CN118563296A - Post-electroless nickel plating dip and preparation method and application thereof - Google Patents
Post-electroless nickel plating dip and preparation method and application thereof Download PDFInfo
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- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
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Abstract
本发明公开了一种化学镀镍后浸剂及其制备方法和应用,涉及化学镀镍助剂领域。其中,化学镀镍后浸剂包括硫酸、钯吸附剂以及去离子水,所述硫酸的质量浓度为10‑20g/L,所述钯吸附剂的质量浓度为4‑5g/L;其中,所述钯吸附剂为丙烯酰胺或顺丁烯二酸与阳离子季铵盐单体聚合的产物。本申请的后浸剂能够有效去除IC载板微小线宽线距内难以去除的Pd2+,解决IC载板容易渗金的问题,提高产品良率。
The present invention discloses a chemical nickel plating post-immersion agent and a preparation method and application thereof, and relates to the field of chemical nickel plating auxiliary agents. Wherein, the chemical nickel plating post-immersion agent includes sulfuric acid, a palladium adsorbent and deionized water, the mass concentration of the sulfuric acid is 10-20 g/L, and the mass concentration of the palladium adsorbent is 4-5 g/L; wherein, the palladium adsorbent is a product of polymerization of acrylamide or maleic acid and a cationic quaternary ammonium salt monomer. The post-immersion agent of the present application can effectively remove Pd2 + which is difficult to remove within the small line width and line spacing of an IC carrier, solve the problem that the IC carrier is easy to penetrate gold, and improve the product yield.
Description
技术领域Technical Field
本申请涉及化学镀镍助剂领域,尤其是涉及一种化学镀镍后浸剂及其制备方法和应用。The present application relates to the field of chemical nickel plating additives, and in particular to a chemical nickel plating post-immersion agent and a preparation method and application thereof.
背景技术Background Art
传统的化学镀镍钯金工艺如下:除油-微蚀-酸洗-预浸-活化-后浸-化学镍-化学钯-化学金。其中,后浸步骤中,通常采用质量浓度为2-3%的硫酸溶液作为后浸剂。The traditional chemical nickel-palladium-gold plating process is as follows: degreasing-microetching-pickling-pre-immersion-activation-post-immersion-chemical nickel-chemical palladium-chemical gold. In the post-immersion step, a sulfuric acid solution with a mass concentration of 2-3% is usually used as a post-immersion agent.
但是,随着电子产品朝着高频高速方向发展,IC载板的设计也日益趋向于高频、高速、高密度和小型化,这种密集复杂的电路工作环境对印制电路板表面处理工艺的稳定性和可靠性提出了新的挑战。其中,对于线宽线距小的IC载板,尤其是线宽线距达到20μm以下的IC载板,用传统质量浓度为2-3%的硫酸溶液作为后浸剂容易导致渗金不良,造成产生大批报废。However, as electronic products develop towards high frequency and high speed, the design of IC substrates is also increasingly tending towards high frequency, high speed, high density and miniaturization. This dense and complex circuit working environment has brought new challenges to the stability and reliability of the surface treatment process of printed circuit boards. Among them, for IC substrates with small line width and line spacing, especially IC substrates with line width and line spacing below 20μm, using traditional sulfuric acid solution with a mass concentration of 2-3% as a post-immersion agent is likely to lead to poor gold penetration, resulting in a large number of scrapped products.
发明内容Summary of the invention
为了改善相关技术中线宽线距达到20μm以下的IC载板以硫酸溶液作为后浸剂时溶液导致渗金不良的问题,本申请提供一种化学镀镍后浸剂及其制备方法和应用。In order to improve the problem in the related art that when sulfuric acid solution is used as a post-immersion agent for IC substrates with a line width and line spacing of less than 20 μm, the solution causes poor gold penetration, the present application provides a chemical nickel plating post-immersion agent and a preparation method and application thereof.
第一方面,本申请提供的一种化学镀镍后浸剂采用如下的技术方案:In the first aspect, the present application provides a chemical nickel plating post-immersion agent using the following technical solution:
一种化学镀镍后浸剂,包括硫酸、钯吸附剂以及去离子水,所述硫酸的质量浓度为10-20g/L,所述钯吸附剂的质量浓度为4-5g/L;其中,所述钯吸附剂为丙烯酰胺或顺丁烯二酸与阳离子季铵盐单体聚合的产物。A post-immersion agent for chemical nickel plating comprises sulfuric acid, a palladium adsorbent and deionized water, wherein the mass concentration of the sulfuric acid is 10-20 g/L, and the mass concentration of the palladium adsorbent is 4-5 g/L; wherein the palladium adsorbent is a product of polymerization of acrylamide or maleic acid and a cationic quaternary ammonium salt monomer.
