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CN117476590A - Double-sided heat dissipation packaging structure and preparation method thereof - Google Patents

Double-sided heat dissipation packaging structure and preparation method thereof Download PDF

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Publication number
CN117476590A
CN117476590A CN202311824791.5A CN202311824791A CN117476590A CN 117476590 A CN117476590 A CN 117476590A CN 202311824791 A CN202311824791 A CN 202311824791A CN 117476590 A CN117476590 A CN 117476590A
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pole
frame
clip
chip
heat dissipation
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韩萌
赵文涛
张涛
万强强
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Huayi Microelectronics Co ltd
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Huayi Microelectronics Co ltd
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Priority to CN202311824791.5A priority Critical patent/CN117476590A/en
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/48Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
    • H01L23/488Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions
    • H01L23/495Lead-frames or other flat leads
    • H01L23/49517Additional leads
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/50Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the groups H01L21/18 - H01L21/326 or H10D48/04 - H10D48/07 e.g. sealing of a cap to a base of a container
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/50Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the groups H01L21/18 - H01L21/326 or H10D48/04 - H10D48/07 e.g. sealing of a cap to a base of a container
    • H01L21/60Attaching or detaching leads or other conductive members, to be used for carrying current to or from the device in operation
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/34Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
    • H01L23/36Selection of materials, or shaping, to facilitate cooling or heating, e.g. heatsinks
    • H01L23/367Cooling facilitated by shape of device
    • H01L23/3672Foil-like cooling fins or heat sinks
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/34Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
    • H01L23/36Selection of materials, or shaping, to facilitate cooling or heating, e.g. heatsinks
    • H01L23/373Cooling facilitated by selection of materials for the device or materials for thermal expansion adaptation, e.g. carbon
    • H01L23/3736Metallic materials
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/48Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
    • H01L23/488Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions
    • H01L23/495Lead-frames or other flat leads
    • H01L23/49541Geometry of the lead-frame
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/48Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
    • H01L23/488Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions
    • H01L23/495Lead-frames or other flat leads
    • H01L23/49568Lead-frames or other flat leads specifically adapted to facilitate heat dissipation

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Materials Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Structures Or Materials For Encapsulating Or Coating Semiconductor Devices Or Solid State Devices (AREA)

Abstract

The invention discloses a double-sided radiating packaging structure and a preparation method thereof, wherein the packaging structure is formed by bonding an S pole and a G pole of a chip through a specific carrier, and the size of the carrier can be adjusted according to the windowing sizes of the S pole and the G pole of the chip so as to adapt to different MOS chip sizes; the D pole of the chip is arranged on the upper surface of the product, and the copper sheet adhesive structure is matched, so that the product realizes double-sided heat dissipation, and meanwhile, the heat dissipation area with the same size as the upper surface of the product is obtained, the heat dissipation is greatly improved, and the product reliability of the power device is improved; meanwhile, the D pole of the chip is arranged on the upper surface of the power device, and the copper sheet bonding structure is matched, so that the power device product has smaller packaging volume and higher product voltage and power. The preparation method of the packaging structure provided by the invention improves the performance and the production yield of the product.

Description

一种双面散热的封装结构及其制备方法A double-sided heat dissipation packaging structure and its preparation method

技术领域Technical field

本发明涉及半导体功率器件封装技术领域,具体涉及一种双面散热的封装结构及其制备方法。The invention relates to the technical field of semiconductor power device packaging, and in particular to a double-sided heat dissipation packaging structure and a preparation method thereof.

背景技术Background technique

现有半导体功率器件封装制造领域,以表贴器件DFN封装为例,一般在Lead frame中设置一个载体(PAD),在载体周围设置引线,MOS管D极通过粘片胶水与载体相接,MOS管S极和G极通过金线、铜线、铝线等键合丝与框架键合,芯片借助载体和外引线引出端与外部电路进行电气连接。In the field of existing semiconductor power device packaging and manufacturing, taking surface mount device DFN packaging as an example, a carrier (PAD) is generally set up in the lead frame, and leads are set around the carrier. The D pole of the MOS tube is connected to the carrier through adhesive glue. The MOS The S and G poles of the tube are bonded to the frame through bonding wires such as gold wires, copper wires, and aluminum wires, and the chip is electrically connected to the external circuit through the carrier and external lead terminals.

目前,采用的传统封装结构,要求芯片的尺寸小于载体的尺寸。随着功率器件封装技术的发展,对产品提出了更高的要求,需要在较小的产品中尽可能封装更大的芯片,以便减小产品外形体积、提供更高的功率、更好的散热效果,以及更小的干扰和更优的产品电性能。采用传统的封装方式不能满足封装更大芯片的使用需求,因此需要一种在同一封装外形下封装更大的芯片的封装结构。Currently, the traditional packaging structure used requires the size of the chip to be smaller than the size of the carrier. With the development of power device packaging technology, higher requirements have been put forward for products. It is necessary to package larger chips in smaller products as much as possible in order to reduce the product outline volume, provide higher power and better heat dissipation. effect, as well as smaller interference and better product electrical performance. The traditional packaging method cannot meet the needs of packaging larger chips, so a packaging structure that can package larger chips in the same package shape is needed.

发明内容Contents of the invention

本发明第一方面提供一种双面散热的封装结构,该结构通过特定的载体粘接芯片的S极和G极,可以根据芯片S极和G极的开窗大小,调整载体的大小,从而适配不同的MOS管芯片尺寸;通过芯片D极在上,配合铜片粘片结构,使产品实现了双面散热,同时获得了与产品上表面相同大小的散热面积,获得极大的散热提升,提高功率器件产品可靠性;同时,通过芯片D极在上,配合铜片粘片结构,使功率器件产品获得了更小的封装体积,更高的产品电压和功率。The first aspect of the present invention provides a double-sided heat dissipation packaging structure. This structure uses a specific carrier to bond the S pole and G pole of the chip. The size of the carrier can be adjusted according to the window size of the S pole and G pole of the chip, thereby Adapt to different MOS tube chip sizes; by placing the D pole of the chip on top and using the copper sheet bonding structure, the product achieves double-sided heat dissipation, and at the same time obtains a heat dissipation area of the same size as the upper surface of the product, greatly improving heat dissipation. , improve the reliability of power device products; at the same time, by placing the D pole of the chip on top and combining with the copper chip bonding structure, the power device products have a smaller packaging volume and higher product voltage and power.

本发明第二方面提供一种上述封装结构的制备方法,该方法通过真空回流焊+锡膏清洗极大的改善了产品的空洞、脏污、分层等异常状况。通过FC上芯+锡膏工艺结合产品结构设计,极大的提升了产品的可靠性和电性能。通过研磨和切割工艺,可以实现产品上表面为整个散热面,极大的降低了产品的Rth,提供了更好的散热效果。A second aspect of the present invention provides a method for preparing the above-mentioned packaging structure. This method greatly improves abnormal conditions such as voids, dirt, and delamination of the product through vacuum reflow + solder paste cleaning. Through the FC core + solder paste process combined with product structure design, the reliability and electrical performance of the product are greatly improved. Through the grinding and cutting process, the upper surface of the product can be the entire heat dissipation surface, which greatly reduces the Rth of the product and provides better heat dissipation effect.

