CN119291852A - A low crosstalk wavelength division multiplexer based on cascaded arrayed waveguide gratings - Google Patents
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Abstract
本发明涉及一种基于级联阵列波导光栅的低串扰波分复用器，属于半导体光信号传输技术领域。本发明从下至上包括晶圆的衬底、晶圆的埋氧层、器件层和器件的SiO2上包层，器件层包括输入波导、若干阵列波导光栅、传输波导、十字交叉波导和输出波导。输入的光信号通过第一阵列波导光栅时，不同波长的光信号被分离到第一阵列波导光栅输出平板波导的不同位置，而后通过传输波导、十字交叉波导输入到第二阵列波导光栅。第二阵列波导光栅输入波导间距为第一个阵列波导光栅输出波导间距的二倍，最终在第二阵列波导光栅输出平板波导分别输出被滤波了两次的目标波长。本发明用于实现阵列波导光栅超低的相邻通道串扰，是对传统波分复用器的改进。
The present invention relates to a low crosstalk wavelength division multiplexer based on cascaded array waveguide gratings, and belongs to the technical field of semiconductor optical signal transmission. The present invention includes a wafer substrate, a wafer buried oxide layer, a device layer and a SiO2 upper cladding layer of the device from bottom to top, and the device layer includes an input waveguide, a plurality of array waveguide gratings, a transmission waveguide, a cross waveguide and an output waveguide. When the input optical signal passes through the first array waveguide grating, optical signals of different wavelengths are separated to different positions of the output flat waveguide of the first array waveguide grating, and then input to the second array waveguide grating through the transmission waveguide and the cross waveguide. The input waveguide spacing of the second array waveguide grating is twice the output waveguide spacing of the first array waveguide grating, and finally the target wavelengths filtered twice are outputted respectively in the second array waveguide grating output flat waveguide. The present invention is used to realize ultra-low adjacent channel crosstalk of the array waveguide grating, which is an improvement on the traditional wavelength division multiplexer.
Description
Technical Field
The invention relates to a low-crosstalk wavelength division multiplexer based on a cascade array waveguide grating, and belongs to the technical field of semiconductor optical signal transmission.
Background
During the past three decades, silicon-based optical interconnects have been investigated to integrate various optical functional devices on-chip, such as on-chip lasers, edge couplers, electro-optic modulators, optical wavelength division multiplexers, photodetectors, and the like. Arrayed Waveguide Gratings (AWGs) are critical wavelength division multiplexing devices in silicon photonic integrated chips. At present, the arrayed waveguide grating has certain application on a plurality of material platforms, such as low refractive index contrast material systems of silicon dioxide (SiO 2), silicon On Insulator (SOI), silicon nitride (Si 3N4), indium phosphide (InP) and the like, and the arrayed waveguide grating with high performance (low insertion loss, low inter-adjacent/inter-band crosstalk and the like) is realized on the material platforms, however, the arrayed waveguide grating often has the problems of larger device size, complex process preparation requirements, or difficult integration with other photon devices and the like. In recent years, an arrayed waveguide grating based on a silicon nanowire waveguide has been widely studied because of its high refractive index contrast characteristic of a Silicon On Insulator (SOI) waveguide, which enables sharp bending, because of its compact size. In addition, its fabrication is compatible with CMOS technology, providing a promising solution for large-scale integration with other silicon-based devices in high-density photonic chips.
Silicon photonic integrated device research is currently based on high speed transmission characteristics, so SOI (silicon on insulator) wafers of thin (220 nm) top silicon are the first choice for device design. Silicon photon PN junction based on thin top silicon can realize high-speed modulation and detection of optical signals, however, on a thin top silicon SOI wafer, a silicon-based array waveguide grating is difficult to obtain satisfactory channel crosstalk characteristics, because the deviation generated by the existing process conditions and design easily causes larger phase errors in nanowire waveguides of a high refractive index core layer, and the array waveguide grating is very sensitive to the phase errors, and the large phase errors can cause poor channel crosstalk. Several approaches have been proposed to improve the silicon photonic AWG crosstalk characteristics for this problem over many years of research, but there are some problems. Currently, AWG crosstalk on thin top-layer silicon is a bottleneck limiting its wide application.