本申请中,化学镀镍后浸剂包括硫酸和钯吸附剂,硫酸能够快速将IC载板板面上的Pd2+清洗下来,钯吸附剂具有优异的渗透作用,能够顺利进出IC载板上尺寸为20μm以下的微小线宽线距中,并吸附活化步骤后残留在IC载板微小线宽线距内的Pd2+,同时,在硫酸作用下,钯吸附剂容易通过水洗除去,不往IC载板带入新的残留,既有利于预防因IC载板上Pd2+残留而导致的渗金问题,也可预防钯吸附剂的残留导致其他产品质量问题。In the present application, the post-chemical nickel plating immersion agent includes sulfuric acid and a palladium adsorbent. The sulfuric acid can quickly clean the Pd 2+ on the surface of the IC substrate. The palladium adsorbent has excellent penetration and can smoothly enter and exit the tiny line width and line spacing of the IC substrate with a size of less than 20 μm, and adsorb the Pd 2+ remaining in the tiny line width and line spacing of the IC substrate after the activation step. At the same time, under the action of sulfuric acid, the palladium adsorbent is easily removed by water washing without introducing new residues into the IC substrate, which is beneficial to prevent gold penetration problems caused by Pd 2+ residues on the IC substrate, and can also prevent other product quality problems caused by the residues of the palladium adsorbent.
此外,与单独采用钯吸附剂作为后浸剂相比,硫酸与钯吸附剂配合,能够有效去除IC载板微小线宽线距内难以去除的Pd2+,解决IC载板容易渗金的问题,提高产品良率。同时,还可以降低化学镀镍钯金工艺的成本,不造成钯吸附剂的残留,更具经济价值和实用价值。In addition, compared with the use of palladium adsorbent alone as a post-immersion agent, the combination of sulfuric acid and palladium adsorbent can effectively remove the Pd 2+ that is difficult to remove within the small line width and line spacing of the IC substrate, solve the problem of easy gold penetration of the IC substrate, and improve the product yield. At the same time, it can also reduce the cost of the chemical nickel-palladium-gold plating process, without causing the residue of palladium adsorbent, and has more economic and practical value.
可选的,所述阳离子季铵盐单体采用二甲基二烯丙基氯化铵、(4-乙氧基-2-羟基-4-氧代丁-2-烯基)三甲基氯化铵中的至少一种。Optionally, the cationic quaternary ammonium salt monomer is at least one of dimethyldiallylammonium chloride and (4-ethoxy-2-hydroxy-4-oxobut-2-enyl)trimethylammonium chloride.
优选的,所述阳离子季铵盐单体采用二甲基二烯丙基氯化铵。Preferably, the cationic quaternary ammonium salt monomer is dimethyldiallylammonium chloride.
本申请中,阳离子单体采用二甲基二烯丙基氯化铵时,钯吸附剂对Pd2+的吸附稳定性更好,钯吸附剂内包裹的Pd2+不易重新转移到后浸剂中,待后浸剂出现明显固体悬浮物后,经过滤去除固体悬浮物后,即可循环利用,必要时补加钯吸附剂即可,无需频繁更换槽内的后浸剂,有利于进一步降低成本。In the present application, when dimethyldiallyl ammonium chloride is used as the cationic monomer, the adsorption stability of the palladium adsorbent to Pd2 + is better, and the Pd2 + encapsulated in the palladium adsorbent is not easily transferred back to the post-infusion agent. After obvious solid suspended matter appears in the post-infusion agent, the solid suspended matter can be removed by filtration and then recycled. If necessary, palladium adsorbent can be added. There is no need to frequently replace the post-infusion agent in the tank, which is conducive to further reducing costs.
优选的,所述丙烯酰胺或顺丁烯二酸与二甲基二烯丙基氯化铵的摩尔比为1:(1-3)。Preferably, the molar ratio of acrylamide or maleic acid to dimethyldiallylammonium chloride is 1:(1-3).
