CN118028758B - Intelligent production control method and system for continuous vacuum coating - Google Patents
Intelligent production control method and system for continuous vacuum coating Download PDFInfo
- Publication number
- CN118028758B CN118028758B CN202410187571.4A CN202410187571A CN118028758B CN 118028758 B CN118028758 B CN 118028758B CN 202410187571 A CN202410187571 A CN 202410187571A CN 118028758 B CN118028758 B CN 118028758B
- Authority
- CN
- China
- Prior art keywords
- coating
- vacuum
- back pressure
- film
- data information
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/54—Controlling or regulating the coating process
-
- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06F—ELECTRIC DIGITAL DATA PROCESSING
- G06F18/00—Pattern recognition
- G06F18/10—Pre-processing; Data cleansing
-
- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06F—ELECTRIC DIGITAL DATA PROCESSING
- G06F18/00—Pattern recognition
- G06F18/20—Analysing
- G06F18/24—Classification techniques
- G06F18/241—Classification techniques relating to the classification model, e.g. parametric or non-parametric approaches
Landscapes
- Engineering & Computer Science (AREA)
- Theoretical Computer Science (AREA)
- Data Mining & Analysis (AREA)
- Chemical & Material Sciences (AREA)
- General Engineering & Computer Science (AREA)
- General Physics & Mathematics (AREA)
- Computer Vision & Pattern Recognition (AREA)
- Evolutionary Biology (AREA)
- Evolutionary Computation (AREA)
- Physics & Mathematics (AREA)
- Bioinformatics & Cheminformatics (AREA)
- Bioinformatics & Computational Biology (AREA)
- Artificial Intelligence (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Abstract
The invention discloses an intelligent production control method and system for continuous vacuum coating, which relate to the technical field of process production, wherein the system provides evacuation speed Cksd by monitoring the vacuum environment state in a process chamber in real time, a gas release module monitors relevant difference change data information in the process of releasing gas after coating on the surface of a substrate is finished, and the system can accurately acquire and analyze the change of the surface of a film through data preprocessing, including the difference caused by desorption gas molecules, so that the problem of coating quality caused by the surface change can be found in time. The coating analysis module calculates the vacuum degree factor Zkyz, the indoor environment coefficient Gjxs and the back pressure influence coefficient Hyxs, and correlates to generate a coating quality index Zlzs, and the comprehensive evaluation provides comprehensive and accurate analysis of the coating quality, which is helpful for ensuring the consistency of the product performance and appearance. And judging the current indoor back pressure state and the coating condition of the base material by the production quality control module, so as to ensure the reduction of the unqualified rate.
Description
Technical Field
The invention relates to the technical field of process production, in particular to an intelligent production control method and system for continuous vacuum coating.
Background
In the field of modern manufacturing, surface coating technology has been a field of research and application of great interest. In order to improve the performance, wear resistance, optical properties, etc. of materials, surface coating techniques have been widely used, and development in this field has been widely used in various fields such as material engineering, electronic manufacturing, and optical devices. Wherein the quality and performance of the film is directly related to the function and lifetime of the product. Therefore, monitoring and control of the vacuum environment within the process chamber, as well as coating quality, becomes particularly important.
The vacuum environment in the process chamber directly influences the quality of the coating, gas molecules are adsorbed on the surface of the film deposited in vacuum, and in the process of releasing the gas, the desorption of the gas molecules can lead to the change of the surface of the film, thereby influencing the performance and the appearance of the product. Therefore, the realization of accurate monitoring and control of the vacuum environment and the surface change of the film becomes an important challenge for improving the application effect of the continuous vacuum coating technology.
However, there are some disadvantages in the continuous vacuum coating process at present. The traditional production control system often cannot monitor the vacuum environment state in the process chamber in real time and accurately and analyze the change of the film surface in time, which may lead to unstable product quality, low production efficiency and even increase of the unqualified rate. Meanwhile, in the process of releasing gas, external pollutants such as tiny dust in air can be introduced to influence the quality of the surface of the coating, and the current system often ignores the difference change of the surface of the film, so that the product on the production line cannot finish the coating process in the optimal state, and the defects of uneven quality of the coating, fluctuation of the film thickness, possible bubbles, holes and the like can be caused.
Disclosure of Invention
(One) solving the technical problems
Aiming at the defects of the prior art, the invention provides a continuous vacuum coating intelligent production control method and system, which solve the problems in the background art.
(II) technical scheme
In order to achieve the above purpose, the invention is realized by the following technical scheme: a continuous vacuum coating intelligent production control system comprises a vacuum monitoring module, a gas release module, a data preprocessing module, a coating analysis module and a production quality control module;
the vacuum monitoring module is used for continuously monitoring the environmental state in the process chamber, providing the evacuation speed Cksd for the process chamber through the vacuum pump, and monitoring the data information of the related vacuum state in the process chamber in real time;
The gas release module is used for monitoring relevant coating difference change data information during indoor back pressure in the process of gradually releasing gas to restore normal air pressure after coating on the surface of the substrate is completed;
The data preprocessing module is used for preprocessing the related vacuum state data information and the related coating difference change data information, classifying and integrating the preprocessed data information and the related coating difference change data information to generate a first data set and a second data set, correcting the data, and uniformly processing different units by using a dimensionless processing technology;
The film coating analysis module comprises a first analysis unit, a second analysis unit and a third correlation estimation unit, wherein the first analysis unit is used for obtaining a vacuum degree factor Zkyz and an indoor environment coefficient Gjxs according to analysis calculation of a first data set, and the second analysis unit is used for obtaining a back pressure influence coefficient Hyxs according to analysis calculation of a second data set; the third correlation estimation unit is used for carrying out summarization analysis on the indoor environment coefficient Gjxs and the back pressure influence coefficient Hyxs to generate a coating quality index Zlzs in a correlation manner;
The production quality control module is used for presetting an influence threshold value Q and an evaluation threshold value L, and comparing the influence threshold value Q with the back pressure influence coefficient Hyxs so as to judge whether the current indoor back pressure is in a normal state or not; and comparing the evaluation threshold L with the coating quality index Zlzs to comprehensively evaluate the coating condition of the current substrate, and performing sorting control.
