CN119163880A - Automatic phosphorus trifluoride filling equipment - Google Patents

Abstract

The invention discloses automatic phosphorus trifluoride filling equipment which comprises a conveying pipe, an outer cladding pipe, an outer shell, a feeding end, a discharging end, a conveying pipe, a filling structure, a filter element shell, a reversing guide structure, an outer bottom pulling structure, a leakage point detection structure, a multi-baffle filter element structure, a first filter cylinder, a first sealing plate, a first filter ring plate, a second filter cylinder, an outer ring baffle, a second sealing plate, a retention frame and a discharging slide pipe, wherein the reversing guide structure comprises a first reversing guide plate, a second reversing plate and a reversing piece, movable conducting pieces are arranged on the reversing piece, a relay pipe is connected between the two movable conducting pieces, the leakage point detection structure comprises a first leakage point detector and a second leakage point detector, the reciprocating recoil assembly comprises a swinging piece and a guide seat, the multi-baffle filter element structure comprises a first feeding filter cylinder, a first sealing plate, a first filter ring plate, a second feeding filter cylinder, an outer ring baffle, a second sealing plate, a second filter ring plate, a retention frame and a discharging slide pipe, and an outer bottom pulling structure comprises a fixed seat, an elastic pipe and a quick connector.

Description

Automatic phosphorus trifluoride filling equipment

Technical Field

The invention relates to automatic filling equipment, in particular to automatic phosphorus trifluoride filling equipment.

Background

The phosphorus trifluoride can be used as a fluorinating agent, can be used for ion transfer and applied to the fields of electronic industry, battery manufacturing, high polymer materials, catalysts and the like, can be changed into plasma gas under the action of microwaves to be doped into semiconductors in the aspect of semiconductor manufacturing, can be used as reactants in the field of high polymer materials to synthesize high polymer materials with good corrosion resistance such as fluorinated organic dithiophosphate, terephthalate and the like, is gas at normal temperature, needs to be condensed into liquid at low temperature for filling, is mostly filled automatically, and needs to consider two problems in the filling process, on one hand, whether a pipeline for filling is safe or not, and on the other hand, whether the purity of the filled phosphorus trifluoride meets the requirement or not.

The traditional filter element of phosphorus trifluoride adopts an anti-corrosion filter membrane to filter phosphorus trifluoride liquid and adopts a permeation mode to filter the phosphorus trifluoride liquid, but the precision of the filter membrane is not good, if the filter membrane is arranged to be thinner, the front end of the filter membrane is excessively loaded and is easy to block, if the filter membrane is arranged to be thicker, small particles can leak through, the filter membrane is arranged to be a plurality of layers in the prior art, the filter membrane is sequentially thickened to be thinner, a plurality of layers of filter layers are formed, particles are filtered by one layer to improve the purity of the phosphorus trifluoride, so that the purity can be improved, the repeated and densely distributed filter layers not only affect the filtering efficiency, but also prevent the backflushing efficiency of the filter cloth at the foremost end from being extremely poor, and the filter cloth at the foremost end can not be backflushed cleanly.

Disclosure of Invention

The invention provides an automatic phosphorus trifluoride filling device, which can protect pipelines, can conduct phosphorus trifluoride liquid to other pipelines after the pipelines leak, and simultaneously utilizes a special pipeline structure and an external pipeline detection structure to cope with long pipelines, so that the number of the pipeline detection structures is reduced, the detection sensitivity is improved, meanwhile, multi-section and interval type filtration can be formed, the whole filter element can automatically vibrate due to the loss of external pressure after filtration, the acting force after vibration can lead a filter membrane to automatically reverse materials and concentrate the reverse materials to the bottom of the filter element, and the filter membrane or a filter plate is cleaned immediately after single filtration, thereby prolonging the service life of the filter membrane or the filter plate and improving the filtration quality, and effectively solving the problems.

The invention is realized in the following way:

The utility model provides an automatic filling equipment of phosphorus trifluoride, contains the conveyer pipe that is used for carrying phosphorus trifluoride liquid, the outside cover of conveyer pipe is equipped with an outer cladding pipe, gap filling between outer cladding pipe and the conveyer pipe has inert gas, the feed end of a terminal connection shell body of conveyer pipe, one side that the feed end was kept away from to the shell body is provided with the discharge end, the feed end meets with the conveyer pipe, the discharge end meets with filling structure, the inside of shell body still is provided with a filter core casing, automatic filling equipment of phosphorus trifluoride still includes:

The reversing flow guiding structure comprises a first reversing guide plate and a second reversing plate which are arranged on the inner side of the conveying pipe, the arrangement directions of the first reversing guide plate and the second reversing plate are opposite and symmetrical to each other, the tops of the first reversing guide plate and the second reversing plate are connected with reversing pieces penetrating through the conveying pipe and the outer cladding pipe, the reversing pieces are provided with movable conducting pieces, and a relay pipe is connected between the two movable conducting pieces;

The leakage-proof detection structure comprises a sealing sleeve sleeved on the outer side of the conveying pipe, tension sensors are arranged on the two overturning pieces, the tension sensors are attached to the outer side surface of the sealing sleeve and are electrically connected with the power end of the overturning piece, when the tension sensors detect that the tension of the sealing sleeve is changed, the conveying pipe is judged to leak, the overturning piece is rotated to be communicated with the movable conducting piece, and the phosphorus trifluoride liquid is continuously conveyed along the relay pipe;

The leakage point detection structure comprises a half arc section and an eccentric section, wherein the half arc section is positioned at the upper end of the conveying pipe, the eccentric section is positioned at the lower end of the conveying pipe, the leakage point detection structure comprises a first leakage point detector which is arranged on the outer side of the half arc section in a sliding manner, a second leakage point detector is arranged on the outer side of the eccentric section in a sliding manner, and when the phosphorus trifluoride liquid leaks, the phosphorus trifluoride liquid can be sputtered onto the half arc section or the eccentric section and vibrate the half arc section or the eccentric section, and the phosphorus trifluoride liquid is detected by the first leakage point detector or the second leakage point detector;

