CN119407324B - Microchannel cold plate and method of manufacturing the same - Google Patents
Microchannel cold plate and method of manufacturing the same Download PDFInfo
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- CN119407324B CN119407324B CN202510025621.3A CN202510025621A CN119407324B CN 119407324 B CN119407324 B CN 119407324B CN 202510025621 A CN202510025621 A CN 202510025621A CN 119407324 B CN119407324 B CN 119407324B
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/20—Bonding
- B23K26/21—Bonding by welding
- B23K26/24—Seam welding
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/12—Working by laser beam, e.g. welding, cutting or boring in a special atmosphere, e.g. in an enclosure
- B23K26/123—Working by laser beam, e.g. welding, cutting or boring in a special atmosphere, e.g. in an enclosure in an atmosphere of particular gases
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/70—Auxiliary operations or equipment
- B23K26/702—Auxiliary equipment
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Abstract
本发明公开了微通道冷板及其制造方法，涉及工件加工技术领域，微通道冷板包括流道板A、流道板B以及位于所述流道板A和流道板B之间的流道腔体，所述流道腔体一端设置有流体入口，另一端设置有流体出口，所述流道板A和流道板B之间采用双面激光焊的方式固定。本申请采用双面激光焊的方式焊接固定流道板A和流道板B，双面激光焊接方式，有利于抵消焊接区的快速冷却和相关的材料收缩导致的热变形和应力，有利于保证微通道冷板的平面度。
The present invention discloses a microchannel cold plate and a manufacturing method thereof, and relates to the technical field of workpiece processing. The microchannel cold plate comprises a flow channel plate A, a flow channel plate B, and a flow channel cavity located between the flow channel plate A and the flow channel plate B. The flow channel cavity is provided with a fluid inlet at one end and a fluid outlet at the other end. The flow channel plate A and the flow channel plate B are fixed by double-sided laser welding. The present application adopts double-sided laser welding to weld and fix the flow channel plate A and the flow channel plate B. The double-sided laser welding method is conducive to offsetting the thermal deformation and stress caused by the rapid cooling of the welding zone and the related material shrinkage, and is conducive to ensuring the flatness of the microchannel cold plate.
Description
Technical Field
The invention relates to the technical field of workpiece processing, in particular to a micro-channel cold plate and a manufacturing method thereof.
Background
The micro-channel cold plate has small thickness and compact structure, limited operation space, the traditional argon tungsten-arc welding method and welding process are easy to influence micro-channels around welding seams, further blockage or melting of splashes into cavities and the like can not be ensured, if the welding is carried out by adopting brazing, brazing filler metal is easy to overflow, corrosion resistance is poor, air tightness of the brazed cold plate is not ideal, slight leakage often occurs, the whole heat dissipation efficiency of a heat dissipation module is influenced, the stability of equipment is influenced, a brazing heat affected zone is large, the cold plate is deformed to a certain extent, the heat dissipation effect is indirectly influenced, and the welding is carried out by adopting diffusion welding, so that the requirements on the processing of materials are high, the structural applicability is poor, the cost is high, and the period is long.
In view of this, the present invention has been made.
Disclosure of Invention
The invention aims to provide a micro-channel cold plate and a manufacturing method thereof, which solve the problem that the micro-channel cold plate welded by the prior art is easy to deform.
The invention is realized in the following way:
In a first aspect, the invention provides a micro-channel cold plate, which comprises a flow channel plate A, a flow channel plate B and a flow channel cavity positioned between the flow channel plate A and the flow channel plate B, wherein one end of the flow channel cavity is provided with a fluid inlet, the other end of the flow channel cavity is provided with a fluid outlet, and the flow channel plate A and the flow channel plate B are welded in a double-sided laser welding mode.
In an alternative embodiment, the cross section of the flow channel cavity along the direction perpendicular to the fluid flow direction is a rounded n-sided shape, and n is a positive integer greater than or equal to 3;
and/or the cross section of the flow channel cavity along the fluid flowing direction is a rounded n-sided shape, and n is a positive integer more than or equal to 3.
