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CN115987396A - Programmable Integrated Optical Chip Based on Photonic Wire Bonding - Google Patents

Programmable Integrated Optical Chip Based on Photonic Wire Bonding Download PDF

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Publication number
CN115987396A
CN115987396A CN202211588871.0A CN202211588871A CN115987396A CN 115987396 A CN115987396 A CN 115987396A CN 202211588871 A CN202211588871 A CN 202211588871A CN 115987396 A CN115987396 A CN 115987396A
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module
optical
wire bonding
programmable integrated
optical chip
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翟鲲鹏
王欣
吉贵军
周赤
郑耀国
杨国亮
郭丹丹
张心研
袁海庆
白金花
文花顺
刘宇
李明
祝宁华
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ADVANCED FIBER RESOURCES (ZHUHAI) Ltd
Institute of Semiconductors of CAS
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Abstract

本公开提供一种基于光子引线键合的可编程集成光芯片,包括:基板;多功能器件单元,包括多种功能器件,所述多种功能器件集成于所述基板上并可通过可擦除的光子引线键合连接;电控模块,通过金丝引线能够与任意的功能器件进行连接,以实现光芯片的不同功能。所述多功能器件单元包括:激光器模块、调制器模块、放大器模块、探测器模块、光路由模块、光滤波模块、矩阵算法模块、波导模块,共同集成于所述基板上并通过可擦除的光子引线键合连接。

Figure 202211588871

The present disclosure provides a programmable integrated optical chip based on photonic wire bonding, including: a substrate; The photonic wire bonding connection; the electronic control module can be connected with any functional device through the gold wire to realize the different functions of the optical chip. The multifunctional device unit includes: a laser module, a modulator module, an amplifier module, a detector module, an optical routing module, an optical filter module, a matrix algorithm module, and a waveguide module, which are integrated on the substrate and passed through the erasable Photonic wire bonding connections.

Figure 202211588871

Description

基于光子引线键合的可编程集成光芯片Programmable Integrated Optical Chip Based on Photonic Wire Bonding

技术领域technical field

本公开涉及集成光电子/光学可编程芯片/光光子引线键合/光光耦合/光光通信技术领域,尤其涉及一种基于光子引线键合的可编程集成光芯片。The disclosure relates to the technical field of integrated optoelectronics/optical programmable chip/opto-photonic wire bonding/optical-optical coupling/optical-optical communication, and in particular to a programmable integrated optical chip based on photon wire bonding.

背景技术Background technique

随着移动互联网、云计算、大数据的日渐繁荣,5G通信等新兴应用不断涌现,高速数据传输需求日益强烈。在骨干网和下一代数据中心中,由于电子芯片遇到速率瓶颈,而光电子芯片因其低功耗、高带宽特性成为了发展的重点。而现代通讯系统的发展,对光纤通信系统提出了更高的要求,其中大规模光电子集成技术成为最佳解决方案之一,其性能、成本、集成度等方面均优势明显,成为了研究热点,可编程光芯片通过软件定义实现重构能力,具有高度通用性与实用性,结合光子引线键合技术,实现光可编程芯片的构建成为了研究的重要课题。With the increasing prosperity of mobile Internet, cloud computing, and big data, emerging applications such as 5G communication continue to emerge, and the demand for high-speed data transmission is increasingly strong. In backbone networks and next-generation data centers, as electronic chips encounter speed bottlenecks, optoelectronic chips have become the focus of development due to their low power consumption and high bandwidth characteristics. The development of modern communication systems has put forward higher requirements for optical fiber communication systems. Among them, large-scale optoelectronic integration technology has become one of the best solutions. It has obvious advantages in performance, cost, and integration, and has become a research hotspot. Programmable optical chips achieve reconfiguration capabilities through software definition, and are highly versatile and practical. Combining photonic wire bonding technology to realize the construction of optical programmable chips has become an important research topic.

目前的芯片分为两种,一种是单片集成的芯片,其内部的主要功能器件已经预先设置好,另一种是通过封装实现的集成芯片,通过金丝键合或者倒装焊后就无法更改芯片功能,这些芯片仅仅能实现单一功能,并且无法进行后期功能的改变,对于开发者而言,流片的时间和成本都很高。The current chip is divided into two types, one is a monolithic integrated chip, the main functional devices of which have been pre-set, and the other is an integrated chip realized through packaging, which is integrated after gold wire bonding or flip-chip welding. Chip functions cannot be changed. These chips can only achieve a single function, and cannot be changed later. For developers, the time and cost of taping out are very high.

