CN119426723A

CN119426723A - A square workpiece cutting system and cutting method based on laser height measurement

Info

Publication number: CN119426723A
Application number: CN202510031983.3A
Authority: CN
Inventors: 李艳丽; 余胡平; 孟繁滨; 赵博; 刘宏文; 王晓铎; 欧阳仲宇; 刘雪飞
Original assignee: Shenyang Heyan Technology Co Ltd
Current assignee: Shenyang Heyan Technology Co Ltd
Priority date: 2025-01-09
Filing date: 2025-01-09
Publication date: 2025-02-14
Anticipated expiration: 2045-01-09
Also published as: CN119426723B

Abstract

The present invention relates to the field of chip cutting technology, and provides a square workpiece cutting system and a cutting method based on laser height measurement. By measuring the height of a specified position of a workpiece, the fitting surface information of the workpiece can be accurately restored, thereby compensating the height of cutting components at different positions, and the height of any position point is calculated by interpolation based on the fitting surface information, so that the height of some position points can be verified, thereby ensuring the cutting accuracy, and the cutting is adjusted in real time according to the surface height, ensuring the consistency of the cutting depth, and minimizing the generation of cutting waste, thereby saving costs, and after the verification meets the requirements, there is no need to continue the verification, thereby achieving subsequent direct cutting, which is beneficial to improving the cutting efficiency.

Description

Square workpiece cutting system and cutting method based on laser height measurement

Technical Field

The invention relates to the technical field of chip cutting, in particular to a square workpiece cutting system and method based on laser height measurement.

Background

The dicing machine table is one of the important mechanisms of the dicing machine, and is mainly used as a carrier for wafers to be diced. The dicing saw cuts the wafer by a dicing blade at a height above the dicing blade, and the distance between the dicing blade and the dicing blade table determines the final cutting depth.

For a workpiece which does not need to be completely cut (half cut), the precision of a scribing workbench for bearing the workpiece has a height difference of 0-50 microns, and meanwhile, the thickness of each area of the workpiece can have a height difference of tens of microns, but the height of a cutting blade is fixed, so that the depth of cutting into the workpiece cannot be accurately controlled, and the final cutting precision is affected.

Disclosure of Invention

The invention aims to provide a square workpiece cutting system and a square workpiece cutting method based on laser height measurement, which are used for solving the problem that the cutting precision of a workpiece cannot be ensured due to the fact that a cutter head is fixed when the workpiece needing to be half-cut is cut.

In a first aspect, an embodiment of the present invention provides a square workpiece cutting system based on laser height measurement, for half-cutting the square workpiece, including:

the cutting device comprises at least one group of cutting working tables, a cutting device and a cutting device, wherein the cutting working tables are used for placing square workpieces to be cut, rectangular objective tables used for adsorbing the square workpieces are arranged on the cutting working tables, and the cutting working tables move in a feeding mode along the X-axis direction;

the cutting assembly moves in a feeding manner along the Y-axis direction and is used for cutting the square workpiece;

The laser ranging module is arranged above the cutting workbench and is used for carrying out laser height measurement on the square workpiece;

The control module is electrically connected with the laser ranging module, the cutting workbench and the cutting assembly, and is configured to obtain the height information of a plurality of sampling points, acquired by the laser ranging module, of the surface of the square workpiece along the cutting direction, fit the height information of the sampling points according to the height information of the sampling points to obtain fitting surface information of the workpiece, take verification points at a plurality of positions on the surface of the square workpiece, conduct interpolation calculation on the positions of the verification points according to fitting surface information of the workpiece to obtain fitting height information of the verification points, verify whether the difference value between the fitting height information of the verification points and the actual height information is within an expected cutting depth fluctuation range, and determine whether to adjust the sampling points according to a verification result, wherein the sampling points are located on straight lines parallel to or perpendicular to the cutting direction, straight lines connecting any two adjacent sampling points parallel to or perpendicular to the cutting direction are the fitting surface information of the workpiece, and the obtained straight line sets are the fitting surface information of the workpiece.

Optionally, performing interpolation calculation on the position where the verification point is located according to the fitting surface information of the workpiece to obtain fitting height information of the verification point, including:

And determining a straight line formed by connecting any two adjacent sampling points which are parallel or perpendicular to the cutting direction, and taking the height corresponding to the verification point on the straight line as a fitting height value, so as to obtain fitting height information of the verification point.

Optionally, the heights of the plurality of sampling points are obtained by means of fixed point measurement, the plurality of sampling points are arranged along the X-axis direction and are equally arranged along the Y-axis direction, and the verification point is positioned at the midpoint of two adjacent sampling points along the X-axis direction and at the midpoint of two adjacent sampling points along the Y-axis direction.

