CN117538264A - Multifunctional spectrum photoelectric test system - Google Patents

Abstract

The invention relates to the field of photoelectric testing and provides a multifunctional spectral photoelectric testing system. The multifunctional spectral photoelectric testing system includes: a laser for emitting lasers of different wavelengths. After the laser is irradiated onto a target to be measured, a laser spectrum is formed. The laser spectrum is used for It is used to characterize the physical properties of the target to be measured; the microscopic objective lens is placed on the optical path of the laser emitted by the laser, and is used to focus the laser light emitted by the laser onto the surface of the target to be measured, and is used for macroscopic observation of the surface of the target to be measured; the spectrometer is used Perform linear polarization testing and/or circular polarization testing on the laser spectrum of the target surface to be measured. In order to solve the problem that the photoelectric testing instruments in the existing technology have single functions and are difficult to conduct all-round testing of the object to be tested, so the test results are inaccurate, it integrates multiple spectral photoelectric testing of linear polarization and circular polarization, and is flexible and variable. It has diverse functions and is easy to expand further.

Description

A multifunctional spectral photoelectric testing system

Technical field

The invention relates to the technical field of photoelectric testing, and in particular to a multifunctional spectral photoelectric testing system.

Background technique

Spectral analysis was a major scientific achievement in the 19th century, which promoted the rapid development of physics, chemistry, materials science and other disciplines. Photoelectric detection is an important means of studying energy conversion and is widely used in the field of modern semiconductor science and technology.

The functions of photoelectric testing instruments in the existing technology are relatively single, making it difficult to conduct comprehensive and rich customized tests on the objects to be tested.

Contents of the invention

The invention provides a multifunctional spectral photoelectric testing system to solve the problem that the photoelectric testing instruments in the prior art have relatively single functions and are difficult to conduct rich customized tests on the objects to be tested, and integrate multiple spectra of linear polarization and circular polarization. Optoelectronic testing, including Raman spectroscopy, photoluminescence spectroscopy, photoelectric detection, photovoltaic testing and other functions, is flexible, versatile, and easy to further expand functions.

The invention provides a multifunctional spectral photoelectric testing system, including:

Lasers are used to emit lasers of different wavelengths. After the laser is irradiated onto the target to be measured, a laser spectrum is formed. The laser spectrum is used to characterize the physical characteristics of the target to be measured;

A microscopic objective lens is used to focus the laser light emitted by the laser onto the target surface to be measured, and is used for macroscopic observation of the target surface to be measured;

A spectrometer is used for microscopic observation of the laser spectrum of the target surface to be measured. The microscopic observation includes linear polarization testing and/or circular polarization testing.

According to the multifunctional spectral photoelectric testing system provided by the present invention, a polarizer and a retardation plate are provided on the optical path of the laser emitted by the laser, and the retardation plate includes a 1/2 retardation plate and a 1/4 retardation plate;

The polarizer is used to convert the laser light emitted by the laser into polarized light;

The 1/2 retardation plate and the 1/4 retardation plate are used to phase retard the laser emitted by the laser, thereby changing the polarization state of the laser.

The multifunctional spectral photoelectric testing system provided according to the present invention also includes a focusing lens;

The focusing lens is used to converge the laser spectrum signal of the target surface to be measured to the spectrometer.

According to the multifunctional spectral photoelectric testing system provided by the present invention, the spectrometer includes a fiber spectrometer and a monochromatic spectrometer;

Fiber optic spectrometers are used to detect spectral signals with high signal intensity;

Monochromatic spectrometers are used to detect spectral signals with low signal intensity.

According to the multifunctional spectral photoelectric testing system provided by the present invention, an attenuator and a filter are also provided on the optical path of the laser emitted by the laser;

The attenuator is used to adjust the brightness of the laser;

Filters are used to screen or change the color of laser light.

