CN117949678B - Sample batch detection device and detection method - Google Patents
Sample batch detection device and detection method Download PDFInfo
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- CN117949678B CN117949678B CN202410347391.8A CN202410347391A CN117949678B CN 117949678 B CN117949678 B CN 117949678B CN 202410347391 A CN202410347391 A CN 202410347391A CN 117949678 B CN117949678 B CN 117949678B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N35/00—Automatic analysis not limited to methods or materials provided for in any single one of groups G01N1/00 - G01N33/00; Handling materials therefor
- G01N35/0099—Automatic analysis not limited to methods or materials provided for in any single one of groups G01N1/00 - G01N33/00; Handling materials therefor comprising robots or similar manipulators
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
- G01N23/225—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material using electron or ion
- G01N23/2251—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material using electron or ion using incident electron beams, e.g. scanning electron microscopy [SEM]
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N35/00—Automatic analysis not limited to methods or materials provided for in any single one of groups G01N1/00 - G01N33/00; Handling materials therefor
- G01N35/10—Devices for transferring samples or any liquids to, in, or from, the analysis apparatus, e.g. suction devices, injection devices
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Abstract
The invention relates to the technical field of sample detection, and aims to provide a sample batch detection device and a detection method. When the sample batch detection device detects samples in batches, only one vacuumizing is needed, so that the working time and resources are saved. The sample batch detection device comprises: the device comprises a sample transportation assembly, a sample transfer assembly, scanning electron microscope equipment and a vacuumizing assembly; the sample transport assembly includes: the sample platform can be placed with a plurality of samples, and the platform moving mechanism can drive the sample platform to move in the transport pipeline; the sample transfer assembly includes: the transfer pipeline is connected with the transportation pipeline, the transfer mechanism is arranged in the transfer pipeline, and the transfer mechanism can transfer samples to a sample detection table of the scanning electron microscope equipment. The invention solves the problems of time consumption, more resources and lower working efficiency of the sample detection device in the prior art when detecting samples in batches.
Description
Technical Field
The invention relates to the technical field of sample detection, in particular to a sample batch detection device and a detection method.
Background
SEM (scanning electron microscope) is a device interposed between transmission electron microscope and optical microscope, and is a powerful tool for observing microscopic world. Scanning electron microscope uses focused high-energy electron beam to scan sample surface under high vacuum environment, and obtains various electronic signals through interaction between light beam and substance, and the signals are collected, amplified, converted and imaged, so as to amplify thousands times to observe microscopic particle state of sample coating, thereby achieving the purpose of representing microscopic morphology of sample.
The existing sample detection device adopts a scanning electron microscope to detect the microscopic appearance characterization of the sample, a sample bin is opened to place the sample on a sample table during detection, then the sample bin is vacuumized, and then the image is observed through the scanning electron microscope. Because the scanning electron microscope needs to be in a vacuum environment to observe and look at, the existing sample detection device needs to be vacuumized once every time a sample is detected, time and resources are wasted when the samples are detected in batches, and the working efficiency is low.
Disclosure of Invention
Therefore, the technical problem to be solved by the invention is to overcome the defects that the sample detection device in the prior art needs to vacuumize once every time one sample is detected, and the time and the resources are more and the working efficiency is lower when the samples are detected in batches, so that the device and the method for detecting the samples in batches can detect a plurality of samples in batches, and vacuumize only once for each batch of samples, save the working time and the resources and have higher working efficiency.
In order to solve the above problems, the present invention provides a sample batch detection device, comprising:
A sample transport assembly, the sample transport assembly comprising: the sample platform is provided with a plurality of sample placing stations, the platform moving mechanism is arranged in the transport pipeline, the moving end of the platform moving mechanism is connected with the sample platform, and the platform moving mechanism is suitable for driving the sample platform to move in the transport pipeline along the extending direction of the transport pipeline;
a sample transfer assembly, the sample transfer assembly comprising: the transfer pipeline is connected with the transportation pipeline, and the transfer mechanism is arranged in the transfer pipeline;
a scanning electron microscope device, a sample inlet of the scanning electron microscope device is connected with the transportation pipeline, and the transfer mechanism is suitable for transferring the sample placed on the sample placing station to a sample detection table at the sample inlet;
And the air extraction end of the vacuumizing assembly is connected with the transportation pipeline.
