CN118499594A - Sealing connection device - Google Patents
Sealing connection device Download PDFInfo
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- CN118499594A CN118499594A CN202410683403.4A CN202410683403A CN118499594A CN 118499594 A CN118499594 A CN 118499594A CN 202410683403 A CN202410683403 A CN 202410683403A CN 118499594 A CN118499594 A CN 118499594A
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- channel space
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- 238000007789 sealing Methods 0.000 title claims abstract description 119
- 239000000463 material Substances 0.000 claims abstract description 12
- 230000009471 action Effects 0.000 claims abstract description 7
- 229910001220 stainless steel Inorganic materials 0.000 claims description 4
- 239000010935 stainless steel Substances 0.000 claims description 4
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 3
- 229910000856 hastalloy Inorganic materials 0.000 claims description 3
- 239000010936 titanium Substances 0.000 claims description 3
- 229910052719 titanium Inorganic materials 0.000 claims description 3
- 239000007769 metal material Substances 0.000 claims description 2
- 239000000126 substance Substances 0.000 abstract description 16
- 230000015572 biosynthetic process Effects 0.000 abstract description 5
- 238000003786 synthesis reaction Methods 0.000 abstract description 5
- 230000000694 effects Effects 0.000 description 12
- 238000010586 diagram Methods 0.000 description 8
- 229910052751 metal Inorganic materials 0.000 description 6
- 239000002184 metal Substances 0.000 description 6
- 238000009434 installation Methods 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 229920001343 polytetrafluoroethylene Polymers 0.000 description 3
- 239000004810 polytetrafluoroethylene Substances 0.000 description 3
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- 238000012824 chemical production Methods 0.000 description 2
- 230000003749 cleanliness Effects 0.000 description 2
- 238000005260 corrosion Methods 0.000 description 2
- 230000007797 corrosion Effects 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- 239000002243 precursor Substances 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 238000003466 welding Methods 0.000 description 2
- 101001121408 Homo sapiens L-amino-acid oxidase Proteins 0.000 description 1
- 101000827703 Homo sapiens Polyphosphoinositide phosphatase Proteins 0.000 description 1
- 102100026388 L-amino-acid oxidase Human genes 0.000 description 1
- 102100023591 Polyphosphoinositide phosphatase Human genes 0.000 description 1
- -1 Polytetrafluoroethylene Polymers 0.000 description 1
- 101100012902 Saccharomyces cerevisiae (strain ATCC 204508 / S288c) FIG2 gene Proteins 0.000 description 1
- 101100233916 Saccharomyces cerevisiae (strain ATCC 204508 / S288c) KAR5 gene Proteins 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 239000001307 helium Substances 0.000 description 1
- 229910052734 helium Inorganic materials 0.000 description 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
- 238000007373 indentation Methods 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
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- 238000003908 quality control method Methods 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
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- 239000004065 semiconductor Substances 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16L—PIPES; JOINTS OR FITTINGS FOR PIPES; SUPPORTS FOR PIPES, CABLES OR PROTECTIVE TUBING; MEANS FOR THERMAL INSULATION IN GENERAL
- F16L23/00—Flanged joints
- F16L23/02—Flanged joints the flanges being connected by members tensioned axially
- F16L23/024—Flanged joints the flanges being connected by members tensioned axially characterised by how the flanges are joined to, or form an extension of, the pipes
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16L—PIPES; JOINTS OR FITTINGS FOR PIPES; SUPPORTS FOR PIPES, CABLES OR PROTECTIVE TUBING; MEANS FOR THERMAL INSULATION IN GENERAL
- F16L23/00—Flanged joints
- F16L23/16—Flanged joints characterised by the sealing means
- F16L23/18—Flanged joints characterised by the sealing means the sealing means being rings
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Pressure Vessels And Lids Thereof (AREA)
Abstract
本申请实施例涉及一种密封连接装置,包括第一连接件、第二连接件、密封件、支架件、支撑件和紧固件。耐高温材质的密封件抵接于第一连接件与第二连接件,密封件、第一连接件和第二连接件形成密封的通道空间,支撑件在第一方向上连接于第一连接件与第二连接件之间,且密封件在与第一方向垂直的第二方向上位于支架件与支撑件之间,紧固件可拆洗连接于第一连接件与第二连接件,密封件在紧固件的作用下抵接于第一连接件与第二连接件,并使得通道空间形成密封。本申请实施例提供的密封连接装置能够保证在高温、高压和高真空工况下的密封性,进一步保证高纯高净电子化学品的合成质量。
The embodiment of the present application relates to a sealing connection device, including a first connection member, a second connection member, a sealing member, a bracket member, a support member and a fastener. The sealing member made of high temperature resistant material abuts against the first connection member and the second connection member, and the sealing member, the first connection member and the second connection member form a sealed channel space. The support member is connected between the first connection member and the second connection member in a first direction, and the sealing member is located between the bracket member and the support member in a second direction perpendicular to the first direction. The fastener is detachably connected to the first connection member and the second connection member, and the sealing member abuts against the first connection member and the second connection member under the action of the fastener, so that the channel space is sealed. The sealing connection device provided in the embodiment of the present application can ensure the sealing performance under high temperature, high pressure and high vacuum conditions, and further ensure the synthesis quality of high-purity and high-cleanliness electronic chemicals.
Description
技术领域Technical Field
本申请涉及法兰密封技术领域,特别是涉及一种密封连接装置。The present application relates to the technical field of flange sealing, and in particular to a sealing connection device.
背景技术Background Art
电子化学品是集成电路、分立器件、显示面板、太阳能电池等领域通过湿法工艺制程得到的关键性电子化工材料。电子化学品行业上承基础化工原料,下接电子信息材料行业,要求超净高纯,具有产品规格多、单个品种用量少、产品更新换代快、质控要求极高、对生产及使用环境洁净度要求高等特点,其纯度和洁净度对下游产品的良率、电性能及可靠性都有着十分重要的影响。Electronic chemicals are key electronic chemical materials obtained through wet process in the fields of integrated circuits, discrete devices, display panels, solar cells, etc. The electronic chemicals industry is based on basic chemical raw materials and is connected to the electronic information materials industry. It requires ultra-clean and high purity, has many product specifications, small amount of a single variety, fast product updates, extremely high quality control requirements, and high requirements for the cleanliness of the production and use environment. Its purity and cleanliness have a very important impact on the yield, electrical performance and reliability of downstream products.
