CN118707424B - Automatic calibration system and method for sheet resistance tester - Google Patents
Automatic calibration system and method for sheet resistance tester Download PDFInfo
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- CN118707424B CN118707424B CN202411203567.9A CN202411203567A CN118707424B CN 118707424 B CN118707424 B CN 118707424B CN 202411203567 A CN202411203567 A CN 202411203567A CN 118707424 B CN118707424 B CN 118707424B
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- 238000012360 testing method Methods 0.000 claims abstract description 93
- 239000000523 sample Substances 0.000 claims description 22
- 238000004891 communication Methods 0.000 claims description 19
- 238000007789 sealing Methods 0.000 claims description 5
- 238000005259 measurement Methods 0.000 abstract description 14
- 238000006073 displacement reaction Methods 0.000 description 20
- 230000008569 process Effects 0.000 description 10
- 238000004590 computer program Methods 0.000 description 8
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- 238000001514 detection method Methods 0.000 description 5
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R35/00—Testing or calibrating of apparatus covered by the other groups of this subclass
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Abstract
本发明属于测试设备的标定方法技术领域，其目的在于提供一种方阻测试仪用自动标定系统及方法。本发明在需要对方阻测试仪进行标定时，可基于主控模块控制测试仪位置驱动模块带动方阻测试仪在测试平台上方移动，以使方阻测试仪对标定片进行测试，进而得到测量结果，随后，主控模块可在测量结果与标定片的标定参数不一致时，基于测量结果、标定片的标定参数以及方阻测试仪当前的标定系数，获取更新后标定系数，最后基于更新后标定系数对方阻测试仪的标定系数进行更新，从而实现对方阻测试仪的自动标定，在方阻测试仪后续对被测片进行测试时，即可自动调用更新后标定系数。本发明可提高对方阻测试仪的标定效率，同时可提高标定片的使用寿命。
The present invention belongs to the technical field of calibration methods for test equipment, and its purpose is to provide an automatic calibration system and method for a square resistance tester. When the square resistance tester needs to be calibrated, the present invention can control the tester position driving module based on the main control module to drive the square resistance tester to move above the test platform, so that the square resistance tester tests the calibration piece, and then obtains the measurement result. Subsequently, when the measurement result is inconsistent with the calibration parameter of the calibration piece, the main control module can obtain the updated calibration coefficient based on the measurement result, the calibration parameter of the calibration piece and the current calibration coefficient of the square resistance tester. Finally, based on the updated calibration coefficient, the calibration coefficient of the square resistance tester is updated, thereby realizing the automatic calibration of the square resistance tester. When the square resistance tester subsequently tests the tested piece, the updated calibration coefficient can be automatically called. The present invention can improve the calibration efficiency of the square resistance tester and at the same time improve the service life of the calibration piece.
Description
Technical Field
The invention belongs to the technical field of calibration methods of test equipment, and particularly relates to an automatic calibration system and method for a sheet resistance tester.
Background
The conventional sheet resistance tester is worn after being used for a period of time, the shearing shape of the probe is changed, so that the parameter drift phenomenon of the sheet resistance tester occurs, the test result is deviated, and at this time, in order to ensure the accuracy of the subsequent measurement result, the sheet resistance tester is usually required to be calibrated, so as to realize the correction of the calibration coefficient of the sheet resistance tester. In the prior art, calibration of the square resistance tester is usually realized in a manual mode, namely, a calibration sheet is placed on a certain platform, then a probe of the square resistance tester is moved to a designated position of the calibration sheet and then is pressed down, so that a measurement result of the calibration sheet is obtained, when deviation between the measurement result of the calibration sheet and calibration parameters of the measurement result is confirmed by manual comparison, an updated calibration coefficient of the square resistance tester is manually calculated, and finally, the calibration coefficient of the square resistance tester is manually corrected.
However, in using the prior art, the inventors found that there are at least the following problems in the prior art:
In the prior art, the calibration process of the other side resistance tester needs manual participation, the labor cost is high, and the calibration efficiency is low; in addition, the calibration piece adopts the semiconductor piece that the national metrology institute has measured the calibration generally, and the sheet resistance of calibration piece evenly sets up, and the calibration parameter of calibration piece is the value that obtains through the measurement of national metrology institute promptly, based on this, the cost of calibration piece is usually higher, and in the current manual calibration's of manual work in-process, get at every turn and put the calibration piece and go on through manual work, pollute the calibration piece easily, and at the in-process that the calibration piece was placed because factors such as friction extremely easily lead to the damage of calibration piece surface, lead to the replacement rate of calibration piece higher, increase the hardware cost of calibration in-process.
