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CN118712202A - Display Panel - Google Patents

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Publication number
CN118712202A
CN118712202A CN202411193313.3A CN202411193313A CN118712202A CN 118712202 A CN118712202 A CN 118712202A CN 202411193313 A CN202411193313 A CN 202411193313A CN 118712202 A CN118712202 A CN 118712202A
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display panel
metal oxide
oxide semiconductor
layer
semiconductor layer
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CN118712202B (en
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赵慧慧
艾飞
宋德伟
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Wuhan China Star Optoelectronics Technology Co Ltd
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Wuhan China Star Optoelectronics Technology Co Ltd
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    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/136Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
    • G02F1/1362Active matrix addressed cells
    • G02F1/136286Wiring, e.g. gate line, drain line
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/10OLED displays
    • H10K59/12Active-matrix OLED [AMOLED] displays
    • H10K59/121Active-matrix OLED [AMOLED] displays characterised by the geometry or disposition of pixel elements
    • H10K59/1213Active-matrix OLED [AMOLED] displays characterised by the geometry or disposition of pixel elements the pixel elements being TFTs
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/10OLED displays
    • H10K59/12Active-matrix OLED [AMOLED] displays
    • H10K59/131Interconnections, e.g. wiring lines or terminals

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Nonlinear Science (AREA)
  • Geometry (AREA)
  • Mathematical Physics (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Devices For Indicating Variable Information By Combining Individual Elements (AREA)
  • Liquid Crystal (AREA)

Abstract

本申请提供一种显示面板,包括显示区,所述显示面板还包括:第一基板;多条数据线,位于所述显示区内,所述数据线所在的膜层设置在所述第一基板上;多个金属氧化物半导体层,设置在所述数据线远离所述第一基板的一表面,且位于所述显示区内,所述金属氧化物半导体层通过第一过孔与所述数据线电性连接;以及多个漏极,所述漏极设置在所述金属氧化物半导体层远离所述第一基板的一表面,且位于所述显示区内,所述漏极通过第二过孔与所述金属氧化物半导体层电性连接;其中,所述金属氧化物半导体层与所述数据线平行设置,且在所述显示面板的俯视图中,所述金属氧化物半导体层与所述数据线至少部分重叠。本申请提供的显示面板能进一步提升像素密度。

The present application provides a display panel, including a display area, the display panel further comprising: a first substrate; a plurality of data lines, located in the display area, the film layer where the data lines are located is arranged on the first substrate; a plurality of metal oxide semiconductor layers, arranged on a surface of the data lines away from the first substrate and located in the display area, the metal oxide semiconductor layers are electrically connected to the data lines through first vias; and a plurality of drain electrodes, the drain electrodes are arranged on a surface of the metal oxide semiconductor layer away from the first substrate and located in the display area, the drain electrodes are electrically connected to the metal oxide semiconductor layers through second vias; wherein the metal oxide semiconductor layers are arranged in parallel with the data lines, and in a top view of the display panel, the metal oxide semiconductor layers at least partially overlap with the data lines. The display panel provided by the present application can further improve the pixel density.

Description

显示面板Display Panel

技术领域Technical Field

本申请涉及显示技术领域,具体涉及一种显示面板。The present application relates to the field of display technology, and in particular to a display panel.

背景技术Background Art

虚拟现实(VR,Virtual Reality)产品对显示面板的分辨率有极高的要求。为了消除纱窗效应,提供更加沉浸式的视觉体验,虚拟现实产品的显示面板的像素密度(PPI,Pixels Per Inch)需要达到1000以上。Virtual reality (VR) products have extremely high requirements for the resolution of display panels. In order to eliminate the screen door effect and provide a more immersive visual experience, the pixel density (PPI, Pixels Per Inch) of the display panel of VR products needs to reach more than 1000.

为满足上述高像素密度的要求,现有的液晶显示面板采用铟镓锌氧化物(IGZO)制作薄膜晶体管(TFT),铟镓锌氧化物薄膜晶体管具有更高的电子迁移率,可以大幅缩小TFT尺寸,从而提高像素密度。To meet the above-mentioned high pixel density requirements, existing liquid crystal display panels use indium gallium zinc oxide (IGZO) to make thin-film transistors (TFTs). Indium gallium zinc oxide thin-film transistors have higher electron mobility and can significantly reduce the size of TFTs, thereby increasing pixel density.

然而,当前铟镓锌氧化物薄膜晶体管的结构通常为平面结构,铟镓锌氧化物层需要倾斜走线,不利于进一步提升像素密度,因此无法满足虚拟现实产品对显示面板具有更高分辨率的要求。However, the current structure of InGaZnO thin-film transistors is usually a planar structure, and the InGaZnO layer needs to be routed at an angle, which is not conducive to further improving the pixel density, and therefore cannot meet the requirements of virtual reality products for display panels with higher resolution.

因此,亟需一种新的技术方案,以进一步提升像素密度。Therefore, a new technical solution is urgently needed to further improve the pixel density.

发明内容Summary of the invention

本申请的实施例提供了一种显示面板,其能进一步提升像素密度。The embodiments of the present application provide a display panel that can further improve pixel density.

本申请的实施例提供了一种显示面板,所述显示面板包括显示区,所述显示面板包括:第一基板;多条数据线,位于所述显示区内,所述数据线所在的膜层设置在所述第一基板上;多个金属氧化物半导体层,设置在所述数据线远离所述第一基板的一表面,且位于所述显示区内,所述金属氧化物半导体层通过第一过孔与所述数据线电性连接;以及多个漏极,所述漏极设置在所述金属氧化物半导体层远离所述第一基板的一表面,且位于所述显示区内,所述漏极通过第二过孔与所述金属氧化物半导体层电性连接;其中,所述金属氧化物半导体层与所述数据线平行设置,且在所述显示面板的俯视图中,所述金属氧化物半导体层与所述数据线至少部分重叠。An embodiment of the present application provides a display panel, which includes a display area, and the display panel includes: a first substrate; a plurality of data lines, which are located in the display area, and a film layer where the data lines are located is arranged on the first substrate; a plurality of metal oxide semiconductor layers, which are arranged on a surface of the data lines away from the first substrate and located in the display area, and the metal oxide semiconductor layers are electrically connected to the data lines through first vias; and a plurality of drain electrodes, which are arranged on a surface of the metal oxide semiconductor layer away from the first substrate and located in the display area, and the drain electrodes are electrically connected to the metal oxide semiconductor layers through second vias; wherein the metal oxide semiconductor layers are arranged in parallel with the data lines, and in a top view of the display panel, the metal oxide semiconductor layers and the data lines at least partially overlap.

在上述显示面板中,所述金属氧化物半导体层包括第一部分和第二部分,所述第一部分与所述数据线电性连接,所述第二部分与所述漏极电性连接,所述第一部分和所述第二部分在垂直于所述显示面板所在的平面的方向上位于不同的高度。In the above-mentioned display panel, the metal oxide semiconductor layer includes a first part and a second part, the first part is electrically connected to the data line, the second part is electrically connected to the drain, and the first part and the second part are located at different heights in a direction perpendicular to the plane where the display panel is located.

在上述显示面板中,所述显示面板还包括:第一栅极线,设置在所述金属氧化物半导体层的所述第二部分的下方;层间绝缘层,设置在所述第一栅极线与所述数据线之间;第一栅绝缘层,设置在所述第一栅极线与所述金属氧化物半导体层的所述第二部分之间;第二栅极线,设置在所述金属氧化物半导体层的所述第二部分的上方;以及第二栅绝缘层,设置在所述第二栅极线与所述金属氧化物半导体层之间。In the above-mentioned display panel, the display panel also includes: a first gate line, arranged below the second part of the metal oxide semiconductor layer; an interlayer insulating layer, arranged between the first gate line and the data line; a first gate insulating layer, arranged between the first gate line and the second part of the metal oxide semiconductor layer; a second gate line, arranged above the second part of the metal oxide semiconductor layer; and a second gate insulating layer, arranged between the second gate line and the metal oxide semiconductor layer.

