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CN116504646A - Multi-chip array packaging structure and method - Google Patents

Multi-chip array packaging structure and method Download PDF

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Publication number
CN116504646A
CN116504646A CN202310735561.5A CN202310735561A CN116504646A CN 116504646 A CN116504646 A CN 116504646A CN 202310735561 A CN202310735561 A CN 202310735561A CN 116504646 A CN116504646 A CN 116504646A
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Prior art keywords
copper
chip
layer
substrate
adhesive layer
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CN116504646B (en
Inventor
林文奎
张伟伟
林骏耀
林殷帆
邱伟豪
管有军
简宏良
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Ningbo Tairuisi Microelectronics Co ltd
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Qingdao Tairuisi Microelectronics Co ltd
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    • H10W70/095
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10BELECTRONIC MEMORY DEVICES
    • H10B80/00Assemblies of multiple devices comprising at least one memory device covered by this subclass
    • H10W40/22
    • H10W40/226
    • H10W70/635
    • H10W70/65
    • H10W72/075
    • H10W74/012
    • H10W74/15
    • H10W90/701

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Abstract

The invention relates to a multi-chip arrangement packaging structure and a method, wherein the method comprises the following steps: providing a copper plate; planting a plurality of copper columns on the provided copper plate; providing a substrate and connecting the copper column on the substrate; carrying out plastic package on the copper column between the substrate and the copper plate to form a plastic package layer for coating the copper column; removing the copper plate by using a grinding process to expose the copper columns; providing a plurality of chips, and mounting the provided chips on the copper columns; dispensing heat dissipation glue on the chip to form a heat dissipation glue layer; coating insulating glue on the side part of the chip to form an insulating glue layer which is positioned on the corresponding plastic sealing layer and is adhered to the chip; and (5) planting solder balls on the back surface of the substrate, thereby completing packaging. The packaging method of the invention arranges a plurality of chips on the copper column, can effectively reduce the volume of the product, and has the advantages of short production lead time, low manufacturing cost, low power consumption, high data transmission rate, small occupied space and the like.

Description

多芯片排列封装结构及方法Multi-chip array packaging structure and method

技术领域technical field

本发明涉及半导体封装技术领域,特指一种多芯片排列封装结构及方法。The invention relates to the technical field of semiconductor packaging, in particular to a multi-chip array packaging structure and method.

背景技术Background technique

倒装芯片封装结构,只适用于凸点间距(Bump pitch)大于60um的情况,对于凸点间距小于60um的情况,现有的封装方式只能采用TCB(Thermal Compression Bonding,热压粘合)封装方式,但TCB封装方式存在良率差、成本高的问题。因此,亟需提供一种新的封装方式以适应于对于凸点间距小于60um的情况。The flip-chip packaging structure is only suitable for the case where the bump pitch (Bump pitch) is greater than 60um. For the case where the bump pitch is less than 60um, the existing packaging method can only use TCB (Thermal Compression Bonding) packaging way, but the TCB packaging method has the problems of poor yield and high cost. Therefore, it is urgent to provide a new packaging method to adapt to the situation that the pitch of the bumps is less than 60um.

发明内容Contents of the invention

本发明的目的在于克服现有技术的缺陷,提供一种多芯片排列封装结构及方法,解决现有的倒装芯片封装结构不能适用于小于60um的凸点间距的问题以及TCB封装存在的良率差和成本高的问题。The purpose of the present invention is to overcome the defects of the prior art, provide a multi-chip array packaging structure and method, solve the problem that the existing flip-chip packaging structure cannot be applied to the bump pitch less than 60um and the yield rate of TCB packaging Poor and high cost issues.

