CN1887528A - Constant micro force micro feeder for super pricise grinding of hard brittle material and its control method - Google Patents
Constant micro force micro feeder for super pricise grinding of hard brittle material and its control method Download PDFInfo
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- CN1887528A CN1887528A CN 200610014784 CN200610014784A CN1887528A CN 1887528 A CN1887528 A CN 1887528A CN 200610014784 CN200610014784 CN 200610014784 CN 200610014784 A CN200610014784 A CN 200610014784A CN 1887528 A CN1887528 A CN 1887528A
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- 238000000034 method Methods 0.000 title claims abstract description 26
- 239000000463 material Substances 0.000 title claims abstract description 15
- 238000006073 displacement reaction Methods 0.000 claims abstract description 40
- 238000012544 monitoring process Methods 0.000 claims abstract description 6
- 230000000052 comparative effect Effects 0.000 claims description 2
- 238000005516 engineering process Methods 0.000 abstract description 3
- 229910001651 emery Inorganic materials 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 238000003754 machining Methods 0.000 description 2
- 239000011159 matrix material Substances 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 239000005304 optical glass Substances 0.000 description 1
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Abstract
本发明公开了一种实现硬脆材料超精密磨削的恒微力微进给装置及控制方法，属于硬脆材料磨削加工技术。装置包括微进给平台和计算机，微进给平台内的微位移驱动器、微位移传感器和力传感器。计算机、D/A、微位移驱动器电源与微位移驱动器构成进给步长通道，微位移传感器、力传感器、放大器及A/D与计算机构成信号监测与反馈通道。控制过程：磨削力信号转换成电压信号，通过A/D转换成数字量由计算机实时监测，计算机根据监测到的磨削力信号，与设定的磨削力上限比较的结果发出调整微进给平台的进给步长的数字量，数字量经D/A转换成模拟电压，以驱动微位移驱动器，实现恒微力磨削。本发明的优点在于，配置成本低、磨削力控制精度可达0.5N。
The invention discloses a constant micro-force micro-feeding device and a control method for realizing ultra-precision grinding of hard and brittle materials, belonging to the grinding processing technology of hard and brittle materials. The device comprises a micro-feeding platform and a computer, a micro-displacement driver, a micro-displacement sensor and a force sensor in the micro-feeding platform. The computer, D/A, micro-displacement driver power supply and micro-displacement driver form the feed step channel, and the micro-displacement sensor, force sensor, amplifier, A/D and computer form the signal monitoring and feedback channel. Control process: The grinding force signal is converted into a voltage signal, which is converted into a digital quantity through A/D and monitored by the computer in real time. The computer sends out adjustment micro-increment according to the monitored grinding force signal and the result of comparison with the set grinding force upper limit. The digital quantity of the feed step length of the platform is converted into an analog voltage by D/A to drive the micro-displacement driver to achieve constant micro-force grinding. The invention has the advantages of low configuration cost and control accuracy of grinding force up to 0.5N.
Description
Technical field
The present invention relates to a kind of constant micro force micro-feeding device and control method that realizes the hard brittle material superfine grinding, belong to the hard brittle material Grinding Technology.
Background technology
At present, two kinds of modes are mainly adopted in little feeding of hard brittle material superfine grinding.Mode one: grinding process is implemented on the ultraprecise grinding machine, realizes by the dynamo-electric feed system of the high accuracy of lathe self along emery wheel little feeding radially, and system architecture complexity, manufacturing cost height, this system does not generally have the grinding force feedback function.For fear of the brittle damage of workpiece machining surface, generally want strict restriction along the emery wheel amount of feeding radially during grinding, grinding efficiency is low.Mode two: grinding process is implemented on precision grinder, is realized by the micro-feeding device that is attached on the lathe along emery wheel little feeding radially.It is the advantage of this mode that feed accuracy height, flexible configuration, cost hang down, but this micro-feeding device does not generally have the grinding force feedback function yet, be difficult to effectively avoid the brittle damage of workpiece machining surface when grinding brittle materials, and grinding efficiency is low.Therefore, be necessary to seek feed accuracy height, flexible configuration, cost is low and have the micro-feeding device of grinding force feedback function and the control corresponding method to adapt to the requirement of hard brittle material superfine grinding.
