CN116973351A - Raman spectrometer chip based on Mach-Zehnder interference - Google Patents
Raman spectrometer chip based on Mach-Zehnder interference Download PDFInfo
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- 238000001069 Raman spectroscopy Methods 0.000 title claims abstract description 42
- 238000010168 coupling process Methods 0.000 claims abstract description 29
- 230000003287 optical effect Effects 0.000 claims abstract description 29
- 238000005859 coupling reaction Methods 0.000 claims abstract description 27
- 230000008878 coupling Effects 0.000 claims abstract description 23
- 239000002131 composite material Substances 0.000 claims abstract description 8
- 239000000758 substrate Substances 0.000 claims description 13
- 150000001875 compounds Chemical class 0.000 claims description 8
- 230000007423 decrease Effects 0.000 claims description 4
- 230000005284 excitation Effects 0.000 claims description 4
- 229910052581 Si3N4 Inorganic materials 0.000 claims description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 3
- 239000011521 glass Substances 0.000 claims description 3
- GQYHUHYESMUTHG-UHFFFAOYSA-N lithium niobate Chemical compound [Li+].[O-][Nb](=O)=O GQYHUHYESMUTHG-UHFFFAOYSA-N 0.000 claims description 3
- 229910052710 silicon Inorganic materials 0.000 claims description 3
- 239000010703 silicon Substances 0.000 claims description 3
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims description 3
- 230000003247 decreasing effect Effects 0.000 claims description 2
- 238000004806 packaging method and process Methods 0.000 claims description 2
- 230000000694 effects Effects 0.000 abstract description 5
- 238000005452 bending Methods 0.000 abstract description 4
- 230000010287 polarization Effects 0.000 abstract description 4
- 238000010586 diagram Methods 0.000 description 6
- 238000001237 Raman spectrum Methods 0.000 description 3
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- 238000001228 spectrum Methods 0.000 description 2
- 230000003044 adaptive effect Effects 0.000 description 1
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- 238000005086 pumping Methods 0.000 description 1
- 230000003595 spectral effect Effects 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
- G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
- G01N21/65—Raman scattering
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
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Abstract
The invention provides a Raman spectrometer chip based on Mach-Zehnder interference, which realizes 360-degree turning of an input light direction and realizes interference through optical paths with different lengths by using Mach-Zehnder interference principle and combining two reflections of first to fourth directional couplers and an arrangement mode thereof, and can effectively reduce the chip volume and the cost without using 180-degree bending waveguides; in addition, the spectrometer units based on Mach-Zehnder interference are arranged side by side up and down, and correspondingly, the image sensor chips can be arranged into a one-dimensional array, so that the signal-to-noise ratio is improved, and the cost is reduced; furthermore, the composite parabolic condenser is arranged on the side end face of the spectrometer chip based on Mach-Zehnder interference, the end face coupling has no polarization selectivity, and the size of a light spot is matched with the size of the coupling-in structure through the condensing effect of the lens, so that light is totally focused on the side face of the chip and enters the spectrometer chip, and the light spot is totally entered into the chip through the lens, so that the coupling efficiency of the light is greatly improved.
Description
Technical Field
The invention relates to the field of Raman spectrum detection, in particular to a Raman spectrometer chip based on Mach-Zehnder interference.
Background
Raman scattering is inelastic scattering, in which photons are interacted due to vibration of molecules of a substance when the light is irradiated on the substance, and the photons are scattered at different frequencies from the excitation light, so that different molecules and even different chemical bonds have different raman peak positions, and the raman spectrum has the characteristics of nondestructive, noninvasive, no need of sample processing, rich information, high analysis efficiency and the like, and is widely applied to the fields of biology, chemistry, medical treatment, food safety, aerospace, environmental protection and the like.
However, raman scattering itself has very weak luminescence intensity, and the intensity of conventional raman signal is only 10 of the incident light intensity -6 ～10 -12 It is difficult to detect raman signals, so how to make the apparatus receive as many raman signals as possible is always a design focus of raman spectrum detection apparatuses. The design of the existing mature Raman spectrometer is limited by the maximum light flux allowed by a device structure, and is difficult to receive enough signals on the premise of keeping high spectral resolution, so that higher requirements on the aspects of data processing and fitting algorithms are provided for subsequent Raman signal extraction.
