CN117631152B - 90° optical mixer based on taper sub-wavelength grating and its design method - Google Patents
90° optical mixer based on taper sub-wavelength grating and its design method Download PDFInfo
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- G—PHYSICS
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- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/28—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals
- G02B6/293—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means
- G02B6/29304—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means operating by diffraction, e.g. grating
- G02B6/29305—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means operating by diffraction, e.g. grating as bulk element, i.e. free space arrangement external to a light guide
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Abstract
本发明公开了基于taper亚波长光栅的90°光混频器，包括混频器本体，混频器本体的输入端和输出端分别连接有taper亚波长光栅结构和taper输出结构；混频器本体包括整体下包层和MMI主体结构，MMI主体结构设置于整体下包层上方。本发明的基于输入端口为taper亚波长光栅的90°光混频器，输入端口为taper状的亚波长光栅结构，以达到提高传输效率的目的，实现了与90°光混频器主体模场匹配。通过在90°光混频器输入端引入亚波长光栅结构，有效提高了光纤与波导的耦合效率，缩小了90°光混频器的尺寸、减小了损耗。本发明还公开了上述混频器的设计方法，该方法其相位偏差小、传输损耗低、工艺参数容差好。
The present invention discloses a 90° optical mixer based on a taper sub-wavelength grating, including a mixer body, wherein the input end and the output end of the mixer body are respectively connected with a taper sub-wavelength grating structure and a taper output structure; the mixer body includes an overall lower cladding and an MMI main body structure, and the MMI main body structure is arranged above the overall lower cladding. The 90° optical mixer based on the input port of the present invention is a taper-shaped sub-wavelength grating structure, so as to achieve the purpose of improving the transmission efficiency and realize the mode field matching with the main body of the 90° optical mixer. By introducing a sub-wavelength grating structure at the input end of the 90° optical mixer, the coupling efficiency between the optical fiber and the waveguide is effectively improved, the size of the 90° optical mixer is reduced, and the loss is reduced. The present invention also discloses a design method for the above-mentioned mixer, which has small phase deviation, low transmission loss, and good process parameter tolerance.
Description
Technical Field
The invention belongs to the technical field of optical communication, and particularly relates to a 90-degree optical mixer based on a super sub-wavelength grating and a design method of the mixer.
Background
The conventional wireless optical communication technology has a certain limitation in future development due to strong channel interference. And the coherent optical communication technology has high bandwidth, low delay and better anti-interference performance, and provides a sustainable solution for future optical communication requirements.
In a coherent optical communication system, a 90-degree optical mixer is an important optical device in a receiving system, and compared with a traditional 90-degree optical mixer, the multimode interference (Multimode Interference, MMI) coupler has the advantages of compact structure, low loss, insensitive polarization, high integration level and the like. The refractive index difference between the core layer and the cladding layer of the silicon nitride platform is large, and the phase error and the propagation loss of light transmitted in the multimode waveguide are small. Therefore, on the silicon nitride platform, based on the self-mapping principle, a high-performance 90-degree optical mixer with low loss, small phase deviation and wide spectrum can be designed.
The sub-wavelength grating is a waveguide structure with the equivalent refractive index of a waveguide core layer designed by adjusting the geometric dimension of the grating, so that the optical field mode distribution on the section is adjusted, the mode matching degree between the optical waveguide and the optical fiber can be improved, and the aim of improving the coupling efficiency is fulfilled. By utilizing the advantages of the sub-wavelength grating, the application provides a high-performance 90-degree optical mixer based on the input of the super sub-wavelength grating.
Disclosure of Invention
The invention aims to provide a 90-degree optical mixer based on a super sub-wavelength grating, and a sub-wavelength grating structure is introduced into the input end of the mixer, so that the coupling efficiency between an optical waveguide and an optical fiber is improved, and the transmission loss of a device is reduced.
The invention also provides a design method of the frequency mixer, which has the advantages of small phase deviation, low transmission loss and good process parameter tolerance.
The technical scheme adopted by the invention is that the 90-degree optical mixer based on the super sub-wavelength grating comprises a mixer body, wherein an input end and an output end of the mixer body are respectively connected with a super sub-wavelength grating structure and a super output structure;
The mixer body includes an integral lower cladding layer and an MMI body structure disposed above the integral lower cladding layer.
The present invention is also characterized in that,
The whole lower cladding is made of silicon dioxide, the size of the whole lower cladding is not smaller than that of the MMI main body structure, and the super sub-wavelength grating structure is made of silicon nitride.
The super sub-wavelength grating structure comprises a first input waveguide and a second input waveguide, wherein signal light is input through the first input waveguide, and locally polarized light is input through the second input waveguide.
