CN116053934B - Laser fast and slow axis collimation method and device - Google Patents

Abstract

The invention provides a laser fast-slow axis collimation method and device, which relate to the technical field of lasers. Only one fast-axis collimator mirror unit is collimated, and then according to the fast-axis collimator mirror unit obtained in the collimation process, The angle and position of the other fast-axis collimator units on the laser are collimated and assembled in batches, and centralized sampling and inspection are performed. For the fast-axis collimator units that do not meet the requirements occasionally during operation, individual adjustments are made. Instead of repeating the collimation operation for each laser, the assembly efficiency can be greatly improved.

Description

Laser fast and slow axis collimation method and device

technical field

The invention relates to the technical field of lasers, in particular to a method and device for collimating fast and slow axes of a laser.

Background technique

Semiconductor lasers have the advantages of small size, light weight, long life, high electro-optical conversion efficiency and high reliability. They are widely used in industrial, medical and material processing fields, and have become the most promising field in the optoelectronic industry. Due to the continuous increase in the power requirements of lasers in practical applications, from the perspective of packaging, in order to obtain high power output, most of the current methods are to stack multiple laser chips in an array to achieve several orders of magnitude increase in the power of semiconductor lasers.

Lasers have higher and higher requirements for the collimation effect and energy coupling efficiency of the vertical array beam. The pointing accuracy of the collimated beam between the lasers in the array directly affects the laser spot size, the uniformity of light intensity density and the transmission direction of the overall output beam. Therefore, the laser The optical characteristic parameters such as laser fast/slow axis collimation beam pointing accuracy have become the common concern of laser array packaging workers and laser designers.

At present, in the laser manufacturing process, it is necessary to individually debug each laser one by one, so as to realize the assembly of the fast-axis collimator unit and the slow-axis collimator, which wastes time and reduces debugging efficiency.

Contents of the invention

The object of the present invention is to provide a laser fast-slow axis alignment method and device to alleviate the technical problems of high time cost and low production efficiency caused by separate debugging of each laser in the existing laser manufacturing process.

In the first aspect, a laser fast-slow axis collimation method provided by an embodiment of the present invention includes:

Step S11. Provide a laser assembly, spot analyzer and slow-axis collimating mirror parts, wherein the laser assembly includes n lasers arranged in sequence along the y-axis, n is an integer greater than 2; laser assembly, slow-axis collimating mirror parts and the spot analyzer are arranged in sequence along the z-axis direction, and the light emitted by the laser assembly is collimated along the z-axis through the slow-axis collimating mirror part and then irradiates the spot analyzer; the y-axis is perpendicular to the z-axis;

Step S12. Place a fast-axis collimating mirror unit between a laser and the slow-axis collimating mirror part, and adjust the angle and position of the fast-axis collimating mirror unit so that the light emitted by the laser passes through the fast-axis collimation After the mirror unit is collimated, the first bright line segment appears on the spot analyzer at last, and the position of the first bright line segment is consistent with the reference line displayed in the spot analyzer on the y-axis; then the fast axis collimating mirror unit is relatively Laser fixation;

Step S13. The spot analyzer automatically generates a reference line corresponding to at least one of the other lasers according to the position of the reference line and the distance between two adjacent lasers;

Step S14. Correspondingly fixing a fast-axis collimating mirror unit on each of the remaining lasers according to the angle and position of the fast-axis collimating mirror unit in step S12;

Step S15. Power on all the lasers, use the spot analyzer to receive the light emitted by all the lasers at the same time, and detect whether the first bright line segment formed by each laser on the spot analyzer is consistent with the position of the corresponding reference line on the y-axis; Adjust the angle and position of the fast-axis collimating mirror unit on the laser whose position of the first bright line segment and its corresponding reference line on the y-axis are inconsistent, so that the first bright line segment formed by it and its corresponding reference line are on the y-axis The location is consistent.

Further, steps performed after step S15 are included:

After completing the collimation assembly of the fast-axis collimator mirror units of all lasers, the collimation assembly of the slow-axis collimator mirror is completed next;

The steps of completing the collimating assembly of the slow-axis collimating mirror include:

Remove the slow axis collimating mirror part;

Place a slow-axis collimator unit between a laser and the spot analyzer, and adjust the angle and position of the slow-axis collimator unit so that the light emitted by the laser passes through the fast-axis collimator unit and the slow-axis collimator After the straight mirror unit is collimated, the second bright line segment appears on the spot analyzer, and the midpoint of the second bright line segment coincides with the reference centerline displayed in the spot analyzer; the reference centerline extends along the y-axis direction, and then the The slow axis collimator unit is fixed relative to the laser;

By analogy, the collimation assembly of the slow-axis collimating mirror units of all remaining lasers is completed.

