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CN117277043B - Light spot superposition homogenizing anhydrous air-cooled laser based on right-angle prism cavity and output method - Google Patents

Light spot superposition homogenizing anhydrous air-cooled laser based on right-angle prism cavity and output method Download PDF

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CN117277043B
CN117277043B CN202311533885.7A CN202311533885A CN117277043B CN 117277043 B CN117277043 B CN 117277043B CN 202311533885 A CN202311533885 A CN 202311533885A CN 117277043 B CN117277043 B CN 117277043B
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angle prism
laser
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gain medium
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CN117277043A (en
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于永吉
刘航
王超
姚晓岱
陈薪羽
金光勇
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Changchun University of Science and Technology
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/10Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
    • H01S3/105Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating by controlling the mutual position or the reflecting properties of the reflectors of the cavity, e.g. by controlling the cavity length
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/05Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
    • H01S3/08Construction or shape of optical resonators or components thereof
    • H01S3/08059Constructional details of the reflector, e.g. shape
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/10Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
    • H01S3/11Mode locking; Q-switching; Other giant-pulse techniques, e.g. cavity dumping
    • H01S3/1106Mode locking
    • H01S3/1112Passive mode locking
    • H01S3/1115Passive mode locking using intracavity saturable absorbers
    • H01S3/1118Semiconductor saturable absorbers, e.g. semiconductor saturable absorber mirrors [SESAMs]; Solid-state saturable absorbers, e.g. carbon nanotube [CNT] based
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/14Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range characterised by the material used as the active medium
    • H01S3/16Solid materials
    • H01S3/1601Solid materials characterised by an active (lasing) ion
    • H01S3/1603Solid materials characterised by an active (lasing) ion rare earth
    • H01S3/1611Solid materials characterised by an active (lasing) ion rare earth neodymium
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/14Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range characterised by the material used as the active medium
    • H01S3/16Solid materials
    • H01S3/163Solid materials characterised by a crystal matrix
    • H01S3/164Solid materials characterised by a crystal matrix garnet
    • H01S3/1643YAG

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  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Optics & Photonics (AREA)
  • Chemical & Material Sciences (AREA)
  • Materials Engineering (AREA)
  • Nanotechnology (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Lasers (AREA)

Abstract

本发明涉及激光器技术领域,具体涉及一种基于直角棱镜腔的光斑叠加匀化无水无风冷激光器及输出方法。其中水平方向依次放置直角棱镜、增益介质、可饱和吸收体、输出镜;泵浦模块平行放置于增益介质正上方;直角棱镜的底面与增益介质的端面平行,直角棱镜的屋脊与竖直方向成45度;输出镜的输出面与增益介质的端面平行放置。所述直角棱镜与输出镜组成谐振腔。本发明提供了一种结构简单、成本低廉的改善光斑对称性的技术方案。

The present invention relates to the field of laser technology, and in particular to a waterless and airless cooling laser and an output method for spot superposition homogenization based on a right-angle prism cavity. A right-angle prism, a gain medium, a saturable absorber, and an output mirror are placed in sequence in the horizontal direction; a pump module is placed in parallel directly above the gain medium; the bottom surface of the right-angle prism is parallel to the end surface of the gain medium, and the ridge of the right-angle prism is 45 degrees to the vertical direction; the output surface of the output mirror is placed parallel to the end surface of the gain medium. The right-angle prism and the output mirror form a resonant cavity. The present invention provides a technical solution for improving the symmetry of the light spot with a simple structure and low cost.

Description

一种基于直角棱镜腔的光斑叠加匀化无水无风冷激光器及输 出方法A waterless and airless cooling laser with spot superposition and homogenization based on a right-angle prism cavity and an output method

技术领域Technical Field

本发明涉及激光器技术领域,具体涉及一种基于直角棱镜腔的光斑叠加匀化无水无风冷激光器及输出方法。The invention relates to the technical field of lasers, and in particular to a waterless and airless cooling laser with spot superposition and homogenization based on a right-angle prism cavity and an output method.

背景技术Background technique

激光器是一种广泛应用于医疗、通信、材料加工等领域的重要光源,在应用中,光斑的对称性对激光光束质量影响极大。然而,无水无风冷激光器只能采用传到冷却,散热能力较差,严重的热效应导致输出的激光光斑呈长条状或月牙状,其光束质量和对称性较差。此外,光学元件的不完美性以及激光介质的散射也会对输出激光光斑对称性产生负面影响,进一步导致输出激光光束质量变差。Laser is an important light source widely used in medical, communication, material processing and other fields. In applications, the symmetry of the spot has a great influence on the quality of the laser beam. However, waterless and airless lasers can only be cooled by conduction, which has poor heat dissipation capacity. Severe thermal effects cause the output laser spot to be long or crescent-shaped, and its beam quality and symmetry are poor. In addition, the imperfection of optical components and the scattering of laser media will also have a negative impact on the symmetry of the output laser spot, further causing the output laser beam quality to deteriorate.