The inner side of the outer shell is provided with a plurality of groups of bosses, the reciprocating recoil assembly comprises a swinging piece fixedly connected to the bosses, one end of the swinging piece, which is far away from the bosses, is connected to the filter element shell, the outer side of the filter element shell is fixedly connected with a plurality of groups of guide seats which are in sliding fit with the inner wall of the outer shell, when fluid is introduced into the filter element shell, the filter element shell extrudes towards the swinging piece at one side of the fluid flowing direction, and after the fluid is cut off, the filter element shell swings left and right under the action of the swinging piece;

The multi-baffle filter element structure is arranged in the filter element shell, the filter element shell is of a diamond structure, the multi-baffle filter element structure comprises a first feeding filter element movably connected with a feeding end, the first feeding filter element is connected with a first sealing plate, a first filtering ring plate is fixedly connected to the outer side of the first sealing plate, a second feeding filter element is connected to the rear side of the first sealing plate, an outer ring baffle is connected to the outer side of the middle position of the second feeding filter element, a second sealing plate is connected to the tail end of the second feeding filter element, a second filtering ring plate is fixedly connected to the outer side of the second sealing plate, the filter element shell is communicated with a discharging end, a retention frame is further arranged at the inner side position of a symmetrical shaft with a short diamond structure, partial particles are adhered to the retention frame after flowing through the middle position of the diamond structure, and the other end of the filter element shell is movably connected with the discharging end through a discharging sliding tube;

The outer bottom is taken out and is separated the structure, a plurality of horizontal link are had to the lower extreme of diamond structure, outer bottom is taken out and is separated the structure and is contained the fixing base of rigid coupling in the inside bottom of shell, the upper end of fixing base is provided with a plurality of elastic tubes, the lower extreme of fixing base is provided with a plurality of quick-operation joint, quick-operation joint butt joint suction structure.

As a further improvement, the first overturning guide plate and the second overturning guide plate have the same size, the first overturning guide plate comprises a circular plate with the same diameter as the inner diameter of the conveying pipe, the circular plate is arranged in a hollow mode, a liquid inlet groove is formed in one side of the circular plate, and the top of the circular plate is communicated with the overturning piece through a matching sleeve.

As a further improvement, the turnover piece comprises a reversing guide pipe inserted into the matching sleeve, a blocking head is arranged at the top of the reversing guide pipe, a rotating motor is arranged at the top of the blocking head, and the reversing guide pipe is driven to rotate when the rotating motor rotates.

As a further improvement, a first detection plate is arranged on the inner side of the eccentric section, the phosphorus trifluoride liquid leaked from the leakage point can be sputtered on the inner wall of the semi-arc section or the first detection plate, the first leakage point detector or the second leakage point detector can detect the impact force born by the semi-arc section or the first detection plate after sliding to the leakage position, and the first leakage point detector is connected with the second leakage point detector through two arc-shaped arms.

As a further improvement, the second leakage point detector comprises a sliding frame which is in sliding connection with the outer side of the eccentric section, one side, close to the eccentric section, of the sliding frame is provided with a vibration sensor attached to the outer side wall of the semi-arc section, the first detection plate is of an arc-shaped structure, and the inside of the arc-shaped structure is hollow.

As a further improvement, the swinging piece comprises a stabilizing head connected with the boss, a limiting cavity pipe is sleeved on the stabilizing head in a sliding manner in the direction of one side of the filter element shell, a spring is sleeved on the outer side of the stabilizing head, one end of the spring is connected to the boss, and the other end of the boss is fixedly connected to the limiting cavity pipe.

As a further improvement, the retention frame comprises a first retention member arranged on the left side of the outer ring baffle and a second retention member arranged on the right side of the outer ring baffle, wherein the first retention member and the second retention member have the same structure, and the proportion of the first retention member is 1.5 times that of the second retention member.

As a further improvement, the first retention member comprises a plurality of groups of inner inclined shafts and outer inclined shafts fixedly connected to the inner bottom of the filter element shell, and the inner inclined shafts and the outer inclined shafts form an X-shaped structure.

As a further improvement, the fixing seat comprises a mounting seat fixed at the inner bottom of the outer shell, and an angle-shaped limiting seat is arranged above the mounting seat and positioned at the bottom of the filter element shell.

As a further improvement, the elastic tube comprises a butt joint tube communicated with the quick joint, a corrugated tube is connected above the butt joint tube, and the top of the corrugated tube is connected with a connecting tube which is inserted into the transverse connecting frame.

The beneficial effects of the invention are as follows:

The invention improves the safety and the quality of filling by the filtration step at the front end of the transmission pipeline and the filling stage, and particularly comprises the following steps:

When the existing filter is used for filtering, the number and the precision of the filter plates or filter membranes are gradually increased to improve the precision of fluid filtration, so that although the precision of filtration can be improved, in the stage of backflushing treatment, the impact force of the backflushing structure at the tail end is quite small when the end is impacted to the front end, so that the tail end filter plates or filter membranes are cleaned cleanly, the backflushing effect of the filter plates or filter membranes at the front end and the middle section is quite poor, and the utilization efficiency after cleaning is lower.

The existing backflushing mode is generally to feed water for backflushing, but because the filter is horizontal, if water is fed for backflushing, when water remains in the filter, phosphorus trifluoride is fed to cause severe reaction easily, therefore, the invention sets up a reciprocating backflushing component on the basis of a multi-baffle filter element structure, when phosphorus trifluoride is fed into the filter element shell, the whole filter element shell can be pushed towards the direction of fluid flow, so that the right swinging piece is extruded, after the supply source of phosphorus trifluoride is closed, the filter element shell loses pressure, the swinging piece can start to reset and swing left and right to drive the whole filter element shell to swing left and right, at the moment, residual phosphorus trifluoride is pumped out at the position of the feed end, so that particles blocked by the multi-baffle filter element structure can drop to the bottom of the inside of the filter element shell under the action of external pumping force and the left and right swinging of the filter element shell, the filtering end at the front end or the rear end can be uniformly swung, further, the effect of each position can be formed, and the practical effect of the invention can be improved.

