CN112596254B - A compact polarizing beam splitter based on photonic crystal - Google Patents
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- 239000004038 photonic crystal Substances 0.000 title claims abstract description 456
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- 238000005859 coupling reaction Methods 0.000 claims abstract description 112
- 230000010287 polarization Effects 0.000 claims abstract description 36
- 238000005253 cladding Methods 0.000 claims abstract description 12
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 14
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- 239000004065 semiconductor Substances 0.000 description 1
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Abstract
本发明公开了一种基于光子晶体的紧凑型偏振分束器，包括包层和偏振分束器主体结构，偏振分束器主体结构包括第一直波导、耦合区波导、第二直波导、S型连接波导和第三直波导，S型连接波导的左端面与第一直波导的右端面连接且两者重合，第三直波导的左端面与S型连接波导的右端面连接且两者重合，耦合区波导位于第一直波导的前侧，第二直波导的左端面与耦合区波导的右端面贴合连接，且第二直波导的后端面与耦合区波导的后端面位于同一平面，耦合区波导中采用嵌入式方式设置有结构尺寸均相同的二十五个圆柱形光子晶体，二十五个圆柱形光子晶体按照特定方式排布；优点是既具有较高性能，又具有较小尺寸。
The invention discloses a compact polarization beam splitter based on photonic crystal, which comprises a cladding layer and a main structure of the polarization beam splitter. The main structure of the polarization beam splitter includes a first straight waveguide, a coupling region waveguide, a second straight waveguide, an S The left end face of the S-shaped connecting waveguide is connected with the right end face of the first straight waveguide and the two are overlapped, and the left end face of the third straight waveguide is connected with the right end face of the S-shaped connecting waveguide and the two are coincident , the coupling region waveguide is located on the front side of the first straight waveguide, the left end face of the second straight waveguide is connected to the right end face of the coupling region waveguide, and the rear face of the second straight waveguide and the rear end face of the coupling region waveguide are located in the same plane, Twenty-five cylindrical photonic crystals with the same structure and size are arranged in the waveguide of the coupling region in an embedded manner, and the twenty-five cylindrical photonic crystals are arranged in a specific manner; the advantage is that it has both high performance and small size. size.
Description
技术领域technical field
本发明涉及一种偏振分束器，尤其是涉及一种基于光子晶体的紧凑型偏振分束器。The present invention relates to a polarization beam splitter, in particular to a compact polarization beam splitter based on a photonic crystal.
背景技术Background technique
“集成光学”是采用与半导体集成电路类似的技术，在某种材料的衬底上集成各种不同功能的光学器件，以实现某种功能的一种技术。自1969年，“集成光学”由贝尔实验室的米勒提出后，经历了飞速的发展，已逐渐成熟并走向产业化应用。随着数据通信业务和互连网技术的飞速发展，带动多媒体、社交网络的日益普及，人们对于信息的需求量越来越大。为了满足人们及时接收信息的需求，要求电信设备具有越来越大的数据传输带宽。用光作为信息传输的载体的光互连同传统的电互连相比，光互连具有频带宽、传输容量大、抗电磁干扰性能好、信号串扰小、损耗小以及中继距离长等优势。其中，光互连的带宽传输距离则是电互连无法比拟的巨大优势。这些优势使得光互连技术被认为是解决电互连瓶颈问题的新途径，成为新一代互连技术的研究热点。"Integrated optics" is a technology that uses a technology similar to semiconductor integrated circuits to integrate various optical devices with different functions on a substrate of a certain material to achieve a certain function. Since 1969, "integrated optics" has experienced rapid development since it was proposed by Miller of Bell Labs. It has gradually matured and moved towards industrial application. With the rapid development of data communication services and Internet technology, and the increasing popularity of multimedia and social networks, people's demand for information is increasing. In order to meet the needs of people to receive information in a timely manner, telecommunication equipment is required to have an increasingly larger data transmission bandwidth. Compared with the traditional electrical interconnection, the optical interconnection using light as the carrier of information transmission has the advantages of frequency bandwidth, large transmission capacity, good anti-electromagnetic interference performance, low signal crosstalk, low loss and long relay distance. . Among them, the bandwidth transmission distance of optical interconnection is an incomparable advantage of electrical interconnection. These advantages make optical interconnection technology considered as a new way to solve the bottleneck problem of electrical interconnection and become a research hotspot of new generation interconnection technology.
目前，人们开始尝试将模式复用技术应用于集成光电子器件中，人们研究的热点主要集中在模式复用系统(MDM)和偏振复用系统(PDM)。其中，模式复用系统主要是增加可以入射的同种光信号模式数量以达到拓展信号的目的，偏振复用系统主要是依托偏振分束器区分出两种正交振动的不同光传播模式以实现模式复用功能。近年来，定向耦合器(DC)型偏振分束器(PBS)和基于光子晶体(PC)的偏振分束器都有了一定进展。但是总体而言，虽然定向耦合器型偏振分束器的性能较为优异，然而其尺寸较大，通常达到几十纳米。而现有的基于光子晶体(PC)的偏振分束器依靠立方体型光子晶体来实现偏振分束功能，虽然具有着紧凑的结构，但是其结构也相应地损失了部分性能，使得其性能并不突出。At present, people have begun to try to apply the mode multiplexing technology to integrated optoelectronic devices, and the research hotspots mainly focus on the mode multiplexing system (MDM) and the polarization multiplexing system (PDM). Among them, the mode multiplexing system mainly increases the number of the same optical signal modes that can be incident to achieve the purpose of expanding the signal. The polarization multiplexing system mainly relies on the polarization beam splitter to distinguish two different optical propagation modes of orthogonal vibration to achieve Mode multiplexing function. In recent years, directional coupler (DC) type polarizing beam splitters (PBS) and photonic crystal (PC)-based polarizing beam splitters have made some progress. But in general, although the performance of the directional coupler type polarizing beam splitter is excellent, its size is relatively large, usually reaching several tens of nanometers. However, the existing polarizing beam splitter based on photonic crystal (PC) relies on cube-type photonic crystal to realize the polarizing beam splitting function. Although it has a compact structure, its structure also loses some performance accordingly, so that its performance is not very good. protrude.
发明内容SUMMARY OF THE INVENTION
本发明所要解决的技术问题是提供一种在既具有较高性能，又具有较小尺寸的基于光子晶体的紧凑型偏振分束器。The technical problem to be solved by the present invention is to provide a compact polarizing beam splitter based on photonic crystal with both high performance and small size.