The invention also provides a multifunctional spectral photoelectric testing method, including:

The laser emits lasers of different wavelengths to the target to be measured, and the laser forms a laser spectrum after irradiating the target;

The laser light emitted by the laser is converged to the target surface to be measured through a microscope objective, and the surface of the target to be measured is macroscopically observed. The laser spectrum of the target surface to be measured is microscopically observed through a spectrometer. The microscopic observation includes linear polarization testing and/or Or circular polarization test;

Based on the results of macro observation and micro observation, the physical characteristics of the target to be measured are determined.

According to the multifunctional spectral photoelectric testing method provided by the present invention, linearly polarized light emission spectrum testing is performed in the following manner:

The laser emitted by the laser passes through the polarizer and 1/2 retarder and is irradiated onto the surface of the target to be measured, generating a photoluminescence signal;

Detect photoluminescence signals in different polarization directions through filters and analyzers, and obtain photoluminescence spectra at different polarization angles;

Based on the photoluminescence spectrum, perform spectral testing on the target to be tested.

According to the multifunctional spectral photoelectric testing method provided by the present invention, the circularly polarized emission spectrum test is performed in the following manner:

The laser emitted by the laser passes through the polarizer, 1/2 retardation plate and 1/4 retardation plate and then irradiates onto the target surface to be measured, generating a circularly polarized luminescence signal;

The circularly polarized luminescence signal is converted into linearly polarized light after passing through the 1/4 retarder, and then the linearly polarized signals in different polarization directions are detected by the analyzer to obtain polarized luminescence spectra at different linear polarization angles;

Based on the polarized luminescence spectrum, spectral testing is performed on the target to be tested.

According to the multifunctional spectral photoelectric testing method provided by the present invention, linear polarization polarization photovoltaic signal testing is performed in the following manner:

The laser emitted by the laser passes through the polarizer and 1/2 retardation plate and then irradiates onto the surface of the target to be measured, and the two ends of the target to be measured are connected to a current and voltmeter;

The photovoltaic signal generated by the target under test under different linear polarized light irradiation is detected through the current and voltage meter, and the photovoltaic signal test is performed based on the photovoltaic signal.

The present invention also provides an electronic device, including a memory, a processor, and a computer program stored in the memory and executable on the processor. When the processor executes the program, it implements any of the above-mentioned multifunctional spectral photoelectric testing methods.

The present invention also provides a non-transitory computer-readable storage medium on which a computer program is stored. When the computer program is executed by a processor, any one of the above-mentioned multifunctional spectral photoelectric testing methods can be implemented.

The present invention also provides a computer program product, which includes a computer program. When the computer program is executed by a processor, any of the above-mentioned multifunctional spectral photoelectric testing methods can be implemented.

The multifunctional spectral photoelectric testing system provided by this application has the following beneficial effects:

It integrates multi-functional micro-area testing such as confocal microscopy, Raman spectroscopy, photoluminescence spectroscopy, electroluminescence spectroscopy and photovoltaic signals, and is highly flexible and easy to disassemble, design and build;

It integrates a variety of spectral photoelectric tests for linear polarization and circular polarization, including Raman spectroscopy, photoluminescence spectroscopy, photoelectric detection, photovoltaic testing and other functions. It is flexible, versatile and easy to further expand its functions;

It has laser wavelength switching and power continuous adjustment functions, and is designed with polarized light excitation and detection functions in the optical path, which can realize polarization spectrum and polarization photocurrent testing;

Photomultiplier tubes and single photon counters that amplify weak signals are designed to achieve high spectral signal resolution accuracy;

It is highly flexible, open and autonomous, which facilitates innovative design expansion and open exploration.

Description of drawings

In order to explain the present invention or the technical solutions in the prior art more clearly, the drawings needed to be used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings in the following description are of the present invention. For some embodiments of the invention, those of ordinary skill in the art can also obtain other drawings based on these drawings without exerting creative efforts.

