CN1324334C - Motion platform mechanism suitable for optical waveguide automatic-packaging robot system - Google Patents

Abstract

The invention discloses a motion platform mechanism suitable for an optical waveguide automatic packaging robot system. The platform mechanism is composed of a macro motion platform mechanism, a micro motion disc, a micro motion arm, six piezoelectric ceramics and three motors. Three piezoelectric ceramics are installed on the moving disc, three other piezoelectric ceramics are installed on the micro-moving arm, three motors are installed on the macro-moving platform mechanism, and the micro-moving disc is installed on the Z of the macro-moving platform mechanism through the counterbore. On the shaft movement platform, the taper pin of the micro-motion disk is installed in the pin hole of the micro-motion arm. The motion platform mechanism of the present invention adopts the "macro-micro" mechanism form combining a macro-motion platform and two micro-motion platforms to solve the contradiction between high precision and large stroke; the three-degree-of-freedom macro-motion platform adopts a modular structure design, It reduces the processing cost and is conducive to the reconstruction of the system; the six-degree-of-freedom micro-motion platform composed of a micro-motion disk and a micro-arm uses a flexible hinge to replace the traditional kinematic pair, and uses a parallel mechanism to achieve sub-micron positioning Accuracy target.

Description

Motion platform mechanism for optical waveguide automatic packaging robot system

technical field

The invention relates to a motion platform mechanism, more specifically, a motion platform mechanism suitable for an optical waveguide automatic packaging robot system.

Background technique

The advent of the communication era has greatly increased the demand for optoelectronic devices, but the difficult packaging technology has become a bottleneck limiting its application. The packaging of optical waveguides involves six-dimensional precision alignment of fiber arrays and waveguide devices, which is difficult. Since the optical channel in the waveguide device is only a few microns in size, the coupling packaging robot system used for the docking of such devices must have sub-micron level positioning accuracy to achieve accurate and reliable docking operations.

At present, the platform mechanism of most packaging systems adopts a screw (sliding screw or ball screw) transmission structure and a motor (stepping motor or AC servo motor) to drive. Due to the limitation of processing level and processing cost, the existence of gaps in the screw drive is inevitable, and it is difficult for the motion platform to meet the requirements of sub-micron positioning accuracy; ) composed of a micro-motion platform, but the stroke of this type of mechanism is small and the range of motion is very limited. In the actual use process, the requirements for the fixture and the initial position are very strict, and sometimes it is difficult to meet. Therefore, how to solve the contradiction between large stroke and high precision is an important problem to be solved in the process of designing the motion platform of the optical waveguide automatic packaging robot system.

Contents of the invention

The object of the present invention is to provide a motion platform mechanism suitable for the optical waveguide automatic packaging robot system, the motion platform mechanism adopts a parallel structure combining a three-degree-of-freedom macro-motion platform and a six-degree-of-freedom micro-motion platform, which not only ensures The large-range motion output by the end of the motion platform mechanism ensures its precise positioning; the macro-motion platform is designed as a modular structure, which is conducive to mechanism reconstruction and processing requirements; the six-degree-of-freedom micro-motion platform consists of a three-degree-of-freedom micro-motion disc and a three-freedom The micro-motion disc is designed as a flexible planar 3-RRR parallel mechanism type, and the flexible hinge relying on the elastic deformation of the material is used instead of the traditional kinematic pair to eliminate the inherent gap and friction of the kinematic pair. The processing method is made into an integrated component, and piezoelectric ceramics with nanoscale resolution are used as the driver to drive three flexible motion branch chain structures, so the terminal output, that is, the center point of the taper pin, has high motion accuracy; the micro-moving arm is designed based on The 3-RPS parallel structure of the flexible hinge, each motion branch chain is composed of an integrally processed moving pair, through precise assembly, and using piezoelectric ceramics with nanoscale resolution as the driver, the end of the mechanism can achieve high-precision output . In this way, the precise alignment between the waveguides to be packaged is effectively ensured, thereby realizing the best coupling effect of the waveguide device.

The invention is a motion platform mechanism suitable for optical waveguide automatic packaging robot system, which is composed of a macro motion platform mechanism, a micro motion disc, a micro motion arm, six piezoelectric ceramics and three motors, and is installed on the micro motion disc There are three piezoelectric ceramics, three other piezoelectric ceramics are installed on the micro-moving arm, three motors are installed on the macro-moving platform mechanism, and the micro-moving disc is installed on the Z-axis motion platform of the macro-moving platform mechanism through the counterbore. The taper pin of the micro-motion disc is installed in the pin hole of the micro-motion arm.

