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CN1255869C - Fault Location Method of Scan Chain in Logic Integrated Circuit - Google Patents

Fault Location Method of Scan Chain in Logic Integrated Circuit Download PDF

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CN1255869C
CN1255869C CN 03119376 CN03119376A CN1255869C CN 1255869 C CN1255869 C CN 1255869C CN 03119376 CN03119376 CN 03119376 CN 03119376 A CN03119376 A CN 03119376A CN 1255869 C CN1255869 C CN 1255869C
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scan chain
integrated circuit
logic integrated
fault location
fault
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CN1531046A (en
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李俊
任志彬
杨明昌
陈宏杰
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United Microelectronics Corp
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Abstract

For each corresponding scan chain set in a plurality of logic integrated circuits with the same configuration, a plurality of initial value vectors related to an inverter are extracted. And comparing the initial value vectors in the same corresponding scan chain set with each other to confirm elements with fixed values in the initial value vectors. When the number of the elements with the fixed value reaches a predetermined percentage, the elements with the fixed value are selected as a standard pattern of the corresponding scan chain set. And comparing the initial value vector of the scan chain in the logic integrated circuit to be subjected to fault location with the standard pattern related to the scan chain so as to determine whether the scan chain in the logic integrated circuit to be subjected to fault location has a fault inverter.

Description

逻辑集成电路中扫描链的故障定位方法Fault Location Method of Scan Chain in Logic Integrated Circuit

技术领域technical field

本发明涉及一种逻辑集成电路的故障定位方法。本发明尤其涉及一种逻辑集成电路中扫描链(scan chain)的故障定位方法。The invention relates to a fault location method for logic integrated circuits. In particular, the invention relates to a method for fault location of a scan chain in a logic integrated circuit.

背景技术Background technique

为了满足计算机、通信、以及消费性电子市场的需求,半导体产业开始走向将整个复杂的系统整合到单一晶片上的发展方向。随着半导体制造技术不断地进步,单一晶片设计中所能容纳的逻辑闸总数也不断地增加。可以预见的是,这样的趋势在未来的几年仍然会持续下去。面对晶片复杂程度急剧的增加,随之而来的晶片故障分析也更加困难。In order to meet the needs of the computer, communication, and consumer electronics markets, the semiconductor industry has begun to move towards the development direction of integrating the entire complex system on a single chip. With the continuous advancement of semiconductor manufacturing technology, the total number of logic gates that can be accommodated in a single chip design is also increasing. It is foreseeable that this trend will continue in the next few years. Faced with the sharp increase in chip complexity, the accompanying chip failure analysis is also more difficult.

在逻辑集成电路的测试中,扫描是一种非常有效且故障涵盖率(fault coverage)非常高的用于测试的设计(design for test,DFT)。其可在不影响逻辑集成电路正常功能运作下,进入测试模式,利用由反向器串成的扫描链,侦测逻辑电路中的故障点。以下请参照图1,简单说明以扫描进行逻辑集成电路故障分析的方法。In the testing of logic integrated circuits, scanning is a very effective design for test (DFT) with very high fault coverage. It can enter the test mode without affecting the normal operation of the logic integrated circuit, and use the scan chain formed by the inverter to detect the fault point in the logic circuit. Referring to FIG. 1 , a method for analyzing faults of logic integrated circuits by scanning is briefly described below.

