CN1162965C - 压电振子 - Google Patents
压电振子 Download PDFInfo
- Publication number
- CN1162965C CN1162965C CNB99108411XA CN99108411A CN1162965C CN 1162965 C CN1162965 C CN 1162965C CN B99108411X A CNB99108411X A CN B99108411XA CN 99108411 A CN99108411 A CN 99108411A CN 1162965 C CN1162965 C CN 1162965C
- Authority
- CN
- China
- Prior art keywords
- oscillator
- width
- piezoelectric vibrator
- electrode
- vibration
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000000463 material Substances 0.000 claims abstract description 8
- 230000005284 excitation Effects 0.000 claims description 12
- 238000009434 installation Methods 0.000 abstract description 12
- 230000000694 effects Effects 0.000 abstract description 11
- 230000003746 surface roughness Effects 0.000 abstract description 6
- 238000006073 displacement reaction Methods 0.000 description 42
- 230000010355 oscillation Effects 0.000 description 16
- 208000037656 Respiratory Sounds Diseases 0.000 description 10
- 238000003754 machining Methods 0.000 description 10
- 230000003071 parasitic effect Effects 0.000 description 7
- WSMQKESQZFQMFW-UHFFFAOYSA-N 5-methyl-pyrazole-3-carboxylic acid Chemical compound CC1=CC(C(O)=O)=NN1 WSMQKESQZFQMFW-UHFFFAOYSA-N 0.000 description 6
- 238000000034 method Methods 0.000 description 4
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- 238000004519 manufacturing process Methods 0.000 description 3
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- 238000005530 etching Methods 0.000 description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- 239000010931 gold Substances 0.000 description 2
- GQYHUHYESMUTHG-UHFFFAOYSA-N lithium niobate Chemical compound [Li+].[O-][Nb](=O)=O GQYHUHYESMUTHG-UHFFFAOYSA-N 0.000 description 2
- 230000000644 propagated effect Effects 0.000 description 2
- 238000005422 blasting Methods 0.000 description 1
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- 238000001311 chemical methods and process Methods 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 238000006731 degradation reaction Methods 0.000 description 1
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- 238000005516 engineering process Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 230000005764 inhibitory process Effects 0.000 description 1
- 239000011241 protective layer Substances 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
- H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
- H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
- H03H9/19—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator consisting of quartz
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
- H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
- H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
- H03H9/177—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator of the energy-trap type
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
- H03H9/02—Details
- H03H9/02007—Details of bulk acoustic wave devices
- H03H9/02086—Means for compensation or elimination of undesirable effects
- H03H9/02133—Means for compensation or elimination of undesirable effects of stress
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
- H03H9/02—Details
- H03H9/05—Holders or supports
- H03H9/0595—Holders or supports the holder support and resonator being formed in one body