The macro-motion platform mechanism is composed of a base, an X-axis motion platform, a Y-axis motion platform, a Z-axis motion platform, an X-axis drive motor, a Y-axis drive motor, a Z-axis drive motor and a connecting bent plate; the X-axis motion platform is installed on On the base, the X-axis drive motor is installed on the X-axis motion platform; the Y-axis motion platform is installed on the X-axis motion platform, and the Y-axis drive motor is installed on the Y-axis motion platform; the parallel surface connecting the bending plate is installed on the Y-axis motion platform. On the platform, a Z-axis motion platform is installed on the vertical surface connecting the bent plate, the Z-axis drive motor is installed on the Z-axis motion platform, and the top of the Z-axis motion platform is provided with a screw hole;

The fretting disc is a thin copper disc with a thickness of 8 to 15 mm. The center of the upper end surface of the disc body is provided with a taper pin, and with the taper pin as the center point, the same structure is arranged at an angle of 120°. Movement branch chain A, movement branch chain B and movement branch chain C; countersunk holes are provided between the elongated cavity on each movement branch chain and the edge of the plate; the edge of the plate body is provided with cutout A, cutout B, Notch C, each notch is provided with a threaded hole on the notch surface;

The motion branch chain A is an integrated component processed by wire cutting. The motion branch chain A is provided with a long cavity for installing piezoelectric ceramics, five grooves and nine through holes, five grooves and nine through holes. The hole constitutes a fulcrum lever structure for displacement amplification;

The micro-moving arm is composed of a bottom plate, a top plate, a moving pair A, a moving pair B, a moving pair C, piezoelectric ceramics A, piezoelectric ceramics B, piezoelectric ceramics C and mounting plates for installing three piezoelectric ceramics respectively There are three notches and mounting holes on the top plate;

The moving pair A is an integrated component processed by wire cutting. The bottom end of the moving pair A is a connecting plate, and a supporting rectangular frame is connected to the connecting plate through a flexible hinge; the upper end of the supporting rectangular frame is cut up and down respectively. The left and right slots are formed into two semicircles, and the lower center of the upper side of the supporting rectangular frame is provided with a ball socket; the center of the lower side of the supporting rectangular frame is provided with a threaded hole for installing piezoelectric ceramic A; the supporting The end of the bottom of the rectangular frame is cut up and down into two semicircular left and right slots, and the bottom of the supporting rectangular frame is provided with a hole corresponding to the process hole of the connecting plate; the supporting rectangular frame Mounting holes are provided on the assembly surface at the top of the left upper end, and the joint between the left upper part of the support rectangular frame and the upper left end of the support rectangular frame is an equivalent flexible ball joint.

The advantages of the motion platform mechanism of the present invention are: (1) the "macro-micro" mechanism that combines a macro-motion platform and two micro-motion platforms solves the contradiction between high precision and large stroke; (2) a three-degree-of-freedom macro The moving platform adopts a modular structure design, which reduces the processing cost and is conducive to the reconstruction of the system; (3) the micro-moving disc and the micro-moving arm adopt a parallel mechanism model to achieve sub-micron positioning accuracy; (4) "macro-micro "The mechanism has the ability to operate across scales, and can operate at the macro-scale and micro-scale; (5) Fast and precise alignment operations can be achieved when packaging multi-channel optical waveguide chips; (6) The micro-motion platform is driven by piezoelectric ceramics So as to realize the rapidity and precision of the movement.

Description of drawings

Fig. 1 is a structural diagram of the macro-motion platform mechanism of the motion platform mechanism of the present invention.

Fig. 2A is a structure diagram of a micro-motion disc of the motion platform mechanism of the present invention.

Fig. 2B is a schematic diagram of the lever structure of the kinematic branch.

Fig. 2C is a schematic diagram of the structure and levers of the kinematic branch A.

Fig. 3A is a structural diagram of the micro-arm of the motion platform mechanism of the present invention.

Fig. 3B is a structural diagram of the moving pair A of the moving platform mechanism of the present invention.