目前,国内高纯电子化学品生产设备多沿用传统医药化工设备演变而来,对生产要求较高的高纯高净的电子化学品存在多种工况,传统密封结构不能很好的满足密封需求,进而影响高纯高净电子化学品的质量。At present, most of the domestic high-purity electronic chemical production equipment has evolved from traditional pharmaceutical and chemical equipment. There are various working conditions for the production of high-purity and high-cleanliness electronic chemicals with high production requirements. Traditional sealing structures cannot meet the sealing requirements well, which in turn affects the quality of high-purity and high-cleanliness electronic chemicals.
发明内容Summary of the invention
有鉴于此,本申请实施例为解决背景技术中存在的至少一个问题而提供一种密封连接装置。In view of this, an embodiment of the present application provides a sealing connection device to solve at least one problem existing in the background technology.
第一方面,本申请实施例提供了一种密封连接装置,所述密封连接装置用于连接并密封第一管与第二管,所述密封连接装置包括:In a first aspect, an embodiment of the present application provides a sealing connection device, the sealing connection device is used to connect and seal a first tube and a second tube, the sealing connection device comprising:
第一连接件,所述第一管末端连接于所述第一连接件;a first connecting member, to which the first tube end is connected;
第二连接件,所述第二管末端连接于所述第二连接件,所述第二连接件与所述第一连接件在第一方向上彼此重叠;a second connecting member, to which an end of the second tube is connected, and the second connecting member and the first connecting member overlap each other in a first direction;
密封件,耐高温材质的所述密封件抵接于所述第一连接件与所述第二连接件,所述密封件、所述第一连接件和所述第二连接件形成密封的通道空间,所述通道空间连通所述第一管与所述第二管;A sealing member, wherein the sealing member made of a high temperature resistant material abuts against the first connecting member and the second connecting member, and the sealing member, the first connecting member and the second connecting member form a sealed channel space, and the channel space communicates with the first tube and the second tube;
支架件,其两端在所述第一方向上分别连接于所述第一连接件与所述第二连接件,所述支架件与所述密封件相邻设置,且所述支架件位于所述通道空间内,所述支架件用于在所述通道空间处于负压工况下支撑所述密封件;a bracket member, two ends of which are respectively connected to the first connecting member and the second connecting member in the first direction, the bracket member is arranged adjacent to the sealing member, and the bracket member is located in the channel space, and the bracket member is used to support the sealing member when the channel space is in a negative pressure condition;
支撑件,其在所述第一方向上连接于所述第一连接件与所述第二连接件之间,且所述密封件在与所述第一方向垂直的第二方向上位于所述支架件与所述支撑件之间,所述支撑件用于在所述通道空间处于高压工况下支撑所述密封件;a support member connected between the first connecting member and the second connecting member in the first direction, and the sealing member is located between the bracket member and the support member in a second direction perpendicular to the first direction, and the support member is used to support the sealing member when the channel space is under a high pressure condition;
紧固件,其可拆卸连接于所述第一连接件与所述第二连接件,所述密封件在所述紧固件的作用下抵接于所述第一连接件与所述第二连接件,并使得所述通道空间形成密封。A fastener is detachably connected to the first connecting member and the second connecting member. Under the action of the fastener, the sealing member abuts against the first connecting member and the second connecting member to form a seal for the channel space.
结合本申请的第一方面,在一可选实施方式中,所述支撑件为自所述第一连接件表面向外延伸的第一凸缘;或者,所述支撑件为自所述第二连接件表面向外延伸的第二凸缘。In combination with the first aspect of the present application, in an optional implementation, the support member is a first flange extending outward from the surface of the first connecting member; or, the support member is a second flange extending outward from the surface of the second connecting member.
结合本申请的第一方面,在一可选实施方式中,所述支撑件包括自所述第一连接件表面向外延伸的第三凸缘,及自所述第二连接件表面向外延伸的第四凸缘。In combination with the first aspect of the present application, in an optional embodiment, the support member includes a third flange extending outward from the surface of the first connecting member, and a fourth flange extending outward from the surface of the second connecting member.
结合本申请的第一方面,在一可选实施方式中,所述第三凸缘与所述第四凸缘中的一个设置有第一凸起,所述第三凸缘与所述第四凸缘中的另一个设置有第一安装槽,所述第一凸起匹配所述第一安装槽。In combination with the first aspect of the present application, in an optional embodiment, one of the third flange and the fourth flange is provided with a first protrusion, and the other of the third flange and the fourth flange is provided with a first mounting groove, and the first protrusion matches the first mounting groove.
结合本申请的第一方面,在一可选实施方式中,所述支撑件连接于所述第一连接件和/或所述第二连接件的边缘处。In combination with the first aspect of the present application, in an optional implementation, the support member is connected to an edge of the first connecting member and/or the second connecting member.
结合本申请的第一方面,在一可选实施方式中,所述第一连接件设置有第一榫槽,所述第二连接件设置有第二榫槽,所述第一榫槽与所述第二榫槽均连通所述通道空间;In combination with the first aspect of the present application, in an optional implementation manner, the first connecting member is provided with a first tenon groove, the second connecting member is provided with a second tenon groove, and the first tenon groove and the second tenon groove are both connected to the channel space;
所述支架件设置有第一榫头与第二榫头,所述第一榫头与所述第二榫头分别匹配所述第一榫槽与所述第二榫槽。The bracket member is provided with a first tenon and a second tenon, and the first tenon and the second tenon are matched with the first tenon groove and the second tenon groove respectively.