发明内容Contents of the invention

(一)要解决的技术问题(1) Technical problems to be solved

基于上述问题,本公开提供了一种基于光子引线键合的可编程集成光芯片,以缓解现有技术中的上述技术问题。Based on the above problems, the present disclosure provides a programmable integrated optical chip based on photonic wire bonding to alleviate the above technical problems in the prior art.

(二)技术方案(2) Technical solution

本公开提供一种基于光子引线键合的可编程集成光芯片,包括:基板,多功能器件单元,电控模块。The disclosure provides a programmable integrated optical chip based on photonic wire bonding, including: a substrate, a multifunctional device unit, and an electric control module.

多功能器件单元包括多种功能器件,所述多种功能器件集成于所述基板上并可通过可擦除的光子引线键合连接;电控模块通过金丝引线能够与任意的功能器件进行连接,以实现光芯片的不同功能。The multifunctional device unit includes a variety of functional devices, which are integrated on the substrate and can be connected through erasable photonic wire bonding; the electronic control module can be connected to any functional device through gold wires , to realize the different functions of the optical chip.

根据本公开实施例,所述多功能器件单元包括激光器模块、调制器模块、放大器模块、探测器模块、光路由模块、光滤波模块、矩阵算法模块、波导模块,共同集成于所述基板上并通过可擦除的光子引线键合连接。According to an embodiment of the present disclosure, the multifunctional device unit includes a laser module, a modulator module, an amplifier module, a detector module, an optical routing module, an optical filtering module, a matrix algorithm module, and a waveguide module, which are jointly integrated on the substrate and Connected via erasable photonic wire bonding.

根据本公开实施例,,每种功能器件的数量为至少一个。According to an embodiment of the present disclosure, there is at least one functional device of each type.

根据本公开实施例,所述激光器的材料体系选自III-V族材料。According to an embodiment of the present disclosure, the material system of the laser is selected from group III-V materials.

根据本公开实施例,所述调制器材料体系选自铌酸锂、铌酸锂、III-V族、硅基材料。According to an embodiment of the present disclosure, the modulator material system is selected from lithium niobate, lithium niobate, group III-V, and silicon-based materials.

根据本公开实施例,所述光路由、波导、光滤波、矩阵算法模块材料体系选自III-V族、铌酸锂、铌酸锂、硅基,氮化硅,有机物。According to an embodiment of the present disclosure, the material system of the optical routing, waveguide, optical filtering, and matrix algorithm module is selected from III-V groups, lithium niobate, lithium niobate, silicon base, silicon nitride, and organic matter.

根据本公开实施例,可编程集成光芯片能够具备与马赫曾德尔干涉仪、微环谐振器、光分束器、光合束器中至少一种相同的功能。According to the embodiments of the present disclosure, the programmable integrated optical chip can have the same function as at least one of Mach-Zehnder interferometer, micro-ring resonator, optical beam splitter, and optical beam combiner.

根据本公开实施例,通过将所述光子引线键合的光刻胶擦除后进行重新写入,可以对多种功能器件间的连接情况进行更改,实现光芯片的不同功能。According to the embodiments of the present disclosure, by erasing the photoresist of the photonic wire bonding and rewriting it, the connections between various functional devices can be changed to realize different functions of the optical chip.

附图说明Description of drawings

图1为本公开实施例的基于光子引线键合的可编程集成光芯片组成结构示意图。FIG. 1 is a schematic diagram of the composition and structure of a programmable integrated optical chip based on photonic wire bonding according to an embodiment of the present disclosure.

图2为本公开一实施例的基于光子引线键合的可编程集成光芯片的具体封装结构示意图。FIG. 2 is a schematic diagram of a specific package structure of a programmable integrated optical chip based on photonic wire bonding according to an embodiment of the present disclosure.

【附图中本公开实施例主要元件符号说明】[Description of main component symbols of the embodiment of the present disclosure in the accompanying drawings]

1、基板;2、电控模块;3、激光器;4、调制器;5、放大器;6、探测器;7、光路由;8、光滤波;9、矩阵算法模块;10、波导;11、金丝;12、光子引线。1. Substrate; 2. Electronic control module; 3. Laser; 4. Modulator; 5. Amplifier; 6. Detector; 7. Optical routing; 8. Optical filtering; 9. Matrix algorithm module; 10. Waveguide; 11. Gold wire; 12. Photon leads.

