[go: up one dir, main page]

CN118507598A - Solar cell, manufacturing method thereof and photovoltaic module - Google Patents

Solar cell, manufacturing method thereof and photovoltaic module Download PDF

Info

Publication number
CN118507598A
CN118507598A CN202410955508.0A CN202410955508A CN118507598A CN 118507598 A CN118507598 A CN 118507598A CN 202410955508 A CN202410955508 A CN 202410955508A CN 118507598 A CN118507598 A CN 118507598A
Authority
CN
China
Prior art keywords
electrode
solar cell
substrate
battery body
isolation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CN202410955508.0A
Other languages
Chinese (zh)
Other versions
CN118507598B (en
Inventor
陈达明
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Trina Solar Co Ltd
Original Assignee
Trina Solar Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Trina Solar Co Ltd filed Critical Trina Solar Co Ltd
Priority to CN202410955508.0A priority Critical patent/CN118507598B/en
Publication of CN118507598A publication Critical patent/CN118507598A/en
Application granted granted Critical
Publication of CN118507598B publication Critical patent/CN118507598B/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F71/00Manufacture or treatment of devices covered by this subclass
    • H10F71/128Annealing
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F10/00Individual photovoltaic cells, e.g. solar cells
    • H10F10/10Individual photovoltaic cells, e.g. solar cells having potential barriers
    • H10F10/14Photovoltaic cells having only PN homojunction potential barriers
    • H10F10/146Back-junction photovoltaic cells, e.g. having interdigitated base-emitter regions on the back side
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F71/00Manufacture or treatment of devices covered by this subclass
    • H10F71/121The active layers comprising only Group IV materials
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F77/00Constructional details of devices covered by this subclass
    • H10F77/20Electrodes
    • H10F77/206Electrodes for devices having potential barriers
    • H10F77/211Electrodes for devices having potential barriers for photovoltaic cells
    • H10F77/219Arrangements for electrodes of back-contact photovoltaic cells
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50Manufacturing or production processes characterised by the final manufactured product

Landscapes

  • Photovoltaic Devices (AREA)

Abstract

The invention relates to a solar cell, a manufacturing method thereof and a photovoltaic module. The manufacturing method of the solar cell comprises the following steps: providing a battery body, wherein patterned metal paste is formed on the surface of the first side and the surface of the second side of the battery body, an isolation groove extending to the substrate of the battery body is further formed on the surface of the first side of the battery body, and transition electrode paste insulated and isolated from the side wall of the isolation groove is formed at the bottom of the isolation groove; pre-sintering the battery body to form a first pre-cured electrode and a second electrode from metal paste on the surface of the first side and the surface of the second side of the battery body respectively, and forming a transition electrode from transition electrode paste; a reverse bias voltage is applied to the battery body through the first pre-cure electrode and the transition electrode, and a laser scan is performed on a surface of the first side of the battery body. The solar cell and the manufacturing method thereof and the photovoltaic module can reduce the surface recombination loss of the solar cell and have higher efficiency.

Description

太阳能电池及其制作方法、光伏组件Solar cell and manufacturing method thereof, photovoltaic module

技术领域Technical Field

本发明涉及太阳能电池技术领域,特别是涉及一种太阳能电池及其制作方法、光伏组件。The present invention relates to the technical field of solar cells, and in particular to a solar cell and a manufacturing method thereof, and a photovoltaic module.

背景技术Background Art

激光辅助烧结技术又名激光增强接触优化LECO技术,是一种先进的激光烧结技术,用于改善太阳能电池中金属电极与硅片之间的接触。相关技术的激光辅助烧结过程中,采用激光扫描电池正面局部产生非常高的电荷载流子注入,在一定的偏置电压作用下,正面和背面的电极界面处会同时产生局部高电流密度和瞬时高温,从而引发金属和硅的相互扩散,并形成欧姆接触。然而,目前的激光辅助烧结技术中,常常存在正面电极的界面接触点达到最佳尺寸时,背面电极的界面接触点会过度烧结的情况,造成太阳能电池背面的复合损失较大,影响太阳能电池的效率。Laser-assisted sintering technology, also known as laser-enhanced contact optimization (LECO) technology, is an advanced laser sintering technology used to improve the contact between metal electrodes and silicon wafers in solar cells. In the laser-assisted sintering process of the related technology, a laser is used to scan the front side of the cell to generate very high charge carrier injection locally. Under a certain bias voltage, local high current density and instantaneous high temperature are simultaneously generated at the interface of the front and back electrodes, thereby inducing mutual diffusion of metal and silicon and forming ohmic contact. However, in the current laser-assisted sintering technology, when the interface contact point of the front electrode reaches the optimal size, the interface contact point of the back electrode is often over-sintered, resulting in large recombination losses on the back of the solar cell, affecting the efficiency of the solar cell.

发明内容Summary of the invention

基于此,有必要提供一种能够减少太阳能电池表面复合损失、效率较高的太阳能电池及其制作方法、光伏组件。Based on this, it is necessary to provide a solar cell and a method for manufacturing the same, as well as a photovoltaic module that can reduce the surface recombination loss of the solar cell and has higher efficiency.

本申请实施例第一方面提供一种太阳能电池的制作方法,包括:A first aspect of an embodiment of the present application provides a method for manufacturing a solar cell, comprising:

提供一电池主体,电池主体的第一侧的表面和第二侧的表面均形成有图案化的金属浆料,电池主体的第一侧的表面还设有延伸至电池主体的基底的隔离槽,隔离槽底部形成有与隔离槽的侧壁绝缘隔离的过渡电极浆料,第一侧和第二侧相对布置;A battery body is provided, wherein a surface of a first side and a surface of a second side of the battery body are both formed with patterned metal paste, an isolation groove extending to a base of the battery body is further provided on the surface of the first side of the battery body, a transition electrode paste insulated and isolated from a side wall of the isolation groove is formed at the bottom of the isolation groove, and the first side and the second side are arranged opposite to each other;

对电池主体进行预烧结,使电池主体的第一侧的表面和第二侧的表面的金属浆料分别形成第一预固化电极和第二电极,并使过渡电极浆料形成过渡电极;Pre-sintering the battery body so that the metal pastes on the surface of the first side and the surface of the second side of the battery body form a first pre-cured electrode and a second electrode respectively, and the transition electrode paste forms a transition electrode;

通过第一预固化电极和过渡电极向电池主体施加反向偏置电压,并对电池主体的第一侧的表面进行激光扫描,以将第一预固化电极激光诱导烧结为第一电极。A reverse bias voltage is applied to the battery body through the first pre-cured electrode and the transition electrode, and a laser is scanned on the surface of the first side of the battery body to laser-induce sintering of the first pre-cured electrode into a first electrode.

在其中一个实施例中,提供一电池主体的步骤具体包括:In one embodiment, the step of providing a battery body specifically includes:

提供一个第一侧的表面依次层叠设置有第一掺杂导电层和第一钝化层、第二侧的表面依次层叠设置有钝化接触层和第二钝化层的基底,第一掺杂导电层的掺杂类型与基底相反;Provide a substrate having a first side surface on which a first doped conductive layer and a first passivation layer are sequentially stacked, and a second side surface on which a passivation contact layer and a second passivation layer are sequentially stacked, wherein the doping type of the first doped conductive layer is opposite to that of the substrate;

在第一钝化层上开设隔离槽,并使基底自隔离槽露出;An isolation groove is formed on the first passivation layer, and the substrate is exposed from the isolation groove;

在基底自隔离槽露出的部分上形成过渡电极浆料,并分别在第一钝化层和第二钝化层的背离基底的表面形成金属浆料。A transition electrode paste is formed on a portion of the substrate exposed from the isolation groove, and metal pastes are formed on surfaces of the first passivation layer and the second passivation layer facing away from the substrate.

在其中一个实施例中,在第一钝化层上形成金属浆料的步骤,与在基底自隔离槽露出的部分上形成过渡电极浆料的步骤在同一个工艺制程中进行。In one embodiment, the step of forming a metal paste on the first passivation layer and the step of forming a transition electrode paste on the portion of the substrate exposed from the isolation trench are performed in the same process.

在其中一个实施例中,隔离槽的宽度为:0.5mm-1mm,过渡电极浆料与隔离槽的槽壁之间的间距大于50μm。In one embodiment, the width of the isolation groove is 0.5 mm-1 mm, and the distance between the transition electrode slurry and the groove wall of the isolation groove is greater than 50 μm.

在其中一个实施例中,电池主体的第一侧的表面设置的金属浆料包括多个沿第一方向间隔布置的金属图案,隔离槽沿第一方向延伸,并位于电池主体的第二方向两端之间;In one embodiment, the metal paste disposed on the surface of the first side of the battery body includes a plurality of metal patterns spaced apart along a first direction, and the isolation groove extends along the first direction and is located between two ends of the battery body in a second direction;

第一方向、第二方向与基底的厚度方向两两垂直。The first direction and the second direction are perpendicular to the thickness direction of the substrate.

在其中一个实施例中,对电池主体进行预烧结的步骤中,对电池主体的第一侧的表面进行烧结的第一峰值温度T1满足:700℃≤T1≤750℃,对电池主体的第二侧的表面进行烧结的第二峰值温度T2满足:650℃≤T2≤700℃。In one embodiment, in the step of pre-sintering the battery body, the first peak temperature T1 of sintering the surface of the first side of the battery body satisfies: 700℃≤T1≤750℃, and the second peak temperature T2 of sintering the surface of the second side of the battery body satisfies: 650℃≤T2≤700℃.

在其中一个实施例中,对电池主体进行预烧结的步骤中,对电池主体的第一侧的表面进行烧结的第一峰值温度T1满足:600℃≤T1<700℃,第一峰值温度的持续时长为2s-30s,对电池主体的第二侧的表面进行烧结的第二峰值温度T2满足:550℃≤T2<650℃,第二峰值温度的持续时长为5s-10s;降温时间范围是2s-5s。In one embodiment, in the step of pre-sintering the battery body, the first peak temperature T1 for sintering the surface of the first side of the battery body satisfies: 600°C ≤ T1 < 700°C, and the duration of the first peak temperature is 2s-30s, and the second peak temperature T2 for sintering the surface of the second side of the battery body satisfies: 550°C ≤ T2 < 650°C, and the duration of the second peak temperature is 5s-10s; the cooling time range is 2s-5s.

在其中一个实施例中,第一侧的表面的金属浆料、第二侧的表面的金属浆料的至少一者包含:银粉、铝粉、玻璃粉、添加剂及有机载体,以该金属浆料总重量为100%计,铝粉的重量百分含量为0%-0.5%;玻璃粉的重量百分含量为3%-5%;In one embodiment, at least one of the metal paste on the surface of the first side and the metal paste on the surface of the second side comprises: silver powder, aluminum powder, glass powder, additives and an organic carrier, and based on the total weight of the metal paste as 100%, the weight percentage of the aluminum powder is 0%-0.5%; the weight percentage of the glass powder is 3%-5%;

玻璃粉中铅的重量百分占比为30%-40%。The weight percentage of lead in glass powder is 30%-40%.

在其中一个实施例中,通过第一预固化电极和过渡电极向电池主体施加反向偏置电压的步骤包括:In one embodiment, the step of applying a reverse bias voltage to the battery body through the first pre-curing electrode and the transition electrode comprises:

将外置电源的第一外置电极的探针抵压于第一预固化电极,将外置电源的第二外置电极的探针抵压于过渡电极,第一外置电极和第二外置电极的极性相反。The probe of the first external electrode of the external power source is pressed against the first pre-curing electrode, and the probe of the second external electrode of the external power source is pressed against the transition electrode. The polarities of the first external electrode and the second external electrode are opposite.

在其中一个实施例中,隔离槽的数量为至少一个,且均沿着第一方向延伸,隔离槽的数量为至少两个时,各隔离槽沿第二方向间隔布置,隔离槽将电池主体的第一侧的表面沿第二方向分隔为至少两个子区域;In one embodiment, the number of the isolation grooves is at least one, and all of them extend along the first direction. When the number of the isolation grooves is at least two, the isolation grooves are arranged at intervals along the second direction, and the isolation grooves divide the surface of the first side of the battery body into at least two sub-areas along the second direction;

将第一预固化电极激光诱导烧结为第一电极的步骤具体包括:The step of laser-induced sintering the first pre-cured electrode into the first electrode specifically includes:

沿第二方向,依次对各子区域中的第一预固化电极进行激光诱导烧结。Laser induced sintering is performed on the first pre-cured electrodes in each sub-region in sequence along the second direction.