The TAPER output structure is 4 paths.
The thickness of the whole lower cladding layer is 2-5 mu m; the length of the super sub-wavelength grating structure is 3-15 mu m, and the thickness is 0.2-0.3 mu m; the MMI main body structure has the length of 150-280 mu m, the width of 13-18 mu m and the thickness of 0.2-0.3 mu m; the length of the super output structure is 5-20 mu m, and the thickness is 0.2-0.3 mu m.
The width of the input end face of the super sub-wavelength grating structure is 0.5-5 mu m, and the width of the connecting end face of the super sub-wavelength grating structure and the MMI main body structure is 0.5-10 mu m.
The width of the connecting end face of the super output structure and the MMI main body structure is 0.5-10 mu m, and the width of the output end face is 0.5-5 mu m.
The second technical scheme adopted by the invention is that the design method of the 90-degree optical mixer based on the super sub-wavelength grating comprises the following specific steps:
Step 1, processing a super sub-wavelength grating structure on an integral lower cladding, wherein the super sub-wavelength grating structure is an introduction module and comprises a first input waveguide and a second input waveguide, signal light is input through the first input waveguide, local polarized light is input through the second input waveguide, and a transmitted light field is efficiently coupled into an MMI main body structure;
Step 2, the optical field led in by the taper sub-wavelength grating structure is subjected to self-imaging effect in the MMI main body structure, in the multimode waveguide, a plurality of waveguides interfere with each other, one or more replicas of the input field appear at periodic intervals along the wave propagation direction, the signal light and the local polarized light form light beams with the same power and different phases through the multimode waveguide, and the relative phase differences of the light beams output through the output waveguide are 0 DEG, 90 DEG, 180 DEG and 270 DEG respectively;
Step3, the 90-degree optical mixer is of a 2 multiplied by 4 structure, 4 paths of output are provided, four paths of light beams with the same power are formed after the MMI main body structure generates a self-mapping effect, the four paths of light beams are respectively output from the four super output structures, the mixing effect is completed, and finally the 4 paths of light beams with the phase difference of 90 degrees are obtained, so that the 90-degree optical mixer based on the super sub-wavelength grating is obtained.
The present invention is also characterized in that,
The whole lower cladding in the step 1 is made of silicon dioxide, the size of the whole lower cladding is not smaller than that of an MMI main body structure, and the super sub-wavelength grating structure is made of silicon nitride.
The thickness of the whole lower cladding layer is 2-5 mu m; the length of the super sub-wavelength grating structure is 3-15 mu m, and the thickness is 0.2-0.3 mu m; the MMI main body structure has the length of 150-280 mu m, the width of 13-18 mu m and the thickness of 0.2-0.3 mu m; the length of the super output structure is 5-20 mu m, and the thickness is 0.2-0.3 mu m;
the width of the input end face of the super sub-wavelength grating structure is 0.5-5 mu m, and the width of the connecting end face of the super sub-wavelength grating structure and the MMI main body structure is 0.5-10 mu m;
the width of the connecting end face of the super output structure and the MMI main body structure is 0.5-10 mu m, and the width of the output end face is 0.5-5 mu m.
The beneficial effects of the invention are as follows: according to the 90-degree optical mixer based on the super sub-wavelength grating, the super-wavelength grating structure is adopted as the input port, so that the transmission efficiency is improved, and the mode field matching with the main body of the 90-degree optical mixer is realized. By introducing the sub-wavelength grating structure at the input end of the 90-degree optical mixer, the coupling efficiency of the optical fiber and the waveguide is effectively improved, the size of the 90-degree optical mixer is reduced, and the transmission loss is reduced.
Drawings
FIG. 1 is a schematic diagram of a three-dimensional structure of a 90 DEG optical mixer based on a super sub-wavelength grating;
FIG. 2 is a top view of a 90 optical mixer based on a tip sub-wavelength grating;
FIG. 3 is a side view of a 90 optical mixer based on a tip sub-wavelength grating;
fig. 4 is an excessive loss diagram of the overall structure of the mixer in embodiment 1;
fig. 5 is an excessive loss diagram of the overall structure of the mixer in embodiment 2;
fig. 6 is an excessive loss diagram of the overall structure of the mixer in embodiment 3.
In the figure, 1. An integral lower cladding layer, 2. A super sub-wavelength grating structure, 3. An MMI main body structure, 4. A super output structure, 5. A mixer body.
Detailed Description
The invention will be described in detail below with reference to the drawings and the detailed description.