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
- H03H9/02—Details
- H03H9/125—Driving means, e.g. electrodes, coils
- H03H9/13—Driving means, e.g. electrodes, coils for networks consisting of piezoelectric or electrostrictive materials
- H03H9/132—Driving means, e.g. electrodes, coils for networks consisting of piezoelectric or electrostrictive materials characterized by a particular shape
Landscapes
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP160130/1998 | 1998-06-09 | ||
| JP16013098A JP3731348B2 (ja) | 1998-06-09 | 1998-06-09 | 圧電振動子 |
| JP160130/98 | 1998-06-09 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1238245A CN1238245A (zh) | 1999-12-15 |
| CN1162965C true CN1162965C (zh) | 2004-08-18 |
Family
ID=15708528
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB99108411XA Expired - Fee Related CN1162965C (zh) | 1998-06-09 | 1999-06-08 | 压电振子 |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US6191524B1 (ja) |
| JP (1) | JP3731348B2 (ja) |
| KR (1) | KR100393173B1 (ja) |
| CN (1) | CN1162965C (ja) |
| TW (1) | TW480808B (ja) |
Families Citing this family (39)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000252786A (ja) * | 1999-03-01 | 2000-09-14 | Matsushita Electric Ind Co Ltd | 圧電振動素子 |
| JP2000269774A (ja) * | 1999-03-18 | 2000-09-29 | Murata Mfg Co Ltd | 圧電振動素子及び圧電共振部品 |
| AU2001269528A1 (en) * | 2000-07-17 | 2002-01-30 | Nagaura, Kumiko | Piezoelectric device and acousto-electric transducer and method for manufacturing the same |
| JP4434537B2 (ja) * | 2001-08-27 | 2010-03-17 | パナソニック株式会社 | 圧電機能部品 |
| CN1245768C (zh) * | 2001-09-07 | 2006-03-15 | 松下电器产业株式会社 | 薄膜压电体元件及其制造方法并致动器 |
| JP2006078179A (ja) * | 2002-09-12 | 2006-03-23 | Furukawa Techno Research:Kk | マイクロ質量センサとその発振子の保持機構 |
| KR20040033098A (ko) * | 2002-10-11 | 2004-04-21 | 제원전자 주식회사 | 수정 진동자 |
| JP4133580B2 (ja) * | 2003-05-21 | 2008-08-13 | 独立行政法人科学技術振興機構 | 圧電材料の加工方法 |
| EP1489740A3 (en) * | 2003-06-18 | 2006-06-28 | Matsushita Electric Industrial Co., Ltd. | Electronic component and method for manufacturing the same |
| JP4012156B2 (ja) | 2004-02-02 | 2007-11-21 | 独立行政法人科学技術振興機構 | 圧電素子の製造方法 |
| JP4075893B2 (ja) | 2004-05-21 | 2008-04-16 | セイコーエプソン株式会社 | 水晶振動子の製造方法、その装置及び水晶振動子 |
| JP4558433B2 (ja) * | 2004-10-01 | 2010-10-06 | 日本電波工業株式会社 | 水晶振動子 |
| JP4997780B2 (ja) * | 2005-05-16 | 2012-08-08 | セイコーエプソン株式会社 | 圧電振動片の製造方法 |
| JP4305542B2 (ja) | 2006-08-09 | 2009-07-29 | エプソントヨコム株式会社 | Ａｔカット水晶振動片及びその製造方法 |
| JP5028061B2 (ja) * | 2006-10-05 | 2012-09-19 | 日本電波工業株式会社 | 水晶振動子 |
| JP5035750B2 (ja) * | 2007-11-22 | 2012-09-26 | セイコーエプソン株式会社 | 水晶振動片、水晶振動子、及び水晶発振器 |
| US8242664B2 (en) * | 2008-12-26 | 2012-08-14 | Nihon Dempa Kogyo Co., Ltd. | Elastic wave device and electronic component |
| JP5625432B2 (ja) * | 2010-03-26 | 2014-11-19 | セイコーエプソン株式会社 | 圧電振動素子、及び圧電振動子 |
| JP5589167B2 (ja) | 2010-11-19 | 2014-09-17 | セイコーエプソン株式会社 | 圧電振動片および圧電振動子 |
| CN202535316U (zh) * | 2011-03-09 | 2012-11-14 | 精工爱普生株式会社 | 振动元件、振子、振荡器以及电子设备 |
| JP5708089B2 (ja) * | 2011-03-18 | 2015-04-30 | セイコーエプソン株式会社 | 圧電振動素子、圧電振動子、圧電発振器及び電子デバイス |
| JP5943187B2 (ja) | 2012-03-21 | 2016-06-29 | セイコーエプソン株式会社 | 振動素子、振動子、電子デバイス、および電子機器 |
| JP6311231B2 (ja) * | 2013-07-25 | 2018-04-18 | セイコーエプソン株式会社 | 振動素子、振動子、発振器、電子機器および移動体 |
| JP5871144B2 (ja) * | 2014-03-19 | 2016-03-01 | セイコーエプソン株式会社 | 圧電振動子 |
| JP6265012B2 (ja) * | 2014-04-01 | 2018-01-24 | Tdk株式会社 | 圧電素子 |