Optionally, the sample platform comprises: the device comprises a bearing platform, wherein a plurality of grooves are formed in the bearing platform at intervals, a platform is arranged at the top end of each groove, and each platform corresponds to one sample placing station.
Optionally, the platform moving mechanism includes: slide rail and slider, the slide rail fixed set up in the transportation pipeline inner wall, the slider slip set up in on the slide rail, sample platform fixed set up in on the slider.
Optionally, the transfer mechanism includes: the mechanical arm is fixedly arranged in the transfer pipeline.
Optionally, the transfer pipeline and the transportation pipeline are vertically arranged, and the end part of the mechanical arm can stretch and retract along the extending direction of the transfer pipeline.
Optionally, the scanning electron microscope device is disposed at an opposite side of the transfer assembly, and the connection ports of the transfer pipeline and the transport pipeline are opposite to the sample inlet of the scanning electron microscope device.
Optionally, the vacuum pumping assembly includes: the mechanical pump is connected with the molecular pump, and the molecular pump is connected with the transportation pipeline.
Optionally, the control device further comprises a control component: the control assembly is electrically connected with the sample transport assembly, the sample transfer assembly, the scanning electron microscope device, and the evacuation assembly.
The sample batch detection method is applied to the sample batch detection device and comprises the following steps:
s1: the sample platform moves to a sample inlet of the first sample placement worker positioned on the scanning electron microscope equipment;
S2: the mechanical arm transfers the sample to a sample detection table;
S3: the scanning electron microscope device detects the sample on the sample detection table;
S4: the detected sample is replaced to the sample platform through the mechanical arm;
S5: and (3) moving the sample platform to enable the next sample placing station to be at the sample inlet, and repeating the steps S2-S4.
Optionally, at said S1: the step of moving the sample platform to the position where the first sample placement tool is positioned at the sample inlet of the scanning electron microscope device further comprises the step of vacuumizing the interior of the device.
The invention has the following advantages:
1. The invention provides a sample batch detection device, which comprises: sample transport assembly, sample transfer assembly, scanning electron microscope apparatus, and evacuation assembly. Wherein the sample transport assembly comprises: the sample platform is provided with a plurality of sample placing stations, so that a plurality of samples can be placed on the sample platform at the same time. The platform moving mechanism is arranged in the conveying pipeline, and the moving end of the platform moving mechanism is connected with the sample platform, so that the sample platform can be driven to move in the conveying pipeline along the extending direction of the conveying pipeline, and the sample platform is conveyed from the inlet of the conveying pipeline to the scanning electron microscope equipment for detection. The sample transfer assembly includes: the transfer pipeline is connected with the transport pipeline, the transfer mechanism is arranged in the transfer pipeline, a sample inlet of the scanning electron microscope device is connected with the transport pipeline, and the transfer mechanism can transfer a sample placed on the sample placing station onto a sample detecting table at the sample inlet so as to be convenient to detect. The suction end of the vacuum pumping assembly is connected with the transportation pipeline to pump the pipeline into a vacuum state, because the scanning electron microscope equipment can work under the vacuum state. The device can detect a plurality of samples each time, only needs to be vacuumized once, does not damage the internal vacuum state in the continuous detection process, is suitable for detecting the samples in batches, can greatly save working time and resources, and improves the working efficiency.
2. The sample batch detection device provided by the invention has the advantages that the sample platform comprises the bearing platform, the bearing platform is provided with the plurality of grooves, the top end of each groove is provided with the platform, samples can be placed on the platform, and the sample platform can regularly place a plurality of samples, so that the detection efficiency can be improved.
3. The invention provides a sample batch detection device, a transfer mechanism comprises: the mechanical arm is arranged in the transfer pipeline, and the end part of the mechanical arm can stretch and retract along the extending direction of the transfer pipeline. The scanning electron microscope is disposed on the opposite side of the transfer set, and the sample inlet is directly opposite to the connection ports of the transfer tube and the transport tube. Therefore, the mechanical arm can be used for directly transferring the sample on the sample platform to the sample detection table, the process is simplified, and the efficiency is improved.
