CN1235405A - Miniature monoblock precisive plane moving mechanism and device thereof - Google Patents
Miniature monoblock precisive plane moving mechanism and device thereof Download PDFInfo
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- CN1235405A CN1235405A CN 99107784 CN99107784A CN1235405A CN 1235405 A CN1235405 A CN 1235405A CN 99107784 CN99107784 CN 99107784 CN 99107784 A CN99107784 A CN 99107784A CN 1235405 A CN1235405 A CN 1235405A
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Abstract
The present invention relates to a miniaturized integral mechanicsm moving precisely on plane and its device. It is composed of moving table, flexibly hinged lever mechanism, clamping part and fixed bottom plate. Said flexibly hinged lever mechanism consists of piezoelectric/electrostrictive actuating part, central connecting part, four supporting levers, four frame levers and four frame connecting parts, all of which are conneted via flexible hinges. It has less drive parts, benefiting the drive control and micromoving location from point to point. Its symmetric structure ensures its moving direction in X and Y axises. It features compact structure and easy minuaturization. It can be used for superprecise XY bench and miniature translational robot.
Description
The present invention relates to a kind of miniature monoblock precisive plane moving mechanism and device thereof, belong to precision optical machinery and ultraprecise movement control technology field.
In precision optical machinery and ultraprecise movement control technology field, even when the Motion Resolution rate reached the submicron order nanoscale, solid actuator particularly piezoelectric actuator revealed advantage at feeding detent mechanism or system's convexity.
The piezoelectric actuation device because its displacement resolution height, reduce intermediary movements transferring elements, efficient height, advantage such as rigidity is big, response is fast, be widely used in little feeding detent mechanism or system.
The little feeding detent mechanism or the system that adopt piezoelectric to activate not only can realize the one dimension rectilinear motion, and by mechanism design cleverly, even also can realize rotatablely moving, two dimensional surface motion three-D displacement etc.Thereby little feeding location technology that piezoelectric is activated is constantly widened its range of application.
In little feeding location or ultraprecise mechanism or system that piezoelectric activates, adopt flexible hinge key leverage to combine with the piezoelectric actuated piece usually to guarantee high-resolution displacement output.But there is its significant disadvantages in mechanism or the system that directly utilizes piezoelectric to activate distortion usually, and promptly stroke is little, to most 10 microns.
The invention of creeping mechanism is come out, and has overcome the little shortcoming of stroke dexterously.The main member of typical creeping motion type stepper motor (inchworm motor) comprises the radially clamp clamping piezoelectric ceramic tube at main shaft, cylindric axial stretching piezoelectric elements and two ends thereof.When main shaft is moving component, the piezoelectric elements and the assembly relative fixed of clamp clamping element radially; If main shaft fixes, piezoelectric elements and radially the assembly of clamp clamping element along the main shaft axial motion.
With the main shaft is moving component, left side clamping piece is fixed on pedestal, the structure that piezoelectric elements and right clamping piece connect with left clamping piece is an example, initial condition is left and right clamping piece clamping spindle, its motion principle is as follows: (1) at first makes left clamping piece radially unclamp main shaft, and right clamping piece radial contraction clamping spindle this moment; (2) drive piezoelectric elements and extend vertically, drive the main shaft ahead one starboard step; (3) make left clamping piece radial contraction clamping spindle, right then clamping piece radially unclamps; (4) piezoelectric elements is shunk vertically; (5) make right clamping piece radial contraction clamping spindle again, be returned to initial condition.The operation of circulation step (1)-step (5) can realize the straight line step motion of main shaft.Its counter motion can clamp the operation control sequence realization of using piezoelectric ceramic tube by changing axial stretching piezoelectric elements and left and right radially clamp.
The stroke of main shaft only depends on the length of main shaft.Translational speed can by change be added on the axial stretching piezoelectric elements voltage magnitude and control piezoelectric elements, about radially the operating frequency of clamp clamping element regulate.
Even, in little displacement range,, drive at the corresponding configuration of each dimension direction of motion one piezoelectric actuated piece usually no matter be layering or integrative-structure for realizing two dimension multidimensional micromotion mechanism.And, also imported the vermicular movement principle in the occasion that realizes big moving displacement output.Its implementation is the extension of one dimension creeping mechanism substantially, even integrative-structure drives at each corresponding piezoelectric actuated piece of configuration of the dimension direction of motion and two auxiliary clamping pieces at least.
Plane multidimensional creeping motion type piezoelectricity/electrostriction so far activates the integrated structure design of micro-feed mechanism, although help when keeping high displacement resolution, realizing big displacement stroke, but piezoelectric actuated piece and the increase quantitatively of auxiliary clamping piece both be unfavorable for motion control, were unsuitable for the microminaturization of structure again.
