CN118497675B - Riving knife coating and preparation method thereof - Google Patents
Riving knife coating and preparation method thereof Download PDFInfo
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- CN118497675B CN118497675B CN202410979656.6A CN202410979656A CN118497675B CN 118497675 B CN118497675 B CN 118497675B CN 202410979656 A CN202410979656 A CN 202410979656A CN 118497675 B CN118497675 B CN 118497675B
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- riving knife
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- 238000010345 tape casting Methods 0.000 title claims abstract description 103
- 238000002360 preparation method Methods 0.000 title claims abstract description 20
- 238000000576 coating method Methods 0.000 claims abstract description 234
- 239000011248 coating agent Substances 0.000 claims abstract description 233
- 239000011159 matrix material Substances 0.000 claims abstract description 190
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 claims abstract description 145
- WGLPBDUCMAPZCE-UHFFFAOYSA-N Trioxochromium Chemical compound O=[Cr](=O)=O WGLPBDUCMAPZCE-UHFFFAOYSA-N 0.000 claims abstract description 108
- 229910000423 chromium oxide Inorganic materials 0.000 claims abstract description 104
- 238000000034 method Methods 0.000 claims abstract description 72
- 238000004140 cleaning Methods 0.000 claims abstract description 34
- 238000001755 magnetron sputter deposition Methods 0.000 claims abstract description 22
- 238000007781 pre-processing Methods 0.000 claims abstract description 12
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 claims description 143
- 229910052786 argon Inorganic materials 0.000 claims description 87
- 239000011651 chromium Substances 0.000 claims description 63
- 229910052804 chromium Inorganic materials 0.000 claims description 45
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 44
- 238000011010 flushing procedure Methods 0.000 claims description 34
- MUBZPKHOEPUJKR-UHFFFAOYSA-N Oxalic acid Chemical compound OC(=O)C(O)=O MUBZPKHOEPUJKR-UHFFFAOYSA-N 0.000 claims description 33
- 239000004215 Carbon black (E152) Substances 0.000 claims description 32
- 239000012459 cleaning agent Substances 0.000 claims description 32
- 229930195733 hydrocarbon Natural products 0.000 claims description 32
- 150000002430 hydrocarbons Chemical class 0.000 claims description 32
- -1 argon ions Chemical class 0.000 claims description 31
- 238000010438 heat treatment Methods 0.000 claims description 27
- 230000008569 process Effects 0.000 claims description 27
- 238000001035 drying Methods 0.000 claims description 26
- 239000000758 substrate Substances 0.000 claims description 24
- 238000000151 deposition Methods 0.000 claims description 18
- 239000007789 gas Substances 0.000 claims description 13
- 239000001301 oxygen Substances 0.000 claims description 13
- 229910052760 oxygen Inorganic materials 0.000 claims description 13
- 238000002791 soaking Methods 0.000 claims description 12
- 235000006408 oxalic acid Nutrition 0.000 claims description 11
- SNRUBQQJIBEYMU-UHFFFAOYSA-N dodecane Chemical compound CCCCCCCCCCCC SNRUBQQJIBEYMU-UHFFFAOYSA-N 0.000 claims description 10
- 229940094933 n-dodecane Drugs 0.000 claims description 10
- 238000004806 packaging method and process Methods 0.000 claims description 10
- 230000009471 action Effects 0.000 claims description 9
- 230000005684 electric field Effects 0.000 claims description 9
- 239000013077 target material Substances 0.000 claims description 8
- GTJOHISYCKPIMT-UHFFFAOYSA-N 2-methylundecane Chemical compound CCCCCCCCCC(C)C GTJOHISYCKPIMT-UHFFFAOYSA-N 0.000 claims description 5
- SGVYKUFIHHTIFL-UHFFFAOYSA-N Isobutylhexyl Natural products CCCCCCCC(C)C SGVYKUFIHHTIFL-UHFFFAOYSA-N 0.000 claims description 5
- VKPSKYDESGTTFR-UHFFFAOYSA-N isododecane Natural products CC(C)(C)CC(C)CC(C)(C)C VKPSKYDESGTTFR-UHFFFAOYSA-N 0.000 claims description 5
- 238000005406 washing Methods 0.000 claims description 2
- 230000002035 prolonged effect Effects 0.000 abstract description 9
- 230000000052 comparative effect Effects 0.000 description 18
- 239000013078 crystal Substances 0.000 description 18
- 238000004506 ultrasonic cleaning Methods 0.000 description 15
- 238000005229 chemical vapour deposition Methods 0.000 description 14
- 230000008021 deposition Effects 0.000 description 9
- 238000001816 cooling Methods 0.000 description 8
- 230000000694 effects Effects 0.000 description 8
- 239000000463 material Substances 0.000 description 8
- 229910052751 metal Inorganic materials 0.000 description 8
- 239000002184 metal Substances 0.000 description 8
- 239000000126 substance Substances 0.000 description 7
- 238000006243 chemical reaction Methods 0.000 description 6
- 239000011247 coating layer Substances 0.000 description 6
- 238000005260 corrosion Methods 0.000 description 6
- 230000007797 corrosion Effects 0.000 description 6
- 238000001878 scanning electron micrograph Methods 0.000 description 6
- 238000003466 welding Methods 0.000 description 5
- 238000005299 abrasion Methods 0.000 description 4
- 230000009286 beneficial effect Effects 0.000 description 4
- QDOXWKRWXJOMAK-UHFFFAOYSA-N dichromium trioxide Chemical compound O=[Cr]O[Cr]=O QDOXWKRWXJOMAK-UHFFFAOYSA-N 0.000 description 4
- 230000003746 surface roughness Effects 0.000 description 4
- 238000012360 testing method Methods 0.000 description 4
- 230000003749 cleanliness Effects 0.000 description 3
- 239000012535 impurity Substances 0.000 description 3
- 239000010410 layer Substances 0.000 description 3
- 238000012986 modification Methods 0.000 description 3
- 230000004048 modification Effects 0.000 description 3
- 238000004544 sputter deposition Methods 0.000 description 3
- 238000002441 X-ray diffraction Methods 0.000 description 2
- 150000001875 compounds Chemical class 0.000 description 2
- 238000005137 deposition process Methods 0.000 description 2
- 238000004090 dissolution Methods 0.000 description 2
- 239000000428 dust Substances 0.000 description 2
- 239000004519 grease Substances 0.000 description 2
- 150000002739 metals Chemical class 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 230000003647 oxidation Effects 0.000 description 2
- 238000007254 oxidation reaction Methods 0.000 description 2
- 238000007790 scraping Methods 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- 238000009825 accumulation Methods 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 239000006118 anti-smudge coating Substances 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- UOUJSJZBMCDAEU-UHFFFAOYSA-N chromium(3+);oxygen(2-) Chemical group [O-2].[O-2].[O-2].[Cr+3].[Cr+3] UOUJSJZBMCDAEU-UHFFFAOYSA-N 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 238000000227 grinding Methods 0.000 description 1
- 230000002401 inhibitory effect Effects 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 238000005289 physical deposition Methods 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/08—Oxides
- C23C14/083—Oxides of refractory metals or yttrium
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/02—Pretreatment of the material to be coated
- C23C14/021—Cleaning or etching treatments
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/14—Metallic material, boron or silicon
- C23C14/16—Metallic material, boron or silicon on metallic substrates or on substrates of boron or silicon
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/58—After-treatment
- C23C14/5846—Reactive treatment
- C23C14/5853—Oxidation
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23G—CLEANING OR DE-GREASING OF METALLIC MATERIAL BY CHEMICAL METHODS OTHER THAN ELECTROLYSIS
- C23G5/00—Cleaning or de-greasing metallic material by other methods; Apparatus for cleaning or de-greasing metallic material with organic solvents
- C23G5/02—Cleaning or de-greasing metallic material by other methods; Apparatus for cleaning or de-greasing metallic material with organic solvents using organic solvents
- C23G5/024—Cleaning or de-greasing metallic material by other methods; Apparatus for cleaning or de-greasing metallic material with organic solvents using organic solvents containing hydrocarbons
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Physical Vapour Deposition (AREA)
- Cutting Tools, Boring Holders, And Turrets (AREA)
Abstract
The invention provides a riving knife coating and a preparation method thereof, comprising the following steps: s1, cleaning the surface of a riving knife matrix; s2, preprocessing the riving knife matrix after the cleaning treatment; s3, forming a chromium element coating on the surface of the pretreated riving knife matrix; s4, preparing a chromium oxide coating with a microcrystalline structure on the chromium element coating by adopting a radio frequency magnetron sputtering method to obtain a riving knife coating; therefore, the roughness of the surface of the coating of the riving knife is reduced, the binding force between the coating and the riving knife matrix is improved, and the service life of the riving knife is prolonged.
Description
Technical Field
The invention relates to the technical field of riving knife coatings, in particular to a riving knife coating and a preparation method thereof.
