CN100458918C - Microdrive, head gimbal assembly using same, and magnetic disk drive - Google Patents

Abstract

The invention discloses a magnetic head folding sheet combination, comprising: a magnetic head (slider); micro-actuators (micro-actuators); the micro-driver comprises a bottom arm, a movable arm and two side arms which are symmetrically distributed by taking the axis of the bottom arm as a symmetric axis and are respectively connected with the bottom arm and the movable arm; and at least one piezoelectric patch connected to the side arm; and a suspension (suspension) for supporting the head and the micro-actuator. Wherein the magnetic head is mounted on a movable arm and rotated by the movable arm upon actuation of the at least one piezoelectric patch. The invention also discloses a hard disk drive structure using the magnetic head folding sheet combination.

Description

Microdrive, head gimbal assembly using same, and magnetic disk drive

technical field

The invention relates to a disk drive, in particular to a micro drive and a magnetic head tab assembly using the micro drive.

Background technique

A disk drive is an information storage device that uses magnetic media to store data. With reference to Fig. 1 a, the existing typical disk drive (Disk Drive) comprises a magnetic disk and a driving arm for driving a head gimbal assembly 277 (Head Gimbal Assembly, HGA) (the head gimbal assembly 277 is provided with a magnetic head 203 cantilever (not shown)). Wherein, the magnetic disk is mounted on a spindle motor for driving the magnetic disk to rotate, and a Voice-Coil Motor (Voice-Coil Motor, VCM) is used to control the movement of the driving arm, thereby controlling the magnetic head 203 to move from a magnetic track to a magnetic disk surface on the magnetic disk surface. next track to read or write data from the disk.

However, during the travel of the magnetic head 203, due to the inherent tolerance (Tolerance) of the voice coil motor (VCM) and the suspension, the magnetic head 203 cannot perform good position control, thus affecting the magnetic head 203 to read or write from the magnetic disk. data.

In order to solve the above problems, a piezoelectric (PZT) micro-actuator is used to adjust the displacement of the magnetic head 203 . That is, the piezoelectric micro-actuator adjusts the displacement of the magnetic head 203 in a small range to compensate for the tolerance of the voice coil motor (VCM) and the suspension. In this way, the track width can be made smaller, and the TPI value ('tracks per inch' value) of the disk drive can be increased by 50% (ie, its surface recording density is increased).

Referring to FIG. 1 b , a conventional piezoelectric micro-actuator 205 has a U-shaped ceramic frame 297 . The U-shaped ceramic frame 297 includes two ceramic arms 207, wherein each ceramic arm 207 is provided with a piezoelectric piece (not shown) on one side thereof. 1a and 1b, the piezoelectric micro-actuator 205 is physically connected to the cantilever 213, wherein, on one side of each ceramic arm 207, there are three electrical connection balls 209 (gold ball bonding (gold ball bonding, GBB) or solder ball bonding) (solder bump bonding, SBB)) connects the microdrive 205 to the HGA cable 210. In addition, there are four electrical connection balls 208 (GBB or SBB) for realizing the electrical connection between the magnetic head 203 and the suspension 213 . FIG. 1 c shows the detailed process of inserting the magnetic head 203 into the microdrive 205 . Wherein, the magnetic head 203 is bonded to the two points 206 on the two ceramic arms 207 through the epoxy glue point 212 , so that the movement of the magnetic head 203 depends on the ceramic arms 207 of the micro-driver 205 .

When current is applied to the micro-driver 205 through the suspension cable 210, the piezoelectric sheet of the micro-driver 205 will expand or contract, thereby causing the deformation of the two ceramic arms 207 of the U-shaped ceramic frame 297 to make the magnetic head 203 move on the track of the disk. . In this way, a good head position adjustment can be achieved.

However, since the piezoelectric micro-actuator 205 and magnetic head 203 are mounted on the cantilever tongue (not shown), when the piezoelectric micro-actuator 205 is excited, it will act as Simply translational motion to oscillate the head 203 will generate a resonance of the suspension at the same frequency as the vibration induced by exciting the base of the suspension. This will limit the disk drive's servo system bandwidth and increase in capacity. As shown in FIG. 2 , reference numeral 201 represents the resonance curve when the cantilever substrate is excited, and reference numeral 202 represents the resonance curve when the micro-actuator 205 is excited, which clearly shows the above problems.