本发明提供的技术方案如下:The technical solutions provided by the invention are as follows:

一种双面散热的封装结构,包括:A double-sided heat dissipation packaging structure, including:

引线框架、芯片、Clip散热铜片以及塑封体;Lead frame, chip, Clip heat dissipation copper sheet and plastic package;

所述引线框架包括框架载体背面、框架D极引线以及框架G极引线,所述框架载体背面两侧分别设置有框架连筋,所述框架载体背面一端连接有一个或多个框架S极引线,所述框架载体背面、所述框架连筋以及所述框架S极引线共面设置且在封装后漏出塑封体,所述框架S极引线塑封后形成S极电极,所述框架载体背面设置有载体S极连接面;The lead frame includes the back of the frame carrier, the D pole lead of the frame and the G pole lead of the frame. There are frame connecting ribs on both sides of the back of the frame carrier. One end of the back of the frame carrier is connected to one or more frame S pole leads. The back side of the frame carrier, the frame connecting ribs and the frame S-pole lead are arranged coplanarly and leak out of the plastic package after packaging. The frame S-pole lead is formed into an S-pole electrode after plastic packaging. A carrier is provided on the back side of the frame carrier. S pole connection surface;

所述框架D极引线设置于所述框架载体背面远离所述框架S极引线一侧,所述框架D极引线的数量为一个或多个,所有所述框架D极引线均设置于同一个引脚连接部上,所述框架D极引线、所述引脚连接部以及所述框架载体背面设置在同一个平面内,且所述框架D极引线与所述引脚连接部塑封后漏出塑封体形成D极电极,所述框架D极引线与所述引脚连接部背面设置有载体D极连接面;The frame D-pole lead is arranged on the back side of the frame carrier away from the frame S-pole lead. The number of the frame D-pole leads is one or more, and all the frame D-pole leads are arranged on the same lead. On the foot connection part, the D pole lead of the frame, the pin connection part and the back side of the frame carrier are arranged in the same plane, and the D pole lead of the frame and the pin connection part are plastic-sealed and leak out of the plastic package. A D-pole electrode is formed, and a carrier D-pole connection surface is provided on the back of the D-pole lead of the frame and the pin connection part;

所述框架G极引线设置于所述框架载体背面与所述框架S极引线同侧,所述框架G极引线与所述框架载体背面共面设置,所述框架G极引线塑封后漏出塑封体形成S极电极,所述框架G极引线背面设置有载体G极连接面;The G-pole lead of the frame is arranged on the same side as the S-pole lead of the frame on the back of the frame carrier. The G-pole lead of the frame is coplanar with the back of the frame carrier. The G-pole lead of the frame leaks out of the plastic package after being plastic-sealed. An S pole electrode is formed, and a carrier G pole connection surface is provided on the back of the G pole lead of the frame;

所述芯片的其中一面分别与所述载体S极连接面、所述载体G极连接面连接,另一面与Clip芯片连接部连接,所述Clip芯片连接部与所述载体D极连接面连接;所述芯片的尺寸大于所述框架载体背面的尺寸;One side of the chip is connected to the S-pole connection surface and the G-pole connection surface of the carrier respectively, and the other side is connected to the Clip chip connection part, and the Clip chip connection part is connected to the D-pole connection surface of the carrier; The size of the chip is larger than the size of the back side of the frame carrier;

所述Clip芯片连接部上设置有Clip散热铜片,所述Clip散热铜片上表面与侧面均漏出塑封体形成Clip散热面;A Clip heat dissipation copper sheet is provided on the Clip chip connection part, and the upper surface and side surfaces of the Clip heat dissipation copper sheet leak out of the plastic package to form a Clip heat dissipation surface;

所述Clip芯片连接部、所述芯片均塑封于所述塑封体内。The Clip chip connection part and the chip are both plastic-sealed in the plastic package body.

进一步地,还包括锡膏,所述锡膏包括芯片S极锡膏、引线D极锡膏、芯片D极锡膏以及G极锡膏;Further, it also includes solder paste, which includes chip S-pole solder paste, lead D-pole solder paste, chip D-pole solder paste and G-pole solder paste;

所述芯片S极锡膏连接所述芯片的S电极和所述载体S极连接面,提供S极电性通路;The S-pole solder paste of the chip connects the S-electrode of the chip and the S-pole connection surface of the carrier to provide an S-pole electrical path;

所述引线D极锡膏连接所述芯片和所述载体D极连接面;The D-pole solder paste of the lead connects the chip and the D-pole connection surface of the carrier;

所述芯片D极锡膏连接所述芯片的D电极和所述Clip芯片连接部,将D极电性传递至Clip铜片,提供D极电性通路;The D-pole solder paste of the chip connects the D-electrode of the chip and the Clip chip connection part, electrically transmits the D-electrode to the Clip copper sheet, and provides an electrical path for the D-electrode;

所述G极锡膏连接所述芯片的G电极和所述载体G极连接面,提供G极电性通路。The G-electrode solder paste connects the G-electrode of the chip and the G-electrode connection surface of the carrier to provide a G-electrode electrical path.

进一步地,所述Clip芯片连接部与所述Clip散热铜片通过过渡圆角连接,所述Clip散热铜片两侧分别设置有Clip开槽,在封装过程中所述Clip散热铜片封装于塑封体内,所述Clip散热铜片通过研磨漏出上表面形成Clip散热面,所述Clip散热铜片侧面通过切割漏出塑封体。Further, the Clip chip connection part and the Clip heat dissipation copper sheet are connected through transition fillets. Clip slots are provided on both sides of the Clip heat dissipation copper sheet. During the packaging process, the Clip heat dissipation copper sheet is packaged in a plastic package. In the body, the upper surface of the Clip heat dissipation copper sheet is exposed through grinding to form a Clip heat dissipation surface, and the side surface of the Clip heat dissipation copper sheet is exposed out of the plastic package through cutting.

进一步地,所述框架载体背面周侧设置有向下的框架载体台阶,所述框架载体台阶背面形成所述载体S极连接面;Further, a downward frame carrier step is provided on the peripheral side of the back of the frame carrier, and the back of the frame carrier step forms the S-pole connection surface of the carrier;

所述引脚连接部周侧设置有向下的引脚连接部台阶,所述引脚连接部台阶背面形成所述载体D极连接面;A downward pin connection step is provided on the peripheral side of the pin connection part, and the back side of the pin connection part step forms the D-pole connection surface of the carrier;

所述框架G极引线周侧设置有向下的G极引线台阶,所述G极引线台阶背面形成所述载体G极连接面。A downward G-pole lead step is provided on the peripheral side of the G-pole lead of the frame, and the back surface of the G-pole lead step forms the G-pole connection surface of the carrier.

进一步地,所述Clip芯片连接部上设置有Clip芯片连接面,所述Clip芯片连接面上设置有Clip芯片连接面圆角。Further, a Clip chip connection surface is provided on the Clip chip connection part, and a Clip chip connection surface fillet is provided on the Clip chip connection surface.

进一步地,所述Clip芯片连接部一端设置有Clip引线连接部,所述Clip引线连接部上设置有Clip芯片连接面圆角。Further, a Clip lead connection part is provided at one end of the Clip chip connection part, and a Clip chip connection surface fillet is provided on the Clip lead connection part.