一逻辑集成电路1包含各个功能电路模块13。为了测试逻辑集成电路1可正常运作,则在逻辑集成电路1中设计多条扫描链,如图1所标示的121、122、123,扫描链是由多个反向器所组成,反向器与各个功能电路模块13连接。例如扫描链121由多个反向器1211组成,并与功能电路模块13连接。当进入测试模式时,功能电路模块13将执行的结果传递至连接的反向器1211,并随着时间周期变化将结果传递至下一反向器1211,最后输出整个扫描链的结果,如图1标示的1212、1222、1232。接着依据扫描链输出的结果比较正确的输出结果,即可判断出某一扫描链的某一反向器的输出结果不正确,将逻辑集成电路1的故障点定位出来,达到故障分析的目的。A logic integrated circuit 1 includes various functional circuit modules 13 . In order to test that the logic integrated circuit 1 can operate normally, multiple scan chains are designed in the logic integrated circuit 1, such as 121, 122, and 123 marked in Figure 1. The scan chain is composed of a plurality of inverters. It is connected with each functional circuit module 13 . For example, the scan chain 121 is composed of a plurality of inverters 1211 and connected to the functional circuit module 13 . When entering the test mode, the functional circuit module 13 transmits the execution result to the connected inverter 1211, and transmits the result to the next inverter 1211 as the time period changes, and finally outputs the result of the entire scan chain, as shown in the figure 1 marked 1212, 1222, 1232. Then, according to the correct output result of the scan chain output, it can be judged that the output result of a certain inverter of a certain scan chain is incorrect, and the fault point of the logic integrated circuit 1 is located to achieve the purpose of fault analysis.

在上述故障分析方法的运用中,必须在逻辑集成电路1中设计具有重置(set/reset)功能的重置电路11,用以将反向器的初始状态设为逻辑0或逻辑1,一般设为逻辑0。随着晶片复杂程度的增加,必须增加扫描链的数目,才能有效地将功能电路模块13中的故障点定位出来。因而,重置电路的数目也伴随着扫描链数目的增加而增加。其中有些重置电路具有特殊的功能性,然而有些重置电路则是单纯为了重置扫描链中反向器的初始值之用。这些单纯为了重置反向器初始值的重置电路占据了晶片一定的面积,使得晶片的设计无法有效地缩小,同时使得单位晶圆面积产出的晶片数较少。In the application of the above fault analysis method, a reset circuit 11 with a reset (set/reset) function must be designed in the logic integrated circuit 1 to set the initial state of the inverter to logic 0 or logic 1, generally Set to logic 0. As the complexity of the chip increases, the number of scan chains must be increased to effectively locate the fault point in the functional circuit module 13 . Therefore, the number of reset circuits also increases along with the increase in the number of scan chains. Some of the reset circuits have special functions, while some reset circuits are only used for resetting the initial values of the inverters in the scan chain. These reset circuits solely for resetting the initial value of the inverter occupy a certain area of the wafer, making the design of the wafer unable to be effectively reduced, and at the same time making the number of wafers produced per unit wafer area less.

发明内容Contents of the invention

为了克服现有技术中的不足之处,本发明的一目的为提供一种逻辑集成电路中扫描链的故障定位方法,其可有效地缩小晶片面积。In order to overcome the deficiencies in the prior art, an object of the present invention is to provide a fault location method for a scan chain in a logic integrated circuit, which can effectively reduce the chip area.

本发明的另一目的为提供一种逻辑集成电路中扫描链的故障定位方法,其可使单位晶圆面积产出较多的晶片数。Another object of the present invention is to provide a fault location method for a scan chain in a logic integrated circuit, which can produce more chips per unit wafer area.

为达上述目的,本发明提供一种逻辑集成电路中扫描链的故障定位方法,该逻辑集成电路包括至少一扫描链,该扫描链由多个反向器所组成,其特征在于:该方法包括:、。In order to achieve the above object, the present invention provides a fault location method for a scan chain in a logic integrated circuit, the logic integrated circuit includes at least one scan chain, the scan chain is composed of a plurality of inverters, characterized in that: the method includes :,.

一收集初始值步骤,该收集初始值步骤用以对于作为统计样本的多个组态相同的逻辑集成电路中的每一相对应扫描链集合撷取多个关联于反向器的初始值向量;A step of collecting initial values, the step of collecting initial values is used to retrieve a plurality of initial value vectors associated with inverters for each corresponding scan chain set in a plurality of logic integrated circuits with the same configuration as statistical samples;

