CN1271444C - Micro optic transmission and scanner based on supersonic motor - Google Patents
Micro optic transmission and scanner based on supersonic motor Download PDFInfo
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- CN1271444C CN1271444C CN 200410080285 CN200410080285A CN1271444C CN 1271444 C CN1271444 C CN 1271444C CN 200410080285 CN200410080285 CN 200410080285 CN 200410080285 A CN200410080285 A CN 200410080285A CN 1271444 C CN1271444 C CN 1271444C
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- 239000000463 material Substances 0.000 claims abstract description 8
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- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 3
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Abstract
本发明涉及一种基于超声马达的微型光学传输和扫描装置，属于光学设计领域。由超声马达定子、转子和与该转子相固接的导光装置构成；所说的定子由激励振动的压电陶瓷元件及与其相连的由可与磁铁之间产生磁吸力的材料制成的匹配块构成；所说的转子由不可磁化的基体和与其相连的磁铁构成，该磁铁所提供的磁力足以承担转子本身的重力，并提供定子与转子间的预压力使转子可以转动；所说的导光装置由光纤及棱镜构成，在转子转动时由光纤导入的光通过棱镜形成环形的扫描。本发明将超声马达与光传输装置紧密地结合在一起，具有结构简单、使用方便等特点。在生物、医疗、微机械等领域有着广泛的应用前景。
The invention relates to a miniature optical transmission and scanning device based on an ultrasonic motor, which belongs to the field of optical design. It is composed of an ultrasonic motor stator, a rotor and a light guide device fixed to the rotor; the stator is composed of a piezoelectric ceramic element that excites vibration and a matching material that can generate magnetic attraction between the magnet and the magnet. The rotor is composed of a non-magnetizable base and a magnet connected to it. The magnetic force provided by the magnet is sufficient to bear the gravity of the rotor itself, and provides a pre-pressure between the stator and the rotor so that the rotor can rotate; the guide The optical device is composed of an optical fiber and a prism. When the rotor rotates, the light introduced by the optical fiber passes through the prism to form a circular scan. The invention closely combines the ultrasonic motor and the optical transmission device, and has the characteristics of simple structure, convenient use and the like. It has broad application prospects in the fields of biology, medical treatment and micro-mechanics.
Description
技术领域technical field
本发明属于光学设计技术领域，特别涉及一种微型的光学传输和扫描机装置的结构设计。The invention belongs to the technical field of optical design, in particular to a structural design of a miniature optical transmission and scanning device.
背景技术Background technique
超声马达是一种新型马达，它利用压电材料的逆压电效应使定子表面产生一定轨迹的运动，进而通过摩擦耦合将振动能转换成转子或滑块的动能。超声马达于电磁马达相比具有一些显著的有点，如：大力矩密度，低噪声运行，低速，不需减速箱可直接驱动，自保持力矩打，惯性小，响应快，大力矩时效率高，可忽略磁效应，结构简单等等。我们使用的马达是弯曲摇头式超声马达，尺寸很小(直径可做到毫米以下)，特别适合于做微型扫描装置。Ultrasonic motor is a new type of motor, which uses the inverse piezoelectric effect of piezoelectric materials to make the surface of the stator move in a certain trajectory, and then converts the vibration energy into the kinetic energy of the rotor or slider through friction coupling. Compared with electromagnetic motors, ultrasonic motors have some remarkable advantages, such as: high torque density, low noise operation, low speed, direct drive without gearbox, high self-holding torque, small inertia, fast response, high efficiency at high torque, The magnetic effect can be ignored, the structure is simple and so on. The motor we use is a bending head-type ultrasonic motor, which is very small in size (diameter can be below a millimeter), and is especially suitable for making a micro-scanning device.
弯曲摇头式超声马达的运动如图1所示，定子处于圆周摇头的振动模态，定子11与环状转子12之间有一很小的间隙，传动时定子边弯曲边摇头运动，因此定转子之间有切点接触，其接触点在定子的外圆周边上移动，依次，定、转子间的摩擦力使转子沿与接触点移动方向相反的方向转动。超声马达需要在定子和转子之间提供预压力才可利用它们之间的摩擦力驱动转子进行转动。The motion of the bending oscillating head ultrasonic motor is shown in Figure 1. The stator is in the vibration mode of circular oscillating head, and there is a small gap between the
发明内容Contents of the invention
本发明的目的是提出一种基于超声马达的微型光学传输和扫描装置，将超声马达与光传输装置紧密地结合在一起，具有结构简单、使用方便等特点。The purpose of the present invention is to propose a micro optical transmission and scanning device based on an ultrasonic motor, which closely combines the ultrasonic motor and the optical transmission device, and has the characteristics of simple structure and convenient use.