本发明解决上述技术问题所采用的技术方案为：一种基于光子晶体的紧凑型偏振分束器，包括包层和偏振分束器主体结构，所述的偏振分束器主体结构位于所述的包层内部，且被所述的包层完全包裹住，所述的包层的材料为二氧化硅，所述的偏振分束器主体结构包括第一直波导、耦合区波导、第二直波导、S型连接波导和第三直波导，所述的耦合区波导为直波导形状，所述的第一波导、所述的耦合区波导、所述的第二直波导、所述的S型连接波导和所述的第三直波导的材料均为硅，所述的第一直波导、所述的耦合区波导、所述的第二直波导、所述的S型连接波导和所述的第三直波导的高度方向均为上下方向，所述的第一直波导、所述的耦合区波导、所述的第二直波导、所述的S型连接波导和所述的第三直波导的宽度方向均为前后方向，所述的第一直波导、所述的耦合区波导、所述的第二直波导、所述的S型连接波导和所述的第三直波导的长度方向均为左右方向，所述的S型连接波导由直波导弯折后形成，所述的第一直波导、所述的耦合区波导、所述的第二直波导、所述的S型连接波导和所述的第三直波导的高度均为220nm，所述的第一直波导、所述的耦合区波导、所述的第二直波导、所述的S型连接波导和所述的第三直波导的下端面位于同一平面，所述的第一直波导、所述的第二直波导、所述的S型连接波导和所述的第三直波导宽度均为0.6um，所述的耦合区波导的宽度为0.75um，所述的第一直波导的左端面作为所述的紧凑型偏振分束器的输入端，所述的S型连接波导的左端面与所述的第一直波导的右端面连接且两者重合，所述的第三直波导的左端面与所述的S型连接波导的右端面连接且两者重合，所述的第三直波导的右端面为所述的紧凑型偏振分束器的第一输出端，所述的耦合区波导位于所述的第一直波导的前侧，所述的第一直波导的前端面与所述的耦合区波导的后端面之间的距离为0.1um，所述的耦合区波导的右端面与所述的第一直波导的右端面位于同一平面，所述的第二直波导的左端面与所述的耦合区波导的右端面贴合连接，且所述的第二直波导的后端面与所述的耦合区波导的后端面位于同一平面，所述的第二直波导的右端面为所述的紧凑型偏振分束器的第二输出端，所述的第三直波导的右端面与所述的第二直波导的右端面位于同一平面，所述的第三直波导的前端面与所述的第二直波导的后端面之间的距离大于所述的第一直波导的前端面与所述的耦合区波导的后端面之间的距离。所述的耦合区波导中采用嵌入式方式设置有结构尺寸均相同的二十五个圆柱形光子晶体，每个所述的圆柱形光子晶体的材料均为二氧化硅，每个所述的圆柱形光子晶体的直径均为100nm，高度均为100nm，二十五个所述的圆柱形光子晶体的轴向均沿上下方向，二十五个所述的圆柱形光子晶体的上表面与所述的耦合区波导的上表面位于同一平面，第一个圆柱形光子晶体的中心轴线位于所述的耦合区波导的左端面的右侧以及所述的耦合区波导后端面的前侧，第一个圆柱形光子晶体的中心轴线与所述的耦合区波导的左端面之间的距离为0.3um，第一个圆柱形光子晶体的中心轴线与所述的耦合区波导的后端面之间的距离为0.225um，第二个圆柱形光子晶体位于第一个圆柱形光子晶体的右侧，第二个圆柱形光子晶体的中心轴与第一个圆柱形光子晶体的中心轴的距离为0.3um，第三个圆柱形光子晶体位于第二个圆柱形光子晶体的右侧，第三个圆柱形光子晶体的中心轴与第二个圆柱形光子晶体的中心轴的距离为0.3um，第四个圆柱形光子晶体位于第三个圆柱形光子晶体的右侧，第四个圆柱形光子晶体的中心轴与第三个圆柱形光子晶体的中心轴的距离为0.3um，第五个圆柱形光子晶体位于第四个圆柱形光子晶体的右侧，第五个圆柱形光子晶体的中心轴与第四个圆柱形光子晶体的中心轴的距离为0.3um，第六个圆柱形光子晶体位于第五个圆柱形光子晶体的右侧，第六个圆柱形光子晶体的中心轴与第五个圆柱形光子晶体的中心轴的距离为0.3um，第七个圆柱形光子晶体位于第六个圆柱形光子晶体的右侧，第七个圆柱形光子晶体的中心轴与第六个圆柱形光子晶体的中心轴的距离为0.9um，第八个圆柱形光子晶体位于第七个圆柱形光子晶体的右侧，第八个圆柱形光子晶体的中心轴与第七个圆柱形光子晶体的中心轴的距离为0.6um，第九个圆柱形光子晶体位于第一个圆柱形光子晶体的前侧以及所述的耦合区波导的左端面的右侧，第九个圆柱形光子晶体的中心轴与第一个圆柱形光子晶体的中心轴的距离为0.3um，第九个圆柱形光子晶体与所述的耦合区波导的左端面的距离为0.3um，第十个圆柱形光子晶体位于第九个圆柱形光子晶体的右侧，第十个圆柱形光子晶体的中心轴与第九个圆柱形光子晶体的中心轴的距离为0.3um，第十一个圆柱形光子晶体位于第十个圆柱形光子晶体的右侧，第十一个圆柱形光子晶体的中心轴与第十个圆柱形光子晶体的中心轴的距离为0.3um，第十二个圆柱形光子晶体位于第十一个圆柱形光子晶体的右侧，第十二个圆柱形光子晶体的中心轴与第十一个圆柱形光子晶体的中心轴的距离为0.3um，第十三个圆柱形光子晶体位于第十二个圆柱形光子晶体的右侧，第十三个圆柱形光子晶体的中心轴与第十二个圆柱形光子晶体的中心轴的距离为0.3um，第十四个圆柱形光子晶体位于第十三个圆柱形光子晶体的右侧，第十四个圆柱形光子晶体的中心轴与第十三个圆柱形光子晶体的中心轴的距离为0.3um，第十五个圆柱形光子晶体位于第十四个圆柱形光子晶体的右侧，第十五个圆柱形光子晶体的中心轴与第十四个圆柱形光子晶体的中心轴的距离为0.3um，第十六个圆柱形光子晶体位于第十五个圆柱形光子晶体的右侧，第十六个圆柱形光子晶体的中心轴与第十五个圆柱形光子晶体的中心轴的距离为0.3um，第十七个圆柱形光子晶体位于第十六个圆柱形光子晶体的右侧，第十七个圆柱形光子晶体的中心轴与第十六个圆柱形光子晶体的中心轴的距离为0.3um，第十八个圆柱形光子晶体位于第十七个圆柱形光子晶体的右侧，第十八个圆柱形光子晶体的中心轴与第十七个圆柱形光子晶体的中心轴的距离为0.3um，第十九个圆柱形光子晶体位于第十八个圆柱形光子晶体的右侧，第十九个圆柱形光子晶体的中心轴与第十八个圆柱形光子晶体的中心轴的距离为0.3um，第二十个圆柱形光子晶体位于第十九个圆柱形光子晶体的右侧，第二十个圆柱形光子晶体的中心轴与第十九个圆柱形光子晶体的中心轴的距离为1.2um，第二十一个圆柱形光子晶体位于第二十个圆柱形光子晶体的右侧，第二十一个圆柱形光子晶体的中心轴与第二十个圆柱形光子晶体的中心轴的距离为0.3um，第二十二个圆柱形光子晶体位于第二十一个圆柱形光子晶体的右侧，第二十二个圆柱形光子晶体的中心轴与第二十一个圆柱形光子晶体的中心轴的距离为0.3um，第二十三个圆柱形光子晶体位于第二十二个圆柱形光子晶体的右侧，第二十三个圆柱形光子晶体的中心轴与第二十二个圆柱形光子晶体的中心轴的距离为0.3um，第二十四个圆柱形光子晶体位于第二十三个圆柱形光子晶体的右侧，第二十四个圆柱形光子晶体的中心轴与第二十三个圆柱形光子晶体的中心轴的距离为0.3um，第二十五个圆柱形光子晶体位于第二十四个圆柱形光子晶体的右侧，第二十五个圆柱形光子晶体的中心轴与第二十四个圆柱形光子晶体的中心轴的距离为0.3um，第一个圆柱形光子晶体、第二个圆柱形光子晶体、第三个圆柱形光子晶体、第四个圆柱形光子晶体、第五个圆柱形光子晶体、第六个圆柱形光子晶体、第七个圆柱形光子晶体和第八个圆柱形光子晶体的中心轴位于同一平面，且该平面与所述的耦合区波导的前端面平行，第九个圆柱形光子晶体、第十个圆柱形光子晶体、第十一个圆柱形光子晶体、第十二个圆柱形光子晶体、第十三个圆柱形光子晶体、第十四个圆柱形光子晶体、第十五个圆柱形光子晶体、第十六个圆柱形光子晶体、第十七个圆柱形光子晶体、第十八个圆柱形光子晶体、第十九个圆柱形光子晶体、第二十个圆柱形光子晶体、第二十一个圆柱形光子晶体、第二十二个圆柱形光子晶体、第二十三个圆柱形光子晶体、第二十四个圆柱形光子晶体和第二十五个圆柱形光子晶体的中心轴位于同一平面，且该平面与所述的耦合区波导的前端面平行。The technical solution adopted by the present invention to solve the above technical problems is as follows: a compact polarization beam splitter based on photonic crystal, comprising a cladding layer and a main structure of the polarization beam splitter, and the main structure of the polarization beam splitter is located in the Inside the cladding layer and completely surrounded by the cladding layer, the material of the cladding layer is silicon dioxide, and the main structure of the polarizing beam splitter includes a first straight waveguide, a coupling region waveguide, and a second straight waveguide , S-type connection waveguide and third straight waveguide, the coupling region waveguide is a straight waveguide shape, the first waveguide, the coupling region waveguide, the second straight waveguide, the S-type connection The materials of the waveguide and the third straight waveguide are all silicon, and the first straight waveguide, the coupling region waveguide, the second straight waveguide, the S-shaped connecting waveguide and the first straight waveguide are all made of silicon. The height directions of the three straight waveguides are all up and down directions. The first straight waveguide, the coupling region waveguide, the second straight waveguide, the S-shaped connecting waveguide and the third straight waveguide The width directions are all front and rear directions, and the length directions of the first straight waveguide, the coupling region waveguide, the second straight waveguide, the S-shaped connecting waveguide and the third straight waveguide are all In the left and right direction, the S-shaped connecting waveguide is formed by bending a straight waveguide. The first straight waveguide, the coupling region waveguide, the second straight waveguide, the S-shaped connecting waveguide and the The heights of the third straight waveguides are all 220 nm, the first straight waveguides, the coupling region waveguides, the second straight waveguides, the S-shaped connecting waveguides and the third straight waveguides The lower end faces of the s are located on the same plane, the widths of the first straight waveguide, the second straight waveguide, the S-shaped connecting waveguide and the third straight waveguide are all 0.6um, and the coupling region waveguide The width