Preferably, the vacuum monitoring module comprises a vacuum unit and an environment unit;
The vacuum unit is used for monitoring related vacuum state data information in the process chamber in real time, wherein the vacuum unit comprises an evacuation speed Cksd, a vacuum chamber volume Srjz, a gas molecular weight Qfzz, a gas concentration Qtnd, a temperature Wdz and a gas distribution condition;
The environment unit is used for combining the related vacuum state data information, and simultaneously collecting and recording the environment state in the process chamber, wherein the environment unit also comprises humidity Sdz, cleanliness Qjd, particle density in the atmosphere and wind speed and direction in the process chamber.
Preferably, the gas release module comprises a film plating regional unit and a post-back pressure film changing unit;
The film plating regional unit is used for dividing the surface of the substrate after film plating into a plurality of groups of regions on average and marking the regions so as to record the film plating condition of the surface of the substrate before and after back pressure in real time;
The post-back-pressure film change unit is used for collecting relevant film coating difference change data information according to marks made on a plurality of groups of areas, wherein the relevant film coating difference change data information comprises a first film thickness difference Mhc1, a second film thickness difference Mhc2, hole number Kdsz, bubble density Qpmd and external air particle density Klmd.
Preferably, the coating film analysis module comprises a first analysis unit, a second analysis unit and a third correlation estimation unit;
the first analysis unit is configured to obtain, according to the first data set, a vacuum degree factor Zkyz by correlating the evacuation speed Cksd therein with the gas concentration Qtnd and performing dimensionless processing, where the vacuum degree factor Zkyz is obtained by the following formula:
Wherein Qfzz is expressed as a gas molecular weight, srjz is expressed as a vacuum chamber volume, wdz is expressed as a temperature, and w 1、w2、w3、w4 and w 5 are expressed as preset proportionality coefficients of an evacuation speed Cksd, a gas molecular weight Qfzz, a gas concentration Qtnd, a vacuum chamber volume Srjz and a temperature Wdz, respectively, wherein ,0.12≤w1≤0.32,0.05≤w2≤0.15,0.10≤w3≤0.21,0.03≤w4≤0.10,0.10≤w5≤0.22, and 0.45.ltoreq.w 1+w2+w3+w4+w5.ltoreq.1.0.
Preferably, the vacuum degree factor Zkyz is combined and correlated with the cleanliness Qjd, and after dimensionless processing, an indoor environment coefficient Gjxs is obtained, and the indoor environment coefficient Gjxs is obtained by the following formula:
Where Sdz is represented as humidity, alpha 1 and alpha 2 are both represented as preset scaling factors, where 0.21.ltoreq.alpha 1≤0.60,0.10≤α2.ltoreq.0.40, and 0.40.ltoreq.alpha 1+α2.ltoreq.1.0, and beta is represented as a first correction constant.
Preferably, the second analysis unit is configured to obtain, according to the second dataset, a back pressure influence coefficient Hyxs through correlation between the first film thickness difference Mhc1 and the second film thickness difference Mhc2 and through dimensionless processing, where the back pressure influence coefficient Hyxs is obtained through the following formula:
wherein Klmd is represented as the outside air particle density, kdsz is represented as the hole number, qpmd is represented as the bubble density, m is represented as the preset proportionality coefficient of the sum of the first film thickness difference Mhc1 and the second film thickness difference Mhc2, k, d and q are respectively represented as the preset proportionality coefficients of the outside air particle density Klmd, the hole number Kdsz and the bubble density Qpmd, wherein the first film thickness difference Mhc1 is represented as the film thickness difference of the same region before and after desorption, the second film thickness difference Mhc2 is represented as the variation difference of the film thickness of the region after desorption and the film thickness of the surrounding region, m is more than or equal to 0.16 and less than or equal to 0.41,0.10 and less than or equal to 0.20,0.07 and less than or equal to d is more than or equal to 0.21,0.02 and less than or equal to 0.18,0.35 and less than or equal to m+k+d+q is less than or equal to 1.0, and C is represented as the second correction constant.
Preferably, comparing and analyzing the back pressure influence coefficient Hyxs with the influence threshold value Q to determine whether the current indoor back pressure is in a normal state;
if the back pressure influence coefficient Hyxs is more than or equal to the influence threshold value Q, the current indoor back pressure condition is shown to be in an abnormal state, and the film coating quality of the current base material is judged to be in an unqualified state at the moment;
and if the back pressure influence coefficient Hyxs is smaller than the influence threshold value Q, indicating that the current indoor back pressure is in a normal state.
Preferably, the third correlation estimation unit is configured to perform fitting calculation on the indoor environment coefficients Gjxs in the first data set and the second data set and the back pressure influence coefficient Hyxs to obtain a coating quality index Zlzs, where the coating quality index Zlzs is obtained by the following formula:
Wherein Csd is represented as a coating material purity, lfcz is represented as a crack bifurcation number, a 1、a2、a3 and a 4 are respectively represented as an indoor environment coefficient Gjxs, a back pressure influence coefficient Hyxs, a coating material purity Csd and a preset proportionality coefficient of the crack bifurcation number Lfcz, wherein a 1≤0.26,0.23≤a2≤0.40,0.12≤a3≤0.20,0.05≤a4 is more than or equal to 0.12 and less than or equal to 0.14, a 1+a2+a3+a4 is more than or equal to 0.60 and less than or equal to 1.0, and p is represented as a third correction constant.