In the figure: 1. Macro platform mechanism 101. Base 102. Threaded hole 103. X-axis drive motor

104. X-axis motion platform 105. Lead screw hole 106. Y-axis drive motor

107. Y-axis motion platform 108. Parallel plane 109. Connecting bent plate

110. Z-axis drive motor 111. Mounting hole 112. Z-axis motion platform 113. Vertical surface

2. Micro-motion disc 201. Upper face 202. Taper pin 203. Countersunk hole 204. Plate edge

205. Ball socket 206. Ball socket 210. Sports branch chain A 211. Long cavity 212. Threaded hole

213. First Rigid Rod 214. Cutout A 215. Third Rigid Rod 219. Second Rigid Rod

220. Motion branch B 224. Cut B 230. Motion branch C 234. Cut C 235. Trimming surface

236. Threaded hole 241. Groove 242. Groove 243. Groove 244. Groove

245. Groove 251. Through hole 252. Through hole 253. Through hole 254. Through hole

255. Through hole 256. Through hole 257. Through hole 258. Through hole 259. Through hole

260. Through hole 3. Micro arm 301. Bottom plate 302. Pin hole 303. Flange

304. Top plate 305. Mounting hole 306. Notch A 310. Moving pair A

311. Piezoelectric ceramic A 312. Mounting plate 316. Notch B 320. Moving pair B

321. Piezoelectric ceramic B 322. Mounting plate 326. Notch C 330. Moving pair C

331. Piezoelectric ceramic C 332. Mounting plate 401. Connecting plate 402. Mounting hole

403. Pin hole 404. Process hole 405. Flexible hinge 408. Threaded hole 410. Supporting rectangular frame

411. Top 412. Left Slot 413. Right Slot 414. Bottom 415. Bottom

416. Left notch 417. Right notch 418. Left 419. Mounting hole 420. Assembly surface

421. Equivalent flexible spherical hinge 422. Right 423. Ball socket

Detailed ways

The present invention will be further described in detail below in conjunction with the accompanying drawings.

A general optical waveguide automatic packaging robot system includes a motion control system (including a motion platform mechanism), a high-precision vision system, a laser light source, an optical power meter, and a glue dispensing and curing system. When the packaging robot is working, the operator first uses the high-precision vision system to obtain the positions of the input fiber array, the packaged waveguide and the output fiber array, and adjusts the spatial pose of the packaged waveguide through the motion control system so that it is in line with the input fiber array. The pose deviation from the output fiber array gradually decreases until the optical power meter detects a certain amount of luminous flux output; then, the optimal optical power search algorithm is compiled through computer control technology and combined with a high-precision motion platform to control the movement of the waveguide chip to be packaged to the maximum Optimal optical power coupling position, and control the motion platform to reach the position. Then, use the dispensing and curing system to dispense and cure the aligned parts to be packaged to become the final product.

The invention is a motion platform mechanism suitable for optical waveguide automatic packaging robot system, which adopts a three-degree-of-freedom macro-motion platform mechanism 1 and a six-degree-of-freedom micro-motion platform (composed of a three-degree-of-freedom micro-motion disc 2 and a three-degree-of-freedom micro-motion platform) The parallel structure combined with the boom 3) effectively ensures the large-range movement of the terminal output and also ensures its precise positioning. The motion platform mechanism is composed of a macro platform mechanism 1, a micro-motion disc 2, a micro-motion arm 3, six piezoelectric ceramics and three motors, in which three piezoelectric ceramics are installed on the micro-motion disc 2, and the micro-motion arm 3 Three other piezoelectric ceramics are installed on the macro-motion platform mechanism 1, and three motors are installed on the macro-motion platform mechanism 1. The micro-motion disc 2 is installed on the Z-axis motion platform 112 of the macro-motion platform mechanism 1 through the counterbore 203, and the micro-motion disc The taper pin 202 of 2 is installed in the pin hole 302 of micro-moving arm 3. The flexible connection between the micro-motion disc 2 and the micro-motion arm 3 is realized by the interference fit between the taper pin 202 of the micro-motion disc 2 and the pin hole 302 of the micro-motion arm 3 .

In the present invention, the macro-motion platform mechanism 1 adopts a modular structure design, which is beneficial to mechanism reconfiguration and processing requirements. The micro-movement disc 2 is designed as a thin disc with a flexible planar 3-RRR parallel mechanism, with a thickness of 8-15mm, preferably about 10mm, and the elastic deformation of copper material is used to realize the flexible hinge instead of the traditional kinematic pair. Eliminate the inherent gaps, friction and other defects of the kinematic pair, and use the wire cutting method to cut the grooves and through holes to design and manufacture three integrated kinematic branch chains with the same structure (namely kinematic branch A 210, kinematic branch B220 and kinematic branch B220). Motion branch chain (C230) has realized the fulcrum lever structure of displacement amplification. Because piezoelectric ceramics with nanoscale resolution (Pst 150/7/40 VS12 produced by Piezomechanik, Germany) are used as the driver to drive three flexible motion branch chain structures, the center point of the taper pin 202 has high motion accuracy. The micro-moving arm 2 is designed as a 3-RPS parallel structure based on flexible hinges and a modular structure design, and each moving pair structure is an integral component, which can achieve high-precision output through precise assembly to ensure precise alignment between the waveguides to be packaged , so as to achieve the best coupling effect of the waveguide device.