Disclosure of Invention
Aiming at the problem of array waveguide grating crosstalk on thin top-layer silicon, the invention provides a low-crosstalk wavelength division multiplexer which is used for realizing larger-amplitude reduction of the crosstalk of adjacent output channels of the array waveguide grating.
The technical scheme of the invention is that the low-crosstalk wavelength division multiplexer based on the cascade array waveguide grating comprises a substrate of a wafer, an oxygen buried layer of the wafer, a device layer and an SiO 2 upper cladding of the device layer from bottom to top, wherein the device layer comprises an input waveguide 100 and two or more cascaded array waveguide gratings or wavelength division multiplexers, the input waveguide 100 is connected with an input optical fiber, each array waveguide grating comprises an array waveguide grating input flat waveguide, an array waveguide and an array waveguide grating output flat waveguide, the array waveguide grating input flat waveguide, the array waveguide and the array waveguide grating output flat waveguide are sequentially connected, two adjacent array waveguide gratings are sequentially connected through a transmission waveguide 400 and a crisscross waveguide 500, and the output end of the last array waveguide grating is connected with an output waveguide 600.
As a further scheme of the invention, the array waveguide grating comprises a first array waveguide grating AWG1 and a second array waveguide grating AWG2, wherein the first array waveguide grating AWG1 comprises a first array waveguide grating input flat waveguide 310, an array waveguide I210 and a first array waveguide grating output flat waveguide 320 which are sequentially connected, and the second array waveguide grating AWG2 comprises a second array waveguide grating input flat waveguide 330, an array waveguide II220 and a second array waveguide grating output flat waveguide 340 which are sequentially connected;
the input waveguide 100 is connected to the first array waveguide grating input slab waveguide 310, the first array waveguide grating output slab waveguide 320 is connected to the transmission waveguide 400, the transmission waveguide 400 is connected to the crisscross waveguide 500, the crisscross waveguide 500 is connected to the second array waveguide grating input slab waveguide 330, and the second array waveguide grating output slab waveguide 340 is connected to the output waveguide 600.
As a further scheme of the invention, the output channel spacing of all cascaded arrayed waveguide gratings is consistent and d, and the input channel spacing of each cascaded arrayed waveguide grating after the first arrayed waveguide grating is twice the output channel spacing of the first arrayed waveguide grating, namely 2 x d.
As a further scheme of the present invention, the optical signal input by the input optical fiber sequentially passes through the input waveguide 100, the first arrayed waveguide grating input slab waveguide 310, the arrayed waveguide I210, the first arrayed waveguide grating output slab waveguide 320, the transmission waveguide 400, the crisscross waveguide 500, the second arrayed waveguide grating input slab waveguide 330, the arrayed waveguide II220, the second arrayed waveguide grating output slab waveguide 340, and the output waveguide 600 to output the twice filtered optical signal.
As a further scheme of the invention, the structures of the flat waveguides and the array waveguides of the first array waveguide grating AWG1 and the second array waveguide grating AWG2 are completely consistent, and the structures are array waveguide gratings with any channel spacing and any channel number, so that crosstalk is reduced after cascade connection of the two array waveguide gratings is realized.
The first arrayed waveguide grating AWG1 and the second arrayed waveguide grating AWG2 are provided with five output channels, the second arrayed waveguide grating AWG2 is provided with five input channels, the optical signals output by the first left output waveguide of the first arrayed waveguide grating AWG1 are input into the first left input waveguide of the second arrayed waveguide grating AWG2 through the transmission waveguide 400 and the cross waveguide 500, the optical signals output by the second left output waveguide of the first arrayed waveguide grating AWG1 are input into the second left input waveguide of the second arrayed waveguide grating AWG2 through the transmission waveguide 400 and the cross waveguide 500, and the optical signals output by the fifth left output waveguide of the first arrayed waveguide grating AWG1 are input into the fifth left input waveguide of the second arrayed waveguide grating AWG2 through the transmission waveguide 400 and the cross waveguide 500.