在上述显示面板中,所述第一栅极线与所述第二栅极线平行设置,所述第一栅极线与所述数据线交叉设置,且在所述显示面板的俯视图中,所述第一栅极线与所述金属氧化物半导体层和所述数据线重叠的部分至少部分重叠,所述第二栅极线与所述金属氧化物半导体层和所述数据线重叠的部分至少部分重叠。In the above-mentioned display panel, the first gate line is arranged in parallel with the second gate line, the first gate line is arranged to cross the data line, and in the top view of the display panel, the first gate line at least partially overlaps with the metal oxide semiconductor layer and the data line, and the second gate line at least partially overlaps with the metal oxide semiconductor layer and the data line.

在上述显示面板中,所述第一栅极线所在的膜层位于所述数据线所在的膜层之上。In the above display panel, the film layer where the first gate line is located is located above the film layer where the data line is located.

在上述显示面板中,在所述显示面板的俯视图中,所述第一栅极线和所述第二栅极线均位于所述第一过孔和所述第二过孔之间。In the above display panel, in a top view of the display panel, the first gate line and the second gate line are both located between the first via hole and the second via hole.

在上述显示面板中,所述第一过孔贯穿所述层间绝缘层和所述第一栅绝缘层,所述第二过孔贯穿所述第二栅绝缘层。In the above display panel, the first via hole penetrates the interlayer insulating layer and the first gate insulating layer, and the second via hole penetrates the second gate insulating layer.

在上述显示面板中,所述显示面板还包括外围区,所述显示面板位于所述外围区的部分包括:栅极驱动电路,所述栅极驱动电路包括低温多晶硅薄膜晶体管,所述低温多晶硅薄膜晶体管的第一源漏极金属层与所述数据线设置在同一层。In the above-mentioned display panel, the display panel also includes a peripheral area, and the part of the display panel located in the peripheral area includes: a gate driving circuit, the gate driving circuit includes a low-temperature polysilicon thin film transistor, and the first source and drain metal layer of the low-temperature polysilicon thin film transistor is arranged in the same layer as the data line.

在上述显示面板中,所述低温多晶硅薄膜晶体管还包括第二源漏极金属层,所述第二源漏极金属层与所述第一源漏极金属层电性连接,所述第二源漏极金属层与所述第一栅极线设置在同一层,或者所述第二源漏极金属层与所述第二栅极线设置在同一层。In the above-mentioned display panel, the low-temperature polysilicon thin film transistor also includes a second source and drain metal layer, the second source and drain metal layer is electrically connected to the first source and drain metal layer, the second source and drain metal layer and the first gate line are arranged on the same layer, or the second source and drain metal layer and the second gate line are arranged on the same layer.

在上述显示面板中,所述显示面板还包括第三过孔,所述第三过孔贯穿所述层间绝缘层、所述第一栅绝缘层和所述第二栅绝缘层,所述第二源漏极金属层通过所述第三过孔与所述第一源漏极金属层电连接。In the above display panel, the display panel further includes a third via hole, the third via hole penetrates the interlayer insulating layer, the first gate insulating layer and the second gate insulating layer, and the second source and drain metal layer is electrically connected to the first source and drain metal layer through the third via hole.

在上述显示面板中,在所述显示面板的俯视图中,所述金属氧化物半导体层的宽度大于所述数据线的宽度,所述漏极的宽度大于所述数据线的宽度,且小于或等于所述金属氧化物半导体层的宽度。In the above display panel, in a top view of the display panel, the width of the metal oxide semiconductor layer is greater than the width of the data line, and the width of the drain electrode is greater than the width of the data line and less than or equal to the width of the metal oxide semiconductor layer.

在上述显示面板中,在所述显示面板的俯视图中,位于同一所述金属氧化物层的两端的所述第一过孔与所述第二过孔的连线与所述数据线平行。In the above display panel, in a top view of the display panel, a connection line between the first via hole and the second via hole located at two ends of the same metal oxide layer is parallel to the data line.

本申请的实施例提出的显示面板中位于显示区的薄膜晶体管为垂直结构,在该薄膜晶体管中,源极与漏极分层设置,并分别位于金属氧化物半导体层的下方和上方,即数据线置于金属氧化物半导体层的下层,二者通过第一过孔电性连接,漏极置于金属氧化物半导体层的上层,二者通过第二过孔电性连接,金属氧化物半导体层平行于数据线,且其置于数据线正上方,二者正投影部分重叠。相对传统的平面结构的薄膜晶体管中金属氧化物半导体层需要有一部分相对数据线倾斜(偏出)而导致线距增大,本申请的显示面板的薄膜晶体管的金属氧化物半导体层不存在倾斜走线,可以大幅提升像素密度,并且还可以减小TFT的占用面积,为提升像素密度腾出更多空间,进一步提升像素密度。由于金属氧化物半导体层全部平行于数据线且置于数据线正上方,二者至少部分重叠,因此可以缩短金属氧化物半导体层的长度,降低其电阻,从而降低功耗。由于显示面板的外围区的薄膜晶体管的源漏极金属层与显示面板的显示区的数据线和栅极线共用同层金属,因此减少了制程中的掩模板的数量,从而降低了生产成本。The thin film transistor located in the display area of the display panel proposed in the embodiment of the present application is a vertical structure. In the thin film transistor, the source and the drain are arranged in layers and are respectively located below and above the metal oxide semiconductor layer, that is, the data line is placed in the lower layer of the metal oxide semiconductor layer, and the two are electrically connected through the first via hole, the drain is placed in the upper layer of the metal oxide semiconductor layer, and the two are electrically connected through the second via hole, the metal oxide semiconductor layer is parallel to the data line, and it is placed directly above the data line, and the orthographic projections of the two overlap. Compared with the traditional planar structure thin film transistor, the metal oxide semiconductor layer needs to have a part of the data line tilted (deflected) to increase the line spacing. The metal oxide semiconductor layer of the thin film transistor of the display panel of the present application does not have a tilted routing, which can greatly improve the pixel density, and can also reduce the occupied area of TFT, free up more space for improving the pixel density, and further improve the pixel density. Since the metal oxide semiconductor layer is all parallel to the data line and placed directly above the data line, and the two overlap at least partially, the length of the metal oxide semiconductor layer can be shortened, its resistance can be reduced, and thus the power consumption can be reduced. Since the source and drain metal layers of the thin film transistors in the peripheral area of the display panel share the same metal layer with the data lines and gate lines in the display area of the display panel, the number of masks in the manufacturing process is reduced, thereby reducing the production cost.

附图说明BRIEF DESCRIPTION OF THE DRAWINGS

图1是本申请的实施例提供的显示装置的示意图。FIG. 1 is a schematic diagram of a display device provided in an embodiment of the present application.

图2是本申请的实施例提供的显示面板的第一实施例的剖面图。FIG. 2 is a cross-sectional view of a first embodiment of a display panel provided by an embodiment of the present application.

图3是本申请的实施例提供的显示面板的第二实施例的剖面图。FIG. 3 is a cross-sectional view of a second embodiment of a display panel provided by an embodiment of the present application.

图4是图2和图3所示的显示面板的俯视图。FIG. 4 is a top view of the display panel shown in FIG. 2 and FIG. 3 .

具体实施方式DETAILED DESCRIPTION

为使本申请实施例更加清楚,下面将结合本申请实施例中的附图,对本申请实施例中的技术方案进行描述。To make the embodiments of the present application clearer, the technical solutions in the embodiments of the present application will be described below in conjunction with the drawings in the embodiments of the present application.