Disclosure of Invention
The invention aims to solve the technical problems at least to a certain extent, and provides an automatic calibration system and method for a sheet resistance tester.
In order to achieve the above purpose, the present invention adopts the following technical scheme:
in a first aspect, the invention provides an automatic calibration system for a sheet resistance tester, which comprises a main control module, a tester position driving module and a test platform; the testing platform is used for placing the calibration sheet, and the tester position driving module is used for driving the sheet resistance tester to move above the testing platform so that the sheet resistance tester can test the calibration sheet; and the tester position driving module and the sheet resistance tester are both in communication connection with the main control module.
In one possible design, the tester position driving module adopts a triaxial driving device, and the tester position driving module is used for driving the sheet resistance tester to move along the X-axis, Y-axis and/or Z-axis directions of the test platform, so that the probe of the sheet resistance tester is in contact with the calibration sheet and the test of the calibration sheet is realized.
In one possible design, the system further includes a calibration sheet guard; the calibration sheet protection device comprises a calibration bin, an environment adjustment module, a calibration cover plate and a cover body position driving module, wherein the calibration bin is arranged on the test platform, the calibration sheet and the environment adjustment module are arranged in the calibration bin, the environment adjustment module is used for adjusting the temperature and/or humidity in the calibration bin, the calibration cover plate is used for sealing the calibration bin, and the cover body position driving module is used for driving the calibration cover plate to move so as to open or close the calibration bin; the environment adjusting module and the cover body position driving module are both in communication connection with the main control module.
The second aspect of the invention provides an automatic calibration method for a sheet resistance tester, which is realized based on the main control module in the automatic calibration system for the sheet resistance tester; the method comprises the following steps:
receiving a calibration instruction and driving the tester position driving module to act so that the tester position driving module drives the sheet resistance tester to move above the calibration sheet, and simultaneously enabling a probe of the sheet resistance tester to contact with the calibration sheet;
driving the sheet resistance tester to test the calibration sheet, and acquiring a test result returned by the sheet resistance tester;
obtaining the calibration parameters of the calibration sheet and the calibration coefficients of the sheet resistance tester, judging whether the test result is consistent with the calibration parameters, if not, calculating to obtain updated calibration coefficients of the sheet resistance tester according to the test result, the calibration parameters and the calibration coefficients;
and modifying the calibration coefficient of the sheet resistance tester into the updated calibration coefficient.
In one possible design, receiving the calibration instructions includes:
setting a certain calibration task, and automatically generating a calibration instruction after the calibration time is reached so as to drive the tester position driving module to act.
In one possible design, after receiving the calibration instruction, the method further includes:
And detecting the detected piece on the test platform, and outputting a detected piece removing reminding message when detecting that the detected piece exists on the test platform, so that the detected piece is removed from the test platform, and then driving the position driving module of the tester to act.
In one possible design, the updated calibration coefficients are:
K New type =(R Label (C) /R Measuring )*K Old one ；
Wherein R Label (C) is a calibration parameter of the calibration sheet, R Measuring is the test result, and K Old one is a calibration coefficient of the sheet resistance tester.
In one possible design, after modifying the calibration coefficient of the sheet resistance tester to the updated calibration coefficient, the method further includes:
driving the position driving module of the tester and the sheet resistance tester again to act so as to acquire and obtain a secondary test result returned by the sheet resistance tester;
and judging whether the secondary test result is consistent with the calibration parameters, if so, judging that the calibration of the sheet resistance tester is completed, and if not, driving the tester position driving module again to act so as to calibrate the sheet resistance tester again.
In one possible design, after receiving the calibration instruction, the method further includes:
The method comprises the steps of driving a preset cover body position driving module to act, and enabling the cover body position driving module to drive a preset calibration cover plate to open a preset calibration bin, so that after the sheet resistance tester is driven by the tester position driving module to move above the calibration sheet, a probe of the sheet resistance tester is contacted with the calibration sheet; the calibration bin is arranged on the test platform, the calibration sheet is arranged in the calibration bin, the calibration cover plate is used for sealing the calibration bin, and the cover body position driving module is used for driving the calibration cover plate to move so as to open or close the calibration bin; the cover body position driving module is in communication connection with the main control module.