Furthermore, since the micro-actuator 205 includes an additional mass, it not only affects its static performance, but also affects the dynamic performance of the cantilever 213, such as resonance performance, thereby reducing the resonant frequency of the cantilever 213 and increasing its gain.

Therefore, it is necessary to provide a microdrive, a HGA, and a disk drive to solve the above-mentioned problems.

Contents of the invention

Based on the deficiencies of the prior art, the main purpose of the present invention is to provide a combination of a micro-drive and a head gimbal, which can achieve good head position adjustment and has good resonance performance when the micro-drive is excited.

Another object of the present invention is to provide a disk drive with larger servo system bandwidth and head position adjustment capability.

In order to achieve the above object, the present invention discloses a head gimbal assembly, comprising: a slider; a micro-actuator; wherein the micro-actuator includes a support frame and at least one piezoelectric sheet, The support frame includes a bottom arm, a movable arm, and two arms that are distributed symmetrically with the axis of the bottom arm and connected to each other through the bottom arm, and connected to the movable arm along the diagonal of the movable arm. a side arm; the at least one piezoelectric sheet is connected to the side arm; and a suspension (suspension) for supporting the magnetic head and the micro-driver; wherein the magnetic head is mounted on the movable arm, and is excited The at least one piezoelectric sheet is rotated by the movable arm.

In one embodiment, the movable arm includes a supporting portion supporting the magnetic head, and two connecting portions respectively connected to two ends located on a diagonal line of the supporting portion. The width of each connecting portion is smaller than that of the supporting portion. The magnetic head part is mounted on the supporting part of the supporting frame, and the magnetic head is matched with the center of the supporting part. The two connection parts can be connected to the two side arms through two connection points, and the two connection points are distributed symmetrically with the longitudinal axis of the support frame as the axis of symmetry. The distance between the two side arms is greater than the width of the magnetic head. The bottom arm is partially connected to the cantilever, forming a parallel gap between the support frame and the cantilever. The side arms are formed on both sides of the bottom arm and the movable arm, and at least one interval is formed between the side arm and the bottom arm or between the side arm and the movable arm. The at least one piezoelectric sheet is mounted on one or both sides of each side arm. The material for bonding the magnetic head and the support frame and the material for bonding the bottom arm of the support frame and the suspension member is epoxy glue, adhesive or anisotropic conductive formwork (ACF).

A microdrive of the present invention includes: a support frame and at least one piezoelectric sheet; the support frame includes a bottom arm; a movable arm for supporting and rotating a magnetic head; it is symmetrically distributed with the axis of the bottom arm as a symmetrical axis, and passes through the The bottom arms are connected to each other, and are respectively connected to two side arms of the movable arm along a diagonal line of the movable arm; the at least one piezoelectric sheet is connected to the two side arms. In one embodiment, the movable arm includes a supporting portion supporting the magnetic head, and two connecting portions respectively connected to two ends located on a diagonal line of the supporting portion. The width of each connecting portion is smaller than that of the supporting portion. The at least one piezoelectric sheet is a thin film piezoelectric sheet or a ceramic piezoelectric sheet. The at least one piezoelectric sheet is a single-layer structure or a multi-layer structure including a base layer and a piezoelectric layer. The piezoelectric layer is a single-layer piezoelectric structure or a multi-layer piezoelectric structure, and the base layer is made of metal, ceramic or polymer. The side arms are formed on both sides of the bottom arm and the movable arm, and at least one interval is formed between the side arm and the bottom arm or between the side arm and the movable arm. The at least one piezoelectric sheet is mounted on one or both sides of each side arm. The material used for bonding the magnetic head and the supporting frame is epoxy glue, adhesive or anisotropic conductive formwork (ACF).

