CN116358509A - Micromechanical gyroscope and electronic product - Google Patents

Abstract

The invention provides a micromechanical gyroscope and an electronic product. The driving piece is positioned at two sides of the first sensing component and the second sensing component which are oppositely arranged along the first direction. The first sensing assembly is connected with the driving piece through a first coupling beam. The second sensing assembly is connected with the driving piece through a second coupling beam. The stiffness of the first coupling beam in the second direction is greater than the stiffness of the first coupling beam in a third direction, the third direction being perpendicular to the first plane. The stiffness of the second coupling beam in the second direction is greater than the stiffness of the second coupling beam in the first direction. The micromechanical gyroscope and the electronic product have higher working precision.

Description

Micromechanical gyroscope and electronic product

Technical Field

The application relates to the technical field of gyroscopes, in particular to a micromechanical gyroscope and an electronic product.

Background

The micromechanical gyroscope in the prior art is a typical angular velocity sensor and generally comprises a driving piece and a moving piece, wherein the working principle is as follows: the driving member is capable of driving the moving member to vibrate in a determined direction in a determined plane, and when an external environment generates an angular velocity in a direction perpendicular to the plane, the moving member receives a coriolis force (coriolis force) perpendicular to the determined direction and generates displacement due to a coriolis effect, and the magnitude of the displacement value can be detected by the detecting member, so that the angular velocity of the external environment is obtained, and the measurement of the angular velocity is realized. In the existing triaxial micromechanical gyroscope, a moving part for detecting the Z-axis angular velocity and a moving part for detecting the X/Y-axis angular velocity are incompletely decoupled, so that the quadrature error is larger, and the working precision of the micromechanical gyroscope is lower.

Disclosure of Invention

The application provides a micromechanical gyroscope and an electronic product, and the working accuracy is higher.

A first aspect of the present application provides a micromechanical gyroscope that includes a first sensing assembly, a second sensing assembly, a drive, a first coupling beam, and a second coupling beam. The first sensing assembly comprises a first moving member capable of swinging about a first direction and/or a second direction, the first direction being orthogonal to the second direction. The second sensing assembly includes a second moving member that is movable in a first plane in which the first and second directions lie. The driving parts are positioned at two sides of the first sensing assembly and the second sensing assembly, which are oppositely arranged along the first direction, wherein one driving part can move along the second direction, and the other driving part can move reversely along the second direction. Two ends of the first sensing assembly, which are oppositely arranged along the first direction, are connected with corresponding driving pieces through corresponding first coupling beams. Two ends of the second sensing assembly, which are oppositely arranged along the first direction, are connected with corresponding driving pieces through corresponding second coupling beams. The stiffness of the first coupling beam in the second direction is substantially greater than the stiffness of the first coupling beam in a third direction, the third direction being perpendicular to the first plane. The stiffness of the second coupling beam in the second direction is substantially greater than the stiffness of the second coupling beam in the first direction.

The micromechanical gyroscope comprises three working modes, namely a driving mode, a first detection mode, a second detection mode and a third detection mode, under the driving mode, when one of the two driving parts moves along the second direction and the other one moves along the direction of the second direction, the two driving parts moving along the opposite direction drive the first sensing assembly to deflect at the first plane where the first direction and the second direction are located through the corresponding first coupling beam, so that the deflection movement of the first sensing assembly can be equivalently decomposed into a part of movement along the first direction, and the other part of movement along the opposite direction of the first direction. The first sensor assembly may be divided into two parts by a center line of the first sensor assembly in the first direction. When the external environment has an angular velocity along the second direction, the first moving member of the first sensor assembly receives a coriolis force along a first plane perpendicular to the first direction and the second direction. In detail, a part of the first moving member is subjected to a coriolis force in a third direction, and the other part of the first moving member is subjected to a coriolis force in a reverse direction of the third direction, and the two coriolis forces in opposite directions can cause the first moving member to swing around the first direction, and at this time, the micromechanical gyroscope is in a first detection state, and an angle at which the first moving member swings around the first direction or a displacement amount of the first moving member in the third direction can be detected, so that a second angular velocity of the external environment in the second direction can be obtained. Similarly, in the driving mode, when one of the two driving members moves along the second direction and the other one moves along the second direction, the two driving members moving along opposite directions drive the first sensing assembly to deflect in the first plane where the first sensing assembly is located in the first direction and the second direction through the corresponding first coupling beam, so that the deflection movement of the first sensing assembly can be equivalently decomposed into a part of movement along the second direction and the other part of movement along the opposite direction of the second direction. Wherein the first sensing component may be divided into two parts by a center line of the first sensing component in the second direction. When the external environment has an angular velocity along the first direction, the first moving member of the first sensor assembly receives a coriolis force along a first plane perpendicular to the first direction and the second direction. In detail, a part of the first moving member is subjected to a coriolis force in a third direction, and the other part of the first moving member is subjected to a coriolis force in a reverse direction of the third direction, and the two coriolis forces in opposite directions can cause the first moving member to swing around the second direction, and at this time, the micromechanical gyroscope is in a second detection state, and an angle at which the first moving member swings around the second direction or a displacement amount of the first moving member in the third direction can be detected, so that a first angular velocity of an external environment in the first direction can be obtained. In the driving mode, when one of the two driving parts moves along the second direction and the other driving part moves along the second direction, the two driving parts moving along opposite directions drive the two parts of the second sensing assembly to move along opposite directions through the corresponding second coupling beams, wherein the second sensing assembly can be divided into two parts according to the middle line of the second sensing assembly along the second direction, and at least one of the two parts can comprise the second moving part. When the external environment has an angular velocity in the third direction, one of the second moving parts of the second sensor assembly receives a coriolis force in the first direction and/or one of the second moving parts of the second sensor assembly receives a coriolis force in the opposite direction. At this time, the micromechanical gyroscope is in the third detection state, and the movement distance of the second moving member in the first direction and/or in the reverse direction of the first direction can be detected, so that the third angular velocity of the external environment in the third direction can be obtained. Since the first detection mode, the second detection mode and the third detection mode may exist at the same time and do not interfere with each other, the micromechanical gyroscope may be used to detect the first angular velocity, the second angular velocity and the third angular velocity of the external environment at the same time, i.e. the micromechanical gyroscope may be used to detect the angular velocity in a complex rotation environment. Because the first sensing component is connected with the driving piece through the first coupling beam, and the rigidity of the first coupling beam along the second direction is far greater than the rigidity of the first coupling beam along the third direction, when the first moving piece swings around the first direction and/or the second direction, the interference influence of the movement of the first moving piece on the driving piece is weak. Because the second sensing component is connected with the driving piece through the second coupling beam, and the rigidity of the second coupling beam along the second direction is far greater than the rigidity of the second coupling beam along the first direction, when the second moving piece moves reversely along the first direction and/or the first direction, the interference influence of the movement of the second moving piece on the driving piece is weaker. Compared with the micromechanical gyroscope in the prior art, the first moving part and the second moving part of the micromechanical gyroscope are decoupled in motion, the mutual interference degree of the first moving part and the second moving part is low, the influence caused by quadrature errors is reduced, and the working accuracy of the micromechanical gyroscope is higher. The first moving part and the second moving part can be used for differential detection, so that the interference of external electrical and mechanical noise can be resisted, and the signal-to-noise ratio of the device is improved.