Figure 1 is a schematic structural diagram of a multifunctional spectral photoelectric testing system provided by an embodiment of the present invention;

Figure 2 is a schematic flow chart of a multifunctional spectral photoelectric testing method provided by an embodiment of the present invention;

Figure 3 is a schematic structural diagram of an electronic device provided by an embodiment of the present invention.

in:

1-laser; 2-attenuation plate; 3-polarizer; 4-1/2 wave plate; 5-first transflective beam splitter;

6-Second transflective beam splitter; 7-Surface observation CCD; 8-1/4 wave plate; 9-Microscope objective lens;

10-Target to be measured; 11-Optical filter; 12-Polarizer; 13-Focusing lens; 14-Spectrometer; 15-Voltage and ammeter.

Detailed ways

In order to make the purpose, technical solutions and advantages of the present invention more clear, the technical solutions in the present invention will be clearly and completely described below in conjunction with the accompanying drawings of the present invention. Obviously, the described embodiments are part of the embodiments of the present invention. , not all examples. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without making creative efforts fall within the scope of protection of the present invention.

Figure 1 is a schematic structural diagram of a multifunctional spectral photoelectric testing system provided by an embodiment of the present invention.

As shown in Figure 1, this embodiment provides a multifunctional spectral photoelectric testing system, including:

Laser 1 is used to emit lasers of different wavelengths. After the laser is irradiated onto the target 10 to be measured, a laser spectrum is formed. The laser spectrum is used to characterize the physical characteristics of the target to be measured;

The microscope objective 9 is arranged on the optical path of the laser emitted by the laser 1, and is used to converge the laser emitted by the laser 1 onto the surface of the target 10 to be measured, and conduct macroscopic observation of the surface of the target 10 to be measured;

The spectrometer 14 is used for microscopic observation of the laser spectrum on the surface of the target 10 to be measured. The microscopic observation includes a linear polarization test and/or a circular polarization test.

The multifunctional spectral optoelectronic testing system provided in this embodiment has the characteristics of openness, autonomy, and scalability. It can perform the following multifunctional micro-area tests during the process of real-time microscopic observation of the target to be tested:

(1) Under switchable wavelength excitation, variable power Raman spectroscopy and polarization Raman spectroscopy testing in selected areas, as well as linear polarization photoluminescence spectroscopy and circular polarization photoluminescence spectroscopy testing are realized;

(2) With a current and voltage source, electroluminescence spectrum testing can be performed, including anisotropic polarization spectrum testing;

(3) Different laser wavelength excitations can be switched, and combined with a current and voltmeter, the variable power photovoltaic signal test in the selected area can be carried out, including polarization polarization photovoltaic signal test.

Combining the above functions, in-situ synchronous micro-area testing of spectral and optoelectronic properties from macroscopic bulk materials to nano-low-dimensional materials can be achieved.

In an exemplary embodiment, as shown in Figure 1, the multifunctional spectral photoelectric testing system provided by the present application also includes a first transflective beam splitter 5, a second transflective beam splitter 6 and a surface observation CCD 7; wherein the first transflective beam splitter 5 The anti-beam splitter has the functions of partial transmission and partial reflection. Its function is to reflect the incident light to the surface of the sample, stimulate the sample to generate a spectrum, and then transmit the generated spectrum through the first transflective beam splitter to the subsequent optical path and spectrometer. .

The second transflective beam splitter also has the functions of partial transmission and partial reflection. Its function is to connect the surface observation CCD7 to conduct real-time macroscopic observation of the sample surface. The topography image of the sample surface can be viewed through the second transflective beam splitter. It is reflected to the surface observation CCD7 and observed.

The function of surface observation CCD7 is to use for macroscopic microscopic observation of the sample surface.

In an exemplary embodiment, a polarizer 3 and a retardation plate are provided on the optical path of the laser emitted by the laser. The retardation plate includes a 1/2 retardation plate 4 and a 1/4 retardation plate 8;

The polarizer is used to convert the laser light emitted by the laser into polarized light;

The 1/2 retardation plate and the 1/4 retardation plate are used to phase retard the laser emitted by the laser, thereby changing the polarization state of the laser.