进一步地,所述Clip芯片连接部和所述Clip引线连接部之间设置有Clip台阶,在Clip台阶的位置形成一个凹槽。Further, a Clip step is provided between the Clip chip connection part and the Clip lead connection part, and a groove is formed at the position of the Clip step.

进一步地,所述框架S极引线的数量为3个,3个所述框架S极引线等间距分布;Further, the number of S-pole leads of the frame is 3, and the three S-pole leads of the frame are equally spaced;

所述框架D极引线的数量为4个,4个所述框架D极引线等间距分布。The number of D-pole leads of the frame is 4, and the four D-pole leads of the frame are equally spaced.

进一步地,所述Clip散热面距离产品轮廓距离为0.1mm。Further, the distance between the Clip heat dissipation surface and the product outline is 0.1 mm.

同时,本发明还提供一种双面散热的封装结构的制备方法,用于制备上述的双面散热的封装结构,包括以下步骤:At the same time, the present invention also provides a method for preparing a double-sided heat dissipation packaging structure, which is used to prepare the above-mentioned double-sided heat dissipation packaging structure, including the following steps:

通过蚀刻工艺得到引线框架;The lead frame is obtained through etching process;

对晶圆进行减薄和划片,划片后的晶圆对MOS管进行倒装上芯,芯片的D极区域镀铜,上芯后进行贴装Clip散热铜片;The wafer is thinned and diced, and the MOS tube is flip-chip-mounted on the diced wafer. The D-pole area of the chip is copper-plated. After the die is mounted, Clip heat-dissipation copper sheets are mounted;

所述Clip散热铜片贴片后进行真空回流焊,再对锡膏挥发物的残留进行清洗;The Clip heat dissipation copper sheet is vacuum reflowed after being patched, and then the residue of solder paste volatiles is cleaned;

对框架载体背面进行贴膜,塑封前进行清洗,对产品进行塑封,塑封后进行后固化;Apply film to the back of the frame carrier, clean it before plastic sealing, plastic seal the product, and post-cure after plastic sealing;

后固化后进行热煮软化,去溢料,软化后进行电镀,电镀后进行烘烤,烘烤结束后对产品进行研磨,漏出Clip散热铜片;After post-curing, boil and soften, remove overflow, electroplating after softening, bake after electroplating, grind the product after baking to remove Clip heat dissipation copper sheets;

漏出Clip散热铜片后进行打印,再切割分离,切割成单颗产品后进行产品测试,测试合格后进行包装入库。After the Clip heat dissipation copper sheet is leaked, it is printed, then cut and separated. After cutting into individual products, the product is tested. After passing the test, it is packaged and stored in the warehouse.

与现有技术相比,本发明的有益效果是:Compared with the prior art, the beneficial effects of the present invention are:

1.本发明将引线框架载体作为S极和G极直接引出,D极通过Clip散热铜片引出,此结构大大的减小了电性传递路径长度,增大导电截面积,极大的降低了产品的内阻,提高了功率器件产品的电性能;该结构通过特定的载体粘接芯片的S极和G极,可以根据芯片S极和G极的开窗大小,调整载体的大小,从而适配不同的MOS管芯片尺寸;1. The present invention uses the lead frame carrier as the S pole and the G pole to be directly led out, and the D pole is led out through the Clip heat dissipation copper sheet. This structure greatly reduces the length of the electrical transmission path, increases the conductive cross-sectional area, and greatly reduces the The internal resistance of the product improves the electrical performance of the power device product; this structure uses a specific carrier to bond the S pole and G pole of the chip, and the size of the carrier can be adjusted according to the window size of the S pole and G pole of the chip, thereby adapting to Equipped with different MOS tube chip sizes;

2.本发明通过围绕框架载体背面外轮廓一圈向下设置一个框架载体台阶,此台阶背面为载体S极连接面,可以根据芯片的S极开窗大小进行调整,框架载体台阶可以增加载体与塑封料的结合力,提高封装强度;2. In the present invention, a frame carrier step is set downward around the outer contour of the back of the frame carrier. The back of this step is the S-pole connection surface of the carrier. It can be adjusted according to the size of the S-pole window of the chip. The frame carrier step can increase the number of connections between the carrier and the carrier. The bonding force of plastic sealing materials improves packaging strength;

3.本发明通过三个电极通过锡膏粘片+铜片的结构,优化电性传播路径距离和传播截面积,降低了功率器件产品的内阻;3. The present invention optimizes the electrical propagation path distance and propagation cross-sectional area through the structure of the solder paste sheet + copper sheet through three electrodes, and reduces the internal resistance of the power device product;

4.本发明通过芯片D极在上,配合铜片粘片结构,使产品实现了双面散热,同时获得了与产品上表面相同大小的散热面积,获得了极大的散热提升,提高了功率器件产品可靠性。4. This invention enables the product to achieve double-sided heat dissipation by placing the D-pole of the chip on the top and using the copper sheet bonding structure. At the same time, the heat dissipation area is the same size as the upper surface of the product, which greatly improves heat dissipation and improves power. Device product reliability.

5.本发明通过芯片D极在上,配合铜片粘片结构,使功率器件产品获得了更小的封装体积,更高的产品电压和功率;5. In this invention, by placing the D pole of the chip on top and cooperating with the copper sheet bonding structure, the power device product obtains a smaller packaging volume and higher product voltage and power;

6.本发明通过双面散热的封装结构的制备方法,提升了产品的性能和生产良率;6. The present invention improves product performance and production yield through the preparation method of a double-sided heat dissipation packaging structure;

7.本发明提供的双面散热的封装结构的制备方法,通过真空回流焊+锡膏清洗极大的改善了产品的空洞、脏污、分层等异常。通过FC上芯+锡膏工艺结合产品结构设计,极大的提升了产品的可靠性和电性能。通过研磨和切割工艺,可以实现产品上表面为整个散热面,极大的降低了产品的Rth,提供了更好的散热效果。7. The method for preparing a double-sided heat-dissipating packaging structure provided by the present invention greatly improves product abnormalities such as voids, dirt, and delamination through vacuum reflow + solder paste cleaning. Through the FC core + solder paste process combined with product structure design, the reliability and electrical performance of the product are greatly improved. Through the grinding and cutting process, the upper surface of the product can be the entire heat dissipation surface, which greatly reduces the Rth of the product and provides better heat dissipation effect.

附图说明Description of the drawings

图1为本发明实施例中双面散热的封装结构的内部结构示意图;Figure 1 is a schematic diagram of the internal structure of a double-sided heat dissipation package structure in an embodiment of the present invention;

图2为本发明实施例中双面散热的封装结构的引线框架结构示意图;Figure 2 is a schematic diagram of the lead frame structure of a double-sided heat dissipation package structure in an embodiment of the present invention;

图3为本发明实施例中双面散热的封装结构的内部结构侧视图;Figure 3 is a side view of the internal structure of the double-sided heat dissipation packaging structure in the embodiment of the present invention;

图4为本发明实施例中Clip散热铜片结构示意图;Figure 4 is a schematic structural diagram of the Clip heat dissipation copper sheet in the embodiment of the present invention;

图5为本发明实施例中双面散热的封装结构的背面外形图;Figure 5 is a backside outline view of a double-sided heat dissipation packaging structure in an embodiment of the present invention;

图6为本发明实施例中双面散热的封装结构的正面外形图。FIG. 6 is a front appearance view of a double-sided heat dissipation packaging structure in an embodiment of the present invention.