The chip type Raman spectrometer has a small volume, can realize miniaturization and portability of the spectrometer, and can even realize wearable equipment, and is used for disease and health management and monitoring. However, the chip type Raman spectrometer has few products, almost no products, insufficient volume, low light receiving efficiency, low signal to noise ratio and the like.
Disclosure of Invention
In view of the above drawbacks of the prior art, an object of the present invention is to provide a raman spectrometer chip based on mach-zehnder interference, which is used for solving the problems of large volume, low light receiving efficiency, low signal-to-noise ratio, and the like of the raman spectrometer chip in the prior art.
To achieve the above and other related objects, the present invention provides a raman spectrometer chip based on mach-zehnder interference, the raman spectrometer chip comprising: the optical spectrometer chip comprises a spectrometer chip, an image sensor chip, a packaging body, a composite parabolic condenser and a lens, wherein the spectrometer chip and the image sensor chip are packaged together based on Mach-Zehnder interference;
the spectrometer chip based on Mach-Zehnder interference comprises a plurality of spectrometer units which are arranged side by side up and down and are based on Mach-Zehnder interference;
each spectrometer unit based on Mach-Zehnder interference comprises an optical coupling structure, a first 50/50 beam splitter, a first directional coupler and a second directional coupler which are connected with two output ends of the first 50/50 beam splitter in sequence, a third directional coupler and a fourth directional coupler which are connected with the output ends of the first directional coupler and the second directional coupler respectively, and a second 50/50 beam splitter which is connected with the output ends of the third directional coupler and the fourth directional coupler;
the optical path difference of each spectrometer unit based on Mach-Zehnder interference is sequentially increased or decreased along the arrangement direction;
the first directional coupler, the second directional coupler, the third directional coupler and the fourth directional coupler are arranged side by side up and down; the first directional coupler and the third directional coupler are arranged on the upper side of one output end of the first 50/50 beam splitter and are staggered left and right, and the second directional coupler and the fourth directional coupler are arranged on the lower side of the other output end of the first 50/50 beam splitter and are staggered left and right;
the composite parabolic condenser is arranged on the end face of the spectrometer chip based on Mach-Zehnder interference, and input light is coupled into the light coupling structure through focusing of the lens;
the image sensor chip is arranged behind the output end of the second 50/50 beam splitter so as to receive interference light output by the second 50/50 beam splitter.
Optionally, the optical path difference of each spectrometer unit based on Mach-Zehnder interference increases or decreases along the arrangement direction of the spectrometer unit.
Optionally, the first 50/50 splitter is a 1×2MMI optical splitter or a 50/50 coupler.
Optionally, the first directional coupler, the second directional coupler, the third directional coupler, and the fourth directional coupler are all 50/50 directional couplers.
Optionally, the first directional coupler, the second directional coupler, the third directional coupler and the fourth directional coupler are four-port elements, including an input end, an output end and two reflective ends provided with a reflective mirror, and a coupling waveguide area is arranged between the four ports.
Optionally, an optical filter is further arranged behind the compound parabolic condenser to filter out excitation light introduced in the front-end system.
Optionally, the optical in-coupling structure includes an in-coupling waveguide and a wedge waveguide that are sequentially connected to implement chip in-coupling of the input light.
Optionally, the lens is a cylindrical lens.
Optionally, the image sensor chip is one of a CCD chip, a CMOS image sensor chip, a PD array, a SPAD array, a PMT array, and an SiPM array; the image sensor chip is a one-dimensional array.
Optionally, the spectrometer chip based on mach-zehnder interference is formed on a silicon substrate or a silicon nitride substrate or a lithium niobate substrate or a glass substrate.
As described above, the Mach-Zehnder interference-based Raman spectrometer chip of the invention realizes 360-degree turning of the input light direction and realizes interference through optical paths with different lengths by using Mach-Zehnder interference principle and combining the twice reflection of the first to fourth directional couplers and the arrangement mode thereof, and does not need 180-degree bending waveguide, thereby effectively reducing the volume of the chip and lowering the cost; in addition, the spectrometer units based on Mach-Zehnder interference are arranged side by side up and down, and correspondingly the image sensor chips can be arranged into a one-dimensional array, so that the signal-to-noise ratio is improved, and the cost is reduced; furthermore, the composite parabolic condenser lens is arranged on the side end face of the spectrometer chip based on Mach-Zehnder interference, the end face coupling has no polarization selectivity, the size of a light spot is matched with the size of a coupling-in structure through the condensing effect of a lens, so that light is totally focused on the side face of the chip and enters the spectrometer chip, and the light spot is totally entered into the chip through the lens, so that the coupling efficiency of the light is greatly improved.