一选定标准图样步骤,该选定标准图样步骤用以相互比较在同一个相对应扫描链集合中的初始值向量,以对于每一个相对应扫描链集合确认该初始值向量中具有固定值的元素,当该具有固定值的元素的数目达到一预定的百分比时,选定该具有固定值的元素作为该相对应扫描链集合的一标准图样;以及A selected standard pattern step, the selected standard pattern step is used to compare the initial value vectors in the same corresponding scan chain set with each other to confirm that the initial value vector has a fixed value for each corresponding scan chain set element, when the number of the elements with the fixed value reaches a predetermined percentage, select the element with the fixed value as a standard pattern of the corresponding scan chain set; and

一故障定位步骤,该故障定位步骤则是用以相互比较一欲进行故障定位的逻辑集成电路中的扫描链的初始值向量与关联于该扫描链的标准图样,借以确定该欲进行故障定位的逻辑集成电路中的该扫描链是否具有故障的反向器。A fault location step, the fault location step is used to compare the initial value vector of the scan chain in the logic integrated circuit for fault location and the standard pattern associated with the scan chain, so as to determine the fault location Whether the scan chain in the logic IC has a faulty inverter.

另外,该故障定位步骤还包含:在该欲进行故障定位的逻辑集成电路中的该扫描链被确定出具有故障的反向器时,定位出该故障的反向器。In addition, the step of locating the fault further includes: locating the faulty inverter when the scan chain in the logic integrated circuit to be faulty is determined to have a faulty inverter.

再者,该故障定位步骤还包含:在该欲进行故障定位的逻辑集成电路中的该扫描链被确定出具有故障的反向器时,参照一逻辑集成电路布局找出该故障逻辑集成电路的故障位置。Moreover, the fault location step further includes: when a faulty inverter is found in the scan chain in the logic integrated circuit to be faulty located, referring to a logic integrated circuit layout to find the faulty logic integrated circuit fault location.

依本发明的逻辑集成电路中扫描链的故障定位方法,不需要在逻辑集成电路中设计多余的重置电路,同时逻辑集成电路的故障分析定位仍保有极高的准确度。因此可有效地缩小单一晶片的面积,并使单位晶圆面积可产出较多的晶片数。According to the fault location method of the scan chain in the logic integrated circuit of the present invention, there is no need to design redundant reset circuits in the logic integrated circuit, and at the same time, the fault analysis and location of the logic integrated circuit still maintains extremely high accuracy. Therefore, the area of a single wafer can be effectively reduced, and a larger number of wafers can be produced per unit wafer area.

附图说明Description of drawings

图1显示现有技术中的逻辑集成电路的组态的示意图。FIG. 1 shows a schematic diagram of the configuration of a logic integrated circuit in the prior art.

图2显示依据本发明的逻辑集成电路中扫描链的故障定位方法的流程图。FIG. 2 shows a flowchart of a fault location method for a scan chain in a logic integrated circuit according to the present invention.

图3显示依据本发明的逻辑集成电路的组态的示意图。FIG. 3 shows a schematic diagram of the configuration of a logic integrated circuit according to the present invention.

图4显示作为统计样本的多个逻辑集成电路分布于单一晶圆及不同晶圆上的示意图。FIG. 4 shows a schematic diagram of a plurality of logic integrated circuits distributed on a single wafer and different wafers as a statistical sample.

组件符号说明:Description of component symbols:

1                           已知的逻辑集成电路1 Known logic integrated circuits

11                          重置电路11 Reset circuit

121、122、123               扫描链121, 122, 123 scan chain

1211、1221、1231            反向器1211, 1221, 1231 Inverter

1212、1222、1232            扫描链的输出1212, 1222, 1232 Scan chain output

13                          功能电路模块13 Functional circuit module

3                           本发明的逻辑集成电路3 The logic integrated circuit of the present invention

311、312、313               扫描链311, 312, 313 scan chain

3111~3116                  反向器3111~3116 Inverter

32                          功能电路模块32 Functional circuit module

33                          初始值向量33 Initial value vector

41、42                      晶圆41, 42 Wafer

411、421、422、423               晶片411, 421, 422, 423 wafers

S21                              收集初始值步骤S21 Collect initial value step

S22                              选定标准图样步骤S22 Select standard drawing steps

S23                              故障定位步骤S23 Fault location steps

具体实施方式Detailed ways

以下将参照附图,说明依本发明较佳实施例的逻辑集成电路中扫描链的故障定位方法,其中相同的组件将以相同的参照符号加以说明。The method for locating a scan chain fault in a logic integrated circuit according to a preferred embodiment of the present invention will be described below with reference to the accompanying drawings, wherein the same components will be described with the same reference symbols.