结合本申请的第一方面,在一可选实施方式中,所述支架件接近所述密封件的一侧还设置有弧形面,当所述通道空间内处于负压工况时,所述密封件抵接于所述弧形面。In combination with the first aspect of the present application, in an optional embodiment, a curved surface is further provided on a side of the bracket member close to the sealing member, and when the channel space is in a negative pressure condition, the sealing member abuts against the curved surface.
结合本申请的第一方面,在一可选实施方式中,所述第一榫头焊接于所述第一榫槽,或者所述第二榫头焊接于所述第二榫槽。In combination with the first aspect of the present application, in an optional implementation, the first tenon is welded to the first tenon groove, or the second tenon is welded to the second tenon groove.
结合本申请的第一方面,在一可选实施方式中,所述密封件为金属材质。In combination with the first aspect of the present application, in an optional implementation, the sealing member is made of metal.
结合本申请的第一方面,在一可选实施方式中,所述紧固件为抱箍或沉头螺栓。In combination with the first aspect of the present application, in an optional implementation, the fastener is a clamp or a countersunk bolt.
结合本申请的第一方面,在一可选实施方式中,所述第一连接件与所述第二连接件的材质包括经过硬化处理的不锈钢、钛或哈氏合金。In combination with the first aspect of the present application, in an optional implementation manner, the material of the first connecting member and the second connecting member includes hardened stainless steel, titanium or Hastelloy.
本申请实施例所提供的密封连接装置中的支架件与密封件相邻设置,支架件能够在通道空间处于负压工况时对密封件进行支撑,避免密封件在第二方向上发生较大位移,且能够提高该密封连接装置的密封性;支撑件能够在通道空间处高压工况时对密封件进行支撑,避免密封件因较大压力在第二方向上发生位移,保证该密封连接装置的密封性;该密封连接装置能够保证在高温、高压和高真空工况下的密封性,进一步保证高纯高净电子化学品的合成质量。The support member in the sealing connection device provided in the embodiment of the present application is arranged adjacent to the sealing member. The support member can support the sealing member when the channel space is in a negative pressure condition, thereby preventing the sealing member from being displaced significantly in the second direction due to the large pressure, and can improve the sealing performance of the sealing connection device; the support member can support the sealing member when the channel space is in a high pressure condition, thereby preventing the sealing member from being displaced in the second direction due to the large pressure, and ensuring the sealing performance of the sealing connection device; the sealing connection device can ensure the sealing performance under high temperature, high pressure and high vacuum conditions, and further ensure the synthesis quality of high-purity and high-cleanliness electronic chemicals.
本申请附加的方面和优点将在下面的描述中部分给出,部分将从下面的描述中变得明显,或通过本申请的实践了解到。Additional aspects and advantages of the present application will be given in part in the description below, and in part will become apparent from the description below, or will be learned through the practice of the present application.
附图说明BRIEF DESCRIPTION OF THE DRAWINGS
此处所说明的附图用来提供对本申请的进一步理解,构成本申请的一部分,本申请的示意性实施例及其说明用于解释本申请,并不构成对本申请的不当限定。在附图中:The drawings described herein are used to provide a further understanding of the present application and constitute a part of the present application. The illustrative embodiments of the present application and their descriptions are used to explain the present application and do not constitute an improper limitation on the present application. In the drawings:
图1为本申请实施例提供的密封连接装置的整体立体结构示意图;FIG1 is a schematic diagram of the overall three-dimensional structure of a sealing connection device provided in an embodiment of the present application;
图2为本申请实施例提供的密封连接装置的分解立体结构示意图;FIG2 is a schematic diagram of an exploded three-dimensional structure of a sealing connection device provided in an embodiment of the present application;
图3为本申请实施例提供的第一管与第二管分别连接于第一连接件与第二连接件的立体结构示意图;FIG3 is a schematic diagram of a three-dimensional structure in which a first tube and a second tube are respectively connected to a first connecting member and a second connecting member provided in an embodiment of the present application;
图4为图3中A-A处的剖面示意图;Fig. 4 is a schematic cross-sectional view taken along line A-A in Fig. 3;
图5为本申请另一实施例提供的密封连接装置的剖面示意图;FIG5 is a cross-sectional schematic diagram of a sealing connection device provided in another embodiment of the present application;
图6为本申请又一实施例提供的密封连接装置的剖面示意图;FIG6 is a cross-sectional schematic diagram of a sealing connection device provided in yet another embodiment of the present application;
图7为本申请再一实施例提供的密封连接装置的剖面示意图;FIG7 is a cross-sectional schematic diagram of a sealing connection device provided in yet another embodiment of the present application;
图8为图4中A处的放大图;FIG8 is an enlarged view of point A in FIG4 ;
图9为图5中B处的放大图。FIG. 9 is an enlarged view of point B in FIG. 5 .
附图标记:Reference numerals:
a1、第一管;a2、第二管;a1, first tube; a2, second tube;
10、第一连接件;1a2、通道空间;110、第一安装孔;120、第一榫槽;20、第二连接件;210、第二安装孔;220、第二榫槽;30、密封件;40、支架件;410、第一榫头;420、第二榫头;430、弧形面;50、支撑件;510、第一凸缘;520、第二凸缘;530、第三凸缘;531、第一凸起;540、第四凸缘;541、第一安装槽;60、紧固件。10. First connecting member; 1a2. Channel space; 110. First mounting hole; 120. First mortise and tenon; 20. Second connecting member; 210. Second mounting hole; 220. Second mortise and tenon; 30. Sealing member; 40. Bracket member; 410. First tenon; 420. Second tenon; 430. Arc surface; 50. Support member; 510. First flange; 520. Second flange; 530. Third flange; 531. First protrusion; 540. Fourth flange; 541. First mounting groove; 60. Fastener.
具体实施方式DETAILED DESCRIPTION
下面将参照附图更详细地描述本申请公开的示例性实施方式。虽然附图中显示了本申请的示例性实施方式,然而应当理解,可以以各种形式实现本申请,而不应被这里阐述的具体实施方式所限制。相反,提供这些实施方式是为了能够更透彻地理解本申请,并且能够将本申请公开的范围完整的传达给本领域的技术人员。The exemplary embodiments disclosed in the present application will be described in more detail below with reference to the accompanying drawings. Although the exemplary embodiments of the present application are shown in the accompanying drawings, it should be understood that the present application can be implemented in various forms and should not be limited by the specific embodiments described herein. On the contrary, these embodiments are provided to enable a more thorough understanding of the present application and to fully convey the scope disclosed in the present application to those skilled in the art.
