CN117855165A - Low-thermal-resistance double-sided metal heat dissipation TO247 structure and preparation method thereof - Google Patents
Low-thermal-resistance double-sided metal heat dissipation TO247 structure and preparation method thereof Download PDFInfo
- Publication number
- CN117855165A CN117855165A CN202410262936.5A CN202410262936A CN117855165A CN 117855165 A CN117855165 A CN 117855165A CN 202410262936 A CN202410262936 A CN 202410262936A CN 117855165 A CN117855165 A CN 117855165A
- Authority
- CN
- China
- Prior art keywords
- metal
- chip
- adhesive
- copper clip
- metal block
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000002184 metal Substances 0.000 title claims abstract description 259
- 229910052751 metal Inorganic materials 0.000 title claims abstract description 259
- 230000017525 heat dissipation Effects 0.000 title claims abstract description 44
- 238000002360 preparation method Methods 0.000 title abstract description 8
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims abstract description 102
- 229910052802 copper Inorganic materials 0.000 claims abstract description 102
- 239000010949 copper Substances 0.000 claims abstract description 102
- 239000000853 adhesive Substances 0.000 claims description 105
- 230000001070 adhesive effect Effects 0.000 claims description 105
- 238000000034 method Methods 0.000 claims description 26
- 238000005538 encapsulation Methods 0.000 claims description 10
- 239000007769 metal material Substances 0.000 claims description 9
- 239000011265 semifinished product Substances 0.000 claims description 8
- 238000005520 cutting process Methods 0.000 claims description 4
- 238000000465 moulding Methods 0.000 claims description 4
- 238000012546 transfer Methods 0.000 abstract description 19
- 238000004806 packaging method and process Methods 0.000 abstract description 8
- 238000012536 packaging technology Methods 0.000 abstract description 2
- 239000003292 glue Substances 0.000 description 33
- 239000011248 coating agent Substances 0.000 description 25
- 238000000576 coating method Methods 0.000 description 25
- 230000009286 beneficial effect Effects 0.000 description 10
- 238000007789 sealing Methods 0.000 description 6
- 238000011161 development Methods 0.000 description 5
- 230000000694 effects Effects 0.000 description 4
- 239000000047 product Substances 0.000 description 4
- 238000004026 adhesive bonding Methods 0.000 description 3
- 238000013461 design Methods 0.000 description 3
- 230000001965 increasing effect Effects 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- 239000011324 bead Substances 0.000 description 2
- 230000002708 enhancing effect Effects 0.000 description 2
- 239000002699 waste material Substances 0.000 description 2
- 101000827703 Homo sapiens Polyphosphoinositide phosphatase Proteins 0.000 description 1
- 102100023591 Polyphosphoinositide phosphatase Human genes 0.000 description 1
- 101100012902 Saccharomyces cerevisiae (strain ATCC 204508 / S288c) FIG2 gene Proteins 0.000 description 1
- 238000013475 authorization Methods 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 230000008094 contradictory effect Effects 0.000 description 1
- 238000006731 degradation reaction Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 238000005265 energy consumption Methods 0.000 description 1
- 238000001125 extrusion Methods 0.000 description 1
- 238000005242 forging Methods 0.000 description 1
- 238000000227 grinding Methods 0.000 description 1
- 230000020169 heat generation Effects 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000013021 overheating Methods 0.000 description 1
- 239000005022 packaging material Substances 0.000 description 1
- 238000005303 weighing Methods 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
- H01L23/36—Selection of materials, or shaping, to facilitate cooling or heating, e.g. heatsinks
- H01L23/367—Cooling facilitated by shape of device
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/50—Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the groups H01L21/18 - H01L21/326 or H10D48/04 - H10D48/07 e.g. sealing of a cap to a base of a container
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/50—Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the groups H01L21/18 - H01L21/326 or H10D48/04 - H10D48/07 e.g. sealing of a cap to a base of a container
- H01L21/56—Encapsulations, e.g. encapsulation layers, coatings
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
- H01L23/36—Selection of materials, or shaping, to facilitate cooling or heating, e.g. heatsinks
- H01L23/373—Cooling facilitated by selection of materials for the device or materials for thermal expansion adaptation, e.g. carbon
- H01L23/3736—Metallic materials
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Materials Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)
Abstract
本发明提供了低热阻的双面金属散热TO247结构及制备方法,涉及芯片封装技术领域,包括金属框架、芯片、导热组件及塑封体,金属框架包括载片台及多个引脚,载片台表面设置芯片,载片台远离芯片一侧设置为第一金属外露面,导热组件包括金属块及铜夹,金属块设置在芯片远离金属框架一侧,金属块远离芯片一侧设置铜夹,塑封体将芯片、载片台、金属块及铜夹包裹,铜夹远离金属块一侧设置为第二金属外露面。本发明中,芯片产生的热量能够通过金属块传递至铜夹,并由铜夹的第二金属外露面将热量导出,铜夹的第二金属外露面与第一金属外露面共同散热,从而减小了TO247结构的封装热阻,提高了热量传递效率。
The present invention provides a low thermal resistance double-sided metal heat dissipation TO247 structure and a preparation method, which relates to the field of chip packaging technology, including a metal frame, a chip, a heat-conducting component and a plastic package, the metal frame includes a wafer stage and a plurality of pins, the chip is arranged on the surface of the wafer stage, and the side of the wafer stage away from the chip is arranged as a first metal exposed surface, the heat-conducting component includes a metal block and a copper clip, the metal block is arranged on the side of the chip away from the metal frame, and the copper clip is arranged on the side of the metal block away from the chip, the plastic package wraps the chip, the wafer stage, the metal block and the copper clip, and the side of the copper clip away from the metal block is arranged as a second metal exposed surface. In the present invention, the heat generated by the chip can be transferred to the copper clip through the metal block, and the heat is extracted by the second metal exposed surface of the copper clip, and the second metal exposed surface of the copper clip and the first metal exposed surface jointly dissipate heat, thereby reducing the packaging thermal resistance of the TO247 structure and improving the heat transfer efficiency.
Description
技术领域Technical Field
本发明涉及芯片封装技术领域,特别涉及低热阻的双面金属散热TO247结构及制备方法。The invention relates to the technical field of chip packaging, and in particular to a low thermal resistance double-sided metal heat dissipation TO247 structure and a preparation method thereof.
背景技术Background technique
TO247封装是是一种可靠、稳定、高效的电子元件封装形式,广泛应用于各种大功率电子设备中。TO247 package is a reliable, stable and efficient electronic component packaging form, which is widely used in various high-power electronic equipment.
如授权公告号为“CN220041865U”的公开了申请公开了一种TO247封装引线框架,包括由多个引线框架单元组成的引线框架,引线框架单元包括基岛和框架体,基岛的下部连接有漏极引脚,漏极引脚的两侧分别通过连筋连接源极引脚和栅极引脚,且框架体于一体结构固定漏极引脚、源极引脚和栅极引脚,漏极引脚与基岛的连接部位嵌装有磁珠。磁珠通过漏极引脚接地导通作用,提供一个磁场,在受到外部电磁干扰时,可以减少受到的电磁干扰影响,解决了现有技术中TO247封装引线框架无法提升封装结构抗电磁干扰能力的问题。For example, the application disclosed in the authorization announcement number "CN220041865U" discloses a TO247 package lead frame, including a lead frame composed of multiple lead frame units, the lead frame unit includes a base island and a frame body, the lower part of the base island is connected with a drain pin, the two sides of the drain pin are connected to the source pin and the gate pin respectively through connecting ribs, and the frame body is an integrated structure to fix the drain pin, source pin and gate pin, and the connection part between the drain pin and the base island is embedded with a magnetic bead. The magnetic bead provides a magnetic field through the grounding conduction of the drain pin, which can reduce the impact of electromagnetic interference when subjected to external electromagnetic interference, solving the problem that the TO247 package lead frame in the prior art cannot improve the anti-electromagnetic interference capability of the package structure.
