CN117537795A - Triaxial gyroscope with lever - Google Patents
Triaxial gyroscope with lever Download PDFInfo
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- CN117537795A CN117537795A CN202311498799.7A CN202311498799A CN117537795A CN 117537795 A CN117537795 A CN 117537795A CN 202311498799 A CN202311498799 A CN 202311498799A CN 117537795 A CN117537795 A CN 117537795A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/5705—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using masses driven in reciprocating rotary motion about an axis
- G01C19/5712—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using masses driven in reciprocating rotary motion about an axis the devices involving a micromechanical structure
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Abstract
The invention relates to the technical field of gyroscopes and discloses a triaxial gyroscope with a lever, which comprises the lever, a driving detection frame, a driving detection electrode, a driving frame, a driving electrode, a detection frame, a third-direction detection electrode and four mass blocks which are orthogonally and symmetrically distributed. The triaxial gyroscope with the lever disclosed by the invention has the advantages that the detection sensitivity, the signal-to-noise ratio and the stability are all improved.
Description
Technical Field
The invention relates to the technical field of gyroscopes, in particular to a triaxial gyroscope with a lever.
Background
The MEMS gyroscope is an angular velocity sensor manufactured based on a micro-silicon mechanical process, has the advantages of good integration, small volume, low cost and the like, and is widely applied to products such as automobiles, unmanned aerial vehicles, game handles and the like. The current unipolar MEMS gyroscope generally adopts the mode that electric capacity detected, produces the size of displacement through detecting the coriolis force and calculates the rotation angular velocity indirectly, along with the miniaturized setting of chip, the length and the width of chip also become increasingly smaller, when the length and the width of chip reduce to certain degree, the sensitivity of electric capacity detection greatly reduced influences the signal to noise ratio and the stability of gyroscope.
Disclosure of Invention
Based on the above, the invention aims to provide a triaxial gyroscope with a lever, which solves the problem of low capacitance detection sensitivity caused by the reduction of the length and the width of a chip to a certain extent and improves the signal-to-noise ratio and the stability of the gyroscope.
In order to achieve the above purpose, the invention adopts the following technical scheme:
the utility model provides a take triaxial gyroscope of lever, includes lever, drive detection frame, drive detection electrode, drive frame, drive electrode, detection frame, third direction detection electrode and four be orthogonal symmetry's quality piece that distributes, drive electrode's active end sets up on the drive frame, drive electrode can drive two that distribute along the second direction the quality piece is followed the second direction motion to drive another two that distribute along the first direction the quality piece is followed the first direction motion, drive detection electrode's active end sets up on the drive detection frame, drive detection frame with along the first direction the quality piece that distributes all with the lever links to each other, drive detection frame's first force arm is less than the second force arm of quality piece, the detection frame is located four the outside of quality piece and with every quality piece elastic connection, the detection frame with drive frame is connected, be equipped with on the detection frame the active end that the third direction detected.
As a preferable scheme of the triaxial gyroscope with the lever, two mass blocks distributed along the second direction and a substrate opposite to the two mass blocks form a first direction detection electrode, and when the angular velocity along the first direction is detected, the two mass blocks distributed along the second direction synchronously and reversely reciprocate along a third direction; the two mass blocks distributed along the first direction and the substrate opposite to the two mass blocks form a second direction detection electrode, and when the angular velocity along the second direction is detected, the two mass blocks distributed along the first direction synchronously and reversely reciprocate along the third direction; and when the angular velocity in the third direction is detected, the two mass blocks distributed along the first direction synchronously and reversely reciprocate along the second direction, the two mass blocks distributed along the second direction move along the first direction, and the detection frame rotates along the third direction.
As the preferred scheme of the triaxial gyroscope with the lever, the triaxial gyroscope with the lever further comprises a first anchor point, a first straight beam, a second straight beam and a first fixedly connected elastic piece which can stretch and retract along the second direction, the lever is connected with the first anchor point through the first straight beam, the lever is connected with the mass block through the second straight beam, the lever is connected with the driving detection frame through the first fixedly connected elastic piece, and the first straight beam and the second straight beam extend along the first direction.