Background
In the bonding process, along with the increase of the routing times of the riving knife, the surface of the ceramic riving knife can be accumulated with dirt. The bonding method is mainly characterized in that the riving knife is contacted with the base materials of the frame and the chip and the wire rods bonded by the lead wires in the bonding process, the materials are metal materials, aluminum, silver, copper and other nonferrous metals, the surface of the riving knife can rub with the metals in the bonding process due to ultrasonic energy, so that metal dirt is accumulated on the surface of the riving knife, and along with the increase of bonding times, the accumulation is increased, and finally the quality of the bonded chip is influenced. Meanwhile, in the wire bonding process, due to the effect of ultrasonic waves, the surface of the riving knife and the wire frame vibrate and rub at high frequency, the surface of the riving knife is gradually worn (as shown in fig. 1), the original surface morphology and structure cannot be maintained, the wire bonding times of the riving knife are affected, and the service life of the riving knife is judged according to the maximum application wire bonding times before the failure of the wire bonding of the chip.
In the prior art, a chromium oxide coating is manufactured by using Chemical Vapor Deposition (CVD) to solve the technical problem that a riving knife is gradually worn in the wire bonding process, but chromium oxide manufactured by using the CVD is easy to grow into a columnar crystal structure of a {1, 1} surface, so that the following technical problems exist in the practical application process:
The columnar crystal structure of the {1, 1} planes means that the chromium oxide coating consists of many columnar crystals perpendicular to the substrate. These crystals may form uneven surfaces during growth because the growth rate and direction of the crystals may not be uniform; due to the growth characteristics and possible non-uniformity of columnar crystals, the surface of the coating layer may be uneven, resulting in an increase in the surface roughness of the riving knife. The increase of the roughness can influence the service performance and the service life of the riving knife, the phenomenon of pulling out the crystal grains occurs in the actual wire bonding process, and the service life is not obviously improved.
The bond between the chromia coating and the riving knife substrate may be weak, especially at the grain boundaries or interfaces between the grains and the substrate. This may be due to temperature gradients, stress distribution or material mismatch during the coating preparation process. During wire bonding, the riving knife is subjected to mechanical stresses, such as stretching, bending, and the like. If the bonding force between the coating and the substrate is weak, the mechanical stresses may cause the grains to be pulled out of the substrate, affecting the service performance and life of the riving knife.
Although CVD processes can produce high quality chromium oxide coatings, columnar crystalline structures in the coating can lead to defects or stress concentrations within the coating. These imperfections or stress concentrations may become the starting point for coating failure, thereby reducing the useful life of the riving knife.
The above disclosure of background art is only for aiding in understanding the inventive concept and technical solution of the present application, and it does not necessarily belong to the prior art of the present patent application, nor does it necessarily give technical teaching; the above background should not be used to assess the novelty and creativity of the present application in the event that no clear evidence indicates that such is already disclosed prior to the filing date of the present patent application.
Disclosure of Invention
In order to solve the technical problems that in the prior art, a chromium oxide coating is manufactured by using Chemical Vapor Deposition (CVD) to solve the problems that in the wire bonding process of a riving knife, the surface roughness of the riving knife is increased, the binding force between the coating and a matrix is weak, the service life of the riving knife is prolonged and the like, the invention provides the riving knife coating and a preparation method thereof, which reduce the surface roughness of the riving knife coating, promote the binding force between the coating and the riving knife matrix, and ensure that the service life of the riving knife is prolonged.
In order to achieve the above purpose, the technical scheme of the invention is as follows:
the invention provides a preparation method of a riving knife coating, which comprises the following steps:
s1, cleaning the surface of a riving knife matrix;
S2, preprocessing the riving knife matrix after the cleaning treatment;
S3, forming a chromium element coating on the surface of the pretreated riving knife matrix;
S4, preparing a chromium oxide coating with a microcrystalline structure on the chromium element coating by adopting a radio frequency magnetron sputtering method to obtain the riving knife coating.
According to the riving knife coating and the preparation method thereof, the roughness of the surface of the riving knife coating is reduced, the binding force between the coating and the riving knife matrix is improved, and the service life of the riving knife is prolonged.
As a preferable technical scheme, the step S3 forms a chromium element coating on the surface of the pretreated riving knife matrix, and specifically comprises the following steps:
s301, vacuumizing the cavity, and simultaneously heating the riving knife matrix to more than 500 ℃ to form a vacuum chamber;
s302, injecting argon into the vacuum chamber;
s303, the chromium target is used as a cathode, ionized argon ions are attracted to bombard the chromium target at a high speed, chromium atoms are separated from the chromium target, a radio frequency power supply is adopted to form a negative bias voltage on the chromium target, and the chromium atoms are deposited on the surface of the chopper subjected to pretreatment under the action of an electric field to form a chromium element coating.
As a preferable technical scheme, the step S4 is to prepare a chromium oxide coating with a microcrystalline structure on the chromium element coating by adopting a radio frequency magnetron sputtering method, and specifically comprises the following steps:
S401, continuously vacuumizing the cavity, and simultaneously heating the riving knife matrix to more than 500 ℃ to form a vacuum chamber;
s402, injecting argon into the vacuum chamber;
s403, using a CrO 3 target as a cathode, attracting ionized argon ions to bombard the CrO 3 target at a high speed, separating CrO 3 molecules from the CrO 3 target, decomposing the CrO 3 molecules at the heating temperature of a chopper matrix to generate Cr 2O3 and O 2, forming a negative bias on the CrO 3 target by adopting a radio frequency power supply, and simultaneously depositing Cr 2O3 on the surface of the chromium element coating under the condition that O 2 forms a micro-oxygen atmosphere to form a chromium oxide coating.
As a preferable technical scheme, the air pressure in the vacuum chamber is less than or equal to 10 -5 Bar, the pressure flow rate of argon gas injected into the vacuum chamber is more than 150ml/min, the negative bias formed on the chromium target is minus 100 to minus 200V, and the negative bias formed on the CrO 3 target is minus 100 to minus 200V.
As a preferable technical scheme, the step S1 is to clean the surface of the riving knife matrix, and comprises the following steps:
S101, ultrasonically cleaning the surface of a riving knife matrix;
S102, washing the surface of the ultrasonic-cleaned riving knife matrix with high-pressure water;
S103, placing the surface of the riving knife matrix subjected to high-pressure water flushing into a hydrocarbon cleaning agent for soaking;
s104, spin-drying the surface of the soaked riving knife matrix;
s105, packaging the spin-dried riving knife matrix in a dust-free environment.
As a preferable technical scheme, the hydrocarbon cleaning agent comprises the following components in percentage by weight:
60-80% of n-dodecane or isododecane;
10 to 20 percent of 1,2, 3-pentafluoropropane or 1, 3-pentafluoropropane;
10-20% of oxalic acid.
As a preferable technical scheme, the temperature of the hydrocarbon cleaning agent is 60-80 ℃, and the soaking time of the hydrocarbon cleaning agent is more than 3 hours.
As a preferred technical scheme, step S2 is to pretreat the riving knife after the cleaning treatment, and includes the following steps:
s201, after vacuumizing the cavity, introducing argon into the cavity;
s202, after the cavity is continuously vacuumized, a direct-current power supply is turned on, argon gas forms a plasma state, ionized argon ions bombard the surface of the riving knife matrix, the process lasts for more than 30 minutes, and the roughness of the surface of the riving knife matrix is less than or equal to Ra0.05μm after pretreatment.
In another aspect, the present invention provides a riving knife coating prepared according to the method for preparing a riving knife coating as described in any one of the above.
As a preferred technical scheme, the method comprises the following steps: the surface of the riving knife matrix is sequentially provided with a chromium element coating and a chromium oxide coating from inside to outside, the chromium oxide coating is of a microcrystalline structure, and the thickness of the chromium oxide coating is 200 nm-1200 nm.