The 90-degree optical mixer based on the super sub-wavelength grating has a specific structure shown in fig. 1, and comprises a mixer body 5, wherein an input end and an output end of the mixer body 5 are respectively connected with a super sub-wavelength grating structure 2 and a super output structure 4. the upper cladding of the super sub-wavelength grating structure 2 is air, the matching with the optical field of the 90-degree optical mixer is realized through the structure, and the mixing of local oscillation light and signal light is completed through four output ports.
According to the mixer, the linear gradual taper (taper) sub-wavelength grating structure is designed at the MMI input port, the taper sub-wavelength grating structure is utilized to improve the mode matching degree between the optical waveguide and the optical fiber, the coupling efficiency is improved, the 90-degree optical mixing function based on MMI with low loss, low phase deviation and high bandwidth is further realized, and the problems that the MMI coupler still has high loss, high phase deviation, low bandwidth and the like when realizing 90-degree optical mixing in the prior art are solved.
The design process of the 90-degree optical mixer based on the light grating with the super sub-wavelength at the input port comprises the following specific steps:
step 1, processing a super sub-wavelength grating structure 2 on a silicon dioxide lower cladding layer 1 by adopting a silicon nitride material, wherein the super sub-wavelength grating structure 2 is an introduction module and comprises a first input waveguide and a second input waveguide, signal light is input through the first input waveguide, local polarized light is input through the second input waveguide, and a transmitted light field is efficiently coupled into an MMI main body structure 3;
Step 2, adding an MMI main body structure 3 on a silicon dioxide lower cladding layer 1, wherein the optical field led in by a super sub-wavelength grating structure 2 is subjected to self-imaging effect in the MMI main body structure 3, a plurality of waveguides interfere with each other in a multimode waveguide, one or more replicas of an input field appear at periodic intervals along the wave propagation direction, signal light and local polarized light form light beams with the same power and different phases through the multimode waveguide, and the relative phase differences of the light beams output through an output waveguide are 0 DEG, 90 DEG, 180 DEG and 270 DEG respectively;
Step 3, the designed 90-degree optical mixer is of a2×4 structure, so that 4 paths of output are provided, four paths of light beams with the same power are formed after the MMI main body structure 3 generates a self-mapping effect, the four paths of light beams are output from the four super output structures 4 respectively, the mixing effect is completed, and finally 4 paths of light beams with the phase difference of 90 degrees are obtained.
The 90 ° optical mixer based on the super sub-wavelength grating according to the present application is described below by 5 examples:
In examples 1-5, the light field emitted by the taper mirror optical fiber was replaced by a Gaussian lens light beam with a diameter of 2.5 μm at 1550nm, the whole lower cladding layer 1 was made of silicon dioxide, the refractive index was 1.446, the material of the super sub-wavelength grating structure 2, the material of the MMI main body structure 3 and the material of the super output structure 4 were made of silicon nitride, the refractive index was 1.984, and the top view and the side view of the 90-degree optical mixer structure were shown in FIG. 2 and FIG. 3.
Example 1: the thickness of the lower cladding layer 1 is 3 mu m, the length of the super sub-wavelength grating structure 2 is 6.67 mu m, the thickness is 0.22 mu m, the width of the butt joint end face of the optical fiber is 1.2 mu m, and the width of the end face connected with the MMI main body structure 3 is 3 mu m;
The MMI main structure 3 has a length of 220 μm, a width of 16 μm and a thickness of 0.22 μm;
the length of the super output structure 4 is 15 mu m, the thickness is 0.22 mu m, the width of the end face connected with the MMI main body structure 3 is 3 mu m, and the width of the output end face is 1.2 mu m;
The excess loss of the overall structure of the mixer of this embodiment is shown in fig. 4, which shows that the mixer of this embodiment has a loss of about 0.068dB at 1550nm and less than 0.074dB over the C-band (i.e., 1520-1580 nm) (whereas the prior art mixer has a loss of about 0.1dB or higher at 1550 nm). When the wavelength exceeds 1550nm, the loss gradually increases.
Example 2: the thickness of the lower cladding layer 1 is 3 mu m, the length of the super sub-wavelength grating structure 2 is 6 mu m, the thickness is 0.22 mu m, the width of the butt joint end face of the optical fiber is 1.2 mu m, and the width of the end face connected with the MMI main body structure 3 is 3 mu m;
the MMI host structure 3 has a length of 180 μm, a width of 17.5 μm, and a thickness of 0.22 μm;
the tip output structure 4 has a length of 15 μm and a thickness of 0.22 μm, and the width of the end face connected to the MMI body structure 3 is 3 μm, and the width of the output end face is 1.2. Mu.m.
The excessive loss of the overall structure of the mixer of this embodiment is shown in fig. 5, where the loss gradually decreases with increasing wavelength, and the entire C-band is lower than 0.089dB.
