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CN1500069A - Preparation method of optical fiber doped with rare earth - Google Patents

Preparation method of optical fiber doped with rare earth Download PDF

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CN1500069A
CN1500069A CNA018230083A CN01823008A CN1500069A CN 1500069 A CN1500069 A CN 1500069A CN A018230083 A CNA018230083 A CN A018230083A CN 01823008 A CN01823008 A CN 01823008A CN 1500069 A CN1500069 A CN 1500069A
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T・班迪帕德哈亚
T·班迪帕德哈亚
布哈德拉
R·森
构牌账
S·K·布哈德拉
保罗
K·达斯古普塔
M·C·保罗
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Abstract

本发明提供一种改善的通过将MCVD技术与溶液掺杂方法相结合制备掺杂稀土的预型体和纤维的方法,所述方法包括:在石英玻璃基体管内形成匹配或凹陷包层结构,之后,沉积含有GeO2和P2O5的未烧结的颗粒层形成芯,并且,通过将多孔烟灰层浸泡在含有确定比例的共掺剂如AlCl3/Al(NO3) 3的RE盐的醇/水溶液中进行溶液掺杂,通过控制烟灰的孔隙率、浸泡时间、溶液的浓度和共掺剂比例,在芯处获得要求的RE离子浓度并且最大程度地减少芯-包层界面缺陷,之后,对含有RE的多孔沉积层进行干燥、氧化、脱水和烧结,并且在高温下进行塌落,制备出预型体,并且采用合适尺寸的石英管进行包覆,再通过纤维拉拔制成纤维。The present invention provides an improved method of preparing rare earth-doped preforms and fibers by combining MCVD techniques with solution doping methods, said method comprising: forming a matching or depressed cladding structure within a quartz glass substrate tube, followed by , deposit an unsintered particle layer containing GeO2 and P2O5 to form the core, and, by soaking the porous soot layer in an alcohol containing a defined ratio of codopants such as AlCl3 /Al( NO3 ) 3 RE salts solution doping in aqueous solution, by controlling the porosity of soot, soaking time, solution concentration and co-dopant ratio, the required RE ion concentration is obtained at the core and the core-cladding interface defects are minimized, after that, The porous deposition layer containing RE is dried, oxidized, dehydrated and sintered, and collapsed at high temperature to prepare a preform, which is coated with a quartz tube of appropriate size, and then made into a fiber by fiber drawing.

Description

掺杂稀土的光导纤维的制备方法Preparation method of optical fiber doped with rare earth

技术领域technical field

本发明涉及一种掺杂稀土的光导纤维的制备方法。The invention relates to a preparation method of rare earth-doped optical fiber.

背景技术Background technique

掺杂稀土(RE)的光导纤维在包括放大器、纤维激光器和传感器等许多领域具有很大的应用潜力。稀土氧化物作为活性物质掺杂至这类纤维的芯中。已证实掺杂各种稀土能够在几个波长范围内产生激光和放大作用,但是,对于通讯而言,掺杂铒的光纤(EDF)仍然是最重要的,因为它的工作波长与第三低损耗光学窗口相匹配。Optical fibers doped with rare earths (REs) have great potential for applications in many fields including amplifiers, fiber lasers, and sensors. Rare earth oxides are doped as active species into the core of such fibers. Doping with various rare earths has been shown to produce lasing and amplification in several wavelength ranges, however, for communications, erbium-doped fiber (EDF) remains the most important because it operates at the same wavelength as the third lowest The lossy optical window is matched.

掺杂铒的光纤放大器(EDFA)在约1.53μm的低损耗窗口范围工作,它在当今的高容量通讯系统中起关键作用。它能够直接放大光学信号,而与调制格式无关。迄今在所述系统中使用的光电中继器是3R元件,但其在离散波长范围内的放大作用有限。EDFA具有在一个纤维中同时放大几个光信道的能力,能够实施WDM技术(波分多路复用技术),具有将远程传输系统的带宽从Gb/s提高至Tb/s的潜力。从而在工作波长范围内,表现出高增益、大带宽、低噪音、极化不敏感增益、明显降低的串话干扰问题和低的导入损耗。未来高容量光学网络和传输系统的成功很大程度上依赖于高效EDFA的发展。Erbium-doped fiber amplifiers (EDFAs), which operate in a low loss window of about 1.53 μm, play a key role in today's high-capacity communication systems. It is capable of amplifying optical signals directly, independent of the modulation format. The opto-repeaters used to date in such systems are 3R elements, but their amplification in discrete wavelength ranges is limited. EDFA has the ability to simultaneously amplify several optical channels in one fiber, can implement WDM technology (wavelength division multiplexing technology), and has the potential to increase the bandwidth of long-distance transmission systems from Gb/s to Tb/s. Therefore, in the working wavelength range, it exhibits high gain, large bandwidth, low noise, polarization insensitive gain, significantly reduced crosstalk interference and low lead-in loss. The success of future high-capacity optical networks and transmission systems largely depends on the development of high-efficiency EDFAs.

可以参考Townsend J.E.,Poole S.B.和Payne D.N.的文章(Electronics Letters,Vol.23(1987)p329)“Solution-doping technique forfabrication of rare-earth doped optical fibre”,其中,采用MCVD技术制备具有一种突变阶跃折射率分布和所要求的芯-皮结构的预型体,同时,采用溶液掺杂加入活性离子。该方法包括如下步骤:Can refer to the article (Electronics Letters, Vol.23 (1987) p329) "Solution-doping technique forfabrication of rare-earth doped optical fiber" of Townsend J.E., Poole S.B. and Payne D.N. The preform of the refractive index distribution and the required core-skin structure, at the same time, the solution doping is used to add active ions. The method comprises the steps of:

i.在高硅氧玻璃基体管中沉积一层掺杂P2O5和F的传统包层以形成匹配的包层或凹陷包层型结构。i. A conventional cladding layer doped with P2O5 and F is deposited in a high silica glass substrate tube to form a matched cladding or depressed cladding type structure.

ii.在较低温度下,沉积具有包含指数提高掺杂剂如GeO2的预定组成的芯层,以形成未烧结的多孔烟灰。ii. At a lower temperature, a core layer with a predetermined composition comprising an index increasing dopant such as GeO2 is deposited to form an unsintered porous soot.

iii.将带有沉积层的管浸入掺杂剂前体的水溶液(典型浓度0.1M)中最多达1小时。尽管使用最多的是稀土卤化物,但是,掺杂剂离子的任何可溶解形式都适合用来制备所述溶液。iii. Immerse the tube with the deposited layer in an aqueous solution of the dopant precursor (typical concentration 0.1 M) for up to 1 hour. Although rare earth halides are most used, any soluble form of the dopant ion is suitable for preparing the solution.

iv.浸泡之后,用丙酮对管进行冲洗并将其重新安装在车床(lathe)上。iv. After soaking, the tube was rinsed with acetone and remounted on the lathe.

v.对含有RE的芯层进行脱水和烧结处理,以获得透明的玻璃层。脱水在600℃下用氯进行。干燥时间超过30分钟时,采用5∶2的Cl2/O2比可将OH-的水平降至低于1ppm。v. Dehydrating and sintering the RE-containing core layer to obtain a transparent glass layer. Dehydration was performed with chlorine at 600°C. Using a Cl 2 /O 2 ratio of 5:2 can reduce the OH- level to less than 1 ppm when the drying time exceeds 30 minutes.

vi.采用通常的方式塌落(collapse),获得称作预型体的实心玻璃棒。vi. Collapse in the usual way to obtain a solid glass rod called a preform.

vii.实施传统的纤维拉拔。vii. Perform conventional fiber drawing.

也可以参考DiGiovanni D.J.的论文(SPIE Vol.1373(1990)p2)“Fabrication of rare-earth-doped optical fibre”,其中,带有多孔芯层的基体管浸泡在含有存在所要求的RE离子的硝酸盐或者氯化物的水溶液或醇溶液中。将所述管脱水、干燥并重新安装在车床上。脱水通过在约900℃下使干燥的氯气通过所述管1小时来进行。脱水之后,对所述层进行烧结,并且将管塌落并拉拔成纤维。Reference may also be made to DiGiovanni D.J.'s paper (SPIE Vol. 1373(1990) p2) "Fabrication of rare-earth-doped optical fiber", in which a substrate tube with a porous core is soaked in nitric acid containing the RE ions required for the presence of In aqueous or alcoholic solutions of salt or chloride. The tubes were dewatered, dried and remounted on the lathe. Dehydration was performed by passing dry chlorine gas through the tube at about 900°C for 1 hour. After dehydration, the layer is sintered and the tube is collapsed and drawn into fibers.

可以参考另一篇Ainslie B.J.,Craig S.P.,Davey S.T.和Wakefield B.的文章(Material Letters,Vol.6(1988)p-139)“The fabrication,assessmentand optical properties of high-concentration Nd3+ and Er3+ doped silicabased fibres”,其中,采用溶液法制造了基于掺杂高浓度的Nd3+和Er3+的Al2O3-P2O5-SiO2主玻璃的光导纤维并对其进行了量化。在沉积包层之后,在较低温度下沉积掺杂P2O5的石英烟灰。将所制备的管浸泡在含有1M Al(NO3)3+各种浓度的ErCl3和NdCl3的醇溶液中1个小时。随后将管吹干并且采用通常方式塌落成预型体。据说Al是在芯中心获得高RE浓度但不产生聚集(clustering)效应的关键组元。进一步发现:Al和RE分布以某种方式结合一起,从而阻止了RE离子的挥发。已观察到在核中心处P和GeO2的含量下降(dip)。You can refer to another article by Ainslie BJ, Craig SP, Davey ST and Wakefield B. (Material Letters, Vol.6(1988) p-139) "The fabrication, assessment and optical properties of high-concentration Nd 3+ and Er 3 + doped silicabased fibers", in which optical fibers based on Al 2 O 3 -P 2 O 5 -SiO 2 host glass doped with high concentrations of Nd 3+ and Er 3+ were fabricated and quantified by the solution method . After the cladding was deposited, P2O5 -doped quartz soot was deposited at a lower temperature. The prepared tubes were soaked in an alcoholic solution containing 1 M Al(NO 3 ) 3 + various concentrations of ErCl 3 and NdCl 3 for 1 hour. The tube is then blown dry and collapsed into a preform in the usual manner. Al is said to be the key component to obtain high RE concentrations in the core center without clustering effects. It was further found that the Al and RE distributions were combined in some way, thereby preventing the RE ions from volatilizing. A dip in the content of P and GeO2 at the center of the core has been observed.

