CN118064960B - Continuous growth horizontal Bridgman furnace - Google Patents
Continuous growth horizontal Bridgman furnace Download PDFInfo
- Publication number
- CN118064960B CN118064960B CN202410246970.3A CN202410246970A CN118064960B CN 118064960 B CN118064960 B CN 118064960B CN 202410246970 A CN202410246970 A CN 202410246970A CN 118064960 B CN118064960 B CN 118064960B
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- boat
- shaped crucible
- push rod
- pretreatment
- rotating shaft
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- 239000002994 raw material Substances 0.000 claims abstract description 43
- 239000013078 crystal Substances 0.000 claims abstract description 41
- 238000010438 heat treatment Methods 0.000 claims abstract description 26
- 230000005540 biological transmission Effects 0.000 claims description 10
- 238000009413 insulation Methods 0.000 claims description 5
- 239000011810 insulating material Substances 0.000 claims description 2
- 238000002844 melting Methods 0.000 abstract description 6
- 230000008018 melting Effects 0.000 abstract description 6
- 238000002156 mixing Methods 0.000 abstract description 4
- 238000002425 crystallisation Methods 0.000 abstract description 3
- 230000008025 crystallization Effects 0.000 abstract description 3
- 238000000034 method Methods 0.000 description 8
- 230000007306 turnover Effects 0.000 description 5
- 238000002109 crystal growth method Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 230000017525 heat dissipation Effects 0.000 description 1
- 239000012774 insulation material Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 238000005245 sintering Methods 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B11/00—Single-crystal growth by normal freezing or freezing under temperature gradient, e.g. Bridgman-Stockbarger method
- C30B11/001—Continuous growth
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
The invention relates to the technical field of crystallization furnaces, and discloses a continuous growth horizontal Bridgman furnace, which comprises the following components: the furnace body is internally provided with a heating area, two ends of the heating area are respectively provided with a low-temperature area and a pretreatment area, and a plurality of conveying wheels for driving the boat-shaped crucible to move are arranged in the low-temperature area and the pretreatment area; the end part of the rotating shaft, which is close to the transport wheel, is fixed with a push rod, and the push rod is contacted with the monocrystalline raw material in the boat-shaped crucible; the boat-shaped crucible is driven to move to the heating area through the conveying wheel, the driving box drives the rotating shaft to rotate, the push rod is driven to rotate, single crystal raw materials in the boat-shaped crucible can be stirred, the boat-shaped crucible is synchronously translated, the single crystal raw materials can be diffused along the extending direction of the side wall of the boat-shaped crucible while being stirred, the single crystal raw material pile can be scattered and paved, the mixing degree of various raw materials can be improved, and accordingly the melting uniformity of the single crystal raw materials is improved.
Description
Technical Field
The invention relates to the technical field of crystallization furnaces, in particular to a continuous growth horizontal Bridgman furnace.
Background
The Bridgman crystal growth method, also known as the crucible descent method, is a commonly used crystal growth method. The vertical Bridgman method and the horizontal Bridgman method are divided, the Bridgman furnace has very wide application in the crystal growth industry, sintering is performed under air, vacuum or atmosphere protection environment cannot be provided, and the furnace is in a constant speed mode.
The horizontal Bridgman method is a method for preparing large-area shaped lamellar crystals, which comprises the steps of placing raw materials in a boat-shaped crucible, horizontally passing the crucible through a heating zone, and melting and crystallizing the raw materials; in order to be able to grow crystals with a strict orientation, a seed crystal may be placed in a seed tank at the top of the crucible to induce growth.
The single crystal raw materials are placed at the tail of the boat-shaped crucible, when the boat-shaped crucible is transported by the existing horizontal Bridgman furnace, the single crystal raw materials at the tail of the boat-shaped crucible cannot be paved, and the single crystal raw materials are easy to stack when placed in the boat-shaped crucible, so that the single crystal raw materials in the raw material stack are difficult to fully melt when the single crystal raw materials are subjected to heating treatment by a heater, and the time for complete melting is long; in addition, the single crystal raw materials are generally various, if the single crystal raw materials are unevenly scattered, the reaction is difficult to fully mix, and the uniform and continuous growth of crystals is difficult, and on the basis of the problem, the applicant purposely provides a continuous growth horizontal Bridgman furnace capable of spreading a single crystal raw material pile in a boat-shaped crucible while transporting the crucible.
