CN117921176A - A method for welding thick microcrystalline glass to metal based on ultrafast laser - Google Patents
A method for welding thick microcrystalline glass to metal based on ultrafast laser Download PDFInfo
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- CN117921176A CN117921176A CN202410243198.XA CN202410243198A CN117921176A CN 117921176 A CN117921176 A CN 117921176A CN 202410243198 A CN202410243198 A CN 202410243198A CN 117921176 A CN117921176 A CN 117921176A
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/20—Bonding
- B23K26/21—Bonding by welding
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/0006—Working by laser beam, e.g. welding, cutting or boring taking account of the properties of the material involved
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/04—Automatically aligning, aiming or focusing the laser beam, e.g. using the back-scattered light
- B23K26/046—Automatically focusing the laser beam
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/08—Devices involving relative movement between laser beam and workpiece
- B23K26/082—Scanning systems, i.e. devices involving movement of the laser beam relative to the laser head
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/60—Preliminary treatment
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Abstract
Description
技术领域Technical Field
本发明属于激光焊接技术领域,具体涉及一种基于超快激光的大厚度微晶玻璃与金属的焊接方法。The invention belongs to the technical field of laser welding, and in particular relates to a method for welding thick microcrystalline glass and metal based on ultrafast laser.
背景技术Background technique
玻璃具有良好的物理和化学特性,如透光率高、机械强度高、耐腐蚀和耐摩擦,是高端光学系统、天文学和卫星、机器视觉和生命科学领域的绝佳材料。然而,玻璃的脆性和低抗冲击性导致其机械性能较差,严重限制了其在实际工程中的应用。将具有良好弹塑性和高抗冲击性的金属和玻璃连接在一起,可以大大提高其整体的机械性能。因此,玻璃-金属连接技术在微机电系统、医疗植入体、光学传感器等领域的应用越来越广泛。Glass has good physical and chemical properties, such as high light transmittance, high mechanical strength, corrosion resistance and friction resistance. It is an excellent material for high-end optical systems, astronomy and satellites, machine vision and life sciences. However, the brittleness and low impact resistance of glass lead to its poor mechanical properties, which seriously limits its application in practical engineering. Joining metals with good elastic-plasticity and high impact resistance with glass can greatly improve their overall mechanical properties. Therefore, glass-metal joining technology is increasingly used in micro-electromechanical systems, medical implants, optical sensors and other fields.
目前,连接玻璃和金属的方法有很多种。胶粘剂粘接和活性钎焊引入了额外的填充物,可以满足有间隙连接的要求。但粘合剂容易变形,难以应对高温、潮湿和腐蚀等复杂的工作环境。活性钎焊通常需要在真空炉中进行高温加热(通常在700℃以上),这大大限制了其应用场景。匹配封接和阳极键合等连接方法是以塑性变形或固态原子扩散的形式实现玻璃与金属的连接,适用于变形量较小的连接场合。但其主要缺点是材料组合需要具有相似的热膨胀系数,且连接强度较低。传统的激光熔焊是通过局部加热金属材料使玻璃和金属材料熔合形成接头,但是在焊接过程中容易对基体造成热损伤并产生裂纹。而超快激光具有热效应小、加工精度高等优点,可以有效避免长脉宽激光加工过程存在的热损伤、热应力的累积以及缺陷等问题,已可以实现各种玻璃和金属的连接。At present, there are many ways to connect glass and metal. Adhesive bonding and active brazing introduce additional fillers to meet the requirements of gap connection. However, adhesives are easy to deform and difficult to cope with complex working environments such as high temperature, humidity and corrosion. Active brazing usually requires high-temperature heating in a vacuum furnace (usually above 700°C), which greatly limits its application scenarios. Connection methods such as matching sealing and anodic bonding realize the connection between glass and metal in the form of plastic deformation or solid atomic diffusion, which is suitable for connection occasions with small deformation. However, its main disadvantage is that the material combination needs to have similar thermal expansion coefficients and the connection strength is low. Traditional laser melting welding is to fuse glass and metal materials to form a joint by locally heating the metal material, but it is easy to cause thermal damage to the substrate and produce cracks during the welding process. Ultrafast lasers have the advantages of small thermal effect and high processing accuracy. They can effectively avoid the problems of thermal damage, accumulation of thermal stress and defects in the long pulse width laser processing process, and can realize the connection of various glass and metal.