Particles backflushed by the multi-baffle filter element structure can fall on the bottom of the filter element shell, at the moment, the particles which are shaken off at the bottom are difficult to be pumped away by adopting a conventional air blowing mode, and the particles can be blocked by a sealing plate or an outer ring baffle, so the invention is provided with an outer bottom pumping structure on the basis of the multi-baffle filter element structure, thereby can be through the granule suction of the inside bottom of filter core casing to the fixing base in, through quick-operation joint ferry to outside, and because the elasticity setting of elastic tube, can take place deformation according to the displacement of filter core casing to can realize the developments and take out the material, take out the granule of the filter core casing bottom of slope, compare in traditional recoil, the mode effect of sloping bottom suction is better.

In the existing corrosive gas transmission pipeline, hidden danger caused by pipeline leakage is usually reduced by externally distributing inert gas, but in practice, the length of the whole pipeline is very long, once leakage occurs, not only the leakage point position is not well searched, but also filling is needed to be stopped, the gas of the pipeline is completely extracted and then detected, and the whole step is very long and very complicated, therefore, the invention is different from the existing pipeline sealing valve mode through the arranged reversing flow guiding structure after leakage occurs, the pipeline and the sealing piece can be directly used as an external flow guiding structure without stopping repair, and the flow route of the phosphorus trifluoride liquid can be immediately switched to the position along the relay pipe to flow after the leakage point of the pipeline is detected, so that the purpose of overhauling without stopping can be achieved, corrosive fluid can be coped with, and a special anti-corrosion structure is not required to be applied.

In order to realize the rapid detection of the whole area of the whole pipeline and rapidly and accurately judge whether leakage occurs or not when detecting whether leakage is prevented, the invention firstly sets the sealing sleeve with certain elasticity on the outer side of the whole pipeline through the arranged leakage prevention detection structure, and tests the tension of the sealing sleeve through the tension sensor, and the tension of the sealing sleeve changes when the sealing sleeve is corroded and disintegrated, thereby judging that the pipeline has leakage in real time, and further detecting leakage points and switching the pipeline in time.

After judging that the pipeline leaks, the invention is characterized in that the length of the whole pipeline is longer, and the pipeline is inspected step by means of manpower, so that the prior art is commonly provided with a plurality of detection structures at intervals, but the pipeline with a plurality of meters is provided with a plurality of groups of detection structures by the arrangement of a plurality of sections, the detection cost is very high, and the detection data is very redundant, therefore, the invention has the advantages of high safety and reliability by the arranged leakage point detection structures, through outside slip at outer cladding pipe sets up first leak point detector and second leak point detector, the liquid that the leak point splattered can wash away the inner wall of outer cladding pipe constantly to can let first leak point detector in the slip and the vibration of outer cladding pipe that the second leak point detector detected the leak point position corresponds, thereby can be accurate, quick judgement leak point when leaking to long distance pipeline, need not to carry out a plurality of detection structure settings of single section, only need set up one can.

Drawings

In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings that are needed in the embodiments will be briefly described below, it being understood that the following drawings only illustrate some examples of the present invention and therefore should not be considered as limiting the scope, and other related drawings may be obtained according to these drawings without inventive effort for a person skilled in the art.

Fig. 1 is a schematic structural view of the present invention.

Fig. 2 is a schematic view of the structure of the connection of the outer shell with the delivery tube and the infusion tube.

Fig. 3 is a schematic diagram of the structure of fig. 2 of the present invention.

FIG. 4 is a cross-sectional view of the invention shown in FIG. 3 A-A.

Figure 5 is an isometric cross-sectional view of the invention from figure 3 A-A.

FIG. 6 is a schematic structural view of the multi-baffle cartridge structure of the present invention.

Fig. 7 is a schematic structural view of the rocking member of the present invention.

FIG. 8 is a schematic view of an outsole extraction structure of the present invention.

Fig. 9 is a schematic view of a three-dimensional structure (first view) of a conveying pipe and an outer covering pipe according to the present invention.

Fig. 10 is a schematic view of a three-dimensional structure of a conveying pipe and an outer covering pipe (second view angle) according to the present invention.

Fig. 11 is a top view of fig. 10 in accordance with the present invention.

FIG. 12 is a cross-sectional view taken at B-B of FIG. 11 in accordance with the present invention.

Fig. 13 is a schematic diagram of the left-hand construction of fig. 12 in accordance with the present invention.

Fig. 14 is a schematic structural view of the reversing diversion structure of the present invention.

FIG. 15 is a schematic view of a leak detection structure according to the present invention.

In the figure:

The device comprises an outer housing 1, a feed end 101, a discharge end 102, a boss 103, a cartridge housing 2, a cross connecting frame 201, a mounting frame 202, a reciprocating recoil assembly 3, a swinging member 301, a stabilizing head 3011, a limiting cavity tube 3012, a spring 3013, a guide base 302, a multi-baffle cartridge structure 4, a first feed cartridge 401, a first closing plate 402, a first filter ring plate 403, a second feed cartridge 404, an outer ring baffle 405, a second closing plate 406, a second filter ring plate 407, a retention frame 408, a first retention member 4081, an inner inclined shaft 40801, an outer inclined shaft 40802, a second retention member 4082, a discharge slide 409, an outer bottom withdrawal structure 5, a mounting base 501, a mounting base 5011, a limiting base 5012, an elastic tube 502, a docking tube 5021, a bellows 5022, a connecting tube 5023, a delivery tube 10, an outer covering tube 20, a semi-arc segment 21, an eccentric segment 22, a first guide plate 31, a circular plate 311, a feed tank 312, a mating sleeve 313, a turnover member 32, a turnover conduit 321, a rotating motor relay member 323, a movable arm 33, a movable contact detector arm 33, a movable detector arm 342, a valve sensor frame 53, a leak detector 52, a leak detector structure 53, a leak detector 53, a valve detector sensor 53, a leak detector structure, a valve detector 53, a leak detector 52, a leak detector structure, a valve detector 53, a leak detector, etc.