As a further scheme of the invention, the arrayed waveguide grating adopts a disc type or saddle type.
As a further aspect of the present invention, any type of nxn wavelength division multiplexer can be used instead of the arrayed waveguide grating to achieve the function of reducing crosstalk.
The arrayed waveguide grating AWG is used as a grating device, and can perform separation output on mixed input wavelengths, which is also called wave division multiplexing. As shown in fig. 1, the first arrayed waveguide grating AWG1 has five output channels, and different wavelengths are focused on different output channels of the output slab waveguide according to the dispersion characteristics of the AWG, so each channel sequentially outputs λ 1-λ5, and a wavelength difference Δλ, also called a channel spacing, i.e. λ 1+Δλ＝λ2,λ2+Δλ＝λ3,...λ4 +Δλ=λ5, exists between the response wavelengths output by each output channel. The above is based on the output channel response of the center channel input, if the arrayed waveguide grating is input from the edge input channel, the focused wavelength of the output channel will become λ±nΔλ (n is the ratio of the interval Δx between the edge input channel and the center input channel to the output channel spacing d, i.e.) That is, when the optical field is input from the nth input channel near the center channel, the output channel focus wavelength is shifted from λ 1,λ2,...λ5 to λ 1±nΔλ,λ2±nΔλ,...λ5 ±nΔλ. For example, when the optical field is input from the left adjacent channel of the central channel of the arrayed waveguide grating, i.e., n= -1, the output wavelength of the output1-5 channel of the arrayed waveguide grating will be shifted from λ 1,λ2,...λ5 to λ 1-Δλ,λ2-Δλ,...λ5 - Δλ. When the optical field is input from the right adjacent channel of the central channel of the arrayed waveguide grating, i.e., n=1, the output wavelengths of the output channels of the arrayed waveguide grating, output1-5, will be shifted from λ 1,λ2,...λ5 to λ 1+Δλ,λ2+Δλ,...λ5 +Δλ.
The first array waveguide grating output slab waveguide 320 and the second array waveguide grating input slab waveguide 330 are connected through the transmission waveguide 400 and the crisscross waveguide 500, as shown in fig. 2 and fig. 3, the output1-5 is respectively connected with the input1-5, that is, the lambada 1-λ5 is respectively and sequentially input into the input1-5, the waveguide spacing between the inputs 1-5 is 2d and is twice the output1-5 spacing, so that the generated beneficial effect is that the focusing response wavelength of the output slab waveguide 340 channel output1 *-5* of the second array waveguide grating is λ1+4Δλ＝λ5,λ2+2Δλ＝λ4,λ3,λ4-2Δλ＝λ2,λ5-4Δλ＝λ1, in sequence, the channel response of the second array waveguide grating output slab waveguide 340 is lambada 5,λ4,...λ1 in sequence, and the response wavelength is consistent with that of the first array waveguide grating output channel. Compared with the conventional cascade connection of six arrayed waveguide gratings with different designs, the dual filtering can be realized, and the same filtering is completed by only two arrayed waveguide gratings to reduce crosstalk.
The beneficial effects of the invention are as follows:
1. according to the invention, by cascading two or more arrayed waveguide gratings with the same slab waveguides and array waveguides, the separation of mixed input wavelengths can be realized, and the crosstalk level is reduced;
2. the effect of twice filtering for single wavelength can be realized, and the crosstalk level of the same channel is greatly reduced;
3. The invention can cascade a plurality of wavelength division multiplexers for filtering for a plurality of times;
4. Compared with the traditional scheme that each arrayed waveguide grating output channel is independently integrated with one arrayed waveguide grating for filtering, the size is more compact, and a wavelength division multiplexing solution is provided, so that the method is suitable for large-scale integration.
