CN119268607A - A F-P standard tool parallelism detection and calibration method - Google Patents
A F-P standard tool parallelism detection and calibration method Download PDFInfo
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- CN119268607A CN119268607A CN202411783866.4A CN202411783866A CN119268607A CN 119268607 A CN119268607 A CN 119268607A CN 202411783866 A CN202411783866 A CN 202411783866A CN 119268607 A CN119268607 A CN 119268607A
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- 238000001228 spectrum Methods 0.000 claims description 42
- 238000013519 translation Methods 0.000 claims description 5
- 238000003384 imaging method Methods 0.000 claims description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 3
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- 238000010586 diagram Methods 0.000 description 3
- 238000000691 measurement method Methods 0.000 description 3
- 230000008859 change Effects 0.000 description 2
- 238000011326 mechanical measurement Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
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- 239000013307 optical fiber Substances 0.000 description 2
- 239000011295 pitch Substances 0.000 description 2
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- 238000004611 spectroscopical analysis Methods 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/26—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
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Abstract
本发明属于光学领域，本发明公开了一种F‑P标准具平行度检测校准方法，具体是采用带有子孔径的掩膜对法珀标准具的通光孔径进行分割，通过光谱仪同时获取法珀标准具不同区域的光谱曲线，通过比对标准具局部区域光谱曲线的相对偏移，精确测量各局部区域平板间距的差异，实现法珀标准具平行度的检测和实时校准，不需要精密的移动机构、不受光源稳定性和检测环境的影响，测量和校准精度可以达到纳米量级。
The invention belongs to the field of optics and discloses a method for detecting and calibrating the parallelism of an F‑P etalon. Specifically, a mask with sub-apertures is used to segment the clear aperture of a Fabry-Perot etalon, spectral curves of different regions of the Fabry-Perot etalon are simultaneously acquired by a spectrometer, and the relative offset of spectral curves of local regions of the etalon is compared to accurately measure the difference in plate spacings in each local region, thereby realizing detection and real-time calibration of the parallelism of the Fabry-Perot etalon. The method does not require a precise moving mechanism and is not affected by the stability of a light source and a detection environment, and the measurement and calibration accuracy can reach nanometer level.
Description
Technical Field
The invention belongs to the field of optics, and particularly relates to a method for detecting and calibrating parallelism of an F-P etalon.
Background
The F-P (Fabry-Perot) etalon mainly comprises two parallel fused quartz plates, wherein a high-reflectivity film layer is plated on the inner sides of the plates, a medium between the plates is air, and the distance between the plates is fixed through a gasket (or a space ring). The Fabry-Perot etalon is based on the principle of multi-beam interference, and light enters the Fabry-Perot cavity to be reflected between two flat plates for multiple times to form multi-beam interference. The Fabry-Perot standard has the advantages of high spectrum resolution, accurate measurement precision, good stability, easy integration and the like, and is widely applied to the fields of spectroscopy, laser technology, optical communication, astronomy, biomedicine, industrial detection and the like.
The parallelism of the two plates of the Fabry-Perot etalon determines the spectral line half width and the transmitted light intensity of the etalon, and is a key parameter for evaluating the performance of the etalon. The method mainly comprises a mechanical measurement method, an autocollimation method, an interferometric measurement method, a phase-shifting mechanical structure and a data processing system, wherein the mechanical measurement method is used for directly measuring the distance change between two flat plates, the method belongs to contact measurement, physical damage or pollution can be caused to the reflecting surface of the flat plates, meanwhile, the measurement precision is lower, and can only reach the micrometer level, the autocollimation method utilizes the autocollimation principle, light beams emitted by a laser are respectively reflected by the two working surfaces, then imaged on a focal plane, the parallelism of the two flat plates is calculated according to the relative position of an image point, the measurement precision is lower although the measurement precision is not physically damaged to the reflecting surface, the micrometer level is also the same, the interferometric measurement method is also the micrometer level, the counting, the uniformity and the change condition of interference fringes are analyzed by changing the phase difference of the interference light beams, and the parallelism between the two flat plates are obtained, the traditional interferometric measurement method is limited by factors such as artificial experience and the resolution of an imaging system, the measurement precision is only lambda/10-lambda/20, then the measurement precision is improved to lambda/50 by adopting a precise phase-shifting mechanical structure and a data processing system, and finally, the phase-shifting precision is increased by adopting a wavelength adjustable device, the phase-shifting mechanism, the phase-shifting precision is greatly, the measurement precision can not be influenced by the laser measurement precision is high, but the measurement precision is high, and the accuracy is high when the phase-shifting precision is high, the measurement precision has the measurement precision can be greatly has the high when the measured, and the high and the phase-stable condition has the high and the condition has the high requirements and can be greatly when the high measured.