Further, the step of completing the collimating assembly of the slow-axis collimating mirror includes:

Step S21. Remove the slow-axis collimator part, place a slow-axis collimator unit between a laser and the spot analyzer, and adjust the angle and position of the slow-axis collimator unit so that the light emitted by the laser After being collimated by the fast-axis collimating mirror unit and the slow-axis collimating mirror unit, a second bright line segment appears on the spot analyzer, and the midpoint of the second bright line segment coincides with the reference midline displayed in the spot analyzer; The reference midline extends along the y-axis direction, and then the slow-axis collimator unit is fixed relative to the laser;

Step S22. Correspondingly fixing a slow-axis collimator mirror unit on each of the remaining lasers according to the angle and position of the slow-axis collimator mirror unit in step S21;

Step S23. Power on all the lasers, use the spot analyzer to simultaneously receive the light emitted by all the lasers, and detect whether the midpoint of the second bright line segment formed by each laser on the spot analyzer coincides with the reference center line;

Adjust the angle and position of the slow-axis collimating mirror unit on the laser whose midpoint of the second bright line segment does not coincide with the reference center line, so that the second bright line segment formed by it coincides with the reference center line; then the slow-axis collimator The unit is fixed relative to the laser.

Further, in the step S15, the angle and position of the fast-axis collimator unit on the laser whose positions on the y-axis of the first bright line segment and its corresponding reference line are inconsistent are adjusted, so that the first bright line segment formed The specific steps for the position of the bright line segment and its corresponding reference line on the y-axis are as follows:

For the laser whose position on the y-axis does not correspond to the first bright line segment and the reference line, remove the fast-axis collimator unit on the laser, readjust the angle and position of the fast-axis collimator unit, and make the laser emit After the light passes through the readjusted fast-axis collimating mirror unit, the first bright line segment that appears on the spot analyzer is consistent with the position on the y-axis of the corresponding reference line displayed in the spot analyzer; then the fast-axis collimator The straight mirror unit is fixed relative to the laser.

Further, a supporting plate is fixed on the heat sink of the laser assembly, and both the fast axis collimating mirror unit and the slow axis collimating mirror unit are fixed to the supporting plate.

Further, one end of the pallet is provided with a first dispensing groove, and the glue in the first dispensing groove is used to connect the pallet and the laser; the other end of the pallet is provided with a second dispensing groove, The glue in the second glue dispensing tank is used to connect the supporting plate and the slow axis collimating mirror unit.

Further, in the step S12, the step of adjusting the angle and position of the fast axis collimating mirror unit is specifically:

Observe the fast-axis collimating mirror unit in the direction of the x-axis, and rotate the fast-axis collimating mirror unit with the x-axis as the axis, so that the light incident surface of the fast-axis collimating mirror unit is parallel to the laser cavity surface;

Then, the fast-axis collimator unit is rotated with the y-axis as the axis; the fast-axis collimator unit is rotated with the z-axis; the x-axis, y-axis and z-axis are perpendicular to each other.

Further, the steps of adjusting and adjusting the angle and position of the slow axis collimating mirror unit are as follows:

Observe the slow-axis collimating mirror unit in the direction of the x-axis, and rotate the slow-axis collimating mirror unit with the x-axis as the axis, so that the light incident surface of the slow-axis collimating mirror unit is parallel to the laser cavity surface;

Take the y-axis as the axis to rotate the slow-axis collimator unit; take the z-axis as the axis to rotate the slow-axis collimator unit;

Move the slow axis collimating mirror unit in the x-axis direction.

In the second aspect, an embodiment of the present invention provides a laser fast-slow axis collimation device, which is used to implement the above-mentioned laser fast-slow axis collimation method.

Further, the laser collimation device includes a powered platform, a spot analyzer, a six-axis movement mechanism, a first clamp, a second clamp and a dispensing device;

The power-on platform is used to fix the laser components and can power up each laser;

The spot analyzer is used to receive the first bright line segment and the second bright line segment and display the reference line and the reference center line;

The six-axis moving mechanism is optionally connected to the first clamp or the second clamp, the first clamp is used to clamp the fast axis collimator unit, and the second clamp is used to clamp the slow axis collimator unit ;

The glue dispensing device is used for applying glue.

The principle and advantages of the laser collimation method provided by the embodiment of the present invention are as follows: firstly, the collimation assembly of the fast-axis collimator mirror unit is carried out on a laser, so that the fast-axis collimator mirror unit relative to the laser can be obtained during the collimation process. The angle and position; then according to the above angle and position, each laser is collimated and assembled with the fast axis collimating mirror unit; then, the collimation detection of each laser is carried out at the same time by using the multiple reference lines automatically formed on the spot analyzer , reinstall the fast-axis collimator mirror units for the lasers that have not passed the inspection, so that the collimation assembly of the fast-axis collimator mirror units of all lasers can be completed. Through the above method, only one fast-axis collimator unit is collimated, and then according to the angle and position of the fast-axis collimator unit obtained in the collimation process, the collimation of other fast-axis collimator units on the laser is completed in batches Assembling, and centralized sampling inspection, and for the occasional fast-axis collimator unit that does not meet the requirements during operation, it can be adjusted separately without repeating the collimation operation for each laser, which can greatly improve Improve assembly efficiency.