of the first straight waveguide is 0.75um, the left end face of the first straight waveguide is used as the input end of the compact polarization beam splitter, and the left end face of the S-shaped connection waveguide is connected with the right end of the first straight waveguide. The left end surface of the third straight waveguide is connected with the right end surface of the S-shaped connecting waveguide and the two are overlapped, and the right end surface of the third straight waveguide is the compact type the first output end of the polarization beam splitter, the coupling region waveguide is located on the front side of the first straight waveguide, and the front end surface of the first straight waveguide and the rear end surface of the coupling region waveguide The distance is 0.1um, the right end face of the waveguide in the coupling region and the right end face of the first straight waveguide are in the same plane, the left end face of the second straight waveguide and the right end face of the waveguide in the coupling region The rear end surface of the second straight waveguide and the rear end surface of the coupling region waveguide are located in the same plane, and the right end surface of the second straight waveguide is the surface of the compact polarization beam splitter. For the second output end, the right end surface of the third straight waveguide and the right end surface of the second straight waveguide are located on the same plane, and the front end surface of the third straight waveguide and the rear surface of the second straight waveguide The distance between the end faces is greater than the distance between the front end face of the first straight waveguide and the rear end face of the coupling region waveguide. Twenty-five cylindrical photonic crystals with the same structure and size are arranged in the coupling region waveguide in an embedded manner, each of the cylindrical photonic crystals is made of silicon dioxide, and each of the cylindrical photonic crystals is made of silicon dioxide. The diameters of the cylindrical photonic crystals are all 100 nm, and the heights are all 100 nm. The upper surface of the waveguide in the coupling region is located on the same plane, the central axis of the first cylindrical photonic crystal is located on the right side of the left end face of the waveguide in the coupling region and the front side of the rear end face of the waveguide in the coupling region, the first The distance between the central axis of the cylindrical photonic crystal and the left end surface of the waveguide in the coupling region is 0.3um, and the distance between the central axis of the first cylindrical photonic crystal and the rear end surface of the waveguide in the coupling region is 0.225um, the second cylindrical photonic crystal is located on the right side of the first cylindrical photonic crystal, the distance between the central axis of the second cylindrical photonic crystal and the central axis of the first cylindrical photonic crystal is 0.3um, the first Three cylindrical photonic crystals are located on the right side of the second cylindrical photonic crystal, the distance between the central axis of the third cylindrical photonic crystal and the central axis of the second cylindrical photonic crystal is 0.3um, and the fourth cylindrical photonic crystal is The photonic crystal is located on the right side of the third cylindrical photonic crystal, the distance between the central axis of the fourth cylindrical photonic crystal and the central axis of the third cylindrical photonic crystal is 0.3um, and the fifth cylindrical photonic crystal is located on the third cylindrical photonic crystal. On the right side of the four cylindrical photonic crystals, the distance between the central axis of the fifth cylindrical photonic crystal and the central axis of the fourth cylindrical photonic crystal is 0.3um, and the sixth cylindrical photonic crystal is located in the fifth cylindrical photonic crystal On the right side of the photonic crystal, the distance between the central axis of the sixth cylindrical photonic crystal and the central axis of the fifth cylindrical photonic crystal is 0.3um, and the seventh cylindrical photonic crystal is located to the right of the sixth cylindrical photonic crystal. side, the distance between the central axis of the seventh cylindrical photonic crystal and the central axis of the sixth cylindrical photonic crystal is 0.9um, the eighth cylindrical photonic crystal is located on the right side of the seventh cylindrical photonic crystal, the eighth The distance between the central axis of the first cylindrical photonic crystal and the central axis of the seventh cylindrical photonic crystal is 0.6um, and the ninth cylindrical photonic crystal is located on the front side of the first cylindrical photonic crystal and the coupling region waveguide On the right side of the left end face of the ninth cylindrical photonic crystal, the distance between the central axis of the ninth cylindrical photonic crystal and the central axis of the first cylindrical photonic crystal is 0.3um, and the left end of the ninth cylindrical photonic crystal and the coupling area waveguide The distance between the faces is 0.3um, the tenth cylindrical photonic crystal is located on the right side of the ninth cylindrical photonic crystal, and the distance between the central axis of the tenth cylindrical photonic crystal and the central axis of the ninth cylindrical photonic crystal is 0.3um, the eleventh cylindrical photonic crystal is located on the right side of