Drawings
Fig. 1 shows a schematic structure of a raman spectrometer chip based on mach-zehnder interference according to the present invention.
Fig. 2 is a schematic structural diagram of a spectrometer chip based on mach-zehnder interference according to the present invention.
Fig. 3 and 4 are schematic structural diagrams of a mach-zehnder interference portion in a spectrometer unit based on mach-zehnder interference according to the present invention.
FIG. 5 shows a schematic diagram of a first 50/50 beam splitter that is an example of a Mach-Zehnder interference based spectrometer unit of the present invention.
FIG. 6 shows a schematic diagram of a first 50/50 beam splitter that is another example of a Mach-Zehnder interference based spectrometer unit of the present invention.
Fig. 7 is a schematic structural diagram of a first directional coupler, a second directional coupler, a third directional coupler, and a fourth directional coupler in a spectrometer unit based on mach-zehnder interference according to the present invention.
Fig. 8 to 10 are schematic diagrams showing optical coupling processes of the first directional coupler, the second directional coupler, the third directional coupler and the fourth directional coupler to the input light in the spectrometer unit based on mach-zehnder interference according to the present invention.
Description of element reference numerals
10. Spectrometer chip based on Mach-Zehnder interference
101. Spectrometer unit based on Mach-Zehnder interference
11. Image sensor chip
12. Compound parabolic condenser
13. Optical filter
14. Lens
15. Light incoupling structure
151. Coupling-in waveguide
152. Wedge waveguide
16. First 50/50 beam splitter
161 50/50 coupler
162 1×2MMI beam splitter
163. Input terminal
164. An output terminal
17. First directional coupler
18. Second directional coupler
19. Third directional coupler
20. Fourth directional coupler
21. Second 50/50 beam splitter
22. First straight waveguide
23. Second straight waveguide
241. Input terminal
242. An output terminal
243. Reflective end
244. Reflecting mirror
245. Coupling waveguide region
Detailed Description
Other advantages and effects of the present invention will become apparent to those skilled in the art from the following disclosure, which describes the embodiments of the present invention with reference to specific examples. The invention may be practiced or carried out in other embodiments that depart from the specific details, and the details of the present description may be modified or varied from the spirit and scope of the present invention.
Please refer to fig. 1 to 10. It should be noted that, the illustrations provided in the present embodiment merely illustrate the basic concept of the present invention by way of illustration, and only the components related to the present invention are shown in the drawings rather than the number, shape and size of the components in actual implementation, and the types, numbers and proportions of the components in actual implementation may be changed according to actual needs, and the layout of the components may be more complex.
As shown in fig. 1 to 7, the present embodiment provides a raman spectrometer chip based on mach-zehnder interference, the raman spectrometer chip including:
as shown in fig. 1, a spectrometer chip 10 based on mach-zehnder interference is packaged with an image sensor chip 11, and a compound parabolic condenser 12 and a lens 14 mechanically connected with the package;
as shown in fig. 1 and 2, the mach-zehnder interference-based spectrometer chip 10 includes a plurality of mach-zehnder interference-based spectrometer units 101 arranged side by side above each other;
as shown in fig. 2 and 4, each of the spectrometer units 101 based on mach-zehnder interference includes an optical in-coupling structure 15, a first 50/50 beam splitter 16, a first directional coupler 17 and a second directional coupler 18 connected to two output ends of the first 50/50 beam splitter 16, respectively, a third directional coupler 19 and a fourth directional coupler 20 connected to output ends of the first directional coupler 17 and the second directional coupler 18, respectively, and a second 50/50 beam splitter 21 connected to output ends of the third directional coupler 19 and the fourth directional coupler 20, respectively, which are sequentially connected;
as shown in fig. 2, the optical path difference of each of the mach-zehnder interference-based spectrometer units 101 sequentially increases or decreases in the arrangement direction thereof;
as shown in fig. 4, the first directional coupler 17, the second directional coupler 18, the third directional coupler 19, and the fourth directional coupler 20 are arranged side by side up and down; the first directional coupler 17 and the third directional coupler 19 are disposed on the upper side of one output end of the first 50/50 beam splitter 16 and are staggered left and right, and the second directional coupler 18 and the fourth directional coupler 20 are disposed on the lower side of the other output end of the first 50/50 beam splitter 16 and are staggered left and right;
as shown in fig. 1, the compound parabolic condenser 12 is disposed on an end face of the spectrometer chip 10 based on mach-zehnder interference, and couples the input light into the light coupling structure 15 through focusing of the lens 14;
the image sensor chip 11 is disposed behind the output end of the second 50/50 beam splitter 16 to receive the interference light output by the second 50/50 beam splitter 21.