Description of drawings

In order to more clearly illustrate the specific implementation of the present invention or the technical solutions in the prior art, the following will briefly introduce the accompanying drawings that need to be used in the specific implementation or description of the prior art. Obviously, the accompanying drawings in the following description The drawings show some implementations of the present invention, and those skilled in the art can obtain other drawings based on these drawings without any creative effort.

FIG. 1 is a schematic diagram of Step S11 of the laser fast-slow axis alignment method provided in Embodiment 1 of the present invention;

FIG. 2 is a schematic diagram of Step S12 of the laser fast-slow axis alignment method provided in Embodiment 1 of the present invention;

FIG. 3 is a comparison diagram showing only the first bright line segment and only the reference line on the same screen in step S12 of the laser fast-slow axis alignment method provided by Embodiment 1 of the present invention;

FIG. 4 is a schematic diagram of the fast-axis collimator unit fixed to the supporting plate in step S12 of the laser fast-slow axis collimation method provided in Embodiment 1 of the present invention;

FIG. 5 is a schematic diagram showing only the first bright line segment and only the reference line on the same screen in step S15 of the laser fast-slow axis alignment method provided by Embodiment 1 of the present invention;

FIG. 6 is a schematic diagram of Step S21 of the laser fast-slow axis alignment method provided in Embodiment 1 of the present invention;

FIG. 7 is a schematic diagram of the slow-axis collimator unit fixed to the supporting plate in step S21 of the laser fast-slow axis collimation method provided by Embodiment 1 of the present invention;

8 is a schematic diagram of a slow-axis collimating mirror unit in the laser fast-slow axis collimation method provided in Embodiment 1 of the present invention;

FIG. 9 is a schematic diagram of the second bright line segment and the reference midline displayed on the screen in step S23 of the laser fast-slow axis alignment method provided by Embodiment 1 of the present invention.

Icons: 100-laser component; 110-heat sink; 200-powered platform; 300-slow axis collimator; 400-spot analyzer; 410-screen; 500-electric platform;

610-baseline; 620-baseline midline; 630-first bright line segment; 640-second bright line segment;

700-pallet; 710-the first dispensing tank; 720-the second dispensing tank;

810-fast axis collimating mirror unit; 820-slow axis collimating mirror unit.

Detailed ways

The technical solutions of the present invention will be clearly and completely described below in conjunction with the embodiments. Obviously, the described embodiments are part of the embodiments of the present invention, but not all of them. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.

Example 1

The laser fast-slow axis collimation method provided by the embodiment of the present invention includes:

Step S11. Provide a laser assembly 100, a spot analyzer 400 and a slow axis collimating mirror part 300, wherein the laser assembly 100 includes n lasers arranged in sequence along the y-axis, n is an integer greater than 2, the laser assembly 100, the slow axis The axis collimating mirror component 300 and the spot analyzer 400 are arranged in sequence along the z-axis; the y-axis is perpendicular to the z-axis.

As shown in Figure 1, the number of lasers in the laser assembly 100 can be multiple, the slow-axis collimating mirror part 300 can be fixed by a bracket, the slow-axis collimating mirror part 300 can cover all the lasers, and the light emitted by the laser is along the z-axis After being collimated by the slow axis collimating mirror part 300 , the beam is irradiated onto the spot analyzer 400 . Any two adjacent lasers are parallel, and the distance between them is equal.

Step S12. Place a fast-axis collimating mirror unit 810 between a laser and the slow-axis collimating mirror part 300, and adjust the angle and position of the fast-axis collimating mirror unit 810 so that the light emitted by the laser passes through the fast After the axis collimating mirror unit 810 is collimated, it passes through the slow axis collimating mirror part 300, and finally the first bright line segment 630 appears on the spot analyzer 400, and the first bright line segment 630 is parallel to the horizontal plane (that is, parallel to the x-axis) , and the first bright line segment 630 is consistent with the position on the y-axis of the reference line 610 displayed in the spot analyzer 400, or the first bright line segment 630 can be directly set as the reference line 610; then the fast axis collimator unit can be 810 is glued and fixed with the supporting plate 700 on the laser.

As shown in Figures 2-4, a first fixture can be added to the movable end of the six-axis moving mechanism, and then a fast-axis collimating mirror unit 810 can be clamped by the first fixture, and placed on a laser and slow-axis collimator. Among the straight mirror components 300, the six-axis moving mechanism can drive the fast-axis collimating mirror unit 810 to move in the x-axis, y-axis and z-axis directions, and can rotate around the x-axis, y-axis and z-axis respectively. Wherein, the angle and position are relative to the laser to be installed, and the angle refers to the rotation angle of the fast-axis collimating mirror unit 810 around the x-axis, y-axis and z-axis, and the position refers to the fast-axis collimating mirror The coordinates of the cell 810 on the x-axis, y-axis and z-axis.