本申请中,丙烯酰胺或顺丁烯二酸与二甲基二烯丙基氯化铵的摩尔比控制在1:(1-3)范围内时,钯吸附剂的渗透作用与吸附Pd2+的作用更强,不仅能够进一步快速去除IC载板微小线宽线距内残留的Pd2+,而且钯吸附剂内包裹的Pd2+不易重新转移到后浸剂中,待后浸剂出现明显固体悬浮物后,经过滤去除固体悬浮物后,即可循环利用,必要时补加钯吸附剂即可,无需频繁更换槽内的后浸剂,有利于进一步降低成本。In the present application, when the molar ratio of acrylamide or maleic acid to dimethyldiallylammonium chloride is controlled within the range of 1:(1-3), the penetration effect of the palladium adsorbent and the adsorption effect of Pd 2+ are stronger, which can not only further quickly remove the Pd 2+ remaining in the small line width and line spacing of the IC carrier, but also the Pd 2+ encapsulated in the palladium adsorbent is not easy to be transferred back to the post-immersion agent. After obvious solid suspended matter appears in the post-immersion agent, the solid suspended matter can be removed by filtration and then recycled. If necessary, palladium adsorbent can be added. There is no need to frequently replace the post-immersion agent in the tank, which is conducive to further reducing costs.
进一步优选为所述丙烯酰胺或顺丁烯二酸与二甲基二烯丙基氯化铵的摩尔比为1:2。More preferably, the molar ratio of acrylamide or maleic acid to dimethyldiallylammonium chloride is 1:2.
优选的,所述钯吸附剂的制备方法如下:Preferably, the preparation method of the palladium adsorbent is as follows:
将丙烯酰胺或顺丁烯二酸与阳离子季铵盐单体混合,然后调节pH至7,Mix acrylamide or maleic acid with cationic quaternary ammonium salt monomer, and then adjust the pH to 7.
加入过硫酸铵-亚硫酸氢钠氧化还原引发剂进行引发聚合得到。The obtained product is obtained by adding ammonium persulfate-sodium bisulfite redox initiator to initiate polymerization.
本申请中,采用上述方案能够制得具有优异的渗透作用,能够顺利进出IC载板上尺寸为20μm以下的微小线宽线距中,并吸附活化步骤后残留在微小线宽线距内的Pd2+的钯吸附剂。In the present application, the above scheme can be used to produce a palladium adsorbent with excellent penetration, which can smoothly enter and exit the tiny line width and line spacing of less than 20 μm on the IC substrate and adsorb Pd 2+ remaining in the tiny line width and line spacing after the activation step.
优选的,所述聚合过程中,反应温度控制在75-80℃,反应时间控制在20-30h。Preferably, during the polymerization process, the reaction temperature is controlled at 75-80° C., and the reaction time is controlled at 20-30 h.
本申请中,反应温度控制在75-80℃内时不易引起原料爆聚,有利于提升生产安全性。In the present application, when the reaction temperature is controlled within 75-80°C, it is not easy to cause raw material explosion, which is beneficial to improving production safety.
可选的,所述过硫酸铵-亚硫酸氢钠氧化还原引发剂中,过硫酸铵与亚硫酸氢钠的重量比为(1.5-2):1。Optionally, in the ammonium persulfate-sodium bisulfite redox initiator, the weight ratio of ammonium persulfate to sodium bisulfite is (1.5-2):1.
第二方面,本申请提供的一种化学镀镍后浸剂的制备方法采用如下的技术方案:In the second aspect, the present application provides a method for preparing a chemical nickel plating post-immersion agent using the following technical solution:
一种化学镀镍后浸剂的制备方法,包括以下步骤:A method for preparing a chemical nickel plating post-immersion agent comprises the following steps:
缓慢将硫酸加入去离子水中,搅拌均匀后,冷却至20-35℃,然后加入钯吸附剂,搅拌均匀,得到后浸剂。Slowly add sulfuric acid to deionized water, stir evenly, cool to 20-35° C., then add palladium adsorbent, stir evenly, and obtain a post-immersion agent.
本申请先将硫酸溶于水并冷却后再加入钯吸附剂,可以预防钯吸附剂因为温度过高而分解,影响后浸剂对IC载板上线宽线距为20μm以下的微小线宽线距内残留的Pd2+的去除效果。In the present application, sulfuric acid is first dissolved in water and cooled before adding the palladium adsorbent, which can prevent the palladium adsorbent from decomposing due to excessive temperature and affecting the removal effect of the post-immersion agent on the Pd2 + remaining in the tiny line width and line spacing of less than 20μm on the IC substrate.