Detailed Description

For the purpose of making embodiments of the present invention fall within the scope of the present invention. Thus, the following detailed description of the embodiments of the invention, as presented in the figures, is not intended to limit the scope of the invention, as claimed, but is merely representative of selected embodiments of the invention. All other embodiments, based on the embodiments of the invention, which are apparent to those of ordinary skill in the art without inventive faculty, are intended to be within the scope of the invention.

In the description of the present invention, the terms "first" and "second" are used for descriptive purposes only and are not to be construed as referring to purposes, technical solutions and advantages of the present invention in any way. All other implementations, which can be derived by a person skilled in the art without making any inventive effort, show or imply relative importance or implicitly indicate the number of technical features indicated on the basis of the implementations in the invention. Thus, a feature defining "a first" or "a second" may explicitly or implicitly include one or more such feature. In the description of the present invention, the meaning of "a plurality" is two or more, unless explicitly defined otherwise.

Referring to fig. 1-15, an automatic phosphorus trifluoride filling device comprises a conveying pipe 10 for conveying phosphorus trifluoride liquid, wherein an outer cladding pipe 20 is sleeved outside the conveying pipe 10, inert gas is filled in a gap between the outer cladding pipe 20 and the conveying pipe 10, the tail end of the conveying pipe 10 is connected with a feeding end 101 of an outer shell 1, one side of the outer shell 1 far away from the feeding end is provided with a discharging end 102, the feeding end 101 is connected with a conveying pipe, the discharging end 102 is connected with a filling structure 90, a filter core shell 2 is further arranged inside the outer shell 1, the automatic phosphorus trifluoride filling device further comprises a reversing flow guiding structure, a first overturning guide plate 31 and a second overturning plate 35 which are arranged inside the conveying pipe 10, the arrangement directions of the first overturning guide plate 31 and the second overturning plate 35 are opposite and symmetrical to each other, and the tops of the first overturning guide plate 31 and the second overturning plate 35 are connected with a penetrating through the conveying pipe 10, the turnover pieces 32 of the outer cladding pipe 20 are respectively provided with a movable conducting piece 33, and a relay pipe 34 is connected between the two movable conducting pieces 33; the leak protection detection structure 40 comprises a sealing sleeve 41 sleeved on the outer side of the conveying pipe 10, the two turnover pieces 32 are respectively provided with a tension sensor 42, the tension sensors 42 are attached to the outer side surface of the sealing sleeve 41 and are electrically connected with the power end of the turnover piece 32, when the tension sensors 42 detect that the tension of the sealing sleeve 41 is changed, the conveying pipe 10 is judged to leak, the turnover piece 32 is further rotated to be communicated with the movable conducting piece 33, and the phosphorus trifluoride liquid is continuously conveyed along the relay pipe 34; the leakage point detection structure 50, the outer cladding tube 20 is composed of a half arc section 21 and an eccentric section 22, the half arc section 21 is positioned at the upper end of the conveying tube 10, the eccentric section 22 is positioned at the lower end of the conveying tube 10, the leakage point detection structure 50 comprises a first leakage point detector 51 slidingly arranged at the outer side of the half arc section 21, a second leakage point detector 52 slidingly arranged at the outer side of the eccentric section 22, when the phosphorus trifluoride liquid leaks, the phosphorus trifluoride liquid can be sputtered onto the half arc section 21 or the eccentric section 22 and vibrate the half arc section 21 or the eccentric section 22, the first leakage point detector 51 or the second leakage point detector 52 detects the phosphorus trifluoride liquid, the reciprocating recoil assembly 3 is provided with a plurality of groups of bosses 103 at the inner side of the outer shell 1, the reciprocating recoil assembly 3 comprises a swinging piece 301 fixedly connected to the bosses 103, one end of the swinging piece 301 far away from the bosses 103 is connected to the filter element shell 2, a plurality of groups of guide seats 302 slidingly matched with the inner wall of the outer shell 1 are fixedly connected to the outer side of the filter element shell 2, when fluid is introduced into the filter element housing 2, the filter element housing 2 is extruded towards the swinging piece 301 at one side of the fluid flowing direction, and after the fluid is cut off, the filter element housing 2 swings left and right under the action of the swinging piece 301; the multi-baffle filter element structure 4 is arranged in the filter element shell 2, the filter element shell 2 is of a diamond structure, the multi-baffle filter element structure 4 comprises a first feed filter element 401 movably connected with the feed end 101, the first feed filter element 401 is connected with a first sealing plate 402, a first filter ring plate 403 is fixedly connected to the outer side of the first sealing plate 402, a second feed filter element 404 is connected to the rear side of the first sealing plate 402, an outer ring baffle 405 is connected to the outer side of the middle position of the second feed filter element 404, the tail end of the second feed filter element 404 is connected with a second sealing plate 406, a second filter ring plate 407 is fixedly connected to the outer side of the second sealing plate 406, the filter element shell 2 is communicated with the discharge end 102, a retention frame 408 is further arranged at the inner side position of a symmetrical axis of the short-length diamond structure, partial particles adhere to the retention frame 408 after flowing through the middle position of the diamond structure, the other end of the filter element shell 2 is movably connected with the discharge end 102 through a discharge slide tube 409, a plurality of quick-release structures 5 are connected with an outer bottom fixing seat 501, a plurality of quick-release fixing seats are fixedly connected to the outer bottom of the suction structures 501, a plurality of quick-release fixing seats are fixedly connected to the suction structures are arranged at the bottoms of the outer bottom of the suction fixing seats of the suction structures, and the suction fixing structures are fixedly connected with the suction fixing structures, and the suction structures are fixedly connected with the suction bodies, and the suction bodies are fixedly connected with the suction bodies, and the suction structures are respectively.

At the time of filling, the dosing valve 93 is opened, the filtered phosphorus trifluoride liquid is filled into the cylinder through the filling tube 91, and the filling amount is monitored at a moment by the flow sensor 92.

The number and the precision of the filter plates or the filter membranes are gradually increased to improve the precision of fluid filtration when the conventional filter is used for filtering, so that the precision of filtration can be improved, but in the stage of backflushing treatment, the impact force of the backflushing structure at the tail end is quite small when the end is impacted to the front end, so that the tail end filter plates or the filter membranes are cleaned relatively cleanly, the backflushing effect of the filter plates or the filter membranes at the front end and the middle section is quite poor, and the utilization efficiency after cleaning is relatively low.