In a possible design, first sensing assembly still includes first decoupling zero subassembly, first torsion subassembly, first fixed anchor point and the fixed anchor point of second, the structure of first decoupling zero subassembly is frame structure, first decoupling zero subassembly's outward flange is connected with the driving piece through first coupling beam, first moving part, first torsion subassembly, first fixed anchor point and the fixed anchor point of second are all located the space that first decoupling zero subassembly encloses, first moving part and the fixed anchor point of first are all connected with first decoupling zero subassembly, first moving part is provided with first fretwork portion, first torsion subassembly and the fixed anchor point of second set up in first fretwork portion, first moving part is connected with the fixed anchor point of second through first torsion subassembly.

In one possible design, the first decoupling assembly includes a first decoupling member, a first decoupling beam, and a first decoupling anchor beam, where the first decoupling member has a rectangular frame structure, two opposite outer edges of the first decoupling member are connected to corresponding driving members through corresponding first coupling beams, and four inner edges of the first decoupling member are connected to the first moving members through corresponding first decoupling beams, and four inner edges of the first decoupling member are connected to corresponding first anchor points through corresponding first decoupling anchor beams. The stiffness of the first decoupling beam in the second direction is much greater than the stiffness of the first decoupling beam in the third direction.

In one possible design, the first torsion assembly includes a torsion frame, a first torsion beam, a second torsion beam, two oppositely disposed outer edges of the torsion frame being connected to corresponding inner edges of the first moving member by corresponding first torsion beams, two oppositely disposed inner edges of the torsion frame being connected to the second fixed anchor point by corresponding second torsion beams, the first torsion beams being orthogonal to the second torsion beams.

In one possible design, the second sensor assembly further comprises a second decoupling assembly and a third fixed anchor point, the second moving member is connected with the driving member through a second coupling beam, and the second moving member is connected with the third fixed anchor point through the second decoupling assembly.

In one possible design, the second decoupling assembly includes a second decoupling member, a second decoupling beam, and a second decoupling anchor beam, the second decoupling member being connected to the second motion member by the second decoupling beam, the second decoupling member being connected to the third fixed anchor by the second decoupling anchor beam, the second decoupling beam being disposed along the first direction, the second decoupling anchor beam being disposed along the second direction, the second decoupling beam having a stiffness in the second direction that is substantially less than a stiffness of the second decoupling beam along the first direction, the second decoupling anchor beam having a stiffness in the second direction that is substantially greater than a stiffness of the second decoupling anchor beam along the first direction.

In one possible design, the second sensing assembly comprises two oppositely arranged second decoupling assemblies and two oppositely arranged second moving parts, each second decoupling assembly is connected with the corresponding second moving part, the second sensing assembly further comprises a third coupling beam, two ends of the third coupling beam are connected with the corresponding driving parts, and the third coupling beam is further connected with the two oppositely arranged second moving parts respectively.

In one possible design, the third coupling beam comprises a first section and a pair of second sections, both ends of the first section are connected with the corresponding driving members, one side of the first section facing the second moving member is also connected with the second section, each second section is connected with the corresponding second moving member, the second section is inclined relative to the first section, one end of the second section, which is away from the first section, is closer to the corresponding driving member than one end of the second section, which is closer to the first section, and the two second sections are symmetrically arranged.

In one possible design, the driving member includes a driving beam, a driving anchor beam, and a fourth fixed anchor point, the driving beam is connected to the fourth fixed anchor point through the driving anchor beam, the driving beam includes a third section and a fourth section connected to each other, the first sensing assembly is connected to the third section through a first coupling beam, and the second sensing assembly is connected to the fourth section through a second coupling beam.

A second aspect of the present application provides an electronic product comprising a body and a micromechanical gyroscope as described above, the micromechanical gyroscope being mounted to the body. The electronic product has the effects of the content.

It is to be understood that both the foregoing general description and the following detailed description are exemplary and explanatory only and are not restrictive of the application.