The riving knife coating and the preparation method thereof provided by the invention have the following beneficial effects:
1) The roughness of the surface of the coating of the riving knife is reduced, the binding force between the coating and the riving knife matrix is improved, and the service life of the riving knife is prolonged;
2) The method purposefully selects the surface of the riving knife matrix to carry out cleaning treatment in the step S1, prevents the dirt on the surface of the riving knife matrix from influencing the effect of the coating, avoids the reaction of part of dirt and the coating, and improves the binding force and thickness uniformity of the subsequent coating;
The method purposefully selects the step S2 to pretreat the riving knife matrix after the cleaning treatment, so that not only is the gas impurities adsorbed on the surface of the riving knife removed, but also the molecular-level cleanliness is presented, the roughness of the surface of the riving knife matrix is reduced, and the subsequent binding force of a chromium element coating formed on the surface of the riving knife matrix is improved;
According to the application, the chromium element coating is purposefully formed on the surface of the pretreated riving knife matrix in the step S3, so that the subsequent binding force of forming the chromium oxide coating on the surface of the riving knife matrix is improved, the chromium element is an inactive metal element, and the oxide (such as chromium oxide) has higher chemical stability, and when the chromium element is deposited on the surface of the riving knife in a coating form, a stable chemical bond or interface reaction layer is formed between the coating and the matrix, so that the binding force between the coating and the riving knife matrix is enhanced;
According to the application, the chromium oxide coating with a microcrystalline structure is manufactured on the chromium element coating in the step S4 by a radio frequency magnetron sputtering method, so that the riving knife coating is obtained, the fine adjustment and control of the deposition process can be realized by precisely controlling sputtering parameters (such as gas flow, gas pressure, matrix temperature, negative bias and the like) by the radio frequency magnetron sputtering method, the high controllability is beneficial to obtaining a uniform and compact chromium oxide coating, the problems of uneven coating and columnar crystal structure possibly occurring in a CVD method are avoided, the roughness of the surface of the riving knife coating is reduced, the binding force between the coating and the riving knife matrix is improved, and the service life of the riving knife is prolonged;
The application purposefully selects chromium element coating with excellent hardness, wear resistance, corrosion resistance and good conductivity; the chromium element coating formed on the substrate of the riving knife can obviously improve the service life and the performance stability of the riving knife, and meanwhile, the chromium element coating can also be used as a bottom layer of a subsequent chromium oxide coating, so that the binding force and the overall performance between the chromium oxide coating and the substrate are improved;
The chromium oxide coating is purposefully selected to have excellent hardness, wear resistance, corrosion resistance, optical performance and the like, and the chromium oxide coating prepared by the radio frequency magnetron sputtering method can further improve the performances and meet the requirements of specific applications;
The application purposefully selects the chromium oxide coating to be in a microcrystalline structure, the microcrystalline structure enables the surface of the chromium oxide coating to be denser, reduces the contact area between a corrosive medium and a substrate, thereby improving the corrosion resistance of the coating, the chromium oxide coating with the microcrystalline structure has high hardness, can effectively resist abrasion and scraping of external force, the coating can keep good performance for a long time in friction and abrasion environments, the microcrystalline structure is better embodied, the coating has better protection effect in high-temperature oxidation environments, the chromium oxide coating with the microcrystalline structure has stronger interfacial bonding force with the substrate, and the coating can be effectively prevented from falling off or peeling off when being subjected to external force.
3) The radio frequency magnetron sputtering method mainly depends on bombardment of high-energy argon ions on a target material, so that target material molecules or atoms are separated and deposited on a substrate; this is a physical process, unlike the chemical vapor reaction process of the CVD method; the physical deposition process is easier to control the growth morphology and structure of the coating, and the possibility of forming columnar crystal structures is reduced;
In the radio frequency magnetron sputtering process, negative bias formed on the target material is favorable for attracting ionized argon ions and accelerating the speed of bombarding the target material, so that the sputtering yield of the target material is increased; meanwhile, cr 2O3 generated by decomposing CrO 3 molecules on a heated substrate can be rapidly deposited on the surface of the substrate under the micro-oxygen atmosphere formed by O 2 to form a uniform chromium oxide coating, and the micro-oxygen atmosphere and the control of the substrate temperature are beneficial to inhibiting the growth of columnar crystals; and meanwhile, the micro-oxygen atmosphere prevents oxygen vacancies of the chromium oxide coating to influence the density, so that a uniform and compact chromium oxide coating is obtained.
4) The negative bias formed on the CrO 3 target material can change the speed and angle of the chromium oxide atoms entering the surface of the chopper, and the formation of the negative bias on the CrO 3 target material by adopting a radio frequency power supply can directly influence the roughness and the grain size of the surface of the chromium oxide coating.
5) The application purposefully selects hydrocarbon cleaning agent, and the formula of the hydrocarbon cleaning agent purposefully selects the following components in percentage by weight: 60-80% of n-dodecane or isododecane; 10 to 20 percent of 1,2, 3-pentafluoropropane or 1, 3-pentafluoropropane; the oxalic acid 10% -20%, the hydrocarbon cleaning agent formula is compounded by the components, so that a plurality of substances can be dissolved, grease, dust and other stains can be removed through strong dissolution, the hydrocarbon cleaning agent has strong activity and inertness, and other elements form stable compounds, so that the effect of the hydrocarbon cleaning agent is better exerted, and the aim of removing metal dirt is fulfilled by generating new substances through chemical reaction aiming at metal type dirt.
6) After the cavity is continuously vacuumized, a direct-current power supply is turned on, argon gas forms a plasma state, ionized argon ions bombard the surface of the riving knife matrix to remove gas impurities adsorbed on the surface of the riving knife, the molecular-level cleanliness is presented, the binding force of a subsequent chromium element coating is facilitated, the process lasts for more than 30 minutes, and after pretreatment, the roughness of the surface of the riving knife matrix is less than or equal to Ra0.05mu m, and the binding force of the subsequent chromium element coating is further facilitated;
7) The thickness of the chromium oxide coating is purposefully selected to be 200-1200 nm, so that the binding force of the riving knife coating is improved, and the service life of the riving knife coating is prolonged;
Because the service life of the riving knife coating is prolonged, the alarm rate of the product in the actual welding line process is reduced, and the appearance characteristics of the first welding point and the second welding point of the product are maintained for a longer time, so that the quality is more stable and the consistency is better.
Drawings
FIG. 1 is an SEM image of a surface of a substrate of a riving knife provided in the background art;
FIG. 2 is an SEM image of the surface of the riving knife substrate in step S1 provided by the present invention;
FIG. 3 is an XRD pattern for a chromium oxide coating provided in example 1 of the present invention;
FIG. 4 is an SEM image of a chromium oxide coating produced by a CVD (chemical vapor deposition) process as provided in the background;
FIG. 5 is an SEM image of a chromium oxide coating produced by the RF magnetron sputtering method provided in example 1 of the present invention;
FIG. 6 is a schematic illustration of a standard block ground down during the thickness test step of the riving knife anti-smudge coating provided by the present invention.
Detailed Description
Preferred embodiments of the present invention will be described in detail below with reference to the accompanying drawings.
The invention provides a preparation method of a riving knife coating, which comprises the following steps:
s1, cleaning the surface of a riving knife matrix;
S2, preprocessing the riving knife matrix after the cleaning treatment;
S3, forming a chromium element coating on the surface of the pretreated riving knife matrix;
S4, preparing a chromium oxide coating with a microcrystalline structure on the chromium element coating by adopting a radio frequency magnetron sputtering method to obtain the riving knife coating.
The preparation method of the riving knife coating reduces the roughness of the surface of the riving knife coating, improves the binding force between the coating and the riving knife matrix, and prolongs the service life of the riving knife.
The method purposefully selects the surface of the riving knife matrix to carry out cleaning treatment in the step S1, prevents the dirt on the surface of the riving knife matrix from influencing the effect of the coating, avoids the reaction of part of dirt and the coating, and improves the binding force and thickness uniformity of the subsequent coating;
The method purposefully selects the step S2 to pretreat the riving knife matrix after the cleaning treatment, so that not only is the gas impurities adsorbed on the surface of the riving knife removed, but also the molecular-level cleanliness is presented, the roughness of the surface of the riving knife matrix is reduced, and the subsequent binding force of a chromium element coating formed on the surface of the riving knife matrix is improved;
According to the application, the chromium element coating is formed on the surface of the pretreated riving knife matrix in the step S3 in a purposeful manner, so that the binding force of the chromium oxide coating formed on the surface of the riving knife matrix is improved;
According to the application, the chromium oxide coating with a microcrystalline structure is manufactured on the chromium element coating in the step S4 by a radio frequency magnetron sputtering method, so that the riving knife coating is obtained, the fine adjustment and control of the deposition process can be realized by precisely controlling sputtering parameters (such as gas flow, gas pressure, matrix temperature, negative bias and the like) by the radio frequency magnetron sputtering method, the high controllability is beneficial to obtaining a uniform and compact chromium oxide coating, the problems of uneven coating and columnar crystal structure possibly occurring in a CVD method are avoided, the roughness of the surface of the riving knife coating is reduced, the binding force between the coating and the riving knife matrix is improved, and the service life of the riving knife is prolonged;
The application purposefully selects chromium element coating with excellent hardness, wear resistance, corrosion resistance and good conductivity; the chromium element coating formed on the substrate of the riving knife can obviously improve the service life and the performance stability of the riving knife, and meanwhile, the chromium element coating can also be used as a bottom layer of a subsequent chromium oxide coating, so that the binding force and the overall performance between the chromium oxide coating and the substrate are improved;
The chromium oxide coating is purposefully selected to have excellent hardness, wear resistance, corrosion resistance, optical performance and the like, and the chromium oxide coating prepared by the radio frequency magnetron sputtering method can further improve the performances and meet the requirements of specific applications;
The application purposefully selects the chromium oxide coating to be in a microcrystalline structure, the microcrystalline structure enables the surface of the chromium oxide coating to be denser, reduces the contact area between a corrosive medium and a substrate, thereby improving the corrosion resistance of the coating, the chromium oxide coating with the microcrystalline structure has high hardness, can effectively resist abrasion and scraping of external force, the coating can keep good performance for a long time in friction and abrasion environments, the microcrystalline structure is better embodied, the coating has better protection effect in high-temperature oxidation environments, the chromium oxide coating with the microcrystalline structure has stronger interfacial bonding force with the substrate, and the coating can be effectively prevented from falling off or peeling off when being subjected to external force.