Preferably, the production quality control module performs a comparative analysis on the coating quality index Zlzs and the evaluation threshold L to comprehensively evaluate the coating condition of the current substrate, where the specific coating condition is as follows:
If the coating quality index Zlzs is more than or equal to the evaluation threshold L, the coating quality of the current base material is in a disqualified state, and the current base material is automatically sorted to a disqualified working area; at the moment, the solubility change of the gas is reduced, the risk of bubble formation is reduced, and meanwhile, the coating equipment is regularly maintained in the process of releasing the gas, so that the tightness and cleanliness of the equipment are ensured, and the impurities inside and outside the system are reduced;
If the coating quality index Zlzs is smaller than the evaluation threshold L, the coating quality of the current substrate is in a qualified state, and secondary treatment is performed after coating is completed, wherein the secondary treatment comprises cleaning and surface treatment so as to remove or reduce pollutants possibly remained on the surface of the substrate.
Preferably, the intelligent production control method for continuous vacuum coating comprises the following steps:
firstly, monitoring the environment in a process chamber in real time, and acquiring related vacuum state data information;
Step two, monitoring relevant coating difference change data information during indoor back pressure in the process of gradually releasing gas to restore normal air pressure after coating on the surface of the substrate is completed;
thirdly, carrying out data correction on the related vacuum state data information and the related coating film difference change data information, and carrying out unified processing on different units by utilizing a dimensionless processing technology;
step four, extracting characteristics of the processed related vacuum state data information and related coating film difference change data information, analyzing and calculating to obtain a vacuum degree factor Zkyz, an indoor environment coefficient Gjxs and a back pressure influence coefficient Hyxs, and fitting to obtain a coating film quality index Zlzs;
fifthly, presetting an influence threshold Q and an evaluation threshold L, and comparing the influence threshold Q with the back pressure influence coefficient Hyxs to judge whether the current indoor back pressure is in a normal state or not; and comparing the evaluation threshold L with the coating quality index Zlzs to comprehensively evaluate the coating condition of the current substrate, and performing sorting control.
(III) beneficial effects
The invention provides a continuous vacuum coating intelligent production control method and a continuous vacuum coating intelligent production control system, which have the following beneficial effects:
(1) The system provides the evacuation speed Cksd by monitoring the vacuum environment state in the process chamber in real time, the gas release module monitors the relevant difference change data information in the process of releasing gas after the film coating on the surface of the substrate is finished, and the system can accurately acquire and analyze the change of the surface of the film through data preprocessing, including the difference caused by desorbing gas molecules, so that the problem of coating quality caused by the surface change can be found in time. The coating analysis module calculates the vacuum degree factor Zkyz, the indoor environment coefficient Gjxs and the back pressure influence coefficient Hyxs, and correlates to generate a coating quality index Zlzs, and the comprehensive evaluation provides comprehensive and accurate analysis of the coating quality, which is helpful for ensuring the consistency of the product performance and appearance. The production quality control module is used for judging the current indoor back pressure state and the coating condition of the base material, so that an effective means is provided for realizing automatic sorting control of the production line, and the reduction of the defective rate is ensured. In a word, the system comprehensively analyzes the coating quality of the current base material by collecting and monitoring the vacuum environment during coating and the film thickness change before and after desorption gas in real time, and timely performs sorting control on qualified and unqualified base materials, so that the working efficiency is further improved, and meanwhile, when the quality problem is monitored, a corresponding treatment strategy is actively made, so that full preparation is made for reducing the unqualified rate in the later period.
(2) By comparing the back pressure influence coefficient Hyxs with a preset influence threshold value Q, the system can judge whether the current indoor back pressure is in a normal state, which is helpful for monitoring the possible problems in the coating process in real time, finding and processing unqualified states in advance, and continuously and comprehensively analyzing the coating quality when the back pressure is in the normal state.
Drawings
FIG. 1 is a block flow diagram of a continuous vacuum coating intelligent production control system according to the present invention;
FIG. 2 is a schematic diagram showing steps of a continuous vacuum coating intelligent production control method according to the invention.
Detailed Description
The following description of the embodiments of the present invention will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present invention, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
Example 1
Referring to fig. 1, the invention provides an intelligent production control system for continuous vacuum coating, which comprises a vacuum monitoring module, a gas releasing module, a data preprocessing module, a coating analysis module and a production quality control module;
the vacuum monitoring module is used for continuously monitoring the environmental state in the process chamber, providing the evacuation speed Cksd for the process chamber through the vacuum pump, and monitoring the data information of the related vacuum state in the process chamber in real time;
The gas release module is used for monitoring relevant coating difference change data information during indoor back pressure in the process of gradually releasing gas to restore normal air pressure after coating on the surface of the substrate is completed;
The data preprocessing module is used for preprocessing the related vacuum state data information and the related coating film difference change data information, classifying and integrating the preprocessed data information and the related coating film difference change data information to generate a first data set and a second data set, correcting the data, and uniformly processing different units by utilizing a dimensionless processing technology, so that accurate monitoring and control of the data such as a process chamber vacuum environment are ensured, and the stability of the coating quality is improved;
The film coating analysis module comprises a first analysis unit, a second analysis unit and a third correlation estimation unit, wherein the first analysis unit is used for obtaining a vacuum degree factor Zkyz and an indoor environment coefficient Gjxs according to analysis calculation of a first data set, and the second analysis unit is used for obtaining a back pressure influence coefficient Hyxs according to analysis calculation of a second data set; the third correlation estimation unit is used for carrying out summarization analysis on the indoor environment coefficient Gjxs and the back pressure influence coefficient Hyxs to generate a coating quality index Zlzs in a correlation manner;
The production quality control module is used for presetting an influence threshold value Q and an evaluation threshold value L, and comparing the influence threshold value Q with the back pressure influence coefficient Hyxs so as to judge whether the current indoor back pressure is in a normal state or not; and comparing the evaluation threshold L with the coating quality index Zlzs to comprehensively evaluate the coating condition of the current substrate, and performing sorting control.
In the system operation, through the vacuum monitoring module, the system can monitor the vacuum environment state in the process chamber in real time, the evacuation speed Cksd is provided, the gas release module monitors relevant difference change data information in the process of releasing gas after the film coating on the surface of the substrate is finished, and through data preprocessing, the system can accurately acquire and analyze the change of the surface of the film, including the difference caused by the desorption gas molecules. The coating analysis module calculates a vacuum degree factor Zkyz, an indoor environment coefficient Gjxs and a back pressure influence coefficient Hyxs through the first analysis unit, the second analysis unit and the third correlation estimation unit, and generates a coating quality index Zlzs in a correlation manner.