还可以参照Desuvire等的美国专利(专利号:5,005,175(1991))“Erbium doped fibre amplifier”,其中,用于光学放大器的纤维包括单模的芯掺杂铒的纤维,并具有如下RE离子分布:RE离子的半径小于1.9μm,而泵浦信号模式的半径超过3μm。纤维的数值孔径(NA)为0.2-0.35,并且,为提高效率,芯同时掺杂Al和Ge的氧化物。当掺杂Er的芯区半径等于或低于纤维泵浦模式的半径时,据认为在芯横截面处的每个铒原子暴露于基本相同水平的泵浦模式高强度部分。据报道:具有这种设计的纤维与传统的掺杂Er的纤维放大器相比,具有更高的增益和更低的阈值。传统掺杂Er的芯的半径比所述泵浦模式的半径大,因此,处于芯边缘的铒原子不能得到充分多的泵浦光子通量,不能产生净增益。Reference can also be made to the U.S. Patent (Patent No.: 5,005,175 (1991)) "Erbium doped fiber amplifier" of Desuvire et al., wherein the fiber used for the optical amplifier comprises a single-mode core-doped fiber with erbium, and has the following RE ion distribution: The RE ions have a radius of less than 1.9 μm, while the pump signal mode has a radius of more than 3 μm. The numerical aperture (NA) of the fiber is 0.2-0.35, and, for improved efficiency, the core is doped with both Al and Ge oxides. When the Er-doped core radius is equal to or lower than that of the fiber's pump mode, it is believed that each Er atom at the core cross-section is exposed to substantially the same level of pump mode high intensity fraction. It is reported that fibers with this design have higher gain and lower threshold than conventional Er-doped fiber amplifiers. The radius of the conventional Er-doped core is larger than that of the pump mode, so the erbium atoms at the edge of the core cannot get enough pump photon flux to produce a net gain.

根据G.S.Roba的美国专利(专利号:5,491,581(1996))“Rare earthdoped optical fibre amplifiers”,其中,据报道在芯处用于提高纤维的NA值的高的氧化锗浓度能够在芯-包层界面处产生残余应力,原因是二者的粘度与膨胀系数不同。据认为:残余应力继而会使纤维的背景损耗出现不希望的增大。According to G.S.Roba's U.S. Patent (Patent No.: 5,491,581 (1996)) "Rare earthdoped optical fiber amplifiers", in which, it is reported that the high concentration of germanium oxide at the core for increasing the NA value of the fiber can be at the core-cladding interface Residual stress is generated at the place, because the viscosity and expansion coefficient of the two are different. It is believed that the residual stress in turn causes an undesired increase in the background loss of the fiber.

根据Shukunami等的美国专利(专利号:5,778,129(1998))“Dopedoptical fibre having core and clad structure are used for increasing theamplification band of an optical amplifier using the optical fibre”,其中,在石英管内部形成包层之后,采用MCVD法沉积多孔芯层,并且,采用溶液掺杂法使作为活性离子的Er渗入多孔芯中,之后,进行玻璃化和塌落,制成预型体。所述溶液也含有Al的化合物,即氯化物,以便用Al对芯进行共掺杂,从而扩大放大带。掺杂Er和Al的玻璃构成了芯的第一个区域。该区域周围是芯的第二和第三个区域。第三个区域含有Ge,以便提高难熔指数。第二个区域的杂质浓度比第一和第三个区域低,因此,其RI值也低。第二个区域起阻止活性掺杂剂扩散的阻挡层作用。According to U.S. Patent (Patent No.: 5,778,129 (1998)) of Shukunami et al. "Dopedoptical fiber having core and clad structure are used for increasing theamplification band of an optical amplifier using the optical fiber", wherein, after the cladding is formed inside the quartz tube, The porous core layer is deposited by the MCVD method, and Er as an active ion is infiltrated into the porous core by the solution doping method, and then vitrified and slumped to form a preform. The solution also contains a compound of Al, ie chloride, in order to co-dope the core with Al and thus enlarge the amplification band. The glass doped with Er and Al constitutes the first region of the core. Surrounding this area are the second and third areas of the core. The third region contains Ge in order to increase the refractory index. The impurity concentration of the second region is lower than that of the first and third regions, and therefore, its RI value is also lower. The second region acts as a barrier against the diffusion of active dopants.

也可以参考Tanaka,D.等的美国专利(专利号:5474588(1995))“Solution doping of a silica with erbium,aluminium and phosphorus toform an optical fibre”,其中,介绍了掺杂Er的氧化硅的制造方法,即:在一根籽棒上沉积一层石英玻璃烟灰(VAD装置),形成多孔烟灰预型体,将所述预型体浸泡在含有一种铒的化合物、一种铝的化合物和一种磷酸酯的醇溶液中,并且,使所述预型体干燥,形成含有Er,Al和P的烟灰预型体。所述干燥在氮气或惰性气体的气氛中,60-70℃下进行24-240小时。干燥后的烟灰预型体在含有0.25-0.35%氯气的氦气气氛中,950-1050℃下进行加热和脱水处理2.5-3.5小时,并且,进一步在1400-1600℃下加热3-5小时,以使其透明。由此形成了掺杂铒的玻璃预型体。由于存在磷,在预型体形成过程中AlCl3的偏析受到抑制,结果,可以实现Al离子的掺杂浓度具有高水平(>3wt%)。据报道Er,Al和P离子的掺杂浓度和组元比在径向以及纵向上极为精确和均匀。Reference can also be made to Tanaka, D. et al.'s U.S. Patent (Patent No.: 5474588 (1995)) "Solution doping of a silica with erbium, aluminum and phosphorus to form an optical fiber", which describes the manufacture of Er-doped silicon oxide method, that is: depositing a layer of quartz glass soot (VAD device) on a seed rod to form a porous soot preform, which is soaked in a compound containing an erbium compound, an aluminum compound and a an alcoholic solution of a phosphate ester, and drying the preform to form a soot preform containing Er, Al and P. The drying is carried out at 60-70° C. for 24-240 hours in an atmosphere of nitrogen or inert gas. The dried soot preform is heated and dehydrated at 950-1050°C for 2.5-3.5 hours in a helium atmosphere containing 0.25-0.35% chlorine, and further heated at 1400-1600°C for 3-5 hours, to make it transparent. An erbium-doped glass preform is thus formed. Due to the presence of phosphorus, segregation of AlCl3 is suppressed during preform formation, and as a result, a doping concentration of Al ions with a high level (>3 wt%) can be achieved. It is reported that the doping concentrations and component ratios of Er, Al, and P ions are extremely precise and uniform in the radial and longitudinal directions.

但是,前述各种方法存在一些缺点,分别是:However, the aforementioned methods have some disadvantages, namely:

1.在芯处获得的是台阶类RE分布,导致泵浦信号与RE离子的重叠较差,降低了泵浦效率。1. What is obtained at the core is a step-like RE distribution, resulting in poor overlap between the pump signal and RE ions, which reduces the pumping efficiency.

2.台阶类RE分布要求芯处具有高的数值孔径(NA)或者对中央区域(即:总芯区域的50%)的RE进行限制,以提高泵浦效率,这继而导致下述缺点:2. The step-like RE distribution requires a high numerical aperture (NA) at the core or limits the RE in the central region (ie: 50% of the total core area) to improve pumping efficiency, which in turn leads to the following disadvantages:

i)仅仅在芯的选择部分掺杂RE极其困难,并且,由于在所述方法对各个处理阶段例如沉积、溶液掺杂、干燥和烧结中的处理参数很敏感,其重复性受到影响。i) Doping RE only in selected parts of the core is extremely difficult and its reproducibility suffers due to the sensitivity of the process to process parameters in the various process stages such as deposition, solution doping, drying and sintering.

ii)提高纤维的NA值但同时减少芯面积要求在较小的芯区具有高的氧化锗浓度,结果,增大了在烧结和塌落期间由于挥发该浸渍物在中心处形成的可能性。ii) Increasing the NA value of the fiber while reducing the core area requires a high concentration of germanium oxide in a smaller core region, consequently increasing the likelihood of impregnations forming in the center due to volatilization during sintering and slumping.

iii)对于具有高NA值(>0.20)的预型体而言,芯处的高氧化锗浓度降低了玻璃的粘度,使得该过程尤其对于多孔烟灰层沉积和烧结步骤期间的温度非常敏感。iii) For preforms with high NA values (>0.20), the high germanium oxide concentration at the core reduces the viscosity of the glass, making the process very sensitive especially to the temperature during the porous soot layer deposition and sintering steps.

iv)多孔烟灰沉积期间温度敏感性的增加导致沿管长度方向的组成和烟灰密度的变化。iv) Increased temperature sensitivity during porous soot deposition leads to variations in composition and soot density along the length of the tube.

v)芯处的高氧化锗浓度能够在芯-包层界面处产生残余应力,因为二者的粘度与膨胀系数不同。残余应力会使纤维的背景损耗出现不希望的增大。v) High germanium oxide concentration at the core can generate residual stress at the core-cladding interface due to the difference in viscosity and expansion coefficient. Residual stress can undesirably increase the background loss of the fiber.

vi)据认为:残余应力产生极化模式色散(PMD),造成容量严重受损,包括脉冲变宽。由于在给定波长条件下PMD的大小不稳定,所以,被动补偿变得不可能。vi) It is believed that: Residual stress produces polarization mode dispersion (PMD), causing severe impairment of capacity, including pulse broadening. Since the magnitude of the PMD is not stable at a given wavelength, passive compensation becomes impossible.