本发明的一种基于超声马达的微型光学传输和扫描装置，其特征在于，由超声马达定子、转子和与该转子相固接的导光装置构成；所说的定子由激励振动的压电陶瓷元件及与其相连的由可与磁铁之间产生磁吸力的材料制成的匹配块构成；所说的转子由不可磁化的基体和与其相连的磁铁构成，该磁铁所提供的磁力足以承担转子本身的重力，并提供定子与转子间的预压力使转子可以转动；所说的导光装置由光纤及棱镜构成，在转子转动时由光纤导入的光通过棱镜形成环形的扫描。A micro-optical transmission and scanning device based on an ultrasonic motor of the present invention is characterized in that it consists of an ultrasonic motor stator, a rotor, and a light guide device fixed to the rotor; said stator is made of piezoelectric ceramics that excite vibrations The component and the matching block connected to it are made of materials that can generate magnetic attraction between the magnet; the rotor is composed of a non-magnetizable base and a magnet connected to it, and the magnetic force provided by the magnet is enough to bear the load of the rotor itself. Gravity, and provide a pre-pressure between the stator and the rotor so that the rotor can rotate; said light guide device is composed of optical fiber and prism, when the rotor rotates, the light introduced by the optical fiber passes through the prism to form a circular scan.
本发明的特点：Features of the present invention:
本发明利用超声马达的微型化和光纤传输的特点，此装置将超声马达与光传输机构结合起来，使超声马达带动光学器件转动，达到光电扫描的效果。超声马达结构简单，易于微型化，这种结构也使此光学传输和扫描装置易于使用。本发明在生物、医疗、微机械等领域有着广泛的应用前景。The invention utilizes the miniaturization of the ultrasonic motor and the characteristics of optical fiber transmission, and the device combines the ultrasonic motor with the light transmission mechanism, so that the ultrasonic motor drives the optical device to rotate to achieve the effect of photoelectric scanning. The structure of the ultrasonic motor is simple and easy to miniaturize, which also makes the optical transmission and scanning device easy to use. The invention has wide application prospects in the fields of biology, medical treatment, micro-mechanics and the like.
本发明在一些光学成像仪器中有很好的应用前景，尤其适用于需要微型化的场合，如内窥成像等。The present invention has good application prospects in some optical imaging instruments, and is especially suitable for occasions requiring miniaturization, such as endoscopic imaging and the like.
附图说明Description of drawings
图1为弯曲摇头式超声马达的运动状态示意图。Fig. 1 is a schematic diagram of the motion state of the bending head-shaking ultrasonic motor.
图2为本发明的基于超声马达的微型光学传输和扫描装置实施例示意图。Fig. 2 is a schematic diagram of an embodiment of a micro-optical transmission and scanning device based on an ultrasonic motor of the present invention.