As a preferable scheme of the triaxial gyroscope with the lever, the first fixed connection elastic piece is connected with one end of the lever, the second straight beam is connected with the other end of the lever, and the first straight beam is connected with a part of the lever, which is close to the first fixed connection elastic piece.
As the preferred scheme of the triaxial gyroscope with the lever, the triaxial gyroscope with the lever further comprises a second anchor point, a second fixedly connected elastic piece and a first detection connected elastic piece, wherein the second anchor point is positioned between the driving detection frame and the mass block, the driving detection frame is connected with the second anchor point through the second fixedly connected elastic piece, the driving detection frame is connected with the detection frame through the first detection connected elastic piece, the second fixedly connected elastic piece and the first detection connected elastic piece can stretch along the first direction, and the first detection connected elastic piece can also deform along the third direction.
As a preferable mode of the three-axis gyroscope with a lever, the three-axis gyroscope with a lever further comprises a third straight beam extending along the second direction and a second detection connecting elastic piece capable of stretching along the second direction, the driving frame is connected with the mass block through the third straight beam, and the driving frame is connected with the detection frame through the second detection connecting elastic piece.
As a preferable mode of the three-axis gyroscope with a lever, the three-axis gyroscope with a lever further comprises a third detection connecting elastic piece which can stretch and retract along the second direction and deform along the third direction, and two ends of the third detection connecting elastic piece are respectively connected with the detection frame and the mass blocks distributed along the second direction.
As the preferred scheme of the triaxial gyroscope with the lever, the triaxial gyroscope with the lever further comprises a central coupling assembly, the central coupling assembly comprises a first central elastic element, a central connecting block, a second central elastic element and a central anchor point, the number of the first central elastic element, the second central elastic element and the number of the central anchor point are four, each first central elastic element is connected with one mass block, four first central elastic elements and four second central elastic elements are connected with the central connecting block, the first central elastic elements and the second central elastic elements are alternately distributed, and each second central elastic element is located between two first central elastic elements and is connected with one central anchor point.
As a preferable scheme of the triaxial gyroscope with the lever, the first central elastic piece comprises a central connecting spring and a central connecting straight beam, the central connecting spring can deform along the first direction, the second direction and the third direction, one end of the central connecting straight beam is connected with the central connecting spring, and the other end of the central connecting straight beam is connected with the central connecting block.
As a preferable scheme of the triaxial gyroscope with the lever, the triaxial gyroscope with the lever further comprises a coupling connection elastic piece, and two adjacent mass blocks are connected through the coupling connection elastic piece.
The beneficial effects of the invention are as follows:
the three-axis gyroscope with the lever disclosed by the invention adopts the drive closed-loop control, the drive electrode drives the drive frame to drive the mass block to move, the mass block can drive the movable end of the drive detection electrode to move through the drive detection frame, so that the capacitance of the drive detection electrode changes, the movement condition of the mass block is reflected, the movement amplitude of the drive detection frame is fixed in a stable state, and the first force arm of the drive detection frame is smaller than the second force arm of the mass block, and the drive frequency is fixed, so that the movement amplitude and the movement speed of the mass block are increased, the coriolis force born by the mass block is increased when the angular speed of the first direction and the angular speed of the second direction are detected, the coriolis force is facilitated to be detected, and the movement amplitude and the coriolis force of the detection frame are increased along with the increase of the movement amplitude and the coriolis force of the mass block, the mass block 51 drives the detection frame 41 to rotate, the capacitance detected by the detection electrode in the third direction is greatly changed, the sensitivity of the detection is improved, and the signal-to-noise ratio and the stability of the three-axis gyroscope with the lever are improved.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the following description will briefly explain the drawings needed in the description of the embodiments of the present invention, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and other drawings may be obtained according to the contents of the embodiments of the present invention and these drawings without inventive effort for those skilled in the art.