When adjusting the angle and position of the fast-axis collimating mirror unit 810, the fast-axis collimating mirror unit 810 can be observed with a CCD camera in the direction of the x-axis, and the fast-axis collimating mirror unit 810 can be rotated with the x-axis as the axis to make the fast-axis collimating mirror unit 810 The light incident surface of the axis collimating mirror unit 810 is parallel to the laser exit cavity surface. Then, take the y-axis as the axis, rotate the fast-axis collimating mirror unit 810, and take the z-axis as the axis, rotate the fast-axis collimating mirror unit 810, and finally, make the light emitted by the laser collimate through the fast-axis collimating mirror unit 810 Finally, the first bright line segment 630 can appear on the spot analyzer 400, the first bright line segment 630 is parallel to the horizontal plane (that is, parallel to the X axis), and the first bright line segment 630 is consistent with the reference line displayed in the spot analyzer 400 610 is in the same position on the y-axis; then the fast-axis collimating mirror unit 810 is glued and solidified with the laser.

In this step, usually the uppermost laser in the laser assembly 100 is selected as the first laser equipped with the fast-axis collimating mirror unit 810 . In this step, there is only one reference line 610 on the spot analyzer 400 . The first bright line segment 630 can be directly set as the first reference line 610 , or a straight line parallel to the horizontal plane (that is, parallel to the X axis) can be pre-generated on the top of the spot analyzer 400 as the first reference line 610 .

Step S13. The spot analyzer 400 automatically generates a reference line 610 corresponding to at least one of the other lasers according to the position of the reference line 610 and the distance between two adjacent lasers, and the number of reference lines 610 can be the same as the number of lasers , and one-to-one correspondence and parallel to each other, the number of reference lines 610 may also be less than the number of lasers, and the remaining lasers are collimated by other means. The distance between two adjacent reference lines 610 on the y-axis is equal to the distance between two adjacent lasers in the direction of the y-axis.

Since the spacing between any two adjacent lasers in the general laser assembly 100 is equal, when a reference line 610 is positioned, the reference lines 610 corresponding to other lasers can be obtained. At this time, in spot analysis On the screen 410 of the instrument 400, a plurality of reference lines 610 will be formed at equal intervals along the y-axis direction, and each reference line 610 corresponds to a laser facing to its left.

Step S14. Correspondingly fixing a fast-axis collimator mirror unit 810 on each of the remaining lasers according to the angle and position of the fast-axis collimator mirror unit 810 in step S12.

In step S12, during the process of collimating the fast-axis collimating mirror unit 810, the movement of the six-axis moving mechanism is completely recorded, according to the previous motion track and combined with the new fast-axis collimating mirror unit 810 to be installed For the position of the laser, the fast axis collimating mirror unit 810 can be fixed to the new laser according to the same angle and position. Or directly record the position coordinates of the first fast-axis collimating mirror unit 810 installed in the six-axis moving mechanism, and fix the remaining fast-axis collimating mirror units 810 according to the position coordinates.

Step S15. Power up all the lasers, use the spot analyzer 400 to simultaneously receive the light emitted by all the lasers, and detect the first bright line segment 630 formed by each laser on the spot analyzer 400 and its corresponding reference line 610 on the y-axis Whether the position is consistent; adjust the angle and position of the fast axis collimator mirror unit 810 on the laser whose position on the y-axis of the first bright line segment 630 and its corresponding reference line 610 are inconsistent, so that the first bright line segment 630 formed by it is consistent with The positions of the corresponding reference lines 610 on the y-axis are consistent.

As shown in Figure 5, after all the lasers have completed the assembly of the fast axis collimating mirror unit 810, all the lasers can be powered on at the same time, so as to obtain all the first bright line segments 630 on the spot analyzer 400, for comparison Whether the positions of all the first bright line segments 630 and their corresponding reference lines 610 on the y-axis are consistent. When all the lasers pass the inspection, the assembly of the fast axis collimating mirror unit 810 is completed. When one or several lasers fail the inspection, the unqualified fast-axis collimator unit 810 can be removed by using the removal mechanism. Then use the six-axis moving mechanism to drive the removed fast-axis collimator unit 810 to perform the collimation process as in step 12, so that the first bright line segment 630 generated by the laser coincides with the corresponding reference line 610 on the y-axis. It should be noted that, in order to prevent the first bright line segment 630 from overlapping with the reference line 610, the difference cannot be shown normally. Therefore, in Fig. 3 and Fig. 5, two patterns are shown respectively, and after the two patterns are completely overlapped, it is A picture normally displayed on the speckle analyzer 400 .

After completing the collimation assembly of the fast-axis collimator mirror units 810 of all lasers, the collimation assembly of the slow-axis collimator mirror is completed next.

For the collimation assembly of the slow-axis collimator mirror unit 820, this solution provides a solution that can be implemented, specifically:

Including: step S21. removing the slow-axis collimating mirror part 300, placing a slow-axis collimating mirror unit 820 between a laser and the spot analyzer 400, and adjusting the angle and position of the slow-axis collimating mirror unit 820, After the light emitted by the laser is collimated by the fast-axis collimating mirror unit 810 and the slow-axis collimating mirror unit 820, a second bright line segment 640 appears on the spot analyzer 400, and the midpoint of the second bright line segment 640 and the light spot The reference center line 620 displayed in the analyzer 400 coincides; the reference center line 620 extends along the y-axis direction, and then the slow-axis collimating mirror unit 820 and the laser are dispensed and cured.