Disclosure of Invention
The invention aims to provide a continuous growth horizontal Bridgman furnace for solving the technical problems that single crystal raw materials are accumulated in a boat-shaped crucible and cannot be sufficiently melted and various single crystal principles cannot be uniformly dispersed and mixed.
The aim of the invention can be achieved by the following technical scheme:
a continuous growth horizontal bridgman furnace comprising:
The furnace body is internally provided with a heating area, two ends of the heating area are respectively provided with a low-temperature area and a pretreatment area, and a plurality of conveying wheels for driving the boat-shaped crucible to move are arranged in the low-temperature area and the pretreatment area; and
The rotating shaft is rotatably arranged on the inner wall of the pretreatment area and is driven to rotate by a driving box arranged on the inner wall of the pretreatment area, a push rod is fixed at the end part of the rotating shaft, which is close to the conveying wheel, and the push rod is contacted with the monocrystalline raw material in the boat-shaped crucible.
As a further scheme of the invention: the number of the push rods is multiple, and the push rods are circumferentially distributed on the rotating shaft.
As a further scheme of the invention: the driving box is slidably arranged in the pretreatment area and driven by the transmission component to reciprocate along the boat-shaped crucible conveying path.
As a further scheme of the invention: the transmission assembly includes:
The gear is rotatably arranged on the inner wall of the pretreatment area and is driven to rotate by the driving source; and
The rack ring is slidably mounted on the inner wall of the pretreatment area, the moving path of the rack ring is coincident with the boat-shaped crucible conveying path, racks meshed with the gears are arranged on two sides of the rack ring, and the rack ring is fixedly connected with the driving box.
As a further scheme of the invention: the push rod is provided with a plurality of grooves which are distributed at equal intervals.
As a further scheme of the invention: and an inclined plane is arranged on the side wall of the groove.
As a further scheme of the invention: the end part of the push rod far away from the rotating shaft is slidably provided with a slide block, the slide block is elastically connected with the push rod, and the distance between the two slide blocks which are oppositely arranged is larger than the width of the boat-shaped crucible.
As a further scheme of the invention: the output end of the driving box is connected with the fixed end of the movable rod, the movable end of the movable rod is fixedly connected with the rotating shaft, and the movable rod is of a telescopic structure.
As a further scheme of the invention: and a heat insulating piece is arranged at the joint of the pretreatment area and the heating area.
As a further scheme of the invention: the heat insulation piece comprises a fixed plate fixed on the inner wall of the pretreatment area, the end part of the fixed plate, far away from the inner wall of the pretreatment area, is hinged with a turnover plate, the turnover plate and the fixed plate are made of heat insulation materials, and the position of the turnover plate interferes with the moving path of the top of the boat-shaped crucible.
The invention has the beneficial effects that:
(1) According to the invention, the boat-shaped crucible is driven to move towards the heating area by the transport wheel, in the process, the drive box drives the rotating shaft to rotate to drive the push rod to rotate, so that single crystal raw materials in the boat-shaped crucible can be stirred, the boat-shaped crucible is synchronously translated, the single crystal raw materials can be diffused along the extending direction of the side wall of the movable boat-shaped crucible while being stirred, so that a single crystal raw material pile can be scattered and paved, the mixing degree of various raw materials can be improved, and the melting uniformity of the single crystal raw materials is improved;
(2) According to the invention, the transmission assembly is adopted to drive the boat crucible to reciprocate along the transportation path of the boat crucible, so that after the boat crucible is translated for a period of time in the pretreatment area, the rotating shaft begins to translate in the opposite transportation direction, and single crystal raw materials in the boat crucible can be scattered and spread along the inner wall of the boat crucible;
(3) According to the invention, when the top of the boat-shaped crucible moves out of the pretreatment area, the overturning plate is collided to overturn the boat-shaped crucible, so that the movement of the boat-shaped crucible is prevented from being hindered, meanwhile, the heat insulation can be carried out, and the influence of the heating area on each structure in the pretreatment area is reduced; meanwhile, the turnover plate turns over to drive the transmission assembly to start to drive the reciprocating movement of the rotating shaft, and drives the movable rod to start to stretch, so that the rotating shaft descends into the boat-shaped crucible to contact with the monocrystalline raw material.