在下文的描述中,给出了大量具体的细节以便提供对本申请更为彻底的理解。然而,对于本领域技术人员而言显而易见的是,本申请可以无需一个或多个这些细节而得以实施。在其他的例子中,为了避免与本申请发生混淆,对于本领域公知的一些技术特征未进行描述;即,这里不描述实际实施例的全部特征,不详细描述公知的功能和结构。In the following description, a large number of specific details are given to provide a more thorough understanding of the present application. However, it is obvious to those skilled in the art that the present application can be implemented without one or more of these details. In other examples, in order to avoid confusion with the present application, some technical features known in the art are not described; that is, all features of the actual embodiments are not described here, and well-known functions and structures are not described in detail.
在附图中,为了清楚,层、区、元件的尺寸以及其相对尺寸可能被夸大。自始至终相同附图标记表示相同的元件。In the drawings, the sizes of layers, regions, elements and their relative sizes may be exaggerated for clarity. The same reference numerals denote the same elements throughout.
应当明白,当元件或层被称为“在……上”、“与……相邻”、“连接到”或“耦合到”其它元件或层时,其可以直接地在其它元件或层上、与之相邻、连接或耦合到其它元件或层,或者可以存在居间的元件或层。相反,当元件被称为“直接在……上”、“与……直接相邻”、“直接连接到”或“直接耦合到”其它元件或层时,则不存在居间的元件或层。应当明白,尽管可使用术语第一、第二、第三等描述各种元件、部件、区、层和/或部分,这些元件、部件、区、层和/或部分不应当被这些术语限制。这些术语仅仅用来区分一个元件、部件、区、层或部分与另一个元件、部件、区、层或部分。因此,在不脱离本申请教导之下,下面讨论的第一元件、部件、区、层或部分可表示为第二元件、部件、区、层或部分。而当讨论的第二元件、部件、区、层或部分时,并不表明本申请必然存在第一元件、部件、区、层或部分。It should be understood that when an element or layer is referred to as "on ...", "adjacent to ...", "connected to" or "coupled to" other elements or layers, it can be directly on, adjacent to, connected to or coupled to other elements or layers, or there can be intervening elements or layers. On the contrary, when an element is referred to as "directly on ...", "directly adjacent to ...", "directly connected to" or "directly coupled to" other elements or layers, there is no intervening element or layer. It should be understood that although the terms first, second, third, etc. can be used to describe various elements, components, regions, layers and/or parts, these elements, components, regions, layers and/or parts should not be limited by these terms. These terms are only used to distinguish one element, component, region, layer or part from another element, component, region, layer or part. Therefore, without departing from the teachings of the present application, the first element, component, region, layer or part discussed below can be represented as the second element, component, region, layer or part. And when the second element, component, region, layer or part is discussed, it does not indicate that the present application necessarily has the first element, component, region, layer or part.
空间关系术语例如“在……下”、“在……下面”、“下面的”、“在……之下”、“在……之上”、“上面的”等,在这里可为了方便描述而被使用从而描述图中所示的一个元件或特征与其它元件或特征的关系。应当明白,除了图中所示的取向以外,空间关系术语意图还包括使用和操作中的器件的不同取向。例如,如果附图中的器件翻转,然后,描述为“在其它元件下面”或“在其之下”或“在其下”元件或特征将取向为在其它元件或特征“上”。因此,示例性术语“在……下面”和“在……下”可包括上和下两个取向。器件可以另外地取向(旋转90度或其它取向)并且在此使用的空间描述语相应地被解释。Spatial relationship terms such as "under", "below", "below", "under", "above", "above", etc., may be used here for convenience of description to describe the relationship between an element or feature shown in the figure and other elements or features. It should be understood that in addition to the orientation shown in the figure, the spatial relationship terms are intended to include different orientations of the device in use and operation. For example, if the device in the accompanying drawings is turned over, then the elements or features described as "under other elements" or "under it" or "under it" will be oriented as "on" other elements or features. Therefore, the exemplary terms "under" and "under" may include both upper and lower orientations. The device can be oriented otherwise (rotated 90 degrees or other orientations) and the spatial descriptors used herein are interpreted accordingly.
在此使用的术语的目的仅在于描述具体实施例并且不作为本申请的限制。在此使用时,单数形式的“一”、“一个”和“所述/该”也意图包括复数形式,除非上下文清楚指出另外的方式。还应明白术语“组成”和/或“包括”,当在该说明书中使用时,确定所述特征、整数、步骤、操作、元件和/或部件的存在,但不排除一个或更多其它的特征、整数、步骤、操作、元件、部件和/或组的存在或添加。在此使用时,术语“和/或”包括相关所列项目的任何及所有组合。The purpose of the terms used herein is only to describe specific embodiments and is not intended to be limiting of the present application. When used herein, the singular forms "one", "an" and "said/the" are also intended to include plural forms, unless the context clearly indicates another way. It should also be understood that the terms "consisting of" and/or "comprising", when used in this specification, determine the presence of the features, integers, steps, operations, elements and/or parts, but do not exclude the presence or addition of one or more other features, integers, steps, operations, elements, parts and/or groups. When used herein, the term "and/or" includes any and all combinations of the relevant listed items.
为了彻底理解本申请,将在下列的描述中提出详细的步骤以及详细的结构,以便阐释本申请的技术方案。本申请的较佳实施例详细描述如下,然而除了这些详细描述外,本申请还可以具有其他实施方式。In order to thoroughly understand the present application, detailed steps and detailed structures will be presented in the following description to illustrate the technical solution of the present application. The preferred embodiments of the present application are described in detail below, but in addition to these detailed descriptions, the present application may also have other implementation methods.
