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CN118522705A - Electronic package and method for manufacturing the same - Google Patents

Electronic package and method for manufacturing the same Download PDF

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Publication number
CN118522705A
CN118522705A CN202310186698.XA CN202310186698A CN118522705A CN 118522705 A CN118522705 A CN 118522705A CN 202310186698 A CN202310186698 A CN 202310186698A CN 118522705 A CN118522705 A CN 118522705A
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China
Prior art keywords
heat dissipation
insulating material
phase change
dissipation structure
electronic
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Chinese (zh)
Inventor
陈盈儒
陈敏尧
林松焜
张垂弘
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Xinai Technology Nanjing Co ltd
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Xinai Technology Nanjing Co ltd
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Priority claimed from TW112104822A external-priority patent/TWI882289B/en
Application filed by Xinai Technology Nanjing Co ltd filed Critical Xinai Technology Nanjing Co ltd
Publication of CN118522705A publication Critical patent/CN118522705A/en
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/34Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
    • H01L23/36Selection of materials, or shaping, to facilitate cooling or heating, e.g. heatsinks
    • H01L23/373Cooling facilitated by selection of materials for the device or materials for thermal expansion adaptation, e.g. carbon
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/34Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
    • H01L23/36Selection of materials, or shaping, to facilitate cooling or heating, e.g. heatsinks
    • H01L23/367Cooling facilitated by shape of device
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/34Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
    • H01L23/42Fillings or auxiliary members in containers or encapsulations selected or arranged to facilitate heating or cooling
    • H01L23/427Cooling by change of state, e.g. use of heat pipes

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Materials Engineering (AREA)
  • Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)
  • Structures Or Materials For Encapsulating Or Coating Semiconductor Devices Or Solid State Devices (AREA)

Abstract

An electronic package and its manufacturing method, including setting a heat radiation structure covering the electronic element on a carrier board with the electronic element, wherein the heat radiation structure is made by molding insulating material, and the heat radiation structure is embedded with a phase change material object and has at least one opening exposing the phase change material object, so the heat radiation structure is formed by insulating material to reduce the weight of the heat radiation structure.

Description

电子封装件及其制法Electronic packaging and method of manufacturing the same

技术领域Technical Field

本发明有关一种半导体封装制程,尤指一种具散热结构的电子封装件及其制法。The present invention relates to a semiconductor packaging process, in particular to an electronic packaging component with a heat dissipation structure and a manufacturing method thereof.

背景技术Background Art

随着电子产品在功能及处理速度的需求的提升,作为电子产品的核心组件的半导体芯片需具有更高密度的电子元件(Electronic Components)及电子电路(ElectronicCircuits),故半导体芯片在运行时将随之产生更大量的热能。As the demand for electronic products in terms of functions and processing speed increases, semiconductor chips, as core components of electronic products, need to have higher density electronic components and electronic circuits. Therefore, semiconductor chips will generate more heat energy during operation.

因此,为了迅速将热能散逸至外部,业界通常在半导体封装件中配置散热片(HeatSink或Heat Spreader),该散热片通常借由散热胶,如导热界面材(Thermal InterfaceMaterial,简称TIM),结合至半导体芯片背面,以借散热胶与散热片逸散出半导体芯片所产生的热量。Therefore, in order to quickly dissipate the heat to the outside, the industry usually configures a heat sink or heat spreader in the semiconductor package. The heat sink is usually combined with the back of the semiconductor chip by a heat dissipation adhesive, such as a thermal interface material (TIM), so as to dissipate the heat generated by the semiconductor chip by the heat dissipation adhesive and the heat sink.

如图1所示,现有半导体封装件1的制法先将一半导体芯片11以其作用面11a利用覆晶接合方式(即通过导电凸块110与底胶111)设于一封装基板10上,再将一散热件13以其顶片130借由TIM层12结合于该半导体芯片11的非作用面11b上,且该散热件13的支撑脚131通过粘着层14架设于该封装基板10上。As shown in FIG. 1 , the manufacturing method of the conventional semiconductor package 1 is to first place a semiconductor chip 11 with its active surface 11a on a package substrate 10 by means of a flip chip bonding method (i.e., through conductive bumps 110 and bottom glue 111), and then place a heat sink 13 with its top sheet 130 on the inactive surface 11b of the semiconductor chip 11 by means of a TIM layer 12, and the support legs 131 of the heat sink 13 are mounted on the package substrate 10 by means of an adhesive layer 14.