The working principle of the raman spectrometer chip based on mach-zehnder interference in this embodiment is as follows: the single-color pumping laser irradiates on a sample, scattered Raman signal light or fluorescent signal is collected by the compound parabolic condenser 12 (CPC condenser for short), the scattered Raman signal light or fluorescent signal is converted into a collimated light beam by the compound parabolic condenser 12, the collimated light beam is focused by the lens 14 and received by the light coupling structure 15, and the Raman signal light or fluorescent signal is transmitted and mode-converted by the light coupling structure 15, so that the Raman signal light or fluorescent signal enters the structure of the Mach-Zehnder interference part in an adaptive mode; as shown in fig. 3 and fig. 4, the light entering the mach-zehnder interference part is split into two sub-beams with equal intensity by the first 50/50 beam splitter 16, and the two sub-beams are respectively reflected twice by the first directional coupler 17 and the third directional coupler 19 and twice by the second directional coupler 18 and the fourth directional coupler 20 to realize 360-degree turning of the light and pass through optical paths with different lengths, and finally are combined in the second 50/50 beam splitter 21 to interfere and are detected by the image sensor chip 11; after the image sensor chip 11 detects a set of interference intensities, fourier transform (Fourier Transform) is performed on the interference intensities to obtain a spectrum of the measured raman signal light or fluorescence signal.
As described above, the raman spectrometer chip based on mach-zehnder interference of the embodiment uses the mach-zehnder interference principle and combines the twice reflection of the first to fourth directional couplers and the arrangement mode thereof to realize 360-degree turning of the input light direction and realize interference through optical paths with different lengths, and 180-degree bending waveguide is not needed, so that the size of the chip can be effectively reduced, and the cost is reduced; in addition, the spectrometer units based on Mach-Zehnder interference are arranged side by side up and down, and correspondingly the image sensor chips can be arranged into a one-dimensional array, so that the signal-to-noise ratio is improved, and the cost is reduced; furthermore, the composite parabolic condenser lens is arranged on the side end face of the spectrometer chip based on Mach-Zehnder interference, the end face coupling has no polarization selectivity, the size of a light spot is matched with the size of a coupling-in structure through the condensing effect of a lens, so that light is totally focused on the side face of the chip and enters the spectrometer chip, and the light spot is totally entered into the chip through the lens, so that the coupling efficiency of the light is greatly improved.
As shown in fig. 7, the first directional coupler 17, the second directional coupler 18, the third directional coupler 19 and the fourth directional coupler 20 are four-port elements, and include an input end 241, an output end 242 and two reflecting ends 243 provided with a reflecting mirror 244, a coupling waveguide area 245 is disposed between the four ports, and an optical path turn of 180 ° is realized after the input light passes through the directional coupler; as shown in fig. 8 to 10, the optical coupling process of the first directional coupler 17, the second directional coupler 18, the third directional coupler 19, and the fourth directional coupler 20 to the input light is specifically: as shown in fig. 8, the input light a enters the directional coupler, light coupling is achieved in the coupling waveguide region 245, and is divided into a light beam C and a light beam B, and the phase difference between the light beam C and the light beam B is 90 °; as shown in fig. 9, the light beams C and B pass through the respective mirrors 244 and become the light beams D and E, respectively, and the phase difference between the light beams D and E is 90 °, assuming that the phase of the light beam D is 90 °, and the phase of the light beam E is 0 °; as shown in fig. 10, the light beam D is divided into the light beam D1 and the light beam D2 through the coupling waveguide region 245, the phase of the light beam D1 is kept constant at 90 °, the phase of the light beam D2 is changed to 180 °, the light beam E is divided into the light beam E1 and the light beam E2 through the coupling waveguide region 245, the phase of the light beam E1 is kept constant at 0 °, and the phase of the light beam E2 is changed to 90 °, so that 180 ° coherent phase differences between the light beam EI and the light beam D2 are canceled, and 0 ° coherent phase differences between the light beam D1 and the light beam E2 are mutually long, thereby realizing 180 ° steering of light from input to output. Therefore, 360-degree turning of the input light can be realized after passing through the two directional couplers. As a preferred example, the first directional coupler 17, the second directional coupler 18, the third directional coupler 19 and the fourth directional coupler 20 are all 50/50 directional couplers to achieve the maximum efficient output of the input light.