但是,随着芯片的高速发展,市场对功率器件要求越来越苛刻,常规TO247的封装热阻已成市面上高性能工作温度产品发展的瓶颈。如上述TO247封装引线框架仅能通过外露的引线框架进行导热,热阻较大,热量传递效率较低。However, with the rapid development of chips, the market has increasingly stringent requirements for power devices, and the conventional TO247 package thermal resistance has become a bottleneck for the development of high-performance operating temperature products on the market. For example, the TO247 package lead frame can only conduct heat through the exposed lead frame, which has a large thermal resistance and low heat transfer efficiency.
发明内容Summary of the invention
本发明提供低热阻的双面金属散热TO247结构及制备方法,用以解决目前TO247结构仅能通过外露的引线框架进行导热,热阻较大,热量传递效率较低的技术问题。The present invention provides a low thermal resistance double-sided metal heat dissipation TO247 structure and a preparation method thereof, so as to solve the technical problem that the current TO247 structure can only conduct heat through an exposed lead frame, has a large thermal resistance and a low heat transfer efficiency.
为解决上述技术问题,本发明公开了低热阻的双面金属散热TO247结构,包括:金属框架、芯片、导热组件及塑封体,金属框架包括载片台及多个引脚,载片台表面设置芯片,载片台远离芯片一侧设置为第一金属外露面,导热组件包括金属块及铜夹,金属块设置在芯片远离金属框架一侧,金属块远离芯片一侧设置铜夹,塑封体将芯片、载片台、金属块、铜夹及靠近载片台的一端引脚包裹,铜夹远离金属块一侧设置为第二金属外露面,铜夹远离金属块一侧与塑封体远离金属框架一侧处于同一平面。In order to solve the above technical problems, the present invention discloses a low thermal resistance double-sided metal heat dissipation TO247 structure, comprising: a metal frame, a chip, a heat-conducting component and a plastic package body, the metal frame comprising a wafer carrier and a plurality of pins, the chip is arranged on the surface of the wafer carrier, and the side of the wafer carrier away from the chip is arranged as a first metal exposed surface, the heat-conducting component comprises a metal block and a copper clip, the metal block is arranged on the side of the chip away from the metal frame, and the copper clip is arranged on the side of the metal block away from the chip, the plastic package body wraps the chip, the wafer carrier, the metal block, the copper clip and one end of the pin close to the wafer carrier, the side of the copper clip away from the metal block is arranged as a second metal exposed surface, and the side of the copper clip away from the metal block and the side of the plastic package body away from the metal frame are in the same plane.
优选的,芯片通过铜夹连接或金属线连接方式中的至少一种连接方式与引脚电性连接。Preferably, the chip is electrically connected to the pin by at least one of a copper clip connection and a metal wire connection.
优选的,第二金属外露面与第一金属外露面的面积比最大可为1:1。Preferably, the area ratio of the second metal exposed surface to the first metal exposed surface can be 1:1 at most.
优选的,金属块与铜夹均采用导热金属材质制成。Preferably, the metal block and the copper clip are both made of heat-conducting metal material.
优选的,金属块与铜夹采用相同金属材料或不同金属材料一体成型制成。Preferably, the metal block and the copper clip are made of the same metal material or different metal materials and are integrally formed.
优选的,芯片与载片台之间通过第一粘接胶连接,芯片与金属块之间采用第二粘接胶连接,金属块与铜夹之间采用第三粘接胶连接。Preferably, the chip and the wafer carrier are connected by a first adhesive, the chip and the metal block are connected by a second adhesive, and the metal block and the copper clip are connected by a third adhesive.
本申请还提供了低热阻的双面金属散热TO247结构制备方法,用于制备上述的低热阻的双面金属散热TO247结构,包括以下步骤:The present application also provides a method for preparing a low thermal resistance double-sided metal heat dissipation TO247 structure, which is used to prepare the above-mentioned low thermal resistance double-sided metal heat dissipation TO247 structure, comprising the following steps:
步骤1:准备金属框架;Step 1: Prepare the metal frame;
步骤2:在金属框架的载片台上涂第一粘接胶,在第一粘接胶上安装芯片;Step 2: Apply a first adhesive on the wafer carrier of the metal frame, and mount the chip on the first adhesive;
步骤3:将芯片与金属框架引脚电性互连;Step 3: Electrically interconnect the chip and the metal frame pins;
步骤4:在芯片上涂第二粘接胶,在第二粘接胶上安装导热组件,导热组件包括金属块及铜夹;Step 4: Apply a second adhesive on the chip, and install a thermal conductive component on the second adhesive, the thermal conductive component including a metal block and a copper clip;
步骤5:采用塑封工艺进行塑封制得塑封体,塑封体包裹在金属块芯片、载片台、金属块、铜夹及靠近载片台的一段引脚外部;Step 5: Using a plastic encapsulation process to obtain a plastic encapsulation body, the plastic encapsulation body wraps around the metal block chip, the wafer carrier, the metal block, the copper clip and a section of the lead close to the wafer carrier;
步骤6:对塑封体远离金属框架一侧研磨,直至铜夹远离金属块一侧与塑封体远离金属框架一侧处于同一平面,制得TO247结构半成品;Step 6: Grind the side of the plastic package body away from the metal frame until the side of the copper clip away from the metal block and the side of the plastic package body away from the metal frame are in the same plane, thereby obtaining a TO247 structure semi-finished product;
步骤7:对TO247结构半成品切筋成型后制得TO247结构。Step 7: The TO247 structure is obtained by cutting and forming the semi-finished product of the TO247 structure.
优选的,在步骤3中,采用键合金属线或铜夹工艺将芯片与引脚电性连接。Preferably, in step 3, the chip is electrically connected to the pins by using a bonding metal wire or a copper clip process.
优选的,在步骤4中,先将金属块安装至第二粘接胶上,接着在金属块远离芯片一侧涂第三粘接胶,在第三粘接胶上安装铜夹。Preferably, in step 4, the metal block is first mounted on the second adhesive, and then the third adhesive is applied to the side of the metal block away from the chip, and the copper clip is mounted on the third adhesive.
优选的,在步骤4中,先将金属块与铜夹采用一体成型工艺连接,接着将带有铜夹的金属块安装在第二粘接胶上。Preferably, in step 4, the metal block and the copper clip are first connected by an integrated molding process, and then the metal block with the copper clip is installed on the second adhesive.