The objective of the invention is to design a kind of miniature monoblock precisive plane moving mechanism.Adopt piezoelectric to activate and combine,, when keeping high displacement resolution, realize big displacement stroke based on a kind of plane Creeping Principle of novelty with the flexible hinge leverage.The characteristics of this mechanism are with 1 piezoelectric master actuated piece, be aided with 4 clamping pieces can realize the three-dimensional XY θ motion in plane.Compact conformation is easy to microminaturization, not only can be used for XY θ ultra precise workbench, also can be used for microminiature translation robot.
The miniature monoblock precisive plane moving mechanism of the present invention's design comprises lever ab, oc, hinge o, a, b, c, piezoelectric actuated piece and center clamping piece, x direction clamping piece, y direction clamping piece and θ direction clamping piece.Lever and hinge are formed right-angled triangle oab, oac, obc.Between flexible actuated piece centering clamping piece and the x direction clamping piece.Center clamping piece and hinge o connect firmly, and x direction clamping piece and hinge a connect firmly, and y direction clamping piece and hinge b connect firmly, and θ direction clamping piece and lever oc connect firmly.
According to above-mentioned motion, the present invention has designed the precisive plane telecontrol equipment, and this device comprises motion table top, flexible hinge leverage, clamping piece and fixed base plate.The flexible hinge leverage is formed by connecting by flexible hinge by piezoelectric actuated piece, center connector, four support lever, four frame levers and four frame connectors.The piezoelectric actuated piece is between center connector and frame connector; The motion table top is fixed on the flexure hinge mechanism by the center connector; Clamping piece comprise center clamping piece, x to clamping piece, y to clamping piece and θ to clamping piece, x connects firmly with the frame connector respectively to clamping piece to clamping piece, y, center clamping piece and center connector connect firmly, θ connects firmly to clamping piece and support lever; Place on the fixed base plate by motion table top, flexible hinge leverage and the clamping piece motion that constitutes that interconnects.
In the above-mentioned precisive plane telecontrol equipment, the piezoelectric actuated piece can also the centering connector on, link with the frame connecting pieces at two ends.Two piezoelectric actuated pieces also can be arranged, be symmetrically placed in two sides of center connector respectively, each links with center connector and frame connecting pieces.
Miniature monoblock precisive plane telecontrol equipment of the present invention can also have another version, and wherein a kind of is: this device comprises motion table top, flexible hinge leverage, clamping piece and fixed base plate.The flexible hinge leverage is formed by connecting by flexible hinge by piezoelectric actuated piece, center connector, four support lever, four frame levers and four frame connectors.On the piezoelectric actuated piece centering connector, link with the frame connecting pieces at two ends; The motion table top is fixed on the flexure hinge mechanism by the center connector; Clamping piece comprise center clamping piece, x to clamping piece and y to clamping piece, x connects firmly with the frame connector respectively to clamping piece to clamping piece, y, center clamping piece and center connector connect firmly; Place on the fixed base plate by motion table top, flexible hinge leverage and the clamping piece motion that constitutes that interconnects.
Miniature monoblock plane X Y θ precise motion of the present invention mechanism adopts piezoelectric to activate and combines with the flexible hinge leverage, based on a kind of plane Creeping Principle of novelty, and the big displacement stroke of realization when keeping high displacement resolution.The characteristics of this mechanism are with a piezoelectric master actuated piece, be aided with four clamping pieces can realize the three-dimensional XY θ motion in plane.
This mechanism design helps drive controlling owing to reduce the quantity of actuator, is fit to little feeding location of point-to-point.Symmetrical structure helps guaranteeing that mechanism is along X, Y-axis travel direction.Simple and compact for structurely be easy to microminaturization, not only can be used for XY θ ultra precise workbench, also can be used for microminiature translation robot.
Description of drawings:
Fig. 1 is the motion structural representation that the present invention designs.
Fig. 2 is a precisive plane telecontrol equipment structural representation of the present invention.
Fig. 3 is the vertical view of Fig. 2.
Fig. 4 and Fig. 5 are other two kinds of versions of the precisive plane telecontrol equipment of Fig. 2.
Fig. 6 is the another kind of structural representation of the precise motion device that designs of the present invention.
Below in conjunction with accompanying drawing, introduce content of the present invention in detail.
Among Fig. 1-Fig. 6, the 1st, piezoelectric actuated piece, the 2nd, flexible hinge leverage, wherein 21 is frame lever (4 of symmetries), the 22nd, and flexible hinge (totally 16), the 23rd, support lever (4 of symmetries), the 24th, frame connector (4 of symmetries), the 25th, the center connector, the 3rd, the center clamping piece, wherein 31 is electromagnetism magnetic cores, the 32nd, solenoid, the 4th, directions X clamping piece, the 41st, electromagnetism magnetic core, the 42nd, solenoid, the 5th, Y direction clamping piece, the 51st, electromagnetism magnetic core, the 52nd, solenoid, the 6th, θ direction clamping piece, wherein 61 is electromagnetism magnetic cores, the 62nd, solenoid, the 7th, motion table top, the 8th, fixing bottom surface.