Example 2
Referring to fig. 1, the following details are: the vacuum monitoring module comprises a vacuum unit and an environment unit;
The vacuum unit is used for monitoring related vacuum state data information in the process chamber in real time, wherein the vacuum unit comprises an evacuation speed Cksd, a vacuum chamber volume Srjz, a gas molecular weight Qfzz, a gas concentration Qtnd, a temperature Wdz and a gas distribution condition;
the environment unit is used for combining the related vacuum state data information, and simultaneously collecting and recording the environment state in the process chamber, wherein the environment unit also comprises humidity Sdz, cleanliness Qjd, particle density in the atmosphere and wind speed and wind direction in the process chamber, so that the coating process is ensured to be carried out under the optimal condition, and the consistency and quality of the coating are improved.
The gas release module comprises a film plating regional unit and a post-back pressure film changing unit;
The film plating regional unit is used for dividing the surface of the substrate after film plating into a plurality of groups of regions on average and marking the regions so as to record the film plating condition of the surface of the substrate before and after back pressure in real time;
The post-back-pressure film change unit is used for collecting relevant film coating difference change data information according to marks made on a plurality of groups of areas, wherein the relevant film coating difference change data information comprises a first film thickness difference Mhc1, a second film thickness difference Mhc2, hole number Kdsz, bubble density Qpmd and external air particle density Klmd.
In this embodiment, by marking and monitoring different areas of the surface of the substrate, the system can accurately obtain the coating film difference change data before and after back pressure, including the film thickness, the number of holes Kdsz, the bubble density Qpmd and the like, so that possible problems in the coating process can be found and corrected in time, and the consistency and stability of the film quality are ensured. In a word, the system realizes multidimensional and high-precision monitoring and control of the vacuum environment and the surface change of the film, and improves the application effect of the continuous vacuum coating technology; through regional marking and differential change monitoring, the system effectively avoids external pollutants possibly introduced after back pressure, such as tiny dust in the air, so that the quality of the surface of the coating is optimized. The system can dynamically adjust technological parameters in the film plating process by comprehensively utilizing the data of the vacuum monitoring and gas releasing modules, so that the instability of product quality and the reject ratio are reduced to the greatest extent, and meanwhile, the production line can carry out sorting control according to real-time monitoring results, and the produced products are ensured to reach the expected quality level.
Example 3
Referring to fig. 1, the following details are: the coating analysis module comprises a first analysis unit, a second analysis unit and a third correlation estimation unit;
the first analysis unit is configured to obtain, according to the first data set, a vacuum degree factor Zkyz by correlating the evacuation speed Cksd therein with the gas concentration Qtnd and performing dimensionless processing, where the vacuum degree factor Zkyz is obtained by the following formula:
Wherein Qfzz is expressed as a gas molecular weight, srjz is expressed as a vacuum chamber volume, wdz is expressed as a temperature, and w 1、w2、w3、w4 and w 5 are expressed as preset proportionality coefficients of an evacuation speed Cksd, a gas molecular weight Qfzz, a gas concentration Qtnd, a vacuum chamber volume Srjz and a temperature Wdz, respectively, wherein ,0.12≤w1≤0.32,0.05≤w2≤0.15,0.10≤w3≤0.21,0.03≤w4≤0.10,0.10≤w5≤0.22, and 0.45.ltoreq.w 1+w2+w3+w4+w5.ltoreq.1.0.
The above-mentioned evacuation speed Cksd is obtained by monitoring with a vacuum pump speedometer or a flowmeter;
the molecular weight Qfzz of the gas is obtained by monitoring through a mass spectrometer or a gas mass analyzer;
The gas concentration Qtnd is obtained by monitoring through a gas concentration sensor or an infrared gas sensor;
the vacuum chamber volume Srjz is acquired by a volumeter;
the temperature Wdz is acquired by a temperature sensor.
Combining the vacuum degree factor Zkyz, correlating the vacuum degree factor with the cleanliness Qjd, and obtaining an indoor environment coefficient Gjxs after dimensionless processing, wherein the indoor environment coefficient Gjxs is obtained by the following formula:
Where Sdz is represented as humidity, alpha 1 and alpha 2 are both represented as preset scaling factors, where 0.21.ltoreq.alpha 1≤0.60,0.10≤α2.ltoreq.0.40, and 0.40.ltoreq.alpha 1+α2.ltoreq.1.0, and beta is represented as a first correction constant.
The humidity Sdz is obtained through monitoring by a humidity sensor;
Cleanliness Qjd is obtained by real-time monitoring by a particle counter or particle counter.
In this embodiment, by taking into consideration a plurality of factors such as the evacuation speed Cksd and the gas concentration Qtnd, and adopting dimensionless processing, the vacuum degree factor Zkyz is obtained, so that the system can more accurately measure the current vacuum environment state, so as to optimize the quality of the vacuum environment, and further ensure the optimal coating condition. Meanwhile, the indoor environment coefficient Gjxs is calculated by combining parameters such as cleanliness Qjd and the like, and the evaluation of various environmental conditions in the process chamber is provided for the system, so that the system can more comprehensively know the conditions of the process chamber, the film formation in the optimal environment can be ensured, and the coating quality is further improved. In a word, through the calculation of the first analysis unit and the second analysis unit, the system realizes the multi-level and multi-dimensional accurate analysis of the vacuum environment and the process indoor environment, and improves the understanding and control level of the coating quality influence factors. The optimized Zkyz and the comprehensively evaluated Gjxs provide more targeted parameters for the production line, are favorable for dynamically adjusting the technological parameters, and ensure the stability and consistency of the continuous vacuum coating process.