Drawings
FIG. 1 is a schematic diagram of a low crosstalk wavelength division multiplexer based on cascaded arrayed waveguide gratings according to the present invention;
fig. 2 is a schematic structural diagram of a first arrayed waveguide grating output slab waveguide 320 according to the present invention;
fig. 3 is a schematic structural diagram of a second arrayed waveguide grating input slab waveguide 330 according to the present invention;
fig. 4 is a schematic structural diagram of a second arrayed waveguide grating output slab waveguide 340 according to the present invention;
the reference numerals in the figure are 100-input waveguide, AWG 1-first array waveguide grating, AWG 2-second array waveguide grating, 310-first array waveguide grating input slab waveguide, 210-array waveguide I, 320-first array waveguide grating output slab waveguide, 400-transmission waveguide, 500-crisscross waveguide, 330-second array waveguide grating input slab waveguide, 220-array waveguide II, 340-second array waveguide grating output slab waveguide, 600-output waveguide.
Detailed Description
The invention will be further described with reference to the drawings and the specific examples.
The embodiment 1 is as shown in figure 1, a low-crosstalk wavelength division multiplexer based on cascaded array waveguide gratings, wherein the substrate comprises a wafer, an oxygen buried layer, a device layer and an SiO 2 upper cladding layer of the device layer from bottom to top, the device layer comprises an input waveguide 100 and two cascaded array waveguide gratings, the input waveguide 100 is connected with an input optical fiber, the two array waveguide gratings have the same structure, one array waveguide grating comprises a first array waveguide grating AWG1 and a second array waveguide grating AWG2, the first array waveguide grating AWG1 comprises a first array waveguide grating input slab waveguide 310, an array waveguide I210 and a first array waveguide grating output slab waveguide 320, and the second array waveguide grating AWG2 comprises a second array waveguide grating input slab waveguide 330, an array waveguide II220 and a second array waveguide grating output slab waveguide 340, and is sequentially connected;
The input waveguide 100 is connected to the first array waveguide grating input slab waveguide 310, the first array waveguide grating output slab waveguide 320 is connected to the transmission waveguide 400, the transmission waveguide 400 is connected to the crisscross waveguide 500, the crisscross waveguide 500 is connected to the second array waveguide grating input slab waveguide 330, and the second array waveguide grating output slab waveguide 340 is connected to the output waveguide 600, so as to realize the twice filtering output of the array waveguide grating on the optical signal, and greatly reduce the crosstalk level of the optical signal.
As a further scheme of the invention, the output channel spacing of all cascaded arrayed waveguide gratings is consistent and d, and the input channel spacing of each cascaded arrayed waveguide grating after the first arrayed waveguide grating is twice the output channel spacing of the first arrayed waveguide grating, namely 2 x d.
As a further scheme of the present invention, the optical signal input by the input optical fiber sequentially passes through the input waveguide 100, the first arrayed waveguide grating input slab waveguide 310, the arrayed waveguide I210, the first arrayed waveguide grating output slab waveguide 320, the transmission waveguide 400, the crisscross waveguide 500, the second arrayed waveguide grating input slab waveguide 330, the arrayed waveguide II220, the second arrayed waveguide grating output slab waveguide 340, and the output waveguide 600 to output the twice filtered optical signal.
As a further scheme of the invention, the structures of the flat waveguides of the first array waveguide grating AWG1 and the second array waveguide grating AWG2 are completely consistent with those of the array waveguide gratings with any channel spacing and any channel number, and the cross talk can be reduced after the two array waveguide gratings are cascaded according to the transmission waveguide connection mode of the invention.