Fig. 1 be miniature monoblock of the present invention plane X Y θ precise motion mechanism based on the plane Creeping Principle, its basic mentality of designing is to utilize single piezoelectric actuated piece to be equipped with the situation monitoring that suitable clamp clamp system is realized XY θ Three Degree Of Freedom.
As shown in Figure 1, lever 21,23 and hinge 22 (comprising o, a, b, c) constitute isosceles right triangle oab, oac, obc structure.If oa, ob are respectively along X, Y direction, if between o, a, put a piezoelectric actuated piece 1, make the relative hinge o of hinge a produce a positive-displacement along directions X, then hinge b produces a negative sense equivalent displacement with relative hinge o along the Y direction, and lever 23 will be around clockwise deflection one angle of hinge o simultaneously; Otherwise if make the relative hinge o of hinge a produce a negative sense displacement along directions X, then hinge b produces a forward equivalent displacement with relative hinge o along the Y direction, and lever 23 will be around counterclockwise deflection one angle of hinge o simultaneously.Basic exercise principle of the present invention that Here it is.
Further, as shown in Figure 1, connect firmly clamp clamp system 3,4,5 and 6 respectively on hinge 22 (comprising o, a, b) and lever 23, piezoelectric actuated piece 1 is placed between clamp clamping element 3 and 4, has just constituted the plane creeping mechanism that can realize big displacement stroke.Basic functional principle is as follows:
(1) directions X motion
Make Y direction clamp clamping element 5 and θ direction of rotation clamp clamping element 6 be in pine position state, rely on the action control of piezoelectric actuated piece 1, center clamp clamping element 3 and directions X clamp clamping element 4 to realize.
At first make center clamp clamping element 3 clamps, directions X clamp clamping element 4 pine positions; Drive 1 elongation of piezoelectric actuated piece; Make directions X clamp clamping element 4 clamps again, center clamp clamping element 3 pine positions; Shed the voltage that is added on the piezoelectric actuated piece 1 and make it return back to original length, drive entire mechanism and move to right a step; Make center clamp clamping element 3 clamps again, directions X clamp clamping element 4 pine positions, initial condition is replied by mechanism, finishes a stepping campaign of directions X.The circulation said process can be realized the creep feed of mechanism.Change two control sequences that clamp clamping piece 3,4 and piezoelectric actuated piece 1, can realize counter motion.Control is added on the voltage waveform of piezoelectric actuated piece 1, also can realize the small step pitch continuous motion in the advance and retreat motion of big step pitch and the cyclic process of changing step.
(2) Y direction motion
Directions X clamp clamping element 4 and θ direction of rotation clamp clamping element 6 pine positions rely on the action control of piezoelectric actuated piece 1, center clamp clamping element 3 and Y direction clamp clamping element 5 to realize.
At first make center clamp clamping element 3 clamps, Y direction clamp clamping element 5 pine positions; Drive 1 elongation of piezoelectric actuated piece; Make Y direction clamp clamping element 5 clamps again, center clamp clamping element 3 pine positions; Shed the voltage that is added on the piezoelectric actuated piece 1 and make it return back to original length, drive entire mechanism and move down a step along the Y direction; Make center clamp clamping element 3 clamps again, Y direction clamp clamping element 5 pine positions, initial condition is replied by mechanism, finishes a stepping campaign of Y direction.The circulation said process can be realized the creep feed of mechanism.Change two control sequences that clamp clamping institution and piezoelectric actuated piece, can realize counter motion.Control is added on the voltage waveform of piezoelectric actuated piece, also can realize the small step pitch continuous motion in the advance and retreat motion of big step pitch and the cyclic process of changing step.
(3) θ direction motion
Directions X clamp clamping element 4 and Y direction clamp clamping element 5 pine positions rely on the action control of piezoelectric actuated piece 1, center clamp clamping element 3 and θ direction clamp clamping element 6 to realize.
At first make center clamp clamping element 3 clamps, θ direction clamp clamping element 6 pine positions; Drive 1 elongation of piezoelectric actuated piece; Make θ direction clamp clamping element 6 clamps again, center clamp clamping element 3 pine positions; Shed the voltage that is added on the piezoelectric actuated piece 1 and make it return back to original length, drive entire mechanism around hinge o along θ direction deflection one angle; Make center clamp clamping element 3 clamps again, θ direction clamp clamping element 6 pine positions, initial condition is replied by mechanism, finishes the step swivel feeding motion of θ direction.The circulation said process can be realized the creep feed of mechanism.Change two control sequences that clamp clamping institution and piezoelectric actuated piece, can realize counter motion.Control is added on the voltage waveform of piezoelectric actuated piece, also can realize the small step pitch continuous motion in the advance and retreat motion of big step pitch and the cyclic process of changing step.
In fact, when stating the mechanism design of motion principle in realization, isosceles right triangle oab, the oac that lever 21,23 and hinge 22 (comprising o, a, b, c) constitute, the condition of obc structure can also be relaxed, if the extended line that guarantees lever 23 with meet at 1 d through a, b point and the straight line that is parallel to X, Y-axis respectively.