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Drawings

FIG. 1a is a schematic structural diagram of a micromechanical gyroscope according to the present application in a first embodiment;

FIG. 1b is a schematic view of the first moving member of FIG. 1a swinging around a second direction;

FIG. 1c is a schematic view of the first moving member of FIG. 1a swinging around a first direction;

FIG. 2 is an enlarged view of a portion A of FIG. 1 a;

FIG. 3 is an enlarged partial view of portion B of FIG. 1 a;

FIG. 4 is a schematic diagram of the first sensor assembly of FIG. 1 a;

FIG. 5 is an enlarged view of a portion C of FIG. 4;

FIG. 6 is an enlarged view of a portion D of FIG. 4;

FIG. 7 is a schematic diagram of the second sensor assembly of FIG. 1 a;

FIG. 8 is a schematic view of the second mover of FIG. 7;

FIG. 9 is a schematic diagram of a second decoupling assembly of FIG. 7;

FIG. 10 is a schematic view of the third coupling beam of FIG. 7;

FIG. 11 is a schematic view of the driving member of FIG. 1 a;

FIG. 12 is a schematic view of the drive anchor beam of FIG. 11;

FIG. 13a is a schematic view of a micromechanical gyroscope according to the present application in a second embodiment;

FIG. 13b is a schematic view of the first moving member of FIG. 13a swinging around a second direction;

FIG. 13c is a schematic view illustrating the first moving member of FIG. 13a swinging around a first direction;

FIG. 14 is an enlarged view of a portion E of FIG. 13 a;

FIG. 15 is an enlarged view of a portion F of FIG. 13 a;

FIG. 16 is an enlarged partial view of portion G of FIG. 13 a;

FIG. 17 is a schematic view of the second mover of FIG. 13 a;

fig. 18 is a schematic structural view of the third coupling beam of fig. 13 a.

Reference numerals:

10-micromechanical gyroscope;

1-a first sensing assembly;

11-a first motion member;

111-a first hollowed-out part;

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12-a first decoupling assembly;

121-a first decoupling member;

121 a-a frame;

121 b-a second tee;

121 c-a second hollowed-out part;

122-a first decoupling beam;

123-a first decoupling anchor beam;

13-a first torsion assembly;

131-torsion frame;

132—a first torsion beam;

133-a second torsion beam;

14-a first anchor point;

15-a second anchor point;

2-a second sensing assembly;

21-a second motion member;

211-a third hollowed-out part;

212-a fourth hollowed-out part;

22-a second decoupling assembly;

221-a second decoupling member;

222-a second decoupling beam;

223-second decoupling anchor beam;

23-a third anchor point;

24-a third coupling beam;

241-first section;

242-a second section;

3-a driving member;

31-a drive beam;

311-third section;

312-fourth section;

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32-driving an anchor beam;

33-fourth anchor point;

4-a first coupling beam;

41-a first lever;

42-first tee

43-a second lever;

5-second coupling beam.

The accompanying drawings, which are incorporated in and constitute a part of this specification, illustrate embodiments consistent with the application and together with the description, serve to explain the principles of the application.

Detailed Description

For a better understanding of the technical solutions of the present application, embodiments of the present application are described in detail below with reference to the accompanying drawings.

It should be understood that the described embodiments are merely some, but not all, of the embodiments of the present application. All other embodiments, which can be made by one of ordinary skill in the art without undue burden from the present disclosure, are within the scope of the present disclosure.

The terminology used in the embodiments of the application is for the purpose of describing particular embodiments only and is not intended to be limiting of the application. As used in this application and the appended claims, the singular forms "a," "an," and "the" are intended to include the plural forms as well, unless the context clearly indicates otherwise.

It should be understood that the term "and/or" as used herein is merely one relationship describing the association of the associated objects, meaning that there may be three relationships, e.g., a and/or B, may represent: a exists alone, A and B exist together, and B exists alone. In addition, the character "/" herein generally indicates that the front and rear associated objects are an "or" relationship.

It should be noted that, the terms "upper", "lower", "left", "right", and the like in the embodiments of the present application are described in terms of the angles shown in the drawings, and should not be construed as limiting the embodiments of the present application. In the context of this document, it will also be understood that when an element is referred to as being "on" or "under" another element, it can be directly on the other element or be indirectly on the other element through intervening elements.

A first aspect of embodiments of the present application provides a micromechanical gyroscope that may be used as a horizontal, vertical, pitch, heading, and angular rate sensor. The micromechanical gyroscope according to the embodiments of the present application mainly comprises two embodiments, a first embodiment is described herein, and then a second embodiment is described.

Embodiment one:

referring to fig. 1a, a micromechanical gyroscope 10 includes a first sensing assembly 1, a second sensing assembly 2, a driving member 3, a first coupling beam 4, and a second coupling beam 5. Referring to fig. 1 b-1 c, the first sensor assembly 1 includes a first moving member 11, and the first moving member 11 can swing around a first direction X and/or a second direction Y. Referring to fig. 1a, the second sensor assembly 2 includes a second moving member 21, and the second moving member 21 can move in a first plane (X-Y) where the first direction X and the second direction Y are located. The driving members 3 are located on both sides of the first sensor assembly 1 and the second sensor assembly 2, which are disposed opposite to each other in the first direction X, wherein one driving member 3 is movable in the second direction Y, and the other driving member 3 is movable in the opposite direction of the second direction Y. The two ends of the first sensing component 1, which are oppositely arranged along the first direction X, are connected with the corresponding driving pieces 3 through corresponding first coupling beams 4, the two ends of the second sensing component 2, which are oppositely arranged along the first direction X, are connected with the corresponding driving pieces 3 through corresponding second coupling beams 5, the rigidity of the first coupling beams 4 along the second direction Y is far greater than the rigidity of the first coupling beams 4 along the third direction Z, and the third direction Z is perpendicular to the first plane (X-Y). The stiffness of the second coupling beam 5 in the second direction Y is much greater than the stiffness of the second coupling beam 5 in the first direction X.