本发明的技术方案具有以下优点:本发明提供了低热阻的双面金属散热TO247结构及制备方法,涉及芯片封装技术领域,包括金属框架、芯片、导热组件及塑封体,金属框架包括载片台及多个引脚,载片台表面设置芯片,导热组件包括金属块及铜夹,金属块设置在芯片远离金属框架一侧,金属块远离芯片一侧设置铜夹,塑封体将芯片、载片台、金属块及铜夹包裹,铜夹远离金属块一侧设置为第二金属外露面,铜夹远离金属块一侧与塑封体远离金属框架一侧处于同一平面。本发明中,芯片产生的热量能够通过金属块传递至铜夹,并由铜夹的第二金属外露面将热量导出,铜夹的第二金属外露面与第一金属外露面共同散热,从而减小了TO247结构的封装热阻,提高了TO247结构的热量传递效率,增强了TO247结构的散热性能,从而有利于高性能工作温度产品的发展,该TO247结构为半导体电路设计提供更强而有力的硬件保障。The technical solution of the present invention has the following advantages: the present invention provides a low thermal resistance double-sided metal heat dissipation TO247 structure and a preparation method, which relates to the field of chip packaging technology, including a metal frame, a chip, a heat-conducting component and a plastic package, the metal frame includes a wafer stage and a plurality of pins, the chip is arranged on the surface of the wafer stage, the heat-conducting component includes a metal block and a copper clip, the metal block is arranged on the side of the chip away from the metal frame, the copper clip is arranged on the side of the metal block away from the chip, the plastic package wraps the chip, the wafer stage, the metal block and the copper clip, the side of the copper clip away from the metal block is arranged as a second metal exposed surface, and the side of the copper clip away from the metal block is in the same plane as the side of the plastic package away from the metal frame. In the present invention, the heat generated by the chip can be transferred to the copper clip through the metal block, and the heat is extracted by the second metal exposed surface of the copper clip, and the second metal exposed surface of the copper clip and the first metal exposed surface jointly dissipate heat, thereby reducing the packaging thermal resistance of the TO247 structure, improving the heat transfer efficiency of the TO247 structure, and enhancing the heat dissipation performance of the TO247 structure, which is conducive to the development of high-performance operating temperature products, and the TO247 structure provides a stronger and more powerful hardware guarantee for semiconductor circuit design.
本发明的其它特征和优点将在随后的说明书中阐述,并且,部分地从说明书中变得显而易见,或者通过实施本发明而了解。本发明的目的和其他优点可通过在所写的说明书以及说明书附图中所特别指出的装置来实现和获得。Other features and advantages of the present invention will be described in the following description, and partly become apparent from the description, or understood by practicing the present invention. The purpose and other advantages of the present invention can be realized and obtained by the devices particularly pointed out in the written description and the drawings of the description.
下面通过附图和实施例,对本发明的技术方案做进一步的详细描述。The technical solution of the present invention is further described in detail below through the accompanying drawings and embodiments.
附图说明BRIEF DESCRIPTION OF THE DRAWINGS
附图用来提供对本发明的进一步理解,并且构成说明书的一部分,与本发明的实施例一起用于解释本发明,并不构成对本发明的限制。在附图中:The accompanying drawings are used to provide a further understanding of the present invention and constitute a part of the specification. Together with the embodiments of the present invention, they are used to explain the present invention and do not constitute a limitation of the present invention. In the accompanying drawings:
图1为常规TO247结构内部结构主视图;Figure 1 is a front view of the internal structure of a conventional TO247 structure;
图2为常规TO247结构侧视图;Figure 2 is a side view of a conventional TO247 structure;
图3为常规TO247结构后视图;Figure 3 is a rear view of a conventional TO247 structure;
图4为图2中A处结构放大图;FIG4 is an enlarged view of the structure at point A in FIG2;
图5为本发明低热阻的双面金属散热TO247结构内部结构主视图;FIG5 is a front view of the internal structure of the double-sided metal heat dissipation TO247 structure with low thermal resistance of the present invention;
图6为本发明低热阻的双面金属散热TO247结构侧视图;FIG6 is a side view of a double-sided metal heat dissipation TO247 structure with low thermal resistance according to the present invention;
图7为本发明低热阻的双面金属散热TO247结构外部结构主视图;FIG7 is a front view of the external structure of the double-sided metal heat dissipation TO247 structure with low thermal resistance of the present invention;
图8为本发明低热阻的双面金属散热TO247结构后视图;FIG8 is a rear view of a double-sided metal heat dissipation TO247 structure with low thermal resistance according to the present invention;
图9为本发明图6中B处结构放大图;FIG9 is an enlarged view of the structure at B in FIG6 of the present invention;
图10为本发明中塑封体研磨后示意图。FIG. 10 is a schematic diagram of the plastic package body after grinding in the present invention.
图中:1、金属框架;2、芯片;3、塑封体;4、金属块;5、铜夹;6、第二金属外露面;7、第一粘接胶;8、第二粘接胶;9、第三粘接胶;10、金属线。In the figure: 1. metal frame; 2. chip; 3. plastic package; 4. metal block; 5. copper clip; 6. second metal exposed surface; 7. first adhesive; 8. second adhesive; 9. third adhesive; 10. metal wire.
具体实施方式Detailed ways
以下结合附图对本发明的优选实施例进行说明,应当理解,此处所描述的优选实施例仅用于说明和解释本发明,并不用于限定本发明。The preferred embodiments of the present invention are described below in conjunction with the accompanying drawings. It should be understood that the preferred embodiments described herein are only used to illustrate and explain the present invention, and are not used to limit the present invention.
另外,在本发明中如涉及“第一”、“第二”等的描述仅用于描述目的,并非特别指称次序或顺位的意思,亦非用以限定本发明,其仅仅是为了区别以相同技术用语描述的组件或操作而已,而不能理解为指示或暗示其相对重要性或者隐含指明所指示的技术特征的数量。由此,限定有“第一”、“第二”的特征可以明示或者隐含地包括至少一个该特征。另外,各个实施例之间的技术方案以及技术特征可以相互结合,但是必须是以本领域普通技术人员能够实现为基础,当技术方案的结合出现相互矛盾或无法实现时应当认为这种技术方案的结合不存在,也不在本发明要求的保护范围之内。In addition, in the present invention, the descriptions of "first", "second", etc. are only used for descriptive purposes, and do not specifically refer to the order or sequence, nor are they used to limit the present invention. They are only used to distinguish components or operations described with the same technical terms, and cannot be understood as indicating or implying their relative importance or implicitly indicating the number of technical features indicated. Therefore, the features defined as "first" and "second" may explicitly or implicitly include at least one of the features. In addition, the technical solutions and technical features between the various embodiments can be combined with each other, but they must be based on the ability of ordinary technicians in the field to implement them. When the combination of technical solutions is contradictory or cannot be implemented, it should be considered that such a combination of technical solutions does not exist and is not within the scope of protection required by the present invention.
实施例1:Embodiment 1:
本发明实施例提供了低热阻的双面金属散热TO247结构,如图1-图10所示,包括:金属框架1、芯片2、导热组件及塑封体3,金属框架1包括载片台及多个引脚,载片台表面设置芯片2,载片台远离芯片2一侧设置为第一金属外露面,导热组件包括金属块4及铜夹5,金属块4设置在芯片2远离金属框架1一侧,金属块4远离芯片2一侧设置铜夹5,塑封体3将芯片2、载片台、金属块4、铜夹5及靠近载片台的一段引脚包裹,铜夹5远离金属块4一侧设置为第二金属外露面6,铜夹5远离金属块4一侧与塑封体3远离金属框架1一侧处于同一平面。An embodiment of the present invention provides a double-sided metal heat dissipation TO247 structure with low thermal resistance, as shown in Figures 1 to 10, comprising: a metal frame 1, a chip 2, a thermally conductive component and a plastic package 3, the metal frame 1 comprising a wafer carrier and a plurality of pins, the chip 2 is arranged on the surface of the wafer carrier, and the side of the wafer carrier away from the chip 2 is arranged as a first metal exposed surface, the thermally conductive component comprises a metal block 4 and a copper clip 5, the metal block 4 is arranged on the side of the chip 2 away from the metal frame 1, and the copper clip 5 is arranged on the side of the metal block 4 away from the chip 2, the plastic package 3 wraps the chip 2, the wafer carrier, the metal block 4, the copper clip 5 and a section of the pins close to the wafer carrier, the side of the copper clip 5 away from the metal block 4 is arranged as a second metal exposed surface 6, and the side of the copper clip 5 away from the metal block 4 and the side of the plastic package 3 away from the metal frame 1 are in the same plane.