the tenth cylindrical photonic crystal, and the distance between the central axis of the eleventh cylindrical photonic crystal and the central axis of the tenth cylindrical photonic crystal is 0.3um , the twelfth cylindrical photonic crystal Located on the right side of the eleventh cylindrical photonic crystal, the distance between the central axis of the twelfth cylindrical photonic crystal and the central axis of the eleventh cylindrical photonic crystal is 0.3um, and the thirteenth cylindrical photonic crystal is Located on the right side of the twelfth cylindrical photonic crystal, the distance between the central axis of the thirteenth cylindrical photonic crystal and the central axis of the twelfth cylindrical photonic crystal is 0.3um, and the fourteenth cylindrical photonic crystal is Located on the right side of the thirteenth cylindrical photonic crystal, the distance between the central axis of the fourteenth cylindrical photonic crystal and the central axis of the thirteenth cylindrical photonic crystal is 0.3um, and the fifteenth cylindrical photonic crystal is Located on the right side of the fourteenth cylindrical photonic crystal, the distance between the central axis of the fifteenth cylindrical photonic crystal and the central axis of the fourteenth cylindrical photonic crystal is 0.3um, and the sixteenth cylindrical photonic crystal is Located on the right side of the fifteenth cylindrical photonic crystal, the distance between the central axis of the sixteenth cylindrical photonic crystal and the central axis of the fifteenth cylindrical photonic crystal is 0.3um, and the seventeenth cylindrical photonic crystal is Located on the right side of the sixteenth cylindrical photonic crystal, the distance between the central axis of the seventeenth cylindrical photonic crystal and the central axis of the sixteenth cylindrical photonic crystal is 0.3um, and the eighteenth cylindrical photonic crystal is Located on the right side of the seventeenth cylindrical photonic crystal, the distance between the central axis of the eighteenth cylindrical photonic crystal and the central axis of the seventeenth cylindrical photonic crystal is 0.3um, and the nineteenth cylindrical photonic crystal Located on the right side of the eighteenth cylindrical photonic crystal, the distance between the central axis of the nineteenth cylindrical photonic crystal and the central axis of the eighteenth cylindrical photonic crystal is 0.3um, and the twentieth cylindrical photonic crystal is Located on the right side of the nineteenth cylindrical photonic crystal, the distance between the central axis of the twentieth cylindrical photonic crystal and the central axis of the nineteenth cylindrical photonic crystal is 1.2um, and the twenty-first cylindrical photonic crystal is located at a distance of 1.2um. The crystal is located on the right side of the twentieth cylindrical photonic crystal, the distance between the central axis of the twenty-first cylindrical photonic crystal and the central axis of the twentieth cylindrical photonic crystal is 0.3um, and the twenty-second cylindrical photonic crystal is The shape photonic crystal is located on the right side of the twenty-first cylindrical photonic crystal, and the distance between the central axis of the twenty-second cylindrical photonic crystal and the central axis of the twenty-first cylindrical photonic crystal is 0.3um. Thirteen cylindrical photonic crystals are located on the right side of the twenty-second cylindrical photonic crystal, and the distance between the central axis of the twenty-third cylindrical photonic crystal and the central axis of the twenty-second cylindrical photonic crystal is 0.3 um, the twenty-fourth cylindrical photonic crystal is located on the right side of the twenty-third cylindrical photonic crystal, the central axis of the twenty-fourth cylindrical photonic crystal and the central axis of the twenty-third cylindrical photonic crystal The distance is 0.3um, the twenty-fifth cylindrical photonic crystal is located to the right of the twenty-fourth cylindrical photonic crystal, and the central axis of the twenty-fifth cylindrical photonic crystal is connected The distance between the central axis of the crystal is 0.3um, the first cylindrical photonic crystal, the second cylindrical photonic crystal, the third cylindrical photonic crystal The central axes of the cylindrical photonic crystal, the fourth cylindrical photonic crystal, the fifth cylindrical photonic crystal, the sixth cylindrical photonic crystal, the seventh cylindrical photonic crystal and the eighth cylindrical photonic crystal are in the same plane, And this plane is parallel to the front end surface of the waveguide in the coupling region, the ninth cylindrical photonic crystal, the tenth cylindrical photonic crystal, the eleventh cylindrical photonic crystal, the twelfth cylindrical photonic crystal, the Thirteen Cylindrical Photonic Crystals, Fourteenth Cylindrical Photonic Crystals, Fifteenth Cylindrical Photonic Crystals, Sixteenth Cylindrical Photonic Crystals, Seventeenth Cylindrical Photonic Crystals, Eighteenth Cylindrical Photonic Crystals Photonic Crystal, Nineteenth Cylindrical Photonic Crystal, Twenty Cylindrical Photonic Crystal, Twenty-First Cylindrical Photonic Crystal, Twenty-Second Cylindrical Photonic Crystal, Twenty-third Cylindrical Photonic Crystal , The central axes of the twenty-fourth cylindrical photonic crystal and the twenty-fifth cylindrical photonic crystal are located in the same plane, and the plane is parallel to the front end surface of the waveguide in the coupling region.