Disclosure of Invention
The invention provides a method for detecting and calibrating parallelism of a Fabry-Perot etalon, which aims to solve the technical problem that a mask with sub-apertures is adopted to divide the clear aperture of the Fabry-Perot etalon, corresponding spectrum curves are generated after light beams pass through local areas of the Fabry-Perot etalon corresponding to the sub-apertures, and the difference of plate distances of the local areas is accurately measured by comparing the relative offset of the spectrum curves.
The utility model provides a calibration method is detected to F-P (Fabry-Perot) etalon parallelism, fabry-Perot etalon comprises two parallel flat boards, the flat board is fused quartz material, and is equipped with the clear aperture, specifically includes following step:
step 1, placing a mask on a clear aperture of a Fabry-Perot etalon, wherein n clear sub apertures are distributed around the edge of the mask in pairs, each sub aperture is matched with a region of the Fabry-Perot etalon, and the plate spacing of the corresponding region is h n;
Step 2, forming collimated light beams by collimating light emitted by a broadband continuous spectrum light source, respectively injecting the collimated light beams into n sub-apertures on a mask and corresponding Fabry-Perot etalon regions, and converging the collimated light beams onto a focal plane through an imaging mirror;
step 3, shielding the sub-aperture on the mask, only reserving a pair of sub-apertures corresponding to the direction for transmitting light, and measuring the spectrum curve of the image point on the focal plane by using a spectrometer;
When two flat plates of the Fabry-Perot etalon are not parallel, the flat plate distance h n corresponding to the two sub-apertures is inconsistent, and at the moment, the two sub-apertures obtain two spectrum curves;
Step4, comparing the offset delta lambda of the two spectrum curves,
(1)
Wherein h is the spacing and lambda is the wavelength
Calculating a difference delta h of plate distances corresponding to the two sub-apertures according to the formula (1);
step 5, the center distance of the two sub-apertures is L,
(2)
Obtaining the relative inclination delta theta of two flat plates of the Fabry-Perot etalon in the direction according to the formula (2) and the directions of the pair of sub-apertures;
Step 6, adjusting a gasket (or a space ring) between two flat plates of the Fabry-Perot etalon according to the flat plate inclination delta theta and the inclination direction, observing translation conditions of two spectrum curves at the same time, and when the two spectrum curves are completely coincident, indicating that the Fabry-Perot etalon is parallel in the direction;
Step 7, replacing the through sub-aperture on the mask, and repeating the steps 3 to 6;
and 8, enabling all sub-apertures on the mask to be transparent, and when the spectrum curves of all the sub-apertures are coincident, completely paralleling two flat plates of the F-P etalon.