于运行时,该半导体芯片11所产生的热能经由该非作用面11b、TIM层12而传导至该散热件13的顶片130以散热至该半导体封装件1的外部。During operation, heat energy generated by the semiconductor chip 11 is conducted to the top plate 130 of the heat sink 13 through the inactive surface 11 b and the TIM layer 12 to be dissipated to the outside of the semiconductor package 1 .

然而,现有半导体封装件1中,采用金属框架作为该散热件13,因而需采用蚀刻金属及/或电镀金属等繁琐制程制作该散热件13,故该散热件13不仅制作成本极高,且重量难以减轻,致使该半导体封装件1不利于符合轻巧的需求。However, in the existing semiconductor package 1, a metal frame is used as the heat sink 13, and thus a complicated process such as etching metal and/or electroplating metal is required to manufacture the heat sink 13. Therefore, the heat sink 13 is not only very expensive to manufacture, but also difficult to reduce in weight, making the semiconductor package 1 not conducive to meeting the demand for being lightweight.

因此,如何克服上述现有技术的种种问题,实已成为目前业界亟待克服的难题。Therefore, how to overcome the above-mentioned problems of the prior art has become a difficult problem that needs to be overcome urgently in the industry.

发明内容Summary of the invention

鉴于上述现有技术的种种缺失,本发明提供一种电子封装件及其制法,可至少部分的解决现有技术的问题。In view of the above-mentioned deficiencies of the prior art, the present invention provides an electronic package and a manufacturing method thereof, which can at least partially solve the problems of the prior art.

本发明的电子封装件,包括:载板,其具有至少一线路层;电子元件,其设于该载板上并电性连接该线路层;以及绝缘材散热结构,其设于该载板上并遮盖该电子元件,其中,该绝缘材散热结构埋设有一相变材物体且具有至少一外露该相变材物体的开口。The electronic package of the present invention comprises: a carrier having at least one circuit layer; an electronic component disposed on the carrier and electrically connected to the circuit layer; and an insulating material heat dissipation structure disposed on the carrier and covering the electronic component, wherein the insulating material heat dissipation structure is embedded with a phase change material object and has at least one opening for exposing the phase change material object.

本发明亦提供一种电子封装件的制法,包括:借由模注绝缘材方式制作绝缘材散热结构,其中,该绝缘材散热结构埋设有一相变材物体且具有至少一外露该相变材物体的开口;以及将该绝缘材散热结构设于一具有至少一线路层的载板上,其中,该载板上设有至少一电性连接该线路层的电子元件,以令该绝缘材散热结构遮盖该电子元件。The present invention also provides a method for manufacturing an electronic package, comprising: manufacturing an insulating material heat dissipation structure by injection molding an insulating material, wherein the insulating material heat dissipation structure is embedded with a phase change material object and has at least one opening exposing the phase change material object; and arranging the insulating material heat dissipation structure on a carrier having at least one circuit layer, wherein the carrier is provided with at least one electronic component electrically connected to the circuit layer so that the insulating material heat dissipation structure covers the electronic component.

前述的电子封装件及其制法中,该绝缘材散热结构接触该电子元件。In the aforementioned electronic package and its manufacturing method, the insulating material heat dissipation structure contacts the electronic element.

前述的电子封装件及其制法中,该绝缘材散热结构具有屏蔽层,以于该绝缘材散热结构设于该载板上后,该屏蔽层位于该相变材物体与该电子元件之间。In the aforementioned electronic package and its manufacturing method, the insulating material heat dissipation structure has a shielding layer, so that after the insulating material heat dissipation structure is arranged on the carrier, the shielding layer is located between the phase change material object and the electronic component.

前述的电子封装件及其制法中,该绝缘材散热结构的制程包含:借由模注绝缘材方式分别制作第一散热件与第二散热件;将该开口形成于该第一散热件上;以及将该第一散热件与第二散热件相接合,使该相变材物体夹设于该第一散热件与该第二散热件之间,其中,该绝缘材散热结构以该第二散热件设于该载板上,使该第二散热件遮盖该电子元件。In the aforementioned electronic package and its manufacturing method, the manufacturing process of the insulating material heat dissipation structure includes: respectively manufacturing a first heat dissipation element and a second heat dissipation element by injection molding insulating material; forming the opening on the first heat dissipation element; and joining the first heat dissipation element and the second heat dissipation element so that the phase change material object is sandwiched between the first heat dissipation element and the second heat dissipation element, wherein the insulating material heat dissipation structure is arranged on the carrier with the second heat dissipation element so that the second heat dissipation element covers the electronic component.