实现上述目的的技术方案是:The technical scheme for realizing the above-mentioned purpose is:

本发明提供了一种多芯片排列封装方法,包括如下步骤:The invention provides a multi-chip array packaging method, comprising the following steps:

提供一铜板;provide a copper plate;

于所提供的铜板上植上多个铜柱;Plant multiple copper pillars on the copper plate provided;

提供一基板,并将所述铜柱连接在所述基板上;providing a substrate, and connecting the copper pillars to the substrate;

对所述基板和所述铜板之间的铜柱进行塑封形成包覆所述铜柱的塑封层;performing plastic sealing on the copper pillars between the substrate and the copper plate to form a plastic sealing layer covering the copper pillars;

利用研磨工艺将所述铜板去除以露出所述铜柱;removing the copper plate by a grinding process to expose the copper pillar;

提供多个芯片,将所提供的芯片贴装在所述铜柱上;providing a plurality of chips, and mounting the provided chips on the copper pillar;

于所述芯片之上点散热胶形成散热胶层;Dot heat dissipation glue on the chip to form a heat dissipation glue layer;

于所述芯片的侧部涂覆绝缘胶形成位于对应的塑封层之上的并与所述芯片相贴的绝缘胶层;Coating insulating glue on the side of the chip to form an insulating glue layer on the corresponding plastic sealing layer and attached to the chip;

于所述基板的背面植上锡球,从而完成封装。Planting solder balls on the back of the substrate to complete the package.

本发明的封装方法将多个芯片排列在铜柱上,能够有效缩小产品的体积,可实现将DRAM、闪存和SRAM等不同规格和不同尺寸的芯片封装在单一模块中,采用混合技术将2至8个芯片堆栈在低成本的基本上,具有生产前置时间短、制造成本低、低功耗、高数据传输速率和占用空间小等的优势。The packaging method of the present invention arranges multiple chips on the copper pillars, which can effectively reduce the volume of the product, and can package chips of different specifications and sizes such as DRAM, flash memory, and SRAM in a single module. On the basis of low cost, the 8-chip stack has the advantages of short production lead time, low manufacturing cost, low power consumption, high data transfer rate and small footprint.

本发明多芯片排列封装方法的进一步改进在于,提供散热片,将所述散热片覆设在所述绝缘胶层和所述散热胶层之上,并与所述绝缘胶层和所述散热胶层粘贴固定。The further improvement of the multi-chip array packaging method of the present invention is that a heat sink is provided, and the heat sink is covered on the insulating adhesive layer and the heat dissipation adhesive layer, and is connected with the insulating adhesive layer and the heat dissipation adhesive layer. Layer paste is fixed.

本发明多芯片排列封装方法的进一步改进在于,所提供的散热片包括覆设在所述绝缘胶层和所述散热胶层之上的顶板以及与所述顶板连接的四个侧板;A further improvement of the multi-chip array packaging method of the present invention is that the provided heat sink includes a top plate covered on the insulating adhesive layer and the heat dissipation adhesive layer and four side plates connected to the top plate;

设置所述散热片时,将所述散热片罩扣在所述绝缘胶层和所述散热胶层之上,让所述散热片的四个侧板贴设在所述绝缘胶层以及所述塑封层对应的侧部上。When setting the heat sink, the heat sink cover is buckled on the insulating adhesive layer and the heat dissipation adhesive layer, and the four side plates of the heat sink are attached to the insulating adhesive layer and the heat dissipation adhesive layer. on the side corresponding to the plastic sealing layer.

本发明多芯片排列封装方法的进一步改进在于,在所述铜板上植铜柱时,让相邻的两个铜柱之间的间距小于60um。A further improvement of the multi-chip array packaging method of the present invention lies in that, when planting copper pillars on the copper plate, the distance between two adjacent copper pillars should be less than 60 um.

本发明多芯片排列封装方法的进一步改进在于,在贴装好芯片之后,对所述芯片进行引线键合。A further improvement of the multi-chip array packaging method of the present invention is that, after the chips are mounted, wire bonding is performed on the chips.

