CN1171168C - Improved method for simulating silicon-on-insulator devices - Google Patents
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Abstract
Description
技术领域technical field
本发明涉及绝缘体上硅集成电路,特别是涉及在创建电路设计的延时计算中用于解决SOI FET浮体电压的方法。The present invention relates to silicon-on-insulator integrated circuits, and more particularly to methods for solving SOI FET floating body voltages in delay calculations for creating circuit designs.
背景技术Background technique
本申请是1997年9月26日提交的USSN 08/938,676,现为2000年2月8日公开的美国专利US6023577的改进和部分继续,并要求了该申请的优先权。发明名称是用于模拟SOI器件的方法,发明人是George E.Smith,III,等。This application, USSN 08/938,676 filed September 26, 1997, is an improvement and continuation-in-part of US Patent No. 6,023,577, published February 8, 2000, and claims priority from this application. The title of the invention is a method for simulating SOI devices, and the inventor is George E. Smith, III, et al.
这里发明人George E.Smith,III,和其它人的其它相关待审查的申请包括在1999年4月19日提交的U.S.S.N.09/294,045,用于静态定时SOI器件及电路的改进方法;1999年4月19日提交的U.S.S.N.09/294,163,用于静态定时SOI器件及电路的改进方法;和1999年4月19日提交的U.S.S.N.09,294,178,用于静态定时SOI器件及电路的改进方法。Other related pending applications of inventors here, George E. Smith, III, and others include U.S.S.N. 09/294,045, Improving Methods for Statically Timing SOI Devices and Circuits, filed April 19, 1999; U.S.S.N.09/294,163, filed April 19, for improved methods of statically timed SOI devices and circuits; and U.S.S.N.09,294,178, filed April 19, 1999, for improved methods of statically timed SOI devices and circuits.
这些待审查的申请和本申请拥有同一个受让人—纽约阿蒙克国际商用机器公司。These pending applications have the same assignee as this application, International Business Machines Corporation, Armonk, New York.
因此将这些待审查申请的说明书并入本申请作为参考。The specifications of these copending applications are hereby incorporated by reference into this application.
商标:S/390和IBM是美国纽约阿蒙克国际商用机器公司的注册商标。其它的名字可能是国际商用机器公司或其它公司的注册商标或产品名称。Trademarks: S/390 and IBM are registered trademarks of International Business Machines Corporation, Armonk, New York, USA. Other names may be registered trademarks or product names of International Business Machines Corporation or other companies.
作为将要描述方法的背景技术,模拟技术已经用于生产硅器件,包括由通常所说的绝缘体上硅(也叫做SOI)的工艺生产薄膜器件以生产SOI器件。SOI器件的性能依赖于该器件(包括电路)浮体的当前电压。而体电压依赖于器件(或电路)的切换历史。用于生产硅器件(包括电路)的模拟包括传统的延时测量工艺,但在相关申请的涉及的技术发展之前,没有解决当前体电压影响的模拟技术。解决当前体电压历史影响的现有方法或者需要在讨论中的模拟准确的规律,或者试图跳过该问题。两种方法都不适用于延时规则。两种方法都不允许纠正一次运行中的模拟顺序。理论上,通过模拟整个切换历史可以解决当前体电压的影响,但这是不实际的,所以传统的延时估计工艺根本不具有解决该影响的方式。此外,因为通常的过程测量一个模拟运行中若干不同负载的延时,使用模拟历史不被接受。对模拟历史的依赖性将取决于模拟运行顺序的不同而给出难以预料的结果。As background to the methods that will be described, analog techniques have been used to produce silicon devices, including thin film devices, by the so-called silicon-on-insulator (also known as SOI) process to produce SOI devices. The performance of an SOI device is dependent on the current voltage on the floating body of the device (including circuitry). Whereas the bulk voltage depends on the switching history of the device (or circuit). Simulations for the production of silicon devices, including circuits, include conventional time-delay measurement processes, but prior to the development of the technology referred to in the related application, there was no simulation technique that addressed the effects of current body voltage. Existing approaches to address the effects of current body voltage history either require the simulation-accurate laws in question, or attempt to skip the issue. Neither method works with delay rules. Neither method allows correcting the order of simulations within a run. Theoretically, the effect of the current body voltage can be resolved by simulating the entire switching history, but this is not practical, so conventional delay estimation processes simply do not have the means to account for this effect. Furthermore, since it is common practice to measure delays for several different loads in one simulation run, the use of simulation history is not acceptable. Dependencies on the simulation history will give unpredictable results depending on the order in which the simulations are run.