Based on above-mentioned plane Creeping Principle, the basic structure of miniature monoblock precisive plane telecontrol equipment of the present invention as shown in Figure 2.Mainly by flexible hinge leverage 2, clamp clamping element 3,4,5 and 6, work top 7 and fixed base plate 8 constitute.
Plane Creeping Principle structure corresponding shown in Figure 1, piezoelectric actuated piece 1 is embedded in the flexible hinge leverage 2 that comprises lever 21,23 and flexible hinge 22, and at the lower position of the flexible hinge leverage 2 clamp clamping element 3,4,5 and 6 that is connected.Figure 2 shows that along the end view of Y direction, center clamping piece 3 and directions X clamping piece 4 only are shown among the figure.The action control of clamping piece can be adopted Electromagnetic Drive, is made of magnetic core and coil.When Control current was passed through coil, electromagnetic attraction made magnetic core and base plate 8 constitute closed magnetic circuits, and clamp is clamped on the base plate 8; During no power, be in pine position state.
If entire mechanism is put upside down, workbench 7 is as fixed base plate, and at this moment base plate 8 also can be used as the motion table top and carries out XY θ precise motion.
Fig. 3 is first kind of structural representation of miniature monoblock plane X Y θ precise motion device of the present invention.Be the concrete structure vertical view that comprises the flexible hinge leverage 2 of piezoelectric actuated piece 1 shown in the figure, the center clamp clamping element 3 that thereunder is connected, directions X clamp clamping element 4, Y direction clamp clamping element 5 and θ direction clamp clamping element 6 with dashed lines frame respectively illustrate.
Piezoelectric actuated piece 1 as the master of mechanism actuator tightly is embedded in the hinge leverage 2 by giving with the interference fit of hinge leverage, between center clamp clamping element 3 and directions X clamp clamping element 4, two ends connect with center connector 25 and frame connector 24 respectively.Hinge leverage 2 is symmetrical structure, and by 21, four support lever 23 of four frame levers, connector 25, four frame connectors 24 in center form by 22 connections of 16 flexible hinges.This structural design helps guaranteeing that mechanism is along X, Y-axis travel direction.
The plane Creeping Principle of this mechanism is as follows:
(1) directions X motion
Make Y direction clamp clamping element 5 and θ direction of rotation clamp clamping element 6 be in pine position state, rely on the action control of piezoelectric actuated piece 1, center clamp clamping element 3 and directions X clamp clamping element 4 to realize.
At first make center clamp clamping element 3 clamps, directions X clamp clamping element 4 pine positions; Drive 1 elongation of piezoelectric actuated piece; Make directions X clamp clamping element 4 clamps again, center clamp clamping element 3 pine positions; Shed the voltage that is added on the piezoelectric actuated piece 1 and make it return back to original length, drive entire mechanism and move to right a step; Make center clamp clamping element 3 clamps again, directions X clamp clamping element 4 pine positions, initial condition is replied by mechanism, finishes a stepping campaign of directions X.The circulation said process can be realized the creep feed of mechanism.Change two control sequences that clamp clamping piece 3,4 and piezoelectric actuated piece 1, can realize counter motion.Control is added on the voltage waveform of piezoelectric actuated piece 1, also can realize the small step pitch continuous motion in the advance and retreat motion of big step pitch and the cyclic process of changing step.
(2) Y direction motion
Directions X clamp clamping element 4 and θ direction of rotation clamp clamping element 6 pine positions rely on the action control of piezoelectric actuated piece 1, center clamp clamping element 3 and Y direction clamp clamping element 5 to realize.
At first make center clamp clamping element 3 clamps, Y direction clamp clamping element 5 pine positions; Drive 1 elongation of piezoelectric actuated piece; Make Y direction clamp clamping element 5 clamps again, center clamp clamping element 3 pine positions; Shed the voltage that is added on the piezoelectric actuated piece 1 and make it return back to original length, drive entire mechanism and move down a step along the Y direction; Make center clamp clamping element 3 clamps again, Y direction clamp clamping element 5 pine positions, initial condition is replied by mechanism, finishes a stepping campaign of Y direction.The circulation said process can be realized the creep feed of mechanism.Change two control sequences that clamp clamping institution and piezoelectric actuated piece, can realize counter motion.Control is added on the voltage waveform of piezoelectric actuated piece, also can realize the small step pitch continuous motion in the advance and retreat motion of big step pitch and the cyclic process of changing step.
(3) θ direction motion
Directions X clamp clamping element 4 and Y direction clamp clamping element 5 pine positions rely on the action control of piezoelectric actuated piece 1, center clamp clamping element 3 and θ direction clamp clamping element 6 to realize.