FIG. 1 is a schematic diagram of a three-axis gyroscope with a lever provided in an embodiment of the present invention;
FIG. 2 is a schematic diagram of a three-axis gyroscope with a lever with a detection frame and a third direction detection electrode removed according to an embodiment of the present invention;
FIG. 3 is a schematic diagram of a tri-axis gyroscope with a lever in a driving state according to an embodiment of the present invention;
FIG. 4 is a schematic diagram of a three-axis gyroscope with a lever according to an embodiment of the present invention for detecting an angular velocity in an X-axis direction;
FIG. 5 is a schematic diagram of a three-axis gyroscope with a lever according to an embodiment of the present invention for detecting an angular velocity in a Y-axis direction;
fig. 6 is a schematic diagram of a three-axis gyroscope with a lever according to an embodiment of the present invention for detecting an angular velocity in a Z-axis direction.
In the figure:
1. a lever;
21. driving a detection frame; 22. Driving the detection electrode;
31. a drive frame; 32. A driving electrode;
41. a detection frame; 42. a third direction detection electrode;
51. a mass block; 52. A coupling connection elastic member;
61. a first anchor point; 62. A second anchor point;
71. a first straight beam; 72. A second straight beam; 73. A third straight beam;
81. the first fixedly connected elastic piece; 82. The second fixedly connected elastic piece;
91. the first detection is connected with the elastic piece; 92. The second detection is connected with the elastic piece; 93. A third detection connecting elastic piece;
10. a center coupling assembly; 101. a first central elastic member; 1011. the center is connected with a spring; 1012. the center is connected with the straight beam; 102. a central connecting block; 103. a second central elastic member; 104. and (5) a central anchor point.
Detailed Description
In order to make the technical problems solved by the present invention, the technical solutions adopted and the technical effects achieved more clear, the technical solutions of the embodiments of the present invention will be described in further detail below with reference to the accompanying drawings, and it is obvious that the described embodiments are only some embodiments of the present invention, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to fall within the scope of the invention.
In the description of the present invention, it should be noted that the directions or positional relationships indicated by the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. are based on the directions or positional relationships shown in the drawings, are merely for convenience of describing the present invention and simplifying the description, and do not indicate or imply that the devices or elements referred to must have a specific orientation, be configured and operated in a specific orientation, and thus should not be construed as limiting the present invention. Furthermore, the terms "first," "second," and the like, are used for descriptive purposes only and are not to be construed as indicating or implying relative importance. Wherein the terms "first position" and "second position" are two different positions.
In the description of the present invention, it should be noted that, unless explicitly specified and limited otherwise, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be either fixed or removable, for example; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communication between two elements. The specific meaning of the above terms in the present invention will be understood in specific cases by those of ordinary skill in the art.
The embodiment provides a triaxial gyroscope with a lever, as shown in fig. 1 and 2, including a lever 1, a driving detection frame 21, a driving detection electrode 22, a driving frame 31, a driving electrode 32, a detection frame 41, a third-direction detection electrode 42 and four masses 51 distributed in orthogonal symmetry, wherein the movable end of the driving electrode 32 is arranged on the driving frame 31, the driving electrode 32 can drive two masses 51 distributed along the second direction to move along the second direction and drive the other two masses 51 distributed along the first direction to move along the first direction, the movable end of the driving detection electrode 22 is arranged on the driving detection frame 21, the driving detection frame 21 and the masses 51 distributed along the first direction are connected with the lever 1, the first force arm of the driving detection frame 21 is smaller than the second force arm of the masses 51, the detection frame 41 is positioned outside the four masses 51 and is elastically connected with each mass 51, the detection frame 41 is connected with the driving detection frame 21 and the driving frame 31, and the movable end of the third-direction detection electrode 42 is arranged on the detection frame 41.