我们认为需要一种模拟影响的方法,可用于模拟电延时的系统中,诸如Mitsubishi Denki K.K.的美国专利5,396,615和HitachiMicro Systems Inc.的美国专利5,384,720所说明的。这两个只是作为电模拟和设计系统的一般例子,本发明还可用于其它至今未实现的系统。We believe there is a need for a method of simulating the effects that can be used in systems that simulate electrical time delays, such as those illustrated in US Patent 5,396,615 to Mitsubishi Denki K.K. and US Patent 5,384,720 to Hitachi Micro Systems Inc. These two are only general examples of electrical modeling and design systems, the invention can also be used in other systems which have not been realized heretofore.
应当注意,现在有大量的关于其它人如何利用SOI器件以及使用的是什么模拟技术的出版物和专利。其中包括在该专利公开中引用的出版物和在先申请,包括在国际商用机器公司的Messrs.Dubois,(E.)1993年1月的未出版的报告;Shahidi,(G.G.)和Sun(J.Y.C.)的“薄膜CMOS/SOI诊断振荡器的速度性能分析”,其中在使用用于电路模拟的小型解析模型分析薄膜SOI/CMOS环形振荡器对它们的体硅对应部分的性能优点之后指出,在时间上SOI于体硅相比的速度的提高可以用阈值电压、体掺杂系数和节电容减小的观点来解释。也可以利用他们的基于各个器件的DC电流测量的列表模型来获得更高的精度。在两种方法中都发现了模拟的和测量的传播延时之间的残余偏差。比较在环形振荡器中的整体电流和存储的电荷,认识到在低估充/放电电流时该差异产生的根源。这些研究人员通过分析外加电压与传输延时,确定电流的瞬间增强不是所述差异的原因。他们讨论并发现SOI器件的DC电流特性对接地规则很敏感,借助电流模拟系统地解释了对每一级的延时的不准确的预测。该报告为IBM的内部报告,但它显示没有办法在SOI器件的设计中模拟当前体电压的影响,并陈述了在该领域中通过电路模拟对延时所作出的不准确的预测给研究人员所造成的沮丧。It should be noted that there are now numerous publications and patents on how others have utilized SOI devices and what analog techniques they have used. These include publications and prior applications cited in this patent publication, including an unpublished report in International Business Machines Corporation, Messrs. Dubois, (E.) January 1993; Shahidi, (G.G.) and Sun (J.Y.C. ), "Speed Performance Analysis of Thin-Film CMOS/SOI Diagnostic Oscillators," which, after analyzing the performance advantages of thin-film SOI/CMOS ring oscillators over their bulk silicon counterparts using small analytical models for circuit simulations, states that at time The speed improvement on SOI compared to bulk silicon can be explained in terms of threshold voltage, bulk doping coefficient and junction capacitance reduction. It is also possible to utilize their tabular model based on DC current measurements of individual devices for even greater accuracy. A residual bias between simulated and measured propagation delays was found in both methods. Comparing the overall current and the stored charge in a ring oscillator recognizes the source of this difference when underestimating the charge/discharge current. By analyzing the applied voltage and the propagation delay, the researchers determined that a momentary boost in current was not responsible for the difference. They discuss and find that the DC current characteristics of SOI devices are sensitive to grounding rules, systematically explaining the inaccurate prediction of the time delay for each stage with the help of current simulations. The report was internal to IBM, but it showed that there was no way to simulate the effect of current body voltage in the design of SOI devices, and stated that inaccurate predictions of delays made by circuit simulations in this field gave researchers caused frustration.
我们得出结论,在SOI电路器件的设计中需要一种模拟当前体电压影响的方法,但到目前为止还没有其他人实现该方法。在IBM过去的申请中所描述的成果中,部分耗尽的SOI器件保持了器件本体中的存储电荷。该电荷导致“体电压”。体电压进而影响了器件的阈值电压(VT)并由此影响电路的性能。We conclude that a method of simulating the effect of current body voltage is needed in the design of SOI circuit devices, but no one else has achieved this method so far. In efforts described in past IBM applications, partially depleted SOI devices maintained stored charge in the bulk of the device. This charge results in a "bulk voltage". The bulk voltage in turn affects the threshold voltage (VT) of the device and thus affects the performance of the circuit.