与现有技术相比，本发明的优点在于通过二十五个圆柱形光子晶体按照特定方式排列使得耦合区波导对应TM0模式和TE0模式的有效折射率发生变化，TE0模式在第一直波导中传输时的有效折射率与嵌入二十五个圆柱形光子晶体的耦合区波导所对应的TE模式的有效折射率范围不匹配，而TM0模式在第一直波导中传输时的有效折射率与嵌入二十五个圆柱形光子晶体的耦合区波导所对应的TM0模式的有效折射率范围相匹配，当混合模式TE0/TM0光源从输入端输入时，先进入第一直波导，由于混合模式TE0/TM0光源中的TM0模式满足模式耦合条件，此时TM0模式将被耦合至耦合区波导，故此TM0模式将通过第一直波导和耦合区波导，继而传输至第二直波导，最后通过第二直波导后在本发明的第二输出端out2输出，相应的，混合模式TE0/TM0光源中的TE0模式因为不满足模式耦合条件，不会从第一直波导处耦合至耦合区波导，而是直接通过第一直波导传输进入S型连接波导，继而经过S型连接波导后进入第三直波导，最后通过第三直波导后在本发明的第一输出端out1输出，从而实现模式分离，本发明中二十五个圆柱形光子晶体按照特定方式嵌入耦合区波导，能够使耦合区波导的相对于TM0模式的有效折射率范围涵盖TM0模式在第一直波导中的值，但是不会包括TE0模式在第一直波导中的值，进而TM0模式在第一直波导中传输时可以在较短距离耦合至耦合区波导中，在混合模式TE0/TM0光源进入第一直波导后，凭借二十五个圆柱形光子晶体的特定组合方式改变耦合区波导的能力，使得TM0模式能在短距离完成耦合分离，由此本发明能在波导长度较短时起到一个混合模式分离的作用，虽然耦合区波导的前端面与第二直波导的前端面不是位于同一平面，但得益于二十五个圆柱形光子晶体的位置分布，能够对耦合至耦合区波导的TM0模式起到规整光路的作用，使得TM0模式由耦合区波导传输到第二直波导时只有很小的反射损耗以及不需要在耦合区波导和第二直波导连接额外硅波导结构在第二输出端就可以得到较小的插入损耗，由此在结构相对紧凑的情况下还能保持优异的性能，另外二十五个圆柱形光子晶体的下端面相对于耦合区波导的下端面具有一段距离，有利于TM0模式在耦合区波导和第二直波导传输，这进一步减小了插入损耗提升了偏振消光比，圆柱形光子晶体形状不仅使得制造简单增大制造容差与现有的立方体型光子晶体相比更是能保持器件可观的性能，仿真结果表明，在整个1500-1600nm波段范围内，TM0模式光源具有小于0.2dB的插入损耗和小于-12dB的偏振消光比，TE0模式光源具有小于0.21dB的插入损耗和小于-14dB的偏振消光比，由此本发明在具有较高性能的基础上，尺寸较小。Compared with the prior art, the present invention has the advantage that twenty-five cylindrical photonic crystals are arranged in a specific manner, so that the effective refractive index of the waveguide in the coupling region corresponding to the TM 0 mode and the TE 0 mode changes, and the TE 0 mode is in the first The effective refractive index when propagating in the straight waveguide does not match the effective refractive index range of the TE mode corresponding to the coupling region waveguide embedded in twenty-five cylindrical photonic crystals, while the effective refractive index of the TM 0 mode propagating in the first straight waveguide does not match. The refractive index matches the effective refractive index range of the TM 0 mode corresponding to the coupling region waveguide embedded in the twenty-five cylindrical photonic crystals. When the mixed-mode TE 0 /TM 0 light source is input from the input end, it first enters the first direct In the waveguide, since the TM 0 mode in the mixed-mode TE 0 /TM 0 light source satisfies the mode coupling condition, the TM 0 mode will be coupled to the coupling region waveguide, so the TM 0 mode will pass through the first straight waveguide and the coupling region waveguide, and then It is transmitted to the second straight waveguide, and finally output at the second output terminal out2 of the present invention after passing through the second straight waveguide. Correspondingly, the TE 0 mode in the mixed-mode TE 0 /TM 0 light source does not meet the mode coupling condition, so it will not be It is coupled from the first straight waveguide to the waveguide in the coupling region, but is directly transmitted through the first straight waveguide into the S-shaped connecting waveguide, and then enters the third straight waveguide after passing through the S-shaped connecting waveguide, and finally passes through the third straight waveguide. The first output end out1 is output from the first output terminal out1, so as to realize mode separation. In the present invention, twenty-five cylindrical photonic crystals are embedded in the coupling region waveguide in a specific way, so that the effective refractive index range of the coupling region waveguide relative to the TM 0 mode covers TM The value of the 0 mode in the first straight waveguide, but does not include the value of the TE 0 mode in the first straight waveguide, and then the TM 0 mode can be coupled to the coupling region waveguide at a short distance when propagating in the first straight waveguide. , after the mixed-mode TE 0 /TM 0 light source enters the first straight waveguide, the ability to change the waveguide in the coupling region by means of a specific combination of twenty-five cylindrical photonic crystals enables the TM 0 mode to complete the coupling separation in a short distance. The present invention can achieve a mixed mode separation effect when the length of the waveguide is short. Although the front end of the waveguide in the coupling region is not in the same plane as the front end of the second straight waveguide, it benefits from twenty-five cylindrical photons. The positional distribution of the crystal can regulate the optical path of the TM 0 mode coupled to the waveguide in the coupling region, so that when the TM 0 mode is transmitted from the waveguide in the coupling region to the second straight waveguide, there is only a small reflection loss and there is no need for the TM 0 mode in the coupling region. The waveguide and the second straight waveguide are connected. The additional silicon waveguide structure can obtain a small insertion loss at the second output end, thereby maintaining excellent performance in a relatively compact structure. Another twenty-five cylindrical photonic crystals The lower end face of the coupling region has a certain distance from the lower end face of the waveguide in the coupling region, which is conducive to the transmission of the TM 0 mode in the waveguide in the coupling region and the second straight waveguide, which further reduces the insertion loss and improves the polarization extinction ratio. The shape of the cylindrical photonic crystal not only makes Manufacturing simplicity increases manufacturing tolerances with current Compared with some cube-type photonic crystals, they can maintain the considerable performance of the device. The simulation results show that the TM 0 mode light source has an insertion loss of less than 0.2dB and a polarization extinction ratio of less than -12dB in the entire 1500-1600nm wavelength range. The TE 0 mode light source has an insertion loss of less than 0.21 dB and a polarization extinction ratio of less than -14 dB, so that the present invention has a smaller size on the basis of higher performance.