3.含有RE氯化物的烟灰层的脱水和烧结非常关键,因为该过程通过蒸发使组成改变,并且还使掺杂剂盐以及芯处存在的GeO2发生扩散。3. The dehydration and sintering of the soot layer containing RE chlorides is critical because the process changes the composition by evaporation and also diffuses dopant salts as well as GeO2 present at the core.

发明目的purpose of invention

本发明的主要目的是提供一种克服了前述之不足的掺杂稀土的光导纤维的制备方法。The main object of the present invention is to provide a method for preparing a rare earth-doped optical fiber which overcomes the aforementioned disadvantages.

本发明的另一个目的是提供拥有可控的RE分布的纤维,特别是掺杂区域的铒的分布与纤维中的泵浦束强度的分布相似,在中心处具有最大浓度,结果,能够明显改善二者之间的重叠。Another object of the present invention is to provide fibers possessing a controllable RE distribution, in particular the distribution of erbium in the doped region is similar to the distribution of the pump beam intensity in the fiber, with a maximum concentration at the center, and as a result, can significantly improve overlap between the two.

本发明的又一个目的是提供光导纤维,该纤维中泵浦束分布半径等于或大于芯处RE离子分布的半径,以便增加所有活性离子暴露在泵浦光下的机会,结果提高了纤维中泵浦转化效率。Yet another object of the present invention is to provide an optical fiber in which the pump beam distribution radius is equal to or greater than that of the RE ion distribution at the core, so as to increase the exposure of all active ions to the pump light, resulting in improved pumping in the fiber. Pu conversion efficiency.

本发明的再一个目的是提供一种控制在芯中沿半径方向的GaussianRE分布的方法。Yet another object of the present invention is to provide a method of controlling the distribution of Gaussian RE in the radial direction in the core.

本发明的再一个目的是使纤维获得高的光学增益,其NA值仅仅接近0.20,从而能够避免芯处与包层玻璃之间组成的大范围变化,消除例如残余应力和PMD等问题。Yet another object of the present invention is to achieve high optical gain in the fiber with an NA value only close to 0.20, thereby avoiding a wide range of compositional variations between the core and the cladding glass, eliminating problems such as residual stress and PMD.

本发明的再一个目的是发展适合于放大输入信号的掺杂铒的纤维,该纤维NA值和模式场直径与信号传送纤维没有明显不同,从而便于进行拼接。Yet another object of the present invention is to develop erbium-doped fibers suitable for amplifying input signals, which fiber NA and mode field diameters are not significantly different from signal-transmitting fibers, thereby facilitating splicing.

本发明的再一个目的是降低因干燥和烧结期间RE盐的蒸发而使颗粒状芯层的组成发生变化的可能性。Yet another object of the present invention is to reduce the possibility of changes in the composition of the particulate core due to evaporation of the RE salt during drying and sintering.

本发明的再一个目的是减少在纤维中获得要求的NA值所需的锗的卤化物的量。Yet another object of the present invention is to reduce the amount of germanium halide required to obtain the desired NA value in the fiber.

本发明的又一个目的是提供一种方法,该方法中,纤维的数值孔径为0.10-0.30,保持芯处RE浓度在50-6000ppm之间,并且与在掺杂区域RE分布图的变化一起,制备出适合于用作不同用途的放大器、纤维激光器和传感器的纤维。Yet another object of the present invention is to provide a method in which the numerical aperture of the fiber is 0.10-0.30, the RE concentration at the core is maintained between 50-6000 ppm, and together with the change in the RE profile in the doped region, Fabricated fibers suitable for use as amplifiers, fiber lasers and sensors for different applications.

发明概述Summary of the invention

本发明的新颖性在于通过最大程度地降低RE盐的蒸发以及防止稀土离子由于随后的热处理发生扩散来控制塌落的预型体中RE离子的浓度分布。为了实现此目标,沉积之后的最佳烟灰密度估计为0.3-0.5。本发明的创造性的步骤在于通过将所述管逐渐加热至更高温度,同时内部保持氧化性气氛,来使RE盐转变成氧化物,由此,最大程度地降低RE在随后的处理过程中发生蒸发的可能性,因为与卤化物/硝酸盐相比,氧化物的熔点非常高。该步骤也有助于去除多孔层内存留的溶剂。该创造性步骤还包括以50-200℃的梯度,将含有RE的多孔层的温度逐渐升至烧结温度以及更高温度,以便进行烧结并且进一步将RE离子固定在要求部位。所述梯度取决于主体玻璃的组成和芯层中Er/Al的浓度。结果,RE由溶液进入芯层的效率明显提高,从而使本方法更有效、更经济。芯处沿横向的RE分布取决于多孔烟灰层的密度、浸泡时间以及氧化、烧结和塌落期间的处理条件。The novelty of the present invention lies in the control of the concentration profile of RE ions in the collapsed preform by minimizing the evaporation of RE salts and preventing the diffusion of rare earth ions due to subsequent heat treatment. To achieve this goal, the optimum soot density after deposition is estimated to be 0.3-0.5. The inventive step of the present invention consists in converting the RE salts into oxides by gradually heating the tube to higher temperatures while maintaining an oxidizing atmosphere inside, thereby minimizing the occurrence of RE during subsequent processing. Possibility of evaporation, since oxides have very high melting points compared to halides/nitrates. This step also helps to remove the solvent trapped in the porous layer. The inventive step also includes gradually raising the temperature of the porous layer containing RE to the sintering temperature and higher temperature with a gradient of 50-200° C., so as to perform sintering and further fix RE ions at required positions. The gradient depends on the composition of the host glass and the concentration of Er/Al in the core layer. As a result, the efficiency of RE from solution into the core layer is significantly improved, making the process more efficient and economical. The RE distribution along the transverse direction at the core depends on the density of the porous soot layer, soaking time, and processing conditions during oxidation, sintering, and slumping.

在富GeO2、同时又添加氧和氦的气氛中烧结多孔芯层是本发明的另一个创造性步骤,该步骤减少了获得要求的NA值所需的GeCl4量,并使本方法更为经济。在烧结步骤期间,于200-1400℃温度下,将纯GeCl4与输入氧一起提供,其量取决于纤维中要求的NA值。通过逐渐升高温度使烧结持续进行,直至形成透明的玻璃层。Sintering the porous core in a GeO2 rich atmosphere with the addition of oxygen and helium is another inventive step of the present invention which reduces the amount of GeCl4 required to obtain the required NA value and makes the process more economical . During the sintering step, pure GeCl4 is supplied with input oxygen at a temperature of 200-1400°C, the amount depends on the required NA value in the fiber. Sintering is continued by gradually increasing the temperature until a transparent glass layer is formed.

发明详述Detailed description of the invention

因此,本发明提供一种改善的制备掺杂稀土的光导纤维的方法,其包括(a)在石英玻璃基体管中沉积掺杂P2O5和F的合成包层,以获得匹配或凹陷(depressed)的包层型结构,(b)在管表面温度为1200-1400℃的条件下,通过沉积未烧结的颗粒层形成芯,(c)在所述颗粒层中使P2O5和GeO2的浓度分别保持为0.5-5.0%(摩尔)和3.0-25.0%(摩尔),以获得包含掺杂F的包层和多孔烟灰层的管,(d)将包含多孔烟灰层的管浸泡在溶液中达1-2个小时,所述溶液中含浓度为0.002-0.25M的RE盐,并且还含有或者没有浓度为0.05-1.25M的铝盐,(e)以10-50cc/min的速度将溶液排掉,(f)通过在管中流过干燥的氮气或者其它任何惰性气体来使多孔层干燥,(g)在存在氧的条件下,在600-1100℃的范围内逐渐对管进行加热,(h)在800-1200℃的温度范围以及存在过量Cl2的条件下对管中的芯层进行脱水,(i)在存在氧和氦的混合物以及1400-1900℃的温度下对芯层进行烧结,(j)在2000-2300℃的温度下对管进行塌落,获得预型体,(k)用石英管包覆预型体,(l)由预型体拉制成纤维。Accordingly, the present invention provides an improved method of making a rare earth doped optical fiber comprising (a) depositing a synthetic cladding doped with P2O5 and F in a quartz glass matrix tube to obtain a matching or recessed ( depressed) cladding structure, (b) under the condition of the tube surface temperature of 1200-1400 °C, the core is formed by depositing an unsintered granular layer, ( c ) P2O5 and GeO The concentrations of 2 were maintained at 0.5-5.0 mol% and 3.0-25.0 mol%, respectively, to obtain tubes containing F-doped cladding and porous soot layers, (d) soaking the tubes containing porous soot layers in 1-2 hours in a solution containing RE salt at a concentration of 0.002-0.25M with or without aluminum salt at a concentration of 0.05-1.25M, (e) at a rate of 10-50cc/min Drain off the solution, (f) dry the porous layer by passing dry nitrogen or any other inert gas through the tube, (g) gradually heat the tube in the range of 600-1100°C in the presence of oxygen , (h) dehydration of the core layer in the tube in the temperature range of 800-1200°C in the presence of excess Cl2 , (i) dehydration of the core layer in the presence of a mixture of oxygen and helium at a temperature of 1400-1900°C Sintering, (j) collapsing the tube at a temperature of 2000-2300°C to obtain a preform, (k) covering the preform with a quartz tube, (l) drawing the preform into fibers.

