unit 30 comprises the following steps: first, provide a support bottom 302 and two side piezoelectric sheets 303; Then, described two side piezoelectric sheets 303 are fixed to two sides of described support bottom 302 side; finally, a bottom piezoelectric sheet 304 is provided and connected to the support bottom 302 . Thereafter, the magnetic head 203' is provided and mounted on the supporting base 302 to which two side piezoelectric pieces 303 and one bottom piezoelectric piece 304 are fixed.

Referring to Figures 8 and 9, as an embodiment of the present invention, one side piezoelectric sheet 303 is fixed on the side arms 401a and 402a of the support base 302, and the other side piezoelectric sheet 303 is fixed on the support On the side arms 401b and 402b of the bottom 302. The piezoelectric substrate 308 is connected to the back of the bottom sheet 401 through anisotropic conductive film (anisotropicconductive film, ACF), epoxy glue or adhesive, so that the bottom piezoelectric sheet 304 can be fixed on the support The rear side of the bottom 302. Correspondingly, the piezoelectric arm 309 is placed under the lead post 404 of the support base 302 , and the two electrode contacts 305 of the piezoelectric substrate 308 are exposed downward. In the present invention, one end of the magnetic head 203' is physically and electrically connected to the top sheet 402 with an anisotropic conductive film (ACF), epoxy glue or adhesive, and the other end is placed on the lead post 404 of the supporting base 302 superior. Wherein, the physical connection can keep the magnetic head 203' moving simultaneously with the micro-drive unit 30, and the electrical connection can help prevent the magnetic head 203' from being damaged by electrostatic discharge.

After the above-mentioned assembly, referring to FIG. 5, the micro-drive unit 30 with the magnetic head 203' is partially connected with the cantilever tongue 328 of the flexible member 325 through an anisotropic conductive film, so that the bottom piezoelectric sheet 304 is Clamped between the cantilever tongue 328 and the support base 302 (shown more clearly in FIG. 7 ). Correspondingly, the two electrode contacts 305 of the bottom piezoelectric sheet 304 are electrically connected to the two electrode contacts 805 , and are electrically connected to the electrode contacts 318 through the cable 311 . At the same time, the plurality of electrode contacts 701 on the magnetic head 203' and the electrode contacts 702, 703 on the side piezoelectric film 303 are placed on the corresponding positions of the electrode contacts 801, 802 and 803. At the same time, a parallel gap 313 is thus formed between the micro-actuator unit 30 and the cantilever tongue 328 , thereby ensuring that the micro-actuator unit 30 can move smoothly, as shown in FIG. 7 .

Please refer to FIG. 6, in the present invention, the electrode contact 701 and the electrode contact 801 are electrically connected through four metal balls 208' (GBB or SBB), thereby connecting the magnetic head 203' and the two cables 309 on the suspension member 213' electrical connection. At the same time, the electrode contacts 702, 703 and the electrode contacts 802, 803 are electrically connected through three metal balls 209', so as to electrically connect the micro-driver unit 30 to the cable 311. Through the cables 309, 311, the electrode contacts 318 electrically connect the magnetic head 203' and the micro-drive unit 30 with a control system (not shown).

In another embodiment of the present invention, please refer to FIG. 11 , the piezoelectric bottom 304 can also be placed between the magnetic head 203' and the support bottom 302, wherein the two electrode contacts 305 are exposed upward. Then, referring to FIG. 12 , the electrode contact 305 of the bottom piezoelectric sheet 304 is electrically connected to the electrode contact 805 of the cantilever tongue 328 . Referring to FIG. 13, in one embodiment of the present invention, the electrical connection is formed as follows: first, a metal ball 901 is connected (such as GBB, SBB or laser welding) to the electrode contact on the bottom piezoelectric sheet 304 305, wherein the metal ball 901 is formed by melting a length of cable 991 output from a connecting device (not shown); And form another metal ball 902, in the process, the cable 991 is not cut. In this embodiment, except for the above-mentioned changes, there are no other changes in the structure and assembly of the HGA, so no detailed description will be given here.