Drawings
The invention is further described below with reference to the accompanying drawings.
FIG. 1 is a schematic view of the overall structure of the present invention;
FIG. 2 is a schematic diagram of the pretreatment zone of the present invention;
FIG. 3 is a schematic view of a structure of a rotating shaft according to the present invention;
FIG. 4 is a schematic view of the structure of the push rod of the present invention;
FIG. 5 is a schematic view of the structure of the transmission assembly of the present invention;
fig. 6 is a schematic view of a partial enlarged structure at a of fig. 3 in the present invention.
In the figure: 1. a furnace body; 2. boat-type crucible; 3. a heating zone; 4. a low temperature zone; 5. a pretreatment zone; 6. a transport wheel; 7. a rotating shaft; 8. a push rod; 9. a transmission assembly; 901. a gear; 902. a rack ring; 10. a groove; 11. an inclined plane; 12. a slide block; 13. a drive box; 14. a movable rod; 15. a thermal insulation member; 1501. a fixing plate; 1502. and (5) turning over the plate.
Detailed Description
The following description of the embodiments of the present invention will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present invention, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
Referring to fig. 1-4, the present invention is a continuous growth horizontal bridgman furnace, comprising:
The furnace body 1 is internally provided with a heating zone 3, two ends of the heating zone 3 are respectively provided with a low-temperature zone 4 and a pretreatment zone 5, and a plurality of transport wheels 6 for driving the boat-shaped crucible 2 to move are arranged in the low-temperature zone 4 and the pretreatment zone 5; and
The rotating shaft 7 is rotatably arranged on the inner wall of the pretreatment area 5 and is driven to rotate by the driving box 13 arranged on the inner wall of the pretreatment area 5, the end part of the rotating shaft 7, which is close to the transport wheel 6, is fixedly provided with the push rod 8, and the push rod 8 is contacted with the single crystal raw material in the boat-shaped crucible 2.
Wherein, the pretreatment area 5 is provided with the input chamber far away from one side of zone of heating 3, the low temperature zone 4 is provided with the output chamber far away from one side of zone of heating 3, the junction of pretreatment area 5 and input chamber and the junction of low temperature zone 4 and output chamber are provided with the control valve respectively, can control the intercommunication state between pretreatment area 5 and the input chamber and between low temperature zone 4 and the output chamber to heat dissipation in the zone of heating 3 when reducing crystallization.
In one case of the present embodiment, a heater is provided in the heating region 3; a seed crystal groove for placing seed crystal is arranged at the inner top of the boat-shaped crucible 2, and a single crystal raw material is placed at the tail part of the seed crystal groove; the transport wheel 6 drives the boat-shaped crucible 2 entering the pretreatment area 5 to move towards the heating area 3, the boat-shaped crucible 2 is driven to move towards the low temperature area 4 after being heated in the heating area 3, and the transport wheel 6 is in the prior art, and the application does not improve the transport wheel, so that the specific mechanical structure and the circuit structure of the transport wheel are not required to be disclosed, and the integrity of the transport wheel is not influenced; an output source for driving the rotating shaft 7 is installed in the driving box 13, and the output source may be a motor assembly, or may be a gear assembly or a belt pulley assembly driven by a motor, so long as the rotating shaft 7 can be rotated, and the embodiment is not specifically limited herein.
In practical application, the boat-shaped crucible 2 is sent into the pretreatment area 5, the transport wheel 6 drives the boat-shaped crucible 2 to move towards the heating area 3, in the process, the driving box 13 drives the rotating shaft 7 to rotate, the push rod 8 is driven to rotate, single crystal raw materials in the boat-shaped crucible 2 can be stirred, the boat-shaped crucible 2 synchronously translates, and the single crystal raw materials can be diffused along the extending direction of the side wall of the boat-shaped crucible 2 while being stirred, so that a single crystal raw material pile can be scattered and paved, and the mixing degree of various raw materials can be improved, thereby improving the melting uniformity of the single crystal raw materials.