Optionally, verifying whether the difference between the fitting height information and the actual height information of the verification points is within the expected cutting depth fluctuation range comprises:

If the difference value between the fitting height information of the N verification points on the square workpiece and the corresponding real height information is all within the expected cutting depth fluctuation range, the cutting precision of the square workpiece is indicated to meet the requirement, and if the difference value between the fitting height information of the N verification points on the square workpiece and the corresponding real height information exceeds the expected cutting depth fluctuation range, the cutting is stopped, the number of sampling points is increased again, and the sampling points are verified again for N times until the N times of verification meet the precision requirement;

If the continuous M square workpieces in a batch of incoming materials pass verification, the cutting precision of the batch of the incoming materials on the surface meets the requirement, and the subsequent square workpieces are directly cut, wherein the real height information of the verification point is obtained in advance through a laser ranging module or obtained through other measuring tools after cutting.

And if the difference value of the real height information corresponding to any verification point and the fitting height information exceeds the expected cutting depth fluctuation range, stopping cutting and re-increasing the number of the sampling points and re-verifying for N times until the verification of N times meets the precision requirement, and if a batch of incoming materials passes through the verification of continuous M square workpieces, the cutting precision of the batch of incoming materials meets the requirement, and the subsequent square workpieces are directly cut, wherein the real height information of the verification point is obtained in advance through a laser ranging module.

The heights of the plurality of sampling points are obtained in a scanning and measuring mode of the laser ranging module, meanwhile, the actual height information of the verification points is obtained through scanning, and verification is carried out through comparison of the actual height information of the verification points and fitting height information of the verification points;

if the difference between the actual height information of the verification point and the fitting height information of the verification point at the corresponding position of the fitting surface information exceeds the expected cutting depth fluctuation range, the number of sampling points and the distance between two adjacent sampling points need to be re-determined.

Optionally, the laser ranging module is connected with the cutting assembly through a connecting piece and synchronously moves along with the cutting assembly, or is connected with a Y-axis driving module arranged on the top of the base.

Optionally, the square workpiece cutting system based on laser height measurement further comprises an image detection module, wherein the image detection module is connected with a Y-axis driving module arranged at the top of the base and used for automatically aligning or checking cutting conditions of the square workpiece.

Optionally, the cutting work platform is two sets of, two sets of the cutting work platform is along Y axle direction setting side by side, and share image detection module with laser rangefinder module.

Optionally, the expected cutting depth of the square workpiece is 100-150 microns, and the fluctuation range of the expected cutting depth is required to be-15 microns.

In a second aspect, an embodiment of the present invention provides a method for cutting a square workpiece based on laser altimetry, based on the system for cutting a square workpiece based on laser altimetry according to the first aspect, where the method for cutting a square workpiece includes:

S100, acquiring the reference plane height of a cutting workbench;

s200, acquiring heights of a plurality of sampling points of the surface of the square workpiece arranged on the cutting workbench along the cutting direction;

S300, fitting according to the heights of the sampling points to obtain fitting surface information of the workpiece;

S400, taking verification points at a plurality of positions on the surface of the square workpiece, and carrying out interpolation calculation on the positions of the verification points according to the fitting surface information of the workpiece to obtain fitting height information of the verification points;

S500, verifying whether the difference value between the actual height information of the verification point and the fitting height information is within the expected cutting depth fluctuation range, and determining whether to adjust the sampling point according to the verification result.

The embodiment of the invention has at least the following technical effects:

According to the square workpiece cutting system and the square workpiece cutting method based on laser height measurement, the fitting surface information of the workpiece can be accurately restored by measuring the height of the designated position of the workpiece, so that the heights of cutting assemblies at different positions are compensated, the heights of any position points are calculated through interpolation according to the fitting surface information, the heights of part of the position points can be verified, the cutting precision is ensured, the cutting is adjusted in real time according to the surface heights, the consistency of the cutting depth is ensured, the generation of cutting waste products can be reduced as much as possible, the cost is saved, the follow-up verification is not needed after the verification meets the requirement, the follow-up direct cutting is realized, and the cutting efficiency is improved.

Drawings

In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings that are needed in the description of the embodiments or the prior art will be briefly described, and it is obvious that the drawings in the description below are some embodiments of the present invention, and other drawings can be obtained according to the drawings without inventive effort for a person skilled in the art.