Referring to Fig. 14, the micro-actuator device 30' in another embodiment of the present invention also includes a micro-actuator (not shown) and a flying height adjusting device (not shown). In this embodiment, the micro-actuator is a pinched type micro-actuator, which includes a U-shaped frame 302' and a piezoelectric unit. The U-shaped frame 302' includes two side beams 207' and a bottom beam 398 connecting the two side beams 207'. In the present invention, the piezoelectric unit includes two side piezoelectric sheets 303', and the two side piezoelectric sheets 303' are respectively connected to the side beams 207' of the U-shaped frame 302'. In this embodiment, the fly height adjustment means is a bottom piezo 304' having two electrode contacts 305'. In one embodiment of the present invention, with reference to Figures 16 and 17, the bottom piezoelectric sheet 304 is in complete contact with the cantilever tongue 328 through an anisotropic conductive film, correspondingly, the two electrode contacts 305' and the cantilever tongue The two electrode contacts 805 of the sheet 328 are connected. Wherein, each side piezoelectric sheet 303' is provided with three electrode contacts 702', 703' at its two ends. The bottom piezoelectric sheet 304' is preferably made of a single-layer or multi-layer piezoelectric film material. Certainly, the side piezoelectric sheet 303' and the bottom piezoelectric sheet 304' may also be made of piezoelectric ceramic material.

Figures 19a, 19c, 19e and 19f show the first working mode in which the two side piezoelectric sheets 303' realize the position and stroke adjustment function. In this embodiment, the two side piezoelectric sheets 303' have the same polarization direction. As shown in FIG. a and 401'b are respectively applied with voltages having opposite phases, the waveforms 405' and 406' of which are shown in Figure 19c. Please refer to Figures 19e and 19f, when a voltage is applied, in the same half cycle, one of the two side piezoelectric sheets 303' expands while the other contracts, and when entering the next half cycle, the two side pressure The electric sheet 303' will change its contraction and expansion state, so that the magnetic head 203' can be driven to move along the direction parallel to the magnetic disk, and then the position of the magnetic head can be adjusted.

Figures 19b and 19d show another working mode in which the two side piezoelectric sheets 303' realize the position and stroke adjustment function. In this embodiment, the two side piezoelectric sheets 303' have opposite polarization directions. As shown in FIG. a and 401'b are respectively applied with voltages having the same phase, the waveform 407' of which is shown in FIG. 19d. When a voltage is applied, during the same half cycle, one of the two side piezoelectric sheets 303' expands while the other contracts, and when entering the next half cycle, the two side piezoelectric sheets 303' will change their In contraction and expansion states, the magnetic head 203' is cyclically moved from right to left, and then from left to right.

Fig. 19g shows two working modes in which the bottom piezoelectric sheet 304' realizes the flying height adjustment function, wherein the bottom piezoelectric sheet 304' can selectively apply two different polarization directions. In the present invention, the bottom piezoelectric sheet 304' is applied with a voltage having a single waveform. When no voltage is applied, the bottom piezoelectric sheet 304' stays at its original position 412b'; when a positive voltage is applied , the bottom piezoelectric sheet 304' will bend upward to the position 412a'; when a negative voltage is applied, the bottom piezoelectric sheet 304' will bend downward to the position 412c'. In this way, the magnetic head 203' moves up and down, thereby realizing the adjustment of the flying height of the magnetic head 203'.

Please refer to FIG. 16 , the manufacture of the micro-actuator unit 30' includes the following steps: first, provide a U-shaped frame 302' with two side piezoelectric sheets 303'; then, provide the bottom piezoelectric sheet 304' and combine it with the The cantilever tongues 328 are connected, as shown in Figure 17; finally, the magnetic head 203' is provided and connected with the side beam 207' through two points 907, as shown in Figure 15, then the U-shaped frame 302 with the magnetic head 203' 'is installed on the cantilever tongue 328, so that the bottom piezoelectric sheet 304' is clamped between the U-shaped frame 302' and the cantilever tongue 328.