术语“第一”、“第二”以及类似的词语并不表示任何顺序、数量或者重要性,而只是用来区分不同的技术特征。术语“多个”以及类似的词语表示两个或两个以上,除非另有明确的限定。The terms "first", "second" and similar words do not indicate any order, quantity or importance, but are only used to distinguish different technical features. The term "plurality" and similar words mean two or more, unless otherwise clearly defined.

术语“平行”包括绝对平行和大致平行,其中,绝对平行指的是A与B所对应的直线的夹角等于0度的情况,大致平行指的是A与B所对应的直线的夹角大于0度且小于或等于3度的情况。The term "parallel" includes absolute parallelism and approximately parallelism, wherein absolute parallelism refers to the situation where the angle between the straight lines corresponding to A and B is equal to 0 degrees, and approximately parallelism refers to the situation where the angle between the straight lines corresponding to A and B is greater than 0 degrees and less than or equal to 3 degrees.

传统的虚拟现实产品中的显示面板的薄膜晶体管采用平面结构,平面结构的薄膜晶体管中的金属氧化物半导体层分为三部分,第一部分与数据线平行且大部分重叠,第二部分转折(倾斜走线)进入开口区,第二部分与数据线存在一定夹角,第三部分与数据线平行但不重叠。由于传统的虚拟现实产品中的显示面板一般具有高像素密度,即,每个像素单元的占用面积较小,因此在此情况下,倾斜走线处的间距不得不设计得更小,但这会导致短路风险大大提高,像素密度无法进一步提高。The thin film transistors of the display panels in traditional virtual reality products adopt a planar structure. The metal oxide semiconductor layer in the thin film transistors of the planar structure is divided into three parts. The first part is parallel to the data line and mostly overlaps. The second part turns (inclined routing) to enter the opening area. The second part has a certain angle with the data line. The third part is parallel to the data line but does not overlap. Since the display panels in traditional virtual reality products generally have a high pixel density, that is, each pixel unit occupies a small area, in this case, the spacing at the inclined routing has to be designed to be smaller, but this will greatly increase the risk of short circuits and the pixel density cannot be further increased.

为此,本申请的实施例提供了一种可以克服上述关于像素密度无法进一步提高的技术问题的显示装置和显示面板。To this end, the embodiments of the present application provide a display device and a display panel that can overcome the above-mentioned technical problem that the pixel density cannot be further improved.

本申请的实施例提供的显示装置包括LCD显示装置、OLED显示装置等,如图1所示,该显示装置包括显示面板、时序控制器TCON、源极驱动电路DD、电源管理芯片(图中未示出),电源管理芯片可以与时序控制器TCON集成为同一芯片)。显示面板包括多个像素P、多条扫描线(GL1~GLn)、多条数据线(DL1~DLm)、一个栅极驱动电路GOA等,多个像素P按行列排列,栅极驱动电路GOA与多条扫描线(GL1~GLn)电连接,源极驱动电路DD与多条数据线(DL1~DLm)电连接,扫描线(GL1~GLn)和数据线(DL1~DLm)与像素P电连接,时序控制器TCON与栅极驱动电路GOA和源极驱动电路DD电连接。The display device provided by the embodiment of the present application includes an LCD display device, an OLED display device, etc. As shown in FIG1 , the display device includes a display panel, a timing controller TCON, a source driving circuit DD, and a power management chip (not shown in the figure). The power management chip can be integrated with the timing controller TCON into the same chip). The display panel includes a plurality of pixels P, a plurality of scan lines (GL1~GLn), a plurality of data lines (DL1~DLm), a gate driving circuit GOA, etc., the plurality of pixels P are arranged in rows and columns, the gate driving circuit GOA is electrically connected to the plurality of scan lines (GL1~GLn), the source driving circuit DD is electrically connected to the plurality of data lines (DL1~DLm), the scan lines (GL1~GLn) and the data lines (DL1~DLm) are electrically connected to the pixels P, and the timing controller TCON is electrically connected to the gate driving circuit GOA and the source driving circuit DD.

在所述显示面板为LCD显示面板的情况下,显示面板包括薄膜晶体管阵列基板、对置基板和设置在薄膜晶体管阵列基板和对置基板之间的液晶材料,薄膜晶体管阵列基板包括基板、栅极驱动电路GOA、像素P、扫描线(GL1~GLn)、数据线(DL1~DLm)、色阻等,像素P包括薄膜晶体管、像素电极等,薄膜晶体管与像素电极、扫描线(GL1~GLn)和数据线(DL1~DLm)电连接。In the case where the display panel is an LCD display panel, the display panel includes a thin film transistor array substrate, an opposing substrate, and a liquid crystal material arranged between the thin film transistor array substrate and the opposing substrate. The thin film transistor array substrate includes a substrate, a gate drive circuit GOA, pixels P, scan lines (GL1~GLn), data lines (DL1~DLm), color resistance, etc. The pixel P includes a thin film transistor, a pixel electrode, etc. The thin film transistor is electrically connected to the pixel electrode, the scan line (GL1~GLn) and the data line (DL1~DLm).

在所述显示面板为OLED显示面板的情况下,显示面板包括基板、像素P、栅极驱动电路GOA、有机发光器件、封装层、偏光片、彩色滤光片等,基板可例如为玻璃基板、柔性基板(例如,聚酰亚胺基板)等,像素P包括有机发光器件(OLED)和驱动电路,驱动电路包括多个薄膜晶体管,有机发光器件电连接于驱动电路,有机发光器件包括发光层、电子传输层、空穴传输层、阴极和阳极等,封装层包括有机/无机交替的多层结构。In the case where the display panel is an OLED display panel, the display panel includes a substrate, a pixel P, a gate drive circuit GOA, an organic light-emitting device, an encapsulation layer, a polarizer, a color filter, etc. The substrate may be, for example, a glass substrate, a flexible substrate (for example, a polyimide substrate), etc. The pixel P includes an organic light-emitting device (OLED) and a drive circuit. The drive circuit includes a plurality of thin-film transistors. The organic light-emitting device is electrically connected to the drive circuit. The organic light-emitting device includes a light-emitting layer, an electron transport layer, a hole transport layer, a cathode and an anode, etc. The encapsulation layer includes an organic/inorganic alternating multilayer structure.

栅极驱动电路GOA包括级联的多级栅极驱动单元,每级栅极驱动单元与一行像素P电连接,栅极驱动单元用于向像素P提供扫描信号。The gate driving circuit GOA includes a plurality of cascaded gate driving units. Each gate driving unit is electrically connected to a row of pixels P. The gate driving unit is used to provide a scanning signal to the pixels P.

源极驱动电路DD用于向像素P提供数据信号。The source driving circuit DD is used to provide data signals to the pixels P.

时序控制器TCON用于接收外部输入的图像数据,并控制栅极驱动电路GOA输出扫描信号,以及控制源极驱动电路DD输出数据信号。The timing controller TCON is used to receive externally input image data, and control the gate driving circuit GOA to output a scanning signal, and control the source driving circuit DD to output a data signal.

电源管理芯片用于为显示装置的各个部分提供所需的工作电压。The power management chip is used to provide the required operating voltage for each part of the display device.

如图2、图3和图4所示,本申请的实施例提供了一种COA(Color-filter On Array)型LCD显示面板,即,本申请的实施例提供的显示面板中的彩色滤光片R、G制作在薄膜晶体管阵列基板上。该显示面板包括薄膜晶体管阵列基板、对置基板、设置在薄膜晶体管阵列基板和对置基板之间的液晶材料以及偏光片。As shown in FIG. 2, FIG. 3 and FIG. 4, the embodiment of the present application provides a COA (Color-filter On Array) type LCD display panel, that is, the color filters R and G in the display panel provided in the embodiment of the present application are made on a thin film transistor array substrate. The display panel includes a thin film transistor array substrate, an opposing substrate, a liquid crystal material disposed between the thin film transistor array substrate and the opposing substrate, and a polarizer.