请参照图2,显示依据本发明的逻辑集成电路中扫描链的故障定位方法,其中逻辑集成电路包含至少一扫描链,每一扫描链由多个反向器组成。该方法包括:一收集初始值步骤S21、一选定标准图样步骤S22、以及一故障定位步骤S23。Please refer to FIG. 2 , which shows a fault location method for a scan chain in a logic integrated circuit according to the present invention, wherein the logic integrated circuit includes at least one scan chain, and each scan chain is composed of a plurality of inverters. The method includes: a step S21 of collecting initial values, a step S22 of selecting a standard pattern, and a step S23 of fault location.

收集初始值步骤S21对于作为统计样本的多个组态相同的逻辑集成电路中的每一相对应扫描链集合撷取关联于反向器的初始值向量。举例而言,请参照图3,显示在统计样本中的一逻辑集成电路3,其包含多条扫描链311、312、与313以及多个功能电路模块32。扫描链311由6个反向器3111、3112、3113、3114、3115、与3116所组成。反向器3111、3112、3113、3114、3115、与3116的初始值按照扫描时钟的周期从逻辑集成电路3中读出。举例而言,扫描链311中的反向器3111、3112、3113、3114、3115、与3116的初始值按照扫描时钟的周期经由反向器3116输出。在此种情况下,最先输出的为反向器3116的初始值、然后依序为反向器3115、3114、3113、3112、与3111的初始值。举例而言,如图3所示,扫描链311的初始值向量(initial state vector)33为010101,其代表扫描链311中的反向器3111、3112、3113、3114、3115、与3116的初始值。同理,经过基于扫描链312与313的反向器数目所决定的特定的时间周期后,可分别获得扫描链312与313的关联于反向器的初始值向量。The initial value collection step S21 retrieves an initial value vector associated with an inverter for each corresponding scan chain set in a plurality of logic integrated circuits with the same configuration as a statistical sample. For example, please refer to FIG. 3 , which shows a logic integrated circuit 3 in a statistical sample, which includes a plurality of scan chains 311 , 312 , and 313 and a plurality of functional circuit modules 32 . The scan chain 311 is composed of six inverters 3111 , 3112 , 3113 , 3114 , 3115 , and 3116 . The initial values of the inverters 3111, 3112, 3113, 3114, 3115, and 3116 are read from the logic integrated circuit 3 according to the cycle of the scan clock. For example, the initial values of the inverters 3111 , 3112 , 3113 , 3114 , 3115 , and 3116 in the scan chain 311 are output through the inverter 3116 according to the period of the scan clock. In this case, the initial value of the inverter 3116 is first output, and then the initial values of the inverters 3115 , 3114 , 3113 , 3112 , and 3111 are output sequentially. For example, as shown in FIG. 3 , the initial state vector 33 of the scan chain 311 is 010101, which represents the initial states of the inverters 3111, 3112, 3113, 3114, 3115, and 3116 in the scan chain 311. value. Similarly, after a specific time period determined based on the number of inverters of the scan chains 312 and 313 , the initial value vectors associated with the inverters of the scan chains 312 and 313 can be obtained respectively.