In this embodiment, referring to fig. 1 a-1 c, the micromechanical gyroscope 10 includes three working modes, specifically, a driving mode, a first detecting mode, a second detecting mode and a third detecting mode, under the driving mode, when one of the two driving members 3 moves along the second direction Y and the other moves along the second direction Y, the two driving members 3 moving in opposite directions drive the first sensing assembly 1 to deflect in the first direction X and the first plane (X-Y) where the second direction Y is located through the corresponding first coupling beam 4, so that the deflection motion of the first sensing assembly 1 can be equivalently decomposed into a part of movement along the first direction X and the other part of movement along the opposite direction of the first direction X. The first sensor assembly 1 can be divided into two parts according to the center line of the first sensor assembly 1 along the first direction X. When the external environment has an angular velocity in the second direction Y, the first moving member 11 of the first sensor assembly 1 receives a coriolis force along a first plane (X-Y) perpendicular to the first direction X and the second direction Y. In detail, a part of the first moving element 11 is subjected to a coriolis force in the third direction Z, and the other part of the first moving element 11 is subjected to a coriolis force in the opposite direction Z, which causes the first moving element 11 to swing around the first direction X, and at this time, the micromechanical gyroscope 10 is in the first detection state, the angle of the swing of the first moving element 11 around the first direction X or the displacement of the first moving element 11 in the third direction Z can be detected, and thus the DD230044I of the external environment in the second direction Y can be obtained

Two angular velocities.

Similarly, referring to fig. 1 a-1 c, in the driving mode, when one of the two driving members 3 moves along the second direction Y and the other one moves along the second direction Y, the two driving members 3 moving in opposite directions drive the first sensing assembly 1 to deflect in the first plane (X-Y) where the first direction X and the second direction Y are located through the corresponding first coupling beam 4, so that the deflection movement of the first sensing assembly 1 can be equivalently decomposed into a part of movement along the second direction Y and the other part of movement along the opposite direction Y. The first sensor assembly 1 can be divided into two parts according to the center line of the first sensor assembly 1 along the second direction Y. When the external environment has an angular velocity in the first direction X, the first moving member 11 of the first sensor assembly 1 receives a coriolis force along a first plane (X-Y) perpendicular to the first direction X and the second direction Y. In detail, a part of the first moving element 11 is subjected to the coriolis force along the third direction Z, and the other part of the first moving element 11 is subjected to the coriolis force along the opposite direction Z, and the two opposite directions of the coriolis force can cause the first moving element 11 to swing around the second direction Y, at this time, the micromechanical gyroscope 10 is in the second detection state, and the angle at which the first moving element 11 swings around the second direction Y or the displacement amount of the first moving element 11 along the third direction Z can be detected, so that the first angular velocity of the external environment along the first direction X can be obtained.

Referring to fig. 1a, in the driving mode, when one of the two driving members 3 moves along the second direction Y and the other one moves along the second direction Y, the two driving members 3 moving along opposite directions drive the two portions of the second sensing assembly 2 to move along opposite directions through the corresponding second coupling beams 5, wherein the second sensing assembly 2 may be divided into two portions according to a center line of the second sensing assembly 2 along the second direction Y, and at least one of the two portions may include the second moving member 21. When the external environment has a third angular velocity in the third direction Z, one of the second moving parts 21 of the second sensing assembly 2 may be subjected to a coriolis force in the first direction X and/or one of the second moving parts 21 of the second sensing assembly 2 may be subjected to a reverse coriolis force in the first direction X. At this time, the micromechanical gyroscope 10 is in the third detection state, and the movement distance of the second motion member 21 in the first direction X and/or in the reverse direction of the first direction X can be detected, so that the third angular velocity of the external environment in the third direction Z can be obtained.

Since the first detection mode, the second detection mode and the third detection mode may exist at the same time and do not interfere with each other, the micromechanical gyroscope 10 may be used to detect the first angular velocity, the second angular velocity and the third angular velocity of the external environment at the same time, i.e. the micromechanical gyroscope 10 may be used to detect the angular velocity in a complex rotational environment.

Referring to fig. 1 a-1 c, since the first sensor assembly 1 is connected to the driving member 3 through the first coupling beam 4, and the stiffness of the first coupling beam 4 along the second direction Y is much greater than the stiffness of the first coupling beam 4 along the third direction Z, when the first moving member 11 swings around the first direction X and/or the second direction Y, the interference effect of the movement of the first moving member 11 on the driving member 3 is weak.

The ratio of the stiffness of the first coupling beam 4 along the second direction Y to the stiffness of the first coupling beam 4 along the third direction Z is greater than 1000:1, and the ratio may specifically be 1100:1, 1200:1, 1300:1, 1400:1, 1500:1.

Referring to fig. 1a, since the second sensing assembly 2 is connected to the driving member 3 through the second coupling beam 5, and the stiffness of the second coupling beam 5 along the second direction Y is much greater than the stiffness of the second coupling beam 5 along the first direction X, when the second moving member 21 moves reversely along the first direction X and/or the first direction X, the interference effect of the movement of the second moving member 21 on the driving member 3 is weak.

The ratio of the stiffness of the second coupling beam 5 along the second direction Y to the stiffness of the second coupling beam 5 along the first direction X is greater than 1000:1, and the ratio may specifically be 1100:1, 1200:1, 1300:1, 1400:1, 1500:1.

Compared with the micromechanical gyroscope in the prior art, the first moving part 11 and the second moving part 21 of the micromechanical gyroscope 10 in the embodiment of the application are decoupled in motion, the mutual interference degree of the first moving part and the second moving part is low, the influence caused by quadrature errors is reduced, and the working precision of the micromechanical gyroscope 10 is higher. The first moving part 11 and the second moving part 21 can be used for differential detection, so that the interference of external electrical and mechanical noise can be resisted, and the signal-to-noise ratio of the device can be improved.

Referring to fig. 2, the first coupling beam 4 includes a first rod 41, a first T-shaped member 42, and a second rod 43. The two ends of the first rod piece 41 are connected with the driving piece 3, the middle part of the first rod piece 41 is connected with the first T-shaped piece 42, the two ends of the first T-shaped piece 42 are respectively connected with the second rod piece 43, and the second rod piece 43 is connected with the first sensing assembly 1. The first rod 41 is arranged along the second direction Y, the first T-shaped member 42 is arranged along the first direction X, the second rod 43 is arranged along the first direction X, the first rod 41 and the first T-shaped member 42 can form an i-shaped structure, the first T-shaped member 42 and the second rod 43 can form a mountain-shaped structure, and the arrangement is such that the rigidity of the first coupling beam 4 along the second direction Y is much greater than the rigidity of the first coupling beam 4 along the third direction Z. At least part of the first T-shaped member 42 and the second rod 43 are located in the second hollowed-out portion 121c of the first sensing assembly 1, and this arrangement makes the structure relatively compact, so as to facilitate miniaturization.