A hard disk drive of the present invention comprises: a HGA; a drive arm connected to the HGA; a magnetic disk; and a spindle motor for rotating the magnetic disk; wherein the HGA includes a magnetic head (slider), micro-actuator (micro-actuator), and a suspension (suspension) for supporting the magnetic head and micro-actuator; wherein, the micro-actuator includes a support frame and at least one piezoelectric sheet, and the support frame includes a bottom The arm, the movable arm, and the axis of the bottom arm are symmetrically distributed and connected to each other through the bottom arm, and two side arms are respectively connected to the movable arm along the diagonal of the movable arm; At least one piezoelectric sheet is connected to the side arm; wherein, the magnetic head is mounted on the movable arm, and is rotated by the movable arm when the at least one piezoelectric sheet is excited; the bottom arm part is installed on the movable arm On the cantilever, a parallel gap is formed between the support frame and the cantilever.

Compared with the prior art, the micro-driver of the present invention uses the piezoelectric sheet to bend the side arm of the support frame, thereby rotating the movable arm of the support frame, and the magnetic head can be rotated because the magnetic head is partially installed on the movable arm. At the same time, the two narrow width connecting parts of the supporting frame prevent the lateral movement of the magnetic head, but only allow the magnetic head to rotate about its center and together with the movable arm. At the same time, since the movable arm corresponds to the center of the magnetic head, the magnetic head can work without swinging the head gimbal assembly.

In the present invention, the trailing side and the leading side of the magnetic head can rotate in different directions at the same time, so that the magnetic head can obtain a larger moving range. At the same time, because the magnetic head rotates along its center, a greater position travel adjustment capability and a wider servo system bandwidth can be obtained. Usually, the work efficiency of the microdriver that adjusts the magnetic head by rotation is 3 times that of the microdriver (such as the prior art) that adjusts the magnetic head by the dynamic mode. The micro-driver of the present invention adjusts the magnetic head through rotation, so the work efficiency equivalent to 3 times of the prior art can be obtained. In addition, because the width of the head is smaller than the distance between the two side arms, creating two gaps between them, the head will be more free to rotate over a wider range when the micro-actuator is activated. In addition, the cantilever resonance phenomenon does not occur in the low frequency band, but only the pure micro-drive resonance phenomenon occurs in the high frequency band, which will increase the servo system bandwidth of the disk drive and the disk drive capacity. Finally, compared with the existing U-shaped ceramic frame, the structure of the micro-actuator of the present invention will obtain better anti-seismic performance.

In order to make the present invention easier to understand, the specific embodiments of the microdrive, the HGA and the hard disk drive of the present invention will be further described below in conjunction with the accompanying drawings.

Description of drawings

FIG. 1a is a perspective view of a conventional head gag assembly (HGA);

Figure 1b is an enlarged partial view of Figure 1a;

Figure 1c shows the detailed process of inserting the magnetic head into the microdrive of the head gag assembly (HGA) in Figure 1a;

Figure 2 shows the resonance curve (resonance curve) of the head gimbal combination in Figure 1a;

3 is a perspective view of the first embodiment of the head gag assembly (HGA) of the present invention;

Fig. 4 is a partial enlarged view of the magnetic head flap assembly in Fig. 3;

Fig. 5 is an exploded view of Fig. 4;

6 is a partial side view of the head gimbal assembly in FIG. 3;

Figure 7 shows a perspective view of the microdrive and the magnetic head mounted thereon in Figure 3;

Fig. 8 has shown the initial state when the microdriver that magnetic head is housed among Fig. 7 is not applied voltage;

Figure 9a shows the electrical connection relationship between the two piezoelectric sheets of the micro-driver shown in Figure 8, according to an embodiment of the present invention, the two piezoelectric sheets have the same polarization direction;

Fig. 9b shows the electrical connection relationship between the two piezoelectric sheets of the micro-driver shown in Fig. 8, according to another embodiment of the present invention, the two piezoelectric sheets have opposite polarization directions;

Figure 9c shows the waveform diagrams of the two voltages respectively applied to the two piezoelectric sheets shown in Figure 9b;

Figure 9d shows waveforms of the voltages applied to the two piezoelectric sheets shown in Figure 9a respectively;

Figures 10 and 11 have shown two different modes of operation when the micro-driver equipped with magnetic head is excited among Figure 8;

Fig. 12 is the resonance curve of the magnetic head gimbal combination in Fig. 3;

13-15 are perspective views of three embodiments of the support frame of the micro-driver of the present invention;

16-18 are schematic diagrams of three embodiments of the microdriver of the present invention;

Figure 19 is a perspective view of one embodiment of the disk drive of the present invention.