本发明进一步提供一种制备掺杂铒的光导纤维的方法,其包括(a)在石英玻璃基体管中沉积掺杂P2O5和F的合成包层,以获得匹配或凹陷包层型结构,(b)在管表面温度为1200-1350℃的条件下,通过沉积未烧结的颗粒层形成芯,(c)在所述颗粒层中分别使P2O5和GeO2的浓度保持为0.5-3.5%(摩尔)和3.0-20.0%(摩尔),以获得包含掺杂F的包层和多孔烟灰层的管,(d)将包含多孔烟灰层的管浸泡在溶液中达1-2个小时,所述溶液中Er盐的浓度为0.004-0.20M,并且还含有或者没有浓度为0.05-1.0M的铝盐,(e)以10-30cc/min的速度将溶液排掉,(f)通过在管中流过干燥的氮气或者其它任何惰性气体来使多孔层干燥,(g)在存在氧的条件下,在700-1000℃的范围内逐渐对管进行加热,(h)在800-1200℃的温度范围以及存在过量Cl2的条件下对管中的芯层进行脱水,(i)在存在氧和氦的混合物以及1400-1800℃的温度下对芯层进行烧结,(i)在2000-2300℃的温度下对管进行塌落,获得预型体,(k)用石英管包覆预型体,(l)由预型体拉制成纤维。The present invention further provides a method of preparing an erbium-doped optical fiber comprising (a) depositing a composite cladding doped with P2O5 and F in a quartz glass substrate tube to obtain a matched or depressed cladding type structure , (b) The core is formed by depositing an unsintered granular layer at a tube surface temperature of 1200–1350 °C, (c) the concentrations of P2O5 and GeO2 are kept at 0.5 in said granular layer, respectively - 3.5 mol% and 3.0-20.0 mol% to obtain a tube comprising a cladding and a porous soot layer doped with F, (d) soaking the tube comprising a porous soot layer in the solution for 1-2 hour, the concentration of Er salt in the solution is 0.004-0.20M, and also contains or does not contain the aluminum salt that concentration is 0.05-1.0M, (e) with the speed of 10-30cc/min the solution is drained, (f) The porous layer is dried by passing dry nitrogen or any other inert gas through the tube, (g) gradually heating the tube in the range of 700-1000°C in the presence of oxygen, (h) at 800-1200°C °C temperature range and in the presence of excess Cl2 to dehydrate the core layer in the tube, (i) sinter the core layer in the presence of a mixture of oxygen and helium at a temperature of 1400-1800 °C, (i) at 2000 Slumping the tube at a temperature of -2300°C to obtain a preform, (k) covering the preform with a quartz tube, (l) drawing the preform into fibers.

本发明还提供一种制备掺杂稀土的光导纤维的方法,其中,根据主体玻璃组成和芯层中RE/Al的浓度,通过控制多孔烟灰层的密度、浸泡时间以及氧化、烧结和塌落期间的处理条件来改变芯中沿横向的RE分布。纤维的数值孔径为0.10-0.30,保持芯处RE浓度在50-6000ppm之间,连同在掺杂区域沿径向RE分布图的变化一起,从而制备出适合于用作不同用途的放大器、纤维激光器和传感器的纤维。The present invention also provides a method for preparing a rare earth-doped optical fiber, wherein, according to the host glass composition and the concentration of RE/Al in the core layer, by controlling the density of the porous soot layer, the soaking time and the period of oxidation, sintering and slumping treatment conditions to change the RE distribution in the core along the transverse direction. The numerical aperture of the fiber is 0.10-0.30, and the RE concentration at the core is kept between 50-6000ppm, together with the change of RE distribution along the radial direction in the doped area, so as to prepare amplifiers and fiber lasers suitable for different purposes and sensor fibers.

在本发明的一个实施方案中,理论估计的多孔烟灰的相对密度为0.30-0.50,以避免出现芯-包层界面缺陷。In one embodiment of the present invention, the theoretically estimated relative density of the porous soot is 0.30-0.50 to avoid core-cladding interface defects.

在本发明的另一个实施方案中,烟灰沉积期间提供的GeCl4比获得要求的NA数值孔径所需的量低10-30%。In another embodiment of the invention, the GeCl4 provided during soot deposition is 10-30% lower than that required to obtain the desired NA numerical aperture.

在本发明的又一个实施方案中,泵浦束的分布半径等于或大于芯中Er离子分布的半径,以便增加所有活性离子暴露在泵浦光下的机会。In yet another embodiment of the present invention, the distribution radius of the pump beam is equal to or greater than the distribution radius of the Er ions in the core in order to increase the exposure of all active ions to the pump light.

在本发明的又一个实施方案中,纤维中获得的增益比较高,NA(数值孔径)值接近0.20。In yet another embodiment of the invention, the gain obtained in the fiber is relatively high, with NA (numerical aperture) values close to 0.20.

在本发明的又一个实施方案中,所使用的RE盐选自于氯化物、硝酸盐或者在本方法中使用的溶剂中可溶解的其它任何盐。In yet another embodiment of the present invention, the RE salt used is selected from chloride, nitrate or any other salt soluble in the solvent used in the process.

在本发明的又一个实施方案中,所使用的铝盐选自于氯化物、硝酸盐或者在本方法中使用的溶剂中可溶解的其它任何盐。In yet another embodiment of the present invention, the aluminum salt used is selected from chlorides, nitrates or any other salt soluble in the solvent used in the process.

在本发明的又一个实施方案中,铝和RE的盐的溶液通过使用选自醇和水的溶剂制备而成。In yet another embodiment of the present invention, the solution of the salt of aluminum and RE is prepared by using a solvent selected from alcohols and water.

在本发明的又一个实施方案中,在氧化和烧结期间,根据芯层的组成和Al/RE的浓度,芯层的温度以50-200℃的梯度升高。In yet another embodiment of the present invention, during oxidation and sintering, the temperature of the core layer is increased in a gradient of 50-200° C., depending on the composition of the core layer and the concentration of Al/RE.

在本发明的又一个实施方案中,O2和He混合物的比例范围为3∶1至9∶1。In yet another embodiment of the present invention, the ratio of O2 and He mixture ranges from 3:1 to 9:1.

在本发明的又一个实施方案中,氯源选自CCl4,其中氦作为载体气体。In yet another embodiment of the present invention, the source of chlorine is selected from CCl4 with helium as the carrier gas.

在本发明的又一个实施方案中,Cl2∶O2的比例为1.5∶1至3.5∶1,脱水时间为1-2小时。In yet another embodiment of the present invention, the ratio of Cl 2 :O 2 is 1.5:1 to 3.5:1, and the dehydration time is 1-2 hours.

在本发明的又一个实施方案中,烧结期间,通过在1200-1400℃的温度下,通过与输入氧一起提供GeCl4,来在存在氧化锗的条件下对多孔芯进行烧结,以便促进氧化锗的引入并且获得适当的数值孔径。In yet another embodiment of the invention, during sintering, the porous core is sintered in the presence of germanium oxide by supplying GeCl 4 with input oxygen at a temperature of 1200-1400° C. in order to promote germanium oxide The introduction and obtain the appropriate numerical aperture.

在本发明的又一个实施方案中,所述方法可使纤维的数值孔径在0.10-0.30之间变化,保持芯处RE浓度在50-6000ppm之间,连同在掺杂区域沿横向的RE分布图的变化一起,从而能够制备出适合用于任何器件的纤维。In yet another embodiment of the present invention, the method allows the numerical aperture of the fiber to be varied between 0.10-0.30, maintaining the RE concentration at the core between 50-6000 ppm, along with the RE profile in the doped region along the transverse direction Together, it is possible to prepare fibers suitable for any device.

在本发明的又一个实施方案中,所述器件是使用光导纤维的不同用途的放大器、纤维激光器和传感器。In yet another embodiment of the invention, the device is a multipurpose amplifier, fiber laser, and sensor using optical fibers.

本发明的再一个实施方案是一种在制备掺杂稀土的光导纤维的工艺中使用的芯中沿径向的Gaussian RE分布图的控制方法,其中,所述制备光导纤维的工艺包括如下步骤:Yet another embodiment of the present invention is a method of controlling the radial Gaussian RE profile in the core for use in a process for preparing a rare earth-doped optical fiber, wherein the process for preparing an optical fiber comprises the steps of:

a)在高硅氧玻璃基体管中沉积P2O5和F,以获得匹配或凹陷包层型结构。a) Deposition of P2O5 and F in a high silica glass matrix tube to obtain a matched or depressed cladding type structure.

b)在1200-1400℃的温度下,沉积预定组成的未烧结颗粒层,以便形成芯,其中,在芯中P2O5和GeO2的含量分别为0.5-5.0%(摩尔)和3.0-25.0%(摩尔),并且,保持气相中GeCl4的浓度比获得要求的0.20的NA值所需浓度低10-30%。b) At a temperature of 1200-1400° C., deposit a layer of unsintered particles of predetermined composition to form a core, wherein the contents of P 2 O 5 and GeO 2 in the core are 0.5-5.0 mol % and 3.0- 25.0 mole %, and keep the GeCl4 concentration in the gas phase 10-30% lower than that required to obtain the required NA value of 0.20.

c)沉积温度取决于烟灰的组成和要求的孔隙率。发现理论估计的0.3-0.5的孔隙率适于避免芯-包层界面缺陷和在浸渍之后发生聚集,并且适于控制芯中RE的分布使其在中心处具有最大浓度。c) The deposition temperature depends on the composition of the soot and the required porosity. The theoretically estimated porosity of 0.3-0.5 was found to be suitable for avoiding core-cladding interface defects and aggregation after impregnation, and for controlling the distribution of RE in the core to have a maximum concentration at the center.

d)将包含多孔烟灰层的管浸泡在RECl3/RE(NO3)3的醇/水溶液中达1-2个小时,其浓度为0.002-0.25M,并且还添加或者未添加浓度为0.05-1.25M的AlCl3/Al(NO3)3d) Soak the tube containing the porous soot layer in an alcohol/water solution of RECl 3 /RE(NO 3 ) 3 for 1-2 hours at a concentration of 0.002-0.25M, with or without addition of a concentration of 0.05- 1.25M AlCl 3 /Al(NO 3 ) 3 .

e)以10-50cc/min的速度将溶液慢慢排掉,以避免在多孔烟灰材料中,尤其是在管的下端产生缺陷。e) Drain the solution slowly at a rate of 10-50 cc/min to avoid defects in the porous soot material, especially at the lower end of the tube.

f)在管中通过干燥的氮气使多孔层充分干燥,并且,将管重新安装在车床上。f) The porous layer is fully dried by passing dry nitrogen in the tube and the tube is remounted on the lathe.