本发明还提供了一种多芯片排列封装结构,包括:The present invention also provides a multi-chip array packaging structure, including:

基板;Substrate;

连接在所述基板上的多个铜柱,所述铜柱的顶部连接有可研磨去除的铜板;A plurality of copper pillars connected to the substrate, the tops of the copper pillars are connected with a removable copper plate;

塑封形成在所述基板和所述铜板之间并包裹所述铜柱的塑封层;Plastic sealing a plastic sealing layer formed between the substrate and the copper plate and wrapping the copper pillar;

贴装在经研磨去除铜板而露出的铜柱上的多个芯片;Multiple chips mounted on copper pillars exposed by grinding to remove the copper plate;

设于所述芯片之上的散热胶层;A heat dissipation glue layer arranged on the chip;

设于所述芯片侧部并位于对应的塑封层之上的绝缘胶层;an insulating adhesive layer disposed on the side of the chip and on the corresponding plastic encapsulation layer;

设于所述基板背面的锡球。Solder balls arranged on the back of the substrate.

本发明多芯片排列封装结构的进一步改进在于,还包括覆设在所述绝缘胶层之上的散热片。A further improvement of the multi-chip array packaging structure of the present invention is that it further includes a heat sink covering the insulating adhesive layer.

本发明多芯片排列封装结构的进一步改进在于,所述散热片包括覆设在所述绝缘胶层和所述散热胶层之上的顶板以及与所述顶板垂直连接的四个侧板,所述的四个侧板贴设在所述绝缘胶层以及所述塑封层对应的侧部上。The further improvement of the multi-chip arrangement package structure of the present invention is that the heat sink includes a top plate covered on the insulating adhesive layer and the heat dissipation adhesive layer and four side plates vertically connected to the top plate, the The four side panels are attached to the insulating glue layer and the corresponding sides of the plastic sealing layer.

本发明多芯片排列封装结构的进一步改进在于,相邻的两个铜柱之间的间距小于60um。The further improvement of the multi-chip array packaging structure of the present invention lies in that the distance between two adjacent copper pillars is less than 60um.

本发明多芯片排列封装结构的进一步改进在于,还包括连接在所述芯片上的焊接线。A further improvement of the multi-chip array package structure of the present invention is that it further includes welding wires connected to the chips.

附图说明Description of drawings

图1为本发明多芯片排列封装结构及方法中的铜板的结构示意图。FIG. 1 is a structural schematic diagram of a copper plate in the multi-chip array packaging structure and method of the present invention.

图2为本发明多芯片排列封装方法中在铜板上植上铜柱的结构示意图。FIG. 2 is a structural schematic diagram of planting copper pillars on a copper plate in the multi-chip array packaging method of the present invention.

图3为本发明多芯片排列封装方法中将铜柱与基板连接的结构示意图。FIG. 3 is a schematic structural diagram of connecting copper pillars to a substrate in the multi-chip array packaging method of the present invention.

图4为本发明多芯片排列封装方法中对铜柱进行塑封的结构示意图。FIG. 4 is a schematic structural view of plastic-encapsulating copper pillars in the multi-chip array packaging method of the present invention.

图5为本发明多芯片排列封装方法中研磨去除铜板后的结构示意图。FIG. 5 is a schematic diagram of the structure after grinding and removing the copper plate in the multi-chip array packaging method of the present invention.

图6为本发明多芯片排列封装方法中贴装芯片的结构示意图。FIG. 6 is a schematic structural diagram of mounting chips in the multi-chip array packaging method of the present invention.

图7为本发明多芯片排列封装方法中设置散热片的结构示意图。FIG. 7 is a schematic structural diagram of a heat sink provided in the multi-chip array packaging method of the present invention.

图8为本发明多芯片排列封装方法中在基板上植上锡球的结构示意图。FIG. 8 is a schematic structural diagram of planting solder balls on the substrate in the multi-chip array packaging method of the present invention.

附图标记说明:Explanation of reference signs:

21-铜板;22-铜柱;23-基板;锡球-231;24-塑封层;25-芯片;26-散热胶层;27-散热片;28-绝缘胶层。21-copper plate; 22-copper column; 23-substrate; solder ball-231; 24-plastic sealing layer; 25-chip;

具体实施方式Detailed ways

下面结合附图和具体实施例对本发明作进一步说明。The present invention will be further described below in conjunction with the accompanying drawings and specific embodiments.