具体实施方式Detailed ways

本公开提供了一种基于光子引线键合的可编程集成光芯片,通过电控模块控制芯片的不同功能通过光子引线键合实现链接,将光刻胶通过双光子聚合形成光子引线,将剩余光刻胶清洗掉,更改芯片功能时将光子引线清除,再次构建新的功能模块,使得通过单一功能芯片以及光子引线,实现低耦合损耗、可编程可控的光学逻辑处理芯片,可提高器件性能的同时增大光电子集成的效率。The present disclosure provides a programmable integrated optical chip based on photonic wire bonding. The different functions of the chip are controlled by an electronic control module to achieve linking through photon wire bonding. The resist is cleaned, and the photon lead is removed when the chip function is changed, and a new functional module is constructed again, so that a low coupling loss, programmable and controllable optical logic processing chip can be realized through a single function chip and a photon lead, which can improve the performance of the device. At the same time, the efficiency of optoelectronic integration is increased.

为使本公开的目的、技术方案和优点更加清楚明白,以下结合具体实施例,并参照附图,对本公开进一步详细说明。In order to make the purpose, technical solutions and advantages of the present disclosure clearer, the present disclosure will be further described in detail below in conjunction with specific embodiments and with reference to the accompanying drawings.

在本公开实施例中,提供一种基于光子引线键合的可编程集成光芯片,结合图1和图2所示,所述基于光子引线键合的可编程集成光芯片,包括:In an embodiment of the present disclosure, a programmable integrated optical chip based on photonic wire bonding is provided. As shown in FIG. 1 and FIG. 2, the programmable integrated optical chip based on photonic wire bonding includes:

基板;Substrate;

多功能器件单元,包括多种功能器件,所述多种功能器件集成于所述基板上并可通过可擦除的光子引线键合连接;A multifunctional device unit, including multiple functional devices, which are integrated on the substrate and can be connected by erasable photonic wire bonding;

电控模块,通过金丝引线能够与任意的功能器件进行连接,以实现光芯片的不同功能。The electronic control module can be connected with any functional device through gold wires to realize different functions of the optical chip.

所述多功能器件单元包括:激光器模块、调制器模块、放大器模块、探测器模块、光路由模块、光滤波模块、矩阵算法模块、波导模块,共同集成于所述基板上并通过可擦除的光子引线键合连接。The multifunctional device unit includes: a laser module, a modulator module, an amplifier module, a detector module, an optical routing module, an optical filtering module, a matrix algorithm module, and a waveguide module, which are integrated on the substrate and passed through the erasable Photonic wire bonding connections.

激光器模块包括至少一个激光器3,调制器模块包括至少一个调制器4,放大器模块包括至少一个放大器5,探测器模块包括至少一个探测器6,光路由模块包括至少一个光路由7,光滤波模块包括至少一个光滤波8,矩阵算法模块包括至少一个矩阵算法模组9,波导模块包括至少一个波导10。上述器件均在同一块基板1上,由电控模块2控制不同的功能器件通过光子引线12进行连接。The laser module includes at least one laser 3, the modulator module includes at least one modulator 4, the amplifier module includes at least one amplifier 5, the detector module includes at least one detector 6, the optical routing module includes at least one optical routing 7, and the optical filtering module includes At least one optical filter 8, the matrix algorithm module includes at least one matrix algorithm module 9, and the waveguide module includes at least one waveguide 10. The above-mentioned devices are all on the same substrate 1 , and the electronic control module 2 controls different functional devices to be connected through photonic leads 12 .