In an alternative embodiment, the thickness of the micro-channel cold plate is 0.2-5 mm, and the flatness of the micro-channel cold plate is less than 0.1mm;
And/or the micro-channel cold plate is made of at least one of stainless steel, titanium alloy, copper alloy and aluminum alloy.
In a second aspect, the present invention provides a method for manufacturing a microchannel cold plate as set forth in any one of the preceding embodiments, comprising:
Assembling, namely cleaning the surfaces of the flow channel plate A and the flow channel plate B, and then assembling to obtain a combined part to be welded;
Vacuumizing, namely connecting the runner cavity of the combined part to be welded with a vacuumizing system, and keeping the inside of the runner cavity in a negative pressure state;
The micro-channel cold plate is obtained by laser welding, wherein the laser welding is adopted to enable laser to irradiate a preset welding path on the flow channel plate A to form a welding line A on the flow channel plate A, the laser welding is adopted to enable the laser to irradiate a preset welding path on the flow channel plate B to form a welding line B on the flow channel plate B, and the micro-channel cold plate is obtained.
In an alternative embodiment, the vacuum pumping system comprises a vacuum pump and a connecting pipe connected with the fluid inlet and/or the fluid outlet of the flow channel cavity;
and/or, performing laser welding after the air pressure in the flow channel cavity is less than 10 -2 Pa;
and/or the laser welding is performed under inert gas protection.
In an alternative embodiment, the vacuumizing system comprises a vacuum pump and a sucker for adsorbing and fixing the combined workpiece to be welded, the vacuum pump is connected with the sucker through a connecting pipe, and the sucker is adsorbed at the fluid inlet and/or the fluid outlet of the runner cavity.
In an alternative embodiment, the weld A and the weld B are both disposed along two sides of the flow channel cavity.
In an alternative embodiment, the depth of a molten pool corresponding to the welding line A is D 1+aD2, and/or the depth of a molten pool corresponding to the welding line B is D 2+bD1, wherein D 1 is the thickness of the runner plate A, D 2 is the thickness of the runner plate B, and a is more than or equal to 1/2 and less than or equal to 2/3, and B is more than or equal to 1/2 and less than or equal to 2/3.
In an alternative embodiment, the laser power used for the laser welding is 500-1500W, the welding speed is 5-30 mm/s, and the spot size is 0.2-0.5 mm.
In an alternative embodiment, the welding gap of the combined part to be welded is less than 0.15mm.
The invention has the following beneficial effects:
The application adopts a double-sided laser welding mode to weld and fix the flow channel plate A and the flow channel plate B, and the double-sided laser welding mode is beneficial to counteracting the thermal deformation and stress caused by the rapid cooling of a welding area and the related material shrinkage, and is beneficial to ensuring the planeness of the micro-channel cold plate.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings that are needed in the embodiments will be briefly described below, it being understood that the following drawings only illustrate some embodiments of the present invention and therefore should not be considered as limiting the scope, and other related drawings may be obtained according to these drawings without inventive effort for a person skilled in the art.
FIG. 1 is a cross-sectional view of a microchannel cold plate;
FIG. 2 is a comparison of the flow channel cavity before and after welding;
FIG. 3 is a schematic view of the flow channel cavity, weld A and weld B in the microchannel cold plate of example 1.
The diagram is 100-flow channel plate A, 110-weld joint A, 200-flow channel plate B, 210-weld joint B and 300-flow channel cavity.
Detailed Description
In order to make the objects, technical solutions and advantages of the embodiments of the present invention more clear, the technical solutions of the embodiments of the present invention will be clearly and completely described below. The specific conditions are not noted in the examples and are carried out according to conventional conditions or conditions recommended by the manufacturer. The reagents or apparatus used were conventional products commercially available without the manufacturer's attention.