参阅图8,本发明提供了一种多芯片排列封装结构及方法,用于解决现有的TCB封装方式存在良率差以及成本高的问题。本发明先利用在铜板上植上间距小于60um的铜柱,利用芯片排列的方式以有效缩小电子产品的体积,将多个芯片封装在一起,具有生产前置时间短、制造成本低、低功耗、高数据传输速率和占用空间小等的优势。下面结合附图对本发明多芯片排列封装结构及方法进行说明。Referring to FIG. 8 , the present invention provides a multi-chip array packaging structure and method, which are used to solve the problems of poor yield and high cost in the existing TCB packaging method. In the present invention, copper pillars with a spacing of less than 60um are planted on the copper plate, and the chip arrangement is used to effectively reduce the volume of electronic products, and multiple chips are packaged together, which has the advantages of short production lead time, low manufacturing cost, and low power consumption. The advantages of power consumption, high data transfer rate and small footprint. The multi-chip array packaging structure and method of the present invention will be described below with reference to the accompanying drawings.

参阅图8,显示了本发明的多芯片排列封装结构的剖视图。下面结合图8,对本发明多芯片排列封装结构进行说明。Referring to FIG. 8 , it shows a cross-sectional view of the multi-chip array package structure of the present invention. The multi-chip array packaging structure of the present invention will be described below with reference to FIG. 8 .

如图8所示,本发明的多芯片排列封装结构包括基板23、铜柱22、铜板21、塑封层24、芯片25、散热胶层26、绝缘胶层28以及锡球231;铜柱22有多个,连接在基板23和铜板21之间,较佳地,结合图1和图2所示,先将铜柱22植在铜板21上,结合图3所示,再将铜柱22的另一端与基板23连接,该铜板21可在后期研磨去除。结合图4所示,塑封层24形成在基板23和铜板21之间并包裹铜柱22,该塑封层24较佳采用绝缘胶形成。芯片25有多个,芯片25贴装在研磨去除铜板21后露出的铜柱22上,结合图5和图6所示,先将铜板21研磨去处露出铜柱,然后在将多个芯片25排列的贴装在铜柱22上。结合图7所示,散热胶层26设于芯片25之上,绝缘胶层28设于芯片25的侧部并位于对应的塑封层24之上;锡球231设于基板23的背面。As shown in Figure 8, the multi-chip arrangement packaging structure of the present invention includes a substrate 23, a copper column 22, a copper plate 21, a plastic sealing layer 24, a chip 25, a heat dissipation adhesive layer 26, an insulating adhesive layer 28, and a solder ball 231; the copper column 22 has Multiple, connected between the substrate 23 and the copper plate 21, preferably, as shown in FIG. 1 and FIG. One end is connected to the substrate 23, and the copper plate 21 can be removed by grinding later. As shown in FIG. 4 , the plastic sealing layer 24 is formed between the substrate 23 and the copper plate 21 and wraps the copper pillars 22 . The plastic sealing layer 24 is preferably formed by insulating glue. There are multiple chips 25, and the chips 25 are mounted on the copper pillars 22 exposed after the copper plate 21 is ground and removed. As shown in FIG. 5 and FIG. mounted on the copper pillar 22. As shown in FIG. 7 , the heat dissipation adhesive layer 26 is disposed on the chip 25 , the insulating adhesive layer 28 is disposed on the side of the chip 25 and on the corresponding plastic packaging layer 24 ; the solder balls 231 are disposed on the back of the substrate 23 .

进一步地,如图7和图8所示,还包括覆设在绝缘胶层28之上的散热片27。Further, as shown in FIG. 7 and FIG. 8 , a heat sink 27 covered on the insulating glue layer 28 is also included.

再进一步地,散热片27包括覆设在绝缘胶层28和散热胶层26之上的顶板以及与顶板垂直连接的四个侧板,该四个侧板贴设在绝缘胶层28以及塑封层24对应的侧部上。Still further, the heat sink 27 includes a top plate covered on the insulating adhesive layer 28 and the heat dissipation adhesive layer 26 and four side plates vertically connected to the top plate, and the four side plates are attached to the insulating adhesive layer 28 and the plastic sealing layer. 24 on the corresponding side.

又进一步地,相邻的两个铜柱22之间的间距小于60um。Still further, the distance between two adjacent copper pillars 22 is less than 60um.