在其中一个实施例中,对任一子区域中的第一预固化电极进行激光诱导烧结的步骤包括:In one embodiment, the step of laser induced sintering the first pre-cured electrode in any sub-region comprises:

将该子区域中的第一预固化电极和与该子区域相邻的过渡电极分别与外置电源的第一外置电极和第二外置电极电连接,并对该子区域进行激光扫描,第一外置电极和第二外置电极的极性相反,第一方向、第二方向以及电池主体的厚度方向两两垂直。The first pre-cured electrode in the sub-region and the transition electrode adjacent to the sub-region are electrically connected to the first external electrode and the second external electrode of the external power supply respectively, and the sub-region is laser scanned, the polarities of the first external electrode and the second external electrode are opposite, and the first direction, the second direction and the thickness direction of the battery body are perpendicular to each other.

在其中一个实施例中,通过第一预固化电极和过渡电极向电池主体施加反向偏置电压,并对电池主体的第一侧的表面进行激光扫描的步骤中:In one embodiment, in the step of applying a reverse bias voltage to the battery body through the first pre-curing electrode and the transition electrode, and performing laser scanning on the surface of the first side of the battery body:

激光的波长范围是532nm-1064nm,激光扫描的功率范围是60W-100W,反向偏置电压是10V-20V。The wavelength range of the laser is 532nm-1064nm, the power range of the laser scanning is 60W-100W, and the reverse bias voltage is 10V-20V.

在其中一个实施例中,将第一预固化电极激光诱导烧结为第一电极的步骤之后还包括:In one embodiment, the step of laser-induced sintering the first pre-cured electrode into the first electrode further includes:

沿着隔离槽的延伸方向将电池主体切断,以形成至少两个太阳能电池。The cell body is cut along the extending direction of the isolation groove to form at least two solar cells.

本申请实施例第二方面提供一种太阳能电池,采用上述任一项的太阳能电池的制作方法制作而成。A second aspect of an embodiment of the present application provides a solar cell, which is manufactured using any of the above-mentioned methods for manufacturing a solar cell.

本申请实施例第三方面提供一种太阳能电池,包括:太阳能电池本体,太阳能电池本体的第一侧的表面和第二侧的表面分别设有第一电极和第二电极;A third aspect of the embodiments of the present application provides a solar cell, comprising: a solar cell body, wherein a first electrode and a second electrode are respectively provided on a surface of a first side and a surface of a second side of the solar cell body;

太阳能电池本体的第一侧的表面还设有延伸至太阳能电池本体的基底的隔离槽,隔离槽底部形成有与隔离槽的侧壁绝缘隔离的过渡电极。The surface of the first side of the solar cell body is also provided with an isolation groove extending to the base of the solar cell body, and a transition electrode insulated and isolated from the side wall of the isolation groove is formed at the bottom of the isolation groove.

在其中一个实施例中,太阳能电池本体还包括依次设置在基底的第一侧的第一掺杂导电层和第一钝化层、以及依次设置在基底的第二侧的钝化接触层和第二钝化层,第一掺杂导电层和钝化接触层的掺杂类型相反;In one embodiment, the solar cell body further comprises a first doped conductive layer and a first passivation layer sequentially disposed on a first side of the substrate, and a passivation contact layer and a second passivation layer sequentially disposed on a second side of the substrate, wherein the first doped conductive layer and the passivation contact layer have opposite doping types;

第一电极设于第一钝化层,并述第一掺杂导电层欧姆接触,第二电极设于第二钝化层,并与钝化接触层欧姆接触;The first electrode is disposed on the first passivation layer and is in ohmic contact with the first doped conductive layer, and the second electrode is disposed on the second passivation layer and is in ohmic contact with the passivation contact layer;

隔离槽开设于第一钝化层背离所述基底的表面。The isolation groove is opened on the surface of the first passivation layer away from the substrate.

在其中一个实施例中,第一电极包括多个沿第一方向间隔布置的第一电极图案;In one embodiment, the first electrode includes a plurality of first electrode patterns arranged at intervals along a first direction;

隔离槽沿第一方向延伸,并位于基底的第二方向两端之间;或者The isolation trench extends along the first direction and is located between two ends of the substrate in the second direction; or

隔离槽沿第二方向延伸,并位于基底的第一方向两端之间;The isolation groove extends along the second direction and is located between two ends of the substrate in the first direction;

第一方向、第二方向与基底的厚度方向两两垂直。The first direction and the second direction are perpendicular to the thickness direction of the substrate.

在其中一个实施例中,隔离槽的数量为至少一个;In one embodiment, the number of the isolation groove is at least one;

隔离槽的数量为至少两个,且均沿第一方向延伸时,各隔离槽沿第二方向间隔布置;The number of the isolation grooves is at least two, and when all of the isolation grooves extend along the first direction, the isolation grooves are arranged at intervals along the second direction;

隔离槽的数量为至少两个,且均沿第二方向延伸时,各隔离槽沿第一方向间隔布置。The number of the isolation grooves is at least two, and when all of the isolation grooves extend along the second direction, the isolation grooves are arranged at intervals along the first direction.

在其中一个实施例中,第一电极包括多个沿第一方向间隔布置的第一电极图案;In one embodiment, the first electrode includes a plurality of first electrode patterns arranged at intervals along a first direction;

隔离槽沿第一方向延伸,并位于基底的第二方向端部;或者,隔离槽沿第二方向延伸,并位于基底的第一方向端部;The isolation groove extends along the first direction and is located at the end of the substrate in the second direction; or the isolation groove extends along the second direction and is located at the end of the substrate in the first direction;

第一方向、第二方向与基底的厚度方向两两垂直。The first direction and the second direction are perpendicular to the thickness direction of the substrate.

本申请实施例第三方面提供一种光伏组件,包括至少一个电池串,电池串包括至少两个上述的太阳能电池。A third aspect of an embodiment of the present application provides a photovoltaic assembly, comprising at least one battery string, wherein the battery string comprises at least two of the above-mentioned solar cells.

上述的太阳能电池及其制作方法、光伏组件的有益效果:The above-mentioned solar cell and its manufacturing method, photovoltaic module have the following beneficial effects:

由于电池主体的第一侧的表面和第二侧的表面均形成有图案化的金属浆料,在对电池主体进行预烧结的过程中,使电池主体的第一侧的表面和第二侧的表面的金属浆料依次形成第一预固化电极和第二电极。Since patterned metal paste is formed on the surface of the first side and the surface of the second side of the battery body, during the pre-sintering process of the battery body, the metal paste on the surface of the first side and the surface of the second side of the battery body sequentially forms a first pre-cured electrode and a second electrode.

由于电池主体的第一侧的表面设有延伸至电池主体的基底的隔离槽,因此基底可以从隔离槽露出到外界,而隔离槽底部形成有与隔离槽的侧壁绝缘隔离的过渡电极浆料,由于图案化的金属浆料形成在电池主体的第一侧的表面,因此在预烧结后,形成的第一预固化电极也会与过渡电极绝缘隔离。Since the surface of the first side of the battery body is provided with an isolation groove extending to the substrate of the battery body, the substrate can be exposed to the outside from the isolation groove, and a transition electrode slurry is formed at the bottom of the isolation groove to be insulated and isolated from the side wall of the isolation groove. Since the patterned metal slurry is formed on the surface of the first side of the battery body, after pre-sintering, the formed first pre-cured electrode will also be insulated and isolated from the transition electrode.

通过第一预固化电极和过渡电极向电池主体施加反向偏置电压,并对电池主体的第一侧的表面进行激光扫描,以将第一预固化电极激光诱导烧结为第一电极。在此过程中,仅对电池主体的第一侧的表面的第一预固化电极进行激光诱导烧结,使其形成第一电极,并不会对电池主体的第二侧的表面进行激光处理,即第二电极只通过对第二侧的表面的金属浆料进行预烧结即可形成,避免太阳能电池第二侧的表面的电极发生过烧结,从而降低第二侧的表面的复合损失,提高太阳能电池的效率。A reverse bias voltage is applied to the battery body through the first pre-cured electrode and the transition electrode, and the surface of the first side of the battery body is laser scanned to laser-induce sintering the first pre-cured electrode into the first electrode. In this process, only the first pre-cured electrode on the surface of the first side of the battery body is laser-induced sintered to form the first electrode, and the surface of the second side of the battery body is not laser-processed, that is, the second electrode can be formed only by pre-sintering the metal paste on the surface of the second side, avoiding over-sintering of the electrode on the surface of the second side of the solar cell, thereby reducing the composite loss of the surface of the second side and improving the efficiency of the solar cell.

附图说明BRIEF DESCRIPTION OF THE DRAWINGS

图1为本申请实施例提供的太阳能电池的结构示意图;FIG1 is a schematic diagram of the structure of a solar cell provided in an embodiment of the present application;

图2为本申请实施例提供的太阳能电池的俯视结构示意图;FIG2 is a schematic diagram of a top view of a solar cell provided in an embodiment of the present application;

图3为图2的A处的局部放大图;FIG3 is a partial enlarged view of point A in FIG2 ;

图4为本申请实施例提供的太阳能电池的制作方法的流程示意图;FIG4 is a schematic diagram of a process of manufacturing a solar cell provided in an embodiment of the present application;

图5为本申请实施例提供的太阳能电池的制作方法中电池主体的局部结构示意图。FIG5 is a schematic diagram of a partial structure of a solar cell body in a method for manufacturing a solar cell provided in an embodiment of the present application.

附图标号说明:Description of Figure Numbers:

100、太阳能电池;100. Solar cells;

101、电池主体;102、金属浆料;103、过渡电极浆料;104、子区域;101. Battery body; 102. Metal slurry; 103. Transition electrode slurry; 104. Sub-region;

10、基底;20、第一掺杂导电层;30、第一钝化层;31、钝化膜层;32、减反射膜层;40、隔离槽;50、第一电极;51、第一电极图案;60、钝化接触层;61、隧穿氧化层;62、多晶硅掺杂导电层;70、第二钝化层;80、第二电极;90、过渡电极;10. substrate; 20. first doped conductive layer; 30. first passivation layer; 31. passivation film layer; 32. anti-reflection film layer; 40. isolation groove; 50. first electrode; 51. first electrode pattern; 60. passivation contact layer; 61. tunneling oxide layer; 62. polysilicon doped conductive layer; 70. second passivation layer; 80. second electrode; 90. transition electrode;

F、第一侧;S、第二侧;Y、第一方向;R、第二方向。F, first side; S, second side; Y, first direction; R, second direction.

具体实施方式DETAILED DESCRIPTION

为使本发明的上述目的、特征和优点能够更加明显易懂,下面结合附图对本发明的具体实施方式做详细的说明。在下面的描述中阐述了很多具体细节以便于充分理解本发明。但是本发明能够以很多不同于在此描述的其它方式来实施,本领域技术人员可以在不违背本发明内涵的情况下做类似改进,因此本发明不受下面公开的具体实施例的限制。In order to make the above-mentioned objects, features and advantages of the present invention more obvious and easy to understand, the specific embodiments of the present invention are described in detail below in conjunction with the accompanying drawings. In the following description, many specific details are set forth to facilitate a full understanding of the present invention. However, the present invention can be implemented in many other ways different from those described herein, and those skilled in the art can make similar improvements without violating the connotation of the present invention, so the present invention is not limited by the specific embodiments disclosed below.

在本发明的描述中,需要理解的是,术语“中心”、“纵向”、“横向”、“长度”、“宽度”、“厚度”、“上”、“下”、“前”、“后”、“左”、“右”、“竖直”、“水平”、“顶”、“底”、“内”、“外”、“顺时针”、“逆时针”、“轴向”、“径向”、“周向”等指示的方位或位置关系为基于附图所示的方位或位置关系,仅是为了便于描述本发明和简化描述,而不是指示或暗示所指的装置或元件必须具有特定的方位、以特定的方位构造和操作,因此不能理解为对本发明的限制。In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", "axial", "radial", "circumferential" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the referred device or element must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as limiting the present invention.

此外,术语“第一”、“第二”仅用于描述目的,而不能理解为指示或暗示相对重要性或者隐含指明所指示的技术特征的数量。由此,限定有“第一”、“第二”的特征可以明示或者隐含地包括至少一个该特征。在本发明的描述中,“多个”的含义是至少两个,例如两个,三个等,除非另有明确具体的限定。In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" and "second" may explicitly or implicitly include at least one of the features. In the description of the present invention, the meaning of "plurality" is at least two, such as two, three, etc., unless otherwise clearly and specifically defined.