Specifically, the two masses 51 distributed along the second direction form a first direction detection electrode with the substrate facing the two masses 51, and when the angular velocity along the first direction is detected, the two masses 51 distributed along the second direction reciprocate synchronously and reversely along the third direction, the capacitance of the first direction detection electrode changes, and at this time, the two masses 51 distributed along the first direction do not move along the third direction; the two mass blocks 51 distributed along the first direction and the substrate opposite to the two mass blocks form a second direction detection electrode, when the angular velocity along the second direction is detected, the two mass blocks 51 distributed along the first direction synchronously and reversely reciprocate along the third direction, the capacitance of the second direction detection electrode changes, and at the moment, the two mass blocks 51 distributed along the second direction do not move along the third direction; when the angular velocity in the third direction is detected, the two masses 51 distributed in the first direction reciprocate in the second direction in synchronization, the two masses 51 distributed in the second direction reciprocate in the first direction, the four masses 51 exhibit rotation in the third direction, and the masses 51 drive the detection frame 41 to rotate in the third direction.
Further, as shown in fig. 1 and fig. 2, the tri-axis gyroscope with a lever of the embodiment further includes a coupling connection elastic member 52, two adjacent mass blocks 51 are connected through the coupling connection elastic member 52, the coupling connection elastic member 52 is a U-shaped spring, one end of the U-shaped spring is connected with one mass block 51, the other end of the U-shaped spring is connected with the other mass block 51, an included angle between an opening direction of the U-shaped spring and the first direction is 45 ° and an included angle between the opening direction of the U-shaped spring and the second direction is 45 °, an opening of the U-shaped spring can ensure that a deformation mode of the coupling connection elastic member 52 is unique in a driving state of the tri-axis gyroscope with a lever, and movement speeds and movement amplitudes of the four mass blocks 51 are identical in a driving state, so that movement consistency of the four mass blocks 51 is ensured, and linearity of driving displacement is increased.
As shown in fig. 1 and 2, the first direction is the X-axis direction, the second direction is the Y-axis direction, the third direction is the Z-axis direction, the first direction detecting electrode is the X-axis direction detecting electrode, the second direction detecting electrode is the Y-axis direction detecting electrode, and the third direction detecting electrode 42 is the Z-axis direction detecting electrode in this embodiment. In other embodiments, the first direction may be a Y-axis direction, the second direction may be an X-axis direction, and the third direction may be a Z-axis direction, or the first direction, the second direction, and the third direction may be other three directions perpendicular to each other, which is specifically set according to actual needs.
The three-axis gyroscope with the lever provided by the embodiment adopts the driving closed-loop control, the driving electrode 32 drives the driving frame 31 to drive the mass block 51 to move, the mass block 51 can drive the movable end of the driving detection electrode 22 to move through the driving detection frame 21, so that the capacitance of the driving detection electrode 22 changes, and the movement condition of the mass block 51 is reflected. In a stable state, the motion amplitude of the driving detection frame 21 is fixed, and because the first force arm driving the detection frame 21 is smaller than the second force arm of the mass block 51 and the driving frequency is fixed, the motion amplitude and the motion speed of the mass block 51 are both increased, when the angular speed in the X-axis direction and the angular speed in the Y-axis direction are detected, the coriolis force received by the mass block 51 is increased, and when the angular speed in the Z-axis direction is detected, the motion amplitude and the coriolis force of the detection frame 41 are both increased along with the increase of the motion amplitude and the coriolis force of the mass block 51, the mass block 51 drives the detection frame 41 to rotate, the capacitance detected by the third-direction detection electrode 42 is greatly changed, the detection sensitivity is improved, and the signal-to-noise ratio and the stability of the tri-axis gyroscope with a lever are improved.