g)在存在O2+He的条件下,在600-1100℃的温度范围内(管表面温度)重复加热含有RE/Al的颗粒层,其中,采用50-200℃的梯度升高温度,以便将层中存在的RE/Al的氯化物或者硝酸盐氧化成相应的氧化物,其中,O2和He的比值为3∶1至9∶1。g) repeated heating of the RE/Al-containing particle layer in the temperature range of 600-1100 °C (tube surface temperature) in the presence of O2 + He, wherein the temperature is increased using a gradient of 50-200 °C, so that Chlorides or nitrates of RE/Al present in the layer are oxidized to the corresponding oxides, wherein the ratio of O 2 to He is 3:1 to 9:1.

h)在800-1200℃的温度范围以及存在过量氯的条件下对含有RE的颗粒芯层进行脱水。采用CCl4作为Cl2的原材料并且采用氦为载体气体送入,氦是较轻的气体,它能够扩散通过小的孔隙,有助于干燥过程的进行。Cl2∶O2的比例为1.5∶1至3.5∶1,脱水时间为1-2个小时。h) Dehydration of the particle core layer containing RE at a temperature range of 800-1200°C in the presence of excess chlorine. CCl 4 is used as the raw material for Cl 2 and fed with helium as the carrier gas, which is a lighter gas that diffuses through small pores and facilitates the drying process. The ratio of Cl 2 :O 2 is 1.5:1 to 3.5:1, and the dehydration time is 1-2 hours.

i)然后,在存在O2和He的条件下,通过将管加热至1900℃高温来对多孔芯层进行烧结。根据芯层的组成和RE/Al的浓度,从上述800-1200℃的干燥温度,温度以50-200℃的梯度逐渐升高。i) Then, the porous core layer was sintered by heating the tube to a high temperature of 1900 °C in the presence of O2 and He. From the above-mentioned drying temperature of 800-1200°C, the temperature is gradually increased in a gradient of 50-200°C, depending on the composition of the core layer and the concentration of RE/Al.

j)烧结期间,在1200-1400℃的温度下,将纯GeCl4与输入氧气一起送入,以便在能够促进氧化锗的引入的富氧化锗气氛中对多孔层进行烧结。GeCl4的流速以及通过的次数取决于纤维中要求的NA值。然后,停止送入GeCl4,并且,通过逐渐提高温度来继续烧结,直至形成透明的玻璃层。j) During sintering, at a temperature of 1200-1400° C., pure GeCl 4 is fed together with oxygen input in order to sinter the porous layer in a germania-rich atmosphere capable of promoting the incorporation of germania. The flow rate of GeCl 4 and the number of passes depend on the required NA value in the fiber. Then, the feeding of GeCl4 was stopped, and the sintering was continued by gradually increasing the temperature until a transparent glass layer was formed.

k)塌落在高温(>2000℃)下,通过燃烧器3-4次进行,以获得称作预型体的实心玻璃棒。k) Slumping is performed at high temperature (>2000° C.) 3-4 times through a burner to obtain a solid glass rod called a preform.

l)采用适当尺寸的石英管包覆预型体,以便在最终的预型体/纤维中获得适当的芯-包层尺寸。l) Wrap the preform with an appropriately sized quartz tube to obtain the proper core-cladding dimensions in the final preform/fiber.

m)由预型体拉制成纤维。m) Drawing fibers from the preform.

附图简述Brief description of the drawings

图1和2代表纤维芯横截面上的Er荧光分布图。Figures 1 and 2 represent the Er fluorescence distribution diagrams on the cross-section of the fiber core.

借助下面的实施例对本发明进行进一步说明,所述实施例不应该被看作是对本发明的范围的限制。The present invention is further illustrated by means of the following examples, which should not be construed as limiting the scope of the present invention.

实施例1Example 1

●在1855℃下,采用MCVD方法在石英管内沉积掺杂F的包层。●At 1855°C, MCVD method is used to deposit F-doped cladding in the quartz tube.

●在1290℃的温度下,沉积未烧结的芯。调整通过反应剂液体的载体气体流,以便在沉积的烟灰层中获得如下组成:SiO2=90.2%(摩尔),P2O5=1.3%(摩尔)和GeO2=8.5%(摩尔)。• At a temperature of 1290°C, the unsintered core is deposited. The flow of the carrier gas through the reactant liquid is adjusted so as to obtain the following composition in the deposited soot layer: SiO 2 =90.2 mol%, P 2 O 5 =1.3 mol% and GeO 2 =8.5 mol%.

●将具有所述沉积层的管浸泡在含有0.025(M)ErCl3和0.15(M)Al(NO3)39H2O的溶液中达1个小时,并且将溶液慢慢排掉。• Soak the tube with the deposit in a solution containing 0.025 (M) ErCl 3 and 0.15 (M) Al(NO 3 ) 3 9H 2 O for 1 hour and drain the solution slowly.

●通过保持氮气流过管中达10分钟来进行干燥。- Dry by keeping nitrogen flowing through the tube for 10 minutes.

●在725℃,825℃和950℃下进行氧化,每个温度下采用通过燃烧器2次,并保持He/O2之比恒定为1∶5。• Oxidation was carried out at 725°C, 825°C and 950°C, using 2 passes through the burner at each temperature and keeping the He/ O2 ratio constant at 1:5.

●进行脱水处理,其中,处理温度为1010℃,Cl2/O2之比为2.5∶1,处理时间为1小时15分。●Dehydration treatment is carried out, wherein the treatment temperature is 1010° C., the ratio of Cl 2 /O 2 is 2.5:1, and the treatment time is 1 hour and 15 minutes.

●分4步将温度升至1400℃。从该阶段与输入氧气一起加入GeCl4,在温度在1200-1400℃之间进行3次。进一步加热该管以阶梯升温至1650℃,以便使含有Er和Al的多孔烟灰层完全烧结。烧结期间,O2和He流比例为4.5∶1。• Increase the temperature to 1400°C in 4 steps. From this stage GeCl4 was added together with the oxygen input, 3 times at a temperature between 1200-1400°C. The tube was further heated in steps up to 1650°C in order to completely sinter the porous soot layer containing Er and Al. During sintering, the O2 and He flow ratio was 4.5:1.

●以通常方式,采用3个步骤进行塌落。• In the usual way, slumping is performed in 3 steps.

●进行包覆(overcladding),使芯与包层的比例减至3.6∶125。纤维中测得的NA值为0.204±0.01。• Overcladding was performed to reduce the ratio of core to cladding to 3.6:125. The NA value measured in the fiber was 0.204 ± 0.01.

●纤维中Er+3的离子浓度为950ppm,其在芯中心处的最大浓度及分布如本说明书中的附图1所示。芯处的Er分布采用荧光谱仪由纤维截面处测得,所述荧光谱仪的制造商为:Photonics Resource Facility,60 St.George Street,Suite No.331,Toronto,Ontario,Canada M5S 1A7。●The ion concentration of Er +3 in the fiber is 950ppm, and its maximum concentration and distribution at the center of the core are shown in Figure 1 of this specification. The Er distribution at the core was measured from the cross-section of the fiber using a fluorescence spectrometer manufactured by: Photonics Resource Facility, 60 St. George Street, Suite No.331, Toronto, Ontario, Canada M5S 1A7.

●测得纤维的增益为35.4dB。该增益在C-DOT,39 Main Pusa Road,New Delhi-110 005处,采用他们的测量设置测得。●The measured gain of the fiber is 35.4dB. The gain was measured at C-DOT, 39 Main Pusa Road, New Delhi-110 005, using their measurement setup.

实施例2Example 2

●在1840℃下,采用MCVD方法在石英玻璃管内沉积掺杂F的包层。●At 1840°C, MCVD is used to deposit F-doped cladding in the quartz glass tube.

●在1310℃的温度下,沉积未烧结的芯。调整通过反应剂液体的载体气体流,以便在沉积的烟灰层中获得如下组成:SiO2=91.6%(摩尔),P2O5=1.1%(摩尔)和GeO2=7.3%(摩尔)。• At a temperature of 1310°C, the unsintered core is deposited. The flow of the carrier gas through the reactant liquid was adjusted so as to obtain the following composition in the deposited soot layer: SiO 2 =91.6 mol%, P 2 O 5 =1.1 mol% and GeO 2 =7.3 mol%.

●将具有所述沉积层的的管浸泡在含有0.015(M)ErCl3,6H2O和0.15(M)Al(NO3)39H2O的溶液中达1.5个小时,并且将溶液慢慢排掉。● Soak the tube with the deposit in a solution containing 0.015(M) ErCl 3 , 6H 2 O and 0.15(M) Al(NO 3 ) 3 9H 2 O for 1.5 hours, and slowly dissolve the solution Drain.

●通过保持氮气流过管中达10分钟来进行干燥。- Dry by keeping nitrogen flowing through the tube for 10 minutes.

●在750℃,800℃和900℃下进行氧化,每个温度下采用通过燃烧器2次,并保持He/O2之比恒定为1∶5。• Oxidation was carried out at 750°C, 800°C and 900°C, using 2 passes through the burner at each temperature and keeping the He/ O2 ratio constant at 1:5.

●进行脱水处理,其中,处理温度为915℃,Cl2/O2之比为2.3∶1,处理时间为1小时。●Dehydration treatment is carried out, wherein the treatment temperature is 915° C., the ratio of Cl 2 /O 2 is 2.3:1, and the treatment time is 1 hour.

●分3步将温度升至1200℃。在该阶段中,与输入氧气一起加入GeCl4,在每个温度分别为1200℃,1300℃和1400℃进行一次。将管进一步加热阶梯升温至1610℃,以便使含有Er和Al的多孔烟灰层完全烧结。烧结期间,O2和He流比例为5∶1。●Raise the temperature to 1200°C in 3 steps. In this stage, GeCl4 was added together with the oxygen input, once at each temperature of 1200°C, 1300°C and 1400°C. The tube was further heated in steps up to 1610°C in order to completely sinter the porous soot layer containing Er and Al. During sintering, the flow ratio of O2 and He was 5:1.

●以通常方式,采用3个步骤进行塌落。• In the usual way, slumping is performed in 3 steps.