在本发明中,除非另有明确的规定和限定,术语“安装”、“相连”、“连接”、“固定”等术语应做广义理解,例如,可以是固定连接,也可以是可拆卸连接,或成一体;可以是机械连接,也可以是电连接;可以是直接相连,也可以通过中间媒介间接相连,可以是两个元件内部的连通或两个元件的相互作用关系,除非另有明确的限定。对于本领域的普通技术人员而言,可以根据具体情况理解上述术语在本发明中的具体含义。In the present invention, unless otherwise clearly specified and limited, the terms "installed", "connected", "connected", "fixed" and the like should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements, unless otherwise clearly defined. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

在本发明中,除非另有明确的规定和限定,第一特征在第二特征“上”或“下”可以是第一和第二特征直接接触,或第一和第二特征通过中间媒介间接接触。而且,第一特征在第二特征“之上”、“上方”和“上面”可是第一特征在第二特征正上方或斜上方,或仅仅表示第一特征水平高度高于第二特征。第一特征在第二特征“之下”、“下方”和“下面”可以是第一特征在第二特征正下方或斜下方,或仅仅表示第一特征水平高度小于第二特征。In the present invention, unless otherwise clearly specified and limited, a first feature being "above" or "below" a second feature may mean that the first and second features are in direct contact, or the first and second features are in indirect contact through an intermediate medium. Moreover, a first feature being "above", "above" or "above" a second feature may mean that the first feature is directly above or obliquely above the second feature, or simply means that the first feature is higher in level than the second feature. A first feature being "below", "below" or "below" a second feature may mean that the first feature is directly below or obliquely below the second feature, or simply means that the first feature is lower in level than the second feature.

需要说明的是,当元件被称为“固定于”或“设置于”另一个元件,它可以直接在另一个元件上或者也可以存在居中的元件。当一个元件被认为是“连接”另一个元件,它可以是直接连接到另一个元件或者可能同时存在居中元件。本文所使用的术语“垂直的”、“水平的”、“上”、“下”、“左”、“右”以及类似的表述只是为了说明的目的,并不表示是唯一的实施方式。It should be noted that when an element is referred to as being "fixed to" or "disposed on" another element, it may be directly on the other element or there may be a central element. When an element is considered to be "connected to" another element, it may be directly connected to the other element or there may be a central element at the same time. The terms "vertical", "horizontal", "upper", "lower", "left", "right" and similar expressions used herein are for illustrative purposes only and are not intended to be the only implementation method.

相关技术的激光辅助烧结技术、也即激光诱导烧结过程中,在同样的激光能量和偏置电压作用下,在正面电极的界面接触点达到最佳尺寸时,背面电极的界面接触点会过度烧结,造成电池背面的复合损失。In the laser-assisted sintering technology of the related technology, that is, during the laser-induced sintering process, under the same laser energy and bias voltage, when the interface contact point of the front electrode reaches the optimal size, the interface contact point of the back electrode will be over-sintered, causing composite loss on the back of the battery.

本申请实施例中,为避免电池第一侧的第一电极激光诱导烧结过程中,第二侧的第二电极的过度烧结,采用单面激光诱导烧结处理方法,依靠预烧结形成第一预固化电极和第二电极,再利用激光诱导烧结工艺将第一预固化电极烧结形成第一电极,不对第二电极进行激光诱导烧结,能够避免第二电极产生过烧结。In the embodiment of the present application, in order to avoid excessive sintering of the second electrode on the second side during the laser induced sintering of the first electrode on the first side of the battery, a single-sided laser induced sintering treatment method is adopted. The first precured electrode and the second electrode are formed by pre-sintering, and then the first precured electrode is sintered to form the first electrode using the laser induced sintering process. The second electrode is not subjected to laser induced sintering, thereby avoiding over-sintering of the second electrode.

下面结合附图说明本申请实施例的太阳能电池及其制作方法、光伏组件。The solar cell and its manufacturing method, and the photovoltaic module of the embodiment of the present application are described below with reference to the accompanying drawings.

图1为本申请实施例提供的太阳能电池的结构示意图,图2为本申请实施例提供的太阳能电池的俯视结构示意图,图3为图2的A处的局部放大图。FIG1 is a schematic diagram of the structure of a solar cell provided in an embodiment of the present application, FIG2 is a schematic diagram of the top view of the structure of a solar cell provided in an embodiment of the present application, and FIG3 is a partial enlarged view of point A in FIG2 .

参照图1、图2、图3,本申请实施例提供的太阳能电池100,包括太阳能电池本体,太阳能电池本体的第一侧F的表面和第二侧S的表面分别设有第一电极50和第二电极80。太阳能电池本体的第一侧F的表面还设有延伸至太阳能电池本体的基底10的隔离槽40,隔离槽40底部形成有与隔离槽40的侧壁绝缘隔离的过渡电极90。1, 2 and 3, a solar cell 100 provided in an embodiment of the present application includes a solar cell body, and a first electrode 50 and a second electrode 80 are respectively provided on the surface of a first side F and a surface of a second side S of the solar cell body. An isolation groove 40 extending to the substrate 10 of the solar cell body is further provided on the surface of the first side F of the solar cell body, and a transition electrode 90 insulated and isolated from the sidewall of the isolation groove 40 is formed at the bottom of the isolation groove 40.

太阳能电池本体还包括依次层叠设置在基底10的第一侧F的第一掺杂导电层20和第一钝化层30、以及依次层叠设置在基底10的第二侧S的钝化接触层60和第二钝化层70,第一掺杂导电层20和钝化接触层60的掺杂类型相反,且第一侧F和所述第二侧S相对设置。The solar cell body also includes a first doped conductive layer 20 and a first passivation layer 30 stacked in sequence on a first side F of the substrate 10, and a passivation contact layer 60 and a second passivation layer 70 stacked in sequence on a second side S of the substrate 10. The doping types of the first doped conductive layer 20 and the passivation contact layer 60 are opposite, and the first side F and the second side S are arranged opposite to each other.

另外,第一电极50设于第一钝化层30,并与第一掺杂导电层20欧姆接触,第二电极80设于第二钝化层70,并与钝化接触层60欧姆接触。In addition, the first electrode 50 is disposed on the first passivation layer 30 and is in ohmic contact with the first doped conductive layer 20 , and the second electrode 80 is disposed on the second passivation layer 70 and is in ohmic contact with the passivation contact layer 60 .

本申请实施例中的太阳能电池100可以是TOPCon电池,也可以根据需要设置为其他类型的电池。The solar cell 100 in the embodiment of the present application may be a TOPCon cell, or may be configured as other types of cells as required.

在太阳能电池100是TOPCon电池时,太阳能电池100可以包括N型电池和P型电池,N型电池的基底10掺杂N型元素,第一掺杂导电层20掺杂P型元素。P型电池的基底10掺杂P型元素,第一掺杂导电层20掺杂N型元素。第一掺杂导电层20用于与基底10形成PN结,本申请实施例中,以基底10是N型基底为例进行说明,此时,第一掺杂导电层20可以是P型掺杂,例如可以是硼元素掺杂的第一掺杂导电层20(也称为P+发射极)。When the solar cell 100 is a TOPCon cell, the solar cell 100 may include an N-type cell and a P-type cell, the substrate 10 of the N-type cell is doped with an N-type element, and the first doped conductive layer 20 is doped with a P-type element. The substrate 10 of the P-type cell is doped with a P-type element, and the first doped conductive layer 20 is doped with an N-type element. The first doped conductive layer 20 is used to form a PN junction with the substrate 10. In the embodiment of the present application, the substrate 10 is an N-type substrate as an example for explanation. At this time, the first doped conductive layer 20 may be P-type doped, for example, the first doped conductive layer 20 doped with boron element (also called P+ emitter).

第一钝化层30可以包括依次层叠在第一掺杂导电层20上的钝化膜层31和减反射膜层32。The first passivation layer 30 may include a passivation film layer 31 and an anti-reflection film layer 32 sequentially stacked on the first doped conductive layer 20 .

钝化膜层31可以采用单层结构或者多层结构,材料可以为氧化铝、氧化硅、氮化硅或氮氧化硅中的至少一者。The passivation film layer 31 may adopt a single-layer structure or a multi-layer structure, and the material may be at least one of aluminum oxide, silicon oxide, silicon nitride or silicon oxynitride.

减反射膜层32位于基底10的第一侧F,也即位于太阳能电池100接收入射光的一面(称为正面或者受光面),在太阳能电池100正面起到减反射效果。减反射膜层32可以采用多层结构。多层结构的减反射膜层32中,各层的材料可以为氧化硅、氮化硅或者氮氧化硅。The anti-reflection film layer 32 is located on the first side F of the substrate 10, that is, on the side of the solar cell 100 that receives incident light (called the front side or the light-receiving side), and has an anti-reflection effect on the front side of the solar cell 100. The anti-reflection film layer 32 can adopt a multi-layer structure. In the anti-reflection film layer 32 of the multi-layer structure, the material of each layer can be silicon oxide, silicon nitride or silicon oxynitride.

钝化接触层60包括依次层叠在基底10的第二侧S的表面的隧穿氧化层61和多晶硅掺杂导电层62,隧穿氧化层61用于实现基底10的第二侧S的表面的界面钝化,起到化学钝化的效果。The passivation contact layer 60 includes a tunneling oxide layer 61 and a polysilicon doped conductive layer 62 sequentially stacked on the surface of the second side S of the substrate 10 . The tunneling oxide layer 61 is used to achieve interface passivation on the surface of the second side S of the substrate 10 , achieving a chemical passivation effect.

第二钝化层70层叠设置于钝化接触层60的背离基底10的表面,第二钝化层70同样可以采用单层或多层结构,第二钝化层70的材料可以为氧化硅、氮化硅或者氮氧化硅。可以减少太阳能电池100第二侧S表面对太阳光的反射率,提高对太阳光的吸收率,第二钝化层70同时起到了钝化和减反射的作用。The second passivation layer 70 is stacked on the surface of the passivation contact layer 60 away from the substrate 10. The second passivation layer 70 can also adopt a single-layer or multi-layer structure. The material of the second passivation layer 70 can be silicon oxide, silicon nitride or silicon oxynitride. The reflectivity of the second side S surface of the solar cell 100 to sunlight can be reduced, and the absorption rate of sunlight can be increased. The second passivation layer 70 plays the role of passivation and anti-reflection at the same time.

本申请实施例中,进一步地,参照图2、图3,隔离槽40设置在第一钝化层30背离基底10的表面,隔离槽40延伸至所述基底10。In the embodiment of the present application, further referring to FIG. 2 and FIG. 3 , the isolation trench 40 is disposed on a surface of the first passivation layer 30 away from the substrate 10 , and the isolation trench 40 extends to the substrate 10 .

通过设置隔离槽40,因此基底10可以从隔离槽40露出到外界,由于过渡电极90不与隔离槽40的侧槽壁接触,因此过渡电极90与将要形成第一电极50的第一预固化电极绝缘隔离。By providing the isolation groove 40 , the substrate 10 can be exposed to the outside through the isolation groove 40 . Since the transition electrode 90 does not contact the side groove wall of the isolation groove 40 , the transition electrode 90 is insulated and isolated from the first pre-cured electrode that will form the first electrode 50 .

在形成第一电极50、第二电极80的过程中,若采用激光诱导烧结方式形成第一电极50时,可以通过第一预固化电极和过渡电极90来施加反向偏置电压,并进行激光扫描,以将第一预固化电极激光诱导烧结为第一电极50。在此过程中,仅对第一侧F表面的第一预固化电极进行激光诱导烧结,使其形成第一电极50,并不会对第二侧S的表面的第二电极80进行激光处理,避免太阳能电池100第二侧S的表面的第二电极80发生过烧结,从而降低第二侧S的表面的复合损失,提高太阳能电池100的效率。In the process of forming the first electrode 50 and the second electrode 80, if the first electrode 50 is formed by laser induced sintering, a reverse bias voltage may be applied through the first pre-cured electrode and the transition electrode 90, and laser scanning may be performed to laser-induced sinter the first pre-cured electrode into the first electrode 50. In this process, only the first pre-cured electrode on the surface of the first side F is laser induced sintered to form the first electrode 50, and the second electrode 80 on the surface of the second side S is not laser processed, so as to avoid over-sintering of the second electrode 80 on the surface of the second side S of the solar cell 100, thereby reducing the recombination loss on the surface of the second side S and improving the efficiency of the solar cell 100.

需要注意的是,在其他一些实施例中,在激光诱导烧结完毕之后,还会对太阳能电池进行切割,将其切分为两个、三个甚至更多数量。It should be noted that in some other embodiments, after the laser induced sintering is completed, the solar cell is cut into two, three or even more quantities.

若需要进行切割,可以沿着隔离槽40的方向进行切割。当然,切割后的太阳能电池100上,该隔离槽40将会被去除。If cutting is required, the cutting can be performed along the direction of the isolation groove 40. Of course, the isolation groove 40 will be removed from the solar cell 100 after cutting.

进一步地,隔离槽40的宽度为:0.5mm-1mm,过渡电极浆料(过渡电极90)与隔离槽40的槽壁之间的间距大于50μm。Furthermore, the width of the isolation groove 40 is 0.5 mm-1 mm, and the distance between the transition electrode slurry (transition electrode 90 ) and the groove wall of the isolation groove 40 is greater than 50 μm.

如此设置,使得过渡电极浆料与隔离槽40之间具有足够的绝缘距离,保证金属浆料与过渡电极之间能够绝缘隔离。Such arrangement ensures that there is a sufficient insulation distance between the transition electrode slurry and the isolation groove 40 , thereby ensuring that the metal slurry and the transition electrode can be insulated and isolated.