As shown in FIGS. 6-8 , in this solution, after the assembly of all the fast-axis collimating mirror units 810 is completed, the slow-axis collimating mirror unit 820 is then assembled. At this point, the first fixture on the six-axis moving mechanism can be removed and replaced with the second fixture. Similar to the assembly principle of the fast-axis collimator unit 810, a slow-axis collimator unit 820 is placed between a laser and the spot analyzer 400, and the angle and position of the slow-axis collimator unit 820 are adjusted, for example , observe the slow-axis collimator unit 820 in the x-axis direction, take the x-axis as the axis, and rotate the slow-axis collimator unit 820 so that the light incident surface of the slow-axis collimator unit 820 is parallel to the laser exit cavity surface; Then take the y-axis as the axis to rotate the slow-axis collimator unit 820, and take the z-axis as the axis to rotate the slow-axis collimator unit 820; move the slow-axis collimator unit 820 in the direction of the x-axis, so that the laser emits After the light is collimated by the fast-axis collimating mirror unit 810 and the slow-axis collimating mirror unit 820, a second bright line segment 640 appears on the spot analyzer 400, and the midpoint of the second bright line segment 640 is in line with the spot inside the spot analyzer 400. The displayed reference centerline 620 coincides.

Step S22. Fixing a slow-axis collimator mirror unit 820 on each of the remaining lasers according to the angle and position of the slow-axis collimator mirror unit 820 in step S21.

According to the angle and position of the slow-axis collimating mirror unit 820 obtained in step S21 , the slow-axis collimating mirror units 820 of other remaining lasers are assembled. Batch processing is faster and takes less time.

Step S23. Power up all the lasers, use the spot analyzer 400 to receive the light emitted by all the lasers simultaneously, and detect whether the midpoint of the second bright line segment 640 formed by each laser on the spot analyzer 400 coincides with the reference center line 620; adjust The midpoint of the second bright line segment 640 is not coincident with the angle and position of the slow axis collimating mirror unit 820 on the laser of the reference center line 620, so that the second bright line segment 640 formed by it coincides with the reference center line 620; The axis collimating mirror unit 820 is fixed to the supporting plate 700 on the laser.

As shown in Figure 9, after all the lasers have completed the assembly of the slow-axis collimating mirror unit 820, all the lasers can be powered on at the same time, thereby obtaining all the second bright line segments 640 on the spot analyzer 400, and detecting Whether the midpoint of the second bright line segment 640 formed by each laser on the spot analyzer 400 coincides with the reference midline 620 . When all the lasers pass the inspection, the assembly of the slow axis collimating mirror unit 820 is completed. When one or several lasers fail the inspection, the unqualified slow-axis collimator unit 820 can be removed by using the removal mechanism. Then use the six-axis moving mechanism to drive the new slow-axis collimating mirror unit 820 to perform the collimation process as in step S21, so that the midpoint of the second bright line segment 640 generated by the laser coincides with the reference midline 620.

The fast-axis collimating mirror unit 810 and the slow-axis collimating mirror unit 820 can be fixed with each laser through the supporting plate 700 .

The supporting plate 700 is connected to the heat sink 110 of the laser, the fast axis collimating mirror unit 810 is correspondingly fixed on the upper surface of the supporting plate 700 , and the slow axis collimating mirror unit 820 is correspondingly fixed on the end surface of the supporting plate 700 . Using the support plate 700 to carry the fast axis collimator unit 810 and the slow axis collimator unit 820 can prevent the glue from polluting the laser.

Specifically, one end of the pallet 700 is provided with a first dispensing groove 710, and the glue in the first dispensing groove 710 is used to connect the pallet 700 and the laser; the other end of the pallet 700 is provided with a second Two glue slots 720 , the glue in the second glue slot 720 is used to connect the support plate 700 and the slow axis collimator unit 820 . The arrangement of the first glue dispensing groove 710 and the second glue dispensing groove 720 can prevent the glue from overflowing when the fast axis collimating mirror unit 810 or the slow axis collimating mirror unit 820 is in contact with the supporting plate 700 .

In need of special instructions, the first glue is used for dispensing and curing in the steps S14 and S22, and the second glue is used for dispensing and curing in the steps S12 and S21, and the viscosity of the second glue is higher than that of the first glue. According to the weight of the fast-axis collimating mirror unit 810 and the slow-axis collimating mirror unit 820, select the first glue and the second glue with a suitable viscosity, because in step S12 and step S21, a complete collimation process is used to obtain the fast-axis collimator. The angle and position of the collimating mirror unit 810 and the slow axis collimating mirror unit 820, therefore, the cured fast axis collimating mirror unit 810 and the slow axis collimating mirror unit 820 will not be dismantled substantially, and in step S14 and step S7 The fast-axis collimating mirror unit 810 and the slow-axis collimating mirror unit 820 cured by glue dispensing may encounter the situation of dismantling again. Therefore, the first glue with a relatively low viscosity is used. , the fast-axis collimator unit 810 and the slow-axis collimator unit 820 can be removed from the support plate 700 with a relatively small external force.