As shown in fig. 4, as a preferred embodiment of the present invention, the number of the push rods 8 is plural, and the plurality of push rods 8 are circumferentially arranged on the rotating shaft 7.
As shown in fig. 1-6, as a preferred embodiment of the present invention, the driving box 13 is slidably installed in the pretreatment area 5, and is driven by the driving assembly 9 to reciprocate along the transport path of the boat-type crucible 2.
In one case of the present embodiment, the transmission assembly 9 includes:
a gear 901 rotatably mounted on the inner wall of the pretreatment area 5 and driven to rotate by a driving source; and
The rack ring 902 is slidably mounted on the inner wall of the pretreatment area 5, the moving path of the rack ring 902 coincides with the transporting path of the boat-shaped crucible 2, racks meshed with the gears 901 are arranged on two sides of the rack ring 902, and the rack ring is fixedly connected with the driving box 13.
The driving source may be a motor assembly, or may be a gear assembly or a belt pulley assembly driven by a motor, so long as the gear 901 can rotate, which is not specifically limited herein.
In practical application, the driving source drives the gear 901 to rotate, when the gear 901 is meshed with a rack on one side of the rack ring 902, the rack ring 902 is driven to translate to one side until the gear 901 rotates away from the rack on the side, then the gear 901 is meshed with a rack on the other side of the rack ring 902, and drives the rack ring 902 to translate reversely until the gear 901 rotates away from the rack on the side, then the gear 901 is meshed with the rack which is initially meshed, and drives the rack ring 902 to translate, so that the reciprocating movement of the rack ring 902 can be realized, and further the reciprocating sliding of the driving box 13 on the inner wall of the pretreatment area 5 is realized, so that the rotating shaft 7 can be driven to rotate by the driving box 13 and simultaneously reciprocate; in actual use, after the boat crucible 2 is translated for a period of time in the pretreatment area 5 by setting the starting time of the driving source and the sizes of the gear 901 and the rack ring 902, the rotating shaft 7 begins to translate in the opposite direction of the transportation direction, so that the monocrystalline raw material in the boat crucible 2 can be scattered and spread along the inner wall of the boat crucible 2.
As shown in fig. 4, as a preferred embodiment of the present invention, the push rod 8 is provided with a plurality of equally spaced grooves 10.
In one case of this embodiment, the side wall of the groove 10 is provided with a bevel 11.
In practical application, the grooves 10 enable the monocrystalline raw material to be scratched to be arranged in a tooth shape, and the inclined planes 11 can prevent the push rod 8 from being clamped with part of monocrystalline particles, so that the paving effect is improved.
As shown in fig. 2-4, as a preferred embodiment of the present invention, the end of the push rod 8 far from the rotating shaft 7 is slidably provided with a slide block 12, and the slide block 12 is elastically connected with the push rod 8, and the distance between two slide blocks 12 oppositely arranged is larger than the width of the boat-shaped crucible 2.
In one case of this embodiment, the slider 12 may be connected to the push rod 8 by a spring, or may be connected to an elastic member such as a spring plate, which is not described herein.
In practical application, when the push rod 8 is not in contact with the side wall of the boat crucible 2, the distance between the push rod 8 and the opposite push rod 8 is the largest; when the push rod 8 rotates to be in contact with the side wall of the boat-shaped crucible 2, the sliding block 12 is pushed to slide towards the direction of the rotating shaft 7 until the sliding block 12 slides away from the boat-shaped crucible 2, so that the paving range can be furthest lifted, and the paving degree of single crystal materials is improved.
As shown in fig. 4, as a preferred embodiment of the present invention, the output end of the driving box 13 is connected to the fixed end of the movable rod 14, the movable end of the movable rod 14 is fixedly connected to the rotating shaft 7, and the movable rod 14 has a telescopic structure.
In one case of the present embodiment, the telescopic structure is a structure formed by nesting multiple stages of pipes, and in practical application, a structure of a rack and pinion or an electric telescopic rod may be adopted, and the present embodiment is not specifically limited herein.