上述技术方案的工作原理及有益效果为:如图1-图4所示,常规TO247结构由塑封料包裹,第二金属外露面6框架的背面上设有芯片2,金属框架1与芯片2间采用粘接胶相连,因此只能通过金属框架1实现单面金属散热,热量传递效率低,为了解决上述问题,如图5-图10所示,本发明在芯片2上设置金属块4,通过金属块4能够将芯片2的热量传递给铜夹5,铜夹5通过第二金属外露面6进一步散热,从而实现了铜夹5的第二金属外露面6与第一金属外露面的双面金属散热,上述低热阻的双面金属散热TO247结构能够大幅降低封装热阻,提高了TO247结构的热量传递效率,增强了TO247结构的散热性能,从而有利于高性能工作温度产品的发展,该TO247结构为半导体电路设计提供更强而有力的硬件保障。The working principle and beneficial effects of the above technical solution are as follows: as shown in Figures 1 to 4, the conventional TO247 structure is wrapped by a plastic packaging material, and a chip 2 is provided on the back of the second metal exposed surface 6 frame. The metal frame 1 and the chip 2 are connected with adhesive, so only single-sided metal heat dissipation can be achieved through the metal frame 1, and the heat transfer efficiency is low. In order to solve the above problem, as shown in Figures 5 to 10, the present invention arranges a metal block 4 on the chip 2, and the heat of the chip 2 can be transferred to the copper clip 5 through the metal block 4. The copper clip 5 further dissipates heat through the second metal exposed surface 6, thereby realizing double-sided metal heat dissipation of the second metal exposed surface 6 and the first metal exposed surface of the copper clip 5. The above-mentioned low thermal resistance double-sided metal heat dissipation TO247 structure can greatly reduce the packaging thermal resistance, improve the heat transfer efficiency of the TO247 structure, and enhance the heat dissipation performance of the TO247 structure, which is conducive to the development of high-performance operating temperature products. The TO247 structure provides a stronger and more powerful hardware guarantee for semiconductor circuit design.
实施例2:Embodiment 2:
在上述实施例1的基础上,如图5、图6、图9、图10所示,芯片2通过铜夹5连接或金属线10连接方式中的至少一种连接方式与引脚电性连接。On the basis of the above-mentioned embodiment 1, as shown in FIG. 5 , FIG. 6 , FIG. 9 , and FIG. 10 , the chip 2 is electrically connected to the pins through at least one of the connection modes of the copper clip 5 or the metal wire 10 .
上述技术方案的工作原理及有益效果为:芯片2能够通过金属块4、铜夹5与引脚电性连接,或通过金属线10与引脚连接,或铜夹5与金属线10组合与引脚连接,芯片2通过铜夹5与引脚连接时,片状的铜夹5一端延伸至引脚处并设置突出部分,通过突出部分分别与不同引脚连接,芯片2通过金属线10与引脚连接时,金属线10一端与芯片2连接,金属线10另一端与引脚连接,当芯片2通过铜夹5与金属线10连接时,可自行选择金属线10的数量,铜夹5远离金属块4一端可覆盖在金属线10的正上方。The working principle and beneficial effects of the above technical solution are as follows: the chip 2 can be electrically connected to the pin through the metal block 4 and the copper clip 5, or connected to the pin through the metal wire 10, or connected to the pin by a combination of the copper clip 5 and the metal wire 10. When the chip 2 is connected to the pin through the copper clip 5, one end of the sheet-like copper clip 5 extends to the pin and is provided with a protruding portion, which is respectively connected to different pins through the protruding portion. When the chip 2 is connected to the pin through the metal wire 10, one end of the metal wire 10 is connected to the chip 2, and the other end of the metal wire 10 is connected to the pin. When the chip 2 is connected to the metal wire 10 through the copper clip 5, the number of metal wires 10 can be selected at will, and the end of the copper clip 5 away from the metal block 4 can cover directly above the metal wire 10.
实施例3:Embodiment 3:
在实施例1或2的基础上,第二金属外露面6与第一金属外露面的面积比最大可为1:1。Based on the embodiment 1 or 2, the area ratio of the second metal exposed surface 6 to the first metal exposed surface can be 1:1 at most.
上述技术方案的工作原理及有益效果为:第二金属外露面6面积与第一金属外露面面积根据实际需求自行设定,第二金属外露面6与第一金属外露面的面积比最大为1:1,第二金属外露面6与第一金属外露面面积相同时,TO247结构两面的散热速度相同,能够达到最大程度的散热,提高了散热效率。The working principle and beneficial effects of the above technical solution are as follows: the area of the second metal exposed surface 6 and the area of the first metal exposed surface are set according to actual needs, and the maximum area ratio of the second metal exposed surface 6 to the first metal exposed surface is 1:1. When the areas of the second metal exposed surface 6 and the first metal exposed surface are the same, the heat dissipation speed on both sides of the TO247 structure is the same, which can achieve maximum heat dissipation and improve heat dissipation efficiency.
实施例4:Embodiment 4:
在实施例1-3中任一项的基础上,如图9、图10所示,金属块4与铜夹5均采用导热金属材质制成;On the basis of any one of the embodiments 1-3, as shown in FIG9 and FIG10 , the metal block 4 and the copper clip 5 are both made of heat-conducting metal material;
金属块4与铜夹5采用相同金属材料或不同金属材料一体成型制成;The metal block 4 and the copper clip 5 are made of the same metal material or different metal materials and are integrally formed;
芯片2与载片台之间通过第一粘接胶7连接,芯片2与金属块4之间采用第二粘接胶8连接,金属块4与铜夹5之间采用第三粘接胶9连接。The chip 2 is connected to the wafer stage by a first adhesive 7 , the chip 2 is connected to the metal block 4 by a second adhesive 8 , and the metal block 4 is connected to the copper clip 5 by a third adhesive 9 .
上述技术方案的工作原理及有益效果为:金属块4与铜夹5均采用高导热材料制成,优选的,金属块4与铜夹5均采用金属铜材质制成,金属块4与铜夹5之间可通过第三粘接胶9粘接或一体成型制成,优选的,金属块4与铜夹5通过一体成型工艺制成,一体成型工艺包括但不限于粘接、锻造、超声波压焊结合、两块铜材或厚铜板挤压等,金属块4与铜夹5一体成型,能够提高金属块4与铜夹5的稳定性,而且能够节省粘接胶并简化了工艺制程。The working principle and beneficial effects of the above technical solution are as follows: the metal block 4 and the copper clip 5 are both made of high thermal conductivity materials. Preferably, the metal block 4 and the copper clip 5 are both made of metal copper. The metal block 4 and the copper clip 5 can be bonded or integrally formed by a third adhesive 9. Preferably, the metal block 4 and the copper clip 5 are formed by an integral forming process. The integral forming process includes but is not limited to bonding, forging, ultrasonic pressure welding, extrusion of two copper materials or thick copper plates, etc. The metal block 4 and the copper clip 5 are integrally formed, which can improve the stability of the metal block 4 and the copper clip 5, save adhesive and simplify the process.