●进行包覆,使芯与包层比例减至3.6∶125。• Cladding was performed to reduce the core to cladding ratio to 3.6:125.

●纤维中测得的NA值为0.201±0.01。●The NA value measured in the fiber is 0.201±0.01.

●纤维中Er+3的离子浓度为460ppm,其峰值在芯中心处,并且,类似的分布如附图1所示。● The ion concentration of Er +3 in the fiber is 460ppm, its peak is at the center of the core, and a similar distribution is shown in Fig. 1 .

●测得纤维的增益最高达37dB。该增益由C-DOT,39 Main PusaRoad,New Delhi-110 005处,采用他们的测量设置测得。●The measured fiber gain is up to 37dB. This gain was measured by C-DOT, 39 Main Pusa Road, New Delhi-110 005, using their measurement setup.

实施例3Example 3

●在1870℃下,采用MCVD方法在石英管内沉积掺杂F的包层。●At 1870°C, MCVD method is used to deposit F-doped cladding in the quartz tube.

●在1250℃的温度下,沉积未烧结的芯。调整通过反应剂液体的载体气体流,以便在沉积的烟灰层中获得如下组成:SiO2=89.1%(摩尔),P2O5=2.3%(摩尔)和GeO2=8.6%(摩尔)。• At a temperature of 1250°C, the unsintered core is deposited. The flow of the carrier gas through the reactant liquid was adjusted so as to obtain the following composition in the deposited soot layer: SiO 2 =89.1 mol%, P 2 O 5 =2.3 mol% and GeO 2 =8.6 mol%.

●将具有所述沉积层的的管浸泡在含有0.07(M)ErCl3和0.25(M)Al(NO3)3 9H2O的水溶液中达1个小时,并且将溶液慢慢排掉。• Soak the tube with the deposit in an aqueous solution containing 0.07 (M) ErCl 3 and 0.25 (M) Al(NO 3 ) 3 9H 2 O for 1 hour and drain the solution slowly.

●通过保持氮气流过管中达10分钟来进行干燥。- Dry by keeping nitrogen flowing through the tube for 10 minutes.

●在730℃,820℃和925℃下进行氧化,每个温度下通过燃烧器2次,并保持He/O2之比恒定为1∶6。• Oxidation was carried out at 730°C, 820°C and 925°C with 2 passes through the burner at each temperature, keeping the He/ O2 ratio constant at 1:6.

●进行脱水处理,其中,处理温度为925℃,Cl2/O2之比为2.3∶1,处理时间为1.5小时。●Dehydration treatment is carried out, wherein the treatment temperature is 925°C, the ratio of Cl 2 /O 2 is 2.3:1, and the treatment time is 1.5 hours.

●分4步将温度升至1400℃。与输入氧气一起加入GeCl4,在1200℃进行2次以及在温度为1300℃和1400℃各进行一次。将管进一步加热阶梯升温至1725℃,以便使含有Er和Al的多孔烟灰层完全烧结。烧结期间,O2和He流比例为4∶1。• Increase the temperature to 1400°C in 4 steps. GeCl4 was added together with oxygen input, twice at 1200°C and once each at temperatures of 1300°C and 1400°C. The tube was further heated in steps up to 1725°C in order to completely sinter the porous soot layer containing Er and Al. During sintering, the flow ratio of O2 and He was 4:1.

●以通常方式,采用3个步骤进行塌落。• In the usual way, slumping is performed in 3 steps.

●进行包覆,使芯与包层的比例减至6.5∶125。纤维中测得的NA值为0.22±0.1。• Cladding was performed to reduce the core to cladding ratio to 6.5:125. The NA value measured in the fiber was 0.22 ± 0.1.

●纤维中Er+3的离子浓度为3020ppm,其峰值浓度在芯中心处,并且,芯处Er的分布如附图2所示。所述Er的分布采用荧光谱仪由纤维截面处测得。所述荧光谱仪的制造商为:Photonics Resource Facility,60St.George Street,Suite No.331,Toronto,Ontario,Canada M5S 1A7。●The ion concentration of Er +3 in the fiber is 3020ppm, and its peak concentration is at the center of the core, and the distribution of Er at the core is shown in Figure 2. The distribution of Er is measured at the cross section of the fiber using a fluorescence spectrometer. The manufacturer of the spectrofluorometer is: Photonics Resource Facility, 60 St. George Street, Suite No.331, Toronto, Ontario, Canada M5S 1A7.

本发明的主要优点是:The main advantages of the present invention are:

1.所开发的纤维中,掺杂区域中的RE分布与纤维中的Gaussian泵浦束强度分布相似,结果,显著改善了二者之间的重叠,从而提高了纤维中的泵浦转化效率。1. In the developed fiber, the RE distribution in the doped region is similar to the Gaussian pump beam intensity distribution in the fiber, and as a result, the overlap between the two is significantly improved, thereby increasing the pump conversion efficiency in the fiber.

2.泵浦束的分布半径等于或大于芯处RE离子的分布半径,从而增大了所有活性离子暴露在泵浦光下的机会。2. The distribution radius of the pump beam is equal to or larger than that of the RE ions at the core, thereby increasing the chance of all active ions being exposed to the pump light.

3.根据主体玻璃组成和芯层中RE/Al的浓度,通过控制多孔烟灰层的密度、浸泡时间以及氧化、烧结和塌落期间的处理条件,来改变芯处沿横向的RE分布。3. Depending on the host glass composition and RE/Al concentration in the core layer, the RE distribution at the core along the lateral direction can be varied by controlling the density of the porous soot layer, soaking time, and treatment conditions during oxidation, sintering, and slumping.

4.改变芯与包层玻璃的组成,使NA值接近0.20,Er3+离子浓度为100-1500ppm,以便提供掺杂铒的纤维,该纤维在光学放大器应用中适合于泵浦以放大输入信号,其增益为10-37dB。4. Change the composition of the core and cladding glass so that the NA value is close to 0.20 and the concentration of Er 3+ ions is 100-1500ppm in order to provide an erbium-doped fiber which is suitable for pumping in optical amplifier applications to amplify the input signal , its gain is 10-37dB.

5.由于在前述第4项中提及在掺杂RE的纤维中NA值较低,因此,能够避免芯与包层玻璃之间的组成在大范围改变,从而消除了可能显著降低纤维性能的例如残余应力和PMD等问题。5. Due to the low NA value in the fiber doped with RE mentioned in item 4 above, it is possible to avoid a large-scale change in the composition between the core and the cladding glass, thereby eliminating the possibility of significantly reducing the fiber performance. Such as residual stress and PMD and other issues.

6.在前述第4和第5项中提及的所开发纤维的NA值以及模式场直径与信号输送纤维没有明显不同,因而易于拼接(splice)。这就最大程度地降低了通过纤维传送的信号的光学损耗。6. The NA values and mode field diameters of the developed fibers mentioned in the aforementioned items 4 and 5 are not significantly different from signal-transporting fibers, and thus are easy to splice. This minimizes the optical loss of the signal transmitted through the fiber.

7.在富氧化锗气氛中烧结能够促进芯处氧化锗的进入并且降低在沉积期间获得要求的NA值所需的锗的卤化物的量,从而使得处理过程有效且经济。7. Sintering in a germania-rich atmosphere can facilitate the ingress of germanium oxide at the core and reduce the amount of germanium halide needed to obtain the required NA value during deposition, making the process efficient and economical.

8.在对颗粒层干燥和烧结之前进行的氧化步骤降低了在随后的处理期间因RE盐蒸发导致组成变化的可能性。8. The oxidation step prior to drying and sintering the particle layer reduces the possibility of compositional changes due to RE salt evaporation during subsequent processing.

9.在氧化和烧结期间的阶梯升温阻止了RE以及共掺杂剂的扩散,从而最大程度地降低了组成变化的可能性。9. The stepped temperature increase during oxidation and sintering prevents the diffusion of RE as well as co-dopants, thereby minimizing the possibility of compositional changes.

10.由于前述第8和第9项中所述原因,在掺杂区域中RE的引入效率得到提高,这使所述方法更具经济性。10. For the reasons stated in items 8 and 9 above, the efficiency of the introduction of RE in the doped regions is increased, which makes the method more economical.

11.由于前述第8-10项中所述原因,处理效率的改善提高了所述方法的产量和可重复性。11. Improvement in process efficiency increases the yield and reproducibility of the process for the reasons stated in items 8-10 above.

12.芯处RE的浓度为50-6000ppm,再加上掺杂区域RE分布图的变化,以及NA值为0.10-0.30,使得所制备的纤维适合于用作不同用途的放大器、显微激光器和传感器。12. The concentration of RE at the core is 50-6000ppm, coupled with the change of RE distribution in the doped area, and the NA value is 0.10-0.30, making the prepared fiber suitable for use as amplifiers for different purposes, microlasers and sensor.