In the practical application of the embodiment, in the initial state, the push rod 8 is positioned at the topmost end of the moving path and above the boat-shaped crucible 2; after the top of the boat-shaped crucible 2 moves out of the pretreatment area 5, the movable rod 14 stretches to drive the rotating shaft 7 to descend, and the push rod 8 enters the boat-shaped crucible 2 and contacts with the single crystal raw material in the boat-shaped crucible.
As shown in fig. 1 to 6, as a preferred embodiment of the present invention, a heat insulating member 15 is provided at the junction of the pretreatment area 5 and the heating area 3.
The heat insulating member 15 includes a fixing plate 1501 fixed on the inner wall of the pretreatment area 5, an end portion of the fixing plate 1501 away from the inner wall of the pretreatment area 5 is hinged with a turning plate 1502, both the turning plate 1502 and the fixing plate 1501 are made of heat insulating materials, and the position of the turning plate 1502 interferes with the moving path of the top of the boat-shaped crucible 2.
In practical application, in the initial state, gravity acts to cause the turning plate 1502 and the fixing plate 1501 to be in a vertical state; the hinged end of the turning plate 1502 is linked with the driving source and the movable rod 14, when the top of the boat-shaped crucible 2 moves out of the pretreatment area 5, the turning plate 1502 is collided to turn over, so that the movement of the boat-shaped crucible 2 is prevented from being hindered, meanwhile, the heat insulation can be performed, and the influence of the heating area 3 on all structures in the pretreatment area 5 is reduced; simultaneously, the turning plate 1502 turns over to drive the transmission assembly 9 to start to drive the reciprocating movement of the rotating shaft 7, and drives the movable rod 14 to start to stretch, so that the rotating shaft 7 descends into the boat-shaped crucible 2 to contact with the single crystal raw material.
The working principle of the invention is as follows: in the above embodiment of the invention, a continuous growth horizontal Bridgman furnace is provided, the boat-shaped crucible 2 is driven to move towards the heating zone 3 by the transport wheel 6, in the process, the driving box 13 drives the rotating shaft 7 to rotate to drive the push rod 8 to rotate, so that single crystal raw materials in the boat-shaped crucible 2 can be stirred, and the boat-shaped crucible 2 synchronously translates, so that the single crystal raw materials are stirred and spread along the extending direction of the side wall of the boat-shaped crucible 2, and then a single crystal raw material pile can be scattered and paved, and the mixing degree of various raw materials can be improved, so that the melting uniformity of the single crystal raw materials is improved.
The foregoing describes one embodiment of the present invention in detail, but the description is only a preferred embodiment of the present invention and should not be construed as limiting the scope of the invention. All equivalent changes and modifications within the scope of the present invention are intended to be covered by the present invention.
Claims (8)
1. A continuous growth horizontal bridgman furnace comprising:
The furnace body (1) is internally provided with a heating zone (3), two ends of the heating zone (3) are respectively provided with a low-temperature zone (4) and a pretreatment zone (5), and a plurality of conveying wheels (6) for driving the boat-shaped crucible (2) to move are arranged in the low-temperature zone (4) and the pretreatment zone (5); and
The rotating shaft (7) is rotatably arranged on the inner wall of the pretreatment area (5) and is driven to rotate by a driving box (13) arranged on the inner wall of the pretreatment area (5), a push rod (8) is fixed at the end part of the rotating shaft (7) close to the conveying wheel (6), and the push rod (8) is in contact with the single crystal raw material in the boat-shaped crucible (2);
the driving box (13) is slidably arranged in the pretreatment area (5) and is driven by the transmission component (9) to reciprocate along the conveying path of the boat-shaped crucible (2);
The transmission assembly (9) comprises:
The gear (901) is rotatably arranged on the inner wall of the pretreatment area (5) and is driven to rotate by the driving source; and
The rack ring (902) is slidably mounted on the inner wall of the pretreatment area (5), the moving path of the rack ring is overlapped with the conveying path of the boat-shaped crucible (2), racks meshed with the gears (901) are arranged on two sides of the rack ring (902), and the rack ring is fixedly connected with the driving box (13).
2. The continuous growth horizontal bridgman furnace according to claim 1, wherein the number of the push rods (8) is plural, and the plurality of push rods (8) are circumferentially arranged on the rotating shaft (7).