另外,隔离槽40的宽度大于1mm时,会浪费太阳能电池100表面的吸光面积,隔离槽40的宽度小于0.5mm时,会无法与外置电源的探针良好接触。在隔离槽40的宽度为0.5mm-1mm时,既不会影响太阳能电池100的效率,又能够保证过渡电极90与探针的良好接触。In addition, when the width of the isolation groove 40 is greater than 1 mm, the light absorption area on the surface of the solar cell 100 will be wasted, and when the width of the isolation groove 40 is less than 0.5 mm, it will not be able to make good contact with the probe of the external power supply. When the width of the isolation groove 40 is 0.5 mm-1 mm, it will not affect the efficiency of the solar cell 100, and can ensure good contact between the transition electrode 90 and the probe.

本申请实施例中,继续参照图2和图3,第一电极50包括多个沿第一方向Y间隔布置的第一电极图案51,隔离槽40沿第一方向Y延伸,并位于基底10的第二方向R两端之间。第一方向Y、第二方向R与基底10的厚度方向两两垂直。In the embodiment of the present application, referring to FIG. 2 and FIG. 3 , the first electrode 50 includes a plurality of first electrode patterns 51 arranged at intervals along the first direction Y, and the isolation groove 40 extends along the first direction Y and is located between two ends of the substrate 10 in the second direction R. The first direction Y and the second direction R are perpendicular to the thickness direction of the substrate 10 in pairs.

进一步地,隔离槽40的数量为至少一个,例如,可以如图2所示那样,只设置一个。或者隔离槽40的数量也可以为至少两个,当至少两个隔离槽40均沿第一方向Y延伸时,各隔离槽40可以沿第二方向R间隔布置。Further, the number of the isolation groove 40 is at least one, for example, only one can be provided as shown in FIG2 . Alternatively, the number of the isolation groove 40 can also be at least two, and when at least two isolation grooves 40 extend along the first direction Y, the isolation grooves 40 can be arranged along the second direction R at intervals.

在其他一些实施例中,也可以是隔离槽40沿第二方向R延伸,并位于基底10的第一方向Y两端之间。In some other embodiments, the isolation trench 40 may extend along the second direction R and be located between two ends of the substrate 10 in the first direction Y.

此时,隔离槽40的数量可以为一个。或者隔离槽40的数量为至少两个时,若两个隔离槽40均沿第二方向R延伸时,各隔离槽40沿第一方向Y间隔布置。At this time, the number of the isolation trench 40 may be one. Alternatively, when the number of the isolation trench 40 is at least two, if both isolation trenches 40 extend along the second direction R, the isolation trenches 40 are arranged along the first direction Y at intervals.

在其他一些实施例中,也可以是隔离槽40位于太阳能电池100的侧端部,例如,隔离槽40沿第一方向Y延伸的情况下,可以位于基底10的第二方向R端部。或者,在隔离槽40沿第二方向S延伸的情况下,可以位于基底10的第一方向Y的端部。In some other embodiments, the isolation trench 40 may be located at a side end of the solar cell 100. For example, when the isolation trench 40 extends along the first direction Y, it may be located at an end of the substrate 10 in the second direction R. Alternatively, when the isolation trench 40 extends along the second direction S, it may be located at an end of the substrate 10 in the first direction Y.

本申请实施例中,隔离槽40沿第一方向Y延伸时,其延伸长度可以与基底10沿第一方向Y的尺寸相同。隔离槽40沿第二方向R延伸时,其延伸长度可以与基底10沿第二方向R的尺寸相同。In the embodiment of the present application, when the isolation trench 40 extends along the first direction Y, its extension length may be the same as the size of the substrate 10 along the first direction Y. When the isolation trench 40 extends along the second direction R, its extension length may be the same as the size of the substrate 10 along the second direction R.

图4为本申请实施例提供的太阳能电池的制作方法的流程示意图,图5为本申请实施例提供的太阳能电池的制作方法中电池主体的局部结构示意图。FIG4 is a schematic diagram of a flow chart of a method for manufacturing a solar cell provided in an embodiment of the present application, and FIG5 is a schematic diagram of a partial structure of a solar cell body in the method for manufacturing a solar cell provided in an embodiment of the present application.

参照图4、图5,本申请实施例第二方面提供一种太阳能电池的制作方法,该方法用于制作前述的太阳能电池100,该方法包括:4 and 5 , a second aspect of an embodiment of the present application provides a method for manufacturing a solar cell. The method is used to manufacture the aforementioned solar cell 100. The method includes:

S10、提供一电池主体,电池主体的第一侧的表面和第二侧的表面均形成有图案化的金属浆料,电池主体的第一侧的表面还设有延伸至电池主体的基底的隔离槽,隔离槽底部形成有与隔离槽的侧壁绝缘隔离的过渡电极浆料,第一侧和第二侧相对布置。S10. Provide a battery body, wherein the surfaces of the first side and the second side of the battery body are both formed with patterned metal paste, the surface of the first side of the battery body is also provided with an isolation groove extending to the base of the battery body, and a transition electrode paste insulated and isolated from the side wall of the isolation groove is formed at the bottom of the isolation groove, and the first side and the second side are arranged opposite to each other.

S20、对电池主体进行预烧结,使电池主体的第一侧的表面和第二侧的表面的金属浆料分别形成第一预固化电极和第二电极,并使过渡电极浆料形成过渡电极。S20, pre-sintering the battery body so that the metal pastes on the surface of the first side and the surface of the second side of the battery body form a first pre-cured electrode and a second electrode respectively, and the transition electrode paste forms a transition electrode.

S30、通过第一预固化电极和过渡电极向电池主体施加反向偏置电压,并对电池主体的第一侧的表面进行激光扫描,以将第一预固化电极激光诱导烧结为第一电极。S30, applying a reverse bias voltage to the battery body through the first pre-cured electrode and the transition electrode, and performing laser scanning on the surface of the first side of the battery body to laser-induced sintering of the first pre-cured electrode into a first electrode.

由于电池主体101的第一侧F的表面和第二侧S的表面均形成有图案化的金属浆料102,在对电池主体101进行预烧结的过程中,使电池主体101的第一侧F的表面和第二侧S的表面的金属浆料102分别形成第一预固化电极和第二电极80。Since patterned metal paste 102 is formed on the surface of the first side F and the surface of the second side S of the battery body 101, during the pre-sintering process of the battery body 101, the metal paste 102 on the surface of the first side F and the surface of the second side S of the battery body 101 forms a first pre-cured electrode and a second electrode 80 respectively.

由于电池主体101的第一侧F的表面设有延伸至电池主体101的基底10的隔离槽40,因此基底10可以从隔离槽40露出到外界,而隔离槽40底部形成有与隔离槽40的侧壁绝缘隔离的过渡电极浆料103,这里,可以是过渡电极浆料103不与隔离槽40的侧槽壁接触,而图案化的金属浆料102形成在电池主体101的第一侧F的表面,因此在预烧结后,形成的第一预固化电极也会与过渡电极90绝缘隔离。Since the surface of the first side F of the battery body 101 is provided with an isolation groove 40 extending to the substrate 10 of the battery body 101, the substrate 10 can be exposed to the outside from the isolation groove 40, and a transition electrode slurry 103 insulated and isolated from the side wall of the isolation groove 40 is formed at the bottom of the isolation groove 40. Here, the transition electrode slurry 103 does not contact the side groove wall of the isolation groove 40, and the patterned metal paste 102 is formed on the surface of the first side F of the battery body 101. Therefore, after pre-sintering, the formed first pre-cured electrode will also be insulated and isolated from the transition electrode 90.

通过第一预固化电极和过渡电极90向电池主体101施加反向偏置电压,并对电池主体101的第一侧F的表面进行激光扫描,以将第一预固化电极激光诱导烧结为第一电极50。在此过程中,仅对电池主体101的第一侧F的表面的第一预固化电极进行激光诱导烧结,使其形成第一电极50,并不会对电池主体101的第二侧S的表面进行激光处理,即第二电极80只通过对第二侧S的表面的金属浆料102进行预烧结即可形成,避免太阳能电池100第二侧S的表面的电极发生过烧结,从而降低第二侧S的表面的复合损失,提高太阳能电池100的效率。A reverse bias voltage is applied to the battery body 101 through the first pre-cured electrode and the transition electrode 90, and the surface of the first side F of the battery body 101 is laser scanned to laser-induce sintering of the first pre-cured electrode into the first electrode 50. In this process, only the first pre-cured electrode on the surface of the first side F of the battery body 101 is laser-induced sintered to form the first electrode 50, and the surface of the second side S of the battery body 101 is not laser-processed, that is, the second electrode 80 can be formed only by pre-sintering the metal paste 102 on the surface of the second side S, thereby avoiding over-sintering of the electrode on the surface of the second side S of the solar cell 100, thereby reducing the recombination loss on the surface of the second side S and improving the efficiency of the solar cell 100.

本申请实施例中,步骤S10中,提供一电池主体101的步骤具体包括:In the embodiment of the present application, in step S10, the step of providing a battery body 101 specifically includes:

提供一个第一侧F的表面依次层叠设置有第一掺杂导电层20和第一钝化层30、第二侧S的表面依次层叠设置有钝化接触层60和第二钝化层70的基底10,第一掺杂导电层20的掺杂类型与基底10相反。A substrate 10 is provided, wherein a first doped conductive layer 20 and a first passivation layer 30 are sequentially stacked on a surface of a first side F, and a passivation contact layer 60 and a second passivation layer 70 are sequentially stacked on a surface of a second side S. The doping type of the first doped conductive layer 20 is opposite to that of the substrate 10.

在第一钝化层30上开设隔离槽40,并使基底10自隔离槽40露出。例如可以是将第一钝化层30和第一掺杂导电层20的部分区域刻蚀去除,将基底10露出而形成隔离槽40。An isolation trench 40 is formed on the first passivation layer 30, and the substrate 10 is exposed from the isolation trench 40. For example, the first passivation layer 30 and a portion of the first doped conductive layer 20 are etched away to expose the substrate 10 to form the isolation trench 40.

在基底10自隔离槽40露出的部分上形成过渡电极浆料103,并分别在第一钝化层30和第二钝化层70的背离基底10的表面形成金属浆料102。A transition electrode paste 103 is formed on the portion of the substrate 10 exposed from the isolation trench 40 , and a metal paste 102 is formed on the surfaces of the first passivation layer 30 and the second passivation layer 70 facing away from the substrate 10 .

需要注意的是,这里的过渡电极浆料103需要选择非烧穿型,以免在预烧结过程中对基底10的表面造成影响。金属浆料102选取烧穿型浆料。另外,此处对形成过渡电极浆料103以及在第一钝化层30上和第二钝化层70上形成金属浆料102的顺序不加以限制,可以根据实际需要选择。It should be noted that the transition electrode slurry 103 here needs to be a non-burn-through type to avoid affecting the surface of the substrate 10 during the pre-sintering process. The metal slurry 102 is a burn-through type slurry. In addition, the order of forming the transition electrode slurry 103 and forming the metal slurry 102 on the first passivation layer 30 and the second passivation layer 70 is not limited here, and can be selected according to actual needs.

另外,在一些实施例中,可以是在基底10的第一侧F的表面形成第一掺杂导电层20,在基底10的第二侧S的表面形成钝化接触层60,在第一掺杂导电层20背离基底10的表面形成第一钝化层30,在钝化接触层60背离基底10的表面形成第二钝化层70,第一掺杂导电层20的掺杂类型与基底10相反,使二者形成PN结。In addition, in some embodiments, a first doped conductive layer 20 may be formed on the surface of the first side F of the substrate 10, a passivation contact layer 60 may be formed on the surface of the second side S of the substrate 10, a first passivation layer 30 may be formed on the surface of the first doped conductive layer 20 facing away from the substrate 10, and a second passivation layer 70 may be formed on the surface of the passivation contact layer 60 facing away from the substrate 10. The doping type of the first doped conductive layer 20 is opposite to that of the substrate 10, so that the two form a PN junction.

另外,开设隔离槽40的方法可以是激光刻蚀。In addition, the isolation groove 40 may be formed by laser etching.

本申请实施例中,在第一钝化层30上形成金属浆料102的步骤,与在基底10自隔离槽40露出的部分上形成过渡电极浆料103的步骤在同一个工艺制程中进行。In the embodiment of the present application, the step of forming the metal paste 102 on the first passivation layer 30 and the step of forming the transition electrode paste 103 on the portion of the substrate 10 exposed from the isolation trench 40 are performed in the same process.