超快激光具有极窄的脉宽和极高的峰值功率,能够诱发玻璃材料的多光子电离和雪崩电离等过程,实现玻璃对激光能量的有效吸收,通过高重频超快激光的热累积效应,玻璃和金属同时发生熔化从而实现有效连接。超快激光焊接玻璃和金属具有三大优势:1.应用范围广,可以适用于各种玻璃和金属的连接;2.热影响区小,局部精确加热,不会改变焊缝以外材料的性质;3.焊接效率高,无需长时间加热及保温。Ultrafast lasers have extremely narrow pulse widths and extremely high peak powers, which can induce multi-photon ionization and avalanche ionization of glass materials, and achieve effective absorption of laser energy by glass. Through the thermal accumulation effect of high-repetition-rate ultrafast lasers, glass and metal melt simultaneously to achieve effective connection. Ultrafast laser welding of glass and metal has three major advantages: 1. Wide range of applications, applicable to the connection of various glass and metals; 2. Small heat-affected zone, local precise heating, will not change the properties of materials outside the weld; 3. High welding efficiency, no need for long-term heating and heat preservation.
零膨胀系数微晶玻璃是指以L iO2、A l2O3、S iO2为主要成分的玻璃,经过严格的受控晶化处理后形成的以负膨胀β-石英固溶体纳米晶相和正膨胀玻璃相构成的一种复合材料,具有优异的光学、热学、力学性能,是目前变温环境尺寸稳定性最好的材料,在航空、航天、电子、兵器、船舶、精密机械等诸多领域得到广泛应用。零膨胀系数微晶玻璃的平均热膨胀系数通常为0±1×10-7/K,最先进的微晶玻璃的平均热膨胀系数可以做到0±0.07×10-7/K。而大多数金属的热膨胀系数通常比微晶玻璃高两个数量级以上,如304不锈钢的热膨胀系数为1.8×10-5/K。巨大的热膨胀系数差异导致微晶玻璃与金属的焊接过程会产生极大的应力,使得玻璃极易产生微裂纹甚至发生整体碎裂,因而对焊接过程中的热输入及热变形提出了严苛的要求。Zero expansion coefficient microcrystalline glass refers to a glass with LiO 2 , Al 2 O 3 , and SiO 2 as the main components. After strict controlled crystallization treatment, it forms a composite material composed of negative expansion β-quartz solid solution nanocrystalline phase and positive expansion glass phase. It has excellent optical, thermal, and mechanical properties. It is currently the material with the best dimensional stability in variable temperature environments and is widely used in many fields such as aviation, aerospace, electronics, weapons, ships, and precision machinery. The average thermal expansion coefficient of zero expansion coefficient microcrystalline glass is usually 0±1×10 -7 /K, and the average thermal expansion coefficient of the most advanced microcrystalline glass can be 0±0.07×10 -7 /K. The thermal expansion coefficient of most metals is usually more than two orders of magnitude higher than that of microcrystalline glass, such as the thermal expansion coefficient of 304 stainless steel is 1.8×10 -5 /K. The huge difference in thermal expansion coefficients causes great stress in the welding process of microcrystalline glass and metal, making the glass very easy to produce microcracks or even overall shattering, thus placing strict requirements on heat input and thermal deformation during welding.
对于大厚度(≥70mm)微晶玻璃来讲,玻璃的高度大幅增加使得短焦距的超快激光在加工时会出现干涉,因此对激光的输入方式提出了更高的要求。同时由于玻璃厚度的增加也导致玻璃对激光的吸收率大大提高,使得激光能量更容易被玻璃基体吸收而无法到达玻璃-金属界面,这也严重限制了超快激光焊接的参数选择。For thick (≥70mm) glass-ceramics, the height of the glass increases significantly, which causes interference with the short-focal-length ultrafast laser during processing, thus placing higher requirements on the laser input method. At the same time, the increase in glass thickness also greatly increases the glass's absorption rate of the laser, making the laser energy more easily absorbed by the glass matrix and unable to reach the glass-metal interface, which also severely limits the parameter selection of ultrafast laser welding.
为了解决大厚度零膨胀系数微晶玻璃与金属焊接场景中热膨胀系数差异大以及玻璃厚度大而带来的焊接应力控制及焊接工艺选择等难题,亟需一种简单可靠且通用性较强的焊接方法。In order to solve the problems of welding stress control and welding process selection caused by the large difference in thermal expansion coefficient and the large thickness of glass in the welding scenario of thick zero-expansion coefficient microcrystalline glass and metal, a simple, reliable and versatile welding method is urgently needed.