In the exemplary embodiment, a focusing lens 13 is also included;

The focusing lens 13 is used to converge the laser spectrum signal on the surface of the target 10 to be measured to the spectrometer 14 .

In an exemplary embodiment, the spectrometer includes a fiber spectrometer and a monochromatic spectrometer;

Fiber optic spectrometers are used to detect spectral signals with high signal intensity;

Monochromatic spectrometers are used to detect spectral signals with low signal intensity.

In the exemplary embodiment, an attenuation plate 2 and a filter 11 are also provided on the optical path of the laser emitted by the laser;

Attenuator 2 is used to adjust the brightness of the laser;

The optical filter 11 is used to screen or change the color of the laser light.

During implementation, the multifunctional spectral photoelectric testing system provided by this application can be divided into the following modules according to functions:

Adjustable power polarization light source module. Specifically, this module can include a variety of lasers with different wavelengths. The power of the laser can be continuously adjusted. The laser can be a spatial light incident or equipped with a single-mode polarization-maintaining optical fiber to access the optical path. Through the positioning slide rail Different lasers can be switched. The incident light path is equipped with switchable and removable attenuators, filters, polarizers, 1/2 retarder, and 1/4 glass, which are used to modulate the polarization state of the laser. According to the experiment It is necessary to generate linearly polarized light or circularly polarized light with different powers, different wavelengths, and different polarization directions.

The signal generation and synchronous observation module is equipped with a magnifying and switchable microscope objective lens, which can accurately focus the laser on the target surface to be measured, significantly improve the excitation light power density, and achieve high-precision micro-area detection at the same time; it is also equipped in the optical path It has an illumination cold light source, a charge-coupled component and an image sensor, which are used to illuminate the target to be measured, observe the surface morphology of the target under test in real time and adjust the laser focus position; the target stage to be measured has a high-precision three-dimensional displacement adjustment function, which can detect and characterize A specific location on the target surface to be measured.

Signal receiving method and detection module, equipped with switchable and removable filters, analyzer 12, and focusing lens, which can filter laser signals of different wavelengths, screen target signals in specific polarization directions, and focus them for spectral detection System; the detection system is equipped with a switchable optical fiber spectrometer and a monochromatic spectrometer. The optical fiber spectrometer can be directly used to detect spectral signals with greater intensity, and its test range is 200~1100nm; the monochromatic spectrometer mainly consists of an incident slit and a dispersion system , CCD imaging system, and can be equipped with photomultiplier tubes and single photon counters that amplify small optical signals, enabling testing of weak signals and single photon signals, with high spectral signal resolution accuracy.

The multifunctional spectral photoelectric testing method provided by the present invention is described below. The spectral photoelectric testing method described below and the spectral photoelectric testing system described above can correspond to each other.

Figure 2 is a schematic flow chart of a multifunctional spectral photoelectric testing method provided by an embodiment of the present invention.

As shown in Figure 2, the multifunctional spectral photoelectric testing method provided by this embodiment includes:

The laser emits lasers of different wavelengths to the target to be measured, and the laser forms a laser spectrum after irradiating the target;

The laser light emitted by the laser is converged to the target surface to be measured through a microscope objective, and the surface of the target to be measured is macroscopically observed. The laser spectrum of the target surface to be measured is microscopically observed through a spectrometer. The microscopic observation includes linear polarization testing and /or circular polarization test;

Based on the results of macro observation and micro observation, the physical characteristics of the target to be measured are determined.

In an exemplary embodiment, the linear polarization light emission spectrum test is performed as follows:

The laser emitted by the laser passes through the polarizer and 1/2 retarder and is irradiated onto the surface of the target to be measured, generating a photoluminescence signal;

Detect photoluminescence signals in different directions through filters and analyzers to obtain photoluminescence spectra at different polarization angles;

Based on the photoluminescence spectrum, perform spectral testing on the target to be tested.