1, the macro-motion platform mechanism 1 is driven by a base 101, an X-axis motion platform 104, a Y-axis motion platform 107, a Z-axis motion platform 112, an X-axis drive motor 103, a Y-axis drive motor 106, and a Z-axis drive. The motor 110 and the connecting bent plate 109 constitute; the X-axis motion platform 104 is installed on the base 101, the X-axis driving motor 103 is installed on the X-axis motion platform 104; the Y-axis motion platform 107 is installed on the X-axis motion platform 104, and the Y-axis The driving motor 106 is installed on the Y-axis motion platform 107; the parallel surface 108 connecting the curved plate 109 is installed on the Y-axis motion platform 107, and the vertical surface 113 connecting the curved plate 109 is equipped with a Z-axis motion platform 112, and the Z-axis drive motor 110 is installed on the Z-axis motion platform 112, and the top of the Z-axis motion platform 112 is provided with a screw hole 105. The X-axis motion platform 104 , the Y-axis motion platform 107 and the Z-axis motion platform 112 are respectively provided with mounting holes 111 and threaded holes 102 for installation and fixing. Lead screw holes are also provided on the X-axis motion platform 104 and the Y-axis motion platform 107, which are not shown in the figure.

Referring to Fig. 2A, the fretting disk 2 is a thin copper disk, the center of the upper end surface 201 of the disk body is provided with a taper pin 202, and the taper pin 202 is the center point and the center point is 120°. The kinematic branch chain A 210, the kinematic branch chain B 220 and the kinematic branch chain C 230 with the same structure are evenly distributed, and a device for connecting the micro-motion disc 2 to the macro-motion platform mechanism 1 is provided between each motion branch chain and the edge 204. The fixed countersunk hole 203 of the Z-axis motion platform 112; the edge 204 of the disc body is provided with a notch A 214, a notch B 224, and a notch C 234, and the notch surface of each notch is provided with threaded holes, such as notch C The notch surface 235 of 234 is provided with a threaded hole 236, and this threaded hole 236 is for the screw to pass through and tighten the piezoelectric ceramics, so as to install the piezoelectric ceramics. These three motion branch chains on the micro-motion disc 2 adopt modular design, and their structures and sizes are the same. With the center point of the taper pin 202 as the center of the circle, a motion branch chain is arranged every 120°, and the motion branch chains formed by cutting the grooves and through holes of the three motion branch chains evenly by wire cutting are designed on the disc. A flexible planar 3-RRR parallel mechanism is formed so that the three kinematic branch chains can move without gaps, which solves the friction defect of the kinematic branch chains during the movement process (see Figure 2B).

Referring to Fig. 2C, the motion branch chain A 210 is processed into an integral component by wire cutting. The motion branch chain A 210 is provided with a long cavity 211 for installing piezoelectric ceramics, five grooves and ten through holes. Five grooves and ten through holes constitute a fulcrum lever structure for displacement amplification. The slit 241, the through hole 251, the through hole 252, the slit 242, the through hole 259 and the through hole 260 constitute the third rigid rod 215, and there is a thin wall with a thickness of 0.3 to 0.5 mm between the through hole 251 and the through hole 252. The center point of the thin wall is the fulcrum A ₁ , there is a thin wall with a thickness of 0.3-0.5 mm between the through hole 259 and the through hole 260, and the center point of the thin wall is the fulcrum A ₂ ; the through hole 260, the through hole 259, the groove 242, Through hole 253, through hole 254, through hole 255, through hole 256, ditch 243 constitute the second rigid bar 219, and the coplanar of ditch 243 and elongated cavity 211 is provided with ball socket 206, through hole 253 and through hole There is a thin wall with a thickness of 0.3-0.5 mm between 254, and the center point of the thin wall is the fulcrum A ₃ , and there is a thin wall with a thickness of 0.3-0.5 mm between the through hole 255 and the through hole 256, and the center point of the thin wall is the fulcrum A ₄ ; the groove 243, the through hole 256, the through hole 255, the groove 245, the through hole 257, the through hole 258, and the groove 244 form the first rigid rod 213, and there is a 0.3-0.5mm gap between the through hole 257 and the through hole 258. Thick and thin-walled, the central point of the thin-wall is the fulcrum A ₅ ; when power is supplied to the piezoelectric ceramic, the piezoelectric ceramic will produce a certain displacement under the action of the magnetic field, so that the output rod of the piezoelectric ceramic will press against the ball socket 206, thereby A force is provided for the first rigid rod 213, which enables the lever A1A2 formed by the fulcrum _A1 and the _{fulcrum A2} on the _kinematic branch chain A210 and the lever _A2A formed by the fulcrum _A3 and the fulcrum _{A2 3} moves according to the kinematics law of the parallel mechanism, thus forming the gapless movement of the micro-moving disc 2, which overcomes the defects caused by friction.