薄膜晶体管阵列基板包括由玻璃或塑料等透明材料制成的第一基板S1,设置在第一基板S1上的薄膜晶体管、数据线SE、栅极线(GE1、GE2、GE3)、像素电极、彩色滤光片(R、G)等。The thin film transistor array substrate includes a first substrate S1 made of a transparent material such as glass or plastic, and thin film transistors, data lines SE, gate lines (GE1, GE2, GE3), pixel electrodes, color filters (R, G), etc. arranged on the first substrate S1.

对置基板包括由玻璃或塑料等透明材料制成的第二基板S2,第二基板S2上设置有有公共电极等。The counter substrate includes a second substrate S2 made of a transparent material such as glass or plastic, and a common electrode and the like are disposed on the second substrate S2.

偏光片设置于薄膜晶体管阵列基板和对置基板的外侧,用于调节光线的偏振状态。The polarizer is arranged on the outer sides of the thin film transistor array substrate and the opposite substrate, and is used to adjust the polarization state of the light.

本申请的实施例提供的显示面板还可以包括设置于薄膜晶体管阵列基板背向对置基板的一面的背光模组。The display panel provided in the embodiment of the present application may further include a backlight module disposed on a side of the thin film transistor array substrate facing away from the opposite substrate.

本申请的实施例提供的显示面板包括多个像素单元,每个像素单元通常包含红、绿、蓝三个子像素,每个子像素由一个薄膜晶体管和一个像素电极组成。彩色滤光片覆盖在对应颜色的子像素上方,用于滤除其他颜色的光线。The display panel provided in the embodiment of the present application includes a plurality of pixel units, each pixel unit generally includes three sub-pixels of red, green and blue, each sub-pixel is composed of a thin film transistor and a pixel electrode. A color filter is covered on the sub-pixel of the corresponding color to filter out light of other colors.

为了实现高像素密度(PPI),需要缩小像素单元的尺寸,这就要求薄膜晶体管的占用面积更加小。因此,本申请的实施例提供了一种显示面板,显示面板包括显示区AA,显示面板位于显示区AA的部分包括多个金属氧化物(IGZO)薄膜晶体管,该金属氧化物薄膜晶体管具有垂直结构,因此可以减小薄膜晶体管的占用面积。本申请的实施例提供的显示面板适用于极致高PPI的VR产品。In order to achieve high pixel density (PPI), the size of the pixel unit needs to be reduced, which requires that the occupied area of the thin film transistor is smaller. Therefore, an embodiment of the present application provides a display panel, the display panel includes a display area AA, and the portion of the display panel located in the display area AA includes a plurality of metal oxide (IGZO) thin film transistors, which have a vertical structure, so the occupied area of the thin film transistor can be reduced. The display panel provided in the embodiment of the present application is suitable for VR products with extremely high PPI.

具体地,显示面板位于显示区AA的部分包括多条数据线SE、多个金属氧化物半导体层OS和多个漏极DE。数据线SE位于显示区AA内,且数据线SE所在的膜层设置在第一基板S1上。金属氧化物半导体层OS的材料可以是铟镓锌氧化物(IGZO)、铟锡锌氧化物(ITZO)等。漏极DE的材料为透明导电材料,如氧化铟锡(ITO)。Specifically, the portion of the display panel located in the display area AA includes a plurality of data lines SE, a plurality of metal oxide semiconductor layers OS, and a plurality of drain electrodes DE. The data lines SE are located in the display area AA, and the film layer where the data lines SE are located is disposed on the first substrate S1. The material of the metal oxide semiconductor layer OS may be indium gallium zinc oxide (IGZO), indium tin zinc oxide (ITZO), etc. The material of the drain electrode DE is a transparent conductive material, such as indium tin oxide (ITO).

金属氧化物半导体层OS设置在数据线SE远离第一基板S1的一表面,且位于显示区AA内,金属氧化物半导体层OS通过第一过孔H1与数据线SE电性连接,金属氧化物半导体层OS与数据线SE平行设置,且在显示面板的俯视图中,如图4所示,金属氧化物半导体层OS与数据线SE至少部分重叠。上述技术方案可以最大程度地利用有限的面积,从而提高开口率。The metal oxide semiconductor layer OS is disposed on a surface of the data line SE away from the first substrate S1 and is located in the display area AA. The metal oxide semiconductor layer OS is electrically connected to the data line SE through the first via hole H1. The metal oxide semiconductor layer OS is disposed in parallel with the data line SE, and in a top view of the display panel, as shown in FIG4 , the metal oxide semiconductor layer OS at least partially overlaps with the data line SE. The above technical solution can maximize the use of a limited area, thereby improving the aperture ratio.

漏极DE设置在金属氧化物半导体层OS的上方,漏极DE通过第二过孔H2与金属氧化物半导体层OS电性连接。The drain electrode DE is disposed above the metal oxide semiconductor layer OS, and the drain electrode DE is electrically connected to the metal oxide semiconductor layer OS through the second via hole H2.

金属氧化物半导体层OS包括第一部分和第二部分,第一部分与数据线SE电性连接,第二部分与漏极DE电性连接,第一部分和第二部分在垂直于显示面板所在的平面的方向上位于不同的高度,从而形成了垂直结构的薄膜晶体管。The metal oxide semiconductor layer OS includes a first part and a second part, the first part is electrically connected to the data line SE, and the second part is electrically connected to the drain DE. The first part and the second part are located at different heights in a direction perpendicular to the plane where the display panel is located, thereby forming a vertically structured thin film transistor.

在显示区AA,金属氧化物半导体层OS为垂直结构。具体来说,金属氧化物薄膜晶体管的源极SE和漏极DE分别设置在金属氧化物半导体层OS的上下两层。在本申请的实施例中,源极即数据线SE,设置在金属氧化物半导体层OS的下层,与金属氧化物半导体层OS通过第一过孔H1电性连接。漏极DE设置在金属氧化物半导体层OS的上层,与金属氧化物半导体层OS通过第二过孔H2电性连接。In the display area AA, the metal oxide semiconductor layer OS is a vertical structure. Specifically, the source electrode SE and the drain electrode DE of the metal oxide thin film transistor are respectively arranged on the upper and lower layers of the metal oxide semiconductor layer OS. In the embodiment of the present application, the source electrode, i.e., the data line SE, is arranged on the lower layer of the metal oxide semiconductor layer OS and is electrically connected to the metal oxide semiconductor layer OS through the first via hole H1. The drain electrode DE is arranged on the upper layer of the metal oxide semiconductor layer OS and is electrically connected to the metal oxide semiconductor layer OS through the second via hole H2.

这种垂直结构的薄膜晶体管可以使得金属氧化物半导体层OS完全平行于数据线SE,且金属氧化物半导体层OS与数据线SE重叠。相比平面结构的薄膜晶体管,垂直结构的薄膜晶体管避免了金属氧化物半导体层OS存在旁路分支(斜线区),从而在显示面板具有高PPI的情况下降低了显示面板的短路风险,提高了可靠性。此外,垂直结构的薄膜晶体管使金属氧化物半导体层OS完全遮挡在数据线SE的下方,从而大幅提升了开口率。This vertical thin film transistor structure allows the metal oxide semiconductor layer OS to be completely parallel to the data line SE, and the metal oxide semiconductor layer OS overlaps the data line SE. Compared with the planar thin film transistor, the vertical thin film transistor avoids the existence of a bypass branch (oblique line area) in the metal oxide semiconductor layer OS, thereby reducing the short circuit risk of the display panel when the display panel has a high PPI and improving reliability. In addition, the vertical thin film transistor allows the metal oxide semiconductor layer OS to be completely blocked under the data line SE, thereby greatly improving the aperture ratio.