FIG. 1 is a schematic diagram of the overall structure of a square workpiece cutting system based on laser altimetry according to an embodiment of the present invention;

FIG. 2 is a schematic diagram of a partial structure of a square workpiece cutting system based on laser altimetry according to an embodiment of the present invention;

fig. 3 is a schematic structural diagram of a cutting table of a square workpiece cutting system based on laser height measurement according to an embodiment of the present invention;

FIG. 4 is a schematic diagram of coordinates of a sampling point selected by a square workpiece cutting system based on laser altimetry according to an embodiment of the present invention;

fig. 5 is a schematic diagram of workpiece fitting surface information obtained by fitting sampling points on a square workpiece surface according to an embodiment of the invention;

FIG. 6 is a schematic diagram of the surface information of the workpiece fitting after interpolation calculation of FIG. 5 according to an embodiment of the present invention;

FIG. 7 is a schematic diagram of a cutting line of a verification point obtained by calculating a difference value of a surface of a square workpiece according to an embodiment of the present invention;

fig. 8 is a schematic diagram of a single rectangular unit in workpiece fitting surface information obtained by fitting sampling points on a square workpiece surface according to an embodiment of the invention;

FIG. 9 is a schematic connection diagram of a control module of a square workpiece cutting system based on laser altimetry according to an embodiment of the present invention;

Fig. 10 is a flowchart of a method for cutting a square workpiece based on laser altimetry according to an embodiment of the present invention.

Icon:

100-cutting workbench, 110-datum plane, 200-cutting assembly, 300-laser ranging module, 400-image detection module, 500-square workpiece, 510-sampling point, 520-interpolation cutting line in Y axis direction, 530-interpolation cutting line in X axis direction and 600-control unit.

Detailed Description

The technical solutions of the present invention will be clearly and completely described in connection with the embodiments, and it is apparent that the described embodiments are some embodiments of the present invention, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.

It will be understood by those skilled in the art that all terms (including technical and scientific terms) used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs unless defined otherwise. It will be further understood that terms, such as those defined in commonly used dictionaries, should be interpreted as having a meaning that is consistent with their meaning in the context of the prior art and will not be interpreted in an idealized or overly formal sense unless expressly so defined herein.

As used herein, the singular forms "a", "an", "the" and "the" are intended to include the plural forms as well, unless expressly stated otherwise, as understood by those skilled in the art. It will be further understood that the terms "comprises" and/or "comprising," when used in this specification, specify the presence of stated features, integers, steps, operations, elements, and/or components, but do not preclude the presence or addition of one or more other features, integers, steps, operations, elements, components, and/or groups thereof. The term "and/or" as used herein includes all or any element and all combination of one or more of the associated listed items.

Referring to fig. 1 to 9, an embodiment of the present invention provides a square workpiece cutting system based on laser height measurement, which is used for half-cutting the square workpiece 500, and the half-cutting is that the square workpiece 500 does not need to be completely cut through, but only needs to be cut into a certain depth. The square workpiece cutting system mainly comprises at least one group of cutting workbench 100, cutting assembly 200, laser ranging module 300 and control unit 600.

The cutting workbench 100 is used for placing a square workpiece 500 to be cut, a rectangular object stage for adsorbing the square workpiece 500 is arranged on the cutting workbench 100, and the cutting workbench 100 moves in a feeding mode along the X-axis direction. Alternatively, the cutting tables 100 may be two sets, and the two sets of cutting tables 100 are arranged side by side along the Y-axis direction, and the two sets of cutting tables 100 may share the image detection module 400 and the laser ranging module 300, thereby contributing to space saving and cost reduction of parts.

It should be noted that, in the embodiment of the present invention, the expected cutting depth of the square workpiece 500 is between 100 micrometers and 150 micrometers, and the fluctuation range of the expected cutting depth is between-15 micrometers and +15 micrometers, so that the cutting precision needs to be strictly controlled to meet the cutting requirement.

The cutting assembly 200 is advanced in the Y-axis direction for cutting the square workpiece 500 along the cutting path. The cutting assembly 200 in the embodiment of the invention is a pair of cutting spindles, and the pair of cutting spindles can synchronously cut, so that the cutting efficiency is improved. At the initial stage of verification, only one of the cutting spindles can be used for cutting, so that the scrapping problem caused by the fact that the verification does not meet the precision requirement is avoided.

The laser ranging module 300 is disposed above the cutting workbench 100, and is configured to perform laser altimetry on the square workpiece 500, and the laser ranging module 300 is configured to determine a distance of a surface to be measured according to a time difference between the emission and the reception by emitting laser, so that the depth in a micro gap (cutting channel) can be measured due to higher laser precision, thereby realizing verification of the cutting depth, and avoiding product rejection caused by unsatisfied requirements found after all cutting is completed. The height measurement is performed by first performing the height measurement on the reference surface 110 of the cutting table 100 and then performing the height measurement on the surface of the square workpiece 500, so that the thickness of the square workpiece 500 can be reflected at intervals.