In the present invention, the motion branch chain A 210, the motion branch chain B 220 and the motion branch chain C230 on the micro-motion disk 2 are symmetrically distributed with the taper pin 202 as the center point at a 120° rotation angle; the fulcrum A on the motion branch chain A 210 ₅ is the flexible hinge point in the lever structure, which is used to amplify the displacement exerted by piezoelectric ceramics; the fulcrum A ₄ is the output point in the lever structure, which is used to realize the input rotation angle of the fulcrum A ₃ , and then through the lever A ₂ A ₃ , the lever A1A ₂ makes the fulcrum A ₂ and the fulcrum A ₁ move in accordance with the law of kinematics of the parallel mechanism. When the piezoelectric ceramic installed on each motion branch chain is powered on, the output rods of the piezoelectric ceramics are in close contact with their respective ball sockets to drive each motion branch chain, so that the end output point taper pin 202 of the platform has a Planar three-degree-of-freedom movement capability.

In the present invention, the kinematic mechanism diagram corresponding to the fully flexible mechanism (kinetic branch A 210, kinematic branch B 220 and kinematic branch C 230) on the micro-movement disc 2 is shown in Figure 2B, that is, usually The familiar planar parallel 3-RRR structure type. In the figure, the motion branch chain A 210, the motion branch chain B 220 and the motion branch chain C 230 are symmetrically distributed around the center point of the taper pin 202. On the same plane, this fully flexible mechanism can complete two planes of movement and one rotation. degree of exercise.

Referring to Fig. 3A, the micro-moving arm 3 is composed of a bottom plate 301, a top plate 304, a moving pair A 310, a moving pair B 320, a moving pair C 330, a piezoelectric ceramic A 311, a piezoelectric ceramic B 321, and a piezoelectric ceramic C 331 and the mounting plates 312, 322, 332 for installing piezoelectric ceramics are formed, and the top plate 304 is provided with three notches and mounting holes 305; the notch A 306, the notch B 316 and the notch C 326 on the top plate 304 The center points form an equilateral triangle. When different displacements are applied to the three notches, the center of the top plate 304 can realize micro-movements in three spatial degrees of freedom.

Referring to Fig. 3B, the moving pair A 310 is processed into an integral member by wire cutting, the bottom end of the moving pair A310 is a connecting plate 401, a supporting rectangular frame 410 is arranged on the connecting plate 401, and an upper edge 411 of the supporting rectangular frame 410 is formed. The end is cut up and down into two semicircular left slits 412 and right slits 413 respectively, the lower center of the upper side 411 of the supporting rectangular frame 410 is provided with a ball socket 423; There is a threaded hole 408 for installing the piezoelectric ceramic A 311; the end of the bottom edge 415 of the supporting rectangular frame 410 is cut into two semicircles up and down respectively to form a left slit 416 and a right slit 417, and the bottom of the supporting rectangular frame 410 The edge 415 is provided with a hole corresponding to the process hole 404 on the connecting plate 401 (not shown in the figure); the mounting surface 420 on the top of the left side 418 of the supporting rectangular frame 410 is provided with an installation hole 419, and the supporting rectangular frame An equivalent flexible ball hinge 421 is provided at the joint between the upper part of the left side 418 of the frame 410 and the left end of the upper side 411 of the supporting rectangular frame 410 . The ball and socket on each moving pair is used for the output rod of piezoelectric ceramics to be tightened, and then provides driving for the moving pair.