In one possible design, after modifying the calibration coefficient of the sheet resistance tester to the updated calibration coefficient, the method further includes:
The cover body position driving module is driven to act, so that the cover body position driving module drives the calibration cover plate to close the calibration bin;
Driving a preset environment adjusting module to operate so as to adjust the temperature in the calibration bin to be within a specified temperature range and/or adjust the humidity in the calibration bin to be within a specified humidity range; the environment adjusting module is arranged in the calibration bin and is used for adjusting the temperature and/or humidity in the calibration bin; the environment adjusting module is in communication connection with the main control module.
In a third aspect, the present invention provides an automatic calibration device for a sheet resistance tester, configured to implement the automatic calibration method for a sheet resistance tester according to any one of the above aspects; the automatic calibration device for the sheet resistance tester comprises:
The instruction receiving module is used for receiving the calibration instruction;
The test control module is in communication connection with the instruction receiving module and is used for driving the tester position driving module to act when the instruction receiving module receives a calibration instruction, so that the tester position driving module drives the sheet resistance tester to move to the position above the calibration sheet, and simultaneously, a probe of the sheet resistance tester is contacted with the calibration sheet; the device is also used for driving the sheet resistance tester to test the calibration sheet and acquiring a test result returned by the sheet resistance tester;
The calibration coefficient calculation module is in communication connection with the test control module and is used for acquiring the calibration parameters of the calibration sheet and the calibration coefficient of the sheet resistance tester, judging whether the test result is consistent with the calibration parameters, and if not, calculating to obtain the updated calibration coefficient of the sheet resistance tester according to the test result, the calibration parameters and the calibration coefficient;
and the calibration coefficient updating module is in communication connection with the calibration coefficient calculating module and is used for modifying the calibration coefficient of the sheet resistance tester into the updated calibration coefficient.
In a fourth aspect, the present invention provides an electronic device, comprising:
A memory for storing computer program instructions; and
And the processor is used for executing the computer program instructions so as to finish the operation of the automatic calibration method for the sheet resistance tester.
In a fifth aspect, the present invention provides a computer program product comprising a computer program or instructions which, when executed by a computer, implement an automatic calibration method for a sheet resistance tester as described in any one of the above.
The beneficial effects of the invention are as follows:
The invention discloses an automatic calibration system, an automatic calibration method, an automatic calibration device, an automatic calibration equipment and an automatic calibration product for a sheet resistance tester, which can improve the calibration efficiency of the sheet resistance tester and can also improve the service life of the calibration sheet. Specifically, in the implementation process, when the sheet resistance tester needs to be calibrated, the position driving module of the tester can be controlled based on the main control module to drive the sheet resistance tester to move above the testing platform, so that the probe of the sheet resistance tester contacts the calibration piece positioned on the testing platform, then the calibration piece is tested to obtain a measurement result, and then, when the measurement result is inconsistent with the calibration parameter of the calibration piece, the main control module can automatically calculate the updated calibration coefficient based on the measurement result, the calibration parameter of the calibration piece and the current calibration coefficient of the sheet resistance tester, and finally, the updated calibration coefficient of the sheet resistance tester is updated based on the updated calibration coefficient, thereby realizing automatic calibration of the sheet resistance tester, and when the sheet resistance tester is tested subsequently, the updated calibration coefficient can be automatically called. In the process, the automatic calibration of the counter resistance tester can be realized through the arrangement of the main control module, the tester position driving module and the like, the calibration efficiency is high, the labor cost is saved, meanwhile, the pollution and damage of the calibration sheet can be avoided through automatic calibration without manually contacting the calibration sheet, and the service life of the calibration sheet is further prolonged.
Other advantageous effects of the present invention will be further described in the detailed description.
Drawings
FIG. 1 is a block diagram of an automatic calibration system for a sheet resistance tester in example 1;
FIG. 2 is a flow chart of an automatic calibration method for a sheet resistance tester in example 2;
FIG. 3 is a block diagram showing an automatic calibration device for a sheet resistance tester in example 3.
Detailed Description
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the present invention will be briefly described below with reference to the accompanying drawings and the description of the embodiments or the prior art, and it is obvious that the following description of the structure of the drawings is only some embodiments of the present invention, and other drawings can be obtained according to these drawings without inventive effort to a person skilled in the art. It should be noted that the description of these examples is for aiding in understanding the present invention, but is not intended to limit the present invention.