目前,改善激光输出光斑对称性的方法主要有限制激光模式法和改善泵浦光场对称性等方法。限制激光模式法需要在激光器系统中引入额外的光学元件,增加了系统的复杂性和成本,还会导致输出功率降低。改善泵浦光场对称性要求泵浦光进入到增益介质内部具有良好的对称性。这对于无主动散热的小型化激光器系统是难以实现的。因此,亟需一种适用无水无风冷激光器的改善光斑对称性的技术手段。At present, the main methods to improve the symmetry of laser output spot are limiting the laser mode method and improving the symmetry of the pump light field. Limiting the laser mode method requires the introduction of additional optical elements in the laser system, which increases the complexity and cost of the system and also leads to a decrease in output power. Improving the symmetry of the pump light field requires that the pump light has good symmetry when entering the gain medium. This is difficult to achieve for a miniaturized laser system without active heat dissipation. Therefore, there is an urgent need for a technical means to improve the symmetry of the spot that is suitable for water-free and air-free cooling lasers.

发明内容Summary of the invention

为了解决现有技术中存在的问题,本发明提供了一种基于直角棱镜腔的光斑叠加匀化无水无风冷激光器及输出方法。一种基于直角棱镜腔的光斑叠加匀化无水无风冷激光器包括直角棱镜、增益介质、可饱和吸收体、泵浦模块、输出镜;In order to solve the problems existing in the prior art, the present invention provides a spot superposition and homogenization waterless and airless cooling laser based on a right-angle prism cavity and an output method. A spot superposition and homogenization waterless and airless cooling laser based on a right-angle prism cavity comprises a right-angle prism, a gain medium, a saturable absorber, a pump module, and an output mirror;

其中沿光路方向由左至右依次放置直角棱镜、增益介质、可饱和吸收体、输出镜;The right-angle prism, gain medium, saturable absorber, and output mirror are placed in sequence from left to right along the optical path;

泵浦模块平行放置于增益介质正上方;The pump module is placed parallely and directly above the gain medium;

在初始状态下,直角棱镜的底面与增益介质的端面平行且与工作光路垂直,直角棱镜的屋脊面与底面成45度;In the initial state, the bottom surface of the right-angle prism is parallel to the end surface of the gain medium and perpendicular to the working optical path, and the ridge surface of the right-angle prism is 45 degrees to the bottom surface;

输出镜的输出面与增益介质的端面平行放置;The output surface of the output mirror is placed parallel to the end surface of the gain medium;

所述直角棱镜与输出镜组成谐振腔;The right-angle prism and the output mirror form a resonant cavity;

进一步的,所述直角棱镜中的各反射面均镀有输出激光波长的全反射膜。Furthermore, each reflective surface in the right-angle prism is coated with a total reflection film of the output laser wavelength.

进一步的,所述增益介质的两端镀有输出激光波长的增透膜。Furthermore, both ends of the gain medium are coated with anti-reflection films of the output laser wavelength.

进一步的,所述输出镜镀有输出波长的增透膜。Furthermore, the output mirror is coated with an anti-reflection film of the output wavelength.

进一步的,所述可饱和吸收体为Cr4+:YAG晶体。Furthermore, the saturable absorber is a Cr 4+ :YAG crystal.

进一步的,所述增益介质为Nd:YAG晶体。Furthermore, the gain medium is Nd:YAG crystal.

进一步的本发明提供的一种基于直角棱镜腔的光斑叠加匀化无水无风冷激光器还包括45度分光镜、CCD相机、信息处理装置、步进电机驱动器、数据线、步进电机。Furthermore, the present invention provides a spot superposition and homogenization waterless and airless cooling laser based on a right-angle prism cavity, which also includes a 45-degree beam splitter, a CCD camera, an information processing device, a stepper motor driver, a data line, and a stepper motor.

所述45度分光镜对出射激光进行分光,一路垂直向上射出,一路水平射出。The 45-degree beam splitter splits the outgoing laser beam, with one beam being emitted vertically upward and the other being emitted horizontally.

所述CCD相机接收45度分光镜分出的垂直方向激光,并通过数据线与信息处理装置相连。The CCD camera receives the vertical laser beam split by the 45-degree beam splitter and is connected to the information processing device via a data line.

所述信息处理装置通过数据线依次与步进电机驱动器、步进电机相连;The information processing device is connected to the stepper motor driver and the stepper motor in sequence through data lines;

所述步进电机通过云台与直角棱镜相连,使直角棱镜的屋脊面与底面可以沿工作光路方向旋转,和/或使直角棱镜平移以调节谐振腔的腔长;The stepper motor is connected to the right-angle prism through a pan-tilt platform, so that the roof surface and the bottom surface of the right-angle prism can rotate along the working light path direction, and/or the right-angle prism can be translated to adjust the cavity length of the resonant cavity;

所述步进电机为三自由度步进电机,能够实现直角棱镜的俯仰角、横滚角以及平移调节。The stepper motor is a three-degree-of-freedom stepper motor, which can realize the pitch angle, roll angle and translation adjustment of the right-angle prism.