The first arrayed waveguide grating AWG1 and the second arrayed waveguide grating AWG2 are provided with five output channels, the second arrayed waveguide grating AWG2 is provided with five input channels, the optical signals output by the first left output waveguide of the first arrayed waveguide grating AWG1 are input into the first left input waveguide of the second arrayed waveguide grating AWG2 through the transmission waveguide 400 and the cross waveguide 500, the optical signals output by the second left output waveguide of the first arrayed waveguide grating AWG1 are input into the second left input waveguide of the second arrayed waveguide grating AWG2 through the transmission waveguide 400 and the cross waveguide 500, and the optical signals output by the fifth left output waveguide of the first arrayed waveguide grating AWG1 are input into the fifth left input waveguide of the second arrayed waveguide grating AWG2 through the transmission waveguide 400 and the cross waveguide 500.
As a further scheme of the invention, the arrayed waveguide grating adopts a disc type or saddle type.
The input waveguide 100 inputs the mixed wavelength lambda 1-λ5 while entering the first array waveguide grating AWG1, then the wavelength lambda 1 is Output from Output1 of the first array waveguide grating Output slab waveguide 320 in fig. 2, the wavelength lambda 2 is Output from Output2 of the first array waveguide grating Output slab waveguide 320, the wavelength lambda 3 is Output from Output3 of the first array waveguide grating Output slab waveguide 320, the wavelength lambda 4 is Output from Output4 of the first array waveguide grating Output slab waveguide 320, and the wavelength lambda 5 is Output from Output5 of the first array waveguide grating Output slab waveguide 320 in fig. 2.
When the wavelength λ 1 enters the input1 of the second arrayed waveguide grating input slab waveguide 330 in fig. 3 through the transmission waveguide 400 and the crisscross waveguide 500, the input waveguide pitch between the input1 and the input3 is 4d, and thus the focused output wavelengths of the five output channels of the second arrayed waveguide grating output slab waveguide 340 are λ 1-4Δλ,λ2-4Δλ,λ3-4Δλ,λ4-4Δλ,λ5 -4Δλ, respectively, at this time, since the wavelength input through the input1 channel of the second arrayed waveguide grating AWG2 is only λ 1, and λ 1＝λ5 -4Δλ. Thus, wavelength λ 1 is filtered through AWG2 and focused at ouput5 * of the second arrayed waveguide grating output slab waveguide 340 in fig. 4, and finally wavelength λ 1 is output through ouput5 *.
When the wavelength λ 2 enters the input2 of the second arrayed waveguide grating input slab waveguide 330 in fig. 3 through the transmission waveguide 400 and the crisscross waveguide 500, the input waveguide pitch between the input2 and the input3 is 2d, and thus the focused output wavelengths of the five output channels of the second arrayed waveguide grating output slab waveguide 340 are λ 1-2Δλ,λ2-2Δλ,λ3-2Δλ,λ4-2Δλ,λ5 -2Δλ, respectively, at this time, since the wavelength input through the input2 channel of the AWG2 is only λ 2, and λ 2＝λ4 -2Δλ. Thus, wavelength λ 2 is filtered through the second arrayed waveguide grating AWG2, and then focused at ouput and * positions of slab waveguide 340 in fig. 4, and finally wavelength λ 2 is output through ouput, 4 and *.
When the wavelength λ 3 enters the input3 of the second arrayed waveguide grating input slab waveguide 330 in fig. 3 through the transmission waveguide 400 and the crisscross waveguide 500, the input3 is the central input waveguide, so that the focused output wavelengths of the five output channels of the second arrayed waveguide grating output slab waveguide 340 are λ 1,λ2,λ3,λ4,λ5 respectively, at this time, since the wavelength input through the input3 channel of the AWG2 is only λ 3, the wavelength λ 3 is filtered through the second arrayed waveguide grating AWG2, and then focused at the ouput3 * position of the second arrayed waveguide grating output slab waveguide 340 in fig. 4, and finally the wavelength λ is output through ouput3 * 3
When the wavelength λ 4 enters the input4 of the second arrayed waveguide grating input slab waveguide 330 in fig. 3 through the transmission waveguide 400 and the crisscross waveguide 500, the input waveguide spacing between the input4 and the input3 is 2d, and thus the focused output wavelengths of the five output channels of the second arrayed waveguide grating output slab waveguide 340 are λ 1+2Δλ,λ2+2Δλ,λ3+2Δλ,λ4+2Δλ,λ5 +2Δλ, respectively, at this time, since the wavelength input through the input2 channel of AWG2 is only λ 4, and λ 4＝λ2 +2Δλ. Thus, wavelength λ 4 is filtered through AWG2 and then focused at ouput and * of the second arrayed waveguide grating output slab waveguide 340 in fig. 4, and finally wavelength λ 4 is output through ouput and 2 *.