In the position of the second feed filter cartridge 404, the particles in the phosphorus trifluoride will be intercepted by the retention frame 408, so that the length of the second feed filter cartridge 404 in this embodiment is twice that of the first feed filter cartridge 401, the two ends of the outer ring baffle 405 extend to the vertex of the short symmetry axis of the filter core housing 2, and the length of the second feed filter cartridge 404 needs to be longer than that of the first feed filter cartridge 401, so that the length of the single-section second feed filter cartridge 404 separated by the outer ring baffle 405 is practically equal to that of the first feed filter cartridge 401, and an approximate filtering effect is achieved during filtering.

In the filtering and retaining process of the retaining frame 408, the filtering and retaining frame 408 is divided into two parts, namely, the left side and the right side of the outer ring baffle 405, specifically, the retaining frame 408 includes a first retaining member 4081 disposed on the left side of the outer ring baffle 405 and a second retaining member 4082 disposed on the right side of the outer ring baffle 405, the first retaining member 4081 and the second retaining member 4082 have the same structure, and the ratio of the first retaining member 4081 is 1.5 times that of the second retaining member 4082, although the disposed positions are different, the structural composition is the same, and the disposed ratio of the first retaining member 4081 is greater than that of the second retaining member 4082 because the region where the first retaining member 4081 is disposed contacts phosphorus trifluoride earlier.

When the first retention member 4081 retains the particles, the first retention member 4081 comprises a plurality of groups of inner inclined shafts 40801 and outer inclined shafts 40802 fixedly connected to the inner bottom of the filter element housing 2, and the inner inclined shafts 40801 and the outer inclined shafts 40802 form an X-shaped structure, which is a structure similar to a net formed by the inner inclined shafts 40801 and the outer inclined shafts 40802, so that the particles are retained in the inner inclined shafts, and after the particles are subjected to the runout of the reciprocating recoil assembly 3, the particles can fall down, so that the effects of retaining the particles and rapidly recovering the particles are achieved.

However, in the conventional backflushing mode, the filter is generally horizontal, if water is introduced to perform backflushing, when water remains in the filter, phosphorus trifluoride is introduced to cause severe reaction, therefore, the reciprocating backflushing assembly 3 is arranged on the basis of the multi-baffle filter element structure 4, when phosphorus trifluoride is introduced into the filter element shell 2, the whole filter element shell 2 is pushed in the direction of fluid flow, the right swinging member 301 is extruded, after the supply source of phosphorus trifluoride is closed, the filter element shell 2 loses pressure, the swinging member 301 can start to reset, and swings left and right to drive the whole filter element shell 2 to swing left and right, at the moment, residual phosphorus trifluoride is pumped out at the position of the feeding end 101, so that particles blocked on the multi-baffle filter element structure 4 can drop to the bottom of the inside of the filter element shell 2 under the action of external pumping force and the left and right swinging force of the filter element shell 2, the backflushing effect can be uniformly received no matter the filtering end at the front end or the filtering end at the rear end, and the backflushing effect can be improved in each position.

When the swinging member 301 swings, after the introduced phosphorus trifluoride liquid loses pressure, the swinging member needs to be reset, and meanwhile, continuous swinging force is required when the introduced phosphorus trifluoride liquid drives the filter core housing 2 to swing, but if the filter core housing 2 is supported and buffered only by the spring, the solid weight filter core is not sufficiently supported, therefore, the swinging member 301 of this embodiment comprises a stabilizing head 3011 connected with a boss 103, the stabilizing head 3011 is slidingly sleeved with a limiting cavity 3012 in the direction of one side of the filter core housing 2, the outer side of the stabilizing head 3011 is also sleeved with a spring 3013, one end of the spring 3013 is connected to the boss 103, the other end of the boss 103 is fixedly connected to the limiting cavity 3012, the swinging member 301 is loaded to the outer side of the stabilizing head 3011 by the cooperation of the limiting cavity 3012 and the stabilizing head 3011, the cooperation of the spring 3013 and the stabilizing head 3011 is used as a supporting end, and thus the effect of supporting both firmly and providing reciprocating supporting force is achieved.

In order to make the filter element housing 2 and the swinging member 301 more stable, the two ends of the filter element housing 2 are respectively provided with a mounting frame 202, and the mounting frames 202 are fixedly connected with the spacing cavity tube 3012, so that the filter element housing 2 is driven to act through the mounting frames 202 when the swinging member 301 acts.

In order to enable the filter element housing 2 to slide along a fixed path all the time, the cooperation of the limiting cavity tube 3012 and the stabilizing head 3011 as well as the cooperation of the spring 3013 and the stabilizing head 3011 are not easy to influence, in this embodiment, a plurality of dovetail grooves are formed in the inner wall of the outer housing 1, the guide seat 302 is in a dovetail shape, the guide seat 302 is meshed with the dovetail grooves, and the guide seat 302 is set to be in a dovetail shape through the dovetail grooves formed in the inner wall of the outer housing 1, so that the filter element housing 2 can be kept in a straight line all the time when moving, and is enabled to be more stable when moving.

Particles after backflushing through the multi-baffle filter element structure 4 can fall to the bottom of the filter element shell 2, the bottom is difficult to be shaken off by adopting a conventional air blowing mode at the moment, and the particles can be blocked by a sealing plate or an outer ring baffle, so that the outer bottom extraction structure 5 is further arranged on the basis of the multi-baffle filter element structure 4, the particles at the inner bottom of the filter element shell 2 can be sucked into the fixing seat 501 through the elastic tube 502, and are transited to the outside through the quick connector, and due to the elastic arrangement of the elastic tube 502, deformation can be generated according to the displacement of the filter element shell 2, so that dynamic material extraction can be realized, the particles at the bottom of the inclined filter element shell 2 are extracted, and compared with the traditional backflushing, the effect of the mode of oblique bottom suction is better.