根据本发明的另一方面,提供利用上述激光器输出激光及光斑叠加匀化的方法,所述方法包括如下步骤:According to another aspect of the present invention, a method for outputting laser light and superimposing and homogenizing light spots using the above-mentioned laser is provided, and the method comprises the following steps:

S1:泵浦模块发出泵浦光,侧面泵浦增益介质;S1: The pump module emits pump light to side-pump the gain medium;

S2:增益介质吸收泵浦光,发生能级跃迁,实现粒子数反转;S2: The gain medium absorbs the pump light, energy level transition occurs, and the population inversion is achieved;

S3:可饱和吸收体初始透过率较低,激光谐振腔内损耗较大,不能形成激光振荡。S3: The initial transmittance of the saturable absorber is low, the loss in the laser resonant cavity is large, and laser oscillation cannot be formed.

S4:在泵浦光作用下,增益介质中上能级粒子数不断增加,激光光强增加,可饱和吸收体的透过率增大,腔内损耗降低,激光在谐振腔内往复振荡。S4: Under the action of pump light, the number of upper energy level particles in the gain medium continues to increase, the laser intensity increases, the transmittance of the saturable absorber increases, the loss in the cavity decreases, and the laser oscillates back and forth in the resonant cavity.

S5:谐振腔内的激光经直角棱镜反射,光斑旋转90度。S5: The laser in the resonant cavity is reflected by the right-angle prism, and the light spot rotates 90 degrees.

S6:输出镜输出的激光经45度分光镜射入CCD相机,CCD相机监测出射激光光斑形状,并实时传递信息给信息处理装置,信息处理装置评价输出激光光斑对称性。S6: The laser outputted by the output mirror is incident on the CCD camera through a 45-degree beam splitter. The CCD camera monitors the shape of the output laser spot and transmits the information to the information processing device in real time. The information processing device evaluates the symmetry of the output laser spot.

S7:当信息处理装置判断出输出激光光斑不对称时,信息处理装置传递信号给步进电机驱动器,步进电机驱动器控制步进电机转动相应的角度,和/或平移相应的距离。S7: When the information processing device determines that the output laser spot is asymmetric, the information processing device transmits a signal to the stepper motor driver, and the stepper motor driver controls the stepper motor to rotate a corresponding angle and/or translate a corresponding distance.

S8:当信息处理装置判断出输出激光光斑对称时,直角棱镜调节至最终状态,输出激光光斑得到优化。S8: When the information processing device determines that the output laser spot is symmetrical, the right-angle prism is adjusted to a final state, and the output laser spot is optimized.

本发明的有益效果是:由于侧面泵浦中从增益介质出射的光斑并不是均匀的圆光斑,而是长条状或月牙状。本发明通过将光学谐振腔中的全反镜替换为直角棱镜,且直角棱镜的直角边与竖直方向成45度。谐振腔内激光经直角棱镜反射后,光斑发生90度旋转,光斑对称性得到改善。进一步,本发明还增加了CCD相机和步进电机,依据输出光斑对称性实时调整直角棱镜旋转角度。本发明提供了一种结构简单、成本低廉的改善光斑对称性的技术方案。The beneficial effects of the present invention are as follows: since the light spot emitted from the gain medium in the side pumping is not a uniform circular light spot, but a long strip or crescent shape. The present invention replaces the total reflection mirror in the optical resonant cavity with a right-angle prism, and the right-angle side of the right-angle prism is 45 degrees to the vertical direction. After the laser in the resonant cavity is reflected by the right-angle prism, the light spot rotates 90 degrees, and the symmetry of the light spot is improved. Furthermore, the present invention also adds a CCD camera and a stepper motor to adjust the rotation angle of the right-angle prism in real time according to the symmetry of the output light spot. The present invention provides a technical solution for improving the symmetry of the light spot with a simple structure and low cost.

应当理解的是,以上的一般描述和后文的细节描述仅是示例性和解释性的,并不能限制本公开。It is to be understood that the foregoing general description and the following detailed description are exemplary and explanatory only and are not restrictive of the present disclosure.

附图说明BRIEF DESCRIPTION OF THE DRAWINGS

此处的附图被并入说明书中并构成本说明书的一部分,示出了符合本公开的实施例,并与说明书一起用于解释本公开的原理。The accompanying drawings, which are incorporated in and constitute a part of this specification, illustrate embodiments consistent with the present disclosure and, together with the description, serve to explain the principles of the present disclosure.

图1为一种基于直角棱镜腔的光斑叠加匀化无水无风冷激光器第一种实施例示意图。FIG1 is a schematic diagram of a first embodiment of a spot superposition and homogenization waterless and airless cooling laser based on a right-angle prism cavity.

图2为一种基于直角棱镜腔的光斑叠加匀化无水无风冷激光器第二种实施例示意图。FIG. 2 is a schematic diagram of a second embodiment of a waterless and airless cooling laser based on a right-angle prism cavity and light spot superposition and homogenization.

图3为直角棱镜光斑旋转作用示意图。FIG3 is a schematic diagram of the rotation effect of a right-angle prism light spot.

图4为一种基于直角棱镜腔的光斑叠加匀化无水无风冷激光器工作流程图。FIG4 is a working flow chart of a waterless and airless cooling laser with spot superposition and homogenization based on a right-angle prism cavity.