Example 1:
The embodiment discloses an automatic calibration system for a sheet resistance tester, as shown in fig. 1, including a main control module, a tester position driving module and a test platform, it should be understood that the main control module may not only adopt electronic devices such as a personal computer, a smart phone, a personal digital assistant or a wearable device, but also adopt a virtual machine, and in this embodiment, the main control module adopts an industrial personal computer; the test platform is used for placing a calibration sheet, the tester position driving module is matched with the test platform, and the tester position driving module is used for driving the sheet resistance tester to move above the test platform so that the sheet resistance tester can test the calibration sheet; and the tester position driving module and the sheet resistance tester are both in communication connection with the main control module.
It should be noted that, in this embodiment, the sheet resistance tester may be, but not limited to, an off-line sheet resistance and resistivity tester, an on-line sheet resistance tester or an on-line total inspection sheet resistance tester, and is not limited herein, i.e. the automatic calibration system in this embodiment may be applied to an off-line sheet resistance and resistivity tester, an on-line sheet resistance tester or an on-line total inspection sheet resistance tester.
The embodiment can improve the calibration efficiency of the other resistance tester and can improve the service life of the calibration sheet. Specifically, in the implementation process, when the sheet resistance tester needs to be calibrated, the main control module can control the tester position driving module to drive the sheet resistance tester to move above the testing platform, so that the probe of the sheet resistance tester contacts the calibration sheet located on the testing platform, then the calibration sheet is tested, and a measurement result, namely, the sheet resistance value of the calibration sheet is obtained, then, when the measurement result is inconsistent with the calibration parameters of the calibration sheet, the main control module can automatically calculate the updated calibration coefficient based on the measurement result, the calibration parameters of the calibration sheet and the current calibration coefficient of the sheet resistance tester, and finally update the calibration coefficient of the sheet resistance tester based on the updated calibration coefficient, so that the updated calibration coefficient can be automatically invoked when the sheet resistance tester is subsequently tested. In this in-process, this embodiment passes through main control module with tester position drive module etc. sets up, can realize the automatic calibration of opposite side resistance tester, and the calibration is efficient, does benefit to saving the human cost, simultaneously through automatic calibration, need not the manual work and contacts the calibration piece, can avoid the calibration piece to pollute and impaired, and then improves the life of calibration piece.
In this embodiment, the tester position driving module adopts a triaxial driving device, and the tester position driving module is configured to drive the sheet resistance tester to move along the X-axis, Y-axis and/or Z-axis directions of the test platform, so that the probe of the sheet resistance tester contacts with the calibration sheet, and testing of the calibration sheet is implemented.
Specifically, in this embodiment, the triaxial driving device includes an X-axis displacement assembly, a Y-axis displacement assembly and a Z-axis displacement assembly, where the X-axis displacement assembly, the Y-axis displacement assembly and the Z-axis displacement assembly may, but are not limited to, use a linear guide, a mechanical arm or a conveyor belt, the sheet resistance tester is connected to the X-axis displacement assembly, the Y-axis displacement assembly or the Z-axis displacement assembly, and the X-axis displacement assembly, the Y-axis displacement assembly and the Z-axis displacement assembly may respectively drive the sheet resistance tester to move along an X-axis direction (a horizontal direction parallel to the test platform), a Y-axis direction (a vertical direction parallel to the test platform) and a Z-axis direction (a direction perpendicular to the test platform).
In this embodiment, in the process that the tester position driving module drives the probe of the sheet resistance tester and the calibration sheet contact, the sheet resistance tester can be driven to move to the upper part of the calibration sheet based on the X-axis displacement assembly and the Y-axis displacement assembly, and then the probe of the sheet resistance tester is driven to contact the calibration sheet based on the Z-axis displacement assembly towards the test platform, so that the contact between the probe of the sheet resistance tester and the calibration sheet is realized, and the sheet resistance tester can conveniently perform subsequent tests on the calibration sheet.
It should be understood that, in the assembly process, any axis displacement component of the X-axis displacement component, the Y-axis displacement component and the Z-axis displacement component can directly drive the sheet resistance tester to move, and the other two axis displacement components indirectly drive the sheet resistance tester to move, or drive the test platform to move, so that the sheet resistance tester moves relative to the test platform, as long as the sheet resistance tester is ensured to move along the X-axis, the Y-axis and/or the Z-axis directions of the test platform, and the probe of the sheet resistance tester can be enabled to contact the upper surface of the calibration sheet or the tested sheet on the test platform, so that the calibration sheet or the tested sheet on the test platform is tested, and the installation structure of the triaxial driving device and the sheet resistance tester is not limited.