In addition, the second coupling beams 5 are disposed along the second direction Y, and two ends of the same side of the second sensing assembly 2 are respectively connected with one second coupling beam 5, and two second coupling beams 5 located on the same side of the second sensing assembly 2 are connected to the same driving member 3.

Specifically, referring to fig. 4, the first sensing assembly 1 may further include a first decoupling assembly 12, a first torsion assembly 13, a first fixed anchor point 14 and a second fixed anchor point 15, where the structure of the first decoupling assembly 12 is a frame structure, the outer edge of the first decoupling assembly 12 is connected with the driving member 3 through the first coupling beam 4, the first moving member 11, the first torsion assembly 13, the first fixed anchor point 14 and the second fixed anchor point 15 are all located in a space enclosed by the first decoupling assembly 12, the first moving member 11 and the first fixed anchor point 14 are all connected with the first decoupling assembly 12, the first moving member 11 is provided with a first hollow portion 111, the first torsion assembly 13 and the second fixed anchor point 15 are disposed in the first hollow portion 111, and the first moving member 11 is connected with the second fixed anchor point 15 through the first torsion assembly 13.

In this embodiment, referring to fig. 4, the structure of the first decoupling assembly 12 is a frame structure, the first fixed anchor point 14 is located in a space enclosed by the first decoupling assembly 12, and the first decoupling assembly 12 is connected to the first fixed anchor point 14. The first moving member 11 is located in a space enclosed by the first decoupling assembly 12, the first moving member 11 is connected to the first decoupling assembly 12, and the first moving member 11 is coupled to the first decoupling assembly 12 in a moving manner, so that the first moving member 11 has a degree of freedom to swing around the first direction X and/or around the second direction Y relative to the first decoupling assembly 12. Since the first moving member 11 is connected to the first coupling beam 4 through the first decoupling assembly 12, the first coupling beam 4 is connected to the driving member 3, and thus the moving decoupling of the first moving member 11 from the driving member 3 can be achieved. The first moving member 11 is provided with a first hollow portion 111, the first torsion assembly 13 and the second fixed anchor 15 are located in the first hollow portion 111, the first moving member 11 is connected with the second fixed anchor 15 through the first torsion assembly 13, and the first moving member 11 is decoupled from the first torsion assembly 13 in a moving manner, so that the first moving member 11 has a degree of freedom of swinging around the first direction X and/or around the second direction Y relative to the first torsion assembly 13.

The first fixed anchor point 14 and the second fixed anchor point 15 are both fixedly connected to a component in the use environment, and the component may be a housing of the electronic device.

In addition, the first hollowed-out portion 111, the first torsion component 13 and the second fixing anchor 15 may be located in a central area of the first moving member 11.

More specifically, referring to fig. 4 to 5, the first decoupling assembly 12 may include a first decoupling member 121, a first decoupling beam 122, and a first decoupling anchor beam 123, where the first decoupling member 121 has a rectangular frame structure, two opposite outer edges of the first decoupling member 121 are connected to the corresponding driving member 3 through corresponding first coupling beams 4, four inner edges of the first decoupling member 121 are connected to the first moving member 11 through corresponding first decoupling beams 122, and four inner edges of the first decoupling member 121 are connected to corresponding first anchor points 14 through corresponding first decoupling anchor beams 123, and the stiffness of the first decoupling beam 122 along the second direction Y is much greater than that of the first decoupling beam 122 along the third direction Z.

In this embodiment, referring to fig. 4-5, the micromechanical gyroscope 10 may include two driving members 3 disposed opposite to each other and two first coupling beams 4 disposed opposite to each other, where the two driving members 3 are connected to corresponding outer edges of the first decoupling member 121 through corresponding first coupling beams 4, so as to implement motion decoupling of the first decoupling member 121 and the driving members 3. The structure of the first decoupling member 121 is a rectangular frame structure, four inner edges of the first decoupling member 121 are connected with the first moving member 11 through corresponding first decoupling beams 122, and the rigidity of the first decoupling beams 122 along the second direction Y is far greater than the rigidity of the first decoupling beams 122 along the third direction Z, so that when the first moving member 11 moves around the first direction X and/or the second direction Y, the movement decoupling of the first decoupling member 121 and the first moving member 11 is realized, and the first moving member 11, the second moving member 21 and the movement decoupling degree can be further improved.

The ratio of the stiffness of the first decoupling beam 122 along the second direction Y to the stiffness of the first decoupling beam 122 along the third direction Z is greater than 1000:1, and the ratio may specifically be 1100:1, 1200:1, 1300:1, 1400:1, 1500:1.

In addition, as shown in fig. 4-5, two first decoupling beams 122 are disposed along the first direction X, two other first decoupling beams 122 are disposed along the second direction Y, two first decoupling anchor beams 123 are disposed along the first direction X, and two other first decoupling beams 122 are disposed along the second direction Y. The arrangement direction of the first decoupling beam 122 located at the same edge of the first mover 11 is orthogonal to the arrangement direction of the first decoupling anchor beam 123. The first decoupling member 121 includes a frame 121a and a second T-shaped member 121b, and at least a portion of the frame 121a and the second T-shaped member 121b may constitute an i-shaped structure. The second T-shaped member 121b has first decoupling beams 122 connected to both ends thereof, and the first decoupling beams 122 have a C-shape, U-shape or -shape, so that the stiffness of the first decoupling beams 122 in the second direction Y is substantially greater than the stiffness of the first decoupling beams 122 in the third direction Z.