作为示例的电子化工材料为前驱体材料,前驱体材料要求具有极高的纯度以避免杂质影响半导体器件的性能。前驱体材料合成条件苛刻,具有处于高温、高压和高真空多种工况,多工况对合成设备要求较高,特别是密封装置,密封性能直接影响高纯高净电子化学品的质量。The electronic chemical materials used as an example are precursor materials, which are required to have extremely high purity to avoid impurities affecting the performance of semiconductor devices. The synthesis conditions of precursor materials are harsh, and they are subjected to multiple working conditions such as high temperature, high pressure and high vacuum. Multiple working conditions have high requirements on synthesis equipment, especially sealing devices. The sealing performance directly affects the quality of high-purity and high-cleanliness electronic chemicals.
针对上述技术问题,本申请实施例提供一种密封连接装置,该密封连接装置能够满足处于高温、高压和高真空多种工况下的密封性能;支架件能够在通道空间处于负压工况时对密封件进行支撑,避免密封件在第二方向上发生较大位移,保证该密封连接装置的密封性;支撑件能够在通道空间处高压工况时对密封件进行支撑,避免密封件因较大压力在第二方向上发生位移,保证该密封连接装置的密封性;另外,耐高温材质的密封件能够保证密封连接装置在高温工况下的密封性。In response to the above technical problems, an embodiment of the present application provides a sealing connection device, which can meet the sealing performance requirements under various working conditions such as high temperature, high pressure and high vacuum; the bracket member can support the seal when the channel space is in a negative pressure condition, thereby preventing the seal from being displaced significantly in the second direction, thereby ensuring the sealing performance of the sealing connection device; the support member can support the seal when the channel space is in a high pressure condition, thereby preventing the seal from being displaced in the second direction due to the large pressure, thereby ensuring the sealing performance of the sealing connection device; in addition, the seal made of high temperature resistant material can ensure the sealing performance of the sealing connection device under high temperature conditions.
下面结合附图对本申请实施例提供的密封连接装置进行详细说明。The sealing connection device provided in the embodiment of the present application is described in detail below with reference to the accompanying drawings.
具体地,如图1至图4所示,本申请实施例提供一种密封连接装置,该密封连接装置用于连接并密封第一管a1与第二管a2,该密封连接装置包括第一连接件10、第二连接件20、支架件40、密封件30、支撑件50和紧固件60。Specifically, as shown in Figures 1 to 4, an embodiment of the present application provides a sealing connection device, which is used to connect and seal a first tube a1 and a second tube a2. The sealing connection device includes a first connecting member 10, a second connecting member 20, a bracket member 40, a sealing member 30, a support member 50 and a fastener 60.
其中,第一连接件10上具有第一安装孔110,第一管a1插接于第一安装孔110内。第二连接件20上具有第二安装孔210,第二管a2插接于第二安装孔210内,第一安装孔110的孔径与第二安装孔210的孔径基于第一管a1与第二管a2的直径进行设定,第一安装孔110的孔径与第二安装孔210的孔径可相同或不相同,本申请实施例不做限定。第二连接件20与第一连接件10在第一方向上彼此重叠,第一方向为第一连接件10的轴线方向。在对电子化学品加工过程中,通道空间1a2内存在多种不同工况。Among them, the first connecting member 10 has a first mounting hole 110, and the first tube a1 is inserted into the first mounting hole 110. The second connecting member 20 has a second mounting hole 210, and the second tube a2 is inserted into the second mounting hole 210. The aperture of the first mounting hole 110 and the aperture of the second mounting hole 210 are set based on the diameter of the first tube a1 and the second tube a2. The aperture of the first mounting hole 110 and the aperture of the second mounting hole 210 can be the same or different, which is not limited in the embodiment of the present application. The second connecting member 20 overlaps with the first connecting member 10 in the first direction, and the first direction is the axial direction of the first connecting member 10. In the process of processing electronic chemicals, there are many different working conditions in the channel space 1a2.
耐高温材质的密封件30抵接于第一连接件10与第二连接件20,密封件30、第一连接件10和第二连接件20形成密封的通道空间1a2,通道空间1a2连通第一管a1与第二管a2。密封件30在紧固件60的作用下抵接于第一连接件10与第二连接件20上,进而实现通道空间1a2的密封。The seal 30 made of high temperature resistant material abuts against the first connector 10 and the second connector 20. The seal 30, the first connector 10 and the second connector 20 form a sealed channel space 1a2, and the channel space 1a2 connects the first tube a1 and the second tube a2. The seal 30 abuts against the first connector 10 and the second connector 20 under the action of the fastener 60, thereby achieving the sealing of the channel space 1a2.
支架件40的两端在第一方向上分别连接于第一连接件10与第二连接件20,支架件40位于通道空间1a2内。支架件40为金属材质具有一定的刚性,当通道空间1a2内处于负压工况时,密封件30在负压的作用下抵接于支架件40上,支架件40对密封件30起到支撑作用,能够避免密封件30发生较大位移而影响密封性能。另外,在利用紧固件60对第一连接件10与第二连接件20进行锁紧时,支架件40还能够均匀地分布第一连接件10与第二连接件20上受到的压力,避免第一连接件10与第二连接件20局部受力过大而受到损坏。The two ends of the bracket member 40 are respectively connected to the first connecting member 10 and the second connecting member 20 in the first direction, and the bracket member 40 is located in the channel space 1a2. The bracket member 40 is made of metal and has a certain rigidity. When the channel space 1a2 is in a negative pressure condition, the seal 30 abuts against the bracket member 40 under the action of the negative pressure. The bracket member 40 supports the seal 30, which can prevent the seal 30 from being displaced significantly and affecting the sealing performance. In addition, when the first connecting member 10 and the second connecting member 20 are locked by the fastener 60, the bracket member 40 can also evenly distribute the pressure on the first connecting member 10 and the second connecting member 20, so as to prevent the first connecting member 10 and the second connecting member 20 from being damaged due to excessive local force.