在过去,对于体硅器件,这种影响并不重要。引用的第一个相关申请为1997年9月26日申请的USSN 08/938,676,现为2000年2月8日公开的美国专利No.6023577,该申请描述了一种可以随机地设置体电压,或通过工艺的变化来设置体电压的方法。实际测量的体电压并不是完全随机的。在其它相关的公开中显示的该方法示出了尝试更精确地表现体电压的影响的方法。In the past, for bulk silicon devices, this effect was not important. The first related application cited was USSN 08/938,676, filed September 26, 1997, now US Patent No. 6,023,577, published February 8, 2000, which describes a method for randomly setting the bulk voltage, Or a method of setting the body voltage through process changes. The actual measured body voltage is not completely random. This approach, shown in other related publications, shows an attempt to more accurately represent the effect of bulk voltage.
需要改进过去所取得的进展,我们将介绍一种更专门的方法以估计体电压。虽然该方法并不像母申请中的那么通用,但在其应用领域它更精确。Needing to improve on the progress made in the past, we will introduce a more specialized method for estimating bulk voltage. Although the method is not as general as that in the parent application, it is more precise in its field of application.
发明内容Contents of the invention
如下所述,我们研制出一种方法,用于在模拟期间在任何时刻将浮动体电压设置为任何需要的值。在现有的申请中给出的分析电路的方法为SOI晶体管本体选择一个电压,该电压限制了所有可能电压。在其他提到的申请中的方法多少缩小了可能性。这里,我们分析电路的哪些部分可能处于AC平衡,并对该部分进行专门的处理。我们也考虑被分析的电路的不同部分具有不同的历史的情况,并且现在意识到假设所有的晶体管具有“快”或“慢”的历史是不够的。As described below, we developed a method for setting the floating body voltage to any desired value at any point during the simulation. The method of analyzing the circuit given in the prior application selects a voltage for the body of the SOI transistor which limits all possible voltages. The approaches in the other mentioned applications somewhat narrow the possibilities. Here, we analyze which parts of the circuit are likely to be AC balanced and treat that part specifically. We also consider the case where different parts of the circuit being analyzed have different histories, and realize now that it is not sufficient to assume that all transistors have a "fast" or "slow" history.
此外,通过分析电路的哪些部分可能处于AC平衡,由使用该方法所取得的改进允许设计人员容易地建立起他们的当前设计方法行得通的延时规则。在一次运行中,设计人员可以进行多次模拟,并得到相同的结果,而与顺序无关。由于我们的方法,现在已知在性能有限制,但是设计人员不必不断尝试输入和历史的不同组合以发现最好和最差情况的值。这些和其它的改进将在随后的详细说明中阐述。为了更好的理解本发明的优点和特征,参考下面的附图和详细说明:Furthermore, by analyzing which parts of the circuit are likely to be in AC balance, the improvements achieved by using this method allow designers to easily establish delay rules that work with their current design methods. In a single run, designers can run multiple simulations and get the same results, regardless of the order. Due to our approach, there are now known performance limitations, but the designer does not have to keep trying different combinations of inputs and histories to discover best and worst case values. These and other improvements are set forth in the detailed description that follows. For a better understanding of the advantages and features of the present invention, refer to the following drawings and detailed description:
附图说明Description of drawings
图1示出了我们所说的浮体以及当前体电压为B点(内部浮体节点)的当前体电压,其中B点为体。Figure 1 shows what we call a floating body and the current body voltage at point B (internal floating body node), where B is the body.
图2示出了图1的公开所作的改进。FIG. 2 shows a modification of the disclosure of FIG. 1 .
具体实施方式Detailed ways
根据本发明,参考图1,我们研制出了一种用于模拟SOI器件的模型的方法,通常包括以下的步骤:通过在模型中增加一个理想电压源和与其串联的理想电流源,在模拟期间的任何时间将浮体电压设置为任何需要的值,其中电压源的值为所需的体电压,电流源的值一个常数(称作GJ)乘以其两端的电压。正如我们所说的,图1示出了我们所说的浮体并且当前体电压为B点(内部浮体节点)的当前体电压,其中B点为体。该图既适用于NFET又适用于PFET。在图1中,所示元件在图1的下面按标号进行了说明。在图1中,数字1表示理想电压源,数字2表示理想电流源。According to the present invention, with reference to Fig. 1, we have developed a kind of method for simulating the model of SOI device, generally comprise the following steps: by adding an ideal voltage source and its ideal current source in series in the model, during simulation Set the floating body voltage to any desired value at any time, where the value of the voltage source is the desired body voltage and the value of the current source is a constant (called GJ) times the voltage across it. As we said, Figure 1 shows what we call a floating body and the current body voltage is the current body voltage at point B (internal floating body node), where point B is the body. The diagram applies to both NFETs and PFETs. In FIG. 1 , the elements shown are described by reference numerals below FIG. 1 . In Figure 1, numeral 1 represents an ideal voltage source, and numeral 2 represents an ideal current source.