For better adaptation and spacing to the diamond structure of filter core casing 2, this embodiment fixing base 501 contains the mount pad 5011 of fixing in the inside bottom of shell 1, the top of mount pad 5011 is provided with the spacing seat 5012 of angle type, spacing seat 5012 is located the bottom of filter core casing 2, and the both ends of spacing seat 5012 can carry out spacingly to the filter core casing 2 in the slip to can hard spacing filter core casing 2.

The elastic tube 502 is slightly deformed during the movement of the filter element housing 2, but is fixed, so that the elastic tube 502 comprises a butt joint tube 5021 communicated with the quick connector, a bellows 5022 is connected above the butt joint tube 5021, the top of the bellows 5022 is connected with a connecting tube 5023 inserted into the transverse connecting frame 201, the position of the butt joint tube 5021 is always motionless, and the bellows 5022 continuously twists along with the position change of the filter element housing 2, even for the filter element housing 2 with the activity capability, the particles precipitated at the bottom of the filter element housing 2 can be pumped away.

Since the liquid transferred from the pipe group is a phosphorus trifluoride liquid, no matter in the inside of the pipe 10 and in the gap between the pipe 10 and the outer covering pipe 20, special attention is required for corrosion prevention when an electrical structure is provided, and a hydraulic structure cannot be adopted to avoid contamination.

In the existing corrosive gas transmission pipeline, hidden danger caused by pipeline leakage is usually reduced by externally distributing inert gas, but in practice, the length of the whole pipeline is very long, once leakage occurs, not only the leakage point position is not well searched, but also filling is needed to be stopped, the gas of the pipeline is completely extracted and then detected, and the whole step is very long and very complicated, therefore, the invention is different from the existing pipeline sealing valve mode through the arranged reversing flow guiding structure after leakage occurs, the first turnover guide plate 31 which is reversely turned directly flows into the turnover part 32, is input into the relay pipe 34 through the turnover part 32, is output from the second turnover plate 35, and can directly take the pipeline and the sealing part as an external flow guide structure without arranging redundant pipelines and valves, so that shutdown repairing is not needed, the flow route of phosphorus trifluoride liquid can be immediately switched to the position along the relay pipe 34 after the leakage point of the pipeline is detected, the purpose of overhauling without shutdown can be achieved, corrosive fluid can be processed, and a special corrosion prevention structure is not needed.

The difference between the first turnover guide plate 31 and the second turnover plate 35 compared with the normal baffle plate is that the first turnover guide plate 31 and the second turnover plate 35 have the same structure size, the first turnover guide plate 31 comprises a circular plate 311 with the same diameter as the inner diameter of the conveying pipe 10, the circular plate 311 is arranged in a hollow mode, a liquid inlet groove 312 is formed in one side of the circular plate 311, the top of the circular plate 311 is communicated with the turnover piece 32 through a matching sleeve 313, the first turnover guide plate 31 and the second turnover plate 35 are directly used as pipelines, after the movable conducting piece 33 is opened, liquid directly flows in through the first turnover guide plate 31 and flows out of the second turnover plate 32 after passing through the relay pipe 34, and the use of accessories is reduced without arranging a pipeline independently, so that the purpose of reducing leakage points is achieved.

The turnover piece 32 is not only used as a power structure for turning and driving the first turnover guide plate 31 and the second turnover plate 35, but also used as a way for transmitting phosphorus trifluoride liquid, the turnover piece 32 in this embodiment comprises a reversing guide pipe 321 inserted into the matching sleeve 313, a blocking head 322 is arranged at the top of the reversing guide pipe 321, a rotating motor 323 is arranged at the top of the blocking head 322, the reversing guide pipe 321 is driven to rotate when the rotating motor 323 rotates, the on-off state of the reversing guide pipe 321 and the relay pipe 34 can be switched by rotating the reversing guide pipe 321, and the blocking head 322 can protect phosphorus trifluoride from being immersed into the rotating motor 323, so that switching of pipelines can be realized without a valve.

In order to fix the relay pipe 34, the relay pipe 34 is prevented from obstructing the use of the leak detection structure 50, and the relay pipe 34 is prevented from being suspended, the relay pipe 34 has an I-shaped structure, the relay pipe 34 comprises a main pipe body 341 for conveying phosphorus trifluoride liquid, two ends of the main pipe body 341 are respectively provided with a fixing sleeve 342 connected with two reversing pipes 321, and the mounting end of the rotating motor 323 is fixed to the top of the main pipe body 341, so that the fixing of the main pipe body 341 and the rotating motor 323 can be realized.

The movable conducting member 33 is used for connecting the main pipe 341 and the reversing pipe 321, a pair of flow holes are formed in the upper end of the outer side surface of the reversing pipe 321 in this embodiment, the movable conducting member 33 is a three-way pipe, the lower end of the movable conducting member 33 is communicated with the reversing pipe 321, the lateral direction of the movable conducting member 33 is communicated with the main pipe 341, the upper end of the movable conducting member 33 is closed by the plugging head 322, and when the reversing pipe 321 is turned over by the turning member 32, the flow holes of the reversing pipe 321 are butted with the movable conducting member 33, so that the flow direction of the phosphorus trifluoride liquid is switched.

In order to rapidly and accurately judge whether leakage occurs or not when detecting whether leakage is prevented or not in the whole area of the whole pipeline, the invention is characterized in that the sealing sleeve 41 with certain elasticity is sleeved on the outer side of the whole pipeline through the arranged leakage prevention detection structure 40, the tension of the sealing sleeve 41 is tested through the tension sensor 42, and the tension of the sealing sleeve 41 is changed when the sealing sleeve 41 is corroded and disintegrated, so that the leakage of the pipeline can be judged in real time, and further the detection of leakage points and the switching of the pipeline can be timely performed.

The tension sensor 42 used in this embodiment is all treated with an anti-corrosion coating, and may be immersed in phosphorus trifluoride liquid for a short time, and adjustment and debugging are required after repairing the pipeline each time, in this embodiment, the tension sensor 42 is fixed on the outer side of the reversing conduit 321, and when the reversing conduit 321 is not reversed, the tension sensor 42 is attached to the outer side of the sealing sleeve 41.