具体实施方式Detailed ways

现在将参照若干示例性实施例来论述本公开的内容。应当理解,论述了这些实施例仅是为了使得本领域普通技术人员能够更好地理解且因此实现本公开的内容,而不是暗示对本公开的范围的任何限制。The present disclosure will now be discussed with reference to several exemplary embodiments. It should be understood that these embodiments are discussed only to enable those skilled in the art to better understand and thus implement the present disclosure, rather than implying any limitation on the scope of the present disclosure.

如本文中所使用的,术语“包括”及其变体要被解读为意味着“包括但不限于”的开放式术语。术语“基于”要被解读为“至少部分地基于”。术语“一个实施例”和“一种实施例”要被解读为“至少一个实施例”。术语“另一个实施例”要被解读为“至少一个其他实施例”。As used herein, the term "including" and variations thereof are to be interpreted as open-ended terms meaning "including but not limited to." The term "based on" is to be interpreted as "based, at least in part, on." The terms "one embodiment" and "an embodiment" are to be interpreted as "at least one embodiment." The term "another embodiment" is to be interpreted as "at least one other embodiment."

实施例一Embodiment 1

如图1所示,本发明一种基于直角棱镜腔的光斑叠加匀化无水无风冷激光器第一实施例包括直角棱镜1、增益介质2、可饱和吸收体3、泵浦模块4、输出镜5;As shown in FIG1 , a first embodiment of a spot superposition homogenization waterless and airless cooling laser based on a right-angle prism cavity of the present invention comprises a right-angle prism 1, a gain medium 2, a saturable absorber 3, a pump module 4, and an output mirror 5;

其中沿光路方向由左至右依次放置直角棱镜1、增益介质2、可饱和吸收体3、输出镜5;The right-angle prism 1, the gain medium 2, the saturable absorber 3, and the output mirror 5 are placed in sequence from left to right along the optical path;

泵浦模块4平行放置于增益介质2正上方;The pump module 4 is placed in parallel and directly above the gain medium 2;

在初始状态下,直角棱镜5的底面与增益介质2的端面平行且与工作光路垂直,直角棱镜5的屋脊面与端面成45度;In the initial state, the bottom surface of the right-angle prism 5 is parallel to the end surface of the gain medium 2 and perpendicular to the working optical path, and the ridge surface of the right-angle prism 5 is at 45 degrees to the end surface;

输出镜5的输出面与增益介质2的端面平行放置;The output surface of the output mirror 5 is placed parallel to the end surface of the gain medium 2;

所述直角棱镜1与输出镜5组成谐振腔;The right angle prism 1 and the output mirror 5 form a resonant cavity;

所述直角棱镜1中的各反射面均镀有输出激光波长的全反射膜;Each reflective surface in the right-angle prism 1 is coated with a total reflection film of the output laser wavelength;

所述增益介质2的两端镀有输出激光波长的增透膜;Both ends of the gain medium 2 are coated with an anti-reflection film of the output laser wavelength;

所述输出镜5镀有输出波长的增透膜;The output mirror 5 is coated with an anti-reflection film of the output wavelength;

所述可饱和吸收体3为Cr4+:YAG晶体;The saturable absorber 3 is a Cr 4+ :YAG crystal;

所述增益介质2为Nd:YAG晶体;The gain medium 2 is Nd:YAG crystal;

如图2所示,本发明一种改善输出光斑不对称的激光器还包括45度分光镜6、CCD相机7、信息处理装置8、步进电机驱动器9、数据线10、步进电机11;As shown in FIG2 , a laser for improving the asymmetry of the output light spot of the present invention further includes a 45-degree beam splitter 6, a CCD camera 7, an information processing device 8, a stepper motor driver 9, a data line 10, and a stepper motor 11;

所述45度分光镜6对出射激光进行分光,一路垂直向上射出,一路水平射出;The 45-degree beam splitter 6 splits the outgoing laser beam, with one beam being emitted vertically upward and the other being emitted horizontally;

所述CCD相机7接收45度分光镜6分出的垂直方向激光,并通过数据线与信息处理装置相连;The CCD camera 7 receives the vertical laser beam split by the 45-degree beam splitter 6 and is connected to the information processing device via a data line;

所述信息处理装置8通过数据线10依次与步进电机驱动器9、步进电机11相连;The information processing device 8 is connected to the stepper motor driver 9 and the stepper motor 11 in sequence through the data line 10;

所述步进电机11通过云台与直角棱镜1相连,使所述直角棱镜1的所述屋脊面与所述底面可以沿工作光路方向旋转,和/或使所述直角棱镜1平移以调节谐振腔的腔长。The stepper motor 11 is connected to the right-angle prism 1 through a pan-tilt platform, so that the ridge surface and the bottom surface of the right-angle prism 1 can rotate along the working light path direction, and/or the right-angle prism 1 can be translated to adjust the cavity length of the resonant cavity.