The embodiment of the invention provides a micro-channel cold plate, which comprises a flow channel plate A100, a flow channel plate B200 and a flow channel cavity 300 positioned between the flow channel plate A100 and the flow channel plate B200, wherein one end of the flow channel cavity 300 is provided with a fluid inlet, the other end is provided with a fluid outlet, and the flow channel plate A100 and the flow channel plate B200 are welded by adopting a double-sided laser welding mode.
The micro-channel cold plate has small thickness, and the traditional welding method adopting direct contact has the problems of easy penetration and large deformation. The laser welding is a high-efficiency and precise welding method which takes a fine focused high-energy laser beam as a heat source for welding, has the characteristics of high energy density, non-contact with a workpiece, high welding efficiency, easiness in realizing automation and the like, has large welding seam fusion depth-width ratio, narrow heat affected zone, small welding deformation, precise and firm welding seam, has no defects of air holes, slag inclusion, hot cracks and the like, has good air tightness, can meet the high air tightness requirement of a micro-channel cold plate, can realize the control of the size and the position of the welding seam in a micron level, can precisely weld micro-channels and other fine complex structures, ensures the dimensional accuracy and the position accuracy of the micro-channel, ensures the heat dissipation performance of the cold plate, has high laser beam heating speed and short welding time, can realize high-efficiency and full-automatic welding in cooperation with an automatic system, is suitable for mass production, improves the production efficiency, does not directly avoid pollution, deformation and damage caused by contact, provides greater flexibility for welding the micro-channel cold plate in a complex shape, does not have adverse effect on the internal structure and performance, and is favorable for obtaining the micro-channel cold plate with high quality, high precision and high efficiency and small thermal deformation of the welding seam.
Further, in the embodiment of the application, the flow channel plate A100 and the flow channel plate B200 are welded and fixed by adopting a double-sided laser welding mode, and the double-sided laser welding mode is beneficial to counteracting the thermal deformation and stress caused by rapid cooling of a welding area and related material shrinkage and is beneficial to ensuring the planeness of the micro-channel cold plate. Specifically, single-sided laser welding is performed from only one side, and during welding, a large thermal stress is generated due to heat input concentrated on one side. Such thermal stress tends to deform the thin Leng Ban toward the welding side, which may lead to a decrease in flatness, and may cause bending, warping, and the like. While double-sided laser welding is performed simultaneously or sequentially from both sides. The heat input is relatively evenly distributed on two sides of the plate, the heat stress can be offset to a certain extent, and the cold plate is hardly deformed.
In an alternative embodiment, the cross section of the flow channel cavity 300 along the direction perpendicular to the fluid flow is a rounded n-sided shape, and n is a positive integer greater than or equal to 3;
and/or, the cross section of the flow channel cavity 300 along the fluid flowing direction is a rounded n-sided shape, n is a positive integer greater than or equal to 3, and the rounded corner is beneficial to reducing the flow resistance.
In an alternative embodiment, the thickness of the micro-channel cold plate is 0.2-5 mm, and the flatness of the micro-channel cold plate is less than 0.1mm;
and/or the micro-channel cold plate is made of one of stainless steel, titanium alloy, copper alloy and aluminum alloy.
The micro-channel cold plate can keep the flatness smaller than 0.1mm under the thickness of 0.2-5 mm. Flatness is affected by various factors, such as the material and thickness of the cold plate, for example, the cold plates with thickness of 0.5mm and 5mm are deformed differently under the same welding condition, and the thinner the thickness, the more easily the cold plate is deformed. The micro-channel cold plate with smaller flatness can be better attached to other parts in the installation and working processes, and the heat dissipation efficiency and the overall performance are guaranteed.