As shown in fig. 2, the tri-axial gyroscope with a lever of this embodiment further includes a first anchor point 61, a first straight beam 71, a second straight beam 72, and a first fixedly connected elastic member 81 that can extend and retract along the Y-axis direction, where the lever 1 is connected to the first anchor point 61 through the first straight beam 71, the lever 1 is connected to the mass block 51 through the second straight beam 72, and the lever 1 is connected to the driving detection frame 21 through the first fixedly connected elastic member 81, and the first straight beam 71 and the second straight beam 72 both extend along the X-axis direction. Wherein, first fixed connection elastic member 81 links to each other with the one end of lever 1, and second straight beam 72 links to each other with the other end of lever 1, and first straight beam 71 links to each other with the part of lever 1 near first fixed connection elastic member 81. The first straight beam 71 and the second straight beam 72 extend along the X-axis direction, and the distance from the end of the first fixedly connected elastic member 81 connected with the lever 1 to the first straight beam 71 along the Y-axis direction is smaller than the distance from the second straight beam 72 to the first straight beam 71, so that the first force arm driving the detection frame 21 is smaller than the second force arm of the mass block 51, and the movement amplitude of the mass block 51 is increased.
In the driving state, the mass blocks 51 distributed along the X-axis direction drive the lever 1 to move through the second straight beam 72, and since the lever 1 is fixed on the first anchor point 61 through the first straight beam 71, the first straight beam 71 is hardly bent, so that the lever 1 rotates with the position where the lever 1 is connected with the first straight beam 71 as a fulcrum, and at the same time, the first fixedly connected elastic member 81 is deformed.
Specifically, as shown in fig. 2, the number of the first anchor point 61, the first straight beam 71, the second straight beam 72 and the first fixedly connected elastic pieces 81 is four, each mass block 51 distributed along the X-axis direction corresponds to two second straight beams 72, the two second straight beams 72 are respectively located at two ends of the mass block 51 along the Y-axis direction, each second straight beam 72 corresponds to one lever 1, one first straight beam 71, one first anchor point 61 and one first fixedly connected elastic piece 81, wherein two first fixedly connected elastic pieces 81 are connected with one driving detection frame 21, the other two first fixedly connected elastic pieces 81 are connected with the other driving detection frame 21, and the two first fixedly connected elastic pieces 81 connected with the same driving detection frame 21 are respectively located at two sides of the driving detection frame 21 along the Y-axis direction.
It should be noted that, in other embodiments of the present invention, the tri-axial gyroscope with a lever may further include a fixed straight beam, instead of the first fixedly connected elastic member 81, one end of the first straight beam 71 is connected to the first anchor point 61, the other end of the first straight beam 71 is connected to one end of the lever 1, the second straight beam 72 is connected to the other end of the lever 1, one end of the fixed straight beam is connected to the middle part of the lever 1, and the other end of the fixed straight beam is connected to the driving detection frame 21, where the first force arm driving the detection frame 21 is still smaller than the second force arm of the mass block 51, and the movement of the lever 1 to the mass block 51 can still play a role of amplification.
As shown in fig. 2, the three-axis gyroscope with a lever of this embodiment further includes a second anchor point 62, a second fixedly connected elastic member 82 and a first detection connected elastic member 91, the second fixedly connected elastic member 82 and the first detection connected elastic member 91 are respectively located at two sides of the driving detection frame 21 along the X-axis direction, the second anchor point 62 is located between the driving detection frame 21 and the mass block 51, the driving detection frame 21 is connected with the second anchor point 62 through the second fixedly connected elastic member 82, the driving detection frame 21 is connected with the detection frame 41 through the first detection connected elastic member 91, the second fixedly connected elastic member 82 and the first detection connected elastic member 91 can stretch and retract along the X-axis direction so as to ensure that the driving detection frame 21 can move along the X-axis direction, and each driving detection frame 21 corresponds to two second anchor points 62, two second fixedly connected elastic members 82 and two first detection connected elastic members 91 so as to ensure that the driving detection frame 21 can move stably. The first detection connection elastic piece 91 can also deform along the Z-axis direction, when detecting the angular velocity in the Y-axis direction, the two driving detection frames 21 generate out-of-plane rotation, the rotation of the driving detection frames 21 is attenuated by the first detection connection elastic piece 91, decoupling of detection of the Z-axis detection of the angular velocity in the Y-axis is achieved, cross coupling is reduced, and accuracy of the Z-axis detection is improved.
