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CN116678850A - Terahertz nondestructive testing system and method - Google Patents

Terahertz nondestructive testing system and method Download PDF

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CN116678850A
CN116678850A CN202210166665.4A CN202210166665A CN116678850A CN 116678850 A CN116678850 A CN 116678850A CN 202210166665 A CN202210166665 A CN 202210166665A CN 116678850 A CN116678850 A CN 116678850A
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scanning
sample
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dimensional
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胡伟东
许志浩
韩钟德
蒋环宇
刘阳
鹿玉瑶
姚智宇
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Beijing Institute of Technology BIT
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N21/35Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
    • G01N21/3581Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light using far infrared light; using Terahertz radiation
    • G01N21/3586Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light using far infrared light; using Terahertz radiation by Terahertz time domain spectroscopy [THz-TDS]
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01SRADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S17/00Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
    • G01S17/88Lidar systems specially adapted for specific applications
    • G01S17/89Lidar systems specially adapted for specific applications for mapping or imaging
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01SRADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S7/00Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
    • G01S7/48Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
    • G01S7/4802Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00 using analysis of echo signal for target characterisation; Target signature; Target cross-section

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Abstract

The application provides a terahertz nondestructive testing system and a terahertz nondestructive testing method. The system comprises a signal acquisition device and an imaging control platform, wherein the acquisition device comprises a scanning signal generation unit, a sample moving unit and an echo signal receiving unit, and the imaging control platform comprises a parameter setting unit, a scanning mode unit, a motion control unit and a multi-stage image display unit. According to the application, the motion control unit controls the sample moving unit to move according to the scanning values sent by the parameter setting unit and the scanning modes sent by the scanning mode unit, so that the echo signal receiving unit receives echo signals corresponding to different preset positions of the sample to be detected, and the appearance of the sample to be detected is not limited. And the multi-level image display unit can integrate and process the echo signals, deeply analyze and calculate the echo signals, intuitively display the multi-dimensional detection information of the sample to be detected, and has high detection efficiency.

Description

一种太赫兹无损检测系统及方法A terahertz non-destructive testing system and method

技术领域technical field

本申请涉及雷达成像领域,尤其涉及一种太赫兹无损检测系统及方法。The present application relates to the field of radar imaging, in particular to a terahertz non-destructive testing system and method.

背景技术Background technique

复合材料由于其质量轻、强度大、延展性强、耐腐蚀、制备灵活以及易加工等特点,被广泛用于航天隔热材料、固体火箭发动机壳体和导弹天线罩等方面。但由于复合材料成型过程复杂,许多细微的加工不确定因素将使得材料结构中存在不可避免的缺陷。同时,在复合材料的使用过程中,也可能会发生各种损伤。这些缺陷与损伤的存在,将对复合材料的使用安全构成极大的威胁。Due to its light weight, high strength, strong ductility, corrosion resistance, flexible preparation and easy processing, composite materials are widely used in aerospace heat insulation materials, solid rocket motor casings and missile radomes. However, due to the complex molding process of composite materials, many subtle processing uncertainties will make inevitable defects in the material structure. At the same time, various damages may also occur during the use of composite materials. The existence of these defects and damages will pose a great threat to the safety of composite materials.

太赫兹波位于微波与红外之间,相对于微波或毫米波成像,太赫兹波因为其更短的波长和更大的带宽,可以获得更好的分辨率。且太赫兹波是完全非接触式的检测,相对于超声波成像可实现更高的分辨率。因此,太赫兹成像成为无损检测的一种新型且重要的补充手段。此外,太赫兹对于复合材料有较高的穿透性,可利用太赫兹无损检测技术实现对复合材料的内部无损检测。Terahertz waves are located between microwave and infrared. Compared with microwave or millimeter wave imaging, terahertz waves can obtain better resolution because of their shorter wavelength and larger bandwidth. Moreover, terahertz waves are completely non-contact detection, which can achieve higher resolution than ultrasonic imaging. Therefore, terahertz imaging has become a new and important supplementary method for nondestructive testing. In addition, terahertz has high penetration for composite materials, and terahertz nondestructive testing technology can be used to realize internal nondestructive testing of composite materials.

现有的无损检测成像方法在扫描方式上多为二维平面扫描,对被测样品的形貌要求有一定限制。而且没有对无损检测产生的各种数据进行整合并进行深入地分析与计算,无法直观地显示待测样品的各类具体检测信息,检测效率低。Most of the existing nondestructive testing imaging methods are two-dimensional plane scanning, which has certain restrictions on the shape of the sample to be tested. Moreover, the various data generated by non-destructive testing are not integrated and analyzed and calculated in depth, and various specific testing information of the sample to be tested cannot be displayed intuitively, and the testing efficiency is low.

发明内容Contents of the invention

为了解决上述技术问题,本发明提供了一种太赫兹无损检测系统及方法,具体方案如下:In order to solve the above technical problems, the present invention provides a terahertz nondestructive testing system and method, the specific scheme is as follows:

第一方面,本申请实施例提供了一种太赫兹无损检测系统,所述太赫兹无损检测系统包括信号获取设备以及成像控制平台,所述获取设备包括扫描信号发生单元、样品移动单元以及回波信号接收单元,所述成像控制平台包括参数设置单元、扫描方式单元、运动控制单元、多级图像显示单元;In the first aspect, an embodiment of the present application provides a terahertz nondestructive testing system. The terahertz nondestructive testing system includes a signal acquisition device and an imaging control platform. The acquisition device includes a scanning signal generation unit, a sample moving unit, and an echo sensor. A signal receiving unit, the imaging control platform includes a parameter setting unit, a scanning mode unit, a motion control unit, and a multi-level image display unit;

所述扫描信号发生单元用于生成扫描信号,以使扫描信号传播至所述样品移动单元上的待测样品并反射回波信号至所述回波信号接收单元;The scanning signal generation unit is used to generate a scanning signal, so that the scanning signal propagates to the sample to be tested on the sample moving unit and reflects the echo signal to the echo signal receiving unit;

所述参数设置单元用于设置第一类型的扫描参数对应的扫描数值,其中,所述第一类型的扫描参数包括扫描信号的覆盖范围、扫描间隔和扫描速度;The parameter setting unit is used to set a scan value corresponding to a first type of scan parameter, wherein the first type of scan parameter includes a scan signal coverage, a scan interval, and a scan speed;

所述扫描方式单元用于设置所述待测样品对应的第二类型的扫描模式,其中,所述第二类型的扫描模式包括平面扫描、圆柱扫描和连续采集扫描;The scanning mode unit is used to set a second type of scanning mode corresponding to the sample to be tested, wherein the second type of scanning mode includes planar scanning, cylindrical scanning and continuous acquisition scanning;

所述运动控制单元用于根据所述参数设置单元发送的所述扫描数值以及所述扫描方式单元发送的所述扫描模式,控制所述样品移动单元进行移动,以使所述回波信号接收单元接收到对应所述待测样品的不同预设位置的回波信号;The motion control unit is used to control the sample moving unit to move according to the scanning value sent by the parameter setting unit and the scanning mode sent by the scanning mode unit, so that the echo signal receiving unit receiving echo signals corresponding to different preset positions of the sample to be tested;

所述多级图像显示单元用于根据所述回波信号接收单元传输的各回波信号,生成并显示所述待测样品对应的多级图像信息,其中,所述多级图像信息包括一维距离像、二维图像信息和三维图像信息。The multi-level image display unit is configured to generate and display multi-level image information corresponding to the sample to be tested according to each echo signal transmitted by the echo signal receiving unit, wherein the multi-level image information includes a one-dimensional distance images, two-dimensional image information and three-dimensional image information.