第三方面,本申请提供的一种化学镀镍后浸剂的应用采用如下的技术方案:In a third aspect, the application of a chemical nickel plating post-immersion agent provided by the present application adopts the following technical solution:
一种化学镀镍后浸剂的应用,用于化学镀镍钯金工艺的后浸步骤中。The invention discloses an application of a chemical nickel plating post-immersion agent, which is used in the post-immersion step of a chemical nickel palladium gold plating process.
本申请中,上述化学镀镍后浸剂用于化学镀镍钯金工艺的活化步骤之后、化学镀镍步骤之前,用于去除IC载板上残留的Pd2+,且该后浸剂针对线宽线距为20μm以下的微小线宽线距内残留的Pd2+也能起到优异的去除效果,可预防因IC载板上Pd2+残留而导致的渗金问题。In the present application, the above-mentioned chemical nickel plating post-immersion agent is used after the activation step of the chemical nickel palladium gold plating process and before the chemical nickel plating step to remove the residual Pd 2+ on the IC substrate, and the post-immersion agent can also have an excellent removal effect on the residual Pd 2+ within the tiny line width and line spacing of less than 20μm, which can prevent the gold penetration problem caused by the residual Pd 2+ on the IC substrate.
优选的,所述后浸步骤的后浸剂温度控制在15-35℃,浸渍时间为1-5min,优选2-3min。Preferably, the temperature of the post-immersion agent in the post-immersion step is controlled at 15-35° C., and the immersion time is 1-5 min, preferably 2-3 min.
本申请中,后浸步骤可以在常温条件下进行,且后浸时间短,能耗低。In the present application, the post-immersion step can be carried out at room temperature, with a short post-immersion time and low energy consumption.
综上所述,本申请的技术方案具有以下有益效果:In summary, the technical solution of the present application has the following beneficial effects:
(1)本申请中,化学镀镍后浸剂包括硫酸和钯吸附剂,硫酸能够快速将IC载板板面上的Pd2+清洗下来,钯吸附剂具有优异的渗透作用,能够顺利进出IC载板上尺寸为20μm以下的微小线宽线距中,并吸附活化步骤后残留在IC载板微小线宽线距内的Pd2+,同时,在硫酸作用下,钯吸附剂容易通过水洗除去,不往IC载板带入新的残留,既有利于预防因IC载板上Pd2+残留而导致的渗金问题,也可预防钯吸附剂的残留导致其他产品质量问题。(1) In the present application, the post-chemical nickel plating immersion agent includes sulfuric acid and a palladium adsorbent. The sulfuric acid can quickly clean the Pd2 + on the surface of the IC substrate. The palladium adsorbent has excellent penetration and can smoothly enter and exit the tiny line width and line spacing of the IC substrate with a size of less than 20 μm, and adsorb the Pd2 + remaining in the tiny line width and line spacing of the IC substrate after the activation step. At the same time, under the action of sulfuric acid, the palladium adsorbent is easily removed by water washing without introducing new residues into the IC substrate, which is beneficial to preventing the gold penetration problem caused by the Pd2 + residue on the IC substrate, and also preventing the residue of the palladium adsorbent from causing other product quality problems.
此外,与单独采用钯吸附剂作为后浸剂相比,硫酸与钯吸附剂配合,能够有效去除IC载板微小线宽线距内难以去除的Pd2+,解决IC载板容易渗金的问题,提高产品良率。同时,还可以降低化学镀镍钯金工艺的成本,不造成钯吸附剂的残留,更具经济价值和实用价值。In addition, compared with the use of palladium adsorbent alone as a post-immersion agent, the combination of sulfuric acid and palladium adsorbent can effectively remove the Pd 2+ that is difficult to remove within the small line width and line spacing of the IC substrate, solve the problem of easy gold penetration of the IC substrate, and improve the product yield. At the same time, it can also reduce the cost of the chemical nickel-palladium-gold plating process, without causing the residue of palladium adsorbent, and has more economic and practical value.
(2)本申请中,阳离子单体采用二甲基二烯丙基氯化铵时,钯吸附剂对Pd2+的吸附稳定性更好,钯吸附剂内包裹的Pd2+不易重新转移到后浸剂中,待后浸剂出现明显固体悬浮物后,经过滤去除固体悬浮物后,即可循环利用,必要时补加钯吸附剂即可,无需频繁更换槽内的后浸剂,有利于进一步降低成本。(2) In the present application, when dimethyldiallylammonium chloride is used as the cationic monomer, the adsorption stability of the palladium adsorbent to Pd2 + is better, and the Pd2 + encapsulated in the palladium adsorbent is not easy to be transferred back to the post-immersion agent. After obvious solid suspended matter appears in the post-immersion agent, the solid suspended matter can be removed by filtration and then recycled. When necessary, palladium adsorbent can be added. There is no need to frequently replace the post-immersion agent in the tank, which is conducive to further reducing costs.