发明内容Summary of the invention
本发明的目的在于提供一种基于超快激光的大厚度微晶玻璃与金属的焊接方法,以解决热膨胀系数相差超过两个数量级的微晶玻璃与金属在焊接过程中热应力较大,难以可靠连接的问题。The purpose of the present invention is to provide a method for welding thick microcrystalline glass to metal based on ultrafast laser, so as to solve the problem that microcrystalline glass and metal with thermal expansion coefficients different by more than two orders of magnitude have large thermal stress during welding and are difficult to connect reliably.
本发明的目的可以通过以下技术方案实现:The purpose of the present invention can be achieved through the following technical solutions:
一种基于超快激光的大厚度微晶玻璃与金属的焊接方法,包括以下步骤:A method for welding thick microcrystalline glass to metal based on ultrafast laser, comprising the following steps:
S1材料准备:将待焊接的微晶玻璃和金属进行清洗,烘干,去除表面油污;S1 Material preparation: Clean and dry the glass-ceramics and metal to be welded to remove surface oil stains;
S2待焊接材料放置:将待焊接的金属平放于加工平台上,并将待焊接的微晶玻璃放置于金属上;S2: Placing the materials to be welded: placing the metal to be welded flat on the processing platform, and placing the glass-ceramics to be welded on the metal;
S3激光对焦:调整加工平台水平位置,使得激光光斑位于微晶玻璃与金属的中心;调整加工平台高度,使得激光透过大厚度微晶玻璃的几何焦点位于微晶玻璃与金属界面;S3 laser focus: adjust the horizontal position of the processing platform so that the laser spot is located at the center of the micro-ceramic glass and the metal; adjust the height of the processing platform so that the geometric focus of the laser penetrating the thick micro-ceramic glass is located at the interface between the micro-ceramic glass and the metal;
S4超快激光焊接:先在待焊接样件中心区域进行多次激光预扫描,使得金属颗粒喷溅在玻璃下表面;所述预扫描激光的脉冲能量低于玻璃的去除阈值;S4 ultrafast laser welding: First, multiple laser pre-scans are performed in the central area of the sample to be welded, so that metal particles are splashed on the lower surface of the glass; the pulse energy of the pre-scanning laser is lower than the removal threshold of the glass;
再在待焊接样件中心区域进行多次激光焊接扫描,使得玻璃与金属均发生有效熔化和混合,实现玻璃与金属的可靠连接;所述焊接扫描激光的脉冲能量高于预扫描激光的脉冲能量。Then, multiple laser welding scans are performed in the central area of the sample to be welded, so that the glass and the metal are effectively melted and mixed, and a reliable connection between the glass and the metal is achieved; the pulse energy of the welding scanning laser is higher than the pulse energy of the pre-scanning laser.
作为本发明进一步的方案,所述微晶玻璃的厚度≥70mm。As a further solution of the present invention, the thickness of the microcrystalline glass is ≥70 mm.
作为本发明进一步的方案,所述S1中,对微晶玻璃和金属的清洗方式包括超声清洗、酒精清洗或丙酮溶剂清洗。As a further solution of the present invention, in S1, the cleaning methods for the microcrystalline glass and the metal include ultrasonic cleaning, alcohol cleaning or acetone solvent cleaning.
作为本发明进一步的方案,所述S2中,待焊接微晶玻璃与待焊接金属的间隙<10μm,焊接间隙将直接影响到焊接有效性及焊接强度,焊接间隙越小,焊接强度越高。As a further solution of the present invention, in S2, the gap between the microcrystalline glass to be welded and the metal to be welded is less than 10 μm. The welding gap will directly affect the welding effectiveness and welding strength. The smaller the welding gap, the higher the welding strength.
作为本发明进一步的方案,所述S3中,激光透过玻璃后会发生折射,导致激光焦点发生变化,因此对焦操作需要考虑激光折射带来的影响,具体变化数值需根据所使用玻璃的折射率进行计算。As a further solution of the present invention, in S3, the laser will be refracted after passing through the glass, causing the laser focus to change. Therefore, the focusing operation needs to consider the impact of laser refraction, and the specific change value needs to be calculated based on the refractive index of the glass used.
作为本发明进一步的方案,所述超快激光焊接的设备包括超快激光器和大焦距高速扫描振镜系统。As a further solution of the present invention, the ultrafast laser welding equipment includes an ultrafast laser and a large focal length high-speed scanning galvanometer system.