In addition, as shown in fig. 4, the first sensing assembly 1 includes four first fixing anchor points 14, wherein two first fixing anchor points 14 are disposed opposite to each other along the first direction X and located on a middle line of the first moving member 11 along the first direction X, and the other two first fixing anchor points 14 are disposed opposite to each other along the second direction Y and located on a middle line of the first moving member 11 along the second direction Y.

Referring to fig. 4 and 6, the first torsion assembly 13 may include a torsion frame 131, a first torsion beam 132, and a second torsion beam 133, wherein two opposite outer edges of the torsion frame 131 are connected with corresponding inner edges of the first moving member 11 through corresponding first torsion beams 132, and two opposite inner edges of the torsion frame 131 are connected with the second fixed anchor 15 through corresponding second torsion beams 133, and the first torsion beam 132 is orthogonal to the second torsion beam 133. In this arrangement, the first moving part 11 can be decoupled from the second fixed anchor 15 in terms of movement, i.e. the first moving part 11 can be twisted relative to the second fixed anchor 15 about the first direction X and/or the second direction Y.

As shown in fig. 4 and fig. 6, the second fixing anchor 15 is located in a central area of the first moving member 11, the first torsion beam 132 may be disposed along the second direction Y and located at a middle line of the first moving member 11 along the second direction Y, and the second torsion beam 133 may be disposed along the first direction X and located at a middle line of the first moving member 11 along the first direction X.

In other embodiments (not shown), the first torsion beam 132 may be disposed along the first direction X and located at a center line of the first moving member 11 along the first direction X, and the second torsion beam 133 may be disposed along the second direction Y and located at a center line of the first moving member 11 along the second direction Y.

In view of the above, as shown in fig. 4 to 6, the first decoupling anchor 123 and the second torsion beam 133 disposed along the first direction X may serve as axes about which the first mover 11 swings in the first direction X. The first decoupling anchor beam 123 and the first torsion beam 132 disposed along the second direction Y may serve as axes about which the first mover 11 swings about the second direction Y.

Referring to fig. 7-9, the second sensing assembly 2 may further include a second decoupling assembly 22 and a third fixed anchor 23, the second moving member 21 is connected to the driving member 3 through the second coupling beam 5, and the second moving member 21 is connected to the third fixed anchor 23 through the second decoupling assembly 22.

In this embodiment, as shown in fig. 7 to 9, the second moving member 21 is connected to the driving member 3 through the second coupling beam 5, so as to realize motion decoupling of the second moving member 21 and the driving member 3, and the interference effect of the second moving member 21 on the driving member 3 is weak. The second moving member 21 is connected with the third fixed anchor point 23 through the second decoupling assembly 22, so that the second moving member 21 and the third fixed anchor point 23 are decoupled in a moving manner, and the second moving member 21 can move in the first plane (X-Y) relative to the third fixed anchor point 23.

The third fixed anchor 23 is fixedly connected to a component in the use environment, which may be a housing of the electronic device.

Referring to fig. 9, the second decoupling assembly 22 may include a second decoupling member 221, a second decoupling beam 222, and a second decoupling anchor beam 223, wherein the second decoupling member 221 is connected to the second moving member 21 through the second decoupling beam 222, the second decoupling member 221 is connected to the third fixing anchor 23 through the second decoupling anchor beam 223, the second decoupling beam 222 is disposed along the first direction X, the second decoupling beam 223 is disposed along the second direction Y, the stiffness of the second decoupling beam 222 along the second direction Y is substantially smaller than the stiffness of the second decoupling beam 222 along the first direction X, and the stiffness of the second decoupling anchor beam 223 along the second direction Y is substantially greater than the stiffness of the second decoupling anchor beam 223 along the first direction X.

In this embodiment, as shown in fig. 9, since the second decoupling member 221 is connected to the second moving member 21 through the second decoupling beam 222, and the stiffness of the second decoupling beam 222 along the second direction Y is much smaller than that of the second decoupling beam 222 along the first direction X, the second decoupling member 221 and the second moving member 21 can be decoupled in the second direction Y, and the second decoupling member 221 is less affected by the second moving member 21 moving in the second direction Y. According to the above, the second moving member 21 is also subjected to the coriolis force along the first direction X, and the second decoupling beam 222 has a relatively high stiffness along the first direction X, so that the second decoupling member 221 can move along the first direction X along with the second moving member 21. Since the second decoupling member 221 is fixed to the third fixing anchor 23 by the second decoupling anchor 223, and the stiffness of the second decoupling anchor 223 in the second direction Y is much greater than the stiffness of the second decoupling anchor 223 in the first direction X, the second decoupling member 221 can be immobilized in the second direction Y relative to the third fixing anchor 23, and the second decoupling member 221 driven by the second moving member 21 can move in the first direction X relative to the third fixing anchor 23.

The ratio of the stiffness of the second decoupling beam 222 along the first direction X to the stiffness of the second decoupling beam 222 along the second direction Y is greater than 1000:1, and the ratio may specifically be 1100:1, 1200:1, 1300:1, 1400:1, 1500:1. The ratio of the stiffness of the second decoupling anchor beam 223 in the second direction Y to the stiffness of the second decoupling anchor beam 223 in the first direction X is greater than 1000:1, which may specifically be 1100:1, 1200:1, 1300:1, 1400:1, 1500:1.

Referring to fig. 8, the second decoupling member 221 is provided with a third hollow portion 211, the third hollow portion 211 is configured to accommodate the second decoupling beam 222, the second decoupling member 221 has a structure, and the second decoupling member 221 half surrounds the second decoupling assembly 22. The second decoupling member 221 is a grating member, and the grating space of the second decoupling member 221 is used for placing a plate electrode (not shown in the figure), which can be used for detecting the displacement of the second moving member 21.

Referring to fig. 7, the second sensing assembly 2 may include two second decoupling assemblies 22 disposed opposite to each other and two second moving members 21 disposed opposite to each other, each second decoupling assembly 22 is connected to a corresponding second moving member 21, the second sensing assembly 2 further includes a third coupling beam 24, two ends of the third coupling beam 24 are connected to corresponding driving members 3, and the third coupling beam 24 is further connected to the two second moving members 21 disposed opposite to each other.