附图标记如下:The reference numbers are as follows:

1-框架载体背面;2-框架连筋;3-框架D极引线;4-引脚连接部;5-引脚连接部台阶;6-框架S极引线;7-框架载体台阶;8-芯片S极锡膏;9-框架G极引线;10-G极引线台阶;11-G极锡膏;12-芯片;13-芯片D极锡膏;14-引线D极锡膏;15-Clip芯片连接面;16-Clip引线连接面;17-Clip台阶;18-Clip引线连接部;19-Clip芯片连接部;20-Clip散热铜片;21-Clip芯片连接面圆角;22-过渡圆角;23-Clip散热面;24-塑封体;25-载体S极连接面;26-载体D极连接面;27-载体G极连接面;28-Clip开槽。1-Back side of the frame carrier; 2-Frame reinforcement; 3-Frame D pole lead; 4-Pin connection part; 5-Pin connection part step; 6-Frame S pole lead; 7-Frame carrier step; 8-Chip S pole solder paste; 9 - frame G pole lead; 10 - G pole lead step; 11 - G pole solder paste; 12 - chip; 13 - chip D pole solder paste; 14 - lead D pole solder paste; 15 - Clip chip Connection surface; 16-Clip lead connection surface; 17-Clip step; 18-Clip lead connection part; 19-Clip chip connection part; 20-Clip heat dissipation copper sheet; 21-Clip chip connection surface fillet; 22-Transition fillet ; 23-Clip heat dissipation surface; 24-plastic package; 25-carrier S-pole connection surface; 26-carrier D-pole connection surface; 27-carrier G-pole connection surface; 28-Clip slotting.

具体实施方式Detailed ways

为使本申请实施例的目的、技术方案和优点更加清楚,下面将结合本申请实施例中的附图,对本申请实施例中的技术方案进行清楚、完整地描述。显然,下面所描述的实施例是本申请的一部分实施例,而不是全部的实施例。通常在此处附图中描述和示出的本申请实施例的组件可以以各种不同的配置来布置和设计。In order to make the purpose, technical solutions and advantages of the embodiments of the present application clearer, the technical solutions in the embodiments of the present application will be clearly and completely described below in conjunction with the drawings in the embodiments of the present application. Obviously, the embodiments described below are some of the embodiments of the present application, but not all of the embodiments. The components of the embodiments of the present application generally described and illustrated in the figures herein may be arranged and designed in a variety of different configurations.

因此,以下结合附图提供的本申请实施例的详细描述旨在仅仅表示本申请的选定实施例,并非限制本申请要求保护的范围。基于本申请中的实施例,本领域普通技术人员在没有作出创造性劳动的前提下所获得的其他所有实施例,都属于本申请保护的范围。Accordingly, the detailed description of the embodiments of the present application provided below in connection with the appended drawings is intended to represent only selected embodiments of the present application and is not intended to limit the scope of the present application. Based on the embodiments in this application, all other embodiments obtained by those of ordinary skill in the art without any creative work shall fall within the scope of protection of this application.

在本发明的实施方式的描述中,需要说明的是,除非另有明确的规定和限定,术语“设置”、“安装”、“相连”、“连接”应做广义理解,例如,可以是固定连接,也可以是可拆卸连接,或一体地连接;可以是机械连接,也可以是电连接或可以相互通讯;可以是直接相连,也可以通过中间媒介间接相连,可以是两个元件内部的连通或两个元件的相互作用关系。对于本领域的普通技术人员而言,可以根据具体情况理解上述术语在本发明的实施方式中的具体含义。In the description of the embodiments of the present invention, it should be noted that, unless otherwise expressly specified and limited, the terms "setting", "installation", "connecting" and "connecting" should be understood in a broad sense. For example, they can be fixed The connection can also be a detachable connection or an integral connection; it can be a mechanical connection, an electrical connection or mutual communication; it can be a direct connection or an indirect connection through an intermediary, or it can be an internal connection between two components. or the interaction between two components. For those of ordinary skill in the art, the specific meanings of the above terms in the embodiments of the present invention can be understood according to specific circumstances.

参阅图1-图6,本发明提供了一种双面散热的封装结构,包括引线框架、芯片12、Clip散热铜片20以及塑封体24。Referring to FIGS. 1 to 6 , the present invention provides a double-sided heat dissipation packaging structure, including a lead frame, a chip 12 , a Clip heat dissipation copper sheet 20 and a plastic package 24 .

引线框架包括框架载体背面1、框架D极引线3以及框架G极引线9,框架载体背面1两侧分别设置有框架连筋2,框架载体背面1一端连接有一个或多个框架S极引线6,框架载体背面1、框架连筋2以及框架S极引线6共面设置且在封装后漏出塑封体24,框架S极引线6塑封后形成该封装结构的S极电极,框架载体背面1设置有载体S极连接面25。The lead frame includes the back side of the frame carrier 1, the D pole lead 3 of the frame, and the G pole lead 9 of the frame. There are frame connecting ribs 2 on both sides of the back side 1 of the frame carrier. One end of the back side 1 of the frame carrier is connected to one or more frame S pole leads 6. , the back side of the frame carrier 1, the frame connecting ribs 2 and the frame S-pole lead 6 are coplanarly arranged and leak out of the plastic package 24 after packaging. The frame S-pole lead 6 forms the S-pole electrode of the package structure after plastic packaging. The back side of the frame carrier 1 is provided with Carrier S pole connection surface 25.

本实施例中,引线框架载体背面1作为产品的背面,通过焊锡将产品背面焊接于PCB电路板上,通过框架载体背面1、框架D极引线3、框架G极引线9将MOS管三个电极引出。In this embodiment, the back side 1 of the lead frame carrier is used as the back side of the product. The back side of the product is welded to the PCB circuit board through solder. The three electrodes of the MOS tube are connected through the back side 1 of the frame carrier, the D electrode lead 3 of the frame, and the G electrode lead 9 of the frame. lead out.

框架D极引线3设置于框架载体背面1远离框架S极引线6一侧,框架D极引线3的数量为一个或多个,所有框架D极引线3均设置于同一个引脚连接部4上,框架D极引线3、引脚连接部4以及框架载体背面1设置在同一个平面内,且框架D极引线3与引脚连接部4塑封后漏出塑封体24形成该封装结构的D极电极,框架D极引线3与引脚连接部4的背面设置有载体D极连接面26。The D pole lead 3 of the frame is arranged on the back side of the frame carrier 1 away from the S pole lead 6 of the frame. The number of the D pole leads 3 of the frame is one or more. All the D pole leads 3 of the frame are arranged on the same pin connection part 4 , the D-pole lead 3 of the frame, the pin connection part 4 and the back side 1 of the frame carrier are arranged in the same plane, and the D-pole lead 3 and the pin connection part 4 of the frame are plastic-sealed and leak out of the plastic package 24 to form the D-pole electrode of the package structure. , a carrier D-pole connection surface 26 is provided on the back of the frame D-pole lead 3 and the pin connection part 4 .