作为本发明进一步的方案,所述S4中,超快激光根据微晶玻璃和金属种类的不同,选择不同的焊接参数。As a further solution of the present invention, in S4, the ultrafast laser selects different welding parameters according to the types of the microcrystalline glass and the metal.
作为本发明进一步的方案,所述S4中,激光的扫描轨迹包括螺旋线或同心圆。As a further solution of the present invention, in S4, the scanning trajectory of the laser includes a spiral line or a concentric circle.
与现有技术相比,本发明的有益效果:Compared with the prior art, the present invention has the following beneficial effects:
1.本发明提供一种基于超快激光的大厚度微晶玻璃与金属的焊接方法,采用大焦距高速扫描振镜系统,解决了大厚度(≥70mm)微晶玻璃焊接过程中可能产生的干涉问题;采用变能量重复高速扫描的焊接工艺,能够实现微晶玻璃与金属的同时熔化,同时有效抑制焊接过程中热应力的产生,避免玻璃内部微裂纹等缺陷的生成,实现热膨胀系数相差超过两个数量级的微晶玻璃与金属的有效焊接。整个焊接过程热输入量小,加热位置集中,加工工序少,易于实现高品质、高效率的自动化焊接。1. The present invention provides a method for welding thick microcrystalline glass and metal based on ultrafast laser, adopts a large focal length high-speed scanning galvanometer system, solves the interference problem that may occur in the welding process of thick microcrystalline glass (≥70mm); adopts a welding process with variable energy and repeated high-speed scanning, can achieve simultaneous melting of microcrystalline glass and metal, effectively suppress the generation of thermal stress in the welding process, avoid the generation of defects such as microcracks inside the glass, and achieve effective welding of microcrystalline glass and metal with a difference of more than two orders of magnitude in thermal expansion coefficient. The whole welding process has a small heat input, concentrated heating positions, fewer processing steps, and is easy to achieve high-quality and efficient automated welding.
2.本发明在激光焊接过程中,首先在较低能量的预扫描超快激光脉冲的作用下,使得金属有效吸收激光能量发生烧蚀,产生大量颗粒喷溅于玻璃下表面;而微晶玻璃由于激光能量远远未达到去除阈值,所以不会通过非线性吸收效应吸收激光能量;当金属颗粒喷溅到玻璃下表面后,金属颗粒直接吸收激光能量发生剧烈升温,然后通过热传导的方式将热量传递给玻璃,从而实现了玻璃去除阈值的降低;其次,在较高能量的焊接扫描超快激光脉冲的作用下,玻璃发生多光子电离和雪崩电离等过程,产生了大量自由电子,实现了对激光能量的有效吸收。在高重频脉冲的热累积效应下,玻璃发生熔化,同时金属也由于直接吸收激光能量而发生熔化。熔化的玻璃与熔化的金属发生混合,激光光斑远离后冷却形成可靠的焊接接头。相较于不变能量直接焊接,可在更低的激光能量下实现玻璃与金属的熔化,降低了焊接应力与热影响。2. In the laser welding process of the present invention, firstly, under the action of the pre-scanning ultrafast laser pulse with lower energy, the metal effectively absorbs the laser energy and ablates, generating a large number of particles splashing on the lower surface of the glass; however, since the laser energy of the microcrystalline glass is far from reaching the removal threshold, it will not absorb the laser energy through the nonlinear absorption effect; when the metal particles splash onto the lower surface of the glass, the metal particles directly absorb the laser energy and heat up sharply, and then transfer the heat to the glass through heat conduction, thereby reducing the glass removal threshold; secondly, under the action of the welding scanning ultrafast laser pulse with higher energy, the glass undergoes multi-photon ionization and avalanche ionization processes, generating a large number of free electrons, and achieving effective absorption of the laser energy. Under the heat accumulation effect of the high repetition rate pulse, the glass melts, and the metal also melts due to direct absorption of the laser energy. The molten glass and the molten metal are mixed, and the laser spot is cooled away to form a reliable welding joint. Compared with direct welding with constant energy, the melting of glass and metal can be achieved at a lower laser energy, reducing welding stress and thermal effects.
3.本发明有效解决了加工干涉及内部吸收等问题,适用于大厚度微晶玻璃的焊接;采用超快激光焊接的手段,能够进行局部精确加热,减小非焊接部位的热影响,不影响非焊接部位的材料性能,也不影响焊接部位周围元件的正常工作;焊接过程使用超快激光作为热源,无需对材料进行预处理,工序简单,易于实现自动化。3. The present invention effectively solves the problems of processing interference and internal absorption, and is suitable for the welding of thick microcrystalline glass. It adopts ultrafast laser welding to perform local precise heating, reduce the thermal impact of non-welding parts, and does not affect the material properties of non-welding parts, nor does it affect the normal operation of components around the welding parts. The welding process uses ultrafast laser as a heat source, and there is no need to pre-treat the material. The process is simple and easy to automate.