As shown in fig. 2, the three-axis gyroscope with a lever of the present embodiment further includes a third straight beam 73 extending in the Y-axis direction and a second detection connection elastic member 92 capable of extending and retracting in the Y-axis direction, the driving frame 31 is connected to the mass block 51 through the third straight beam 73, and the driving frame 31 is connected to the detection frame 41 through the second detection connection elastic member 92. The third straight beams 73 and the second detection connection elastic pieces 92 are respectively located at two sides of the driving frame 31 along the Y-axis direction, each driving frame 31 corresponds to two third straight beams 73 and two second detection connection elastic pieces 92, two third straight beams 73 are located at two ends of one side of the driving frame 31 along the X-axis direction, and two second detection connection elastic pieces 92 are located at two ends of the other side of the driving frame 31 along the X-axis direction. In the driving state, the driving frame 31 and the mass block 51 move synchronously due to the third straight beam 73, and in the detecting state, the influence of the rotation of the mass block 51 on the driving frame 31 can be reduced due to the third straight beam 73, the unidirectional decoupling of the detected driving is realized, and the driving stability is improved. In other embodiments, the number of the third straight beams 73 and the second detection connection elastic members 92 corresponding to each driving frame 31 is not limited to two in the present embodiment, and may be three or other numbers, which are specifically set according to actual needs.
As shown in fig. 2, the tri-axis gyroscope with a lever of the present embodiment further includes a third detecting connection elastic member 93 capable of expanding and contracting in the Y-axis direction and deforming in the Z-axis direction, and both ends of the third detecting connection elastic member 93 are respectively connected to the detecting frame 41 and the mass blocks 51 distributed in the Y-axis direction. In this embodiment, the number of the third detecting connecting elastic members 93 is four, each mass block 51 distributed along the Y-axis direction corresponds to two third detecting connecting elastic members 93, and the two third detecting connecting elastic members 93 are located at two ends of the mass block 51 along the X-axis direction to ensure that the mass block 51 is elastically connected with the detecting frame 41.
When the angular velocity in the Z-axis direction is detected, the mass blocks 51 are subjected to coriolis force to generate motion, so that the detection frame 41 is driven to move by the third detection connecting elastic member 93, in addition, when the angular velocity in the X-axis direction is detected, the two mass blocks 51 distributed along the Y-axis generate out-of-plane rotation, the rotation of the mass blocks 51 is attenuated by the third detection connecting elastic member 93, decoupling of detection of the Z-axis detection of the angular velocity in the X-axis direction is realized, cross coupling is reduced, and accuracy of the Z-axis detection is improved.
As shown in fig. 1, the tri-axial gyroscope with lever of the present embodiment further includes a center coupling assembly 10, as shown in fig. 2, where the center coupling assembly 10 includes a first center elastic member 101, a center connecting block 102, a second center elastic member 103, and a center anchor 104, the number of the first center elastic member 101, the second center elastic member 103, and the center anchor 104 is four, each first center elastic member 101 is connected with one mass 51, four first center elastic members 101 and four second center elastic members 103 are connected with the center connecting block 102, the first center elastic members 101 and the second center elastic members 103 are alternately distributed, and each second center elastic member 103 is located between two first center elastic members 101 and connected with one center anchor 104. The first central elastic member 101 includes a central connection spring 1011 and a central connection straight beam 1012, the central connection spring 1011 can be deformed along the X-axis direction, the Y-axis direction and the Z-axis direction, one end of the central connection straight beam 1012 is connected with the central connection spring 1011, and the other end of the central connection straight beam 1012 is connected with the central connection block 102.