The embodiment of the present invention further provides a method for manufacturing a microchannel cold plate as set forth in any one of the preceding embodiments, as shown in fig. 1 and 2, including:
Assembling, namely cleaning the surfaces of the flow channel plate A and the flow channel plate B, and then assembling to obtain a combined part to be welded;
Vacuumizing, namely connecting the runner cavity 300 of the combined part to be welded with a vacuumizing system, and keeping the inside of the runner cavity 300 in a negative pressure state;
The micro-channel cold plate is obtained by laser welding, wherein laser is used for irradiating a preset welding path on the flow channel plate A100, forming a welding line A110 on the flow channel plate A100, laser is used for irradiating a preset welding path on the flow channel plate B200, forming a welding line B210 on the flow channel plate B200, and the micro-channel cold plate is obtained.
In the embodiment of the application, the flow channel plate A100 and the flow channel plate B200 are welded and fixed by adopting a double-sided laser welding mode, and the double-sided laser welding mode is beneficial to counteracting the thermal deformation and stress caused by rapid cooling of a welding area and related material shrinkage and is beneficial to ensuring the planeness of the micro-channel cold plate. Further, during laser welding, as the flow channel cavity 300 is in a negative pressure state, the right angle of the flow channel is changed into a round angle, the round angle is formed to be favorable for reducing flow resistance, and meanwhile, the flow channel cavity 300 in the negative pressure state can play a role in buffering, deformation and uneven stress distribution of the micro-channel plate are further restrained, so that the micro-channel cold plate can keep flatness smaller than 0.1mm under the thickness of 0.2-5 mm.
In an alternative embodiment, the evacuation system comprises a vacuum pump and a connecting tube connected to the fluid inlet and/or fluid outlet of the flow channel cavity 300;
And/or, performing laser welding after the air pressure in the flow channel cavity 300 is less than 10 -2 Pa;
and/or the laser welding is performed under inert gas protection.
The vacuum level in the flow channel cavity 300 is maintained at a higher level, and the radius of the rounded corner of the flow channel cavity 300 is larger, which is more beneficial to reducing the flow resistance.
It should be noted that, in the conventional welding process, if the gas between the flow channel plate a100 and the flow channel plate B200 cannot be discharged in time, the gas may remain in the micro-channel cold plate and further affect the performance of the micro-channel cold plate, and in the embodiment of the application, the vacuum in the flow channel cavity 300 is maintained, and the timely discharge of the gas between the flow channel plate a100 and the flow channel plate B200 is also promoted, so that the air holes in the micro-channel cold plate are reduced.
In an alternative embodiment, the vacuum pumping system comprises a vacuum pump and a sucker for adsorbing and fixing the combined workpiece to be welded, the vacuum pump is connected with the sucker through a connecting pipe, and the sucker is adsorbed at the fluid inlet and/or the fluid outlet of the runner cavity 300.
The suction cup can provide vacuum conditions for the runner cavity 300 on one hand, and can fix the combined to-be-welded piece without other clamps or fixing tools on the other hand.
It should be noted that, the suction cup may cover the fluid inlet and the fluid outlet of the flow channel cavity 300 at the same time, if the suction cup is only sucked on one port of the flow channel cavity 300, the other port needs to be plugged, so as to ensure the vacuum state in the flow channel cavity 300. The sucking disc can be provided with one or more than two according to the requirement, and the sucking disc can select a high-temperature-resistant material with certain elasticity according to the requirement.
In an alternative embodiment, weld A110 and weld B210 are each disposed along two sides of the flow path cavity 300.
The welding lines A110 and B210 fix the flow channel plate A100 and the flow channel plate B200 on one hand, and on the other hand, the separation effect on each part of the flow channel cavity 300 is realized, so that the fluid is ensured to move along a preset path in the flow channel cavity 300.
It should be noted that, the specific arrangement mode of the flow channel cavity 300 may be as shown in fig. 3, or may be set according to needs, and the shapes of the weld a110 and the weld B210 may be adaptively adjusted for the flow channel cavities 300 with different shapes.
In an alternative embodiment, the depth of the molten pool corresponding to the weld A110 is D 1+aD2, and/or the depth of the molten pool corresponding to the weld B210 is D 2+bD1, wherein D 1 is the thickness of the runner plate A100, D 2 is the thickness of the runner plate B200, and a is 1/2.ltoreq.a.ltoreq.2/3, and B is 1/2.ltoreq.b.ltoreq.2/3.