As shown in fig. 2, as an example, the optical path difference of each of the mach-zehnder interference-based spectrometer units 101 may be realized by providing a straight waveguide between two directional couplers and between the directional coupler and the second 50/50 beam splitter. For example, a first straight waveguide 22 is provided between the first and third directional couplers 17 and 19 and between the third directional coupler 19 and the second 50/50 beam splitter 21, a second straight waveguide 23 is provided between the second and fourth directional couplers 18 and 20 and between the fourth directional coupler 20 and the second 50/50 beam splitter 21, and the first straight waveguide 22 and the second straight waveguide 23 are separated by a distance D to achieve an optical path difference of each of the mach-zehnder interference-based spectrometer units 101. As a preferred example, the optical path difference of each spectrometer unit 101 based on mach-zehnder interference increases or decreases along the arrangement direction of the spectrometer unit, so that a plurality of groups of interference fringes with uniformly-changed fringe intervals and uniformly-changed peak intensities can be finally collected, thereby further improving the spectrum accuracy of the analysis.
By way of example, the first 50/50 beam splitter 16 may be of a conventional beam splitter configuration, provided that a 1:1 intensity splitting of the incident light is achieved. As shown in FIG. 5, the first 50/50 splitter 16 is selected to be a 50/50 coupler, and as shown in FIG. 6, the first 50/50 splitter is selected to be a 1×2MMI splitter.
As shown in fig. 2, the spectrometer chip 10 based on mach-zehnder interference may be fabricated using a conventional substrate, for example, a silicon substrate, a silicon nitride substrate, a lithium niobate substrate, or a glass substrate, etc., without limitation.
As shown in fig. 1, the image sensor chip 11 may be any suitable image sensor, for example, an array PMT, SPAD, CMOS, CCD, siPM, PD, a linear PMT, SPAD, CMOS, CCD, siPM, PD, a single PMT, SPAD, CCD, siPM, or a single photodiode. In the case of a single PMT, SPAD, CMOS, CCD, siPM photodiode, this chip architecture can be used to detect the fluorescent signal intensity of a single molecule. In this embodiment, a CCD chip is preferable to improve the signal-to-noise ratio. The image sensor chip 11 may preferably be arranged as a one-dimensional array, improving signal-to-noise ratio and reducing cost.
As shown in fig. 1, as an example, a filter 13 is further disposed behind the compound parabolic condenser 12, and a wavelength portion of the excitation light that may be introduced from the front-end system may be filtered by the filter 13, so that the light entering the chip is pure raman signal light.
As shown in fig. 1, the lens 14 is a cylindrical lens as an example.
As shown in fig. 2, the optical incoupling structure 15 includes an incoupling waveguide 151 and a wedge waveguide 152 connected in sequence, so as to implement chip incoupling of the input light.
In summary, according to the raman spectrometer chip based on mach-zehnder interference, the mach-zehnder interference principle is used, the twice reflection of the first directional coupler, the second directional coupler and the arrangement mode thereof are combined, 360-degree turning of the input light direction is realized, the interference is realized through optical paths with different lengths, 180-degree bending waveguides are not needed, the size of the chip can be effectively reduced, and the cost is reduced; in addition, the spectrometer units based on Mach-Zehnder interference are arranged side by side up and down, and correspondingly the image sensor chips can be arranged into a one-dimensional array, so that the signal-to-noise ratio is improved, and the cost is reduced; furthermore, the composite parabolic condenser lens is arranged on the side end face of the spectrometer chip based on Mach-Zehnder interference, the end face coupling has no polarization selectivity, the size of a light spot is matched with the size of a coupling-in structure through the condensing effect of a lens, so that light is totally focused on the side face of the chip and enters the spectrometer chip, and the light spot is totally entered into the chip through the lens, so that the coupling efficiency of the light is greatly improved. Therefore, the invention effectively overcomes various defects in the prior art and has high industrial utilization value.