根据本发明的另一方面,提供利用上述激光器输出激光及光斑叠加匀化的方法,所述方法包括如下步骤:According to another aspect of the present invention, a method for outputting laser light and superimposing and homogenizing light spots using the above-mentioned laser is provided, the method comprising the following steps:

S1:泵浦模块4发出泵浦光,侧面泵浦增益介质2;S1: Pump module 4 emits pump light to side-pump gain medium 2;

S2:增益介质2吸收泵浦光,发生能级跃迁,实现粒子数反转;S2: Gain medium 2 absorbs pump light, undergoes energy level transition, and achieves population inversion;

S3:可饱和吸收体3初始透过率较低,激光谐振腔内损耗较大,不能形成激光振荡;S3: The initial transmittance of saturable absorber 3 is low, the loss in the laser resonant cavity is large, and laser oscillation cannot be formed;

S4:在泵浦光作用下,增益介质2中上能级粒子数不断增加,激光光强增加,可饱和吸收体3的透过率增大,腔内损耗降低,激光在谐振腔内往复振荡;S4: Under the action of pump light, the number of upper energy level particles in the gain medium 2 continues to increase, the laser light intensity increases, the transmittance of the saturable absorber 3 increases, the cavity loss decreases, and the laser oscillates back and forth in the resonant cavity;

S5:谐振腔内的激光经直角棱镜1反射,光斑旋转90度(如图3所示);S5: The laser in the resonant cavity is reflected by the right-angle prism 1, and the light spot rotates 90 degrees (as shown in Figure 3);

S6:输出镜5输出的激光经45度分光镜6射入CCD相机7,CCD相机7监测出射激光光斑形状,并实时传递信息给信息处理装置8,信息处理装置8评价输出激光光斑对称性;S6: The laser outputted by the output mirror 5 is incident on the CCD camera 7 via the 45-degree beam splitter 6. The CCD camera 7 monitors the shape of the output laser spot and transmits the information to the information processing device 8 in real time. The information processing device 8 evaluates the symmetry of the output laser spot.

S7:当信息处理装置8判断出输出激光光斑不对称时,信息处理装置8传递信号给步进电机驱动器9,步进电机驱动器9控制步进电机11转动相应的角度,和/或平移相应的距离(如图4所示);S7: When the information processing device 8 determines that the output laser spot is asymmetric, the information processing device 8 transmits a signal to the stepper motor driver 9, and the stepper motor driver 9 controls the stepper motor 11 to rotate a corresponding angle and/or translate a corresponding distance (as shown in FIG. 4 );

S8:当信息处理装置8判断出输出激光光斑对称时,直角棱镜1角度调节至最终状态,输出激光光斑得到优化(如图4所示);S8: When the information processing device 8 determines that the output laser spot is symmetrical, the angle of the right-angle prism 1 is adjusted to the final state, and the output laser spot is optimized (as shown in FIG. 4 );

一种基于直角棱镜腔的光斑叠加匀化无水无风冷激光器工作流程如图4所示。CCD相机7能实时采集激光输出光斑形状,同时将采集到的光斑图形传输到信息处理装置8,经过信息处理装置8分析判断输出光斑是否对称。如果不对称,信息处理装置8将传输信号给步进电机驱动器9,步进电机驱动器9控制步进电机11转动相应的角度,使输出光斑形状得到优化对称。重复上述步骤,直至光斑对称。The working process of a waterless and airless laser with spot superposition and homogenization based on a right-angle prism cavity is shown in FIG4. The CCD camera 7 can collect the laser output spot shape in real time, and transmit the collected spot pattern to the information processing device 8, which analyzes and determines whether the output spot is symmetrical. If it is asymmetrical, the information processing device 8 transmits a signal to the stepper motor driver 9, and the stepper motor driver 9 controls the stepper motor 11 to rotate the corresponding angle to optimize the output spot shape. Repeat the above steps until the spot is symmetrical.

实施例二Embodiment 2

进一步地,实施例一所述利用上述激光器输出激光及光斑叠加匀化的方法步骤S6中所述信息处理装置8评价输出激光光斑对称性,具体包括如下步骤:Furthermore, in the method for using the laser to output laser light and to superimpose and homogenize the light spot described in the first embodiment, the information processing device 8 in step S6 evaluates the symmetry of the output laser light spot, which specifically includes the following steps:

S61:通过预先安装在信息处理装置8中的软件系统对激光光斑对称性进行评价;S61: Evaluate the symmetry of the laser spot by using a software system pre-installed in the information processing device 8;

S62:所述激光光斑包括如下TEM00、TEM01、TEM10、TEM11、TEM02、TEM20、TEM12、TEM21、TEM22...TEMab(a≥0,b>2或a>2,b≥0)模式。S62: The laser spots include the following TEM 00 , TEM 01 , TEM 10 , TEM 11 , TEM 02 , TEM 20 , TEM 12 , TEM 21 , TEM 22 . . . TEM ab (a≥0, b>2 or a>2, b≥0) modes.