附图说明BRIEF DESCRIPTION OF THE DRAWINGS
图1是线宽线距为10-20μm以下的IC载板无渗金时的产品图。FIG. 1 is a product picture of an IC substrate with a line width and line spacing of less than 10-20 μm and no gold penetration.
图2是线宽线距为10-20μm以下的IC载板发生渗金时的产品图。FIG. 2 is a product picture of an IC substrate with a line width and line spacing of less than 10-20 μm when gold penetration occurs.
具体实施方式DETAILED DESCRIPTION
以下根据具体的实验对本申请做进一步说明。The present application is further described below based on specific experiments.
实施例Example
【实施例1】[Example 1]
一种后浸剂,包括硫酸、钯吸附剂以及去离子水,其中,硫酸的质量浓度为15g/L,钯吸附剂的质量浓度为4.5g/L。A post-leaching agent comprises sulfuric acid, a palladium adsorbent and deionized water, wherein the mass concentration of the sulfuric acid is 15 g/L, and the mass concentration of the palladium adsorbent is 4.5 g/L.
后浸剂的制备方法包括以下步骤:The preparation method of the post-infusion comprises the following steps:
称量7.1kg丙烯酰胺、30L二甲基二烯丙基氯化铵(密度为0.719g/mL)、50L水于反应容器中,用氨水调整pH=7,将反应容器内的物料加热到50℃,连接好氮气保护装置,加入0.15kg质量浓度为1%的过硫酸铵水溶液以及0.15kg质量浓度为0.5%的亚硫酸氢钠水溶液,5分钟内加完,接着将温度升高到75℃,反应30h,出料,得到钯吸附剂;Weigh 7.1 kg of acrylamide, 30 L of dimethyldiallylammonium chloride (density 0.719 g/mL), and 50 L of water in a reaction container, adjust pH to 7 with aqueous ammonia, heat the contents of the reaction container to 50° C., connect a nitrogen protection device, add 0.15 kg of an aqueous solution of ammonium persulfate having a mass concentration of 1% and 0.15 kg of an aqueous solution of sodium bisulfite having a mass concentration of 0.5%, add the mixture within 5 minutes, then raise the temperature to 75° C., react for 30 hours, and discharge the mixture to obtain a palladium adsorbent;
缓慢将硫酸加入去离子水中,搅拌均匀后,冷却至20℃,然后加入钯吸附剂,搅拌均匀,得到后浸剂。Sulfuric acid was slowly added to deionized water, and after being stirred evenly, the mixture was cooled to 20° C., and then a palladium adsorbent was added, and the mixture was stirred evenly to obtain a post-immersion agent.
【实施例2】[Example 2]
一种后浸剂,包括硫酸、钯吸附剂以及去离子水,其中,硫酸的质量浓度为15g/L,钯吸附剂的质量浓度为4.5g/L。A post-leaching agent comprises sulfuric acid, a palladium adsorbent and deionized water, wherein the mass concentration of the sulfuric acid is 15 g/L, and the mass concentration of the palladium adsorbent is 4.5 g/L.
后浸剂的制备方法包括以下步骤:The preparation method of the post-infusion comprises the following steps:
称量11.6kg顺丁烯二酸、60L二甲基二烯丙基氯化铵(密度为0.719g/mL)、50L水于反应容器中,用氨水调整PH=7,将反应容器内的物料加热到50℃,连接好氮气保护装置,加入0.15kg质量浓度为1%的过硫酸铵水溶液以及0.15kg质量浓度为0.5%的亚硫酸氢钠水溶液,5分钟内加完,接着将温度升高到80℃,反应25h,出料,得到钯吸附剂;Weigh 11.6 kg of maleic acid, 60 L of dimethyldiallylammonium chloride (density 0.719 g/mL), and 50 L of water in a reaction container, adjust the pH to 7 with aqueous ammonia, heat the materials in the reaction container to 50° C., connect a nitrogen protection device, add 0.15 kg of an aqueous solution of ammonium persulfate having a mass concentration of 1% and 0.15 kg of an aqueous solution of sodium bisulfite having a mass concentration of 0.5%, add the mixture within 5 minutes, then raise the temperature to 80° C., react for 25 hours, and discharge the mixture to obtain a palladium adsorbent;
缓慢将硫酸加入去离子水中,搅拌均匀后,冷却至20℃,然后加入钯吸附剂,搅拌均匀,得到后浸剂。Sulfuric acid was slowly added to deionized water, and after being stirred evenly, the mixture was cooled to 20° C., and then a palladium adsorbent was added, and the mixture was stirred evenly to obtain a post-immersion agent.