又进一步地,还包括连接在芯片25上的焊接线。Still further, it also includes bonding wires connected to the chip 25 .

本发明的芯片排列封装结构侧重在一个封装中排列了多个芯片,主要指多个存储器芯片的堆栈,在这个封装中含有存储器子系统,可将DRAM、闪存和SRAM等不同规格和不同尺寸的芯片封装在单一模块中,并采用混合技术,将2至8个芯片堆栈在低成本的基板上,具备生产前置时间短、制造成本低、低功耗、高数据传输速率和占用空间小等优势。The chip array packaging structure of the present invention focuses on arranging multiple chips in one package, mainly referring to the stack of multiple memory chips. This package contains a memory subsystem, which can integrate DRAM, flash memory, and SRAM with different specifications and sizes. The chip is packaged in a single module and uses hybrid technology to stack 2 to 8 chips on a low-cost substrate, which has short production lead time, low manufacturing cost, low power consumption, high data transmission rate and small footprint, etc. Advantage.

本发明还提供了一种多芯片排列封装方法,下面对该封装方法进行说明。The present invention also provides a multi-chip array packaging method, which will be described below.

如图1至图8所示,本发明的封装方法包括如下步骤:As shown in Figures 1 to 8, the packaging method of the present invention includes the following steps:

提供一铜板21;providing a copper plate 21;

于所提供的铜板21上植上多个铜柱22;Plant a plurality of copper pillars 22 on the provided copper plate 21;

提供一基板23,并将铜柱22连接在基板23上;providing a substrate 23, and connecting the copper column 22 to the substrate 23;

对基板23和铜板21之间的铜柱22进行塑封形成包覆铜柱22的塑封层24;Plastic sealing the copper pillars 22 between the substrate 23 and the copper plate 21 to form a plastic sealing layer 24 covering the copper pillars 22;

利用研磨工艺将铜板21去除以露出铜柱22;removing the copper plate 21 by a grinding process to expose the copper post 22;

提供多个芯片25,将所提供的芯片25贴装在铜柱22上;Provide a plurality of chips 25, and mount the provided chips 25 on the copper pillars 22;

于芯片25之上点散热胶形成散热胶层26;Dot heat dissipating glue on the chip 25 to form a heat dissipating glue layer 26;

于芯片25的侧部涂覆绝缘胶形成位于对应的塑封层24之上的并与芯片25相贴的绝缘胶层28;Coating insulating glue on the side of the chip 25 to form an insulating glue layer 28 on the corresponding plastic sealing layer 24 and attached to the chip 25;

于基板23的背面植上锡球231,从而完成封装。Solder balls 231 are planted on the back of the substrate 23 to complete the package.

在贴装芯片25时,将芯片25置于对应的铜柱22及塑封层24之上,并将芯片25上的引脚与铜柱22对应的电连接。When mounting the chip 25 , the chip 25 is placed on the corresponding copper pillar 22 and the plastic encapsulation layer 24 , and the pins on the chip 25 are electrically connected to the corresponding copper pillar 22 .

进一步地,还包括:提供散热片27,将散热片27覆设在绝缘胶层28和散热胶层26之上,并与绝缘胶层28和散热胶层26粘贴固定。Further, it also includes: providing a heat sink 27 , covering the heat sink 27 on the insulating adhesive layer 28 and the heat dissipation adhesive layer 26 , and pasting and fixing the insulating adhesive layer 28 and the heat dissipation adhesive layer 26 .

再进一步地,所提供的散热片27包括覆设在绝缘胶层28和散热胶层26之上的顶板以及与顶板连接的四个侧板;Still further, the provided heat sink 27 includes a top plate covered on the insulating adhesive layer 28 and the heat dissipation adhesive layer 26 and four side plates connected to the top plate;

设置散热片27时,将散热片27罩扣在绝缘胶层28和散热胶层26之上,让散热片27的四个侧板贴设在绝缘胶层以及塑封层对应的侧部上。When disposing the heat sink 27, the heat sink 27 is covered and fastened on the insulating adhesive layer 28 and the heat dissipation adhesive layer 26, and the four side plates of the heat sink 27 are pasted on the corresponding sides of the insulating adhesive layer and the plastic sealing layer.

