CN115308188B - Chip type Raman spectrometer based on directional coupling mode transmission - Google Patents
Chip type Raman spectrometer based on directional coupling mode transmission Download PDFInfo
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- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
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Abstract
The invention provides a chip Raman spectrometer based on directional coupling transmission, which comprises: the system comprises a static interferometer chip coupled into a grating array, an interferometer array and a grating array, an image sensor chip and a compound parabolic condenser; the coupling-in grating array comprises a plurality of first straight waveguides and a plurality of coupling-in grating units correspondingly arranged beside the first straight waveguides, the first straight waveguides are arranged in parallel to form a row, and the coupling-in grating units transmit optical signals to the first straight waveguides in a directional coupling mode; the interferometer array comprises a plurality of second curved waveguides, second straight waveguides and reflecting mirrors arranged at two ends of the second straight waveguides; the coupling-out grating array comprises a plurality of third straight waveguides and a plurality of coupling-out grating units, and interference light transmitted in the third straight waveguides is coupled out of the static interferometer chip through the coupling-out grating units. The spectrometer effectively improves the input luminous flux and simplifies the alignment structure between the input signal light and the coupling grating array.
Description
Technical Field
The invention relates to the field of Raman spectrum detection, in particular to a chip Raman spectrometer based on directional coupling transmission.
Background
Raman scattering is inelastic scattering, in which photons are interacted due to vibration of molecules of a substance when the light is irradiated on the substance, and the photons are scattered at different frequencies from the excitation light, so that different molecules and even different chemical bonds have different raman peak positions, and the raman spectrum has the characteristics of nondestructive, noninvasive, no need of sample processing, rich information, high analysis efficiency and the like, and is widely applied to the fields of biology, chemistry, medical treatment, food safety, aerospace, environmental protection and the like.
However, the luminous intensity of raman scattering itself is very weak, the intensity of conventional raman signal is only 10 -6～10-12 of the incident light intensity, and it is very difficult to detect raman signal, so how to make the apparatus receive raman signal as much as possible is always a design focus of raman spectrum detection apparatus. The design of the existing mature Raman spectrometer is limited by the maximum light flux allowed by a device structure, and is difficult to receive enough signals on the premise of keeping high spectral resolution, so that higher requirements on the aspects of data processing and fitting algorithms are provided for subsequent Raman signal extraction.
The chip type Raman spectrometer has a small volume, can realize miniaturization and portability of the spectrometer, and can even realize wearable equipment, and is used for disease and health management and monitoring. However, the chip raman spectrometer has few products, almost no products, low input luminous flux and complex coupling alignment structure of input signal light.
Disclosure of Invention
In view of the above-mentioned drawbacks of the prior art, an object of the present invention is to provide a chip raman spectrometer based on directional coupling transmission, which is used for solving the problems of low input luminous flux and complex coupling alignment structure of input signal light in the chip raman spectrometer in the prior art.
To achieve the above and other related objects, the present invention provides a chip raman spectrometer based on directional coupling transmission, the chip raman spectrometer comprising: a package body in which the static interferometer chip and the image sensor chip are packaged together, and a compound parabolic condenser mechanically connected with the package body;
The static interferometer chip comprises a coupling-in grating array, an interferometer array and a coupling-out grating array which are connected in sequence in a one-to-one correspondence manner;
the coupling-in grating array comprises a plurality of first straight waveguides and a plurality of coupling-in grating units correspondingly arranged beside each first straight waveguide, the first straight waveguides are mutually arranged in parallel to form a row, each coupling-in grating unit comprises a coupling-in grating, a first conical planar waveguide and a first curved waveguide which are sequentially connected, and each first curved waveguide and the corresponding first straight waveguide form a directional coupler;
The interferometer array comprises a plurality of second curved waveguides, second straight waveguides correspondingly arranged beside each second curved waveguide, and reflecting mirrors arranged at two ends of each second straight waveguide; the first straight waveguides are connected with the second curved waveguides in a one-to-one correspondence manner; the second curved waveguide and the second straight waveguide correspondingly arranged form a directional coupler; the second straight waveguide and the reflecting mirrors at the two ends of the second straight waveguide form a Fabry-Perot interferometer;
the coupling-out grating array comprises a plurality of third straight waveguides and a plurality of coupling-out grating units, the third straight waveguides are arranged in parallel to each other to form a row, the third straight waveguides are connected with the second curved waveguides in a one-to-one correspondence manner, and interference light transmitted in the third straight waveguides is coupled out of the static interferometer chip through the coupling-out grating units;
The compound parabolic condenser is arranged right above the coupling grating array;
The image sensor chip is arranged above the coupling-out grating array to receive the diffracted light of the coupling-out grating array.
Optionally, the overall profile of the configuration of the coupling-in grating unit on the static interferometer chip matches the shape of the light spot emitted by the compound parabolic condenser.
Optionally, the coupling-out grating unit includes a second tapered planar waveguide and a coupling-out grating that are sequentially connected, where the second tapered planar waveguide is connected with the third straight waveguide.
Optionally, the structure of the in-coupling grating array is the same as the structure of the out-coupling grating array.
Optionally, the coupling-in grating units are arranged in a "fishbone" opposite or staggered up and down manner on the static interferometer chip.
Optionally, lengths of the plurality of second straight waveguides are unequal along an arrangement direction thereof.
Further, the lengths of the plurality of second straight waveguides gradually decrease along the arrangement direction thereof.
Further, the lengths of the plurality of second straight waveguides are equally reduced along the arrangement direction thereof.
Optionally, a minimum distance between the second curved waveguide and the second straight waveguide correspondingly arranged is between 1nm and 400 nm.
Optionally, the image sensor chip is a CCD chip or a CMOS image sensor chip.
Optionally, the reflecting mirrors at two ends of the second straight waveguide are metal plane reflecting mirrors; and an optical filter is arranged below the compound parabolic condenser to filter excitation light introduced in the front-end system.
Alternatively, the static interferometer chip is formed on a silicon substrate or on a plastic substrate.
Optionally, the coupling grating is a rectangular grating, a sector grating or a sub-wavelength grating; the coupling-out grating in the coupling-out grating unit is a rectangular grating, a fan-shaped grating or a sub-wavelength grating.
As described above, the chip raman spectrometer based on directional coupling transmission of the invention, the coupling grating array transmits optical signals in a directional coupling manner, effectively increases the area of the coupling grating on the static interferometer chip, and then effectively increases the input luminous flux of the spectrometer in a form of combining with the compound parabolic condenser; and simplifying the alignment structure between the input signal light and the coupling-in grating array.
Drawings
Fig. 1 shows a schematic structural diagram of a chip raman spectrometer based on directional coupling transmission according to the present invention.
Fig. 2 is a schematic structural diagram of a static interferometer chip in a chip raman spectrometer based on directional coupling transmission according to the present invention.
Fig. 3a and 3b are schematic structural diagrams of an arrangement of coupling grating arrays in a chip raman spectrometer based on directional coupling transmission according to the present invention.
Fig. 4 is a schematic structural diagram of another arrangement of coupling grating arrays in the chip raman spectrometer based on directional coupling transmission according to the present invention.
Fig. 5 shows a schematic diagram of the structure of a small static interferometer cell in the static interferometer chip of fig. 2.
Fig. 6 is a schematic structural diagram of an arrangement of an out-coupling grating array in a chip raman spectrometer based on directional coupling transmission according to the present invention.
FIG. 7 is a schematic diagram of the structure of the static interferometer chip of FIG. 2 in which the first straight waveguide is curved at the corners.
FIG. 8 is a schematic diagram of the structure of the third straight waveguide of the static interferometer chip of FIG. 2 in an arc shape at a corner.
Fig. 9 to 11 are schematic views of structures of the coupling-in grating and the coupling-out grating in the static interferometer chip of fig. 2, which are rectangular gratings, sector gratings, and sub-wavelength gratings in sequence.
Description of element reference numerals
10. Static interferometer chip
11. Image sensor chip
12. Compound parabolic condenser
121. Light spot
122. Optical filter
13. Coupling into a grating array
131. First straight waveguide
132. Coupling in grating unit
133. Coupling in grating
134. First tapered planar waveguide
135. First curved waveguide
136. Directional coupler
14. Interferometer array
141. Second curved waveguide
142. Second straight waveguide
143. Reflecting mirror
144. Directional coupler
15. Coupling out grating array
151. Third straight waveguide
152. Coupling out grating unit
153. Second tapered planar waveguide
154. Coupling out grating
155. Third curved waveguide
156. Directional coupler
16. Static interferometer unit
Length of D second straight waveguide
Detailed Description
Other advantages and effects of the present invention will become apparent to those skilled in the art from the following disclosure, which describes the embodiments of the present invention with reference to specific examples. The invention may be practiced or carried out in other embodiments that depart from the specific details, and the details of the present description may be modified or varied from the spirit and scope of the present invention.
Please refer to fig. 1 to 11. It should be noted that, the illustrations provided in the present embodiment merely illustrate the basic concept of the present invention by way of illustration, and only the components related to the present invention are shown in the drawings rather than the number, shape and size of the components in actual implementation, and the types, numbers and proportions of the components in actual implementation may be changed according to actual needs, and the layout of the components may be more complex.
As shown in fig. 1,2 and 5, the present embodiment provides a chip raman spectrometer based on directional coupling transmission, where the chip raman spectrometer includes: as shown in fig. 1, a package body in which a static interferometer chip 10 and an image sensor chip 11 are packaged together, and a compound parabolic condenser 12 mechanically connected to the package body;
as shown in fig. 2, the static interferometer chip 10 includes an in-grating array 13, an interferometer array 14 and an out-grating array 15, which are sequentially connected in a one-to-one correspondence manner;
As shown in fig. 2 and fig. 5, the coupling-in grating array 13 includes a plurality of first straight waveguides 131 and a plurality of coupling-in grating units 132 correspondingly disposed beside each first straight waveguide 131, and the plurality of first straight waveguides 131 are arranged in parallel to each other in a row, each coupling-in grating unit 132 includes a coupling-in grating 133, a first tapered planar waveguide 134 and a first curved waveguide 135 that are sequentially connected, and each first curved waveguide 135 and the corresponding first straight waveguide 131 form a directional coupler 136;
As shown in fig. 2 and 5, the interferometer array 14 includes a plurality of second curved waveguides 141, second straight waveguides 142 disposed beside each of the second curved waveguides 141, and reflecting mirrors 143 disposed at two ends of each of the second straight waveguides 142; the first straight waveguides 131 and the second curved waveguides 141 are connected in a one-to-one correspondence; the second curved waveguide 141 and the second straight waveguide 142 correspondingly arranged form a directional coupler 144; the second straight waveguide 142 and the reflecting mirrors 143 at both ends thereof form a fabry-perot interferometer;
As shown in fig. 2 and fig. 5, the coupling-out grating array 15 includes a plurality of third straight waveguides 151 and a plurality of coupling-out grating units 152, the plurality of third straight waveguides 151 are arranged in parallel to each other to form a row, the plurality of third straight waveguides 151 are connected to the plurality of second curved waveguides 141 in a one-to-one correspondence manner, and interference light transmitted in the third straight waveguides 151 is coupled out of the static interferometer chip 10 through the coupling-out grating units 152;
as shown in fig. 1, the compound parabolic condenser 12 is disposed directly above the coupling-in grating array 13;
As shown in fig. 1, the image sensor chip 11 is disposed above the coupling-out grating array 15 to receive the diffracted light of the coupling-out grating array 15.
Each of the optical path units of the in-coupling grating array 13, the interferometer array 14, and the out-coupling grating array 15, which are connected in a one-to-one correspondence, is formed as a static interferometer unit 16 as shown in fig. 5. The working principle is as follows: the excitation light irradiates on the sample, the scattered signal light is collected by the composite parabolic condenser 12 (CPC condenser for short), the signal light is converted into a quasi-straight beam by the composite parabolic condenser 12, the quasi-straight beam is incident into the coupling-in grating array 13 of the static interferometer chip 10, the signal light enters the first straight waveguides 131 which are arranged in parallel with each other in a row through the directional coupler 136 and is transmitted into the interferometer array 14 through the first straight waveguides 131 in a one-to-one correspondence manner, the signal light firstly enters the second curved waveguides 141 in the interferometer array 14 and is transmitted in the second curved waveguides 141, the signal light is coupled into the second straight waveguides 142 in a form of evanescent waves by controlling the distance between the second curved waveguides 141 and the second straight waveguides 142, the signal light entering the second straight waveguides 142 is formed by the second straight waveguides 142 and the two end of the first straight waveguides 131 to form a one-to-one correspondence manner, the signal light is transmitted back into the second straight waveguides 141 in a specific form of evanescent waves, and then the signal light is transmitted out of the second straight waveguides 142 in a specific form of waveguide 151 along the second straight waveguides 15 by controlling the distance between the second curved waveguides 141 and the second straight waveguides 142; finally, the signal light is diffracted out by the coupling grating array 15 and captured by the image sensor chip 11 above the coupling grating array, a group of interference patterns are acquired by the image sensor chip 11, and a signal light spectrum can be obtained through Fourier transform (Fourier Transform).
The evanescent wave is explained herein with a Fabry-perot interferometer (Fabry-Perot Interferometer).
Evanescent wave: light is transmitted within the waveguide in total reflection, and at the interface there is still an optical field at the interface, whose field strength rapidly decays with increasing distance from the boundary, although all power is reflected back, such an electromagnetic field that decays with distance is called a evanescent wave.
Fabry-perot interferometer: a cavity formed by two parallel high reflectivity surfaces (such as two-sided metal mirrors), wherein the reflectivity of the mirrors is <100%, multiple transmission and reflection occur on the two cavity surfaces during the light beam propagation in the cavity, and for the same light beam, two adjacent light beams generated during multiple transmission and reflection on a certain cavity surface have optical path difference deltal in space and geometrically:
ΔL＝2nL*cosθ
Phase difference:
transmittance function: r is the reflectivity of the two cavity surfaces, θ is the refraction angle of the light beam propagating in the waveguide, and L is the length of the interference cavity.
In the transmission spectrum, the wavelength interval between two adjacent transmission peaks is:
Where lambda 0 is the center wavelength of the nearest peak and n is the refractive index of the waveguide material.
As can be seen from the mathematical expression, the effects of wavelength selection and fine light splitting can be achieved by designing the reflectivity and the cavity (waveguide) length of the Fabry-Perot interferometer, and the longer the cavity length is, the finer the fringes in the obtained interference pattern are, and the higher the spectral resolution is. In this embodiment, the length of the second straight waveguide 142 between the two mirrors 143 determines the size of the spectral resolution.
As described above, the coupling grating array transmits optical signals in a directional coupling manner, so that the area of the coupling grating on the static interferometer chip is effectively increased, and then the coupling grating array is combined with the composite parabolic condenser, so that the input luminous flux of the spectrometer is effectively increased; and simplifying the alignment structure between the input signal light and the coupling-in grating array.
As an example, the static interferometer chip 10 may be formed on a silicon substrate or may be formed on a plastic substrate. The static interferometer chip 10 is preferably formed on a plastic substrate in this embodiment, and the use of polymer plastic as the substrate material of the static interferometer chip 10 has advantages of low cost, easy preparation, high durability, and the like.
As shown in fig. 1, as an example, the overall profile of the arrangement shape of the several incoupling grating units 132 on the static interferometer chip 10 matches the shape of the light spot 121 emitted by the compound parabolic concentrator 12. The shape of the light spot 121 is generally circular, square or rectangular, so that the shape of the arrangement of the plurality of coupling-in grating units 132 on the static interferometer chip 10 is set to be similar to the shape of the circular, square or rectangular, so as to match the shape of the light spot 121 to achieve the highest possible signal light collection efficiency. The arrangement of the coupling-in grating array 13 is not completely fixed, so long as the overall profile satisfies the above requirements, the signal light collection efficiency can be further improved.
As shown in fig. 3a and 3b, the coupling-in grating units 132 may be disposed on the static interferometer chip 10 in a staggered manner, which may further increase the effective area of the coupling-in grating, thereby further increasing the input light flux of the spectrometer.
As shown in fig. 4, the coupling-in grating units 132 may also be arranged in a "fishbone" opposite manner on the static interferometer chip 10, as an example. By way of example, the arrangement of the coupling-out grating units 152 on the static interferometer chip 10 is not limited, and may be, for example, a linear single-row array as shown in fig. 1, or may be consistent with the arrangement of the coupling-in grating units 132 on the static interferometer chip 10, or may be in other multi-row array arrangements, which is specifically selected according to practical needs. Preferably, the arrangement of the coupling-out grating 152 on the static interferometer chip 10 is selected to be square or rectangular, so as to facilitate capturing of the signal light by the image sensor chip 11.
As an example, the transmission manner of the coupling-out grating array 15 to the diffracted light may be a direct transmission manner or a directional coupling transmission manner, specifically, as shown in fig. 5, that is, a direct transmission manner, where the structure of the coupling-out grating unit 152 includes a second tapered planar waveguide 153 and a coupling-out grating 154 sequentially connected, and the second tapered planar waveguide 153 is connected to the third straight waveguide 151; as shown in fig. 6, which is a directional coupling transmission mode, at this time, the structure of the out-coupling grating array 15 is the same as the structure of the in-coupling grating array 13, where the structure of the out-coupling grating unit 152 includes an out-coupling grating 154, a second tapered planar waveguide 153, and a third curved waveguide 155 that are sequentially connected, and each of the third curved waveguides 155 and the third straight waveguide 151 that are correspondingly disposed form a directional coupler 156.
As shown in fig. 1 and 2, as an example, the included angle between the light incident on the coupling-in grating array 13 by the compound parabolic condenser 12 and the vertical direction is between 0 ° and 30 °, and the distance between the compound parabolic condenser 12 and the coupling-in grating array 13 is between 0mm and 99 mm. In this embodiment, it is preferable that the angle between the light incident on the coupling-in grating array 13 by the compound parabolic condenser 12 and the vertical direction is 10 °, and the distance between the compound parabolic condenser 12 and the coupling-in grating array 12 is 1mm.
As shown in fig. 1, the image sensor chip 11 may be any suitable image sensor, such as a CCD chip or a CMOS image sensor chip, and a CCD chip is preferable in this embodiment.
As shown in fig. 5, as an example, the mirrors 143 at both ends of the second straight waveguide 142 may be plane mirrors of a metal material. For example, copper mirrors are selected in this embodiment.
As shown in fig. 1, as an example, a filter 122 is further disposed below the compound parabolic condenser 12, and a wavelength portion of the excitation light that may be introduced from the front-end system may be filtered by the filter 122, so that the light entering the grating array 13 is pure signal light.
As shown in fig. 9 to 11, the coupling-in grating 133 and the coupling-out grating 154 may be conventional coupling gratings, such as rectangular gratings shown in fig. 9, fan-shaped gratings shown in fig. 10, and sub-wavelength gratings shown in fig. 11.
As shown in fig. 7 and 8, it should be noted that, during layout design, a turning situation of the waveguide often occurs, for example, the first straight waveguide 131 (as shown in fig. 7) and the third straight waveguide 151 (as shown in fig. 8) may turn during the connection with the first tapered planar waveguide 134 and the second tapered planar waveguide 153, and at the turning point a or B, the connection between the first straight waveguide 131 and the third straight waveguide 151 needs to be designed into an arc waveguide form, so as to reduce the transmission loss of signals.
As an example, the minimum distance between the second curved waveguide 141 and the second straight waveguide 142 correspondingly disposed is between 1nm and 400 nm.
As shown in fig. 2, as an example, lengths D of the plurality of second straight waveguides are not equal in the arrangement direction thereof. Preferably, the lengths D of the plurality of second straight waveguides gradually decrease along the arrangement direction thereof, so that a plurality of groups of interference fringes with different fringe intervals and different peak intensities can be finally collected, thereby improving the spectrum accuracy of the analysis. Optimally, the lengths D of a plurality of the second straight waveguides are reduced along the arrangement direction of the second straight waveguides, so that a plurality of groups of interference fringes with uniformly-changed fringe intervals and uniformly-changed peak intensities can be finally acquired, and the spectrum accuracy of the analysis is further improved.
As shown in fig. 5, the first straight waveguide 131, the second straight waveguide 142, and the third straight waveguide 151 may be selected as single-mode waveguides or multi-mode waveguides, and may be specifically selected according to actual needs, which is not limited herein. In this embodiment a multimode waveguide is chosen.
As shown in fig. 5 and 6, the first curved waveguide 135, the second curved waveguide 141 and the third curved waveguide 155 may be selected as single-mode waveguides or multimode waveguides, and may be specifically selected according to actual needs, which is not limited herein. In this embodiment a multimode waveguide is chosen. In summary, according to the chip raman spectrometer based on the directional coupling transmission, the coupling grating array transmits optical signals in a directional coupling manner, so that the area of the coupling grating on the static interferometer chip is effectively increased, and the input luminous flux of the spectrometer is effectively increased by adopting a mode of combining with the composite parabolic condenser; and simplifying the alignment structure between the input signal light and the coupling-in grating array. Therefore, the invention effectively overcomes various defects in the prior art and has high industrial utilization value.
The above embodiments are merely illustrative of the principles of the present invention and its effectiveness, and are not intended to limit the invention. Modifications and variations may be made to the above-described embodiments by those skilled in the art without departing from the spirit and scope of the invention. Accordingly, it is intended that all equivalent modifications and variations of the invention be covered by the claims, which are within the ordinary skill of the art, be within the spirit and scope of the present disclosure.
Claims (10)
1. A chip raman spectrometer based on directional coupling mode transmission, characterized in that the chip raman spectrometer comprises: a package body in which the static interferometer chip and the image sensor chip are packaged together, and a compound parabolic condenser mechanically connected with the package body;
The static interferometer chip comprises a coupling-in grating array, an interferometer array and a coupling-out grating array which are connected in sequence in a one-to-one correspondence manner;
the coupling-in grating array comprises a plurality of first straight waveguides and a plurality of coupling-in grating units correspondingly arranged beside each first straight waveguide, the first straight waveguides are mutually arranged in parallel to form a row, each coupling-in grating unit comprises a coupling-in grating, a first conical planar waveguide and a first curved waveguide which are sequentially connected, and each first curved waveguide and the corresponding first straight waveguide form a directional coupler;
The interferometer array comprises a plurality of second curved waveguides, second straight waveguides correspondingly arranged beside each second curved waveguide, and reflecting mirrors arranged at two ends of each second straight waveguide; the first straight waveguides are connected with the second curved waveguides in a one-to-one correspondence manner; the second curved waveguide and the second straight waveguide correspondingly arranged form a directional coupler; the second straight waveguide and the reflecting mirrors at the two ends of the second straight waveguide form a Fabry-Perot interferometer;
the coupling-out grating array comprises a plurality of third straight waveguides and a plurality of coupling-out grating units, the third straight waveguides are arranged in parallel to each other to form a row, the third straight waveguides are connected with the second curved waveguides in a one-to-one correspondence manner, and interference light transmitted in the third straight waveguides is coupled out of the static interferometer chip through the coupling-out grating units;
The coupling-out grating unit comprises a second conical planar waveguide and a coupling-out grating which are sequentially connected, and the second conical planar waveguide is connected with the third straight waveguide;
The compound parabolic condenser is arranged right above the coupling grating array;
the image sensor chip is arranged above the coupling-out grating array to receive the diffracted light of the coupling-out grating array;
And the overall outline of the arrangement shape of the coupling-in grating units on the static interferometer chip is matched with the shape of the light spot emitted by the compound parabolic condenser.
2. The transmission-based on directional coupling chip raman spectrometer of claim 1, wherein: the coupling-in grating units are arranged on the static interferometer chip in a 'fishbone' shape in a relative mode or in an up-down staggered mode.
3. The transmission-based on directional coupling chip raman spectrometer of claim 1, wherein: the lengths of the plurality of second straight waveguides are unequal along the arrangement direction.
4. A transmission-based on directional coupling chip raman spectrometer according to claim 3, wherein: the lengths of the plurality of second straight waveguides gradually decrease along the arrangement direction.
5. The transmission-based on directional coupling chip raman spectrometer of claim 4, wherein: the lengths of the plurality of second straight waveguides are equally reduced along the arrangement direction.
6. The transmission-based on directional coupling chip raman spectrometer of claim 1, wherein: the minimum distance between the second bending waveguide and the second straight waveguide correspondingly arranged is between 1nm and 400 nm.
7. The transmission-based on directional coupling chip raman spectrometer of claim 1, wherein: the image sensor chip is a CCD chip or a CMOS image sensor chip.
8. The transmission-based on directional coupling chip raman spectrometer of claim 1, wherein: the reflectors at the two ends of the second straight waveguide are metal plane reflectors; and an optical filter is arranged below the compound parabolic condenser to filter excitation light introduced in the front-end system.
9. The transmission-based on directional coupling chip raman spectrometer of claim 1, wherein: the static interferometer chip is formed on a silicon substrate or on a plastic substrate.
10. The transmission-based on directional coupling chip raman spectrometer of claim 1, wherein: the coupling grating is a rectangular grating, a fan-shaped grating or a sub-wavelength grating; the coupling-out grating in the coupling-out grating unit is a rectangular grating, a fan-shaped grating or a sub-wavelength grating.
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| US7411670B2 (en) * | 2005-12-07 | 2008-08-12 | Ge Homeland Protection, Inc. | Collection probe for use in a Raman spectrometer system and methods of making and using the same |
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