所述步骤S7中所述步进电机驱动器9控制步进电机11转动相应的角度,和/或平移相应的距离,具体包括如下步骤:In step S7, the stepper motor driver 9 controls the stepper motor 11 to rotate a corresponding angle and/or translate a corresponding distance, which specifically includes the following steps:

S71:当所述信息处理装置8评价激光光斑为TEM01、TEM10、TEM11模式时,所述步进电机驱动器9控制步进电机11在俯仰角方向转动相应的角度;当所述信息处理装置8评价激光光斑为TEM02、TEM20、TEM12、TEM21、TEM22...TEMab(a≥0,b>2或a>2,b≥0)模式时,所述步进电机驱动器9控制步进电机11在俯仰角方向转动相应的角度,和/或平移相应的距离;S71: When the information processing device 8 evaluates that the laser spot is in the TEM 01 , TEM 10 , TEM 11 mode, the stepper motor driver 9 controls the stepper motor 11 to rotate a corresponding angle in the pitch angle direction; when the information processing device 8 evaluates that the laser spot is in the TEM 02 , TEM 20 , TEM 12 , TEM 21 , TEM 22 ...TEM ab (a≥0, b>2 or a>2, b≥0) mode, the stepper motor driver 9 controls the stepper motor 11 to rotate a corresponding angle in the pitch angle direction, and/or translate a corresponding distance;

S72:通过所述信息处理装置8实时对激光光斑进行评价;S72: Evaluate the laser spot in real time by the information processing device 8;

S73:如果激光光斑是TEM00模式,则执行步骤S8;S73: If the laser spot is in TEM 00 mode, execute step S8;

S74:如果激光光斑不是TEM00模式,则所述步进电机驱动器9控制步进电机11在横滚角方向转动相应的角度,和/或平移相应的距离;S74: If the laser spot is not in the TEM 00 mode, the stepper motor driver 9 controls the stepper motor 11 to rotate a corresponding angle in the roll angle direction and/or translate a corresponding distance;

S75:通过所述信息处理装置8实时对激光光斑进行评价;S75: Evaluate the laser spot in real time by the information processing device 8;

S76:重复执行步骤S71-S75,直至输出激光光斑是TEM00模式。S76: Repeat steps S71-S75 until the output laser spot is in TEM 00 mode.

可以理解的是,本公开中“多个”是指两个或两个以上,其它量词与之类似。“和/或”,描述关联对象的关联关系,表示可以存在三种关系,例如,A和/或B,可以表示:单独存在A,同时存在A和B,单独存在B这三种情况。字符“/”一般表示前后关联对象是一种“或”的关系。单数形式的“一种”、“所述”和“该”也旨在包括多数形式,除非上下文清楚地表示其他含义。It is to be understood that in the present disclosure, "plurality" refers to two or more than two, and other quantifiers are similar thereto. "And/or" describes the association relationship of associated objects, indicating that three relationships may exist. For example, A and/or B may represent: A exists alone, A and B exist at the same time, and B exists alone. The character "/" generally indicates that the associated objects before and after are in an "or" relationship. The singular forms "a", "the" and "the" are also intended to include plural forms, unless the context clearly indicates other meanings.

进一步可以理解的是,术语“第一”、“第二”等用于描述各种信息,但这些信息不应限于这些术语。这些术语仅用来将同一类型的信息彼此区分开,并不表示特定的顺序或者重要程度。实际上,“第一”、“第二”等表述完全可以互换使用。例如,在不脱离本公开范围的情况下,第一信息也可以被称为第二信息,类似地,第二信息也可以被称为第一信息。It is further understood that the terms "first", "second", etc. are used to describe various information, but such information should not be limited to these terms. These terms are only used to distinguish the same type of information from each other, and do not indicate a specific order or degree of importance. In fact, the expressions "first", "second", etc. can be used interchangeably. For example, without departing from the scope of the present disclosure, the first information can also be referred to as the second information, and similarly, the second information can also be referred to as the first information.

进一步可以理解的是,术语“中心”、“纵向”、“横向”、“前”、“后”、“上”、“下”、“左”、“右”、“竖直”、“水平”、“顶”、“底”“内”、“外”等指示的方位或位置关系为基于附图所示的方位或位置关系,仅是为了便于描述本实施例和简化描述,而不是指示或暗示所指的装置或元件必须具有特定的方位、以特定的方位构造和操作。It will be further understood that the terms “center”, “longitudinal”, “lateral”, “front”, “back”, “up”, “down”, “left”, “right”, “vertical”, “horizontal”, “top”, “bottom”, “inside”, “outside”, etc., indicating orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, are only for the convenience of describing the present embodiment and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation.

进一步可以理解的是,除非有特殊说明,“连接”包括两者之间不存在其他构件的直接连接,也包括两者之间存在其他元件的间接连接。It can be further understood that, unless otherwise specified, “connection” includes a direct connection without other components between the two, and also includes an indirect connection with other components between the two.

进一步可以理解的是,本公开实施例中尽管在附图中以特定的顺序描述操作,但是不应将其理解为要求按照所示的特定顺序或是串行顺序来执行这些操作,或是要求执行全部所示的操作以得到期望的结果。在特定环境中,多任务和并行处理可能是有利的。It is further understood that, although the operations are described in a specific order in the drawings in the embodiments of the present disclosure, it should not be understood as requiring the operations to be performed in the specific order shown or in a serial order, or requiring the execution of all the operations shown to obtain the desired results. In certain environments, multitasking and parallel processing may be advantageous.