4. The invention provides a sample batch detection method, which comprises the following steps: s1: the sample platform moves to a sample inlet of the first sample placement worker positioned on the scanning electron microscope equipment; s2: the mechanical arm transfers the sample to a sample detection table; s3: the scanning electron microscope device detects the sample on the sample detection table; s4: the detected sample is put back to the sample platform through the mechanical arm; s5: the sample platform moves to enable the next sample placing station to reach the sample inlet, and the steps S2-S4 are repeated. The multiple samples on the sample platform can be sequentially detected according to the step circulation, the detection process is continuously carried out, repeated vacuumizing is not needed, the working time and resources are saved, and the detection efficiency is improved.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings that are needed in the description of the embodiments or the prior art will be briefly described, and it is obvious that the drawings in the description below are some embodiments of the present invention, and other drawings can be obtained according to the drawings without inventive effort for a person skilled in the art.
FIG. 1 is a schematic diagram of a sample batch detection apparatus of the present invention;
FIG. 2 is a schematic view of another view of the sample batch detection apparatus of the present invention;
FIG. 3 is a schematic diagram of a sample platform in the sample batch detection device of the present invention;
FIG. 4 is a schematic diagram of a platform movement mechanism in the sample batch detection apparatus of the present invention;
FIG. 5 is a schematic diagram of a robotic arm in a sample batch detection apparatus of the present invention;
FIG. 6 is a schematic diagram of a sample detection stage of a scanning electron microscope apparatus in a sample batch detection device of the present invention;
FIG. 7 is a schematic diagram showing the cooperation of a mechanical arm and a sample detection table in the sample batch detection device of the present invention.
Reference numerals illustrate:
11. The device comprises a transportation pipeline, 12, a sample platform, 121, a bearing platform, 122, a platform, 13, a platform moving mechanism, 131, a sliding rail, 132 and a sliding block;
21. transfer pipeline 221, mechanical arm;
3. scanning electron microscope equipment 31, sample detection platform.
Detailed Description
The following description of the embodiments of the present invention will be made apparent and fully in view of the accompanying drawings, in which some, but not all embodiments of the invention are shown. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
In the description of the present invention, it should be noted that the directions or positional relationships indicated by the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. are based on the directions or positional relationships shown in the drawings, are merely for convenience of describing the present invention and simplifying the description, and do not indicate or imply that the devices or elements referred to must have a specific orientation, be configured and operated in a specific orientation, and thus should not be construed as limiting the present invention. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.
In the description of the present invention, it should be noted that, unless explicitly specified and limited otherwise, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be either fixedly connected, detachably connected, or integrally connected, for example; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communication between two elements. The specific meaning of the above terms in the present invention can be understood by those of ordinary skill in the art according to the specific circumstances.
In addition, the technical features of the different embodiments of the present invention described below may be combined with each other as long as they do not collide with each other.
As shown in fig. 1 and fig. 2, the sample batch detection device according to the preferred embodiment of the present invention can be used for batch detection of microscopic morphological characterization of samples, for example, can be used for batch automatic detection of coating materials on an industrial production line, and when a plurality of samples are detected in batches, only one vacuum pumping is needed for each batch of samples, so that working time and resources can be greatly saved, and working efficiency can be improved.