Example 3: the thickness of the lower cladding layer 1 is 3 mu m, the length of the super sub-wavelength grating structure 2 is 7 mu m, the thickness is 0.22 mu m, the width of the butt joint end face of the optical fiber is 1.2 mu m, and the width of the end face connected with the MMI main body structure 3 is 3 mu m;
the MMI host structure 3 has a length of 250 μm, a width of 14.5 μm, and a thickness of 0.22 μm;
the tip output structure 4 has a length of 15 μm and a thickness of 0.22 μm, and the width of the end face connected to the MMI body structure 3 is 3 μm, and the width of the output end face is 1.2. Mu.m.
The excessive loss of the overall structure of the mixer of this embodiment is shown in fig. 6, where the loss of the mixer of this embodiment decreases with increasing wavelength, and tends to be smooth at 1550nm to about 0.082dB, with the entire C-band being below 0.09dB.
Example 4: the thickness of the lower cladding layer 1 is 5 mu m, the length of the super sub-wavelength grating structure 2 is 15 mu m, the thickness is 0.3 mu m, the width of the butt joint end face of the optical fiber is 5 mu m, and the width of the end face connected with the MMI main body structure 3 is 10 mu m;
the MMI main structure 3 has a length of 280 μm, a width of 18 μm and a thickness of 0.3 μm;
the tip output structure 4 has a length of 20 μm and a thickness of 0.3 μm, and the width of the end face connected to the MMI body structure 3 is 10 μm, and the width of the output end face is 5 μm.
Example 5: the thickness of the lower cladding layer 1 is 2 mu m, the length of the super sub-wavelength grating structure 2 is 3 mu m, the thickness is 0.2 mu m, the width of the butt joint end face of the optical fiber is 0.5 mu m, and the width of the end face connected with the MMI main body structure 3 is 0.5 mu m;
The MMI main structure 3 has a length of 150 μm, a width of 13 μm and a thickness of 0.2 μm;
the tip output structure 4 has a length of 5 μm and a thickness of 0.2 μm, and the width of the end face connected to the MMI body structure 3 is 0.5 μm, and the width of the output end face is 0.5 μm.
The 90-degree optical mixer based on the super sub-wavelength grating has the following application principle: after the two input lights are mixed in the mixer, the output light intensity of the four super output structures 4 directly reflects the optical path difference information of the two input lights of the super sub-wavelength grating structure 2. Meanwhile, four super output structures of the 90-degree optical mixer are connected with the balanced photoelectric detector and the differential circuit, so that two paths of signals are obtained, a path of complex signal is finally formed, and the optical path difference information of two input lights can be judged by testing the phase information of the complex signal.
The 90-degree optical mixer based on the super sub-wavelength grating is used as follows:
And step 1, connecting the optical fiber to a port of an optical mixer, and checking the stability and the correctness of the optical fiber connection. Step 3, adjusting input power: the input optical power is adjusted to fit the operating range of the optical mixer. Too high an input power may damage the optical mixer.
Step 3, adjusting the polarization direction: the polarizers are adjusted as necessary so that the two input optical signals have the same polarization direction. This is to ensure that the two optical signals can interfere.
Step 4, adjusting the phase difference: the phase adjuster is adjusted so that the phase difference between the two input optical signals is 90 °. This is to ensure that the two optical signals can interfere with each other, creating a new optical signal.
Step 5, monitoring output signals: the output signal of the optical mixer is monitored by connecting devices such as an optical power meter or a spectrometer. The input power, polarization direction and phase difference can be adjusted as needed to obtain the desired output signal.
Claims (5)
1. The 90-degree optical mixer based on the super sub-wavelength grating is characterized by comprising a mixer body (5), wherein an input end and an output end of the mixer body (5) are respectively connected with a super sub-wavelength grating structure (2) and a super output structure (4);
The mixer body (5) comprises an integral lower cladding layer (1) and an MMI main body structure (3), wherein the MMI main body structure (3) is arranged above the integral lower cladding layer (1);
The thickness of the whole lower cladding layer (1) is 2-5 mu m; the length of the super sub-wavelength grating structure (2) is 3-15 mu m, and the thickness is 0.2-0.3 mu m; the MMI main body structure (3) has the length of 150-280 mu m, the width of 13-18 mu m and the thickness of 0.2-0.3 mu m; the length of the super output structure (4) is 5-20 mu m, and the thickness is 0.2-0.3 mu m;
The width of the input end face of the super sub-wavelength grating structure (2) is 0.5-5 mu m, and the width of the end face connected with the MMI main body structure (3) is 0.5-10 mu m;
The width of the connecting end face of the tag output structure (4) and the MMI main body structure (3) is 0.5-10 mu m, and the width of the output end face is 0.5-5 mu m.