第一电极50可以包括主栅和细栅,具体实现时,可以先在第二钝化层70上形成金属浆料102,之后,第一钝化层30上形成的金属浆料102中与第一电极50的主栅对应的那部分金属浆料102可以与过渡电极浆料103在同一个工艺制程中进行印刷,最后再形成第一钝化层30的金属浆料102中与第一电极50的细栅对应的那部分金属浆料102。如此设置,在形成第一钝化层30的金属浆料102的同时,就能够顺便形成过渡电极浆料103,能够节省工序,降低成本。The first electrode 50 may include a main grid and a fine grid. In specific implementation, the metal paste 102 may be formed on the second passivation layer 70 first, and then the portion of the metal paste 102 formed on the first passivation layer 30 corresponding to the main grid of the first electrode 50 may be printed with the transition electrode paste 103 in the same process, and finally the portion of the metal paste 102 of the first passivation layer 30 corresponding to the fine grid of the first electrode 50 is formed. In this way, the transition electrode paste 103 can be formed at the same time as the metal paste 102 of the first passivation layer 30 is formed, which can save processes and reduce costs.

另外,在第二钝化层70上形成金属浆料102,包括先形成第二钝化层70的金属浆料102中与第二电极80的主栅对应的那部分金属浆料102,再形成第二钝化层70的金属浆料102中与第二电极80的细栅对应的那部分金属浆料102。In addition, a metal paste 102 is formed on the second passivation layer 70, including first forming a portion of the metal paste 102 of the second passivation layer 70 corresponding to the main gate of the second electrode 80, and then forming a portion of the metal paste 102 of the second passivation layer 70 corresponding to the fine gate of the second electrode 80.

本申请实施例中,隔离槽40的宽度为:0.5m-1mm,过渡电极浆料103与隔离槽40的槽壁之间的间距大于50μm。In the embodiment of the present application, the width of the isolation groove 40 is 0.5 μm-1 mm, and the distance between the transition electrode slurry 103 and the groove wall of the isolation groove 40 is greater than 50 μm.

如此设置,使得过渡电极浆料103与隔离槽40之间具有足够的绝缘距离,保证金属浆料102与过渡电极浆料103之间能够绝缘隔离。Such configuration ensures that there is a sufficient insulation distance between the transition electrode slurry 103 and the isolation groove 40 , thereby ensuring that the metal slurry 102 and the transition electrode slurry 103 can be insulated and isolated.

另外,隔离槽40的宽度大于1mm时,会浪费太阳能电池100表面的吸光面积,隔离槽40的宽度小于0.5mm时,会无法与外置电源的探针良好接触。在隔离槽40的宽度为0.5m-1mm时,既不会影响太阳能电池100的效率,又能够保证过渡电极90与探针的良好接触。In addition, when the width of the isolation groove 40 is greater than 1 mm, the light absorption area on the surface of the solar cell 100 will be wasted, and when the width of the isolation groove 40 is less than 0.5 mm, it will not be able to make good contact with the probe of the external power supply. When the width of the isolation groove 40 is 0.5 mm-1 mm, it will not affect the efficiency of the solar cell 100, and can ensure good contact between the transition electrode 90 and the probe.

本申请实施例中,电池主体101的第一侧F的表面设置的金属浆料102包括多个沿第一方向Y间隔布置的金属图案,隔离槽40沿第一方向Y延伸,并位于电池主体101的第二方向R两端之间。In the embodiment of the present application, the metal paste 102 disposed on the surface of the first side F of the battery body 101 includes a plurality of metal patterns arranged at intervals along the first direction Y. The isolation groove 40 extends along the first direction Y and is located between the two ends of the battery body 101 in the second direction R.

如此设置,最后的切半阶段,可以沿着隔离槽40的方向进行切半,能够防止太阳能电池100在切半过程中发生应力断裂。With such arrangement, the final half-cutting stage can be performed along the direction of the isolation groove 40 , which can prevent the solar cell 100 from stress fracture during the half-cutting process.

当然,隔离槽40的数量可以根据需要设置,例如可以设置有两条,两条隔离槽40可以在第二方向R间隔布置,例如,两个隔离槽40可以将电池主体101均分为三份。Of course, the number of the isolation grooves 40 can be set as needed, for example, two isolation grooves 40 can be provided, and the two isolation grooves 40 can be arranged at intervals in the second direction R. For example, the two isolation grooves 40 can divide the battery body 101 into three equal parts.

另外,隔离槽40的长度可以与电池主体101的第一方向Y尺寸相同,即隔离槽40贯穿电池主体101的第一方向Y两个侧面。In addition, the length of the isolation groove 40 may be the same as the dimension of the battery body 101 in the first direction Y, that is, the isolation groove 40 passes through two side surfaces of the battery body 101 in the first direction Y.

另外,隔离槽40也可以沿着第二方向R延伸设置,并位于电池主体101的第一方向Y两端之间。In addition, the isolation groove 40 may also be extended along the second direction R and located between two ends of the battery body 101 in the first direction Y.

此时,隔离槽40的数量可以为一个。或者隔离槽40的数量为至少两个时,若两个隔离槽40均沿第二方向R延伸时,各隔离槽40沿第一方向Y间隔布置。At this time, the number of the isolation trench 40 may be one. Alternatively, when the number of the isolation trench 40 is at least two, if both isolation trenches 40 extend along the second direction R, the isolation trenches 40 are arranged along the first direction Y at intervals.

在其他一些实施例中,也可以是隔离槽40位于电池主体101的侧端部,例如,隔离槽40沿第一方向Y延伸的情况下,可以位于基底10的第二方向R端部。或者,在隔离槽40沿第二方向S延伸的情况下,可以位于基底10的第一方向Y的端部。另外,隔离槽40的其他特征在前述太阳能电池100结构部分进行过详细描述,此处不再赘述。In some other embodiments, the isolation groove 40 may be located at the side end of the battery body 101. For example, when the isolation groove 40 extends along the first direction Y, it may be located at the end of the substrate 10 in the second direction R. Alternatively, when the isolation groove 40 extends along the second direction S, it may be located at the end of the substrate 10 in the first direction Y. In addition, other features of the isolation groove 40 have been described in detail in the aforementioned structure of the solar cell 100, and will not be repeated here.

本申请实施例中,步骤S20中,对电池主体101进行预烧结的步骤中,对电池主体101的第一侧F的表面进行烧结的第一峰值温度T1满足:700℃≤T1≤750℃,对电池主体101的第二侧S的表面进行烧结的第二峰值温度T2满足:650℃≤T2≤700℃。In the embodiment of the present application, in step S20, in the step of pre-sintering the battery body 101, the first peak temperature T1 of sintering the surface of the first side F of the battery body 101 satisfies: 700℃≤T1≤750℃, and the second peak temperature T2 of sintering the surface of the second side S of the battery body 101 satisfies: 650℃≤T2≤700℃.

这里,预烧结时第一峰值温度和第二峰值温度都比现有技术低大约50℃-150℃,能够有效防止第二电极80的过烧。Here, the first peak temperature and the second peak temperature during pre-sintering are both about 50° C.-150° C. lower than those in the prior art, which can effectively prevent the second electrode 80 from being over-burned.

进一步地,第一峰值温度T1满足:600℃≤T1<700℃,第一峰值温度的持续时长为2s-30s,对电池主体101的第二侧S的表面进行烧结的第二峰值温度T2满足:550℃≤T2<650℃,第二峰值温度的持续时长为5-10s;降温时间范围是2s-5s。Furthermore, the first peak temperature T1 satisfies: 600°C ≤ T1 < 700°C, the duration of the first peak temperature is 2s-30s, the second peak temperature T2 for sintering the surface of the second side S of the battery body 101 satisfies: 550°C ≤ T2 < 650°C, the duration of the second peak temperature is 5-10s; the cooling time range is 2s-5s.

如此设置,在金属浆料102被预烧的过程中,在峰值温度后降温速度较快,能够控制部分初始接触点的过度生长,避免过烧。另一方面,由于在较低的预烧温度下进行预烧,并且采用较长时间的峰值温度保持时间,使得第一预固化电极和第一掺杂导电层20的初始接触点的分布更加均匀,能够提高第一侧F的激光诱导烧结的工艺窗口及稳定性。With such a configuration, during the pre-firing process of the metal paste 102, the cooling speed is fast after the peak temperature, which can control the overgrowth of some initial contact points and avoid over-firing. On the other hand, since the pre-firing is performed at a lower pre-firing temperature and a longer peak temperature holding time is used, the distribution of the initial contact points of the first pre-cured electrode and the first doped conductive layer 20 is more uniform, which can improve the process window and stability of the laser induced sintering of the first side F.

另外,如此设置也使得太阳能电池100能同时获得更高的Voc值和更高的Isc值以及较低的接触电阻率,从而显著提升太阳能电池的转换效率。In addition, such a configuration also enables the solar cell 100 to simultaneously obtain a higher Voc value and a higher Isc value as well as a lower contact resistivity, thereby significantly improving the conversion efficiency of the solar cell.

本申请实施例中,第一侧F的表面的金属浆料102、第二侧S的表面的金属浆料的至少一者包含:银粉、铝粉、玻璃粉、添加剂及有机载体,以该金属浆料(是指第一侧F或者第二侧S的表面的金属浆料)总重量为100%计,铝粉的重量百分含量为0%-0.5%;玻璃粉的重量百分含量为3%-5%;In the embodiment of the present application, at least one of the metal paste 102 on the surface of the first side F and the metal paste on the surface of the second side S comprises: silver powder, aluminum powder, glass powder, additives and an organic carrier. With the total weight of the metal paste (referring to the metal paste on the surface of the first side F or the second side S) as 100%, the weight percentage of the aluminum powder is 0%-0.5%; the weight percentage of the glass powder is 3%-5%;

玻璃粉中铅的重量百分占比为30%-40%。The weight percentage of lead in glass powder is 30%-40%.

可以理解的是,此处,第一侧F的表面的金属浆料102、第二侧S的表面的金属浆料的至少一者设置成如上配比,是指,第一侧F的表面的金属浆料可以采用上述配比,或者第二侧S的表面的金属浆料可以采用上述配比,或者第一侧F的表面的金属浆料和第二侧S的表面的金属浆料均可以采用上述配比。It can be understood that, here, at least one of the metal slurry 102 on the surface of the first side F and the metal slurry on the surface of the second side S is set to the above ratio, which means that the metal slurry on the surface of the first side F can adopt the above ratio, or the metal slurry on the surface of the second side S can adopt the above ratio, or the metal slurry on the surface of the first side F and the metal slurry on the surface of the second side S can both adopt the above ratio.

如此设置,使得第一侧F的表面的金属浆料和/或第一侧F的表面的金属浆料具有较低的腐蚀性,也能够避免第一电极50和/或第二电极80的过烧结情况。具体实现时,如前所述,第一侧F的表面的金属浆料可以包括对应于第一电极50的主栅的部分以及对应于第一电极50的副栅的部分,优选对应于第一电极50的副栅的部分采用上述的配比的金属浆料。同样地,第二侧S的表面的金属浆料可以包括对应于第二电极80的主栅的部分以及对应于第二电极80的副栅的部分,优选对应于第二电极80的副栅的部分采用上述的配比的金属浆料。Such arrangement makes the metal paste on the surface of the first side F and/or the metal paste on the surface of the first side F have low corrosivity, and can also avoid over-sintering of the first electrode 50 and/or the second electrode 80. In specific implementation, as mentioned above, the metal paste on the surface of the first side F may include a portion corresponding to the main grid of the first electrode 50 and a portion corresponding to the sub-grid of the first electrode 50, and preferably the portion corresponding to the sub-grid of the first electrode 50 adopts the metal paste of the above-mentioned proportion. Similarly, the metal paste on the surface of the second side S may include a portion corresponding to the main grid of the second electrode 80 and a portion corresponding to the sub-grid of the second electrode 80, and preferably the portion corresponding to the sub-grid of the second electrode 80 adopts the metal paste of the above-mentioned proportion.

另外,上述调整可以调整玻璃粉的玻璃相变温度及熔银能力,改善金属浆料102对钝化层的腐蚀稳定性和均匀性,使得银硅界面初始接触点的尺寸大小和分布更为均匀,有利于后续激光诱导烧结过程中接触点的均匀生长,使得第一电极50与第一掺杂导电层20的接触电阻更小,欧姆接触更好,还能获得更低的金属接触复合,同时也提高了第一电极50的耐酸性,降低了太阳能电池后续使用中的可靠性风险。In addition, the above adjustment can adjust the glass phase transition temperature and silver melting ability of the glass powder, improve the corrosion stability and uniformity of the metal slurry 102 on the passivation layer, and make the size and distribution of the initial contact points of the silver-silicon interface more uniform, which is beneficial to the uniform growth of the contact points during the subsequent laser induced sintering process, so that the contact resistance between the first electrode 50 and the first doped conductive layer 20 is smaller, the ohmic contact is better, and a lower metal contact composite can be obtained. At the same time, the acid resistance of the first electrode 50 is also improved, and the reliability risk of the solar cell in the subsequent use is reduced.