根据本申请公开的一种具体实施方式,所述样品移动单元包括二维平移台和转台,所述二维平移台与所述转台连接;According to a specific embodiment disclosed in the present application, the sample moving unit includes a two-dimensional translation stage and a turntable, and the two-dimensional translation stage is connected to the turntable;

所述运动控制单元具体用于:The motion control unit is specifically used for:

接收所述扫描方式单元发送的所述扫描模式;receiving the scanning mode sent by the scanning mode unit;

若所述扫描模式为平面扫描,控制所述二维平移台进行平移以实现所述扫描信号对待测样品的平面扫描;If the scanning mode is planar scanning, controlling the two-dimensional translation stage to translate to realize the planar scanning of the sample to be tested by the scanning signal;

若所述扫描模式为圆柱扫描,控制所述二维平移台进行平移和/或控制所述转台进行转动,以实现所述扫描信号对待测样品的圆柱扫描;If the scanning mode is cylindrical scanning, controlling the two-dimensional translation stage to translate and/or controlling the turntable to rotate, so as to realize the cylindrical scanning of the sample to be tested by the scanning signal;

若所述扫描模式为连续采集扫描,控制所述二维平移台进行平移以及控制所述转台进行转动,以实现所述扫描信号对待测样品的连续扫描。If the scanning mode is continuous acquisition scanning, the two-dimensional translation platform is controlled to translate and the turntable is controlled to rotate, so as to realize the continuous scanning of the sample to be tested by the scanning signal.

根据本申请公开的一种具体实施方式,所述多级图像显示单元包括一维距离像显示子单元,所述多级图像显示单元具体用于:According to a specific implementation manner disclosed in the present application, the multi-level image display unit includes a one-dimensional distance image display subunit, and the multi-level image display unit is specifically used for:

接收所述回波信号接收单元传输的各回波信号对应的时域数据,其中,各回波信号对应所述待测样品的不同预设位置;receiving time-domain data corresponding to each echo signal transmitted by the echo signal receiving unit, wherein each echo signal corresponds to a different preset position of the sample to be tested;

将各所述时域数据转化为电压以及进行第三类型的预设处理,得到各所述预设位置对应的频域数据以及一维距离像,其中,所述第三类型的预设处理包括相位补偿、滤波和傅里叶变换。converting each of the time-domain data into voltages and performing a third type of preset processing to obtain frequency-domain data and one-dimensional distance images corresponding to each of the preset positions, wherein the third type of preset processing includes Phase compensation, filtering and Fourier transform.

根据本申请公开的一种具体实施方式,所述多级图像显示单元还包括二维图像显示子单元,所述多级图像显示单元具体用于:According to a specific implementation manner disclosed in the present application, the multi-level image display unit further includes a two-dimensional image display subunit, and the multi-level image display unit is specifically used for:

选取各预设位置的预设范围内的全部所述预设位置对应的频域数据为目标数据;selecting the frequency domain data corresponding to all the preset positions within the preset range of each preset position as the target data;

将所述目标数据进行积分,得到预设范围内的当前所述预设位置对应的强度值;Integrating the target data to obtain an intensity value corresponding to the current preset position within a preset range;

将全部预设位置对应的强度值进行融合显示,得到所述待测样品对应的二维图像。The intensity values corresponding to all preset positions are fused and displayed to obtain a two-dimensional image corresponding to the sample to be tested.

根据本申请公开的一种具体实施方式,所述多级图像显示单元还包括三维图像显示子单元,所述多级图像显示单元具体用于:According to a specific implementation manner disclosed in the present application, the multi-level image display unit further includes a three-dimensional image display subunit, and the multi-level image display unit is specifically used for:

将各所述一维距离像进行三维拼接,得到所述待测样品对应的三维矩阵;Performing three-dimensional splicing of each of the one-dimensional range images to obtain a three-dimensional matrix corresponding to the sample to be tested;

接收用户输入的三维坐标显示范围以及距离像层数;Receive the 3D coordinate display range and the number of distance image layers input by the user;

根据坐标显示范围以及距离像层数,显示所述待测样品的不同深度距离对应的切片信息。According to the coordinate display range and the number of distance image layers, slice information corresponding to different depth distances of the sample to be measured is displayed.

第二方面,本申请实施例提供了一种太赫兹无损检测方法,所述太赫兹无损检测方法应用于第一方面中任一项实施例所述的太赫兹无损检测系统,所述太赫兹无损检测方法包括:In the second aspect, an embodiment of the present application provides a terahertz nondestructive testing method, which is applied to the terahertz nondestructive testing system described in any one of the embodiments in the first aspect, and the terahertz nondestructive testing method is Detection methods include:

扫描信号发生单元生成扫描信号,以使扫描信号传播至样品移动单元上的待测样品并反射回波信号至回波信号接收单元;The scanning signal generation unit generates the scanning signal, so that the scanning signal propagates to the sample to be tested on the sample moving unit and reflects the echo signal to the echo signal receiving unit;

参数设置单元设置第一类型的扫描参数对应的扫描数值,其中,所述第一类型的扫描参数包括扫描信号的覆盖范围、扫描间隔和扫描速度;The parameter setting unit sets the scanning value corresponding to the scanning parameter of the first type, wherein the scanning parameter of the first type includes the coverage area of the scanning signal, the scanning interval and the scanning speed;

扫描方式单元设置所述待测样品对应的第二类型的扫描模式,其中,所述第二类型的扫描模式包括平面扫描、圆柱扫描和连续采集扫描;The scanning mode unit sets the second type of scanning mode corresponding to the sample to be tested, wherein the second type of scanning mode includes planar scanning, cylindrical scanning and continuous acquisition scanning;

运动控制单元根据所述参数设置单元发送的所述扫描数值以及所述扫描方式单元发送的所述扫描模式,控制所述样品移动单元进行移动,以使所述回波信号接收单元接收到对应所述待测样品的不同预设位置的回波信号;The motion control unit controls the sample moving unit to move according to the scanning value sent by the parameter setting unit and the scanning mode sent by the scanning mode unit, so that the echo signal receiving unit receives the corresponding Describe the echo signals at different preset positions of the sample to be tested;

多级图像显示单元根据所述回波信号接收单元传输的各回波信号,生成并显示所述待测样品对应的多级图像信息,其中,所述多级图像信息包括一维距离像、二维图像信息和三维图像信息。The multi-level image display unit generates and displays the multi-level image information corresponding to the sample to be tested according to the echo signals transmitted by the echo signal receiving unit, wherein the multi-level image information includes a one-dimensional range image, a two-dimensional image information and three-dimensional image information.

根据本申请公开的一种具体实施方式,所述样品移动单元包括二维平移台和转台,所述二维平移台与所述转台连接;According to a specific embodiment disclosed in the present application, the sample moving unit includes a two-dimensional translation stage and a turntable, and the two-dimensional translation stage is connected to the turntable;

运动控制单元根据所述参数设置单元发送的所述扫描数值以及所述扫描方式单元发送的所述扫描模式,控制所述样品移动单元进行移动的步骤,包括:The motion control unit controls the sample moving unit to move according to the scanning value sent by the parameter setting unit and the scanning mode sent by the scanning mode unit, including:

接收所述扫描方式单元发送的所述扫描模式;receiving the scanning mode sent by the scanning mode unit;

若所述扫描模式为平面扫描,控制所述二维平移台进行平移以实现所述扫描信号对待测样品的平面扫描;If the scanning mode is planar scanning, controlling the two-dimensional translation stage to translate to realize the planar scanning of the sample to be tested by the scanning signal;

若所述扫描模式为圆柱扫描,控制所述二维平移台进行平移和/或控制所述转台进行转动,以实现所述扫描信号对待测样品的圆柱扫描;If the scanning mode is cylindrical scanning, controlling the two-dimensional translation stage to translate and/or controlling the turntable to rotate, so as to realize the cylindrical scanning of the sample to be tested by the scanning signal;

若所述扫描模式为连续采集扫描,控制所述二维平移台进行平移以及控制所述转台进行转动,以实现所述扫描信号对待测样品的连续扫描。If the scanning mode is continuous acquisition scanning, the two-dimensional translation platform is controlled to translate and the turntable is controlled to rotate, so as to realize the continuous scanning of the sample to be tested by the scanning signal.