如前所述,在本发明中使用多个组态相同的逻辑集成电路作为统计样本。举例而言,图4显示多个相同组态的逻辑集成电路,其中每一个以一矩形格来代表。该多个组态相同的逻辑集成电路可形成于不同晶圆上(例如晶圆41的晶片411以及晶圆42的晶片421),或者形成于同一晶圆的不同位置上(例如晶圆42的晶片421、422、与423)。在此多个相同组态的逻辑集成电路中的多条扫描链可归类为多个相对应扫描链集合。收集初始值步骤S21针对每一矩形格中的每一扫描链撷取初始值向量,并且将属于同一个相对应扫描链集合中的初始值向量归类在一起,以便进行后续的步骤。As mentioned above, multiple logic integrated circuits with the same configuration are used as statistical samples in the present invention. For example, FIG. 4 shows a plurality of logic integrated circuits of the same configuration, each of which is represented by a rectangle. The plurality of logical integrated circuits with the same configuration can be formed on different wafers (such as wafer 411 of wafer 41 and wafer 421 of wafer 42), or formed on different locations of the same wafer (such as wafer 42 of wafer 42). wafers 421, 422, and 423). The plurality of scan chains in the plurality of logic integrated circuits with the same configuration can be classified into a plurality of corresponding scan chain sets. The initial value collection step S21 retrieves initial value vectors for each scan chain in each grid, and classifies the initial value vectors belonging to the same set of corresponding scan chains together for subsequent steps.

选定标准图样步骤S22从收集初始值步骤S21所收集的初始值向量中,相互比较在同一个相对应扫描链集合中的初始值向量,以确认初始值向量中具有固定值(逻辑0或逻辑1)的元素。理论上,在同一个相对应扫描链集合中的初始值向量应该彼此相同。然而,由于在集成电路制造过程中所无可避免的制造过程变动,在同一个相对应扫描链集合中的初始值向量实际上并非完全相同。因此,选定标准图样步骤S22利用统计的方式,对于每一个相对应扫描链集合确认初始值向量中的具有固定值的元素的位置及数目。当这些具有固定值的元素的数目达到一具有统计上意义的数值时,此等具有固定值的元素可用以代表关联于该扫描链的初始值向量。在下文中,此具有代表性的初始值向量称为标准图样(golden pattern)。The selected standard pattern step S22 compares the initial value vectors in the corresponding scan chain set with each other from the initial value vectors collected in the initial value collection step S21 to confirm that there is a fixed value (logic 0 or logic 0 in the initial value vector) 1) Elements. Theoretically, the initial value vectors in the same set of corresponding scan chains should be identical to each other. However, due to unavoidable manufacturing process variations in the integrated circuit manufacturing process, the initial value vectors in the same set of corresponding scan chains are actually not exactly the same. Therefore, the step S22 of selecting a standard pattern uses a statistical method to determine the position and number of elements with fixed values in the initial value vector for each corresponding scan chain set. When the number of the elements with fixed values reaches a statistically significant value, the elements with fixed values can be used to represent the initial value vector associated with the scan chain. In the following, this representative vector of initial values is called the golden pattern.

故障定位步骤S23则是将一欲进行故障定位的逻辑集成电路中的扫描链的初始值与关联于该扫描链的标准图样相互比较,借以确定该欲进行故障定位的逻辑集成电路中扫描链是否具有故障的反向器。在该欲进行故障定位的逻辑集成电路中扫描链被确定出具有故障的反向器时,该故障定位步骤S23同时可定位出该故障的反向器。The fault location step S23 is to compare the initial value of the scan chain in a logic integrated circuit to be fault located with the standard pattern associated with the scan chain, so as to determine whether the scan chain in the logic integrated circuit to be fault located is Faulty inverter. When a faulty inverter is identified in the scan chain in the logic integrated circuit to be fault located, the fault location step S23 can also locate the faulty inverter.

为使本发明的逻辑集成电路中扫描链的故障定位方法更容易了解,今举一实例加以说明。如下表1所示,假设有一逻辑集成电路,其中包含扫描链A、B、与C等等,并且用以组成扫描链A、B、与C的反向器数目分别为1045、900、与2000。依据本发明的方法,首先按照收集初始值步骤,以自动测试设备(Automatic Test Equipment,ATE)对于多个相同组态的逻辑集成电路收集扫描链A、B、与C等等的关联于反向器的初始值向量。In order to make the fault location method of the scan chain in the logic integrated circuit of the present invention easier to understand, an example is given to illustrate. As shown in Table 1 below, suppose there is a logic integrated circuit, which includes scan chains A, B, and C, etc., and the number of inverters used to form scan chains A, B, and C are 1045, 900, and 2000, respectively. . According to the method of the present invention, first according to the step of collecting the initial value, the automatic test equipment (Automatic Test Equipment, ATE) collects the scan chains A, B, and C, etc. vector of initial values for the device.