支撑件50在第一方向上连接于第一连接件10与第二连接件20之间,且密封件30在第二方向上位于支架件40与支撑件50之间,第二方向垂直于第一方向,支撑件50位于通道空间1a2外部。支撑件50为金属材质具有一定的刚性,当通道空间1a2处于高压工况时,密封件30受力抵接于支撑件50上,支撑件50对密封件30起到支撑作用,避免密封件30受力发生位移而影响密封效果。The support member 50 is connected between the first connecting member 10 and the second connecting member 20 in the first direction, and the sealing member 30 is located between the bracket member 40 and the support member 50 in the second direction. The second direction is perpendicular to the first direction, and the support member 50 is located outside the channel space 1a2. The support member 50 is made of metal and has a certain rigidity. When the channel space 1a2 is in a high-pressure working condition, the sealing member 30 is forced to abut against the support member 50, and the support member 50 supports the sealing member 30 to prevent the sealing member 30 from being displaced by force and affecting the sealing effect.
紧固件60可拆卸连接于第一连接件10与第二连接件20,紧固件60用于锁紧第一连接件10与第二连接件20,密封件30在紧固件60的作用下抵接于第一连接件10与第二连接件20,并使得通道空间1a2形成密封。The fastener 60 is detachably connected to the first connecting member 10 and the second connecting member 20, and is used to lock the first connecting member 10 and the second connecting member 20. Under the action of the fastener 60, the sealing member 30 abuts against the first connecting member 10 and the second connecting member 20, and forms a seal in the channel space 1a2.
图1中示出了紧固件60锁紧第一连接件10与第二连接件20的状态示意图。图1中示出的紧固件60为抱箍,紧固件60还可以为沉头螺栓(图中未显示)。本申请实施例中提供的紧固件60方便拆卸与安装。Fig. 1 shows a schematic diagram of a state in which a fastener 60 locks the first connecting member 10 and the second connecting member 20. The fastener 60 shown in Fig. 1 is a clamp, and the fastener 60 can also be a countersunk bolt (not shown in the figure). The fastener 60 provided in the embodiment of the present application is convenient for disassembly and installation.
图4中示出了第一连接件10、第二连接件20、支架件40、密封件30和支撑件50的剖面结构。本申请实施例提供的密封连接装置不仅能够满足电子化学品生产设备在多种不同工况下的密封性要求,进而保证高纯高净电子化学品的质量;还能够提高密封连接装置结构紧凑性,进而大大降低了密封连接装置的整体质量,具有轻便性。Fig. 4 shows the cross-sectional structure of the first connecting member 10, the second connecting member 20, the bracket member 40, the sealing member 30 and the supporting member 50. The sealing connection device provided in the embodiment of the present application can not only meet the sealing requirements of the electronic chemical production equipment under various working conditions, thereby ensuring the quality of high-purity and high-cleanliness electronic chemicals; it can also improve the compactness of the sealing connection device structure, thereby greatly reducing the overall mass of the sealing connection device, and having lightness.
本申请实施例提供的密封连接装置在保证密封效果的前提下通道空间内的真空下气体的体积流量可达1.0×10-13bar×m3/s,压力大于等于5MPa。可以理解为该密封连接装置的氦检漏能够达到1.0×10-13bar×m3/s,对应高真空。The sealing connection device provided in the embodiment of the present application can achieve a gas volume flow rate of 1.0× 10-13 bar× m3 /s under vacuum in the channel space while ensuring the sealing effect, and the pressure is greater than or equal to 5MPa. It can be understood that the helium leak detection of the sealing connection device can reach 1.0× 10-13 bar× m3 /s, corresponding to high vacuum.
在一可选实施例中,当通道空间1a2内温度在-60℃-250℃之间时,密封件30为高纯PTFE(Polytetrafluoroethylene,聚四氟乙烯)或者为高纯PFA(Polyfluoroalkoxy,可溶性聚四氟乙烯),PTFE与PFA均具有较好的抗化学腐蚀能力。In an optional embodiment, when the temperature in the channel space 1a2 is between -60°C and 250°C, the seal 30 is made of high-purity PTFE (Polytetrafluoroethylene) or high-purity PFA (Polyfluoroalkoxy), and both PTFE and PFA have good resistance to chemical corrosion.
进一步地,当通道空间1a2内温度在-196-350℃之间时,密封件30为金属材质。金属材质的密封件30具有耐高温和耐高压性能。金属材质包括不锈钢、镍、镀银等,该类金属具有良好的延展性,能够在外力的作用下发生变形,保证密封效果。Furthermore, when the temperature in the channel space 1a2 is between -196-350°C, the seal 30 is made of metal. The metal seal 30 has high temperature and high pressure resistance. The metal material includes stainless steel, nickel, silver plating, etc. Such metals have good ductility and can be deformed under the action of external force to ensure the sealing effect.
在一可选实施例中,第一连接件10与第二连接件20的材质为不锈钢、钛或者哈氏合金,当然并不仅限于此。对第一连接件10与第二连接件20进行硬化处理,例如:滚压。硬化处理能够提高第一连接件10与第二连接件20的抗腐蚀性、耐磨性和耐压痕性能。In an optional embodiment, the first connecting member 10 and the second connecting member 20 are made of stainless steel, titanium or Hastelloy, but are not limited thereto. The first connecting member 10 and the second connecting member 20 are hardened, for example, by rolling. The hardening treatment can improve the corrosion resistance, wear resistance and indentation resistance of the first connecting member 10 and the second connecting member 20.
进一步地,对与通道空间1a2连通的第一连接件10与第二连接件20的区域进行电化学抛光,电化学抛光后的第一连接件10与第二连接件20能够避免杂质析出,保证电子化学品的纯度。Furthermore, the regions of the first connector 10 and the second connector 20 communicating with the channel space 1a2 are electrochemically polished. The electrochemically polished first connector 10 and the second connector 20 can avoid precipitation of impurities and ensure the purity of electronic chemicals.