框架G极引线9设置于框架载体背面1与框架S极引线6相同一侧,框架G极引线9与框架载体背面1共面设置,框架G极引线9塑封后漏出塑封体24形成S极电极,框架G极引线9背面设置有载体G极连接面27。The frame G pole lead 9 is arranged on the same side of the frame carrier back 1 and the frame S pole lead 6. The frame G pole lead 9 is coplanar with the frame carrier back 1. After the frame G pole lead 9 is plastic-sealed, it leaks out of the plastic package 24 to form the S pole electrode. , the back side of the frame G pole lead 9 is provided with a carrier G pole connection surface 27.

芯片12的其中一面分别与载体S极连接面25、载体G极连接面27连接,另一面与Clip芯片连接部19连接,Clip芯片连接部19与载体D极连接面26连接;芯片12的尺寸大于框架载体背面1的尺寸。One side of the chip 12 is connected to the carrier S-pole connection surface 25 and the carrier G-pole connection surface 27 respectively, and the other side is connected to the Clip chip connection part 19, and the Clip chip connection part 19 is connected to the carrier D-pole connection surface 26; the size of the chip 12 Larger than the dimensions of the back side 1 of the frame carrier.

Clip芯片连接部19上设置有Clip散热铜片20,Clip散热铜片20上表面与侧面均漏出塑封体24形成Clip散热面23,如图6所示。A Clip heat dissipation copper sheet 20 is provided on the Clip chip connection part 19. The upper surface and side surfaces of the Clip heat dissipation copper sheet 20 leak out of the plastic package 24 to form a Clip heat dissipation surface 23, as shown in FIG. 6 .

Clip芯片连接部19、芯片12均塑封于塑封体24内。该封装结构经过封装后,框架载体背面1从塑封体24中漏出的一面定义为产品的背面,具体外形结构如图5所示;Clip散热铜片20从塑封体24中漏出的一面定义为产品的正面,该产品除了框架载体背面1、框架连筋2、框架D极引线3、引脚连接部4、框架S极引线6以及框架G极引线9从背面漏出,Clip散热铜片20从正面漏出外,其余结构均封装在塑封体24内。The Clip chip connection part 19 and the chip 12 are both plastic-sealed in the plastic package 24 . After the package structure is encapsulated, the side of the frame carrier back 1 that leaks from the plastic package 24 is defined as the back of the product. The specific appearance structure is shown in Figure 5; the side of the Clip heat dissipation copper sheet 20 that leaks from the plastic package 24 is defined as the product. On the front side of the product, in addition to the back side of the frame carrier 1, the frame connecting ribs 2, the frame D pole lead 3, the pin connection part 4, the frame S pole lead 6 and the frame G pole lead 9 leak out from the back, the Clip heat dissipation copper sheet 20 leaks out from the front Except for the leakage, the rest of the structure is encapsulated in the plastic package 24 .

可选的,还包括锡膏,锡膏包括芯片S极锡膏8、引线D极锡膏14、芯片D极锡膏13以及G极锡膏11。芯片S极锡膏8连接芯片12的S电极和载体S极连接面25,提供S极电性通路。引线D极锡膏14连接芯片12和载体D极连接面26。芯片D极锡膏13连接芯片12的D电极和Clip芯片连接部19,将D极电性传递至Clip散热铜片20,提供D极电性通路。G极锡膏11连接芯片12的G电极和载体G极连接面27,提供G极电性通路。Optionally, solder paste is also included, which includes chip S-pole solder paste 8, lead D-pole solder paste 14, chip D-pole solder paste 13 and G-pole solder paste 11. The chip S-pole solder paste 8 connects the S-electrode of the chip 12 and the carrier S-pole connection surface 25 to provide an S-pole electrical path. The lead D-pole solder paste 14 connects the chip 12 and the carrier D-pole connection surface 26 . The chip D electrode solder paste 13 connects the D electrode of the chip 12 and the Clip chip connection part 19, electrically transmits the D electrode to the Clip heat dissipation copper sheet 20, and provides an electrical path for the D electrode. The G-electrode solder paste 11 connects the G-electrode of the chip 12 and the carrier G-electrode connection surface 27 to provide a G-electrode electrical path.

与传统功率器件封装不同,传统封装是引线框架载体作为芯片的D极引出端,S极和G极通过焊线键合的方式引出,本发明将引线框架载体作为S极和G极通过锡膏粘片直接引出,D极通过Clip散热铜片20引出,此结构大大的减小了电性传递路径长度,增大导电截面积,极大的降低了产品的内阻,提高了功率器件产品的电性能。Different from traditional power device packaging, the traditional package uses the lead frame carrier as the D pole lead-out terminal of the chip, and the S pole and G pole are led out through wire bonding. In the present invention, the lead frame carrier serves as the S pole and G pole through solder paste. The adhesive sheet is directly led out, and the D pole is led out through the Clip heat dissipation copper sheet 20. This structure greatly reduces the length of the electrical transmission path, increases the conductive cross-sectional area, greatly reduces the internal resistance of the product, and improves the efficiency of the power device product. electrical properties.

如图3、图4所示,Clip芯片连接部19与Clip散热铜片20通过过渡圆角22连接,Clip散热铜片20两侧分别设置有Clip开槽28,在封装过程中Clip散热铜片20封装于塑封体24内,Clip散热铜片20通过研磨漏出上表面形成Clip散热面23,Clip散热铜片20侧面通过切割从塑封体24中漏出。As shown in Figure 3 and Figure 4, the Clip chip connection part 19 and the Clip heat dissipation copper sheet 20 are connected through the transition fillet 22. Clip heat dissipation copper sheet 20 is provided with Clip slots 28 on both sides. During the packaging process, the Clip heat dissipation copper sheet 20 is encapsulated in a plastic package 24. The Clip heat dissipation copper sheet 20 is exposed from the upper surface through grinding to form a Clip heat dissipation surface 23. The side surface of the Clip heat dissipation copper sheet 20 is exposed from the plastic package 24 through cutting.

如图1所示,框架载体背面1的周侧设置有向下的框架载体台阶7,框架载体台阶7背面形成载体S极连接面25。As shown in FIG. 1 , a downward frame carrier step 7 is provided on the peripheral side of the back surface 1 of the frame carrier. The back surface of the frame carrier step 7 forms a carrier S-pole connecting surface 25 .

本实施例中,围绕框架载体背面1外轮廓一圈向下设置一个框架载体台阶7,此台阶背面为载体S极连接面25,可以根据芯片12的S极开窗大小进行调整。框架载体台阶7可以增加载体与塑封料的结合力,提高封装强度。In this embodiment, a frame carrier step 7 is set downward around the outer contour of the back side 1 of the frame carrier. The back side of this step is the carrier S-pole connection surface 25, which can be adjusted according to the size of the S-pole window of the chip 12. The frame carrier step 7 can increase the binding force between the carrier and the plastic sealing material and improve the packaging strength.

引脚连接部4周侧设置有向下的引脚连接部台阶5,引脚连接部台阶5的背面形成载体D极连接面26。A downward pin connection step 5 is provided on the four peripheral sides of the pin connection part, and the back surface of the pin connection step 5 forms a carrier D-pole connection surface 26 .