附图说明BRIEF DESCRIPTION OF THE DRAWINGS
下面结合附图对本发明做进一步的说明。The present invention will be further described below in conjunction with the accompanying drawings.
图1是本发明基于超快激光的大厚度微晶玻璃与金属的焊接方法的示意图;FIG1 is a schematic diagram of a method for welding thick microcrystalline glass to metal based on ultrafast laser according to the present invention;
图2是本发明超快激光焊接过程中焊接步骤与脉冲能量的关系示意图;FIG2 is a schematic diagram showing the relationship between welding steps and pulse energy in the ultrafast laser welding process of the present invention;
图3是本发明实施例1焊接得到的焊接样件效果示意图;FIG3 is a schematic diagram of the welding sample effect obtained by welding in Example 1 of the present invention;
图4是本发明实施了1焊接得到的焊接样件手提测试效果图;FIG4 is a hand-held test effect diagram of a welding sample obtained by welding 1 according to the present invention;
图5是本发明对比例1焊接得到的焊接样件效果示意图;FIG5 is a schematic diagram of the welding effect of the welding sample obtained by welding in Comparative Example 1 of the present invention;
图中:1、超快激光器;2、高速扫描振镜;3、超快激光;4、微晶玻璃;5、金属。In the figure: 1. Ultrafast laser; 2. High-speed scanning galvanometer; 3. Ultrafast laser; 4. Microcrystalline glass; 5. Metal.
具体实施方式Detailed ways
下面将结合本发明实施例,对本发明实施例中的技术方案进行清楚、完整的描述,显然,所描述的实施例仅仅是本发明一部分实施例,而不是全部的实施例。基于本发明中的实施例,本领域普通技术人员在没有做出创造性劳动前提下所获得的所有其他实施例,都属于本发明保护的范围。The following will be combined with the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.
请参阅图1,一种基于超快激光的大厚度微晶玻璃与金属的焊接方法,包括以下步骤:Please refer to FIG1 , a method for welding thick microcrystalline glass to metal based on ultrafast laser, comprising the following steps:
S1材料准备:将待焊接的微晶玻璃(厚度≥70mm)和金属进行清洗,烘干,去除表面油污;S1 Material preparation: Clean and dry the glass-ceramics (thickness ≥ 70 mm) and metal to be welded to remove surface oil stains;
S2待焊接材料放置:将待焊接的金属平放于加工平台上,并将待焊接的微晶玻璃放置于金属上,所述待焊接微晶玻璃与待焊接金属的间隙<10μm;S2: Placing the materials to be welded: placing the metal to be welded flat on the processing platform, and placing the glass-ceramics to be welded on the metal, wherein the gap between the glass-ceramics to be welded and the metal to be welded is less than 10 μm;
S3激光对焦:调整加工平台水平位置,使得激光光斑位于微晶玻璃与金属的中心;调整加工平台高度,使得激光透过大厚度微晶玻璃的几何焦点位于微晶玻璃与金属界面;S3 laser focus: adjust the horizontal position of the processing platform so that the laser spot is located at the center of the micro-ceramic glass and the metal; adjust the height of the processing platform so that the geometric focus of the laser penetrating the thick micro-ceramic glass is located at the interface between the micro-ceramic glass and the metal;
S4超快激光焊接:请参阅图2,先在待焊接样件中心区域进行多次激光预扫描,使得金属颗粒喷溅在玻璃下表面;所述预扫描激光的脉冲能量低于玻璃的去除阈值;S4 ultrafast laser welding: Please refer to Figure 2. First, perform multiple laser pre-scans in the central area of the sample to be welded, so that metal particles are splashed on the lower surface of the glass; the pulse energy of the pre-scan laser is lower than the removal threshold of the glass;
再在待焊接样件中心区域进行多次激光焊接扫描,使得玻璃与金属均发生有效熔化和混合,实现玻璃与金属的可靠连接;所述焊接扫描激光的脉冲能量高于预扫描激光的脉冲能量。Then, multiple laser welding scans are performed in the central area of the sample to be welded, so that the glass and the metal are effectively melted and mixed, and a reliable connection between the glass and the metal is achieved; the pulse energy of the welding scanning laser is higher than the pulse energy of the pre-scanning laser.