【实施例3】[Example 3]
一种后浸剂,与【实施例1】的区别在于:二甲基二烯丙基氯化铵采用等摩尔量的(4-乙氧基-2-羟基-4-氧代丁-2-烯基)三甲基氯化铵代替。A post-infusion agent, which differs from Example 1 in that dimethyldiallylammonium chloride is replaced by an equimolar amount of (4-ethoxy-2-hydroxy-4-oxobut-2-enyl)trimethylammonium chloride.
【实施例4】[Example 4]
一种后浸剂,与【实施例2】的区别在于:二甲基二烯丙基氯化铵采用等摩尔量的(4-乙氧基-2-羟基-4-氧代丁-2-烯基)三甲基氯化铵代替。A post-infusion agent, which differs from Example 2 in that dimethyldiallylammonium chloride is replaced by an equimolar amount of (4-ethoxy-2-hydroxy-4-oxobut-2-enyl)trimethylammonium chloride.
对比例Comparative Example
【对比例1】[Comparative Example 1]
一种后浸剂,与【实施例1】的区别在于:二甲基二烯丙基氯化铵采用等摩尔量的丙烯酰胺代替。A post-infusion agent, which differs from [Example 1] in that dimethyldiallylammonium chloride is replaced by an equimolar amount of acrylamide.
【对比例2】[Comparative Example 2]
一种后浸剂,与【实施例2】的区别在于:二甲基二烯丙基氯化铵采用等摩尔量的顺丁烯二酸代替。A post-infusion agent, which differs from Example 2 in that dimethyldiallylammonium chloride is replaced by maleic acid in an equal molar amount.
【对比例3】[Comparative Example 3]
一种后浸剂,与【实施例1】的区别在于:丙烯酰胺采用等摩尔量的二甲基二烯丙基氯化铵代替。A post-immersion agent, which differs from [Example 1] in that acrylamide is replaced by an equimolar amount of dimethyldiallylammonium chloride.
应用例Application Examples
【应用例1】【Application Example 1】
IC载板的化学镀镍钯金工艺,包括以下步骤:The chemical nickel-palladium-gold plating process for IC substrates includes the following steps:
步骤(1)喷砂:将IC载板喷砂处理;Step (1) sandblasting: sandblasting the IC substrate;
步骤(2)除油:用斯美特酸性除油剂S-31对印制电路板清洗5min,之后水洗;Step (2) Degreasing: Clean the printed circuit board with S-31 acidic degreasing agent for 5 minutes, and then wash with water;
步骤(3)微蚀:将步骤(2)中处理后的IC载板浸渍在微蚀液中2min,之后水洗;其中,微蚀液中,过硫酸钠的浓度为100克/升,硫酸的浓度为50克/升;Step (3) micro-etching: immerse the IC substrate treated in step (2) in a micro-etching solution for 2 minutes, and then wash with water; wherein the concentration of sodium persulfate in the micro-etching solution is 100 g/L, and the concentration of sulfuric acid is 50 g/L;
步骤(4)酸洗:将步骤(3)中处理后的IC载板浸渍在100克/升的硫酸溶液中3min,之后水洗;Step (4) acid washing: immerse the IC substrate treated in step (3) in a 100 g/L sulfuric acid solution for 3 min, and then wash with water;
步骤(5)预浸酸:将步骤(4)中处理后的IC载板浸渍在50克/升硫酸溶液中2min;Step (5) acid pre-immersion: immerse the IC substrate treated in step (4) in a 50 g/L sulfuric acid solution for 2 min;
步骤(6)活化:将步骤(5)中浸渍后的IC载板浸渍在斯美特S-32活化剂溶液中活化5min,之后水洗;Step (6) Activation: The IC substrate immersed in step (5) is immersed in a S-32 activator solution for activation for 5 minutes, and then washed with water;
步骤(7)后浸:将步骤(6)中处理后的IC载板浸渍在本申请【实施例1】中制得的后浸剂中,后浸剂的温度为20℃,浸泡2min,之后水洗;Step (7) post-immersion: immerse the IC substrate treated in step (6) in the post-immersion agent prepared in Example 1 of the present application, the temperature of the post-immersion agent is 20° C., immerse for 2 minutes, and then wash with water;
步骤(8)化学沉镍:将步骤(7)中处理后的IC载板浸渍在斯美特SEN-4化学镍溶液中,沉镍20min,沉镍温度为80℃,之后水洗;Step (8) chemical nickel deposition: immerse the IC substrate treated in step (7) in SEN-4 chemical nickel solution, deposit nickel for 20 minutes at a temperature of 80° C., and then wash with water;
步骤(9)化学沉钯:将步骤(8)中处理后的IC载板浸渍在斯美特SPD-38化学镀钯溶液中沉钯,沉钯时间为10min,沉钯温度为50℃。Step (9) chemical palladium deposition: the IC substrate treated in step (8) is immersed in Smet SPD-38 chemical palladium plating solution to deposit palladium. The palladium deposition time is 10 minutes and the palladium deposition temperature is 50°C.