Claims (45)

1.一种制备掺杂稀土的光导纤维的方法,所述方法包括如下步骤:1. A method for preparing an optical fiber doped with rare earth, said method comprising the steps of: a)在石英玻璃基体管中沉积掺杂P2O5和F的合成包层,以获得匹配或凹陷包层型结构,a) depositing a synthetic cladding doped with P2O5 and F in a quartz glass substrate tube to obtain a matched or depressed cladding type structure, b)在管表面温度为1200-1400℃的条件下,通过沉积未烧结的颗粒层形成芯,b) forming the core by depositing a layer of unsintered particles at a tube surface temperature of 1200-1400°C, c)在所述颗粒层使P2O5和GeO2的浓度保持分别为0.5-5.0%(摩尔)和3.0-25.0%(摩尔),以获得包含掺杂F的包层和多孔烟灰层的管,c) maintaining the concentrations of P2O5 and GeO2 in the particle layer at 0.5-5.0 mol% and 3.0-25.0 mol%, respectively, in order to obtain a cladding layer containing F doping and a porous soot layer Tube, d)将包含多孔烟灰层的管浸泡在溶液中达1-2个小时,所述溶液中RE盐的浓度为0.002-0.25M,并且还含有或者没有浓度为0.05-1.25M的铝盐,d) immersing the tube comprising the porous soot layer in a solution having a RE salt concentration of 0.002-0.25M and also containing or not an aluminum salt at a concentration of 0.05-1.25M for 1-2 hours, e)以10-50cc/min的速度将溶液排掉,e) drain the solution at a rate of 10-50cc/min, f)通过在管中流过干燥的氮气或者其它任何惰性气体来使多孔层干燥,f) drying the porous layer by passing dry nitrogen or any other inert gas through the tube, g)在存在氧的条件下,在600-1100℃的范围内逐渐对管进行加热,g) gradually heating the tube in the presence of oxygen in the range of 600-1100°C, h)在约800-1200℃的温度范围以及存在过量Cl2的条件下对管中的芯层进行脱水,h) dehydrating the core layer in the tube at a temperature range of about 800-1200° C. in the presence of excess Cl 2 , i)在存在氧和氦的混合物以及1400-1900℃的温度下对芯层进行烧结,i) sintering the core layer in the presence of a mixture of oxygen and helium at a temperature of 1400-1900°C, j)在2000-2300℃的温度下采用通常方法对管进行塌落,获得预型体,j) Collapsing the tube by the usual method at a temperature of 2000-2300°C to obtain a preform, k)用石英管包覆预型体,以及k) coating the preform with a quartz tube, and l)采用传统方法由预型体拉制成纤维。l) The fiber is drawn from the preform by conventional methods. 2.根据权利要求1的方法,其中,理论估计的多孔烟灰的相对密度为0.30-0.50,以避免出现芯-包层界面缺陷。2. The method according to claim 1, wherein the theoretically estimated relative density of the porous soot is 0.30-0.50 to avoid core-cladding interface defects. 3.根据权利要求1的方法,其中,所使用的RE盐选自于氯化物、硝酸盐或者在本方法中使用的溶剂中可溶解的其它任何盐。3. The method according to claim 1, wherein the RE salt used is selected from chloride, nitrate or any other salt soluble in the solvent used in the method. 4.根据权利要求1的方法,其中,所使用的铝盐选自于氯化物、硝酸盐或者在本方法中使用的溶剂中可溶解的其它任何盐。4. The method according to claim 1, wherein the aluminum salt used is selected from chlorides, nitrates or any other salt soluble in the solvent used in the method. 5.根据权利要求1的方法,其中,铝盐和铒盐的溶液通过使用选自醇和水的溶剂制备而成。5. The method according to claim 1, wherein the solution of aluminum salt and erbium salt is prepared by using a solvent selected from alcohol and water. 6.根据权利要求1的方法,其中,O2和He混合物的比例范围为3∶1至9∶1。6. The method according to claim 1, wherein the ratio of the mixture of O2 and He is in the range of 3:1 to 9:1. 7.根据权利要求1的方法,其中,氯源是CCl4,He用作载体气体。7. The method according to claim 1, wherein the source of chlorine is CCl4 and He is used as the carrier gas. 8.根据权利要求1的方法,其中,Cl2∶O2的比例为1.5∶1至3.5∶1,脱水时间为1-2小时。8. The method according to claim 1, wherein the ratio of Cl2 : O2 is 1.5:1 to 3.5:1, and the dehydration time is 1-2 hours. 9.根据权利要求1的方法,其中,在烧结多孔芯层期间,在保持1200-1400℃温度的条件下,将GeCl4与输入氧一起提供。9. The method according to claim 1, wherein, during sintering of the porous core layer, GeCl4 is supplied together with input oxygen while maintaining a temperature of 1200-1400°C. 10.根据权利要求1的方法,其中,在富氧化锗气氛中烧结能够使更多的氧化锗引入并且降低在沉积期间所需的锗的卤化物的量。10. The method of claim 1, wherein sintering in a germania-rich atmosphere enables the incorporation of more germanium oxide and reduces the amount of germanium halide required during deposition. 11.根据权利要求1的方法,其中,在对颗粒层干燥和烧结之前进行的氧化步骤降低了在随后的处理期间因RE盐蒸发导致组成变化的可能性。11. The method of claim 1, wherein the oxidation step prior to drying and sintering the particle layer reduces the likelihood of compositional changes due to RE salt evaporation during subsequent processing. 12.根据权利要求1的方法,其中,在氧化和烧结步骤期间以50-200℃的梯度升温阻止了RE以及共掺杂剂从掺杂区域扩散,从而最大程度地降低了组成变化。12. The method of claim 1, wherein a temperature gradient of 50-200°C during the oxidation and sintering steps prevents RE and co-dopants from diffusing from doped regions, thereby minimizing compositional changes. 13.根据权利要求1的方法,其中,在掺杂区域中RE的引入效率得到提高。13. The method of claim 1, wherein the introduction efficiency of RE in the doped region is increased. 14.一种制备掺杂Er的纤维的改进方法,所述纤维的特征尤其在于在芯处Er离子的分布与Gaussian泵浦束强度分布相似,所述方法包括如下步骤:14. An improved method of preparing Er-doped fibers characterized in particular by a distribution of Er ions at the core which is similar to a Gaussian pump beam intensity distribution, said method comprising the steps of: (a)在石英玻璃基体管中沉积掺杂P2O5和F的合成包层,以获得匹配或凹陷包层型结构,(a) depositing a synthetic cladding doped with P2O5 and F in a quartz glass substrate tube to obtain a matched or depressed cladding type structure, (b)在管表面温度为1200-1350℃的条件下,通过沉积未烧结的颗粒层形成芯,(b) forming the core by depositing a layer of unsintered particles at a tube surface temperature of 1200-1350°C, (c)在所述颗粒层中使P2O5和GeO2的浓度分别保持为0.5-3.5%(摩尔)和3.0-20.0%(摩尔),以获得包含掺杂F的包层和多孔烟灰层的管,(c) maintain the concentration of P2O5 and GeO2 at 0.5-3.5 mol % and 3.0-20.0 mol %, respectively, in the particle layer to obtain cladding and porous soot containing doped F layers of tubes, (d)将包含多孔烟灰层的管浸泡在溶液中达1-2个小时,所述溶液中Er盐的浓度为0.004-0.20M,并且还含有或者没有浓度为0.05-1.0M的铝盐,(d) soaking the tube comprising the porous soot layer in a solution having an Er salt concentration of 0.004-0.20M and also containing or not an aluminum salt at a concentration of 0.05-1.0M for 1-2 hours, (e)以10-30cc/min的速度将溶液排掉,(e) drain the solution at a rate of 10-30cc/min, (f)通过在管中流过干燥的氮气或者其它任何惰性气体来使多孔层干燥,(f) drying the porous layer by passing dry nitrogen or any other inert gas through the tube, (g)在存在氧的条件下,在700-1000℃的范围内逐渐对管进行加热,(g) gradually heating the tube in the range of 700-1000°C in the presence of oxygen, (h)在800-1200℃的温度范围以及存在过量Cl2的条件下对管中的芯层进行脱水,(h) dehydrating the core layer in the tube at a temperature in the range of 800-1200°C in the presence of excess Cl2 , (i)在存在氧和氦的混合物以及1400-1800℃的温度下对芯层进行烧结,(i) sintering the core layer in the presence of a mixture of oxygen and helium at a temperature of 1400-1800°C, (j)在2000-2300℃的温度下采用通常方法对管进行塌落,获得预型体,(j) Collapsing the tube by the usual method at a temperature of 2000-2300°C to obtain a preform, (k)用石英管包覆预型体,以及(k) wrapping the preform with a quartz tube, and (l)采用传统方法由预型体拉制成纤维。(l) Drawing fibers from preforms using conventional methods. 15.根据权利要求14的方法,其中,理论估计的多孔烟灰的相对密度为0.30-0.50,以避免出现芯-包层界面缺陷。15. The method of claim 14, wherein the theoretically estimated relative density of the porous soot is 0.30-0.50 to avoid core-cladding interface defects. 16.根据权利要求14的方法,其中,所使用的Er盐选自于氯化物、硝酸盐或者在本方法中使用的溶剂中可溶解的其它任何盐。16. A method according to claim 14, wherein the Er salt used is selected from chloride, nitrate or any other salt soluble in the solvent used in the method. 17.根据权利要求14的方法,其中,所使用的铝盐选自于氯化物、硝酸盐或者在本方法中使用的溶剂中可溶解的其它任何盐。17. A method according to claim 14, wherein the aluminum salt used is selected from chlorides, nitrates or any other salt soluble in the solvent used in the method. 18.根据权利要求14的方法,其中,铝盐和铒盐的溶液通过使用选自醇和水的溶剂制备而成。18. The method according to claim 14, wherein the solution of aluminum salt and erbium salt is prepared by using a solvent selected from alcohol and water. 19.根据权利要求14的方法,其中,O2和He混合物的比例范围为4∶1至9∶1。19. The method according to claim 14, wherein the ratio of the mixture of O2 and He is in the range of 4:1 to 9:1. 20.根据权利要求14的方法,其中,氯源是CCl4,He用作载体气体。20. The method according to claim 14, wherein the source of chlorine is CCl4 and He is used as the carrier gas. 21.根据权利要求14的方法,其中,Cl2∶O2的比例为1.5∶1至3.5∶1,脱水时间为1-2小时。21. The method according to claim 14, wherein the ratio of Cl2 : O2 is 1.5:1 to 3.5:1, and the dehydration time is 1-2 hours. 22.根据权利要求14的方法,其中,在烧结多孔层期间,在保持1200-1400℃温度的条件下,将GeCl4与输入氧一起提供。22. The method according to claim 14, wherein, during sintering of the porous layer, GeCl4 is supplied together with input oxygen while maintaining a temperature of 1200-1400°C. 23.