The control module is electrically connected to the laser ranging module 300, the cutting table 100, and the cutting assembly 200, and is configured to obtain height information of a plurality of sampling points 510 along the cutting direction on the surface of the square workpiece 500 collected by the laser ranging module 300 (the distribution of the sampling points 510 is shown in fig. 4), and fit the obtained workpiece fitting surface information according to the height information of the plurality of sampling points 510 (as shown in fig. 5), and after obtaining the workpiece fitting surface information, compensate the cutting depth based on the workpiece fitting surface information, so as to ensure consistency of the cutting depths at different positions. The control unit 600 further obtains fitting height information (as shown in fig. 6) of the verification points by taking verification points at a plurality of positions on the surface of the square workpiece 500 and performing interpolation calculation on the positions of the verification points according to fitting surface information of the workpiece, verifies whether the difference value between the fitting height information of the verification points and actual height information is within an expected cutting depth fluctuation range, and determines whether to adjust sampling points according to verification results.

The sampling points 510 are located on a straight line parallel or perpendicular to the cutting direction, and connect any two adjacent sampling points 510 parallel or perpendicular to the cutting direction, so that the obtained set of straight lines is the fitting surface information of the workpiece, and the verification point is a certain point (may be a midpoint or other position points) on the straight line connecting any two sampling points 510 parallel or perpendicular to the cutting direction. The sampling point 510 can be selected in a direction parallel to or perpendicular to the cutting direction, so that the cutting accuracy requirement is met on the premise that the sampling point 510 is as few as possible, the sampling point 510 is reduced to help to improve the sampling efficiency, the subsequent interpolation calculation result is easy to obtain, and the calculation result can more accurately simulate the height of the surface where the cutting channel is located.

Optionally, the specific calculation method of the interpolation calculation is as follows, any two sampling points 510 parallel or perpendicular to the cutting direction are connected through a straight line, and the height corresponding to the verification point on the straight line is taken as the fitting height, so that the fitting height information of the verification point is obtained. For example, in a cutting direction parallel to the X-axis direction (without considering the Y-axis), two sampling points 510 are connected to obtain a straight line, a straight line equation of the straight line is obtained according to the coordinates of the two sampling points 510, the fitting height value corresponding to the verification point can be obtained by substituting the X-axis coordinate of the corresponding verification point, and fitting height information corresponding to the verification point is obtained according to the fitting height value.

Optionally, after selection, the sampling points 510 may also perform self-verification, taking the smallest rectangular unit (non-rectangular plane) in fig. 5 as an example, referring to fig. 8, A, B, C, D in the drawing respectively represents four sampling points, where the midpoint between AB is E, the midpoint between BC is F, the midpoint between CD is G, and the midpoint between DA is H, where the intersection point of the XY projection plane where the connection line of EG and the connection line of HF are located, different fitting height values exist, so that by verifying whether the difference value of the fitting heights of the same coordinate point on the connection line of EG and the connection line of HF is within the cutting fluctuation range, if the requirement is met, the result of calculating the difference value and the value of the sampling point are proved to meet the requirement, otherwise, the fitting result of workpiece fitting surface information is proved to be inaccurate, so that the number and the interval of the sampling points need to be adjusted, the fitting surface accuracy is improved, the actual height information of the corresponding verification point does not need to be measured, and the cutting verification efficiency is improved.

It should be noted that, in the case of cutting, assuming that EG is used as a cutting line and a line of E, G is used as a cutting straight line (inclined straight line), the height corresponding to the point E and the height corresponding to the point G are used as cutting reference bases for cutting. For example, if the cutting depth is 100 micrometers, the actual cutting path translates downwards by 100 micrometers along the height of the EG connecting line to be used as the cutting track of the cutter for compensation cutting, so that any point on the obtained cutting line meets the cutting precision requirement, i.e. the cutting depth of any point on the EG connecting line meets the cutting depth requirement of 100 micrometers. Optionally, interpolation calculation is performed according to the fitting surface information of the workpiece obtained by fitting in fig. 5, so as to obtain an interpolation cutting line 520 in the Y-axis direction and an interpolation cutting line 530 in the X-axis direction in fig. 6, and when the interpolation cutting line is cut according to the path in fig. 7, the actual height of the midpoint between any two adjacent sampling points 510 on the cutting line is measured by a measuring tool, so as to obtain a real height, and the real height can be compared with the midpoint height obtained by linear interpolation calculation, and if the difference between the real height and the midpoint height obtained by linear interpolation calculation is within the accuracy requirement range, the corresponding two sampling points are considered to be qualified sampling points.