At first make center clamp clamping element 3 clamps, θ direction clamp clamping element 6 pine positions; Drive 1 elongation of piezoelectric actuated piece; Make θ direction clamp clamping element 6 clamps again, center clamp clamping element 3 pine positions; Shed the voltage that is added on the piezoelectric actuated piece 1 and make it return back to original length, drive entire mechanism around hinge o along θ direction deflection one angle; Make center clamp clamping element 3 clamps again, θ direction clamp clamping element 6 pine positions, initial condition is replied by mechanism, finishes the step swivel feeding motion of θ direction.The circulation said process can be realized the creep feed of mechanism.Change two control sequences that clamp clamping institution and piezoelectric actuated piece, can realize counter motion.Control is added on the voltage waveform of piezoelectric actuated piece, also can realize the small step pitch continuous motion in the advance and retreat motion of big step pitch and the cyclic process of changing step.
Fig. 4 is second kind of structural representation of miniature monoblock plane X Y θ precise motion device of the present invention.Be the concrete structure vertical view that comprises the flexible hinge leverage 2 of piezoelectric actuated piece 1 shown in the figure, the center clamp clamping element 3 that thereunder is connected, directions X clamp clamping element 4, Y direction clamp clamping element 5 and θ direction clamp clamping element 6 with dashed lines frame respectively illustrate.The basic structure principle of this XY θ precise motion mechanism and Fig. 3 roughly the same, different characteristic is to use two piezoelectric actuated pieces 1, gives tightly being embedded in the hinge leverage 2 along X-direction.Make structure more become symmetrical like this, thereby improve the direction of motion of mechanism along X, Y-axis.But every step displacement output variable is still the deflection of a piezoelectric actuated piece 1 in this mechanism.
Two piezoelectric actuated pieces 1 as the master of mechanism actuator tightly are embedded in the hinge leverage 2 by giving with the interference fit of hinge leverage, and two ends connect with center connector 25 and frame connector 24 respectively.Hinge leverage 2 is symmetrical structure, and by 21, four support lever 23 of four frame levers, connector 25, four frame connectors 24 in center form by 22 connections of 16 flexible hinges.
The plane Creeping Principle of this mechanism is as follows:
(1) directions X motion
Make Y direction clamp clamping element 5 and θ direction of rotation clamp clamping element 6 be in pine position state, rely on the action control of piezoelectric actuated piece 1, center clamp clamping element 3 and directions X clamp clamping element 4 to realize.
At first make center clamp clamping element 3 clamps, directions X clamp clamping element 4 pine positions; Drive 1 elongation of piezoelectric actuated piece; Make directions X clamp clamping element 4 clamps again, center clamp clamping element 3 pine positions; Shed the voltage that is added on the piezoelectric actuated piece 1 and make it return back to original length, drive entire mechanism and move to right a step; Make center clamp clamping element 3 clamps again, directions X clamp clamping element 4 pine positions, initial condition is replied by mechanism, finishes a stepping campaign of directions X.The circulation said process can be realized the creep feed of mechanism.Change two control sequences that clamp clamping piece 3,4 and piezoelectric actuated piece 1, can realize counter motion.Control is added on the voltage waveform of piezoelectric actuated piece 1, also can realize the small step pitch continuous motion in the advance and retreat motion of big step pitch and the cyclic process of changing step.
(2) Y direction motion
Directions X clamp clamping element 4 and θ direction of rotation clamp clamping element 6 pine positions rely on the action control of piezoelectric actuated piece 1, center clamp clamping element 3 and Y direction clamp clamping element 5 to realize.
At first make center clamp clamping element 3 clamps, Y direction clamp clamping element 5 pine positions; Drive 1 elongation of piezoelectric actuated piece; Make Y direction clamp clamping element 5 clamps again, center clamp clamping element 3 pine positions; Shed the voltage that is added on the piezoelectric actuated piece 1 and make it return back to original length, drive entire mechanism and move down a step along the Y direction; Make center clamp clamping element 3 clamps again, Y direction clamp clamping element 5 pine positions, initial condition is replied by mechanism, finishes a stepping campaign of Y direction.The circulation said process can be realized the creep feed of mechanism.Change two control sequences that clamp clamping institution and piezoelectric actuated piece, can realize counter motion.Control is added on the voltage waveform of piezoelectric actuated piece, also can realize the small step pitch continuous motion in the advance and retreat motion of big step pitch and the cyclic process of changing step.
(3) θ direction motion
Directions X clamp clamping element 4 and Y direction clamp clamping element 5 pine positions rely on the action control of piezoelectric actuated piece 1, center clamp clamping element 3 and θ direction clamp clamping element 6 to realize.
At first make center clamp clamping element 3 clamps, θ direction clamp clamping element 6 pine positions; Drive 1 elongation of piezoelectric actuated piece; Make θ direction clamp clamping element 6 clamps again, center clamp clamping element 3 pine positions; Shed the voltage that is added on the piezoelectric actuated piece 1 and make it return back to original length, drive entire mechanism around hinge o along θ direction deflection one angle; Make center clamp clamping element 3 clamps again, θ direction clamp clamping element 6 pine positions, initial condition is replied by mechanism, finishes the step swivel feeding motion of θ direction.The circulation said process can be realized the creep feed of mechanism.Change two control sequences that clamp clamping institution and piezoelectric actuated piece, can realize counter motion.Control is added on the voltage waveform of piezoelectric actuated piece, also can realize the small step pitch continuous motion in the advance and retreat motion of big step pitch and the cyclic process of changing step.