本实施例中,围绕引脚连接部4轮廓一圈向下设置一个引脚连接部台阶5,引脚连接部台阶5可以增加引脚连接部4与塑封料的结合力,提高封装强度。In this embodiment, a pin connection step 5 is set downward around the outline of the pin connection part 4. The pin connection step 5 can increase the binding force between the pin connection part 4 and the plastic packaging material and improve the packaging strength.

框架G极引线9周侧设置有向下的G极引线台阶10,G极引线台阶10的背面形成载体G极连接面27。A downward G pole lead step 10 is provided on the peripheral side of the frame G pole lead 9, and the back side of the G pole lead step 10 forms a carrier G pole connection surface 27.

本实施例中,围绕框架G极引线9外轮廓设置一个向下的G极引线台阶10,此台阶背面为载体G极连接面27,G极引线台阶10可以增加框架G极引线9与塑封料的结合力,提高封装强度。In this embodiment, a downward G-pole lead step 10 is set around the outer contour of the frame G-pole lead 9. The back of this step is the carrier G-pole connection surface 27. The G-pole lead step 10 can increase the connection between the frame G-pole lead 9 and the plastic packaging material. The bonding force improves the packaging strength.

如图3所示,Clip芯片连接部19上设置有Clip芯片连接面15,Clip芯片连接面15上设置有Clip芯片连接面圆角21。As shown in FIG. 3 , the Clip chip connection portion 19 is provided with a Clip chip connection surface 15 , and the Clip chip connection surface 15 is provided with a Clip chip connection surface fillet 21 .

本实施例中,通过在Clip芯片连接部19上设置Clip芯片连接面15,Clip芯片连接面15上设置Clip芯片连接面圆角21,避免粘接过程中划伤芯片12。In this embodiment, the Clip chip connection surface 15 is provided on the Clip chip connection part 19 and the Clip chip connection surface fillet 21 is provided on the Clip chip connection surface 15 to avoid scratching the chip 12 during the bonding process.

可选的,Clip芯片连接部19一端设置有Clip引线连接部18,Clip引线连接部18上设置有Clip芯片连接面圆角21。Optionally, one end of the Clip chip connection part 19 is provided with a Clip lead connection part 18, and the Clip lead connection part 18 is provided with a Clip chip connection surface fillet 21.

本实施例中,通过在Clip芯片连接部19一端设置一个凸台状的Clip引线连接部18,凸台顶部为Clip引线连接面16,在Clip引线连接面16上设置Clip芯片连接面圆角21避免粘接过程中划伤芯片12。In this embodiment, a boss-shaped Clip lead connection part 18 is provided at one end of the Clip chip connection part 19. The top of the boss is the Clip lead connection surface 16, and the Clip chip connection surface fillet 21 is provided on the Clip lead connection surface 16. Avoid scratching the chip 12 during the bonding process.

可选的,Clip芯片连接部19和Clip引线连接部18之间设置有Clip台阶17,在Clip台阶17的位置形成一个凹槽。Optionally, a Clip step 17 is provided between the Clip chip connection part 19 and the Clip lead connection part 18, and a groove is formed at the position of the Clip step 17.

本实施例中,在Clip芯片连接部19和Clip引线连接部18之间设置一个Clip台阶17,在台阶位置形成一个凹槽,此凹槽可以为芯片12让位,保证塑封料填充。In this embodiment, a Clip step 17 is provided between the Clip chip connection part 19 and the Clip lead connection part 18, and a groove is formed at the step position. This groove can make way for the chip 12 to ensure that the plastic packaging material is filled.

可选的,框架S极引线6的数量为3个,3个框架S极引线6等间距分布。Optionally, the number of frame S pole leads 6 is three, and the three frame S pole leads 6 are equally spaced.

框架D极引线3的数量为4个,4个框架D极引线3等间距分布。The number of frame D-pole leads 3 is 4, and the four frame D-pole leads 3 are equally spaced.

可选的,Clip散热面23距离产品轮廓距离最小为0.1mm。Optionally, the minimum distance between the Clip heat dissipation surface 23 and the product outline is 0.1mm.

本发明为芯片S极和芯片G极开窗区域通过锡膏粘接在引线框架载体上,可以做到芯片12尺寸大于载体尺寸,只需要设计芯片12边缘到塑封体24有安全的包封尺寸即可,最小为0.1mm,所以同一封装外形尺寸下的MOS管,可以封装更大尺寸的芯片,从而得到更大的产品电压和功率,提供更大的芯片12尺寸选择范围,反向来说可以做到相同的产品性能下,得到更小的功率器件产品的封装尺寸。In the present invention, the chip S-pole and chip G-pole window areas are bonded to the lead frame carrier through solder paste. The size of the chip 12 can be larger than the size of the carrier. It only needs to design a safe packaging size from the edge of the chip 12 to the plastic package 24. That’s it, the minimum is 0.1mm, so MOS tubes under the same package size can package larger chips, thereby obtaining greater product voltage and power, and providing a larger selection range of chip 12 sizes. Inversely speaking, it can Under the same product performance, a smaller power device product package size can be obtained.

本发明提供的上述双面散热的封装结构的电路连接关系如下:The circuit connection relationship of the above-mentioned double-sided heat dissipation packaging structure provided by the present invention is as follows:

S极通路:芯片S极开窗→芯片S极锡膏8→载体S极连接面25→框架载体背面1、框架S极引线6→焊接至PCB电路板。S pole path: chip S pole opening → chip S pole solder paste 8 → carrier S pole connection surface 25 → frame carrier backside 1, frame S pole lead 6 → soldered to the PCB circuit board.

D极通路:芯片D极开窗→芯片D极锡膏13→Clip芯片连接面15→Clip芯片连接部19→Clip散热铜片20→Clip引线连接部18→Clip引线连接面16→引线D极锡膏14→载体D极连接面26→引脚连接部4、框架D极引线3→焊接至PCB电路板。D pole path: chip D pole opening window → chip D pole solder paste 13 → Clip chip connection surface 15 → Clip chip connection part 19 → Clip heat dissipation copper sheet 20 → Clip lead connection part 18 → Clip lead connection surface 16 → lead D pole Solder paste 14→carrier D-pole connection surface 26→pin connection part 4, frame D-pole lead 3→soldered to the PCB circuit board.

G极通路:芯片G极开窗→G极锡膏11→载体G极连接面27→框架G极引线9→焊接至PCB电路板。G pole path: chip G pole opening → G pole solder paste 11 → carrier G pole connection surface 27 → frame G pole lead 9 → soldered to the PCB circuit board.