在一个具体的实施案例中,所述S1中,对微晶玻璃和金属的清洗方式包括超声清洗、酒精清洗或丙酮溶剂清洗。In a specific implementation case, in S1, the cleaning method of the microcrystalline glass and the metal includes ultrasonic cleaning, alcohol cleaning or acetone solvent cleaning.
在一个具体的实施案例中,所述S3中,激光透过玻璃后会发生折射,导致激光焦点发生变化,因此对焦操作需要考虑激光折射带来的影响,具体变化数值需根据所使用玻璃的折射率进行计算。In a specific implementation case, in S3, the laser will be refracted after passing through the glass, causing the laser focus to change. Therefore, the focusing operation needs to consider the impact of laser refraction, and the specific change value needs to be calculated based on the refractive index of the glass used.
在一个具体的实施案例中,所述超快激光焊接的设备包括超快激光器和大焦距高速扫描振镜系统。In a specific implementation case, the ultrafast laser welding equipment includes an ultrafast laser and a large focal length high-speed scanning galvanometer system.
在一个具体的实施案例中,所述S4中,超快激光根据微晶玻璃和金属种类的不同,选择不同的焊接参数。In a specific implementation case, in S4, the ultrafast laser selects different welding parameters according to the types of microcrystalline glass and metal.
在一个具体的实施案例中,所述S4中,激光的扫描轨迹包括螺旋线或同心圆。In a specific implementation case, in S4, the scanning trajectory of the laser includes a spiral line or concentric circles.
实施例1Example 1
请参阅图1,一种基于超快激光的大厚度微晶玻璃与金属的焊接方法,对1mm厚304不锈钢片(热膨胀系数1.8×10-5/K)与70mm厚零膨胀系数微晶玻璃(热膨胀系数0±1×10-7/K)进行焊接,主要焊接设备包括超快激光器(波长1030nm,脉冲宽度8ps)、大焦距高速扫描振镜系统(焦距100mm);包括以下步骤:Please refer to FIG1 , a method for welding thick microcrystalline glass and metal based on ultrafast laser, wherein a 1 mm thick 304 stainless steel sheet (thermal expansion coefficient 1.8×10 -5 /K) and a 70 mm thick zero expansion coefficient microcrystalline glass (thermal expansion coefficient 0±1×10 -7 /K) are welded, and the main welding equipment includes an ultrafast laser (wavelength 1030 nm, pulse width 8 ps), a large focal length high-speed scanning galvanometer system (focal length 100 mm); the method includes the following steps:
S1材料准备:将待焊接的微晶玻璃和不锈钢片进行酒精清洗,烘干,去除表面油污;S1 Material preparation: Clean the glass-ceramic and stainless steel sheets to be welded with alcohol, dry them, and remove surface oil stains;
S2待焊接材料放置:将待焊接的不锈钢片平放于加工平台上,并将待焊接的微晶玻璃放置于不锈钢片上,二者间隙为8±0.5μm;S2 Placement of materials to be welded: Place the stainless steel sheet to be welded flat on the processing platform, and place the microcrystalline glass to be welded on the stainless steel sheet, with a gap of 8±0.5μm between the two;
S3激光对焦:调整加工平台水平位置,使得激光光斑位于微晶玻璃与不锈钢片的中心;调整加工平台高度,使得激光透过大厚度微晶玻璃的几何焦点位于微晶玻璃与不锈钢片界面;S3 laser focus: adjust the horizontal position of the processing platform so that the laser spot is located at the center of the micro-ceramic glass and the stainless steel sheet; adjust the height of the processing platform so that the geometric focus of the laser penetrating the thick micro-ceramic glass is located at the interface between the micro-ceramic glass and the stainless steel sheet;
S4超快激光焊接:请参阅图2,先在待焊接样件中心区域进行多次螺旋线路径预扫描,使得不锈钢片的金属颗粒喷溅在微晶玻璃下表面;螺旋线直径2mm,线间距10μm,扫描速度1000mm/s,重复扫描次数5次;预扫描激光参数:单脉冲能量2.5μJ,脉冲重复频率400kHz;S4 ultrafast laser welding: Please refer to Figure 2. First, perform multiple spiral path pre-scans in the central area of the sample to be welded, so that the metal particles of the stainless steel sheet are splashed on the lower surface of the microcrystalline glass; the spiral diameter is 2mm, the line spacing is 10μm, the scanning speed is 1000mm/s, and the number of repeated scans is 5 times; pre-scan laser parameters: single pulse energy 2.5μJ, pulse repetition frequency 400kHz;
再在待焊接样件中心区域进行多次螺旋线路径焊接扫描,使得微晶玻璃与不锈钢片均发生有效熔化和混合,实现玻璃与不锈钢片的可靠连接;螺旋线直径2mm,线间距10μm,扫描速度1000mm/s,重复扫描次数5次;焊接扫描激光参数:单脉冲能量18.75μJ,脉冲重复频率400kHz。Then, multiple spiral path welding scans are performed in the central area of the sample to be welded, so that the microcrystalline glass and the stainless steel sheet are effectively melted and mixed, and a reliable connection between the glass and the stainless steel sheet is achieved; the spiral wire diameter is 2mm, the line spacing is 10μm, the scanning speed is 1000mm/s, and the scanning is repeated 5 times; the welding scanning laser parameters are: single pulse energy 18.75μJ, pulse repetition frequency 400kHz.