步骤(10)化学沉金:将步骤(9)中处理后的IC载板浸渍在斯美特SKG-22还原型化学镀金溶液中,沉金时间为20min,温度80℃,得到化学镀镍钯金的IC载板。Step (10) chemical gold plating: immerse the IC substrate treated in step (9) in a reduced chemical gold plating solution of Smet SKG-22, with a gold plating time of 20 minutes and a temperature of 80° C. to obtain an IC substrate with chemical nickel-palladium-gold plating.
【应用例2】【Application Example 2】
IC载板的化学镀镍钯金工艺,与【应用例1】的区别在于:步骤(7)中的后浸剂采用【实施例2】中制得的后浸剂。The chemical nickel-palladium-gold plating process of the IC substrate is different from that of [Application Example 1] in that the post-immersion agent in step (7) adopts the post-immersion agent prepared in [Example 2].
【应用例3】【Application Example 3】
IC载板的化学镀镍钯金工艺,与【应用例1】的区别在于:步骤(7)中的后浸剂采用【实施例3】中制得的后浸剂。The chemical nickel-palladium-gold plating process of the IC substrate is different from that of [Application Example 1] in that the post-immersion agent in step (7) adopts the post-immersion agent prepared in [Example 3].
【应用例4】【Application example 4】
IC载板的化学镀镍钯金工艺,与【应用例1】的区别在于:步骤(7)中的后浸剂采用【实施例4】中制得的后浸剂。The chemical nickel-palladium-gold plating process of the IC substrate is different from that of [Application Example 1] in that the post-immersion agent in step (7) adopts the post-immersion agent prepared in [Example 4].
对比应用例Comparative Application Examples
【对比应用例1】【Comparative Application Example 1】
IC载板的化学镀镍钯金工艺,与【应用例1】的区别在于:步骤(7)中的后浸剂采用【对比例1】中制得的后浸剂。The chemical nickel-palladium-gold plating process of the IC substrate is different from that of [Application Example 1] in that the post-immersion agent in step (7) adopts the post-immersion agent prepared in [Comparative Example 1].
【对比应用例2】【Comparative Application Example 2】
IC载板的化学镀镍钯金工艺,与【应用例1】的区别在于:步骤(7)中的后浸剂采用【对比例2】中制得的后浸剂。The chemical nickel-palladium-gold plating process of the IC substrate is different from that of [Application Example 1] in that the post-immersion agent in step (7) adopts the post-immersion agent prepared in [Comparative Example 2].
【对比应用例3】【Comparative Application Example 3】
IC载板的化学镀镍钯金工艺,与【应用例1】的区别在于:步骤(7)中的后浸剂采用【对比例3】中制得的后浸剂。The chemical nickel-palladium-gold plating process of the IC substrate is different from that of [Application Example 1] in that the post-immersion agent in step (7) adopts the post-immersion agent prepared in [Comparative Example 3].
【对比应用例4】【Comparative Application Example 4】
IC载板的化学镀镍钯金工艺,与【应用例1】的区别在于:步骤(7)中的后浸剂采用质量浓度为1%的硫酸溶液代替。The difference between the chemical nickel-palladium-gold plating process of the IC substrate and [Application Example 1] is that the post-immersion agent in step (7) is replaced by a sulfuric acid solution with a mass concentration of 1%.