本发明提供一种双面散热的封装结构的制备方法,用于制备上述的双面散热的封装结构,该制备方法的封装流程为:晶圆减薄→晶圆划片→引线框架上料→锡膏印刷→FC上芯→锡膏印刷→Clip贴装→真空回流焊→锡膏清洗→框架贴膜→塑封前清洗→塑封→后固化→热煮软化→去溢料→电镀→烘烤→研磨→打印→切割分离→测试→外检包装→入库,具体包括以下步骤:The present invention provides a method for preparing a double-sided heat dissipation packaging structure, which is used to prepare the above-mentioned double-sided heat dissipation packaging structure. The packaging process of the preparation method is: wafer thinning → wafer dicing → lead frame loading → Solder paste printing → FC core mounting → Solder paste printing → Clip mounting → Vacuum reflow soldering → Solder paste cleaning → Frame film → Cleaning before plastic sealing → Plastic sealing → Post-curing → Hot boiling and softening → Overflow removal → Electroplating → Baking → Grinding → Print → Cut and separate → Test → External inspection and packaging → Warehousing, including the following steps:

通过蚀刻工艺得到引线框架;The lead frame is obtained through etching process;

对晶圆进行减薄和划片,划片后的晶圆对MOS管进行倒装上芯,芯片的D极区域镀铜,上芯后进行贴装Clip散热铜片20;The wafer is thinned and diced, and the MOS tube is flip-chip mounted on the diced wafer. The D-pole area of the chip is plated with copper. After the wafer is mounted, a Clip heat dissipation copper sheet 20 is mounted;

Clip散热铜片20贴片后进行真空回流焊,再对锡膏挥发物的残留进行清洗;After the Clip heat dissipation copper sheet 20 is mounted, it is vacuum reflowed, and then the residue of solder paste volatiles is cleaned;

对框架载体背面1进行贴膜,进行清洗后,对产品进行塑封,塑封后进行后固化;Apply a film to the back side 1 of the frame carrier, clean it, and then plastic seal the product. After plastic sealing, perform post-curing;

后固化后进行热煮软化,去溢料,软化后进行电镀,电镀后进行烘烤,烘烤结束后对产品进行研磨,漏出Clip散热铜片20;After post-curing, heat boiling is performed to soften, and overflow is removed. After softening, electroplating is performed. After electroplating, baking is performed. After baking, the product is ground to remove Clip heat dissipation copper sheets 20;

漏出Clip散热铜片20后进行打印,再切割分离,切割成单颗产品后进行产品测试,测试合格后进行包装入库。After the Clip heat dissipation copper sheet 20 is leaked, it is printed, then cut and separated. After cutting into single products, the product is tested. After passing the test, it is packaged and stored in the warehouse.

本发明提供的双面散热的封装结构的制备方法,通过真空回流焊+锡膏清洗极大的改善了产品的空洞、脏污、分层等异常状况。通过FC上芯+锡膏工艺结合产品结构设计,极大的提升了产品的可靠性和电性能。通过研磨和切割工艺,可以实现产品上表面为整个散热面,极大的降低了产品的Rth,提供了更好的散热效果。The method for preparing a double-sided heat-dissipating packaging structure provided by the present invention greatly improves abnormal conditions such as voids, dirt, and delamination of the product through vacuum reflow soldering and solder paste cleaning. Through the FC core + solder paste process combined with product structure design, the reliability and electrical performance of the product are greatly improved. Through the grinding and cutting process, the upper surface of the product can be the entire heat dissipation surface, which greatly reduces the Rth of the product and provides better heat dissipation effect.

以上所述,仅为本申请的最优具体实施方式,但本申请的保护范围并不局限于此,任何在本申请揭露的技术范围内的变化或替换,都应涵盖在本申请的保护范围之内。因此,本申请的保护范围应以所述权利要求的保护范围为准。The above are only the best specific implementations of the present application, but the protection scope of the present application is not limited thereto. Any changes or substitutions within the technical scope disclosed in the present application shall be covered by the protection scope of the present application. within. Therefore, the protection scope of this application should be subject to the protection scope of the claims.

Claims (10)