又进一步地,在铜板21上植铜柱22时,让相邻的两个铜柱22之间的间距小于60um。Still further, when planting the copper pillars 22 on the copper plate 21 , the distance between two adjacent copper pillars 22 should be less than 60 um.

又进一步地,在贴装好芯片25之后,对芯片25进行引线键合。Still further, after the chip 25 is mounted, wire bonding is performed on the chip 25 .

以上结合附图实施例对本发明进行了详细说明,本领域中普通技术人员可根据上述说明对本发明做出种种变化例。因而,实施例中的某些细节不应构成对本发明的限定,本发明将以所附权利要求书界定的范围作为本发明的保护范围。The present invention has been described in detail above with reference to the embodiments of the accompanying drawings, and those skilled in the art can make various changes to the present invention according to the above description. Therefore, some details in the embodiments should not be construed as limiting the present invention, and the present invention will take the scope defined by the appended claims as the protection scope of the present invention.

Claims (10)

1. A multi-chip arrangement packaging method is characterized by comprising the following steps:
providing a copper plate;
planting a plurality of copper columns on the provided copper plate;
providing a substrate and connecting the copper column on the substrate;
carrying out plastic packaging on the copper column between the substrate and the copper plate to form a plastic packaging layer for coating the copper column;
removing the copper plate by using a grinding process to expose the copper pillars;
providing a plurality of chips, and mounting the provided chips on the copper columns;
dispensing heat dissipation glue on the chip to form a heat dissipation glue layer;
coating insulating glue on the side part of the chip to form an insulating glue layer which is positioned on the corresponding plastic sealing layer and is attached to the chip;
and (5) planting solder balls on the back surface of the substrate, thereby completing packaging.
2. The multi-chip arrangement package method of claim 1, further comprising:
and providing a radiating fin, and covering the radiating fin on the insulating adhesive layer and the radiating adhesive layer, and adhering and fixing the radiating fin and the insulating adhesive layer and the radiating adhesive layer.
3. The multi-chip arrangement package method of claim 2 wherein the heat sink provided includes a top plate overlying the insulating glue layer and the heat sink glue layer and four side plates connected to the top plate;
when the radiating fins are arranged, the radiating fins are covered and buckled on the insulating adhesive layer and the radiating adhesive layer, and the four side plates of the radiating fins are attached to the side parts corresponding to the insulating adhesive layer and the plastic sealing layer.
4. The multi-chip arrangement package method of claim 1, wherein when copper pillars are planted on the copper plate, a spacing between two adjacent copper pillars is smaller than 60um.
5. The multi-chip arrangement package method of claim 1, wherein after the chips are mounted, wire bonding is performed on the chips.
6. A multi-chip arrangement package structure, comprising:
a substrate;
the copper columns are connected to the substrate, and copper plates capable of being removed through grinding are connected to the tops of the copper columns;
a plastic package layer which is formed between the substrate and the copper plate and wraps the copper column;
a plurality of chips mounted on the copper pillars exposed by polishing the copper plate;
a heat dissipation adhesive layer arranged on the chip;
the insulating adhesive layer is arranged on the side part of the chip and positioned above the corresponding plastic sealing layer;
and the solder balls are arranged on the back surface of the substrate.
7. The multi-chip arrangement package structure of claim 6 further comprising a heat sink overlying the insulating glue layer.
8. The multi-chip arrangement package structure of claim 7, wherein the heat sink comprises a top plate covering the insulating glue layer and the heat sink glue layer, and four side plates vertically connected to the top plate, and the four side plates are attached to the corresponding side portions of the insulating glue layer and the plastic layer.
9. The multi-chip arrangement package of claim 8 wherein a spacing between two adjacent copper pillars is less than 60um.
10. The multi-chip arrangement package structure of claim 6, further comprising bond wires connected to the chip.
CN202310735561.5A 2023-06-21 2023-06-21 Multi-chip arrangement packaging structure and method Active CN116504646B (en)

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