| JP6390836B2 (ja) | 2014-07-31 | 2018-09-19 | セイコーエプソン株式会社 | 振動片、振動子、振動デバイス、発振器、電子機器、および移動体 |
| KR20160032600A (ko) | 2014-09-16 | 2016-03-24 | 삼성전기주식회사 | 압전 진동편, 그 제조방법 및 압전 진동자 |
| CN106160695B (zh) * | 2014-09-16 | 2019-07-26 | 三星电机株式会社 | 压电振动构件、制造压电振动构件的方法和压电振动器 |
| US9503045B2 (en) | 2015-01-19 | 2016-11-22 | Seiko Epson Corporation | Resonator element, resonator, oscillator, electronic apparatus, and moving object |
| JP6500915B2 (ja) * | 2015-01-29 | 2019-04-17 | 株式会社大真空 | 水晶振動板、及び水晶振動デバイス |
| JP6441761B2 (ja) | 2015-07-29 | 2018-12-19 | 太陽誘電株式会社 | 圧電薄膜共振器及びフィルタ |
| JP6613482B2 (ja) * | 2015-09-03 | 2019-12-04 | 日本電波工業株式会社 | 水晶振動子 |
| JP2017060055A (ja) * | 2015-09-17 | 2017-03-23 | エスアイアイ・クリスタルテクノロジー株式会社 | 圧電振動片及び圧電振動子 |
| JP2017139682A (ja) * | 2016-02-05 | 2017-08-10 | セイコーエプソン株式会社 | 振動片、振動片の製造方法、発振器、電子機器、移動体、および基地局 |
| JP6469601B2 (ja) * | 2016-02-05 | 2019-02-13 | 太陽誘電株式会社 | 圧電薄膜共振器、フィルタおよびデュプレクサ |
| JP6910134B2 (ja) * | 2016-11-30 | 2021-07-28 | 京セラ株式会社 | 圧電振動素子及び圧電振動デバイス |
| CN110622416B (zh) * | 2017-05-15 | 2023-01-17 | 株式会社村田制作所 | 水晶振动元件和水晶振子以及它们的制造方法 |
| JP6797764B2 (ja) * | 2017-08-09 | 2020-12-09 | 日本電波工業株式会社 | 水晶振動子およびその製造方法 |
| JP7370190B2 (ja) * | 2019-08-14 | 2023-10-27 | 太陽誘電株式会社 | パネル及び電子機器 |
Family Cites Families (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5217784A (en) * | 1974-11-20 | 1977-02-09 | Seiko Instr & Electronics Ltd | Support structure for slip thickness vibrator |
| FR2338607A1 (fr) * | 1976-01-16 | 1977-08-12 | France Etat | Resonateur a quartz a electrodes non adherentes au cristal |
| FR2431189A1 (fr) * | 1978-07-10 | 1980-02-08 | Quantel Sa | Procede et dispositif de polarisation de ceramiques piezo-electriques |
| FR2462055A1 (fr) * | 1979-07-18 | 1981-02-06 | France Etat | Oscillateur haute frequence autothermostate |
| JPS58190115A (ja) | 1982-04-28 | 1983-11-07 | Fujitsu Ltd | 圧電振動子 |
| US5198716A (en) * | 1991-12-09 | 1993-03-30 | The United States Of America As Represented By The United States Department Of Energy | Micro-machined resonator |
| JPH05259799A (ja) | 1992-03-09 | 1993-10-08 | Citizen Watch Co Ltd | 水晶振動子 |
| JPH06291587A (ja) * | 1992-07-08 | 1994-10-18 | Matsushita Electric Ind Co Ltd | 圧電振動子 |
| GB2281159B (en) * | 1993-08-17 | 1997-10-01 | Murata Manufacturing Co | Ladder-type filter |
| US5648746A (en) * | 1993-08-17 | 1997-07-15 | Murata Manufacturing Co., Ltd. | Stacked diezoelectric resonator ladder-type filter with at least one width expansion mode resonator |
-
1998
- 1998-06-09 JP JP16013098A patent/JP3731348B2/ja not_active Expired - Fee Related
-
1999
- 1999-05-27 TW TW088108778A patent/TW480808B/zh not_active IP Right Cessation
- 1999-06-08 CN CNB99108411XA patent/CN1162965C/zh not_active Expired - Fee Related
- 1999-06-09 KR KR10-1999-0021430A patent/KR100393173B1/ko not_active IP Right Cessation
- 1999-06-09 US US09/328,390 patent/US6191524B1/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| KR20000006051A (ko) | 2000-01-25 |
| JPH11355094A (ja) | 1999-12-24 |
| KR100393173B1 (ko) | 2003-07-31 |
| JP3731348B2 (ja) | 2006-01-05 |
| US6191524B1 (en) | 2001-02-20 |
| TW480808B (en) | 2002-03-21 |
| CN1238245A (zh) | 1999-12-15 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C17 | Cessation of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20040818 |