In the detection state, as shown in fig. 3, the driving electrode 32 drives the driving frame 31 to drive the two mass blocks 51 distributed along the Y axis direction to move along the Y axis direction, the presence of the coupling connection elastic member 52 enables the two mass blocks 51 distributed along the X axis direction to synchronously move along the X axis direction, at the same time, the four mass blocks 51 simultaneously move towards the direction close to the center coupling assembly 10 or away from the center coupling assembly 10, and simultaneously the lever 1 rotates with the position where the lever 1 is connected with the first straight beam 71 as a fulcrum, the rotation directions of the two levers 1 connected with the same mass block 51 are opposite, the movement direction of the driving detection frame 21 is opposite to the movement direction of the mass blocks 51, and the presence of the first detection connection elastic member 91, the second detection connection elastic member 92 and the third detection connection elastic member 93 enables the detection frame 41 to be substantially motionless.
When the angular velocity in the X-axis direction is detected, as shown in fig. 4, two masses 51 distributed in the Y-axis direction receive coriolis force in the Z-axis direction and the like in a large reverse direction, and the first direction detecting electrode obtains the angular velocity in the X-axis direction by detecting the change in capacitance, at this time, the detecting frame 41 is substantially stationary due to the presence of the third detecting connecting elastic member 93, and cross-axis coupling in which the detection in the Z-axis direction is detected in the X-axis direction is reduced.
When the angular velocity in the Y-axis direction is detected, as shown in fig. 5, two masses 51 distributed in the X-axis direction receive coriolis force in the Y-axis direction and the like in a large reverse direction, and the second direction detecting electrode obtains the angular velocity in the Y-axis direction by detecting the change in capacitance, at this time, the detecting frame 41 is substantially stationary due to the presence of the first detecting connecting elastic member 91, and cross coupling in which the detection in the Z-direction is detected in the Y-direction is reduced.
When detecting the angular velocity in the Z-axis direction, as shown in fig. 6, the four mass blocks 51 are subjected to coriolis force in the clockwise or counterclockwise rotation direction, and the first detection connection elastic member 91 and the third detection connection elastic member 93 enable the mass blocks 51 to drive the detection frame 41 to move in the clockwise or counterclockwise direction, the detection frame 41 and the mass blocks 51 move in the same direction, and at this time, the third direction detection electrode 42 can obtain the angular velocity in the Z-axis direction by detecting the change of the capacitance.
Note that the above is only a preferred embodiment of the present invention and the technical principle applied. It will be understood by those skilled in the art that the present invention is not limited to the particular embodiments described herein, but is capable of various obvious changes, rearrangements and substitutions as will now become apparent to those skilled in the art without departing from the scope of the invention. Therefore, while the invention has been described in connection with the above embodiments, the invention is not limited to the embodiments, but may be embodied in many other equivalent forms without departing from the spirit or scope of the invention, which is set forth in the following claims.
Claims (10)
1. The utility model provides a take triaxial gyroscope of lever, its characterized in that includes lever, drive detection frame, drive detection electrode, drive frame, drive electrode, detection frame, third direction detection electrode and four are orthogonal symmetric distribution's quality piece, drive electrode's expansion end sets up on the drive frame, drive electrode can drive two that distribute along the second direction the quality piece is followed the second direction motion to drive another two that distribute along the first direction the quality piece is followed the first direction motion, drive detection electrode's expansion end sets up on the drive detection frame, drive detection frame with along the first direction the quality piece that distributes all with the lever links to each other, drive detection frame's third force arm is less than the second arm of quality piece, the detection frame is located four the outside of quality piece and with every quality piece elastic connection, the detection frame with drive frame is connected, be equipped with on the detection frame the third direction expansion end of detecting the quality piece.