Example 4
Referring to fig. 1, the following details are: the second analysis unit is configured to obtain, according to the second dataset, a back pressure influence coefficient Hyxs through correlation between the first film thickness difference Mhc1 and the second film thickness difference Mhc2 and through dimensionless processing, where the back pressure influence coefficient Hyxs is obtained through the following formula:
wherein Klmd is represented as the outside air particle density, kdsz is represented as the hole number, qpmd is represented as the bubble density, m is represented as the preset proportionality coefficient of the sum of the first film thickness difference Mhc1 and the second film thickness difference Mhc2, k, d and q are respectively represented as the preset proportionality coefficients of the outside air particle density Klmd, the hole number Kdsz and the bubble density Qpmd, wherein the first film thickness difference Mhc1 is represented as the film thickness difference of the same region before and after desorption, the second film thickness difference Mhc2 is represented as the variation difference of the film thickness of the region after desorption and the film thickness of the surrounding region, m is more than or equal to 0.16 and less than or equal to 0.41,0.10 and less than or equal to 0.20,0.07 and less than or equal to d is more than or equal to 0.21,0.02 and less than or equal to 0.18,0.35 and less than or equal to m+k+d+q is less than or equal to 1.0, and C is represented as the second correction constant.
The first film thickness difference Mhc1 and the second film thickness difference Mhc2 can be obtained by monitoring through a laser interferometer, interference fringes are formed on the surface of the thin film by using a laser beam, and the thickness of the thin film is calculated by measuring the movement of the interference fringes.
The external air particle density Klmd is acquired by a particle sensor or an air particle counter;
Hole number Kdsz and bubble density Qpmd the hole number was estimated by microscopic observation of the film surface;
Comparing and analyzing the back pressure influence coefficient Hyxs with the influence threshold Q to judge whether the current indoor back pressure is in a normal state or not;
if the back pressure influence coefficient Hyxs is more than or equal to the influence threshold value Q, the current indoor back pressure condition is shown to be in an abnormal state, and the film coating quality of the current base material is judged to be in an unqualified state at the moment;
If the back pressure influence coefficient Hyxs is smaller than the influence threshold value Q, the back pressure is indicated to be in a normal state in the current room, and the plating condition of the current substrate is comprehensively evaluated to be a final result.
In this embodiment, by comprehensively considering multiple factors such as the first film thickness difference Mhc1, the second film thickness difference Mhc2, the number of holes Kdsz, the bubble density Qpmd, the external air particle density Klmd and the like, and adopting dimensionless processing, a back pressure influence coefficient Hyxs is obtained, the coefficient can more comprehensively reflect the film coating difference condition before and after back pressure, and the system can evaluate the quality of the coating on a higher level by calculating the second analysis unit, and comprehensively considering the factors such as the film thickness difference, the hole number Kdsz, the bubble density Qpmd and the like, so that the quality of the judging coating is more accurate. Aiming at the comparison of the back pressure influence coefficient Hyxs and the influence threshold Q, the system can judge the state of the coating quality more rapidly and reliably, and the real-time quality control level on the production line is improved.
Example 5
Referring to fig. 1, the following details are: the third correlation estimation unit is configured to perform fitting calculation on the indoor environment coefficients Gjxs and the back pressure influence coefficient Hyxs in the first data set and the second data set to obtain a coating quality index Zlzs, where the coating quality index Zlzs is obtained by the following formula:
Wherein Csd is represented as a coating material purity, lfcz is represented as a crack bifurcation number, a 1、a2、a3 and a 4 are respectively represented as an indoor environment coefficient Gjxs, a back pressure influence coefficient Hyxs, a coating material purity Csd and a preset proportionality coefficient of the crack bifurcation number Lfcz, wherein a 1≤0.26,0.23≤a2≤0.40,0.12≤a3≤0.20,0.05≤a4 is more than or equal to 0.12 and less than or equal to 0.14, a 1+a2+a3+a4 is more than or equal to 0.60 and less than or equal to 1.0, and p is represented as a third correction constant.
The purity Csd of the coating material is acquired by a mass spectrometer;
Crack bifurcation number Lfcz the number of cracks and bifurcation was estimated by microscopic observation of the film surface.
In this embodiment, the coating quality index Zlzs is calculated by comprehensively considering a plurality of key factors such as the indoor environment coefficient Gjxs, the back pressure influence coefficient Hyxs and the crack bifurcation value Lfcz, so that the system can more comprehensively analyze and evaluate the comprehensive condition of the coating quality, and the setting of a plurality of groups of preset proportionality coefficients allows the weight of each parameter in the calculation to be adjusted according to specific requirements, so that the flexibility of the system is improved, and the system is suitable for different production environments and requirements. The third correction constant P is introduced to enable the system to be more robust, so that the influence of each factor in calculation is balanced, the accuracy of the coating quality index Zlzs is improved, and the stability and controllability of the product quality are improved.
Example 6
Referring to fig. 1, the following details are: the production quality control module performs a comparison analysis on the coating quality index Zlzs and the evaluation threshold value L to comprehensively evaluate the coating condition of the current substrate, wherein the specific coating condition comprises the following contents:
If the coating quality index Zlzs is more than or equal to the evaluation threshold L, the coating quality of the current base material is in a disqualified state, and the current base material is automatically sorted to a disqualified working area; at the moment, the solubility change of gas is reduced, the risk of bubble formation is reduced by controlling the indoor temperature, humidity, vacuum degree and gas release speed before and after film coating, and meanwhile, in the process of releasing gas, the coating equipment is regularly maintained, so that the tightness and cleanliness of the equipment are ensured, the impurities inside and outside the system are reduced, unnecessary dust and particles are prevented from being introduced into the system, and the pollution of the external environment to the coating is reduced as much as possible by using a proper atmosphere control technology;
If the coating quality index Zlzs is smaller than the evaluation threshold L, the coating quality of the current substrate is in a qualified state, and secondary treatment is performed after coating is completed, wherein the secondary treatment comprises cleaning and surface treatment so as to remove or reduce pollutants possibly remained on the surface of the substrate.