附图说明Description of drawings
图1为本发明的基于光子晶体的紧凑型偏振分束器的偏振分束器主体结构的俯视图；1 is a top view of the main structure of the polarizing beam splitter of the photonic crystal-based compact polarizing beam splitter of the present invention;
图2为图1中A’-A处的剖视图；Fig. 2 is the sectional view at A'-A place in Fig. 1;
图3为本发明的基于光子晶体的紧凑型偏振分束器在波段1500nm-1600nm下TE0/TM0模式的偏振消光比仿真曲线图；3 is a simulation graph of the polarization extinction ratio of the TE 0 /TM 0 mode of the photonic crystal-based compact polarization beam splitter in the wavelength band of 1500nm-1600nm;
图4为本发明的基于光子晶体的紧凑型偏振分束器在波段1500nm-1600nm下TE0/TM0模式的插入损耗仿真曲线图；4 is a simulation curve diagram of insertion loss of the TE 0 /TM 0 mode of the photonic crystal-based compact polarizing beam splitter in the wavelength band of 1500nm-1600nm;
具体实施方式Detailed ways
以下结合附图实施例对本发明作进一步详细描述。The present invention will be further described in detail below with reference to the embodiments of the accompanying drawings.
实施例：如图1和图2所示，一种基于光子晶体的紧凑型偏振分束器，包括包层和偏振分束器主体结构，偏振分束器主体结构位于包层内部，且被包层完全包裹住，包层的材料为二氧化硅，偏振分束器主体结构包括第一直波导1、耦合区波导2、第二直波导3、S型连接波导4和第三直波导5，耦合区波导2为直波导形状，第一直波导1、耦合区波导2、第二直波导3、S型连接波导4和第三直波导5的材料均为硅，第一直波导1、耦合区波导2、第二直波导3、S型连接波导4和第三直波导5的高度方向均为上下方向，第一直波导1、耦合区波导2、第二直波导3、S型连接波导4和第三直波导5的宽度方向均为前后方向，第一直波导1、耦合区波导2、第二直波导3、S型连接波导4和第三直波导5的长度方向均为左右方向，S型连接波导4由直波导弯折后形成，第一直波导1、耦合区波导2、第二直波导3、S型连接波导4和第三直波导5的高度均为220nm，第一直波导1、耦合区波导2、第二直波导3、S型连接波导4和第三直波导5的下端面位于同一平面，第一直波导1、第二直波导3、S型连接波导4和第三直波导5宽度均为0.6um，耦合区波导2的宽度为0.75um，第一直波导1的左端面作为紧凑型偏振分束器的输入端，S型连接波导4的左端面与第一直波导1的右端面连接且两者重合，第三直波导5的左端面与S型连接波导4的右端面连接且两者重合，第三直波导5的右端面为紧凑型偏振分束器的第一输出端，耦合区波导2位于第一直波导1的前侧，第一直波导1的前端面与耦合区波导2的后端面之间的距离为0.15um，耦合区波导2的右端面与第一直波导1的右端面位于同一平面，第二直波导3的左端面与耦合区波导2的右端面贴合连接，且第二直波导3的后端面与耦合区波导2的后端面位于同一平面，第二直波导3的右端面为紧凑型偏振分束器的第二输出端，第三直波导5的右端面与第二直波导3的右端面位于同一平面，第三直波导5的前端面与第二直波导3的后端面之间的距离大于第一直波导1的前端面与耦合区波导2的后端面之间的距离；耦合区波导2中采用嵌入式方式设置有结构尺寸均相同的二十五个圆柱形光子晶体，每个圆柱形光子晶体的材料均为二氧化硅，每个圆柱形光子晶体的直径均为100nm，高度均为100nm，二十五个圆柱形光子晶体的轴向均沿上下方向，二十五个圆柱形光子晶体的上表面与耦合区波导2的上表面位于同一平面，第一个圆柱形光子晶体6的中心轴线位于耦合区波导2的左端面的右侧以及耦合区波导2后端面的前侧，第一个圆柱形光子晶体6的中心轴线与耦合区波导2的左端面之间的距离为0.3um，第一个圆柱形光子晶体6的中心轴线与耦合区波导2的后端面之间的距离为0.225um，第二个圆柱形光子晶体7位于第一个圆柱形光子晶体6的右侧，第二个圆柱形光子晶体7的中心轴与第一个圆柱形光子晶体6的中心轴的距离为0.3um，第三个圆柱形光子晶体8位于第二个圆柱形光子晶体7的右侧，第三个圆柱形光子晶体8的中心轴与第二个圆柱形光子晶体7的中心轴的距离为0.3um，第四个圆柱形光子晶体9位于第三个圆柱形光子晶体8的右侧，第四个圆柱形光子晶体9的中心轴与第三个圆柱形光子晶体8的中心轴的距离为0.3um，第五个圆柱形光子晶体10位于第四个圆柱形光子晶体9的右侧，第五个圆柱形光子晶体10的中心轴与第四个圆柱形光子晶体9的中心轴的距离为0.3um，第六个圆柱形光子晶体11位于第五个圆柱形光子晶体10的右侧，第六个圆柱形光子晶体11的中心轴与第五个圆柱形光子晶体10的中心轴的距离为0.3um，第七个圆柱形光子晶体12位于第六个圆柱形光子晶体11的右侧，第七个圆柱形光子晶体12的中心轴与第六个圆柱形光子晶体11的中心轴的距离为0.9um，第八个圆柱形光子晶体13位于第七个圆柱形光子晶体12的右侧，第八个圆柱形光子晶体13的中心轴与第七个圆柱形光子晶体12的中心轴的距离为0.6um，第九个圆柱形光子晶体14位于第一个圆柱形光子晶体6的前侧以及耦合区波导2的左端面的右侧，第九个圆柱形光子晶体14的中心轴与第一个圆柱形光子晶体6的中心轴的距离为0.3um，第九个圆柱形光子晶体14与耦合区波导2的左端面的距离为0.3um，第十个圆柱形光子晶体15位于第九个圆柱形光子晶体14的右侧，第十个圆柱形光子晶体15的中心轴与第九个圆柱形光子晶体14的中心轴的距离为0.3um，第十一个圆柱形光子晶体16位于第十个圆柱形光子晶体15的右侧，第十一个圆柱形光子晶体16的中心轴与第十个圆柱形光子晶体15的中心轴的距离为0.3um，第十二个圆柱形光子晶体17位于第十一个圆柱形光子晶体16的右侧，第十二个圆柱形光子晶体17的中心轴与第十一个圆柱形光子晶体16的中心轴的距离为0.3um，第十三个圆柱形光子晶体18位于第十二个圆柱形光子晶体17的右侧，第十三个圆柱形光子晶体18的中心轴与第十二个圆柱形光子晶体17的中心轴的距离为0.3um，第十四个圆柱形光子晶体19位于第十三个圆柱形光子晶体18的右侧，第十四个圆柱形光子晶体19的中心轴与第十三个圆柱形光子晶体18的中心轴的距离为0.3um，第十五个圆柱形光子晶体20位于第十四个圆柱形光子晶体19的右侧，第十五个圆柱形光子晶体20的中心轴与第十四个圆柱形光子晶体19的中心轴的距离为0.3um，第十六个圆柱形光子晶体21位于第十五个圆柱形光子晶体20的右侧，第十六个圆柱形光子晶体21的中心轴与第十五个圆柱形光子晶体20的中心轴的距离为0.3um，第十七个圆柱形光子晶体22位于第十六个圆柱形光子晶体21的右侧，第十七个圆柱形光子晶体22的中心轴与第十六个圆柱形光子晶体21的中心轴的距离为0.3um，第十八个圆柱形光子晶体23位于第十七个圆柱形光子晶体22的右侧，第十八个圆柱形光子晶体23的中心轴与第十七个圆柱形光子晶体22的中心轴的距离为0.3um，第十九个圆柱形光子晶体24位于第十八个圆柱形光子晶体23的右侧，第十九个圆柱形光子晶体24的中心轴与第十八个圆柱形光子晶体23的中心轴的距离为0.3um，第二十个圆柱形光子晶体25位于第十九个圆柱形光子晶体24的右侧，第二十个圆柱形光子晶体25的中心轴与第十九个圆柱形光子晶体24的中心轴的距离为1.2um，第二十一个圆柱形光子晶体26位于第二十个圆柱形光子晶体25的右侧，第二十一个圆柱形光子晶体26的中心轴与第二十个圆柱形光子晶体25的中心轴的距离为0.3um，第二十二个圆柱形光子晶体27位于第二十一个圆柱形光子晶体26的右侧，第二十二个圆柱形光子晶体27的中心轴与第二十一个圆柱形光子晶体26的中心轴的距离为0.3um，第二十三个圆柱形光子晶体28位于第二十二个圆柱形光子晶体27的右侧，第二十三个圆柱形光子晶体28的中心轴与第二十二个圆柱形光子晶体27的中心轴的距离为0.3um，第二十四个圆柱形光子晶体29位于第二十三个圆柱形光子晶体28的右侧，第二十四个圆柱形光子晶体29的中心轴与第二十三个圆柱形光子晶体28的中心轴的距离为0.3um，第二十五个圆柱形光子晶体30位于第二十四个圆柱形光子晶体29的右侧，第二十五个圆柱形光子晶体30的中心轴与第二十四个圆柱形光子晶体29的中心轴的距离为0.3um，第一个圆柱形光子晶体6、第二个圆柱形光子晶体7、第三个圆柱形光子晶体8、第四个圆柱形光子晶体9、第五个圆柱形光子晶体10、第六个圆柱形光子晶体11、第七个圆柱形光子晶体12和第八个圆柱形光子晶体13的中心轴位于同一平面，且该平面与耦合区波导2的前端面平行，第九个圆柱形光子晶体14、第十个圆柱形光子晶体15、第十一个圆柱形光子晶体16、第十二个圆柱形光子晶体17、第十三个圆柱形光子晶体18、第十四个圆柱形光子晶体19、第十五个圆柱形光子晶体20、第十六个圆柱形光子晶体21、第十七个圆柱形光子晶体22、第十八个圆柱形光子晶体23、第十九个圆柱形光子晶体24、第二十个圆柱形光子晶体25、第二十一个圆柱形光子晶体26、第二十二个圆柱形光子晶体27、第二十三个圆柱形光子晶体28、第二十四个圆柱形光子晶体29和第二十五个圆柱形光子晶体30的中心轴位于同一平面，且该平面与耦合区波导2的前端面平行。