2. The 90 ° optical mixer based on the super sub-wavelength grating according to claim 1, wherein the whole lower cladding layer (1) is made of silicon dioxide material, the size of the whole lower cladding layer (1) is not smaller than the size of the MMI main body structure (3), and the super sub-wavelength grating structure (2) is made of silicon nitride material.
3. The 90 ° optical hybrid based on a super sub-wavelength grating according to claim 1, wherein the super sub-wavelength grating structure (2) comprises a first input waveguide through which signal light is input and a second input waveguide through which locally polarized light is input.
4. The 90 ° optical mixer based on a super sub-wavelength grating according to claim 1, wherein the super output structure (4) is 4-way.
5. The design method of the 90-degree optical mixer based on the super sub-wavelength grating is characterized by comprising the following specific steps:
Step 1, processing a super sub-wavelength grating structure (2) on an integral lower cladding layer (1), wherein the super sub-wavelength grating structure (2) is an import module and comprises a first input waveguide and a second input waveguide, signal light is input through the first input waveguide, local polarized light is input through the second input waveguide, and a transmitted light field is efficiently coupled into an MMI main body structure (3);
Step 2, the optical field led in by the super sub-wavelength grating structure (2) is subjected to a self-imaging effect in the MMI main body structure (3), in the multimode waveguide, a plurality of waveguides interfere with each other, one or more replicas of the input field appear at periodic intervals along the wave propagation direction, the signal light and the locally polarized light form light beams with the same power and different phases through the multimode waveguide, and the relative phase differences of the light beams output through the output waveguide are 0 DEG, 90 DEG, 180 DEG and 270 DEG respectively;
step 3, the 90-degree optical mixer is of a 2 multiplied by 4 structure and has 4 paths of output, four paths of light beams with the same power are formed after the MMI main body structure (3) generates a self-mapping effect and are respectively output from four taper output structures (4), the mixing effect is finished, and finally 4 paths of light beams with the phase difference of 90 degrees are obtained, so that the 90-degree optical mixer based on a taper sub-wavelength grating is obtained;
the whole lower cladding layer (1) in the step 1 is made of silicon dioxide, the size of the whole lower cladding layer (1) is not smaller than that of an MMI main body structure (3), and the TAPER sub-wavelength grating structure (2) is made of silicon nitride;
The thickness of the whole lower cladding layer (1) is 2-5 mu m; the length of the super sub-wavelength grating structure (2) is 3-15 mu m, and the thickness is 0.2-0.3 mu m; the MMI main body structure (3) has the length of 150-280 mu m, the width of 13-18 mu m and the thickness of 0.2-0.3 mu m; the length of the super output structure (4) is 5-20 mu m, and the thickness is 0.2-0.3 mu m;
The width of the input end face of the super sub-wavelength grating structure (2) is 0.5-5 mu m, and the width of the end face connected with the MMI main body structure (3) is 0.5-10 mu m;
The width of the connecting end face of the tag output structure (4) and the MMI main body structure (3) is 0.5-10 mu m, and the width of the output end face is 0.5-5 mu m.
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| CN114726447A (en) * | 2020-12-22 | 2022-07-08 | 上海新微技术研发中心有限公司 | 90-degree optical mixer based on silicon-based silicon nitride waveguide |
| CN115407451A (en) * | 2021-05-27 | 2022-11-29 | 上海新微技术研发中心有限公司 | 120-degree optical mixer based on sub-wavelength grating waveguide structure and manufacturing method |
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| CN105866893B (en) * | 2016-06-08 | 2019-01-15 | 龙岩学院 | A kind of optical add/drop multiplexer based on antisymmetry multimode Bragg waveguide grating |
| US11218655B2 (en) * | 2017-10-27 | 2022-01-04 | The Charles Stark Draper Laboratory Inc. | Multi-mode interference coupler-based flat compressive and transform imager |
| CN214256319U (en) * | 2020-12-22 | 2021-09-21 | 上海新微技术研发中心有限公司 | 90-degree optical mixer based on silicon-based silicon nitride waveguide |
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| CN114726447A (en) * | 2020-12-22 | 2022-07-08 | 上海新微技术研发中心有限公司 | 90-degree optical mixer based on silicon-based silicon nitride waveguide |
| CN115407451A (en) * | 2021-05-27 | 2022-11-29 | 上海新微技术研发中心有限公司 | 120-degree optical mixer based on sub-wavelength grating waveguide structure and manufacturing method |
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