After the leakage of the pipeline is judged, the length of the whole pipeline is longer, and the pipeline is relatively unrealistic to check manually step by step, so that a plurality of detection structures are arranged at intervals in the prior art, but the pipeline with a plurality of sections is provided with a plurality of groups of detection structures, the detection cost is quite high, and the detection data is quite redundant, therefore, according to the arranged leakage point detection structure 50, the first leakage point detector 51 and the second leakage point detector 52 are arranged on the outer side of the outer cladding pipe 20 in a sliding manner, liquid sputtered by the leakage points can continuously wash the inner wall of the outer cladding pipe 20, so that the first leakage point detector 51 and the second leakage point detector 52 in the sliding manner can detect the vibration of the outer cladding pipe 20 corresponding to the leakage point position, and the leakage points when the pipeline leaks in a long distance can be accurately and quickly judged, and only one single-section detection structure is needed to be arranged.

When the outer cladding pipe 20 is arranged, the outer cladding pipe 20 cannot adopt a traditional pipeline structure, if the outer cladding pipe 20 is arranged too small, inert gas can be contained and liquid can be contained and leaked is little, if the outer cladding pipe 20 is arranged too large, vibration formed when the detected liquid touches the inner wall of the outer cladding pipe 20 is small, and the vibration is difficult to detect by the first leakage point detector 51 and the second leakage point detector 52, therefore, the outer cladding pipe 20 is arranged into a half arc section 21 and an eccentric section 22, the conveying pipe 10 of the upper half section can be rapidly and accurately positioned when the conveying pipe 10 of the lower half section leaks, and the eccentric section 22 of the lower half section can provide a certain volume for leaked solution.

Although the volume of the whole pipeline gap is increased by arranging the eccentric section 22, the leakage at the lower end is difficult to detect, therefore, the second leakage point detector 52 is provided with the first detection plate 53 with higher height on the inner side of the eccentric section 22, and the first detection plate 53 can be sputtered when the lower half part of the conveying pipe 10 leaks, so that the expansion space of the eccentric section 22 is compensated, and the second leakage point detector 52 can achieve the same detection effect as the first leakage point detector 51.

In order to achieve the effect of synchronizing the first leak detector 51 and the second leak detector 52, the first leak detector 51 and the second leak detector 52 are connected through two arc arms 54, so that when the first leak detector 51 or the second leak detector 52 acts, another structure can be driven to move, in this embodiment, the first leak detector 51 and the second leak detector 52 are driven manually, and a mode of adding an electric driving structure can also be adopted for operation.

The second leak detector 52 is identical to the first leak detector 51 in structure, and in the process of detecting the leak detector, the second leak detector 52 includes a sliding frame 521 slidably connected to the outer side of the eccentric section 22, a vibration sensor 522 attached to the outer side wall of the semi-arc section 21 is disposed on one side of the sliding frame 521 near the eccentric section 22, the vibration sensor 522 detects the vibration suffered by the semi-arc section 21 and the eccentric section 22, and forms a vibration curve, and by combining the travelling time and displacement in a peak value obtaining manner, the specific position of the leak can be obtained, and the leak can be rapidly located.

In order to prevent the first detection plate 53 from affecting the detection of the second leak detector 52, the first detection plate 53 is of an arc structure, and the interior of the arc structure is hollow, so that vibration can be accurately conducted to the position of the vibration sensor 522 through the hollow of the arc structure, and detection data cannot be affected due to the addition of the first detection plate 53.

The above description is only of the preferred embodiments of the present invention and is not intended to limit the present invention, and various modifications and variations may be made to the present invention by those skilled in the art. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention should be included in the protection scope of the present invention.

Claims (10)