为实现上述垂直结构,金属氧化物半导体层OS的两个部分(第一部分和第二部分)通过爬坡连接。第一部分与数据线SE相连,从数据线SE处通过爬坡进入第一栅绝缘层GI2上方与第二部分相连。也就是说,金属氧化物半导体层OS在竖直方向存在爬坡跨越的垂直架构,不再处于同一平面。第二部分与漏极DE电性连接。To achieve the vertical structure, two parts (the first part and the second part) of the metal oxide semiconductor layer OS are connected by climbing. The first part is connected to the data line SE, and from the data line SE, it climbs into the first gate insulating layer GI2 and is connected to the second part. In other words, the metal oxide semiconductor layer OS has a vertical structure of climbing and crossing in the vertical direction, and is no longer in the same plane. The second part is electrically connected to the drain DE.

这种垂直结构(分层爬坡设计)使得金属氧化物半导体层OS在平面布局上只需直线布置,无需斜线布置,避免了旁路分支(平面结构中的斜线区),从而可以适用于极高像素密度的设计,即,可以进一步缩小线宽线距,实现2000+PPI等极致高分辨率。同时,由于第一部分和第二部分在垂直方向上存在高度差,因此可以减小金属氧化物半导体层OS的占用面积(增加有效显示区域的面积),进一步提高开口率,降低功耗。同时由于金属氧化物半导体层OS与数据线SE平行布置,二者的重叠面积增大,进一步提高了开口率。This vertical structure (layered climbing design) allows the metal oxide semiconductor layer OS to be arranged in a straight line in the plane layout without the need for a diagonal line, thus avoiding bypass branches (diagonal line areas in the plane structure), making it suitable for designs with extremely high pixel density, that is, the line width and line spacing can be further reduced to achieve an extremely high resolution of 2000+PPI. At the same time, since there is a height difference between the first part and the second part in the vertical direction, the occupied area of the metal oxide semiconductor layer OS can be reduced (increasing the area of the effective display area), further improving the aperture ratio and reducing power consumption. At the same time, since the metal oxide semiconductor layer OS is arranged in parallel with the data line SE, the overlapping area of the two is increased, further improving the aperture ratio.

金属氧化物半导体层OS的第一部分位于较低的高度,与数据线SE通过第一过孔H1电性连接。第二部分位于较高的高度,与漏极DE通过第二过孔H2电性连接。第一部分和第二部分之间通过爬坡结构(在垂直与显示面板所在的平面的方向上的过渡结构)连接,即,金属氧化物半导体层OS的第一部分和第二部分在垂直方向上呈阶梯状。The first part of the metal oxide semiconductor layer OS is located at a lower height and is electrically connected to the data line SE through the first via hole H1. The second part is located at a higher height and is electrically connected to the drain electrode DE through the second via hole H2. The first part and the second part are connected by a climbing structure (a transition structure in a direction perpendicular to the plane where the display panel is located), that is, the first part and the second part of the metal oxide semiconductor layer OS are stepped in the vertical direction.

作为一种改进,金属氧化物半导体层OS上下表面分别设置有一层具有不同能带结构的金属氧化物薄膜,这种多层结构可以提高金属氧化物半导体层OS的载流子的迁移率,从而改善薄膜晶体管的开关特性和驱动能力。同时,还可以提高器件的稳定性,减少长期工作时的性能退化。As an improvement, a metal oxide film with different energy band structures is disposed on the upper and lower surfaces of the metal oxide semiconductor layer OS, respectively. This multilayer structure can improve the carrier mobility of the metal oxide semiconductor layer OS, thereby improving the switching characteristics and driving capability of the thin film transistor. At the same time, it can also improve the stability of the device and reduce performance degradation during long-term operation.

进一步地,在显示面板的俯视图中,如图4所示,金属氧化物半导体层OS的宽度大于数据线SE的宽度,漏极DE的宽度大于数据线SE的宽度,且小于或等于金属氧化物半导体层OS的宽度。Furthermore, in the top view of the display panel, as shown in FIG. 4 , the width of the metal oxide semiconductor layer OS is greater than the width of the data line SE, and the width of the drain electrode DE is greater than the width of the data line SE and less than or equal to the width of the metal oxide semiconductor layer OS.

显示面板还包括第一栅极线GE2、层间绝缘层IL、第一栅绝缘层GI2、第二栅极线GE3和第二栅绝缘层GI3。The display panel further includes a first gate line GE2, an interlayer insulating layer IL, a first gate insulating layer GI2, a second gate line GE3, and a second gate insulating layer GI3.

第一栅极线GE2设置在金属氧化物半导体层OS的第二部分的下方,用于控制第二部分的导电状态。The first gate line GE2 is disposed under the second portion of the metal oxide semiconductor layer OS to control a conductive state of the second portion.

层间绝缘层IL设置在第一栅极线GE2与数据线SE之间,用于将第一栅极线GE2与数据线SE隔离。The interlayer insulating layer IL is disposed between the first gate line GE2 and the data line SE, and is used to isolate the first gate line GE2 from the data line SE.

第一栅绝缘层GI2设置在第一栅极线GE2与金属氧化物半导体层OS的第二部分之间,用于将第一栅极线GE2和金属氧化物半导体层OS进行绝缘。The first gate insulating layer GI2 is disposed between the first gate line GE2 and the second portion of the metal oxide semiconductor layer OS, and is used to insulate the first gate line GE2 from the metal oxide semiconductor layer OS.

第二栅极线GE3设置在金属氧化物半导体层OS的第二部分的上方,与第一栅极线GE2共同控制第二部分的导电状态。The second gate line GE3 is disposed above the second portion of the metal oxide semiconductor layer OS, and controls the conductive state of the second portion together with the first gate line GE2.

第二栅绝缘层GI3设置在第二栅极线GE3与金属氧化物半导体层OS之间,用于将第二栅极线GE3和金属氧化物半导体层OS进行绝缘。The second gate insulating layer GI3 is disposed between the second gate line GE3 and the metal oxide semiconductor layer OS, and is used to insulate the second gate line GE3 from the metal oxide semiconductor layer OS.

第一栅极线GE2所在的膜层位于数据线SE所在的膜层之上。The film layer where the first gate line GE2 is located is located above the film layer where the data line SE is located.

在显示面板的俯视图中,如图4所示,金属氧化物半导体层OS的长度方向与数据线SE的长度方向一致,且金属氧化物半导体层OS跨越第一栅极线GE2和第二栅极线GE3。In the top view of the display panel, as shown in FIG. 4 , the length direction of the metal oxide semiconductor layer OS is consistent with the length direction of the data line SE, and the metal oxide semiconductor layer OS crosses the first gate line GE2 and the second gate line GE3 .

金属氧化物半导体层OS包括有源区,有源区位于第一栅极线GE2、第二栅极线GE3与数据线SE的交叉区域。第一栅极线GE2、第二栅极线GE3在有源区对应的位置施加电场,控制金属氧化物半导体层OS的导电状态,实现对像素的开关控制。The metal oxide semiconductor layer OS includes an active area, and the active area is located at the intersection of the first gate line GE2, the second gate line GE3 and the data line SE. The first gate line GE2 and the second gate line GE3 apply an electric field at a position corresponding to the active area to control the conductive state of the metal oxide semiconductor layer OS and realize the switching control of the pixel.

在显示面板的俯视图中,如图4所示,第一栅极线GE2和第二栅极线GE3均位于第一过孔H1和第二过孔H2之间,因此金属氧化物半导体层OS第二部分完全位于第一栅极线GE2和第二栅极线GE3的控制范围内,从而优化像素的开关特性。In the top view of the display panel, as shown in Figure 4, the first gate line GE2 and the second gate line GE3 are both located between the first via hole H1 and the second via hole H2, so the second portion of the metal oxide semiconductor layer OS is completely within the control range of the first gate line GE2 and the second gate line GE3, thereby optimizing the switching characteristics of the pixel.