其中,光子引线键合又称为自由曲面光波导三维纳米打印技术,可以在光子芯片之间进行光学的自由耦合,利用高能量的脉冲光束使得光刻胶特定位置处发生多光子聚合作用,形成三维的聚合物波导,聚合物波导的尺寸根据光芯片光场尺寸大小进行设计,进而实现光场从芯片到芯片之的传输,其光学损耗低,自由度高,并且可以重构,将不同的光子芯片耦合封装成为一个整体的模块,将不同功能不同材料体系的芯片预置在基板上,使用电控模块控制光子引线将不同的芯片连接到一起,构成开发者所需的功能模块,当开发者需要更改功能时,将光子引线的光刻胶擦除后重新写入即可。Among them, photonic wire bonding, also known as free-form surface optical waveguide three-dimensional nano-printing technology, can perform optical free coupling between photonic chips, and use high-energy pulsed beams to make multi-photon polymerization at specific positions of the photoresist. Three-dimensional polymer waveguide, the size of the polymer waveguide is designed according to the size of the light field of the optical chip, and then the transmission of the light field from chip to chip is realized. It has low optical loss, high degree of freedom, and can be reconfigured. The photonic chip is coupled and packaged into a whole module. Chips with different functions and different material systems are preset on the substrate, and the electronic control module is used to control the photonic leads to connect different chips together to form the functional module required by the developer. When developing When the operator needs to change the function, the photoresist of the photon lead can be erased and rewritten.

基于光子引线键合的可编程集成光芯片的材料组分可以包括多种材料体系。其中,激光器的材料体系为III-V族;调制器材料为铌酸锂和铌酸锂薄膜,III-V族,硅基;探测器材料体系为III-V族和硅基;光路由、光波导、光滤波、矩阵算法模块材料体系为III-V族,铌酸锂及铌酸锂薄膜,硅基,氮化硅,有机物。各个芯片的功能可以为激光器,调制器,放大器,探测器,光路由,光滤波,矩阵算法模块,波导,马赫曾德尔干涉仪,微环谐振器,光分束器,光合束器。The material composition of the programmable integrated optical chip based on photonic wire bonding can include a variety of material systems. Among them, the material system of the laser is III-V group; the modulator material is lithium niobate and lithium niobate film, III-V group, silicon base; the detector material system is III-V group and silicon base; The material system of waveguide, optical filtering, and matrix algorithm modules is III-V group, lithium niobate and lithium niobate thin film, silicon base, silicon nitride, organic matter. The functions of each chip can be lasers, modulators, amplifiers, detectors, optical routing, optical filtering, matrix algorithm modules, waveguides, Mach-Zehnder interferometers, microring resonators, optical beam splitters, and optical beam combiners.

根据本公开实施例,激光器,调制器,放大器,探测器,光路由,光滤波,矩阵算法模块,波导可有一个或多个器件。According to the embodiment of the present disclosure, lasers, modulators, amplifiers, detectors, optical routing, optical filtering, matrix algorithm modules, and waveguides may have one or more devices.

根据本公开实施例,通过将所述光子引线键合的光刻胶擦除后进行重新写入,可以对多种功能器件间的连接情况进行更改,实现光芯片的不同功能,例如实现赫曾德尔干涉仪、微环谐振器、光分束器、或光合束器的功能。According to the embodiment of the present disclosure, by erasing the photoresist of the photonic wire bonding and rewriting it, the connection between various functional devices can be changed to realize different functions of the optical chip, for example, to realize the Herzeng function of a Del interferometer, microring resonator, optical beam splitter, or optical beam combiner.

至此,已经结合附图对本公开实施例进行了详细描述。需要说明的是,在附图或说明书正文中,未绘示或描述的实现方式,均为所属技术领域中普通技术人员所知的形式,并未进行详细说明。此外,上述对各元件和方法的定义并不仅限于实施例中提到的各种具体结构、形状或方式,本领域普通技术人员可对其进行简单地更改或替换。So far, the embodiments of the present disclosure have been described in detail with reference to the accompanying drawings. It should be noted that, in the accompanying drawings or in the text of the specification, implementations that are not shown or described are forms known to those of ordinary skill in the art, and are not described in detail. In addition, the above definitions of each element and method are not limited to the various specific structures, shapes or methods mentioned in the embodiments, and those skilled in the art can easily modify or replace them.

依据以上描述,本领域技术人员应当对本公开基于光子引线键合的可编程集成光芯片有了清楚的认识。Based on the above description, those skilled in the art should have a clear understanding of the programmable integrated optical chip based on photonic wire bonding of the present disclosure.