Detailed ways

Referring to FIG. 3 , a HGA 3 according to the present invention includes a magnetic head 31 , a micro-driver 32 and a suspension member 8 for carrying the magnetic head 31 and the micro-driver 32 .

4 and 5, the flexure 13 also includes a cantilever tongue (suspension tongue) 328, the cantilever tongue 328 is used to support the micro-driver 32 and the magnetic head 31, and make the bearing force always pass through the load bar 17 A small protrusion 329 is applied to the central area of the magnetic head 31 . A plurality of electrode contacts 113 and 310 are provided on the cantilever tongue 328 . One end of the magnetic head 31 is provided with a plurality of electrode contacts 204 corresponding to the electrode contacts 113 on the cantilever tongue 328 .

Referring to FIGS. 4-5 , according to an embodiment of the present invention, the micro-driver 32 includes a support frame 320 and two piezoelectric sheets 321 . A plurality of electrode contacts 333 are provided on each piezoelectric sheet 321 corresponding to the electrode contacts 310 . The support frame 320 can be made of metal (for example, stainless steel), ceramics or polymer, and includes a bottom arm 393 , a movable arm 394 and two side arms 391 , 392 . The two side arms 391 , 392 are symmetrically distributed about the axis of the bottom arm 393 , and each side arm 391 , 392 is connected with the bottom arm 393 and the movable arm 394 . In this embodiment, the distance between the two side arms 391 , 392 is greater than the width of the magnetic head 31 . When the magnetic head 31 is mounted on the support frame 320 , two gaps 315 are formed between the support frame 320 and the magnetic head 31 . In addition, the movable arm 394 includes a supporting portion 10 for supporting the magnetic head 31 and two connecting portions 11 and 12 . The connecting parts 11 and 12 are respectively connected to two ends located on the diagonal of the supporting part 10 . The width of each connecting portion 11 and 12 is smaller than that of the support portion 10 , thereby forming a notch 14 between the side arm 391 and the support portion 10 , and forming a notch (not shown) between the side arm 392 and the support portion 10 . In order to increase the elasticity of the supporting frame 320 , two notches 16 can be formed between the bottom arm 393 and the two side arms 391 , 392 . In this embodiment, the supporting part 10 is in the shape of a cuboid, and the connecting parts 11 and 12 are vertically connected thereto.

4-5, a stopper 207 is formed on the load rod 17, and the stopper 207 passes through the cantilever tongue 328 to prevent the cantilever tongue 328 from being excessively bent during normal operation or being subjected to vibration or impact . In the present invention, the connection method between the piezoelectric sheet 321 and the support frame 320 can be a traditional connection method, such as epoxy bonding (epoxy bonding), anisotropic conductive film (anisotropic conductive film, ACF) connection.

In one embodiment, the movable arm 394 is formed corresponding to the position of the small protrusion 329 on the load bar 17 . Thus, the support frame 320 and the cantilever tongue 328 have the same rotation center, and a parallel gap 400 is formed between the support frame 320 and the cantilever tongue 328 . In the present invention, the piezoelectric sheet 321 is connected to the support frame 320 by connecting its two ends to the two free ends of the support frame 320 . Similarly, the piezoelectric sheet 321 is connected to the support frame 320 by connecting its two ends to the two free ends of the support frame 320 . In the present invention, the piezoelectric sheet 321 is preferably made of piezoelectric film material, and the piezoelectric sheet 321 can be a single-layer piezoelectric element or a multi-layer piezoelectric element. In one embodiment, each piezoelectric sheet 321 may be a multi-layer structure including an inner base layer and an outer piezoelectric layer. The inner base layer can be made of ceramics, polymers or metals, and the outer piezoelectric layer can be a single-layer piezoelectric element or a multi-layer piezoelectric element.