The above embodiments are merely illustrative of the principles of the present invention and its effectiveness, and are not intended to limit the invention. Modifications and variations may be made to the above-described embodiments by those skilled in the art without departing from the spirit and scope of the invention. Accordingly, it is intended that all equivalent modifications and variations of the invention be covered by the claims, which are within the ordinary skill of the art, be within the spirit and scope of the present disclosure.
Claims (10)
1. A raman spectrometer chip based on mach-zehnder interference, the raman spectrometer chip comprising: the optical spectrometer chip comprises a spectrometer chip, an image sensor chip, a packaging body, a composite parabolic condenser and a lens, wherein the spectrometer chip and the image sensor chip are packaged together based on Mach-Zehnder interference;
the spectrometer chip based on Mach-Zehnder interference comprises a plurality of spectrometer units which are arranged side by side up and down and are based on Mach-Zehnder interference;
each spectrometer unit based on Mach-Zehnder interference comprises an optical coupling structure, a first 50/50 beam splitter, a first directional coupler and a second directional coupler which are connected with two output ends of the first 50/50 beam splitter in sequence, a third directional coupler and a fourth directional coupler which are connected with the output ends of the first directional coupler and the second directional coupler respectively, and a second 50/50 beam splitter which is connected with the output ends of the third directional coupler and the fourth directional coupler;
the optical path difference of each spectrometer unit based on Mach-Zehnder interference is sequentially increased or decreased along the arrangement direction;
the first directional coupler, the second directional coupler, the third directional coupler and the fourth directional coupler are arranged side by side up and down; the first directional coupler and the third directional coupler are arranged on the upper side of one output end of the first 50/50 beam splitter and are staggered left and right, and the second directional coupler and the fourth directional coupler are arranged on the lower side of the other output end of the first 50/50 beam splitter and are staggered left and right;
the composite parabolic condenser is arranged on the end face of the spectrometer chip based on Mach-Zehnder interference, and input light is coupled into the light coupling structure through focusing of the lens;
the image sensor chip is arranged behind the output end of the second 50/50 beam splitter so as to receive interference light output by the second 50/50 beam splitter.
2. The mach-zehnder interference based raman spectrometer chip of claim 1, wherein: the optical path difference of each spectrometer unit based on Mach-Zehnder interference increases or decreases along the arrangement direction arithmetic difference.
3. The mach-zehnder interference based raman spectrometer chip of claim 1, wherein: the first 50/50 beam splitter is a 1×2MMI optical beam splitter or a 50/50 coupler.
4. The mach-zehnder interference based raman spectrometer chip of claim 1, wherein: the first directional coupler, the second directional coupler, the third directional coupler and the fourth directional coupler are all 50/50 directional couplers.
5. The mach-zehnder interference based raman spectrometer chip of claim 1 or 4, wherein: the first directional coupler, the second directional coupler, the third directional coupler and the fourth directional coupler are four-port elements, and each four-port element comprises an input end, an output end and two reflecting ends provided with reflecting mirrors, and a coupling waveguide area is arranged between the four ports.
6. The mach-zehnder interference based raman spectrometer chip of claim 1, wherein: and an optical filter is arranged behind the compound parabolic condenser to filter excitation light introduced in the front-end system.
7. The mach-zehnder interference based raman spectrometer chip of claim 1, wherein: the optical coupling-in structure comprises a coupling-in waveguide and a wedge-shaped waveguide which are sequentially connected, so that chip coupling-in of input light is realized.
8. The mach-zehnder interference based raman spectrometer chip of claim 1, wherein: the lens is a cylindrical lens.
9. The mach-zehnder interference based raman spectrometer chip of claim 1, wherein: the image sensor chip is one of a CCD chip, a CMOS image sensor chip, a PD array, a SPAD array, a PMT array and an SiPM array; the image sensor chip is a one-dimensional array.
10. The mach-zehnder interference based raman spectrometer chip of claim 1, wherein: the spectrometer chip based on Mach-Zehnder interference is formed on a silicon substrate or a silicon nitride substrate or a lithium niobate substrate or a glass substrate.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210435806.8A CN116973351A (en) | 2022-04-24 | 2022-04-24 | Raman spectrometer chip based on Mach-Zehnder interference |
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| Application Number | Priority Date | Filing Date | Title |
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| CN202210435806.8A CN116973351A (en) | 2022-04-24 | 2022-04-24 | Raman spectrometer chip based on Mach-Zehnder interference |
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| CN116973351A true CN116973351A (en) | 2023-10-31 |
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