The invention provides a preparation method of a riving knife coating, which comprises the following steps:
s1, cleaning the surface of a riving knife matrix, which specifically comprises the following steps:
s101, ultrasonically cleaning the surface of a riving knife matrix, wherein the ultrasonic cleaning frequency is 40-80 KHZ;
s102, carrying out high-pressure water flushing on the surface of the ultrasonic-cleaned riving knife matrix, wherein the water pressure of the high-pressure water flushing is more than or equal to 10Bar, and the time of the high-pressure water flushing is more than 20 minutes;
s103, placing the surface of the riving knife matrix subjected to high-pressure water flushing into a hydrocarbon cleaning agent at 60-80 ℃ for soaking for more than 3 hours;
s104, spin-drying is carried out on the surface of the soaked riving knife matrix, spin-drying is carried out in a centrifugal machine, the rotating speed of the centrifugal machine is 10000RPM, and the spin-drying time is more than or equal to 15 minutes;
s105, packaging the spin-dried riving knife matrix in a dust-free environment, wherein the dust-free environment grade is within ten thousand;
s2, preprocessing the riving knife matrix after cleaning, and specifically comprising the following steps:
S201, vacuumizing the cavity, and introducing argon into the cavity when the air pressure in the cavity is below 10 -2 Bar;
S202, continuously vacuumizing the cavity, when the air pressure in the cavity is below 10 -3 Bar, turning on a direct current power supply to 500V, forming a plasma state by argon, bombarding the surface of the riving knife matrix by ionized argon ions, and after the process lasts for more than 30 minutes, enabling the roughness of the surface of the riving knife matrix to be less than or equal to Ra0.05μm;
s3, forming a chromium element coating on the surface of the pretreated riving knife matrix, which specifically comprises the following steps:
S301, continuously vacuumizing the cavity to below 10 -5 Bar, and simultaneously heating the riving knife matrix to above 500 ℃ to form a vacuum chamber;
S302, injecting argon into the vacuum chamber, wherein the flow rate of the pressure of the argon injected into the vacuum chamber is more than 150ml/min;
S303, a chromium target is used as a cathode, ionized argon ions are attracted to bombard the chromium target at a high speed, chromium atoms are separated from the chromium target, a radio frequency power supply is adopted to form a negative bias voltage on the chromium target, the negative bias voltage formed on the chromium target is-100 to-200V, the chromium atoms are deposited on the surface of the chopper subjected to pretreatment under the action of an electric field, a chromium element coating is formed, and the thickness of the chromium element coating is controlled to be 50-100 nm;
s4, preparing a chromium oxide coating with a microcrystalline structure on the chromium element coating by adopting a radio frequency magnetron sputtering method to obtain a riving knife coating, which specifically comprises the following steps:
S401, moving a CrO 3 target to the right opposite side of the riving knife matrix, and keeping the distance from the riving knife matrix to 50-150 mm, continuously vacuumizing the cavity until the air pressure is less than or equal to 10 -5 Bar, and simultaneously heating the riving knife matrix to more than 500 ℃ to form a vacuum chamber;
s402, injecting argon into the vacuum chamber, wherein the flow rate of the pressure of injecting the argon into the vacuum chamber is more than 150ml/min;
S403, using a CrO 3 target as a cathode, attracting ionized argon ions to bombard the CrO 3 target at a high speed, separating CrO 3 molecules from the CrO 3 target, decomposing the CrO 3 molecules at the heating temperature (more than 500 ℃) of a chopper matrix to generate Cr 2O3 and O 2, adopting a radio frequency power supply to form negative bias on the CrO 3 target, forming negative bias on the CrO 3 target to be-100 to-200V, and simultaneously depositing Cr 2O3 on the surface of a chromium element coating under the micro-oxygen atmosphere formed by O 2 to form a chromium oxide coating, wherein the chromium oxide coating has a microcrystalline structure, and the thickness of the chromium oxide coating is 200-1200 nm;
and S5, after the coating deposition of the riving knife is finished, cooling the vacuum chamber, releasing air pressure and closing the vacuum chamber.
Preferably, the hydrocarbon cleaning agent comprises the following components in percentage by weight: 60-80% of n-dodecane or isododecane; 10 to 20 percent of 1,2, 3-pentafluoropropane or 1, 3-pentafluoropropane; 10% -20% of oxalic acid; the formula of the hydrocarbon cleaning agent is selected and compounded as above, so that a plurality of substances can be dissolved, grease, dust and other stains can be removed through strong dissolution, the hydrocarbon cleaning agent has strong activity and inertness, and can form stable compounds with other elements, thereby better playing the role of the hydrocarbon cleaning agent, aiming at metal type dirt, and the purpose of removing the metal dirt is achieved by generating new substances through chemical reaction.
Preferably, the negative bias voltage generated by the radio frequency power supply is calculated by the following formula:
V = k(W/P)^1/2；
Wherein V is a negative bias voltage generated by the radio frequency power supply;
k is a factor dependent on the electrode area;
W is radio frequency power;
p is the gas pressure.
The invention provides a riving knife coating, which is prepared according to the preparation method of any one of the riving knife coating, and comprises the following steps: the surface of the riving knife matrix is sequentially provided with a chromium element coating and a chromium oxide coating from inside to outside, the chromium oxide coating is of a microcrystalline structure, the thickness of the chromium oxide coating is 200 nm-1200 nm, and the thickness of the chromium element coating is 50-100 nm.
Example 1
The invention provides a preparation method of a riving knife coating, which comprises the following steps:
s1, cleaning the surface of a riving knife matrix, which specifically comprises the following steps:
s101, carrying out ultrasonic cleaning on the surface of a riving knife matrix, wherein the frequency of the ultrasonic cleaning is 40KHZ;
s102, carrying out high-pressure water flushing on the surface of the ultrasonic-cleaned riving knife matrix, wherein the water pressure of the high-pressure water flushing is 10Bar, and the time of the high-pressure water flushing is 21 minutes;
s103, placing the surface of the riving knife matrix subjected to high-pressure water flushing into a 60 ℃ three-dimensional hydrocarbon cleaning agent for soaking for 3.1 hours;
the hydrocarbon cleaning agent comprises the following components in percentage by weight: 60% of n-dodecane, 20% of 1,2, 3-pentafluoropropane and 20% of oxalic acid;
s104, spin-drying is carried out on the surface of the soaked riving knife matrix, spin-drying is carried out in a centrifugal machine, the rotating speed of the centrifugal machine is 10000RPM, and the spin-drying time is 15 minutes;
s105, packaging the spin-dried riving knife matrix in a dust-free environment, wherein the dust-free environment grade is within ten thousand;
s2, preprocessing the riving knife matrix after cleaning, and specifically comprising the following steps:
S201, vacuumizing the cavity, and introducing argon into the cavity when the air pressure in the cavity is below 10 -2 Bar;
s202, continuously vacuumizing the cavity, when the air pressure in the cavity is below 10 -3 Bar, turning on a direct current power supply to 500V, forming a plasma state by argon, bombarding the surface of the riving knife matrix by ionized argon ions, and after the process lasts for more than 30 minutes, enabling the roughness of the surface of the riving knife matrix to be Ra0.05μm;
s3, forming a chromium element coating on the surface of the pretreated riving knife matrix, which specifically comprises the following steps:
S301, continuously vacuumizing the cavity to below 10 -5 Bar, and simultaneously heating the riving knife matrix to above 500 ℃ to form a vacuum chamber;
s302, injecting argon into the vacuum chamber, wherein the flow rate of the pressure of injecting the argon into the vacuum chamber is 151ml/min;
S303, the chromium target is used as a cathode, ionized argon ions are attracted to bombard the chromium target at a high speed, chromium atoms are separated from the chromium target, a radio frequency power supply is adopted to form a negative bias voltage on the chromium target, the negative bias voltage formed on the chromium target is minus 100V, the chromium atoms are deposited on the surface of the chopper subjected to pretreatment under the action of an electric field, a chromium element coating is formed, and the thickness of the chromium element coating is controlled to be 50nm;
s4, preparing a chromium oxide coating with a microcrystalline structure on the chromium element coating by adopting a radio frequency magnetron sputtering method to obtain a riving knife coating, which specifically comprises the following steps:
s401, moving the CrO3 target to the right opposite side of the riving knife matrix, keeping the distance from the riving knife matrix to 50mm, continuously vacuumizing the cavity until the air pressure is less than or equal to 10 -5 Bar, and simultaneously heating the riving knife matrix to more than 500 ℃ to form a vacuum chamber;
S402, injecting argon into the vacuum chamber, wherein the flow rate of the pressure of injecting the argon into the vacuum chamber is 151ml/min;
s403, using a CrO 3 target as a cathode, attracting ionized argon ions to bombard the CrO 3 target at a high speed, separating CrO 3 molecules from the CrO 3 target, decomposing the CrO 3 molecules at the heating temperature of a chopper matrix to generate Cr 2O3 and O 2, adopting a radio frequency power supply to form a negative bias on the CrO 3 target, forming a negative bias on the CrO 3 target to be-100V, and simultaneously depositing Cr 2O3 on the surface of a chromium element coating under the condition that O 2 forms micro-oxygen atmosphere to form a chromium oxide coating, wherein the chromium oxide coating has a microcrystalline structure, and the thickness of the chromium oxide coating is 200nm;
and S5, after the coating deposition of the riving knife is finished, cooling the vacuum chamber, releasing air pressure and closing the vacuum chamber.