In order to prevent the performance of the calibration sheet from being affected by the temperature or air humidity in the environment, in this embodiment, the following improvements are further made: the system also comprises a calibration piece protection device; the calibration sheet protection device comprises a calibration bin, an environment adjustment module, a calibration cover plate and a cover body position driving module, wherein the calibration bin is arranged on the test platform, the calibration sheet and the environment adjustment module are arranged in the calibration bin, the environment adjustment module is used for adjusting the temperature and/or humidity in the calibration bin, the calibration cover plate is used for sealing the calibration bin, and the cover body position driving module is used for driving the calibration cover plate to move so as to open or close the calibration bin; the environment adjusting module and the cover body position driving module are both in communication connection with the main control module. It should be noted that, in this embodiment, the calibration bin may be disposed in the test platform, so that the upper plate of the calibration bin, that is, the calibration cover plate, is flush with the upper surface of the test platform, so that when the sheet resistance tester is not tested, the calibration bin is sealed by the calibration cover plate, and the tested sheet may be normally placed on the upper surface of the test platform, so as to realize normal test operation on the tested sheet.
Specifically, in this embodiment, the environment adjustment module includes temperature sensing module, temperature adjustment module, humidity sensing module and humidity adjustment module, temperature sensing module temperature adjustment module humidity sensing module with humidity adjustment module all with main control module communication connection. Based on this, in the implementation process, the temperature sensing module can collect the ambient temperature in the calibration cabin, and when the ambient temperature in the cabin is not in the specified temperature range, the temperature adjusting module is driven to act so as to adjust the temperature in the calibration cabin to the specified temperature range, and the humidity sensing module can collect the ambient humidity in the cabin, and when the ambient humidity in the cabin is not in the specified humidity range, the humidity adjusting module is driven to act so as to adjust the humidity in the calibration cabin to the specified humidity range, thereby ensuring that the calibration sheet is stored in the environment with proper temperature and humidity, and further improving the service life of the calibration sheet.
In this embodiment, the main control module may be implemented by, but not limited to, an industrial personal computer, and in this embodiment, a man-machine interaction module such as a display and a keyboard may be further configured in cooperation with the main control module, so that a user may view related data in a system setting and calibration process through the display, and may perform operations such as instruction input on the main control module through the keyboard, which is not limited herein.
Example 2:
The embodiment discloses an automatic calibration method for a sheet resistance tester, which is realized based on the main control module in the automatic calibration system for the sheet resistance tester according to any one of the embodiment 1; as shown in fig. 2, the method may include, but is not limited to, the following steps:
S1, receiving a calibration instruction and driving the tester position driving module to act so that the tester position driving module drives the sheet resistance tester to move to the position above the calibration sheet, and simultaneously enabling a probe of the sheet resistance tester to contact with the calibration sheet.
Specifically, in step S1, receiving a calibration instruction includes:
setting a certain calibration task, and automatically generating a calibration instruction after the calibration time is reached so as to drive the tester position driving module to act.
Based on this, this embodiment can realize regularly carrying out the work of demarcating to the square resistance tester, and then guarantees the long-time steady operation of square resistance tester, avoids the manual work to frequently send out the demarcation instruction, further lightens user's work load.
In step S1, after receiving the calibration command (it should be understood that the calibration command herein may also be automatically generated for the main control module), the method further includes:
And detecting the detected piece on the test platform, and outputting a detected piece removing reminding message when detecting that the detected piece exists on the test platform, so that the detected piece is removed from the test platform, and then driving the position driving module of the tester to act.
Specifically, in this embodiment, the automatic calibration system for a sheet resistance tester further includes a sheet detection module, which may be implemented by using a proximity switch, so as to automatically detect a sheet to be tested on the test platform based on the sheet detection module. Of course, the detected piece detection work can also be confirmed manually, and the detected piece detection module is adopted in the embodiment to realize automatic detection of the detected piece so as to improve the automation degree of calibration of the resistance tester.
In step S1, a calibration instruction is received, and after the tested piece is removed from the test platform, the method further includes:
And driving the cover body position driving module to act so that the cover body position driving module drives the calibration cover plate to open the calibration bin, and the tester position driving module drives the sheet resistance tester to move to the position above the calibration sheet, and then the probe of the sheet resistance tester is contacted with the calibration sheet.
S2, driving the sheet resistance tester to test the calibration sheet, and acquiring a test result returned by the sheet resistance tester.