2. The leveraged tri-axis gyroscope of claim 1, wherein two of the masses distributed along the second direction and the substrate opposite thereto form a first direction detection electrode, and when detecting angular velocity along the first direction, two of the masses distributed along the second direction reciprocate synchronously and reversely along a third direction; the two mass blocks distributed along the first direction and the substrate opposite to the two mass blocks form a second direction detection electrode, and when the angular velocity along the second direction is detected, the two mass blocks distributed along the first direction synchronously and reversely reciprocate along the third direction; and when the angular velocity in the third direction is detected, the two mass blocks distributed along the first direction synchronously and reversely reciprocate along the second direction, the two mass blocks distributed along the second direction move along the first direction, and the detection frame rotates along the third direction.
3. The leveraged tri-axis gyroscope of claim 1, further comprising a first anchor point, a first straight beam, a second straight beam, and a first fixedly connected elastic member that is capable of telescoping along the second direction, the lever connected to the first anchor point through the first straight beam, the lever connected to the mass through the second straight beam, the lever connected to the drive detection frame through the first fixedly connected elastic member, the first straight beam and the second straight beam each extending along the first direction.
4. A leveraged tri-axis gyroscope according to claim 3, characterised in that the first fixedly connected elastic member is connected to one end of the lever, the second straight beam is connected to the other end of the lever, and the first straight beam is connected to a portion of the lever adjacent to the first fixedly connected elastic member.
5. The leveraged tri-axis gyroscope of claim 3, further comprising a second anchor point, a second fixedly connected elastic member, and a first detection connected elastic member, the second anchor point being located between the drive detection frame and the mass, the drive detection frame being connected to the second anchor point by the second fixedly connected elastic member, the drive detection frame being connected to the detection frame by the first detection connected elastic member, the second fixedly connected elastic member and the first detection connected elastic member being both stretchable in the first direction, the first detection connected elastic member being also deformable in the third direction.
6. The leveraged tri-axis gyroscope of claim 1, further comprising a third straight beam extending along the second direction and a second detection connection elastic member capable of telescoping along the second direction, wherein the drive frame is connected to the mass block through the third straight beam, and wherein the drive frame is connected to the detection frame through the second detection connection elastic member.
7. The leveraged tri-axis gyroscope of claim 6, further comprising a third detection connection elastic member capable of expanding and contracting in the second direction and deforming in the third direction, both ends of the third detection connection elastic member being connected to the detection frame and the mass blocks distributed in the second direction, respectively.
8. The leveraged tri-axis gyroscope of claim 1, further comprising a center coupling assembly, the center coupling assembly comprising a first center elastic member, a center connection block, a second center elastic member, and a center anchor, the number of the first center elastic member, the second center elastic member, and the center anchor being four, each of the first center elastic member being connected to one of the mass blocks, four of the first center elastic member and four of the second center elastic member being connected to the center connection block, the first center elastic member and the second center elastic member being alternately distributed, each of the second center elastic members being located between two of the first center elastic members and being connected to one of the center anchor.
9. The leveraged tri-axis gyroscope of claim 8, wherein the first central elastic member comprises a central connection spring and a central connection straight beam, the central connection spring being deformable in the first direction, the second direction, and the third direction, one end of the central connection straight beam being connected to the central connection spring, the other end of the central connection straight beam being connected to the central connection block.
10. The leveraged tri-axis gyroscope of claim 1, further comprising a coupling connection elastic member, adjacent two of the masses being connected by the coupling connection elastic member.
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| CN202311498799.7A CN117537795A (en) | 2023-11-13 | 2023-11-13 | Triaxial gyroscope with lever |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117739941A (en) * | 2024-02-21 | 2024-03-22 | 苏州亿波达微系统技术有限公司 | Single-axis MEMS gyroscope |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117739941A (en) * | 2024-02-21 | 2024-03-22 | 苏州亿波达微系统技术有限公司 | Single-axis MEMS gyroscope |
| CN117739941B (en) * | 2024-02-21 | 2024-05-14 | 苏州亿波达微系统技术有限公司 | Single-axis MEMS gyroscope |
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