The depth of the molten pool is too large, the runner plate can be welded through, the depth of the molten pool is too small, and the welding intensity of the runner plate A100 and the runner plate B200 is too low, so that the depth of the molten pool needs to be reasonably set.
In an alternative embodiment, the laser power used for the laser welding is 500-1500W, the welding speed is 5-30 mm/s, and the spot size is 0.2-0.5 mm.
The laser welding method comprises the steps of setting proper welding speed by combining laser power and the structural characteristics of a weldment, setting proper power to be favorable for ensuring that the weldment material is sufficiently melted to form a good weld, setting proper welding speed to be too fast so that defects such as lack of penetration and the like can occur, and too slow so that the weldment is possibly overheated and excessively deformed, selecting proper light spot diameter, controlling energy distribution of laser beams on the surface of the weldment by adjusting defocusing amount, and ensuring that weld penetration, weld width and the like meet welding quality requirements.
Meanwhile, the molten pool is required to be regular and stable in shape. The regular shape is helpful for ensuring the beautiful shape of the welding seam and avoiding the defects of undercut, hump and the like. The stable molten pool can enable the welding process to be smoothly carried out, and parameters such as laser power, welding speed and the like are required to be reasonably controlled.
In an alternative embodiment, the welding gap of the combined part to be welded is less than 0.15mm.
In some embodiments, a method of manufacturing a microchannel cold plate includes:
1) Preparing weldments, namely determining a main substrate of the micro-channel cold plate, strictly checking the materials, the sizes and the like of the main substrate, ensuring that the materials are qualified in quality, free of obvious defects, uniform in thickness of the plate and the like. Machining the material according to design requirements may require forming the runner plate structure by CNC machining or chemical etching.
2) And (3) surface cleaning, namely removing greasy dirt, an oxide layer, impurities and the like on the surface of the cold plate by using a proper chemical reagent or physical polishing method and the like, so that the welding surface is kept clean, and the good absorption of laser energy and the forming of welding seams during subsequent welding are facilitated. The butt-welded surface is polished to improve its flatness and contact area.
3) Assembling the weldment, namely assembling all the parts according to the design requirement to obtain a combined weldment to be welded, placing the combined weldment to be welded on a sucker, positioning the combined weldment to be welded, and simultaneously pumping out the gas in the runner cavity 300 corresponding to the combined weldment to be welded, so as to maintain the vacuum condition in the runner cavity 300. The sucker is used, so that a special fixture is not required to be used for positioning, and the correct position and clearance of each part in the welding process can be ensured. Ensuring that the gap of the micro-channel meets the welding requirement.
4) And setting laser welding parameters, namely setting parameters such as laser power, welding speed, focal position and the like according to the material and thickness of the micro-channel cold plate.
5) The welding process is implemented by starting the laser welding equipment, firstly carrying out short arc starting at the starting position of a weldment, accurately positioning the welding starting point, and simultaneously observing the melting condition of the arc starting position to ensure that the starting state is good. And welding along the welding line according to a preset welding path of the flow channel plate A100. The laser beam is enabled to move at a constant speed along the welding line of the micro-channel cold plate, the welding state is monitored in real time in the welding process, parameters such as the penetration, the width and the like of the welding line are monitored through equipment such as a sensor, and if deviation occurs, the parameters are adjusted in time. And after overturning, welding again at a constant speed according to a preset welding path of the flow channel plate B200. The penetration and weld pattern is shown in fig. 1.
6) And after welding, checking whether the appearance of the welding line is smooth and continuous or not through visual or by means of tools such as a magnifying glass, and marking the part with appearance problems if the welding line has the defects of air holes, cracks, undercut and the like. And cleaning impurities such as splashes and the like remained around the welding line, and if the welding line has uneven appearance, properly polishing to ensure that the surface of the welding line is smooth, thereby meeting the subsequent use or assembly requirements.