With reference to Fig. 3-8, described two piezoelectric sheets 321 and support frame 320 are connected together and form micro-driver 32; Then, the support portion 10 of magnetic head 31 and micro-driver 32 is bonded; Then, magnetic head 31 and micro-driver 32 are bonded together; The driver 32 is installed on the suspension member 8 to form the HGA 3 according to the following steps:

First, the support frame 320 is connected to the cantilever tongue 328 of the flexible member 13 through ACF, adhesive or epoxy (epoxy), and a parallel gap is formed between the support frame 320 and the cantilever tongue 328 . Then, a plurality of metal balls 332 (GBB or SBB) electrically connect the electrode contacts 333 on the two piezoelectric sheets 321 with the electrode contacts 310 on the cantilever tongue 328, thereby connecting the micro-driver 32 and the cantilever 8. The two cables 311 are electrically connected. Meanwhile, a plurality of metal balls 405 (GBB or SBB) electrically connect the electrode contacts 204 on the magnetic head 31 to the electrode contacts 113 , thereby electrically connecting the magnetic head 31 to the cable 309 . Through the cables 309 , 311 , the electrode contacts 308 electrically connect the magnetic head 31 and the micro-driver 32 with a control system (not shown). Apparently, the HGA 3 can also be assembled in this way: firstly, the micro-drive 32 is connected to the suspension member 8 , and then the magnetic head 31 is installed on the micro-drive 32 .

Referring to FIGS. 5 and 7 , the magnetic head 31 is mounted on the supporting portion 10 through two epoxy bars 18 (epoxy bars), and the magnetic head 31 corresponds to the center of the supporting portion 10 . In this embodiment, two epoxy strips 18 are symmetrically arranged at both ends of the support portion 10 with the center of the support portion 10 as a symmetrical point.

8, 9a, 9d and 10 show the first working mode of the micro-driver 32 to realize the function of head position adjustment. In this embodiment, the two piezoelectric sheets 321 have the same polarization direction. As shown in FIG. A voltage with the same sinusoidal waveform 407 is applied respectively (cf. FIG. 9d ). FIG. 8 shows the initial state of the micro-driver 32, ie, the state with no voltage applied thereto. When a sinusoidal voltage with a waveform 407 is applied to the two piezoelectric sheets 321, in the first half cycle, the two piezoelectric sheets 321 are respectively applied with a voltage with the same sinusoidal waveform 407 along with 401a and 401b (see FIG. 9d ). FIG. 8 shows the initial state of the micro-driver 32, ie, the state with no voltage applied thereto. When a sinusoidal voltage with a waveform 407 is applied to the two piezoelectric sheets 321, in the first half cycle, the two piezoelectric sheets 321 gradually shrink to a shortest position (corresponding to the maximum displacement position); and then gradually return to its initial position as the driving voltage decreases.

Referring to FIGS. 10 and 7 , when the two piezoelectric sheets 321 contract simultaneously, they will bend the two side arms 391 and 392 , thereby driving the two connecting parts 11 , 12 of the movable arm 394 to move in opposite directions. Because the two connecting parts 11, 12 are connected to it along the diagonal of the supporting part 10, and the width of each connecting part 11, 12 is smaller than the width of the supporting part 10, so that the supporting part 10 is connected between the two connecting parts 11, 12 rotates around its center from the original position 501 to the maximum displacement position 502 under the action of the torque generated by 12, and then returns to the original position 501. Correspondingly, because the magnetic head 31 is partially connected with the support part 10 by two epoxy strips 18, and the center of the magnetic head 31 and the support part 10 is corresponding, thus the magnetic head 31 will rotate around its center and with the support part 10 from the original position 501 The maximum displacement position 502, and then returns to its original position 501. In addition, two gaps 315 between the magnetic head 31 and the support frame 320 ensure the free rotation of the magnetic head 31 .

Referring to Figures 8, 9a, 9d and 11, when the driving voltage 407 enters the second half cycle (opposite to the phase of the first half cycle), the two piezoelectric plates 321 will simultaneously increase with the negative driving voltage gradually expands to a position of maximum displacement, and then gradually returns to its original position as the negative drive voltage decreases to zero. Correspondingly, it will rotate the magnetic head 31 from its original position 501 to the maximum displacement position 503 and then back to its original position. Here, since the magnetic head 31 is driven to rotate about its center, a good head position adjustment can be performed.