本申请实施例中,步骤S30中,通过第一预固化电极和过渡电极90向电池主体101施加反向偏置电压的步骤包括:In the embodiment of the present application, in step S30, the step of applying a reverse bias voltage to the battery body 101 through the first pre-cured electrode and the transition electrode 90 includes:

将外置电源的第一外置电极的探针抵压于第一预固化电极,将外置电源的第二外置电极的探针抵压于过渡电极90,第一外置电极和第二外置电极的极性相反。The probe of the first external electrode of the external power source is pressed against the first pre-curing electrode, and the probe of the second external electrode of the external power source is pressed against the transition electrode 90 , and the polarities of the first external electrode and the second external electrode are opposite.

具体实现时,若基底10是N型基底,第一掺杂导电层20是P型,则需要将第一外置电极设置为正电极,将第二外置电极设置为负电极,以实现对电池主体101施加反向偏置电压的目的。In specific implementation, if the substrate 10 is an N-type substrate and the first doped conductive layer 20 is a P-type, it is necessary to set the first external electrode as a positive electrode and the second external electrode as a negative electrode to achieve the purpose of applying a reverse bias voltage to the battery body 101.

本申请实施例中,如前所述,参照图5,隔离槽40的数量为至少一个,且均沿着第一方向Y延伸,隔离槽40的数量为至少两个时,至少两个隔离槽40沿第二方向R间隔布置,隔离槽40将电池主体101的第一侧F的表面沿第二方向R分隔为至少两个子区域104。In the embodiment of the present application, as described above, referring to Figure 5, the number of isolation grooves 40 is at least one, and all extend along the first direction Y. When the number of isolation grooves 40 is at least two, at least two isolation grooves 40 are arranged at intervals along the second direction R, and the isolation grooves 40 separate the surface of the first side F of the battery body 101 into at least two sub-areas 104 along the second direction R.

步骤S30中,将第一预固化电极激光诱导烧结为第一电极50的步骤具体包括:In step S30, the step of laser-induced sintering the first pre-cured electrode into the first electrode 50 specifically includes:

沿第二方向R,依次对各子区域104中的第一预固化电极进行激光诱导烧结。Along the second direction R, laser induced sintering is performed on the first pre-cured electrodes in each sub-region 104 in sequence.

具体实现时,对任一子区域104中的第一预固化电极进行激光诱导烧结的步骤包括:In a specific implementation, the step of laser-induced sintering of the first pre-cured electrode in any sub-region 104 includes:

将该子区域104中的第一预固化电极和与该子区域104相邻的过渡电极90分别与外置电源的第一外置电极和第二外置电极电连接,并对该子区域104进行激光扫描,第一外置电极和第二外置电极的极性相反。The first pre-curing electrode in the sub-region 104 and the transition electrode 90 adjacent to the sub-region 104 are electrically connected to the first external electrode and the second external electrode of the external power supply respectively, and the sub-region 104 is laser scanned, and the polarities of the first external electrode and the second external electrode are opposite.

如此,可以对每个子区域中的第一预固化电极都进行激光诱导烧结。In this way, the first pre-cured electrode in each sub-region may be laser induced sintered.

进一步地,通过第一预固化电极和过渡电极90向电池主体101施加反向偏置电压,并对电池主体101的第一侧F的表面进行激光扫描的步骤中:Further, in the step of applying a reverse bias voltage to the battery body 101 through the first pre-curing electrode and the transition electrode 90, and performing laser scanning on the surface of the first side F of the battery body 101:

激光的波长范围是532nm-1064nm,激光扫描的功率范围是60W-100W,反向偏置电压是10V-20V。The wavelength range of the laser is 532nm-1064nm, the power range of the laser scanning is 60W-100W, and the reverse bias voltage is 10V-20V.

在其他一些实施例中,对偏置电压也可以为12V-18V(含端点值),激光扫描的功率范围也可以是70W-90W(含端点值)。In some other embodiments, the bias voltage may also be 12V-18V (including the endpoint values), and the power range of the laser scanning may also be 70W-90W (including the endpoint values).

进一步地,将第一预固化电极激光诱导烧结为第一电极50的步骤之后还包括:Furthermore, after the step of laser-induced sintering the first pre-cured electrode into the first electrode 50, the following steps are further included:

对电池主体101进行退火处理。其中,退火过程中,温度范围是100℃-300℃,退火时长是5min-15min。The battery body 101 is subjected to annealing treatment. During the annealing process, the temperature range is 100° C.-300° C., and the annealing time is 5 min-15 min.

本申请实施例中,将第一预固化电极激光诱导烧结为第一电极50的步骤之后还包括:In the embodiment of the present application, after the step of laser-induced sintering the first pre-cured electrode into the first electrode 50, the following steps are further included:

沿着隔离槽40的延伸方向将电池主体101切断,以形成至少两个太阳能电池100。The cell body 101 is cut along the extending direction of the isolation groove 40 to form at least two solar cells 100 .

如此,可以利用防止电池主体101的切割过程中发生应力断裂。而在隔离槽40的数量为多个时,可以将隔离槽40的位置设置在将要进行切割的位置处,以便于将电池主体101切割为需要的数量。In this way, stress fracture can be prevented from occurring during the cutting process of the battery body 101. When there are multiple separation grooves 40, the separation grooves 40 can be set at the positions where cutting is to be performed, so as to cut the battery body 101 into the required number.

当然,在隔离槽40形成在电池主体101的端部的情况下,无需进行切割。Of course, in the case where the separation groove 40 is formed at the end of the battery body 101, no cutting is required.

本申请实施例中,由于第一电极50的形成使用了激光诱导电极烧结工艺,并且在太阳能电池100的第一侧F的表面使用低腐蚀性的银浆料,并在低于传统烧结温度下进行预烧结,之后对正面的第一预固化电极进行激光诱导烧结工艺处理,使用激光对第一侧F的表面进行扫描,激发电荷载流子,同时施加不同强度的偏置电压,因在第一预固化电极下表面的金属与第一掺杂导电层20之间产生高密度局部电流并导致对应位置发热,引发金属与基底10的互相扩散发生烧结,因此也会显著降低形成的第一电极50的接触电阻。In the embodiment of the present application, since the first electrode 50 is formed using a laser induced electrode sintering process, and a low-corrosive silver paste is used on the surface of the first side F of the solar cell 100, and pre-sintering is performed at a temperature lower than the traditional sintering temperature, the first pre-cured electrode on the front side is then subjected to a laser induced sintering process, and a laser is used to scan the surface of the first side F to excite charge carriers, while bias voltages of different intensities are applied. A high-density local current is generated between the metal on the lower surface of the first pre-cured electrode and the first doped conductive layer 20, causing heat to be generated at the corresponding position, thereby inducing mutual diffusion and sintering of the metal and the substrate 10, thereby significantly reducing the contact resistance of the formed first electrode 50.

另外,由于采用了单面激光诱导烧结处理,在保证了第一电极50的接触性能的同时,获得最低的电极金属复合损失。而在预烧结过程中降低了峰值温度并在激光诱导烧结中,使银硅互扩散形成接触的过程中缩短时间,降低银铝钉刺对第一掺杂导电层20的破坏以降低金属接触复合。In addition, due to the single-sided laser induced sintering process, the contact performance of the first electrode 50 is guaranteed while the lowest electrode metal composite loss is obtained. The peak temperature is lowered during the pre-sintering process and the time for the silver-silicon interdiffusion to form contact is shortened during the laser induced sintering, thereby reducing the damage of the silver-aluminum nails to the first doped conductive layer 20 to reduce metal contact composite.

本申请实施例中,因不受激光高能量的制约,从而能够获得更高的Voc值和Isc值,并同时保持较低的电极接触电阻,提高较薄的多晶硅掺杂导电层的烧结工艺窗口及稳定性,从而更适用于100nm以下厚度的多晶硅掺杂导电层。In the embodiment of the present application, because it is not restricted by the high energy of the laser, it is possible to obtain higher Voc and Isc values, while maintaining a low electrode contact resistance, thereby improving the sintering process window and stability of the thinner polysilicon doped conductive layer, making it more suitable for polysilicon doped conductive layers with a thickness of less than 100 nm.

下面结合一个具体的实施例说明本申请实施例的太阳能电池的制作方法,该方法包括以下步骤:The following is a method for manufacturing a solar cell according to an embodiment of the present application, which comprises the following steps:

步骤B、在基底10的第一侧F的表面通过高温硼扩散工艺形成第一掺杂导电材料层,通过单面刻蚀去除基底10的侧面和第二侧S的表面的第一掺杂导电材料层和BSG,在基底的第一侧F的表面形成第一掺杂导电层20。Step B: forming a first doped conductive material layer on the surface of the first side F of the substrate 10 by a high-temperature boron diffusion process, removing the first doped conductive material layer and BSG on the side surface and the second side S of the substrate 10 by single-sided etching, and forming a first doped conductive layer 20 on the surface of the first side F of the substrate.

步骤C、在基底10的第二侧S的表面通过LPCVD工艺形成隧穿氧化层61及多晶硅掺杂导电层62,在第一掺杂导电层20上依次沉积氧化铝膜和氮化硅膜以形成第一钝化层30,并在多晶硅掺杂导电层62上沉积氮化硅膜作为第二钝化层70,多晶硅掺杂导电层62的厚度是50nm-100nm。Step C: forming a tunneling oxide layer 61 and a polysilicon doped conductive layer 62 on the surface of the second side S of the substrate 10 by an LPCVD process, depositing an aluminum oxide film and a silicon nitride film on the first doped conductive layer 20 in sequence to form a first passivation layer 30, and depositing a silicon nitride film on the polysilicon doped conductive layer 62 as a second passivation layer 70, the thickness of the polysilicon doped conductive layer 62 is 50nm-100nm.

步骤D、通过激光刻蚀工艺在第一钝化层30沿第二方向R的中间位置依次刻蚀掉第一钝化层30和第一掺杂导电层20的局部区域,形成一条1mm以下宽度的隔离槽40,因为隔离槽40的底部延伸到基底10,将N型基底露出至外界,也可以将隔离槽40称为N型隔离区。N型隔离区在第一钝化层30分隔出多个子区域104,在隔离槽40的底部印刷非烧穿型浆料作为过渡电极浆料103,过渡电极浆料与隔离槽40的侧壁具有间隔,以实现绝缘隔离。在第一钝化层30上对应各子区域104的位置,以及第二钝化层70上形成金属浆料102。第一钝化层30上的金属浆料102可以选择低腐蚀性的浆料,从而形成电池主体101。第一钝化层30上的金属浆料包含:银粉、铝粉、玻璃粉、添加剂及有机载体,以该金属浆料总重量为100%计,铝粉的重量百分含量为0%-0.5%;玻璃粉的重量百分含量为3%-5%,玻璃粉中铅的重量百分占比为30%-40%。Step D: The first passivation layer 30 and the local area of the first doped conductive layer 20 are sequentially etched away in the middle position of the first passivation layer 30 along the second direction R by a laser etching process to form an isolation groove 40 with a width of less than 1 mm. Since the bottom of the isolation groove 40 extends to the substrate 10, the N-type substrate is exposed to the outside, and the isolation groove 40 can also be called an N-type isolation area. The N-type isolation area separates a plurality of sub-areas 104 in the first passivation layer 30, and a non-burn-through paste is printed at the bottom of the isolation groove 40 as a transition electrode paste 103. The transition electrode paste is spaced from the sidewall of the isolation groove 40 to achieve insulation isolation. Metal paste 102 is formed on the first passivation layer 30 at positions corresponding to each sub-area 104, and on the second passivation layer 70. The metal paste 102 on the first passivation layer 30 can be a low-corrosive paste, thereby forming a battery body 101. The metal paste on the first passivation layer 30 includes: silver powder, aluminum powder, glass powder, additives and organic carriers. Taking the total weight of the metal paste as 100%, the weight percentage of aluminum powder is 0%-0.5%; the weight percentage of glass powder is 3%-5%, and the weight percentage of lead in the glass powder is 30%-40%.

步骤E、烘干,并在烧结炉中以较低的温度对电池主体101进行预烧结,对电池主体101的第一侧F的表面进行烧结的第一峰值温度T1满足:700℃≤T1≤750℃,对电池主体101的第二侧S的表面进行烧结的第二峰值温度T2满足:650℃≤T2≤700℃。预烧结后,电池主体101的第一侧F的金属浆料烧结为第一预固化电极,电池主体101的第二侧S的金属浆料烧结为第二电极80。Step E: drying, and pre-sintering the battery body 101 at a relatively low temperature in a sintering furnace, wherein the first peak temperature T1 of the surface of the first side F of the battery body 101 satisfies: 700° C. ≤ T1 ≤ 750° C., and the second peak temperature T2 of the surface of the second side S of the battery body 101 satisfies: 650° C. ≤ T2 ≤ 700° C. After pre-sintering, the metal paste on the first side F of the battery body 101 is sintered into a first pre-cured electrode, and the metal paste on the second side S of the battery body 101 is sintered into a second electrode 80.