7) For weldments with higher product quality requirements, nondestructive detection methods such as X-ray flaw detection and ultrasonic flaw detection can be adopted to further detect the internal quality of the welding seams, so that the welding seams are ensured to have no internal defects to influence the performance of the micro-channel cold plate, and the welded finished products meet the quality requirements. If the condition that the quality is not in accordance with the requirement is detected, analyzing reasons such as unreasonable welding parameters, inadequately pretreated sheet surfaces and the like, pertinently adopting improvement measures, and carrying out welding operation again.
8) The cold plate was subjected to a fluid-tightness test to ensure that the microchannel was leak-free and its performance was verified.
9) Surface treatment, coating, anodic oxidation or other surface treatments as needed to improve corrosion and wear resistance.
10 And (3) functional test, namely comprehensively testing the heat conductivity and the fluid flow of the cold plate to ensure that the design requirement is met. The production process is recorded, the traceability of each step is ensured, the subsequent quality control is realized, and the laser welding parameters can be optimized according to the actual material and the product characteristics if necessary, so as to obtain the optimal welding effect.
The features and capabilities of the present invention are described in further detail below in connection with the examples.
Example 1
The embodiment provides a manufacturing method of a stainless steel micro-channel cold plate, which comprises the following specific steps:
Preparing a weldment, namely preparing a 316 stainless steel cold plate to be welded, carefully checking parameters such as specification, thickness, size and the like, ensuring the surface of the plate to be flat, and avoiding obvious defects such as pits, scratches, oxide scales and the like. Ensuring that the welding requirements are met. And (3) surface cleaning, namely dipping a proper amount of organic solvents such as acetone or alcohol by using clean wiping cloth, carefully wiping the to-be-welded part and the peripheral area of the stainless steel cold plate, thoroughly removing impurities such as greasy dirt and dust, and ensuring the cleanness of the welded surface. The equipment is prepared and debugged, namely, the vacuum laser welding equipment is placed on a place which is clean, dry, relatively stable in temperature and humidity and good in ventilation, the equipment is prevented from being influenced by dust, humidity, extreme temperature, corrosive gas and the like, and the performance and the service life of the equipment are guaranteed. Debugging a vacuum system, installing a micro-channel cold plate, and a vacuum pump, a vacuum pipeline and a vacuum chamber matched with the micro-channel cold plate, wherein the embodiment is provided with a sucker for fixedly combining a piece to be welded, the sucker is connected to the vacuum chamber, the vacuum pump is started for air extraction test, parameters such as air extraction rate, vacuum degree and the like are regulated, and the vacuum chamber can reach 10 -2
Pa or less, and checking whether the operation state is normal. The laser welding equipment is arranged on a stable, dry and well ventilated working site, and a power supply, a cooling system and the like are connected, so that the equipment can be ensured to normally operate. The argon steel cylinder is connected with a gas conveying pipeline through a pressure reducer, a gas flowmeter and the like, firm connection is ensured, sealing is reliable, a valve of the argon steel cylinder is opened, the pressure reducer is regulated to enable output pressure to be stabilized at 0.3-0.6 MPa, gas flow is controlled at 5-15L/min, and a stable and effective protective gas cover can be formed in a welding area during welding to prevent weld metal from being oxidized due to contact with air. And the protective gas conveying system is debugged, and the gas flow is regulated, so that the protective gas conveying system can stably cover a welding area during welding, and a good protective effect is achieved. And meanwhile, whether components such as the combined part to be welded and the combined part to be welded placing platform are firmly installed or not is checked, and the components are clean. The laser welding parameters are set, namely, for a 316 stainless steel thin Leng Ban with the thickness of 0.2 mm, the laser power is properly regulated down to prevent burning through, and the welding speed can be slightly higher to ensure good welding seam forming, so that the laser power is set to about 1300 watts, the welding speed is set to 200 mm per minute, and the parameters of the laser welding equipment are repeatedly debugged. And meanwhile, the diameter of the light spot and the defocus amount are finely adjusted, so