实施例5:Embodiment 5:
在实施例1-4中任一项的基础上,如图5-图10所示,本申请还提供了低热阻的双面金属散热TO247结构制备方法,用于制备上述的低热阻的双面金属散热TO247结构,包括以下步骤:On the basis of any one of Examples 1-4, as shown in FIG. 5-FIG 10, the present application further provides a method for preparing a double-sided metal heat dissipation TO247 structure with low thermal resistance, which is used to prepare the above-mentioned double-sided metal heat dissipation TO247 structure with low thermal resistance, comprising the following steps:
步骤1:准备金属框架1;Step 1: Prepare the metal frame 1;
步骤2:在金属框架1的载片台上涂第一粘接胶7,在第一粘接胶7上安装芯片2;Step 2: Apply the first adhesive 7 on the wafer carrier of the metal frame 1, and install the chip 2 on the first adhesive 7;
步骤3:将芯片2与金属框架1引脚电性互连;Step 3: Electrically interconnect the chip 2 and the pins of the metal frame 1;
步骤4:在芯片2上涂第二粘接胶8,在第二粘接胶8上安装导热组件,导热组件包括金属块4及铜夹5;Step 4: Apply a second adhesive 8 on the chip 2, and install a heat-conducting component on the second adhesive 8, wherein the heat-conducting component includes a metal block 4 and a copper clip 5;
步骤5:采用塑封工艺进行塑封制得塑封体3,塑封体3包裹在金属块4芯片2、载片台、金属块4、铜夹5及靠近载片台的一段引脚外部;Step 5: plastic encapsulation is performed by plastic encapsulation process to obtain a plastic encapsulation body 3, wherein the plastic encapsulation body 3 is wrapped around the metal block 4, the chip 2, the wafer carrier, the metal block 4, the copper clip 5 and the outside of a section of the lead close to the wafer carrier;
步骤6:对塑封体3远离金属框架1一侧研磨,直至铜夹5远离金属块4一侧与塑封体3远离金属框架1一侧处于同一平面,制得TO247结构半成品;Step 6: Grind the side of the plastic package body 3 away from the metal frame 1 until the side of the copper clip 5 away from the metal block 4 and the side of the plastic package body 3 away from the metal frame 1 are in the same plane, thereby obtaining a TO247 structure semi-finished product;
步骤7:对TO247结构半成品切筋成型后制得TO247结构。Step 7: The TO247 structure is obtained by cutting and forming the semi-finished product of the TO247 structure.
上述技术方案的工作原理及有益效果为:常规TO247结构制备时,如图1-图4所示,先在金属框架1上点第一粘接胶7,然后在第一粘接胶7上装芯片2,接着通过键合金属丝材工艺实现芯片2与引脚间的电性互联,再进行塑封,最后切筋成型,上述制备方法制备的TO247结构仅能通过金属框架进行单面金属散热,散热性能差,常规TO247结构热阻较高,为了解决上述问题,本发明提供了低热阻的双面金属散热TO247结构,制备双面金属散热TO247结构时,首先准备金属框架1;接着在金属框架1的载片台上涂第一粘接胶7,在第一粘接胶7上安装芯片2;再将芯片2与金属框架1的引脚电性连接;然后在芯片2上涂第二粘接胶8,在第二粘接胶8上安装导热组件,导热组件包括金属块4及铜夹5;并采用塑封工艺进行塑封制得塑封体3,塑封体3包裹在金属块4芯片2、载片台、金属块4及铜夹5外部;对塑封体3远离金属框架1一侧研磨,直至铜夹5远离金属块4一侧与塑封体3远离金属框架1一侧处于同一平面,制得TO247结构半成品;最后对TO247结构半成品切筋成型后制得TO247结构,上述TO247结构中,芯片2产生的热量能够通过金属块4传递至铜夹5,并由铜夹5的第二金属外露面6将热量导出,铜夹5的第二金属外露面6与第一金属外露面共同散热,从而减小了TO247结构的封装热阻,提高了TO247结构的热量传递效率,增强了TO247结构的散热性能,从而有利于高性能工作温度产品的发展,该TO247结构为半导体电路设计提供更强而有力的硬件保障。The working principle and beneficial effects of the above technical solution are as follows: when preparing a conventional TO247 structure, as shown in Figures 1 to 4, first apply a first adhesive 7 to the metal frame 1, then mount the chip 2 on the first adhesive 7, then realize electrical interconnection between the chip 2 and the pins through a metal wire bonding process, then perform plastic sealing, and finally perform rib cutting and forming. The TO247 structure prepared by the above preparation method can only perform single-sided metal heat dissipation through the metal frame, and has poor heat dissipation performance. The conventional TO247 structure has a high thermal resistance. In order to solve the above problems, the present invention provides a double-sided metal heat dissipation TO247 structure with low thermal resistance. When preparing the double-sided metal heat dissipation TO247 structure, first prepare a metal frame 1; then apply a first adhesive 7 on the wafer carrier of the metal frame 1, and mount the chip 2 on the first adhesive 7; then electrically connect the chip 2 to the pins of the metal frame 1; then apply a second adhesive 8 on the chip 2, and mount a thermal conductive component on the second adhesive 8. The thermal conductive component includes a metal block 4 and a copper Clip 5; and use a plastic sealing process to obtain a plastic sealing body 3, the plastic sealing body 3 is wrapped around the metal block 4 chip 2, the wafer carrier, the metal block 4 and the copper clip 5; the side of the plastic sealing body 3 away from the metal frame 1 is ground until the side of the copper clip 5 away from the metal block 4 and the side of the plastic sealing body 3 away from the metal frame 1 are in the same plane, so as to obtain a TO247 structure semi-finished product; finally, the TO247 structure semi-finished product is cut and formed to obtain a TO247 structure, in which the heat generated by the chip 2 can be transferred to the copper clip 5 through the metal block 4, and the heat is conducted out by the second metal exposed surface 6 of the copper clip 5, and the second metal exposed surface 6 of the copper clip 5 and the first metal exposed surface jointly dissipate heat, thereby reducing the packaging thermal resistance of the TO247 structure, improving the heat transfer efficiency of the TO247 structure, and enhancing the heat dissipation performance of the TO247 structure, which is conducive to the development of high-performance operating temperature products. The TO247 structure provides a stronger and more powerful hardware guarantee for semiconductor circuit design.
实施例6:Embodiment 6:
在实施例5的基础上,在步骤3中,采用键合金属线10或铜夹5工艺将芯片2与引脚电性连接。On the basis of Embodiment 5, in step 3, the chip 2 is electrically connected to the pins by using a bonding metal wire 10 or a copper clip 5 process.
上述技术方案的工作原理及有益效果为:键合金属线10或铜夹5工艺均采用现有工艺,能够实现芯片2与引脚的电性连接。The working principle and beneficial effects of the above technical solution are as follows: the bonding metal wire 10 or the copper clip 5 process adopts the existing process, which can realize the electrical connection between the chip 2 and the pin.
实施例7:Embodiment 7:
在实施例5或6的基础上,在步骤4中,如图9、图10所示,先将金属块4安装至第二粘接胶8上,接着在金属块4远离芯片2一侧涂第三粘接胶9,在第三粘接胶9上安装铜夹5。On the basis of Example 5 or 6, in step 4, as shown in Figures 9 and 10, the metal block 4 is first installed on the second adhesive 8, and then the third adhesive 9 is applied to the side of the metal block 4 away from the chip 2, and the copper clip 5 is installed on the third adhesive 9.
上述技术方案的工作原理及有益效果为:铜夹5可以通过第三粘接胶9安装在金属块4上,铜夹5远离金属块4一侧设置第二金属外露面6,通过第二金属外露面6能够散热,与金属框架1配合实现了双面金属散热,提高了散热效率。The working principle and beneficial effects of the above technical solution are as follows: the copper clip 5 can be installed on the metal block 4 through the third adhesive 9, and a second metal exposed surface 6 is provided on the side of the copper clip 5 away from the metal block 4. Heat can be dissipated through the second metal exposed surface 6, and double-sided metal heat dissipation is achieved in cooperation with the metal frame 1, thereby improving the heat dissipation efficiency.
实施例8:Embodiment 8:
在实施例5或6的基础上,在步骤4中,先将金属块4与铜夹5采用一体成型工艺连接,接着将带有铜夹5的金属块4安装在第二粘接胶8上。On the basis of Example 5 or 6, in step 4, the metal block 4 and the copper clip 5 are first connected by an integrated molding process, and then the metal block 4 with the copper clip 5 is installed on the second adhesive 8.