The invention provides a riving knife coating, which is prepared according to the preparation method of any one of the riving knife coating, and comprises the following steps: the surface of the riving knife matrix is sequentially provided with a chromium element coating and a chromium oxide coating from inside to outside, the chromium oxide coating is of a microcrystalline structure, the thickness of the chromium oxide coating is 200nm, and the thickness of the chromium element coating is 50nm.
Example 2
The invention provides a preparation method of a riving knife coating, which comprises the following steps:
s1, cleaning the surface of a riving knife matrix, which specifically comprises the following steps:
S101, carrying out ultrasonic cleaning on the surface of a riving knife matrix, wherein the frequency of the ultrasonic cleaning is 80KHZ;
s102, carrying out high-pressure water flushing on the surface of the ultrasonic-cleaned riving knife matrix, wherein the water pressure of the high-pressure water flushing is 12Bar, and the time of the high-pressure water flushing is 22 minutes;
s103, placing the surface of the riving knife matrix subjected to high-pressure water flushing into a hydrocarbon cleaning agent at 80 ℃ for soaking for 3.2 hours;
The hydrocarbon cleaning agent comprises the following components in percentage by weight: 80% of n-dodecane, 10% of 1,2, 3-pentafluoropropane and 10% of oxalic acid;
S104, spin-drying is carried out on the surface of the soaked riving knife matrix, spin-drying is carried out in a centrifugal machine, the rotating speed of the centrifugal machine is 10000RPM, and the spin-drying time is 16 minutes;
s105, packaging the spin-dried riving knife matrix in a dust-free environment, wherein the dust-free environment grade is within ten thousand;
s2, preprocessing the riving knife matrix after cleaning, and specifically comprising the following steps:
S201, vacuumizing the cavity, and introducing argon into the cavity when the air pressure in the cavity is below 10 < -2 > Bar;
s202, continuously vacuumizing the cavity, when the air pressure in the cavity is below 10 < -3 > Bar, turning on a direct current power supply to 500V, forming a plasma state by argon, bombarding the surface of the riving knife matrix by ionized argon ions, and after the process lasts for more than 30 minutes, enabling the roughness of the surface of the riving knife matrix to be Ra0.04 mu m;
s3, forming a chromium element coating on the surface of the pretreated riving knife matrix, which specifically comprises the following steps:
S301, continuously vacuumizing the cavity to below 10 < -5 > Bar, and simultaneously heating the riving knife matrix to above 500 ℃ to form a vacuum chamber;
s302, injecting argon into the vacuum chamber, wherein the flow rate of the pressure of injecting the argon into the vacuum chamber is 153ml/min;
S303, the chromium target is used as a cathode, ionized argon ions are attracted to bombard the chromium target at a high speed, chromium atoms are separated from the chromium target, a radio frequency power supply is adopted to form a negative bias voltage on the chromium target, the negative bias voltage formed on the chromium target is-150V, the chromium atoms are deposited on the surface of the chopper subjected to pretreatment under the action of an electric field, a chromium element coating is formed, and the thickness of the chromium element coating is controlled at 75nm;
s4, preparing a chromium oxide coating with a microcrystalline structure on the chromium element coating by adopting a radio frequency magnetron sputtering method to obtain a riving knife coating, which specifically comprises the following steps:
s401, moving a CrO 3 target to the right opposite side of the riving knife matrix, keeping vacuumizing the cavity until the air pressure is less than or equal to 10 < -5 > Bar, and simultaneously heating the riving knife matrix to more than 500 ℃ to form a vacuum chamber;
s402, injecting argon into the vacuum chamber, wherein the flow rate of the pressure of injecting the argon into the vacuum chamber is 153ml/min;
S403, using a CrO 3 target as a cathode, attracting ionized argon ions to bombard the CrO 3 target at a high speed, separating CrO 3 molecules from the CrO 3 target, decomposing the CrO 3 molecules at the heating temperature of a chopper matrix to generate Cr 2O3 and O 2, adopting a radio frequency power supply to form a negative bias on the CrO 3 target, forming a negative bias on the CrO 3 target to be-150V, and simultaneously depositing Cr 2O3 on the surface of a chromium element coating under the condition that O 2 forms micro-oxygen atmosphere to form a chromium oxide coating, wherein the chromium oxide coating is of a microcrystalline structure, and the thickness of the chromium oxide coating is 750nm;
and S5, after the coating deposition of the riving knife is finished, cooling the vacuum chamber, releasing air pressure and closing the vacuum chamber.
The invention provides a riving knife coating, which is prepared according to the preparation method of any one of the riving knife coating, and comprises the following steps: the surface of the riving knife matrix is sequentially provided with a chromium element coating and a chromium oxide coating from inside to outside, the chromium oxide coating is of a microcrystalline structure, the thickness of the chromium oxide coating is 750nm, and the thickness of the chromium element coating is 75nm.
Example 3
The invention provides a preparation method of a riving knife coating, which comprises the following steps:
s1, cleaning the surface of a riving knife matrix, which specifically comprises the following steps:
s101, carrying out ultrasonic cleaning on the surface of a riving knife matrix, wherein the frequency of the ultrasonic cleaning is 60KHZ;
S102, carrying out high-pressure water flushing on the surface of the ultrasonic-cleaned riving knife matrix, wherein the water pressure of the high-pressure water flushing is 13Bar, and the time of the high-pressure water flushing is 23 minutes;
s103, placing the surface of the riving knife matrix subjected to high-pressure water flushing into a hydrocarbon cleaning agent at 70 ℃ for soaking for 3.3 hours;
the hydrocarbon cleaning agent comprises the following components in percentage by weight: 70% of isododecane, 15% of 1, 3-pentafluoropropane and 15% of oxalic acid;
S104, spin-drying is carried out on the surface of the soaked riving knife matrix, spin-drying is carried out in a centrifugal machine, the rotating speed of the centrifugal machine is 10000RPM, and the spin-drying time is 17 minutes;
s105, packaging the spin-dried riving knife matrix in a dust-free environment, wherein the dust-free environment grade is within ten thousand;
s2, preprocessing the riving knife matrix after cleaning, and specifically comprising the following steps:
S201, vacuumizing the cavity, and introducing argon into the cavity when the air pressure in the cavity is below 10 < -2 > Bar;
S202, continuously vacuumizing the cavity, when the air pressure in the cavity is below 10 < -3 > Bar, turning on a direct current power supply to 500V, forming a plasma state by argon, bombarding the surface of the riving knife matrix by ionized argon ions, and after the process lasts for more than 30 minutes, enabling the roughness of the surface of the riving knife matrix to be Ra0.03 mu m;
s3, forming a chromium element coating on the surface of the pretreated riving knife matrix, which specifically comprises the following steps:
S301, continuously vacuumizing the cavity to below 10 < -5 > Bar, and simultaneously heating the riving knife matrix to above 500 ℃ to form a vacuum chamber;
S302, injecting argon into the vacuum chamber, wherein the flow rate of the pressure of injecting the argon into the vacuum chamber is 155ml/min;
S303, the chromium target is used as a cathode, ionized argon ions are attracted to bombard the chromium target at a high speed, chromium atoms are separated from the chromium target, a radio frequency power supply is adopted to form a negative bias voltage on the chromium target, the negative bias voltage formed on the chromium target is-200V, the chromium atoms are deposited on the surface of the chopper subjected to pretreatment under the action of an electric field, a chromium element coating is formed, and the thickness of the chromium element coating is controlled to be 100nm;
s4, preparing a chromium oxide coating with a microcrystalline structure on the chromium element coating by adopting a radio frequency magnetron sputtering method to obtain a riving knife coating, which specifically comprises the following steps:
S401, moving a CrO 3 target to the right opposite side of the riving knife matrix, keeping the distance from the riving knife matrix to 150mm, continuously vacuumizing the cavity until the air pressure is less than or equal to 10 < -5 > Bar, and simultaneously heating the riving knife matrix to more than 500 ℃ to form a vacuum chamber;
s402, injecting argon into the vacuum chamber, wherein the flow rate of the pressure of injecting the argon into the vacuum chamber is 155ml/min;
S403, using a CrO 3 target as a cathode, attracting ionized argon ions to bombard the CrO 3 target at a high speed, separating CrO 3 molecules from the CrO 3 target, decomposing the CrO 3 molecules at the heating temperature of a chopper matrix to generate Cr 2O3 and O 2, adopting a radio frequency power supply to form a negative bias on the CrO 3 target, forming a negative bias on the CrO 3 target to be-200V, and simultaneously depositing Cr 2O3 on the surface of a chromium element coating under the condition that O 2 forms micro-oxygen atmosphere to form a chromium oxide coating, wherein the chromium oxide coating has a microcrystalline structure, and the thickness of the chromium oxide coating is 1200nm;
and S5, after the coating deposition of the riving knife is finished, cooling the vacuum chamber, releasing air pressure and closing the vacuum chamber.