that the ideal energy distribution of the laser beam on the surface of a weldment is ensured, and the accurate action of the laser beam on a welding part is ensured. The method comprises the steps of carefully placing the cleaned stainless steel cold plate on a workbench of a laser welding device, slowing the operation process, preventing the thin plate from collision deformation, then assembling the cold plate according to the design requirement of a drawing, accurately placing the stainless steel cold plate to be welded, ensuring the alignment of welding joints, ensuring that the gap is uniform and meets the welding process requirement, controlling the welding gap to be in a smaller range and about 0.15mm generally, ensuring that the runner plate cannot displace in the welding process, checking the fixing firmness degree of the runner plate by slightly pulling the edge of the runner plate, and the like, and timely adjusting if looseness exists. And (3) parameter rechecking, namely, before welding, rechecking the set parameters on the laser welding equipment, the flow of the shielding gas and the like, so as to ensure that all parameters are accurate and correct, and avoid welding failure or quality problems caused by parameter errors. After confirming that there is no error, the welding is ready to be started. Starting welding, namely starting a laser emission system of the laser welding equipment, and simultaneously opening a protective gas conveying valve to ensure that argon is stably conveyed to a welding area to form a protective gas hood. The laser beam is irradiated to the welded portion of the stainless steel cold plate according to a predetermined welding path of the flow path plate a 100. The stainless steel material is quickly melted, fused and solidified to form a welding seam under the action of laser energy. And after overturning, welding again at a constant speed according to a preset welding path of the flow channel plate B200. The schematic penetration and the schematic weld are shown in fig. 1, and the schematic diagrams of the flow channel cavity 300, the weld a110 and the weld B210 in the microchannel cold plate are shown in fig. 3, it should be noted that fig. 3 is only a schematic diagram of the embodiment, and in other embodiments, the shape of the flow channel cavity 300 may be set according to the needs. In the welding process, the welding condition can be monitored in real time by means of a welding monitoring system such as an optical imaging system and the like, abnormal phenomena such as weld joint forming condition, splashing and the like are checked, if problems are found, the welding is stopped in time, and parameters are adjusted and then the process is continued. And after the equipment and the gas are closed, the laser welding equipment and the shielding gas conveying system are sequentially closed, and the supply of argon is stopped. And then closing the vacuum pump, and slowly releasing the vacuum degree in the vacuum chamber according to the operation procedure of the vacuum pump, so that the chamber is gradually restored to the normal pressure state, and adverse effects on equipment or welded runner plates due to sudden pressure changes are avoided. And finally, closing related auxiliary systems such as a cooling system of the equipment, so as to ensure that the equipment is in a safe and stable shutdown state without abnormal sound, water leakage, electric leakage and other phenomena after the systems are closed. And (3) post-welding treatment, namely carefully taking out the welded stainless steel cold plate, and lightly cleaning impurities such as welding slag and the like remained on the surface of the weldment by using tools such as a hairbrush and the like to keep the appearance of the weldment clean. The polishing treatment can be properly carried out to ensure that the surface of the polishing agent is smooth, and the polishing agent meets the subsequent use or assembly requirements. The appearance of the weld joint can be seen to be smooth and continuous through visual inspection, the defects of air holes, undercut, cracks and the like are avoided, and further the micro-channel cold plate is detected by adopting air tightness detection equipment, so that the result shows that the air tightness completely meets the high standard requirement. And the thermal deformation caused by laser welding is extremely small, the flatness of the whole cold plate is controlled within 0.08mm, and the heat radiation performance in the follow-up assembly and the actual use is greatly improved. Comparative example 1
In the comparative example, single-sided laser welding was adopted, and compared with example 1, the difference was that in step 8, after the surface welding of the flow channel plate A100 was completed, the step 9 was performed, and the micro-channel cold plate obtained was not formed with the weld B210, and the flatness of the whole cold plate was 0.3mm.