步骤F、对电池主体101的第一侧F的表面,也即隔离槽40两侧的子区域104沿垂直于隔离槽40的方向(第二方向R)依次进行激光诱导烧结。具体地,以外置电源的第一外置电极的探针(正极)抵压于其中一个子区域104中的第一预固化电极,将外置电源的第二外置电极的探针(负极)抵压于与该子区域相邻的隔离槽40中的过渡电极90上,对电池主体施加10V-20V(含端点值)的偏置电压。对电池主体101的第一侧F的表面进行激光扫描,将第一预固化电极激光烧结为第一电极50。激光的波长范围是532nm-1064nm,激光扫描的功率范围是60W-100W(含端点值)。Step F, laser induced sintering is sequentially performed on the surface of the first side F of the battery body 101, that is, the sub-regions 104 on both sides of the isolation groove 40 along the direction perpendicular to the isolation groove 40 (the second direction R). Specifically, the probe (positive electrode) of the first external electrode of the external power supply is pressed against the first pre-cured electrode in one of the sub-regions 104, and the probe (negative electrode) of the second external electrode of the external power supply is pressed against the transition electrode 90 in the isolation groove 40 adjacent to the sub-region, and a bias voltage of 10V-20V (including the endpoint value) is applied to the battery body. The surface of the first side F of the battery body 101 is laser scanned, and the first pre-cured electrode is laser sintered into the first electrode 50. The wavelength range of the laser is 532nm-1064nm, and the power range of the laser scanning is 60W-100W (including the endpoint value).

在进行完该子区域104的激光诱导烧结处理后,继续对于该子区域104相邻的子区域进行相同的激光诱导烧结处理,直至所有子区域104中的第一预固化电极均形成第一电极50。After the laser induced sintering process is performed on the sub-region 104 , the same laser induced sintering process is continued to be performed on the sub-regions adjacent to the sub-region 104 until the first pre-cured electrodes in all the sub-regions 104 form the first electrodes 50 .

步骤G、将上述的电池主体101进行一定时长的低温热退火处理,其中退火处理的工艺温度范围是100℃-300℃;退火工艺时间范围是5min-15min,低温退火工艺能够进一步提升钝化性能。Step G: subjecting the battery body 101 to a low-temperature thermal annealing treatment for a certain period of time, wherein the annealing process temperature range is 100° C.-300° C.; the annealing process time range is 5 min-15 min. The low-temperature annealing process can further improve the passivation performance.

在其他一些实施例中,步骤F中,对电池主体施加的偏置电压也可以为12V-18V(含端点值),激光扫描的功率范围也可以是70W-90W(含端点值)。In some other embodiments, in step F, the bias voltage applied to the battery body may also be 12V-18V (including the endpoint values), and the power range of the laser scanning may also be 70W-90W (including the endpoint values).

对比例的太阳能电池的制作方法包括:The manufacturing method of the solar cell of the comparative example comprises:

步骤H、在基底的第一侧的表面通过高温硼扩散工艺形成第一掺杂导电材料层,通过单面刻蚀去除基底的侧面和背面的第一掺杂导电材料层和BSG,在基底的第一侧的表面形成第一掺杂导电层。Step H: forming a first doped conductive material layer on the surface of the first side of the substrate by a high-temperature boron diffusion process, removing the first doped conductive material layer and BSG on the side and back of the substrate by single-sided etching, and forming a first doped conductive layer on the surface of the first side of the substrate.

步骤I、在基底的第二侧的表面通过LPCVD工艺形成隧穿氧化层及多晶硅掺杂导电层,在第一掺杂导电层上依次沉积氧化铝膜和氮化硅膜以形成第一钝化层,并在多晶硅掺杂导电层上沉积氮化硅膜作为第二钝化层。Step I: forming a tunnel oxide layer and a polysilicon doped conductive layer on the surface of the second side of the substrate by an LPCVD process, depositing an aluminum oxide film and a silicon nitride film on the first doped conductive layer in sequence to form a first passivation layer, and depositing a silicon nitride film on the polysilicon doped conductive layer as a second passivation layer.

步骤J、在第一钝化层和第二钝化层的背离基底的表面分别印刷金属浆料,并烘干,再进行预烧结处理,对基底第一侧进行烧结的峰值温度T1满足:700℃≤T1≤750℃,对基底第二侧进行烧结的峰值温度T2满足:650℃≤T2≤700℃,将第一钝化层和第二钝化层的金属浆料分别烧结为预固化电极。Step J: Print metal paste on the surfaces of the first passivation layer and the second passivation layer facing away from the substrate respectively, dry them, and then perform pre-sintering treatment. The peak temperature T1 for sintering the first side of the substrate satisfies: 700℃≤T1≤750℃, and the peak temperature T2 for sintering the second side of the substrate satisfies: 650℃≤T2≤700℃. The metal pastes of the first passivation layer and the second passivation layer are respectively sintered into pre-cured electrodes.

步骤K、以外置电源的第一外置电极的探针(正极)抵压于第一钝化层上的预固化电极,将外置电源的第二外置电极的探针(负极)抵压于第二钝化层上的预固化电极,以电池主体施加10V-20V(含端点值)的偏置电压。对第一钝化层表面进行激光扫描,将第一钝化层和第二钝化层上的预固化电极烧结为最终状态的电极,其中激光器波长532nm-1064nm,其中处理正面电极的激光功率范围60W-100W(含端点值)。Step K: Press the probe (positive electrode) of the first external electrode of the external power supply against the precured electrode on the first passivation layer, press the probe (negative electrode) of the second external electrode of the external power supply against the precured electrode on the second passivation layer, and apply a bias voltage of 10V-20V (including the endpoint value) to the battery body. Perform laser scanning on the surface of the first passivation layer, and sinter the precured electrodes on the first passivation layer and the second passivation layer into the final state of the electrode, wherein the laser wavelength is 532nm-1064nm, and the laser power range for processing the front electrode is 60W-100W (including the endpoint value).

步骤L、进行低温热退火处理。Step L: performing low temperature thermal annealing.

将经过步骤B-步骤G制作而成的太阳能电池记作第一组太阳能电池,将经过对比例步骤H-步骤L制作而成的太阳能电池记作第二组太阳能电池,将第一组太阳能电池和第二组太阳能电池进行电池性能测试,并将测试结果记录在表一中。The solar cells manufactured through step B to step G are recorded as the first group of solar cells, and the solar cells manufactured through comparative example step H to step L are recorded as the second group of solar cells. The first group of solar cells and the second group of solar cells are subjected to battery performance tests, and the test results are recorded in Table 1.

其中,Eta为转换效率;Jsc为短路电流密度;Voc为开路电压;FF为填充因子。Among them, Eta is the conversion efficiency; Jsc is the short-circuit current density; Voc is the open-circuit voltage; FF is the fill factor.

表一Table 1

由表一中的实验结果可以看出,本申请实施例的方法制备的第一组太阳能电池与对比例的第二组太阳能电池相比,电池转换效率提升0.23%,短路电流密度升高0.09,电池开路电压提升0.0034V,填充因子提升约0.16%,由此可知,以本实施例的方法制作的第一组太阳能电池的效率较高。It can be seen from the experimental results in Table 1 that, compared with the second group of solar cells in the comparative example, the first group of solar cells prepared by the method of the embodiment of the present application has a cell conversion efficiency increased by 0.23%, a short-circuit current density increased by 0.09, a cell open-circuit voltage increased by 0.0034 V, and a fill factor increased by about 0.16%. It can be seen that the efficiency of the first group of solar cells prepared by the method of this embodiment is higher.

本申请实施例第三方面还提供一种光伏组件,包括至少一个电池串,电池串包括至少两个前述实施的太阳能电池100。各太阳能电池100之间可以通过串焊的方式连接在一起。The third aspect of the embodiment of the present application further provides a photovoltaic module, comprising at least one battery string, wherein the battery string comprises at least two aforementioned solar cells 100. The solar cells 100 can be connected together by serial welding.

本申请实施例第四方面还提供一种光伏系统,包括上述的光伏组件。A fourth aspect of the embodiments of the present application further provides a photovoltaic system, comprising the above-mentioned photovoltaic component.

光伏系统可应用在光伏电站中,例如地面电站、屋顶电站、水面电站等,也可应用在利用太阳能进行发电的设备或者装置上,例如用户太阳能电源、太阳能路灯、太阳能汽车、太阳能建筑等等。当然,可以理解的是,光伏系统的应用场景不限于此,也即是说,光伏系统可应用在需要采用太阳能进行发电的所有领域中。以光伏发电系统网为例,光伏系统可包括光伏阵列、汇流箱和逆变器,光伏阵列可为多个光伏组件的阵列组合,例如,多个光伏组件可组成多个光伏阵列,光伏阵列连接汇流箱,汇流箱可对光伏阵列所产生的电流进行汇流,汇流后的电流流经逆变器转换成市电电网要求的交流电之后接入市电网络以实现太阳能供电。Photovoltaic systems can be used in photovoltaic power stations, such as ground power stations, rooftop power stations, water power stations, etc., and can also be used in equipment or devices that use solar energy to generate electricity, such as user solar power supplies, solar street lights, solar cars, solar buildings, etc. Of course, it is understandable that the application scenarios of photovoltaic systems are not limited to this, that is to say, photovoltaic systems can be used in all fields that require solar energy to generate electricity. Taking the photovoltaic power generation system network as an example, the photovoltaic system may include a photovoltaic array, a junction box and an inverter. The photovoltaic array may be an array combination of multiple photovoltaic components. For example, multiple photovoltaic components can form multiple photovoltaic arrays. The photovoltaic array is connected to the junction box. The junction box can converge the current generated by the photovoltaic array. The converged current flows through the inverter and is converted into the alternating current required by the mains power grid, and then connected to the mains network to realize solar power supply.

以上所述实施例的各技术特征可以进行任意的组合,为使描述简洁,未对上述实施例中的各个技术特征所有可能的组合都进行描述,然而,只要这些技术特征的组合不存在矛盾,都应当认为是本说明书记载的范围。The technical features of the above-described embodiments may be arbitrarily combined. To make the description concise, not all possible combinations of the technical features in the above-described embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

以上所述实施例仅表达了本发明的几种实施方式,其描述较为具体和详细,但并不能因此而理解为对发明专利范围的限制。应当指出的是,对于本领域的普通技术人员来说,在不脱离本发明构思的前提下,还可以做出若干变形和改进,这些都属于本发明的保护范围。因此,本发明专利的保护范围应以所附权利要求为准。The above-mentioned embodiments only express several implementation methods of the present invention, and the descriptions thereof are relatively specific and detailed, but they cannot be understood as limiting the scope of the invention patent. It should be pointed out that, for ordinary technicians in this field, several variations and improvements can be made without departing from the concept of the present invention, and these all belong to the protection scope of the present invention. Therefore, the protection scope of the patent of the present invention shall be subject to the attached claims.

Claims (20)