In this embodiment, referring to fig. 7, one of the two oppositely disposed second moving members 21 moves along the first direction X, the other moves in the opposite direction of the first direction X, and one of the two oppositely disposed second decoupling assemblies 22 moves in the first direction X, and the other moves in the opposite direction of the first direction X. When the two driving members 3 move in opposite directions, one driving member 3 drives the second moving member 21 to move in the second direction Y through one portion of the third coupling beam 24, and the other driving member 3 drives the second moving member 21 to move in the opposite direction of the second direction Y through the other portion of the third coupling beam 24. Referring to fig. 10, the third coupling beam 24 may include a first section 241 and a pair of second sections 242, wherein two ends of the first section 241 are connected to the corresponding driving member 3, one side of the first section 241 facing the second moving member 21 is further connected to the second section 242, and each second section 242 is connected to the corresponding second moving member 21. The second sections 242 are inclined relative to the first sections 241, the ends of the second sections 242 facing away from the first sections 241 are closer to the corresponding driving member 3 than the ends of the second sections 242 facing closer to the first sections 241, and the two second sections 242 are symmetrically arranged. With this arrangement, when in the third detection mode, the two second moving members 21 move in opposite phases in the direction X, the vibration state of the first segment 241 belonging to the first-order mode; when in the interference mode, the two second moving parts 21 move in the same phase along the direction X, and the vibration state of the first section 241 belongs to the second-order mode, so that the opposite-phase movement frequency of the two second moving parts 21 along the direction X is smaller than the same-phase movement frequency along the direction X through the different vibration states of the first section 241, the differential driving/detecting reliability of the micromechanical gyroscope is improved, the interference of external electrical and mechanical noise can be resisted, and the signal-to-noise ratio of the device is improved. The second moving member 21 is provided with a fourth hollowed-out portion 212 for accommodating the second section 242, so that the structure is compact and miniaturization is facilitated.

Referring to fig. 11, the driving member 3 may include a driving beam 31, a driving anchor beam 32 and a fourth fixed anchor 33, the driving beam 31 is connected to the fourth fixed anchor 33 through the driving anchor beam 32, the driving beam 31 includes a third section 311 and a fourth section 312 connected to each other, the first sensing assembly 1 is connected to the third section 311 through the first coupling beam 4, and the second sensing assembly 2 is connected to the fourth section 312 through the second coupling beam 5.

In this embodiment, referring to fig. 11, the driving anchor beam 32 can be deformed to enable the driving beam 31 to move along the second direction Y relative to the fourth fixed anchor 33, and then the third section 311 of the driving beam 31 can drive the first sensing assembly 1 to move along the second direction Y through the first coupling beam 4, and similarly, the fourth section 312 of the driving beam 31 can drive the second sensing assembly 2 to move along the second direction Y through the second coupling beam 5.

The fourth fixed anchor 33 is fixedly connected to a component in the use environment, which may be a housing of the electronic device. Referring to fig. 12, the driving anchor beam 32 has a mountain-shaped structure along a first direction X.

Embodiment two:

the following description mainly describes the differences between the second embodiment and the first embodiment with respect to the structure, and the following description will not describe the same points between the second embodiment and the first embodiment with respect to the structure.

Referring to fig. 13a and 14, the third section 311 of the driving member 3 is directly connected to the first moving member 11 of the first sensor assembly 1 through the first coupling beam 4. Wherein the same driving member 3 is connected to the same side edge of the first moving member 11 through a pair of first coupling beams 4, and the first coupling beams 4 have a zigzag structure. The stiffness of the first coupling beam 4 in the second direction Y is much greater than the stiffness of the first coupling beam 4 in the third direction Z. As shown in fig. 13b and 13c, when the first moving member 11 swings around the first direction X and/or the second direction Y, the interference effect of the movement of the first moving member 11 on the driving member 3 is weak.

Referring to fig. 15, the first moving member 11 is provided with a first hollow portion 111, and the first hollow portion 111 is configured to accommodate the first torsion assembly 13 and the second fixing anchor 15. The first torsion assembly 13 includes a torsion frame 131, a first torsion beam 132, and a second torsion beam 133. The first moving element 11 is connected to the torsion frame 131 by a first torsion beam 132 in the shape of , and the torsion frame 131 is connected to the second anchor point 15 in the shape of by a second torsion beam 133 in the shape of . Both ends of the outer edge of the torsion frame 131 in the second direction Y are respectively connected to the torsion frame 131 by a pair of first torsion beams 132, and both ends of the inner edge of the torsion frame 131 in the first direction X are respectively connected to the second anchor point 15 by a pair of second torsion beams 133.

Referring to fig. 16, the fourth section 312 of the driving member 3 is connected to the second moving member 21 of the second sensing assembly 2 through the i-shaped second coupling beam 5, the stiffness of the second coupling beam 5 along the second direction Y is much greater than the stiffness of the second coupling beam 5 along the first direction X, and when the second moving member 21 moves reversely along the first direction X and/or the first direction X, the interference effect of the movement of the second moving member 21 on the driving member 3 is weak. Referring to fig. 17 to 18, the second moving member 21 is provided with a fourth hollow portion 212, and the fourth hollow portion 212 is configured to accommodate a second section 242 of the third coupling beam 24, where the second section 242 has a mountain-shaped structure.

The micromechanical gyroscope 10 in the second embodiment also has the following effects:

the first moving member 11 and the second moving member 21 are decoupled in movement, the mutual interference degree of the first moving member 11 and the second moving member is low, the influence caused by the quadrature error is reduced, and the working precision of the micro-mechanical gyroscope 10 is higher. The first moving part 11 and the second moving part 21 can be used for differential detection, so that the interference of external electrical and mechanical noise can be resisted, and the signal-to-noise ratio of the device can be improved.