焊接得到的焊接样件效果图如图3所示,手提微晶玻璃检测微晶玻璃是否与不锈钢片有效焊接,如图4所示,由图可看出,微晶玻璃与不锈钢片实现有效焊接,焊接样件的剪切强度达到14.75MPa。The effect diagram of the welded sample obtained by welding is shown in Figure 3. The handheld microcrystalline glass is used to detect whether the microcrystalline glass is effectively welded to the stainless steel sheet, as shown in Figure 4. It can be seen from the figure that the microcrystalline glass and the stainless steel sheet are effectively welded, and the shear strength of the welded sample reaches 14.75MPa.
对比例1Comparative Example 1
对1mm厚304不锈钢片(热膨胀系数1.8×10-5/K)与70mm厚零膨胀系数微晶玻璃(热膨胀系数0±1×10-7/K)进行焊接,主要焊接设备包括超快激光器(波长1030nm,脉冲宽度8ps)、大焦距高速扫描振镜系统(焦距100mm);包括以下步骤:A 1mm thick 304 stainless steel sheet (thermal expansion coefficient 1.8×10 -5 /K) and a 70mm thick zero expansion coefficient glass-ceramic sheet (thermal expansion coefficient 0±1×10 -7 /K) were welded. The main welding equipment included an ultrafast laser (wavelength 1030nm, pulse width 8ps) and a large focal length high-speed scanning galvanometer system (focal length 100mm); the following steps were included:
S1材料准备:将待焊接的微晶玻璃和不锈钢片进行酒精清洗,烘干,去除表面油污;S1 Material preparation: Clean the glass-ceramic and stainless steel sheets to be welded with alcohol, dry them, and remove surface oil stains;
S2待焊接材料放置:将待焊接的不锈钢片平放于加工平台上,并将待焊接的微晶玻璃放置于不锈钢片上,二者间隙为8±0.5μm;S2 Placement of materials to be welded: Place the stainless steel sheet to be welded flat on the processing platform, and place the microcrystalline glass to be welded on the stainless steel sheet, with a gap of 8±0.5μm between the two;
S3激光对焦:调整加工平台水平位置,使得激光光斑位于微晶玻璃与不锈钢片的中心;调整加工平台高度,使得激光透过大厚度微晶玻璃的几何焦点位于微晶玻璃与不锈钢片界面;S3 laser focus: adjust the horizontal position of the processing platform so that the laser spot is located at the center of the micro-ceramic glass and the stainless steel sheet; adjust the height of the processing platform so that the geometric focus of the laser penetrating the thick micro-ceramic glass is located at the interface between the micro-ceramic glass and the stainless steel sheet;
S4超快激光焊接:在待焊接样件中心区域进行多次螺旋线路径焊接扫描,螺旋线直径2mm,线间距10μm,扫描速度1000mm/s,重复扫描次数5次;焊接扫描激光参数:单脉冲能量18.75μJ,脉冲重复频率400kHz。S4 ultrafast laser welding: multiple spiral path welding scans are performed in the central area of the sample to be welded, with a spiral diameter of 2mm, a line spacing of 10μm, a scanning speed of 1000mm/s, and repeated scanning times of 5 times; welding scanning laser parameters: single pulse energy 18.75μJ, pulse repetition frequency 400kHz.