                                        表1   扫描链编号   扫描链长度   初始值向量中固定为逻辑1的元素的数目   初始值向量中固定为逻辑0的元素的数目   初始值向量中具有固定值的元素的数目   占所有元素的百分比   A   1045   501   483   984   94.2%   B   900   380   478   858   95.3%   C   2000   1120   725   1845   92.3%                   Table 1 scan chain number scan chain length number of elements in the initial value vector fixed to logical 1 Number of elements in the initial value vector fixed to logical 0 number of elements in the initializer vector with fixed values % of all elements A 1045 501 483 984 94.2% B 900 380 478 858 95.3% C 2000 1120 725 1845 92.3%

接着,按照选定标准图样步骤,相互比较在同一个相对应扫描链集合中的每一初始值向量,以确认初始值向量中具有固定值(逻辑0或逻辑1)的元素。以表1中的扫描链A为例,在扫描链A的相对应扫描链集合中,初始值向量中固定为逻辑1的元素的数目为501,且固定为逻辑0的元素的数目为483。因此,合计初始值向量中具有固定值的元素的数目为984,占了扫描链A的初始值向量中所有元素数目的94.2%(=984/1045×100%)。倘若假设当初始值向量中具有固定值的元素的数目超过所有元素数目的90%时,此等具有固定值的元素即可用以作为关联于扫描链的标准图样,则扫描链A的标准图样即被确定出。同理,扫描链B及扫描链C的标准图样亦按照相同的方式确定出。Next, according to the step of selecting a standard pattern, each initial value vector in the same corresponding scan chain set is compared with each other to confirm elements with fixed values (logic 0 or logic 1) in the initial value vector. Taking scan chain A in Table 1 as an example, in the corresponding scan chain set of scan chain A, the number of elements fixed as logic 1 in the initial value vector is 501, and the number of elements fixed as logic 0 is 483. Therefore, the total number of elements with fixed values in the initial value vector is 984, accounting for 94.2% (=984/1045×100%) of the number of all elements in the initial value vector of scan chain A. If it is assumed that when the number of elements with fixed values in the initial value vector exceeds 90% of the number of all elements, these elements with fixed values can be used as the standard pattern associated with the scan chain, then the standard pattern of scan chain A is was identified. Similarly, the standard patterns of scan chain B and scan chain C are also determined in the same manner.

在故障定位步骤中,首先以自动测试设备收集欲进行故障定位的逻辑集成电路中扫描链的初始值向量。然后,比较欲进行故障定位的逻辑集成电路中扫描链的初始值向量与该扫描链的标准图样,借以确定该欲进行故障定位的逻辑集成电路中扫描链是否具有故障的反向器。举例而言,表2显示欲进行故障定位的扫描链的初始值向量与标准图样中的一部分。从表2可知,在第54至第59反向器中,欲进行故障定位的扫描链的初始值向量与标准图样的数值彼此相同。然而,在第50至第53反向器中,欲进行故障定位的扫描链的初始值向量的数值则不同于标准图样的数值,且欲进行故障定位的扫描链中对应于第50至第53反向器的初始值皆为逻辑0。据此可推论出第53反向器的初始值在传递至第54反向器时发生故障,使得无论第50至第53反向器的初始值为何,在经过第54反向器后皆输出为逻辑0。In the fault location step, the automatic test equipment is first used to collect the initial value vector of the scan chain in the logic integrated circuit to be fault located. Then, comparing the initial value vector of the scan chain in the logic integrated circuit for fault location with the standard pattern of the scan chain, so as to determine whether the scan chain in the logic integrated circuit for fault location has a faulty inverter. For example, Table 2 shows the initial value vector and a part of the standard pattern of the scan chain for fault location. It can be known from Table 2 that in the 54th to 59th inverters, the initial value vector of the scan chain to be fault located is the same as that of the standard pattern. However, in the 50th to 53rd inverters, the value of the initial value vector of the scan chain to be fault location is different from the value of the standard pattern, and the scan chain to be fault location corresponds to the 50th to 53rd The initial values of the inverters are all logic 0. Accordingly, it can be deduced that the initial value of the 53rd inverter fails when it is passed to the 54th inverter, so that no matter what the initial values of the 50th to 53rd inverters are, they all output after passing through the 54th inverter to logic 0.