The invention provides a riving knife coating, which is prepared according to the preparation method of any one of the riving knife coating, and comprises the following steps: the surface of the riving knife matrix is sequentially provided with a chromium element coating and a chromium oxide coating from inside to outside, the chromium oxide coating is of a microcrystalline structure, the thickness of the chromium oxide coating is 1200nm, and the thickness of the chromium element coating is 100nm.
Comparative example 1
Comparative example 1 provides a method of preparing a riving knife coating comprising the steps of:
s1, cleaning the surface of a riving knife matrix, which specifically comprises the following steps:
s101, carrying out ultrasonic cleaning on the surface of a riving knife matrix, wherein the frequency of the ultrasonic cleaning is 40KHZ;
s102, carrying out high-pressure water flushing on the surface of the ultrasonic-cleaned riving knife matrix, wherein the water pressure of the high-pressure water flushing is 10Bar, and the time of the high-pressure water flushing is 21 minutes;
S103, placing the surface of the chopper matrix subjected to high-pressure water flushing into a hydrocarbon cleaning agent at 60 ℃ for soaking for 3.1 hours;
the hydrocarbon cleaning agent comprises the following components in percentage by weight: 60% of n-dodecane, 20% of 1,2, 3-pentafluoropropane and 20% of oxalic acid;
S104, spin-drying is carried out on the surface of the soaked riving knife matrix, spin-drying is carried out in a centrifugal machine, the rotating speed of the centrifugal machine is 10000RPM, and the spin-drying time is 15 minutes;
s105, packaging the spin-dried riving knife matrix in a dust-free environment, wherein the dust-free environment grade is within ten thousand;
s2, preprocessing the riving knife matrix after cleaning, and specifically comprising the following steps:
S201, vacuumizing the cavity, and introducing argon into the cavity when the air pressure in the cavity is below 10 < -2 > Bar;
s202, continuously vacuumizing the cavity, when the air pressure in the cavity is below 10 -3 Bar, turning on a direct current power supply to 500V, forming a plasma state by argon, bombarding the surface of the riving knife matrix by ionized argon ions, and after the process lasts for more than 30 minutes, enabling the roughness of the surface of the riving knife matrix to be Ra0.05μm;
s3, forming a chromium element coating on the surface of the pretreated riving knife matrix, which specifically comprises the following steps:
S301, continuously vacuumizing the cavity to below 10 < -5 > Bar, and simultaneously heating the riving knife matrix to above 500 ℃ to form a vacuum chamber;
s302, injecting argon into the vacuum chamber, wherein the flow rate of the pressure of injecting the argon into the vacuum chamber is 151ml/min;
S303, the chromium target is used as a cathode, ionized argon ions are attracted to bombard the chromium target at a high speed, chromium atoms are separated from the chromium target, a radio frequency power supply is adopted to form a negative bias voltage on the chromium target, the negative bias voltage formed on the chromium target is minus 100V, the chromium atoms are deposited on the surface of the chopper subjected to pretreatment under the action of an electric field, a chromium element coating is formed, and the thickness of the chromium element coating is controlled to be 50nm;
And S4, after the deposition of the chromium element coating is finished, cooling the vacuum chamber, releasing air pressure, and closing the vacuum chamber.
Comparative example 1 provides a riving knife coating prepared according to the method of preparing a riving knife coating as described in any of the preceding claims, the riving knife coating comprising: the surface of the riving knife matrix is provided with a chromium element coating, and the thickness of the chromium element coating is 50nm.
Comparative example 2
Comparative example 2 provides a method of preparing a riving knife coating comprising the steps of:
s1, cleaning the surface of a riving knife matrix, which specifically comprises the following steps:
s101, carrying out ultrasonic cleaning on the surface of a riving knife matrix, wherein the frequency of the ultrasonic cleaning is 40KHZ;
s102, carrying out high-pressure water flushing on the surface of the ultrasonic-cleaned riving knife matrix, wherein the water pressure of the high-pressure water flushing is 10Bar, and the time of the high-pressure water flushing is 21 minutes;
s103, placing the surface of the chopper matrix subjected to high-pressure water flushing into a hydrocarbon cleaning agent at 60 ℃ for soaking for 3.1 hours;
preferably, the hydrocarbon cleaning agent comprises the following components in percentage by weight: 60% of n-dodecane, 20% of 1,2, 3-pentafluoropropane and 20% of oxalic acid;
S104, spin-drying is carried out on the surface of the soaked riving knife matrix, spin-drying is carried out in a centrifugal machine, the rotating speed of the centrifugal machine is 10000RPM, and the spin-drying time is 15 minutes;
s105, packaging the spin-dried riving knife matrix in a dust-free environment, wherein the dust-free environment grade is within ten thousand;
s2, preprocessing the riving knife matrix after cleaning, and specifically comprising the following steps:
S201, vacuumizing the cavity, and introducing argon into the cavity when the air pressure in the cavity is below 10 -2 Bar;
S202, continuously vacuumizing the cavity, when the air pressure in the cavity is below 10 < -3 > Bar, turning on a direct current power supply to 500V, forming a plasma state by argon, bombarding the surface of the riving knife matrix by ionized argon ions, and after the process lasts for more than 30 minutes, enabling the roughness of the surface of the riving knife matrix to be Ra0.05μm;
s3, preparing a chromium oxide coating with a microcrystalline structure by adopting a radio frequency magnetron sputtering method to obtain a riving knife coating, which specifically comprises the following steps:
S301, moving the CrO3 target to the right opposite side of the riving knife matrix, keeping the distance from the riving knife matrix to 50mm, continuously vacuumizing the cavity until the air pressure is less than or equal to 10 -5 Bar, and simultaneously heating the riving knife matrix to more than 500 ℃ to form a vacuum chamber;
S302, injecting argon into the vacuum chamber, wherein the flow rate of the pressure of injecting the argon into the vacuum chamber is 151ml/min;
S303, using a CrO 3 target as a cathode, attracting ionized argon ions to bombard the CrO 3 target at a high speed, separating CrO 3 molecules from the CrO 3 target, decomposing the CrO 3 molecules at the heating temperature of a riving knife matrix to generate Cr 2O3 and O 2, adopting a radio frequency power supply to form a negative bias on the CrO 3 target, forming a negative bias on the CrO 3 target to be-100V, and simultaneously depositing Cr 2O3 on the surface of the pretreated riving knife matrix under the condition that O 2 forms micro-oxygen to form a chromium oxide coating, wherein the chromium oxide coating has a microcrystalline structure, and the thickness of the chromium oxide coating is 200nm;
and S4, after the coating deposition of the riving knife is finished, cooling the vacuum chamber, releasing air pressure and closing the vacuum chamber.
Comparative example 2 provides a riving knife coating prepared according to the method of preparing a riving knife coating as described in any of the preceding claims, the riving knife coating comprising: the surface of the riving knife matrix is provided with a chromium oxide coating, the chromium oxide coating is of a microcrystalline structure, and the thickness of the chromium oxide coating is 200nm.