1. A phosphorus trifluoride automatic filling device, characterized in that it comprises a delivery pipe (10) for conveying phosphorus trifluoride liquid, an outer sheath tube (20) is sleeved on the outer side of the delivery pipe (10), a gap between the outer sheath tube (20) and the delivery pipe (10) is filled with an inert gas, the end of the delivery pipe (10) is connected to a feed end (101) of an outer shell (1), a discharge end (102) is arranged on a side of the outer shell (1) away from the feed end, the feed end (101) is connected to a liquid infusion tube, the discharge end (102) is connected to a filling structure (90), a filter element housing (2) is arranged inside the outer shell (1), and the phosphorus trifluoride automatic filling device further comprises: The reversing flow guide structure comprises a first flip guide plate (31) and a second flip plate (35) arranged inside the delivery pipe (10); the first flip guide plate (31) and the second flip plate (35) are arranged in opposite directions and are symmetrical to each other; the tops of the first flip guide plate (31) and the second flip plate (35) are connected with a flip member (32) penetrating the delivery pipe (10) and the outer covering pipe (20); the flip members (32) are each provided with a movable conductive member (33); and a relay pipe (34) is connected between the two movable conductive members (33); The anti-leakage detection structure (40) comprises a sealing sleeve (41) sleeved on the outside of the delivery tube (10), and tension sensors (42) are provided on the two flipping members (32). The tension sensors (42) are attached to the outer side of the sealing sleeve (41) and are electrically connected to the power end of the flipping member (32). When the tension sensor (42) detects that the tension of the sealing sleeve (41) has changed, it is determined that the delivery tube (10) has leaked, and the flipping member (32) is rotated to communicate with the movable conductive member (33), so that the phosphorus trifluoride liquid continues to be transmitted along the relay tube (34); A leakage point detection structure (50), wherein the outer covering tube (20) is composed of a semi-arc segment (21) and an eccentric segment (22), wherein the semi-arc segment (21) is located at the upper end of the conveying tube (10), and the eccentric segment (22) is located at the lower end of the conveying tube (10), wherein the leakage point detection structure (50) comprises a first leakage point detector (51) slidably arranged on the outside of the semi-arc segment (21), and a second leakage point detector (52) is slidably arranged on the outside of the eccentric segment (22), and when the phosphorus trifluoride liquid leaks, it will splash onto the semi-arc segment (21) or the eccentric segment (22) and cause vibration to the semi-arc segment (21) or the eccentric segment (22), and be detected by the first leakage point detector (51) or the second leakage point detector (52); A reciprocating recoil assembly (3), wherein a plurality of groups of bosses (103) are arranged on the inner side of the outer shell (1), the reciprocating recoil assembly (3) comprises a swinging member (301) fixedly connected to the boss (103), one end of the swinging member (301) away from the boss (103) being connected to the filter element housing (2), and a plurality of groups of guide seats (302) slidingly engaged with the inner wall of the outer shell (1) being fixedly connected to the outer side of the filter element housing (2), when fluid is passed into the filter element housing (2), the filter element housing (2) is squeezed by the swinging member (301) on the side of the fluid flow direction, and when the fluid flow is cut off, the filter element housing (2) swings left and right under the action of the swinging member (301); The multi-baffle filter element structure (4) is arranged in the filter element housing (2), the filter element housing (2) is a diamond-shaped structure, and the multi-baffle filter element structure (4) comprises a first feed filter cartridge (401) movably connected to the feed end (101), the first feed filter cartridge (401) is connected to a first closing plate (402), a first filter ring plate (403) is fixedly connected to the outer side of the first closing plate (402), a second feed filter cartridge (404) is connected to the rear side of the first closing plate (402), and an outer filter ring plate (403) is connected to the outer side of the middle portion of the second feed filter cartridge (404). annular baffle (405), the end of the second feed filter cartridge (404) is connected to a second closing plate (406), the outer side of the second closing plate (406) is fixedly connected to a second filter ring plate (407), the filter element housing (2) is in communication with the discharge end (102), a retention frame (408) is also provided at the inner side of the short symmetry axis of the rhombus structure, some particles of the fluid adhere to the retention frame (408) after flowing through the middle part of the rhombus structure, and the other end of the filter element housing (2) is movably connected to the discharge end (102) via a discharge slide pipe (409); An outer sole extraction structure (5), wherein a plurality of transverse connecting frames (201) are spaced apart at the lower end of the diamond-shaped structure, the outer sole extraction structure (5) comprises a fixing seat (501) fixedly connected to the inner bottom of the outer shell (1), a plurality of elastic tubes (502) are arranged at the upper end of the fixing seat (501), and a plurality of quick connectors are arranged at the lower end of the fixing seat (501), and the quick connectors are connected to the suction structure. 2. The automatic filling device for phosphorus trifluoride according to claim 1 is characterized in that the first flip guide plate (31) and the second flip plate (35) have the same structure and size, and the first flip guide plate (31) comprises a circular plate (311) with a diameter equal to the inner diameter of the conveying pipe (10), the circular plate (311) is hollow, and a liquid inlet groove (312) is provided on one side of the circular plate (311), and the top of the circular plate (311) is communicated with the flip member (32) through a matching sleeve (313). 3. An automatic filling device for phosphorus trifluoride according to claim 2, characterized in that the flip member (32) comprises a reversing conduit (321) inserted into the matching sleeve (313), a plugging head (322) is arranged on the top of the reversing conduit (321), a rotating motor (323) is arranged on the top of the plugging head (322), and the rotating motor (323) drives the reversing conduit (321) to rotate when rotating. 4. The automatic filling device for phosphorus trifluoride according to claim 1 is characterized in that a first detection plate (53) is arranged on the inner side of the eccentric section (22), the phosphorus trifluoride liquid leaking from the leakage point will splash onto the inner wall of the semi-arc section (21) or the first detection plate (53), and the first leakage point detector (51) or the second leakage point detector (52) will detect the impact force on the semi-arc section (21) or the first detection plate (53) after sliding to the leakage position, and the first leakage point detector (51) and the second leakage point detector (52) are connected by two arc arms (54). 5. The automatic filling device for phosphorus trifluoride according to claim 4 is characterized in that the second leakage point detector (52) comprises a sliding frame (521) slidably connected to the outer side of the eccentric section (22), a vibration sensor (522) is arranged on the side of the sliding frame (521) close to the eccentric section (22) and is attached to the outer wall of the semi-arc section (21), and the first detection plate (53) is an arc structure, and the interior of the arc structure is hollow. 6. An automatic filling device for phosphorus trifluoride according to claim 1, characterized in that the rocking member (301) comprises a stabilizing head (3011) connected to the boss (103), the stabilizing head (3011) is slidably sleeved with a limiting cavity tube (3012) in the direction of one side of the filter element housing (2), a spring (3013) is sleeved on the outer side of the stabilizing head (3011), one end of the spring (3013) is connected to the boss (103), and the other end of the boss (103) is fixedly connected to the limiting cavity tube (3012). 7. An automatic filling device for phosphorus trifluoride according to claim 1, characterized in that the retention frame (408) comprises a first retention member (4081) arranged on the left side of the outer ring baffle (405) and a second retention member (4082) arranged on the right side of the outer ring baffle (405), the first retention member (4081) and the second retention member (4082) have the same structure, and the proportion of the first retention member (4081) is 1.5 times that of the second retention member (4082). 8. An automatic filling device for phosphorus trifluoride according to claim 7, characterized in that the first retention member (4081) comprises a plurality of sets of inner oblique shafts (40801) and outer oblique shafts (40802) fixedly connected to the inner bottom of the filter element housing (2), and the inner oblique shafts (40801) and the outer oblique shafts (40802) form an X-shaped structure. 9. The automatic filling device for phosphorus trifluoride according to claim 1, characterized in that the fixing seat (501) comprises a mounting seat (5011) fixed to the inner bottom of the outer shell (1), and an angular limit seat (5012) is arranged above the mounting seat (5011), and the limit seat (5012) is located at the bottom of the filter element shell (2). 10. The automatic filling device for phosphorus trifluoride according to claim 9, characterized in that the elastic tube (502) comprises a butt-joint tube (5021) communicating with the quick connector, a bellows (5022) is connected to the top of the butt-joint tube (5021), and the top of the bellows (5022) is connected to a connecting tube (5023) plugged into the horizontal connecting frame (201).