Note that, the interpolation cut line 520 in the Y-axis direction may be regarded as a set of straight lines formed by connecting the E-point and the G-point in the Y-axis direction in fig. 8, and the interpolation cut line 530 in the X-axis direction may be regarded as a set of straight lines formed by connecting the H-point and the F-point in the X-axis direction in fig. 8. Of course, HF and EG in fig. 8 are the lines of verification points, respectively, and if they are the lines of actual cutting points, they correspond to the aforementioned cutting straight lines.

It should be noted that, the verification points may be considered as positions corresponding to interpolation points between the sampling points 510, so that more heights of the verification points can be determined through the limited sampling points 510, so that verification of the verification points is facilitated, and thus the requirement of cutting accuracy is satisfied. If the cutting depth corresponding to the verification point is within the range of the expected cutting depth, the number and the interval of the sampling points 510 can be considered to be proper, the cutting precision meets the requirement, otherwise, the cutting precision does not meet the requirement, more sampling points 510 need to be selected so as to fit the workpiece fitting surface information which is more close to the real situation, the more the sampling points 510 data of the workpiece fitting surface information are, the more the sampling points 510 data are close to the real surface, but the more the sampling points 510 data are, the fitting efficiency is affected, and the cutting efficiency is affected, so that the cutting precision is required to be considered, and the cutting efficiency is ensured.

Optionally, the verification point is a midpoint between any two sampling points 510 that are parallel or perpendicular to the cutting direction, so that accuracy of the fitting result can be verified quickly, fitting of the workpiece fitting surface information that is closer to the actual situation is easier, and particularly fitting of the height of the surface where the cutting line is located is more accurate, so that cutting accuracy is higher.

According to the square workpiece cutting system based on laser height measurement, provided by the embodiment of the invention, the fitting surface information of the workpiece can be accurately restored by measuring the height of the designated position of the workpiece, so that the heights of cutting assemblies at different positions are compensated, the heights of any position points are calculated by interpolation according to the fitting surface information, the heights of part of position points on a cutting path can be verified, so that the cutting precision is ensured, the cutting is adjusted in real time according to the surface heights, the consistency of the cutting depth is ensured, the generation of cutting wastes can be reduced as much as possible, the cost is saved, the follow-up direct cutting is realized without continuing verification after the verification meets the requirement, and the cutting efficiency is improved.

In some embodiments, the height measurement of the plurality of sampling points 510 is performed in two ways, one is fixed-point height measurement, i.e. only a partial number of measuring points are empirically selected as sampling points 510, and the other is continuous acquisition of the heights of the plurality of points along the cutting direction by scanning, and since the height data of less points are needed when fitting the workpiece surface information, then a partial point can be randomly selected as sampling points 510, and the fit is verified by the measured heights of points between sampling points 510.

The first way of locating the height measurement is specifically described below:

As shown in fig. 4 and fig. 5, the heights of the plurality of sampling points 510 are obtained by means of fixed point measurement, the plurality of sampling points 510 are arranged along the X-axis direction and are equally arranged along the Y-axis direction, the aspect ratio of the smallest rectangular unit (not necessarily rectangular plane) formed by the connecting line of the sampling points 510 along the X-axis direction and the connecting line along the Y-axis direction is close to the aspect ratio of the square workpiece 500, so that uniform division of the smallest rectangular unit is facilitated, the distribution of the sampling points 510 is more uniform, and the obtained fitting surface information of the workpiece is more accurate. Optionally, more sampling points are selected in the Y-axis direction, so that the sampling points are denser, for example, the minimum rectangular unit is close to a square, and fitting accuracy is improved.

Optionally, verifying whether the difference between the fitting height information and the actual height information of the verification point is within the expected cutting depth fluctuation range also includes two ways, wherein one verification way specifically includes:

After all cutting is completed along the cutting path, the cutting depth corresponding to the middle points of the N adjacent two sampling points 510 is verified, and if the difference values between the real height information of the N verification points on the square workpiece 500 and the corresponding real height information are all within the range of the expected cutting depth fluctuation, the cutting precision of the square workpiece 500 is indicated to meet the requirement. If the difference value between the fitting height information of the N verification points on the square workpiece and the corresponding real height information exceeds the expected cutting depth fluctuation range, stopping cutting and re-increasing the number of the sampling points and verifying again for N times until the N times of verification meet the precision requirement.