根据权利要求14的方法,其中,所开发的纤维在掺杂区域中具有可控的与纤维中的Gaussian泵浦束强度分布相似的RE分布,其最大浓度在中心处,结果,显著改善了所述二分布之间的重叠,从而提高了纤维中的泵浦转化效率。23. The method according to claim 14, wherein the developed fiber has a controllable RE distribution in the doped region similar to the Gaussian pump beam intensity distribution in the fiber, with its maximum concentration at the center, resulting in significantly improved The overlap between the two distributions is reduced, thereby increasing the pump conversion efficiency in the fiber. 24.根据权利要求14的方法,其中,泵浦束的分布半径等于或大于芯处Er离子的分布半径,从而增大了所有活性离子暴露在泵浦光下的机会。24. The method of claim 14, wherein the distribution radius of the pump beam is equal to or greater than that of Er ions at the core, thereby increasing the exposure of all active ions to the pump light. 25.根据权利要求24的方法,其中,纤维中获得了比较高的增益,NA值接近0.20。25. A method according to claim 24, wherein a relatively high gain is obtained in the fiber with an NA value close to 0.20. 26.根据权利要求14的方法,其中,由于纤维中的NA值较低,因此,避免了芯与包层玻璃之间的组成在大范围改变,从而消除了可能显著降低纤维性能的例如残余应力和PMD等问题。26. A method according to claim 14, wherein, due to the low NA value in the fiber, large changes in the composition between the core and the cladding glass are avoided, thereby eliminating e.g. residual stresses that could significantly degrade the properties of the fiber and PMD etc. issues. 27.根据权利要求14的方法,其中,芯与包层玻璃的组成适合于获得0.20的NA值和100-1500ppm的Er3+离子浓度而又不会出现聚集,以便提供适合于在波长为980nm时进行泵浦以在光学放大器应用中用于放大输入信号(其增益为10-37dB)的EDF。27. The method according to claim 14, wherein the composition of the core and cladding glasses is adapted to obtain an NA value of 0.20 and an Er ion concentration of 100-1500 ppm without aggregation so as to provide EDF pumped to amplify an input signal (with a gain of 10-37dB) in an optical amplifier application. 28.根据权利要求14的方法,其中,所开发的纤维的NA值以及模式场直径与信号传输纤维没有明显不同,以便易于拼接,这就最大程度地降低了通过纤维传输的信号的光学损耗。28. The method of claim 14, wherein the developed fibers have NA values and mode field diameters not significantly different from signal transmission fibers for ease of splicing, which minimizes optical loss of signals transmitted through the fibers. 29.根据权利要求14的方法,其中,在富氧化锗气氛中烧结能够降低在沉积期间获得要求的NA值所需的锗的卤化物的量。29. The method of claim 14, wherein sintering in a germania-rich atmosphere reduces the amount of germanium halide required to obtain a desired NA value during deposition. 30.根据权利要求14的方法,其中,在对颗粒层干燥和烧结之前进行的氧化步骤降低了在随后的处理期间因Er盐蒸发导致组成变化的可能性。30. The method of claim 14, wherein the oxidation step prior to drying and sintering the particle layer reduces the likelihood of compositional changes due to Er salt evaporation during subsequent processing. 31.根据权利要求14的方法,其中,在氧化和烧结步骤期间以50-200℃的梯度升温阻止了RE以及共掺杂剂的扩散,从而最大程度地降低了组成变化的可能性。31. The method of claim 14, wherein a temperature gradient of 50-200°C during the oxidation and sintering steps prevents diffusion of RE and co-dopants, thereby minimizing the possibility of compositional changes. 32.根据权利要求14的方法,其中,在掺杂区域中RE的引入效率得到提高,这继而提高了所述方法的经济性和可重复性。32. The method of claim 14, wherein the efficiency of introduction of RE in doped regions is increased, which in turn improves the economics and reproducibility of the method. 33.根据权利要求14的方法,其中,纤维的数值孔径为0.10-0.30,芯处Er的浓度保持为50-6000ppm,再加上掺杂区域Er分布图,使得所制备的纤维适合于用作不同用途的放大器、纤维激光器和传感器。33. The method according to claim 14, wherein the numerical aperture of the fiber is 0.10-0.30, the concentration of Er at the core is maintained at 50-6000 ppm, and the Er profile in the doped region is added, so that the prepared fiber is suitable for use as Amplifiers, fiber lasers and sensors for different purposes. 34.一种在制备掺杂稀土的光导纤维的工艺使用的芯中沿径向的Gaussian RE分布图的控制方法,其中,所述方法包括如下步骤:34. A method of controlling a radial Gaussian RE profile in a core used in a process for preparing a rare earth-doped optical fiber, wherein said method comprises the steps of: a)在管表面温度为1200-1400℃的条件下,通过沉积未烧结的颗粒层形成芯,a) forming the core by depositing a layer of unsintered particles at a tube surface temperature of 1200-1400°C, b)在所述颗粒层中使P2O5和GeO2的浓度分别保持为0.5-5.0%(摩尔)和3.0-25.0%(摩尔),以获得包含掺杂F的包层和多孔烟灰层的管,b) maintaining the concentrations of P2O5 and GeO2 at 0.5-5.0 mol % and 3.0-25.0 mol %, respectively, in the particle layer to obtain cladding and porous soot layers containing doped F tube, c)将包含多孔烟灰层的管浸泡在溶液中达1-2个小时,所述溶液中RE盐的浓度为0.002-0.25M,并且还含有或者没有浓度为0.05-1.25M的铝盐,c) soaking the tube comprising the porous soot layer in a solution having a RE salt concentration of 0.002-0.25M and also containing or not an aluminum salt at a concentration of 0.05-1.25M for 1-2 hours, d)以10-50cc/min的速度将溶液排掉,d) drain the solution at a rate of 10-50cc/min, e)通过在管中流过干燥的氮气或者其它任何惰性气体来使多孔层干燥,e) drying the porous layer by passing dry nitrogen or any other inert gas through the tube, f)在存在氧的条件下,在700-1100℃的范围内逐渐对管进行加热,并且以50-200℃的梯度升高温度,f) gradually heating the tube in the presence of oxygen in the range of 700-1100°C and increasing the temperature in a gradient of 50-200°C, g)在800-1200℃的温度范围以及存在过量Cl2的条件下对管中的芯层进行脱水,g) dehydration of the core layer in the tube at a temperature range of 800-1200° C. in the presence of excess Cl 2 , h)在存在氧的混合物以及1400-1900℃的温度下对芯层进行烧结,温度升高以50-200℃的梯度进行,h) sintering the core layer in a mixture in the presence of oxygen at a temperature of 1400-1900° C., with a temperature increase in a gradient of 50-200° C., i)在2000-2300℃的温度下采用通常方法对管进行塌落,获得预型体,i) Collapsing the tube by the usual method at a temperature of 2000-2300°C to obtain a preform, j)采用传统方法由预型体拉制成纤维。j) Fibers are drawn from the preform using conventional methods. 35.根据权利要求34的方法,其中,理论估计的多孔烟灰的相对密度为0.30-0.50,以避免出现芯-包层界面缺陷。35. The method of claim 34, wherein the theoretically estimated relative density of the porous soot is 0.30-0.50 to avoid core-cladding interface defects. 36.根据权利要求34的方法,其中,所使用的RE盐选自于氯化物、硝酸盐或者在本方法中使用的溶剂中可溶解的其它任何盐。36. A method according to claim 34, wherein the RE salt used is selected from chloride, nitrate or any other salt soluble in the solvent used in the method. 37.根据权利要求34的方法,其中,所使用的铝盐选自于氯化物、硝酸盐或者在本方法中使用的溶剂中可溶解的其它任何盐。37. A method according to claim 34, wherein the aluminum salt used is selected from chlorides, nitrates or any other salt soluble in the solvent used in the method. 38.根据权利要求34的方法,其中,铝盐和铒盐的溶液通过使用选自醇和水的溶剂制备而成。38. The method according to claim 34, wherein the solution of aluminum salt and erbium salt is prepared by using a solvent selected from alcohol and water. 39.根据权利要求34的方法,其中,O2和He混合物的比例范围为3∶1至9∶1。39. The method according to claim 34, wherein the ratio of the mixture of O2 and He is in the range of 3:1 to 9:1. 40.根据权利要求34的方法,其中,氯源是CCl4,He用作载体气体。40. The method according to claim 34, wherein the source of chlorine is CCl4 and He is used as the carrier gas. 41.根据权利要求34的方法,其中,Cl2∶O2的比例为1.5∶1至3.5∶1,脱水时间为1-2小时。41. The method according to claim 34, wherein the ratio of Cl2 : O2 is 1.5:1 to 3.5:1, and the dehydration time is 1-2 hours. 42.根据权利要求34的方法,其中,在烧结多孔层期间,在保持1200-1400℃温度的条件下,将GeCl4与输入氧一起提供。42. The method according to claim 34, wherein, during sintering of the porous layer, GeCl4 is supplied together with input oxygen while maintaining a temperature of 1200-1400°C. 43.根据权利要求34的方法,其中,在对颗粒层干燥和烧结之前进行的氧化步骤降低了在随后的处理期间因Er盐蒸发导致组成变化的可能性。43. The method of claim 34, wherein the oxidation step prior to drying and sintering the particle layer reduces the likelihood of compositional changes due to Er salt evaporation during subsequent processing. 44.根据权利要求34的方法,其中,在氧化和烧结步骤期间的梯度升温阻止了RE以及共掺杂剂的扩散,这进而又防止了组成的变化。44. The method of claim 34, wherein the temperature gradient during the oxidation and sintering steps prevents diffusion of RE and co-dopants, which in turn prevents compositional changes. 45.根据权利要求34的方法,其中,纤维的数值孔径为0.10-0.30,芯处Er的浓度保持为50-6000ppm,再加上掺杂区域Er分布图的变化,使得所制备的纤维适合用于任何器件。45. The method according to claim 34, wherein the numerical aperture of the fiber is 0.10-0.30, the concentration of Er at the core is maintained at 50-6000 ppm, and the change of the Er profile in the doped region makes the prepared fiber suitable for use in on any device. 46.根据权利要求34的方法,其中,所述器件是不同用途的放大器、纤维激光器和传感器以及使用光导纤维的其它器件。46. The method of claim 34, wherein said devices are amplifiers for different applications, fiber lasers and sensors, and other devices using optical fibers.
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