Embodiment: As shown in Figures 1 and 2, a compact polarizing beam splitter based on photonic crystals includes a cladding layer and a main structure of the polarizing beam splitter. The main structure of the polarizing beam splitter is located inside the cladding layer and is surrounded by The main structure of the polarizing beam splitter includes a first straight waveguide 1, a
本发明的工作过程为：本发明中，二十五个圆柱形光子晶体按照特定方式排列使得耦合区波导对应TM0模式和TE0模式的有效折射率发生变化，TE0模式在第一直波导中传输时的有效折射率与嵌入有二十五个圆柱形光子晶体的耦合区波导所对应的TE0模式的有效折射率范围不匹配，而TM模式在第一直波导中传输时的有效折射率与嵌入有二十五个圆柱形光子晶体的耦合区波导所对应的TM模式的有效折射率范围相匹配，当混合模式TE0/TM0光源从本发明的输入端输入时，先进入第一直波导，由于混合模式TE0/TM0光源中的TM0模式满足模式耦合条件，此时TM0模式将被耦合至耦合区波导，故此TM0模式将通过第一直波导和耦合区波导，继而传输至第二直波导，最后通过第二直波导后在本发明的第二输出端out2输出，相应的，混合模式TE0/TM0光源中的TE0模式因为不满足模式耦合条件，不会从第一直波导处耦合至耦合区波导，而是直接通过第一直波导传输进入S型连接波导，继而经过S型连接波导后进入第三直波导，最后通过第三直波导后在本发明的第一输出端out1输出。本发明中，在混合模式TE0/TM0光源进入第一直波导后，凭借二十五个圆柱形光子晶体的特定组合方式改变耦合区波导的能力，使得TM0模式能在短距离完成耦合分离，由此本发明能在波导长度较短时起到一个混合模式分离的作用。虽然耦合区波导的前端面与第二直波导的前端面不是位于同一平面，但得益于二十五个圆柱形光子晶体的位置分布，本发明能够对耦合至耦合区波导的TM模式起到规整光路的作用，使得TM0模式由耦合区波导传输到第二直波导时只有很小的反射损耗以及不需要在耦合区波导和第二直波导连接额外硅波导结构就可以在第二输出端得到较小的插入损耗，由此在结构相对紧凑的情况下还能保持优异的性能。The working process of the present invention is as follows: in the present invention, twenty-five cylindrical photonic crystals are arranged in a specific manner so that the effective refractive index of the waveguide in the coupling region corresponding to the TM 0 mode and the TE 0 mode changes, and the TE 0 mode is in the first straight waveguide. The effective refractive index when propagating in the first straight waveguide does not match the effective refractive index range of the TE 0 mode corresponding to the coupling region waveguide embedded with twenty-five cylindrical photonic crystals, while the effective refractive index of the TM mode propagating in the first straight waveguide The ratio matches the effective refractive index range of the TM mode corresponding to the coupling region waveguide embedded with twenty-five cylindrical photonic crystals. When the mixed-mode TE 0 /TM 0 light source is input from the input end of the present invention, it first enters the Straight waveguide, since the TM 0 mode in the mixed-mode TE 0 /TM 0 light source satisfies the mode coupling condition, the TM 0 mode will be coupled to the coupling region waveguide, so the TM 0 mode will pass through the first straight waveguide and the coupling region waveguide , and then transmitted to the second straight waveguide, and finally output at the second output terminal out2 of the present invention after passing through the second straight waveguide. Correspondingly, the TE 0 mode in the mixed-mode TE 0 /TM 0 light source does not meet the mode coupling condition, It will not be coupled from the first straight waveguide to the coupling region waveguide, but will be directly transmitted through the first straight waveguide into the S-type connecting waveguide, and then enter the third straight waveguide after passing through the S-type connecting waveguide, and finally pass through the third straight waveguide. The first output terminal out1 of the present invention outputs. In the present invention, after the mixed-mode TE 0 /TM 0 light source enters the first straight waveguide, the ability of the waveguide in the coupling region is changed by a specific combination of twenty-five cylindrical photonic crystals, so that the TM 