3. A continuous growth horizontal bridgman furnace according to claim 1, characterized in that the push rod (8) is provided with a number of equally spaced grooves (10).
4. A continuous growth horizontal bridgman furnace according to claim 3, characterized in that the side walls of the recess (10) are provided with bevels (11).
5. Continuous growth horizontal bridgman furnace according to claim 1, characterized in that the end of the push rod (8) far from the rotating shaft (7) is slidably provided with a slide block (12), and the slide block (12) is elastically connected with the push rod (8), and the distance between the two slide blocks (12) which are oppositely arranged is larger than the width of the boat-shaped crucible (2).
6. The continuous growth horizontal Bridgman furnace according to claim 1, wherein the output end of the driving box (13) is connected with the fixed end of the movable rod (14), the movable end of the movable rod (14) is fixedly connected with the rotating shaft (7), and the movable rod (14) is of a telescopic structure.
7. Continuous growth horizontal bridgman furnace according to claim 1, characterized in that the junction of the pretreatment zone (5) and the heating zone (3) is provided with a thermal insulation (15).
8. The continuous growth horizontal bridgman furnace according to claim 7, wherein the heat insulating member (15) comprises a fixed plate (1501) fixed on the inner wall of the pretreatment area (5), the end of the fixed plate (1501) far away from the inner wall of the pretreatment area (5) is hinged with a turning plate (1502), the turning plate (1502) and the fixed plate (1501) are made of heat insulating materials, and the position of the turning plate (1502) interferes with the top moving path of the boat crucible (2); when the top of the boat 2 moves out of the pretreatment area 5, it collides with the flipping plate 1502 to be flipped.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202410246970.3A CN118064960B (en) | 2024-03-05 | 2024-03-05 | Continuous growth horizontal Bridgman furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202410246970.3A CN118064960B (en) | 2024-03-05 | 2024-03-05 | Continuous growth horizontal Bridgman furnace |
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| Publication Number | Publication Date |
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| CN118064960A CN118064960A (en) | 2024-05-24 |
| CN118064960B true CN118064960B (en) | 2024-08-30 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN202410246970.3A Active CN118064960B (en) | 2024-03-05 | 2024-03-05 | Continuous growth horizontal Bridgman furnace |
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Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0380181A (en) * | 1989-08-24 | 1991-04-04 | Mitsubishi Monsanto Chem Co | Device for producing single crystal |
| JP2001106597A (en) * | 1999-10-05 | 2001-04-17 | Toshiba Corp | Method and device for producing single crystal |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2614322B1 (en) * | 1987-04-27 | 1989-07-28 | Europ Propulsion | GRADIENT OVEN FOR ORIENTED SOLIDIFICATION, IN PARTICULAR BY THE BRIDGMANN METHOD. |
| JPH02145499A (en) * | 1988-12-28 | 1990-06-04 | Tsuaitowan Faaren Gonie Jishu Ienjiou Yuen | Growing method for gallium arsenide single crystals |
| JPH06219884A (en) * | 1993-01-23 | 1994-08-09 | Horiba Ltd | Single crystal growth furnace |
| JP3128173B2 (en) * | 1993-04-05 | 2001-01-29 | 信越化学工業株式会社 | Method and apparatus for producing bismuth germanate single crystal |
| JPH1067592A (en) * | 1996-08-23 | 1998-03-10 | Fujitsu Ltd | Horizontal Bridgman crystal growth furnace and semiconductor manufacturing method |
| US20070151510A1 (en) * | 2003-08-27 | 2007-07-05 | Andreas Muhe | Crystal-Growing Furnace, In Particular A Vertical Bridgman Crystal-Growing Furnace Or A Vertical Gradient Freeze Crystal-Growing Furnace Having A Jacket Heater And A Method of Regulating The Heat Output of the Jacket Heater |
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2024
- 2024-03-05 CN CN202410246970.3A patent/CN118064960B/en active Active
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0380181A (en) * | 1989-08-24 | 1991-04-04 | Mitsubishi Monsanto Chem Co | Device for producing single crystal |
| JP2001106597A (en) * | 1999-10-05 | 2001-04-17 | Toshiba Corp | Method and device for producing single crystal |
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| CN118064960A (en) | 2024-05-24 |
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