The same partial structure of the micromechanical gyroscope 10 in the second embodiment as that of the micromechanical gyroscope 10 in the first embodiment also has the effects described in the foregoing description of the first embodiment, and will not be described here again.

A second aspect of the present embodiment provides an electronic product (not shown in the drawings) including a body (not shown in the drawings) and the micromechanical gyroscope 10 in the foregoing, the micromechanical gyroscope 10 being mounted to the body. The electronic product of the present application has the effects described above with respect to the micromechanical gyroscope 10, and will not be described here again.

While the invention has been described with respect to the above embodiments, it should be noted that modifications can be made by those skilled in the art without departing from the inventive concept, and these are all within the scope of the invention.

Claims (10)

1. A micromechanical gyroscope, comprising:

a first sensing assembly comprising a first moving member swingable about a first direction and/or a second direction, the first direction being orthogonal to the second direction;

a second sensing assembly comprising a second moving member movable in a first plane in which the first and second directions lie;

the driving piece is positioned at two sides of the first sensing assembly and the second sensing assembly, which are oppositely arranged along the first direction, one driving piece can move along the second direction, and the other driving piece can move reversely along the second direction;

The two ends of the first sensing assembly, which are oppositely arranged along the first direction, are connected with the corresponding driving pieces through the corresponding first coupling beams;

the two ends of the second sensing assembly, which are oppositely arranged along the first direction, are connected with the corresponding driving pieces through the corresponding second coupling beams;

the stiffness of the first coupling beam along the second direction is greater than the stiffness of the first coupling beam along a third direction, the third direction being perpendicular to the first plane;

the stiffness of the second coupling beam along the second direction is greater than the stiffness of the second coupling beam along the first direction.

2. The micromechanical gyroscope of claim 1, wherein the first sensing assembly further comprises a first decoupling assembly, a first torsion assembly, a first fixed anchor point and a second fixed anchor point, the first decoupling assembly is in a frame structure, an outer edge of the first decoupling assembly is connected with the driving member through the first coupling beam, the first moving member, the first torsion assembly, the first fixed anchor point and the second fixed anchor point are all located in a space surrounded by the first decoupling assembly, the first moving member and the first fixed anchor point are both connected with the first decoupling assembly, the first moving member is provided with a first hollow portion, the first torsion assembly and the second fixed anchor point are arranged in the first hollow portion, and the first moving member is connected with the second fixed anchor point through the first torsion assembly.

3. The micromechanical gyroscope of claim 2, wherein the first decoupling assembly comprises a first decoupling member, a first decoupling beam, a first decoupling anchor beam, the first decoupling member having a rectangular frame structure, two oppositely disposed outer edges of the first decoupling member each being connected to a corresponding one of the drive members by a corresponding one of the first coupling beams, four inner edges of the first decoupling member each being connected to the first moving member by a corresponding one of the first decoupling beams, and four inner edges of the first decoupling member each being connected to a corresponding one of the first anchor points by a corresponding one of the first decoupling anchor beams;

the stiffness of the first decoupling beam in the second direction is greater than the stiffness of the first decoupling beam in the third direction.

4. The micromechanical gyroscope of claim 2, wherein the first torsion assembly comprises a torsion frame, a first torsion beam, a second torsion beam, two oppositely disposed outer edges of the torsion frame being connected to corresponding inner edges of the first motion member by corresponding first torsion beams, two oppositely disposed inner edges of the torsion frame being connected to the second fixed anchor by corresponding second torsion beams, the first torsion beams being orthogonal to the second torsion beams.

5. The micromechanical gyroscope of any of claims 1-4, wherein the second sensing assembly further comprises a second decoupling assembly, a third fixed anchor, the second moving member being coupled to the drive member via the second coupling beam, the second moving member being coupled to the third fixed anchor via the second decoupling assembly.

6. The micromechanical gyroscope of claim 5, wherein a second decoupling assembly comprises a second decoupling member, a second decoupling beam, and a second decoupling anchor beam, the second decoupling member being coupled to the second kinematic member through the second decoupling beam, the second decoupling member being coupled to the third fixed anchor through the second decoupling anchor beam, the second decoupling beam being disposed along the first direction, the second decoupling anchor beam being disposed along the second direction;

the stiffness of the second decoupling beam along the second direction is less than the stiffness of the second decoupling beam along the first direction;

the stiffness of the second decoupling anchor beam along the second direction is greater than the stiffness of the second decoupling anchor beam along the first direction.

7. The micromechanical gyroscope according to claim 5, characterized in that the second sensor assembly comprises two oppositely arranged second decoupling assemblies, two oppositely arranged second moving members, each second decoupling assembly being connected to a corresponding second moving member, the second sensor assembly further comprising a third coupling beam, both ends of which are connected to corresponding driving members, the third coupling beam further being connected to two oppositely arranged second moving members, respectively.

8. The micromechanical gyroscope according to claim 7, characterized in that the third coupling beam comprises a first segment and a pair of second segments, both ends of the first segment being connected to the corresponding driving member, the side of the first segment facing the second moving member being further connected to the second segments, each of the second segments being connected to the corresponding second moving member;

the second section is inclined relative to the first section, one end of the second section, which is away from the first section, is closer to the corresponding driving piece than one end of the second section, which is closer to the first section, and the two second sections are symmetrically arranged.

9. The micromechanical gyroscope of any of claims 1-4, wherein the drive comprises a drive beam, a drive anchor beam, and a fourth fixed anchor point, the drive beam being coupled to the fourth fixed anchor point by the drive anchor beam, the drive beam comprising a third segment and a fourth segment that are coupled, the first sensing assembly being coupled to the third segment by the first coupling beam, the second sensing assembly being coupled to the fourth segment by the second coupling beam.

10. An electronic product, comprising:

A body;

a micromechanical gyroscope, being a micromechanical gyroscope according to any of claims 1-9, the micromechanical gyroscope being mounted to the body.

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