上述技术方案的工作原理及有益效果为:一体成型工艺能够使得金属块4与铜夹5实现整体模块化,提高了金属块4与铜夹5连接的稳定性,减少了金属块4与铜夹5之间的粘接胶,进一步提高了导热性能,提高了金属块4与铜夹5之间的热量传递效率。The working principle and beneficial effects of the above technical solution are as follows: the one-piece molding process can realize overall modularization of the metal block 4 and the copper clip 5, improve the stability of the connection between the metal block 4 and the copper clip 5, reduce the adhesive glue between the metal block 4 and the copper clip 5, further improve the thermal conductivity, and improve the heat transfer efficiency between the metal block 4 and the copper clip 5.
实施例9:Embodiment 9:
在实施例8的基础上,在步骤2和步骤4中,采用自动涂胶装置进行涂胶,自动涂胶装置的涂胶量采用以下公式(1)计算:On the basis of Example 8, in step 2 and step 4, an automatic gluing device is used for gluing, and the amount of glue applied by the automatic gluing device is calculated using the following formula (1):
(1); (1);
其中,为自动涂胶装置的涂胶量,/>为步骤4中,第二粘接胶8烘干后金属框架1、芯片2、金属块4及铜夹5的总质量,/>为金属框架1、芯片2、金属块4及铜夹5的总质量,/>为第一粘接胶7与第二粘接胶8烘干后的密度,/>为第一粘接胶7的预设涂覆面积,/>为第二粘接胶8的预设涂覆面积,/>为第/>粘接胶的预设涂覆面积。in, is the glue application amount of the automatic glue application device, /> is the total mass of the metal frame 1, chip 2, metal block 4 and copper clip 5 after the second adhesive 8 is dried in step 4, is the total mass of the metal frame 1, chip 2, metal block 4 and copper clip 5, /> is the density of the first adhesive 7 and the second adhesive 8 after drying, /> is the preset coating area of the first adhesive 7, /> is the preset coating area of the second adhesive 8, /> For the first/> The preset coating area of the adhesive.
上述技术方案的工作原理及有益效果为:在金属框架1的载片台涂第一粘接胶7或在芯片2表面涂第二粘接胶8时,涂胶过多或涂胶过少均会影响粘接胶的涂覆质量,若涂胶过多,则粘接胶容易溢出,造成浪费的同时会增大热导率,若涂胶过少,则会降低粘接强度,为了提高粘接胶的涂覆质量,通过自动涂胶装置进行涂胶,自动涂胶装置能够根据涂胶位置自动调整涂胶量,涂胶前,先称量金属框架1、芯片2、金属块4及铜夹5的总质量,接着在实施步骤2-步骤4,其中,第一次制备为设定标准涂胶量制备工艺,第一粘接胶7与第二粘接胶8均涂覆较多,使得第一粘接胶7与第二粘接胶8均溢出,待步骤4实施完毕后,烘干第二粘接胶8,然后去除溢出的第一粘接胶7与第二粘接胶8后,称量第二粘接胶8烘干后金属框架1、芯片2、金属块4及铜夹5的总质量,通过两次称量结果能够计算出第一粘接胶7与第二粘接胶8的总质量,接着通过能够计算出第一粘接胶7与第二粘接胶8的平均厚度,基于计算所得的第一粘接胶7与第二粘接胶8的平均厚度与第/>粘接胶的预设涂覆面积,便可以计算出自动涂胶装置的涂胶量,/>为一或二,分别表示第一粘接胶7的预设涂覆面积与第二粘接胶8的预设涂覆面积,第一粘接胶7的预设涂覆面积为芯片2与载片台的最大接触面积,第二粘接胶8的预设涂覆面积为芯片2与金属块4的最大接触面积,基于计算所得的自动涂胶装置的涂胶量,涂覆第一粘接胶7时,/>为/>,自动涂胶装置便能在金属框架1的载片台上涂与第一粘接胶7对应的涂胶量,涂覆第二粘接胶8时,/>为/>,自动涂胶装置便能在金属框架1的载片台上涂与第二粘接胶8对应的涂胶量,自动涂胶装置能够针对第一粘接胶7或第二粘接胶8选取相对应的涂胶量,并且准确控制了第一粘接胶7与第二粘接胶8的厚度,不仅减少了粘接胶对热导率的影响,而且节省了粘接胶,避免粘接胶的溢出,不会影响后序的封装,还能保证粘接强度,提高TO247结构的制备品质。The working principle and beneficial effects of the above technical solution are as follows: when applying the first adhesive glue 7 on the wafer carrier of the metal frame 1 or applying the second adhesive glue 8 on the surface of the chip 2, applying too much glue or too little glue will affect the coating quality of the adhesive glue. If too much glue is applied, the adhesive glue is easy to overflow, causing waste and increasing thermal conductivity. If too little glue is applied, the bonding strength will be reduced. In order to improve the coating quality of the adhesive glue, the glue is applied by an automatic glue application device, which can automatically adjust the amount of glue applied according to the glue application position. Before applying the glue, the metal frame 1, the chip 2, the metal block 4 and the copper are weighed. The total mass of the clip 5 is then implemented in step 2-step 4, wherein the first preparation is a process for setting a standard glue coating amount, and both the first adhesive glue 7 and the second adhesive glue 8 are coated more, so that both the first adhesive glue 7 and the second adhesive glue 8 overflow. After step 4 is completed, the second adhesive glue 8 is dried, and then the overflowed first adhesive glue 7 and the second adhesive glue 8 are removed, and the total mass of the metal frame 1, the chip 2, the metal block 4 and the copper clip 5 after the second adhesive glue 8 is dried is weighed. The total mass of the first adhesive glue 7 and the second adhesive glue 8 can be calculated through the two weighing results, and then by The average thickness of the first adhesive 7 and the second adhesive 8 can be calculated, and the average thickness of the first adhesive 7 and the second adhesive 8 can be calculated based on the average thickness of the first adhesive 7 and the second adhesive 8. The preset coating area of the adhesive can be used to calculate the amount of adhesive applied by the automatic adhesive coating device. is 1 or 2, representing the preset coating area of the first adhesive 7 and the preset coating area of the second adhesive 8, respectively. The preset coating area of the first adhesive 7 is the maximum contact area between the chip 2 and the wafer stage, and the preset coating area of the second adhesive 8 is the maximum contact area between the chip 2 and the metal block 4. Based on the calculated coating amount of the automatic adhesive coating device, when coating the first adhesive 7, /> For/> , the automatic glue coating device can apply the glue amount corresponding to the first adhesive 7 on the carrier of the metal frame 1, and when applying the second adhesive 8, / For/> The automatic glue coating device can apply a coating amount corresponding to the second adhesive 8 on the carrier stage of the metal frame 1. The automatic glue coating device can select the corresponding coating amount for the first adhesive 7 or the second adhesive 8, and accurately control the thickness of the first adhesive 7 and the second adhesive 8, which not only reduces the influence of the adhesive on the thermal conductivity, but also saves the adhesive, avoids the overflow of the adhesive, does not affect the subsequent packaging, and can also ensure the bonding strength, thereby improving the preparation quality of the TO247 structure.