根据本申请公开的一种具体实施方式,所述多级图像显示单元包括一维距离像显示子单元;According to a specific implementation manner disclosed in the present application, the multi-level image display unit includes a one-dimensional range image display subunit;

多级图像显示单元根据所述回波信号接收单元传输的各回波信号,生成并显示所述待测样品对应的多级图像信息的步骤,包括:The step of the multi-level image display unit generating and displaying the multi-level image information corresponding to the sample to be tested according to the echo signals transmitted by the echo signal receiving unit includes:

接收所述回波信号接收单元传输的各回波信号对应的时域数据,其中,各回波信号对应所述待测样品的不同预设位置;receiving time-domain data corresponding to each echo signal transmitted by the echo signal receiving unit, wherein each echo signal corresponds to a different preset position of the sample to be tested;

将各所述时域数据转化为电压以及进行第三类型的预设处理,得到各所述预设位置对应的频域数据以及一维距离像,其中,所述第三类型的预设处理包括相位补偿、滤波和傅里叶变换。converting each of the time-domain data into voltages and performing a third type of preset processing to obtain frequency-domain data and one-dimensional distance images corresponding to each of the preset positions, wherein the third type of preset processing includes Phase compensation, filtering and Fourier transform.

根据本申请公开的一种具体实施方式,所述多级图像显示单元还包括二维图像显示子单元;According to a specific implementation manner disclosed in the present application, the multi-level image display unit further includes a two-dimensional image display subunit;

多级图像显示单元根据所述回波信号接收单元传输的各回波信号,生成并显示所述待测样品对应的多级图像信息的步骤,包括:The step of the multi-level image display unit generating and displaying the multi-level image information corresponding to the sample to be tested according to the echo signals transmitted by the echo signal receiving unit includes:

选取各预设位置的预设范围内的全部所述预设位置对应的频域数据为目标数据;selecting the frequency domain data corresponding to all the preset positions within the preset range of each preset position as the target data;

将所述目标数据进行积分,得到预设范围内的当前所述预设位置对应的强度值;Integrating the target data to obtain an intensity value corresponding to the current preset position within a preset range;

将全部预设位置对应的强度值进行融合显示,得到所述待测样品对应的二维图像。The intensity values corresponding to all preset positions are fused and displayed to obtain a two-dimensional image corresponding to the sample to be tested.

根据本申请公开的一种具体实施方式,所述多级图像显示单元还包括三维图像显示子单元;According to a specific implementation manner disclosed in the present application, the multi-level image display unit further includes a three-dimensional image display subunit;

多级图像显示单元根据所述回波信号接收单元传输的各回波信号,生成并显示所述待测样品对应的多级图像信息的步骤,包括:The step of the multi-level image display unit generating and displaying the multi-level image information corresponding to the sample to be tested according to the echo signals transmitted by the echo signal receiving unit includes:

将各所述一维距离像进行三维拼接,得到所述待测样品对应的三维矩阵;Performing three-dimensional splicing of each of the one-dimensional range images to obtain a three-dimensional matrix corresponding to the sample to be tested;

接收用户输入的三维坐标显示范围以及距离像层数;Receive the 3D coordinate display range and the number of distance image layers input by the user;

根据坐标显示范围以及距离像层数,显示所述待测样品的不同深度距离对应的切片信息。According to the coordinate display range and the number of distance image layers, slice information corresponding to different depth distances of the sample to be measured is displayed.

相对于现有技术而言,本申请具有以下有益效果:Compared with the prior art, the present application has the following beneficial effects:

本申请提供的太赫兹无损检测系统包括信号获取设备以及成像控制平台,获取设备包括扫描信号发生单元、样品移动单元以及回波信号接收单元,成像控制平台包括参数设置单元、扫描方式单元、运动控制单元、多级图像显示单元。本申请中的运动控制单元根据参数设置单元发送的扫描数值以及扫描方式单元发送的扫描模式,控制样品移动单元进行移动,以使回波信号接收单元接收到对应待测样品的不同预设位置的回波信号,对待测样品的形貌没有限制。且通过多级图像显示单元可以对回波信号进行整合处理,并进行深入地分析与计算,可以直观地显示待测样品的多维度检测信息,检测效率高。The terahertz nondestructive testing system provided by this application includes a signal acquisition device and an imaging control platform. The acquisition device includes a scanning signal generation unit, a sample moving unit, and an echo signal receiving unit. The imaging control platform includes a parameter setting unit, a scanning mode unit, and a motion control unit. unit, multi-level image display unit. The motion control unit in this application controls the sample moving unit to move according to the scanning value sent by the parameter setting unit and the scanning mode sent by the scanning mode unit, so that the echo signal receiving unit receives signals corresponding to different preset positions of the sample to be tested. Echo signal, the shape of the sample to be tested is not limited. Moreover, the echo signal can be integrated and processed through the multi-level image display unit, and the in-depth analysis and calculation can be performed, and the multi-dimensional detection information of the sample to be tested can be intuitively displayed, and the detection efficiency is high.

附图说明Description of drawings

为了更清楚地说明本公开实施例的技术方案,下面将对实施例中所需要使用的附图作简单地介绍,显而易见地,下面描述中的附图仅仅是本公开的一些实施例,对于本领域普通技术人员来讲,在不付出创造性劳动的前提下,还可以根据这些附图获得其它的附图。In order to more clearly illustrate the technical solutions of the embodiments of the present disclosure, the following will briefly introduce the accompanying drawings required in the embodiments. Obviously, the accompanying drawings in the following description are only some embodiments of the present disclosure. Those of ordinary skill in the art can also obtain other drawings based on these drawings without any creative effort.

图1为本申请实施例提供的一种太赫兹无损检测系统的组成示意图;FIG. 1 is a schematic diagram of the composition of a terahertz nondestructive testing system provided by an embodiment of the present application;

图2为本申请实施例提供的一种太赫兹无损检测方法的流程示意图。FIG. 2 is a schematic flow chart of a terahertz nondestructive testing method provided in an embodiment of the present application.

具体实施方式Detailed ways

下面将结合本发明实施例中附图,对本发明实施例中的技术方案进行清楚、完整地描述,显然,所描述的实施例仅仅是本发明一部分实施例,而不是全部的实施例。The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some, not all, embodiments of the present invention.

通常在此处附图中描述和示出的本发明实施例的组件可以以各种不同的配置来布置和设计。因此,以下对在附图中提供的本发明的实施例的详细描述并非旨在限制要求保护的本发明的范围,而是仅仅表示本发明的选定实施例。基于本发明的实施例,本领域技术人员在没有做出创造性劳动的前提下所获得的所有其他实施例,都属于本发明保护的范围。The components of the embodiments of the invention generally described and illustrated in the figures herein may be arranged and designed in a variety of different configurations. Accordingly, the following detailed description of the embodiments of the invention provided in the accompanying drawings is not intended to limit the scope of the claimed invention, but merely represents selected embodiments of the invention. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without making creative efforts belong to the protection scope of the present invention.