S3, obtaining the calibration parameters of the calibration sheet and the calibration coefficients of the sheet resistance tester, judging whether the test result is consistent with the calibration parameters, if not, calculating the updated calibration coefficients of the sheet resistance tester according to the test result, the calibration parameters and the calibration coefficients, and if so, indicating that the sheet resistance tester does not have parameter drift phenomenon, and not calibrating the sheet resistance tester at the moment.
In step S3, the updated calibration coefficient is:
K New type =(R Label (C) /R Measuring )*K Old one ；
wherein R Label (C) is a calibration parameter of the calibration sheet, R Measuring is the test result, and K Old one is a calibration coefficient of the sheet resistance tester, namely an original calibration coefficient before updating of the sheet resistance tester.
It should be understood that in step S4, the calibration coefficient of the sheet resistance tester is modified to be the updated calibration coefficient, that is, the original calibration coefficient K Old one stored in the main control module or in an upper computer in communication connection with the main control module and matched with the sheet resistance tester is modified to be the updated calibration coefficient K New type , that is, the original calibration coefficient K Old one is covered by the updated calibration coefficient K New type , so as to achieve calibration of the sheet resistance tester.
S4, modifying the calibration coefficient of the sheet resistance tester into the updated calibration coefficient.
In step S4, after modifying the calibration coefficient of the sheet resistance tester to the updated calibration coefficient, the method further includes:
S5, driving the position driving module of the tester and the sheet resistance tester again to act so as to acquire a secondary test result returned by the sheet resistance tester;
S6, judging whether the secondary test result is consistent with the calibration parameters, if so, judging that the calibration of the sheet resistance tester is completed, and if not, driving the tester position driving module again to act, namely returning to the step S1 so as to calibrate the sheet resistance tester again.
It should be noted that, the step S5 and the step S6 are verification processes for the calibration result of the sheet resistance tester, based on which it can be confirmed whether the sheet resistance tester is successfully calibrated, and if the secondary test result is inconsistent with the calibration parameter, that is, the calibration effect is not good, the sheet resistance tester information is calibrated again, so that the final calibration effect of the sheet resistance tester can be ensured.
It should also be understood that in step S5, the probe of the sheet resistance tester may be moved to another position on the upper surface of the calibration sheet, that is, when the calibration result is verified, the position where the probe of the sheet resistance tester contacts the calibration sheet is different from the position where the probe contacts the calibration sheet in step S1, thereby facilitating the improvement of the accuracy of verification of the calibration result.
In step S4, after modifying the calibration coefficient of the sheet resistance tester to the updated calibration coefficient, the method further includes:
S7, driving the cover body position driving module to act so that the cover body position driving module drives the calibration cover plate to close the calibration bin;
s8, driving the environment adjusting module to operate so as to adjust the temperature in the calibration bin to be within a specified temperature range and/or adjust the humidity in the calibration bin to be within a specified humidity range.
Specifically, in this embodiment, the environment adjustment module includes temperature sensing module, temperature adjustment module, humidity sensing module and humidity adjustment module, temperature sensing module temperature adjustment module humidity sensing module with humidity adjustment module all with main control module communication connection. Correspondingly, in step S6, the environmental conditioning module is driven to operate so as to adjust the temperature in the calibration bin to be within a specified temperature range, and/or adjust the humidity in the calibration bin to be within a specified humidity range, including:
Acquiring the environmental temperature in the bin acquired by the temperature sensing module, and driving the temperature adjusting module to act when the environmental temperature in the bin is not in a specified temperature range so as to adjust the temperature in the calibration bin to be in the specified temperature range;
And/or acquiring the humidity of the cabin interior environment acquired by the humidity sensing module, and driving the humidity adjusting module to act when the humidity of the cabin interior environment is not in a specified humidity range so as to adjust the humidity in the calibration cabin to be in the specified humidity range.
Specifically, in this embodiment, the specified temperature range is 25-35 ℃, the temperature adjustment module adopts a refrigeration sheet, and drives the refrigeration sheet to act when the environmental temperature in the bin is higher than the upper limit 35 ℃ of the specified temperature range, so as to reduce the temperature in the calibrated bin, and stops driving the refrigeration sheet to act when the environmental temperature in the bin acquired by the temperature sensing module is within the specified temperature range; when the ambient temperature in the bin is lower than the lower limit 25 ℃ of the specified temperature range, the refrigerating sheet is driven to act reversely, for example, the positive electrode and the negative electrode of the refrigerating sheet are reversely connected through a preset relay, so that the refrigerating sheet heats, and the temperature in the calibration bin is further increased. In addition, the temperature regulating module can also adopt a refrigerator and a heater, and drive the refrigerator to operate when the ambient temperature in the bin is higher than the upper limit of 35 ℃ of the specified temperature range, and drive the heater to operate when the ambient temperature in the bin is lower than the lower limit of 25 ℃ of the specified temperature range, so that the ambient temperature in the bin is within the specified temperature range.