The sample batch detection device comprises: a sample transport assembly, a sample transfer assembly, a scanning electron microscope device 3 and a vacuum assembly. Wherein the sample transport assembly comprises: transport pipe 11, sample platform 12 and platform movement mechanism 13. The transportation pipeline 11 is a straight pipeline, the appearance can be round pipe or square pipe and the like, and the interior of the pipeline is hollow. The sample platform 12 has a plurality of sample placement stations, each of which can place one sample to be tested, so that a plurality of samples can be tested in batches. The platform moving mechanism 13 is arranged in the transport pipeline 11, and the moving end of the platform moving mechanism 13 is connected with the sample platform 12, so that the sample platform 12 can be driven to move in the transport pipeline 11 along the extending direction of the transport pipeline 11, samples are sequentially placed on the sample platform 12 from the inlet at one end of the transport pipeline 11, and then the sample platform 12 is transported to the scanning electron microscope device 3 for detection through the platform moving mechanism 13. The sample transfer assembly includes: transfer pipeline 21 and transfer mechanism, transfer pipeline 21 are connected with transportation pipeline 11, and transfer mechanism sets up in transfer pipeline 21, and the sample entry and the transportation pipeline 11 of scanning electron microscope device 3 are connected, and transfer mechanism is used for placing the sample that the station was placed to the sample on the sample detection platform 31 of sample entry department to detect in the convenience. Since the scanning electron microscope apparatus 3 is required to operate in a vacuum state, a vacuum pumping assembly is required to be provided, and the vacuum pumping end of the vacuum pumping assembly is connected with the transportation pipeline 11, so that the interior of the pipeline can be pumped into a vacuum state. The sample batch detection device can detect a plurality of samples each time, and can not destroy the internal vacuum state in the continuous detection process, so that the device only needs to vacuumize once, is suitable for batch detection of samples, can greatly save working time and resources, and improves working efficiency.
Specifically, as shown in fig. 3, the sample platform 12 includes: the cushion cap 121, the interval is provided with a plurality of recesses on the cushion cap 121, and the top of every recess is provided with a platform 122, and the platform 122 card is on the recess, and every platform 122 corresponds a sample and places the station, promptly can place a sample on every platform 122. In order to facilitate automatic control, in this embodiment, the grooves on the bearing platform 121 are uniformly spaced to ensure that the spacing between each sample is the same.
Of course, in other embodiments, the platform 122 and the groove may be fixed together and not detachable, since in this embodiment, the platform 122 and the groove may be integrally transferred by the transferring mechanism, which may prevent the transferring mechanism from contacting with the sample and damaging the surface layer of the sample, if the transferring mechanism is provided with a corresponding protecting device, the platform 122 and the groove may be fixed together and directly transfer the sample without damaging the surface layer during transferring the sample.
Further, as shown in fig. 4, the stage moving mechanism 13 includes: the sliding rail 131 and the sliding block 132, the sliding rail 131 is fixedly arranged on the inner wall of the transportation pipeline 11, and the extending direction of the sliding rail 131 is parallel to the extending direction of the transportation pipeline 11. The sliding block 132 is slidably disposed on the sliding rail 131, and the sample platform 12 is fixedly disposed on the sliding block 132, so that the sliding block 132 and the sample platform 12 can integrally move on the sliding rail 131.
In other embodiments, the platform moving mechanism 13 may also adopt various manners such as gear-rack transmission, worm gear transmission, and the like, so as to ensure that the sample platform 12 performs linear motion.
As shown in fig. 5, the transfer mechanism includes: the robot arm 221, the transfer duct 21 is connected to the transport duct 11, and the transfer duct 21 and the transport duct 11 are disposed vertically. The mechanical arm 221 is disposed in the transfer tube 21, and an end of the mechanical arm 221 is retractable along an extending direction of the transfer tube 21, so as to transfer the sample moving onto the sample platform 12 to the scanning electron microscope.
Specifically, the mechanical arm 221 in this embodiment is a magnetic rod mechanical arm, which is a sample transmission device that transmits power through a magnetic field without requiring actual physical contact. It consists of two magnetically coupled parts, and the sample can be transported and handled in a contactless manner in an ultra-high vacuum environment by the action of magnetic forces. The non-contact sample transferring mode can avoid the pollution or damage of the sample and improve the accuracy of sample transferring.
In other embodiments, the mechanical arm 221 may be replaced by a gripper with multiple degrees of freedom, and a guard may be added to the gripper, and then the sample may be directly grasped and then placed on a scanning electron microscope for detection.
The scanning electron microscope apparatus 3 is disposed at the opposite side of the transfer assembly, and the connection ports of the transfer pipe 21 and the transport pipe 11 are directly opposite to the sample inlet of the scanning electron microscope apparatus 3, so that the mechanical arm 221 is convenient to directly transfer the sample from the sample platform 12 to the sample detection stage 31. Fig. 6 and 7 are schematic diagrams of the sample detection stage 31 and the cooperation between the sample detection stage 31 and the mechanical arm 221.