综上所述,本公开提供了一种基于光子引线键合的可编程集成光芯片,该结构包括:基板,电控模块,激光器,调制器,放大器,探测器,光路由,光滤波,矩阵算法模块,波导,金丝,光子引线实现集成化可编程光芯片。通过光子引线键合的方式,实现不同器件之间的光学连接,并可以消除,避免了传统光耦合方案的对准调节,节省了光束整形所需的透镜,同时制备简单快捷,可实现异质异构芯片的集成与可编程芯片的构建。In summary, the present disclosure provides a programmable integrated optical chip based on photonic wire bonding, the structure includes: substrate, electronic control module, laser, modulator, amplifier, detector, optical routing, optical filtering, matrix Algorithm modules, waveguides, gold wires, and photonic leads realize integrated programmable optical chips. Through the way of photonic wire bonding, the optical connection between different devices can be realized, and can be eliminated, avoiding the alignment adjustment of the traditional optical coupling scheme, saving the lens required for beam shaping, and the preparation is simple and fast, which can realize heterogeneous Integration of heterogeneous chips and construction of programmable chips.

基于光子引线键合的可编程光芯片及封装结构可有效提高芯片的集成度,同时可构建多功能芯片模块,实现可编程多功能处理光学芯片的构建与擦除,同时采用光子引线键合实现光学可编程逻辑阵列,增加光学耦合的集成度,降低光耦合的损耗,减小芯片体积。有助于实现大规模光子集成芯片的低损耗耦合,构建光学可编程逻辑阵列芯片。The programmable optical chip and packaging structure based on photonic wire bonding can effectively improve the integration of the chip, and at the same time build a multifunctional chip module to realize the construction and erasing of the programmable multifunctional processing optical chip, and at the same time use photonic wire bonding to realize The optical programmable logic array increases the integration degree of optical coupling, reduces the loss of optical coupling, and reduces the chip volume. It is helpful to realize low-loss coupling of large-scale photonic integrated chips and construct optical programmable logic array chips.

还需要说明的是,以上为本公开提供的不同实施例。这些实施例是用于说明本公开的技术内容,而非用于限制本公开的权利保护范围。一实施例的一特征可通过合适的修饰、置换、组合、分离以应用于其他实施例。It should also be noted that the above are different embodiments provided by the present disclosure. These embodiments are used to illustrate the technical content of the present disclosure, rather than to limit the protection scope of the present disclosure. A feature of one embodiment can be applied to other embodiments through appropriate modification, replacement, combination, and separation.

应注意的是,在本文中,除了特别指明的之外,具备“一”元件不限于具备单一的该元件,而可具备一或更多的该元件。It should be noted that, unless otherwise specified herein, having “a” element is not limited to having a single element, but may include one or more elements.

此外,在本文中,除了特别指明的之外,“第一”、“第二”等序数,只是用于区别具有相同名称的多个元件,并不表示它们之间存在位阶、层级、执行顺序、或制程顺序。一“第一”元件与一“第二”元件可能一起出现在同一构件中,或分别出现在不同构件中。序数较大的一元件的存在不必然表示序数较小的另一元件的存在。In addition, in this article, unless otherwise specified, ordinal numbers such as "first" and "second" are only used to distinguish multiple components with the same name, and do not indicate that there is a hierarchy, level, execution sequence, or process sequence. A "first" element and a "second" element may appear together in the same component, or may appear separately in different components. The presence of an element with a higher ordinal number does not necessarily indicate the presence of another element with a lower ordinal number.

在本文中,除了特别指明的之外,所谓的特征甲“或”(or)或“及/或”(and/or)特征乙,是指甲单独存在、乙单独存在、或甲与乙同时存在;所谓的特征甲“及”(and)或“与”(and)或“且”(and)特征乙,是指甲与乙同时存在;所谓的“包括”、“包含”、“具有”、“含有”,是指包括但不限于此。In this paper, unless otherwise specified, the so-called feature A "or" (or) or "and/or" (and/or) feature B means that nail exists alone, B exists alone, or A and B exist simultaneously ; The so-called feature A "and" (and) or "and" (and) or "and" (and) feature B means that nail and B exist at the same time; the so-called "includes", "includes", "has", " Contains" means including but not limited to.

此外,在本文中,所谓的“上”、“下”、“左”、“右”、“前”、“后”、或“之间”等用语,只是用于描述多个元件之间的相对位置,并在解释上可推广成包括平移、旋转、或镜像的情形。此外,在本文中,除了特别指明的之外,“一元件在另一元件上”或类似叙述不必然表示该元件接触该另一元件。In addition, in this article, the so-called "upper", "lower", "left", "right", "front", "rear", or "between" and other terms are only used to describe the distance between a plurality of elements. relative position, and can be generalized in interpretation to include cases of translation, rotation, or mirroring. In addition, herein, unless otherwise specified, "an element is on another element" or similar expressions do not necessarily mean that the element contacts the other element.