Specifically, linearly polarized Raman spectroscopy/linearly polarized photoluminescence spectroscopy testing can include: the laser passes through a polarizer and a 1/2 retarder to form linearly polarized light with good monochromaticity and a specific polarization direction and is incident on the target surface to be measured. , excite the target to be measured to generate a Raman/photoluminescence signal, and then filter the laser through a filter and detect signals in different polarization directions through an analyzer to obtain Raman spectra/photoluminescence spectra at different polarization angles to achieve anisotropic structures. and property testing.

In an exemplary embodiment, the circularly polarized emission spectrum test is performed as follows:

The laser emitted by the laser passes through the polarizer, 1/2 retardation plate and 1/4 retardation plate and then irradiates onto the target surface to be measured, generating a circularly polarized luminous signal;

The circularly polarized luminescence signal is converted into linearly polarized light after passing through the 1/4 retarder, and then the linearly polarized signals in different polarization directions are detected by the analyzer to obtain polarized luminescence spectra at different linear polarization angles;

Based on the polarized luminescence spectrum, spectral testing is performed on the target to be tested.

In practical applications, circularly polarized photoluminescence spectrum testing can include: after the laser passes through the polarizer, 1/2 retarder, and 1/4 retarder, it can form left-handed/right-handed circularly polarized light and enter the semiconductor target surface to be measured. The target to be measured is excited to generate a circularly polarized luminescence signal. The signal passes through the 1/4 retardation plate again and is converted into linearly polarized light. The analyzer then performs polarization luminescence spectrum testing at different polarization angles.

Electroluminescence spectrum testing can include: connecting a current and voltmeter to both ends of the target to be measured, injecting electrons into the semiconductor target to be measured through a current and voltage source to generate an electroluminescence signal, and then using an analyzer to screen optical signals in different polarization directions to obtain different polarizations Angle electroluminescence spectroscopy for anisotropic electroluminescence testing.

In an exemplary embodiment, the linear polarization photovoltaic signal test is performed in the following manner:

The laser emitted by the laser passes through the polarizer and 1/2 retardation plate and then irradiates onto the surface of the target to be measured, and the two ends of the target to be measured are connected to a current and voltmeter;

The photovoltaic signal generated by the target to be measured under different linear polarized light irradiation is detected through the current and voltage meter 15, and the photovoltaic signal test is performed based on the photovoltaic signal.

In practical applications, the polarized photovoltaic signal can include: after the laser passes through the polarizer and the 1/2 retardation plate, it forms linearly polarized light that is incident on the surface of the semiconductor target to be measured. Both ends of the target to be measured are connected to a current and voltmeter, and under laser excitation Generate photovoltaic signals, and then detect signals in different polarization directions through the analyzer to achieve polarized photovoltaic signal testing.

The specific implementation method of the multifunctional spectral photoelectric testing method provided by this application can be implemented with reference to the above embodiments, and will not be described again here.

Figure 3 illustrates a schematic diagram of the physical structure of an electronic device. As shown in Figure 3, the electronic device may include: a processor (processor) 310, a communications interface (Communications Interface) 320, a memory (memory) 330 and a communication bus 340. Among them, the processor 310, the communication interface 320, and the memory 330 complete communication with each other through the communication bus 340. The processor 310 can call logical instructions in the memory 330 to execute a multifunctional spectral photoelectric testing method, which method includes:

The laser emits lasers of different wavelengths to the target to be measured, and the laser forms a laser spectrum after irradiating the target;

The laser light emitted by the laser is converged to the target surface to be measured through a microscope objective, and the surface of the target to be measured is macroscopically observed. The laser spectrum of the target surface to be measured is microscopically observed through a spectrometer. The microscopic observation includes linear polarization testing and/or Or circular polarization test;

Based on the results of macro observation and micro observation, the physical characteristics of the target to be measured are determined.