Compared with the prior art, the invention has the beneficial effects that:
(1) According to the method, the spectrum curves of different areas of the F-P (Fabry-Perot) etalon are obtained simultaneously, the parallelism of the Fabry-Perot etalon is detected and calibrated by comparing the relative offset of the spectrum curves, a precise moving mechanism is not needed, the influence of the stability of a light source and the detection environment is avoided, and the measuring and calibrating effects are better;
(2) According to the invention, the spectrum curve of the local area of the Fabry-Perot etalon is measured through the spectrometer, so that the detection and calibration accuracy depends on the spectrometer used, and the spectrometer has higher spectrum resolution, so that the detection and calibration accuracy is higher, and can reach the nanometer level;
(3) According to the orientation of the sub-aperture on the mask, the inclination direction of the Fabry-Perot etalon flat plate can be clarified, and the parallelism of the Fabry-Perot etalon can be calibrated in real time by observing a spectrum curve.
Drawings
FIG. 1 is a schematic diagram of a F-P (Fabry-Perot) etalon parallelism detection and calibration system provided by the invention;
FIG. 2 is a schematic diagram of a mask and sub-aperture provided by the present invention;
Fig. 3 is a schematic diagram of a difference between plate pitches of a local area of a fabry-perot etalon corresponding to a sub-aperture provided by the present invention;
FIG. 4 is a graph showing the spectrum of a light beam provided by the present invention after passing through sub-apertures 1 and 3;
FIG. 5 is a graph showing the spectrum of a light beam provided by the present invention after passing through sub-apertures 2 and 4;
fig. 6 is a graph of the spectrum of a light beam provided by the present invention after passing through all sub-apertures.
The ordinate it/li of fig. 4 to 6 is the ratio of the current of electrons to the intensity of the incident light.
Detailed Description
In the following description, for purposes of explanation and not limitation, specific details are set forth such as the particular system architecture, techniques, etc., in order to provide a thorough understanding of the embodiments of the present application. It will be apparent, however, to one skilled in the art that the present application may be practiced in other embodiments that depart from these specific details. In other instances, detailed descriptions of well-known systems, devices, circuits, and methods are omitted so as not to obscure the description of the present application with unnecessary detail.
It should be understood that the terms "comprises" and/or "comprising," when used in this specification and the appended claims, specify the presence of stated features, integers, steps, operations, elements, and/or components, but do not preclude the presence or addition of one or more other features, integers, steps, operations, elements, components, and/or groups thereof.
It should also be understood that the term "and/or" as used in the present specification and the appended claims refers to any and all possible combinations of one or more of the associated listed items, and includes such combinations.
As used in the present description and the appended claims, the term "if" may be interpreted as "when..once" or "in response to a determination" or "in response to detection" depending on the context. Similarly, the phrase "if a determination" or "if a [ described condition or event ] is detected" may be interpreted in the context of meaning "upon determination" or "in response to determination" or "upon detection of a [ described condition or event ]" or "in response to detection of a [ described condition or event ]".
Furthermore, the terms "first," "second," "third," and the like in the description of the present specification and in the appended claims, are used for distinguishing between descriptions and not necessarily for indicating or implying a relative importance.
Reference in the specification to "one embodiment" or "some embodiments" or the like means that a particular feature, structure, or characteristic described in connection with the embodiment is included in one or more embodiments of the application. Thus, appearances of the phrases "in one embodiment," "in some embodiments," "in other embodiments," and the like in the specification are not necessarily all referring to the same embodiment, but mean "one or more but not all embodiments" unless expressly specified otherwise. The terms "comprising," "including," "having," and variations thereof mean "including but not limited to," unless expressly specified otherwise.