                                    表2   反向器编号   50   51   52   53   54   55   56   57   58   59   欲进行故障定位的逻辑集成电路的一扫描链的初始值向量 0 0 0 0 1 1 1 1 0 0   该扫描链的标准图样   1   1   1   1   1   1   1   1   0   0 Table 2 Inverter number 50 51 52 53 54 55 56 57 58 59 Initial value vector of a scan chain of a logic integrated circuit to be fault located 0 0 0 0 1 1 1 1 0 0 The standard pattern of the scan chain 1 1 1 1 1 1 1 1 0 0

若要进一步找出故障的原因,可参照该欲进行故障定位的逻辑集成电路的电路布局,以第53反向器至第54反向器的连接路径为起点,向外逐步找出故障的原因。故障出现的可能范围得包括第53反向器至第54反向器的连接路径,以及与该路径有等电位效应的所有金属导线。If you want to further find out the cause of the fault, you can refer to the circuit layout of the logic integrated circuit to be fault located, start from the connection path from the 53rd inverter to the 54th inverter, and gradually find out the cause of the fault . The possible range of faults must include the connection path from the 53rd inverter to the 54th inverter, and all metal wires that have an equipotential effect with this path.

依据本发明的逻辑集成电路中扫描链的故障定位方法,无须使用逻辑集成电路中的重置电路,可以有效地缩小单一晶片的面积,也使得单位晶圆可产出更多的晶片。此外,依据本发明的逻辑集成电路中扫描链的故障定位方法对于逻辑集成电路的故障分析定位有极高的准确度,能有效地将故障点定位出来。According to the fault location method of the scan chain in the logic integrated circuit of the present invention, there is no need to use a reset circuit in the logic integrated circuit, the area of a single chip can be effectively reduced, and more chips can be produced per unit wafer. In addition, the fault location method of the scan chain in the logic integrated circuit according to the present invention has extremely high accuracy for the fault analysis and location of the logic integrated circuit, and can effectively locate the fault point.

以上所述仅为举例性,而非为限制性者。任何熟悉该项技术者均可依据上述本发明的实施例进行等效的修改,而不脱离其精神与范畴。例如,前述实施例以初始值向量中具有固定值的元素的数目超过所有元素数目的90%,作为标准图样的选用条件。然而,任何熟悉该项技术者可依据制造过程的条件或稳定性,或是逻辑集成电路的设计,调整其比例为80%或99%。另外,针对单一逻辑集成电路需监视几条扫描链,亦可依人力、逻辑集成电路的复杂度、制造的困难性等因素作适当的调整。故任何未脱离本发明的精神与范畴,而对其进行的等效修改或变更,均应包含于本发明的权利要求中。The above descriptions are illustrative only, not restrictive. Anyone skilled in the art can make equivalent modifications based on the above-mentioned embodiments of the present invention without departing from its spirit and scope. For example, in the foregoing embodiments, the number of elements with fixed values in the initial value vector exceeds 90% of all elements, as the selection condition for the standard pattern. However, anyone skilled in the art can adjust the ratio to 80% or 99% according to the conditions or stability of the manufacturing process, or the design of the logic integrated circuit. In addition, several scan chains need to be monitored for a single logic integrated circuit, and appropriate adjustments can be made according to factors such as manpower, complexity of the logic integrated circuit, and manufacturing difficulty. Therefore, any equivalent modification or change without departing from the spirit and scope of the present invention shall be included in the claims of the present invention.