In addition, the above-mentioned logical instructions in the memory 330 can be implemented in the form of software functional units and can be stored in a computer-readable storage medium when sold or used as an independent product. Based on this understanding, the technical solution of the present invention essentially or the part that contributes to the existing technology or the part of the technical solution can be embodied in the form of a software product. The computer software product is stored in a storage medium, including Several instructions are used to cause a computer device (which can be a personal computer, a server, or a network device, etc.) to execute all or part of the steps of the methods of various embodiments of the present invention. The aforementioned storage media include: U disk, mobile hard disk, read-only memory (ROM, Read-Only Memory), random access memory (RAM, Random Access Memory), magnetic disk or optical disk and other media that can store program code.

On the other hand, the present invention also provides a computer program product. The computer program product includes a computer program. The computer program can be stored on a non-transitory computer-readable storage medium. When the computer program is executed by the processor, the computer can perform the above methods. The multifunctional spectral photoelectric testing method provided includes:

The laser emits lasers of different wavelengths to the target to be measured, and the laser forms a laser spectrum after irradiating the target;

The laser light emitted by the laser is converged to the target surface to be measured through a microscope objective, and the surface of the target to be measured is macroscopically observed. The laser spectrum of the target surface to be measured is microscopically observed through a spectrometer. The microscopic observation includes linear polarization testing and/or Or circular polarization test;

Based on the results of macro observation and micro observation, the physical characteristics of the target to be measured are determined.

In yet another aspect, the present invention also provides a non-transitory computer-readable storage medium on which a computer program is stored. The computer program is implemented when executed by a processor to execute the multifunctional spectral photoelectric testing method provided by each of the above methods. Methods include:

The laser emits lasers of different wavelengths to the target to be measured, and the laser forms a laser spectrum after irradiating the target;

The laser light emitted by the laser is converged to the target surface to be measured through a microscope objective, and the surface of the target to be measured is macroscopically observed. The laser spectrum of the target surface to be measured is microscopically observed through a spectrometer. The microscopic observation includes linear polarization testing and/or Or circular polarization test;

Based on the results of macro observation and micro observation, the physical characteristics of the target to be measured are determined.

The device embodiments described above are only illustrative. The units described as separate components may or may not be physically separated. The components shown as units may or may not be physical units, that is, they may be located in one place. , or it can be distributed to multiple network units. Some or all of the modules can be selected according to actual needs to achieve the purpose of the solution of this embodiment. Persons of ordinary skill in the art can understand and implement the method without any creative effort.

Through the above description of the embodiments, those skilled in the art can clearly understand that each embodiment can be implemented by software plus a necessary general hardware platform, and of course, it can also be implemented by hardware. Based on this understanding, the part of the above technical solution that essentially contributes to the existing technology can be embodied in the form of a software product. The computer software product can be stored in a computer-readable storage medium, such as ROM/RAM, magnetic disc, optical disk, etc., including a number of instructions to cause a computer device (which can be a personal computer, a server, or a network device, etc.) to execute various embodiments or methods of certain parts of the embodiments.

Finally, it should be noted that the above embodiments are only used to illustrate the technical solution of the present invention, but not to limit it; although the present invention has been described in detail with reference to the foregoing embodiments, those of ordinary skill in the art should understand that it can still be used Modifications are made to the technical solutions described in the foregoing embodiments, or equivalent substitutions are made to some of the technical features; however, these modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the spirit and scope of the technical solutions of the embodiments of the present invention.