本领域技术人员在考虑说明书及实践这里公开的公开后,将容易想到本公开的其它实施方案。本公开旨在涵盖本公开的任何变型、用途或者适应性变化,这些变型、用途或者适应性变化遵循本公开的一般性原理并包括本公开未公开的本技术领域中的公知常识或惯用技术手段。说明书和实施例仅被视为示例性的,本公开的真正范围和精神由下面的权利要求指出。Those skilled in the art will readily appreciate other embodiments of the present disclosure after considering the specification and practicing the disclosure disclosed herein. The present disclosure is intended to cover any variations, uses, or adaptations of the present disclosure that follow the general principles of the present disclosure and include common knowledge or customary techniques in the art that are not disclosed in the present disclosure. The description and examples are to be considered exemplary only, and the true scope and spirit of the present disclosure are indicated by the following claims.

应当理解的是,本公开并不局限于上面已经描述并在附图中示出的精确结构,并且可以在不脱离其范围进行各种修改和改变。本公开的范围仅由所附的权利要求来限制。It should be understood that the present disclosure is not limited to the exact structures that have been described above and shown in the drawings, and that various modifications and changes may be made without departing from the scope thereof. The scope of the present disclosure is limited only by the appended claims.

Claims (8)

1.一种基于直角棱镜腔的光斑叠加匀化无水无风冷激光器,其特征在于,1. A waterless and airless cooling laser based on a right-angle prism cavity for spot superposition and homogenization, characterized in that: 包括:直角棱镜(1)、增益介质(2)、可饱和吸收体(3)、泵浦模块(4)、输出镜(5);其中,沿光路方向由左至右依次放置所述直角棱镜(1)、所述增益介质(2)、所述可饱和吸收体(3)、所述输出镜(5);The invention comprises: a right-angle prism (1), a gain medium (2), a saturable absorber (3), a pump module (4), and an output mirror (5); wherein the right-angle prism (1), the gain medium (2), the saturable absorber (3), and the output mirror (5) are arranged in sequence from left to right along the optical path; 所述泵浦模块(4)平行放置于所述增益介质(2)正上方;The pump module (4) is placed in parallel and directly above the gain medium (2); 在初始状态下,所述直角棱镜(1)的底面与所述增益介质(2)的端面平行且与工作光路垂直,所述直角棱镜(1)的屋脊面与底面成45度;In an initial state, the bottom surface of the right-angle prism (1) is parallel to the end surface of the gain medium (2) and perpendicular to the working optical path, and the ridge surface of the right-angle prism (1) is at 45 degrees to the bottom surface; 所述输出镜(5)的输出面与所述增益介质(2)的端面平行放置;The output surface of the output mirror (5) is placed parallel to the end surface of the gain medium (2); 所述直角棱镜(1)与所述输出镜(5)组成谐振腔;The right-angle prism (1) and the output mirror (5) form a resonant cavity; 还包括45度分光镜(6)、CCD相机(7)、信息处理装置(8)、步进电机驱动器(9)、数据线(10)、步进电机(11);It also includes a 45-degree beam splitter (6), a CCD camera (7), an information processing device (8), a stepper motor driver (9), a data cable (10), and a stepper motor (11); 所述45度分光镜(6)对出射激光进行分光,第一光路垂直向上射出,第二光路水平射出;The 45-degree beam splitter (6) splits the emitted laser light, with the first light path being emitted vertically upward and the second light path being emitted horizontally; 所述CCD相机(7)接收所述45度分光镜(6)分出的垂直方向激光,并通过数据线与信息处理装置相连;The CCD camera (7) receives the vertical laser beam split by the 45-degree beam splitter (6) and is connected to the information processing device via a data line; 所述信息处理装置(8)通过所述数据线(10)依次与所述步进电机驱动器(9)、所述步进电机(11)相连;The information processing device (8) is connected to the stepper motor driver (9) and the stepper motor (11) in sequence via the data line (10); 所述步进电机(11)通过云台与所述直角棱镜(1)相连,使所述直角棱镜(1)的所述屋脊面与所述底面可以沿工作光路方向旋转,和/或使所述直角棱镜(1)平移以调节谐振腔的腔长。The stepping motor (11) is connected to the right-angle prism (1) via a pan-tilt platform, so that the ridge surface and the bottom surface of the right-angle prism (1) can rotate along the direction of the working light path, and/or the right-angle prism (1) can be translated to adjust the cavity length of the resonant cavity. 2.根据权利要求1所述的基于直角棱镜腔的光斑叠加匀化无水无风冷激光器,其特征在于,所述直角棱镜(1)中的各反射面均镀有输出激光波长的全反射膜。2. The spot superposition homogenization waterless and airless cooling laser based on the right-angle prism cavity according to claim 1, characterized in that each reflective surface in the right-angle prism (1) is coated with a total reflection film of the output laser wavelength. 3.根据权利要求1所述的基于直角棱镜腔的光斑叠加匀化无水无风冷激光器,其特征在于,所述增益介质(2)的两端镀有输出激光波长的增透膜。