In this embodiment, through real-time supervision coating film quality index Zlzs and production quality control module, the system can be automatic with disqualified product letter sorting to corresponding work area, has further improved the degree of automation and the work efficiency of production line, under disqualified state, the system is through factors such as control indoor temperature, humidity and vacuum degree, reduces the solubility change of gas, further reduces the risk that the bubble formed to improve coating quality. For unqualified states, the system recommends periodic maintenance of the coating equipment, ensures the tightness and cleanliness of the equipment, and is beneficial to improving the stability and service life of the equipment. The control system can reduce impurities inside and outside the system, reduce introduction of tiny dust and particles, help prevent unnecessary pollution to the coating and improve the purity of the coating.
Example 7
Referring to fig. 1 and 2, the following details are: an intelligent production control method for continuous vacuum coating comprises the following steps:
firstly, monitoring the environment in a process chamber in real time, and acquiring related vacuum state data information;
Step two, monitoring relevant coating difference change data information during indoor back pressure in the process of gradually releasing gas to restore normal air pressure after coating on the surface of the substrate is completed;
thirdly, carrying out data correction on the related vacuum state data information and the related coating film difference change data information, and carrying out unified processing on different units by utilizing a dimensionless processing technology;
step four, extracting characteristics of the processed related vacuum state data information and related coating film difference change data information, analyzing and calculating to obtain a vacuum degree factor Zkyz, an indoor environment coefficient Gjxs and a back pressure influence coefficient Hyxs, and fitting to obtain a coating film quality index Zlzs;
fifthly, presetting an influence threshold Q and an evaluation threshold L, and comparing the influence threshold Q with the back pressure influence coefficient Hyxs to judge whether the current indoor back pressure is in a normal state or not; and comparing the evaluation threshold L with the coating quality index Zlzs to comprehensively evaluate the coating condition of the current substrate, and performing sorting control.
Examples: a certain production factory introduces a continuous vacuum coating intelligent production control method and system, and the following is an example of a certain production factory:
And (3) data acquisition: the evacuation speed Cksd is 12; the molecular weight Qfzz of the gas is 34.1; the gas concentration Qtnd was 68%; the vacuum chamber volume Srjz is 106; the temperature Wdz was 29;
Presetting a proportionality coefficient: w 1 is 0.16; w 2 is 0.07; w 3 is 0.11; w 4 is 0.05; w 5 is 0.14;
The cleanliness Qjd is 78%; the humidity Sdz is 15;
Presetting a proportionality coefficient: alpha 1 is 0.30; alpha 2 is 0.16; the first correction constant β is 0.03;
the first film thickness difference Mhc1 is 0.28; the second film thickness difference Mhc2 is 1.6; the outside air particle density Klmd was 62%; the number Kdsz of holes is 24; bubble density Qpmd was 28%;
Presetting a proportionality coefficient: m is 0.21; k is 0.11; d is 0.14; q is 0.10; the second correction constant C is 0.12;
the purity Csd of the coating material is 87%; crack bifurcation number Lfcz was 3;
Presetting a proportionality coefficient: a 1 is 0.15; a 2 is 0.31; a 3 is 0.13; a 4 is 0.08; the third correction constant P is 0.02;
From the above data, the following calculations can be made:
Vacuum degree factor
Indoor environmental coefficient
Back pressure influence coefficient
If the influence threshold Q is 5.0, the back pressure influence coefficient Hyxs is larger than or equal to the influence threshold Q, and the current indoor back pressure condition is indicated to be in an abnormal state, and the film coating quality of the current base material is determined to be in an unqualified state at the moment;
Coating quality index
If the evaluation threshold L is 5.0, the coating quality index Zlzs is more than or equal to the evaluation threshold L, which indicates that the coating quality of the current base material is in a disqualified state, and the base material is automatically sorted to a disqualified working area; at the moment, the solubility change of gas is reduced, the risk of bubble formation is reduced by controlling the indoor temperature, humidity, vacuum degree and gas release speed before and after film coating, and meanwhile, in the process of releasing gas, the coating equipment is regularly maintained, so that the tightness and cleanliness of the equipment are ensured, the impurities inside and outside the system are reduced, unnecessary dust and particles are prevented from being introduced into the system, and the pollution of the external environment to the coating is reduced as much as possible by using a proper atmosphere control technology.
Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made therein without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.