在一可选实施例中,如图4所示,支撑件50为自第一连接件10表面向外延伸的第一凸缘510,当通道空间1a2处于高压工况时,支撑件50能够为密封件30提供支撑力,保证密封效果。In an optional embodiment, as shown in FIG. 4 , the support member 50 is a first flange 510 extending outward from the surface of the first connecting member 10 . When the channel space 1a2 is in a high-pressure condition, the support member 50 can provide support force for the seal 30 to ensure a sealing effect.
在一可选实施例中,如图5所示,支撑件50为自第二连接件20表面向外延伸的第二凸缘520,第二凸缘520与第一凸缘510的作用相同。In an optional embodiment, as shown in FIG. 5 , the support member 50 is a second flange 520 extending outward from the surface of the second connecting member 20 , and the second flange 520 has the same function as the first flange 510 .
在一可选实施例中,如图6所示,支撑件50包括自第一连接件10表面向外延伸的第三凸缘530,及自第二连接件20表面向外延伸的第四凸缘540。当通道空间1a2处于高压工况时,第三凸缘530与第四凸缘540共同为密封件30提供支撑件50,以保证密封效果。In an optional embodiment, as shown in Fig. 6, the support member 50 includes a third flange 530 extending outward from the surface of the first connection member 10, and a fourth flange 540 extending outward from the surface of the second connection member 20. When the channel space 1a2 is in a high pressure condition, the third flange 530 and the fourth flange 540 together provide the support member 50 for the sealing member 30 to ensure the sealing effect.
在一可选实施例中,如图7所示,第三凸缘530与第四凸缘540中的一者设置有第一凸起531,第三凸缘530与第四凸缘540中的另一者设置有第一安装槽541,第一凸起531匹配第一安装槽541。In an optional embodiment, as shown in FIG. 7 , one of the third flange 530 and the fourth flange 540 is provided with a first protrusion 531 , and the other of the third flange 530 and the fourth flange 540 is provided with a first mounting groove 541 , and the first protrusion 531 matches the first mounting groove 541 .
第一凸起531嵌装于第一安装槽541内能够提高支撑件50的支撑能力,进一步保证密封连接装置的密封效果。The first protrusion 531 is embedded in the first installation groove 541 to improve the supporting capacity of the support member 50 and further ensure the sealing effect of the sealing connection device.
在一可选实施例中,支撑件50连接于第一连接件10和/或第二连接件20的边缘处。In an optional embodiment, the support member 50 is connected to the edge of the first connecting member 10 and/or the second connecting member 20 .
从第一连接件10与第二连接件20的边缘处延伸形成支撑件50,能够减小密封连接装置的整体体积,进而减小密封连接装置的质量。The support member 50 is formed by extending from the edges of the first connecting member 10 and the second connecting member 20 , so as to reduce the overall volume of the sealing connection device and further reduce the mass of the sealing connection device.
在一可选实施例中,如图2和图8所示,第一连接件10设置有第一榫槽120,第二连接件20设置有第二榫槽220,第一榫槽120与第二榫槽220分别设置于连通通道空间1a2的一侧表面,第一榫槽120与第二榫槽220均连通通道空间1a2。支架件40设置有第一榫头410与第二榫头420,第一榫头410与第二榫头420分别匹配第一榫槽120与第二榫槽220。In an optional embodiment, as shown in Fig. 2 and Fig. 8, the first connecting member 10 is provided with a first tenon groove 120, and the second connecting member 20 is provided with a second tenon groove 220, the first tenon groove 120 and the second tenon groove 220 are respectively provided on a side surface of the communicating channel space 1a2, and the first tenon groove 120 and the second tenon groove 220 are both communicating with the channel space 1a2. The bracket member 40 is provided with a first tenon 410 and a second tenon 420, and the first tenon 410 and the second tenon 420 are matched with the first tenon groove 120 and the second tenon groove 220 respectively.
图8中示出了通道空间1a2处于负压工况时密封件30与支架件40的状态示意图。图8中示出的箭头为密封件30的受力方向,通道空间1a2处于负压工况时,通道空间1a2外部压力大于内部压力,密封件30受力后抵接于支架件40上,支架件40对密封件30起到支撑作用并能够避免密封件30因压力发生较大移动,保证密封效果。另外,在安装密封连接装置的时候,第一榫头410插装于第一榫槽120内,第二榫头420插装于第二榫槽220内,安装及拆卸均较为方便,为后续的清洁提供便利性。FIG8 shows a schematic diagram of the state of the seal 30 and the bracket 40 when the channel space 1a2 is in a negative pressure condition. The arrow shown in FIG8 is the force direction of the seal 30. When the channel space 1a2 is in a negative pressure condition, the external pressure of the channel space 1a2 is greater than the internal pressure. After the seal 30 is subjected to force, it abuts against the bracket 40. The bracket 40 supports the seal 30 and can prevent the seal 30 from moving significantly due to pressure, thereby ensuring the sealing effect. In addition, when installing the sealing connection device, the first tenon 410 is inserted into the first tenon groove 120, and the second tenon 420 is inserted into the second tenon groove 220. The installation and disassembly are relatively convenient, which provides convenience for subsequent cleaning.
进一步地,密封件30的一侧还设置有弧形面430,当通道空间1a2内处于负压工况时,密封件30抵接于弧形面430。在密封件30受力抵接于弧形面430上时,弧形面430能够给密封件30提供相适配的压缩面,进一步能够提高密封件30的密封效果。Furthermore, a curved surface 430 is provided on one side of the seal 30, and when the channel space 1a2 is in a negative pressure condition, the seal 30 abuts against the curved surface 430. When the seal 30 abuts against the curved surface 430 under force, the curved surface 430 can provide a matching compression surface for the seal 30, and further improve the sealing effect of the seal 30.
在一可选实施例中,第一榫头410焊接于第一榫槽120,或者第二榫头420焊接于第二榫槽220。In an optional embodiment, the first tenon 410 is welded to the first tenon groove 120 , or the second tenon 420 is welded to the second tenon groove 220 .