在下文中,可在本发明的各种实施例中使用的术语“包括”、“具有”及其同源词仅意在表示特定特征、数字、步骤、操作、元件、组件或前述项的组合,并且不应被理解为首先排除一个或更多个其它特征、数字、步骤、操作、元件、组件或前述项的组合的存在或增加一个或更多个特征、数字、步骤、操作、元件、组件或前述项的组合的可能性。Hereinafter, the terms "comprising", "having" and their cognates that may be used in various embodiments of the present invention are only intended to represent specific features, numbers, steps, operations, elements, components or combinations of the foregoing, And it should not be understood as first excluding the existence of one or more other features, numbers, steps, operations, elements, components or combinations of the foregoing or adding one or more features, numbers, steps, operations, elements, components or a combination of the foregoing possibilities.

此外,术语“第一”、“第二”、“第三”等仅用于区分描述,而不能理解为指示或暗示相对重要性。In addition, the terms "first", "second", "third", etc. are only used for distinguishing descriptions, and should not be construed as indicating or implying relative importance.

除非另有限定,否则在这里使用的所有术语(包括技术术语和科学术语)具有与本发明的各种实施例所属领域普通技术人员通常理解的含义相同的含义。所述术语(诸如在一般使用的词典中限定的术语)将被解释为具有与在相关技术领域中的语境含义相同的含义并且将不被解释为具有理想化的含义或过于正式的含义,除非在本发明的各种实施例中被清楚地限定。Unless otherwise defined, all terms (including technical terms and scientific terms) used herein have the same meaning as commonly understood by one of ordinary skill in the art to which various embodiments of the present invention belong. The terms (such as those defined in commonly used dictionaries) will be interpreted as having the same meaning as the contextual meaning in the relevant technical field and will not be interpreted as having an idealized meaning or an overly formal meaning, Unless clearly defined in various embodiments of the present invention.

下面结合附图,对本申请的一些实施方式作详细说明。在不冲突的情况下,下述的实施例及实施例中的特征可以相互结合。Some implementations of the present application will be described in detail below in conjunction with the accompanying drawings. In the case of no conflict, the following embodiments and features in the embodiments can be combined with each other.

参见图1,图1为本申请实施例提供的一种太赫兹无损检测系统的组成示意图。Referring to FIG. 1 , FIG. 1 is a schematic composition diagram of a terahertz nondestructive testing system provided by an embodiment of the present application.

所述太赫兹无损检测系统包括信号获取设备11以及成像控制平台12,所述信号获取设备11包括扫描信号发生单元111、样品移动单元112以及回波信号接收单元113,所述成像控制平台12包括参数设置单元121、扫描方式单元122、运动控制单元123、多级图像显示单元124。The terahertz nondestructive testing system includes a signal acquisition device 11 and an imaging control platform 12, the signal acquisition device 11 includes a scanning signal generation unit 111, a sample moving unit 112, and an echo signal receiving unit 113, and the imaging control platform 12 includes A parameter setting unit 121 , a scanning mode unit 122 , a motion control unit 123 , and a multi-level image display unit 124 .

所述扫描信号发生单元111用于生成扫描信号,以使扫描信号传播至所述样品移动单元112上的待测样品并反射回波信号至所述回波信号接收单元113。The scan signal generation unit 111 is used to generate a scan signal, so that the scan signal propagates to the sample to be tested on the sample moving unit 112 and reflects an echo signal to the echo signal receiving unit 113 .

所述参数设置单元121用于设置第一类型的扫描参数对应的扫描数值,其中,所述第一类型的扫描参数包括扫描信号的覆盖范围、扫描间隔和扫描速度。The parameter setting unit 121 is configured to set a scan value corresponding to a first type of scan parameter, wherein the first type of scan parameter includes a scan signal coverage, a scan interval, and a scan speed.

所述扫描方式单元122用于设置所述待测样品对应的第二类型的扫描模式,其中,所述第二类型的扫描模式包括平面扫描、圆柱扫描和连续采集扫描。The scan mode unit 122 is configured to set a second type of scan mode corresponding to the sample to be tested, wherein the second type of scan mode includes planar scan, cylindrical scan and continuous acquisition scan.

所述运动控制单元123用于根据所述参数设置单元121发送的所述扫描数值以及所述扫描方式单元122发送的所述扫描模式,控制所述样品移动单元112进行移动,以使所述回波信号接收单元113接收到对应所述待测样品的不同预设位置的回波信号。The motion control unit 123 is used to control the sample moving unit 112 to move according to the scanning value sent by the parameter setting unit 121 and the scanning mode sent by the scanning mode unit 122, so that the The wave signal receiving unit 113 receives echo signals corresponding to different preset positions of the sample to be tested.

需要说明的是,具体实施时,可以通过不同的方式实现所述扫描速度调节:It should be noted that during specific implementation, the scanning speed adjustment can be realized in different ways:

1.待测样品的位置保持不动,即承载所述待测样品的样品移动单元112对应的实时位置不发生变化,仅调节所述扫描信号发生单元111的位置。调节的方式包括但不限于扫描信号发生单元111位置的上下移动或扫描信号发生单元111的信号发生端沿其固定端做旋转,即调节所述扫描信号单元的角度;1. The position of the sample to be tested remains unchanged, that is, the real-time position corresponding to the sample moving unit 112 carrying the sample to be tested does not change, and only the position of the scanning signal generating unit 111 is adjusted. The adjustment method includes but not limited to moving up and down the position of the scanning signal generating unit 111 or rotating the signal generating end of the scanning signal generating unit 111 along its fixed end, that is, adjusting the angle of the scanning signal unit;

2.所述样品移动单元112可以包括二维平移台和转台,所述二维平移台与所述转台连接。在此情况下,也可以保持扫描信号发生单元111位置或角度的不变,通过控制二维平移台的平移速度和/或转台的旋转角速度以移动或旋转所述待测样品,实现调节扫描速度的效果。2. The sample moving unit 112 may include a two-dimensional translation stage and a turntable, and the two-dimensional translation stage is connected to the turntable. In this case, the position or angle of the scanning signal generation unit 111 can also be kept unchanged, and the scanning speed can be adjusted by controlling the translational speed of the two-dimensional translation stage and/or the rotational angular speed of the turntable to move or rotate the sample to be measured Effect.

基于类似的理由,扫描模式的调节也可以通过所述运动控制单元123控制二维平移台和/或所述转台来实现。具体地,所述运动控制单元123接收所述扫描方式单元122发送的所述扫描模式,然后确定扫描模式对应的第二类型,根据不同第二类型的扫描模式确定样品移动单元112的具体移动方式:Based on similar reasons, the adjustment of the scanning mode can also be realized by controlling the two-dimensional translation stage and/or the turntable by the motion control unit 123 . Specifically, the motion control unit 123 receives the scanning mode sent by the scanning mode unit 122, then determines the second type corresponding to the scanning mode, and determines the specific moving mode of the sample moving unit 112 according to different second type scanning modes. :

若所述扫描模式为平面扫描,控制所述二维平移台进行平移以实现所述扫描信号对待测样品的平面扫描;If the scanning mode is planar scanning, controlling the two-dimensional translation stage to translate to realize the planar scanning of the sample to be tested by the scanning signal;

若所述扫描模式为圆柱扫描,控制所述二维平移台进行平移和/或控制所述转台进行转动,以实现所述扫描信号对待测样品的圆柱扫描;If the scanning mode is cylindrical scanning, controlling the two-dimensional translation stage to translate and/or controlling the turntable to rotate, so as to realize the cylindrical scanning of the sample to be tested by the scanning signal;

若所述扫描模式为连续采集扫描,控制所述二维平移台进行平移以及控制所述转台进行转动,以实现所述扫描信号对待测样品的连续扫描。If the scanning mode is continuous acquisition scanning, the two-dimensional translation platform is controlled to translate and the turntable is controlled to rotate, so as to realize the continuous scanning of the sample to be tested by the scanning signal.