If M continuous square workpieces 500 pass verification in a batch of incoming materials, the cutting precision of the batch of incoming materials on the surface meets the requirement, and the subsequent square workpieces 500 are directly cut. The real height information of the verification point is obtained in advance through a laser ranging module or obtained through other measuring tools after cutting.

For example, taking 20 for N and 10 for M, namely taking 20 verification points on each square workpiece 500 to verify whether the cutting depth meets the precision requirement, continuously verifying 10 workpieces in the same batch of workpiece supplies, if all the workpiece supplies meet the cutting precision requirement, considering that the selection of the sampling points 510 meets the requirement, directly cutting the rest of the batch of the supplied workpiece without verification, if one workpiece fails to verify, adjusting the number and the spacing of the sampling points 510, and fitting again and verifying until the requirement is met.

Optionally, in order to reduce the generation of cutting waste, the embodiment of the present invention further provides a verification method for fitting the fixed-point measurement height to the sampling point 510, specifically:

And if the difference value between the real height information corresponding to any verification point and the fitting height information exceeds the expected cutting depth fluctuation range, stopping cutting and re-increasing the number of the sampling points 510 for re-verification for N times until the N times of verification meet the precision requirement, wherein the difference value between the real height information corresponding to the verification point and the fitting height information is within the expected cutting depth fluctuation range, the verification is repeated for N-1 times in the same way.

If all of the M continuous square workpieces 500 in a batch of incoming materials pass verification, it indicates that the cutting precision of the batch of incoming materials meets the requirement, and the subsequent square workpieces 500 can be directly cut. The real height information of the verification point can be obtained in advance through the laser ranging module, that is, the laser ranging module firstly takes a plurality of sampling points 510, a part of the sampling points are fitted to obtain fitting surface information, and the rest part is used as the verification point to verify the subsequent fitting height information.

Illustratively, N in the embodiment of the present invention may be 20, that is, the number of sampling points 510 taken before and the distance between adjacent sampling points 510 may be considered to satisfy the requirement of cutting accuracy after a total of 20 times of verification. Otherwise, if the cutting accuracy requirement is not met at a time, the cutting is stopped immediately and the number of sampling points 510 needs to be increased again to obtain fitting surface information of the workpiece which is closer to the real surface condition, and verification is restarted for N times, so that the cutting accuracy is improved. M is taken 10, namely 10 pieces of workpieces are continuously verified in the same batch of workpiece incoming materials, if all the workpiece incoming materials meet the requirement of cutting precision, the selection of the sampling points 510 is considered to meet the requirement, the rest of the workpiece in the batch of incoming materials can be directly cut without verification later, and if one piece of workpiece fails to be verified, the number and the interval of the sampling points 510 are required to be adjusted, fitting is carried out again, and verification is carried out until the requirement is met.

Optionally, after the cutting is completed, the actual height information of the verification point can be measured by a measuring tool with higher precision, so as to determine the accuracy of the verification result.

The second scan altimeter mode is specifically described below:

Optionally, the actual height information of the plurality of sampling points 510 is obtained by means of scanning measurement, and meanwhile, the height value of the middle point (verification point) between two adjacent sampling points 510 is collected, and the fitting precision of the fitting surface information of the workpiece is verified through the actual height information of the verification point between two adjacent sampling points 510.

Specifically, if the difference between the actual height of the sampling points 510 of the verification points and the height thereof at the corresponding positions of the fitting surface information exceeds the preset threshold (the range of expected cutting depth fluctuation), the number of sampling points 510 and the interval between two adjacent sampling points 510 need to be redetermined. If the cutting accuracy requirement is not exceeded, the cutting accuracy requirement is considered to be met, and the cutting is continued according to the current mode.

In some embodiments, the laser ranging module 300 is connected to the cutting assembly 200 through a connecting piece, and moves synchronously with the cutting assembly 200, that is, the laser ranging module 300 moves synchronously with the cutting assembly 200, so that the depth of the cutting path can be verified while cutting, thereby being beneficial to improving the cutting efficiency.

Optionally, the laser ranging module 300 is connected with a Y-axis driving module installed at the top of the base, and the laser ranging module 300 is driven by the Y-axis driving module to move along the Y-axis direction, so that switching between different cutting operation tables is realized, and thus, the height of the square workpiece 500 on the two cutting operation tables 100 can be measured by one laser ranging module 300 in a time-sharing manner, which is beneficial to saving the space and cost of the whole device.