前述的电子封装件及其制法中,该相变材物体包含石蜡、有机酸、无机盐或盐水化合物。In the aforementioned electronic packaging component and its manufacturing method, the phase change material object includes paraffin, organic acid, inorganic salt or salt water compound.

由上可知,本发明的电子封装件及其制法,主要借由模注绝缘材方式制作该绝缘材散热结构,以简易制程,故相较于现有金属散热件,本发明不仅能大幅降低该绝缘材散热结构的制作成本,且能减轻该绝缘材散热结构的重量,以利于该电子封装件符合轻巧的需求。As can be seen from the above, the electronic package and its manufacturing method of the present invention mainly manufacture the insulating material heat dissipation structure by injection molding insulating material, with a simple process. Therefore, compared with the existing metal heat dissipation parts, the present invention can not only greatly reduce the manufacturing cost of the insulating material heat dissipation structure, but also reduce the weight of the insulating material heat dissipation structure, so that the electronic package meets the lightweight requirements.

附图说明BRIEF DESCRIPTION OF THE DRAWINGS

图1为现有半导体封装件的剖视示意图。FIG. 1 is a schematic cross-sectional view of a conventional semiconductor package.

图2A至图2H为本发明的电子封装件的制法的剖面示意图。2A to 2H are cross-sectional schematic diagrams of a method for manufacturing an electronic package of the present invention.

图2D-1为图2D的另一实施例的上视示意图。FIG. 2D-1 is a top schematic diagram of another embodiment of FIG. 2D .

图2E-1为图2E的另一实施例的上视示意图。FIG. 2E-1 is a top schematic diagram of another embodiment of FIG. 2E .

图3A至图3B为本发明的电子封装件的绝缘材散热结构的第一散热件的制程的剖面示意图。3A to 3B are cross-sectional views of the manufacturing process of the first heat sink of the insulating material heat sink structure of the electronic package of the present invention.

图4A至图4B为本发明的电子封装件的绝缘材散热结构的第二散热件的制程的剖面示意图。4A to 4B are cross-sectional views of the manufacturing process of the second heat sink of the insulating material heat dissipation structure of the electronic package of the present invention.

其中,附图标记说明如下:The reference numerals are described as follows:

1半导体封装件1Semiconductor Package

10封装基板10Package substrate

11半导体芯片11Semiconductor Chips

11a,21a作用面11a, 21a action surface

11b,21b非作用面11b, 21b non-active surface

110,210导电凸块110, 210 conductive bumps

111,211底胶111, 211 primer

12TIM层12TIM layer

13散热件13 heat sink

130顶片130 Top Sheet

131,400支撑脚131,400 support feet

14,24粘着层14, 24 adhesive layer

2电子封装件2Electronic packaging

2a绝缘材散热结构2a Insulation material heat dissipation structure

2b基板结构2b Substrate structure

20载板20 carrier boards

200绝缘层200 insulation layer

201线路层201 circuit layer

21电子元件21 Electronic components

22相变材物体22 Phase change material objects

23屏蔽层23 shielding layer

3散热架体3. Heat dissipation frame

3a支架3a bracket

30第一散热件30 first heat sink

30a,402绝缘材30a, 402 insulation material

300开口300 openings

301凸部301 convex part

40第二散热件40 second heat sink

40a片体40a sheet

401凹部401 recess

70,80第一模件70, 80 first module

71,81第二模件71, 81 second module

9,9a承载件9, 9a bearing member

S容置空间S Accommodation Space

L切割路径。L cutting path.

具体实施方式DETAILED DESCRIPTION

以下借由特定的具体实施例说明本发明的实施方式,熟悉此技艺的人士可由本说明书所揭示的内容轻易地了解本发明的其他优点及功效。The following describes the implementation of the present invention by means of specific embodiments. Those skilled in the art can easily understand other advantages and effects of the present invention from the contents disclosed in this specification.