When the wavelength λ 5 enters the input5 of the second arrayed waveguide grating input slab waveguide 330 in fig. 3 through the transmission waveguide 400 and the crisscross waveguide 500, the input waveguide spacing between the input5 and the input3 is 4d, and thus the focused output wavelengths of the five output channels of the second arrayed waveguide grating output slab waveguide 340 are λ 1+4Δλ,λ2+4Δλ,λ3+4Δλ,λ4+4Δλ,λ5 +4Δλ, respectively, at this time, since the wavelength input through the input1 channel of AWG2 is only λ 5, and λ 5＝λ1 +4Δλ. Thus, wavelength λ 5 is filtered by AWG2 and then focused at ouput and * of the second arrayed waveguide grating output slab waveguide 340 in fig. 4, and finally wavelength λ 5 is output by ouput and 1 *.
The invention can cascade two or more arrayed waveguide gratings and is used for realizing filtering and reducing crosstalk;
any type of nxn wavelength division multiplexer can replace the arrayed waveguide grating to realize the function of reducing crosstalk.
The preparation process of the present invention may be, for example, a process in which a pure silicon wafer is cleaned, thermally oxidized to obtain an oxygen buried layer, and the obtained surface is chemically polished by CMP technique to obtain a smooth surface. And depositing a silicon layer on the manufactured buried oxide layer by using an LPCVD technology, polishing, then carrying out photoetching, wherein the photoetching comprises photoresist throwing, exposure, development, drying, etching, photoresist removing and cleaning, and preparing a complete ridge structure and a strip waveguide structure to finish an array waveguide grating and a transmission waveguide structure. After cleaning, a PECVD method is adopted to deposit an SiO 2 cladding layer on the upper layer of the Si waveguide. To obtain a smooth and flat upper surface, CMP chemical mechanical polishing is used to obtain a smooth upper surface. Thus, the passive silicon-based low-crosstalk wavelength division multiplexing device is prepared.
Embodiment 2, a low crosstalk wavelength division multiplexer based on cascaded arrayed waveguide gratings, is different from embodiment 1 in that the number of cascaded arrayed waveguide gratings is 2, in embodiment 2, the number of cascaded arrayed waveguide gratings is 3, the number of output channels of the arrayed waveguide gratings is 8, and other structures are unchanged.
The channel interval of the three array waveguide gratings is 3.2nm, the output waveguide interval d of the three array waveguide gratings is 4nm, and the input waveguide interval of the second array waveguide grating and the third array waveguide grating is 8nm.
All input/output waveguides are defined as numbered 1, 2, 8 in order from left to right. The output waveguide 1 of the first array waveguide grating is connected with the input waveguide 8 of the second array waveguide grating, the output waveguide 2 of the first array waveguide grating is connected with the input waveguide 7 of the second array waveguide grating, and so on, and finally the output waveguide 8 of the first array waveguide grating is connected with the input waveguide 1 of the second array waveguide grating.
Output waveguides 1, 2,..8 of the second arrayed waveguide grating are connected in sequence to input waveguides 1, 2,..8 of the third arrayed waveguide grating.
While the present invention has been described in detail with reference to the drawings, the present invention is not limited to the above embodiments, and various changes can be made by those skilled in the art without departing from the spirit of the present invention.