In the present invention, the top plate 304, the base plate 301, the moving pair A 310, the moving pair B 320, and the moving pair C 330 of the micro-moving arm 3 constitute the geometric relationship form of the 3-RPS mechanism. When the piezoelectric ceramic is powered on, the force generated by the output rod of the piezoelectric ceramic against the ball socket (that is, the expansion and contraction performance of the output rod) is used to control the up and down movement of the moving pair, so that the packaged part fixedly installed on the top plate 304 It has three-degree-of-freedom movement capabilities in space with two rotations and one movement.

Claims (3)

1, a kind of motion platform mechanism that is applicable to optical waveguide automatic-packaging robot system, it is characterized in that: by macro-moving stage mechanism (1), fine motion disk (2), fine motion arm (3), six piezoelectric ceramics and three motors constitute, three piezoelectric ceramics are installed on the fine motion disk (2), other three piezoelectric ceramics are installed on the fine motion arm (3), three motors are installed in the macro-moving stage mechanism (1), fine motion disk (2) is installed in by counter sink (203) on the Z axle motion platform (112) of macro-moving stage mechanism (1), and the taper pin (202) of fine motion disk (2) is installed in the pin-and-hole (302) of fine motion arm (3);

Described macro-moving stage mechanism (1) is by base (101), X-axis motion platform (104), Y-axis motion platform (107), Z axle motion platform (112), X-axis drive motor (103), Y-axis drive motor (106), Z axis drive motor (110) and be connected bent plate (109) formation; X-axis motion platform (104) is installed on the base (101), and X-axis drive motor (103) is installed on the X-axis motion platform (104); Y-axis motion platform (107) is installed on the X-axis motion platform (104), and Y-axis drive motor (106) is installed on the Y-axis motion platform (107); The parallel surface (108) that connects bent plate (109) is installed on the Y-axis motion platform (107), on the vertical plane (113) of connection bent plate (109) Z axle motion platform (112) is installed, Z axis drive motor (110) is installed on the Z axle motion platform (112), and the top of Z axle motion platform (112) is provided with lead screw hole (105);

Described fine motion disk (2) is the thick thin type copper material disk of 8～15mm, the core position of its disk body upper surface (201) is provided with taper pin (202), and is central point and is laid with the identical movement branched chain A of structure (210), movement branched chain B (220) and movement branched chain C (230) by 120 ° with taper pin (202); Be provided with counter sink (203) between elongated chamber on each movement branched chain and the dish edge; The dish edge (204) of disk body is provided with otch A (214), otch B (224), otch C (234), and the cut sides of each otch is provided with threaded hole;

Described movement branched chain A (210) is the integral member that adopts the line cutting mode to be processed into, movement branched chain A (210) is provided with for the elongated chamber (211) that piezoelectric ceramics is installed, five ditch seams and ten through holes, and five ditch seams constitute the pivot point lever structure that displacement is amplified with ten through holes;

Described fine motion arm (3), by base plate (301), top board (304), moving sets A (310), moving sets B (320), moving sets C (330), piezoelectric ceramics A (311), piezoelectric ceramics B (321), piezoelectric ceramics C (331) be respectively applied for the mounting disc that three piezoelectric ceramics are installed and constitute, top board (304) is provided with three notches and mounting hole (305);

Described moving sets A (310) is the integral member that adopts the line cutting mode to be processed into, and the bottom of moving sets A (310) is web joint (401), and web joint (401) is gone up by a flexible hinge (405) and is connected with support rectangle frame (410); The end of supporting the top (411) of rectangle frame (410) cuts into two semicircle left cut groove (412) and right cut grooves of forming (413) up and down respectively, and the lower central that supports the top (411) of rectangle frame (410) is provided with ball-and-socket (423); Bottom (414) center position that supports rectangle frame (410) is provided with for the threaded hole (408) that piezoelectric ceramics A (311) is installed; The end of supporting the base (415) of rectangle frame (410) cuts into two semicircle left cut groove (416) and right cut grooves of forming (417) up and down respectively, the base (415) of supporting rectangle frame (410) be provided with and web joint (401) on the corresponding hole of fabrication hole (404); The fitting surface (420) that supports the top, upper end, the left side (418) of rectangle frame (410) is provided with mounting hole (419), and the top, the left side (418) of support rectangle frame (410) is equivalent flexible ball pivot (421) with the joint of top (411) left end that supports rectangle frame (410).

2, motion platform mechanism according to claim 1 is characterized in that: the central point of the notch A (306) on the top board (304), notch B (316) and notch C (326) constitutes an equilateral triangle.

3, motion platform mechanism according to claim 1 is characterized in that: described motor is selected stepper motor for use, power of motor 36W～72W.

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