须知,本说明书所附图式所绘示的结构、比例、大小等,均仅用以配合说明书所揭示的内容,以供熟悉此技艺的人士的了解与阅读,并非用以限定本发明可实施的限定条件,故不具技术上的实质意义,任何结构的修饰、比例关系的改变或大小的调整,在不影响本发明所能产生的功效及所能达成的目的下,均应仍落在本发明所揭示的技术内容得能涵盖的范围内。同时,本说明书中所引用的如“上”、“第一”、“第二”及“一”等的用语,亦仅为便于叙述的明了,而非用以限定本发明可实施的范围,其相对关系的改变或调整,在无实质变更技术内容下,当亦视为本发明可实施的范畴。It should be noted that the structures, proportions, sizes, etc. illustrated in the drawings of this specification are only used to match the contents disclosed in the specification for the understanding and reading of people familiar with this technology, and are not used to limit the limiting conditions for the implementation of the present invention, so they have no substantial technical significance. Any modification of the structure, change of the proportion relationship or adjustment of the size should still fall within the scope of the technical content disclosed by the present invention without affecting the effects and purposes that can be achieved by the present invention. At the same time, the terms such as "on", "first", "second" and "one" quoted in this specification are only for the convenience of description, and are not used to limit the scope of the implementation of the present invention. The change or adjustment of their relative relationship should also be regarded as the scope of the implementation of the present invention without substantially changing the technical content.

图2A至图2H为本发明的电子封装件2的制法的剖面示意图。2A to 2H are cross-sectional schematic diagrams of a method for manufacturing an electronic package 2 according to the present invention.

如图2A所示,提供一具有多个凸部301的第一散热件30与一具有多个凹部401的第二散热件40。As shown in FIG. 2A , a first heat dissipation element 30 having a plurality of protrusions 301 and a second heat dissipation element 40 having a plurality of concave portions 401 are provided.

于本实施例中,该第一散热件30为一板体,且该第二散热件40为一连接有多个支撑脚400的片体,以令该凹部401形成于该支撑脚400的其中一侧。例如,该第二散热件40借由该多个支撑脚400围绕而呈罩盖状以形成一容置空间S。In this embodiment, the first heat sink 30 is a plate, and the second heat sink 40 is a sheet connected to a plurality of support legs 400, so that the recess 401 is formed on one side of the support legs 400. For example, the second heat sink 40 is surrounded by the plurality of support legs 400 to form a cover shape to form an accommodation space S.

再者,该第一散热件30为绝缘材,如预浸材(Prepreg,简称PP)、环氧树脂(epoxy)的封装胶体、封装材(molding compound)或其它塑胶材质。例如,该第一散热件30可采用模注(Injection molding)方式制作,如图3A所示的第一模件70与第二模件71,并于脱模后,移除多余的绝缘材30a,如图3B所示。Furthermore, the first heat sink 30 is an insulating material, such as prepreg (PP), epoxy encapsulation colloid, molding compound or other plastic materials. For example, the first heat sink 30 can be made by injection molding, such as the first mold 70 and the second mold 71 shown in FIG. 3A , and after demolding, the excess insulating material 30a is removed, as shown in FIG. 3B .

另外,该第二散热件40为绝缘材,如预浸材(PP)、环氧树脂(epoxy)的封装胶体、封装材或其它塑胶材质。例如,该第二散热件40可采用模注方式制作,如图4A所示的第一模件80与第二模件81,并于脱模后,移除多余的绝缘材402,如图4B所示。应可理解地,该第一散热件30与第二散热件40的材质可相同或相异。In addition, the second heat sink 40 is an insulating material, such as prepreg (PP), epoxy resin (epoxy) packaging colloid, packaging material or other plastic materials. For example, the second heat sink 40 can be made by injection molding, such as the first mold 80 and the second mold 81 shown in FIG4A, and after demolding, the excess insulating material 402 is removed, as shown in FIG4B. It should be understood that the materials of the first heat sink 30 and the second heat sink 40 can be the same or different.

如图2B至图2C所示,先于该第一散热件30上形成多个开口300,再借由令相变材(Phase change material,简称PCM)物体(Mass)22位于该第一散热件30和第二散热件40之间,以压合该第一散热件30与第二散热件40,以令该相变材物体22夹设于该第一散热件30与第二散热件40之间,使该相变材物体22外露于该多个开口300。As shown in FIGS. 2B to 2C , a plurality of openings 300 are first formed on the first heat sink 30 , and then a phase change material (PCM) mass 22 is positioned between the first heat sink 30 and the second heat sink 40 to press the first heat sink 30 and the second heat sink 40 , so that the PCM mass 22 is sandwiched between the first heat sink 30 and the second heat sink 40 , and the PCM mass 22 is exposed from the plurality of openings 300 .

于本实施例中,该多个开口300贯穿该第一散热件30的片体,且该第一散热件30以其凸部301插入该第二散热件40的凹部401中,使该第一与第二散热件30,40相接合。In this embodiment, the openings 300 penetrate the body of the first heat dissipation element 30 , and the convex portion 301 of the first heat dissipation element 30 is inserted into the concave portion 401 of the second heat dissipation element 40 , so that the first and second heat dissipation elements 30 , 40 are joined.