Comparative example 3
Comparative example 3 provides a method of preparing a riving knife coating comprising the steps of:
s1, cleaning the surface of a riving knife matrix, which specifically comprises the following steps:
s101, carrying out ultrasonic cleaning on the surface of a riving knife matrix, wherein the frequency of the ultrasonic cleaning is 40KHZ;
s102, carrying out high-pressure water flushing on the surface of the ultrasonic-cleaned riving knife matrix, wherein the water pressure of the high-pressure water flushing is 10Bar, and the time of the high-pressure water flushing is 21 minutes;
S103, placing the surface of the chopper matrix subjected to high-pressure water flushing into a hydrocarbon cleaning agent at 60 ℃ for soaking for 3.1 hours;
preferably, the hydrocarbon cleaning agent comprises the following components in percentage by weight: 60% of n-dodecane, 20% of 1,2, 3-pentafluoropropane and 20% of oxalic acid;
S104, spin-drying is carried out on the surface of the soaked riving knife matrix, spin-drying is carried out in a centrifugal machine, the rotating speed of the centrifugal machine is 10000RPM, and the spin-drying time is 15 minutes;
s105, packaging the spin-dried riving knife matrix in a dust-free environment, wherein the dust-free environment grade is within ten thousand;
s2, preprocessing the riving knife matrix after cleaning, and specifically comprising the following steps:
S201, vacuumizing the cavity, and introducing argon into the cavity when the air pressure in the cavity is below 10 < -2 > Bar;
S202, continuously vacuumizing the cavity, when the air pressure in the cavity is below 10 < -3 > Bar, turning on a direct current power supply to 500V, forming a plasma state by argon, bombarding the surface of the riving knife matrix by ionized argon ions, and after the process lasts for more than 30 minutes, enabling the roughness of the surface of the riving knife matrix to be Ra0.05μm;
s3, forming a chromium element coating on the surface of the pretreated riving knife matrix, which specifically comprises the following steps:
S301, continuously vacuumizing the cavity to below 10 -5 Bar, and simultaneously heating the riving knife matrix to above 500 ℃ to form a vacuum chamber;
s302, injecting argon into the vacuum chamber, wherein the flow rate of the pressure of injecting the argon into the vacuum chamber is 151ml/min;
S303, the chromium target is used as a cathode, ionized argon ions are attracted to bombard the chromium target at a high speed, chromium atoms are separated from the chromium target, a radio frequency power supply is adopted to form a negative bias voltage on the chromium target, the negative bias voltage formed on the chromium target is minus 100V, the chromium atoms are deposited on the surface of the chopper subjected to pretreatment under the action of an electric field, a chromium element coating is formed, and the thickness of the chromium element coating is controlled to be 50nm;
s4, preparing a chromium oxide coating with a microcrystalline structure on the chromium element coating by adopting a radio frequency magnetron sputtering method to obtain a riving knife coating, which specifically comprises the following steps:
S401, moving a CrO 3 target to the right opposite side of the riving knife matrix, keeping the distance from the riving knife matrix to 50mm, continuously vacuumizing the cavity until the air pressure is less than or equal to 10 -5 Bar, and simultaneously heating the riving knife matrix to more than 500 ℃ to form a vacuum chamber;
S402, injecting argon into the vacuum chamber, wherein the flow rate of the pressure of injecting the argon into the vacuum chamber is 151ml/min;
s403, using a CrO 3 target as a cathode, attracting ionized argon ions to bombard the CrO 3 target at a high speed, separating CrO 3 molecules from the CrO 3 target, decomposing the CrO 3 molecules at the heating temperature of a chopper matrix to generate Cr 2O3 and O 2, adopting a radio frequency power supply to form a negative bias on the CrO 3 target, forming a negative bias on the CrO 3 target to be-100V, and simultaneously depositing Cr 2O3 on the surface of a chromium element coating under the condition that O 2 forms micro-oxygen atmosphere to form a chromium oxide coating, wherein the chromium oxide coating is of a microcrystalline structure, and the thickness of the chromium oxide coating is 100nm;
and S5, after the coating deposition of the riving knife is finished, cooling the vacuum chamber, releasing air pressure and closing the vacuum chamber.
Comparative example 3 provides a riving knife coating prepared according to the method of preparing a riving knife coating as described in any of the preceding claims, the riving knife coating comprising: the surface of the riving knife matrix is sequentially provided with a chromium element coating and a chromium oxide coating from inside to outside, the chromium oxide coating is of a microcrystalline structure, the thickness of the chromium oxide coating is 100nm, and the thickness of the chromium element coating is 50nm.
Comparative example 4
Comparative example 4 provides a method of preparing a riving knife coating comprising the steps of:
s1, cleaning the surface of a riving knife matrix, which specifically comprises the following steps:
s101, carrying out ultrasonic cleaning on the surface of a riving knife matrix, wherein the frequency of the ultrasonic cleaning is 40KHZ;
s102, carrying out high-pressure water flushing on the surface of the ultrasonic-cleaned riving knife matrix, wherein the water pressure of the high-pressure water flushing is 10Bar, and the time of the high-pressure water flushing is 21 minutes;
s103, placing the surface of the chopper matrix subjected to high-pressure water flushing into a hydrocarbon cleaning agent at 60 ℃ for soaking for 3.1 hours;
preferably, the hydrocarbon cleaning agent comprises the following components in percentage by weight: 60% of n-dodecane, 20% of 1,2, 3-pentafluoropropane and 20% of oxalic acid;
S104, spin-drying is carried out on the surface of the soaked riving knife matrix, spin-drying is carried out in a centrifugal machine, the rotating speed of the centrifugal machine is 10000RPM, and the spin-drying time is 15 minutes;
s105, packaging the spin-dried riving knife matrix in a dust-free environment, wherein the dust-free environment grade is within ten thousand;
s2, preprocessing the riving knife matrix after cleaning, and specifically comprising the following steps:
S201, vacuumizing the cavity, and introducing argon into the cavity when the air pressure in the cavity is below 10 < -2 > Bar;
S202, continuously vacuumizing the cavity, when the air pressure in the cavity is below 10 < -3 > Bar, turning on a direct current power supply to 500V, forming a plasma state by argon, bombarding the surface of the riving knife matrix by ionized argon ions, and after the process lasts for more than 30 minutes, enabling the roughness of the surface of the riving knife matrix to be Ra0.05μm;
s3, forming a chromium element coating on the surface of the pretreated riving knife matrix, which specifically comprises the following steps:
S301, continuously vacuumizing the cavity to below 10 < -5 > Bar, and simultaneously heating the riving knife matrix to above 500 ℃ to form a vacuum chamber;
s302, injecting argon into the vacuum chamber, wherein the flow rate of the pressure of injecting the argon into the vacuum chamber is 151ml/min;
S303, the chromium target is used as a cathode, ionized argon ions are attracted to bombard the chromium target at a high speed, chromium atoms are separated from the chromium target, a radio frequency power supply is adopted to form a negative bias voltage on the chromium target, the negative bias voltage formed on the chromium target is minus 100V, the chromium atoms are deposited on the surface of the chopper subjected to pretreatment under the action of an electric field, a chromium element coating is formed, and the thickness of the chromium element coating is controlled to be 50nm;
s4, preparing a chromium oxide coating with a microcrystalline structure on the chromium element coating by adopting a radio frequency magnetron sputtering method to obtain a riving knife coating, which specifically comprises the following steps:
S401, moving a CrO 3 target to the right opposite side of the riving knife matrix, keeping the distance from the riving knife matrix to 50mm, continuously vacuumizing the cavity until the air pressure is less than or equal to 10 -5 Bar, and simultaneously heating the riving knife matrix to more than 500 ℃ to form a vacuum chamber;
S402, injecting argon into the vacuum chamber, wherein the flow rate of the pressure of injecting the argon into the vacuum chamber is 151ml/min;
S403, using a CrO 3 target as a cathode, attracting ionized argon ions to bombard the CrO 3 target at a high speed, separating CrO 3 molecules from the CrO 3 target, decomposing the CrO 3 molecules at the heating temperature of a chopper matrix to generate Cr 2O3 and O 2, adopting a radio frequency power supply to form a negative bias on the CrO 3 target, forming a negative bias on the CrO 3 target to be-100V, and simultaneously depositing Cr 2O3 on the surface of a chromium element coating under the condition that O 2 forms micro-oxygen atmosphere to form a chromium oxide coating, wherein the chromium oxide coating is of a microcrystalline structure, and the thickness of the chromium oxide coating is 1500nm;
and S5, after the coating deposition of the riving knife is finished, cooling the vacuum chamber, releasing air pressure and closing the vacuum chamber.
Comparative example 4 provides a riving knife coating prepared according to the method of preparing a riving knife coating as described in any of the preceding claims, the riving knife coating comprising: the surface of the riving knife matrix is sequentially provided with a chromium element coating and a chromium oxide coating from inside to outside, the chromium oxide coating is of a microcrystalline structure, the thickness of the chromium oxide coating is 1500nm, and the thickness of the chromium element coating is 50nm.
Experimental means for testing experimental data
The riving knife coatings of examples 1-3 and comparative examples 1-4 were tested by the following experimental means:
aiming at the thickness of the riving knife coating, the following steps are adopted for testing:
1. The standard sample block for film thickness test is prepared by grinding the same material as the material of the riving knife base material into a plane (shown in figure 6) for subsequent coating deposition;
2. The deposited coating is a standard sample block which is put into the grinder and is put into the grinder together with the riving knife matrix, and the same process of preparing the riving knife coating is carried out;
3. After the completion, removing part of the chopper coating by using a film tearing method;
4. and measuring the height difference by using a 3D laser scanning microscope VK-3000 of Kennel, wherein the height difference is the thickness of a part of the riving knife coating.