1.一种双面散热的封装结构,其特征在于,包括:1. A double-sided heat dissipation packaging structure, characterized by including: 引线框架、芯片、Clip散热铜片以及塑封体;Lead frame, chip, Clip heat dissipation copper sheet and plastic package; 所述引线框架包括框架载体背面、框架D极引线以及框架G极引线,所述框架载体背面两侧分别设置有框架连筋,所述框架载体背面一端连接有一个或多个框架S极引线,所述框架载体背面、所述框架连筋以及所述框架S极引线共面设置且在封装后漏出塑封体,所述框架S极引线塑封后形成S极电极,所述框架载体背面设置有载体S极连接面;The lead frame includes the back of the frame carrier, the D pole lead of the frame and the G pole lead of the frame. There are frame connecting ribs on both sides of the back of the frame carrier. One end of the back of the frame carrier is connected to one or more frame S pole leads. The back side of the frame carrier, the frame connecting ribs and the frame S-pole lead are arranged coplanarly and leak out of the plastic package after packaging. The frame S-pole lead is formed into an S-pole electrode after plastic packaging. A carrier is provided on the back side of the frame carrier. S pole connection surface; 所述框架D极引线设置于所述框架载体背面远离所述框架S极引线一侧,所述框架D极引线的数量为一个或多个,所有所述框架D极引线均设置于同一个引脚连接部上,所述框架D极引线、所述引脚连接部以及所述框架载体背面设置在同一个平面内,且所述框架D极引线与所述引脚连接部塑封后漏出塑封体形成D极电极,所述框架D极引线与所述引脚连接部背面设置有载体D极连接面;The frame D-pole lead is arranged on the back side of the frame carrier away from the frame S-pole lead. The number of the frame D-pole leads is one or more, and all the frame D-pole leads are arranged on the same lead. On the foot connection part, the D pole lead of the frame, the pin connection part and the back side of the frame carrier are arranged in the same plane, and the D pole lead of the frame and the pin connection part are plastic-sealed and leak out of the plastic package. A D-pole electrode is formed, and a carrier D-pole connection surface is provided on the back of the D-pole lead of the frame and the pin connection part; 所述框架G极引线设置于所述框架载体背面与所述框架S极引线同侧,所述框架G极引线与所述框架载体背面共面设置,所述框架G极引线塑封后漏出塑封体形成S极电极,所述框架G极引线背面设置有载体G极连接面;The G-pole lead of the frame is arranged on the same side as the S-pole lead of the frame on the back of the frame carrier. The G-pole lead of the frame is coplanar with the back of the frame carrier. The G-pole lead of the frame leaks out of the plastic package after being plastic-sealed. An S pole electrode is formed, and a carrier G pole connection surface is provided on the back of the G pole lead of the frame; 所述芯片的其中一面分别与所述载体S极连接面、所述载体G极连接面连接,另一面与Clip芯片连接部连接,所述Clip芯片连接部与所述载体D极连接面连接;所述芯片的尺寸大于所述框架载体背面的尺寸;One side of the chip is connected to the S-pole connection surface and the G-pole connection surface of the carrier respectively, and the other side is connected to the Clip chip connection part, and the Clip chip connection part is connected to the D-pole connection surface of the carrier; The size of the chip is larger than the size of the back side of the frame carrier; 所述Clip芯片连接部上设置有Clip散热铜片,所述Clip散热铜片上表面与侧面均漏出塑封体形成Clip散热面;A Clip heat dissipation copper sheet is provided on the Clip chip connection part, and the upper surface and side surfaces of the Clip heat dissipation copper sheet leak out of the plastic package to form a Clip heat dissipation surface; 所述Clip芯片连接部、所述芯片均塑封于所述塑封体内。The Clip chip connection part and the chip are both plastic-sealed in the plastic package body. 2.根据权利要求1所述的双面散热的封装结构,其特征在于:2. The double-sided heat dissipation packaging structure according to claim 1, characterized in that: 还包括锡膏,所述锡膏包括芯片S极锡膏、引线D极锡膏、芯片D极锡膏以及G极锡膏;It also includes solder paste, which includes chip S-pole solder paste, lead D-pole solder paste, chip D-pole solder paste, and chip G-pole solder paste; 所述芯片S极锡膏连接所述芯片的S电极和所述载体S极连接面,提供S极电性通路;The S-pole solder paste of the chip connects the S-electrode of the chip and the S-pole connection surface of the carrier to provide an S-pole electrical path; 所述引线D极锡膏连接所述芯片和所述载体D极连接面;The D-pole solder paste of the lead connects the chip and the D-pole connection surface of the carrier; 所述芯片D极锡膏连接所述芯片的D电极和所述Clip芯片连接部,将D极电性传递至Clip铜片,提供D极电性通路;The D-pole solder paste of the chip connects the D-electrode of the chip and the Clip chip connection part, electrically transmits the D-electrode to the Clip copper sheet, and provides an electrical path for the D-electrode; 所述G极锡膏连接所述芯片的G电极和所述载体G极连接面,提供G极电性通路。The G-electrode solder paste connects the G-electrode of the chip and the G-electrode connection surface of the carrier to provide a G-electrode electrical path. 3.根据权利要求1或2所述的双面散热的封装结构,其特征在于:3. The double-sided heat dissipation packaging structure according to claim 1 or 2, characterized in that: 所述Clip芯片连接部与所述Clip散热铜片通过过渡圆角连接,所述Clip散热铜片两侧分别设置有Clip开槽,在封装过程中所述Clip散热铜片封装于塑封体内,所述Clip散热铜片通过研磨漏出上表面形成Clip散热面,所述Clip散热铜片侧面通过切割漏出塑封体。The Clip chip connection part and the Clip heat dissipation copper sheet are connected through transition fillets. Clip slots are provided on both sides of the Clip heat dissipation copper sheet. During the packaging process, the Clip heat dissipation copper sheet is packaged in a plastic package. The upper surface of the Clip heat dissipation copper sheet is exposed through grinding to form a Clip heat dissipation surface, and the side surface of the Clip heat dissipation copper sheet is exposed out of the plastic package through cutting. 4.根据权利要求1所述的双面散热的封装结构,其特征在于:4. The double-sided heat dissipation packaging structure according to claim 1, characterized in that: 所述框架载体背面周侧设置有向下的框架载体台阶,所述框架载体台阶背面形成所述载体S极连接面;A downward frame carrier step is provided on the back side of the frame carrier, and the back side of the frame carrier step forms the S-pole connection surface of the carrier; 所述引脚连接部周侧设置有向下的引脚连接部台阶,所述引脚连接部台阶背面形成所述载体D极连接面;A downward pin connection step is provided on the peripheral side of the pin connection part, and the back side of the pin connection part step forms the D-pole connection surface of the carrier; 所述框架G极引线周侧设置有向下的G极引线台阶,所述G极引线台阶背面形成所述载体G极连接面。A downward G-pole lead step is provided on the peripheral side of the G-pole lead of the frame, and the back surface of the G-pole lead step forms the G-pole connection surface of the carrier. 5.根据权利要求1所述的双面散热的封装结构,其特征在于:5. The double-sided heat dissipation packaging structure according to claim 1, characterized in that: 所述Clip芯片连接部上设置有Clip芯片连接面,所述Clip芯片连接面上设置有Clip芯片连接面圆角。The Clip chip connection part is provided with a Clip chip connection surface, and the Clip chip connection surface is provided with a Clip chip connection surface fillet. 6.根据权利要求5所述的双面散热的封装结构,其特征在于:6. The double-sided heat dissipation packaging structure according to claim 5, characterized in that: 所述Clip芯片连接部一端设置有Clip引线连接部,所述Clip引线连接部上设置有Clip芯片连接面圆角。A Clip lead connection part is provided at one end of the Clip chip connection part, and a Clip chip connection surface fillet is provided on the Clip lead connection part. 7.根据权利要求6所述的双面散热的封装结构,其特征在于:7. The double-sided heat dissipation packaging structure according to claim 6, characterized in that: 所述Clip芯片连接部和所述Clip引线连接部之间设置有Clip台阶,在Clip台阶的位置形成一个凹槽。A Clip step is provided between the Clip chip connection part and the Clip lead connection part, and a groove is formed at the position of the Clip step. 8.根据权利要求4-7任一项所述的双面散热的封装结构,其特征在于:8. The double-sided heat dissipation packaging structure according to any one of claims 4 to 7, characterized in that: 所述框架S极引线的数量为3个,3个所述框架S极引线等间距分布;The number of S-pole leads of the frame is 3, and the three S-pole leads of the frame are equally spaced; 所述框架D极引线的数量为4个,4个所述框架D极引线等间距分布。The number of D-pole leads of the frame is 4, and the four D-pole leads of the frame are equally spaced. 9.根据权利要求8所述的双面散热的封装结构,其特征在于:9. The double-sided heat dissipation packaging structure according to claim 8, characterized in that: 所述Clip散热面距离产品轮廓距离为0.1mm。The distance between the Clip heat dissipation surface and the product outline is 0.1mm. 10.一种双面散热的封装结构的制备方法,用于制备如权利要求1-9任一项所述的双面散热的封装结构,其特征在于,包括以下步骤:10. A method for preparing a double-sided heat dissipation packaging structure, used to prepare the double-sided heat dissipation packaging structure according to any one of claims 1 to 9, characterized in that it includes the following steps: 通过蚀刻工艺得到引线框架;The lead frame is obtained through the etching process; 对晶圆进行减薄和划片,划片后的晶圆对MOS管进行倒装上芯,芯片的D极区域镀铜,上芯后进行贴装Clip散热铜片;The wafer is thinned and diced, and the MOS tube is flip-chip mounted on the diced wafer. The D-pole area of the chip is copper-plated. After the wafer is mounted, Clip heat-dissipating copper sheets are mounted; 所述Clip散热铜片贴片后进行真空回流焊,再对锡膏挥发物的残留进行清洗;The Clip heat dissipation copper sheet is vacuum reflowed after being patched, and then the residue of solder paste volatiles is cleaned; 对框架载体背面进行贴膜,塑封前进行清洗,对产品进行塑封,塑封后进行后固化;Apply film to the back of the frame carrier, clean it before plastic sealing, plastic seal the product, and post-cure after plastic sealing; 后固化后进行热煮软化,去溢料,软化后进行电镀,电镀后进行烘烤,烘烤结束后对产品进行研磨,漏出Clip散热铜片;After post-curing, hot boiling is performed to soften, and overflow is removed. After softening, electroplating is performed. After electroplating, baking is performed. After baking, the product is ground to remove Clip heat dissipation copper sheets; 漏出Clip散热铜片后进行打印,再切割分离,切割成单颗产品后进行产品测试,测试合格后进行包装入库。After the Clip heat dissipation copper sheet is leaked, it is printed, then cut and separated. After cutting into individual products, the product is tested. After passing the test, it is packaged and stored in the warehouse.
CN202311824791.5A 2023-12-28 2023-12-28 Double-sided heat dissipation packaging structure and preparation method thereof Pending CN117476590A (en)

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