性能检测试验渗金:根据各应用例与对比应用例中的化学镀镍钯金工艺对线距线宽不同的IC载板进行镀镍钯金,记录不同线距线宽的IC载板成品是否出现渗金问题。Performance testing gold penetration: According to the chemical nickel-palladium-gold plating process in each application example and comparative application example, IC substrates with different line spacing and line widths are plated with nickel-palladium-gold, and it is recorded whether the finished IC substrates with different line spacing and line widths have gold penetration problems.
表1Table 1
结合应用例1与对比应用例1可知:对比应用例1中,钯吸附剂采用丙烯酰胺的聚合物,应用例1中,钯吸附剂采用丙烯酰胺与二甲基二烯丙基氯化铵的聚合物。结合表1中的数据可知:钯吸附剂采用丙烯酰胺的聚合物时,不利于解决线宽线距小于20μm的IC载板容易渗金的问题。Combining Application Example 1 with Comparative Application Example 1, it can be seen that in Comparative Application Example 1, the palladium adsorbent uses a polymer of acrylamide, and in Application Example 1, the palladium adsorbent uses a polymer of acrylamide and dimethyldiallylammonium chloride. Combining the data in Table 1, it can be seen that when the palladium adsorbent uses a polymer of acrylamide, it is not conducive to solving the problem of easy gold penetration of IC substrates with a line width and line spacing less than 20μm.
结合应用例2与对比应用例2可知:对比应用例2中,钯吸附剂采用顺丁烯二酸的聚合物,应用例2中,钯吸附剂采用顺丁烯二酸与二甲基二烯丙基氯化铵的聚合物。结合表1中的数据可知:钯吸附剂采用顺丁烯二酸的聚合物时,不利于解决线宽线距小于20μm的IC载板容易渗金的问题。Combining Application Example 2 with Comparative Application Example 2, it can be seen that in Comparative Application Example 2, the palladium adsorbent uses a polymer of maleic acid, and in Application Example 2, the palladium adsorbent uses a polymer of maleic acid and dimethyldiallylammonium chloride. Combining the data in Table 1, it can be seen that when the palladium adsorbent uses a polymer of maleic acid, it is not conducive to solving the problem of easy gold penetration of IC substrates with a line width and line spacing of less than 20μm.
结合应用例1-2与对比应用例3可知:对比应用例3中,钯吸附剂采用二甲基二烯丙基氯化铵的聚合物,应用例1中,钯吸附剂采用丙烯酰胺与二甲基二烯丙基氯化铵的聚合物,应用例2中,钯吸附剂采用顺丁烯二酸与二甲基二烯丙基氯化铵的聚合物。结合表1中的数据可知:钯吸附剂采用二甲基二烯丙基氯化铵的聚合物时,不利于解决线宽线距小于20μm的IC载板容易渗金的问题。Combining Application Examples 1-2 with Comparative Application Example 3, it can be seen that in Comparative Application Example 3, the palladium adsorbent uses a polymer of dimethyldiallyl ammonium chloride, in Application Example 1, the palladium adsorbent uses a polymer of acrylamide and dimethyldiallyl ammonium chloride, and in Application Example 2, the palladium adsorbent uses a polymer of maleic acid and dimethyldiallyl ammonium chloride. Combining the data in Table 1, it can be seen that when the palladium adsorbent uses a polymer of dimethyldiallyl ammonium chloride, it is not conducive to solving the problem of easy gold penetration of IC carriers with a line width and line spacing less than 20μm.
结合应用例1-4可知:钯吸附剂采用丙烯酰胺或顺丁烯二酸与阳离子季铵盐单体聚合的产物时,能够有效去除IC载板微小线宽线距内难以去除的Pd2+,解决IC载板容易渗金的问题,提高产品良率。Combined with Application Examples 1-4, it can be seen that when the palladium adsorbent is a product of polymerization of acrylamide or maleic acid and cationic quaternary ammonium salt monomers, it can effectively remove Pd 2+ that is difficult to remove within the small line width and line spacing of the IC substrate, solve the problem of easy gold penetration of the IC substrate, and improve product yield.
本具体实施方式仅仅是对本申请的解释,其并不是对本申请的限制,本领域技术人员在阅读完本说明书后可以根据需要对本具体实施方式做出没有创造性贡献的修改,但只要在本申请的权利要求范围内都受到专利法的保护。This specific implementation manner is merely an explanation of the present application and is not a limitation of the present application. After reading this specification, those skilled in the art may make non-creative modifications to the specific implementation manner as needed, but such modifications are protected by the patent law as long as they are within the scope of the claims of the present application.
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