实施例10:Embodiment 10:
在实施例9的基础上, 在步骤4中,安装金属块4时,为了保证金属块4的导热效果,金属块4与芯片2的接触面积应等于目标传热面积,目标传热面积通过以下公式(2)计算:On the basis of Example 9, in step 4, when installing the metal block 4, in order to ensure the heat conduction effect of the metal block 4, the contact area between the metal block 4 and the chip 2 should be equal to the target heat transfer area, and the target heat transfer area is calculated by the following formula (2):
(2); (2);
其中,为目标传热面积,/>为金属块4的热阻抗,/>为芯片2的预设最高工作温度,为TO247结构的外部工作环境温度,/>为芯片2的发热功率,/>为金属框架1外露面表面的对流换热系数,/>为金属框架1外露面面积,/>为铜夹5的第二金属外露面6表面的对流换热系数,/>为铜夹5的第二金属外露面6面积,/>为芯片2的热阻,/>为金属框架1的热阻,/>为第一粘接胶7的涂胶量,/>为第一粘接胶7的预设涂覆面积,/>为第二粘接胶8的涂胶量,/>为第二粘接胶8的预设涂覆面积,/>为第一粘接胶7与第二粘接胶8的导热率。in, is the target heat transfer area, /> is the thermal impedance of the metal block 4, /> is the preset maximum operating temperature of chip 2, is the external working environment temperature of TO247 structure,/> is the heat generation power of chip 2, /> is the convective heat transfer coefficient of the exposed surface of the metal frame 1, /> is the exposed surface area of the metal frame 1, /> is the convection heat transfer coefficient of the second metal exposed surface 6 of the copper clip 5, /> is the area of the second metal exposed surface 6 of the copper clip 5, /> is the thermal resistance of chip 2, /> is the thermal resistance of the metal frame 1, /> is the coating amount of the first adhesive 7, /> is the preset coating area of the first adhesive 7, /> is the coating amount of the second adhesive 8, /> is the preset coating area of the second adhesive 8, /> is the thermal conductivity of the first adhesive 7 and the second adhesive 8.
上述技术方案的工作原理及有益效果为:若金属块4与芯片2的接触面积较小,则会降低金属块4的热传递效率,若金属块4与芯片2的接触面积较大,则会浪费材料,增加TO247结构的重量,增加成本,因此,在选取金属块4时,不仅要保证金属块4的导热效果,还要考虑金属块4的用量,通过上述方案能够准确计算出目标传热面积,计算过程中,通过公式能够计算第一粘接胶7的热阻,通过公式/>能够计算第二粘接胶8的热阻,/>与/>均采用上述公式(1)计算得出,计算时,根据第一粘接胶7与第二粘接胶8的涂胶量综合考虑了第一粘接胶7与第二粘接胶8的热阻,能够使得目标传热面积的计算更加准确,实现了精准散热,根据目标传热面积便可以选取金属块4,金属块4呈柱状,金属块4与芯片2的接触面面积等于目标传热面积时,金属块4不仅能够将芯片2产生的热量快速导出,保证芯片2工作温度不超过预设最高工作温度,芯片2在正常工作温度范围内运行,可以减少由于过热导致的性能下降、损坏或失效,从而提高系统的可靠性和稳定性,延长了芯片2的使用寿命,提升了芯片2的工作性能,降低了芯片2的能耗,达到节能的效果,而且金属块4的体积达到精准控制,不会造成金属块4的浪费,减轻了TO247结构的整体重量,进一步节省了成本,优选的,第二金属外露面6与第一金属外露面的面积比为1:1,铜夹5的第二金属外露面6与第一金属外露面共同散热,能够提高散热效果,降低了TO247结构的封装热阻,提高了TO247结构的热量传递效率,增强了TO247结构的散热性能。The working principle and beneficial effects of the above technical solution are as follows: if the contact area between the metal block 4 and the chip 2 is small, the heat transfer efficiency of the metal block 4 will be reduced; if the contact area between the metal block 4 and the chip 2 is large, materials will be wasted, the weight of the TO247 structure will be increased, and the cost will be increased. Therefore, when selecting the metal block 4, not only the heat conduction effect of the metal block 4 should be ensured, but also the amount of the metal block 4 should be considered. The above solution can accurately calculate the target heat transfer area. In the calculation process, the formula The thermal resistance of the first adhesive 7 can be calculated by the formula The thermal resistance of the second adhesive 8 can be calculated, With/> The above formula (1) is used for calculation. When calculating, the thermal resistance of the first adhesive 7 and the second adhesive 8 is comprehensively considered according to the coating amount of the first adhesive 7 and the second adhesive 8, which can make the calculation of the target heat transfer area more accurate and achieve precise heat dissipation. According to the target heat transfer area, the metal block 4 can be selected. The metal block 4 is columnar. When the contact surface area between the metal block 4 and the chip 2 is equal to the target heat transfer area, the metal block 4 can not only quickly conduct the heat generated by the chip 2, but also ensure that the operating temperature of the chip 2 does not exceed the preset maximum operating temperature. The chip 2 operates within the normal operating temperature range, which can reduce the performance degradation, damage or failure caused by overheating, thereby improving The reliability and stability of the high system extend the service life of the chip 2, improve the working performance of the chip 2, reduce the energy consumption of the chip 2, and achieve energy-saving effects. Moreover, the volume of the metal block 4 is precisely controlled, and no waste of the metal block 4 is caused, thereby reducing the overall weight of the TO247 structure and further saving costs. Preferably, the area ratio of the second metal exposed surface 6 to the first metal exposed surface is 1:1, and the second metal exposed surface 6 of the copper clip 5 and the first metal exposed surface dissipate heat together, which can improve the heat dissipation effect, reduce the packaging thermal resistance of the TO247 structure, improve the heat transfer efficiency of the TO247 structure, and enhance the heat dissipation performance of the TO247 structure.
在本发明的描述中,需要理解的是,术语“中心”、“纵向”、“横向”、“长度”、“宽度”、“厚度”、“上”、“下”、“前”、“后”、“左”、“右”、“竖直”、“水平”、“顶”、“底”“内”、“外”、“顺时针”、“逆时针”、“轴向”、“径向”、“周向”等指示的方位或位置关系为基于附图所示的方位或位置关系,仅是为了便于描述本发明和简化描述,而不是指示或暗示所指的装置或元件必须具有特定的方位、以特定的方位构造和操作,因此不能理解为对本发明的限制。In the description of the present invention, it is to be understood that the terms “center”, “longitudinal”, “lateral”, “length”, “width”, “thickness”, “up”, “down”, “front”, “back”, “left”, “right”, “vertical”, “horizontal”, “top”, “bottom”, “inside”, “outside”, “clockwise”, “counterclockwise”, “axial”, “radial”, “circumferential”, etc., indicating orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as limiting the present invention.
在本发明中,除非另有明确的规定和限定,术语“安装”、“相连”、“连接”、“固定”等术语应做广义理解,例如,可以是固定连接,也可以是可拆卸连接,或成一体;可以是机械连接,也可以是电连接或彼此可通讯;可以是直接相连,也可以通过中间媒介间接相连,可以是两个元件内部的连通或两个元件的相互作用关系,除非另有明确的限定。对于本领域的普通技术人员而言,可以根据具体情况理解上述术语在本发明中的具体含义。In the present invention, unless otherwise clearly specified and limited, the terms "installed", "connected", "connected", "fixed" and the like should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral one; it can be a mechanical connection, an electrical connection, or communication with each other; it can be a direct connection, or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements, unless otherwise clearly defined. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.
尽管本发明的实施方案已公开如上,但其并不仅仅限于说明书和实施方式中所列运用,它完全可以被适用于各种适合本发明的领域,对于熟悉本领域的人员而言,可容易地实现另外的修改,因此在不背离权利要求及等同范围所限定的一般概念下,本发明并不限于特定的细节与这里示出与描述的图例。Although the embodiments of the present invention have been disclosed as above, they are not limited to the applications listed in the specification and implementation modes. They can be fully applied to various fields suitable for the present invention. For those familiar with the art, additional modifications can be easily implemented. Therefore, without departing from the general concept defined by the claims and the scope of equivalents, the present invention is not limited to the specific details and the illustrations shown and described herein.