Summary of the invention
The objective of the invention is to propose a kind of constant micro force micro-feeding device and control method that realizes the hard brittle material superfine grinding, this installs flexible configuration, cost is low, feed accuracy is high, and the control method process is simple.
The present invention is realized by following technical proposals: be configured on the precision grinder, a kind of constant micro force micro-feeding device of realizing the hard brittle material superfine grinding, it is characterized in that, comprise micro-feeding platform 1 and computer 10, micro-feeding platform 1 mounted inside micro-displacement driver 2, micro-displacement sensor 3 and power sensor 4, computer 10 links to each other with micro-displacement driver 2 in the micro-feeding platform 1 by D/A converter 6 and micro-displacement driver power supply 5 and constitutes the feeding step-length that the feeding step-length is adjusted passage control micro-feeding platform 1, and micro-displacement sensor 3 and power sensor 4 pass through signal amplifier 7,8 and A/D converter 9 link to each other with computer 10 and constitute signal monitoring and feedback channel and monitor actual grinding force and total feed amount in the grinding process in real time.
Adopt said apparatus to realize the control method of the little feeding of constant micro force, be characterised in that to comprise following process:
Power sensor 4 in the micro-feeding platform 1 converts the grinding force signal to voltage signal, this voltage signal converts digital quantity to by A/D converter 9 and is monitored in real time by computer 10 after amplifier 8 amplifies, computer 10 according to the grinding force upper limit of the grinding force signal that monitors and setting the comparative result digital quantity that sends the feeding step-length of adjustment micro-feeding platform 1 be no more than the grinding force upper limit of setting to guarantee actual grinding force, this digital quantity converts aanalogvoltage to through D/A converter 6, this aanalogvoltage produces the driving voltage that drives the micro-displacement driver 2 in the micro-feeding platform 1 as the input signal control micro-displacement driver power supply 5 of micro-displacement driver power supply 5, thereby the feeding step-length feeding that control micro-feeding platform 1 sends by computer 10 realizes the constant micro force grinding.
The invention has the advantages that, monitor actual grinding force with the power sensor, adjust the feeding step-length of micro-feeding platform according to the grinding force feedback result, actual grinding force is controlled within the grinding force scope of setting, realize the constant micro force grinding, the setting range of system's grinding force control accuracy height, grinding force is adjustable, cost is low, the grinding force control accuracy of system is by the feed accuracy decision of power sensor and micro-feeding platform, can be according to the flexible configuration that requires of actual grinding process, the grinding force control accuracy can reach 0.5N.
Description of drawings
Fig. 1 is apparatus of the present invention composition frame chart.
Among the figure: 1 is micro-feeding platform, 2 is the micro-displacement driver in the micro-feeding platform 1,3 is the micro-displacement sensor in the micro-feeding platform 1,4 is the power sensor in the micro-feeding platform 1,5 is the micro-displacement driver power supply, and 6 is D/A converter, and 7 and 8 is signal amplifier, 9 is A/D converter, and 10 is computer.
Fig. 2 is a control method theory diagram of the present invention.