Shown in Figure 5 is the third structural representation of miniature monoblock plane X Y θ precise motion device of the present invention.Be the concrete structure vertical view that comprises the flexible hinge leverage 2 of piezoelectric actuated piece 1 shown in the figure, the center clamp clamping element 3 that thereunder is connected, directions X clamp clamping element 4, Y direction clamp clamping element 5 and θ direction clamp clamping element 6 with dashed lines frame respectively illustrate.
Piezoelectric actuated piece 1 as the master of mechanism actuator tightly is embedded in the hinge leverage 2 by giving with the interference fit of hinge leverage, is positioned at center connector 25 tops, and two ends connect with two frame connectors 24 of symmetry respectively.Hinge leverage 2 is symmetrical structure, and by 21, four support lever 23 of four frame levers, connector 25, four frame connectors 24 in center form by 22 connections of 16 flexible hinges.Piezoelectric actuated piece 1 cross center's connector 25 of this structural design and do not connect half of the deflection that the every step displacement output variable that makes mechanism is the piezoelectric actuated piece with center connector 25.
The plane Creeping Principle of this mechanism is as follows:
(1) directions X motion
Make Y direction clamp clamping element 5 and θ direction of rotation clamp clamping element 6 be in pine position state, rely on the action control of piezoelectric actuated piece 1, center clamp clamping element 3 and directions X clamp clamping element 4 to realize.
At first make center clamp clamping element 3 clamps, directions X clamp clamping element 4 pine positions; Drive 1 elongation of piezoelectric actuated piece; Make directions X clamp clamping element 4 clamps again, center clamp clamping element 3 pine positions; Shed the voltage that is added on the piezoelectric actuated piece 1 and make it return back to original length, drive entire mechanism and move to right a step; Make center clamp clamping element 3 clamps again, directions X clamp clamping element 4 pine positions, initial condition is replied by mechanism, finishes a stepping campaign of directions X.The circulation said process can be realized the creep feed of mechanism.Change two control sequences that clamp clamping piece 3,4 and piezoelectric actuated piece 1, can realize counter motion.Control is added on the voltage waveform of piezoelectric actuated piece 1, also can realize the small step pitch continuous motion in the advance and retreat motion of big step pitch and the cyclic process of changing step.
(2) Y direction motion
Directions X clamp clamping element 4 and θ direction of rotation clamp clamping element 6 pine positions rely on the action control of piezoelectric actuated piece 1, center clamp clamping element 3 and Y direction clamp clamping element 5 to realize.
At first make center clamp clamping element 3 clamps, Y direction clamp clamping element 5 pine positions; Drive 1 elongation of piezoelectric actuated piece; Make Y direction clamp clamping element 5 clamps again, center clamp clamping element 3 pine positions; Shed the voltage that is added on the piezoelectric actuated piece 1 and make it return back to original length, drive entire mechanism and move down a step along the Y direction; Make center clamp clamping element 3 clamps again, Y direction clamp clamping element 5 pine positions, initial condition is replied by mechanism, finishes a stepping campaign of Y direction.The circulation said process can be realized the creep feed of mechanism.Change two control sequences that clamp clamping institution and piezoelectric actuated piece, can realize counter motion.Control is added on the voltage waveform of piezoelectric actuated piece, also can realize the small step pitch continuous motion in the advance and retreat motion of big step pitch and the cyclic process of changing step.
(3) θ direction motion
Directions X clamp clamping element 4 and Y direction clamp clamping element 5 pine positions rely on the action control of piezoelectric actuated piece 1, center clamp clamping element 3 and θ direction clamp clamping element 6 to realize.
At first make center clamp clamping element 3 clamps, θ direction clamp clamping element 6 pine positions; Drive 1 elongation of piezoelectric actuated piece; Make θ direction clamp clamping element 6 clamps again, center clamp clamping element 3 pine positions; Shed the voltage that is added on the piezoelectric actuated piece 1 and make it return back to original length, drive entire mechanism around hinge o along θ direction deflection one angle; Make center clamp clamping element 3 clamps again, θ direction clamp clamping element 6 pine positions, initial condition is replied by mechanism, finishes the step swivel feeding motion of θ direction.The circulation said process can be realized the creep feed of mechanism.Change two control sequences that clamp clamping institution and piezoelectric actuated piece, can realize counter motion.Control is added on the voltage waveform of piezoelectric actuated piece, also can realize the small step pitch continuous motion in the advance and retreat motion of big step pitch and the cyclic process of changing step.