0 mode can be coupled in a short distance. separation, whereby the present invention can function as a mixed mode separation when the waveguide length is short. Although the front-end surface of the waveguide in the coupling region and the front-end surface of the second straight waveguide are not located in the same plane, thanks to the positional distribution of the twenty-five cylindrical photonic crystals, the present invention can play an important role in the TM mode coupled to the waveguide in the coupling region. The function of the regular optical path makes the TM 0 mode transmitted from the coupling region waveguide to the second straight waveguide with only a small reflection loss and no need to connect additional silicon waveguide structures between the coupling region waveguide and the second straight waveguide. A small insertion loss is obtained, thereby maintaining excellent performance in a relatively compact structure.
在波段1500nm-1600nm下，对本发明的基于光子晶体的紧凑型偏振分束器进行仿真，其中TE0\TM0模式的偏振消光比仿真曲线如图3所示，插入损耗仿真曲线如图4所示，图3中PER表示偏振消光比，wavelength表示波长；图4中IL表示插入损耗，wavelength表示波长。分析图3和图4可知，在整个1500-1600nm波段范围内，TM0模式光源具有小于0.42dB的插入损耗和大于13.4dB的偏振消光比；TE0模式光源具有小于0.3dB的插入损耗和大于11.8dB的偏振消光比，由此可知本发明具有优异的性能。In the wavelength range of 1500nm-1600nm, the compact polarization beam splitter based on photonic crystal of the present invention is simulated, wherein the simulation curve of polarization extinction ratio of TE 0 \TM 0 mode is shown in Figure 3, and the simulation curve of insertion loss is shown in Figure 4 In Figure 3, PER represents the polarization extinction ratio, and wavelength represents the wavelength; in Figure 4, IL represents the insertion loss, and wavelength represents the wavelength. Analysis of Figures 3 and 4 shows that in the entire 1500-1600nm band range, the TM 0 mode light source has an insertion loss of less than 0.42dB and a polarization extinction ratio greater than 13.4dB; the TE 0 mode light source has an insertion loss of less than 0.3dB and greater than The polarization extinction ratio of 11.8dB shows that the present invention has excellent performance.
除了上述软件仿真数据外，我们还依照仿真结构对本发明的基于光子晶体的紧凑型偏振分束器进行版图绘制，并根据绘制的版图进行流片制作实物。成功制作实物之后，我们用光谱仪(OSA)在1527nm-1580nm波段范围对本发明基于光子晶体的紧凑型偏振分束器的实物进行测试，所得结果在入射光模式波长在1520nm到1580nm变化时，所制作的基于光子晶体的紧凑型偏振分束器实物在TM0模式光源入射时，所得的插入损耗小于1.23dB，偏振消光比优于11.3dB，在TE0模式光源入射时，所得的插入损耗小于1.32dB，偏振消光比优于10.8dB。由此可知，所制作的基于光子晶体的紧凑型偏振分束器实物与基于光子晶体的紧凑型偏振分束器仿真结果吻合得很好。In addition to the above software simulation data, we also draw the layout of the photonic crystal-based compact polarizing beam splitter according to the simulation structure, and tape out the real object according to the drawn layout. After the successful production of the real object, we tested the real object of the photonic crystal-based compact polarizing beam splitter with a spectrometer (OSA) in the 1527nm-1580nm band. The photonic crystal-based compact polarizing beam splitter in kind has an insertion loss of less than 1.23dB and a polarization extinction ratio better than 11.3dB when a TM 0 mode light source is incident, and an insertion loss of less than 1.32 when a TE 0 mode light source is incident. dB, the polarization extinction ratio is better than 10.8dB. It can be seen that the fabricated compact polarizing beam splitter based on photonic crystal is in good agreement with the simulation results of the compact polarizing beam splitter based on photonic crystal.
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| Polarization Splitter Based on d-Shaped Dual-Core Photonic Crystal Fibers with Gold Film;Hailiang Chen·Shuguang Li·Guowen An·Jianshe Li·Zhenkai Fan;《Plasmonics》;20140827;全文 * |
| 光子晶体偏振分束器的设计与性能分析;张信祥，陈鹤鸣;《激光与光电子学进展》;20171231;全文 * |
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| CN112596254A (en) | 2021-04-02 |
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