此外,除非特别描述或必须依序发生的步骤,上述步骤的顺序并无限制于以上所列,且可根据所需设计而变化或重新安排。并且上述实施例可基于设计及可靠度的考虑,彼此混合搭配使用或与其他实施例混合搭配使用,即不同实施例中的技术特征可以自由组合形成更多的实施例。In addition, unless specifically described or steps that must occur sequentially, the order of the above steps is not limited to that listed above and may be changed or rearranged according to the desired design. Moreover, the above-mentioned embodiments can be mixed and matched with each other or with other embodiments based on design and reliability considerations, that is, technical features in different embodiments can be freely combined to form more embodiments.

以上所述的具体实施例,对本公开的目的、技术方案和有益效果进行了进一步详细说明,所应理解的是,以上所述仅为本公开的具体实施例而已,并不用于限制本公开,凡在本公开的精神和原则之内,所做的任何修改、等同替换、改进等,均应包含在本公开的保护范围之内。The specific embodiments described above further describe the purpose, technical solutions and beneficial effects of the present disclosure in detail. It should be understood that the above descriptions are only specific embodiments of the present disclosure, and are not intended to limit the present disclosure. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principles of the present disclosure shall be included within the protection scope of the present disclosure.

Claims (8)

1.一种基于光子引线键合的可编程集成光芯片,包括:1. A programmable integrated optical chip based on photonic wire bonding, comprising: 基板;Substrate; 多功能器件单元,包括多种功能器件,所述多种功能器件集成于所述基板上并可通过可擦除的光子引线键合连接;A multifunctional device unit, including multiple functional devices, which are integrated on the substrate and can be connected by erasable photonic wire bonding; 电控模块,通过金丝引线能够与任意的功能器件进行连接,以实现光芯片的不同功能。The electronic control module can be connected with any functional device through gold wires to realize different functions of the optical chip. 2.根据权利要求1所述的可编程集成光芯片,所述多功能器件单元包括:激光器模块、调制器模块、放大器模块、探测器模块、光路由模块、光滤波模块、矩阵算法模块、波导模块,共同集成于所述基板上并通过可擦除的光子引线键合连接。2. The programmable integrated optical chip according to claim 1, said multifunctional device unit comprising: a laser module, a modulator module, an amplifier module, a detector module, an optical routing module, an optical filtering module, a matrix algorithm module, a waveguide Modules are co-integrated on the substrate and connected by erasable photonic wire bonding. 3.根据权利要求2所述的可编程集成光芯片,每种功能器件的数量为至少一个。3. The programmable integrated optical chip according to claim 2, the number of each functional device is at least one. 4.根据权利要求2所述的可编程集成光芯片,所述激光器的材料体系选自III-V族材料。4. The programmable integrated optical chip according to claim 2, the material system of the laser is selected from group III-V materials. 5.根据权利要求2所述的可编程集成光芯片,所述调制器材料体系选自铌酸锂、铌酸锂、III-V族、硅基材料。5. The programmable integrated optical chip according to claim 2, wherein the modulator material system is selected from lithium niobate, lithium niobate, III-V groups, and silicon-based materials. 6.根据权利要求2所述的可编程集成光芯片,所述光路由、波导、光滤波、矩阵算法模块材料体系选自III-V族、铌酸锂、铌酸锂、硅基,氮化硅,有机物。6. The programmable integrated optical chip according to claim 2, said optical routing, waveguide, optical filtering, and matrix algorithm module material system are selected from group III-V, lithium niobate, lithium niobate, silicon-based, nitrided Silicon, organic matter. 7.根据权利要求1所述的可编程集成光芯片,能够具备与马赫曾德尔干涉仪、微环谐振器、光分束器、光合束器中至少一种相同的功能。7. The programmable integrated optical chip according to claim 1, capable of having the same function as at least one of a Mach-Zehnder interferometer, a microring resonator, an optical beam splitter, and an optical beam combiner. 8.根据权利要求1所述的可编程集成光芯片,通过将所述光子引线键合的光刻胶擦除后进行重新写入,可以对多种功能器件间的连接情况进行更改,实现光芯片的不同功能。8. The programmable integrated optical chip according to claim 1, by rewriting the photoresist of the photonic wire bonding after erasing, the connection between various functional devices can be changed to realize optical Different functions of the chip.
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