再者,该相变材物体22为类薄板(like sheet)形体,且形成该相变材物体22的材质为石蜡(Paraffin)、有机酸(organic acid)、无机盐(inorganic salt)、盐水化合物(salt water compound)或其它相变材。Furthermore, the phase change material object 22 is in the shape of a sheet, and the material forming the phase change material object 22 is paraffin, organic acid, inorganic salt, salt water compound or other phase change materials.

如图2D所示,于该第二散热件40上形成一屏蔽层23,以形成一绝缘材散热结构2a。As shown in FIG. 2D , a shielding layer 23 is formed on the second heat dissipation element 40 to form an insulating material heat dissipation structure 2 a .

于本实施例中,该屏蔽层23形成于该第二散热件40的容置空间S内的片体40a与该支撑脚400的表面上。例如,该屏蔽层23包含金属材,如采用电镀如金(Au)、银(Ag)、镍(Ni)或其它的金属层的方式形成于该第二散热件40上。In this embodiment, the shielding layer 23 is formed on the surface of the sheet 40a and the supporting leg 400 in the accommodation space S of the second heat sink 40. For example, the shielding layer 23 includes a metal material, such as formed on the second heat sink 40 by electroplating a metal layer such as gold (Au), silver (Ag), nickel (Ni) or other metal layers.

再者,借由模注方式制作该第一散热件30与第二散热件40可形成整版面(panel)规格或晶圆级(wafer level)规格,如图2D-1所示的散热架体3,其借由多个支架3a连接多个阵列排设的绝缘材散热结构2a。Furthermore, the first heat sink 30 and the second heat sink 40 can be manufactured by injection molding to form a panel specification or a wafer level specification, such as the heat sink frame 3 shown in FIG. 2D-1, which connects a plurality of array-arranged insulating material heat sink structures 2a via a plurality of brackets 3a.

或者,可依需求将单一绝缘材散热结构2a以其第一散热件30置放于单一承载件9上,以利于输送至后续制程所用的机台,如图2E所示。应可理解地,如图2E-1所示,亦可将多个绝缘材散热结构2a阵列排设于一整版面规格或晶圆级规格的承载件9a上。Alternatively, a single insulating material heat dissipation structure 2a with its first heat dissipation element 30 can be placed on a single carrier 9 according to needs, so as to facilitate transportation to a machine used in a subsequent process, as shown in FIG2E. It should be understood that, as shown in FIG2E-1, multiple insulating material heat dissipation structures 2a can also be arrayed on a carrier 9a of a full-page specification or wafer-level specification.

如图2F至图2G所示,提供一整版面规格或晶圆级规格的基板结构2b,其包含多个相邻接的载板20,再于各该载板20上设置至少一电子元件21。接着,接续图2E-1所示的制程,自该承载件9a上移取各该绝缘材散热结构2a,以将各该绝缘材散热结构2a分别对应放置于各该载板20上。As shown in FIG. 2F to FIG. 2G , a substrate structure 2b of full-page or wafer-level specifications is provided, which includes a plurality of adjacent carriers 20, and at least one electronic component 21 is disposed on each of the carriers 20. Next, following the process shown in FIG. 2E-1 , each of the insulating material heat dissipation structures 2a is removed from the carrier 9a, so as to place each of the insulating material heat dissipation structures 2a on each of the carriers 20 respectively.

于本实施例中,该载板20例如为具有核心层与线路结构的封装基板、无核心层(coreless)形式线路结构的封装基板、具导电硅穿孔(Through-silicon via,简称TSV)的硅中介板(Through Silicon interposer,简称TSI)或其它板型,其包含至少一绝缘层200及至少一结合该绝缘层200的线路层201,如至少一扇出(fan out)型重布线路层(redistribution layer,简称RDL)。例如,形成该线路层201的材质为铜,且形成该绝缘层200的材质为如聚对二唑苯(Polybenzoxazole,简称PBO)、聚酰亚胺(Polyimide,简称PI)、预浸材(Prepreg,简称PP)等的介电材。应可理解地,该基板结构2b亦可为单一载板20形式(图未示)或为其它承载芯片的板材,如导线架(lead frame)、晶圆(wafer)、或其它具有金属布线(routing)的板体等,并不限于上述。In the present embodiment, the carrier 20 is, for example, a package substrate having a core layer and a circuit structure, a package substrate having a coreless circuit structure, a silicon interposer (TSI) with conductive through-silicon via (TSV), or other board types, which includes at least one insulating layer 200 and at least one circuit layer 201 combined with the insulating layer 200, such as at least one fan-out redistribution layer (RDL). For example, the material forming the circuit layer 201 is copper, and the material forming the insulating layer 200 is a dielectric material such as polybenzoxazole (PBO), polyimide (PI), prepreg (PP), etc. It should be understood that the substrate structure 2b may also be in the form of a single carrier 20 (not shown) or other plate materials for carrying chips, such as a lead frame, a wafer, or other plates with metal routing, etc., but is not limited to the above.