具体实施方式Detailed ways
本发明的基于超声马达的微型光学传输和扫描装置实施例结构如图2所示。它包括由定子、转子组成的带有中通孔的超声马达及与其紧密相连成一体的光传输装置。本实施例中超声马达的定子由固定在一起的陶瓷柱27和带有突出轴的匹配块24构成(压电陶瓷元件和匹配块也可采用其它形状)，该匹配块和突出轴可用普通钢一体加工而成(也可采用其它与磁铁产生磁吸力的材料)，通过对陶瓷上制作好的电极提供信号去驱动匹配块产生超声振动。超声马达的转子由固定在一起的铝柱23、盘状磁铁22构成，其中铝柱也可用另外的不可磁化的材料制作，但不能用可磁化的材料制作，否则其磁化将使转子与定子间的压力非常小，不足以提供转子转动的动力。盘状磁铁由永磁材料，如钕铁硼、铁氧体等制作而成。光传输装置由光纤25和棱镜21构成；超声马达的定子与转子轴孔配合，通过磁铁和定子之间的磁力提供超声马达的预压力，从而使得定子可以驱动转子进行转动。在陶瓷、定子、铝柱和磁铁中间都打了通孔，以供光纤从此通孔中穿入，一直到棱镜处。The structure of an embodiment of the ultrasonic motor-based micro-optical transmission and scanning device of the present invention is shown in FIG. 2 . It includes an ultrasonic motor with a through hole in the stator and a rotor, and an optical transmission device closely connected with it. The stator of the ultrasonic motor in the present embodiment is made of
本实施例的光纤可以和定子相对固定，光纤端头和转子不直接接触，可以不需要转动，从光纤出射的光通过空气传到棱镜再折反射到侧面光。随着转子的转动，带动棱镜转动，使得光对侧面四周进行环形扫描。扫描的光点可以是聚焦的或是不聚焦的，这可以通过光纤端面或棱镜实现。棱镜可做成聚焦型的(如图2中所示，其中棱镜一个直角面胶合上成像透镜或做成凸形或其他形状，使之有聚焦成像、准直功能)，也可制作成不聚焦型的，光纤端面可作成凸的，从而提供聚焦功能。以适应不同的需要。此装置与外界的接口，即光纤的另一端也可以通过光纤接口完成。The optical fiber in this embodiment can be relatively fixed to the stator, the fiber end is not in direct contact with the rotor, and there is no need to rotate. The light emitted from the optical fiber passes through the air to the prism and then refracts and reflects to the side light. With the rotation of the rotor, the prism is driven to rotate, so that the light scans circularly around the sides. The scanned light spot can be focused or unfocused, which can be achieved by fiber endfaces or prisms. The prism can be made into a focusing type (as shown in Figure 2, in which a right-angled surface of the prism is glued to an imaging lens or made into a convex shape or other shapes, so that it has the functions of focusing imaging and collimation), or it can be made into a non-focusing Type, the end face of the fiber can be made convex to provide focusing function. to suit different needs. The interface between this device and the outside world, that is, the other end of the optical fiber can also be completed through the optical fiber interface.
用于控制驱动超声马达的电导线是从陶瓷的底面接出的，和光纤的路径一样，不会影响转子的转动。由于超声马达的尺寸可以做得很小(直径1mm以下)，因而这是一个基于微机电系统的光扫描微型装置。The electric wires used to control and drive the ultrasonic motor are connected from the bottom surface of the ceramic, which is the same as the path of the optical fiber and will not affect the rotation of the rotor. Since the size of the ultrasonic motor can be made very small (less than 1mm in diameter), it is a light-scanning micro-device based on micro-electro-mechanical systems.
本实施例的光纤外径为125微米，从压电陶瓷的底面光纤导入口28插入(参见图2)，直至棱镜和磁铁的交界面。将光纤粘合于定子及压电陶瓷的通孔(直径300微米)中，棱镜的另一直角边，胶合一平凸透镜，使得光纤出射的光，经棱镜斜面反射后，聚焦于侧面3mm处(图中26为光出射方向)。整个装置直径为1mm。The outer diameter of the optical fiber in this embodiment is 125 microns, and it is inserted from the
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| Publication number | Priority date | Publication date | Assignee | Title |
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| DE102006038787A1 (en) * | 2006-08-18 | 2008-02-21 | Oc Oerlikon Balzers Ag | Mirror drive for projection systems |
| CN101170289B (en) * | 2007-09-26 | 2010-09-01 | 哈尔滨工业大学 | Pre-pressure device of magnetic force pressure enforcement and micro face ultrasonic electromotor based on this device |
| US9743020B2 (en) | 2010-03-23 | 2017-08-22 | California Institute Of Technology | Super resolution optofluidic microscopes for 2D and 3D imaging |
| US9643184B2 (en) | 2010-10-26 | 2017-05-09 | California Institute Of Technology | e-Petri dishes, devices, and systems having a light detector for sampling a sequence of sub-pixel shifted projection images |
| US9569664B2 (en) | 2010-10-26 | 2017-02-14 | California Institute Of Technology | Methods for rapid distinction between debris and growing cells |
| US9343494B2 (en) * | 2011-03-03 | 2016-05-17 | California Institute Of Technology | Light guided pixel configured for emissions detection and comprising a guide layer with a wavelength selective filter material and a light detector layer |
| JP6028400B2 (en) * | 2012-06-04 | 2016-11-16 | セイコーエプソン株式会社 | Image display device and head mounted display |
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