The method for aligning the fast and slow axes of the laser further includes: Step S24. Applying the second glue on the junction of the fast axis collimating mirror unit 810 and the supporting plate 700 for secondary fixing; applying the second glue on the joint of the slow axis collimation The connection between the mirror unit 820 and the support plate 700 is fixed for the second time.

When the fast-axis collimating mirror unit 810 and the slow-axis collimating mirror unit 820 on all lasers are assembled and passed the inspection, each fast-axis collimating mirror unit 810 and each fast-axis collimating mirror unit 810 and The slow-axis collimator unit 820 is painted a second time to improve the connection strength between the fast-axis collimator unit 810 and the slow-axis collimator unit 820 and the support plate 700 respectively.

Example 2

For the collimation assembly of the slow-axis collimator mirror unit 820, this solution provides another solution that can be implemented, specifically:

Including removing the slow axis collimating mirror part 300 . Place a slow-axis collimating mirror unit 820 between a laser and the spot analyzer 400, and adjust the angle and position of the slow-axis collimating mirror unit 820 so that the light emitted by the laser passes through the fast-axis collimating mirror unit 810 After being collimated with the slow axis collimating mirror unit 820, a second bright line segment 640 appears on the spot analyzer 400, and the midpoint of the second bright line segment 640 coincides with the reference midline 620 displayed in the spot analyzer 400; The centerline 620 extends along the y-axis direction, and then the slow-axis collimating mirror unit 820 is fixed relative to the laser. By analogy, the collimation assembly of the slow-axis collimating mirror units 820 of all remaining lasers is completed.

In this solution, after the assembly of all the fast axis collimating mirror units 810 is completed, then the slow axis collimating mirror unit 820 is assembled. At this point, the first fixture on the six-axis moving mechanism can be removed and replaced with the second fixture. Similar to the assembly principle of the fast-axis collimator unit 810, a slow-axis collimator unit 820 is placed between a laser and the spot analyzer 400, and the angle and position of the slow-axis collimator unit 820 are adjusted, for example , observe the slow-axis collimator unit 820 in the x-axis direction, take the x-axis as the axis, and rotate the slow-axis collimator unit 820 so that the light incident surface of the slow-axis collimator unit 820 is parallel to the laser exit cavity surface; Then take the y-axis as the axis to rotate the slow-axis collimator unit 820, and take the z-axis as the axis to rotate the slow-axis collimator unit 820; move the slow-axis collimator unit 820 in the direction of the x-axis, so that the laser emits After the light is collimated by the fast-axis collimating mirror unit 810 and the slow-axis collimating mirror unit 820, a second bright line segment 640 appears on the spot analyzer 400, and the midpoint of the second bright line segment 640 is in line with the spot inside the spot analyzer 400. The displayed reference centerline 620 coincides. Then the above process is repeated to complete the collimation assembly of the slow axis collimator mirror units 820 of all lasers one by one. The collimation assembly of the slow-axis collimator unit 820 has a high pass rate, but takes a lot of time.

The laser fast-slow axis collimation device provided by the embodiment of the present invention is used to implement the above-mentioned laser fast-slow axis collimation method.

Specifically, the laser fast and slow axis collimation device may include a powered platform 200, a spot analyzer 400, a six-axis moving mechanism, a first clamp, a second clamp, a dispensing device and a removal mechanism.

The power-on platform 200 is used to fix the laser assembly 100 and can power on each laser. The lasers on the laser assembly 100 on the power-on platform 200 are vertically arranged sequentially with the same spacing.

The spot analyzer 400 is used to receive the first bright line segment 630 and the second bright line segment 640. The spot analyzer 400 can be placed on the motorized platform 500 moving along the z-axis direction to facilitate adjustment of the position of the spot analyzer 400 to the position of the laser. focus. The spot analyzer 400 has a display function, can display the reference line 610 and the reference center line 620 , and can display the reference line 610 , the reference center line 620 , the first bright line segment 630 and the second bright line segment 640 on the screen 410 .

The six-axis moving mechanism is optionally connected to the first fixture or the second fixture, and the six-axis moving mechanism is detachably connected to the first fixture and the second fixture respectively, and clamps the fast-axis collimator unit 810 or the slow-axis collimator unit 810 as required. The collimating mirror unit 820 is replaced. The first clamp is used for clamping the fast axis collimating mirror unit 810 , and the second clamp is used for clamping the slow axis collimating mirror unit 820 .

For the solution in Embodiment 1, the glue dispensing device may include a first glue dispensing mechanism and a second glue dispensing mechanism, and the first glue dispensing mechanism is used for applying the first glue. The second dispensing mechanism is used for applying the second glue.