所述多级图像显示单元124用于根据所述回波信号接收单元113传输的各回波信号,生成并显示所述待测样品对应的多级图像信息,其中,所述多级图像信息包括一维距离像、二维图像信息和三维图像信息。The multi-level image display unit 124 is used to generate and display the multi-level image information corresponding to the sample to be tested according to the echo signals transmitted by the echo signal receiving unit 113, wherein the multi-level image information includes a 2D distance image, 2D image information and 3D image information.

具体地,所述多级图像显示单元124包括但不限于一维距离像显示子单元1241、二维图像显示子单元1242以及三维图像显示子单元1243。Specifically, the multi-level image display unit 124 includes but not limited to a one-dimensional range image display subunit 1241 , a two-dimensional image display subunit 1242 and a three-dimensional image display subunit 1243 .

一维距离像显示子单元1241是对检测过程中,扫描信号在传播至待测样品的预设位置而返回的时域信息进行滤波、非线性度校准以及傅里叶变换之后,得到各预设位置对应的频域数据以及一维距离像。其中,一维距离像是待测样品对应的二维像在其径向上的所有回波信号的投影,即矢量和。通过各预设位置的一维距离像可以对待测样品的内部结构信息进行实时分析。The one-dimensional distance image display subunit 1241 is to filter, nonlinearity calibration and Fourier transform the time domain information returned by the scanning signal propagating to the preset position of the sample to be tested during the detection process, and obtain each preset The frequency domain data corresponding to the position and the one-dimensional range profile. Wherein, the one-dimensional distance image is the projection of all the echo signals of the two-dimensional image corresponding to the sample to be measured on its radial direction, that is, the vector sum. The internal structure information of the sample to be tested can be analyzed in real time through the one-dimensional distance image of each preset position.

二维图像显示子单元1242利用的是对一维距离像显示子单元1241中的频域数据进行积分后得到的强度值,通过将全部预设位置对应的强度值进行融合显示,可以得到所述待测样品对应的二维图像。The two-dimensional image display subunit 1242 uses the intensity value obtained by integrating the frequency domain data in the one-dimensional range image display subunit 1241, and by fusing and displaying the intensity values corresponding to all preset positions, the described The two-dimensional image corresponding to the sample to be tested.

三维图像显示子单元1243是将和预设位置对应的一维距离像拼接后进一步处理为三维图像,并将所述三维图像进行切片式的展示。The 3D image display subunit 1243 splices the 1D range image corresponding to the preset position and further processes it into a 3D image, and displays the 3D image in slices.

可以根据用户的实际使用需求和具体应用场景选择其中一种或多种进行图像显示。下面分别对以上几种子单元的工作原理或流程进行说明:One or more of them can be selected for image display according to the user's actual usage requirements and specific application scenarios. The following describes the working principles or processes of the above subunits:

1.所述一维距离像显示子单元1241具体用于:1. The one-dimensional distance image display subunit 1241 is specifically used for:

接收所述回波信号接收单元113传输的各回波信号对应的时域数据,其中,各回波信号对应所述待测样品的不同预设位置;receiving time-domain data corresponding to each echo signal transmitted by the echo signal receiving unit 113, wherein each echo signal corresponds to a different preset position of the sample to be tested;

将各所述时域数据转化为电压以及进行第三类型的预设处理,得到各所述预设位置对应的频域数据以及一维距离像,其中,所述第三类型的预设处理包括相位补偿、滤波和傅里叶变换。converting each of the time-domain data into voltages and performing a third type of preset processing to obtain frequency-domain data and one-dimensional distance images corresponding to each of the preset positions, wherein the third type of preset processing includes Phase compensation, filtering and Fourier transform.

一维距离像显示子单元1241可以通过数据采集卡获取当前扫描位置即预设位置对应的时域信号,将时域信号转化为电压值。由于获取设备中扫描信号发生单元111等射频器件会对宽带信号引入群延时,严重恶化信号质量,所以需要用非线性度校准算法来对经过射频器件后的中频信号进行相位补偿,从而消除宽带射频器件带来的影响。因此,转化后的电压值需要再经过非线性度校准。对校准后的中频信号进行滤波加汉宁窗后进行傅里叶变换,得到各预设位置对应的一维距离向分像。其中,汉宁窗可大大降低旁瓣的影响。The one-dimensional distance image display subunit 1241 can obtain the time domain signal corresponding to the current scanning position, that is, the preset position through the data acquisition card, and convert the time domain signal into a voltage value. Since radio frequency devices such as the scanning signal generation unit 111 in the acquisition device will introduce group delay to the broadband signal and seriously deteriorate the signal quality, it is necessary to use a nonlinearity calibration algorithm to perform phase compensation on the intermediate frequency signal after passing through the radio frequency device, thereby eliminating the wideband signal. The impact of radio frequency devices. Therefore, the converted voltage value needs to be calibrated for non-linearity. After the calibrated intermediate frequency signal is filtered and added with a Hanning window, Fourier transform is performed to obtain the one-dimensional range-wise image corresponding to each preset position. Among them, the Hanning window can greatly reduce the influence of side lobes.

2.所述二维图像显示子单元1242具体用于:2. The two-dimensional image display subunit 1242 is specifically used for:

选取各预设位置的预设范围内的全部所述预设位置对应的频域数据为目标数据;selecting the frequency domain data corresponding to all the preset positions within the preset range of each preset position as the target data;

将所述目标数据进行积分,得到预设范围内的当前所述预设位置对应的强度值;Integrating the target data to obtain an intensity value corresponding to the current preset position within a preset range;

将全部预设位置对应的强度值进行融合显示,得到所述待测样品对应的二维图像。The intensity values corresponding to all preset positions are fused and displayed to obtain a two-dimensional image corresponding to the sample to be tested.

二维图像显示子单元1242是将各预设位置的前后区间,即预设范围内的积分值作为预设位置的强度值。因此,在根据不同扫描位置即预设位置的强度差异,便可判断待测样品的缺陷类型、大小及对应的缺陷位置。所述预设范围的具体大小,可以根据用户的使用需求和具体应用场景自定义,这里不做进一步限定。The two-dimensional image display subunit 1242 uses the intervals before and after each preset position, that is, the integral value within the preset range as the intensity value of the preset position. Therefore, the defect type, size and corresponding defect position of the sample to be tested can be judged according to the intensity difference at different scanning positions, ie preset positions. The specific size of the preset range can be customized according to user requirements and specific application scenarios, and is not further limited here.

3.所述三维图像显示子单元1243具体用于:3. The 3D image display subunit 1243 is specifically used for:

将各所述一维距离像进行三维拼接,得到所述待测样品对应的三维矩阵;Performing three-dimensional splicing of each of the one-dimensional range images to obtain a three-dimensional matrix corresponding to the sample to be tested;

接收用户输入的三维坐标显示范围以及距离像层数;Receive the 3D coordinate display range and the number of distance image layers input by the user;

根据坐标显示范围以及距离像层数,显示所述待测样品的不同深度距离对应的切片信息。According to the coordinate display range and the number of distance image layers, slice information corresponding to different depth distances of the sample to be measured is displayed.