再者,该电子元件21为主动元件、被动元件或其组合者,其中,该主动元件例如为半导体芯片,而该被动元件例如为电阻、电容及电感。于本实施例中,该电子元件21为半导体芯片,其具有相对的作用面21a与非作用面21b,并使该作用面21a借由多个如焊锡材料、金属柱(pillar)或其它等的导电凸块210以覆晶方式设于该载板20的线路层上并电性连接该线路层201,且以底胶211包覆该些导电凸块210;或者,该电子元件21可借由多个焊线(图未示)以打线方式电性连接该载板20的线路层201;亦或,该电子元件21可直接接触该载板20的线路层201。因此,可于该载板20上接置所需类型及数量的电子元件21,以提升其电性功能,且有关电子元件21电性连接承载结构20的方式繁多,并不限于上述。Furthermore, the electronic component 21 is an active component, a passive component or a combination thereof, wherein the active component is, for example, a semiconductor chip, and the passive component is, for example, a resistor, a capacitor and an inductor. In the present embodiment, the electronic component 21 is a semiconductor chip having an active surface 21a and an inactive surface 21b opposite to each other, and the active surface 21a is disposed on the circuit layer of the carrier 20 by a flip chip method through a plurality of conductive bumps 210 such as solder materials, metal pillars or others and electrically connected to the circuit layer 201, and the conductive bumps 210 are coated with a primer 211; or, the electronic component 21 can be electrically connected to the circuit layer 201 of the carrier 20 by a plurality of welding wires (not shown) by a wire bonding method; or, the electronic component 21 can directly contact the circuit layer 201 of the carrier 20. Therefore, the required type and quantity of electronic components 21 can be placed on the carrier 20 to enhance its electrical function. There are many ways to electrically connect the electronic components 21 to the carrier structure 20, which are not limited to the above.

另外,该绝缘材散热结构2a以其第二散热件40的支撑脚400借由粘着层24结合于该载板20上,以令该电子元件21位于该容置空间S内,使该第二散热件40罩盖该电子元件21。例如,该屏蔽层23位于该第二散热件40(该相变材物体22)与该电子元件21之间,以遮盖该电子元件21,使该屏蔽层23能防止该电子元件21受外界的电磁干扰(ElectromagneticInterference,简称EMI)。In addition, the insulating material heat dissipation structure 2a is combined with the support leg 400 of the second heat dissipation element 40 on the carrier 20 through the adhesive layer 24, so that the electronic component 21 is located in the accommodating space S, and the second heat dissipation element 40 covers the electronic component 21. For example, the shielding layer 23 is located between the second heat dissipation element 40 (the phase change material object 22) and the electronic component 21 to cover the electronic component 21, so that the shielding layer 23 can prevent the electronic component 21 from being subjected to external electromagnetic interference (Electromagnetic Interference, referred to as EMI).

另外,该绝缘材散热结构2a以其第二散热件40的片体40a(或该屏蔽层23)接触该电子元件21的非作用面21b。应可理解地,该绝缘材散热结构2a亦可未接触该电子元件21,即该绝缘材散热结构2a与该电子元件21的非作用面21b相分离。In addition, the insulating material heat dissipation structure 2a contacts the inactive surface 21b of the electronic component 21 with the sheet 40a of the second heat dissipation element 40 (or the shielding layer 23). It should be understood that the insulating material heat dissipation structure 2a may not contact the electronic component 21, that is, the insulating material heat dissipation structure 2a is separated from the inactive surface 21b of the electronic component 21.

如图2H所示,沿如图2G所示的切割路径L(即各该载板20之间的交界)进行切单制程,以获取该电子封装件2。As shown in FIG. 2H , a singulation process is performed along the cutting path L shown in FIG. 2G (ie, the boundary between each of the carriers 20 ) to obtain the electronic package 2 .