The scanning electron microscope device 3 is an existing analysis instrument, and the principle is that a finely focused electron beam is utilized to bombard the surface of a sample to generate electronic signals such as secondary electrons, back scattered electrons and the like, meanwhile, the generated electronic signals are captured by an electronic detector, and are converted into digital image signals through analog-to-digital conversion, and finally, an image of the microscopic morphology of the surface of the sample is obtained at an output terminal of a computer.
The evacuation assembly includes: the mechanical pump is connected with the molecular pump, the molecular pump is connected with the transportation pipeline 11, and the mechanical pump is used as a front-stage pump matched with the molecular pump to pump the inside of the device into a vacuum state under the combined action so as to ensure that the scanning electron microscope device 3 can operate under the vacuum state.
Still further, the sample batch detection device further comprises a control assembly: the control assembly is electrically connected to the sample transport assembly, the sample transfer assembly, the scanning electron microscope device 3 and the evacuation assembly. The control mode is common PLC control, and the coordination and the automatic work of each component are realized under the integral coordination control of the control component. Specifically, the control component may control the movement position of the sample platform 12, the extension and retraction of the mechanical arm 221, the opening and closing of the mechanical pump and the molecular pump, and the operation of the scanning electron microscope device 3. And the touch screen can be matched with a display screen, parameters of corresponding components can be displayed on the display screen, and the performance and the control of each component can be realized through the touch screen.
The embodiment also provides a sample batch detection method, which is applied to the sample batch detection device and is used for realizing batch detection and automatic detection of samples. The sample batch detection method comprises the following specific steps:
s1: the sample platform 12 is moved to the sample inlet of the first sample placement tool at the scanning electron microscope apparatus 3;
Before this step, the vacuum pipeline valve at the end of the transport pipeline 11 is opened, the sample to be detected is placed on the corresponding position of the sample platform 12 in sequence, and then the vacuum pipeline valve is closed and the interior of the device is vacuumized through the vacuumizing assembly. And when the internal vacuum degree reaches the order of 5 multiplied by 10 -7 Torr, the vacuumizing operation can be finished.
The control assembly then controls the movement of the sample platform 12 to the sample inlet of the scanning electron microscope apparatus 3, at which point the first sample placement station of the sample platform 12 corresponds to the sample inlet position.
S2: the robot arm 221 transfers the sample to the sample detection stage 31;
the robot arm 221 extends beyond the platform 122 of the first sample placement station on the sample platform 12 and transfers the sample on the platform 122 to the sample detection stage 31 at the sample inlet.
And the robotic arm 221 will automatically reset after transferring the sample on the sample platform 12 to the sample detection stage 31 at the sample inlet.
S3: the scanning electron microscope apparatus 3 detects a sample on the sample detection stage 31;
the scanning electron microscope apparatus 3 starts full-automatic image viewing of the sample, and the sample detection stage 31 moves to the first point, starts automatic adjustment of brightness contrast, automatic astigmatism elimination, automatic focusing, and automatic photographing, to obtain a plurality of images of the first point of the sample. The sample detection stage 31 is then moved to the second, third, nth potential in sequence, each spot is automatically processed, and a sample image of the spot is obtained. And finally, collecting point location image information to form a detection result.
S4: the detected sample is replaced on the sample platform 12 through the mechanical arm 221;
After the scanning electron microscope apparatus 3 detects, the mechanical arm 221 transfers the sample from the sample detection stage 31 to the corresponding stage 122 on the sample stage 12.
S5: the sample platform 12 is moved to bring the next sample placement station to the sample inlet and the steps S2-S4 are repeated.
After the detection of one sample is completed, the sample platform 12 automatically moves forward by one station, that is, after the detection of the first sample is completed, the second sample placement station moves to the sample inlet, and then the steps S2-S4 are repeated to complete the detection of the second sample. And the like, after all the samples on the sample platform 12 are detected, the sample platform 12 moves to the vacuum pipeline valve at the end part, and the valve is opened to take out the samples.
It is apparent that the above examples are given by way of illustration only and are not limiting of the embodiments. Other variations or modifications of the above teachings will be apparent to those of ordinary skill in the art. It is not necessary here nor is it exhaustive of all embodiments. While still being apparent from variations or modifications that may be made by those skilled in the art are within the scope of the invention.