In some embodiments, with continued reference to FIG. 1, the laser altimetry-based square workpiece cutting system further includes an image detection module 400, the image detection module 400 being coupled to a Y-axis drive module mounted on top of the base for acquiring surface image information of the square workpiece 500. The control unit 600 is electrically connected to the image detection module 400, and is used for performing automatic alignment or cutting condition inspection on the workpiece 500 during height measurement, for example, the cutting condition inspection includes whether the cutting mark is located at the middle of the cutting path, whether there is a mark offset, whether the mark width meets the requirement, and whether the mark breaks the edge. Optionally, a positioning mark is set on the edge of the square workpiece 500, and the image detection module 400 is used for quickly identifying the positioning mark for alignment, so that the positioning efficiency and the positioning precision are improved, and the image detection module 400 can also be used for verifying the cutting track, so that the product scrapping caused by deviation of the cutting track is avoided.

Based on the same inventive concept, as shown in fig. 10, the embodiment of the present invention further provides a method for cutting a square workpiece based on laser height measurement, based on the square workpiece cutting system of the first aspect (specific details of the cutting system are not repeated here), the method for cutting a square workpiece includes the following steps:

s100, acquiring the reference plane height of the cutting workbench 100.

Specifically, firstly, the height measurement is performed on the cutting workbench 100, the height measurement tool can adopt the laser ranging module 300, the measurement accuracy is high, and the depth of the cutting channel can be detected.

S200, the heights of a plurality of sampling points 510 along the cutting direction of the surface of the square workpiece 500 placed on the cutting table 100 are acquired.

Specifically, the sampling points 510 are selected along the cutting direction (the X-axis direction and the Y-axis direction), so that the distribution of the sampling points 510 is more uniform, thereby being beneficial to improving the accuracy of the fitting surface information of the workpiece.

S300, fitting the workpiece according to the heights of the sampling points 510 to obtain fitting surface information of the workpiece.

Specifically, the plurality of sampling points 510 along the X-axis direction and located at the same Y-axis coordinate are sequentially connected to form a broken line, the plurality of sampling points 510 along the Y-axis direction and located at the same X-axis coordinate are sequentially connected to form a broken line, fitting surface information of the workpiece can be obtained through fitting by a plurality of such broken lines, that is, the surface condition of the whole square workpiece 500 is indirectly fitted through the heights of the limited number of sampling points 510, so that the heights of different positions are favorably reflected, and the depth of the cutting tool (that is, the height of the cutting assembly 200) is compensated according to the surfaces of different heights, so that the consistency of the cutting depth is ensured.

S400, taking verification points at a plurality of positions on the surface of the square workpiece, and carrying out interpolation calculation on the positions of the verification points according to fitting surface information of the workpiece to obtain fitting height information of the verification points.

Specifically, the interpolation may result in more validation points (which may or may not be on the line of sampling points 510). In addition, the sampling point 510 may be located on the dicing street or not, and the height of the verification point located on the dicing street may be calculated by interpolation, so that the true height of the verification point can be verified after dicing along the dicing street. Optionally, the verification point may also be a midpoint between two adjacent sampling points 510, which is beneficial for improving verification accuracy.

Specifically, by comparing the difference between the actual height information of the verification point and the fitting height information, whether the cutting accuracy requirement is met is determined. When the difference between the actual height information of the verification points and the fitting height information is within the expected fluctuation range of the cutting depth, the cutting precision requirement is considered to be met, otherwise, the cutting precision requirement is considered not to be met, and the number and the spacing of the sampling points 510 are required to be adjusted (the number of the sampling points 510 is increased and the spacing is reduced), so that the fitting surface information is closer to the real situation to improve the fitting precision, and the steps are repeated until the cutting precision requirement is met.

According to the square workpiece cutting method based on laser height measurement, fitting surface information of a workpiece can be accurately restored by measuring the height of a designated position of the workpiece, and the height of any position point can be calculated through interpolation according to the fitting surface information, so that the height of part of position points located on a cutting path can be verified, cutting accuracy is guaranteed, cutting is adjusted in real time according to the surface height, consistency of cutting depth is guaranteed, cutting waste products can be reduced as much as possible, cost is saved, continuous verification is not needed after verification meets requirements, further follow-up direct cutting is achieved, and cutting efficiency is improved.

Those of skill in the art will appreciate that the various operations, methods, steps in the flow, acts, arrangements, etc. that have been discussed in the present disclosure may be interchanged, altered, combined or deleted. Further, other steps, means, or steps in a process having various operations, methods, or procedures discussed herein may be alternated, altered, rearranged, disassembled, combined, or eliminated. Further, steps, measures, schemes in the prior art with various operations, methods, flows disclosed in the present invention may also be alternated, altered, rearranged, decomposed, combined, or deleted.