三维图像显示子单元1243将一维距离像显示子单元1241处理得到的一维距离像进行三维拼接,得到待测样品三维矩阵。进一步地,可以设置坐标显示范围,距离像层数查看距离像层数不同距离处的切片信息,从而可以更加精确的判断距离像层数内部是否有脱粘、分层、孔洞等缺陷类型和位置。如图1中所示的三维图像显示子单元1243,可以在其显示界面上设置坐标显示范围,即x和y的数值,以及设置距离像层数。其中,距离像层数即为将待测样品对应的三维图像沿z轴进行切分的层数。例如,若距离像层数为3,那么可以得到待测样品对应的3个切片信息。The three-dimensional image display subunit 1243 performs three-dimensional splicing on the one-dimensional range image processed by the one-dimensional distance image display subunit 1241 to obtain a three-dimensional matrix of the sample to be tested. Further, you can set the coordinate display range, view the slice information at different distances from the distance image layer, so that you can more accurately judge whether there are debonding, delamination, holes and other defect types and positions inside the distance image layer . The three-dimensional image display subunit 1243 shown in FIG. 1 can set the coordinate display range, that is, the values of x and y, and the number of distance image layers on its display interface. Wherein, the number of distance image layers is the number of layers for dividing the three-dimensional image corresponding to the sample to be tested along the z-axis. For example, if the number of range image layers is 3, then 3 slice information corresponding to the sample to be tested can be obtained.

具体实施时,所述太赫兹无损检测系统还可以包括文件保存单元,所述文件保存单元用于将采集得到的中频原始数据以BIN文件的形式保存在指定的路径,同时将处理后的三维矩阵以MAT格式进行保存,便于后续对数据的其他处理和回放。During specific implementation, the terahertz non-destructive testing system may also include a file storage unit, the file storage unit is used to save the collected intermediate frequency raw data in a specified path in the form of a BIN file, and at the same time save the processed three-dimensional matrix It is saved in MAT format, which is convenient for subsequent processing and playback of the data.

本申请中的运动控制单元根据参数设置单元发送的扫描数值以及扫描方式单元发送的扫描模式,控制样品移动单元进行移动,以使回波信号接收单元接收到对应待测样品的不同预设位置的回波信号,对待测样品的形貌没有限制。且通过多级图像显示单元可以对回波信号进行整合处理,并进行深入地分析与计算,可以直观地显示待测样品的多维度检测信息,检测效率高。The motion control unit in this application controls the sample moving unit to move according to the scanning value sent by the parameter setting unit and the scanning mode sent by the scanning mode unit, so that the echo signal receiving unit receives signals corresponding to different preset positions of the sample to be tested. Echo signal, the shape of the sample to be tested is not limited. Moreover, the echo signal can be integrated and processed through the multi-level image display unit, and the in-depth analysis and calculation can be performed, and the multi-dimensional detection information of the sample to be tested can be intuitively displayed, and the detection efficiency is high.

与上述系统实施例相对应,参见图2,图2为本申请实施例提供的一种太赫兹无损检测方法的流程示意图,所述太赫兹无损检测方法包括:Corresponding to the above-mentioned system embodiment, see FIG. 2 , which is a schematic flowchart of a terahertz nondestructive testing method provided in an embodiment of the present application. The terahertz nondestructive testing method includes:

步骤S201,扫描信号发生单元生成扫描信号,以使扫描信号传播至样品移动单元上的待测样品并反射回波信号至回波信号接收单元。Step S201 , the scanning signal generation unit generates a scanning signal, so that the scanning signal propagates to the sample to be tested on the sample moving unit and reflects the echo signal to the echo signal receiving unit.

步骤S202,参数设置单元设置第一类型的扫描参数对应的扫描数值,其中,所述第一类型的扫描参数包括扫描信号的覆盖范围、扫描间隔和扫描速度。In step S202, the parameter setting unit sets a scan value corresponding to a first type of scan parameter, wherein the first type of scan parameter includes a scan signal coverage, a scan interval, and a scan speed.

步骤S203,扫描方式单元设置所述待测样品对应的第二类型的扫描模式,其中,所述第二类型的扫描模式包括平面扫描、圆柱扫描和连续采集扫描。Step S203, the scanning mode unit sets a second type of scanning mode corresponding to the sample to be tested, wherein the second type of scanning mode includes planar scanning, cylindrical scanning and continuous acquisition scanning.

步骤S204,运动控制单元根据所述参数设置单元发送的所述扫描数值以及所述扫描方式单元发送的所述扫描模式,控制所述样品移动单元进行移动,以使所述回波信号接收单元接收到对应所述待测样品的不同预设位置的回波信号。Step S204, the motion control unit controls the sample moving unit to move according to the scanning value sent by the parameter setting unit and the scanning mode sent by the scanning mode unit, so that the echo signal receiving unit receives Echo signals to different preset positions corresponding to the sample to be tested.

具体实施时,所述样品移动单元包括二维平移台和转台,所述二维平移台与所述转台连接;During specific implementation, the sample moving unit includes a two-dimensional translation stage and a turntable, and the two-dimensional translation stage is connected to the turntable;

运动控制单元根据所述参数设置单元发送的所述扫描数值以及所述扫描方式单元发送的所述扫描模式,控制所述样品移动单元进行移动的步骤,包括:The motion control unit controls the sample moving unit to move according to the scanning value sent by the parameter setting unit and the scanning mode sent by the scanning mode unit, including:

接收所述扫描方式单元发送的所述扫描模式;receiving the scanning mode sent by the scanning mode unit;

若所述扫描模式为平面扫描,控制所述二维平移台进行平移以实现所述扫描信号对待测样品的平面扫描;If the scanning mode is planar scanning, controlling the two-dimensional translation stage to translate to realize the planar scanning of the sample to be tested by the scanning signal;

若所述扫描模式为圆柱扫描,控制所述二维平移台进行平移和/或控制所述转台进行转动,以实现所述扫描信号对待测样品的圆柱扫描;If the scanning mode is cylindrical scanning, controlling the two-dimensional translation stage to translate and/or controlling the turntable to rotate, so as to realize the cylindrical scanning of the sample to be tested by the scanning signal;

若所述扫描模式为连续采集扫描,控制所述二维平移台进行平移以及控制所述转台进行转动,以实现所述扫描信号对待测样品的连续扫描。If the scanning mode is continuous acquisition scanning, the two-dimensional translation platform is controlled to translate and the turntable is controlled to rotate, so as to realize the continuous scanning of the sample to be tested by the scanning signal.

步骤S205,多级图像显示单元根据所述回波信号接收单元传输的各回波信号,生成并显示所述待测样品对应的多级图像信息,其中,所述多级图像信息包括一维距离像、二维图像信息和三维图像信息。Step S205, the multi-level image display unit generates and displays the multi-level image information corresponding to the sample to be tested according to the echo signals transmitted by the echo signal receiving unit, wherein the multi-level image information includes a one-dimensional distance image , two-dimensional image information and three-dimensional image information.

具体实施时,所述多级图像显示单元包括一维距离像显示子单元;During specific implementation, the multi-level image display unit includes a one-dimensional distance image display subunit;

多级图像显示单元根据所述回波信号接收单元传输的各回波信号,生成并显示所述待测样品对应的多级图像信息的步骤,包括:The step of the multi-level image display unit generating and displaying the multi-level image information corresponding to the sample to be tested according to the echo signals transmitted by the echo signal receiving unit includes:

接收所述回波信号接收单元传输的各回波信号对应的时域数据,其中,各回波信号对应所述待测样品的不同预设位置;receiving time-domain data corresponding to each echo signal transmitted by the echo signal receiving unit, wherein each echo signal corresponds to a different preset position of the sample to be tested;

将各所述时域数据转化为电压以及进行第三类型的预设处理,得到各所述预设位置对应的频域数据以及一维距离像,其中,所述第三类型的预设处理包括相位补偿、滤波和傅里叶变换。converting each of the time-domain data into voltages and performing a third type of preset processing to obtain frequency-domain data and one-dimensional distance images corresponding to each of the preset positions, wherein the third type of preset processing includes Phase compensation, filtering and Fourier transform.