Claims (4)
1. A continuous vacuum coating intelligent production control system is characterized in that: the device comprises a vacuum monitoring module, a gas releasing module, a data preprocessing module, a coating analysis module and a production quality control module;
the vacuum monitoring module is used for continuously monitoring the environmental state in the process chamber, providing the evacuation speed Cksd for the process chamber through the vacuum pump, and monitoring the data information of the related vacuum state in the process chamber in real time;
the vacuum monitoring module comprises a vacuum unit and an environment unit;
The vacuum unit is used for monitoring related vacuum state data information in the process chamber in real time, wherein the vacuum unit comprises an evacuation speed Cksd, a vacuum chamber volume Srjz, a gas molecular weight Qfzz, a gas concentration Qtnd, a temperature Wdz and a gas distribution condition;
The environment unit is used for combining the related vacuum state data information, and collecting and recording the environment state in the process chamber, wherein the environment unit also comprises humidity Sdz, cleanliness Qjd, particle density in the atmosphere and wind speed and direction in the process chamber;
The gas release module is used for monitoring relevant coating difference change data information during indoor back pressure in the process of gradually releasing gas to restore normal air pressure after coating on the surface of the substrate is completed;
the gas release module comprises a film plating regional unit and a post-back pressure film changing unit;
The film plating regional unit is used for dividing the surface of the substrate after film plating into a plurality of groups of regions on average and marking the regions so as to record the film plating condition of the surface of the substrate before and after back pressure in real time;
The post-back-pressure film change unit is used for collecting relevant film coating difference change data information according to marks made on a plurality of groups of areas, wherein the relevant film coating difference change data information comprises a first film thickness difference Mhc1, a second film thickness difference Mhc2, hole number Kdsz, bubble density Qpmd and external air particle density Klmd;
The data preprocessing module is used for preprocessing the related vacuum state data information and the related coating difference change data information, classifying and integrating the preprocessed data information and the related coating difference change data information to generate a first data set and a second data set, correcting the data, and uniformly processing different units by using a dimensionless processing technology;
The film coating analysis module comprises a first analysis unit, a second analysis unit and a third correlation estimation unit, wherein the first analysis unit is used for obtaining a vacuum degree factor Zkyz and an indoor environment coefficient Gjxs according to analysis calculation of a first data set, and the second analysis unit is used for obtaining a back pressure influence coefficient Hyxs according to analysis calculation of a second data set; the third correlation estimation unit is used for carrying out summarization analysis on the indoor environment coefficient Gjxs and the back pressure influence coefficient Hyxs to generate a coating quality index Zlzs in a correlation manner;
the first analysis unit is configured to obtain, according to the first data set, a vacuum degree factor Zkyz by correlating the evacuation speed Cksd therein with the gas concentration Qtnd and performing dimensionless processing, where the vacuum degree factor Zkyz is obtained by the following formula:
Wherein Qfzz is expressed as a gas molecular weight, srjz is expressed as a vacuum chamber volume, wdz is expressed as a temperature, and w 1、w2、w3、w4 and w 5 are respectively expressed as preset proportionality coefficients of an evacuation speed Cksd, a gas molecular weight Qfzz, a gas concentration Qtnd, a vacuum chamber volume Srjz, and a temperature Wdz;
Combining the vacuum degree factor Zkyz, correlating the vacuum degree factor with the cleanliness Qjd, and obtaining an indoor environment coefficient Gjxs after dimensionless processing, wherein the indoor environment coefficient Gjxs is obtained by the following formula:
wherein Sdz is expressed as humidity, alpha 1 and alpha 2 are both expressed as preset proportionality coefficients, and beta is expressed as a first correction constant;
The second analysis unit is configured to obtain, according to the second dataset, a back pressure influence coefficient Hyxs through correlation between the first film thickness difference Mhc1 and the second film thickness difference Mhc2 and through dimensionless processing, where the back pressure influence coefficient Hyxs is obtained through the following formula:
wherein Klmd is represented as the outside air particle density, kdsz is represented as the hole number, qpmd is represented as the bubble density, m is represented as the preset proportionality coefficient of the sum of the first film thickness difference Mhc1 and the second film thickness difference Mhc2, k, d and q are represented as the preset proportionality coefficients of the outside air particle density Klmd, the hole number Kdsz and the bubble density Qpmd, respectively, wherein the first film thickness difference Mhc1 is represented as the film thickness difference of the same region before and after desorption, the second film thickness difference Mhc2 is represented as the variation difference of the film thickness of the region after desorption and the film thickness of the surrounding region, and C is represented as the second correction constant;
the third correlation estimation unit is configured to perform fitting calculation on the indoor environment coefficients Gjxs and the back pressure influence coefficient Hyxs in the first data set and the second data set to obtain a coating quality index Zlzs, where the coating quality index Zlzs is obtained by the following formula:
Wherein Csd is represented as a coating material purity, lfcz is represented as a crack bifurcation value, a 1、a2、a3 and a 4 are respectively represented as an indoor environment coefficient Gjxs, a back pressure influence coefficient Hyxs, a coating material purity Csd and a preset proportionality coefficient of the crack bifurcation value Lfcz, and P is represented as a third correction constant;
The production quality control module is used for presetting an influence threshold value Q and an evaluation threshold value L, and comparing the influence threshold value Q with the back pressure influence coefficient Hyxs so as to judge whether the current indoor back pressure is in a normal state or not; and comparing the evaluation threshold L with the coating quality index Zlzs to comprehensively evaluate the coating condition of the current substrate, and performing sorting control.
2. The intelligent production control system for continuous vacuum coating according to claim 1, wherein: comparing and analyzing the back pressure influence coefficient Hyxs with the influence threshold Q to judge whether the current indoor back pressure is in a normal state or not;
if the back pressure influence coefficient Hyxs is more than or equal to the influence threshold value Q, the current indoor back pressure condition is shown to be in an abnormal state, and the film coating quality of the current base material is judged to be in an unqualified state at the moment;
and if the back pressure influence coefficient Hyxs is smaller than the influence threshold value Q, indicating that the current indoor back pressure is in a normal state.
3. The intelligent production control system for continuous vacuum coating according to claim 1, wherein: the production quality control module performs a comparison analysis on the coating quality index Zlzs and the evaluation threshold value L to comprehensively evaluate the coating condition of the current substrate, wherein the specific coating condition comprises the following contents:
If the coating quality index Zlzs is more than or equal to the evaluation threshold L, the coating quality of the current base material is in a disqualified state, and the current base material is automatically sorted to a disqualified working area; at the moment, the solubility change of the gas is reduced, the risk of bubble formation is reduced, and meanwhile, the coating equipment is regularly maintained in the process of releasing the gas, so that the tightness and cleanliness of the equipment are ensured, and the impurities inside and outside the system are reduced;
If the coating quality index Zlzs is smaller than the evaluation threshold L, the coating quality of the current substrate is in a qualified state, and secondary treatment is performed after coating is completed, wherein the secondary treatment comprises cleaning and surface treatment so as to remove or reduce pollutants possibly remained on the surface of the substrate.