当常数GJ为零时,没有电流流动,附加的元件对电路没有影响。当常数GJ非零时,理想电流源看起来与电阻一样。因此,电流可以流进或流出体节点以设置体节点的电压。When the constant GJ is zero, no current flows and additional components have no effect on the circuit. When the constant GJ is non-zero, an ideal current source looks like a resistor. Accordingly, current can flow into or out of the bulk node to set the voltage of the bulk node.
常数GJ除了在需要改变体电压时以外一直保持为零。The constant GJ is kept at zero except when the bulk voltage needs to be changed.
选择理想电压源的值以设置所需的浮体电压需要两个步骤。首先,通过考虑器件的端电压和温度可以唯一地计算静态体电压。该电压为长时间没有进行切换动作后本体自然地确定的电压。Selecting the value of the ideal voltage source to set the desired floating body voltage requires two steps. First, the static bulk voltage can be uniquely calculated by considering the terminal voltage and temperature of the device. This voltage is the voltage that the main body naturally determines after a long time without switching.
由该基准静态电压,根据可能的切换动作的不同类型,可以发现该电压改变的界限。例如,增加器件的栅极电压,同时保持源极和漏极电压恒定,会对体电压产生特定的影响。From this reference static voltage, according to the different types of possible switching actions, the limits of the voltage change can be found. For example, increasing the gate voltage of a device while keeping the source and drain voltages constant has a specific effect on the bulk voltage.
考虑所有可能的切换类型将会在静态体电压的周围给出电压改变的可能的范围。根据所希望的模拟类型,我们可以从这些电压中任意地挑选一个改变静态电压,以表示该器件未知的切换历史,或者根据已知的切换历史选择一个值,或者选择给定最好或最差情况延时的值。Considering all possible switching types will give the possible range of voltage changes around the static bulk voltage. Depending on the type of simulation desired, we can pick one of these voltages arbitrarily, change the quiescent voltage to represent the unknown switching history of the device, or choose a value based on the known switching history, or choose a given best or worst The value of the condition delay.
由于可以在我们需要的任何时刻重新设置体电压,我们可以通过在每次延时测量开始之前重新设置电压来解决在一个模拟过程中连续的延时问题。Since the bulk voltage can be reset at any time we want, we can solve the problem of continuous time delays in a simulation by resetting the voltage before starting each time delay measurement.
为了解决在延时预报器(例如,延时规则发生器)中预测延时的问题,可以把由体电压的偏移作为确定最好情况/最差情况的一部分。例如,要发现电路的最快延时,除了选择最快的工艺和环境变量外,还可以选择给定最快延时的体电压。例如,这些可由IBM销售的AS/X(在下面说明)自动完成。To address the problem of predicting delays in a delay predictor (eg, a delay rule generator), the offset from bulk voltage can be included as part of the best/worst case determination. For example, to find the fastest time delay for a circuit, in addition to choosing the fastest process and environmental variables, one can also choose the bulk voltage that gives the fastest time delay. For example, this can be done automatically by AS/X sold by IBM (described below).
这种方法已由IBM的AS/X系统或例如SPICE的其它电路模拟器采用模拟SOI的模型实现了,并且使用基于FET逻辑的任何SOI设计人员都可以使用该方法。这些方法可以编码到标准的电子设计软件中,并通常在他们的文件中进行说明。This approach has been implemented by IBM's AS/X system or other circuit simulators such as SPICE using models that simulate SOI, and can be used by any SOI designer using FET-based logic. These methods can be coded into standard electronic design software and are usually described in their documentation.
现在,我们必须明白事实上电压不是随机的。参考图2,在我们下面所描述的改进中,与图1相比较,我们将在图2中说明显示在图中的电路并在随后进行说明。这是一个在我们的电路中广泛使用的标准的锁存电路的一部分。Now, we must understand that voltages are not random in fact. Referring to Fig. 2, in the improvement we describe below, we will illustrate the circuit shown in Fig. 2 in comparison with Fig. 1 and subsequently. This is part of a standard latch circuit that is widely used in our circuits.