具体实施时,所述多级图像显示单元还包括二维图像显示子单元;During specific implementation, the multi-level image display unit further includes a two-dimensional image display subunit;

多级图像显示单元根据所述回波信号接收单元传输的各回波信号,生成并显示所述待测样品对应的多级图像信息的步骤,包括:The step of the multi-level image display unit generating and displaying the multi-level image information corresponding to the sample to be tested according to the echo signals transmitted by the echo signal receiving unit includes:

选取各预设位置的预设范围内的全部所述预设位置对应的频域数据为目标数据;selecting the frequency domain data corresponding to all the preset positions within the preset range of each preset position as the target data;

将所述目标数据进行积分,得到预设范围内的当前所述预设位置对应的强度值;Integrating the target data to obtain an intensity value corresponding to the current preset position within a preset range;

将全部预设位置对应的强度值进行融合显示,得到所述待测样品对应的二维图像。The intensity values corresponding to all preset positions are fused and displayed to obtain a two-dimensional image corresponding to the sample to be tested.

具体实施时,所述多级图像显示单元还包括三维图像显示子单元;During specific implementation, the multi-level image display unit further includes a three-dimensional image display subunit;

多级图像显示单元根据所述回波信号接收单元传输的各回波信号,生成并显示所述待测样品对应的多级图像信息的步骤,包括:The step of the multi-level image display unit generating and displaying the multi-level image information corresponding to the sample to be tested according to the echo signals transmitted by the echo signal receiving unit includes:

将各所述一维距离像进行三维拼接,得到所述待测样品对应的三维矩阵;Performing three-dimensional splicing of each of the one-dimensional range images to obtain a three-dimensional matrix corresponding to the sample to be tested;

接收用户输入的三维坐标显示范围以及距离像层数;Receive the 3D coordinate display range and the number of distance image layers input by the user;

根据坐标显示范围以及距离像层数,显示所述待测样品的不同深度距离对应的切片信息。According to the coordinate display range and the number of distance image layers, slice information corresponding to different depth distances of the sample to be measured is displayed.

本申请所提供的太赫兹无损检测方法的具体实施过程,可以参见上述实施例提供的太赫兹无损检测系统的具体实施过程,在此不再一一赘述。For the specific implementation process of the terahertz non-destructive testing method provided in the present application, reference may be made to the specific implementation process of the terahertz non-destructive testing system provided in the above-mentioned embodiments, which will not be repeated here.

本申请提供的太赫兹无损检测方法,运动控制单元根据参数设置单元发送的扫描数值以及扫描方式单元发送的扫描模式,控制样品移动单元进行移动,以使回波信号接收单元接收到对应待测样品的不同预设位置的回波信号,对待测样品的形貌没有限制。且通过多级图像显示单元可以对回波信号进行整合处理,并进行深入地分析与计算,可以直观地显示待测样品的多维度检测信息,检测效率高。In the terahertz nondestructive testing method provided by this application, the motion control unit controls the sample moving unit to move according to the scanning value sent by the parameter setting unit and the scanning mode sent by the scanning mode unit, so that the echo signal receiving unit receives the corresponding sample to be tested There are no restrictions on the shape of the sample to be tested for the echo signals at different preset positions. Moreover, the echo signal can be integrated and processed through the multi-level image display unit, and the in-depth analysis and calculation can be performed, and the multi-dimensional detection information of the sample to be tested can be intuitively displayed, and the detection efficiency is high.

在本申请所提供的几个实施例中,应该理解到,所揭露的装置和方法,也可以通过其它的方式实现。以上所描述的装置实施例仅仅是示意性的,例如,附图中的流程图和结构图显示了根据本发明的多个实施例的装置、方法和计算机程序产品的可能实现的体系架构、功能和操作。在这点上,流程图或框图中的每个方框可以代表一个模块、程序段或代码的一部分,所述模块、程序段或代码的一部分包含一个或多个用于实现规定的逻辑功能的可执行指令。也应当注意,在作为替换的实现方式中,方框中所标注的功能也可以以不同于附图中所标注的顺序发生。例如,两个连续的方框实际上可以基本并行地执行,它们有时也可以按相反的顺序执行,这依所涉及的功能而定。也要注意的是,结构图和/或流程图中的每个方框、以及结构图和/或流程图中的方框的组合,可以用执行规定的功能或动作的专用的基于硬件的系统来实现,或者可以用专用硬件与计算机指令的组合来实现。In the several embodiments provided in this application, it should be understood that the disclosed devices and methods may also be implemented in other ways. The device embodiments described above are only illustrative. For example, the flowcharts and structural diagrams in the accompanying drawings show the possible implementation architecture and functions of devices, methods and computer program products according to multiple embodiments of the present invention. and operation. In this regard, each block in a flowchart or block diagram may represent a module, program segment, or part of code that includes one or more Executable instructions. It should also be noted that, in alternative implementations, the functions noted in the block may occur out of the order noted in the figures. For example, two blocks in succession may, in fact, be executed substantially concurrently, or they may sometimes be executed in the reverse order, depending upon the functionality involved. It is also to be noted that each block of the block diagrams and/or flow diagrams, and combinations of blocks in the block diagrams and/or flow diagrams, can be implemented by a dedicated hardware-based system that performs the specified function or action may be implemented, or may be implemented by a combination of special purpose hardware and computer instructions.

另外,在本发明各个实施例中的各功能模块或单元可以集成在一起形成一个独立的部分,也可以是各个模块单独存在,也可以两个或更多个模块集成形成一个独立的部分。In addition, each functional module or unit in each embodiment of the present invention can be integrated together to form an independent part, or each module can exist independently, or two or more modules can be integrated to form an independent part.

所述功能如果以软件功能模块的形式实现并作为独立的产品销售或使用时,可以存储在一个计算机可读取存储介质中。基于这样的理解,本发明的技术方案本质上或者说对现有技术做出贡献的部分或者该技术方案的部分可以以软件产品的形式体现出来,该计算机软件产品存储在一个存储介质中,包括若干指令用以使得一台计算机设备(可以是智能手机、个人计算机、服务器、或者网络设备等)执行本发明各个实施例所述方法的全部或部分步骤。而前述的存储介质包括:U盘、移动硬盘、只读存储器(ROM,Read-Only Memory)、随机存取存储器(RAM,Random Access Memory)、磁碟或者光盘等各种可以存储程序代码的介质。If the functions are implemented in the form of software function modules and sold or used as independent products, they can be stored in a computer-readable storage medium. Based on this understanding, the essence of the technical solution of the present invention or the part that contributes to the prior art or the part of the technical solution can be embodied in the form of a software product, and the computer software product is stored in a storage medium, including Several instructions are used to make a computer device (which may be a smart phone, a personal computer, a server, or a network device, etc.) execute all or part of the steps of the method described in each embodiment of the present invention. The aforementioned storage medium includes: U disk, mobile hard disk, read-only memory (ROM, Read-Only Memory), random access memory (RAM, Random Access Memory), magnetic disk or optical disk and other media that can store program codes. .

以上所述,仅为本发明的具体实施方式,但本发明的保护范围并不局限于此,任何熟悉本技术领域的技术人员在本发明揭露的技术范围内,可轻易想到变化或替换,都应涵盖在本发明的保护范围之内。The above is only a specific embodiment of the present invention, but the scope of protection of the present invention is not limited thereto. Anyone skilled in the art can easily think of changes or substitutions within the technical scope disclosed in the present invention. Should be covered within the protection scope of the present invention.