For the micro-channel cold plate, the single-sided laser welding can cause larger flatness deviation, and the double-sided laser welding can better keep the flatness of the micro-channel cold plate, so that the micro-channel cold plate can better fit other parts in the installation and working processes, and the heat dissipation efficiency and the overall performance are ensured.
The above description is only of the preferred embodiments of the present invention and is not intended to limit the present invention, but various modifications and variations can be made to the present invention by those skilled in the art. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
Claims (8)
1. A manufacturing method of a micro-channel cold plate is characterized in that the micro-channel cold plate comprises a flow channel plate A, a flow channel plate B and a flow channel cavity positioned between the flow channel plate A and the flow channel plate B, wherein one end of the flow channel cavity is provided with a fluid inlet, the other end of the flow channel cavity is provided with a fluid outlet, the flow channel plate A and the flow channel plate B are welded in a double-sided laser welding mode, the cross section of the flow channel cavity along the direction perpendicular to the fluid flow direction is a circular-angle n-shaped, and n is a positive integer more than or equal to 3;
and/or the cross section of the flow channel cavity along the fluid flowing direction is a rounded n-sided shape, and n is a positive integer more than or equal to 3
The manufacturing method of the microchannel cold plate comprises the following steps:
Assembling, namely cleaning the surfaces of the flow channel plate A and the flow channel plate B, and then assembling to obtain a combined part to be welded;
Vacuumizing, namely connecting the runner cavity of the combined part to be welded with a vacuumizing system, and keeping the inside of the runner cavity in a negative pressure state;
The micro-channel cold plate is obtained by adopting laser welding, wherein the laser welding irradiates a preset welding path on the flow channel plate A to form a welding line A on the flow channel plate A, the laser welding irradiates a preset welding path on the flow channel plate B to form a welding line B on the flow channel plate B, and the micro-channel cold plate is obtained, wherein the right angle of the flow channel becomes a round angle due to the fact that the cavity of the flow channel is in a negative pressure state during the laser welding.
2. The method for manufacturing a micro-channel cold plate according to claim 1, wherein the thickness of the micro-channel cold plate is 0.2-5 mm, and the flatness of the micro-channel cold plate is less than 0.1mm;
And/or the micro-channel cold plate is made of one of stainless steel, copper alloy, titanium alloy and aluminum alloy.
3. The method of manufacturing a microchannel cold plate according to claim 1, wherein the vacuum pumping system comprises a vacuum pump and a connecting tube connected to the fluid inlet and/or the fluid outlet of the flow channel cavity;
and/or, performing laser welding after the air pressure in the flow channel cavity is less than 10 -2 Pa;
and/or the laser welding is performed under inert gas protection.
4. The method for manufacturing a micro-channel cold plate according to claim 1, wherein the vacuumizing system comprises a vacuum pump and a sucker for adsorbing and fixing the combined part to be welded, the vacuum pump is connected with the sucker through a connecting pipe, and the sucker is adsorbed at a fluid inlet and/or a fluid outlet of the flow channel cavity.
5. The method of manufacturing a microchannel cold plate according to claim 1, wherein weld a and weld B are disposed along both sides of the flow channel cavity.
6. The method of manufacturing a microchannel cold plate according to claim 1, wherein the depth of the molten pool corresponding to weld A is D 1+aD2, and/or the depth of the molten pool corresponding to weld B is D 2+bD1, wherein D 1 is the thickness of the flow channel plate A, D 2 is the thickness of the flow channel plate B, a is 1/2.ltoreq.a.ltoreq.2/3, and B is 1/2.ltoreq.b.ltoreq.2/3.
7. The method for manufacturing a micro-channel cold plate according to claim 1, wherein the laser power used for the laser welding is 500-1500 w, the welding speed is 5-30 mm/s, and the spot size is 0.2-0.5 mm.
8. The method of manufacturing a microchannel cold plate according to claim 1, wherein the weld gap of the combined part to be welded is less than 0.15mm.
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