In one possible implementation manner, the embodiment provides a method for detecting and calibrating parallelism of an F-P (fabry-perot) etalon, as shown in fig. 1, specifically including the following steps:
Step 1, placing a mask on a clear aperture of a Fabry-Perot etalon, and distributing n sub clear apertures in pairs in different directions at the edge of the mask;
as shown in fig. 2;
the different sub-apertures correspond to different regions of the F-P etalon, with a plate spacing of h n for each region, as shown in figure 3;
Step 2, forming collimated light beams by collimating light emitted by a broadband continuous spectrum light source, respectively injecting the collimated light beams into n sub-apertures of a mask and corresponding Fabry-Perot etalon regions, and converging the collimated light beams onto a focal plane through an imaging mirror;
step 3, shielding the sub-apertures on the mask, enabling only one pair of sub-apertures corresponding to the direction to transmit light, measuring the spectrum curves of image points on the focal plane by using a spectrometer, and when two flat plates of the Fabry-Perot etalon are not parallel, enabling the flat plate distances h n corresponding to the two sub-apertures to be inconsistent, wherein two spectrum curves can be obtained by the two sub-apertures;
As shown in fig. 4-5;
step 4, comparing the offset delta lambda of the two spectrum curves, and calculating a difference delta h of the plate spacing corresponding to the two sub-apertures according to a formula (1);
(1)
As shown in FIG. 3, h is the pitch and λ is the wavelength
Step 5, the center distance of the two sub-apertures is L, and the relative inclination delta theta of the two flat plates of the F-P etalon in the direction can be obtained according to the formula (2) and the directions of the pair of sub-apertures;
(2)
step 6, adjusting a gasket (or a space ring) between two flat plates of the Fabry-Perot etalon according to the inclination amount and the inclination direction of the flat plates, observing translation conditions of two spectrum curves at the same time, and when the two spectrum curves are completely overlapped, indicating that the Fabry-Perot etalon is parallel in the direction;
Step 7, replacing the through sub-aperture on the mask, and repeating the steps 3 to 6;
Step 8, enabling all sub apertures on the mask to be transparent, and when the spectrum curves of all sub apertures are coincident, enabling two flat plates of the F-P etalon to be completely parallel;
as shown in fig. 6.
In another embodiment, the distance between the Fabry-Perot etalon plates to be detected is 100.0827 mu m, the center wavelength is 656.28nm, and the light transmission caliber is 30 mm;
The outer diameter of the mask is 30mm, 4 sub-apertures are uniformly distributed at the edge of the mask, the sub-apertures 1 and 3 correspond to the y direction of the Fabry-Perot etalon, the sub-apertures 2 and 4 correspond to the x direction of the Fabry-Perot etalon, the diameter of the sub-aperture is 4mm, and the center distance L of the sub-aperture is 22mm;
The light source adopts a halogen lamp, the spectrometer adopts an Ocean Optics high-resolution optical fiber spectrometer, and the spectral resolution is 0.08nm;
Shielding the sub-apertures 2 and 4, converging light beams to a focal plane after passing through the sub-apertures 1 and 3, measuring image points by using a spectrometer to obtain two spectrum curves, wherein the offset delta lambda of the two spectrum curves near the wavelength of 656.28nm is 0.38nm, and calculating a plate distance difference delta h y corresponding to the sub-apertures 1 and 3 by using a formula (1) to be 57.95nm;
The center distance L between the sub-apertures 1 and 3 is 22mm, and the relative inclination delta theta y of the two flat plates of the Fabry-Perot etalon in the y direction is calculated to be 0.54' by using a formula (2);
according to the inclination amount and inclination direction of the flat plates, adjusting a gasket between two flat plates of the Fabry-Perot etalon, observing translation conditions of two spectrum curves at the same time, and when the two spectrum curves are completely coincident, indicating that the Fabry-Perot etalon is parallel in the y direction;
shielding the sub-apertures 1 and 3, converging light beams to a focal plane after passing through the sub-apertures 2 and 4, measuring image points by using a spectrometer to obtain two spectrum curves, wherein the offset delta lambda of the two spectrum curves near the wavelength of 656.28nm is 0.41nm, and calculating a plate distance difference delta h x corresponding to the sub-apertures 2 and 4 by using a formula (1) to be 62.525nm;
The center distance L between the sub-apertures 2 and 4 is 22mm, and the relative inclination delta theta x of the two flat plates of the Fabry-Perot etalon in the x direction is calculated to be 0.59' by using a formula (2);
According to the inclination amount and inclination direction of the flat plates, the gasket between the two flat plates of the Fabry-Perot standard tool is adjusted, and the translation condition of the two spectrum curves is observed,
When the two spectrum curves are completely coincident, the Fabry-Perot etalon is parallel in the x direction;
the sub-apertures are not shielded, as in fig. 2, the sub-apertures 1,2,3 and 4 are all led to light, and when the 4 spectrum curves of the 4 sub-apertures are all coincident, the two flat plates of the fabry-perot etalon are completely parallel;
The detection and calibration accuracy of the invention depends on the spectrum resolution of the spectrometer, the resolution of the Ocean Optics high-resolution optical fiber spectrometer is 0.08nm, the measurement accuracy of the difference value of the plate spacing in the local area of the Fabry-Perot etalon can be calculated according to the formula (1) to be 12.2nm, and the parallelism detection and calibration accuracy of the Fabry-Perot etalon is calculated according to the formula (2) to be 0.11".