The binding force of the riving knife coating can be confirmed by whether the riving knife coating on the surface of the riving knife coating is peeled after the bonding;
Quantitatively measuring the roughness of the surface of the coating of the chopper by a 3D laser profile scanner;
Determining by actually bonding the wire by a wire bonding machine according to the maximum application bonding times of the riving knife coating, wherein the parameters of the wire bonding machine are shown in the following table 1, and finally determining by the shape and size of the first welding spot and the second welding spot after bonding and the wire tension, and determining that the wire bonding is unqualified after exceeding the specification requirement;
Table 1 parameters of wire bonding machine
Experimental data for the riving knife coatings of examples 1-3 and comparative examples 1-4, as tested by the experimental means described above, are shown in table 2 below:
Table 2 experimental data for the riving knife coatings of examples 1-3 and comparative examples 1-4
From table 1, we can observe that the riving knife coating prepared in the embodiments 1-3 reduces the roughness of the surface of the riving knife coating, improves the binding force between the coating and the riving knife matrix, and prolongs the service life of the riving knife; compared with the riving knife coating prepared in the embodiment 1, the riving knife coating prepared in the embodiment 1 lacks a chromium oxide coating, and the binding force between the coating and the riving knife substrate is maintained, but the roughness of the surface of the riving knife coating is increased to 0.25 mu m, the roughness of the surface of the riving knife coating is increased, the maximum application routing frequency of the riving knife coating is reduced to 1300 thousands of times, and the service life of the riving knife coating is reduced; compared with the riving knife coating prepared in the embodiment 1, the riving knife coating prepared in the comparative example 2 lacks the chromium element coating, and the riving knife coating on the surface of the riving knife substrate peels off, so that the binding force between the coating and the riving knife substrate is poor; compared with the riving knife coating prepared in the embodiment 1, the riving knife coating prepared in the comparative example 3 reduces the thickness of the chromium oxide coating to 100nm, maintains the binding force between the coating and the riving knife matrix and the roughness of the surface of the riving knife coating, but reduces the maximum application routing frequency of the riving knife coating to 1500 thousands of times, and reduces the service life of the riving knife coating; compared with the riving knife coating prepared in the embodiment 1, the riving knife coating prepared in the comparative example 4 has the advantages that the thickness of the chromium oxide coating is increased to 1500nm, the binding force between the coating and the riving knife matrix is maintained, but the roughness of the surface of the riving knife coating is increased to 0.15 mu m, the roughness of the surface of the riving knife coating is increased, meanwhile, the maximum application routing frequency of the riving knife coating is reduced to 1350 thousands times, and the service life of the riving knife is reduced.
From the XRD pattern of the chromia coating provided in example 1 of the present application, as shown in FIG. 3, we can observe that the four peak positions marked by circles in the pattern coincide with chromia, demonstrating that the chromia coating was prepared according to the present application.
As shown in fig. 4, in the SEM image of the chromium oxide coating layer manufactured by the CVD (chemical vapor deposition) method provided by the background art, we can observe that the surface of the coating layer is uneven due to the fact that the chromium oxide manufactured by CVD is easy to grow into a columnar crystal structure of {1, 1} plane, the morphology of the crystal grains is sharp and has cracks, the morphology of the crystal grains is uneven, and the crystal grains are broken, so that the surface roughness of the chopper is increased.
As shown in fig. 5, in the SEM image of the chromium oxide coating layer prepared by the rf magnetron sputtering method provided in embodiment 1 of the present invention, we can observe that the surface of the coating layer is not uneven, the surface of the crystal grain is smooth and has no cracks, the crystal grain is uniform in morphology, the crystal grains are continuous and compact, and the roughness of the surface of the riving knife coating layer is reduced.
It will be understood that the application has been described in terms of several embodiments, and that various changes and equivalents may be made to these features and embodiments by those skilled in the art without departing from the spirit and scope of the application. In addition, many modifications may be made to adapt a particular situation or material to the teachings of the application without departing from the essential scope thereof. Therefore, it is intended that the application not be limited to the particular embodiments disclosed, but that the application will include all modifications and equivalents falling within the scope of the appended claims. In addition, many modifications may be made to adapt a particular situation or material to the teachings of the application without departing from the essential scope thereof. Therefore, it is intended that the application not be limited to the particular embodiment disclosed, but that the application will include all embodiments falling within the scope of the appended claims.
Claims (9)
1. The preparation method of the riving knife coating is characterized by comprising the following steps:
s1, cleaning the surface of a riving knife matrix;
S2, preprocessing the riving knife matrix after the cleaning treatment;
S3, forming a chromium element coating on the surface of the pretreated riving knife matrix;
s4, preparing a chromium oxide coating with a microcrystalline structure on the chromium element coating by adopting a radio frequency magnetron sputtering method, and specifically comprising the following steps of:
S401, continuously vacuumizing the cavity, and simultaneously heating the riving knife matrix to more than 500 ℃ to form a vacuum chamber;
s402, injecting argon into the vacuum chamber;
S403, using a CrO 3 target as a cathode, attracting ionized argon ions to bombard the CrO 3 target at a high speed, separating CrO 3 molecules from the CrO 3 target, decomposing the CrO 3 molecules at the heating temperature of a chopper matrix to generate Cr 2O3 and O 2, adopting a radio frequency power supply to form a negative bias on the CrO 3 target, and simultaneously depositing Cr 2O3 on the surface of a chromium element coating to form a chromium oxide coating under the condition that O 2 forms a micro-oxygen atmosphere to obtain a chopper coating;
The air pressure in the vacuum chamber is less than or equal to 10 -5 Bar, the pressure flow rate of argon gas injected into the vacuum chamber is more than 150ml/min, and the negative bias formed on the CrO 3 target material is-100 to-200V.
2. The method for preparing a riving knife coating according to claim 1, wherein the step S3 forms a chromium element coating on the surface of the riving knife substrate after the pretreatment, and specifically comprises the steps of:
s301, vacuumizing the cavity, and simultaneously heating the riving knife matrix to more than 500 ℃ to form a vacuum chamber;
s302, injecting argon into the vacuum chamber;
s303, the chromium target is used as a cathode, ionized argon ions are attracted to bombard the chromium target at a high speed, chromium atoms are separated from the chromium target, a radio frequency power supply is adopted to form a negative bias voltage on the chromium target, and the chromium atoms are deposited on the surface of the chopper subjected to pretreatment under the action of an electric field to form a chromium element coating.
3. The method for preparing a riving knife coating according to claim 2, wherein the air pressure in the vacuum chamber is less than or equal to 10 -5 Bar, the pressure flow rate of argon injected into the vacuum chamber is more than 150ml/min, and the negative bias formed on the chromium target is-100 to-200V.
4. The method for preparing a riving knife coating according to claim 1, wherein the step S1 of cleaning the surface of the riving knife substrate comprises the steps of:
S101, ultrasonically cleaning the surface of a riving knife matrix;
S102, washing the surface of the ultrasonic-cleaned riving knife matrix with high-pressure water;
S103, placing the surface of the riving knife matrix subjected to high-pressure water flushing into a hydrocarbon cleaning agent for soaking;
s104, spin-drying the surface of the soaked riving knife matrix;
s105, packaging the spin-dried riving knife matrix in a dust-free environment.
5. The method for preparing a riving knife coating according to claim 4, wherein the hydrocarbon cleaning agent comprises the following components in percentage by weight:
60-80% of n-dodecane or isododecane;
10 to 20 percent of 1,2, 3-pentafluoropropane or 1, 3-pentafluoropropane;
10-20% of oxalic acid.
6. The method for preparing a riving knife coating according to claim 4 or 5, wherein the temperature of the hydrocarbon cleaning agent is 60-80 ℃, and the soaking time of the hydrocarbon cleaning agent is more than 3 hours.
7. The method for preparing a riving knife coating according to claim 1, wherein the step S2 of pretreating the riving knife after the cleaning process comprises the steps of:
s201, after vacuumizing the cavity, introducing argon into the cavity;
s202, after the cavity is continuously vacuumized, a direct-current power supply is turned on, argon gas forms a plasma state, ionized argon ions bombard the surface of the riving knife matrix, the process lasts for more than 30 minutes, and the roughness of the surface of the riving knife matrix is less than or equal to Ra0.05μm after pretreatment.
8. A riving knife coating, characterized in that it is prepared according to the method for preparing a riving knife coating according to any one of claims 1-7.
9. The riving knife coating as claimed in claim 8, comprising: the surface of the riving knife matrix is sequentially provided with a chromium element coating and a chromium oxide coating from inside to outside, the chromium oxide coating is of a microcrystalline structure, and the thickness of the chromium oxide coating is 200 nm-1200 nm.
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| CN102161941A (en) * | 2011-03-14 | 2011-08-24 | 耿建 | Environment-friendly hydrocarbon cleaning agent |
| CN105385997A (en) * | 2015-11-06 | 2016-03-09 | 北京有色金属研究总院 | Cr2O3 film system and preparing method thereof |
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| DE112007002410T5 (en) * | 2006-10-20 | 2009-08-20 | WINTEK ELECTRO-OPTICS Corp., Ann Arbor | Sputtering target made of a mixture of chromium oxide and chromium metal |
| CN104278234B (en) * | 2013-07-02 | 2017-02-22 | 中国科学院兰州化学物理研究所 | Preparation technology for self-lubricating coating with wide temperature range of room temperature to 800 DEG C |
| CN106967947B (en) * | 2017-04-18 | 2019-06-18 | 华南理工大学 | A kind of mosaic structure interface α-chromium oxide coating and preparation method thereof |
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| CN102161941A (en) * | 2011-03-14 | 2011-08-24 | 耿建 | Environment-friendly hydrocarbon cleaning agent |
| CN105385997A (en) * | 2015-11-06 | 2016-03-09 | 北京有色金属研究总院 | Cr2O3 film system and preparing method thereof |
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