4. An intelligent production control method for continuous vacuum coating, comprising the intelligent production control system for continuous vacuum coating according to any one of claims 1-3, and characterized in that: the method comprises the following steps:
firstly, monitoring the environment in a process chamber in real time, and acquiring related vacuum state data information;
Step two, monitoring relevant coating difference change data information during indoor back pressure in the process of gradually releasing gas to restore normal air pressure after coating on the surface of the substrate is completed;
thirdly, carrying out data correction on the related vacuum state data information and the related coating film difference change data information, and carrying out unified processing on different units by utilizing a dimensionless processing technology;
step four, extracting characteristics of the processed related vacuum state data information and related coating film difference change data information, analyzing and calculating to obtain a vacuum degree factor Zkyz, an indoor environment coefficient Gjxs and a back pressure influence coefficient Hyxs, and fitting to obtain a coating film quality index Zlzs;
fifthly, presetting an influence threshold Q and an evaluation threshold L, and comparing the influence threshold Q with the back pressure influence coefficient Hyxs to judge whether the current indoor back pressure is in a normal state or not; and comparing the evaluation threshold L with the coating quality index Zlzs to comprehensively evaluate the coating condition of the current substrate, and performing sorting control.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202410187571.4A CN118028758B (en) | 2024-02-20 | 2024-02-20 | Intelligent production control method and system for continuous vacuum coating |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202410187571.4A CN118028758B (en) | 2024-02-20 | 2024-02-20 | Intelligent production control method and system for continuous vacuum coating |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN118028758A CN118028758A (en) | 2024-05-14 |
| CN118028758B true CN118028758B (en) | 2024-10-08 |
Family
ID=90983704
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202410187571.4A Active CN118028758B (en) | 2024-02-20 | 2024-02-20 | Intelligent production control method and system for continuous vacuum coating |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN118028758B (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN118467766B (en) * | 2024-05-20 | 2025-04-01 | 江苏派莱特光电科技有限公司 | An analysis system for vacuum coating machine |
| CN118308702B (en) * | 2024-06-11 | 2024-09-06 | 深圳市正和忠信股份有限公司 | Parameter optimization method and system for vacuum coating equipment |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101365822A (en) * | 2006-07-31 | 2009-02-11 | 东京毅力科创株式会社 | Substrate processing apparatus, program, recording medium and conditioning necessity determining method |
| CN102714135A (en) * | 2009-12-18 | 2012-10-03 | 阿迪克森真空产品公司 | Method and device for controlling the manufacture of semiconductor by measuring contamination |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4539789B2 (en) * | 1999-10-26 | 2010-09-08 | 東洋紡績株式会社 | Vacuum deposition equipment |
| US10269545B2 (en) * | 2016-08-03 | 2019-04-23 | Lam Research Corporation | Methods for monitoring plasma processing systems for advanced process and tool control |
| CN113774353A (en) * | 2021-09-15 | 2021-12-10 | 佛山市博顿光电科技有限公司 | Technological parameter optimization method and device in film coating process and film coating real-time monitoring system |
| CN114481077B (en) * | 2022-01-20 | 2023-08-25 | 江苏南高智能装备创新中心有限公司 | Automatic control device and method for metal coating |
-
2024
- 2024-02-20 CN CN202410187571.4A patent/CN118028758B/en active Active
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101365822A (en) * | 2006-07-31 | 2009-02-11 | 东京毅力科创株式会社 | Substrate processing apparatus, program, recording medium and conditioning necessity determining method |
| CN102714135A (en) * | 2009-12-18 | 2012-10-03 | 阿迪克森真空产品公司 | Method and device for controlling the manufacture of semiconductor by measuring contamination |
Also Published As
| Publication number | Publication date |
|---|---|
| CN118028758A (en) | 2024-05-14 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN118028758B (en) | Intelligent production control method and system for continuous vacuum coating | |
| CN116738353B (en) | Pharmaceutical workshop air filter element performance detection method based on data analysis | |
| CN116645007B (en) | Environment evaluation method and system based on multidimensional data acquisition | |
| CN108445020B (en) | Glass substrate defect aggregation identification method | |
| CN116184950B (en) | Multisource data extraction and analysis system for automobile production line | |
| CN117129636B (en) | Gaseous molecular pollutant on-line monitoring system for semiconductor manufacturing | |
| CN116307289A (en) | Textile processing procedure parameter detection and prediction method, system and storage medium | |
| CN114150287A (en) | Thin film deposition method and equipment | |
| CN117234164A (en) | Intelligent factory control system for comprehensive digital production management | |
| CN115455359A (en) | Automatic correction and distribution fitting method for small-batch error data | |
| CN109426013B (en) | Method and device for analyzing and detecting and repairing defects of color film substrate | |
| CN117821908B (en) | Intelligent monitoring system of electron beam evaporation coating machine for optical coating | |
| KR102776377B1 (en) | A device for real time measumetnt of process particles and a method for real time prediction of the particle defect on nano device using the same | |
| CN113588884B (en) | Pollution source searching method based on AMC on-line monitoring system | |
| CN119323384B (en) | Optimal multi-level continuous sampling inspection and process capability index integration method | |
| CN108268987B (en) | Method for estimating quality of various products | |
| CN117892093B (en) | Monitoring parameter data interaction processing method, processing system and processing equipment | |
| CN118422131B (en) | Light-operated monitoring system of evaporation coating machine | |
| CN117316836B (en) | Wafer processing management system applying marangoni effect | |
| CN117708615B (en) | Product detection method and processing equipment monitoring method | |
| CN118011188B (en) | Semiconductor test management system | |
| CN118585774B (en) | Casting machine data acquisition and analysis system and method based on Internet of things | |
| CN118605653B (en) | Anti-disturbance accurate temperature control method for heating section of tunnel oven | |
| US7899627B2 (en) | Automatic dynamic baseline creation and adjustment | |
| CN119310969A (en) | Integrated control scheme for optimal four-parameter continuous sampling inspection (OCSP-3) and process yield index (Spk) |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| TA01 | Transfer of patent application right |
Effective date of registration: 20240912 Address after: Building 10, 1st to 4th floors, Crystal Agglomeration Zone, Pujiang County, Jinhua City, Zhejiang Province 321000 Applicant after: Pujiang chuangjun crystal Co.,Ltd. Country or region after: China Address before: Room 1103, Building 3, Gangcheng Plaza, No. 16 North Ring Road, Taicang Port Economic and Technological Development Zone, Taicang City, Suzhou City, Jiangsu Province, 215400 Applicant before: Suzhou huilianhang Technology Co.,Ltd. Country or region before: China |
|
| TA01 | Transfer of patent application right | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |