CN116699177A - An accelerometer performance testing device, method and system - Google Patents

Abstract

The invention discloses an accelerometer performance testing device, method and system, belonging to the technical field of high-precision inertial sensor testing. The invention is based on a four-wire pendulum active vibration isolation system, which can reduce the influence of ground vibration noise on the residual vibration of the pendulum, and provide a low-noise test environment of the order of ^10-9 m/s ² in the horizontal direction for the accelerometer to be tested. The invention utilizes a displacement monitoring instrument to record the horizontal displacement change of the pendulum, which can be used as a theoretical input after calibration, and is compared with the measured acceleration data of the accelerometer to be measured in the calibration direction for amplitude spectrum comparison, and by changing the amplitude and the amplitude of the injected electromagnetic excitation signal Frequency, to obtain the performance test results of the accelerometer to be tested, and realize the resolution test and sensitivity calibration of the horizontal axis of the high-precision accelerometer in the 0.1Hz-1Hz frequency band of the order of ^10-9 m/s ^2. It also has the ability to provide a low-noise environment and can Realize the advantages of accelerometer different frequency acceleration response measurement.

Description

An accelerometer performance testing device, method and system

technical field

The invention belongs to the technical field of high-precision inertial sensor testing, and more specifically relates to an accelerometer performance testing device, method and system.

Background technique

The resolution of the high-precision space electrostatic accelerometer is usually above 10 ^-9 m/s ² , and it has been successfully used as an important load in domestic and foreign satellite gravity measurement programs. one of the important research tasks. A comprehensive test of the functional performance of the high-precision electrostatic accelerometer on the ground is an essential step before its on-orbit application. Among them, the high-voltage suspension test method uses the electrostatic force balance accelerometer to test the gravity of the mass, which is the most important step in its ground test. An important method for testing and validating accelerometer performance such as resolution and sensitivity in the horizontal axis.

Traditional accelerometer resolution testing and sensitivity calibration methods are no longer applicable to accelerometers with a precision of 10 ^-9 m/s ² or even higher, and the performance test level of high-voltage suspension experiments of high-precision space electrostatic accelerometers is often limited by the ground factors such as vibration. Therefore, in order to further improve the test and evaluation level of the main performance parameters of the accelerometer, it is necessary to improve the existing accelerometer performance test method, provide a test platform with low vibration and noise, and complete the functional test, horizontal axis resolution test and sensitivity coefficient of the accelerometer Calibration will provide important support for ground testing of space inertial sensors and their application in satellite gravity measurement and other fields. In addition, performance tests such as resolution and sensitivity of inertial sensors such as MEMS accelerometers, microseismometers, and gravimeters also rely on high-performance vibration isolation devices and calibration test systems.

Contents of the invention

Aiming at the defects of the prior art, the object of the present invention is to provide an accelerometer performance testing device, method and system, aiming at solving the problem of traditional accelerometer resolution testing and sensitivity calibration methods for 10 ^-9 m/s ² or even higher Accuracy of accelerometers is no longer an issue.

In order to achieve the above object, in the first aspect, the present invention provides an accelerometer performance testing device, comprising: a support frame, four suspension wires of equal length, a vibration isolation platform, several motion sensors, an active vibration isolation controller, and a drive controller , several electromagnetic drives and displacement monitoring instruments;

One end of the suspension wire is fixed to the crossbeam on the support frame, and the other end is connected to the vibration isolation platform for suspending the vibration isolation platform, and its length can ensure that the four-wire pendulum can move along two horizontal translation degrees of freedom;

The accelerometer to be measured is fixedly placed on the central position of the table top of the vibration isolation platform;

The plurality of motion sensors are used to obtain the absolute speed information of the vibration isolation platform and output it to the active vibration isolation controller;

The active vibration isolation controller is used to generate an active vibration isolation control signal according to the absolute speed information of the vibration isolation platform, and then generate a corresponding current through the signal conditioning circuit, and output it to the electromagnetic driver;

The drive controller is used to generate a sinusoidal voltage signal with an amplitude of A and a frequency required for calibration of f _a , and generate a corresponding current through a signal conditioning circuit, and output it to the electromagnetic driver;

The plurality of electromagnetic drivers are used to firstly receive the current generated by the active vibration isolation controller to form a feedback force used to reduce the vibration degree of the vibration isolation platform. After the vibration isolation platform enters the optimal state, receive the current generated by the drive controller current, and based on the principle of magnetic force transmission, an electromagnetic driving force of the frequency f _a required for calibration is formed to drive the vibration isolation platform to produce translational displacement changes along the calibration direction;

The displacement monitoring instrument is used to monitor and record the displacement data of the vibration isolation platform in the directions of two horizontal degrees of freedom;

The support frame, four suspension wires of equal length and the vibration isolation platform together form a passive vibration isolation structure, and together with the motion sensor, active vibration isolation controller and electromagnetic driver, an active vibration isolation system is formed, so that the vibration isolation system has 0.1 ~10Hz frequency band horizontal ground vibration noise isolation function.

Preferably, the electromagnetic driver includes: a permanent magnet installed on the table of the vibration isolation platform and an electromagnetic coil installed on the ground-fixed base along the direction of the permanent magnet.

Preferably, the plurality of electromagnetic drivers comprises:

The first electromagnetic driver is located on the east-west axis of the vibration isolation platform, and controls the east-west translation degree of freedom movement of the vibration isolation platform;

The second electromagnetic driver and the third electromagnetic driver are symmetrically arranged on both sides of the north-south axis of the vibration isolation platform, and jointly realize the simultaneous control of the north-south direction translation degree of freedom movement and rotation degree of freedom movement of the vibration isolation platform.

Preferably, the device further includes: a magnetic shield;

The magnetic shield covers the electromagnetic driver and is used for shielding the electromagnetic driver from magnetic field interference or magnetic leakage generated by the accelerometer to be measured.

In order to achieve the above object, in the second aspect, the present invention provides a method for testing accelerometer performance, which is applied to the accelerometer performance testing device described in the first aspect, the method comprising:

After the vibration isolation of the vibration isolation platform enters the best state and the output data of the accelerometer to be measured is stable, obtain the output data of the displacement monitoring instrument and the accelerometer to be measured in the same period of time;

Perform differential processing on the output data of the displacement monitoring instrument to obtain the translational acceleration signal of the vibration isolation platform, and further calculate the amplitude spectrum of the signal as the theoretical output amplitude of the acceleration;

The theoretical acceleration is compared with the measured acceleration of the accelerometer to be tested in the calibration direction, and the amplitude spectrum is compared to determine whether they are consistent within the error range, and the resolution test result of the accelerometer to be tested is obtained.

Preferably, the method also includes:

The sensitivity calibration results of the accelerometer to be tested are obtained by linear fitting of the response acceleration amplitude spectra of the accelerometer to be tested and the displacement monitoring instrument under different amplitude electromagnetic excitation signals.

Preferably, the method also includes:

By changing the frequency of the injected electromagnetic excitation signal, the transfer function or low-frequency response characteristics of the accelerometer to be measured are analyzed.

To achieve the above object, in a third aspect, the present invention provides an accelerometer performance testing system, comprising: the accelerometer performance testing device, memory and processor as described in the first aspect;

The memory is used to store computer programs and execute instructions;

The processor is configured to execute the computer-executable instructions, so that when the computer program runs on the processor, the method described in the second aspect is executed.

Generally speaking, compared with the prior art, the above technical solution conceived by the present invention has the following beneficial effects:

(1) The present invention provides an accelerometer performance testing device, based on the four-wire pendulum active vibration isolation system, which can reduce the impact of ground vibration noise on the residual vibration of the pendulum, and provide a horizontal direction of 10 ^-9 m for the accelerometer to be tested. /s ² -level low-noise test environment. The non-contact electromagnetic driver can provide electromagnetic excitation signals in the two translational freedom directions of the table level. In addition, compared with the contact drive, which will hinder the free movement of the vibration isolation table and affect the system performance, the non-contact drive has less interference, and has the characteristics of a larger output range and no hysteresis, and is more suitable for active in the field of precision measurement. vibration isolation system.

(2) The present invention provides a kind of accelerometer performance testing method, utilize displacement monitoring instrument to record the horizontal displacement change of pendulum platform, can be used as theoretical input through calibration, carry out amplitude spectrum with the actually measured acceleration data of accelerometer to be measured on the calibration direction In comparison, the performance test of the accelerometer ^to be tested can be performed by changing the amplitude and frequency of the injected excitation signal, and the resolution test and sensitivity of the horizontal axis of the high-precision accelerometer in the 0.1Hz-1Hz frequency band of 10 ^-9 m/s can be realized. Calibration also has the advantages of providing a low-noise environment and realizing the acceleration response measurement of different frequencies of the accelerometer.

Description of drawings

Fig. 1 is a schematic structural diagram of a high-precision accelerometer performance testing device provided by the present invention.

Fig. 2 is a front view of a high-precision accelerometer performance testing device provided by the present invention.

Fig. 3 is a flowchart of an accelerometer performance testing method provided by the present invention.

Throughout the drawings, the same reference numerals are used to designate the same elements or structures, wherein:

1-supporting frame; 2-suspension wire; 3-vibration isolation platform; 4-motion sensor; 5-controller; 6-electromagnetic driver; 7-displacement monitoring instrument; 8-accelerometer to be measured; 9-data processing system; 10-Magnetic shield; 51-Active vibration isolation controller; 52-Drive controller; 53-Signal conditioning circuit; 61-Permanent magnet; 92-result display module.

Detailed ways

In order to make the object, technical solution and advantages of the present invention clearer, the present invention will be further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described here are only used to explain the present invention, not to limit the present invention.

As shown in Fig. 1 and Fig. 2, the present invention provides a kind of high-precision accelerometer performance test device, comprising: support frame 1, four equal-length suspension wires 2, vibration isolation platform 3, several motion sensors 4, controller 5, Several electromagnetic drivers 6 , displacement monitoring instruments 7 , accelerometers to be measured 8 , data processing systems 9 and magnetic shields 10 .

The support frame 1 is placed on a flat ground, the suspension wire 2 is fixed to the crossbeam of the support frame 1 (screws and connection plates), and the bottom is connected to the connection plate of the vibration isolation platform 3 (wire rope clamping device). The platform is suspended. The first motion sensor, the second motion sensor and the accelerometer 8 to be measured are respectively placed on the table of the vibration isolation platform 3, and the first motion sensor and the second motion sensor are placed symmetrically on both sides of the accelerometer 8 to be measured, The third motion sensor is placed on the ground near the vibration isolation platform 3 , and its signal output end is connected with the signal input end of the data processing system 9 . The signal output end of the controller 5 is connected with the signal input end of the electromagnetic driver 6, the signal output end of the electromagnetic driver 6 is connected with the signal input end of the vibration isolation platform 3, and the signal output of the displacement monitoring instrument 7 is end is connected with the signal input end of the data processing system 9, and the accelerometer 8 to be measured is fixed on the central position of the vibration isolation platform 3 table tops, and its signal output end is connected with the signal input end of the data processing system 9. The magnetic shield 10 is located on both sides of the vibration isolation platform and covers the electromagnetic driver 6, which is used to shield the magnetic field interference or magnetic leakage generated by the accelerometer 8 to be measured, etc., but leaves space for the magnetic transmission process, and finally passes The data processing system 9 calculates and analyzes to obtain the final resolution test and sensitivity calibration results.

Specifically, as shown in FIG. 1 and FIG. 2 , the support frame 1 , suspension wires of equal length 2 and vibration isolation platform 3 form a two-axis translation four-wire pendulum structure based on a single pendulum model. The vibration isolation platform 3 is an optical platform. The suspension wire is long enough so that the four-wire pendulum can move along two horizontal degrees of freedom, and it has the vibration isolation function of ground vibration and noise in the horizontal direction in the 0.1-10Hz frequency band. The vibration isolation performance is determined by the residual vibration acceleration on the vibration isolation platform. The ratio of the noise spectral density to the vibration acceleration noise spectral density of the ground near the location of the vibration isolation platform in the same time period is determined. The horizontal two translation degrees of freedom directions refer to the horizontal y and z directions, which correspond to the east-west and north-south plane directions respectively.

The quantity of described motion sensor 4 is three, comprises the microseismometer (requiring noise power spectral density to reach ^10-10 m/s ² /Hz ^{1/ 2} magnitude), can record the residual vibration acceleration noise on the vibration isolation platform and the vibration data of the ground near the vibration isolation platform in real time, and finally give the residual vibration acceleration noise spectrum curve on the vibration isolation platform 3 and its vibration isolation effect on the ground vibration rate and other information. Using two symmetrically placed microseismometers, on the one hand, the readout data of the accelerometer’s translational degree of freedom can be verified through the common mode, and on the other hand, the readout data of the accelerometer’s torsional degree of freedom can be verified through the differential mode. The center of mass of the vibration isolation platform is balanced so that it coincides with the geometric center as much as possible, so as to obtain the correct torsional signal.

The controller 5 includes an active vibration isolation controller 51 , a drive controller 52 and a signal conditioning circuit 53 . The active vibration isolation controller 51 is used for generating an active vibration isolation control voltage signal according to the absolute speed information of the vibration isolation platform. The driving controller 52 provides a single-frequency sinusoidal input signal as a driving voltage signal, and the amplitude and frequency of the signal can be changed according to performance testing requirements. The signal conditioning circuit 53 generates current after receiving the voltage signal.

The electromagnetic driver 6 includes a permanent magnet 61 installed on the table of the four-wire pendulum vibration isolation platform and an electromagnetic coil 63 installed on the ground-fixed base 62 along the direction of the permanent magnet 61 . The electromagnetic driver 6 mainly works based on the principle of magnetic force transmission. When the electromagnetic coil 63 is fed with current, a force will be generated between the permanent magnet 61 and the electromagnetic coil 63, and the thrust of both can be realized by changing the direction of the current. The vibration isolation platform 3 produces a corresponding displacement, and the accelerometer 8 to be measured on the vibration isolation platform also produces a horizontal displacement and outputs an acceleration signal. The electromagnetic driver 6 has the characteristics of wide operating frequency, high precision, fast response, large output force and large displacement, and is very suitable for precision measurement experiments in the low frequency range. In this embodiment, a smaller cylindrical permanent magnet with a diameter of 10 mm and a length of 12 mm is used, thereby increasing the gap between the magnet and the coil to 3.5 mm.

The displacement monitoring instrument 7 is used to monitor the displacement of the vibration isolation platform 3, including but not limited to a laser interferometer, an autocollimator, and the like.

The accelerometer 8 to be measured outputs a horizontal axis acceleration signal.

The data processing system 9 includes a data processing module 91 and a result display module 92 . The data processing module 91 is used for differential calculation of the output data of the displacement monitoring instrument 7, and performs data processing on the accelerometer 8 and the translational acceleration of the vibration isolation platform to be measured; the result display module 92 is used to display the accelerometer to be measured 8 and the data processing results of the displacement monitoring instrument 7.

The magnetic shield 10 is located on both sides of the vibration isolation platform, connected to the ground fixed base 62, covers the permanent magnet 61, the ground fixed base 62 and the electromagnetic coil 63, and leaves space for the magnetic force transmission process. Covered with magnetic shielding material, it is used to shield the magnetic field interference or magnetic leakage generated by the accelerometer to be measured by the electromagnetic driver.

The working process of the whole performance testing device is specifically as follows: first, a low-noise test environment is provided based on the active vibration isolation system, and then a single-frequency sinusoidal input signal is provided by the drive controller 52 in the controller 5 as the drive voltage signal, and the signal conditioning circuit 53 generates a current after receiving the signal. When the electromagnetic coil 63 is fed with current, a force will be generated between the permanent magnet 61 and the electromagnetic coil 63. By changing the direction of the current, the switching of the thrust and attraction force between the two can be realized. , so that the vibration isolation platform can produce displacement changes in the directions of two horizontal translational degrees of freedom. On the one hand, the displacement monitoring instrument 7 is used to monitor the displacement data of the vibration isolation platform 3, which can be calculated as a theoretical input after position calibration; Perform differential processing on the output data of the monitoring instrument 7, and perform amplitude spectrum analysis, error calculation and linear fitting on the accelerometer 8 to be measured and the translational acceleration of the vibration isolation platform, and display the accelerometer 8 to be measured and the displacement monitoring based on the result display module 92 Resolution test and sensitivity calibration results of instrument 7.

As shown in Figure 3, the present invention provides a kind of accelerometer performance testing method, comprises the following steps:

S1. Before the experiment, the current excitation method is used to calibrate the sensitivity coefficient of the execution force of the electromagnetic driver.

The permanent magnet is fixed on the lower end of the dynamometer, and the electromagnetic coil is fixed on the base of the screw side shaking machine. By adjusting the knob of the machine, the dynamometer can be moved up and down, thereby changing the distance between the permanent magnet and the coil. Use a DC stabilized power supply to supply current to the coil, and record the readings of the dynamometer when the power is turned off and on, respectively. According to the difference in readings, the sensitivity coefficient of the execution force of the electromagnetic driver composed of a magnet and a coil at a specific distance can be obtained.

S2. Start the experiment, place the accelerometer to be tested in the center of the vibration isolation platform, use the vibration isolation platform to perform active vibration isolation on the ground, and provide a test environment with low vibration and noise.

First turn on the power switch of the accelerometer to be tested, observe the output data of the accelerometer received by the data processing system, then turn on the active vibration isolation control switch, wait for the vibration isolation platform to further improve the vibration isolation performance, and stabilize for about 8 to 12 hours (depending on the ground at that time). vibration conditions).

S3. After the vibration isolation of the vibration isolation platform enters the best state and the output data of the accelerometer to be measured is stable, inject a sinusoidal drive voltage (amplitude is A mV, frequency is f _a Hz) through the drive controller, and use the four-wire pendulum isolation The permanent magnet fixedly connected to the table of the vibrating platform and the electromagnetic coil outside the table generate an electromagnetic driving force of frequency f _a required for calibration, so that the vibration isolation platform produces a translational displacement change in the calibration direction.

First, input a according to the acceleration required for the test of the accelerometer to be tested, and then multiply it by the total mass M of the object placed on the vibration isolation platform and the table to obtain the electromagnetic driving force F=M×a required for calibration, and then according to the electromagnetic driving force F =k × (H _vccs × V) obtains the size of the required electromagnetic drive voltage for calibration, wherein, H _vccs is the transfer function of the voltage-controlled current source unit, and I=H _vccs × V is the current generated after passing through the signal conditioning circuit, The sensitivity coefficient of the execution force of the electromagnetic driver is kN/A, and V is the electromagnetic driving voltage required for calibration. In addition, the acceleration response of different frequency points (such as f _b , f _c Hz, etc.) can also be tested as required.

S4. Simultaneously record the output data of the displacement monitoring instrument and the accelerometer to be measured.

The specific steps of S4 include:

S41. Using a displacement monitoring instrument to monitor displacement changes of the vibration isolation platform, performing differential processing on the displacement data, and obtaining a translational acceleration signal of the vibration isolation platform as a theoretical input.

S42. Simultaneously record the output acceleration data of the horizontal axis of the accelerometer to be measured.

In said S4, the vibration isolation platform undergoes a slight translational displacement driven by electromagnetic force, and the accelerometer to be measured on the vibration isolation platform outputs dynamic response acceleration data; at the same time, the displacement detection instrument records the displacement data of the vibration isolation platform, and through the The displacement is differentially processed to obtain the acceleration signal of the vibration isolation platform translation. The specific formula is as follows:

S5. Load the output data of the horizontal axis of the accelerometer to be measured and the time-domain data of the translational acceleration of the vibration isolation platform recorded in the experimental process, respectively, and each take a period of data not less than 1000s in the same time period, and use the data processing system to perform FFT on it ,Calculated as follows:

In the formula, N represents the length of data points calculated by FFT in data processing.

Then divide the corresponding modulus of each data point after the FFT (taking the first half of the data length, that is, N/2) by N/2 to obtain the actual amplitude of the signal, and obtain the spectrum resolution of the corresponding amplitude according to Δf=F _s /N Rate.

S6. Draw the amplitude spectrum curves of the displacement monitoring instrument and the accelerometer to be measured in response to the acceleration signal at the calibration frequency f _a , judge whether there is a peak at the calibration frequency f _a , and obtain the amplitude of the signal.

S7, carry out error calculation according to the accuracy of frequency stability 1%, take the average value of the noise amplitude value of the frequency range of f _a * (1 ± 1%) Hz (deducting the corresponding signal amplitude at f _a place) in the amplitude spectrum as The amplitude spectrum error is obtained to obtain the amplitude spectrum error result of the accelerometer to be measured and the translational acceleration of the vibration isolation platform.

The S5-S7 are all completed in the data processing system.

S8. Change the injected sinusoidal driving voltage (amplitudes are B, C, D, E mV in sequence, and the corresponding frequencies are all f _a Hz), generate electromagnetic driving forces corresponding to excitation signals with different amplitudes, and repeat steps S5-S7.

In said S8, change the amplitude of the excitation signal through the drive controller (the injection amplitudes can be B, C, D, EmV, and the frequency is f _a Hz), and detect the response of the accelerometer to be measured in the horizontal direction.

S9. According to the measurement specifications of the resolution test, compare the acceleration of the accelerometer response to be tested and the amplitude spectrum of the translational acceleration of the vibration isolation platform monitored by the displacement monitoring instrument within the error range, and respond to different excitation signal amplitudes The results are linearly fitted, and finally the resolution test and sensitivity calibration results of the accelerometer to be tested are obtained.

In said S9, the error range of the accelerometer means that the ratio of the measured output amplitude of the accelerometer to be tested to the theoretical output amplitude should be within the range of 50% to 150%.

In this method, the displacement monitoring instrument monitors the displacement change of the vibration isolation platform, and the translational acceleration signal of the vibration isolation platform can be obtained through differential processing, and the amplitude spectrum of the signal is further calculated as the theoretical output amplitude of the acceleration. Comparing the response acceleration of the accelerometer to be tested and the amplitude spectrum of the translational acceleration of the vibration isolation platform monitored by the displacement monitoring instrument within the error range, the resolution test level of the accelerometer to be tested can be obtained; The response acceleration amplitude spectrum of the measured accelerometer and the displacement monitoring instrument is linearly fitted to obtain the sensitivity calibration result of the measured accelerometer.

It is easy for those skilled in the art to understand that the above descriptions are only preferred embodiments of the present invention, and are not intended to limit the present invention. Any modifications, equivalent replacements and improvements made within the spirit and principles of the present invention, All should be included within the protection scope of the present invention.

Claims (8)

1. An accelerometer performance testing apparatus, comprising: the vibration isolator comprises a supporting frame, four equal-length suspension wires, a vibration isolation platform, a plurality of motion sensors, an active vibration isolation controller, a driving controller, a plurality of electromagnetic drivers and a displacement monitoring instrument;

one end of the suspension wire is fixed with a cross beam on the supporting frame, and the other end of the suspension wire is connected with the vibration isolation platform and used for suspending the vibration isolation platform, and the length of the suspension wire can ensure that the four-wire pendulum can move along the horizontal two translational degrees of freedom;

an accelerometer to be measured is fixedly placed at the center of the table top of the vibration isolation platform;

the motion sensors are used for acquiring absolute speed information of the vibration isolation platform and outputting the absolute speed information to the active vibration isolation controller;

the active vibration isolation controller is used for generating an active vibration isolation control signal according to the absolute speed information of the vibration isolation platform, generating corresponding current through the signal conditioning circuit and outputting the current to the electromagnetic driver;

the driving controller is used for generating the frequency f with the amplitude value A and the calibration requirement _a The sinusoidal voltage signal of the power supply is generated through a signal conditioning circuit and is output to an electromagnetic driver;

the electromagnetic drivers are used for firstly receiving the current generated by the active vibration isolation controller to form feedback force for reducing the vibration degree of the vibration isolation platform, receiving the current generated by the driving controller after the vibration isolation platform is in an optimal state, and forming the frequency f required by calibration based on the magnetic transmission principle _a The electromagnetic driving force of the vibration isolation platform is driven to generate translational displacement change along the calibration direction;

the displacement monitoring instrument is used for monitoring and recording displacement data of the vibration isolation platform in the directions of two horizontal translational degrees of freedom;

the support frame, the four equal-length suspension wires and the vibration isolation platform jointly form a passive vibration isolation structure, and form an active vibration isolation system together with the motion sensor, the active vibration isolation controller and the electromagnetic driver, so that the vibration isolation system has a vibration noise isolation function of the ground in the horizontal direction of the frequency band of 0.1-10 Hz.

2. The apparatus of claim 1, wherein the electromagnetic drive comprises: the permanent magnet is arranged on the table top of the vibration isolation platform, and the electromagnetic coil is arranged on the ground fixedly connected with the base along the direction of the permanent magnet.

3. The apparatus of claim 1, wherein the number of electromagnetic drives comprises:

the first electromagnetic driver is positioned on the east-west axis of the vibration isolation platform and used for controlling the east-west translational degree of freedom motion of the vibration isolation platform;

the second electromagnetic driver and the third electromagnetic driver are symmetrically arranged on two sides of a north-south axis of the vibration isolation platform, and the translational degree of freedom motion and the rotational degree of freedom motion of the vibration isolation platform in the north-south direction are controlled simultaneously.

4. A device according to any one of claims 1 to 3, wherein the device further comprises: a magnetic shield;

the magnetic shielding cover covers the electromagnetic driver and is used for shielding magnetic field interference or magnetic leakage generated by the electromagnetic driver to the accelerometer to be tested.

5. A method of testing performance of an accelerometer, applied to the device of any one of claims 1 to 4, the method comprising:

after the vibration isolation platform is in an optimal state and the output data of the accelerometer to be tested are stable, obtaining the output data of the displacement monitoring instrument and the accelerometer to be tested in the same time period;

carrying out differential processing on output data of a displacement monitoring instrument to obtain a translational acceleration signal of the vibration isolation platform, and further carrying out amplitude spectrum calculation on the signal to serve as an acceleration theory output amplitude;

and comparing the amplitude spectrum of the theoretical acceleration with the actual measured acceleration of the accelerometer to be measured in the calibration direction, and judging whether the theoretical acceleration is consistent with the actual measured acceleration of the accelerometer to be measured in the error range, so as to obtain a resolution test result of the accelerometer to be measured.

6. The method of claim 5, wherein the method further comprises:

and obtaining a sensitivity calibration result of the accelerometer to be measured by performing linear fitting on response acceleration amplitude spectrums of the accelerometer to be measured and the displacement monitoring instrument under electromagnetic excitation signals with different amplitudes.

7. The method of claim 5, wherein the method further comprises:

by changing the frequency of the injected electromagnetic excitation signal, the transfer function or the low-frequency response characteristic of the accelerometer to be measured is analyzed.

8. An accelerometer performance testing system, comprising: an accelerometer performance testing apparatus, memory and processor according to any one of claims 1 to 4;

the memory is used for storing a computer program and executing instructions;

the processor being configured to execute the computer-executable instructions, which when executed on the processor cause the method of any of claims 5 to 7 to be performed.