Claims (10)

1. The terahertz nondestructive testing system is characterized by comprising signal acquisition equipment and an imaging control platform, wherein the acquisition equipment comprises a scanning signal generation unit, a sample moving unit and an echo signal receiving unit, and the imaging control platform comprises a parameter setting unit, a scanning mode unit, a motion control unit and a multi-stage image display unit;
the scanning signal generating unit is used for generating a scanning signal so that the scanning signal propagates to the sample to be detected on the sample moving unit and reflects an echo signal to the echo signal receiving unit;
the parameter setting unit is used for setting a scanning value corresponding to a first type of scanning parameter, wherein the first type of scanning parameter comprises a coverage range, a scanning interval and a scanning speed of a scanning signal;
the scanning mode unit is used for setting a second type of scanning mode corresponding to the sample to be detected, wherein the second type of scanning mode comprises plane scanning, cylindrical scanning and continuous acquisition scanning;
the motion control unit is used for controlling the sample moving unit to move according to the scanning value sent by the parameter setting unit and the scanning mode sent by the scanning mode unit, so that the echo signal receiving unit receives echo signals corresponding to different preset positions of the sample to be detected;
the multi-stage image display unit is used for generating and displaying multi-stage image information corresponding to the sample to be detected according to each echo signal transmitted by the echo signal receiving unit, wherein the multi-stage image information comprises a one-dimensional range profile, two-dimensional image information and three-dimensional image information.
2. The terahertz nondestructive testing system according to claim 1, wherein the sample moving unit includes a two-dimensional translation stage and a turntable, the two-dimensional translation stage being connected to the turntable;
the motion control unit is specifically configured to:
receiving the scanning mode sent by the scanning mode unit;
if the scanning mode is plane scanning, controlling the two-dimensional translation stage to translate so as to realize plane scanning of the sample to be detected by the scanning signal;
if the scanning mode is cylindrical scanning, controlling the two-dimensional translation stage to translate and/or controlling the turntable to rotate so as to realize cylindrical scanning of the sample to be detected by the scanning signal;
and if the scanning mode is continuous acquisition scanning, controlling the two-dimensional translation stage to translate and controlling the turntable to rotate so as to realize continuous scanning of the sample to be detected by the scanning signals.
3. The terahertz nondestructive inspection system of claim 1 wherein the multi-stage image display unit includes a one-dimensional range profile display subunit, the multi-stage image display unit being specifically configured to:
receiving time domain data corresponding to each echo signal transmitted by the echo signal receiving unit, wherein each echo signal corresponds to different preset positions of the sample to be detected;
converting each time domain data into voltage and performing a third type of preset processing to obtain frequency domain data and a one-dimensional range profile corresponding to each preset position, wherein the third type of preset processing comprises phase compensation, filtering and Fourier transformation.
4. The terahertz nondestructive inspection system of claim 3 wherein the multi-stage image display unit further comprises a two-dimensional image display subunit, the multi-stage image display unit being specifically configured to:
selecting all frequency domain data corresponding to all preset positions in a preset range of each preset position as target data;
integrating the target data to obtain an intensity value corresponding to the current preset position in a preset range;
and carrying out fusion display on the intensity values corresponding to all the preset positions to obtain a two-dimensional image corresponding to the sample to be detected.
5. The terahertz nondestructive inspection system according to claim 3, wherein the multi-stage image display unit further comprises a three-dimensional image display subunit, the multi-stage image display unit being specifically configured to:
three-dimensional stitching is carried out on each one-dimensional distance image, and a three-dimensional matrix corresponding to the sample to be detected is obtained;
receiving a three-dimensional coordinate display demonstration girth input by a user and the number of layers of the range profile;
and displaying slice information corresponding to different depth distances of the sample to be detected according to the coordinate display demonstration circle and the number of layers of the range profile.
6. A terahertz nondestructive testing method, which is applied to the terahertz nondestructive testing system according to any one of claims 1 to 5, and which comprises:
the scanning signal generating unit generates a scanning signal so that the scanning signal propagates to the sample to be detected on the sample moving unit and reflects an echo signal to the echo signal receiving unit;
the method comprises the steps that a parameter setting unit sets a scanning value corresponding to a first type of scanning parameter, wherein the first type of scanning parameter comprises a coverage range, a scanning interval and a scanning speed of a scanning signal;
the scanning mode unit sets a second type of scanning mode corresponding to the sample to be detected, wherein the second type of scanning mode comprises plane scanning, cylindrical scanning and continuous acquisition scanning;
the motion control unit controls the sample moving unit to move according to the scanning value sent by the parameter setting unit and the scanning mode sent by the scanning mode unit, so that the echo signal receiving unit receives echo signals corresponding to different preset positions of the sample to be detected;
and the multi-stage image display unit generates and displays multi-stage image information corresponding to the sample to be detected according to each echo signal transmitted by the echo signal receiving unit, wherein the multi-stage image information comprises a one-dimensional range profile, two-dimensional image information and three-dimensional image information.
7. The terahertz nondestructive testing method according to claim 6, wherein the sample moving unit includes a two-dimensional translation stage and a turntable, the two-dimensional translation stage being connected to the turntable;
the motion control unit controls the sample moving unit to move according to the scanning value sent by the parameter setting unit and the scanning mode sent by the scanning mode unit, and the motion control unit comprises the following steps:
receiving the scanning mode sent by the scanning mode unit;
if the scanning mode is plane scanning, controlling the two-dimensional translation stage to translate so as to realize plane scanning of the sample to be detected by the scanning signal;
if the scanning mode is cylindrical scanning, controlling the two-dimensional translation stage to translate and/or controlling the turntable to rotate so as to realize cylindrical scanning of the sample to be detected by the scanning signal;
and if the scanning mode is continuous acquisition scanning, controlling the two-dimensional translation stage to translate and controlling the turntable to rotate so as to realize continuous scanning of the sample to be detected by the scanning signals.
8. The terahertz nondestructive testing method according to claim 6, wherein the multi-stage image display unit includes a one-dimensional range profile display subunit;
the step of generating and displaying the multi-level image information corresponding to the sample to be tested by the multi-level image display unit according to each echo signal transmitted by the echo signal receiving unit comprises the following steps:
receiving time domain data corresponding to each echo signal transmitted by the echo signal receiving unit, wherein each echo signal corresponds to different preset positions of the sample to be detected;
converting each time domain data into voltage and performing a third type of preset processing to obtain frequency domain data and a one-dimensional range profile corresponding to each preset position, wherein the third type of preset processing comprises phase compensation, filtering and Fourier transformation.
9. The terahertz nondestructive testing method according to claim 8, wherein the multi-stage image display unit further includes a two-dimensional image display subunit;
the step of generating and displaying the multi-level image information corresponding to the sample to be tested by the multi-level image display unit according to each echo signal transmitted by the echo signal receiving unit comprises the following steps:
selecting all frequency domain data corresponding to all preset positions in a preset range of each preset position as target data;
integrating the target data to obtain an intensity value corresponding to the current preset position in a preset range;
and carrying out fusion display on the intensity values corresponding to all the preset positions to obtain a two-dimensional image corresponding to the sample to be detected.
10. The terahertz nondestructive testing method according to claim 8, wherein the multi-stage image display unit further includes a three-dimensional image display subunit;
the step of generating and displaying the multi-level image information corresponding to the sample to be tested by the multi-level image display unit according to each echo signal transmitted by the echo signal receiving unit comprises the following steps:
three-dimensional stitching is carried out on each one-dimensional distance image, and a three-dimensional matrix corresponding to the sample to be detected is obtained;
receiving a three-dimensional coordinate display demonstration girth input by a user and the number of layers of the range profile;
and displaying slice information corresponding to different depth distances of the sample to be detected according to the coordinate display demonstration circle and the number of layers of the range profile.
CN202210166665.4A 2022-02-23 2022-02-23 Terahertz nondestructive testing system and method Pending CN116678850A (en)

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