将支架件40的一端通过焊接的方式连接于第一连接件10或第二连接件20,能够提高支架件40对密封件30的支撑力度,进一步保证密封效果。另外,只对支架件40的一端进行焊接能够保证便利的拆卸密封连接装置。Connecting one end of the bracket 40 to the first connector 10 or the second connector 20 by welding can improve the support strength of the bracket 40 on the sealing member 30 and further ensure the sealing effect. In addition, welding only one end of the bracket 40 can ensure convenient disassembly of the sealing connection device.
图9中示出了通道空间1a2处于高压状态时密封件30、支架件40和支撑件50的位置关系。图9中的箭头示出了通道空间1a2处于高压状态时密封件30与支架件40的受力方向。通道空间1a2处于高压状态时,通道空间1a2内压力大于通道空间1a2外部压力,密封件30受力抵接于支撑件50上,第二凸缘520对密封件30起到支撑作用,能够避免密封件30发生较大位移而影响密封效果。此状态下,支架件40也同样受力,支架件40能够分担密封件30受到的压力,进一步保证密封连接装置的密封效果。FIG9 shows the positional relationship between the seal 30, the bracket 40 and the support 50 when the channel space 1a2 is in a high-pressure state. The arrows in FIG9 show the force directions of the seal 30 and the bracket 40 when the channel space 1a2 is in a high-pressure state. When the channel space 1a2 is in a high-pressure state, the pressure inside the channel space 1a2 is greater than the pressure outside the channel space 1a2. The seal 30 is forced to abut against the support 50, and the second flange 520 supports the seal 30, which can prevent the seal 30 from being displaced significantly and affecting the sealing effect. In this state, the bracket 40 is also subjected to force, and the bracket 40 can share the pressure on the seal 30, further ensuring the sealing effect of the sealing connection device.
在一可选实施例中,当通道空间1a2处于高压状态时,第一安装孔110的直径和第二安装孔210的直径占支架件40内径的比例范围为1/4至1/2。In an optional embodiment, when the channel space 1a2 is in a high pressure state, the ratio of the diameter of the first mounting hole 110 and the diameter of the second mounting hole 210 to the inner diameter of the bracket member 40 is in the range of 1/4 to 1/2.
第一安装孔110直径对应第一管a1直径,当第一安装孔110直径占支架件40内径的比例小于1/4时,通道空间1a2内容易残留,进而降低电子化学品的合成纯度。The diameter of the first mounting hole 110 corresponds to the diameter of the first tube a1. When the ratio of the diameter of the first mounting hole 110 to the inner diameter of the bracket 40 is less than 1/4, residues are easily left in the channel space 1a2, thereby reducing the synthesis purity of electronic chemicals.
当第一安装孔110直径与第二安装孔210直径占支架件40内径的比例大于1/2时,将降低第一连接件10与第二连接件20的强度,存在影响密封连接装置的密封效果。When the ratio of the diameter of the first mounting hole 110 and the diameter of the second mounting hole 210 to the inner diameter of the bracket 40 is greater than 1/2, the strength of the first connecting member 10 and the second connecting member 20 will be reduced, which may affect the sealing effect of the sealing connection device.
应用本申请实施例提供的密封连接装置与现有技术中的高真空法兰及高压法兰的使用工况的对比数据如下表1所示。The comparative data of the use conditions of the sealing connection device provided by the embodiment of the present application and the high vacuum flange and the high pressure flange in the prior art are shown in Table 1 below.
表1为本申请实施例的密封连接装置与现有技术中的法兰在不同使用工况下的数据。Table 1 shows the data of the sealing connection device of the embodiment of the present application and the flange in the prior art under different operating conditions.
由表1可知,现有技术中的高真空法兰无法长时间适用于高压工况,同样的高压法兰无法长时间适用于高真空工况,而本申请提供的密封连接装置可同时长时间适用高温、高压和高真空法兰。It can be seen from Table 1 that the high vacuum flange in the prior art cannot be used for a long time in high pressure conditions, and similarly, the high pressure flange cannot be used for a long time in high vacuum conditions. However, the sealing connection device provided in the present application can be used for high temperature, high pressure and high vacuum flanges for a long time at the same time.
应当理解,以上实施例均为示例性的,不用于包含权利要求所包含的所有可能的实施方式。在不脱离本公开的范围的情况下,还可以在以上实施例的基础上做出各种变形和改变。同样的,也可以对以上实施例的各个技术特征进行任意组合,以形成可能没有被明确描述的本申请的另外的实施例。因此,上述实施例仅表达了本申请的几种实施方式,不对本申请专利的保护范围进行限制。It should be understood that the above embodiments are exemplary and are not intended to include all possible implementations included in the claims. Various modifications and changes may be made on the basis of the above embodiments without departing from the scope of the present disclosure. Similarly, the various technical features of the above embodiments may be arbitrarily combined to form other embodiments of the present application that may not be explicitly described. Therefore, the above embodiments only express several implementations of the present application and do not limit the scope of protection of the patent of this application.
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US20140312570A1 (en) * | 2013-04-18 | 2014-10-23 | Bal Seal Engineering, Inc. | Interlocking face seal assemblies and related methods |
CN207213397U (en) * | 2017-08-18 | 2018-04-10 | 深圳市万斯得自动化设备有限公司 | Adapter assembly |
CN110285242A (en) * | 2019-07-01 | 2019-09-27 | 温州齐力流体设备有限公司 | A kind of Y type check-valves |
CN216143380U (en) * | 2021-07-31 | 2022-03-29 | 无锡龙森真空科技有限公司 | Central support for vacuum connection |
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US20140312570A1 (en) * | 2013-04-18 | 2014-10-23 | Bal Seal Engineering, Inc. | Interlocking face seal assemblies and related methods |
CN207213397U (en) * | 2017-08-18 | 2018-04-10 | 深圳市万斯得自动化设备有限公司 | Adapter assembly |
CN110285242A (en) * | 2019-07-01 | 2019-09-27 | 温州齐力流体设备有限公司 | A kind of Y type check-valves |
CN216143380U (en) * | 2021-07-31 | 2022-03-29 | 无锡龙森真空科技有限公司 | Central support for vacuum connection |
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