In the description of the present invention, it should be understood that the terms "center," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," and the like indicate orientations or positional relationships based on the orientation or positional relationships shown in the drawings, merely to facilitate describing the present invention and simplify the description, and do not indicate or imply that the devices or elements referred to must have a specific orientation, be configured and operated in a specific orientation, and thus should not be construed as limiting the present invention.

The terms "first," "second," and the like, are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defining "a first" or "a second" may explicitly or implicitly include one or more such feature. In the description of the present invention, unless otherwise indicated, the meaning of "a plurality" is two or more.

In the description of the present invention, unless explicitly stated and limited otherwise, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally connected, directly connected, or indirectly connected through an intermediary, or may be in communication with the interior of two elements. The specific meanings of the above terms in the present invention can be understood in specific situations by those of ordinary skill in the art.

In the description of the present specification, a particular feature, structure, material, or characteristic may be combined in any suitable manner in one or more embodiments or examples. It should be understood that, although the steps in the flowcharts of the figures are shown in order as indicated by the arrows, these steps are not necessarily performed in order as indicated by the arrows. The steps are not strictly limited in order and may be performed in other orders, unless explicitly stated herein. Moreover, at least some of the steps in the flowcharts of the figures may include a plurality of sub-steps or stages that are not necessarily performed at the same time, but may be performed at different times, the order of their execution not necessarily being sequential, but may be performed in turn or alternately with other steps or at least a portion of the other steps or stages.

It should be noted that the above embodiments are merely for illustrating the technical solution of the present invention and not for limiting the same, and although the present invention has been described in detail with reference to the above embodiments, it should be understood by those skilled in the art that the technical solution described in the above embodiments may be modified or some or all of the technical features may be equivalently replaced, and these modifications or substitutions do not make the essence of the corresponding technical solution deviate from the scope of the technical solution of the embodiments of the present invention.

Claims

1. A square work piece cutting system based on laser height finding for to square work piece carries out half cutting, its characterized in that includes:

2. The laser altimeter-based square workpiece cutting system according to claim 1, wherein interpolating the positions of the verification points according to the workpiece fitting surface information to obtain fitting height information of the verification points, comprises:

3. The laser altimeter square workpiece cutting system according to claim 2, wherein the heights of the plurality of sampling points are obtained by means of fixed point measurement, the plurality of sampling points are arranged along the X-axis direction and are equally arranged along the Y-axis direction, and the verification point is located at a midpoint of two sampling points adjacent along the X-axis direction and at a midpoint of two sampling points adjacent along the Y-axis direction.

4. The laser altimeter based square workpiece cutting system of claim 3, wherein verifying whether the difference between the fit height information and the actual height information of the verification points is within the expected depth of cut fluctuation range comprises:

5. The laser altimeter based square workpiece cutting system of claim 3, wherein verifying whether the difference between the fit height information and the actual height information of the verification points is within the expected depth of cut fluctuation range comprises:

And if the difference value between the real height information corresponding to any verification point and the fitting height information exceeds the expected cutting depth fluctuation range, stopping cutting and re-increasing the number of the sampling points and re-verifying for N times until the verification of N times meets the precision requirement, and if a batch of incoming materials passes through the verification of continuous M square workpieces, the cutting precision of the batch of incoming materials on the surface meets the requirement, and the subsequent square workpieces are directly cut, wherein the real height information of the verification point is obtained in advance through a laser ranging module.

6. The laser altimeter based square workpiece cutting system of claim 3, wherein verifying whether the difference between the fit height information and the actual height information of the verification points is within the expected depth of cut fluctuation range comprises:

7. The laser altimeter square workpiece cutting system of claim 1, wherein the laser ranging module is connected with the cutting assembly through a connecting piece and moves synchronously with the cutting assembly, or is connected with a Y-axis driving module arranged on the top of the base.

8. The laser altimeter based square workpiece cutting system of claim 7, further comprising an image detection module connected to a Y-axis drive module mounted on top of the base for automatic alignment or cutting condition inspection of the square workpiece.

9. The laser altimeter square workpiece cutting system of claim 8, wherein the cutting tables are two groups, the two groups of cutting tables are arranged side by side along the Y-axis direction, and the image detection module and the laser ranging module are shared.

10. The laser altimeter square workpiece cutting system of any one of claims 1 to 9, wherein the square workpiece has an expected cutting depth of between 100 microns and 150 microns, the expected cutting depth having a fluctuation range of between-15 microns and +15 microns.

11. A method for cutting a square workpiece based on laser altimetry, based on the system for cutting a square workpiece based on laser altimetry according to any one of claims 1 to 10, characterized in that the method for cutting a square workpiece comprises:

S100, acquiring the reference plane height of a cutting workbench;