于本实施例中,该电子元件21所产生的热能的散热路径由该第二散热件40经由该相变材物体22,再经由该开口300将热能散出至外界环境。当该相变材物体22吸收来自该电子元件21的热能时,该相变材物体22会由固态转变成液态,且当该相变材物体22经由该开口300将热能散逸时,该相变材物体22会由液态转变成固态。In this embodiment, the heat dissipation path of the heat energy generated by the electronic component 21 is from the second heat sink 40 through the phase change material object 22, and then dissipates the heat energy to the external environment through the opening 300. When the phase change material object 22 absorbs the heat energy from the electronic component 21, the phase change material object 22 will change from a solid state to a liquid state, and when the phase change material object 22 dissipates the heat energy through the opening 300, the phase change material object 22 will change from a liquid state to a solid state.

因此,本发明的制法主要借由模注绝缘材方式制作该第一散热件30与第二散热件40,以简易制程,故相较于现有金属散热件,本发明的制法不仅能大幅降低该绝缘材散热结构的制作成本,且能减轻该绝缘材散热结构2a的重量,以利于该电子封装件2符合轻巧的需求。Therefore, the manufacturing method of the present invention mainly manufactures the first heat sink 30 and the second heat sink 40 by injection molding insulating material, with a simple process. Therefore, compared with the existing metal heat sink, the manufacturing method of the present invention can not only greatly reduce the manufacturing cost of the insulating material heat dissipation structure, but also reduce the weight of the insulating material heat dissipation structure 2a, so as to help the electronic package 2 meet the lightweight requirements.

再者,该电子封装件2借由该相变材物体22的设计,以当该相变材物体22吸收来自该电子元件21的热能时,该电子元件21的温度将保持稳定(即维持于所需的温度),此时,该第一散热件30的开口300作为该相变材物体22的液态扩散的流向路径及释压空间,以减低该相变材物体22施加于该第二散热件40(或该电子元件21)上的压力,因而有利于提升该电子封装件2的可靠度。Furthermore, the electronic package 2 is designed with the phase change material object 22 so that when the phase change material object 22 absorbs heat energy from the electronic component 21, the temperature of the electronic component 21 will remain stable (i.e., maintained at a desired temperature). At this time, the opening 300 of the first heat sink 30 serves as a flow path and pressure release space for the liquid diffusion of the phase change material object 22 to reduce the pressure applied by the phase change material object 22 on the second heat sink 40 (or the electronic component 21), thereby helping to improve the reliability of the electronic package 2.

另外,该屏蔽层23不仅能防止该电子元件21受外界的电磁干扰,且能作为导热结构,以将该电子元件21的热能传递至该相变材物体22,使该相变材物体22发生相变(phasetransformation),即该相变材物体22由固态转变成液态。In addition, the shielding layer 23 can not only prevent the electronic component 21 from being interfered by external electromagnetic interference, but also serve as a heat-conducting structure to transfer the heat energy of the electronic component 21 to the phase change material object 22, so that the phase change material object 22 undergoes a phase transformation, that is, the phase change material object 22 changes from a solid state to a liquid state.

本发明提供一种电子封装件2包括:一具有至少一线路层201的载板20、至少一设于该载板20上并电性连接该线路层201的电子元件21、以及一设于该载板20上以遮盖该电子元件21的绝缘材散热结构2a。The present invention provides an electronic package 2 including: a carrier 20 having at least one circuit layer 201 , at least one electronic component 21 disposed on the carrier 20 and electrically connected to the circuit layer 201 , and an insulating material heat dissipation structure 2a disposed on the carrier 20 to cover the electronic component 21 .

所述的绝缘材散热结构2a埋设有一相变材物体22且具有至少一外露该相变材物体22的开口300。The insulating material heat dissipation structure 2 a is embedded with a phase change material object 22 and has at least one opening 300 exposing the phase change material object 22 .

于一实施例中,该绝缘材散热结构2a接触该电子元件21。In one embodiment, the insulating material heat dissipation structure 2 a contacts the electronic component 21 .

于一实施例中,该绝缘材散热结构2a具有一屏蔽层23,且该屏蔽层23位于该相变材物体22与该电子元件21之间。In one embodiment, the insulating material heat dissipation structure 2 a has a shielding layer 23 , and the shielding layer 23 is located between the phase change material object 22 and the electronic component 21 .