In the present invention, with reference to Figures 14 and 16, the U-shaped frame 302' with the magnetic head 203' is installed on the cantilever tongue 328 by connecting its bottom beam 398 part to the cantilever tongue 328. . Correspondingly, the electrode contacts 702', 703' on the piezoelectric sheet 303' on both sides and the electrode contact 701 on the magnetic head 203' are respectively placed on the electrode contacts 802, 803 and 801 on the cantilever tongue 328. 18, the electrode contact 701 and the electrode contact 801 are electrically connected through four metal balls 310 (GBB or SBB), thereby electrically connecting the magnetic head 203' and the two cables 309 on the suspension member 213'. At the same time, the electrode contacts 702', 703' and the electrode contacts 802 and 803 are electrically connected through three metal balls 320, thereby electrically connecting the micro-driver unit 30' to the cable 311, thereby forming a micro-driver unit with 30' head gimbal assembly, as shown in Figure 20. Through the cables 309, 311, the electrode contacts 318 electrically connect the magnetic head 203' and the micro-driver 30' with the control system (not shown).

When a working voltage is applied to the micro-drive unit 30', the two side piezoelectric plates 303' will move the magnetic head 203' in a direction parallel to the surface of the magnetic disk, thereby realizing the adjustment of the position and stroke of the magnetic head. At the same time, the bottom piezoelectric sheet 304' can make the magnetic head 203' move along the direction perpendicular to the surface of the disk, so as to realize the adjustment of flying height.

In the present invention, a disk drive can be formed by assembling the magnetic head gimbal assembly with a disk drive base, a disk, a spindle motor, a voice coil motor, and the like. Because the process of assembling the HGA with the micro-drive unit of the present invention and then assembling the disk drive is well known to those skilled in the art, it will not be described in detail here.

In the present invention, the micro-actuator unit can be replaced by a single piezoelectric element (such as the bottom piezoelectric plate 304 or 304') that is only used to adjust the flying height. According to the above description of the HGA 3 and the magnetic disk drive, the structure and manufacturing method of the HGA 3 and the magnetic disk drive having the single piezoelectric element can be easily implemented by those of ordinary skill in the industry, so it will not be described in detail here. stated.

What is disclosed above is only a preferred embodiment of the HGA, the disk drive and the manufacturing method thereof of the present invention, and certainly cannot limit the scope of rights of the present invention with this, so equivalent changes made according to the scope of the patent application of the present invention, Still belong to the scope covered by the present invention.

Claims (26)