Claims (10)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN202410262936.5A CN117855165B (en) | 2024-03-08 | 2024-03-08 | Low-thermal-resistance double-sided metal heat dissipation TO247 structure and preparation method thereof |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN202410262936.5A CN117855165B (en) | 2024-03-08 | 2024-03-08 | Low-thermal-resistance double-sided metal heat dissipation TO247 structure and preparation method thereof |
Publications (2)
Publication Number | Publication Date |
---|---|
CN117855165A true CN117855165A (en) | 2024-04-09 |
CN117855165B CN117855165B (en) | 2024-06-21 |
Family
ID=90534678
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN202410262936.5A Active CN117855165B (en) | 2024-03-08 | 2024-03-08 | Low-thermal-resistance double-sided metal heat dissipation TO247 structure and preparation method thereof |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN117855165B (en) |
Citations (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101593740A (en) * | 2008-05-30 | 2009-12-02 | 万国半导体股份有限公司 | The conductive clip that is used for semiconductor packages |
US8841167B1 (en) * | 2013-07-26 | 2014-09-23 | Alpha & Omega Semiconductor, Inc. | Manufacturing method of a semiconductor package of small footprint with a stack of lead frame die paddle sandwiched between high-side and low-side MOSFET |
US20160293523A1 (en) * | 2015-03-31 | 2016-10-06 | Stmicroelectronics, Inc. | Semiconductor device including conductive clip with flexible leads and related methods |
US20160307826A1 (en) * | 2015-03-11 | 2016-10-20 | Gan Systems Inc. | PACKAGING SOLUTIONS FOR DEVICES AND SYSTEMS COMPRISING LATERAL GaN POWER TRANSISTORS |
CN214378393U (en) * | 2021-01-27 | 2021-10-08 | 广东气派科技有限公司 | Embedded chip packaging structure |
WO2022057822A1 (en) * | 2020-09-21 | 2022-03-24 | 青岛歌尔微电子研究院有限公司 | Heat dissipating packaging structure and preparation method therefor, and electronic device |
CN114420664A (en) * | 2022-01-18 | 2022-04-29 | 广东气派科技有限公司 | Packaging structure of multi-base-island high-power module QFN |
CN114529547A (en) * | 2022-04-24 | 2022-05-24 | 常州捷仕特机器人科技有限公司 | Gluing quality detection system and method for robot gluing workstation |
CN217334062U (en) * | 2022-03-22 | 2022-08-30 | 南京芯干线科技有限公司 | Gallium nitride device convenient to high-efficient heat dissipation reverse conduction |
CN218730911U (en) * | 2022-11-10 | 2023-03-24 | 广东气派科技有限公司 | Double-sided heat dissipation packaging structure with internal insulation |
CN116259549A (en) * | 2022-12-30 | 2023-06-13 | 深圳真茂佳半导体有限公司 | Packaging method and packaging structure of double-sided heat dissipation power semiconductor |
CN117494444A (en) * | 2023-11-09 | 2024-02-02 | 东软睿驰汽车技术(沈阳)有限公司 | Domain controller heat dissipation parameter optimization method and device and electronic equipment |
-
2024
- 2024-03-08 CN CN202410262936.5A patent/CN117855165B/en active Active
Patent Citations (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101593740A (en) * | 2008-05-30 | 2009-12-02 | 万国半导体股份有限公司 | The conductive clip that is used for semiconductor packages |
US8841167B1 (en) * | 2013-07-26 | 2014-09-23 | Alpha & Omega Semiconductor, Inc. | Manufacturing method of a semiconductor package of small footprint with a stack of lead frame die paddle sandwiched between high-side and low-side MOSFET |
US20160307826A1 (en) * | 2015-03-11 | 2016-10-20 | Gan Systems Inc. | PACKAGING SOLUTIONS FOR DEVICES AND SYSTEMS COMPRISING LATERAL GaN POWER TRANSISTORS |
US20160293523A1 (en) * | 2015-03-31 | 2016-10-06 | Stmicroelectronics, Inc. | Semiconductor device including conductive clip with flexible leads and related methods |
WO2022057822A1 (en) * | 2020-09-21 | 2022-03-24 | 青岛歌尔微电子研究院有限公司 | Heat dissipating packaging structure and preparation method therefor, and electronic device |
CN214378393U (en) * | 2021-01-27 | 2021-10-08 | 广东气派科技有限公司 | Embedded chip packaging structure |
CN114420664A (en) * | 2022-01-18 | 2022-04-29 | 广东气派科技有限公司 | Packaging structure of multi-base-island high-power module QFN |
CN217334062U (en) * | 2022-03-22 | 2022-08-30 | 南京芯干线科技有限公司 | Gallium nitride device convenient to high-efficient heat dissipation reverse conduction |
CN114529547A (en) * | 2022-04-24 | 2022-05-24 | 常州捷仕特机器人科技有限公司 | Gluing quality detection system and method for robot gluing workstation |
CN218730911U (en) * | 2022-11-10 | 2023-03-24 | 广东气派科技有限公司 | Double-sided heat dissipation packaging structure with internal insulation |
CN116259549A (en) * | 2022-12-30 | 2023-06-13 | 深圳真茂佳半导体有限公司 | Packaging method and packaging structure of double-sided heat dissipation power semiconductor |
CN117494444A (en) * | 2023-11-09 | 2024-02-02 | 东软睿驰汽车技术(沈阳)有限公司 | Domain controller heat dissipation parameter optimization method and device and electronic equipment |
Also Published As
Publication number | Publication date |
---|---|
CN117855165B (en) | 2024-06-21 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN210668609U (en) | An independent heat dissipation device for battery electrodes | |
CN109564908A (en) | The manufacturing method of semiconductor device and semiconductor device | |
CN110620094A (en) | Packaging structure and packaging process of power semiconductor device | |
CN113707624A (en) | Gallium nitride power device and packaging method thereof | |
US6350634B2 (en) | Semiconductor device having a built-in heat sink and process of manufacturing same | |
CN216054669U (en) | Gallium nitride power device convenient to heat dissipation | |
CN118522699B (en) | A DBC substrate and power module | |
CN114975401A (en) | Packaging structure and electronic equipment | |
CN117855165A (en) | Low-thermal-resistance double-sided metal heat dissipation TO247 structure and preparation method thereof | |
CN112366188B (en) | Semiconductor device packaging structure with radiating fins and packaging method | |
CN221151828U (en) | Heat radiation structure of power device in controller | |
CN219435850U (en) | MOSFET chip packaging structure | |
CN110676232B (en) | Semiconductor device packaging structure, manufacturing method thereof and electronic equipment | |
CN220272469U (en) | Package structure and electrical component | |
CN218548430U (en) | Power module with top heat dissipation and heat dissipation structure | |
CN217544596U (en) | Power semiconductor module and power semiconductor module group | |
CN207637783U (en) | Substrate for high-power semiconductor packaging and semiconductor packaging structure | |
CN212659822U (en) | Thermoelectrically separated substrate structure and package structure | |
CN210575922U (en) | A package structure of a power semiconductor device | |
CN211265455U (en) | Intelligent Power Module and Air Conditioner | |
CN211088443U (en) | BMS heat radiation structure | |
CN114927485A (en) | Electric conduction, heat storage and heat transfer method for components | |
CN209594178U (en) | A kind of switching tube radiator structure and vehicle power supply | |
CN222884997U (en) | A heat dissipation structure of a chip transistor | |
CN221651484U (en) | Package structure |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
PB01 | Publication | ||
PB01 | Publication | ||
SE01 | Entry into force of request for substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
GR01 | Patent grant | ||
GR01 | Patent grant |