8, 9b, 9c and 10-11 show another working mode in which two piezoelectric sheets 321 realize the function of adjusting the position of the magnetic head. In this embodiment, the two piezoelectric sheets 321 have opposite polarization directions, as shown in FIG. 9b. One end 404 of the two piezoelectric sheets 321 is commonly grounded, and two voltages with two different waveforms 406 and 408 are respectively applied to the other ends 401a and 401b (as shown in FIG. 9c ). Driven by the above-mentioned voltage, within the same half period, the two piezoelectric sheets 321 will gradually shrink to the shortest position at the same time, and then return to their initial positions. When the driving voltage 406, 408 enters the second half cycle, the two piezoelectric sheets 321 will expand to the longest position at the same time, and then return to their original positions. Similarly, the magnetic head 31 will rotate cyclically around its center to obtain good head position adjustment.

In the present invention, because the width of each connecting portion 11, 12 is smaller than the width of the supporting portion 10 of the supporting frame 32, it will facilitate the rotation of the supporting portion 10 and the magnetic head 31, that is, the connecting portion 11 , 12 having a narrow width makes it easy to be bent so that the supporting part 10 and the magnetic head 31 can be driven to rotate. In addition, referring to FIG. 6 , the parallel gap between the cantilever tongue 328 and the movable arm 394 will allow the supporting part 10 and the magnetic head 31 to rotate more freely when driven by the piezoelectric film 321 .

Compared with the prior art, the micro-driver 32 of the present invention rotates the movable arm on it with two piezoelectric plates 321, thereby the magnetic head 31 is rotated with its center as the rotation center, and then the leading edge portion (leading) of the magnetic head 31 is rotated. side) and the trailing side (trailing side) move in different directions, while existing microdrives can only swing the trailing edge of the head (because its leading edge is fixed). Thus, the present invention can make the position adjustment of the magnetic head more effective. Correspondingly, the head position adjustment capacity (head position adjustment capacity) can be improved.

12 shows the test results of the resonance performance of the magnetic head gimbal assembly of the present invention, wherein 701 represents the excitation resonance curve of the substrate of the cantilever, and 702 represents the excitation resonance curve of the micro-drive. As can be seen from this figure, when the micro-driver 32 is excited, the cantilever resonance does not occur in the low-frequency band, but only the pure micro-driver resonance occurs in the high-frequency band, which will increase the servo system bandwidth of the disk drive and improve its capacity, At the same time reduce the head search and positioning time (seeking and settling time).

13-15, in the present invention, the support frame 32 can also be other structures, for example, the support part 10 can be other shapes (eg rhombohedral) than cuboid. Optionally, the connecting parts 11 and 12 may be connected to the support part 10 at a certain angle (not 90 degrees). For easier bending of the connecting parts 11 , 12 , a cutout 15 may be provided between the connecting part 11 ( 12 ) and the supporting part 10 .

In the three embodiments of the present invention, referring to FIGS. 16-18 , the supporting portion 10 may have a profile formed by a smooth arc. In addition, the connecting parts 11 and 12 may also be curved. In addition, in order to balance the forces exerted on the support part 10, the connection parts 11, 12 can be connected to the two side arms 391, 392 by means of two connection points 500, which are connected with the longitudinal axis of the support frame. Axisymmetric distribution is symmetrical. In the present invention, the piezoelectric sheet can be mounted on one side or both sides of each side arm 391,392.

In the present invention, referring to FIG. 19 , a disk drive can be formed by assembling the HGA 3 of the present invention with the disk drive housing 108 , disk 101 , spindle motor 102 , and voice coil motor 107 . Since the assembly process and structure of the disk drive of the present invention are well known to those skilled in the art, they will not be described in detail here.

Claims (20)

1. A magnetic head flap assembly, characterized in that it comprises: magnetic head; Micro-driver; wherein the micro-driver includes a support frame and at least one piezoelectric sheet; the support frame includes a bottom arm, a movable arm and a symmetrical distribution with the axis of the bottom arm, and is connected to each other through the bottom arm, and two side arms respectively connected to the movable arm along the diagonals of the movable arm; the at least one piezoelectric sheet connected to the side arms; and a suspension for supporting the magnetic head and microdrive; Wherein, the magnetic head is mounted on a movable arm, and is rotated by the movable arm when the at least one piezoelectric sheet is excited. 2. The magnetic head gimbal assembly according to claim 1, wherein the movable arm comprises a support portion for supporting the magnetic head, and two connection portions respectively connected to two ends on the diagonal line of the support portion . 3. The HGA according to claim 2, wherein the width of each connecting portion is smaller than the width of the supporting portion. 4. The magnetic head gimbal assembly according to claim 2, wherein the magnetic head part is mounted on a support portion of the support frame, and the magnetic head matches the center of the support portion. 5. The magnetic head gimbal assembly according to claim 2, wherein the two connection parts can be connected to the two side arms through two connection points, and the two connection points are centered on the longitudinal axis of the support frame Symmetry Axisymmetric distribution. 6. The HGA as claimed in claim 1, wherein the distance between the two side arms is greater than the width of the magnetic head. 7. The HGA as claimed in claim 1, wherein the bottom arm is partially connected to the suspension member, forming a parallel gap between the support frame and the suspension member. 8. The HGA according to claim 1, wherein the side arms are formed on both sides of the bottom arm and the movable arm, between the side arm and the bottom arm or between the side arm and the movable arm form at least one gap between them. 9. The HGA as claimed in claim 1, wherein the at least one piezoelectric film is mounted on one side or both sides of each side arm. 10. The magnetic head gimbal assembly according to claim 1, wherein the material for bonding the magnetic head to the support frame and the material for bonding the bottom arm of the support frame to the suspension member are epoxy glue, adhesive junction agent or anisotropic conductive mode. 11. A microdrive comprising: a support frame, and at least one piezoelectric sheet; wherein the support frame includes a bottom arm, A movable arm to support and rotate the magnetic head; two side arms that are distributed symmetrically with the axis of the bottom arm as the axis of symmetry, are connected to each other through the bottom arm, and are connected to the movable arm along the diagonal of the movable arm; The at least one piezoelectric sheet is connected to the two side arms. 12. The micro-driver according to claim 11, wherein the movable arm comprises a supporting part supporting the magnetic head, and two connecting parts respectively connected to two ends located on a diagonal line of the supporting part. 13. The micro-driver according to claim 12, wherein the width of each connecting portion is smaller than the width of the supporting portion. 14. The micro-actuator according to claim 11, wherein the at least one piezoelectric film is a film piezoelectric film or a ceramic piezoelectric film. 15. The micro-actuator according to claim 11, wherein the at least one piezoelectric film is a single-layer structure or a multi-layer structure comprising a base layer and a piezoelectric layer. 16. The micro-driver according to claim 15, wherein the piezoelectric layer is a single-layer piezoelectric structure or a multi-layer piezoelectric structure, and the base layer is made of metal, ceramic or polymer. 17. The micro-driver according to claim 11, wherein the side arms are formed on both sides of the bottom arm and the movable arm, between the side arm and the bottom arm or between the side arm and the movable arm at least one interval. 18. The micro-actuator according to claim 11, wherein said at least one piezoelectric film is mounted on one or both sides of said each side arm. 19. The microdrive according to claim 11, characterized in that: the material for bonding the magnetic head and the support frame is epoxy glue, adhesive or anisotropic conductive mold. 20. A hard disk drive comprising: Magnetic head flap assembly; a drive arm connected to the HGA; disk; and a spindle motor for rotating said disk; characterized by: The HGA includes a magnetic head, a micro-driver, and a suspension for supporting the magnetic head and the micro-driver; Wherein, the micro-driver includes a support frame, and at least one piezoelectric sheet; the support frame includes a bottom arm, a movable arm, and the axis of the bottom arm is symmetrically distributed, and is connected to each other through the bottom arm, and respectively two side arms connected to the movable arm along the diagonal of the movable arm; the at least one piezoelectric sheet is connected to the side arms; Wherein, the magnetic head is installed on the movable arm, and is rotated by the movable arm when the at least one piezoelectric sheet is excited; the bottom arm part is installed on the cantilever, forming a parallel gap.

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