The specific embodiment
Below in conjunction with accompanying drawing the present invention is described in detail:
Micro-displacement driver 2 is installed on the matrix of micro-feed stage and links to each other with micro-displacement driver power supply 5 by lead, piezoelectric ceramics in the micro-displacement driver 2 has electrostriction effect, driving voltage in 5 outputs of micro-displacement driver power supply (produces micrometric displacement under 0～250V) effect, thereby promote micro-feed stage 1 feeding (0～10 μ m), feed accuracy can reach 10nm; Micro-displacement driver power supply 5 links to each other with D/A converter 6 by holding wire, D/A converter 6 is installed on the PCI slot of computer motherboard, the control voltage that D/A converter 6 outputs to displacement driver power supply 5 is 0～5V, and the output voltage that micro-displacement driver power supply 5 produces is 0～250V.Micro-displacement sensor 3 and power sensor 4 are installed on the matrix of micro-feed stage 1 by holding wire and link to each other the actual amount of feeding that is used for measuring micro-feed stage 1 and micro-feed stage 1 with 8 at the suffered grinding force of grinding process with amplifier 7 respectively, micro-displacement sensor 3 is a capacitance type sensor, and certainty of measurement can reach 10nm; Power sensor 4 is a strain gauge transducer, certainty of measurement can reach 0.1N, micro-displacement sensor 3 and power sensor 4 detected displacement signals and force signal are modulated the normal voltage that zooms into 0～10V through amplifier 7 and 8 respectively, amplifier 7 links to each other with A/D converter 9 by holding wire with 8, and A/D converter 9 is installed on the PCI slot of computer motherboard.
In concrete hard brittle material (as optical glass) superfine grinding process, at first set and be limited to 5N on the grinding force, the total feed amount of micro-feeding platform 1 and initial feeding step-length are respectively 5 μ m and 100nm, pass through D/A converter 6 by computer 10 then, micro-displacement driver power supply 5 and micro-displacement driver 2 control micro-feeding platforms 1 are by the initial feeding step-length feeding of setting and begin grinding process, pass through power sensor 4 by computer 10, signal amplifier 8 and A/D converter 9 be the grinding force of monitoring grinding process in real time, if the grinding force that monitors greater than the grinding force upper limit of setting, then reduces feeding step-length (the feeding step-length of current feeding step-length=0.7 * last feeding circulation) in proportion in next feeding circulation; If the grinding force that monitors is not more than the grinding force upper limit of setting, then in next feeding circulation, keep current feeding step-length constant (being the feeding step-length of current feeding step-length=last feeding circulation).At the end near grinding process, (actual total feed amount is monitored by micro-displacement sensor 3, signal amplifier 7 and A/D converter 9 in real time by computer 10 if the total feed amount of the micro-feeding platform of setting 1 and the difference of actual total feed amount are greater than ε, ε is a very little tolerance, can set in advance at the control software inhouse, ε in this example=20nm) and be not more than the feeding step-length of feeding circulation then is made as current feeding step-length with this difference in next feeding circulation; If the total feed amount of setting and the difference of actual total feed amount are greater than the feeding step-length of last feeding circulation, then according to the feeding step-length of determining at the grinding force of current feeding circulatory monitoring in the next feeding circulation; If the total feed amount of setting and the difference of actual total feed amount are not more than ε, then finish grinding process, in the grinding overall process, grinding force is controlled within the scope of setting, thereby realizes the little feeding of constant micro force of hard brittle material superfine grinding.
Claims (2)
1. constant micro force micro-feeding device of realizing the hard brittle material superfine grinding, it is characterized in that, comprise micro-feeding platform (1) and computer (10), micro-feeding platform (1) mounted inside has micro-displacement driver (2), micro-displacement sensor (3) and power sensor (4), computer (10) links to each other with micro-displacement driver (2) in the micro-feeding platform (1) by D/A converter (6) and micro-displacement driver power supply (5) and constitutes the feeding step-length and adjust the feeding step-length that passage is controlled micro-feeding platform (1), and micro-displacement sensor (3) and power sensor (4) pass through signal amplifier (7), (8) and A/D converter (9) link to each other with computer (10) and constitute signal monitoring and feedback channel and monitor actual grinding force and total feed amount in the grinding process in real time.