第一栅极线GE2与第二栅极线GE3平行设置,第一栅极线GE2与数据线SE交叉设置,且在显示面板的俯视图中,如图4所示,第一栅极线GE2与金属氧化物半导体层OS和数据线SE重叠的部分至少部分重叠,第二栅极线GE3与金属氧化物半导体层OS和数据线SE重叠的部分至少部分重叠。第一栅极线GE2和第二栅极线GE3在显示面板的外围区PA电性连接。The first gate line GE2 is arranged in parallel with the second gate line GE3, and the first gate line GE2 is arranged to cross the data line SE, and in the top view of the display panel, as shown in FIG4, the first gate line GE2 at least partially overlaps with the metal oxide semiconductor layer OS and the data line SE, and the second gate line GE3 at least partially overlaps with the metal oxide semiconductor layer OS and the data line SE. The first gate line GE2 and the second gate line GE3 are electrically connected in the peripheral area PA of the display panel.

第一栅极线GE2和第二栅极线GE3可以具有不同的驱动电压或相同的驱动电压。The first gate line GE2 and the second gate line GE3 may have different driving voltages or the same driving voltage.

第一栅极线GE2和第二栅极线GE3可以同步驱动或异步驱动。The first gate line GE2 and the second gate line GE3 may be synchronously driven or asynchronously driven.

第一过孔H1贯穿层间绝缘层IL和第一栅绝缘层GI2,第二过孔H2贯穿第二栅绝缘层GI3。The first via hole H1 penetrates the interlayer insulating layer IL and the first gate insulating layer GI2 , and the second via hole H2 penetrates the second gate insulating layer GI3 .

具体来说,在制造工艺中,在数据线SE上沉积层间绝缘层IL和第一栅绝缘层GI2,在形成金属氧化物半导体层OS之前,在层间绝缘层IL和第一栅绝缘层GI2中开设第一过孔H1,以便后续形成的金属氧化物半导体层OS的第一部分与数据线SE电性连接。然后在金属氧化物半导体层OS上方形成第二栅绝缘层GI3,并在第二栅绝缘层GI3中开设第二过孔H2,以便金属氧化物半导体层OS的第二部分与漏极DE电性连接。Specifically, in the manufacturing process, an interlayer insulating layer IL and a first gate insulating layer GI2 are deposited on the data line SE, and before the metal oxide semiconductor layer OS is formed, a first via hole H1 is opened in the interlayer insulating layer IL and the first gate insulating layer GI2 so that a first portion of the subsequently formed metal oxide semiconductor layer OS is electrically connected to the data line SE. Then, a second gate insulating layer GI3 is formed over the metal oxide semiconductor layer OS, and a second via hole H2 is opened in the second gate insulating layer GI3 so that a second portion of the metal oxide semiconductor layer OS is electrically connected to the drain electrode DE.

第一过孔H1和第二过孔H2可以具有不同的形状和尺寸,例如,第一过孔H1具有相对第二过孔H2较大的尺寸,以增大金属氧化物半导体层OS与数据线SE的接触面积,第二过孔H2具有相对第一过孔H1较小的尺寸。The first via hole H1 and the second via hole H2 may have different shapes and sizes. For example, the first via hole H1 has a larger size than the second via hole H2 to increase the contact area between the metal oxide semiconductor layer OS and the data line SE, and the second via hole H2 has a smaller size than the first via hole H1.

在显示面板的俯视图中,位于同一金属氧化物层OS的两端的第一过孔H1与第二过孔H2的连线与数据线SE平行。In the top view of the display panel, a connection line between the first via hole H1 and the second via hole H2 located at two ends of the same metal oxide layer OS is parallel to the data line SE.

为确保第一过孔H1的内壁具有良好的绝缘性,避免金属氧化物半导体层OS与数据线SE发生漏电或短路,一种改进方案是:在第一过孔H1的内壁制作绝缘层,如氧化物绝缘层等,另一种改进方案是:对第一过孔H1进行钝化处理,消除尖锐边角,即,第一过孔H1的底面的边缘或开口的边缘的相邻两面形成为钝角或圆角。In order to ensure that the inner wall of the first via hole H1 has good insulation properties and avoid leakage or short circuit between the metal oxide semiconductor layer OS and the data line SE, one improvement scheme is: making an insulating layer, such as an oxide insulating layer, on the inner wall of the first via hole H1. Another improvement scheme is: passivating the first via hole H1 to eliminate sharp corners, that is, the edge of the bottom surface of the first via hole H1 or the adjacent two surfaces of the edge of the opening are formed into obtuse angles or rounded corners.

显示面板还包括外围区PA,显示面板位于外围区PA的部分包括栅极驱动电路,栅极驱动电路包括低温多晶硅薄膜晶体管,低温多晶硅薄膜晶体管的第一源漏极金属层SD1与数据线SE设置在同一层,第一源漏极金属层SD1所在的膜层位于低温多晶硅薄膜晶体管的第三栅极GE1所在的膜层之上。The display panel also includes a peripheral area PA. The portion of the display panel located in the peripheral area PA includes a gate driving circuit. The gate driving circuit includes a low-temperature polycrystalline silicon thin film transistor. The first source and drain metal layer SD1 of the low-temperature polycrystalline silicon thin film transistor is arranged on the same layer as the data line SE. The film layer where the first source and drain metal layer SD1 is located is located above the film layer where the third gate GE1 of the low-temperature polycrystalline silicon thin film transistor is located.

在显示区AA,设置有上述金属氧化物薄膜晶体管,在外围区PA,则设置有低温多晶硅薄膜晶体管,用于驱动显示区AA的第一栅极线GE2、第二栅极线GE3。低温多晶硅薄膜晶体管的第一源漏极金属层SD1与数据线SE设置在同一层,从而可以在同一工艺步骤中一并形成,简化了制程。The above metal oxide thin film transistor is arranged in the display area AA, and the low temperature polysilicon thin film transistor is arranged in the peripheral area PA, which is used to drive the first gate line GE2 and the second gate line GE3 of the display area AA. The first source and drain metal layer SD1 of the low temperature polysilicon thin film transistor is arranged in the same layer as the data line SE, so that they can be formed together in the same process step, simplifying the process.

低温多晶硅薄膜晶体管还包括第二源漏极金属层SD2,第二源漏极金属层SD2所在的膜层位于第一源漏极金属层SD1所在的膜层之上。第二源漏极金属层SD2与第一源漏极金属层SD1电性连接,第二源漏极金属层SD2与第一栅极线GE2设置在同一层,如图3所示,或者第二源漏极金属层SD2与第二栅极线GE3设置在同一层,如图4所示。The low temperature polysilicon thin film transistor further includes a second source-drain metal layer SD2, and the film layer where the second source-drain metal layer SD2 is located is located above the film layer where the first source-drain metal layer SD1 is located. The second source-drain metal layer SD2 is electrically connected to the first source-drain metal layer SD1, and the second source-drain metal layer SD2 and the first gate line GE2 are arranged in the same layer, as shown in FIG3, or the second source-drain metal layer SD2 and the second gate line GE3 are arranged in the same layer, as shown in FIG4.

如果第二源漏极金属层SD2与第一栅极线GE2设置在同一层,则第二源漏极金属层SD2可以与第一栅极线GE2金属层在同一工艺步骤中一并形成。如果第二源漏极金属层SD2与第二栅极线GE3设置在同一层,则第二源漏极金属层SD2可以与第二栅极线GE3金属层在同一工艺步骤中一并形成。If the second source-drain metal layer SD2 is disposed at the same layer as the first gate line GE2, the second source-drain metal layer SD2 can be formed together with the first gate line GE2 metal layer in the same process step. If the second source-drain metal layer SD2 is disposed at the same layer as the second gate line GE3, the second source-drain metal layer SD2 can be formed together with the second gate line GE3 metal layer in the same process step.