由图2容易看出我们所关心的通路是由两个输入中的一个到电路的右侧。如果假设所有的晶体管都具有慢的历史,显然通路的延时也会是慢,对于快的历史也类似,延时也会快。然而,在该电路中,延时并不是唯一被关心的事项。我们也关心由“时钟”和“数据”输入的信号到达的相对时间。例如,这可用于计算锁存器的建立时间。It is easy to see from Figure 2 that the path we care about is from one of the two inputs to the right side of the circuit. If it is assumed that all transistors have a slow history, it is clear that the delay of the path will also be slow, and similarly for the fast history, the delay will also be fast. However, delay is not the only concern in this circuit. We are also concerned with the relative time of arrival of the signals input by "clock" and "data". For example, this can be used to calculate the setup time of a latch.
在大多数的系统中,时钟以重复的方式长期运行。因此,很快就会明白,例如,晶体管T0和T3必定处于AC稳定状态的体电压状态。In most systems, clocks run in a repetitive fashion for long periods of time. Thus, it will quickly become apparent that, for example, transistors T0 and T3 must be at the bulk voltage state of the AC steady state.
然而,数据输入是不可预测的。其值将根据电路中进行的精确计算得到。因此,需要假设在例如T2和T5的晶体管中的数据码型例如具有慢的历史。此外,对于这些晶体管也可以有快的历史,或者在这些值之间的任何可能的其它历史。However, data input is unpredictable. Its value will be based on precise calculations performed in the circuit. Therefore, it needs to be assumed that the data pattern in transistors such as T2 and T5 has a slow history, for example. Also, there may be a fast history for these transistors, or any other possible history between these values.
因此,我们可以根据晶体管的端信号通过简单的拓扑分析将所有的晶体管分类。这里,我们可以把T0和T3称作“时钟”晶体管。这是由于它们的栅极连接到时钟信号,而它们的源极和漏极连接到电源。Therefore, we can classify all transistors by simple topological analysis according to their terminal signals. Here, we can refer to T0 and T3 as "clock" transistors. This is due to the fact that their gates are connected to the clock signal, while their source and drain are connected to the power supply.
类似地,可以将T2和T5分类为“数据”晶体管。这是由于它们的栅极连接到数据信号,而它们的源极和漏极连接到电源。剩下晶体管T1和T4。由于它们的栅极取决于时钟信号而源极和漏极具有类似数据的特性,我们将它们称作“混合”晶体管。虽然通常看不到,另一种类型的“混合”晶体管具有栅极上的数据信号和漏极上的时钟信号。Similarly, T2 and T5 can be classified as "data" transistors. This is due to the fact that their gates are connected to the data signal, while their source and drain are connected to the power supply. This leaves transistors T1 and T4. We call them "hybrid" transistors because their gate depends on the clock signal and the source and drain have data-like characteristics. Although not commonly seen, another type of "hybrid" transistor has a data signal on the gate and a clock signal on the drain.
因此,我们修改了过去公开的晶体管的模型,以允许明确地指定历史的类型。通过从慢值到快值的范围来实现。上述拓扑分析告诉我们晶体管属于哪一类。例如,“时钟”晶体管只需指定为均衡值。由于栅极电压一直在切换,所以我们可以这样做。另一方面,由于不知道历史,必须允许假设“数据”晶体管的体电压值的全部范围。Therefore, we modified models of transistors published in the past to allow unambiguous assignment of historical types. This is achieved by ranging from slow to fast values. The topological analysis above tells us which class a transistor belongs to. For example, "clock" transistors need only be specified as balanced values. Since the gate voltage is switching all the time, we can do this. On the other hand, since the history is not known, it must be allowed to assume the full range of bulk voltage values for the "data" transistors.
可以通过合并晶体管的“时钟”和“混合”组来进行简化。根据我们的模拟,这样会产生少量的错误,并允许简化拓扑分析。这一步是可选的,可以保留所有四种类型的晶体管以进行详细的分析。Simplification can be done by merging "clock" and "mixed" groups of transistors. According to our simulations, this produces a small amount of error and allows for simplified topology analysis. This step is optional and all four types of transistors can be kept for detailed analysis.
我们的方法可以作为一组AS/X模型来实现,用于标准库用法的延时规则发生器。Our approach can be implemented as a set of AS/X models for delayed rule generators for standard library usage.
虽然描述了本发明的优选实施例,但应该明白现在和将来本领域的技术人员可以在随后的权利要求书的范围内做各种改进和提高。这些权利要求用于解释首先说明的本发明的适当的保护范围。While the preferred embodiment of the invention has been described, it should be understood that various modifications and enhancements will occur, now and in the future, to those skilled in the art within the scope of the following claims. These claims are intended to explain the proper scope of the invention first described.
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