In this embodiment, the control principle of driving the humidity adjustment module to act to control the humidity in the calibration bin is the same as the temperature control principle, but the control object is converted into the humidity adjustment module by the temperature adjustment module, and the principle of humidity control is not described here again.
It should be noted that, the working details and the technical effects of the automatic calibration method for a sheet resistance tester provided in embodiment 2 can be referred to embodiment 1, and are not repeated herein.
Example 3:
the embodiment discloses an automatic calibration device for a sheet resistance tester, which is used for realizing the automatic calibration method for the sheet resistance tester in the embodiment 2; as shown in fig. 3, the automatic calibration device for a sheet resistance tester includes:
The instruction receiving module is used for receiving the calibration instruction;
The test control module is in communication connection with the instruction receiving module and is used for driving the tester position driving module to act when the instruction receiving module receives a calibration instruction, so that the tester position driving module drives the sheet resistance tester to move to the position above the calibration sheet, and simultaneously, a probe of the sheet resistance tester is contacted with the calibration sheet; the device is also used for driving the sheet resistance tester to test the calibration sheet and acquiring a test result returned by the sheet resistance tester;
The calibration coefficient calculation module is in communication connection with the test control module and is used for acquiring the calibration parameters of the calibration sheet and the calibration coefficient of the sheet resistance tester, judging whether the test result is consistent with the calibration parameters, and if not, calculating to obtain the updated calibration coefficient of the sheet resistance tester according to the test result, the calibration parameters and the calibration coefficient;
and the calibration coefficient updating module is in communication connection with the calibration coefficient calculating module and is used for modifying the calibration coefficient of the sheet resistance tester into the updated calibration coefficient.
It should be noted that, in the working process, working details and technical effects of the automatic calibration device for a sheet resistance tester provided in this embodiment 3, reference may be made to embodiments 1 and 2, and no further description is given here.
Example 4:
On the basis of embodiment 1, 2 or 3, this embodiment discloses an electronic device, which may be a smart phone, a tablet computer, a notebook computer, a desktop computer or the like. Electronic devices may be referred to as user terminals, portable terminals, desktop terminals, etc., the electronic devices including:
A memory for storing computer program instructions; and
A processor for executing the computer program instructions to perform the operations of the automatic calibration method for a sheet resistance tester as described in any one of embodiment 2.
Example 5:
On the basis of any one of embodiments 1 to 4, this embodiment discloses a computer program product, including a computer program or instructions, which when executed by a computer, implement the automatic calibration method for a sheet resistance tester according to any one of embodiment 2.
It will be apparent to those skilled in the art that the modules or steps of the invention described above may be implemented in a general purpose computing device, they may be concentrated on a single computing device, or distributed across a network of computing devices, or they may alternatively be implemented in program code executable by computing devices, such that they may be stored in a memory device for execution by the computing devices, or they may be separately fabricated into individual integrated circuit modules, or multiple modules or steps within them may be fabricated into a single integrated circuit module. Thus, the present invention is not limited to any specific combination of hardware and software.
Finally, it should be noted that the above embodiments are merely illustrative of the technical solution of the present invention, and not limiting thereof; although the invention has been described in detail with reference to the foregoing embodiments, it will be understood by those of ordinary skill in the art that: the technical scheme described in the foregoing embodiments can be modified or some of the technical features thereof can be replaced by equivalents. Such modifications and substitutions do not depart from the spirit and scope of the technical solutions of the embodiments of the present invention.
Claims (8)
1. An automatic calibration system for a sheet resistance tester is characterized in that: the tester comprises a main control module, a tester position driving module and a testing platform; the testing platform is used for placing the calibration sheet, and the tester position driving module is used for driving the sheet resistance tester to move above the testing platform so that the sheet resistance tester can test the calibration sheet; the tester position driving module and the sheet resistance tester are both in communication connection with the main control module;
The tester position driving module adopts a triaxial driving device and is used for driving the sheet resistance tester to move along the X-axis, Y-axis and/or Z-axis directions of the test platform so that a probe of the sheet resistance tester contacts with the calibration sheet and the test of the calibration sheet is realized;
The system also comprises a calibration piece protection device; the calibration sheet protection device comprises a calibration bin, an environment adjustment module, a calibration cover plate and a cover body position driving module, wherein the calibration bin is arranged on the test platform, the calibration sheet and the environment adjustment module are arranged in the calibration bin, the environment adjustment module is used for adjusting the temperature and/or humidity in the calibration bin, the calibration cover plate is used for sealing the calibration bin, and the cover body position driving module is used for driving the calibration cover plate to move so as to open or close the calibration bin; the environment adjusting module and the cover body position driving module are both in communication connection with the main control module.