For the solution in Embodiment 1, the removal mechanism is used to remove the fast-axis collimator unit 810 and the slow-axis collimator unit 820 that have been connected to the support plate 700 . The removal mechanism may include movable first and second jaws. For example, when the fast-axis collimating mirror unit 810 on a certain laser needs to be removed, the first jaw moves to the position of the supporting plate 700 corresponding to the laser and clamps and fixes the supporting plate 700, and the second jaw moves to the position of the fast-axis collimating mirror unit 810. axis collimating mirror unit 810 , and clamp the fast axis collimating mirror unit 810 , and then the second jaw moves away from the supporting plate 700 again to remove the fast axis collimating mirror unit 810 .

Finally, it should be noted that the above embodiments are only used to illustrate the technical solution of the present invention, rather than limit it, for example, it is not only applicable to the alignment of the fast and slow axis of the bar laser, but also applicable to any other applicable type of laser Fast and slow axis collimation; although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that: it can still modify the technical solutions described in the aforementioned embodiments, or modify some or all of them The technical features are equivalently replaced; and these modifications or replacements do not make the essence of the corresponding technical solutions depart from the scope of the technical solutions of the various embodiments of the present invention.

Claims (10)

1. A method for collimating a fast and slow axis of a laser, comprising:

s11, providing a laser assembly (100), a light spot analyzer (400) and a slow-axis collimating mirror component (300), wherein the laser assembly (100) comprises n lasers which are sequentially arranged along a y-axis and are respectively set as lasers L ₁ 、L ₂ ……L _n N is an integer greater than 2; the laser assembly (100), the slow axis collimating mirror component (300) and the light spot analyzer (400) are sequentially arranged along the z-axis direction, and light emitted by the laser assembly (100) is collimated by the slow axis collimating mirror component (300) along the z-axis and then irradiates the light spot analyzer (400); the y-axis is perpendicular to the z-axis;

s12, placing a fast axis collimator unit (810) on the laser L _u And a slow-axis collimator lens part (300), wherein u is an integer of 1 or more and n or less, and is adjusted to the laser L _u The angle and position of the corresponding fast axis collimator unit (810) causes the laser L to _u After the emitted light is collimated by the fast axis collimating mirror unit (810), a first bright line segment (630) appears on the light spot analyzer (400), and the position of the first bright line segment (630) is consistent with the position of a datum line (610) displayed in the light spot analyzer (400) on the y axis; then will be connected with the laser L _u A corresponding fast axis collimator unit (810) is arranged relative to the laser L _u Fixing;

s13, automatically generating and removing a laser L by the spot analyzer (400) according to the position of the datum line (610) and the distance between two adjacent lasers _u A reference line (610) corresponding to at least one of the other lasers;

s14, correspondingly fixing a fast axis collimating mirror unit (810) on each of the rest lasers according to the angle and the position of the fast axis collimating mirror unit (810) in the step S12;

s15, powering up all lasers, simultaneously receiving light emitted by all lasers by using a light spot analyzer (400), and detecting whether the positions of a first bright line segment (630) formed by each laser on the light spot analyzer (400) and a corresponding datum line (610) are consistent or not; the angle and the position of the fast axis collimating mirror unit (810) on the laser, in which the positions of the first bright line segment (630) and the corresponding reference line (610) are inconsistent, are adjusted so that the positions of the first bright line segment (630) formed by the fast axis collimating mirror unit and the corresponding reference line (610) are consistent on the y axis.

2. The laser fast and slow axis collimation method according to claim 1, comprising the step performed after step S15:

after the collimation assembly is completed for the fast axis collimation lens units (810) of all lasers, the collimation assembly of the slow axis collimation lens is completed next;

the step of completing the collimation assembly of the slow axis collimating mirror comprises the following steps:

removing the slow axis collimator lens assembly (300);

a slow axis collimator unit (820) is arranged on the laser L _h And a spot analyzer (400), wherein h is an integer of 1 or more and n or less, and is adjusted to the laser L _h The angle and position of the corresponding slow axis collimator unit (820) causes the laser L to _h After the emitted light is collimated by the fast axis collimating mirror unit (810) and the slow axis collimating mirror unit (820), a second bright line segment (640) appears on the spot analyzer (400), and the second bright line segment (640)The midpoint coincides with a reference centerline (620) displayed in the spot analyzer (400); the reference centerline (620) extends in the y-axis direction and then will be aligned with the laser L _h A corresponding slow axis collimator unit (820) is arranged relative to the laser L _h Fixing;

and so on, the alignment assembly of the slow axis collimating mirror units (820) of all the remaining lasers is completed.