1. A method of manufacturing a solar cell, comprising:
Providing a battery body, wherein patterned metal paste is formed on the surface of a first side and the surface of a second side of the battery body, an isolation groove extending to the substrate of the battery body is further formed on the surface of the first side of the battery body, transition electrode paste insulated and isolated from the side wall of the isolation groove is formed at the bottom of the isolation groove, and the first side and the second side are oppositely arranged;
Pre-sintering the battery body to form a first pre-cured electrode and a second electrode from the metal paste on the surface of the first side and the surface of the second side of the battery body, and forming a transition electrode from the transition electrode paste;
And applying a reverse bias voltage to the battery body through the first pre-cured electrode and the transition electrode, and carrying out laser scanning on the surface of the first side of the battery body so as to enable the first pre-cured electrode to be sintered into a first electrode by laser induction.
2. The method of claim 1, wherein the step of providing a cell body comprises:
providing a substrate, wherein a first doped conductive layer, a first passivation layer and a passivation contact layer are sequentially laminated on the surface of a first side, and a second passivation layer are sequentially laminated on the surface of a second side, and the doping type of the first doped conductive layer is opposite to that of the substrate;
forming the isolation groove on the first passivation layer, and exposing the substrate from the isolation groove;
and forming the transition electrode slurry on the part of the substrate exposed from the isolation groove, and forming the metal slurry on the surfaces of the first passivation layer and the second passivation layer, which are away from the substrate, respectively.
3. The method of claim 2, wherein the step of forming the metal paste on the first passivation layer and the step of forming the transition electrode paste on the portion of the substrate exposed from the isolation trench are performed in the same process.
4. The method for manufacturing a solar cell according to claim 1, wherein the width of the isolation groove is: 0.5mm-1mm, and the distance between the transition electrode slurry and the wall of the isolation groove is more than 50 mu m.
5. The method of claim 1, wherein the metal paste disposed on the surface of the first side of the cell body includes a plurality of metal patterns spaced apart along a first direction, and the isolation groove extends along the first direction and is located between two ends of the cell body in a second direction;
the first direction and the second direction are perpendicular to the thickness direction of the substrate.
6. The method according to claim 1, wherein in the step of pre-sintering the battery body, a first peak temperature T1 at which the surface of the first side of the battery body is sintered is set to be: the second peak temperature T2 of sintering the surface of the second side of the battery body at 700 ℃ to 750 ℃ is as follows: t2 at 650℃ the temperature is less than or equal to 700 ℃.
7. The method according to claim 1, wherein in the step of pre-sintering the battery body, a first peak temperature T1 at which the surface of the first side of the battery body is sintered is set to be: the temperature T1 is more than or equal to 600 ℃ and less than 700 ℃, the duration of the first peak temperature is 2s-30s, and the second peak temperature T2 for sintering the surface of the second side of the battery body meets the following conditions: the temperature of T2 is more than or equal to 550 ℃ and less than 650 ℃, and the duration of the second peak temperature is 5s-10s; the cooling time range is 2s-5s.
8. The method according to claim 1, wherein at least one of the metal paste on the surface of the first side and the metal paste on the surface of the second side comprises: silver powder, aluminum powder, glass powder, additives and an organic carrier, wherein the weight percentage of the aluminum powder is 0% -0.5% based on the total weight of the metal slurry being 100%; the weight percentage of the glass powder is 3% -5%;
the weight percentage of lead in the glass powder is 30% -40%.
9. The method of manufacturing a solar cell according to claim 1, wherein the step of applying a reverse bias voltage to the cell body through the first pre-cured electrode and the transition electrode comprises:
and pressing a probe of a first external electrode of an external power supply against the first pre-cured electrode, pressing a probe of a second external electrode of the external power supply against the transition electrode, wherein the polarities of the first external electrode and the second external electrode are opposite.
10. The method of manufacturing a solar cell according to claim 1, wherein the number of the isolation grooves is at least one, and each of the isolation grooves extends along a first direction; when the number of the isolation grooves is at least two, the isolation grooves are arranged at intervals along a second direction, and the isolation grooves divide the surface of the first side of the battery body into at least two sub-areas along the second direction;
the step of laser-induced sintering the first pre-cured electrode into a first electrode specifically comprises the following steps:
and sequentially carrying out laser-induced sintering on the first pre-solidified electrode in each sub-region along the second direction.
11. The method of claim 10, wherein the step of laser-induced sintering the first pre-cured electrode in any one of the sub-regions comprises:
And electrically connecting the first pre-cured electrode in the subarea and the transition electrode adjacent to the subarea with a first external electrode and a second external electrode of an external power supply respectively, and carrying out laser scanning on the subarea, wherein the polarities of the first external electrode and the second external electrode are opposite, and the first direction, the second direction and the thickness direction of the battery body are perpendicular to each other.
12. The method of any one of claims 1 to 11, wherein the step of applying a reverse bias voltage to the cell body through the first pre-cured electrode and the transition electrode and laser scanning the surface of the first side of the cell body comprises:
the wavelength range of the laser is 532nm-1064nm, the power range of the laser scanning is 60W-100W, and the reverse bias voltage is 10V-20V.
13. The method of any one of claims 1-11, wherein the step of laser-induced sintering the first pre-cured electrode to a first electrode is followed by:
The cell main body is cut along the extending direction of the isolation groove to form at least two solar cells.
14. A solar cell is characterized in that, a solar cell manufactured by the manufacturing method of any one of claims 1 to 13.
15. A solar cell, comprising: the solar cell comprises a solar cell body, wherein a first electrode and a second electrode are respectively arranged on the surface of a first side and the surface of a second side of the solar cell body;
The surface of the first side of the solar cell body is also provided with an isolation groove extending to the substrate of the solar cell body, and a transition electrode insulated and isolated from the side wall of the isolation groove is formed at the bottom of the isolation groove.
16. The solar cell of claim 15, wherein the solar cell body further comprises a first doped conductive layer and a first passivation layer disposed in sequence on a first side of the substrate, and a passivation contact layer and a second passivation layer disposed in sequence on a second side of the substrate, the doping types of the first doped conductive layer and the passivation contact layer being opposite;
The first electrode is arranged on the first passivation layer and in ohmic contact with the first doped conductive layer, and the second electrode is arranged on the second passivation layer and in ohmic contact with the passivation contact layer;
The isolation groove is formed in the surface, away from the substrate, of the first passivation layer.
17. The solar cell of claim 16, wherein the first electrode comprises a plurality of first electrode patterns spaced apart along a first direction;
the isolation groove extends along the first direction and is positioned between two ends of the substrate in the second direction; or alternatively
The isolation groove extends along the second direction and is positioned between two ends of the substrate in the first direction;
the first direction and the second direction are perpendicular to the thickness direction of the substrate.
18. The solar cell of claim 17, wherein the number of isolation trenches is at least one;
when the number of the isolation grooves is at least two and the isolation grooves extend along the first direction, the isolation grooves are arranged at intervals along the second direction;
When the number of the isolation grooves is at least two and the isolation grooves extend along the second direction, the isolation grooves are arranged at intervals along the first direction.
19. The solar cell of claim 16, wherein the first electrode comprises a plurality of first electrode patterns spaced apart along a first direction;
The isolation groove extends along a first direction and is positioned at the end part of the substrate in a second direction; or the isolation groove extends along the second direction and is positioned at the end part of the substrate in the first direction;
the first direction and the second direction are perpendicular to the thickness direction of the substrate.
20. A photovoltaic module comprising at least one cell string comprising at least two solar cells according to any one of claims 14-19.
CN202410955508.0A 2024-07-17 2024-07-17 Solar cell and manufacturing method thereof, photovoltaic module Active CN118507598B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202410955508.0A CN118507598B (en) 2024-07-17 2024-07-17 Solar cell and manufacturing method thereof, photovoltaic module

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202410955508.0A CN118507598B (en) 2024-07-17 2024-07-17 Solar cell and manufacturing method thereof, photovoltaic module

Publications (2)

Publication Number Publication Date
CN118507598A true CN118507598A (en) 2024-08-16
CN118507598B CN118507598B (en) 2024-10-18

Family

ID=92238595

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202410955508.0A Active CN118507598B (en) 2024-07-17 2024-07-17 Solar cell and manufacturing method thereof, photovoltaic module

Country Status (1)

Country Link
CN (1) CN118507598B (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN119277840A (en) * 2024-12-05 2025-01-07 天合光能股份有限公司 Solar cell and preparation method thereof, conductive device and laser-assisted sintering equipment

Citations (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5017243A (en) * 1989-01-06 1991-05-21 Mitsubishi Denki Kabushiki Kaisha Solar cell and a production method therefor
US6518087B1 (en) * 1999-03-30 2003-02-11 Seiko Epson Corporation Method for manufacturing solar battery
US20130228221A1 (en) * 2011-08-05 2013-09-05 Solexel, Inc. Manufacturing methods and structures for large-area thin-film solar cells and other semiconductor devices
US20150020877A1 (en) * 2011-08-09 2015-01-22 Solexel, Inc. High-efficiency solar photovoltaic cells and modules using thin crystalline semiconductor absorbers
CN104904021A (en) * 2012-11-05 2015-09-09 索莱克赛尔公司 Systems and methods for monolithically isled solar photovoltaic cells and modules
CN105917473A (en) * 2013-08-30 2016-08-31 北京铂阳顶荣光伏科技有限公司 Method for producing sub-solar modules using electrically insulating insulation trenches in a thin-layer solar module, and method for producing a thin-layer solar module with such insulation trenches
CN115312629A (en) * 2022-09-01 2022-11-08 三一集团有限公司 Preparation method of solar cell and solar cell
CN116314442A (en) * 2023-02-10 2023-06-23 天合光能股份有限公司 Solar cell preparation method
CN116913983A (en) * 2023-08-30 2023-10-20 天合光能股份有限公司 Solar cells and manufacturing methods, photovoltaic modules and photovoltaic systems
CN117374153A (en) * 2023-09-28 2024-01-09 帝尔激光科技(无锡)有限公司 Laser-induced sintering method for solar cell and solar cell
CN117558777A (en) * 2023-12-20 2024-02-13 天合光能(淮安)光电有限公司 Solar cell and preparation method thereof
CN118136721A (en) * 2024-01-18 2024-06-04 帝尔激光科技(无锡)有限公司 A solar cell and a method for preparing the same
CN118263359A (en) * 2024-03-14 2024-06-28 天合光能股份有限公司 Solar cell, manufacturing method thereof, photovoltaic module and photovoltaic system

Patent Citations (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5017243A (en) * 1989-01-06 1991-05-21 Mitsubishi Denki Kabushiki Kaisha Solar cell and a production method therefor
US6518087B1 (en) * 1999-03-30 2003-02-11 Seiko Epson Corporation Method for manufacturing solar battery
US20130228221A1 (en) * 2011-08-05 2013-09-05 Solexel, Inc. Manufacturing methods and structures for large-area thin-film solar cells and other semiconductor devices
US20150020877A1 (en) * 2011-08-09 2015-01-22 Solexel, Inc. High-efficiency solar photovoltaic cells and modules using thin crystalline semiconductor absorbers
CN104904021A (en) * 2012-11-05 2015-09-09 索莱克赛尔公司 Systems and methods for monolithically isled solar photovoltaic cells and modules
CN105917473A (en) * 2013-08-30 2016-08-31 北京铂阳顶荣光伏科技有限公司 Method for producing sub-solar modules using electrically insulating insulation trenches in a thin-layer solar module, and method for producing a thin-layer solar module with such insulation trenches
CN115312629A (en) * 2022-09-01 2022-11-08 三一集团有限公司 Preparation method of solar cell and solar cell
CN116314442A (en) * 2023-02-10 2023-06-23 天合光能股份有限公司 Solar cell preparation method
CN116913983A (en) * 2023-08-30 2023-10-20 天合光能股份有限公司 Solar cells and manufacturing methods, photovoltaic modules and photovoltaic systems
CN117374153A (en) * 2023-09-28 2024-01-09 帝尔激光科技(无锡)有限公司 Laser-induced sintering method for solar cell and solar cell
CN117558777A (en) * 2023-12-20 2024-02-13 天合光能(淮安)光电有限公司 Solar cell and preparation method thereof
CN118136721A (en) * 2024-01-18 2024-06-04 帝尔激光科技(无锡)有限公司 A solar cell and a method for preparing the same
CN118263359A (en) * 2024-03-14 2024-06-28 天合光能股份有限公司 Solar cell, manufacturing method thereof, photovoltaic module and photovoltaic system

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
孟彦龙;贾锐;: "低成本、高效率晶硅太阳电池的研究", 《半导体光电》, vol. 32, no. 02, 30 April 2011 (2011-04-30), pages 151 - 157 *
张子男: "索特TOPCon激光载流子注入技术专用导电浆料方案", 《第十九届中国太阳级硅及光伏发电研讨会(19TH CSPV)论文集》, 2 November 2023 (2023-11-02), pages 1 - 16 *

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN119277840A (en) * 2024-12-05 2025-01-07 天合光能股份有限公司 Solar cell and preparation method thereof, conductive device and laser-assisted sintering equipment

Also Published As

Publication number Publication date
CN118507598B (en) 2024-10-18

Similar Documents

Publication Publication Date Title
US9209332B2 (en) Solar cell element and solar cell module
CN101203961A (en) Transparent conductors for silicon solar cells
CN102077358B (en) Photvoltaic device and manufacture method thereof
CN108666376B (en) A kind of p-type back contact solar cell and its preparation method
CN108666386B (en) P-type back contact solar cell and preparation method thereof
WO2010064303A1 (en) Method for manufacturing solar battery cell
CN115939254A (en) Preparation method of solar cell
CN118507598B (en) Solar cell and manufacturing method thereof, photovoltaic module
CN108735829A (en) The p-type PERC double-sided solar batteries and preparation method thereof of back side photoelectric conversion efficiency can be promoted
CN117650188B (en) Solar cell, preparation method thereof, photovoltaic module and photovoltaic system
JP2013048126A (en) Photovoltaic device and manufacturing method thereof
CN115440839A (en) A kind of solar cell and its preparation method
CN118763147A (en) Solar cell and manufacturing method thereof, photovoltaic module
JP2010251343A (en) Solar cell and method of manufacturing the same
CN115483311A (en) Preparation method of solar cell
CN117276361B (en) Solar cells and manufacturing methods, photovoltaic modules and photovoltaic systems
CN220543926U (en) Solar cell and photovoltaic module
CN101814539A (en) Solar cell and manufacturing method thereof
CN108269873A (en) IBC solar cells and preparation method thereof
KR102707789B1 (en) Conductive contacts for polycrystalline silicon features of solar cells
JP2001257371A (en) Solar cell manufacturing method, solar cell, and concentrating solar cell module
CN116487482A (en) Solar cell and manufacturing method thereof
JP2004281569A (en) Method for manufacturing solar cell element
Yu et al. Improved Bifacial Properties of P‐Type Passivated Emitter and Rear Cell Solar Cells toward High Mass Production Efficiency
CN109041583A (en) Solar cell device and solar cell module

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
GR01 Patent grant
GR01 Patent grant