Claims (6)

1.一种逻辑集成电路中扫描链的故障定位方法,该逻辑集成电路包括多条扫描链,该扫描链由多个反向器所组成,其特征在于:该方法包含:1. A method for fault location of a scan chain in a logic integrated circuit, the logic integrated circuit includes a plurality of scan chains, the scan chain is made up of a plurality of inverters, it is characterized in that: the method includes: 一收集初始值步骤,用以利用一自动测试设备对于作为统计样本的多个组态相同的逻辑集成电路中的每一相对应扫描链集合撷取多个关联于反向器的初始值向量;A step of collecting initial values, for using an automatic test equipment to retrieve a plurality of initial value vectors associated with the inverters for each corresponding scan chain set in a plurality of logic integrated circuits with the same configuration as statistical samples; 一选定标准图样步骤,用以相互比较在同一个相对应扫描链集合中的每一初始值向量,以对于每一个相对应扫描链集合确认初始值向量中的具有固定值的元素,当该具有固定值的元素的数目达到一预定的百分比时,选定该具有固定值的元素作为该相对应扫描链集合的一标准图样;以及a selected standard pattern step for comparing each initial value vector in the same set of corresponding scan chains with each other to confirm for each corresponding set of scan chains that an element with a fixed value in the initial value vector, when the selecting the element with the fixed value as a standard pattern of the corresponding scan chain set when the number of the elements with the fixed value reaches a predetermined percentage; and 一故障定位步骤,用以相互比较一欲进行故障定位的逻辑集成电路中的扫描链的初始值与关联于该扫描链的标准图样,借以确定该欲进行故障定位的逻辑集成电路中的该扫描链是否具有故障的反向器。A fault location step, which is used to compare the initial value of the scan chain in the logic integrated circuit for fault location with the standard pattern associated with the scan chain, so as to determine the scan in the logic integrated circuit for fault location Whether the chain has a faulty inverter. 2.如权利要求1所述的逻辑集成电路中扫描链的故障定位方法,其特征在于:该初始值向量由储存于该多个反向器中的每一个的数据所排列而成,该数据为逻辑0或逻辑1。2. The fault location method for scan chains in logic integrated circuits as claimed in claim 1, wherein the initial value vector is arranged by data stored in each of the plurality of inverters, and the data to logic 0 or logic 1. 3.如权利要求1所述的逻辑集成电路中扫描链的故障定位方法,其特征在于:该欲进行故障定位的逻辑集成电路中的扫描链的初始值是由一自动测试设备收集而得。3. The method for fault location of a scan chain in a logic integrated circuit as claimed in claim 1, wherein the initial value of the scan chain in the logic integrated circuit to be fault located is collected by an automatic test equipment. 4.如权利要求1所述的逻辑集成电路中扫描链的故障定位方法,其特征在于:该故障定位步骤还包含:4. The fault location method of scan chain in the logic integrated circuit as claimed in claim 1, is characterized in that: this fault location step also comprises: 在该欲进行故障定位的逻辑集成电路中的该扫描链被确定出具有故障的反向器时,定位出该故障的反向器。When the scan chain in the logic integrated circuit to be fault located is determined to have a faulty inverter, the faulty inverter is located. 5.如权利要求1所述的逻辑集成电路中扫描链的故障定位方法,其特征在于:该故障定位步骤还包含:5. The fault location method of scan chain in logic integrated circuit as claimed in claim 1, is characterized in that: this fault location step also comprises: 在该欲进行故障定位的逻辑集成电路中的该扫描链被确定出具有故障的反向器时,参照一逻辑集成电路布局找出该故障逻辑集成电路的故障位置。When the scan chain in the logic integrated circuit to be fault located is determined to have a faulty inverter, a fault location of the faulty logic integrated circuit is found by referring to a logic integrated circuit layout. 6.如权利要求5所述的逻辑集成电路中扫描链的故障定位方法,其特征在于:该故障逻辑集成电路的故障位置的范围包括该故障的反向器与该故障逻辑集成电路的连接路径以及所有与该故障的反向器相关的所有金属导线。6. The fault location method of the scan chain in the logic integrated circuit as claimed in claim 5, characterized in that: the scope of the fault location of the fault logic integrated circuit includes the connection path between the inverter of the fault and the fault logic integrated circuit And all the metal wires associated with that faulty inverter.
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