3. The spot superposition homogenization waterless and airless cooling laser based on a right-angle prism cavity according to claim 1, characterized in that both ends of the gain medium (2) are coated with an anti-reflection film of the output laser wavelength. 4.根据权利要求1所述的基于直角棱镜腔的光斑叠加匀化无水无风冷激光器,其特征在于,所述步进电机(11)为三自由度步进电机,能够实现直角棱镜(1)的俯仰角、横滚角以及平移调节。4. The spot superposition homogenization waterless and airless cooling laser based on a right-angle prism cavity according to claim 1, characterized in that the stepper motor (11) is a three-degree-of-freedom stepper motor, which can achieve the pitch angle, roll angle and translation adjustment of the right-angle prism (1). 5.根据权利要求1所述的基于直角棱镜腔的光斑叠加匀化无水无风冷激光器,其特征在于,所述输出镜(5)镀有输出波长的增透膜。5. The water-free and air-free cooling laser with spot superposition and homogenization based on a right-angle prism cavity according to claim 1, characterized in that the output mirror (5) is coated with an anti-reflection film of the output wavelength. 6.根据权利要求3所述的基于直角棱镜腔的光斑叠加匀化无水无风冷激光器,其特征在于,所述可饱和吸收体(3)为Cr4+:YAG晶体。6. The spot superposition homogenization waterless and airless cooling laser based on a right-angle prism cavity according to claim 3, characterized in that the saturable absorber (3) is a Cr 4+ :YAG crystal. 7.根据权利要求5所述的基于直角棱镜腔的光斑叠加匀化无水无风冷激光器,其特征在于,所述增益介质(2)为Nd:YAG晶体。7. The spot superposition homogenization waterless and airless cooling laser based on a right-angle prism cavity according to claim 5, characterized in that the gain medium (2) is a Nd:YAG crystal. 8.一种基于直角棱镜腔的光斑叠加匀化无水无风冷激光器的输出方法,采用了如权利要求1-7任一项所述的基于直角棱镜腔的光斑叠加匀化无水无风冷激光器,其特征在于,所述方法包括如下步骤:8. A method for outputting a waterless and airless laser by light spot superposition and homogenization based on a right-angle prism cavity, using the waterless and airless laser by light spot superposition and homogenization based on a right-angle prism cavity as claimed in any one of claims 1 to 7, characterized in that the method comprises the following steps: S1:所述泵浦模块(4)发出泵浦光,侧面泵浦所述增益介质(2);S1: the pump module (4) emits pump light to side-pump the gain medium (2); S2:所述增益介质(2)吸收泵浦光,发生能级跃迁,实现粒子数反转;S2: The gain medium (2) absorbs the pump light, undergoes energy level transition, and realizes population inversion; S3:所述可饱和吸收体(3)初始透过率较低,激光谐振腔内损耗较大,不能形成激光振荡;S3: The saturable absorber (3) has a low initial transmittance, and the loss in the laser resonant cavity is large, so laser oscillation cannot be formed; S4:在泵浦光作用下,所述增益介质(2)中上能级粒子数不断增加,激光光强增加,所述可饱和吸收体(3)的透过率增大,腔内损耗降低,激光在谐振腔内往复振荡;S4: Under the action of the pump light, the number of upper energy level particles in the gain medium (2) increases continuously, the laser light intensity increases, the transmittance of the saturable absorber (3) increases, the cavity loss decreases, and the laser oscillates back and forth in the resonant cavity; S5:谐振腔内的激光经所述直角棱镜(1)反射,光斑旋转90度;S5: The laser in the resonant cavity is reflected by the right-angle prism (1), and the light spot is rotated 90 degrees; S6:所述输出镜(5)输出的激光经所述45度分光镜(6)射入所述CCD相机(7),所述CCD相机(7)监测出射激光光斑形状,并实时传递信息给所述信息处理装置(8),所述信息处理装置(8)评价输出激光光斑对称性;S6: The laser output by the output mirror (5) is incident on the CCD camera (7) via the 45-degree beam splitter (6); the CCD camera (7) monitors the shape of the output laser spot and transmits the information to the information processing device (8) in real time; the information processing device (8) evaluates the symmetry of the output laser spot; S7:当所述信息处理装置(8)判断出输出激光光斑不对称时,所述信息处理装置(8)传递信号给所述步进电机驱动器(9),所述步进电机驱动器(9)控制所述步进电机(11)转动相应的角度,和/或平移相应的距离;S7: When the information processing device (8) determines that the output laser spot is asymmetric, the information processing device (8) transmits a signal to the stepper motor driver (9), and the stepper motor driver (9) controls the stepper motor (11) to rotate a corresponding angle and/or translate a corresponding distance; S8:当所述信息处理装置(8)判断出输出激光光斑对称时,所述直角棱镜(1)调节至最终状态,输出激光光斑得到优化。S8: When the information processing device (8) determines that the output laser spot is symmetrical, the right-angle prism (1) is adjusted to a final state, and the output laser spot is optimized.
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