Claims (8)
1. The sample batch detection method is applied to a sample batch detection device, and is characterized in that the sample batch detection device comprises:
A sample transport assembly, the sample transport assembly comprising: the device comprises a transportation pipeline (11), a sample platform (12) and a platform moving mechanism (13), wherein the sample platform (12) is provided with a plurality of sample placing stations, the platform moving mechanism (13) is arranged in the transportation pipeline (11), the moving end of the platform moving mechanism is connected with the sample platform (12), and the platform moving mechanism (13) is suitable for driving the sample platform (12) to move in the transportation pipeline (11) along the extending direction of the transportation pipeline (11);
A sample transfer assembly, the sample transfer assembly comprising: a transfer pipe (21) and a transfer mechanism, wherein the transfer pipe (21) is connected with the transportation pipe (11), and the transfer mechanism is arranged in the transfer pipe (21);
A scanning electron microscope device (3), a sample inlet of the scanning electron microscope device (3) being connected to the transport conduit (11), the transfer mechanism being adapted to transfer a sample placed on the sample placement station onto a sample detection stage (31) at the sample inlet;
the vacuumizing assembly is connected with the conveying pipeline (11) at the air extraction end;
A control assembly electrically connected to the sample transport assembly, the sample transfer assembly, the scanning electron microscope device (3) and the evacuation assembly;
the sample batch detection method comprises the following steps:
S1, moving a sample platform (12) to a sample inlet of a first sample placement tool positioned in scanning electron microscope equipment (3);
s2, a mechanical arm (221) transfers the sample to a sample detection table (31);
s3, detecting the sample on the sample detection table (31) by the scanning electron microscope equipment (3);
S4, the detected sample is replaced to the sample platform (12) through the mechanical arm (221);
and S5, moving the sample platform (12) to enable the next sample placing station to be at the sample inlet, and repeating the steps S2-S4.
2. The sample batch detection method of claim 1, wherein the sample platform (12) comprises: the device comprises a bearing platform (121), wherein a plurality of grooves are formed in the bearing platform (121) at intervals, a platform (122) is arranged at the top end of each groove, and each platform (122) corresponds to one sample placing station.
3. The sample lot inspection method according to claim 1, wherein the stage moving mechanism (13) includes: slide rail (131) and slider (132), slide rail (131) fixed set up in transportation pipeline (11) inner wall, slider (132) slip set up in on slide rail (131), sample platform (12) fixed set up in on slider (132).
4. The method of batch sample testing according to claim 1, wherein the transfer mechanism comprises: and a mechanical arm (221), wherein the mechanical arm (221) is arranged in the transfer pipeline (21).
5. The method according to claim 4, wherein the transfer pipe (21) and the transport pipe (11) are vertically arranged, and the end of the robot arm (221) is retractable along the extending direction of the transfer pipe (21).
6. The batch detection method of samples according to claim 5, wherein the scanning electron microscope apparatus (3) is disposed on the opposite side of the transfer assembly, and the connection ports of the transfer pipe (21) and the transport pipe (11) are directly opposite to the sample inlet of the scanning electron microscope apparatus (3).
7. The method of claim 1, wherein the vacuum assembly comprises: a mechanical pump and a molecular pump, the mechanical pump being connected to the molecular pump, the molecular pump being connected to the transport pipe (11).
8. The method for batch detection of samples according to claim 1, wherein the step of evacuating the interior of the apparatus is further comprised before the step of moving S1 the sample stage (12) to the sample inlet of the first sample placement tool in the scanning electron microscope apparatus (3).
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| CN108068118A (en) * | 2016-11-14 | 2018-05-25 | 中国科学院苏州纳米技术与纳米仿生研究所 | A kind of sample conveyance system applied to vacuum interacted system |
| CN107860783A (en) * | 2017-10-23 | 2018-03-30 | 中国科学院化学研究所 | XPS sampling devices |
| CN216595165U (en) * | 2021-09-13 | 2022-05-24 | 费勉仪器科技（上海）有限公司 | Vacuum sample transfer device and vacuum system |
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