2. one kind is adopted the described device of claim 1, realize the control method of the little feeding of constant micro force of hard brittle material superfine grinding, it is characterized in that being to comprise following process: the power sensor (4) in the micro-feeding platform (1) converts the grinding force signal to voltage signal, this voltage signal converts digital quantity to by computer (10) monitoring in real time by A/D converter (9) after amplifier (8) amplifies, computer (10) according to the grinding force upper limit of the grinding force signal that monitors and setting the comparative result digital quantity that sends the feeding step-length of adjustment micro-feeding platform (1) be no more than the grinding force upper limit of setting to guarantee actual grinding force, this digital quantity converts aanalogvoltage to through D/A converter (6), this aanalogvoltage produces the driving voltage that drives the micro-displacement driver (2) in the micro-feeding platform (1) as the input signal control micro-displacement driver power supply (5) of micro-displacement driver power supply (5), thereby the feeding step-length feeding that control micro-feeding platform (1) sends by computer (10) realizes the constant micro force grinding.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2006100147849A CN100429045C (en) | 2006-07-17 | 2006-07-17 | Constant micro-force micro-feed device and control method for realizing ultra-precision grinding of hard and brittle materials |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2006100147849A CN100429045C (en) | 2006-07-17 | 2006-07-17 | Constant micro-force micro-feed device and control method for realizing ultra-precision grinding of hard and brittle materials |
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| Publication Number | Publication Date |
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| CN1887528A true CN1887528A (en) | 2007-01-03 |
| CN100429045C CN100429045C (en) | 2008-10-29 |
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| CNB2006100147849A Expired - Fee Related CN100429045C (en) | 2006-07-17 | 2006-07-17 | Constant micro-force micro-feed device and control method for realizing ultra-precision grinding of hard and brittle materials |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105563309A (en) * | 2015-11-11 | 2016-05-11 | 华中科技大学 | Active compliance end effector for controllable-pitch propeller robot grindingand control method of active compliance end effector |
| CN108381303A (en) * | 2018-04-13 | 2018-08-10 | 宁波德深机械设备有限公司 | Method for finishing surface |
| CN110640552A (en) * | 2019-09-12 | 2020-01-03 | 大连理工大学 | Processing method of easily-cleaved semiconductor crystal |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4965584A (en) * | 1972-10-28 | 1974-06-25 | ||
| CN87215571U (en) * | 1987-11-12 | 1988-10-05 | 西北工业大学 | Accurate locating and microfeeding apparatus for machine tool |
| CN2085702U (en) * | 1990-11-23 | 1991-10-02 | 昆明市联盟机械厂 | Micro-feeding mechanism for universal knife grinder |
| JPH06106465A (en) * | 1992-08-10 | 1994-04-19 | Sumitomo Metal Mining Co Ltd | Polishing method and device thereof |
| CN2178594Y (en) * | 1993-06-15 | 1994-10-05 | 张宝源 | Grinding wheel feed device for surface grinder |
| CN1060711C (en) * | 1994-06-10 | 2001-01-17 | 险峰机床厂 | Intelligent feed control system for grinding machines |
-
2006
- 2006-07-17 CN CNB2006100147849A patent/CN100429045C/en not_active Expired - Fee Related
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105563309A (en) * | 2015-11-11 | 2016-05-11 | 华中科技大学 | Active compliance end effector for controllable-pitch propeller robot grindingand control method of active compliance end effector |
| CN105563309B (en) * | 2015-11-11 | 2019-04-12 | 华中科技大学 | It is a kind of actively to comply with end effector and its control method for adjustable pitch propeller robot grinding |
| CN108381303A (en) * | 2018-04-13 | 2018-08-10 | 宁波德深机械设备有限公司 | Method for finishing surface |
| CN108381303B (en) * | 2018-04-13 | 2019-07-09 | 宁波德深机械设备有限公司 | Method for finishing surface |
| CN110640552A (en) * | 2019-09-12 | 2020-01-03 | 大连理工大学 | Processing method of easily-cleaved semiconductor crystal |
| CN110640552B (en) * | 2019-09-12 | 2020-11-06 | 大连理工大学 | Processing method of easily-cleaved semiconductor crystal |
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| CN100429045C (en) | 2008-10-29 |
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