Fig. 6 is the structural representation that is used for the precisive plane telecontrol equipment of microminiature translation robot of the present invention.Be the concrete structure vertical view that comprises the flexible hinge leverage 2 of piezoelectric actuated piece 1 shown in the figure, the center clamp clamping element 3 that thereunder is connected, directions X clamp clamping element 4 and Y direction clamp clamping element 5 with dashed lines frame respectively illustrate.The design of this precise motion mechanism make every effort to whole flexible hinge leverage 2 compact conformation, be easy to microminaturization, saved θ direction of rotation clamp clamping element 6.Compare with Fig. 5, difference is the arrangement angles change with four support lever 23.The condition that arrangement angles must satisfy be: when mechanism kinematic, the instantaneous centre of rotation of lever 21 meets at the d point with extended line along lever 23 directions.
Piezoelectric actuated piece 1 as the master of mechanism actuator tightly is embedded in the hinge leverage 2 by giving with the interference fit of hinge leverage, is positioned at center connector 25 tops, and two ends connect with two frame connectors 24 of symmetry respectively.Hinge leverage 2 is symmetrical structure, and by 21, four support lever 23 of four frame levers, connector 25, four frame connectors 24 in center form by 22 connections of 16 flexible hinges.Piezoelectric actuated piece 1 cross center's connector 25 of this structural design and do not connect half of the deflection that the every step displacement output variable that makes mechanism is the piezoelectric actuated piece with center connector 25.
The plane Creeping Principle of this mechanism is as follows:
(1) directions X motion
Make Y direction clamp clamping element 5 and θ direction of rotation clamp clamping element 6 be in pine position state, rely on the action control of piezoelectric actuated piece 1, center clamp clamping element 3 and directions X clamp clamping element 4 to realize.
At first make center clamp clamping element 3 clamps, directions X clamp clamping element 4 pine positions; Drive 1 elongation of piezoelectric actuated piece; Make directions X clamp clamping element 4 clamps again, center clamp clamping element 3 pine positions; Shed the voltage that is added on the piezoelectric actuated piece 1 and make it return back to original length, drive entire mechanism and move to right a step; Make center clamp clamping element 3 clamps again, directions X clamp clamping element 4 pine positions, initial condition is replied by mechanism, finishes a stepping campaign of directions X.The circulation said process can be realized the creep feed of mechanism.Change two control sequences that clamp clamping piece 3,4 and piezoelectric actuated piece 1, can realize counter motion.Control is added on the voltage waveform of piezoelectric actuated piece 1, also can realize the small step pitch continuous motion in the advance and retreat motion of big step pitch and the cyclic process of changing step.
(2) Y direction motion
Directions X clamp clamping element 4 and θ direction of rotation clamp clamping element 6 pine positions rely on the action control of piezoelectric actuated piece 1, center clamp clamping element 3 and Y direction clamp clamping element 5 to realize.
At first make center clamp clamping element 3 clamps, Y direction clamp clamping element 5 pine positions; Drive 1 elongation of piezoelectric actuated piece; Make Y direction clamp clamping element 5 clamps again, center clamp clamping element 3 pine positions; Shed the voltage that is added on the piezoelectric actuated piece 1 and make it return back to original length, drive entire mechanism and move down a step along the Y direction; Make center clamp clamping element 3 clamps again, Y direction clamp clamping element 5 pine positions, initial condition is replied by mechanism, finishes a stepping campaign of Y direction.The circulation said process can be realized the creep feed of mechanism.Change two control sequences that clamp clamping institution and piezoelectric actuated piece, can realize counter motion.Control is added on the voltage waveform of piezoelectric actuated piece, also can realize the small step pitch continuous motion in the advance and retreat motion of big step pitch and the cyclic process of changing step.
Claims (5)
1, a kind of miniature monoblock precisive plane moving mechanism is characterized in that, this mechanism comprises lever ab, oc, hinge o, a, b, c, piezoelectric actuated piece and center clamping piece, x direction clamping piece, y direction clamping piece and θ direction clamping piece; Described lever and hinge are formed right-angled triangle oab, oac, obc; Between described flexible actuated piece centering clamping piece and the x direction clamping piece; Described center clamping piece and hinge o connect firmly, and x direction clamping piece and hinge a connect firmly, and y direction clamping piece and hinge b connect firmly, and θ direction clamping piece and lever oc connect firmly.
2, a kind of miniature monoblock precisive plane telecontrol equipment is characterized in that this device comprises motion table top, flexible hinge leverage, clamping piece and fixed base plate; Described flexible hinge leverage is formed by connecting by flexible hinge by piezoelectric actuated piece, center connector, four support lever, four frame levers and four frame connectors, and described piezoelectric actuated piece is between center connector and frame connector; The motion table top is fixed on the flexure hinge mechanism by the center connector; Clamping piece comprise center clamping piece, x to clamping piece, y to clamping piece and θ to clamping piece, x connects firmly with the frame connector respectively to clamping piece to clamping piece, y, center clamping piece and center connector connect firmly, θ connects firmly to clamping piece and support lever; Place on the fixed base plate by motion table top, flexible hinge leverage and the clamping piece motion that constitutes that interconnects.