3. The method of claim 2, wherein the step of completing the alignment assembly of the slow axis collimator comprises:

step S21. Removing the slow axis collimator lens assembly (300) and placing a slow axis collimator lens unit (820) on the laser L _h And a spot analyzer (400), and adjusting the angle and position of the slow-axis collimating mirror unit (820) to make the laser L _h After the emitted light is collimated by the fast axis collimating mirror unit (810) and the slow axis collimating mirror unit (820), a second bright line segment (640) appears on the light spot analyzer (400), and the midpoint of the second bright line segment (640) coincides with a reference center line (620) displayed in the light spot analyzer (400); the reference centerline (620) extends in the y-axis direction and then will be aligned with the laser L _h A corresponding slow axis collimator unit (820) is arranged relative to the laser L _h Fixing;

s22, correspondingly fixing a slow-axis collimating mirror unit (820) on each of the rest lasers according to the angle and the position of the slow-axis collimating mirror unit (820) in the S21;

s23, powering up all lasers, simultaneously receiving light emitted by all lasers by using a light spot analyzer (400), and detecting whether the middle point of a second bright line segment (640) formed by each laser on the light spot analyzer (400) coincides with a reference center line (620);

adjusting the laser L whose midpoint of the second bright line segment (640) is not coincident with the reference centerline (620) _p The angle and position of the slow axis collimating mirror unit (820) are such that the midpoint of the second bright line segment (640) formed thereby is aligned with the baseThe quasi-midlines (620) coincide, wherein p is an integer greater than or equal to 1 and less than or equal to n; then will be connected with the laser L _p A corresponding slow axis collimator unit (820) is arranged relative to the laser L _p Fixing.

4. The method according to claim 1, wherein in the step S15, the step of adjusting the angle and the position of the fast axis collimator unit (810) on the laser, in which the positions of the first bright line segment (630) and the corresponding reference line (610) are not identical in the y axis, so that the positions of the first bright line segment (630) and the corresponding reference line (610) are identical in the y axis is specifically:

for the laser L with the first bright line segment (630) and the reference line (610) not corresponding to the position on the y axis _q Wherein q is an integer greater than or equal to 1 and less than or equal to n, and removing the laser L _q A fast axis collimator unit (810) for readjusting the laser L _q The angle and position of the corresponding fast axis collimator unit (810) causes the laser L to _q After the emitted light passes through the readjusted fast axis collimating mirror unit (810), a first bright line segment (630) appearing on the light spot analyzer (400) is consistent with the position of a corresponding datum line (610) displayed in the light spot analyzer (400) on the y axis; then will be connected with the laser L _q The corresponding fast axis collimator unit (810) is relative to the laser L _q Fixing.

5. The method of any one of claims 1-4, wherein a pallet (700) is fixed to a heat sink (110) of the laser assembly (100), and the fast axis collimating mirror unit (810) and the slow axis collimating mirror unit (820) are both fixed to the pallet (700).

6. The method for aligning the fast and slow axes of the laser according to claim 5, wherein a first dispensing slot (710) is provided at one end of the supporting plate (700), and the glue in the first dispensing slot (710) is used for connecting the supporting plate (700) and the laser; the other end of the supporting plate (700) is provided with a second dispensing groove (720), and glue in the second dispensing groove (720) is used for connecting the supporting plate (700) and the slow-axis collimating lens unit (820).

7. The method according to claim 1, wherein in the step S12, the step of adjusting the angle and position of the fast axis collimator unit (810) is specifically:

observing the fast axis collimating mirror unit (810) in the x axis direction, and rotating the fast axis collimating mirror unit (810) by taking the x axis as an axis, so that the light incident surface of the fast axis collimating mirror unit (810) is parallel to the light emergent cavity surface of the laser;

then, the fast axis collimator lens unit (810) is rotated with the y axis as an axis; rotating a fast axis collimator unit (810) with the z axis as an axis; the x-axis, y-axis, and z-axis are perpendicular to each other.

8. A method of fast and slow axis collimation of a laser according to claim 2 or 3, characterized in that said step of adjusting the angle and position of the slow axis collimator unit (820) is specifically:

observing the slow-axis collimating mirror unit (820) in the x-axis direction, and rotating the slow-axis collimating mirror unit (820) by taking the x-axis as an axis so that the light incident surface of the slow-axis collimating mirror unit (820) is parallel to the light emergent cavity surface of the laser;

rotating a slow axis collimator unit (820) with the y axis as an axis; rotating a slow axis collimator unit (820) with the z axis as an axis;

the slow axis collimator lens unit (820) is moved in the x-axis direction.

9. A laser fast and slow axis collimation device, characterized by being used for implementing the laser fast and slow axis collimation method according to any one of claims 2-8.

10. The laser fast and slow axis collimation device according to claim 9, wherein the laser collimation device comprises a level adding table (200), a light spot analyzer (400), a six-axis moving mechanism, a first clamp, a second clamp and a glue dispensing device;

the power-up stage (200) is used for fixing the laser assembly (100) and can power up each laser;

the spot analyzer (400) is configured to receive the first bright line segment (630) and the second bright line segment (640) and display a reference line (610) and a reference center line (620);

the six-axis moving mechanism is selectively connected with a first clamp or a second clamp, the first clamp is used for clamping the fast axis collimating mirror unit (810), and the second clamp is used for clamping the slow axis collimating mirror unit (820);

the glue dispensing device is used for applying glue.