In the foregoing embodiments, the descriptions of the embodiments are emphasized, and in part, not described or illustrated in any particular embodiment, reference is made to the related descriptions of other embodiments.
The foregoing embodiments are merely illustrative of the technical solutions of the present application, and not restrictive, and although the present application has been described in detail with reference to the foregoing embodiments, it should be understood by those skilled in the art that modifications may still be made to the technical solutions described in the foregoing embodiments or equivalent substitutions of some technical features thereof, and that such modifications or substitutions do not depart from the spirit and scope of the technical solutions of the embodiments of the present application.
Claims (1)
1. The F-P etalon comprises two parallel flat plates which are made of fused quartz and provided with clear apertures, and is characterized by comprising the following steps:
step 1, placing a mask on a clear aperture of a Fabry-Perot etalon, wherein n clear sub apertures are distributed around the edge of the mask in pairs, each sub aperture is matched with a region of the Fabry-Perot etalon, and the plate spacing of the corresponding region is h n;
Step 2, forming collimated light beams by collimating light emitted by a broadband continuous spectrum light source, respectively injecting the collimated light beams into n sub-apertures on a mask and corresponding Fabry-Perot etalon regions, and converging the collimated light beams onto a focal plane through an imaging mirror;
step 3, shielding the sub-aperture on the mask, only reserving a pair of sub-apertures corresponding to the direction for transmitting light, and measuring the spectrum curve of the image point on the focal plane by using a spectrometer;
When two flat plates of the Fabry-Perot etalon are not parallel, the flat plate distance h n corresponding to the two sub-apertures is inconsistent, and at the moment, the two sub-apertures obtain two spectrum curves;
Step4, comparing the offset delta lambda of the two spectrum curves,
(1)
Calculating a difference delta h of the plate spacing corresponding to the two sub-apertures according to the formula (1), wherein h is the spacing, and lambda is the wavelength;
step 5, the center distance of the two sub-apertures is L,
(2)
Obtaining the relative inclination delta theta of two flat plates of the Fabry-Perot etalon in the direction according to the formula (2) and the directions of the pair of sub-apertures;
Step 6, adjusting a gasket (or a space ring) between two flat plates of the Fabry-Perot etalon according to the flat plate inclination delta theta and the inclination direction, observing translation conditions of two spectrum curves at the same time, and when the two spectrum curves are completely coincident, indicating that the Fabry-Perot etalon is parallel in the direction;
Step 7, replacing the through sub-aperture on the mask, and repeating the steps 3 to 6;
and 8, enabling all sub-apertures on the mask to be transparent, and when the spectrum curves of all the sub-apertures are coincident, completely paralleling the two flat plates of the Fabry-Perot etalon.
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| 龚鹏伟: "太赫兹时域光谱仪校准技术", 宇航计测技术, no. 05, 15 October 2016 (2016-10-15), pages 9 - 15 * |
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| CN119268607B (en) | 2025-03-14 |
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