3, precisive plane telecontrol equipment as claimed in claim 2 is characterized in that, wherein said piezoelectric actuated piece has two, is symmetrically placed in two sides of center connector respectively, and each links with center connector and frame connecting pieces.
4, precisive plane telecontrol equipment as claimed in claim 2 is characterized in that, on the wherein said piezoelectric actuated piece centering connector, links with the frame connecting pieces at two ends.
5, a kind of miniature monoblock precisive plane telecontrol equipment is characterized in that this device comprises motion table top, flexible hinge leverage, clamping piece and fixed base plate; Described flexible hinge leverage is formed by connecting by flexible hinge by piezoelectric actuated piece, center connector, four support lever, four frame levers and four frame connectors, on the described piezoelectric actuated piece centering connector, link with the frame connecting pieces at two ends; The motion table top is fixed on the flexure hinge mechanism by the center connector; Clamping piece comprise center clamping piece, x to clamping piece and y to clamping piece, x connects firmly with the frame connector respectively to clamping piece to clamping piece, y, center clamping piece and center connector connect firmly; Place on the fixed base plate by motion table top, flexible hinge leverage and the clamping piece motion that constitutes that interconnects.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 99107784 CN1110122C (en) | 1999-05-28 | 1999-05-28 | Miniature monoblock precisive plane moving mechanism and device thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 99107784 CN1110122C (en) | 1999-05-28 | 1999-05-28 | Miniature monoblock precisive plane moving mechanism and device thereof |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1235405A true CN1235405A (en) | 1999-11-17 |
| CN1110122C CN1110122C (en) | 2003-05-28 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 99107784 Expired - Fee Related CN1110122C (en) | 1999-05-28 | 1999-05-28 | Miniature monoblock precisive plane moving mechanism and device thereof |
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| Country | Link |
|---|---|
| CN (1) | CN1110122C (en) |
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN1305644C (en) * | 2004-07-30 | 2007-03-21 | 哈尔滨工业大学 | Microdriving fully decoupled macrol/micre bidriving minitype robot moving locating platform |
| CN100439049C (en) * | 2004-07-15 | 2008-12-03 | 清华大学 | Plane motion mechanism of a microrobot and microrobot |
| CN101947779A (en) * | 2010-09-01 | 2011-01-19 | 华南理工大学 | Structure of combination drive type micro robot |
| CN102284955A (en) * | 2011-07-22 | 2011-12-21 | 吉林大学 | Six-freedom degree micro robot based on hybrid drive |
| CN1973428B (en) * | 2004-04-27 | 2012-05-23 | 英特尔公司 | Electromechanical actuator adapted to provide two degrees of mobility |
| CN103111990A (en) * | 2011-11-17 | 2013-05-22 | 上海航天测控通信研究所 | Movement mechanism of one-dimensional micro-positioning platform |
| CN103912573A (en) * | 2014-03-27 | 2014-07-09 | 广东工业大学 | Replaceable inlaid-type flexible hinge fixing structure |
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| CN100369283C (en) * | 2003-07-15 | 2008-02-13 | 西北工业大学 | Clamping Method of Magnetostrictive Material Body |
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- 1999-05-28 CN CN 99107784 patent/CN1110122C/en not_active Expired - Fee Related
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1973428B (en) * | 2004-04-27 | 2012-05-23 | 英特尔公司 | Electromechanical actuator adapted to provide two degrees of mobility |
| CN100439049C (en) * | 2004-07-15 | 2008-12-03 | 清华大学 | Plane motion mechanism of a microrobot and microrobot |
| CN1305644C (en) * | 2004-07-30 | 2007-03-21 | 哈尔滨工业大学 | Microdriving fully decoupled macrol/micre bidriving minitype robot moving locating platform |
| CN101947779A (en) * | 2010-09-01 | 2011-01-19 | 华南理工大学 | Structure of combination drive type micro robot |
| CN101947779B (en) * | 2010-09-01 | 2012-08-08 | 华南理工大学 | Structure of combination drive type micro robot |
| CN102284955A (en) * | 2011-07-22 | 2011-12-21 | 吉林大学 | Six-freedom degree micro robot based on hybrid drive |
| CN103111990A (en) * | 2011-11-17 | 2013-05-22 | 上海航天测控通信研究所 | Movement mechanism of one-dimensional micro-positioning platform |
| CN103912573A (en) * | 2014-03-27 | 2014-07-09 | 广东工业大学 | Replaceable inlaid-type flexible hinge fixing structure |
| CN103912573B (en) * | 2014-03-27 | 2016-03-23 | 广东工业大学 | Replaceable mosaic flexible hinge fixing structure |
| CN104057307A (en) * | 2014-06-17 | 2014-09-24 | 绍兴绍力机电科技有限公司 | Precise indexing and micro positioning numerical control rotary table |
| CN104057307B (en) * | 2014-06-17 | 2016-03-30 | 绍兴绍力机电科技有限公司 | Precision indexing microposition NC rotary table |
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