Claims (10)

1. Multifunctional spectral photoelectric testing system, which is characterized by: A laser used to emit lasers of different wavelengths. The laser forms a laser spectrum after being irradiated onto the target to be measured. The laser spectrum is used to characterize the physical characteristics of the target to be measured; A microscope objective lens is arranged on the optical path of the laser emitted by the laser, used to converge the laser emitted by the laser onto the target surface to be measured, and used for macroscopic observation of the target surface to be measured; A spectrometer is used for microscopic observation of the laser spectrum of the target surface to be measured. The microscopic observation includes linear polarization testing and/or circular polarization testing. 2. The multifunctional spectral optoelectronic testing system according to claim 1, characterized in that a polarizer and a retardation plate are provided on the optical path of the laser emitted by the laser, and the retardation plate includes a 1/2 retardation plate and a 1/2 retardation plate. /4 delay film; The polarizer is used to convert the laser light emitted by the laser into polarized light; The 1/2 retardation plate and the 1/4 retardation plate are used to cause phase retardation of the laser light emitted by the laser, thereby changing the polarization state of the laser light. 3. The multifunctional spectral photoelectric testing system according to claim 2, further comprising a focusing lens; The focusing lens is used to converge the laser spectrum signal of the target surface to be measured to the spectrometer. 4. The multifunctional spectral optoelectronic testing system according to claim 1, wherein the spectrometer includes a fiber spectrometer and a monochromatic spectrometer; The optical fiber spectrometer is used to detect spectral signals with high signal intensity; The monochromatic spectrometer is used to detect spectral signals with low signal intensity. 5. The multifunctional spectral optoelectronic testing system according to claim 2, characterized in that an attenuator and a filter are also provided on the optical path of the laser emitted by the laser; The attenuation piece is used to adjust the brightness of the laser; The optical filter is used to screen or change the color of the laser. 6. Multifunctional spectral photoelectric testing method, characterized by including: The laser emits lasers of different wavelengths to the target to be measured, and the laser forms a laser spectrum after irradiating the target to be measured; The laser light emitted by the laser is converged to the target surface to be measured through a microscope objective, and the surface of the target to be measured is macroscopically observed. The laser spectrum of the target surface to be measured is microscopically observed through a spectrometer. The microscopic observation includes linear polarization testing and/or Or circular polarization test; Based on the results of macroscopic observation and the result of microscopic observation, the physical characteristics of the target to be measured are determined. 7. The multifunctional spectral photoelectric testing method according to claim 6, characterized in that, the linear polarization light emission spectrum test is carried out in the following manner: The laser light emitted by the laser passes through the polarizer and the 1/2 retarder and is irradiated onto the surface of the target to be measured, generating a photoluminescence signal; Detect photoluminescence signals in different polarization directions through filters and analyzers, and obtain photoluminescence spectra at different polarization angles; Based on the photoluminescence spectrum, perform a spectrum test on the target to be measured. 8. The multifunctional spectral photoelectric testing method according to claim 6, characterized in that, the circularly polarized emission spectrum test is carried out in the following manner: The laser emitted by the laser passes through the polarizer, 1/2 retardation plate and 1/4 retardation plate and then irradiates onto the target surface to be measured, generating a circularly polarized luminescence signal; The circularly polarized luminescence signal is converted into linearly polarized light after passing through the 1/4 retarder, and then the linearly polarized signals in different polarization directions are detected by the analyzer to obtain polarized luminescence spectra at different linear polarization angles; Based on the polarized luminescence spectrum, a spectrum test is performed on the target to be measured. 9. The multifunctional spectral photovoltaic testing method according to claim 6, characterized in that linear polarization polarization photovoltaic signal testing is performed in the following manner: The laser light emitted by the laser passes through the polarizer and the 1/2 retarder and is irradiated onto the surface of the target to be measured, and the two ends of the target to be measured are connected to a current and voltmeter; Detect the photovoltaic signals generated by the target to be measured under different linearly polarized light irradiation through a current and voltmeter, Based on the photovoltaic signal, a photovoltaic signal test is performed. 10. An electronic device, comprising a memory, a processor and a computer program stored on the memory and executable on the processor, characterized in that when the processor executes the program, the processor implements claim 6 The multifunctional spectral photoelectric testing method described in any one of to 9.