焊接得到的焊接样件效果图如图4所示,由于使用单一能量进行焊接,未能实现大厚度微晶玻璃与不锈钢片的有效连接。The welding sample effect diagram obtained by welding is shown in Figure 4. Due to the use of single energy for welding, effective connection between thick microcrystalline glass and stainless steel sheet cannot be achieved.
需要说明的是,在本文中,诸如第一和第二等之类的关系术语仅仅用来将一个实体或者操作与另一个实体或操作区分开来,而不一定要求或者暗示这些实体或操作之间存在任何这种实际的关系或者顺序。而且,术语“包括”“包含”或者其任何其他变体意在涵盖非排他性的包含,从而使得包括一系列要素的过程、方法、物品或者设备不仅包括那些要素,而且还包括没有明确列出的其他要素,或者是还包括为这种过程、方法、物品或者设备所固有的要素。It should be noted that, in this article, relational terms such as first and second, etc. are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Moreover, the terms "include", "comprises" or any other variations thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or device.
尽管已经示出和描述了本发明的实施例,对于本领域的普通技术人员而言,可以理解在不脱离本发明的原理和精神的情况下可以对这些实施例进行多种变化、修改、替换和变型,本发明的范围由所附权利要求及其等同物限定。Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.
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CN118926643A (en) * | 2024-10-14 | 2024-11-12 | 浙江工业大学 | Laser brazing method for glass and metal and aircraft optical window |
Citations (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0262699A1 (en) * | 1986-08-18 | 1988-04-06 | Koninklijke Philips Electronics N.V. | Interconnecting a glass or ceramic element and a metal element |
JP2017164986A (en) * | 2016-03-16 | 2017-09-21 | 富士電機株式会社 | Laser joining method |
CN108609841A (en) * | 2018-04-10 | 2018-10-02 | 华中科技大学 | A kind of welding method suitable for glass |
CN111842892A (en) * | 2020-07-03 | 2020-10-30 | 华南理工大学 | In-situ energy-controlled selective laser melting device and method |
CN112846499A (en) * | 2020-12-29 | 2021-05-28 | 武汉华工激光工程有限责任公司 | Ultrafast laser welding method and system for glass and metal packaging |
CN113369689A (en) * | 2021-06-30 | 2021-09-10 | 哈尔滨工业大学(威海) | Mold for laser brazing of vibrating mirror of sensor socket and tail end lead and connecting method |
CN114160975A (en) * | 2021-12-30 | 2022-03-11 | 中南大学 | Large-format high-intensity laser welding method and equipment for dissimilar materials |
CN116890168A (en) * | 2023-08-28 | 2023-10-17 | 中国航空制造技术研究院 | Method and apparatus for welding transparent material and metal material |
CN116944675A (en) * | 2023-08-28 | 2023-10-27 | 中国航空制造技术研究院 | Ultrafast laser welding method for transparent material and metal material |
-
2024
- 2024-03-04 CN CN202410243198.XA patent/CN117921176B/en active Active
Patent Citations (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0262699A1 (en) * | 1986-08-18 | 1988-04-06 | Koninklijke Philips Electronics N.V. | Interconnecting a glass or ceramic element and a metal element |
JP2017164986A (en) * | 2016-03-16 | 2017-09-21 | 富士電機株式会社 | Laser joining method |
CN108609841A (en) * | 2018-04-10 | 2018-10-02 | 华中科技大学 | A kind of welding method suitable for glass |
CN111842892A (en) * | 2020-07-03 | 2020-10-30 | 华南理工大学 | In-situ energy-controlled selective laser melting device and method |
CN112846499A (en) * | 2020-12-29 | 2021-05-28 | 武汉华工激光工程有限责任公司 | Ultrafast laser welding method and system for glass and metal packaging |
CN113369689A (en) * | 2021-06-30 | 2021-09-10 | 哈尔滨工业大学(威海) | Mold for laser brazing of vibrating mirror of sensor socket and tail end lead and connecting method |
CN114160975A (en) * | 2021-12-30 | 2022-03-11 | 中南大学 | Large-format high-intensity laser welding method and equipment for dissimilar materials |
CN116890168A (en) * | 2023-08-28 | 2023-10-17 | 中国航空制造技术研究院 | Method and apparatus for welding transparent material and metal material |
CN116944675A (en) * | 2023-08-28 | 2023-10-27 | 中国航空制造技术研究院 | Ultrafast laser welding method for transparent material and metal material |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN118926643A (en) * | 2024-10-14 | 2024-11-12 | 浙江工业大学 | Laser brazing method for glass and metal and aircraft optical window |
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