Claims (7)
1. The low-crosstalk wavelength division multiplexer based on the cascade array waveguide grating comprises a substrate of a wafer, an oxygen-buried layer of the wafer, a device layer and an SiO 2 upper cladding of the device layer from bottom to top, and is characterized in that the device layer comprises an input waveguide (100), two or more cascade array waveguide gratings or a wavelength division multiplexer;
The input waveguide (100) is connected with an input optical fiber, each array waveguide grating comprises an array waveguide grating input flat waveguide, an array waveguide and an array waveguide grating output flat waveguide, the array waveguide grating input flat waveguide, the array waveguide and the array waveguide grating output flat waveguide are sequentially connected, two adjacent array waveguide gratings are sequentially connected through a transmission waveguide (400) and a crisscross waveguide (500), and the output end of the last array waveguide grating is connected with an output waveguide (600).
2. The low crosstalk wavelength division multiplexer based on cascaded array waveguide gratings according to claim 1, wherein the array waveguide gratings comprise a first array waveguide grating (AWG 1) and a second array waveguide grating (AWG 2), the first array waveguide grating (AWG 1) comprises a first array waveguide grating input slab waveguide (310), an array waveguide I (210) and a first array waveguide grating output slab waveguide (320) and are sequentially connected, and the second array waveguide grating (AWG 2) comprises a second array waveguide grating input slab waveguide (330), an array waveguide II (220) and a second array waveguide grating output slab waveguide (340) and are sequentially connected;
The input waveguide (100) is connected with the first array waveguide grating input flat waveguide (310), the first array waveguide grating output flat waveguide (320) is connected with the transmission waveguide (400), the transmission waveguide (400) is connected with the crisscross waveguide (500), the crisscross waveguide (500) is connected with the second array waveguide grating input flat waveguide (330), and the second array waveguide grating output flat waveguide (340) is connected with the output waveguide (600).
3. The low crosstalk wavelength division multiplexer according to claim 1, wherein the output channel pitches of all cascaded arrayed waveguide gratings are identical and d, and the input channel pitch of each arrayed waveguide grating cascaded after the first arrayed waveguide grating is twice the output channel pitch of the first arrayed waveguide grating, namely 2 x d.
4. The low crosstalk wavelength division multiplexer according to claim 2, wherein the optical signals input by the input optical fibers sequentially pass through the input waveguide 100, the first array waveguide grating input slab waveguide (310), the array waveguide I (210), the first array waveguide grating output slab waveguide (320), the transmission waveguide (400), the crisscross waveguide (500), the second array waveguide grating input slab waveguide (330), the array waveguide II (220), the second array waveguide grating output slab waveguide (340), and the output waveguide (600) to output the twice filtered optical signals.
5. The low crosstalk wavelength division multiplexer according to claim 2, wherein the slab waveguides of the first arrayed waveguide grating (AWG 1) and the second arrayed waveguide grating (AWG 2) are identical to the arrayed waveguide grating with any channel spacing and any channel number.
6. The low crosstalk wavelength division multiplexer according to claim 2, wherein the first arrayed waveguide grating (AWG 1) and the second arrayed waveguide grating (AWG 2) have five output channels, the second arrayed waveguide grating (AWG 2) has five input channels, the optical signal output by the first left output waveguide of the first arrayed waveguide grating (AWG 1) is input to the first left input waveguide of the second arrayed waveguide grating (AWG 2) through the transmission waveguide (400) and the cross waveguide (500), and the optical signal output by the second left output waveguide of the first arrayed waveguide grating (AWG 1) is input to the second left input waveguide of the second arrayed waveguide grating (AWG 2) through the transmission waveguide (400) and the cross waveguide (500), and the optical signal output by the fifth left output waveguide of the first arrayed waveguide grating (AWG 1) is input to the fifth left input waveguide of the second arrayed waveguide grating (AWG 2) through the transmission waveguide (400) and the cross waveguide (500), and so on.
7. The low crosstalk wavelength division multiplexer based on cascaded arrayed waveguide gratings according to claim 1, wherein the arrayed waveguide gratings are disk-type or saddle-type.
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