1. A magnetic head flap assembly comprising: magnetic head; a suspension for supporting the magnetic head; and A flying height adjustment device for adjusting the flying height of the magnetic head; It is characterized in that: the flying height adjusting device is placed between the magnetic head and the suspension, the flying height adjusting device is a piezoelectric unit, the flying height adjusting device has a fixed end and a free end, the The free end protrudes below the magnetic head, and the fixed end is connected with the suspension member. 2. The HGA as claimed in claim 1, wherein the flying height adjusting device comprises at least one film piezoelectric element or ceramic piezoelectric element. 3. The HGA as claimed in claim 1, further comprising a micro-actuator for adjusting the position of the magnetic head in the horizontal direction. 4. The HGA according to claim 3, wherein the micro-actuator is a retractable micro-actuator or a metal-frame micro-actuator. 5. The HGA as claimed in claim 3, wherein the micro-actuator comprises at least one film piezoelectric element or ceramic piezoelectric element. 6. The HGA as claimed in claim 5, wherein the micro-actuator further comprises a supporting base for supporting the piezoelectric element. 7. The HGA as claimed in claim 6, wherein the flying height adjustment device is disposed between the suspension member and the supporting base. 8. The HGA as claimed in claim 6, wherein the flying height adjusting device is disposed between the magnetic head and the supporting base. 9. The magnetic head gimbal assembly as claimed in claim 6, characterized in that: said supporting bottom comprises a bottom sheet, a top sheet and a lead post connecting said bottom sheet and top sheet, said bottom sheet and top sheet are opposite Notches are respectively arranged on both sides. 10. The magnetic head gimbal assembly according to claim 6, wherein the support base is a frame composed of two side beams and a bottom beam connecting the two side beams, and the piezoelectric element is fixed On the outer side of at least one side beam, the magnetic heads are respectively fixed on the inner sides of two side beams. 11. The HGA as claimed in claim 1, wherein a plurality of electrode contacts are provided on the flying height adjusting device. 12. The magnetic head gimbal assembly according to claim 11, wherein a plurality of electrode contacts corresponding to the plurality of electrode contacts on the flying height adjusting device are provided on the suspension member, and the flying height adjusting device It is electrically connected with the cantilever by electrically connecting the electrode contacts thereon. 13. The head gimbal assembly according to claim 12, wherein the electrode contacts on the flying height adjustment device and the electrode contacts on the suspension member are electrically connected by wire welding. 14. A method for manufacturing a head gimbal assembly, comprising the steps of: Manufacturing a magnetic head, a flying height adjusting device and a suspension, wherein the flying height adjusting device is a piezoelectric unit, and the flying height adjusting device has a fixed end and a free end; placing the flying height adjustment device between the magnetic head and the suspension, and making the free end protrude below the magnetic head; The fixed end of the flying height adjustment device is connected with the cantilever member. 15. The method for manufacturing a HGA as claimed in claim 14, wherein the flying height adjusting device is made of thin film piezoelectric material or ceramic piezoelectric material. 16. The method of manufacturing an HGA as claimed in claim 14, further comprising the step of manufacturing a micro-driver for adjusting the position of the magnetic head in the horizontal direction. 17. The method for manufacturing a HGA as claimed in claim 16, wherein manufacturing the micro-drive comprises the following steps: forming at least one piezoelectric element; forming a supporting base; The at least one piezoelectric element is welded to the support base. 18. The method for manufacturing a head gimbal assembly as claimed in claim 17, wherein forming said support bottom comprises the steps of forming a bottom sheet, a top sheet, and a lead post connecting said bottom sheet and top sheet, forming The supporting bottom also includes the step of opening notches on opposite sides of the bottom sheet and the top sheet. 19. The method for manufacturing a head gimbal assembly according to claim 17, wherein forming the supporting bottom comprises the steps of forming two side beams and a bottom beam connecting the two side beams, and further comprising forming the two side beams The piezoelectric element is fixed on the outer surface of at least one side beam. 20. The method of manufacturing a HGA as claimed in claim 14, wherein forming the flying height adjustment device includes a step of forming a plurality of electrode contacts thereon. 21. The method for manufacturing a head gimbal assembly according to claim 20, wherein forming the suspension member includes the step of forming a plurality of electrode contacts corresponding to the plurality of electrode contacts on the flying height adjustment device . 22. The method of manufacturing a head gimbal assembly as claimed in claim 21, wherein the step of connecting the flying height adjustment device to the suspension member comprises connecting an electrode contact on the flying height adjustment device to the The steps of electrically connecting the electrode contacts on the cantilever are described above. 23. The method for manufacturing a head gimbal assembly according to claim 20, wherein the electrical connection between the electrode contacts on the flying height adjustment device and the electrode contacts on the suspension member is through wire welding ongoing. 24. A hard disk drive comprising: Magnetic head flap assembly with magnetic head, flying height adjustment device and cantilever; a drive arm connected to the HGA; disk; and a spindle motor for rotating the disk; It is characterized in that: the flying height adjusting device is placed between the magnetic head and the suspension, the flying height adjusting device is a piezoelectric unit, the flying height adjusting device has a fixed end and a free end, the The free end protrudes below the magnetic head, and the fixed end is connected with the suspension member. 25. The hard disk drive according to claim 24, wherein the flying height adjustment device comprises at least one film piezoelectric element or ceramic piezoelectric element. 26. The hard disk drive according to claim 24, wherein the HGA further comprises a micro-actuator for adjusting the position of the magnetic head in the horizontal direction.

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