于一实施例中,该绝缘材散热结构2a包含相接合的第一散热件30与第二散热件40,以令该相变材物体22夹设于该第一散热件30与该第二散热件40之间,且该开口300形成于该第一散热件30上,并使该第二散热件40设于该载板20上以遮盖该电子元件21。In one embodiment, the insulating material heat dissipation structure 2a includes a first heat dissipation element 30 and a second heat dissipation element 40 that are connected to each other, so that the phase change material object 22 is sandwiched between the first heat dissipation element 30 and the second heat dissipation element 40, and the opening 300 is formed on the first heat dissipation element 30, and the second heat dissipation element 40 is disposed on the carrier 20 to cover the electronic component 21.

于一实施例中,该相变材物体22包含石蜡、有机酸、无机盐或盐水化合物。In one embodiment, the phase change material 22 includes paraffin, organic acid, inorganic salt or salt water compound.

综上所述,本发明的电子封装件及其制法,主要借由模注绝缘材方式制作该绝缘材散热结构,以降低该绝缘材散热结构的制作成本,且减轻该绝缘材散热结构的重量,使该电子封装件利于符合轻巧的需求。In summary, the electronic package and its manufacturing method of the present invention mainly manufacture the insulating material heat dissipation structure by injection molding insulating material to reduce the manufacturing cost of the insulating material heat dissipation structure and reduce the weight of the insulating material heat dissipation structure, so that the electronic package can meet the demand of being lightweight.

上述实施例仅用以例示性说明本发明的原理及其功效,而非用于限制本发明。任何熟习此项技艺的人士均可在不违背本发明的精神及范畴下,对上述实施例进行修改。因此本发明的权利保护范围,应如权利要求书所列。The above embodiments are only used to illustrate the principles and effects of the present invention, and are not used to limit the present invention. Anyone skilled in the art can modify the above embodiments without violating the spirit and scope of the present invention. Therefore, the scope of protection of the present invention should be as listed in the claims.

Claims (10)

1. An electronic package, comprising:
the carrier plate is provided with at least one circuit layer;
the electronic element is arranged on the carrier plate and is electrically connected with the circuit layer; and
The insulating material heat dissipation structure is arranged on the carrier plate and covers the electronic element, wherein the insulating material heat dissipation structure is embedded with a phase change material object and provided with at least one opening exposing the phase change material object.
2. The electronic package of claim 1, wherein the insulating material heat dissipation structure contacts the electronic component.
3. The electronic package of claim 1, wherein the insulating material heat dissipation structure has a shielding layer, and the shielding layer is located between the phase change material object and the electronic component.
4. The electronic package of claim 1, wherein the insulating material heat dissipating structure comprises a first heat dissipating member and a second heat dissipating member that are coupled to each other, such that the phase change material object is sandwiched between the first heat dissipating member and the second heat dissipating member, and the opening is formed on the first heat dissipating member, and such that the second heat dissipating member is disposed on the carrier to cover the electronic component.
5. The electronic package of claim 1, wherein the phase change material body comprises paraffin, organic acid, inorganic salt, or brine compound.
6. A method of manufacturing an electronic package, comprising:
manufacturing an insulating material heat dissipation structure by means of injection molding of an insulating material, wherein the insulating material heat dissipation structure is embedded with a phase change material object and provided with at least one opening exposing the phase change material object; and
The insulating material heat dissipation structure is arranged on a carrier plate with at least one circuit layer, wherein the carrier plate is provided with at least one electronic element electrically connected with the circuit layer, so that the insulating material heat dissipation structure covers the electronic element.
7. The method of claim 6, wherein the insulating material heat dissipation structure contacts the electronic device.
8. The method of claim 6, wherein the insulating material heat dissipation structure has a shielding layer, and the shielding layer is located between the phase change material object and the electronic device after the insulating material heat dissipation structure is disposed on the carrier.
9. The method of claim 6, wherein the fabricating the insulating material heat dissipation structure comprises: respectively manufacturing a first heat dissipation piece and a second heat dissipation piece by means of molding insulating materials; forming the opening on the first heat sink; and the first heat dissipation piece and the second heat dissipation piece are jointed, so that the phase change material object is clamped between the first heat dissipation piece and the second heat dissipation piece, wherein the insulating material heat dissipation structure is arranged on the carrier plate by the second heat dissipation piece, and the second heat dissipation piece covers the electronic element.
10. The method of claim 6, wherein the phase change material comprises a paraffin, an organic acid, an inorganic salt, or a salt water compound.
CN202310186698.XA 2023-02-10 2023-03-01 Electronic package and method for manufacturing the same Pending CN118522705A (en)

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