2. An automatic calibration method for a sheet resistance tester is characterized by comprising the following steps of: the sheet resistance tester is realized by the main control module in the automatic calibration system based on the sheet resistance tester of claim 1; the method comprises the following steps:
receiving a calibration instruction and driving the tester position driving module to act so that the tester position driving module drives the sheet resistance tester to move above the calibration sheet, and simultaneously enabling a probe of the sheet resistance tester to contact with the calibration sheet;
driving the sheet resistance tester to test the calibration sheet, and acquiring a test result returned by the sheet resistance tester;
obtaining the calibration parameters of the calibration sheet and the calibration coefficients of the sheet resistance tester, judging whether the test result is consistent with the calibration parameters, if not, calculating to obtain updated calibration coefficients of the sheet resistance tester according to the test result, the calibration parameters and the calibration coefficients;
and modifying the calibration coefficient of the sheet resistance tester into the updated calibration coefficient.
3. The automatic calibration method for the sheet resistance tester according to claim 2, wherein the method comprises the following steps: receiving a calibration instruction, comprising:
setting a certain calibration task, and automatically generating a calibration instruction after the calibration time is reached so as to drive the tester position driving module to act.
4. The automatic calibration method for the sheet resistance tester according to claim 2, wherein the method comprises the following steps: after receiving the calibration instruction, the method further comprises the following steps:
And detecting the detected piece on the test platform, and outputting a detected piece removing reminding message when detecting that the detected piece exists on the test platform, so that the detected piece is removed from the test platform, and then driving the position driving module of the tester to act.
5. The automatic calibration method for the sheet resistance tester according to claim 2, wherein the method comprises the following steps: the updated calibration coefficients are as follows:
K New type ＝(R Label (C) /R Measuring )*K Old one ；
Wherein R Label (C) is a calibration parameter of the calibration sheet, R Measuring is the test result, and K Old one is a calibration coefficient of the sheet resistance tester.
6. The automatic calibration method for the sheet resistance tester according to claim 2, wherein the method comprises the following steps: after modifying the calibration coefficient of the sheet resistance tester to the updated calibration coefficient, the method further comprises:
driving the position driving module of the tester and the sheet resistance tester again to act so as to acquire and obtain a secondary test result returned by the sheet resistance tester;
and judging whether the secondary test result is consistent with the calibration parameters, if so, judging that the calibration of the sheet resistance tester is completed, and if not, driving the tester position driving module again to act so as to calibrate the sheet resistance tester again.
7. The automatic calibration method for the sheet resistance tester according to claim 2, wherein the method comprises the following steps: after receiving the calibration instruction, the method further comprises the following steps:
The method comprises the steps of driving a preset cover body position driving module to act, and enabling the cover body position driving module to drive a preset calibration cover plate to open a preset calibration bin, so that after the sheet resistance tester is driven by the tester position driving module to move above the calibration sheet, a probe of the sheet resistance tester is contacted with the calibration sheet; the calibration bin is arranged on the test platform, the calibration sheet is arranged in the calibration bin, the calibration cover plate is used for sealing the calibration bin, and the cover body position driving module is used for driving the calibration cover plate to move so as to open or close the calibration bin; the cover body position driving module is in communication connection with the main control module.
8. The automatic calibration method for the sheet resistance tester according to claim 7, wherein the method comprises the following steps: after modifying the calibration coefficient of the sheet resistance tester to the updated calibration coefficient, the method further comprises:
The cover body position driving module is driven to act, so that the cover body position driving module drives the calibration cover plate to close the calibration bin;
Driving a preset environment adjusting module to operate so as to adjust the temperature in the calibration bin to be within a specified temperature range and/or adjust the humidity in the calibration bin to be within a specified humidity range; the environment adjusting module is arranged in the calibration bin and is used for adjusting the temperature and/or humidity in the calibration bin; the environment adjusting module is in communication connection with the main control module.
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