显示面板还包括第三过孔,第三过孔贯穿层间绝缘层IL、第一栅绝缘层GI2和第二栅绝缘层GI3,第二源漏极金属层SD2通过第三过孔与第一源漏极金属层SD1电连接。The display panel further includes a third via hole, which penetrates the interlayer insulating layer IL, the first gate insulating layer GI2 and the second gate insulating layer GI3, and the second source-drain metal layer SD2 is electrically connected to the first source-drain metal layer SD1 through the third via hole.

具体来说,在制造工艺中,首先在基板上依次形成数据线SE、层间绝缘层IL、第一栅极线GE2、第一栅绝缘层GI2、金属氧化物半导体层OS和第二栅绝缘层GI3。然后在层间绝缘层IL、第一栅绝缘层GI2和第二栅绝缘层GI3中开设第三过孔,使第三过孔贯穿层间绝缘层IL、第一栅绝缘层GI2和第二栅绝缘层GI3,接着在第二栅绝缘层GI3上方形成第二源漏极金属层SD2,第二源漏极金属层SD2通过第三过孔与第一源漏极金属层SD1电性连接。Specifically, in the manufacturing process, first, a data line SE, an interlayer insulating layer IL, a first gate line GE2, a first gate insulating layer GI2, a metal oxide semiconductor layer OS, and a second gate insulating layer GI3 are sequentially formed on a substrate. Then, a third via hole is opened in the interlayer insulating layer IL, the first gate insulating layer GI2, and the second gate insulating layer GI3, so that the third via hole penetrates the interlayer insulating layer IL, the first gate insulating layer GI2, and the second gate insulating layer GI3, and then a second source-drain metal layer SD2 is formed on the second gate insulating layer GI3, and the second source-drain metal layer SD2 is electrically connected to the first source-drain metal layer SD1 through the third via hole.

第三过孔可以采用锥形或阶梯形等特殊形状,确保第二源漏极金属层SD2与第一源漏极金属层SD1之间的电连接质量。The third via hole may be in a special shape such as a cone or a step shape to ensure the electrical connection quality between the second source-drain metal layer SD2 and the first source-drain metal layer SD1 .

第三过孔在不同深度处具有不同直径,这样可以确保良好的台阶覆盖和电气连接。The third via has different diameters at different depths, which can ensure good step coverage and electrical connection.

第二源漏极金属层SD2与第一源漏极金属层SD1之间存在一定的高度差,因此通过第三过孔将二者电性连接。There is a certain height difference between the second source-drain metal layer SD2 and the first source-drain metal layer SD1 , so the two are electrically connected through the third via hole.

本申请的实施例提出的显示面板中位于显示区AA的薄膜晶体管为垂直结构,在该薄膜晶体管中,源极与漏极DE分层设置,并分别位于金属氧化物半导体层OS的下方和上方,即数据线SE置于金属氧化物半导体层OS的下层,二者通过第一过孔H1电性连接,漏极DE置于金属氧化物半导体层OS的上层,二者通过第二过孔H2电性连接,金属氧化物半导体层OS平行于数据线SE,且其置于数据线SE正上方,二者正投影部分重叠。相对传统的平面结构的薄膜晶体管中金属氧化物半导体层OS需要有一部分相对数据线SE倾斜(偏出)而导致线距增大,本申请的显示面板的薄膜晶体管的金属氧化物半导体层OS不存在倾斜走线,可以大幅提升像素密度,并且还可以减小TFT的占用面积,为提升像素密度腾出更多空间,进一步提升像素密度。由于金属氧化物半导体层OS全部平行于数据线SE且置于数据线SE正上方,二者至少部分重叠,因此可以缩短金属氧化物半导体层OS的长度,降低其电阻,从而降低功耗。由于显示面板的外围区PA的薄膜晶体管的源漏极金属层与显示面板的显示区AA的数据线SE和栅极线共用同层金属,因此减少了制程中的掩模板的数量,从而降低了生产成本。The thin film transistor in the display panel in the embodiment of the present application, which is located in the display area AA, is a vertical structure. In the thin film transistor, the source electrode and the drain electrode DE are arranged in layers and are respectively located below and above the metal oxide semiconductor layer OS, that is, the data line SE is placed in the lower layer of the metal oxide semiconductor layer OS, and the two are electrically connected through the first via hole H1, the drain electrode DE is placed in the upper layer of the metal oxide semiconductor layer OS, and the two are electrically connected through the second via hole H2, the metal oxide semiconductor layer OS is parallel to the data line SE, and it is placed directly above the data line SE, and the orthographic projections of the two overlap partially. Compared with the traditional planar structure thin film transistor, the metal oxide semiconductor layer OS needs to be partially tilted (deflected) relative to the data line SE, resulting in an increase in line spacing. The metal oxide semiconductor layer OS of the thin film transistor of the display panel of the present application does not have a tilted routing, which can greatly improve the pixel density, and can also reduce the occupied area of TFT, free up more space for improving the pixel density, and further improve the pixel density. Since the metal oxide semiconductor layer OS is completely parallel to the data line SE and is placed directly above the data line SE, the two overlap at least partially, so the length of the metal oxide semiconductor layer OS can be shortened, its resistance can be reduced, and thus the power consumption can be reduced. Since the source and drain metal layers of the thin film transistors in the peripheral area PA of the display panel share the same metal layer with the data lines SE and gate lines in the display area AA of the display panel, the number of masks in the manufacturing process is reduced, thereby reducing production costs.

本申请的实施例提供了一种垂直结构的LTPO设计方案。在该设计方案中,显示面板位于显示区AA的部分采用垂直结构的金属氧化物半导体薄膜晶体管,数据线SE置于金属氧化物半导体层OS的下方,二者通过第一过孔H1电性连接,漏极DE置于金属氧化物半导体层OS的上方,二者通过第二过孔H2电性连接,金属氧化物半导体层OS全部平行于数据线SE,且置于数据线SE正上方,二者正投影部分重叠。在此设计方案中,金属氧化物半导体层OS不需要转折(倾斜走线)进入开口区,薄膜晶体管的占用面积可以进一步减小,像素单元的尺寸可以进一步缩减,进而可以实现更高的像素密度,并且可以大幅提升开口率。The embodiment of the present application provides a vertical structure LTPO design. In this design, the part of the display panel located in the display area AA adopts a vertical structure metal oxide semiconductor thin film transistor, the data line SE is placed below the metal oxide semiconductor layer OS, and the two are electrically connected through the first via H1, the drain DE is placed above the metal oxide semiconductor layer OS, and the two are electrically connected through the second via H2, the metal oxide semiconductor layer OS is all parallel to the data line SE, and is placed directly above the data line SE, and the orthographic projections of the two partially overlap. In this design, the metal oxide semiconductor layer OS does not need to turn (tilt routing) to enter the opening area, the occupied area of the thin film transistor can be further reduced, the size of the pixel unit can be further reduced, and thus a higher pixel density can be achieved, and the aperture ratio can be greatly improved.

此外,显示面板的外围区PA采用低温多晶硅薄膜晶体管,其源漏极金属层与显示区AA的数据线SE及栅极线共用同层金属,减少了光罩数量,降低生产成本,提升了良率。In addition, the peripheral area PA of the display panel adopts low-temperature polysilicon thin film transistors, whose source and drain metal layers share the same metal layer with the data lines SE and gate lines of the display area AA, reducing the number of masks, lowering production costs and improving yield.

本方案提出两种实施例:This solution proposes two embodiments:

实施例一:Embodiment 1:

显示面板位于显示区AA中的金属氧化物半导体薄膜晶体管采用垂直架构,数据线SE设置在金属氧化物半导体层OS的下方,漏极DE设置在金属氧化物半导体层OS的上方。金属氧化物半导体层OS分为两个部分,第一部分与数据线SE相连,第二部分与漏极DE相连,两部分在垂直方向上位于不同高度。该架构使金属氧化物半导体层OS走线仅需直线,可适用超高像素密度设计要求,如2000+的像素密度设计要求。显示面板位于外围区PA中的低温多晶硅薄膜晶体管的第一源漏极金属层SD1与显示区AA中的数据线SE设置在同一层,第二源漏极金属层SD2与金属氧化物薄膜晶体管的第二栅极线GE3设置在同一层,共用同层金属,节省光罩数量,降低生产成本,提升良率。The metal oxide semiconductor thin film transistor of the display panel located in the display area AA adopts a vertical structure, the data line SE is arranged below the metal oxide semiconductor layer OS, and the drain DE is arranged above the metal oxide semiconductor layer OS. The metal oxide semiconductor layer OS is divided into two parts, the first part is connected to the data line SE, and the second part is connected to the drain DE, and the two parts are located at different heights in the vertical direction. This structure allows the metal oxide semiconductor layer OS to be routed in a straight line, which can be applied to ultra-high pixel density design requirements, such as 2000+ pixel density design requirements. The first source and drain metal layer SD1 of the low-temperature polysilicon thin film transistor located in the peripheral area PA of the display panel is arranged on the same layer as the data line SE in the display area AA, and the second source and drain metal layer SD2 is arranged on the same layer as the second gate line GE3 of the metal oxide thin film transistor, sharing the same layer of metal, saving the number of masks, reducing production costs, and improving yield.

实施例二:Embodiment 2:

在实施例一的基础上,显示面板位于外围区PA中的低温多晶硅薄膜晶体管的第二源漏极金属层SD2与金属氧化物薄膜晶体管的第一栅极线GE2设置在同一层。这种设计使第二源漏极金属层SD2与第一源漏极金属层SD1之间的高度差降低,仅隔一层层间绝缘层IL,高度差由0.6~1μm降低为0.2~0.5μm,大幅降低制程难度,进一步提升良率。On the basis of the first embodiment, the second source-drain metal layer SD2 of the low-temperature polysilicon thin film transistor in the peripheral area PA of the display panel and the first gate line GE2 of the metal oxide thin film transistor are arranged on the same layer. This design reduces the height difference between the second source-drain metal layer SD2 and the first source-drain metal layer SD1, and only one interlayer insulating layer IL is separated, and the height difference is reduced from 0.6-1μm to 0.2-0.5μm, which greatly reduces the difficulty of the process and further improves the yield.

本方案针对极致高像素密度的显示面板提出了新的LTPO COA架构的显示面板,该方案可大幅提升像素密度(例如,提升至2000+以上),增大开口率,降低功耗,改善色偏。同时,本方案的显示面板的外围区PA的低温多晶硅薄膜晶体管的源漏极金属层与显示区AA的数据线SE及栅极线共用同层金属,可减少光罩数量,降低成本,提升良率。This solution proposes a new LTPO COA architecture display panel for extremely high pixel density display panels, which can significantly increase pixel density (for example, to more than 2000), increase aperture ratio, reduce power consumption, and improve color deviation. At the same time, the source and drain metal layer of the low-temperature polysilicon thin film transistor in the peripheral area PA of the display panel of this solution shares the same metal layer with the data line SE and gate line in the display area AA, which can reduce the number of masks, reduce costs, and improve yield.

以上对本申请实施例进行了详细介绍,本说明书的内容不应理解为对本申请的保护范围的限制。The above is a detailed introduction to the embodiments of the present application. The contents of this specification should not be construed as limiting the scope of protection of the present application.

Claims (12)

1. A display panel, the display panel comprising a display area, the display panel comprising:
a first substrate;
the data lines are positioned in the display area, and a film layer where the data lines are positioned is arranged on the first substrate;
The metal oxide semiconductor layers are arranged on one surface of the data line far away from the first substrate and are positioned in the display area, and the metal oxide semiconductor layers are electrically connected with the data line through first through holes; and
The drain electrodes are arranged on one surface of the metal oxide semiconductor layer, which is far away from the first substrate, and are positioned in the display area, and the drain electrodes are electrically connected with the metal oxide semiconductor layer through second through holes;
the metal oxide semiconductor layer is arranged in parallel with the data line, and the metal oxide semiconductor layer at least partially overlaps with the data line in a top view of the display panel.
2. The display panel according to claim 1, wherein the metal oxide semiconductor layer includes a first portion electrically connected to the data line and a second portion electrically connected to the drain electrode, the first portion and the second portion being located at different heights in a direction perpendicular to a plane in which the display panel is located.
3. The display panel according to claim 2, the display panel is characterized in that the display panel further comprises:
a first gate line disposed under the second portion of the metal oxide semiconductor layer;
an interlayer insulating layer disposed between the first gate line and the data line;
a first gate insulating layer disposed between the first gate line and the second portion of the metal oxide semiconductor layer;
A second gate line disposed over the second portion of the metal oxide semiconductor layer; and
And a second gate insulating layer disposed between the second gate line and the metal oxide semiconductor layer.
4. The display panel according to claim 3, wherein the first gate line is disposed in parallel with the second gate line, the first gate line is disposed to intersect the data line, and a portion where the first gate line overlaps the metal oxide semiconductor layer and the data line at least partially overlaps a portion where the second gate line overlaps the metal oxide semiconductor layer and the data line in a top view of the display panel.
5. The display panel of claim 3, wherein the film layer on which the first gate line is disposed is located above the film layer on which the data line is disposed.
6. The display panel of claim 3, wherein the first gate line and the second gate line are each located between the first via and the second via in a top view of the display panel.
7. The display panel of claim 3, wherein the first via penetrates the interlayer insulating layer and the first gate insulating layer, and the second via penetrates the second gate insulating layer.
8. A display panel according to claim 3, wherein the display panel further comprises a peripheral region, the portion of the display panel located in the peripheral region comprising:
the gate driving circuit comprises a low-temperature polysilicon thin film transistor, and a first source-drain metal layer of the low-temperature polysilicon thin film transistor and the data line are arranged on the same layer.
9. The display panel of claim 8, wherein the low temperature polysilicon thin film transistor further comprises a second source drain metal layer electrically connected to the first source drain metal layer, the second source drain metal layer being disposed on the same layer as the first gate line or the second source drain metal layer being disposed on the same layer as the second gate line.
10. The display panel of claim 9, further comprising a third via penetrating the interlayer insulating layer, the first gate insulating layer, and the second gate insulating layer, the second source drain metal layer being electrically connected to the first source drain metal layer through the third via.
11. The display panel according to claim 1, wherein a width of the metal oxide semiconductor layer is larger than a width of the data line, and a width of the drain electrode is larger than a width of the data line and smaller than or equal to a width of the metal oxide semiconductor layer in a top view of the display panel.
12. The display panel according to claim 1, wherein lines of the first via holes and the second via holes located at both ends of the same metal oxide layer are parallel to the data lines in a plan view of the display panel.
CN202411193313.3A 2024-08-28 2024-08-28 Display panel Active CN118712202B (en)

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Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20170185192A1 (en) * 2015-12-28 2017-06-29 Lg Display Co., Ltd. Display Device with Connection Interface
CN112736094A (en) * 2020-12-30 2021-04-30 武汉华星光电技术有限公司 Display panel and display device
CN114068590A (en) * 2022-01-14 2022-02-18 京东方科技集团股份有限公司 Array substrate and display panel
CN117594608A (en) * 2023-11-10 2024-02-23 武汉华星光电技术有限公司 A display panel and display device

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20170185192A1 (en) * 2015-12-28 2017-06-29 Lg Display Co., Ltd. Display Device with Connection Interface
CN112736094A (en) * 2020-12-30 2021-04-30 武汉华星光电技术有限公司 Display panel and display device
CN114068590A (en) * 2022-01-14 2022-02-18 京东方科技集团股份有限公司 Array substrate and display panel
CN117594608A (en) * 2023-11-10 2024-02-23 武汉华星光电技术有限公司 A display panel and display device

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